JP4241002B2 - Linear guide device - Google Patents

Description

で計算される。
【００３３】
図４に示すように、クラウニング部２０が、直線状である場合、上記と同様にして、接触角方向の断面内で見たクラウニング部の傾きをθｃとすると、クラウニング部有効長Ｌｃｅは、
【数２】

で計算される。
【００３４】
ここで、スライダ軌道面１９の全長Ｌ_１のうち、転動体１３が予圧を受ける部分の長さをスライダ軌道面有効長と呼ぶ。そして、スライダ軌道面有効長Ｌｅｓは、
【数３】

で計算される。
【００３５】
ただし、上記［数３］で計算されるスライダ軌道面有効長Ｌｅｓが、Ｌｅｓ＞Ｌ_１−２Ｃとなる場合、または、クラウニング部が無い場合には、
【数４】

で計算される。ここで、Ｃはスライダ端部の面取り部２１の長さである。
【００３６】
スライダ軌道面有効長Ｌｅｓは、転動体１３のオーバーサイズ量をδ_０によって変化するため、上記［数３］のＬｅｓもδ_０によって変化する。通常のリニアガイド装置では、用途毎に転動体１３のオーバーサイズ量を変更して用いている。例えば、工作機械等では、剛性を必要とするため、オーバーサイズ量は大きくなる。
また、高速な駆動が必要な測定器等で、摺動抵抗を小さくしたい場合には、オーバーサイズ量を小さくする。オーバーサイズ量が特定できる場合には、スライダ軌道面１９の有効長として、上記［数３］のＬｅｓを用いても良い。しかし、通常の場合は、スライダ軌道面の有効長として、上記Ｌｅｓの代わりに、オーバーサイズ量に因らずに定められる次式のＬｅを用いるのが良い。
【数５】

このＬｅは、オーバーサイズを変化させた場合の、最大のＬｅｓ（＝Ｌ_１−２Ｃ）と、最小のＬｅｓ（＝Ｌ_１−２Ｌｃ）との平均値である。Ｌｅは、広い範囲のオーバーサイズに対する平均的なスライダ軌道面有効長を表す。上記式５は、クラウニング部２０，２０が同一形状である場合に用いる。
【００３７】
クラウニング部２０，２０の形状が異なる場合、Ｌｅは、次式で計算される。
【数６】

ここで、Ｌｃ_１，Ｌｃ_２：左右端部のクラウニング部長さ
Ｃ_１，Ｃ_２：左右端部の面取り部長さ
である。
【００３８】
次に、以降の計算に際して、以下を仮定する。
レール軌道面１５，１６の波打ちは、正弦波として表す。
転動体１３と軌道面１５，１６，１９との接触は、スライダ軌道面１９に一様に、連続的に分布する線形ばねとする。
【００３９】
図５に示すように、直動方向にｘ軸をとり、レール軌道面１５，１６の位置ｘにおける上下方向の波打ち量ｙをとると、波打ち量ｙは次式によって表される。このとき、Ａは定数であり、レール軌道面１５，１６の波打ちの片振幅である。
【数７】

【００４０】
そして、ｉ番目のスライダ軌道面が位置ｘにおいて受ける単位長さあたりの荷重Ｆｉは、次式で表される。
【数８】

ここで、
Ｘｓ：スライダ軌道面の中心座標
Δｚ：スライダの上方向への変位量
Δφ：スライダのピッチング方向への変位量
ｋｉ：ｉ番目のスライダ軌道面の転動体・軌道面接触部の単位長さあたりの上下方向ばね係数(転動体と軌道面の仕様、接触角によって決まる。)
【００４１】
従って、スライダ１２が４列の転動体列から受ける荷重の和Ｆは、スライダ中心のｘ座標をｘｓ、スライダ軌道面有効長をＬｅとして、次式により表される。
【数９】

ここで、Ｋ＝ｋ_１＋ｋ_２＋ｋ_３＋ｋ_４
【００４２】
そして、スライダ１２に作用する上方向の外力をＦ₀とすると、力の釣り合いにより次式が成り立つ。
【数１０】

【００４３】
また、上式［数９］と［数１０］とにより、スライダ１２の上下方向の変位は、
【数１１】

により表される。
【００４４】
また、波打ちに起因するスライダ１２の上下方向変位の片振幅Δｖは、波打ちの片振幅Ａに対する比として、次式で表される。
【数１２】

ここで、ξ＝Ｌｅ／Ｐである。
【００４５】
図６は、ξとΔｖ／Ａの大きさ関係を表している。Δｖ／Ａは、ξの増加に伴って、はじめは急激に減少する。しかし、ξ≧１．７では、Δｖ／Ａの変化は小さい。従って、上下変位を小さくするには、次式を満たすようにすることが必要である。
【数１３】

また、ξが次式の範囲にある場合、Δｖ／Ａは０．１以下になり、上下変位を極めて小さくできる。
【数１４】

ここで、ｍは１以上の整数である。
【００４６】
一方、スライダ１２が４列の転動体列から受けるピッチング方向のモーメントの和Ｍは、次式により表される。
【数１５】

【００４７】
また、スライダ１２に作用するピッチング方向の外部モーメントをＭ_０とすると、力の釣り合いから、次式が成り立つ。
【数１６】

【００４８】
そして、上式［数１５］及び［数１６］より、スライダ１２のピッチング方向の変位は次式にて表される。
【数１７】

【００４９】
波打ちに起因するスライダ１２のピッチング方向の変位における片振幅Δｐは、波打ちの最大傾斜Θに対する比として、次式にて表される。ここで、Θ＝２πＡ／Ｌである。
【数１８】

ここで、ξ＝Ｌｅ／Ｐである。
【００５０】
続いて、図７は、ξとΔｐ／Θの大きさ関係を表している。Δｐ／Θは、ξの増加に伴って、はじめ急激に増加する。しかし、ξ≧１．３では、Δｐ／Θの変化は小さい。従って、ピッチング変位を小さくするには、次式を満たすようにすることが必要である。
【数１９】

なお、図６と図７とを比べることによって、上下変位とピッチング変位とを比較すると、ピッチング変位の方が、ξの増加による変位の低減効果が大きいことがわかる。
【００５１】
上記式［数１３］及び［数１９］から、ξ≧１．７の範囲にすることにより、上下変位とピッチング変位の両方を効果的に低減することができる。この場合、特に、ピッチング方向の変位を低減することができる。
また、［数１４］及び［数１９］を満たすようにすることで、ピッチング方向の変位を低減するとともに、上下変位を著しく低減することができる。
【００５２】
第１実施形態のリニアガイド装置１０によれば、スライダ軌道面１９の全長Ｌ_１と、クラウニング部２０の長さＬｃと、面取り部２１の長さＣと、の関係において、
Ｌｅ＝Ｌ_１−（Ｌｃ＋Ｃ）
で定まるスライダ軌道面１９の有効長さＬｅとレール軌道面波打ち波長Ｐとの関係が、Ｌｅ／Ｐ≧１．７に設定されている。
これによって、選択設定されたスライダ軌道面１９の有効長さにより、スライダ１２がどの位置に移動した場合においても、スライダ１２の姿勢変化がごく小さくなるように、スライダ軌道面１９の有効長さが定められる。よって、レール軌道面１５，１６に波打ちが生じていても、スライダ１２の姿勢変化を小さく保つことができ、ボルト締結等によって生じる軌道面の周期的な変形がスライダ１２の運動精度に及ぼす影響を小さくすることができる。
【００５３】
また、レール軌道面１５，１６に生じる波打ち波長をＰとし、ｍを１以上の整数として、スライダ軌道面１９の有効長さＬｅが、Ｌｅ／Ｐ≧１．３で且つ、ｍ−０．１≦Ｌｅ／Ｐ≦ｍ＋０．１により設定することにより、スライダ１２の姿勢変化がごく小さくなるように、スライダ軌道面１９の有効長さと波打ち波長との関係が定められる。これによって、レール軌道面１５，１６に波打ちが生じていても、スライダ１２の姿勢変化を小さく保つことができ、ボルト締結等によって生じる軌道面の周期的な変形がスライダ１２の運動精度に及ぼす影響を小さくすることができる。
【００５４】
そして、レール軌道面１５，１６に生じる波打ち波長Ｐとして、案内レール１１に設けられたボルト孔１７のボルトピッチを選べば、ボルト締結によって生じる軌道面の周期的な変形がスライダ１２の運動精度に及ぼす影響を小さくすることができる。
さらに、レール軌道面１５，１６に生じる波打ち波長Ｐとして、案内レール１１の側部に配される横押し板（図１８参照）の取付間隔を選べば、横押し板の取付けによって生じる軌道面の周期的な変形がスライダ１２の運動精度に及ぼす影響を小さくすることができる。
【００５５】
次に、図８を用いて本発明に係る第２実施形態を説明する。
第２実施形態のリニアガイド装置３０は、案内レール１１の両側面に、ボールである転動体１３を摺動させるための一対のレール軌道面３１が形成されており、２列の転動体１３を配している。
そして、第２実施形態のリニアガイド装置３０は、第１実施形態と同様にして、上記［数１］〜［数１９］を用いることによって、転動体１３が予圧を受けるスライダ軌道面の有効長さＬｅが、
Ｌｅ／Ｐ≧１．７
または、
Ｌｅ／Ｐ≧１．３ かつ ｍ−０．１≦Ｌｅ／Ｐ≦ｍ＋０．１（ｍ：１以上の整数）により設定されている。
【００５６】
次に、図９を用いて本発明に係る第３実施形態を説明する。
第３実施形態のリニアガイド装置４０は、案内レール１１の両側面に、ボールである転動体１３を摺動させるための三対のレール軌道面４１,４２,４３が形成されており、３列の転動体１３を配している。
そして、第３実施形態のリニアガイド装置４０は、第１実施形態と同様にして、上記［数１］〜［数１９］を用いることによって、転動体１３が予圧を受けるスライダ軌道面の有効長さＬｅが、
Ｌｅ／Ｐ≧１．７
または、
Ｌｅ／Ｐ≧１．３ かつ ｍ−０．１≦Ｌｅ／Ｐ≦ｍ＋０．１（ｍ：１以上の整数）により設定されている。
【００５７】
続いて、図１０を用いて本発明に係る第４実施形態を説明する。
第４実施形態のリニアガイド装置５０は、案内レール１１の両側面に、円すいころである転動体１３を摺動させるための二対のレール軌道面５１,５２が形成されており、２列の転動体１３を配している。
そして、第４実施形態のリニアガイド装置５０は、第１実施形態と同様にして、上記［数１］〜［数１９］を用いることによって、転動体１３が予圧を受けるスライダ軌道面の有効長さＬｅが、
Ｌｅ／Ｐ≧１．７
または、
Ｌｅ／Ｐ≧１．３ かつ ｍ−０．１≦Ｌｅ／Ｐ≦ｍ＋０．１（ｍ：１以上の整数）により設定されている。
【００５８】
【実施例】
上述した第１実施形態、第３実施形態に関して、実施例及び比較例を以下のように行った。
【００５９】
＜実施例１＞
第１実施形態のリニアガイド装置１０において、
レール軌道面数：４個
ボール接触角：α＝50°
レール軌道面の半径：Ｄａ＝4.7625mm
ボールオーバーサイズ量：ｒ＝2.4765mm（ボール直径の52％）
クラウニング部：形状＝円弧、長さＬｃ＝6.45mm、半径Ｒｃ＝1710mm、なお、クラウニング部は、加工時は溝底方向に半径Ｒｃ´＝1100mmで加工、接触方向に換算した半径Ｒｃは、Ｒｃ＝Ｒｃ´／cosα＝1710ｍｍとなる。
面取り量：Ｃ＝0.2mm
案内レールのボルトピッチ：Ｐ＝80mm
【００６０】
本発明によると、上記［数１３］及び［数１９］より、スライダ軌道面有効長Ｌｅとして、以下の範囲が望ましい。
Ｌｅ≧136mm
また、上記［数１４］及び［数１９］を満たすようにする場合に、Ｌｅは以下の範囲になる。
Ｌｅ≧104mm かつ、
72mm≦Ｌｅ≦88mm（ｍ＝１）
152mm≦Ｌｅ≦168mm（ｍ＝２）
232mm≦Ｌｅ≦248mm（ｍ＝３）
そして、スライダ軌道面の全長Ｌ_１とスライダ軌道面有効長Ｌｅとの関係式［数５］より、スライダ軌道面の全長Ｌ_１の範囲は、以下のようになる。

【００６１】
本発明による実施例と、本発明によらない比較例として、以下を選ぶ。
＜実施例１ａ＞ Ｌ_１＝145mm・・・［数１３］と［数１９］を満たす。
＜実施例１ｂ＞ Ｌ_１＝165mm・・・［数１４］と［数１９］を満たす。
＜比較例１ｃ＞ Ｌ_１＝70mm・・・本発明によらない。
実施例と比較例について、レール軌道面にボルトピッチの波打ちがある場合でのスライダの運動精度を調べた。ここで、レール軌道面の波打ちの片振幅は、Ａ＝0.0005mmである。
【００６２】
図１１に示すように、実施例１ａ，１ｂと、比較例１ｃについて、スライダの移動に伴う上下方向の変位を調べた結果、実施例１ａ，１ｂともに、比較例１ｃに比べて、上下方向の変位が小さい。特に、［数１４］と［数１９］を同時に満たすようにした実施例１ｂでは、上下方向の変位が極めて小さくなっていることが明らかになった。
【００６３】
図１２に示すように、実施例１ａ，１ｂと、比較例１ｃについて、スライダの移動に伴うピッチング方向の変位を調べた結果、実施例１ａ，１ｂともに、比較例１ｃに比べて、ピッチング方向の変位が小さくなっていることが明らかになった。
【００６４】
＜実施例１の変形例＞
第３実施形態のリニアガイド装置４０において、
レール軌道面数：６組
ボール接触角：α＝45°
レール軌道面の半径：Ｄａ＝4.7625mm

クラウニング部：形状＝円弧、長さＬｃ＝11mm、半径Ｒｃ＝4530mm、なお、クラウニング部は、加工時は溝底方向に半径Ｒｃ´＝3200mmで加工、接触方向に換算した半径Ｒｃは、Ｒｃ＝Ｒｃ´／cosα＝4530mmとなる。
面取り量：Ｃ＝0.2mm
案内レールのボルトピッチ：Ｐ＝40mm この場合、実施例１に比べて小さいので、スライダ長さを短くできる。
【００６５】
実施例１と同様にして、本発明によると、スライダ軌道面の全長は、以下の範囲が望ましい。

【００６６】
本発明による実施例と、本発明によらない比較例として、以下を選ぶ。
＜実施例１ｄ＞ Ｌ_１＝149mm・・・式１３と式１９を満たす。
＜実施例１ｅ＞ Ｌ_１＝128mm・・・式１４と式１９を満たす。
＜比較例１ｆ＞ Ｌ_１＝40mm・・・本発明によらない。
実施例と比較例について、レール軌道面にボルトピッチの波打ちがある場合でのスライダの運動精度を調べた。ここで、レール軌道面の波打ちの片振幅は、Ａ＝0.0005mmである。
【００６７】
図１３に示すように、上下変位を低減する実施例１ｄ，１ｅと、比較例１ｆについて、スライダの移動に伴う上下方向の変位を調べた結果、実施例１ｄ，１ｅは、比較例１ｆに比べて、上下方向の変位が小さい。特に、［数１４］と［数１９］を同時に満たすようにした実施例１ｅでは、上下方向の変位が極めて小さくなっていることが明らかになった。
【００６８】
図１４に示すように、ピッチング変位を低減する実施例１ｄ，１ｅと、比較例１ｆについて、スライダの移動に伴うピッチング方向の変位を調べた結果、実施例１ｄ，１ｅは、比較例１ｆに比べて、ピッチング方向の変位が小さくなっていることが明らかになった。
【００６９】
なお、本発明は前述した実施形態に限定されるものではなく、適宜な変形、改良等が可能である。
例えば、ボールや円すいころである転動体の列は２列、４列、６列に限らず、それ以上の複数対配されたリニアガイド装置に本発明を用いても良い。
また、本発明のリニアガイド装置を複数組み合わせることにより、テーブル装置として用いても良い。
【００７０】
【発明の効果】
以上説明したように、本発明によれば、スライダ軌道面の全長Ｌ_１と、クラウニング部の長さＬｃと、面取り部の長さＣとから、
Ｌｅ＝Ｌ_１−（Ｌｃ＋Ｃ） によって定まるスライダ軌道面の有効長さＬｅは、レール軌道面に生じる波打ち波長をＰとして、
Ｌｅ／Ｐ≧１．７ の範囲に設定されている。
したがって、スライダがどの位置に移動した場合においても、スライダの姿勢変化がごく小さくなるように、スライダ軌道面の有効長さが定められる。これによって、レール軌道面に波打ちが生じていても、スライダの姿勢変化を小さく保つことができ、ボルト締結等によって生じる軌道面の周期的な変形がスライダの運動精度に及ぼす影響を小さくすることができる。
また、レール軌道面に生じる波打ち波長をＰとし、ｍを１以上の整数として、スライダ軌道面の有効長さＬｅが、
Ｌｅ／Ｐ≧１．３で且つ、ｍ−０．１≦Ｌｅ／Ｐ≦ｍ＋０．１
により設定されれば、スライダの姿勢変化がごく小さくなるように、スライダ軌道面の有効長さと波打ち波長との関係が定められる。これによって、レール軌道面に波打ちが生じていても、スライダの姿勢変化を小さく保つことができ、ボルト締結等によって生じる軌道面の周期的な変形がスライダの運動精度に及ぼす影響を小さくすることができる。
また、レール軌道面に生じる波打ち波長として、案内レールに設けられたボルト孔のボルトピッチを選ぶことにより、ボルト締結によって生じる軌道面の周期的な変形がスライダの運動精度に及ぼす影響を小さくすることができる。
さらに、レール軌道面に生じる波打ち波長として、案内レールの側部に配される横押し板の取付間隔を選ぶことにより、横押し板の取付けによって生じる軌道面の周期的な変形がスライダの運動精度に及ぼす影響を小さくすることができる。
【図面の簡単な説明】
【図１】本発明に係る第１実施形態のリニアガイド装置の外観斜視図である。
【図２】（ａ）は図１に示したリニアガイド装置における断面図、（ｂ）は図２（ａ）におけるＡ−Ａ線断面図である。
【図３】図１に示したリニアガイド装置におけるスライダの拡大断面図である。
【図４】図１に示したリニアガイド装置におけるスライダの拡大断面図である。
【図５】図１に示したリニアガイド装置におけるレール軌道面の波打ち量の説明図である。
【図６】スライダの上下方向変位の片振幅の特性図である。
【図７】スライダのピッチング方向変位の片振幅の特性図である。
【図８】本発明に係る第２実施形態のリニアガイド装置の外観斜視図である。
【図９】本発明に係る第３実施形態のリニアガイド装置の断面図である。
【図１０】本発明に係る第４実施形態のリニアガイド装置の断面図である。
【図１１】スライダの移動に伴う上下方向の変位を調べたグラフである。
【図１２】スライダの移動に伴うピッチング方向の変位を調べたグラフである。
【図１３】スライダの移動に伴う上下方向の変位を調べたグラフである。
【図１４】スライダの移動に伴うピッチング方向の変位を調べたグラフである。
【図１５】従来のリニアガイド装置を説明する参考図である。
【図１６】（ａ），（ｂ），（ｃ）は図１５に示したリニアガイド装置における波打ち現象を説明する各参考図である。
【図１７】図１５とは異なる従来のリニアガイド装置を説明する参考図である。
【図１８】（ａ），（ｂ）は図１７とは異なる従来のリニアガイド装置を説明する参考図である。
【符号の説明】
１０，３０，４０，５０ リニアガイド装置
１１ 案内レール
１２ スライダ
１３ 転動体
１５，１６，３１，４１，４２，４３，５１，５２ レール軌道面
１９ スライダ軌道面
２０ クラウニング部
２１ 面取り部
８１ 横押し板[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a linear guide device used in various machines such as a semiconductor manufacturing apparatus, a precision processing machine, and a precision measuring instrument.
[0002]
[Prior art]
The linear guide device used to guide the guided object linearly includes a guide rail extending in the axial direction, a slider disposed on the guide rail and assembled to be movable in the axial direction of the guide rail, and a ball What is provided with the rolling element which is is (for example, refer patent document 1).
[0003]
Rail raceways for sliding the rolling elements are formed on both side surfaces of the guide rail, and the slider raceway surface for sliding the rolling elements in the rolling element circulation path that holds the rolling elements while circulating them. Is formed.
[0004]
In the rail surface of the guide rail, a plurality of bolt holes penetrating vertically are formed along the axial direction. The guide rail is fixed to the processing table by a plurality of bolts being screwed into the processing table through the bolt holes.
[0005]
The slider has a slide surface on the lower surface of the guide rail, and the moving body of various machines such as semiconductor manufacturing equipment, precision processing machines, and precision measuring instruments is fixed by bolt fastening. When moving, the rolling elements circulate in the rolling element circulation path of the slider while rolling between the rail raceway surface of the guide rail and the slider raceway surface of the slider, thereby moving the guide rail in the axial direction. To support smoothly.
[0006]
As shown in the reference diagram of FIG. 15, in the linear guide device 70, the guide rail 71 has a plurality of bolt holes 72 formed in the axial direction. The guide rail 71 is fixed by being screwed.
[0007]
A movable body of various machines such as a semiconductor manufacturing apparatus, a precision processing machine, and a precision measuring instrument is fixed to the slider 74. The slider 74 moves in the axial direction of the guide rail 71 via a rolling element that is disposed between the rail track surface of the guide rail 71 and the slider track surface of the slider 74 so as to freely roll.
[0008]
In such a linear guide device 70, when the guide rail 71 is bolted to the work table as shown in the reference diagrams of FIGS. 16A and 16B, the bolt 73 is fixed at the bolt fastening positions a1 and a2. The space between the seat surface and the bottom surface of the guide rail 71 is compressed by the axial force of the bolt 73. As a result, the guide rail 71 mainly elastically deforms at the bolt fastening positions a1 and a2, the rail raceway surface 75 of the guide rail 71 sinks due to the surrounding elastic deformation, and the rail raceway surface 75 has a undulation phenomenon corresponding to the bolt pitch. appear. Such a wavy phenomenon of the rail track surface 75 directly affects the motion accuracy of the slider 74 traveling on the guide rail 71.
[0009]
As shown in FIG. 16C, for example, in the case where the rail raceway surface 75 of the guide rail 71 is wavy in the vertical direction, the linear guide device used for precise applications is for preventing the slider 74 from rattling. Since a preload is applied to the rolling elements, the preload within the slider needs to be balanced in the state where no external force is applied to the slider 74. For this reason, when the slider 74 is in the position A, the slider 74 is inclined counterclockwise. Subsequently, when the slider 74 moves to the position B, the slider 74 is tilted clockwise.
As described above, when the rail raceway surface 75 has a undulation phenomenon, the slider 74 changes its posture along with the movement. The slider 74 causes a posture variation in the vertical direction in the same manner as the posture variation in the pitching direction. Further, when the rail raceway surface 75 is wavy in the left-right direction, the slider 74 also changes its posture in the left-right direction as well as the yawing direction.
[0010]
As a method for preventing the wavy phenomenon of the rail raceway surface in the guide rail, when machining the rail raceway surface, a method is known in which the guide rail is bolted to the machining table with a prescribed fastening torque. And also at the time of use of a linear guide apparatus, a guide rail is bolt-fastened with the same fastening torque as the time of a process. In this way, if the rate of elastic deformation of the guide rail at the time of processing is the same as that at the time of use, the waviness of the rail track surface at the time of use can be reduced.
However, in reality, there are variations in axial force at the time of bolt fastening, and differences in the dimensions and materials of the mounting base between processing and use. For this reason, it is difficult to make the amount of change in the rail raceway perfectly match during processing and use. Therefore, it is difficult to completely prevent the rail track surface from corrugating.
[0011]
In order to solve these problems, the applicants defined in Patent Document 1 below the counterbore depth of the bolt holes provided in the guide rail so that the waviness of the rail surface can be reduced. This makes it possible to reduce the deformation of the rail track surface even if there is some variation in the axial force at the time of bolt fastening.
[0012]
[Patent Document 1]
Japanese Patent Laid-Open No. 8-303459 (page 3, FIG. 1)
[0013]
[Problems to be solved by the invention]
However, recently, in order to reduce the weight of the machine, the mounting space has become thinner and the use of light metal using aluminum alloy has been promoted, and the dimensions and materials of the mounting space are always the same during processing and use. It has become difficult to make.
Therefore, a difference is easily generated in the deformation amount of the rail raceway surface between processing and use. Also in the said patent document 1, reduction of the wavy phenomenon of a rail track surface may become inadequate.
[0014]
Moreover, it takes a considerable amount of time and labor to fasten the bolts during processing. From the viewpoint of productivity, a quick fixing method such as a magnet chuck is desired.
As shown in FIG. 17, in a linear guide device that is fixed to a processing table by screwing a bolt into a screw hole 78 provided in a bottom surface 77 arranged on the lower surface of the guide rail 76, the fixing at the time of processing is performed. A magnet chuck is effective for quick operation.
However, in the fixing method using the magnet chuck, it is difficult to prevent the rail raceway surface from being waved in the state of use, that is, after the bolt is tightened.
[0015]
Further, the rail raceway surface may be processed without fixing the guide rail to the processing table. This is the case when performing processing by rolling. Also in this case, it is difficult to prevent the wavy phenomenon on the rail raceway surface in the state after the bolt is fastened.
[0016]
Further, as shown in FIGS. 18A and 18B, the guide rail 84 may be fixed to the machine base 85 by pressing against the lateral reference plane 83 using the lateral pushing plate 81 and the bolt 82. is there. Also in this case, the lateral pushing plate 81 causes the rail raceway surface to undulate in the left-right direction at the mounting period of the lateral pushing plate 81, and it is difficult to prevent this waving.
[0017]
As described above, it is very difficult to prevent the rail raceway surface from being wavy, and the deterioration of the slider motion accuracy due to the rail raceway surface is often problematic.
[0018]
The present invention has been made in view of the above circumstances, and an object thereof is to provide a linear guide device capable of reducing the influence of periodic deformation of a raceway surface caused by bolt fastening or the like on the motion accuracy of a slider. And
[0019]
[Means for Solving the Problems]
    The said subject which concerns on this invention is following (1)-(5) Can be solved.
(1) a guide rail having a rail track surface, a slider having a slider track surface disposed opposite to the rail track surface and moving along the rail track surface, and the rail track surface and the slider track surface. A linear guide device provided with rolling elements arranged so as to be freely rotatable between them, and P is a wavy wavelength generated on the rail raceway surface,The effective length Le of the slider raceway surface, where m is an integer greater than or equal to 1,
Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1
The linear guide device is characterized in that it is set to.
[0021]
(2(2) The bolt pitch of the bolt holes provided in the guide rail is selected as the waved wavelength P generated on the rail raceway surface.1)The linear guide device described.
[0022]
(3(2) The wave spacing wavelength P generated on the rail track surface is selected as the mounting interval of the laterally pushing plates disposed on the side portions of the guide rail.1)The linear guide device described.
[0023]
(4) A chamfered portion is formed at the end of the slider raceway surface.₁The length of the chamfered portion is C, and the slider raceway surface effective length Le is
Le = L₁-2C
Claims (1) to () characterized in that3).
[0024]
(5) A crowning portion is formed near the end of the slider raceway surface, and a chamfered portion is formed at the end of the crowning portion.₁The length of the crowning portion is Lc, the length of the chamfered portion is C, and the slider raceway surface effective length Le is
Le = L₁-(Lc + C)
Claims (1) to () characterized in that3).
[0025]
  According to the linear guide device having the above configuration, the wavy wavelength generated on the rail raceway surface is P, the effective length of the slider raceway surface is Le,When m is an integer of 1 or more, the effective length Le of the slider raceway surface is
Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1
Is set, the relationship between the effective length of the slider track surface and the wavy wavelength is determined so that the change in the attitude of the slider becomes very small. As a result, even if the rail track surface is wavy, the change in the posture of the slider can be kept small, and the influence of periodic deformation of the track surface caused by bolt fastening etc. on the slider motion accuracy can be reduced. it can.
If the bolt pitch of the bolt holes provided in the guide rail is selected as the wavy wavelength generated on the rail raceway surface, the influence of periodic deformation of the raceway surface caused by bolt fastening on the slider motion accuracy can be reduced. it can.
Furthermore, if the mounting distance of the lateral pushing plate arranged on the side of the guide rail is selected as the wavy wavelength generated on the rail raceway surface, the periodic deformation of the raceway surface caused by the installation of the lateral pushing plate will contribute to the slider motion accuracy. The influence exerted can be reduced.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is an external perspective view of the linear guide device according to the first embodiment of the present invention, FIG. 2A is a cross-sectional view of the linear guide device shown in FIG. 1, and FIG. 2B is A in FIG. FIG. 3 is an enlarged sectional view of the slider in the linear guide device shown in FIG. 1, FIG. 4 is an enlarged sectional view of the slider in the linear guide device shown in FIG. 1, and FIG. 5 is the linear guide device shown in FIG. FIG. 6 is a characteristic diagram of the half amplitude of the displacement in the vertical direction of the slider, FIG. 7 is a characteristic diagram of the half amplitude of the displacement in the pitching direction of the slider, and FIG. 8 is a second diagram according to the present invention. FIG. 9 is a cross-sectional view of a linear guide device according to a third embodiment of the present invention. FIG. 10 is a cross-sectional view of the linear guide device according to the fourth embodiment of the present invention. 11 is the top of the slider movement 12 is a graph in which the displacement in the pitching direction accompanying the movement of the slider is examined, FIG. 13 is a graph in which the displacement in the vertical direction accompanying the movement of the slider is examined, and FIG. 14 is a graph in accordance with the movement of the slider. It is the graph which investigated the displacement of a pitching direction. In the following embodiments, members and the like having the same configurations and functions as those already described are denoted by the same reference numerals in the drawings, and the description thereof is simplified or omitted.
[0027]
As shown in FIG. 1, a linear guide device 10 according to a first embodiment of the present invention includes a guide rail 11 and a slider 12 that is disposed on the guide rail 11 and is movably assembled in the axial direction of the guide rail 11. And a plurality of rolling elements 13 which are balls.
[0028]
A rail surface 14 is formed on the upper surface of the guide rail 11, and rail track surfaces 15 and 16 for sliding the rolling elements 13 are formed on the upper and lower sides of the guide rail 11 in two rows. A plurality of bolt holes 17 penetrating vertically are formed in the rail surface 14 along the axial direction. The guide rail 11 is fixed to the processing table by bolts being screwed into the processing table via the bolt holes 17.
[0029]
The slider 12 is formed with a slider raceway surface 19 for sliding the rolling element 13 in a rolling element circulation path 18 that holds the rolling element 13 while circulating it.
[0030]
As shown in FIG. 2A, the rail track surfaces 15 and 16 of the guide rail 11 are arranged in pairs on both sides via the rail surface 14, and the rolling elements 13 are arranged in four rows.
[0031]
As shown in FIG. 2B, near the both end portions of the slider raceway surface 19 of the slider 12, there are formed gently inclined surface-like arcuate or linear crowning portions 20, 20. Chamfered portions 21 and 21 are formed at the ends of the portions 20 and 20. In the crowning portion 20, the rolling elements 13 do not receive a load in the vicinity of the end portion of the slider raceway surface 19.
[0032]
As shown in FIG. 3, when the crowning portion 20 has an arc shape, the length of the portion of the total length Lc of the crowning portion 20 where the rolling element 13 receives a load is referred to as a crowning portion effective length Lce. Then, the oversize amount of the rolling element 13 is set to δ₀And the radius of the crowning portion seen in the cross section in the contact angle direction is Rc, the crowning portion effective length Lce is:
[Expression 1]

Calculated by
[0033]
As shown in FIG. 4, when the crowning portion 20 is linear, the crowning portion effective length Lce is defined as θc when the inclination of the crowning portion seen in the cross section in the contact angle direction is θc in the same manner as described above.
[Expression 2]

Calculated by
[0034]
Here, the total length L of the slider raceway surface 19₁Of these, the length of the portion where the rolling element 13 receives the preload is referred to as the slider track surface effective length. And the slider track surface effective length Les is
[Equation 3]

Calculated by
[0035]
However, the slider track effective length Les calculated by the above [Equation 3] is Les> L₁-2C or when there is no crowning part
[Expression 4]

Calculated by Here, C is the length of the chamfered portion 21 at the end of the slider.
[0036]
The slider raceway surface effective length Les indicates the oversize amount of the rolling element 13 by δ.₀Therefore, Les in [Expression 3] is also δ.₀It depends on. In a normal linear guide device, the oversize amount of the rolling element 13 is changed for each application. For example, since a machine tool or the like requires rigidity, the oversize amount becomes large.
In addition, when it is desired to reduce the sliding resistance in a measuring instrument that requires high-speed driving, the oversize amount is reduced. When the oversize amount can be specified, Les in the above [Equation 3] may be used as the effective length of the slider raceway surface 19. However, in the normal case, as the effective length of the slider raceway surface, it is preferable to use the following expression Le that is determined regardless of the oversize amount, instead of the above-mentioned Les.
[Equation 5]

This Le is the maximum Les (= L when the oversize is changed.₁-2C) and the minimum Les (= L₁-2Lc). Le represents an average slider track surface effective length for a wide range of oversizes. The above formula 5 is used when the crowning portions 20, 20 have the same shape.
[0037]
When the shapes of the crowning portions 20, 20 are different, Le is calculated by the following equation.
[Formula 6]

Where Lc₁, Lc₂: Length of crowning part at left and right ends
C₁, C₂: Chamfer length at left and right ends
It is.
[0038]
Next, in the following calculation, the following is assumed.
The waviness of the rail track surfaces 15 and 16 is expressed as a sine wave.
The contact between the rolling element 13 and the raceway surfaces 15, 16, and 19 is a linear spring that is uniformly and continuously distributed on the slider raceway surface 19.
[0039]
As shown in FIG. 5, when the x-axis is taken in the linear motion direction and the vertical wavy amount y at the position x of the rail track surfaces 15 and 16 is taken, the wavy amount y is expressed by the following equation. At this time, A is a constant, and is the half amplitude of the undulation of the rail track surfaces 15 and 16.
[Expression 7]

[0040]
The load Fi per unit length received by the i-th slider raceway surface at the position x is expressed by the following equation.
[Equation 8]

here,
Xs: Center coordinates of slider track surface
Δz: Slider upward displacement
Δφ: Slider displacement in the pitching direction
ki: Vertical spring coefficient per unit length of the rolling element / race surface contact portion of the i-th slider raceway surface (determined by the specifications of the rolling element and the raceway surface and the contact angle).
[0041]
Therefore, the sum F of the loads that the slider 12 receives from the four rolling element rows is expressed by the following equation, where the x coordinate of the slider center is xs and the effective length of the slider raceway surface is Le.
[Equation 9]

Where K = k₁+ K₂+ K₃+ K₄
[0042]
The upward external force acting on the slider 12 is F₀Then, the following equation holds according to the balance of forces.
[Expression 10]

[0043]
Further, according to the above equations [Equation 9] and [Equation 10], the displacement of the slider 12 in the vertical direction is
## EQU11 ##

It is represented by
[0044]
Also, the piece amplitude Δv of the vertical displacement of the slider 12 caused by the undulation is expressed by the following equation as a ratio to the undulation piece amplitude A.
[Expression 12]

Here, ξ = Le / P.
[0045]
FIG. 6 shows the magnitude relationship between ξ and Δv / A. At first, Δv / A rapidly decreases as ξ increases. However, when ξ ≧ 1.7, the change in Δv / A is small. Therefore, in order to reduce the vertical displacement, it is necessary to satisfy the following equation.
[Formula 13]

When ξ is in the range of the following equation, Δv / A is 0.1 or less, and the vertical displacement can be extremely small.
[Expression 14]

Here, m is an integer of 1 or more.
[0046]
On the other hand, the sum M of the moments in the pitching direction received by the slider 12 from the four rows of rolling elements is expressed by the following equation.
[Expression 15]

[0047]
Further, the external moment in the pitching direction acting on the slider 12 is expressed as M.₀Then, from the balance of force, the following equation holds.
[Expression 16]

[0048]
From the above equations [Equation 15] and [Equation 16], the displacement of the slider 12 in the pitching direction is expressed by the following equation.
[Expression 17]

[0049]
The piece amplitude Δp in the displacement in the pitching direction of the slider 12 caused by the undulation is expressed by the following equation as a ratio to the maximum inclination Θ of the undulation. Here, Θ = 2πA / L.
[Formula 18]

Here, ξ = Le / P.
[0050]
Next, FIG. 7 shows the magnitude relationship between ξ and Δp / Θ. Δp / Θ increases rapidly as ξ increases. However, when ξ ≧ 1.3, the change in Δp / Θ is small. Therefore, in order to reduce the pitching displacement, it is necessary to satisfy the following equation.
[Equation 19]

By comparing FIG. 6 with FIG. 7, it can be seen that the vertical displacement and the pitching displacement are compared, and the pitching displacement has a greater effect of reducing the displacement due to the increase of ξ.
[0051]
From the above equations [Equation 13] and [Equation 19], both vertical displacement and pitching displacement can be effectively reduced by setting ξ ≧ 1.7. In this case, in particular, the displacement in the pitching direction can be reduced.
Further, by satisfying [Equation 14] and [Equation 19], the displacement in the pitching direction can be reduced and the vertical displacement can be remarkably reduced.
[0052]
According to the linear guide device 10 of the first embodiment, the total length L of the slider raceway surface 19.₁In the relationship between the length Lc of the crowning portion 20 and the length C of the chamfered portion 21,
Le = L₁-(Lc + C)
The relationship between the effective length Le of the slider raceway surface 19 and the rail raceway surface undulation wavelength P is set to Le / P ≧ 1.7.
As a result, the effective length of the slider track surface 19 is set so that the change in the posture of the slider 12 becomes very small regardless of the position of the slider 12, depending on the effective length of the slider track surface 19 selected and set. Determined. Therefore, even if the rail track surfaces 15 and 16 are wavy, the change in the posture of the slider 12 can be kept small, and the periodic deformation of the track surface caused by bolt fastening or the like has an effect on the motion accuracy of the slider 12. Can be small.
[0053]
The effective length Le of the slider raceway surface 19 is Le / P ≧ 1.3, and m−0.1, where P is the wavy wavelength generated on the rail raceway surfaces 15 and 16, and m is an integer of 1 or more. By setting ≦ Le / P ≦ m + 0.1, the relationship between the effective length of the slider raceway surface 19 and the waving wavelength is determined so that the change in the posture of the slider 12 becomes very small. Thereby, even if the rail raceway surfaces 15 and 16 are wavy, the change in the posture of the slider 12 can be kept small, and the periodic deformation of the raceway surface caused by bolt fastening or the like affects the motion accuracy of the slider 12. Can be reduced.
[0054]
If the bolt pitch of the bolt holes 17 provided in the guide rail 11 is selected as the waved wavelength P generated on the rail track surfaces 15 and 16, the periodic deformation of the track surface caused by the bolt fastening increases the motion accuracy of the slider 12. The influence exerted can be reduced.
Furthermore, if the mounting interval of the laterally pushing plates (see FIG. 18) arranged on the side of the guide rail 11 is selected as the undulating wavelength P generated on the rail raceway surfaces 15 and 16, the raceway surface caused by the attachment of the laterally pushing plates is selected. The influence of the periodic deformation on the motion accuracy of the slider 12 can be reduced.
[0055]
Next, a second embodiment according to the present invention will be described with reference to FIG.
In the linear guide device 30 according to the second embodiment, a pair of rail raceway surfaces 31 for sliding the rolling elements 13 that are balls are formed on both side surfaces of the guide rail 11. Arranged.
And the linear guide apparatus 30 of 2nd Embodiment uses the said [Equation 1]-[Equation 19] similarly to 1st Embodiment, By using the said [Equation 1]-[Equation 19], the effective length of the slider track surface in which the rolling element 13 receives a preload Le
Le / P ≧ 1.7
Or
It is set by Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1 (m: an integer of 1 or more).
[0056]
Next, a third embodiment according to the present invention will be described with reference to FIG.
In the linear guide device 40 of the third embodiment, three pairs of rail track surfaces 41, 42, 43 for sliding the rolling elements 13, which are balls, are formed on both side surfaces of the guide rail 11. The rolling elements 13 are arranged.
And the linear guide apparatus 40 of 3rd Embodiment uses the said [Equation 1]-[Equation 19] similarly to 1st Embodiment, By this, the effective length of the slider track surface to which the rolling element 13 receives a preload Le
Le / P ≧ 1.7
Or
It is set by Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1 (m: an integer of 1 or more).
[0057]
Subsequently, a fourth embodiment according to the present invention will be described with reference to FIG.
In the linear guide device 50 according to the fourth embodiment, two pairs of rail raceway surfaces 51 and 52 for sliding the rolling elements 13 that are tapered rollers are formed on both side surfaces of the guide rail 11. A rolling element 13 is provided.
And the linear guide apparatus 50 of 4th Embodiment uses the said [Equation 1]-[Equation 19] similarly to 1st Embodiment, and the effective length of the slider track surface in which the rolling element 13 receives a preload is used. Le
Le / P ≧ 1.7
Or
It is set by Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1 (m: an integer of 1 or more).
[0058]
【Example】
With respect to the first embodiment and the third embodiment described above, examples and comparative examples were performed as follows.
[0059]
<Example 1>
In the linear guide device 10 of the first embodiment,
Number of rail track surfaces: 4
Ball contact angle: α = 50 °
Rail raceway radius: Da = 4.7625mm
Ball oversize amount: r = 2.4765mm (52% of ball diameter)
Crowning part: shape = arc, length Lc = 6.45 mm, radius Rc = 1710 mm, the crowning part is processed with a radius Rc ′ = 1100 mm in the groove bottom direction during processing, and the radius Rc converted to the contact direction is Rc = Rc '/ cosα = 1710 mm.
Chamfering amount: C = 0.2mm
Guide rail bolt pitch: P = 80mm
[0060]
According to the present invention, from the above [Equation 13] and [Equation 19], the following range is desirable as the slider raceway surface effective length Le.
Le ≧ 136mm
Further, when satisfying the above [Equation 14] and [Equation 19], Le is in the following range.
Le ≧ 104mm and
72mm ≦ Le ≦ 88mm (m = 1)
152mm ≦ Le ≦ 168mm (m = 2)
232mm ≦ Le ≦ 248mm (m = 3)
The total length L of the slider raceway surface₁From the relational expression [Equation 5] between the slider track surface effective length Le and the total length L of the slider track surface.₁The range of is as follows.

[0061]
The following is selected as an example according to the present invention and a comparative example not according to the present invention.
<Example 1a> L₁= 145 mm ... [Equation 13] and [Equation 19] are satisfied.
<Example 1b> L₁= 165 mm ... [Equation 14] and [Equation 19] are satisfied.
<Comparative Example 1c> L₁= 70 mm ... not according to the present invention.
Regarding the example and the comparative example, the motion accuracy of the slider when the rail raceway surface has a undulating bolt pitch was investigated. Here, the half amplitude of the wave of the rail track surface is A = 0.0005 mm.
[0062]
As shown in FIG. 11, as a result of examining the displacement in the vertical direction accompanying the movement of the slider for Examples 1a and 1b and Comparative Example 1c, both Examples 1a and 1b are more vertically aligned than Comparative Example 1c. Small displacement. In particular, in Example 1b in which [Equation 14] and [Equation 19] are satisfied simultaneously, it has been clarified that the vertical displacement is extremely small.
[0063]
As shown in FIG. 12, as a result of examining the displacement in the pitching direction accompanying the movement of the slider for Examples 1a and 1b and Comparative Example 1c, both of Examples 1a and 1b are more effective in the pitching direction than Comparative Example 1c. It became clear that the displacement was getting smaller.
[0064]
<Modification of Example 1>
In the linear guide device 40 of the third embodiment,
Number of rail track surfaces: 6 sets
Ball contact angle: α = 45 °
Rail raceway radius: Da = 4.7625mm

Crowning part: shape = arc, length Lc = 11 mm, radius Rc = 4530 mm, the crowning part is processed with a radius Rc ′ = 3200 mm in the groove bottom direction during processing, and the radius Rc converted to the contact direction is Rc = Rc ′ / cosα = 4530 mm.
Chamfering amount: C = 0.2mm
Bolt pitch of the guide rail: P = 40 mm In this case, the slider length can be shortened because it is smaller than the first embodiment.
[0065]
Similarly to the first embodiment, according to the present invention, the total length of the slider raceway surface is preferably in the following range.

[0066]
The following is selected as an example according to the present invention and a comparative example not according to the present invention.
<Example 1d> L₁= 149 mm: Expressions 13 and 19 are satisfied.
<Example 1e> L₁= 128 mm ... Expression 14 and Expression 19 are satisfied.
<Comparative Example 1f> L₁= 40 mm ... not according to the present invention.
Regarding the example and the comparative example, the motion accuracy of the slider when the rail raceway surface has a undulating bolt pitch was investigated. Here, the half amplitude of the wave of the rail track surface is A = 0.0005 mm.
[0067]
As shown in FIG. 13, as a result of examining the displacement in the vertical direction accompanying the movement of the slider in Examples 1d and 1e for reducing the vertical displacement and Comparative Example 1f, Examples 1d and 1e are compared with Comparative Example 1f. The vertical displacement is small. In particular, in Example 1e that satisfies [Equation 14] and [Equation 19] at the same time, it has been clarified that the vertical displacement is extremely small.
[0068]
As shown in FIG. 14, as a result of examining the displacement in the pitching direction accompanying the movement of the slider in Examples 1d and 1e for reducing the pitching displacement and Comparative Example 1f, Examples 1d and 1e are compared with Comparative Example 1f. Thus, it became clear that the displacement in the pitching direction was small.
[0069]
In addition, this invention is not limited to embodiment mentioned above, A suitable deformation | transformation, improvement, etc. are possible.
For example, the rows of rolling elements such as balls or tapered rollers are not limited to 2, 4 and 6 rows, and the present invention may be applied to a plurality of linear guide devices arranged in pairs.
Moreover, you may use as a table apparatus by combining multiple linear guide apparatuses of this invention.
[0070]
【The invention's effect】
As described above, according to the present invention, the total length L of the slider raceway surface.₁And the length Lc of the crowning portion and the length C of the chamfered portion,
Le = L₁The effective length Le of the slider raceway surface determined by − (Lc + C) is defined as P, where the wavy wavelength generated on the rail raceway surface is P.
The range of Le / P ≧ 1.7 is set.
Therefore, the effective length of the slider track surface is determined so that the change in the attitude of the slider becomes very small regardless of the position of the slider. As a result, even if the rail track surface is wavy, the change in the posture of the slider can be kept small, and the influence of periodic deformation of the track surface caused by bolt fastening etc. on the slider motion accuracy can be reduced. it can.
Further, the wave length generated on the rail track surface is P, m is an integer of 1 or more, and the effective length Le of the slider track surface is
Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1
Is set, the relationship between the effective length of the slider track surface and the wavy wavelength is determined so that the change in the attitude of the slider becomes very small. As a result, even if the rail track surface is wavy, the change in the posture of the slider can be kept small, and the influence of periodic deformation of the track surface caused by bolt fastening etc. on the slider motion accuracy can be reduced. it can.
In addition, by selecting the bolt pitch of the bolt holes provided in the guide rail as the wavy wavelength generated on the rail raceway surface, the effect of periodic deformation of the raceway surface caused by bolt fastening on the slider's motion accuracy is reduced. Can do.
In addition, by selecting the mounting interval of the laterally pushing plate arranged on the side of the guide rail as the waved wavelength generated on the railing raceway surface, the periodic deformation of the raceway surface caused by the laterally pushing plate attachment can cause the slider motion accuracy. Can be reduced.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a linear guide device according to a first embodiment of the present invention.
2A is a cross-sectional view of the linear guide device shown in FIG. 1, and FIG. 2B is a cross-sectional view taken along line AA in FIG.
FIG. 3 is an enlarged sectional view of a slider in the linear guide device shown in FIG.
4 is an enlarged sectional view of a slider in the linear guide device shown in FIG.
FIG. 5 is an explanatory diagram of a wavy amount of a rail track surface in the linear guide device shown in FIG. 1;
FIG. 6 is a characteristic diagram of a half amplitude of a vertical displacement of a slider.
FIG. 7 is a characteristic diagram of a half amplitude of displacement in the pitching direction of the slider.
FIG. 8 is an external perspective view of a linear guide device according to a second embodiment of the present invention.
FIG. 9 is a sectional view of a linear guide device according to a third embodiment of the present invention.
FIG. 10 is a sectional view of a linear guide device according to a fourth embodiment of the present invention.
FIG. 11 is a graph obtained by examining the vertical displacement accompanying the movement of the slider.
FIG. 12 is a graph showing the displacement in the pitching direction accompanying the movement of the slider.
FIG. 13 is a graph obtained by examining the vertical displacement accompanying the movement of the slider.
FIG. 14 is a graph in which the displacement in the pitching direction accompanying the movement of the slider is examined.
FIG. 15 is a reference diagram for explaining a conventional linear guide device;
16 (a), (b), and (c) are reference diagrams for explaining the undulation phenomenon in the linear guide device shown in FIG.
FIG. 17 is a reference diagram for explaining a conventional linear guide device different from FIG. 15;
18A and 18B are reference views for explaining a conventional linear guide device different from FIG.
[Explanation of symbols]
10, 30, 40, 50 Linear guide device
11 Guide rail
12 Slider
13 Rolling elements
15, 16, 31, 41, 42, 43, 51, 52 Rail track surface
19 Slider raceway surface
20 Crowning Club
21 Chamfer
81 Lateral push plate

Claims (5)

A guide rail having a rail track surface, a slider having a slider track surface disposed opposite to the rail track surface and moving along the rail track surface, and a rail between the rail track surface and the slider track surface. A linear guide device comprising rolling elements arranged freely,
The wave length generated on the rail track surface is P, m is an integer of 1 or more, and the effective length Le of the slider track surface is
Le / P ≧ 1.3 and m−0.1 ≦ Le / P ≦ m + 0.1
A linear guide device characterized in that it is set to. 2. The linear guide device according to claim 1, wherein a bolt pitch of a bolt hole provided in the guide rail is selected as the corrugated wavelength P generated on the rail track surface. 2. The linear guide device according to claim 1, wherein an installation interval of a laterally pressing plate disposed on a side portion of the guide rail is selected as the undulating wavelength P generated on the rail track surface. A chamfered portion is formed at an end of the slider raceway surface, and the total length of the slider raceway surface is L. ₁ The length of the chamfered portion is C, and the slider raceway surface effective length Le is
Le = L ₁ -2C
The linear guide device according to claim 1, wherein the linear guide device is used. A crowning portion is formed near the end portion of the slider raceway surface, and a chamfered portion is formed at an end portion of the crowning portion. ₁ The length of the crowning portion is Lc, the length of the chamfered portion is C, and the slider raceway surface effective length Le is
Le = L ₁ -(Lc + C)
The linear guide device according to claim 1, wherein the linear guide device is used.

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