JP4319930B2 - Inductive displacement detector and micrometer - Google Patents

Description

  The present invention relates to a rotary type inductive displacement detecting device applied to a digital micrometer, a digital micrometer head, a digital hall test, and the like.

  Conventionally, inductive displacement detectors have been used for precise measurements such as linear displacement and angular displacement. This device performs displacement detection using magnetic flux coupling (electromagnetic coupling) and digitally displays the measurement value as a result, so that the measurement value can be read quickly.

There are a linear type and a rotary type in this apparatus. The rotary type includes a rotor in which conductive plates are arranged circumferentially at a predetermined pitch, and a stator that is disposed opposite to the rotor and has a transmission winding and a reception winding that can be magnetically coupled to the conductive plate. It is comprised (for example, patent document 1).
JP-A-8-313295 (FIG. 16)

  When the receiving winding is affected by the magnetic field generated from the transmitting winding (in other words, when the receiving winding is directly magnetically coupled to the transmitting winding), the resolution is reduced, and as a result, the accuracy of displacement detection is reduced. .

  The present invention has been made to solve such a problem, and an object thereof is to provide a highly accurate rotary type inductive displacement detection device.

  An inductive displacement detection device according to the present invention includes a rotor, a first stator disposed on one surface side of the rotor so as to face the rotor, and the rotor on the other surface side of the rotor. A second stator arranged so as to transmit, a transmission winding arranged in the first stator, a reception winding arranged in the second stator, and the transmission winding so as to be capable of magnetic flux coupling A first magnetic flux coupling winding disposed on one surface of the rotor; and a first magnetic flux coupling winding disposed on the other surface of the rotor so as to be magnetically coupled to the receiving winding and electrically connected to the first magnetic flux coupling winding. And a second magnetic flux coupling winding connected thereto.

  According to the inductive displacement detection device of the present invention, the first stator is disposed on one surface side of the rotor, and the second stator is disposed on the other surface side of the rotor. Thus, the rotor is positioned between the first stator in which the transmission winding is disposed and the second stator in which the reception winding is disposed. Therefore, since the position of the transmission winding and the position of the reception winding can be separated along the rotation axis direction of the rotor, direct coupling of magnetic flux between the transmission winding and the reception winding can be suppressed or prevented. .

  In the inductive displacement detection device according to the present invention, the reception winding may have a structure in which a plurality of reception loops are arranged in a circle. According to this, since the reception winding is circular, the reception current can be increased as compared with the arc shape. Therefore, the S / N ratio is improved, and the accuracy of the inductive displacement detector can be increased.

  In the inductive displacement detection device according to the present invention, a connection portion that connects the first magnetic flux coupling winding and the second magnetic flux coupling winding is formed on the inner peripheral side of the rotor, can do. According to this, since the magnetic flux coupling area can be increased for each of the first and second magnetic flux coupling windings, the S / N ratio is improved and the accuracy of the inductive displacement detecting device can be increased.

  In the inductive displacement detection device according to the present invention, the rotor may include a magnetic shield member disposed between the first magnetic flux coupling winding and the second magnetic flux coupling winding. it can. According to this, the magnetic shield member is provided in the rotor disposed between the first stator and the second stator. For this reason, even if the position of the transmission winding and the position of the reception winding are close, it is possible to suppress or prevent the magnetic flux coupling between the transmission winding and the reception winding directly. Therefore, it is possible to reduce the size of the inductive displacement detector in the direction of the rotation axis of the rotor.

  The inductive displacement detector according to the present invention can be mounted on a micrometer.

  According to the present invention, since the position of the transmission winding and the position of the reception winding can be separated along the rotation axis direction of the rotor, the transmission winding and the reception winding can be directly magnetically coupled. It can be suppressed or prevented. Therefore, it is possible to increase the accuracy of the rotary type inductive displacement detection device.

  Hereinafter, an inductive displacement detector (encoder) according to an embodiment of the present invention will be described with reference to the drawings. In the figure, the same components as those already described with reference numerals are designated by the same reference numerals, and the description thereof is omitted. The embodiment of the present invention is characterized in that a stator provided with a transmission winding is arranged on one side of the rotor, and a stator provided with a reception winding is arranged on the other side of the rotor. To do.

  FIG. 1 is a front view of a digital micrometer 1 equipped with an inductive displacement detector according to an embodiment of the present invention. A thimble 5 is rotatably attached to the frame 3 of the micrometer 1. The spindle 7 serving as a measuring element is rotatably supported inside the frame 3.

  One end side of the spindle 7 protrudes to the outside, and this one end comes into contact with the object to be measured. On the other hand, a feed screw is cut on the other end side of the spindle 7. This feed screw is fitted into a nut in the thimble 5. When the thimble 5 is rotated in the forward direction, the spindle 7 moves forward along the axial direction of the spindle 7, and when the thimble 5 is rotated in the reverse direction, the spindle 7 moves backward along the axial direction of the spindle 7.

  The frame 3 is provided with a liquid crystal display unit 9 that can display the measurement value of the micrometer 1. Note that the inductive displacement detection device according to the embodiment of the present invention can be incorporated into a digital micrometer head and a digital Hall test.

  FIG. 2 is a cross-sectional view of the inductive displacement detection device 11 according to the embodiment of the present invention incorporated in the micrometer 1 of FIG. The apparatus 11 includes a rotor 13, a stator (an example of a first stator) 15 disposed so as to face the rotor 13 on one surface side of the rotor 13, and the rotor 13 facing the other surface side of the rotor 13. And a stator (an example of a second stator) 17 arranged so as to be. The rotor 13 is fixed to an end surface of a cylindrical rotor bush 19. The spindle 7 is inserted into the rotor bush 19.

  The stator 15 is fixed to the frame 3. On the other hand, the stator 17 is fixed to the end face of the cylindrical stator bush 21. The spindle 7 is inserted into the stator bush 21, and the stator bush 21 is fixed to the frame 3 in this state. As described above, the stator 15 and the stator 17 are arranged along the rotation axis direction of the spindle 7 (that is, the rotation axis direction of the rotor 13) so that the rotor 13 is located between them.

  A feed screw 23 is formed on the surface of the spindle 7 to be fitted into a nut disposed inside the thimble 5 of FIG. Further, a key groove 25 is dug on the surface of the spindle 7 along the longitudinal direction of the spindle 7 (that is, the forward and backward direction of the spindle 7). The key groove 25 is fitted with the tip of a pin 27 fixed to the rotor bush 19. When the spindle 7 rotates, the rotational force is transmitted to the rotor bush 19 via the pin 27 and the rotor 13 rotates. In other words, the rotor 13 rotates in conjunction with the rotation of the spindle 7. Since the pin 27 is not fixed to the key groove 25, the rotor 13 can be rotated without moving the rotor 13 together with the spindle 7.

  Details of the configuration of the inductive displacement detector 11 will be described with reference to FIG. FIG. 3 is an enlarged cross-sectional view showing a state in which components other than the inductive displacement detector 11 and the spindle 7 are omitted from FIG.

  First, the stator (an example of the first stator) 15 will be described. The stator 15 includes an insulating substrate 29. A transmission winding 31 is formed on the surface of the insulating substrate 29 on the rotor 13 side, and an insulating protective film (passivation film) 33 is formed so as to cover the transmission winding 31. A through hole 35 is provided in the center of the stator 15.

  FIG. 4 is a plan view of the stator 15 in which the transmission winding 31 is disposed. The transmission winding 31 is disposed on the stator 15 so as to surround the through hole 35. Specifically, the transmission winding 31 extends from the terminal T1 in a ring shape to reach the transmission folded portion 37, and the ring portion from the transmission folded portion 37 to a ring shape with a smaller radius than the ring portion 39 reaches the terminal T2. 41 is included.

  Next, the stator (an example of the second stator) 17 in FIG. 3 will be described. FIG. 5 is a plan view of the stator 17. A through hole 43 is provided in the center of the stator 17. In the stator 17, three circumferential receiving windings 45, 47, 49 are arranged so as to overlap each other so as to surround the through hole 43. The windings 45, 47, and 49 have the same structure, and the structure of the reception winding will be described by taking the reception winding 45 as an example.

  FIG. 6 is a plan view of the reception winding 45. As shown in FIGS. 3 and 6, the reception winding 45 includes a plurality of sets U of upper layer conductors 51 and lower layer conductors 53 that three-dimensionally intersect with the upper layer conductors 51, and these sets U are arranged circumferentially. is there. The lower conductor 53 is formed on the insulating substrate 55. An insulating film 57 is disposed between the lower conductor 53 and the upper conductor 51. The end portion of the upper layer conductor 51 and the end portion of the lower layer conductor 53 are electrically connected via a buried conductor 59 embedded in a through hole provided in the insulating film 57. A protective film 61 is formed on the insulating film 57 so as to cover the upper layer conductor 51.

  It can also be said that the reception winding 45 has a plurality of substantially diamond-shaped reception loops 63 shown in FIG. 7 and these are arranged in a circle along the through hole 43 (FIG. 5). Two opposite sides of the reception loop 63 are the upper layer conductor 51, and the remaining two opposite sides are the lower layer conductor 53. Further, it can be said that the reception winding 45 is configured to extend in a wave shape from the terminal T3, be folded back at the reception folding portion 59a, and extend again in a wave shape to reach the terminal T4.

  Returning to the description of FIG. The reception windings 45, 47, and 49 are arranged with a phase shifted by λ / 6. As shown in FIG. 6, λ is the wavelength of the reception winding. In other words, λ is the dimension of two reception loops 63 along the rotation direction of the rotor 13.

  The terminals T3 and T4 of the reception winding 45, the terminals T5 and T6 of the reception winding 47, the terminals T7 and T8 of the reception winding 49, and the terminals T1 and T2 of the transmission winding 31 of FIG. It is connected to an IC circuit that performs calculation and control for measuring displacement.

  This embodiment is a case of three receiving windings 45, 47, 49 arranged out of phase with each other, that is, three-phase receiving windings. However, according to the present invention, when there is one receiving winding (one-phase receiving winding), two receiving windings arranged out of phase with each other (two-phase receiving winding), the phases are shifted from each other. The present invention can also be applied to the case of four or more receiving windings arranged in this manner (receiving windings of four or more phases).

  Next, the rotor 13 of FIG. 3 will be described. The rotor 13 has a through hole 65 formed in the center, and a magnetic flux coupling winding (an example of a first magnetic flux coupling winding) 67 disposed on one surface of the rotor 13 so as to be capable of magnetic flux coupling with the transmission winding 31. And a magnetic flux coupling winding (second magnetic flux coupling winding) which is disposed on the other surface of the rotor 13 so as to be magnetically coupled to the receiving windings 45, 47 and 49 and is electrically connected to the magnetic flux coupling winding 67. Example) 69.

  FIG. 8 is a plan view of the rotor 13 on the transmission winding side. Five magnetic flux coupling windings 67 are arranged so as to be insulated from each other so as to surround the through hole 65. Each of the magnetic flux coupling windings 67 includes an inner arc portion 71 disposed on the through hole 65 side of the rotor 13, an outer arc portion 73 disposed on the outer side of the rotor 13, and the arc portions extending in the radial direction of the rotor 13. It has a one-stroke structure including two linear portions 75 that electrically connect both ends of 71 and 73. The inner arc portion 71 and the outer arc portion 73 have a substantially one-fifth arc shape. The center of the inner circular arc portion 71 is divided, and one end and the other end of the divided portion extend to the through hole 65 side, in other words, to the inner peripheral side of the rotor 13 to become a connection portion 77.

  On the other hand, FIG. 9 is a plan view of the receiving winding side of the rotor 13. Five magnetic flux coupling windings 69 are arranged so as to be insulated from each other at a predetermined pitch so as to surround the through hole 65. The magnetic flux coupling winding 69 is different from the magnetic flux coupling winding 67 of FIG. 8 in that the inner circular arc portion 71 and the outer circular arc portion 73 have substantially one circular arc shape. Therefore, a space for one magnetic flux coupling winding 69 is provided between the magnetic flux coupling windings 69 (it can also be called a space for one receiving loop 63).

  Next, the magnetic shield film (an example of a magnetic shield member) 79 in FIG. 3 will be described. The magnetic shield film 79 is formed on the core substrate 81 of the rotor 13. Therefore, the magnetic shield film 79 is disposed between the magnetic flux coupling winding 67 and the magnetic flux coupling winding 69. FIG. 10 is a plan view of the magnetic shield film 79. The magnetic shield film 79 is formed on substantially the entire surface of the core substrate 81 on the transmission winding 31 (FIG. 3) side.

  As shown in FIG. 3, an insulating film 83 is formed on the core substrate 81 so as to cover the magnetic shield film 79. A magnetic flux coupling winding 67 is formed on the insulating film 83 and a protective film 85 is formed so as to cover the winding 67. An insulating film 87 is formed on the surface of the core substrate 81 opposite to the surface on which the magnetic shield film 79 is formed. The magnetic flux coupling winding 69 is formed on the insulating film 87. A protective film 89 is formed on the insulating film 87 so as to cover the magnetic flux coupling winding 69.

  Here, a structure for electrically connecting the magnetic flux coupling windings 67 and 69 will be described. As shown in FIGS. 3 and 10, a part of the magnetic shield film 79 is removed in a circular shape on the inner peripheral side of the rotor 13, and is electrically insulated from the magnetic shield film 79 in this circle. A pad electrode 91 is formed. The pad electrode 91 corresponds to the connection part 77 of the magnetic flux coupling windings 67 and 69. The pad electrode 91 and the connection part 77 of the magnetic flux coupling winding 67 are electrically connected by a buried conductor 93 buried in the through hole of the insulating film 83.

  A pad electrode 95 is formed on the surface of the core substrate 81 opposite to the surface on which the magnetic shield film 79 is formed so as to correspond to the pad electrode 91. The pad electrodes 91 and 95 are electrically connected by embedded conductors 97 embedded in the through holes of the core substrate 81. The pad electrode 95 and the connection portion 77 of the magnetic flux coupling winding 69 are electrically connected by a buried conductor 99 buried in the through hole of the insulating film 87.

  The transmission winding 31, the reception windings 45, 47, 49, the magnetic flux coupling windings 67, 69, members (such as the pad electrode 91) that electrically connect the magnetic flux coupling windings 67, 69 and the magnetic shield film 79 are made of aluminum. It is made of a material with low electrical resistance such as copper or gold. The materials for the insulating substrates, the insulating films, and the protective films of the stators 15 and 17 and the rotor 13 are, for example, silicon oxide films and resins. The stators 15 and 17 and the rotor 13 can be manufactured using a normal printed circuit board manufacturing technique.

  Here, the operation of the inductive displacement detector 11 will be briefly described with reference to FIG. A transmission current whose polarity is periodically reversed is sent to the transmission winding 31, and the transmission winding 31 and the magnetic flux coupling winding 67 are magnetically coupled by a magnetic field generated thereby. As a result, an induced current flows through the magnetic flux coupling winding 67. This current flows through the flux coupling winding 69 where it generates a magnetic field. The magnetic flux coupling winding 69 and the receiving windings 45, 47, 49 are magnetically coupled by this magnetic field. The degree of magnetic flux coupling between the magnetic flux coupling winding 69 and each receiving winding 45, 47, 49 depends on the rotational angle position of the rotor 13. Therefore, the rotational angle position of the rotor 13 can be detected by detecting the current (or voltage) generated in each of the receiving windings 45, 47, and 49.

  Next, main effects of the inductive displacement detector 11 according to the embodiment of the present invention will be described. First, the first effect will be described. Consider a case where the transmission winding 31 shown in FIG. 4 and the reception windings 45, 47, and 49 shown in FIG. 5 are arranged in one stator. The direction in which the transmission winding 31 extends at the location of the transmission turn-back portion 37 changes abruptly, and has an irregular shape. For this reason, the distribution and intensity of the magnetic field formed by the transmission winding 31 changes near the folded portion 37, and distortion occurs. Therefore, when the receiving windings 45, 47, and 49 are magnetically coupled (that is, crosstalk) with the folded portion 37, the receiving windings 45, 47, and 49 are affected by the distorted magnetic field, so that the accuracy of displacement detection is reduced. .

  There are the following two means for suppressing the influence of the distorted magnetic field. One is to make the reception windings 45, 47, and 49 arcs instead of circumferences. Thereby, since the windings 45, 47, and 49 can be separated from the folded portion 37, the influence of the distorted magnetic field can be suppressed. However, since the reception windings 45, 47, and 49 are shortened, the intensity of the reception current is reduced.

  The other is to increase the area of the stator. Thereby, since the receiving windings 45, 47, and 49 can be separated from the transmitting winding 31, the influence of the distorted magnetic field can be suppressed. However, this hinders miniaturization of the inductive displacement detector.

  On the other hand, according to the inductive displacement detection device 11 according to the present embodiment, as shown in FIG. It is arranged. Then, the stator 15 is disposed on one surface side of the rotor 13 and the stator 17 is disposed on the other surface side of the rotor 13, so that the rotor 13 is positioned between the stator 15 and the stator 17. .

  Therefore, the position of the transmission winding 31 and the position of the reception windings 45, 47, 49 can be separated along the direction of the rotation axis of the spindle 7 (that is, the rotation axis of the rotor 13). Therefore, it is possible to suppress or prevent direct magnetic flux coupling between the transmission winding 31 and the reception windings 45, 47, and 49 (that is, the reception winding is not easily affected by the magnetic field generated from the transmission winding, or You can avoid it). Therefore, it is possible to improve the accuracy of the rotary type inductive displacement detection device 11.

  The second effect is as follows. As shown in FIG. 3, according to the embodiment of the present invention, a magnetic shield film is formed on the rotor 13 disposed between the stator (an example of the first stator) 15 and the stator (an example of the second stator) 17. (An example of a magnetic shield member) 79 is provided. As a result, the magnetic field generated from the transmission winding 31 is attenuated before reaching the reception windings 45, 47 and 49.

  Therefore, even if the position of the transmission winding 31 and the position of the reception windings 45, 47, 49 are close to each other, the direct coupling of the magnetic flux between the transmission winding 31 and the reception windings 45, 47, 49 is suppressed or prevented. It becomes possible to do. Therefore, it is possible to reduce the dimension of the rotor 13 in the rotation axis direction among the dimensions of the induction-type displacement detection device 11. Further, this is effective when the position of the transmission winding 31 and the position of the reception windings 45, 47, 49 cannot be sufficiently separated due to design reasons.

  The magnetic shield film 79 is disposed between the magnetic flux coupling winding 67 and the magnetic flux coupling winding 69. Therefore, the magnetic field generated from the transmission winding 31 is attenuated without interfering with the magnetic flux coupling between the transmission winding 31 and the magnetic flux coupling winding 67 and the magnetic flux coupling between the reception windings 45, 47, 49 and the magnetic flux coupling winding 69. An effect can be obtained.

  However, if the distance between the stator 15 and the stator 17 can be made large enough to suppress or prevent direct coupling of magnetic flux between the transmission winding 31 and the reception windings 45, 47, and 49, The magnetic shield film 79 may not be provided.

  As shown in FIGS. 8 and 9, both ends of the magnetic flux coupling windings 67 and 69 are configured to extend to the inner peripheral side of the rotor 13 to become a connection portion 77. However, the connecting portion 77 may be disposed on the outer peripheral side of the rotor 13. That is, the both ends of the magnetic flux coupling windings 67 and 69 may be configured to extend to the outer peripheral side of the rotor 13 to become the connection portion 77.

  Since the outer circumference side of the rotor 13 has a longer circumference than the inner circumference side, the arcs of the magnetic flux coupling windings 67 and 69 are also arranged on the outer circumference side of the rotor 13 as compared to the arrangement on the inner circumference side. Become longer. The magnetic flux coupling windings 67 and 69 cannot be arranged on the circumference of the rotor 13 where the connecting portion 77 is arranged. Therefore, when the connecting portion 77 is disposed on the inner peripheral side of the rotor 13, it is possible to connect these without reducing the length of the magnetic flux coupling windings 67 and 69 compared to the case where the connecting portion 77 is disposed on the outer peripheral side. it can. Thereby, since the magnetic flux coupling area can be increased, the S / N ratio is improved, and the accuracy of the inductive displacement detector 11 can be increased.

  Conventionally, a transmission winding and a reception winding are arranged on one surface of one stator, and a rotor is arranged so as to face this surface. In the embodiment of the present invention, the transmission winding and the reception winding are arranged in different stators, and the rotor is arranged between the stators, so that the outer diameter of the stator can be reduced as compared with the conventional case. In particular, when applied to a measuring instrument that is held in the hand such as a micrometer, the outer diameter is small, so that it is easy to hold and the operability is improved.

  Next, a modification of the embodiment of the present invention will be described. FIG. 11 is a plan view of a modified example of a stator (an example of a first stator) 101 in which transmission windings are arranged, out of two stators according to an embodiment of the present invention, and corresponds to FIG. 4. The difference from the stator 15 in FIG. 4 is that the transmission folded portion 37 is arranged in a layer (or a different surface) different from the ring portions 39 and 41.

  FIG. 12 is a plan view of a modified example of the stator (an example of the second stator) 103 in which the reception winding is disposed, out of the two stators according to the embodiment of the present invention, and corresponds to FIG. The receiving windings 45, 47, and 49 in FIG. 5 are circular, whereas the receiving windings 45, 47, and 49 in FIG.

  The circular reception winding can increase the area of the reception winding compared to the arc-shaped reception winding. Therefore, since the reception current can be increased, the S / N ratio is improved, and the induction displacement detection device 11 can be highly accurate.

  FIG. 13 is a plan view on the transmission winding side of a modification of the rotor 105 according to the embodiment of the present invention, and corresponds to FIG. On the other hand, FIG. 14 is a plan view on the receiving winding side of a modified example of the rotor 105 and corresponds to FIG.

  The rotor 13 in FIG. 8 has five magnetic flux coupling windings 67, whereas the rotor 105 in FIG. 13 has one circumferential magnetic flux coupling winding 67. In the rotor 13 of FIG. 9, five magnetic flux coupling windings 69 are arranged so as not to be connected to each other. On the other hand, five magnetic flux coupling windings 69 are arranged in a single stroke on the rotor 105 of FIG. 14, and therefore the windings 69 are connected to each other.

  In the rotor 13 (FIGS. 8 and 9), the straight line portion 75 and the connection portion 77 are arranged in a balanced manner on the rotor as compared with the rotor 105 (FIGS. 13 and 14). It does not occur evenly.

1 is a front view of a micrometer in which an inductive displacement detector according to an embodiment of the present invention is incorporated. It is sectional drawing of the induction type displacement detection apparatus which concerns on embodiment of this invention. It is an expanded sectional view of the induction type displacement detection apparatus of FIG. It is a top view of the stator by which the transmission winding was arrange | positioned among the two stators with which the induction type displacement detection apparatus shown in FIG. 3 was equipped. It is a top view of the stator by which the receiving winding is arrange | positioned among the two stators. FIG. 6 is a plan view of a receiving winding arranged in the stator of FIG. 5. It is a top view of the receiving loop which comprises the receiving winding of FIG. It is a top view at the side of the transmission winding of the rotor with which the induction type displacement detection apparatus shown in FIG. 3 was equipped. It is a top view by the side of the receiving winding of the rotor with which the induction type displacement detection apparatus shown in FIG. 3 was equipped. It is a top view of the magnetic shielding film provided in the rotor with which the induction type displacement detection apparatus shown in FIG. 3 was equipped. It is a top view of the modification of the stator by which the transmission winding is arrange | positioned among the two stators which concern on embodiment of this invention. It is a top view of the modification of the stator by which the receiving winding is arrange | positioned among the two stators. It is a top view by the side of the transmission winding of the modification of the rotor which concerns on embodiment of this invention. It is a top view by the side of the receiving winding of the modification of the rotor which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Micrometer, 3 ... Frame, 5 ... Thimble, 7 ... Spindle, 9 ... Liquid crystal display part, 11 ... Inductive displacement detector, 13 ... Rotor, 15 ... Stator (example of first stator), 17 ... Stator (example of second stator), 19 ... Rotor bush, 21 ... Stator bush, 23 ... Feed screw, 25 ..Key groove, 27... Pin, 29 .. Insulating substrate, 31... Transmission winding, 33 .. Protective film, 35 .. Through-hole, 37. 41 ... ring part, 43 ... through hole, 45, 47, 49 ... receiving winding, 51 ... upper layer conductor, 53 ... lower layer conductor, 55 ... insulating substrate, 57 ... Insulating film, 59... Buried conductor, 59 a... Reception folded portion, 61. 63-1, 63-2 ... receiving loop, 65 ... through hole, 67 ... magnetic flux coupling winding (an example of the first magnetic flux coupling winding), 69, 69-1, 69-2, .. Magnetic flux coupling winding (an example of the second magnetic flux coupling winding), 71... Inner arc portion, 73... Outer arc portion, 75... Linear portion, 77. ..Magnetic shield film, 81... Core substrate, 83 .. insulating film, 85 .. protective film, 87 .. insulating film, 89 .. protective film, 91. ..Embedded conductor, 95... Pad electrode, 97, 99 .embedded conductor, 101... Stator (example of first stator), 103... Stator (example of second stator) 105, rotor, T1 to T8, terminal, U, set of upper layer conductor and lower layer conductor, λ, wavelength of receiving winding, i1, i2 ... Direction of current

Claims (4)

A rotor,
A first stator disposed on one side of the rotor so as to face the rotor;
A second stator disposed on the other surface of the rotor so as to face the rotor;
A transmission winding disposed on the first stator;
A receiving winding disposed on the second stator;
A first magnetic flux coupling winding disposed on one surface of the rotor so as to be magnetically coupled to the transmission winding;
A second magnetic flux coupling winding disposed on the other surface of the rotor so as to be magnetically coupled to the receiving winding and electrically connected to the first magnetic flux coupling winding;
An inductive displacement detection device comprising: a magnetic shield member disposed between the first magnetic flux coupling winding and the second magnetic flux coupling winding of the rotor . The reception winding has a structure in which a plurality of reception loops are arranged in a circle.
The inductive displacement detection device according to claim 1. A connecting portion that connects the first magnetic flux coupling winding and the second magnetic flux coupling winding is formed on the inner peripheral side of the rotor,
The inductive displacement detection device according to claim 1 or 2, characterized in that A micrometer on which the inductive displacement detector according to any one of claims 1 to 3 is mounted.

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