JP4285389B2 - Magnetic head device and tape drive device including the same - Google Patents

Description

  The present invention relates to a magnetic head device for a linear tape in which a plurality of data tracks extending in the longitudinal direction of a magnetic tape are arranged in the width direction of the magnetic tape, and a tape drive device including the magnetic head device.

  In recent years, for example, due to an increase in the amount of data handled by a computer system, there is a great demand for a data storage system using a magnetic tape as a backup device. As this data storage system, there is a linear tape drive type storage system.

  FIG. 8 schematically shows a tape format in a linear tape system (for example, LTO (Linear Tape Open)), and a plurality of servo bands SB (SB1, SB2, SB2) extending along the longitudinal direction of the magnetic tape T. SB3,...) Are juxtaposed in the width direction of the magnetic tape T, and a plurality of data bands DB (DB1, DB2, DB3,...) Are formed by being partitioned between the servo bands SB. In these data bands DB, a large number of data tracks (not shown) are arranged in parallel in the longitudinal direction of the magnetic tape T.

  The magnetic tape T has a structure in which a plurality of data tracks are simultaneously recorded and reproduced in a selected data band by a multi-channel magnetic head HD. For example, as shown in FIG. 9, the magnetic head HD has a plurality of recording / reproducing magnetic head elements 1D each composed of a recording magnetic head element unit 1W and a reproducing magnetic head element unit 1R, arranged in two rows in the track width direction. ing. The arrangement interval of the recording / reproducing magnetic head elements 1D in each column corresponds to the interval of the data tracks in the same data band DB. Further, servo signal reproducing magnetic head element portions 1S for reading out servo signals from servo bands SB on both sides of the data band DB are arranged at both ends of the recording / reproducing magnetic head element 1D of each column.

  On the other hand, the magnetic tape T reciprocally slides with respect to the magnetic head HD. At this reciprocation, the magnetic head HD moves a predetermined amount in the width direction of the tape, so that a plurality of different data tracks are transferred. Recording or playback is performed. At the time of recording, in the forward path and the return path, signal recording is performed on the corresponding track by the recording magnetic head element unit 1W in the preceding (leading) row by the transition of the magnetic tape T, and this recording is performed at the same time. The state is monitored by the reproducing magnetic head element portion 1R in the rear (trailing side) row. On the other hand, at the time of reproduction, the recorded data signal is reproduced by one of the two rows of reproducing magnetic head element portions 1R.

  Then, in the recording and reproduction described above, the servo signals are read from the servo bands SB on both sides sandwiching the data band DB to be recorded and reproduced by the servo signal reproducing magnetic head element portions 1S at both ends of the magnetic head element array, Thereby, tracking servo by minute movement of the magnetic head HD with respect to the target data track is performed.

  In such a linear tape format drive, the magnetic head HD is based on a coarse motion tracking mechanism for positioning a corresponding magnetic head element on a selected set of data tracks in a selected data band and the servo signal described above. Transition in the width direction of the magnetic tape T is performed by a fine movement tracking mechanism (track tracking mechanism) for performing tracking servo. This is due to the demand for higher bandwidth tracking servos to cope with higher track density and to follow faster.

  Conventionally, magnetic head devices in linear tape drive systems such as LTO, DLT, and QIC ensure stable electrical continuity with the control unit (control board) on the tape drive device side while flexibly following the tracking operation. For this purpose, a flexible printed circuit (FPC) is employed (FIGS. 10 to 12).

  FIG. 10 is an overall perspective view of a conventional magnetic head device 1, FIG. 11 is a front perspective view showing a configuration of a main part of the magnetic head device 1, and FIG. 12 is a diagram of the magnetic head device 1 showing how a flexible wiring board is routed. It is a back side perspective view.

A conventional magnetic head device 1 includes a head chip 2 having a plurality of magnetic head elements formed on the front surface (tape sliding surface) side, and a fine movement actuator (fine movement follow-up mechanism) that minutely moves the head chip 2 in the tape width direction. 3, a carrier 4 that supports the head chip 2 via the fine actuator 3, a pair of flexible wiring boards 5 and 5 attached to the back side of the head chip 2, and the flexible wiring boards 5 and 5, respectively. It consists of support members 6 and 6.
In FIG. 12, the fine actuator 3, the carrier 4, and the support members 6 and 6 are not shown for easy understanding.

  The flexible wiring board 5 is formed with a wiring pattern for electrically connecting the magnetic head elements of the head chip 2 and the control board 7 on, for example, a polyimide plastic film. First bent surface portion 5A that is folded back approximately 180 degrees, second bent surface portion 5B that is folded approximately 180 degrees downward from the upper side of the head chip 2, and laterally from the lower side of the head chip 2. And a third bent surface portion 5C that is bent approximately 90 degrees.

  The carrier 4 is supported by a coarse motion actuator (coarse motion tracking mechanism) (not shown), and the head chip 2, the fine motion actuator 3, the carrier 4, the flexible wiring board 5, and the support member 6 are integrated by driving the coarse motion actuator. Thus, coarse tracking is performed. Stable electrical continuity between the head chip 2 and the control board 7 is ensured by the second and third bent surface portions 5B and 5C of the flexible wiring board 5 flexibly corresponding to the coarse tracking operation. The

  On the other hand, the fine actuator 3 is a twin bimorph actuator composed of a pair of upper and lower bimorph elements facing each other with an interval corresponding to the length of the head chip 2 in the track width direction (in this example, the longitudinal direction of the head chip 2). One end of each of the pair of bimorph elements is fixed to the carrier 4, and the other end is connected to the upper and lower ends of the head chip 2. The fine movement actuator 3 causes the head chip 2 to perform a fine tracking operation in accordance with the servo signal. The flexible wiring boards 5 and 5 respond to this fine movement tracking operation by twisting and deforming the first bent surface portion 5A to ensure stable electrical conduction.

  Thus, the flexible wiring board 5 is a component for ensuring stable electrical continuity while flexibly responding to each of the coarse / fine movements of the head chip 2, and the size and configuration of the tape drive device. The head chip 2 is made to follow the tracking operation by providing the bent surface portions 5A to 5C corresponding to the required driving range corresponding to the above constraints.

  Prior art documents related to the invention of the present application are shown below.

JP-A-5-325107

  In recent years, due to the explosive increase in the amount of data, an increase in capacity has become an urgent task even in a tape storage system, and in order to realize this, an improvement in recording density is required. Under such circumstances, in a so-called linear magnetic recording tape system for recording data on serpentine, it is possible to record how the track density (TPI) can be increased while increasing the linear recording density. Holding the key to improving capacity. Then, it is becoming essential to increase the speed and bandwidth of the tracking servo and to make the flexible wiring board 5 into a multilayer wiring by increasing the number of channels.

  However, in the conventional magnetic head device 1 described above, as the tracking servo increases in speed and bandwidth, the high-speed tracking performance of the tracking operation decreases, and it becomes difficult to obtain a good response to the actuator drive. There is a problem that has come.

  This is due to the rigidity of the flexible wiring board 5. In particular, as the tracking servo speed increases and the bandwidth increases, the torsional rigidity of the first bent surface portion 5A that undergoes torsional deformation during the fine tracking operation cannot be ignored. For this reason, the flexible wiring board 5 cannot flexibly follow the fine movement tracking operation, which causes adverse effects such as generating unnecessary resonance in the servo band.

  Moreover, if the number of channels increases due to the higher recording density and the flexible wiring board 5 becomes multi-layered, the flexible wiring board 5 becomes larger, heavier and more rigid. Higher accuracy tracking servo control becomes more difficult due to response delay.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a magnetic head device that can suppress unnecessary resonance and can sufficiently cope with higher speed and higher bandwidth of a tracking servo, and a tape drive device including the magnetic head device. .

  In solving the above problems, the present invention provides a head chip in which a plurality of magnetic head elements are arranged on the front surface in the track width direction, a carrier that supports the head chip, and a gap between the head chip and the carrier. A track follower mechanism that is attached and moves the head chip in the track width direction, and a flexible wiring board that is led out from the back surface of the head chip and exchanges electrical signals between the magnetic head element and the external control unit. The torsionally deformed portion of the flexible wiring board is subjected to processing for reducing the torsional rigidity of the portion.

  The torsional deformation portion of the flexible wiring board corresponds to a bent surface portion formed by folding back from the back side of the head chip to the front side of the head chip.

  The processing for reducing the torsional rigidity of the bent surface portion can be a plurality of through holes formed in the bent surface portion, and these through holes extend in a direction intersecting the track width direction. Slot shape. With this configuration, the tracking movement followability of the head chip in the track width direction can be improved, and unnecessary resonance can be generated in the servo band even if the flexible wiring board becomes larger, thicker, and heavier due to the increase in the number of channels. And stable and flexible servo tracking.

  The same effect as described above can also be obtained when a plurality of slits are formed in the direction intersecting the track width direction with respect to the bent surface portion.

  As described above, according to the present invention, since the processing for reducing the torsional rigidity of the flexible wiring board is performed on the torsionally deformed portion, the tracking movement of the head chip in the track width direction is performed. The follow-up performance can be improved, and even if the flexible wiring board becomes larger, thicker, and heavier due to the increase in the number of channels, stable and flexible servo follow-up can be ensured without causing unnecessary resonance in the servo band. it can.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic configuration diagram of a tape drive device 10 according to an embodiment of the present invention.
The linear tape drive device 10 includes a cartridge mounting portion 14 to which a tape cartridge 13 having a winding portion (tape reel) 12 of a magnetic tape 11 is mounted, a magnetic head device 21 according to the present invention described later, and the tape cartridge 13. A magnetic tape guide means 15 having a guide body 15GR such as a plurality of guide pins and guide rollers, for example, for guiding the drawn magnetic tape 11 to the magnetic head device 21 is provided.

  In the illustrated example, a second winding portion (tape winding portion) 16 that is paired with the first winding portion 12 of the magnetic tape 11 disposed in the tape cartridge 13 is disposed outside the cartridge 13. The magnetic tape 11 is reciprocated between the first and second winding parts 12 and 16 through the magnetic head device 21.

  As in the magnetic tape T described in FIG. 8, the magnetic tape 11 has a plurality of servo bands SB (SB1, SB2, SB3,...) Extending in the longitudinal direction in the tape width direction. A plurality of data bands DB (DB1, DB2, DB3,...) Are formed by being juxtaposed while maintaining a required interval and partitioned between the servo bands SB. In each of these data bands DB, a large number of data tracks are arranged in parallel in the longitudinal direction of the tape, for example, a predetermined number such as 16 or 32.

  Next, the configuration of the magnetic head device 21 according to the present invention will be described with reference to FIGS. Here, FIG. 2 is an overall perspective view of the magnetic head device 21, FIG. 3 is a front perspective view showing the configuration of the main part of the magnetic head device 21, and FIG. 4 is a magnetic head device 21 showing how the flexible wiring board is routed. FIG.

A magnetic head device 21 according to the present embodiment includes a head chip 22 having a plurality of magnetic head elements formed on the front surface (tape sliding surface) side, and a fine movement actuator (fine movement) that finely moves the head chip 22 in the tape width direction. Follower mechanism) 23, a carrier 24 that supports the head chip 22 via the fine actuator 23, and a pair that is led out from the back surface of the head chip 22 and exchanges electrical signals between the head chip 22 and the control board 27. Flexible wiring boards 25 and 25, and support members 26 and 26 for supporting the flexible wiring boards 25 and 25, respectively.
In FIG. 4, the fine movement actuator 23, the carrier 24, and the support member 26 are omitted for easy understanding.

  The head chip 22 is configured by joining together a pair of rectangular head chip elements in which the head chip elements are formed on a substrate such as AlTiC (AlTiC). As with the magnetic head HD schematically shown in FIG. 9, a plurality of recording / reproducing magnetic head elements each including a recording magnetic head element unit 1W and a reproducing magnetic head element unit 1R for a data track of the magnetic tape are combined. For example, 16 or 32 IDs are arranged inline in the track width direction. These in-line magnetic head element rows are arranged in two rows at a predetermined interval, and the corresponding magnetic head elements 1D in each row are arranged on the same track. Furthermore, servo signal reproducing magnetic head element portions 1S are respectively formed at both ends of each column of the magnetic head element 1D.

  The magnetic head elements 1D in each row are intermittently arranged with a predetermined number of data track intervals in the data band DB, and the track 24 is driven by a coarse actuator described later according to repeated reciprocation of the magnetic tape 11. Recording or reproduction is sequentially performed on each data track by shifting in the direction.

  In this magnetic head configuration, when recording is performed on the corresponding data track by the recording magnetic head element portion 1W of the magnetic head element 1D in one row on the forward or return path of the magnetic tape 11, the recording of this data track is performed. The state is monitored by the reproducing magnetic head element portion 1R of the magnetic head element 1D in the other column located in the data track.

  In the present embodiment, as shown in FIG. 9, the magnetic head element 1D in each column has the recording magnetic head element portion 1W positioned on the outer side with respect to the reproducing magnetic head element portion 1R. The magnetic head element 1D is configured. However, the present invention is not limited to this, and the recording magnetic head element portion 1W may be positioned on the inner side of the reproducing magnetic head element portion 1R.

  As schematically shown in FIG. 5, the fine actuator 23 is a pair of upper and lower bimorph elements 31 facing each other with a distance corresponding to the length of the head chip 22 in the longitudinal direction (the width direction of the magnetic tape 11). , 31 and corresponds to the “track following mechanism” of the present invention.

  One end of each of the pair of bimorph elements 31, 31 is fixed to the carrier 24, and the other end is connected to the upper and lower ends of the head chip 22 via the chip bases 32, 32. The chip base 32 is formed of a conductive material such as a resin containing carbon fiber bent in a U-shape at an intermediate portion.

  In the bimorph element 31, a pair of piezoelectric bodies 31 a and 31 b are joined with a common electrode 31 </ b> E <b> 1 as an electrode on one surface, and first and second electrodes 31 </ b> E <b> 1 and 31 </ b> E <b> 2 are formed on both outer surfaces. . For example, one of the second electrodes 31E2 is set to the ground potential, and the signal obtained from the reproducing magnetic head element unit 1S of the servo signal is applied to the other electrode 31E1 as an appropriate voltage for obtaining a predetermined tracking servo through the bimorph driver circuit. Apply.

  In this configuration, a conductive chip base 32 is mechanically and electrically connected to the ground potential side of both bimorph elements 31, and the head chip 22 is connected to these chip bases 32. The head chip 22 is grounded to the ground electrode 31E2.

Then, the fine motion actuator 23 is configured by the twin bimorph actuator composed of the pair of bimorph elements 31 described above, and the head chip 22 is followed by fine motion. The fine actuator 23 bends the bimorph element 31 by applying a tracking control signal to the bimorph element 31, and finely moves the head chip 22 disposed therebetween in the multi-channel arrangement direction, that is, the track width direction. Thus, the magnetic head element operates to track the corresponding data track.
The fine actuator 67 can obtain, for example, a displacement amount of ± 20 μm or less at ± 150 volts, and can thereby suppress a tracking error within an allowable deviation.

  The carrier 24 is supported by a coarse actuator 35 schematically shown in FIG. By driving the coarse actuator 35, the head chip 22, the fine actuator 23, the carrier 24, the flexible wiring board 25, and the support member 26 can be integrally moved in the track width direction.

  The coarse actuator 35 has a drive unit 36 such as a stepping motor attached to a fixed substrate such as a chassis of a linear tape drive device. The rotation shaft 37 of the drive unit 36 is arranged in the track width direction, and a ball screw 39 is integrally connected to the rotation shaft 37 via a connector 38 so as to be rotatable. The carrier 24 is formed with a screw hole 40 through which the ball screw 39 is screwed. In this way, by rotating the ball screw 39 by the rotation of the rotation shaft 37 of the drive unit 36, the carrier 24 is roughly moved along the ball screw 39 in the track width direction.

  On the other hand, the pair of flexible wiring boards 25 are formed, for example, on a polyimide-based plastic film by forming wiring patterns that electrically connect the magnetic head elements 1D and 1S of the head chip 2 and the control board 27. . The flexible wiring board 25 is mechanically and electrically connected between the back side of the head chip 22 and the control board 27, and is routed in the manner shown in FIGS.

That is, each flexible wiring board 25 has a first bent surface portion 25A that is folded outward from the back side to the front side of the head chip 22 by about 180 degrees, and the outer side of the head chip 22 from the upper side to the lower side by about 180 degrees. A second bent surface portion 25B that is folded back and a third bent surface portion 25C that is bent outward from the lower side of the head chip 22 by approximately 90 degrees laterally.
Both support members 26 are used to stably hold the bent surface portions 25 </ b> A to 25 </ b> C of the flexible wiring board 25 and are integrally attached to the carrier 24.

  Of the bent surface portions 25A to 25C of the flexible printed circuit board 25, the bent surface portion 25B and the bent surface portion 25C flexibly follow the movement in the track width direction of the magnetic head device 21 driven by the coarse actuator 35, and thereby the head chip 22. And stable electrical conduction between the control board 27 and the control board 27. On the other hand, the bent surface portion 25A ensures a stable electrical continuity between the head chip 22 and the control board 27 by torsionally deforming following the minute movement of the head chip 22 in the track width direction by the fine actuator 23. .

  Here, in the present invention, the processing for reducing the torsional rigidity of the first bent surface portion 25A is performed on the first bent surface portion 25A, which is the torsionally deformed portion of the flexible wiring board 25.

  As the above processing, in the present embodiment, as shown in FIGS. 3 and 4, a plurality of through holes 41 are formed in the first bent surface portion 25A. In particular, these through holes 41 are configured by slots (long holes) extending in parallel with each other in a direction intersecting with the track width direction (the direction of minute movement of the head chip 22) (a direction orthogonal in this example). Yes.

  By reducing the torsional rigidity of the first bent surface portion 25A as described above, it becomes easy to torsionally deform when the head chip 22 is finely moved, and the follow-up operation of the head chip 22 can be made flexible. Unwanted resonance in the servo band can be suppressed.

  Of course, the through hole 41 is formed so as to avoid the wiring region on the first bent surface portion 25A. In addition, it is preferable that the formation length of the slot constituting the through hole 41 is equal to or greater than the bending range of the first bent surface portion 25A, and in a facing relationship connected via the first bent surface portion 25A as in this example. More preferably, it is formed over a region of two plane portions 25A1 and 25A2. The formation width and the number of the formation of the through holes 41 are not particularly limited, and can be set as appropriate according to specifications and the like.

  On the other hand, as another processing for reducing the torsional rigidity of the first bent surface portion 25A, instead of forming the above-described slot-shaped through holes 41 in the first bent surface portion 25A, each of them is parallel to the direction intersecting the track width direction. Even if a plurality of slits are formed, the same effect as described above can be obtained.

  In the magnetic head device 21 of the present embodiment configured as described above, the carrier 24 is moved in the track width direction by the coarse motion actuator 35 described above. As a result, the head chip 22 is moved to a position in a predetermined width direction in a selected predetermined data band of the magnetic tape 11, and each recording / reproducing magnetic head element 1D faces a target data track.

  At this time, the servo signal reproducing magnetic head element unit 1S detects a servo signal from the servo bands located on both sides of the selected data track. The detection signal of the servo signal is sent to the control board 27 via the flexible wiring board 25, and a tracking control signal voltage corresponding to the detection signal is applied to the fine actuator 23. As a result, the head chip 22 is finely moved in the track width direction, and the recording / reproducing magnetic head element is tracking-controlled for each data track.

  According to the present embodiment, since the plurality of through holes 41 are formed in the first bent surface portion 25A of the flexible wiring board 25, the torsional rigidity of the first bent surface portion 25A is reduced, and the torsional deformation is easy. Become. Thereby, it becomes possible to flexibly follow the minute movement of the chip head 22 in the track width direction, and the unnecessary resonance of the head chip 22 in the servo band is suppressed, and the high-accuracy tracking servo function of the magnetic head device 21 is ensured. be able to.

  The effect of the present invention was confirmed using a general-purpose servo analyzer. FIG. 7A shows frequency characteristics of a magnetic head device provided with a flexible wiring board having a conventional structure (FIG. 12) in which the through holes 41 are not formed in the first bent surface portion 25A of the flexible wiring board 25. FIG. On the other hand, FIG. 7B shows frequency characteristics of the magnetic head device 21 of the present invention including the flexible wiring board 25 having the through holes 41.

  Here, the flexible wiring board 25 is made of polyimide, and the formation length of the flat portion 25A1 (FIG. 4) is 21 mm, the formation length of the first bending surface portion 25A (the length of the bending region) is 19 mm, and the thickness is 0.07 mm. The width was 18.3 mm, the number of through holes 41 formed was 4, the formation length was 23 mm, and the formation width was 0.9 mm.

As apparent from FIGS. 7A and 7B, according to the magnetic head device 21 having the through hole 41 of the present invention, the unnecessary resonance generated in the vicinity of 500 Hz (point P) in the magnetic head device having the conventional structure is large. It turns out that it is suppressed.
Further, according to the present invention (FIG. 7B), the output characteristics up to about 1.5 kHz are gentle compared to the conventional structure (FIG. 7A), so that the servo band can be sufficiently increased and tracking can be performed. Servo can be stabilized.

  The embodiment of the present invention has been described above. Of course, the present invention is not limited to this, and various modifications can be made based on the technical idea of the present invention.

  For example, in the above-described embodiment, an example in which a plurality of slot-shaped through holes 41 are formed as processing for reducing the torsional rigidity of the first bent surface portion 25A that is a torsional deformation portion of the flexible wiring board 25 has been described. However, the shape of the through hole 41 is not limited to the slot shape, and may be a round hole, a square hole, or a composite shape thereof.

  In addition, the processing includes processing for reducing torsional rigidity by forming the film thickness of the first bent surface portion 25A of the flexible wiring board 25 thinner than other regions or reducing the width.

  Furthermore, although the above embodiment demonstrated the example which routed the flexible wiring board 25 between the head chip 22 and the control board 27 with the form which has 1st-3rd bending surface part 25A-25C, a flexible wiring board The routing form of 25 is not limited to the above, and can be appropriately changed according to the internal configuration of the tape drive device. Also in this case, the same effect as described above can be obtained by performing a processing for reducing the torsional rigidity on the torsionally deformed portion of the flexible wiring board.

1 is a schematic configuration diagram of a tape drive device according to an embodiment of the present invention. 1 is a perspective view showing a configuration of a magnetic head device 21 according to an embodiment of the present invention. It is an enlarged view of the principal part in FIG. FIG. 4 is a perspective view of the back side of the magnetic head device 21, showing only the head chip 22 and the flexible wiring board 25. 3 is a side view of a twin bimorph actuator that constitutes a fine movement actuator 23. FIG. FIG. 4 is a configuration diagram of a coarse actuator 35 viewed from the back side of the carrier 24. It is a figure which shows the frequency characteristic of a magnetic head apparatus, A is a conventional product and B is the product of invention. It is explanatory drawing of the tape format for linear tapes. It is a head chip front view which shows the example of formation of the magnetic head element for linear tapes. It is a perspective view which shows the structure of the conventional magnetic head apparatus 1. FIG. It is a principal part enlarged view of FIG. It is a perspective view of the back side of the conventional magnetic head device 1, and shows only the head chip 2 and the flexible wiring board 5.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1D ... Recording / reproducing magnetic head element, 1S ... Servo signal reproducing magnetic head element part, 10 ... Tape drive apparatus, 11 ... Magnetic tape, 13 ... Tape cartridge, 21 ... Magnetic head apparatus, 22 ... Head chip, 23 ... Fine movement actuator , 24 ... carrier, 25 ... flexible wiring board, 25A ... first bent surface portion, 25B ... second bent surface portion, 25C ... third bent surface portion, 27 ... control substrate, 31 ... bimorph element, 35 ... coarse actuator, 41 ... Through hole.

Claims (2)

A magnetic head device for linear tape in which a plurality of data tracks extending in the longitudinal direction of the magnetic tape are arranged in the width direction of the magnetic tape,
A head chip in which a plurality of magnetic head elements are arranged in the track width direction on the front surface;
A carrier for supporting the head chip;
A track following mechanism that has a pair of bimorph elements attached between the head chip and the carrier so as to face each other in the track width direction, and that finely moves the head chip in the track width direction;
A coarse screw actuator that has a ball screw screwed to the carrier and a drive unit that rotates the ball screw, and that coarsely moves the head chip in the track width direction by driving the drive unit;
A flexible wiring board that is led out from the back surface of the head chip and exchanges electric signals between the magnetic head element and an external control unit, and is arranged in the track width direction from the back side to the front side of the head chip. A first bent surface portion which is folded back approximately 180 degrees around a parallel first axis and has a plurality of slots or slits formed in a direction intersecting the track width direction; and the track width direction and the magnetic tape A second bent surface portion that is folded about 180 degrees around a second axis that is orthogonal to the longitudinal direction, and a third bent surface portion that is folded about 90 degrees around the second axis, And the first bent surface portion follows the minute movement of the head chip by the track following mechanism by torsional deformation, and the second bent surface portion and the third bent surface portion are The magnetic head apparatus comprising a flexible wiring board is to follow the coarse movement of said head chip by the coarse actuator. A tape drive device comprising a linear tape magnetic head device in which a plurality of data tracks extending in the longitudinal direction of the magnetic tape are arranged in the width direction of the magnetic tape,
The magnetic head device includes:
A head chip in which a plurality of magnetic head elements are arranged in the track width direction on the front surface;
A carrier for supporting the head chip;
A track following mechanism that has a pair of bimorph elements attached between the head chip and the carrier so as to face each other in the track width direction, and that finely moves the head chip in the track width direction;
A coarse screw actuator that has a ball screw screwed to the carrier and a drive unit that rotates the ball screw, and that coarsely moves the head chip in the track width direction by driving the drive unit;
A flexible wiring board that is led out from the back surface of the head chip and exchanges electric signals between the magnetic head element and an external control unit, and is arranged in the track width direction from the back side to the front side of the head chip. A first bent surface portion which is folded back approximately 180 degrees around a parallel first axis and has a plurality of slots or slits formed in a direction intersecting the track width direction; and the track width direction and the magnetic tape A second bent surface portion that is folded about 180 degrees around a second axis that is orthogonal to the longitudinal direction, and a third bent surface portion that is folded about 90 degrees around the second axis, And the first bent surface portion follows the minute movement of the head chip by the track following mechanism by torsional deformation, and the second bent surface portion and the third bent surface portion are Tape drive device including a flexible wiring board, the which is to follow the coarse movement of said head chip by the coarse actuator.

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