JP4309797B2 - Vacuum processing system - Google Patents

Description

  The present invention relates to a vacuum processing system that performs processing in a vacuum.

  Conventionally, vacuum processing systems that perform precision processing such as press molding in a vacuum state have been used. In such a vacuum processing system, a processing apparatus is fixed to an inner wall of an enclosure, which is a pressure vessel that can be sealed, like the one described in Patent Document 1. A vacuum pump and a relief valve are attached to the enclosure, and the atmospheric pressure inside the enclosure can be evacuated by driving the vacuum pump with the inside of the enclosure sealed from the outside air. Further, the pressure inside the enclosure can be returned to the atmospheric pressure by operating the relief valve.

In the conventional vacuum processing system, since the processing device is fixed to the inner wall of the enclosure as described above, the inner wall of the enclosure is distorted by fluctuations in the pressure inside the enclosure, resulting in tilting and distortion of the processing device. It is not easy to increase the processing accuracy by the processing device.
JP-A-5-309498

  In order to solve the above problems, an object of the present invention is to provide a vacuum processing system capable of precision processing.

  In order to solve the above problems, a vacuum processing system according to the present invention includes a processing device supported by a leg extending from a base, and an enclosure that covers the processing device so as not to contact the processing device. A seal mechanism that has an opening through which the leg portion is inserted so as not to contact, a seal mechanism that covers and seals a gap between the opening and the leg portion, and that does not restrain the displacement of the opening; and air in the enclosure A vacuum pump.

  According to the present invention, the inside of the enclosure is shielded from the outside air by the sealing mechanism, so that the inside of the enclosure, that is, the periphery of the processing apparatus can be kept in a vacuum by driving the vacuum pump. Furthermore, since the seal mechanism is deformed so as not to constrain the displacement of the opening, the enclosure is distorted due to the pressure difference between the inside and outside of the enclosure, and even if the opening is displaced, the seal mechanism is deformed according to the displacement amount. The force to the extent that the leg and the processing device are displaced / deformed is not transmitted to the leg and the processing device. Therefore, even if the inside of the enclosure is evacuated, the machining apparatus is not displaced or deformed, and precision machining is possible.

  As described above, according to the present invention, a vacuum processing system capable of precision processing is realized.

  It attaches to the structure of the vacuum processing system of embodiment of this invention, and demonstrates with reference to drawings below. FIG. 1 is a side sectional view of a vacuum processing system 1 according to an embodiment of the present invention. As shown in FIG. 1, the vacuum processing system 1 includes an enclosure 100 supported on a base 300 and a precision processing apparatus 200 disposed therein. The precision processing apparatus 200 is, for example, a multistage pressing apparatus capable of multistage pressing a plurality of plastic cards in a vacuum. On the side surface of the enclosure 100, a door 120 for inserting and removing a plastic card as a product is provided. The door 120 is provided with a gasket 122 to prevent air from leaking through the gap between the door 120 and the enclosure 100 itself when the door 120 is closed. Moreover, the enclosure 100 is supported with respect to the base 300 via the leg part 140 provided in the lower surface.

  The precision processing apparatus 200 is rigidly supported at four corners of the lower surface thereof by four apparatus legs 210 (only two are shown in FIG. 1). Further, the precision processing apparatus 200 is arranged so as not to contact the enclosure 100. Each of the device legs 210 is fixed to the base 300 so as to extend vertically upward from the horizontal plane of the base 300. Therefore, the precision machining apparatus 200 is rigidly supported on the base 300 via the apparatus leg 210. In the lower surface of the enclosure 100, an opening 110 through which the upper part of the apparatus leg is inserted is formed.

  In order to seal the gap between the opening 110 and the apparatus leg 210, an expansion joint 400 is formed between the bottom surface 100 a of the enclosure 100 and the apparatus leg 210. Hereinafter, the configuration of the expansion joint 400 will be described in detail. FIG. 2 is an enlarged cross-sectional view around the device leg 210 of the vacuum processing system 1 of the present embodiment.

  As shown in FIG. 2, the base 300 has a base body 310 made of concrete and an H-shaped steel 320 embedded in the base body 310. The apparatus leg 210 is welded onto the H-shaped steel 320. The apparatus leg part 210 has a steel pipe 211 having flanges 212 and 213 formed at both ends. The flange 213 formed at the lower end of the steel pipe 211 is disposed on the H-shaped steel 320 and welded to the H-shaped steel 320 after shim adjustment.

  A flange 212 formed at the upper end of the steel pipe 211 is disposed in the enclosure 100 beyond the opening 110. The apparatus 200 is fixed to the upper surface of the flange 212 via a rail 220 made of H-shaped steel.

  The upper end of the opening 110 is covered with the plate 130. FIG. 3 is a view of the plate 130 as viewed from above. The plate 130 is bolted to the lower surface 100a of the enclosure 100 through eight through holes 131 formed at the end thereof. An annular groove 132 is formed on the lower surface of the plate 130. When the plate 130 is fixed to the enclosure 100, the groove 132 is completely covered by the lower surface 100a of the enclosure 100. An O-ring 133 is fitted in the groove 132 to prevent air leakage from the gap between the enclosure 100 and the plate 130.

  A through hole 134 is formed in the center of the plate 130 so as to penetrate in the vertical direction. The inner diameter of the through hole 134 is formed to be slightly larger than the outer shape of the upper flange 212 of the device leg 210, and the device leg 210 can be inserted into the through hole 134 from below with the plate 130 fastened to the enclosure 100. I can do it.

  The expansion joint 400 is provided between the lower surface of the plate 130 and the upper surface of the lower flange 213 of the device leg 210. As shown in FIG. 2, the expansion joint 400 is a cylindrical member having flanges 410 and 420 formed at both upper and lower ends. The cylindrical portion 430 of the expansion joint 400 is a metal or non-metal bellows. This bellows prevents air from passing therethrough. In addition, since both ends of the cylindrical portion 430 and the flanges 410 and 420 are fixed without gaps by means of all-around welding or the like, air does not leak between the cylindrical portion 430 and the flanges 410 and 420. The cylindrical portion 430 is a flexible member that can be expanded and contracted in the axial direction and has flexibility in the cross axis direction.

  The upper flange 410 of the expansion joint 400 is fastened to the lower surface of the plate 130. A sheet packing 412 is fitted between the upper flange 410 and the plate 130 to prevent air leakage between the upper flange 410 and the plate 130. Similarly, the lower flange 420 of the expansion joint 400 is fastened to the upper surface of the flange 213 formed at the lower end of the steel pipe 211. A sheet packing 422 is fitted between the lower flange 420 of the expansion joint 400 and the upper surface of the flange 213 formed at the lower end of the steel pipe 211 to prevent air leakage between the upper flange 410 and the plate 130. .

  As shown in FIG. 3, the upper flange 410 of the expansion joint 400 is fixed so as to completely cover the outer edge of the through hole 134 of the plate 130. Accordingly, the gap between the outer peripheral portion of the steel pipe 211 and the through hole 134 of the plate 130 is completely sealed by the expansion joint 400. Therefore, by driving the vacuum pump 501 (FIG. 1) from the inside of the enclosure 100 with the door 120 closed, the inside of the enclosure 100 can be kept in a vacuum. At this time, the enclosure 100 is distorted due to the pressure difference between the inside and outside of the enclosure 100 and the through hole 134 of the plate 130 is displaced, but the cylindrical portion 430 of the expansion joint 400 can be expanded and contracted in the axial direction and flexible in the intersecting direction. Therefore, even if the through hole 134 of the plate 130 is displaced, a force that only displaces or deforms the device leg 210 is not transmitted to the device leg 210.

  Further, the inner diameter of the through hole 134 of the plate 130 is sufficiently larger than the inner diameter of the steel pipe 211 of the device leg 210, and even if the through hole 134 of the plate 130 is displaced due to distortion of the enclosure 100, the through hole 134 and the device leg 210. Is not touching.

  Therefore, according to the present embodiment, even if the through-hole 134 of the plate 130 is displaced due to the distortion of the enclosure 100, the force for displacing or deforming the device leg 210 is not transmitted to the device leg 210. Even if distortion occurs in 100, the processing apparatus 200 and the apparatus leg 210 are not displaced or deformed, and high-precision vacuum processing is possible.

It is the schematic of the vacuum processing system of embodiment of this invention. It is an expanded sectional view of an apparatus leg part circumference of a vacuum processing system of an embodiment of the present invention. It is a top view of the plate attached to the enclosure of the vacuum processing system of embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum processing system 100 Enclosure 110 Opening 130 Plate 134 Through-hole 210 Apparatus leg part 211 Steel pipe 212 Upper flange 213 Lower flange 300 Base 400 Expansion pipe joint 410 Upper flange 412 Sheet packing 420 Lower flange 422 Sheet packing 430 Cylindrical part

Claims (1)

A processing device supported by legs extending from the base;
An enclosure that covers the processing device so as not to contact the processing device, and has an opening through which the leg is inserted so that the leg does not contact the enclosure;
A sealing mechanism that covers and seals a gap between the opening and the leg and deforms so as not to restrain displacement of the opening;
A vacuum pump for sucking air inside the enclosure;
Have
The sealing mechanism has a bellows;
Flange is formed at both ends of the bellows,
One of the flanges of the bellows is fixed to the enclosure so as to cover the opening;
2. The vacuum processing system according to claim 1, wherein the other flange of the bellows is fixed in contact with a flange formed on the leg portion.

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