JP4254542B2 - Vacuum laminator - Google Patents

Description

  The present invention relates to a vacuum laminating apparatus, and more particularly to a vacuum laminating apparatus that performs a vacuum laminating process on a laminated body such as a solar cell module constituent material.

In recent years, awareness of environmental issues has been increasing on a global scale amid the deterioration of the global environment, such as air pollution and global warming due to increased CO _2, due to the massive consumption of fossil fuels since the Industrial Revolution.

Under these circumstances, solar cells, which are safe, easy to handle and clean energy sources, are greatly expected.
There are various types of solar cells, but single crystal silicon solar cells, polycrystalline silicon solar cells, amorphous silicon solar cells, compound semiconductor solar cells and the like are typical. Among these, amorphous silicon solar cells are capable of producing flexible solar cells at a relatively low cost and can be increased in area, and thus have recently been applied to new fields.

  In general, since a solar cell module is used by being exposed to the outside air, in order to supply a highly reliable element, it is necessary to improve durability against temperature, humidity, and external pressure. One technique is vacuum lamination.

9A and 9B are schematic views of a conventional vacuum laminating apparatus, in which FIG. 9A is a top perspective view and FIG. 9B is a cross-sectional view taken along line AA.
A conventional vacuum laminating apparatus has a plate-like base material 1001, a tubular tube 1003 that is annularly arranged at the upper part thereof, and is provided with a plurality of exhaust ports 1002 on the inner peripheral wall, and further a vacuum pump 1008. have. The tube 1003 is fixed to the base material 1001 by a fixing member 1004. A processing space 1006 for performing a laminating process is formed by a lid member 1005 that covers the entire surface of the annular tube 1003.

  In the vacuum laminating process, first, a sheet-like solar cell module constituting material 1007 constituting the solar cell module is placed and laminated in a vacuum laminating apparatus, and vacuuming is performed by a vacuum pump 1008 to remove air between the materials. A so-called deaeration process is performed. Next, it heats in this vacuumed state. The temperature is raised by heating, the temperature reaches a temperature for crosslinking or curing of the sealing material, and this temperature is maintained for a predetermined time until the sealing material is sufficiently cured. Then, it is cooled, evacuation is stopped, and the pressure is returned to atmospheric pressure.

FIG. 10 is a schematic view of a solar cell module created by a vacuum laminating apparatus.
A surface sealing material 1011 and an outermost surface covering material (surface protective film) 1012 are formed in this order on the surface of the photovoltaic element 1010, and a back surface sealing material 1013 and a back surface covering material 1014 are formed on the back surface of the photovoltaic element 1010. It is formed in order.

  In the conventional vacuum laminating apparatus as shown in FIG. 9, when evacuation is performed, a portion of the lid member 1005 that contacts the tube 1003 is bent at an acute angle. If the use is continued in such a state, cracks are likely to occur in the acute angle portion of the lid member 1005 due to long-term temperature stress. As a result, there is a problem in that leakage occurs and a deaeration failure occurs between the materials of the solar cell module constituent material 1007, bubbles remain in the solar cell module, resulting in an appearance defect.

In order to solve this problem, a technique has been disclosed in which a cushioning material is installed along the inside of the cylindrical tube to improve the steep angle configuration of the lid member (see, for example, Patent Document 1).
FIG. 11 is a schematic cross-sectional view of a conventional vacuum laminating apparatus in which a cushioning material is installed along the inside of the tube.

  In the solar cell module constituent material 1020, a filler flow prevention material 1026 for preventing leakage of the filler filled in the surrounding area is arranged above and below, and a plate-like shape is formed via a net 1022 for forming a ventilation layer. It is disposed on the base material 1021. Further, a buffer material 1024 having an L-shaped cross section, for example, is installed along the inside of the annular tube 1023 as shown in FIG. Then, a cover member 1025 is covered so as to cover the entire surface of the cylindrical tube 1023 and is evacuated.

  In the conventional vacuum laminating apparatus as shown in FIG. 11, when the vacuum laminating apparatus is enlarged in response to the enlargement of the solar cell module, the adhesion between the base material 1021 and the cylindrical tube 1023 is strengthened as the apparatus. It is necessary to improve the rigidity. However, even if the base material 1021 and the tubular tube 1023 can be integrated in a strong state by welding or the like, for example, since the cylindrical member generally has low bending rigidity, it cannot be expected to improve rigidity as a device. There was a problem.

In order to solve this problem, an application has been filed for a vacuum laminating apparatus in which a frame having a triangular cross section is provided on two opposing sides of a plate-like substrate.
FIG. 12 is a top perspective view of a vacuum laminating apparatus in which a frame having a triangular cross section is installed on two opposite sides of a substrate. 13 is a cross-sectional view taken along the line AA in FIG. 12, and FIG. 14 is a cross-sectional view taken along the line BB in FIG.

  The solar cell module constituent material 1030 is disposed on the base material 1031 via the breathable sheet material 1032 disposed above and below the solar cell module constituent material 1030. The frame body 1033 is fixed in an airtight state to two opposite sides of the base material 1031. The frame body 1033 is configured by a plurality of bent surfaces that are bent so that the cross section thereof is triangular. A bending surface 1033 a which is one of those bending surfaces is bent so as to have a certain gap with respect to the base material 1031.

  However, as shown in FIG. 14, the bent surface 1033 a is bent leaving a predetermined sealing range at both ends in the width direction of the frame body 1033. The gap configured in this way becomes an exhaust port 1033h for performing vacuum exhaust.

And the cover member 1035 is covered so that the solar cell module constituent material 1030 may be covered, and the processing space which performs a lamination process is formed. At this time, as shown in FIG. 14, the lid member 1035 has a predetermined overlap with the sealing range. At the time of vacuuming, air is exhausted from the processing space through the exhaust port 1033h.
Japanese Patent Laid-Open No. 9-51111 (paragraph numbers [0025] to [0026], FIG. 5)

By the way, in the above-described vacuum laminating apparatus, the flat base material and the lid member are in contact with each other at both end edges of the lid member on the side where the frame is not disposed, and the airtight state of the processing space is maintained.
FIG. 15 is a cross-sectional view showing a state of laminating processing in a conventional vacuum laminating apparatus, and FIG. 16 is a cross-sectional view taken along line AA in FIG.

  As shown in FIG. 15, in the conventional vacuum laminating apparatus, on the side where the frame is not arranged, both end edges of the lid member 1035 and the flat base material 1031 are in contact with each other during the laminating process, Airtight state is maintained. However, at this time, the lid member 1035 is in close contact with the base material 1031 only by the vacuum differential pressure only at the inner end portion of the contact portion, and is in contact with the base material 1031 by atmospheric pressure at the outer side. The close contact portion becomes a seal point, and a range sandwiched between seal points generated at both end edges of the lid member 1035 is a range where a vacuum differential pressure is generated.

  After the evacuation, as the vacuum laminating apparatus is heated, the lid member 1035 expands due to heat. At this time, at both end edges of the lid member 1035, as shown in FIG. 16, the left and right sides are constrained by the inclined portions of the frame body 1033. Adhesiveness at will decrease.

  However, in the above configuration, since the lid member 1035 is in contact with the flat base material 1031, the cross-sectional secondary moment of the lid member 1035 does not become a value that can sufficiently suppress the lifting at the seal point. As a result, there is a problem that the degree of vacuum in the processing space is reduced due to a leak generated from the floating seal point. Further, since the lid member 1035 is made of an elastic material such as silicon resin, it has been impossible to process the lid member 1035 in advance so as to have a desired cross-sectional second moment.

  This invention is made | formed in view of such a point, and it aims at providing the vacuum laminating apparatus which can suppress a leak and can perform a good-quality laminating process.

In the present invention, in order to solve the above problem, in a vacuum laminating apparatus that performs a vacuum laminating process on a laminate, the substrate on which the laminate is placed and the substrate to be laminated are in contact with the laminate. An air-permeable layer forming part for forming an air-permeable layer on the side, a lid member made of an elastic material for covering the object to be laminated and forming a processing space for performing the vacuum laminating process, and on the substrate are opposed so as to sandwich the laminated body, the uplink at a predetermined angle in the peripheral end direction of the substrate, to the substrate on opposite sides of each of the processing space as an exhaust port for evacuating An exhaust member having an inclined surface having a gap and having a substantially triangular cross section , one exhaust member and the other exhaust member are bridged, and the laminate is sandwiched on the substrate. versus Are arranged, the vacuum laminating apparatus is provided which is characterized by having a guide portion for forming a bent portion at both end edges of the lid member when the vacuum lamination process.

According to the above configuration, when the processing space for performing the vacuum laminating process is formed by the lid member, and the air in the processing space is exhausted through the gap as the exhaust port of the exhaust member, the object to be laminated is subjected to the vacuum laminating process. The both end edges of the lid member on the side where the exhaust member is not disposed are bent by the guide portion, and the sectional moment of inertia of the lid member increases.

  The present invention bridges the exhaust members arranged opposite to each other and arranges the guide portions so as to sandwich the object to be laminated on the base material, so that both end edges of the lid member are formed by the guide portions during the vacuum laminating process. Since the cross-sectional secondary moment of the lid member is increased by bending, the adhesion of the lid member is improved, leakage is suppressed, and a high-quality vacuum laminating process can be performed.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a top perspective view of a vacuum laminating apparatus according to an embodiment of the present invention. 2 is a cross-sectional view taken along the line AA in FIG. 1, and FIG. 3 is a cross-sectional view taken along the line BB in FIG.

  The vacuum laminating apparatus 10 according to the present embodiment includes a substrate 11 on which a body to be laminated (which will be referred to as a solar cell module constituent material in the following description) is placed, a process of covering the body to be laminated and performing a vacuum laminating process. A cover member 14 for forming a space, and an exhaust member 12L that is disposed so as to sandwich the object to be laminated on the base material 11 and has an exhaust port 12h for evacuating the processing space on each facing side, The plate-shaped member 12W, which is disposed so as to cross-link the one exhaust member 12L and the other exhaust member 12L and sandwich the object to be laminated on the base material 11, and both ends in the width direction of the exhaust member 12L are sealed. Plate material 13 to be used. Further, an exhaust port 15 which is a path for connecting the exhaust member 12L and the vacuum pump 110 and a valve 16 are provided.

  The plate-like base material 11 as a component is a member constituting the bottom of the vacuum laminating apparatus 10. In the present embodiment, the substrate 11 has a concavo-convex portion 11a (see FIGS. 2 and 3) formed on the surface in contact with the solar cell module constituent material. The concavo-convex part 11a has a function as a ventilation layer at the time of deaeration, and the pitch of the concavo-convex part 11a is preferably in the range of 0.3 to 0.8 mm and the height difference is in the range of 0.2 to 0.6 mm. Thus, it becomes possible to implement | achieve sufficient air permeability, maintaining the thermal conductivity with respect to a solar cell module constituent material by making the uneven | corrugated | grooved part 11a formed in the base material 11 into a ventilation layer. Moreover, as for the outer periphery of the uneven | corrugated | grooved part 11a, it is desirable to exist outside the outer periphery of the solar cell module constituent material to arrange | position. In the present embodiment, as shown in FIG. 3, the concavo-convex portion 11a reaches the plate member 12W. By setting it as such a structure, the exhaust efficiency of a vacuum laminating apparatus can be improved more, and it can contribute to the suppression by the rise by the bending rigidity increase of the cover member 14 mentioned later.

  In the vacuum laminating apparatus 10 of the present embodiment used in the manufacture of the solar cell module, the properties required for the substrate 11 include heat resistance, rigidity, lightness, and the like. The material used for this member is mainly a metal such as iron or aluminum, but it is desirable to use stainless steel in terms of formability, weldability and corrosion resistance. Moreover, although it is necessary to make it thin in order to reduce a heat capacity and to reduce weight, since rigidity will deteriorate if it makes it thin too much, it is desirable that it is 0.8-2.0 mm in thickness, for example.

  The exhaust member 12 </ b> L is disposed and fixed so as to sandwich the solar cell module constituent material on the base material 11, and both ends in the width direction are sealed by the plate material 13. Since the exhaust member 12L is required to have excellent heat resistance, rigidity, and lightness as in the case of the base material 11, for example, stainless steel is used as the material.

  In the present embodiment, the exhaust member 12L is a member having a triangular cross section having a surface inclined upward at a predetermined angle in the circumferential end direction of the substrate 11, and as shown in FIG. The surface 12La, the second bent surface 12Lb, the third bent surface 12Lc, the fourth bent surface 12Ld, and the fifth bent surface 12Le are configured. In FIG. 2, in order to show the fifth bent surface 12Le, the uneven portion 11a is omitted in the vicinity of this surface.

  The first bent surface 12La and the second bent surface 12Lb are bent substantially at a right angle. The third bending surface 12Lc is bent into a shape having a narrow angle of about 30 ° with respect to the substrate 11. The fourth bending surface 12 </ b> Ld is bent so that a bent portion between the third bending surface 12 </ b> Lc and the fourth bending surface 12 </ b> Ld has a certain gap with respect to the base material 11. In the present embodiment, the height of the gap is 2 mm. By configuring the exhaust member 12L as described above, the lid member 14 is gently bent along the third folding surface 12Lc during the vacuum laminating process, and therefore, a sharp bend that gives stress to the lid member 14 is provided. It is possible to prevent the shape, and it is possible to improve the productivity of the vacuum laminating apparatus by preventing the lid member 14 from cracking. The cross section of the exhaust member 12L may be a substantially triangular shape such as a trapezoid whose top is deformed to a flat side.

  When the fourth bending surface 12Ld is bent, as shown in FIG. 3, the fourth bending surface 12Ld is bent from the third bending surface 12Lc so as to leave a sealed range for preventing air from being exhausted in a predetermined range on both sides in the width direction of the gap. For example, the sealing range is 10 mm. A gap formed by such bending serves as an exhaust port 12h for performing vacuum evacuation. Further, in the sealed range, the fifth bending surface 12Le is bent from the third bending surface 12Lc. The fifth bending surface 12Le is bent so as to be perpendicular to the base material 11. In the present embodiment, since the height of the gap is 2 mm, the height of the fifth bent surface 12Le is also 2 mm.

  In the exhaust member 12L as described above, the exhaust member 12L and the base material 11 form an exhaust space 12v that exhausts air in the processing space from the exhaust port 12h. Further, an exhaust port 15 for connecting to the vacuum pump 110 is inserted into the exhaust space 12v through the plate member 13. In the vacuum laminating process, air is exhausted from the processing space sealed by the lid member 14 to the exhaust space 12v through the exhaust port 12h by the vacuum pump 110, and from the exhaust space 12v through the exhaust port 15. Air is exhausted.

  The plate-like member 12W functions as a guide portion for forming bent portions at both edge portions of the lid member 14 on the side where the exhaust member 12L is not disposed during the vacuum laminating process. Is used as a material. As shown in FIG. 3, this member includes a first bent surface 12Wc and a second bent surface 12We.

  The first bent surface 12Wc is bent so as to be a surface that is inclined upward at a predetermined angle in the circumferential end direction of the substrate 11, and the second bent surface 12We is bent so as to stand upright with respect to the substrate 11. Here, when the angle is steep with respect to the base material 11 or when the angle is nearly flat with respect to the base material 11, the width direction both ends of the plate member 12W and the exhaust member 12L At the corner portion formed by the butting, the lid member 14 is three-dimensionally bent, and the lid member 14 sags and causes a leak. Therefore, it is desirable that the angle be an angle at which the first bent surface 12Wc is moderately gentle with respect to the base material 11. In the present embodiment, this angle is about 30 °. In addition, the height of the second bending surface 12We is desirably 2 mm to 3 mm in order to prevent the lid member 14 from being three-dimensionally bent as described above. In the present embodiment, the height is set to 2 mm, and the structure can be joined to the fifth bent surface 12Le of the exhaust member 12L.

  The plate-like member 12W as described above is abutted so that the second bent surface 12We is perpendicular to the base material 11. Further, both end portions in the width direction of the plate-like member 12W are abutted so that the first bent surface 12Wc and the second bent surface 12We are aligned with the third bent surface 12Lc and the fifth bent surface 12Le of the exhaust member 12L, respectively. .

  Such a butted portion is spot welded by, for example, TIG (Tungsten Inert Gas) welding. In addition, the exhaust member 12L has the outer peripheral side of the substrate 11 and the first bent surface 12La abutted, and is spot-welded at intervals of about 100 mm by, for example, electric resistance welding. By fixing by spot welding in this way, the occurrence of welding distortion can be suppressed and the time required for welding can be shortened, so that the manufacturing cost of the vacuum laminating apparatus can be reduced.

  All the parts joined by the above spot welding are sealed with a sealant material so that there is no leakage during evacuation. In the present embodiment, sealing was performed using a silicon sealant “KE45” (KE45 is a registered trademark of Shin-Etsu Silicone). In addition, it is desirable that the sealant bonding portion is degreased before bonding. Thus, since it is made airtight structure using a sealant material, difficult airtight welding becomes unnecessary, so that the manufacturing cost can be reduced while maintaining the reliability of the vacuum laminating apparatus.

  The plate member 13 is a member for sealing both ends in the width direction of the exhaust member 12L. In the present embodiment, the plate material 13 is spot welded to the base material 11 by TIG welding, for example, as described above, and the joint portion is sealed with a sealant material. In addition, in order to ensure the rigidity of the vacuum laminating apparatus 10, it is desirable that the plate members 13 communicate with each other between the facing exhaust members 12L. Further, by bending both ends of the base material 11 and using this portion as a plate material, the number of manufacturing steps of the vacuum laminating apparatus can be reduced.

  The cover member 14 covers the solar cell module constituent material to form a processing space, presses the solar cell module constituent material against the base material 11 in a state of being evacuated from the exhaust space 12v, and the solar cell module constituent material between the materials of the solar cell module constituent material Used to promote deaeration. Therefore, the characteristics required for the lid member 14 are heat resistance, flexibility, light weight, airtightness when evacuated, and the like. The material used is mainly silicon resin as a material having elasticity, for example, silicon rubber (thickness: 2t (t is a unit of thickness, indicating mm), hardness: 50, silicon resin general-purpose type, Tigers Polymer). Alternatively, fluororubber can be used, but silicon resin is more advantageous in terms of flexibility and cost.

  By the way, since the solar cell module used as a roofing material is elongated, the processing space also has a rectangular shape. However, considering the exhaust efficiency, the exhaust members 12L on the two sides that form the exhaust space 12v are opposed to each other. Long side is desirable.

  That is, when the interval between the opposing exhaust ports 12h is W (see FIG. 2) and the width of the exhaust port is L (see FIG. 3), it is desirable that L ≧ W is satisfied. By satisfying such a condition, the exhaust space 12v is formed on the long side of the substrate 11, and even if the exhaust space 12v is formed only on two opposing sides, it is sufficient for the vacuum laminating process. It is possible to perform evacuation. Thereby, a vacuum laminating process can be performed even for a large-sized solar cell module (for example, a size of 500 × 2000 mm).

FIG. 4 is a schematic configuration diagram of a solar cell module constituent material that is vacuum laminated by the vacuum laminating apparatus of the present embodiment.
The solar cell module constituent material 18 has a laminated structure including a back reinforcing material 18a, a thermal adhesive sealing material 18b, a photovoltaic element 18c, a thermal adhesive sealing material 18d, and a surface covering material 18e from the top. In the present embodiment, the light receiving surface side of the photovoltaic element 18c is disposed on the substrate 11 side (face down), and vacuum lamination processing is performed. Therefore, the outer shape of the surface covering material 18e is different for the purpose of preventing the heat-adhesive sealing materials 18b and 18d flowing out from the solar cell module constituent material 18 from adhering to the base material 11 during the vacuum laminating process. The shape is larger than the constituent material. In the formed solar cell module, light from the outside enters the surface covering material 18e, that is, the transparent resin film on the outermost surface, and reaches the photovoltaic element 18c. The generated electromotive force is taken out from an output terminal (not shown).

  FIG. 5 is a cross-sectional view showing the state of the vacuum laminating process, and FIG. 6 is another cross-sectional view showing the state of the vacuum laminating process. 5 corresponds to FIG. 2 which is an AA cross-sectional view of the vacuum laminating apparatus 10 described above, and FIG. 6 corresponds to FIG. 3 which is a BB cross-sectional view thereof. These drawings show a state in which the processing space 19 is formed by covering the cover member 14 after the solar cell module constituent material 18 as shown in FIG. .

  At the time of the vacuum laminating process, the solar cell module constituent material 18 is disposed on the concavo-convex portion 11 a of the base material 11, and the heat-adhesive sealing materials 18 b and 18 d flowing out from the solar cell module constituent material 18 are further covered therewith. In order to prevent adhesion to the member 14, a release sheet material 21 is disposed. Finally, the lid member 14 is covered. In the case of face-down, the release sheet material 21 is in contact with the back surface reinforcing material 18a of the solar cell module constituent material 18 on the surface. Since the non-breathable material such as a steel plate is used for the back surface reinforcing member 18a, it is not necessary to use a breathable constituent member as the release sheet material 21.

  After completing the arrangement of each member, when the vacuum pump 110 is started and vacuuming of the processing space 19 formed by the lid member 14 is started, the lid member 14 presses the solar cell module constituent material 18 against the base material 11, The air between the materials of the solar cell module constituent material 18 is urged. At this time, the concavo-convex portion 11a formed on the base material 11 becomes a ventilation layer and further promotes deaeration. In a state where the vacuum pump 110 is deaerated, the temperature is raised to a temperature (for example, 150 ° C.) at which the thermoadhesive sealing materials 18b and 18d of the solar cell module constituent material 18 are cured and held until the curing is completed. (Eg 30 minutes). Thereafter, the valve 16 is closed to cool the vacuum laminating apparatus 10 while maintaining the vacuum, and the valve 16 is opened to return the processing space 19 to atmospheric pressure.

  In such a vacuum laminating process, bent portions 14a and 14b are formed by the plate-like member 12W at both end edges of the lid member 14 on the side where the exhaust member 12L is not disposed, as shown in FIG.

FIG. 7 is a diagram illustrating a state of a bent portion formed at an end edge portion of the lid member. This figure corresponds to an enlarged view of the bent portion 14a of FIG.
In this Embodiment, since the uneven | corrugated | grooved part 11a formed on the base material 11 has reached to the time of the plate-shaped member 12W, the process space 19 will also be pulled to the time of the plate-shaped member 12W. The lid member 14 is in close contact with the corner of the plate-like member 12W (the bent portion between the first bent surface 12Wc and the second bent surface 12We), and this close portion becomes a seal point. Since the lid member 14 is pressed down by the vacuum differential pressure at the seal point and inside thereof, the lid member 14 is bent at the seal point formed at the corner of the plate-like member 12W, and then the plate-like member 12W is It inclines up so that the 1st bending surface 12Wc which comprises may be followed. In this way, the bent portion 14a is formed in the lid member 14, and the cross-sectional secondary moment of the lid member 14 is increased.

  As described above, since the moment of inertia of the lid member 14 is increased, the bending rigidity of the lid member 14 is increased and the lid member 14 is difficult to be deformed. Therefore, the lifting of the lid member 14 at the seal point can be sufficiently suppressed. It becomes.

Hereinafter, an outline of a solar cell module manufacturing apparatus to which the vacuum laminating apparatus 10 of the embodiment of the present invention is applied will be described.
FIG. 8 is a schematic configuration diagram of a solar cell module manufacturing apparatus to which the vacuum laminating apparatus of the present embodiment is applied.

The vacuum laminating apparatus 10 disposed in the solar cell module manufacturing apparatus 100 illustrated in FIG. 8 is a cross-sectional view when the solar cell module is disposed in the processing space, and corresponds to FIG.
The solar cell module manufacturing apparatus 100 has, for example, a hot air circulation type heating furnace 101, in which the vacuum laminating apparatus 10 of the present embodiment as described above is installed. The solar cell module manufacturing apparatus 100 shown in FIG. 6 has a configuration in which ten solar cell modules can be created at a time. Each vacuum laminating apparatus 10 is connected to an exhaust manifold 102 in the heating furnace 101 via a valve 16 attached to the exhaust port 15.

At the time of the vacuum laminating process, the vacuum pump 110 is activated, and the heating furnace 101 is turned on and heated while the processing space of the vacuum laminating apparatus 10 is exhausted.
As described above, in the vacuum laminating apparatus 10 according to the embodiment of the present invention, at the time of the vacuum laminating process, both end edges of the lid member 14 are bent by the plate-like member 12W, and the cross-sectional secondary moment of the lid member 14 is increased. Since it increases, the bending rigidity of the cover member 14 increases and it becomes difficult to deform | transform, and it becomes possible to fully suppress the lifting of the cover member 14 at a seal point. Accordingly, the adhesion of the lid member 14 at the seal point is improved, and the leakage to the processing space 19 is sufficiently suppressed, so that a high-quality vacuum laminating process can be performed. For example, in the vacuum laminating apparatus 10 of the present embodiment, the degree of vacuum in the processing space 19 can be maintained at 1 Torr by suppressing leakage to the processing space 19.

  In the above description, the concavo-convex part 11a reaches the plate-like member 12W. However, when the concavo-convex part 11a is formed up to the front of the plate-like member 12W, the concavo-convex part 11a and the plate-like member 12W The lid member 14 and the base material 11 are in close contact with each other, and a seal point is formed. Even in such a case, since the lid member 14 is bent at the sealing point by arranging the plate-like member 12 </ b> W, bent portions are formed at both edge portions of the lid member 14. Therefore, the cross-sectional secondary moment of the lid member 14 is increased, the adhesion of the lid member 14 at the seal point is improved, and leakage can be suppressed.

  In the above description, the plate-like member 12W is used as a guide portion for forming a bent portion at the edge of the lid member 14, but any other plate-like member having a bent cross section in the width direction may be used. But you can. Moreover, it is good also considering what formed such a shape on the base material 11 as a guide part, without using a member.

  In addition to the plate-like body as described above, the guide portion for forming the bent portion at the end edge portion of the lid member 14 is based on a columnar member having a cross section protruding from the base material 11 or a similar cross section. What was formed on the material 11 may be used. By using such a columnar body, the lid member 14 is raised from the base material 11 to form a bent portion during the vacuum laminating process, and the cross-sectional secondary moment of the lid member 14 can be increased. For example, a member having a trapezoidal cross section with a surface inclined upward in the circumferential end direction of the substrate 11 or a rod-shaped member having a circular cross section can be used. In the case of a rod-shaped member having a circular cross section, in order to prevent three-dimensional bending of the lid member 14 at the corner portion formed by the abutting portion between the both ends in the width direction and the exhaust member 12L, the diameter is 2 to 2. It is desirable to be 3 mm. By using such a circular rod-shaped member, the processing cost of the member can be reduced.

  Moreover, although the case where the vacuum laminating process was performed face-down with respect to the solar cell module constituent material 18 was described above, the vacuum laminating process may be performed face-up. In this case, it is desirable to use a breathable component as the release sheet material 21.

  Moreover, although the to-be-laminated body was the solar cell module constituent material 18 in the above, it is not limited to this, For example, it can apply also to manufacture of the semiconductor-related apparatus which needs a vacuum laminating process.

  The present invention is applied to a solar cell module, a semiconductor device, and the like that require a vacuum laminating process in the manufacturing process.

It is a top perspective view of the vacuum laminating device of an embodiment of the invention. It is AA sectional drawing of FIG. It is BB sectional drawing of FIG. It is a schematic block diagram of the solar cell module constituent material vacuum-processed by the vacuum laminating apparatus of this Embodiment. It is sectional drawing which shows the mode of a vacuum laminating process. It is another sectional drawing which shows the mode of a vacuum laminating process. It is a figure which shows the mode of the bending part formed in the edge part of a cover member. It is a schematic block diagram of the solar cell module manufacturing apparatus to which the vacuum laminating apparatus of this Embodiment is applied. It is the schematic of the conventional vacuum laminating apparatus, (A) is an upper perspective view, (B) is AA sectional drawing. It is the schematic of the solar cell module produced with the vacuum laminating apparatus. It is general | schematic sectional drawing of the conventional vacuum laminating apparatus which installed the shock absorbing material along the inner side of a cylinder pipe. It is an upper perspective view of a vacuum laminating apparatus in which a frame having a triangular cross section is installed on two opposite sides of a substrate. It is AA sectional drawing of FIG. It is BB sectional drawing of FIG. It is sectional drawing which shows the mode of the vacuum laminating process with the conventional vacuum laminating apparatus. It is AA sectional drawing of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Vacuum laminating apparatus 11 Base material 11a Uneven part 12L Exhaust member 12W Plate member 12h Exhaust port 13 Plate material 14 Lid member 15 Exhaust port 16 Valve 18 Solar cell module constituent material 19 Processing space

Claims (9)

In a vacuum laminating apparatus that performs a vacuum laminating process on the object to be laminated,
A substrate for mounting the object to be laminated;
A ventilation layer forming portion for forming a ventilation layer on the side of the substrate that contacts the laminate,
A lid member made of an elastic material for covering the object to be laminated and forming a processing space for performing the vacuum laminating process;
Oppositely arranged so as to sandwich the object to be laminated on the base material, and rises at a predetermined angle in the circumferential end direction of the base material, and the processing space is evacuated to the base material on each opposing side An exhaust member having a substantially triangular cross section with an inclined surface having a gap as an exhaust port for
One exhaust member and the other exhaust member are bridged and arranged opposite to each other to sandwich the object to be laminated on the base material, and bent at both end edges of the lid member during the vacuum laminating process A guide part for forming a part,
A vacuum laminating apparatus comprising:   The vacuum laminating apparatus according to claim 1, wherein the guide portion is formed of a plate-like body and has a bent cross section in the width direction.   3. The vacuum laminating apparatus according to claim 2, wherein the guide portion is configured by a surface that stands upright with respect to the base material and a surface that slopes upward at a predetermined angle in a circumferential end direction of the base material. .   2. The vacuum laminating apparatus according to claim 1, wherein the guide portion is a columnar body having a cross section protruding from the base material, and the lid member is raised from the base material.   The vacuum laminating apparatus according to claim 4, wherein the guide portion is formed of a bar-shaped member having a circular cross section.   The vacuum laminating apparatus according to claim 1, wherein the air-permeable layer forming portion reaches the guide portion.   2. The vacuum laminating apparatus according to claim 1, wherein the air-permeable layer forming portion is formed of a concavo-convex portion formed on a surface of the base material on a side in contact with the laminated body.   2. The vacuum laminating apparatus according to claim 1, wherein a relationship between the gap L and the gap W between the gaps is L ≧ W.   The base material and the exhaust member, the base material and the guide portion, and the exhaust member and the guide portion are joined by spot welding, and each joint portion is sealed with a sealant material. The vacuum laminator according to claim 1.

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