JP4302679B2 - Clean room - Google Patents

Description

  The present invention relates to a clean room that needs to suppress various kinds of dust from the viewpoint of quality and hygiene.

  Currently, clean rooms are used in various fields. A person engaged in work in the clean room usually performs work while wearing special work clothes called dust-proof clothes in order to maintain the cleanliness in the room. In recent years, the demand for cleanliness of this clean room has increased greatly in various fields.

  For example, a clean room in the semiconductor field is required to have a degree of cleanliness of about “Class 1” of the US Federal Standard along with miniaturization of semiconductor devices. “Class 1” indicates that there is only one or less dust of 0.5 μm or less in one cubic foot.

  In order to maintain such a high level of cleanliness, various proposals such as proposals for clean rooms and dust-proof clothing have been made from various fields. For example, a proposal related to dust-proof clothing is disclosed in Japanese Patent Laid-Open No. 3-26535 which is a Japanese patent publication.

  The dust-proof clothing proposed so far has not been satisfactory for wearing in a clean room that requires a very high level of cleanliness.

  An object of the present invention is to provide a dust-proof clothing that captures a large amount of dust inside the dust-proof clothing in contact with the wearer, hardly adheres to the dust outside the dust-proof clothing, and has excellent strength.

  Among various inventions shown in this application for achieving this object, representative inventions are shown below.

  A representative invention of the present application is a dust-proof garment configured such that more curved fibers are exposed than linear fibers on the inner surface, and more linear fibers are exposed than curved fibers on the outer surface. .

  With this configuration, the outer surface has less space for capturing dust than the inner surface, and the inner surface has more space for capturing dust than the outer surface.

  According to the present invention, the outer surface of the dust-proof clothing has less space for capturing dust than the inner surface, and the inner surface has more space for capturing dust than the outer surface. It is possible to provide a dust-proof clothing that captures a large amount of dust, hardly adheres to the dust outside the dust-proof clothing, and has excellent strength.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view for explaining the first embodiment, and FIG. 2 is a cross-sectional view for explaining the first embodiment. FIG. 2 is a cross-sectional view taken along line X-X 'and line Y-Y' in FIG. In these drawings, the main part of the fabric constituting the dust-proof clothing is schematically enlarged and shown. In FIG. 1, the front side of the drawing is the outside of the dust-proof clothing, and the back side of the drawing is the inside of the dust-proof clothing. In FIG. 2, the upper direction of the drawing is the outside of the dust proof clothing, and the lower side of the drawing is the inside of the dust proof clothing. The inside of the dust-proof clothing is the side of the human body of the wearer wearing the dust-proof clothing, and the outside is the side in contact with the surrounding atmosphere on the opposite side. More specifically, the inner side is the inner surface (or back surface) side of the clothes, and the outer side is the outer surface side of the clothes.

  In the first embodiment, the dust-proof clothing fabric 100 includes a plurality of fiber groups 110 extending in a first direction and a plurality of fiber groups 120 extending in a second direction intersecting with the first direction. Are woven into each other. In the drawings, a uniform gap is provided between the fiber groups for convenience, but it will be understood that this gap is not necessarily uniform in an actual fabric. It is ideal that the fiber group and the fiber group are completely in close contact with each other, but there may be a small gap in a certain part. In the following embodiments and other embodiments, the description will be given with reference to the drawings in which uniform gaps are provided.

  Here, the first direction means the vertical direction of the drawing, and the second direction means the horizontal direction substantially orthogonal to the first direction. Since the crossing of the fibers is orthogonal on the paper surface, it is assumed that the fibers are not necessarily orthogonal on the actual fabric, so the definitions of the first direction and the second direction are used here.

  The plurality of fiber groups 110 includes fiber groups 111 to 115. The plurality of fiber groups 120 includes fiber groups 121 to 125.

  Each of the fiber groups 111 to 115 and the fiber groups 121 to 125 is a fiber group in which a plurality of minute fibers are bundled. Usually, this fiber group is often called a yarn.

  The fiber groups 111 to 115 are aggregates in which several linear polyester fibers each having a diameter of 15 to 20 μm are bundled, and each fiber group has a diameter of about 50 to 100 μm. Here, polyester fibers are used, but fibers of other materials such as nylon can also be used. Needless to say, other materials can be selected as appropriate for the fibers shown below.

  Each of the fiber groups 121 to 123 is an aggregate in which several curved polyester fibers having a diameter of 5 to 10 μm are bundled, and each fiber group has a diameter of about 50 to 80 μm. Here, the curved polyester fiber refers to a polyester fiber processed into a wave shape or a wave shape.

  The diameters of the fiber groups 121 to 123 are desirably thinner than the diameters of the fiber groups 111 to 115. The size of each fiber and fiber group is expected to vary depending on the material, etc., but the designer appropriately selects the relative relationship between the longitudinal fiber group and the transverse fiber group as described above. It will be possible.

  A fiber group 124 is disposed between the fiber group 121 and the fiber group 122, and a fiber group 125 is disposed between the fiber group 122 and the fiber group 123. The fiber groups 124 and 125 are aggregates in which several linear polyester fibers each having a diameter of 15 to 20 μm are bundled in the same manner as the fiber groups 111 to 115 described above, and each fiber group has a diameter of about 50 to 100 μm. Has a thickness of

  Next, referring to FIG. 2 in which cross-sectional views taken along lines XX ′ and YY ′ in FIG. 1 are shown, a structure in which a longitudinal fiber group and a transverse fiber group are woven together is shown. This will be specifically described.

  The fiber groups 121 to 123 extend beyond the single fiber group 111 to the inside of the dust-proof clothing on the outside of the dust-proof clothing. Further, the fiber groups 121 to 123 extend outward beyond the two fiber groups 112 and 113 inside the dust-proof clothing. Furthermore, the fiber groups 121 to 123 extend beyond the single fiber group 114 to the inside of the dust proof clothing on the outside of the dust proof clothing.

  The fiber groups 124 and 125 extend to the outside of the dust proof clothing beyond the fiber group 111 inside the dust proof clothing. Further, the fiber groups 124 to 125 extend inward beyond the two fiber groups 112 and 113 on the outside of the dust proof clothing. Further, the fiber groups 121 to 123 extend beyond the single fiber group 114 to the outside of the dust-proof clothing on the inside of the dust-proof clothing.

  The plurality of fiber groups 110 and the plurality of fiber groups 120 are repeatedly woven into the above pattern, whereby the dust-proof clothing fabric 100 is configured.

  As can be understood from FIGS. 1 and 2, only linear fiber groups (111 to 115 and 124) appear in the X-X ′ cross section.

  In this case, the rate at which the fiber group 124 appears on the outside and inside of the dust proof clothing is “2 (fiber group 124 extending on the fiber groups 112 and 113)” on the outside, whereas “1 ( A fiber group 124) "extending on the fiber group 111. The ratio of the fiber groups 111 to 113 appearing on the outer side and the inner side of the dust-proof garment is “1 (fiber group 111 extending on the fiber group 124)” on the outer side, whereas “2” (fiber group 124 on the inner side). The fiber groups 112 and 113) ”extending upward.

  On the other hand, linear fiber groups (111 to 115) and curved fiber group 122 appear in the Y-Y 'cross section.

  In this case, the rate at which the fiber group 122 appears on the outside and inside of the dust proof clothing is “1 (fiber group 122 extending on the fiber group 111)” on the outside, whereas “2 (fiber group) on the inside. A group of fibers 122) "extending on 112 and 113; The ratio of the fiber groups 111 to 113 appearing on the outside and inside of the dust proof clothing is “2 (fiber groups 112 and 113 extending on the fiber group 122)” on the outside, whereas “1 (fibers) on the inside. A group of fibers 111) "extending on the group 122;

  Since the fabric 100 according to the present embodiment has a pattern as shown in FIGS. 1 and 2, the ratio of the fiber group 110 appearing on the outside and inside of the dust proof clothing is 3 to 3, that is, 1 to 1. Moreover, the ratio of the fiber groups 121 to 123 on the curve appearing outside the dust proof clothes and the linear fiber groups 124 and 125 is 2 to 1, and the fiber groups 121 to 123 on the curve appearing inside the dust proof clothes are The ratio with the linear fiber groups 124 and 125 is 1: 2.

  That is, more linear fiber groups are exposed outside the dust-proof garments than curved fiber groups, and more curved fiber groups are exposed inside the dust-proof garments than straight fiber groups. In this embodiment, the linear fiber group has a larger diameter than the curved fiber group, so that a large diameter fiber group is exposed to the outside, and a small diameter fiber group is exposed to the inside. You can also It can also be said that a large number of straight thick threads are exposed on the outside and a thin curved thread is exposed on the inside.

  The following effects can be expected when a dustproof garment is created using the fabric configured as described above.

  Inside the dust-proof clothing that comes into contact with the wearer, the diameter of the curved fiber is more exposed than the straight fiber, so the dust generated by the wearer (the dust from the clothing worn by the wearer) Much dust is attached to the wearer or clothing. This is because dust is taken into a space called a “fiber pocket” between the fibers. The fiber pocket exists between the fibers and between the fibers and the fibers. Since the fiber pocket exists in such a place, more space is formed between the curved fibers than between the straight fibers. That is, the curved fiber has more fiber pockets than the straight fiber. Furthermore, it is considered that the number of fiber pockets increases as the diameter decreases.

  Further, since the straight fibers having a large diameter are exposed more than the curved fibers on the outside of the dust-proof clothing, the probability that surrounding dust is captured is much lower than that of the curved fibers. That is, even if the dust-proof clothing is exposed to an environment with a lot of dust, the straight fibers are difficult to take in dust. Accordingly, it is possible to prevent the dust taken in the dust-proof clothing from being released into the clean room. Prevention of such dust re-release is a very important factor in realizing a clean room with a high degree of cleanliness as described above. The dusty environment mentioned above refers to the environment in which the dust-proof clothing is stored after the wearer takes off the dust-proof clothing, the environment in which the wearer wearing the dust-proof clothing works, the dust from equipment, jigs, handling materials, etc. It is an environment where you can take a bath.

  In addition, curved fibers tend to generate pills compared to straight fibers and are easily caught by surrounding devices, etc., so there are more straight and thick fibers outside the dust-proof clothing than curved fibers. By being exposed, generation | occurrence | production of the catch to dust proof clothes, such as an apparatus, is suppressed. This is to prevent damage to the dust proof clothing, which means an improvement in the durability of the dust proof clothing.

  As described above, according to the first embodiment of the present invention, it is possible to realize a dust-proof garment in which dust generation from the wearer is easily captured and external dust is not easily captured.

  Next, a second embodiment of the present invention will be described.

  FIG. 3 is a plan view for explaining the second embodiment, and FIG. 4 is a cross-sectional view for explaining the second embodiment. 4 is a cross-sectional view taken along line X-X ', Y-Y', and Z-Z 'in FIG. As in the previous drawings, these drawings are schematically shown by enlarging the main part of the fabric constituting the dust-proof clothing. In FIG. 3, the front side of the drawing is the outside of the dust-proof clothing, and the back side of the drawing is the inside of the dust-proof clothing. In FIG. 4, the upper direction of the drawing is the outside of the dust proof clothing, and the lower side of the drawing is the inside of the dust proof clothing.

  In the second embodiment, the fabric 200 of the dustproof garment includes a plurality of fiber groups 210 extending in the first direction and a plurality of fiber groups 220 extending in the second direction intersecting with the first direction. Are woven into each other.

  Here, the first direction means the vertical direction of the drawing, and the second direction means the horizontal direction substantially orthogonal to the first direction. Since the crossing of the fibers is orthogonal on the paper surface, it is assumed that the fibers are not necessarily orthogonal on the actual fabric, so the definitions of the first direction and the second direction are used here.

  The plurality of fiber groups 210 includes fiber groups 211 to 216. The plurality of fiber groups 220 includes fiber groups 221 to 227.

  The fiber groups 211 to 216 and the fiber groups 221 to 226 are fiber groups in which a plurality of minute fibers are bundled. Usually, this fiber group is often called a yarn.

  The fiber groups 211 to 216 are aggregates in which several linear polyester fibers each having a diameter of 15 to 20 μm are bundled, and each fiber group has a diameter of about 50 to 100 μm. Here, polyester fibers are used, but fibers of other materials such as nylon can also be used as described above.

  Each of the fiber groups 221 to 225 is an aggregate in which several curved polyester fibers having a diameter of 5 to 10 μm are bundled, and each fiber group has a diameter of about 50 to 80 μm. Here, the curved polyester fiber indicates a polyester fiber processed into a wave shape or a wave shape as in the first embodiment.

  The diameters of the fiber groups 221 to 225 are desirably thinner than the diameters of the fiber groups 211 to 216. The size of each fiber and fiber group is expected to vary depending on the material, etc., but the designer appropriately selects the relative relationship between the longitudinal fiber group and the transverse fiber group as described above. It will be possible.

  A fiber group 226 is disposed between the fiber group 222 and the fiber group 223, and a fiber group 227 is disposed between the fiber group 224 and the fiber group 225. The fiber groups 226 and 227 are aggregates in which several linear polyester fibers each having a diameter of 15 to 20 μm are bundled in the same manner as the fiber groups 211 to 216 described above, and each fiber group has a diameter of about 50 to 100 μm. Has a thickness of

  Next, referring to FIG. 4 in which cross-sectional views taken along lines XX ′, YY ′, and ZZ ′ in FIG. 3 are shown, the longitudinal fiber group and the transverse fiber group are The structure interwoven is described in detail.

  The fiber groups 221 to 225 extend beyond the two fiber groups 211 and 212 to the outside of the dust proof clothing inside the dust proof clothing. Further, the fiber groups 221 to 225 extend inward beyond the single fiber group 213 on the outside of the dust-proof clothing. Further, the fiber groups 221 to 225 extend beyond the two fiber groups 214 and 215 to the outside of the dust proof clothing inside the dust proof clothing.

The fiber groups 226 and 227 extend to the inside of the dust proof clothing beyond the two fiber groups 211 and 212 on the outside of the dust proof clothing. Further, the fiber groups 226 and 227 extend outward beyond the single fiber group 213 inside the dust-proof clothing. Further, the fiber groups 226 and 227 extend beyond the two fiber groups 214 and 215 to the inside of the dust-proof clothing on the outside of the dust-proof clothing.

  The plurality of fiber groups 210 and the plurality of fiber groups 220 are repeatedly woven in the above pattern, thereby forming the dust-proof clothing fabric 200.

  As can be understood from FIGS. 3 and 4, only linear fiber groups (211 to 216 and 226) appear in the X-X ′ cross section.

  In this case, the ratio of the fiber group 226 appearing on the outer side and the inner side of the dust-proof clothing is “2 (fiber group 226 extending on the fiber groups 211 and 212)” on the outer side, whereas “1 ( The fiber group 226 extends on the fiber group 213. The ratio of the fiber groups 211 to 213 appearing on the outer side and the inner side of the dust-proof clothing is “1 (fiber group 213 extending on the fiber group 226)” on the outer side. The inside is “2” (fiber groups 211 and 212 extending on the fiber group 226).

  A linear fiber group (211 to 216) and a fiber group 223 on a curve appear in the Y-Y 'cross section.

  In this case, the ratio of the fiber group 223 appearing on the outer side and the inner side of the dust-proof clothing is “1 (fiber group 223 extending on the fiber group 213)” on the outer side, whereas “2 (fiber group) on the inner side. 211 and 212. The ratio of the fiber groups 211 to 213 appearing on the outside and inside of the dust proof clothing is “2” (fiber groups 211 and 212 extending on the fiber group 223). ) "Whereas the inner side is" 1 (fiber group 213 extending on the fiber group 223) ".

  The Z-Z 'cross section is the same as the Y-Y' cross section described above. Therefore, the rate at which the fiber group 224 appears on the outside and inside of the dust proof clothing is “1” on the outside and “2” on the inside. The ratio of the fiber groups 211 to 213 appearing on the outside and inside of the dust proof clothing is “2” on the outside and “1” on the inside.

  Since the fabric 200 of the present embodiment has a pattern as shown in FIGS. 3 and 4, the ratio of the fiber group 210 appearing on the outside and inside of the dust proof clothing is 5: 4. Further, the ratio of the fiber groups 221 to 225 on the curve appearing outside the dust proof clothes to the linear fiber groups 226 and 227 is 2 to 2, and the fiber groups 221 to 225 on the curve appearing inside the dust proof clothes are The ratio with the linear fiber groups 226 and 227 is 1: 4.

  In this embodiment, compared to the first embodiment, more linear fiber groups are exposed on the outside of the dust-proof clothing than in the first embodiment, compared to the first embodiment. On the inner side, more curved fiber groups are exposed than in the first embodiment than in the straight fiber groups.

  In this embodiment, since the linear fiber group has a larger diameter than the curved fiber group as in the first embodiment, the larger fiber group is further outward than in the first embodiment. It can be said that a large number of exposed fiber groups with a small diameter are exposed on the inside more than in the first embodiment. In addition, it can be said that more linear thick threads are exposed on the outer side than in the first embodiment, and more curved thin threads are exposed on the inner side than in the first embodiment.

  When a dustproof garment is created using the fabric configured as described above, the following effects can be expected in addition to the effects of the first embodiment described above.

  More linear fiber groups than the first embodiment are exposed outside the dust-proof garment than the first embodiment, and more curved fiber groups are present inside the dust-proof garment than the straight fiber group. More exposure than in one embodiment. Therefore, it is more difficult for dust to be taken in outside the dust proof clothing than the dust proof clothing of the first embodiment, and the dust taken into the dust proof clothing is further prevented from being released into the clean room. Further, more dust is captured inside the dust proof clothing than the dust proof clothing of the first embodiment.

  As described above, according to the second embodiment of the present invention, a dust-proof garment that is easier to capture dust from the wearer than the dust-proof garment of the first embodiment and hardly captures external dust is realized. it can.

  Next, a third embodiment of the present invention will be described.

  FIG. 5 is a plan view for explaining the third embodiment, and FIG. 6 is a cross-sectional view for explaining the third embodiment. 6 is a cross-sectional view taken along line X-X ', line Y-Y', and line Z-Z 'in FIG. As in the previous drawings, these drawings are schematically shown by enlarging the main part of the fabric constituting the dust-proof clothing. In FIG. 5, the front side of the drawing is the outside of the dust-proof clothing, and the back side of the drawing is the inside of the dust-proof clothing. In FIG. 6, the upper direction of the drawing is the outside of the dust proof clothing, and the lower side of the drawing is the inside of the dust proof clothing.

  In the third embodiment, the dust-proof clothing fabric 300 includes a plurality of fiber groups 310 extending in a first direction and a plurality of fiber groups 320 extending in a second direction intersecting with the first direction. Are woven into each other.

  Here, the first direction means the vertical direction of the drawing, and the second direction means the horizontal direction substantially orthogonal to the first direction. Since the crossing of the fibers is orthogonal on the paper surface, it is assumed that the fibers are not necessarily orthogonal on the actual fabric, so the definitions of the first direction and the second direction are used here.

  The plurality of fiber groups 310 includes fiber groups 311 to 316. The plurality of fiber groups 320 includes fiber groups 321 to 327.

  The fiber groups 311 to 316 and the fiber groups 321 to 326 are fiber groups in which a plurality of minute fibers are bundled. Usually, this fiber group is often called a yarn.

  The fiber groups 311 to 316 are aggregates in which several linear polyester fibers having a diameter of 15 to 20 μm are bundled, and each fiber group has a diameter of about 50 to 100 μm. Here, polyester fibers are used, but fibers of other materials such as nylon can also be used as described above.

  Each of the fiber groups 321 to 325 is an aggregate in which several curved polyester fibers having a diameter of 5 to 10 μm are bundled, and each fiber group has a diameter of about 50 to 80 μm. Here, the curved polyester fiber indicates a polyester fiber processed into a wave shape or a wave shape as in the second embodiment.

  The diameters of the fiber groups 321 to 325 are preferably thinner than the diameters of the fiber groups 311 to 316. The size of each fiber and fiber group is expected to vary depending on the material, etc., but the designer appropriately selects the relative relationship between the longitudinal fiber group and the transverse fiber group as described above. It will be possible.

  A fiber group 326 is disposed between the fiber group 322 and the fiber group 323, and a fiber group 327 is disposed between the fiber group 324 and the fiber group 325. The fiber groups 326 and 327 are aggregates in which several linear polyester fibers each having a diameter of 15 to 20 μm are bundled similarly to the fiber groups 311 to 316 described above, and each fiber group has a diameter of about 50 to 100 μm. Has a thickness of

  Next, referring to FIG. 6 in which cross-sectional views taken along lines XX ′, YY ′, and ZZ ′ in FIG. 5 are shown, the longitudinal fiber group and the transverse fiber group are The structure interwoven is described in detail.

  The fiber group 321 extends beyond the single fiber group 311 to the outside of the dust proof clothing inside the dust proof clothing. Further, the fiber group 321 extends inward beyond the single fiber group 312 on the outside of the dust-proof clothing. Further, the fiber group 321 extends beyond the two fiber groups 313 and 314 to the outside of the dust proof clothing inside the dust proof clothing.

  The fiber group 322 adjacent to the fiber group 321 extends beyond the two fiber groups 311 and 312 to the outside of the dust proof clothing inside the dust proof clothing. Furthermore, the fiber group 322 extends inward beyond the single fiber group 313 on the outside of the dust-proof clothing. Further, the fiber group 322 extends beyond the two fiber groups 314 and 315 to the outside of the dust proof clothing inside the dust proof clothing. Similar to the relationship between the fiber group pairs of the two fiber groups 321 and 322 and the fiber groups 311 to 316, other fiber group pairs (the fiber groups adjacent to 323 and 324 and 325 and 325 not shown) are also included. Be placed.

  The fiber groups 326 and 327 extend beyond the single fiber group 311 to the inside of the dust proof clothing on the outside of the dust proof clothing. Furthermore, the fiber groups 326 and 327 extend outward beyond the single fiber group 312 on the inside of the dust proof clothing. Further, the fiber groups 326 and 327 extend to the inside of the dust proof clothing beyond the two fiber groups 313 and 314 on the outside of the dust proof clothing.

  A plurality of fiber groups 310 and a plurality of fiber groups 320 are repeatedly woven into the above pattern, thereby forming a fabric 300 for a dustproof garment.

  As can be understood from FIGS. 5 and 6, only linear fiber groups (311 to 316 and 326) appear in the X-X ′ cross section.

  In this case, the ratio of the fiber group 326 appearing on the outside and inside of the dust proof clothing is “2 (fiber group 326 extending on the fiber groups 313 and 214)” on the outside, whereas “1 ( The fiber group 326 extends on the fiber group 312. The ratio of the fiber groups 311 to 316 appearing on the outside and inside of the dust proof clothing is “1 (fiber group 312 extending on the fiber group 326)” on the outside. Whereas the inside is “2” (fiber groups 313 and 314 extending on the fiber group 326).

  A linear fiber group (311 to 316) and a fiber group 323 on a curve appear in the Y-Y 'cross section.

  In this case, the ratio of the fiber group 323 appearing on the outer side and the inner side of the dust-proof clothing is “1 (fiber group 323 extending on the fiber group 312)” on the outer side, whereas “2 (fiber group) on the inner side. 313 and 314. The ratio of the fiber groups 311 to 216 appearing on the outside and inside of the dust-proof garment is “2” on the outside (fiber groups 313 and 314 extending on the fiber group 323). ) ", While the inner side is" 1 (fiber group 312 extending on the fiber group 323) ".

  The Z-Z 'cross section is the same as that obtained by shifting the Y-Y' cross section in the horizontal direction by one fiber group. Therefore, the rate at which the fiber group 324 appears on the outside and inside of the dust proof clothing is “1” on the outside and “2” on the inside. The rate at which the fiber groups 311 to 316 appear on the outside and inside of the dust proof clothing is “2” on the outside and “1” on the inside.

  Since the fabric 300 according to the present embodiment has a pattern as shown in FIGS. 5 and 6, the ratio of the fiber group 310 appearing on the outside and inside of the dust-proof clothing is 5: 4. Further, the ratio of the fiber groups 321 to 325 on the curved line appearing on the outside of the dust proof clothes to the linear fiber groups 326 and 327 is 2 to 2, and the fiber groups 321 to 325 on the curved line appearing on the inside of the dust proof clothes are The ratio with the linear fiber groups 326 and 327 is 1: 4.

  In this embodiment, compared to the first embodiment, more linear fiber groups are exposed on the outside of the dust-proof clothing than in the first embodiment, compared to the first embodiment. On the inner side, more curved fiber groups are exposed than in the first embodiment than in the straight fiber groups.

  In this embodiment, since the linear fiber group has a larger diameter than the curved fiber group as in the first embodiment, the larger fiber group is further outward than in the first embodiment. It can be said that a large number of exposed fiber groups with a small diameter are exposed on the inside more than in the first embodiment. In addition, it can be said that more linear thick threads are exposed on the outer side than in the first embodiment, and more curved thin threads are exposed on the inner side than in the first embodiment.

  When a dustproof garment is created using the fabric configured as described above, the following effects can be expected in addition to the effects of the first embodiment described above.

  More linear fiber groups than the first embodiment are exposed outside the dust-proof garment than the first embodiment, and more curved fiber groups are present inside the dust-proof garment than the straight fiber group. More exposure than in one embodiment. Therefore, it is more difficult for dust to be taken in outside the dust proof clothing than the dust proof clothing of the first embodiment, and the dust taken into the dust proof clothing is further prevented from being released into the clean room. Further, more dust is captured inside the dust proof clothing than the dust proof clothing of the first embodiment.

  As described above, according to the third embodiment of the present invention, a dust-proof clothing is realized in which dust generation from the wearer is more easily captured than the dust-proof clothing of the first embodiment, and external dust is not easily captured. it can.

  As described above, according to the present invention, the outer surface of the dust-proof clothing has less space for capturing dust than the inner surface, and the inner surface has more space for capturing dust than the outer surface. It is possible to provide a dust-proof clothing that captures a large amount of dust on the inside of the clothes and that does not easily adhere to the outside of the dust-proof clothing and that has excellent strength.

  The present invention is a dust-proof garment to be worn in a clean room that needs to suppress various kinds of dust from the viewpoint of quality and hygiene, particularly in a clean room such as a semiconductor field, a precision instrument field, a medical / pharmaceutical field, and a food processing field. Applied to dustproof clothing.

  For example, in a clean room 700 in the semiconductor field as shown in FIG. 7, the worker 701 is engaged in work while wearing the above-described dust-proof clothing. An operator 701 handles semiconductor wafers in and around apparatuses 702 and 703 for processing semiconductor wafers. The worker 701 controls the devices 702 and 703.

  In such a place, the influence on the semiconductor wafer by dust of a certain level or more is very large. There may be a case where a minute pattern scheduled to be formed on the semiconductor wafer cannot be formed as planned due to the presence of dust. This means an increase in defective products, that is, a decrease in yield (ratio at which good products are obtained). Also, from the viewpoint of product reliability, it is desirable to eliminate dust that may cause an unexpected event as much as possible.

  In the above-described embodiment, the single layer fabric in which the longitudinal fiber group and the lateral fiber group are woven is shown, but the present invention can also be applied to a multilayer structure fabric. For example, a multilayer in which the inner surface of a dust-proof garment is formed only from the curved fibers as described above, the outer surface is formed only from the straight fibers as described above, and the inner surface and the outer surface are bonded together. It can also be applied to structures. In this case, in consideration of easiness of movement when worn, breathability, comfort, cost, etc., either a single layer or a multilayer structure will be adopted.

It is a partial enlarged plan view showing a 1st embodiment of the present invention. It is a partial expanded sectional view which shows the 1st Embodiment of this invention. It is a partial enlarged plan view which shows the 2nd Embodiment of this invention. It is a partial expanded sectional view which shows the 2nd Embodiment of this invention. It is a partial enlarged plan view which shows the 3rd Embodiment of this invention. It is a partial expanded sectional view which shows the 3rd Embodiment of this invention. It is a partial expanded sectional view of a clean room.

Explanation of symbols

100 Fabrics for dust-proof clothing 110, 120 Fiber groups 111, 124 Linear fiber groups 121, 122 Curved fiber groups

Claims (6)

In a clean room,
The clean room includes an apparatus for processing a semiconductor wafer, and dust-proof clothing used in the clean room,
The dust-proof clothing includes a plurality of first fiber groups extending in a first direction, a plurality of second fiber groups extending in a second direction intersecting the first direction, and the second A structure of a fabric formed by interweaving a third fiber group sandwiched between fiber groups and extending in the second direction;
The first fiber group is composed of linear polyester fibers, the second fiber group is composed of curved polyester fibers, and the third fiber group is composed of linear polyester fibers. The fiber group is exposed to the inside of the fabric, which is the side in contact with the wearer of the dust-proof clothing, more than the outside opposite to the inside of the fabric, and the third fiber group is exposed to the outside of the fabric. A clean room having the structure of the fabric exposed more than the inside. In the clean room according to claim 1,
The structure of the fabric of the dust-proof garment is such that each fiber of the second fiber group extends inwardly beyond the one of the first fiber group on the outer side, and on the inner side of the first fiber group. Extending beyond the two to the outside, and each fiber of the third fiber group extends to the inside beyond the two of the first fiber group on the outside and the first fiber on the inside A clean room characterized by having a structure extending to the outside beyond one of the fiber groups. In the clean room according to claim 1,
The structure of the fabric of the dust-proof garment includes a fiber group pair formed by two fiber groups adjacent to the plurality of second fiber groups, and the third fiber group is disposed between the fiber group pairs. The fiber group pair extends inwardly beyond one of the first fiber groups on the outer side and extends outwardly over two of the first fiber groups on the inner side, Each fiber of the third fiber group extends inwardly beyond the two of the first fiber group on the outside and extends outwardly over one of the first fiber groups on the inside Clean room characterized by the structure to be. In the clean room according to claim 3,
The structure of the fabric of the dust proof clothing is a clean room characterized in that one of the fiber group pairs is exposed to the outside and the other is exposed to the inside of one of the first fiber groups. In the clean room according to any one of claims 1 to 4,
The clean room is characterized in that the structure of the fabric of the dust proof clothing is a structure in which the diameter of the first fiber group is larger than the diameter of the second fiber group. In the clean room according to any one of claims 1 to 5,
The clean room is characterized in that the structure of the fabric of the dust proof clothing is a structure in which the diameter of the first fiber group is 50 μm to 100 μm and the diameter of the second fiber group is 50 μm to 80 μm.

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