JP4323267B2 - Shape measuring device, shape measuring method, shape analyzing device, shape analyzing program, and recording medium - Google Patents

Description

The present invention relates to a shape measuring device, a shape measuring method, a shape analyzing device, a shape analyzing program, and a recording medium. For example, the present invention relates to a shape measuring device that obtains the uneven shape of each side, a shift in angle, etc., for a planar polygon.

In measuring a planar polygonal object to be measured, it is necessary to measure the surface irregularities and angles of each side. For example, for a 4-square skewer, the straightness of each side and the squareness of four angles are measured. There is a need.
The straightness of each side is measured by, for example, scanning the measurement target side with a detector (such as an electric micrometer) that moves along the straight ruler, and measuring the straightness based on the deviation from the straight ruler as the straight reference. It was. On the other hand, the perpendicularity is measured by arranging a 4 right angle square inside the reference rulers arranged at right angles to each other and measuring the distance between the reference ruler and each side of the 4 right angle square (Patent Document). 1).
However, according to the measurement based on the deviation from the reference as described above, if the arrangement posture between the reference and the object to be measured is shifted at the time of measurement, or there is a processing error in the reference, such a deviation is measured. Since it is included in the result, there arises a problem that high-precision measurement cannot be expected.

In the straightness calibration, a three-surface alignment method has been proposed as a measurement method that is not affected by the reference ruler or the arrangement posture during measurement (for example, Patent Document 2 and Patent Document 3).
In the three-sided alignment method, three sets (A and B, B and C, C and A) formed by combining three rod-like objects to be measured (A, B and C) face each other (for example, A and B). Thus, the distance between the measurement surfaces is measured at a plurality of points. The measurement of the distance between the measurement surfaces is performed for each group, and the simultaneous equations established for the three pairs of objects to be measured are solved. Then, the straightness of each object to be measured is calculated as a deviation from the virtual reference line. In this way, there is an advantage that the straightness can be evaluated without being affected by the processing error of the reference ruler, the arrangement posture of the reference ruler and the measured object, and the like.

JP-A-9-243351 JP-A-2-253114 JP2003-121131A

  According to the above three-plane alignment method, the straightness of the object to be measured can be accurately evaluated even if a ruler whose straightness is unknown is used, but there is a problem that it is limited to one-dimensional calculation. In other words, there is a problem that the straightness of each side cannot be evaluated even though the straightness of each side can be evaluated with respect to a planar polygonal object to be measured such as a 4-right angle square. And, extending the one-dimensional calculation method to two-dimensional calculation including the postures of the sides has a problem that it is not simple because the number of unknowns for solving the simultaneous equations is increased.

  An object of the present invention is to provide a planar polygon shape measuring device, a shape measuring method, and a shape capable of easily and accurately obtaining the surface irregularities and the inner angles of each side of the planar polygon regardless of the reference ruler and the measurement posture. It is to provide a measurement program and a recording medium.

The shape measuring apparatus according to claim 1 has two straight rulers and combines the straight ruler and the side of the object to be measured which is a plane polygon so as to face each other with a plurality of sampling points. in a measuring unit for acquiring measurement data measured, each of the from the reference straight line is a virtual straight line set for the test surface of the sides and the straight edge of the object to be measured to the test surface the distance at the sampling point, the set as a shape readings representing the unevenness of the surface to be inspected, prior SL internal angle angle and the corner of the reference straight line for each straightedge constitutes the plane in which the reference straight line of the object to be measured constitutes The angle deviated from the interior angle when the polygon is a regular polygon is set as an angle index representing the interior angle formed by the reference straight line of the object to be measured and the angle formed by the reference straight line of each straight ruler. and readings setting unit, the Equal from the distance from the straightedge to the side of the object to be measured reference straight line of the straight edge to be acquired to a value obtained by adding the shape readings of the distance to the reference straight sides of the object to be measured at tough And the inclination of the reference straight line of the straight ruler relative to the reference straight line of the object to be measured facing one of the straight rulers and the reference straight line of the side of the measured object facing the other of the straight ruler relationship between the inclination of the reference straight line of the straightedge, as is the table with the angle readings, deriving simultaneous equations for a plurality of pairs composed of the respective sides of the straightedge and the object to be measured A simultaneous equation deriving unit , and a simultaneous equation calculating unit that calculates the shape index and the angle index by solving the simultaneous equations derived by the simultaneous equation deriving unit, To do.

  Here, as an example, the reference straight line may be a least square line obtained by least square regression of the test surface of the straight ruler and the test surface of each side of the object to be measured.

According to such a configuration, measurement data obtained by measuring the distance between the straight ruler and the side of the object to be measured is acquired in the measurement unit. For example, the two straight rulers are arranged in a state where the extension lines of the two straight rulers form a predetermined angle, and the measurement object is in a state where each of the straight rulers and the side of the measurement object are substantially parallel to each other. Are arranged, and the distance between the straight ruler and the side of the object to be measured is measured at each sampling point. Then, the object to be measured is rotated and the combination of the straight ruler and the side of the object to be measured is changed, and the distance between the straight ruler and the side of the object to be measured is measured for all possible combinations. The measurement data obtained in this way is sent to the analysis unit.
The simultaneous equations are derived by the simultaneous equation deriving unit using the shape and angle indications set by the indication setting unit and the acquired measurement data. At this time, in addition to the relationship between the distance from the straight ruler to the side of the object to be measured, a simultaneous equation is established in consideration of the relationship between the two straight rulers and the internal angle of the object to be measured. These simultaneous equations are processed by the simultaneous equation calculation unit, and the shape indication and angle indication of the object to be measured are calculated. In addition, calculation of such simultaneous equations can be completed with simple calculation by using a matrix.

  The deviation between the side of the object to be measured and the reference line is indicated by the shape index at each sampling point for the side of the object to be measured. Then, for example, information on the shape is obtained such that the straightness of the side is indicated from the difference between the maximum value and the minimum value among the shape indications on the side. Further, information about each inner angle of the object to be measured can be obtained from the angle indication of the object to be measured. For example, if the object to be measured is a 4-right angle square, an amount in which each internal angle is deviated from 90 ° is obtained. In addition, information on the shape including the straightness of the straight ruler can be obtained from the shape index of the straight ruler.

The shape of the object to be measured can be calculated by processing the measurement data obtained by measuring the distance from the straight ruler whose straightness is unknown to the side of the object to be measured. The shape of the measurement object can be measured.
Since the shape index at each sampling point can be calculated, not only the straightness evaluation but also the surface irregularities on each side of the object to be measured can be obtained. Furthermore, since the internal angle of the object to be measured can be calculated as an angle index, the internal angle of the object to be measured can be obtained in addition to the straightness of each side of the object to be measured.
As long as two straight rulers and each side of the object to be measured can be measured and the distance between them can be measured, calculation processing can be performed, so in principle any shape of the plane polyhedron can be used to determine the shape of the side and the size of the interior angle. Can be measured.

  Here, the straight ruler of the measuring unit does not necessarily mean a straight ruler that is straightened and serves as a straight reference, and may be a straight bar. Since the shape of the straight ruler is also obtained from the shape index of the straight ruler, depending on the case, this straight ruler may be the target of shape measurement.

  The shape measurement according to claim 2 is the shape measurement device according to claim 1, wherein the measurement unit includes a length measuring sensor that measures a distance between the straight ruler and a side of the object to be measured. The length measuring sensor includes a main body provided to be movable in the longitudinal direction of the straight ruler between an object to be measured arranged with the sides facing each of the two straight rulers and the straight ruler. A first spindle and a second spindle provided so as to be able to advance and retreat from the main body in opposite directions in the direction connecting the straight ruler and the side of the object to be measured facing the straight ruler in the shortest direction; And a detector for detecting the amount of advancement and retreat of the second spindle.

  According to such a configuration, the length measuring sensor has the spindles that advance and retreat in opposite directions, and detects the distance between the straight ruler and the side of the object to be measured from the sum of the advance and retreat amounts of these spindles. Then, even if the movement axis for moving the length measuring sensor is shifted in the direction connecting the straight ruler and the side of the object to be measured, the detected value accurately represents the distance between the straight ruler and the side of the object to be measured. Therefore, the distance between the side of the object to be measured and the straight ruler is accurately detected.

The shape measuring method according to claim 3 has two straight rulers and combines the straight ruler and the side of the object to be measured which is a plane polygon so as to face each other at a plurality of sampling points. a measuring step of obtaining the measured measurement data, each sampling of the from the reference straight line is a virtual straight line set for the test surface of the sides and the straight edge of the object to be measured to the test surface the distance in points, the set as the shape readings representing the unevenness of the surface to be inspected, prior Symbol angles of reference straight interior angle angles and the respective straight edge which reference straight line of the object to be measured constitutes constitutes said planar multi The angle deviated from the internal angle when the square is a regular polygon is set as an angle index representing the internal angle formed by the reference straight line of the object to be measured and the angle formed by the reference straight line of each straight ruler. number setting step and, before Equal to the distance to the sides plus the shape readings of the distance to the reference straight sides of the object to be measured from the reference straight line of the straightedge of the object to be measured from the straight edge to be acquired by the measuring step And the inclination of the reference straight line of the straight ruler relative to the reference straight line of the object to be measured facing one of the straight rulers and the reference straight line of the side of the measured object facing the other of the straight ruler relationship between the inclination of the reference straight line of the straightedge, as is the table with the angle readings and derives the simultaneous equations for pairs constituted by the respective sides of the straightedge and the object to be measured simultaneous An equation deriving step , and a simultaneous equation calculating step of calculating the shape indication and the angle indication by solving the derived simultaneous equations.
According to such a configuration, the same effect as that of the first aspect of the invention can be achieved.

  The shape measuring method according to claim 4 is the shape measuring method according to claim 3, wherein the measuring step includes the step of measuring the straight ruler in which the extension lines of the two straight rulers form a predetermined angle. Interval measurement that measures the distance between one straight ruler and one side of the object to be measured and the distance between the other straight ruler and the other side of the object to be measured, with the sides of the object to be measured facing substantially parallel to each other. And a combination changing step of changing the combination of the straight ruler and the side of the object to be measured by rotating the object to be measured while keeping the postures of the two straight rulers as they are.

According to such a configuration, the extension of the two straight rulers is arranged in a state where a predetermined angle is formed, and further, the measurement object is in a state in which each of the straight rulers and the side of the measurement object are substantially parallel to each other. Is placed. In this state, in the interval measurement step, measurement data obtained by measuring the interval between the straight ruler and the side of the object to be measured is acquired. For example, when the sides of a four-right angle square are the first side, the second side, the third side, and the fourth side, the first side is arranged opposite to the first straight ruler and faces the second straight ruler Assume that the second side is arranged. Then, the distance between the first straight ruler and the first side and the distance between the second straight ruler and the second side are measured at a predetermined sampling pitch.
When the distance between the first straight ruler and the first side and the distance between the second straight ruler and the second side are measured, in the combination changing step, the postures of the first straight ruler and the second straight ruler are The measurement object is rotated as it is, and the combination of the straight ruler and the edge is changed. For example, it is assumed that the second side faces the first straight ruler and the third side faces the second straight ruler. Then, with this combination, the distance between the straight ruler and the side is measured, and measurement data is acquired. Thereafter, the measurement object is rotated to change the combination of the straight ruler and the side of the measurement object, and the distance between the straight ruler and the measurement object is measured for all possible combinations.

  Here, in the shape measuring method of the present invention, in the measuring step, one straight ruler and the other straight ruler are arranged substantially in parallel with a certain interval, and this interval is measured by the length measuring sensor to obtain measurement data. A straight ruler interval measuring step to obtain. Then, since a conditional expression for solving simultaneous equations is further added, it is possible to obtain the shape index and the angle indication by solving the simultaneous equations.

The shape analysis apparatus according to claim 5 has two straight rulers and combines the straight rulers and the sides of the object to be measured which are planar polygons so as to face each other at a plurality of sampling points. A shape analyzing apparatus for analyzing the measured measurement data to obtain the shape of the object to be measured, which is a virtual straight line set for each side of the object to be measured and the test surface of the straight ruler the distance in each of the sampling points from a straight line to the test surface, the set as the shape readings representing the unevenness of the surface to be inspected, prior SL interior angle angles and the respective straight edge which reference straight line of the object to be measured constitutes the angle at which the angles of the reference straight line constituting deviates from the interior angle angle when the regular polygon the planar polygons, the internal angle angle and the reference straight line for each straight edge of the reference straight line of the measurement object constitutes the structure angle shows representing the angle at which the And readings setting unit for setting as to a distance from said straightedge acquired by the measurement unit to the reference straight sides of the distance to the side of the object to be measured is the measured object from the reference straight line of the straightedge It is equal to a value obtained by adding the shape index, and the inclination of the reference straight line of the straight ruler with respect to the reference straight line of the side of the object facing the straight ruler is opposed to the other straight ruler. the relationship between the slope of the reference straight line of the straightedge to the reference straight sides of the object to be measured, as is the table with the angle readings, the consists of straightedge and the sides of the object to be measured A simultaneous equation deriving unit for deriving simultaneous equations for all sets , and a simultaneous equation calculating unit for calculating the shape number and the angle number by solving the derived simultaneous equations. It is characterized by that.
According to such a configuration, the same effect as that of the first aspect of the invention can be achieved.

The shape analysis program according to claim 6 has two straight rulers and combines the straight rulers and the sides of the object to be measured which are planar polygons so as to face each other at a plurality of sampling points. A virtual straight line set with respect to each side of the object to be measured and the surface to be measured of the straight ruler, with a computer incorporated in the shape analysis device for analyzing the measured measurement data and obtaining the shape of the object to be measured the distance at each sampling point from the reference straight line up to the test surface, the set as the shape readings representing the unevenness of the surface to be inspected, prior SL internal angle angles and the respective reference straight line of the object to be measured constitutes the angle at which angles the reference straight straightedge constitutes deviates from the interior angle angle when the regular polygon the planar polygons, see the internal angle angles and the respective straight edge which reference straight line of the object to be measured constitutes Straight line And readings setting unit for setting as an angle readings that represent the angle that constitutes a distance from said straightedge acquired by the measuring unit to the side of the object to be measured of the object to be measured from the reference straight line of the straightedge An inclination of the reference line of the straight ruler with respect to the reference line of the side of the object to be measured facing one of the straight rulers , and equal to a value obtained by adding the shape index to the distance to the reference straight line of the side; relationship between the inclination of the reference straight line of the straightedge against the sides of the reference straight line of the object to be measured which is opposed to the other of said straightedge as is the table with the angle readings, the device under test and the straightedge A simultaneous equation deriving unit for deriving simultaneous equations for a set composed of each side of the object , and a simultaneous equation calculating unit for calculating the shape index and the angle index by solving the derived simultaneous equations And functioning.

  A recording medium according to a seventh aspect records the shape analysis program according to the sixth aspect.

  According to such a configuration, the same effect as that of the first aspect of the invention can be achieved. Furthermore, if a computer having a CPU (central processing unit) and a memory (storage device) is incorporated and a program is configured to realize each function in the computer, parameters in each function can be easily changed. For example, it is possible to easily change the setting of the shape indication, the angle indication, etc. set in the indication setting unit according to the shape of the object to be measured. For example, even when the angle index is set as a deviation from the internal angle 180 × (n−2) / n of the regular polygon (regular n-gon), the setting can be easily changed according to the shape of the object to be measured. Further, when the shape index is set as a deviation from the reference line, the reference line can be set to various approximate lines such as a least square line. Then, the program may be installed in the computer by directly inserting the recording medium in which the program is recorded into the computer, and a reading device that reads information on the recording medium is externally attached to the computer, and the program is installed from the reading device into the computer. May be. The program may be supplied and installed on the computer via a communication line such as the Internet, a LAN cable, a telephone line, or wirelessly.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be illustrated and described with reference to reference numerals attached to respective elements in the drawings.
In FIG. 1, the structure of one Embodiment which concerns on the shape measuring apparatus of this invention is shown.
The shape measuring apparatus 1 includes two straight rulers 21 and 22 and measurement data measured at a plurality of points in different combinations of the distance m between the straight rulers 21 and 22 and the sides (51 to 54) of the object 5 to be measured. The measurement unit 2 is configured to include an analysis unit (shape analysis device) 3 that analyzes the acquired measurement data to analyze the shape of the object to be measured, and an output unit 4 that outputs the analysis result.
The measuring unit 2 is arranged with two straight rulers 21 and 22 arranged so that their extension lines form a predetermined angle, and the sides (51 to 54) facing each of these straight rulers 21 and 22. The length measuring sensor 24 that measures the distance between the measured object 5 and the straight rulers 21 and 22 at a plurality of predetermined points, and the movement that moves the length measuring sensor 24 along the longitudinal direction of the straight rulers 21 and 22 A mechanism (not shown).

Two straight rulers 21 and 22 are provided, and the object to be measured 5 is opened and disposed so as to be received on the corner side formed by the two straight rulers 21 and 22 (corner side smaller than 180 °). Has been. The two straight rulers 21 and 22 are arranged at an angle equivalent to the maximum inner angle (55 to 58) in the object 5 to be measured. The two straight rulers 21 and 22 are arranged in a state in which the extension lines of each other form an approximately right angle. Of course, it is desirable that the test surface directed toward the object 5 to be measured on the straight rulers 21 and 22 is processed as straight as possible, but this measurement method affects the processing error of the straight rulers 21 and 22. Therefore, it is not always necessary to perform straight machining with high accuracy.
The straight rulers 21 and 22 are required to have corresponding points that face points on the sides (51 to 54) of the device under test 5 when they are arranged opposite to the sides of the device under test 5. The longest side of the measurement object 5 has an equal or longer length.
Here, one straight ruler is referred to as a first straight ruler 21, and the other straight ruler is referred to as a second straight ruler 22.

The length measuring sensor 24 is provided so as to be movable in the longitudinal direction of the straight rulers 21 and 22 and measures the distance m between the straight rulers 21 and 22 and the DUT 5 at a predetermined sampling pitch.
The length measuring sensor 24 includes a main body cylinder part (main body part) 25 provided so as to be movable in the longitudinal direction of the straight rulers 21 and 22, and a first spindle 26 provided so as to be able to advance and retreat in the opposite direction from the main body cylinder part 25. And a second spindle 27, and a detection unit (not shown) for detecting the amount of advance and retreat of the first spindle 26 and the second spindle 27. At the tips of the first spindle 26 and the second spindle 27, contacts 261 and 271 that contact the object are provided.
When the object to be measured 5 is arranged with the sides (51 to 54) opposed to the two straight rulers 21 and 22, the length measuring sensor 24 is the first between the straight rulers 21 and 22 and the object to be measured 5. The spindle 26 is disposed toward the straight ruler 21 (22), and the second spindle 27 is disposed toward the object 5 to be measured. When the length measuring sensor 24 moves along the straight rulers 21 and 22, the first spindle 26 and the second spindle 27 are moved forward and backward according to the surface irregularities of the straight rulers 21 and 22 and the surface irregularities of the object 5 to be measured. The distance m between the straight rulers 21 and 22 and the side (51 to 54) of the object to be measured 5 is detected from the sum of the advance and retreat amounts of the spindle 26 and the second spindle.

  Although the movement mechanism is not particularly illustrated, a configuration including a drive shaft disposed along the straight rulers 21 and 22 and a slider slidably movable on the drive shaft is given as an example. Then, the length measuring sensor 24 may be attached to the slider and moved integrally. It is preferable that the slider can set a predetermined movement pitch corresponding to the sampling pitch of the length measurement sensor 24.

  Although not particularly illustrated, it is preferable that the straight rulers 21 and 22 and the workpiece 5 to be measured are provided with a mounting table processed substantially flat. Further, the straight rulers 21 and 22 and the workpiece 5 are measured. It is preferable that positioning means for positioning the position is provided. Such positioning means may be any positioning pin or positioning plate protruding from the mounting table, and it is preferable that the positioning pin or positioning plate is movable and can be fixed at an arbitrary position.

  As shown in FIG. 2, the analysis unit 3 sets a measurement data storage unit 31 that stores measurement data acquired by the measurement unit 2, a straight ruler 21, 22, and a number that indicates the shape of the DUT 5. An indicator setting unit 32, a simultaneous expression deriving unit 33 that establishes a simultaneous expression representing the relationship between the measurement data and the set display number, a simultaneous expression calculating unit 34 that solves the derived simultaneous expression, and an analysis unit 3 And a central processing unit (CPU) 35 for controlling the operation. The measurement data storage unit 31, the number setting unit 32, the simultaneous equation deriving unit 33, the simultaneous equation calculating unit 34, and the CPU 35 are connected via a bus 36.

The measurement data storage unit 31 stores the measurement data acquired by the measurement unit 2. For example, as shown in FIG. 3, the straight rulers 21 and 22 and the sides (51 to 54) of the object to be measured 5 are stored. The distance m (x _i ) at each sampling point x _i is stored for the combination.

For example, as shown in FIG. 4 and FIG. 5, the reading setting unit 32 is configured so that the shape of the straight rulers 21 and 22, the shape of the measured object 5, the internal angle of the measured object, and the installation posture of the straight rulers 21 and 22. Is stored as an unknown number indicating (number setting step).
The setting of the shape indicators (L ₁ , L ₂ , S ₁ , S ₂ , S ₃ , S ₄ ...) Indicating the shape of each side (51 to 54) of the DUT 5 and the straight rulers 21 and 22 will be described. To do.
The test surface of each side (51 to 54) of the object to be measured 5 and the test surfaces of the straight rulers 21 and 22 have irregularities. As shown in FIG. A reference straight line (R _{1 to} R ₆ ) for linear regression is virtually set. Furthermore, the residual (distance) from the virtually set reference straight line (R _{1 to} R ₆ ) to the surface to be measured is set as the shape index. The reference straight lines R _{1 to} R ₆ are exemplified as least square lines.

For the first straight ruler 21, the residual from the reference line R ₁ is represented by L ₁ , and the residual at the sampling point x _i is represented by a shape index L ₁ (x _i ) (see FIG. 4). Similarly, the residual at the sampling point x _i for the second straight ruler 22 is expressed as a shape index L ₂ (x _i ).
Further, the residual from the reference straight line R ₃ for the first side 51 of the DUT 5 is represented by S ₁ , and the residual at the sampling point (x _i ) is represented by the shape index S ₁ (x _i ). Similarly, the residual from the reference straight line (R _{4 to} R ₆ ) for the second side 52, the third side 53, the fourth side 54... Of the DUT 5 is represented by the shape index S ₂ (x _i ), S ₃ (x _i), expressed as S ₄ (x _i) ···.
By these shape indexes (L ₁ , L ₂ , S ₁ , S ₂ , S ₃ , S ₄ ...), The sides (51 to 54) of the object to be measured 5 and the test surfaces of the straight rulers 21 and 22 are measured. The unevenness is expressed as unevenness from the reference straight line (R _{1 to} R ₆ ).

The setting of the angle index that represents the size of the inner angle (55 to 58) of the DUT 5 will be described.
Each interior angle (55 to 58) of a polygon (for example, an n-gon) as the DUT 5 is deviated from 180 × (n−2) / n, so that these interior angles (55 to 58) are regular polygons ( The angle deviated from the interior angle of the regular n-gon) is set as the angle index. For example, if the interior angles of the planar polygon of the DUT 5 are the first angle 55, the second angle 56, the third angle 57, the fourth angle 58,..., Each angle is 180 × (n−2) / n. The angles deviating from the above are set as angle indices α, β, γ, δ. The internal angle (55 to 58) of the DUT 5 is defined as the angle formed by the reference straight lines (R _{3 to} R ₆ ) of the sides (51 to 54). As an example, when the DUT 5 is a 4 right angle score, the angle reading is set as a deviation from 90 °. That is, the internal angle of the four right angle square is 90 ° + α for the first angle (55), 90 ° + β for the second angle (56), 90 ° + γ for the third angle (57), and 90 ° for the fourth angle (58). It is expressed in ° + δ.
In addition, a numerical value indicating the posture where the two straight rulers 21 and 22 are installed is expressed as a deviation from 180 × (n−2) / n in accordance with the inner angle of the object 5 to be measured. The angle formed by the reference lines R ₁ and R _{2 of} 22 is deviated from 180 × (n−2) / n as an angle index θ.
These angle indications (α, β, γ, δ,...) Represent the internal angles (55 to 58) of the DUT 5.

The simultaneous equation deriving unit 33 measures the measurement data m (x _i ) acquired by the measuring unit 2, the shape index L (x _i ), S (x _i ) and the angle index set by the index setting unit 32. Formula which α-γ satisfies is established (simultaneous formula derivation step). The derivation process of the equation set in the simultaneous equation deriving unit 33 will be briefly described.
The distance between the reference straight lines R ₁ and R _{2 of the} straight rulers 21 and 22 and the reference straight lines R _{3 to} R ₆ of each side (51 to 54) of the DUT 5 is represented by D. the distance between the reference straight line R ₁ and the reference straight line R ₁ of the first side of the object 5 (51) represented by D _11. Then, the following formula is established between the first straight ruler 21 and the first side 51 of the DUT 5.

  Similarly, when formulas are established for combinations of the straight rulers 21 and 22 and each side (51 to 54) of the DUT 5 such as the relationship between the second straight ruler 22 and the second side 52, the following formula is obtained: Is established.

Further, when the distance between the reference straight lines R ₁ and R ₂ when the first straight ruler 21 and the second straight ruler 22 are arranged substantially in parallel is expressed as D ₅ , the following expression is established.

In a pair of reference lines, when the slope formed by one reference line with respect to the other reference line is u and the distance between the reference lines at the sampling point x ₀ is w, the distance D between the reference lines is u and w. It is expressed by a linear expression using For example, the distance D ₁₁ between the reference straight line R ₁ of the first straight ruler 21 and the reference straight line R ₃ of the first side 51 is expressed by the following equation using the slope u ₁₁ and the intercept w ₁₁ .

Similarly, the distance D ₂₂ between the reference straight line R ₂ of the second straight ruler 22 and the reference straight line R ₄ of the second side 52 is expressed using the slope u ₂₂ and the intercept w _22, and so on.

Here, the angle (angle index θ) formed by the reference straight lines R ₁ and R _{2 of} the first straight ruler 21 and the second straight ruler 22 and the inner angles (angle indices α, β,. The relationship between the second straight ruler 22 and the side (51 to 54) of the object 5 to be measured is expressed by the relationship between the first straight ruler 21 and the side (51 to 54) of the object 5 to be measured. Is done. For example, the slope u reference straight line R ₂ of the reference straight lines R ₁ is the first side by the reference slope u ₁₁ for linear R ₃ of the 51 second straightedge 22 of the first straightedge 21 for the reference straight line R ₄ of the second side 52 ₂₂ is represented by the following formula.

  Similarly, the relationship between the set composed of one side of the object to be measured 5 and the first straight ruler 21 and the pair composed of the side adjacent to one side of the object to be measured 5 and the second straight ruler 22 is as follows. The relative posture of the other set is represented by the relative posture of the one set. Taking a four-square square as an example, it is expressed as follows.

  For the equations (1) to (5) derived from the distance m between the straight rulers 21 and 22 and the sides (51 to 54) of the DUT 5, the equations (6) to (10) and ( By substituting equation (14) from 11), the following equation can be obtained.

  Further, since the sum of the inner angles 55 to 58 of the n-shaped object 5 to be measured is 180 × (n−2), for example, in the case of a 4-right angle square, the sum of the inner angles is 360 degrees, so Is established.

Here, since the reference straight lines R _{1 to} R ₆ are the least square lines of the test surface, the following equation is established. Here, these equations are derived by the undetermined multiplier method because the reference straight lines R _{1 to} R ₆ are the least square lines of the surface to be examined.

  The simultaneous equation deriving unit 33 stores the equations (15) to (30) described above, and establishes simultaneous equations by substituting the measurement data stored in the measurement data storage unit 31 into the above equations.

The simultaneous equation calculation unit 34 performs arithmetic processing on the simultaneous equations of the equations (15) to (30) established by the simultaneous equation deriving unit 33, thereby obtaining the shape index (L ₁ (x _i ), L ₂ (x _i ), S ₁ (x _i ), S ₂ (x _i ),...) and the angle readings (α, β, γ, δ, θ shown in the table of FIG. ) Is calculated (simultaneous calculation process).
Each calculated indication is output to the output unit 4. An example of the output unit 4 is an external output device such as a monitor or a printer that can display or print the arithmetic processing result.

The case where the shape of the to-be-measured object 5 which is a planar polygon is measured using the shape measuring apparatus 1 having such a configuration will be described.
Measurement data obtained by measuring the distance m between the straight rulers 21 and 22 and the sides 51 to 54 of the DUT 5 in the measurement unit 2 is acquired (measurement process). The extension lines of the two straight rulers 21 and 22 are arranged at a predetermined angle, and the measurement object 5 is in a state in which each of the straight rulers 21 and 22 and the side of the measurement object 5 face each other substantially in parallel. Place. For example, when the sides of the 4 right angle skewer are the first side 51, the second side 52, the third side 53, and the fourth side 54, the first side 51 is arranged to face the first straight ruler 21, and the second side It is assumed that the second side 52 is disposed to face the straight ruler 22. The parallelism between the straight rulers 21 and 22 and the sides 51 and 52 may not be strict, and the distance between the straight rulers 21 and 22 and the sides 51 and 52 may be within the measurement range of the length measuring sensor 24.

The movement pitch of the length measurement sensor 24 is set, and the distance m between the straight rulers 21 and 22 and the sides 51 and 52 of the object to be measured 5 is measured by the length measurement sensor 24 for each movement pitch (interval measurement process). ). Then, the interval m ₂₂ between the first straightedge 21 and spacing m ₁₁ and the second straightedge 22 between first side 51 and second side 52 is measured at a predetermined sampling pitch.
For example, the coordinates of the sampling points are defined as x ₀ , x ₁ , x ₂ ..x _i ..x _{n in} order from one end of the straight ruler along the straight rulers 21 and 22, and the first straight ruler 21 and the first straight ruler 21. When the measurement data of the distance to the side 51 is expressed as m ₁₁ , the distance between the first ruler 21 and the first side 51 is m ₁₁ (x ₀ ), m ₁₁ (x ₁ ), m ₁₁ (x ₂ ),. It is measured as m ₁₁ (x _i ) ·· m ₁₁ (x _n ) (see, for example, FIG. 3).

When the distance m ₁₁ (x _i ) between the first straight ruler 21 and the first side 51 and the distance m ₂₂ (x _i ) between the second straight ruler 22 and the second side 52 are measured, the first straight ruler 21 is measured. Further, the measurement object 5 is rotated with the posture of the second straight ruler 22 as it is, and the combination of the straight rulers 21 and 22 and the sides 51 to 54 is changed (combination changing step). For example, it is assumed that the second side 52 faces the first straight ruler 21 and the third side 53 faces the second straight ruler 22.
Then, the measurement data is obtained by measuring the distances m ₁₂ and m ₂₃ between the straight rulers 21 and 22 and the sides 52 and 53 with this combination. Thereafter, the measurement object 5 is rotated to change the combination of the straight rulers 21 and 22 and the sides 51 to 54 of the measurement object 5, and for all possible combinations, the straight rulers 21 and 22 and the sides 51 to 51 of the measurement object 5. The distance to 54 is measured by the length measuring sensor 24 (see, for example, FIG. 3).

Further, the first straight ruler 21 and the second straight ruler 22 are arranged substantially in parallel with a certain interval, and this interval is measured by a length measuring sensor to obtain measurement data m ₅ (x _i ). Ruler interval measurement process, see bottom row in FIG.

Here, in all combinations of the straight rulers 21 and 22 and the sides 51 to 54, the sampling points for measuring the intervals between the straight rulers 21 and 22 and the sides 51 to 54 are the same. That is, when the sampling points are defined as x ₀ , x ₁ , x ₂ ... X _i ..x _{n in} order from one end along the straight rulers 21 and 22, the sampling points are the first straight ruler 21 and the second straight ruler. The ruler 22 is also set at the same interval. Then, the point on the first side 51 corresponding to the sampling point x _i as measured between the first straightedge 21 intervals m ₁₁ between the first side 51, second straightedge by rotation of the object to be measured 5 Even when the distance m ₂₁ between the first edge 51 and the first edge 51 is measured, the point is on the first edge 51 corresponding to the sampling point x _i .
The measurement data obtained in this way is sent to the analysis unit 3 and stored in the measurement data storage unit 31 (see FIGS. 2 and 3).

  The measurement data stored in the measurement data storage unit 31 (FIG. 3) and the shape and angle indications (see FIGS. 4 and 5) set by the indication setting unit 32 are preset in the simultaneous derivation unit 33. The simultaneous equation (15) is substituted into the equation (23), and the equation (15) is established from the simultaneous equations (15). The simultaneous expression calculation unit 34 calculates the expression (30) from these expressions (15), and calculates the shape index (S1, S2...) And the angle index (α, β. Is done. Such simultaneous equations can be completed with a simple calculation if they are calculated using a matrix.

Depending on the shape index S ₁ (x _i ), S ₂ (x _i ), S ₃ (x _i ), S ₄ (x _i ),... 51 to 54) shows a deviation between the test surface and the straight line. For example, information on the shape is obtained such that the straightness of the first side is indicated from the difference between the maximum value and the minimum value of the shape indication S ₁ (x _i ) related to the first side 51.
Further, the deviation from 180 × (n−2) / n is obtained for each internal angle (55 to 58) of the object 5 to be measured by the angle readings α, β, γ, δ. For example, if the object to be measured is a 4-right angle square, an amount in which each internal angle is deviated from 90 ° is obtained.
In addition, information on the shape including straightness of the straight rulers 21 and 22 is obtained by the shape indications L ₁ (x _i ) and L ₂ (x _i ) of the straight rulers 21 and 22.

As described above, according to the shape measuring apparatus 1 having such a configuration, the following remarkable effects can be obtained.
(1) The shape of the device under test 5 can be obtained by calculating the measurement data obtained by measuring the distance from the straight rulers 21 and 22 whose straightness is unknown to the sides 51 to 54 of the device under test 5. Therefore, the shape of the DUT 5 can be accurately measured by calculation regardless of the accuracy of the straight rulers 21 and 22.

(2) Since the shape index (L _i , S _i ) at each sampling point can be calculated, not only the straightness evaluation but also the surface irregularities on each side of the DUT 5 can be obtained.
(3) Since the internal angle of the device under test 5 can be calculated as an angle index (α, β,...), The device under test in addition to the straightness of each side (51 to 54) of the device under test 5 Up to 5 interior angles (55 to 58) can be obtained.

(4) Even when the distance between the straight rulers 21 and 22 and each side (51 to 54) of the measured object 5 is determined, the arrangement posture of the straight rulers 21 and 22 and the measured object 5 does not affect the calculation result. Precise measurement results can be obtained regardless of the orientation. Since the orientation does not affect the result, it is not necessary to take time to make the placement accurate, and the measurement operation can be performed easily and in a short time. For example, it is not necessary that the straight rulers 21 and 22 cross each other at exactly 90 °, or the straight rulers 21 and 22 and the sides 51 to 54 of the object to be measured 5 are strictly arranged in parallel.

(5) The length measurement sensor 24 has spindles 26 and 27 that advance and retract in opposite directions. From the total amount of the spindles 26 and 27, the straight rulers 21 and 22 and the sides 51 to 54 of the object to be measured 5 Since the distance is detected, the distance between the straight rulers 21 and 22 and the sides 51 to 54 of the DUT 5 can be accurately detected. For example, even if the movement axis for moving the length measuring sensor 24 is shifted in the direction connecting the straight rulers 21 and 22 and the sides 51 to 54 of the measured object 5, the detected value is the sides of the straight rulers 21 and 22 and the measured object 5. The distance from 51 to 54 is expressed accurately.

(6) As long as the distance between the two straight rulers 21 and 22 and the sides 51 to 54 of the DUT 5 can be measured, the calculation process can be performed. However, the shape of the side and the size of the inner angle can be measured.

In addition, the shape measuring apparatus (shape measuring method) of the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the scope of the present invention.
Although the four-right angle skewer has been described as an example of the planar polygonal object 5 to be measured, the shape measuring device (shape measuring method) of the present invention can measure various planar polygons as long as the distance between the two straight rulers 21 and 22 can be measured. Applicable to shape. That is, when the object to be measured 5 is arranged on the smaller angle side of the angles formed by the two straight rulers 21 and 22, the straight rulers 21 and 22 and the sides (51 to 54) of the object to be measured 5 The interval needs to fall within the measurement range of the length measurement sensor 24. At this time, when the measured object 5 is rotated while the postures of the straight rulers 21 and 22 are kept as they are, the distance is measured for all the pairs of the straight rulers 21 and 22 and the sides (51 to 54) of the measured object 5. It needs to be in the range. Therefore, for example, a concave polyhedron having a concave angle with an internal angle of 180 ° or more is considered not preferable for the DUT 5.
In order to establish simultaneous equations, the measurement data obtained by measuring the distance between the straight rulers 21 and 22 and the sides 51 to 54 of the measured object 5 in a certain combination is used as the measurement data obtained in another set. Since it is necessary to exist corresponding to the measurement data obtained by measuring the distance between the sides 51 to 54 of the measurement object 5, each side of the measurement object 5 to the extent that the corresponding measurement data exists in each group. It is preferable that the lengths (51 to 54) are uniform.

  The configuration of the length measuring sensor 24 is not limited as long as the distance can be measured. For example, the bottom part of the main body part 25 may be brought into contact with one of the straight rulers 21, 22 and the DUT 5 and the tip may be brought into contact with either of the other. And it is not restricted to the contact-type length measurement sensor 24, A non-contact-type length measurement sensor may be sufficient. For example, it may be configured to have an electrode capacitively coupled to the object to be measured and detect the distance to the object to be measured based on the potential of this electrode.

The reference straight lines R _{1 to} R ₆ have been described by exemplifying the case of using the least-squares straight line, but the reference straight line is not particularly limited, and an arbitrary straight line can be set. For example, a straight line connecting any two points on the test surface may be set as the reference straight line. Even in such a case, for example, conditional expressions corresponding to the expressions (25) to (30) can be added by giving conditions of two points through which the reference straight line passes.
When measuring the straightness of the side of the object to be measured, a plurality of (for example, three or more) sampling points are required. However, if only the internal angle of the object to be measured is to be measured, This is not always necessary, and it is sufficient that there are two for each set of the straight rulers 21 and 22 and the sides 51 to 54 of the DUT 5.

  As described above, according to the shape measuring device, the shape measuring method, the shape analyzing device, the shape analyzing program, and the recording medium of the present invention, the surface irregularities on each side of the planar polygon and the plane polygon, regardless of the reference ruler and the measurement posture. It is possible to obtain an excellent effect that each inner angle can be obtained simply and with high accuracy.

  INDUSTRIAL APPLICABILITY The present invention can be used for a shape measuring device or the like that obtains an uneven shape or an angle shift of each side of a planar polygon.

It is a figure which shows one Embodiment of the shape measuring apparatus of this invention. In the said embodiment, it is a figure which shows the structure of an analysis part. In the said embodiment, it is a figure which shows measurement data. In the said embodiment, it is a figure which shows a shape index. It is a figure which shows an angle index in the said embodiment. In the said embodiment, it is a figure which shows a reference straight line, a shape parameter, and an angle parameter.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Shape measuring apparatus, 2 ... Measuring part, 21 ... 1st straight ruler, 22 ... 2nd straight ruler, 24 ... Length measuring sensor, 25 ... Main body cylinder part, 26 ... 1st spindle, 261 ... Contact, 27 ... 2nd spindle, 271 ... contact, 3 ... analysis unit, 31 ... measurement data storage unit, 32 ... reading setting unit, 33 ... simultaneous equation deriving unit, 34 ... simultaneous equation calculation unit, 36 ... bus 4 ... output unit, 5 ... object to be measured, 51 ... first side, 52 ... second side, 53 ... third side, 54 ... fourth side, 55 ... first corner, 56 ... second corner, 57 ... third corner, 58 ... Fourth angle, L: shape index, m: measured data, R ₁ ... reference line, R ₂ ... reference line, R ₃ ... reference line, R ₄ ... reference line, S ... shape index

Claims (7)

A measuring unit that has two straight rulers and obtains measurement data obtained by measuring the distance between the straight ruler and the side of the object to be measured, which is a plane polygon, in a state of being opposed to each other at a plurality of sampling points; ,
The distance in each of sampling points from said reference straight line is a virtual straight line set for the test surface of the sides and the straight edge of the object to be measured to the test surface, unevenness of the surface to be inspected set the shape readings representing the interior angle angle when the previous SL internal angle angles and the angles of the reference straight line for each straightedge constitutes a reference straight line of the object to be measured constitutes has a regular polygon the planar polygons A setting unit for setting an angle deviated from an internal angle formed by the reference straight line of the object to be measured and an angle indicating the angle formed by the reference straight line of each straight ruler ;
The distance from the straight ruler acquired by the measuring unit to the side of the object to be measured is a value obtained by adding the shape index to the distance from the reference straight line of the straight ruler to the reference line of the side of the object to be measured. The inclination of the reference straight line of the straight ruler with respect to the reference straight line of the object to be measured facing one of the straight rulers and the reference straight line of the side of the object to be measured facing the other straight ruler relationship between the inclination of the reference straight line of the straightedge against, as is the table with the angle readings, the simultaneous equations for a plurality of pairs composed of the respective sides of the straightedge and the object to be measured A simultaneous derivation unit for deriving;
A shape measuring apparatus , comprising: a simultaneous expression calculation unit that calculates the shape index and the angle index by solving the simultaneous expression derived by the simultaneous expression deriving unit. In the shape measuring apparatus according to claim 1,
The measuring unit includes a length measuring sensor that measures a distance between the straight ruler and a side of the object to be measured.
The length measuring sensor is a main body provided so as to be movable in the longitudinal direction of the straight ruler between an object to be measured arranged with the sides facing each of the two straight rulers and the straight ruler;
A first spindle and a second spindle which are provided so as to be able to advance and retreat from the main body in opposite directions in a direction connecting the straight ruler and the side of the object to be measured facing the straight ruler in the shortest direction;
A shape measuring device, comprising: a detection unit that detects an advance / retreat amount of the first spindle and the second spindle. A measurement step of obtaining measurement data obtained by measuring two or more intervals at a plurality of sampling points by having two straight rulers and combining the straight ruler and the side of the object to be measured, which is a plane polygon, facing each other.
The distance in each of sampling points from said reference straight line is a virtual straight line set for the test surface of the sides and the straight edge of the object to be measured to the test surface, unevenness of the surface to be inspected set the shape readings representing the interior angle angle when the previous SL internal angle angles and the angles of the reference straight line for each straightedge constitutes a reference straight line of the object to be measured constitutes has a regular polygon the planar polygons An index setting step for setting an angle deviated from an internal angle formed by the reference straight line of the object to be measured and an angle indicated by an angle formed by the reference straight line of each straight ruler ;
The distance from the straight ruler acquired in the measuring step to the side of the object to be measured is a value obtained by adding the shape index to the distance from the reference line of the straight ruler to the reference line of the side of the object to be measured. The inclination of the reference straight line of the straight ruler with respect to the reference straight line of the object to be measured facing one of the straight rulers and the reference straight line of the side of the object to be measured facing the other straight ruler relationship between the inclination of the reference straight line of the straightedge for as is the table with the angle readings and derives the simultaneous equations for pairs constituted by the respective sides of the straightedge and the object to be measured Simultaneous derivation process,
A shape measurement method comprising: a simultaneous equation calculation step of calculating the shape index and the angle index by solving the derived simultaneous equations. In the shape measuring method according to claim 3,
In the measuring step, one of the straight rulers is placed in a state where the sides of the object to be measured are substantially parallel to each of the straight rulers arranged in a state where the extension lines of the two straight rulers form a predetermined angle. An interval measuring step for measuring an interval between one side of the object to be measured and an interval between the other straight ruler and the other side of the object to be measured;
A shape measuring method comprising: a combination changing step of rotating the object to be measured while maintaining the postures of the two straight rulers to change the combination of the straight ruler and the side of the object to be measured. The measurement target is analyzed by measuring measurement data measured at a plurality of sampling points by having two straight rulers and combining the straight ruler and the side of the object to be measured which is a plane polygon so as to face each other. A shape analysis device for obtaining an object shape,
The distance in each of sampling points from said reference straight line is a virtual straight line set for the test surface of the sides and the straight edge of the object to be measured to the test surface, unevenness of the surface to be inspected set the shape readings representing the interior angle angle when the previous SL internal angle angles and the angles of the reference straight line for each straightedge constitutes a reference straight line of the object to be measured constitutes has a regular polygon the planar polygons A setting unit for setting an angle deviated from an internal angle formed by the reference straight line of the object to be measured and an angle indicating the angle formed by the reference straight line of each straight ruler ;
The distance from the straight ruler acquired by the measuring unit to the side of the object to be measured is a value obtained by adding the shape index to the distance from the reference straight line of the straight ruler to the reference line of the side of the object to be measured. The inclination of the reference straight line of the straight ruler with respect to the reference straight line of the object to be measured facing one of the straight rulers and the reference straight line of the side of the object to be measured facing the other straight ruler relationship between the inclination of the reference straight line of the straightedge against, as is the table with the angle readings, the simultaneous equation for all pairs constituted by the respective sides of the straightedge and the object to be measured A simultaneous derivation unit for deriving;
A shape analysis apparatus , comprising: a simultaneous operation unit that calculates the shape indication and the angle indication by solving the derived simultaneous equations. The measurement target is analyzed by measuring measurement data measured at a plurality of sampling points by having two straight rulers and combining the straight ruler and the side of the object to be measured which is a plane polygon so as to face each other. A computer built into a shape analysis device that calculates the shape of an object
The distance in each of sampling points from said reference straight line is a virtual straight line set for the test surface of the sides and the straight edge of the object to be measured to the test surface, unevenness of the surface to be inspected set the shape readings representing the interior angle angle when the previous SL internal angle angles and the angles of the reference straight line for each straightedge constitutes a reference straight line of the object to be measured constitutes has a regular polygon the planar polygons A setting unit for setting an angle deviated from an internal angle formed by the reference straight line of the object to be measured and an angle indicating the angle formed by the reference straight line of each straight ruler ;
The distance from the straight ruler acquired by the measuring unit to the side of the object to be measured is a value obtained by adding the shape index to the distance from the reference straight line of the straight ruler to the reference line of the side of the object to be measured. The inclination of the reference straight line of the straight ruler with respect to the reference straight line of the object to be measured facing one of the straight rulers and the reference straight line of the side of the object to be measured facing the other straight ruler relationship between the inclination of the reference straight line of the straightedge for as is the table with the angle readings and derives the simultaneous equations for pairs constituted by the respective sides of the straightedge and the object to be measured Simultaneous derivation unit;
A computer-readable shape analysis program that functions as a simultaneous expression calculation unit that calculates the shape indication and the angle indication by solving the derived simultaneous equations.   A computer-readable recording medium on which the shape analysis program according to claim 6 is recorded.

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