JP4232040B2 - Magnetic head actuator and magnetic disk device using the same - Google Patents

Description

  The present invention relates to a head actuator of a magnetic disk device and a magnetic disk device using the same.

  A magnetic disk device records and reproduces information by scanning a magnetic head on a rotating ferromagnetic medium, that is, a magnetic disk, and is widely used as the center of a storage device that supports the modern information society. Yes. The magnetic head is housed in a slider, and the slider floats on the magnetic disk while maintaining a nanometer-order gap during recording and reproduction. The driving force for moving the magnetic head to a predetermined position is usually generated by a voice coil motor. The coil of the voice coil motor is connected to an arm rotatably supported by a pivot, and a magnetic head slider is attached from the end of the arm via a suspension made up of a load beam and a gimbal. The load beam is a spring material that generates a load that balances the flying height of the slider, and the gimbal supports the slider and elastically deforms on a surface other than the surface parallel to the disk surface. A spring material that absorbs the tilt associated with the assembly. With this structure, the magnetic head can move to a predetermined track on the rotating disk while maintaining a stable state.

  In recent years, the recording density of magnetic disk devices has continued to increase (that is, the track width has become narrower), and the magnetic head must be accurately positioned on this narrow track. Therefore, it is necessary to improve the head positioning accuracy. is there. Conventionally, the positioning of the head has been performed only by a large actuator such as the voice coil motor described above, but it does not have sufficient accuracy for narrowing the track width. Therefore, a mechanism and a microactuator for performing high-precision positioning have become indispensable for high recording density disk devices.

  The present inventor has proposed microactuators (Japanese Patent Application Nos. 2003-1904, 1929, and 1949) using electromagnetic force in order to achieve high-precision positioning. This microactuator is formed by connecting a rotor part and a stator part with two leaf springs (referred to as microbeams), and is manufactured by bending together with a gimbal part of a suspension.

  The cross-section of the micro beam is a rectangle having a high aspect ratio or a shape close thereto, and the thickness in the tracking direction is thin, and the direction perpendicular to it, that is, the direction in which the load beam of the suspension applies a load to the magnetic head slider is thick. As a result, the micro beam supports the rotor so as to be swingable with respect to the tracking direction, and exhibits sufficiently high rigidity with respect to the load direction. Permanent magnets and coils are arranged on the rotor and stator, and high-precision positioning control in the track width direction is realized as a second-stage voice coil motor. This micro-actuator system has a structure in which a slider is driven via a gimbal portion, and hence is referred to as a “slider drive type” hereinafter.

  As the performance of magnetic disk devices increases, the application range is expanded to various fields including television image recording devices and car navigation systems. In a small magnetic disk apparatus having a magnetic disk diameter of less than 2.5 inches, adoption in portable devices such as a digital still camera, a video camera, and a music player has been studied or put into practical use. For such applications, the impact resistance of the device is important. As countermeasures against impacts, it is conceivable to reduce the overall weight of the device, to reduce the size and shape of the slider with a shock-absorbing housing, and to control it so as to avoid impacts. It has been broken.

The cross-sectional shape of the microbeam in the slider-driven microactuator previously proposed by the present inventor is about 0.03 × 0.005, and may be easily deformed when subjected to a strong impact. In this case, if the cross-sectional area of the beam is increased and the impact resistance and rigidity are increased, the spring constant in the tracking direction of the microbeam also increases, so that the volumes of the permanent magnet and the coil need to be increased. However, if the mass of the suspension tip is easily increased, the resonance frequency is lowered and the inertia is increased, so that the control by the coarse actuator becomes difficult, so the accuracy of the head positioning by the two-stage actuator cannot be improved. . For these reasons, it is difficult to apply the slider-driven microactuator to a portable recording apparatus.
In addition, the following is mentioned as literature which shows the prior art relevant to this invention.

US Pat. No. 6,295,185 US Pat. No. 6,078,473 Fan et al. , IEEE TRANSACTIONS ON MAGNETICS. VOL. 35, NO. 2, MARCH 1999, p. 1000-1005 Koganezawa et al. , IEEE TRANSACTIONS ON MAGNETICS. VOL. 35, NO. 2, MARCH 1999, p. 988-992 Koganezawa et al. , IEEE TRANSACTIONS ON MAGNETICS. VOL. 32, NO. 5, SEPTEMBER 1996, p. 3908-3910

  In view of the above-described conventional problems, the present invention provides an actuator at the tip of the arm of the voice coil motor and drives the entire suspension to increase the size of the actuator, increase the cross-sectional area of the microbeam, An object of the present invention is to provide a magnetic head actuator of a magnetic disk device that is strong against damage and a magnetic disk device using the same.

The present invention has arrived at the present invention as a result of intensive studies to achieve the above object, and the present invention provides the following magnetic head actuator and a magnetic disk device using the same.
Claim 1: An actuator provided at the tip of an arm of a voice coil motor, which swings a magnetic head slider via a suspension, having a fixing part to the arm, and one end side of this fixing part is the tip of the arm Is provided with a rotor portion that is fixed together with the stator portion and supported by a metallic micro beam formed by bending at the other end, and is provided with a permanent magnet in the stator portion and a coil in the rotor portion, or A coil is placed in the stator, and a permanent magnet is placed in the rotor. A current is passed through the coil in the magnetic field formed by the permanent magnet to cause displacement of the microbeam, and it is attached to the suspension fixed to the rotor and beyond. was a magnetic head slider configured to swing, the micro beam, a voice coil motor arm A long piece that is integrally connected to both side edges of the fixing portion to the end, folded back at a right angle toward the stator side along these both side edges, and extends further forward than the front end portion of the fixing portion side edges. Bend 180 ° inward (first bend), and further 180 ° inward (second bend opposite to the first bend) in front of both ends of the fixed portion. The magnetic head actuator of the magnetic disk apparatus according to claim 1, wherein the rotor portion is integrally connected via the continuous portion .
Claim 2: The fixing portion and the rotor portion are bridged by long pieces at both end portions and connected to each other, the intermediate portions of the long pieces are valley-folded by about 180 °, and the rotor portion is attached to the fixing portion. Next, of the long pieces bent in this way, the intermediate part of the rotor part and the connecting side piece are each folded by about 180 °, and the leading edge of the fixed part and the base edge of the rotor part are mutually connected. 2. The magnetic head actuator according to claim 1, wherein the fixed portion, the micro beam, and the rotor portion are configured by being close to each other and further folding the long piece at a right angle toward the stator portion side.
[ 3] The magnetic head actuator according to [1] or [2] , wherein the microbeam is integrated with a fixed portion to the arm tip of the voice coil motor, a rotor portion, and a load beam portion of the suspension.
[ 4 ] The magnetic head actuator according to any one of [1] to [ 3 ], wherein the stator portion is made of a ferromagnetic material.
[ 5 ] The magnetic head actuator according to any one of [1] to [ 4] , wherein the stator portion is integral with an arm of a voice coil motor, and the arm is made of a ferromagnetic material.
[ 6 ] The magnetic head actuator according to any one of [1] to [ 5 ], wherein the rotor portion is made of a ferromagnetic material.
Claim 7 to form a magnetic circuit, according to any one of claims 1 to 6, characterized in that the auxiliary yoke at a position opposed to the stator portion across the rotor portion is attached Magnetic head actuator.
Claim 8 : Two sets of the microbeam, the rotor part and the suspension part are arranged so as to sandwich the arm at the tip part of the arm of the voice coil motor, and one stator part is provided at the arm tip part. the magnetic head actuator of any one of claims 1 to 7, characterized in that.
Claim 9 : The suspension load beam and gimbal are attached to the tip of the voice coil motor arm that moves about the pivot axis of rotation that is rotated by the operation of the voice coil motor via the magnetic head actuator, and the suspension tip is magnetically A slider having a head is attached, and the arm is operated so as to move, so that the slider moves a predetermined track on the magnetic disk, and the magnetic head actuator includes: The voice coil motor arm is provided with a component that constitutes a fixed portion to the tip of the voice coil motor arm, a micro beam and a rotor portion on which a coil or permanent magnet is disposed, a stator portion on which a permanent magnet or coil is disposed, and an auxiliary yoke. Fixed and permanent magnet In the magnetic circuit consisting of a stone, stator and auxiliary yoke, the permanent magnet and the coil are arranged facing each other with a slight gap, and the microbeam is fixed to the tip of the voice coil motor arm. A long piece that is integrally connected to both side edges of the portion, folded back at a right angle toward the stator portion along the both side edges, and extends forward from the front end portion of the both side edges of the fixed portion 180 inward. Bend (first bend), and further bend 180 ° inward (second bend in the direction opposite to the first bend) in front of the tips on both side edges of the fixed portion. The rotor part is integrally connected via the part, and the rotor part swings in the left-right direction by Lorentz force by energizing the coil placed in the magnetic field created by the permanent magnet. With suspension, magnetic head A magnetic disk drive characterized in that a slider equipped with a rocker swings.
Claim 10 : The fixing portion and the rotor portion are bridged by long pieces at both end portions, respectively, and a base is used. The intermediate portion of each of the long pieces is valley-folded by about 180 °, and the rotor portion is attached to the fixing portion. Next, of the long pieces bent in this way, the intermediate part of the rotor part and the connecting side piece are each folded by about 180 °, and the leading edge of the fixed part and the base edge of the rotor part are mutually connected. 10. The magnetic disk device according to claim 9 , wherein the parts constituting the fixed portion, the micro beam, and the rotor portion are formed by being close to each other and further folding the long piece at a right angle toward the stator portion side. .

  According to the present invention, it is possible to provide a magnetic head actuator that has high reliability, can achieve accurate positioning with a simple structure, and has impact resistance. Furthermore, the productivity of the magnetic head actuator can be increased by simplifying the structure of the actuator.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, specific embodiments of the magnetic head actuator of the present invention will be described in detail.
FIG. 1 is a plan view showing an example of a magnetic disk device 4 provided with a magnetic head actuator 2 of the present invention. In this example, a coarse actuator for positioning a magnetic head slider (not shown) on a predetermined track on the magnetic disk 8 includes a voice coil motor (VCM) arm 12 that moves about a pivot axis 10. It is composed of a voice coil motor (VCM) 14. The load beam of the suspension 16 is attached to the tip of the VCM arm 12 via the magnetic head actuator 2 of the present invention.

  FIG. 2 shows an exploded perspective view of the magnetic head actuator 2 of the present invention, but the power supply line to the coil is not shown for simplicity. This magnetic head actuator 2 includes a fixed portion 18 to the tip of the VCM arm, microbeams 20 and 22, and a component 26 constituting a rotor portion 24. A coil 28 is attached to the rotor portion 24, and a stator portion 30 is permanently attached. A magnet 32 is arranged. The stator unit 30 preferably uses a ferromagnetic material to form a magnetic circuit. In order to increase the efficiency of the magnetic circuit, an auxiliary yoke 34 made of a ferromagnetic material may be attached. The fixed part 18 to the tip of the VCM arm 18, the parts 26 constituting the microbeams 20 and 22 and the rotor part 24, the stator part 30 and the auxiliary yoke 34 are VCM arms (not shown) by caulking pieces, screws, rivets, welding, etc. Fixed to.

  More specifically, in the component 26 constituting the fixing portion 18 to the tip of the VCM arm, the micro beams 20 and 22 and the rotor portion 24, the micro beams 20 and 22 are integrally connected to both side edges of the fixing portion 18 to the tip of the VCM arm. As shown in FIG. 6 to be described later, a long piece 20a that is folded at a right angle toward the stator portion 30 side along these both side edges and extends further forward than the front end portions on both side edges of the fixing portion 18. , 22a is bent 180 ° inward (first bend), and further bent 180 ° inward from the front end of both side edges of the fixing portion 18 (second bend opposite to the first bend). At the tip, the rotor portion 24 is integrally connected via the connecting portions 20b and 22b.

  As shown in FIG. 3, in addition to the coil 28, a fixing portion 38 of the suspension load beam 36 to the rotor portion is attached to the rotor portion 24 by welding or the like. A slider 42 having a magnetic head (not shown) for reading / writing data on the magnetic disk is attached to the tip of the suspension composed of the load beam 36 and the gimbal 40. Since the VCM 14 is operated so that the arm 12 moves about the pivot shaft 10, the slider 42 attached to the tip of the suspension 16 can roughly move to a predetermined track on the magnetic disk 8. For simplicity, the signal line to the magnetic head is not shown.

  FIG. 4 shows another method for attaching the suspension. In FIG. 3, the load beam 36 includes a load portion 44, base bent portions 46 and 48, and a fixed portion 38 to the rotor portion, but in this example, the bent portions 50 and 52 are fixed to the rotor portion. The part 54 forms an integral part 55 with the gimbal 56. The load beam 57 is attached to the fixing portion 59 of the component 55 to the load beam by welding or the like, and the fixing portion 54 of the component 55 to the rotor portion is attached to the rotor portion 24 by adhesion or welding or the like.

The magnetic head actuator according to an embodiment of the present invention is fixed to the permanent magnet 32 and the rotor portion 24 in a magnetic circuit including the permanent magnet 32, the stator portion 30 and the auxiliary yoke 34 provided near the tip of the VCM arm. It arrange | positions so that the coil 28 may be opposed, maintaining a slight gap. As shown in FIG. 5, the permanent magnet is magnetized in a direction perpendicular to the surface of the opposing coil, and is magnetized in two poles on the left and right as viewed from the front of the slider. As an alternative, two single-pole magnetized permanent magnets may be arranged. The permanent magnet 32 has a size of 3 to 10 mm ^{2 in} terms of the area of the magnetic pole surface and a thickness in the direction of magnetization of 0.1 to ¹ mm. The magnetic force generated by the permanent magnet 32 greatly affects the driving force of the magnetic head actuator of the present invention. In order to obtain a sufficient magnetic force with the above dimensions, it is preferable to use a strong rare earth magnet such as an Nd—Fe—B sintered magnet.

  The stator portion 30 and the auxiliary yoke 34 are made of a ferromagnetic material such as steel, and have a thickness of 0.05 to 0.25 mm. The permanent magnet 32 is fixed to the stator portion 30 by, for example, an epoxy adhesive, solder, welding or the like.

  For the coil 28, a copper wire or a printed wiring board is used. The coil 28 is wound so as to generate a magnetic field perpendicular to the magnetic pole surface of the opposing permanent magnet 32. In the case of a printed wiring board, a multilayer wiring board may be used according to a required magnetic force, that is, a driving force. For fixing the coil 28 to the rotor portion 24, for example, an epoxy adhesive is used. A power supply line (not shown) to the coil is fixed to the tip of the VCM arm or the like with a slight deflection so as not to disturb the swing of the magnetic head actuator.

  The parts 18 constituting the fixed portion 18 to the tip of the VCM arm, the micro beams 20 and 22 and the rotor portion 24 are made of a steel spring material and have a thickness of about 0.025 to 0.15 mm. For the purpose of not disturbing the magnetic field generated by the magnetic circuits 30, 32, and 34 and the coil 28, it is preferable to use non-ferromagnetic steel.

  As best shown in FIG. 2, the pair of microbeams 20 and 22 extends from the VCM arm tip fixing portion 18 side to the rotor portion 24 side, and then bends once to the VCM arm tip fixing portion 18 side. The rotor part 24 is supported when it bends further and extends to the rotor part 24 side. This structure has the same effect as arranging three beams on one side, and is higher in the vertical direction and the like while increasing the elasticity in the driving direction of the magnetic head actuator compared to the case of one beam. The rigidity can be maintained. In order to obtain predetermined elasticity and translational rigidity, only one bending point or three or more bending points may be provided.

  As shown in FIG. 5, the drive unit of the magnetic head actuator of the present invention has the same basic structure as the VCM 14 that is a coarse actuator. By energizing the coil 28 placed in the magnetic field created by the permanent magnet 32, the rotor portion 24 swings in the direction of the arrow X due to the Lorentz force, and the suspension 42 and the slider 42 on which the magnetic head is mounted integrally therewith. Also rocks.

  The microbeams 20 and 22 are produced by punching a thin plate by pressing or etching and then bending the same as in the case of a suspension load beam or gimbal in a conventional VCM. The state of processing deformation at that time is as illustrated in FIG. First, the fixed part 18 to the tip of the VCM arm after being punched by press working or etching, the microbeams 20 and 22, and the parts 26 constituting the rotor part 24 are the fixed part 18 and the rotor as shown in FIG. The portion 24 is bridged by the long pieces 20a and 22a at both end portions, and the base body 26 'is connected to each other, and an intermediate portion indicated by the line A of the long pieces 20a and 22a is about 180 as indicated by an arrow B. The valley is folded and the rotor portion 24 is overlapped with the fixed portion 18 as shown in FIG. Next, of the long pieces 20a and 22a bent in this way, the intermediate portion indicated by the line C of the rotor portion 24 and the connecting side pieces 20a ′ and 22a ′ is folded at about 180 ° as indicated by the arrow D. The distal end edge of the fixed part 18 and the proximal end edge of the rotor part 24 are made close to each other [FIG. 6 (c)]. Further, the long piece 20a, 22a is valley-folded at right angles as indicated by arrows E, F, G, H to form the component 26 [FIG. 6 (d)].

Note that the bending order is not limited to this. Further, in order to perform a series of processing with high accuracy, a bending line may be provided in advance in the bending portion.
The stator portion 30 and the auxiliary yoke 34 are also manufactured by punching a thin plate by pressing or etching and then bending.

  FIG. 7 shows an exploded perspective view of the second embodiment of the present invention. In this embodiment, the suspension load beam portion 66 is provided at the tip of the rotor portion 58, and the fixing portion 60 to the tip of the VCM arm, the micro beams 62 and 64, the rotor portion 58, and the load beam portion 66 of the suspension are integrated. The number of parts can be reduced.

FIG. 8 shows an exploded perspective view of the third embodiment of the present invention. In the present embodiment, the number of parts can be reduced by providing the stator portion 70 integrated with the VCM arm 68 at the tip of the VCM arm 68. In the case of this embodiment, it is possible to form a highly efficient magnetic circuit by using a ferromagnetic material for the VCM arm 68. Instead of the component 26 comprising the fixed portion 18 to the tip of the VCM arm 18, the microbeams 20 and 22, and the rotor portion 24, the suspension load beam portion integrated component 72 shown in the second embodiment may be used. The fixed part 18, the micro beam 20, 22 and the rotor part 24, the stator part 70 and the auxiliary yoke 34 to the tip of the VCM arm are fixed to the VCM arm 68 by caulking pieces 74, but the fixing method is not limited to this. Instead, they may be fixed by screws, rivets, welding or the like.
7 and 8, the same components as those in FIGS. 1 to 5 are denoted by the same reference numerals, and the description thereof is omitted.

  9 and 10 show a partially exploded perspective view and a sectional view of a fourth embodiment of the present invention, respectively. In the present embodiment, the stator portion in the third embodiment is a hole 76 that penetrates to the back side of the tip of the VCM arm 75, and a permanent magnet 78 is embedded in the hole 76. In the case of this embodiment, as best shown in FIG. 10, when two magnetic head sliders 80 and 82 are provided on the VCM arm 75, two rotor portions are formed by one stator portion (permanent magnet 78). 84 and 86 can be driven. In this case, the efficiency of the magnetic circuit is higher when the non-ferromagnetic material is used for the VCM arm 75. Here, 106 and 108 are suspension gimbals, 110 and 112 are suspension load beams, 114 and 116 are microbeams, 118 and 120 are rotor parts, 122 and 124 are auxiliary yokes, 126 and 128 are caulking pieces, 130, Reference numeral 132 denotes a fixing portion to the tip of the VCM arm. In this embodiment, the load beam portion integrated part 72 of the suspension shown in the second embodiment can also be used.

  Referring to FIG. 11, an exploded perspective view of the fifth embodiment of the present invention is shown. In the present embodiment, the coil 90 is disposed on the stator portion 88 and the permanent magnet 94 is disposed on the rotor portion 92. The coil 90 that requires power supply wiring is placed on the stator portion 88 that does not oscillate, so that the wiring can be performed. It can be simplified. In the case of the present embodiment, the efficiency of the magnetic circuit is increased by using a ferromagnetic material for the component 104 constituting the fixing portion 98 to the tip of the VCM arm, the microbeams 100 and 102, and the rotor portion 92. As another method, a yoke 96 using a ferromagnetic material may be provided between the permanent magnet 94 and the rotor portion 92. The method of disposing a permanent magnet in the rotor portion shown in this example can be applied to the second to fourth embodiments.

1 is a plan view of a magnetic disk device including a magnetic head actuator according to a first embodiment of the present invention. It is a disassembled perspective view of the magnetic head actuator of 1st Embodiment of this invention. FIG. 3 is an exploded perspective view showing configurations of the magnetic head actuator, the suspension, and the magnetic head slider according to the first embodiment of the present invention. It is a disassembled perspective view which shows another structure with the magnetic head actuator of 1st Embodiment of this invention, a suspension, and a magnetic head slider. It is sectional drawing of the stator rotor part vicinity of 1st Embodiment of this invention. It is a perspective view which shows the process modified example of the components which consist of the fixing part to the front-end | tip of the VCM arm of the 1st Embodiment of this invention, a micro beam, and a rotor part, (a) is the state which stamped the thin plate by press work or the etching process , (B) is a state in which (a) is bent in the B direction, (c) is a state in which (b) is bent in the D direction, and (d) is a state in which (c) is bent in the E to H directions. is there. It is a disassembled perspective view of the magnetic head actuator vicinity of 2nd Embodiment of this invention. It is a disassembled perspective view near the magnetic head actuator of 3rd Embodiment of this invention. It is a partial exploded perspective view of the vicinity of the magnetic head actuator of the fourth embodiment of the present invention. It is sectional drawing of the magnetic head actuator vicinity of 4th Embodiment of this invention. It is a disassembled perspective view of the magnetic head actuator of 5th Embodiment of this invention.

Explanation of symbols

2 Magnetic head actuator 4 Magnetic disk device 8 Magnetic disk 10 Pivot rotating shaft 12 Voice coil motor (VCM) arm 14 Voice coil motor (VCM)
16 Suspension 18 Fixed parts 20 and 22 to the tip of the VCM arm Microbeam 24 Rotor part 26 Parts comprising the fixed part to the tip of the VCM arm, the microbeam and the rotor 28 Coil 30 Stator part 32 Permanent magnet 34 Auxiliary yoke 36 Suspension load Beam 38 Fixed part 40 to rotor part Suspension gimbal 42 Magnetic head slider 44 Loaded part 46, 48 Bent part 50, 52 Bent part 54 Fixed part 56 to rotor part Gimbal 57 Load beam part 58 of suspension 59 Rotor part 59 Load beam fixing portion 60 VCM arm tip fixing portion 62, 64 Micro beam 66 Load beam portion 68 VCM arm 70 Stator portion 72 Fixing portion to VCM arm tip, micro beam, rotor portion and low Parts 74 consisting of beam part 75 Caulking piece 75 VCM arm 76 hole 78 Permanent magnet 80, 82 Magnetic head slider 84, 86 Rotor part 88 Stator part 90 Coil 92 Rotor part 94 Permanent magnet 96 Yoke 98 Fixing part 100 to the tip of the VCM arm, 102 Microbeam 104 Parts fixed to the tip of the VCM arm, microbeam and rotor parts 106, 108 Suspension gimbals 110, 112 Suspension load beams 114, 116 Microbeams 118, 120 Rotor parts 122, 124 Auxiliary yoke 126, 128 Caulking piece 130, 132 Fixing part to VCM arm tip

Claims (10)

An actuator that is provided at the tip of the arm of the voice coil motor and swings the magnetic head slider via a suspension, and has a fixing part to the arm, and one end of this fixing part is a stator part at the tip of the arm And a rotor portion fixed to the other end and supported by a metal micro beam formed by bending at the other end so as to be swingable. A permanent magnet is provided in the stator portion, a coil is provided in the rotor portion, or a coil is provided in the stator portion. A suspension is fixed to the rotor portion and a magnetic head attached to the tip of the suspension by arranging a permanent magnet in the rotor portion and causing a current to flow through the coil in a magnetic field formed by the permanent magnet to generate a displacement in the microbeam. slider configured to swing, said microbeam is solid to the voice coil motor arm tip A long piece that is integrally connected to both side edges of the portion, folded back at a right angle toward the stator portion along the both side edges, and extends forward from the front end portion of the both side edges of the fixed portion 180 inward. Bend (first bend), and further bend 180 ° inward (second bend in the direction opposite to the first bend) in front of the tips on both side edges of the fixed portion. A magnetic head actuator for a magnetic disk drive, characterized in that the rotor part is integrally connected through the part . The fixed part and the rotor part are bridged by long pieces at both end portions, respectively, using a base that is connected, the middle part of the long pieces is valley-folded by about 180 °, and the rotor part is overlapped with the fixed part, Next, of the long pieces bent in this way, the intermediate part of the rotor part and the connecting side piece are each folded by about 180 ° so that the leading edge of the fixing part and the base edge of the rotor part are close to each other. 2. The magnetic head actuator according to claim 1, wherein the fixed portion, the micro beam, and the rotor portion are formed by vertically folding the long piece toward the stator portion at a right angle. 3. The magnetic head actuator according to claim 1, wherein the micro beam is integrated with a fixed portion to the arm tip of the voice coil motor, a rotor portion, and a load beam portion of the suspension. The magnetic head actuator of any one of claims 1 to 3 wherein the stator portion is characterized by comprising a ferromagnetic material. The stator portion is a arm integral with a voice coil motor, any one magnetic head actuator according to claim 1 to 4, characterized in that said arm is made of a ferromagnetic material. The magnetic head actuator of any one of claims 1 to 5 wherein the rotor portion is characterized by comprising a ferromagnetic material. To form a magnetic circuit, a magnetic head actuator of any one of claims 1 to 6, characterized in that the auxiliary yoke at a position opposed to the stator portion across the rotor portion is attached. Two sets of the micro beam, the rotor part, and the suspension part are arranged so as to sandwich the arm at the tip part of the arm of the voice coil motor, and one stator part is provided at the arm tip part. the magnetic head actuator of any one of claims 1 to 7.   The suspension load beam and gimbal are attached to the tip of the voice coil motor arm that moves around the pivot axis that rotates by the operation of the voice coil motor via the magnetic head actuator, and the suspension head has a magnetic head. A magnetic disk device in which a slider is attached and the arm is operated to move so that the slider moves on a predetermined track on the magnetic disk. The magnetic head actuator includes a voice coil motor arm. It is fixed to the voice coil motor arm with parts that make up the fixed part to the tip, the micro beam and the rotor part where the coil or permanent magnet is arranged, the stator part where the permanent magnet or coil is arranged, and the auxiliary yoke. And permanent magnets and stays In the magnetic circuit composed of the part and the auxiliary yoke, the permanent magnet and the coil are arranged so as to face each other while maintaining a slight gap, and the microbeam is arranged on both sides of the fixed part to the tip of the voice coil motor arm. A long piece that is integrally connected to the edge, folded back at a right angle toward the side of the stator along the both side edges, and extended toward the front side from the front end of both side edges of the fixed part is bent 180 ° inward ( 1st bend), and further bent 180 ° inward from the front end of both side edges of the fixed portion (second bend in the direction opposite to the first bend), and at the front end via a connecting portion The rotor part is integrated and connected to the coil, and by energizing the coil placed in the magnetic field created by the permanent magnet, the rotor part swings in the left-right direction due to the Lorentz force. Equipped with suspension and magnetic head Magnetic disk apparatus characterized by also oscillating rider. The fixed part and the rotor part are bridged by long pieces at both end portions, respectively, using a base that is connected, the middle part of the long pieces is valley-folded by about 180 °, and the rotor part is overlapped with the fixed part, Next, of the long pieces bent in this way, the intermediate part of the rotor part and the connecting side piece are each folded by about 180 ° so that the leading edge of the fixing part and the base edge of the rotor part are close to each other. 10. The magnetic disk drive according to claim 9 , further comprising forming a fixed part, a micro beam, and a part constituting the rotor part by vertically folding the long piece toward the stator part side.

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