JP4305969B2 - Carrier identification system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a carrier identification system capable of recognizing a carrier stored for processing, storing and transporting semiconductor wafers used in semiconductor device manufacturing, semiconductor manufacturing, and the like.
[0002]
[Prior art]
For example, in semiconductor device manufacturing in a clean room, a semiconductor wafer is processed while a carrier containing a plurality of semiconductor wafers is repeatedly transported between a semiconductor process processing apparatus, an inspection apparatus or a stocker by a transport vehicle or an operator. Here, the carrier is a general term for a transport container such as a ME (Mini Enviroment) box, a FOUP (Front Open Unified Pod), and a cassette.
[0003]
In semiconductor device manufacturing, in order to process, store, and transport semiconductor wafers without fail, a barcode label indicating the type, state, etc. of the semiconductor wafer is affixed to a carrier and read by a barcode reader provided in each device. A system for recognizing a carrier (semiconductor wafer) is employed. In the bar code label, characters such as alphanumeric characters are also written on the bar code side so that the operator can recognize when the carrier is conveyed. Further, the manner of attaching the barcode label is determined by the convenience of the barcode reader installed in each apparatus, for example, as shown in FIG. In FIG. 5, a barcode reader 103 is provided at a port 102 of the semiconductor process processing apparatus 101, and a barcode label 105 is attached to the bottom of a carrier 104 to be transferred to the port 102.
[0004]
[Problems to be solved by the invention]
In the case where the label 105 is attached to the bottom of the carrier 104, the bar code reader 103 can read the bar code label 105 when the operator transfers the data to the port 102, but the operator himself reads the characters on the label 105. The carrier 104 cannot be recognized (see FIG. 5). In this case, the operator can lift the carrier 104 over the head and read the characters on the bar code label 105, but in recent years, to lift the carrier 104 containing a plurality of large-diameter (300 mm diameter) semiconductor wafers. A large amount of labor is required, and if the carrier 104 is tilted during lifting, the semiconductor wafer may be dropped. Therefore, the same barcode label 105 is separately attached on the carrier 104 or the like so that the operator can easily recognize the carrier 104.
[0005]
However, if a plurality of bar code labels 105 are attached to the carrier 104, the attachment cost and labor are increased accordingly. In addition, when the barcode labels 105 to be pasted on a plurality of sheets are mistaken and the labels on the bottom and the top or the other side are different, there is a possibility that the semiconductor wafer stored in the carrier 104 may be mistakenly processed. May also cause serious damage.
[0006]
The carrier identification system of the present invention is to enable identification of a carrier by causing an operator to read identification means provided on the bottom of the carrier.
[0007]
[Means for Solving the Problems]
The carrier identification system of the present invention is a system in a clean room for identifying a carrier that accommodates an object to be processed, and is provided at the bottom of the carrier, and is a character or symbol that identifies a printed carrier that is printed in the left and right direction, When configured identifying means by the bar code identifying the carrier is installed in the upward surface of the port is positioned at a height Atari operator waist while standing placed receiving the bottom side of the carrier and, standing when the state of the operator transfers the carriers, by facing the character or symbol identification means Projected these characters or symbols in the left-right reversed, the Utsushide means for identifying the carrier to an operator of the state of standing, standing disposed upward surface of the port is positioned at a height Atari waist operator status, transfers the operator carriers standing state When that, by facing the bar code identification means, reading the bar code, comprising: a reading means for transmitting the data to the control system of the clean room, a standing and means reading and Utsushide means is mounted carrier Are arranged side by side on the upward surface of the port positioned around the height position of the waist of the operator in the state of being caught . When the standing operator places the carrier on the port , the identification means is a projection means provided on the upward surface of the port positioned around the waist height position of the standing operator where the carrier is placed. By copying, it is possible to read characters or symbols that identify the carrier. In particular, the standing operator can easily identify the carrier without lifting the heavy carrier over the head. In addition to the recognition of the carrier by the operator of a standing state, reading the carrier is provided alongside the Utsushide means upward surface of the port is positioned at a height Atari operator waist standing position to be placed means The carrier can be recognized based on the reading of, and processing of an erroneous workpiece can be reliably prevented.
[0008]
Further, the object to be processed is a semiconductor wafer, and the port is provided in a semiconductor process processing apparatus for processing a semiconductor wafer in a clean room, and is a port for a standing operator to place a carrier, And the reading means are preferably arranged on the port. When a standing operator places a carrier on a port of a semiconductor processing apparatus, in recent years it has taken a lot of labor for the standing operator to lift a carrier containing a plurality of large-diameter semiconductor wafers. Further, it is possible to prevent the semiconductor wafer from dropping due to tilting of the carrier when it is lifted by a standing operator.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a carrier identification system according to an embodiment of the present invention will be described with reference to the drawings. In the carrier identification system of the present invention, an identification label (identification means) affixed to the bottom of the carrier can be read by an operator when placed on a target device.
[0010]
The carrier identification system 1 in FIG. 1 is applied to a semiconductor process processing apparatus 2 used for semiconductor device manufacturing and a carrier 3 for storing a semiconductor device wafer W (hereinafter referred to as “semiconductor wafer W”). . The carrier identification system 1 includes an identification label 4, a barcode reader 5 (reading means), and a reflecting mirror 6 (projection means).
[0011]
As shown in FIGS. 2 and 3, the identification label 4 is printed with a barcode for identifying the carrier 3 (indicating the processing state of the semiconductor wafer W) and several characters for identifying the carrier 3. Several characters of the identification label 4 are printed upside down along the barcode side. In addition, what identifies the carrier 3 is not limited to several characters, and includes various things such as alphabets and other symbols. Thus, the identification label 4 on which a barcode and several characters are printed is attached to the bottom of the carrier 3.
[0012]
The carrier 3 is a transport container such as a ME (Mini Enviroment) box, a FOUP (Front Open Unified Pod), a cassette, etc. As an example, a FOUP (Front that stores a plurality of semiconductor wafers W having a diameter of 300 mm in FIG. Open Unified Pod). The FOUP in FIG. 3 has a box shape covering the upper and lower sides of the side wall whose front surface is open and the rear surface is curved, and has a shelf 7 into which a plurality of semiconductor wafers W can be inserted in a vertically stacked state. . A lid 8 is attached to the opening of the FOUP so as to be opened and closed by an automatic opening / closing mechanism. In addition to the FOUP whose opening is not opened / closed by the lid 8, various carriers such as the above-mentioned ME box and open cassette are used as the carrier 3.
[0013]
The barcode reader 5 and the reflecting mirror 6 are provided in parallel on the port 9 of the semiconductor process processing apparatus 2. The barcode reader 5 is connected to a clean room control system (not shown), and the read barcode of the identification label 4 is used for carrier identification processing in the control system. The reflecting mirror 6 has a surface larger than that of the identification label 4, and projects the numbers of the identification label 4 of the carrier 3, which is shifted from the upper side of the port 9, on the left and right sides. As the reflecting mirror 6, it is preferable to use a mirror that can be easily manufactured and obtained, such as a glass mirror or a mirror-finished metal such as stainless steel or aluminum.
[0014]
When the operator transfers the carrier 3 to the port 9 of the semiconductor processing apparatus 2, the identification label 4 on the bottom of the carrier 3 faces the reflecting mirror 6 of the port 9. Subsequently, the carrier 3 is shifted to the main body 2A side of the semiconductor processing apparatus 2 with respect to the reflecting mirror 6 so that the operator can read several characters of the identification label 4 projected on the reflecting mirror 6 (see FIG. 1). Thus, the operator identifies the carrier 3 by reading several characters of the identification label 4 projected to the normal state in the right and left direction on the reflecting mirror 6.
[0015]
After identifying the carrier 3 to be transferred, the operator places the carrier 3 on a pin (not shown) arranged in a triangular shape on the port 9 so that the identification label 4 faces the barcode reader 5. . Thus, the barcode reader 5 reads the barcode of the identification label 4 and transmits it as data to the control system for identification of the carrier 3. When the operator reads the identification label 4 of the carrier 3 and identifies from the information of the identification label 4 that the processing of the semiconductor wafer W is wrong, an appropriate post-processing is performed.
[0016]
As described above, according to the carrier identification system 1, when the carrier 3 is placed on the port 9 of the semiconductor processing apparatus 2, the operator reads several characters of the identification label 4 projected on the reflecting mirror 6 to read the carrier 3. Appropriateness can be identified. Therefore, it is not necessary to affix the plurality of identification labels 4 to the carrier 3, and it is possible to eliminate the labor and cost of affixing the plurality of identification labels 4. Further, it is possible to reliably prevent erroneous processing of the semiconductor wafer W due to the pasting of a plurality of identification labels 4 as in the prior art, thereby eliminating a great deal of damage.
In particular, it is effective for a case where the identification label 4 must be attached to the bottom of the carrier 4 due to the arrangement of the barcode reader 5.
[0017]
Although the carrier identification system 1 is applied to the semiconductor process processing apparatus 2, the barcode reader 5 and the reflection on the port 11 of the inspection apparatus, the transport vehicle or the stocker 10 shown in FIG. A mirror 6 may be provided to identify the appropriateness of the carrier 4 stored in the stocker 10. Furthermore, although what was applied to the carrier 3 which accommodates the semiconductor wafer W was demonstrated, it is not limited to this, It applies to what conveys and stores various things including plate-shaped processed materials, such as a liquid crystal, with the carrier 3 You may do it.
[0018]
Moreover, although the barcode and several characters printed as the identification label 4 have been described, it is also possible to use one printed with only the characters identifying the carrier 3. Further, the identification label 4 may not be attached. For example, the identification label is inserted into a transparent case provided on the bottom of the carrier 3 or the character is directly written on the bottom of the carrier 3. It is good also as an identification means.
[0019]
【The invention's effect】
In the carrier recognition system of the present invention, a system in a clean room for identifying a carrier that accommodates an object to be processed , provided on the bottom of the carrier, and a character or a symbol that identifies a printed carrier printed on the left and right sides, When configured identifying means by the bar code identifying the carrier is installed in the upward surface of the port is positioned at a height Atari operator waist while standing placed receiving the bottom side of the carrier and, standing when the state of the operator transfers the carriers, by facing the character or symbol identification means Projected these characters or symbols in the left-right reversed, the Utsushide means for identifying the carrier to an operator of the state of standing, standing disposed upward surface of the port is positioned at a height Atari waist operator status, operator standing state moved the carrier When standing, by facing the bar code identification means, reading the bar code, comprising: a reading means for transmitting the data to the control system of the clean room, and means reading and Utsushide means is mounted carrier When the operator in the standing state places the carrier on the port , the identification means stands on which the carrier is placed. By copying to the projection means provided on the upward surface of the port positioned around the waist height position of the operator in the state, it is possible to read characters or symbols identifying the carrier, and the operator in the standing state The carrier can be easily identified without lifting the heavy carrier over the head. In addition to the carrier recognition by the standing operator, the reading unit provided side by side with the projecting unit on the upward surface of the port positioned around the waist level of the standing operator on which the carrier is placed The carrier can be recognized based on the reading of, and processing of an erroneous workpiece can be reliably prevented. As a result, it is possible to minimize the amount of damage caused by erroneously processing the workpiece.
[0020]
Further, the object to be processed is a semiconductor wafer, and the port is provided in a semiconductor process processing apparatus for processing a semiconductor wafer in a clean room, and is a port for a standing operator to place a carrier, And the reading means are preferably arranged on the port. When a standing operator places a carrier on a port of a semiconductor processing apparatus, in recent years it has taken a lot of labor for the standing operator to lift a carrier containing a plurality of large-diameter semiconductor wafers. Further, it is possible to prevent the semiconductor wafer from dropping due to tilting of the carrier when it is lifted by a standing operator.
[Brief description of the drawings]
FIG. 1 is a diagram showing a carrier identification system applied to a semiconductor process processing apparatus used for semiconductor device manufacturing.
FIG. 2 is an enlarged view showing an identification label of the carrier identification system.
FIG. 3 is a perspective view showing a FOUP as an example of a carrier.
FIG. 4 is a perspective view showing a semiconductor process processing apparatus and a stocker used for manufacturing a semiconductor device.
FIG. 5 is a perspective view showing a conventional carrier identification system.
[Explanation of symbols]
1 Carrier recognition system 2 Semiconductor process processing equipment (target equipment)
3 Carrier 4 Identification label (identification means)
5 Bar code reader (reading means)
6 Reflector (projection means)

Claims (2)

A system in a clean room for identifying a carrier storing a workpiece,
An identification means that is provided on the bottom of the carrier and is composed of characters or symbols for identifying the carrier printed on the left and right sides, and a barcode for identifying the carrier;
When the carrier is placed on the upper surface of the port that is placed on the bottom side of the carrier and is positioned around the waist position of the standing operator, and the operator in the standing state transfers the carrier In addition, the character or symbol of the identification means is confronted, and the character or symbol is imaged in the opposite direction, and the imaging means for allowing the operator in the standing state to identify the carrier;
Arranged on the upward surface of the port positioned around the waist height position of the standing operator, when the standing operator transfers the carrier, the barcode of the identification means is opposed Reading means for reading a bar code and sending it as data to a clean room control system;
With
A carrier identification system in which the projecting means and the reading means are provided side by side on an upward surface of a port positioned around a waist position of the standing operator on which the carrier is placed . The object to be processed is a semiconductor wafer,
The port is provided in a semiconductor processing apparatus for processing the semiconductor wafer in a clean room, and is a port for the operator in the standing state to place the carrier,
The carrier identification system according to claim 1, wherein the projecting unit and the reading unit are disposed on the port.

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