JP4227818B2 - Divided valve plate - Google Patents

Divided valve plate Download PDF

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Publication number
JP4227818B2
JP4227818B2 JP2003059617A JP2003059617A JP4227818B2 JP 4227818 B2 JP4227818 B2 JP 4227818B2 JP 2003059617 A JP2003059617 A JP 2003059617A JP 2003059617 A JP2003059617 A JP 2003059617A JP 4227818 B2 JP4227818 B2 JP 4227818B2
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Japan
Prior art keywords
valve plate
ring
valve
tapered portion
fastening
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JP2004270754A (en
Inventor
秀彦 吉田
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Irie Koken Co Ltd
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Irie Koken Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0227—Packings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は分割弁板に関し、特に、弁板を二体の組み合わせとして、二体の締結ネジの締結力によってゴムＯリングを嵌め込むことにより、特に、容易に装着可能で、且つ、固着により脱落しにくく、また、ゴムＯリングの装着ムラを無くし、同時にシール性を向上させるための新規な改良に関する。
【０００２】
【従来の技術】
従来、用いられていたゴムＯリングをシール材とした真空バルブの弁板４は、図１０に示すように、一枚の弁板に形成されたアリ溝４ａの中にゴムのＯリング２を装着していた（例えば、特許文献１）。
また、他の従来例としては、図示しないが、アリ溝を用いず、輪状凹部の中にＯリングを入れ、外側をリング板で覆っていた（例えば、特許文献２）。
【０００３】
【特許文献１】
特開平９−３２４８６３号公報
【特許文献２】
特開平１１−２３０３７４号公報
【０００４】
【発明が解決しようとする課題】
一般に、真空バルブを長時間閉にしたまま放置しておくと図９に示すシール面２ａにおいてＯリング２が弁座１００に固着し、バルブを開にしたときにＯリング２が弁座１００に固着したまま残り、弁板アリ溝４ａからＯリング２が脱落し、次回シールしようとした時にシール不能となったり、バルブの開動作や閉動作に支障が出るなど様々な問題があった。
以上のような問題を解決するために図１０に示すように、アリ溝４ａの開放口の幅Ａに対してＯリング２の直径Ｄを大きくしてＯリング２と弁座の固着力よりも、アリ溝４ａからＯリング２が抜け出るのに必要な力を大きくしていた。
よって、前述のようにＯリング２のアリ溝４ａからの脱落を防止するため、アリ溝４ａの開放口の幅Ａは、Ｏリング（直径Ｄ）を挿入可能なぎりぎりの大きさに設定されるが、アリ溝の中へＯリング２を装着する時は、Ｏリング２をアリ溝４ａの一部に押し当て、Ｏリング２の一部を変形させて順次アリ溝の中へ挿入しなくてはならず、Ｏリング２の装着には大変な手間と熟練を要し、Ｏリング２を装着し終わった時には挿入ムラができ易く、シール性能にバラツキが出やすかった。
【０００５】
本発明は以上のような課題を解決するためになされたもので、特に、弁板を二体の組み合わせとして締結ネジの締結力を利用してＯリングを全周に渡って同時に嵌め込むことにより、固着によって脱落し、且つ、装着しやすく、且つ、装着ムラを無くし、シール性を向上するようにした真空バルブ用の分割弁板を提供することを目的とする。
【０００６】
【課題を解決するための手段】
本発明による分割弁板は、弁棒が接続される第１弁板と、前記第１弁板の一面に形成された凹部と、前記凹部内周壁に形成され外側へ向けて前記凹部の開口が小さくなる形状の第１テーパ部と、前記凹部に嵌入される第２弁板と前記第２弁板の外周壁に形成され前記第１テーパ部とは逆方向で前記開口が小さくなる形状の第２テーパ部と、前記第２弁板の外周に前記第２テーパ部から連続して形成された断面直線部からなる最小外径部と、前記第１、第２テーパ部間に挟持されたＯリングと、前記第１、第２弁板を肉厚方向に沿って締結するために前記第１弁板側から挿入された締結ネジ体とを備え、前記締結ネジ体により前記第２弁板を前記第１弁板に締結するときの締結力を利用してＯリングが前記第１、第２テーパ部間に挟持され、前記第２弁板単体でも前記Ｏリングは前記第２弁板の前記最小外径部に保持でき、前記第２弁板の第２テーパ部とＯリングとでシール機能が形成される構成である。
【０００７】
【発明の実施の形態】
以下、図面と共に本発明による分割弁板の好適な実施の形態について説明する。
図１から図５において、符号１で示されるものは、図１のように横長形状で環状に形成されたＯリング２を有する分割弁板であり、この分割弁板１は、弁棒３に支持された第１弁板４と、この第１弁板４に重合された第２弁板５とからなり、この第１、第２弁板４、５は第１弁板４を貫通する締付ねじ体６によって一体状に固定されている。
【０００８】
前記第１弁板４の一面４Ａに形成された凹部７の内縁には、図４で示されるように、輪状に形成された第１テーパ部１０に有する内周壁１１が形成され、この凹部７の開口７ａは外側１１ａを向いている。
【０００９】
前記第１テーパ部１０は、この凹部７の開口７ａが前記外側１１ａへ向けて小さくなるような形状に形成されており、この凹部７に設けられる第２弁板５の外周壁１５に形成された第２テーパ部１６は、図５のように、前記第１テーパ部１０とは逆方向すなわち前記開口７ａが小さくなる形状に形成されている。
【００１０】
従って、前記各弁板４、５を組合せると、各テーパ部１０、１６によって断面ほぼ三角形の空隙が環状に形成されるため、図６の組立図の（Ａ）から（Ｅ）で示すように、予め、第２弁板５の第２テーパ部１６の外周にＯリング２を取り付けた後、この第２弁板５を第１弁板４の凹部７内に挿入すると、各テーパ部１０、１１間にＯリング２全体が同時に押し込まれ、全体にわたってムラなく装着される（図２、図３及び図６の（Ｅ）の状態）。また、Ｏリング２の周面の一部は第２弁体５の開口面７ａＡから外方に突出している。
【００１１】
また、前記第１弁板４に設けられた弁棒３の軸方向３ａは、前記凹部７の開口７ａの開口面７ａＡの面方向７ａＢと非平行な関係となるように構成され、周知のように、弁棒３が上昇して傾動した場合に、開口面７ａＡ及びＯリング２が図７で示されるように真空ゲート弁の弁座１００に円滑に接合することができるように構成されている。
【００１２】
次に、前述のようにＯリング２を円滑に各弁板４、５間に装着できるかは、第２弁板５の最小外径部５ＭにＯリング２を保持した状態で、Ｏリング２の外径Ｄ１が第１テーパ部１０の最小内径Ｄ２の近傍に設定されているからである。この近傍とは、±５％位であり、一致でも可だが、必ずしも一致することはない。
前記最小外径部５Ｍは、図８に示されるように、前記第２弁板５の外周に前記第２テーパ部１６から連続して形成された断面形状で直線状をなす断面直線部１６ａから構成されている。
【００１３】
この特徴があるため、締付ねじ体６で第１弁板４と第２弁板５を締結してＯリング２を装着する際に、第２弁板５の第２テーパ部１６との接触によるＯリング２のねじれ力が働かず、また、Ｏリング２がＯリング２の押し上げ面に接触するまでＯリング２を変形させるための力が殆んど無くてすむので、装着作業が楽になる。
【００１４】
次に、前述の構成においては、第１弁板４にはシール性を必要としてぃない。
すなわち、図８に示されるように、本発明の分割弁板１は、第２弁板５と、第２テーパ部１６と、Ｏリング２と弁座１００とでシールを行っているため、第１弁板４にはシール機能を必要としていないものである。すなわち、分割弁板１自体は第２テーパ部１６とＯリング２とでシール機能が形成されている。
【００１５】
また、第１弁板４は弁棒３と第２弁板５の連結と、弁棒３から伝わるシート力を均等にＯリング３に伝える役目と、第１テーパ部１０とＯリング２押し上げ面を形成していることでＯリング２を第２弁板５の第２テーパ部１６と第１弁板４のＯリング２の押し上げ面と第１弁板４の第１テーパ部１０間に強固に挟持する役目を果たしている。
【００１６】
また、第２弁板５の第２テーパ部１６の面と弁座１００間でシールを実現しているため、締付ねじ体６を第１弁板４の非シート面側にネジ頭がくるような構成を、他のシール材を必要とせずに実現できるものである。
従って、締結ネジ体６により第２弁板５を第１弁板４に締結する時の締結力を利用してＯリング２を各テーパ部１０、１６間に挟持することができる。
また、分割弁板１を組立てる際、第２弁板５単体でもＯリング２を第２弁板５の最小外径部５Ｍに保持できる寸法であるため、このＯリング２を第２弁板５に取付けたままで第２弁板５を第１弁板４に係合して容易に組立てることができる。
また、各弁板４、５をＯリング２を介して一体的に組立てる場合、第２テーパ部１６がＯリング２と接合する際に、この第２テーパ部１６がその傾斜によってシール機能を有しているため、極めて信頼性の高いシール性を得ることができる。
尚、前述の分割弁板は全体形状が長方形の場合について述べたが、長方形の場合に限らず、丸形等の他の形状とした場合も本発明に含まれることは述べるまでもないことである。
【００１７】
【発明の効果】
本発明による分割弁板は、以上のように構成されているため、次のような効果を得ることができる。
すなわち、特に弁板を二体の組み合わせとして締付ねじ体の締結力を利用してＯリングを全周に渡って同時に嵌め込むことにより、固着によって脱落し難く、且つ、装着しやすく、且つ、装着ムラをなくし、シール性を向上するようにした真空バルブ用の弁板を提供することができる。
また、Ｏリングの外径が第１テーパ部の最小内径近傍にあるため、Ｏリングを変形させる作用が殆んどなく、装着作業が極めて容易となる。
また、シール機能を第２テーパ部とＯリングと弁座で行っているため、第１弁板にシール機能を必要とせず、第１弁板側から締付ねじ体を締付けることができる。
【図面の簡単な説明】
【図１】 本発明による分割弁板の正面図である。
【図２】 図１の横断面図である。
【図３】 図１の中央部の横断面図である。
【図４】 図２の要部の拡大断面図である。
【図５】 図２の要部の拡大断面図である。
【図６】 図２の分割弁板の組立状態を示す構成図である。
【図７】 弁座との接合状態を示す断面図である。
【図８】 図７の要部を示す拡大図である。
【図９】 従来の接合状態を示す拡大図である。
【図１０】 従来の弁板の組立状態を示す構成図である。
【符号の説明】
１ 分割弁板
２ Ｏリング
３ 弁棒
３ａ 軸方向
４ 第１弁板
４Ａ 一面
５ 第２弁板
５Ｍ 最小外径部
６ 締付ねじ体
７ 凹部
７ａ 開口
７ａＡ 開口面
７ａＢ 面方向
１０ 第１テーパ部
１１ａ 外側
１１ 内周壁
１５ 外周壁
１６ 第２テーパ部
１６ａ 断面直線部
Ｄ１ Ｏリングの外径
Ｄ２ 第１テーパ部の最小内径[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a split valve plate, and in particular, by combining two valve plates and fitting a rubber O-ring with a fastening force of two fastening screws, in particular, it can be easily mounted and dropped off by fixing. In addition, the present invention relates to a novel improvement for eliminating the uneven mounting of the rubber O-ring and at the same time improving the sealing performance.
[0002]
[Prior art]
As shown in FIG. 10, a conventional valve plate 4 of a vacuum valve using a rubber O-ring as a sealing material has a rubber O-ring 2 in a dovetail groove 4a formed on one valve plate. (For example, patent document 1).
As another conventional example, although not shown, an ant groove is not used, an O-ring is inserted in a ring-shaped recess, and the outside is covered with a ring plate (for example, Patent Document 2).
[0003]
[Patent Document 1]
JP-A-9-324863 [Patent Document 2]
Japanese Patent Laid-Open No. 11-230374
[Problems to be solved by the invention]
In general, if the vacuum valve is left closed for a long time, the O-ring 2 adheres to the valve seat 100 on the seal surface 2a shown in FIG. 9, and the O-ring 2 contacts the valve seat 100 when the valve is opened. The O-ring 2 dropped from the valve plate dovetail groove 4a and remained unsealed, making it impossible to seal the next time it was sealed, and hindering the opening and closing operations of the valve.
In order to solve the above problems, as shown in FIG. 10, the diameter D of the O-ring 2 is increased with respect to the width A of the opening of the dovetail groove 4a so that the fixing force between the O-ring 2 and the valve seat is larger. The force required for the O-ring 2 to come out of the dovetail groove 4a was increased.
Therefore, in order to prevent the O-ring 2 from dropping out from the dovetail groove 4a as described above, the width A of the opening of the dovetail groove 4a is set to a marginal size capable of inserting the O-ring (diameter D). However, when installing the O-ring 2 into the dovetail groove, the O-ring 2 is pressed against a part of the dovetail groove 4a, and a part of the O-ring 2 is not deformed and inserted into the dovetail groove sequentially. In addition, the mounting of the O-ring 2 required a lot of labor and skill, and when the O-ring 2 was completely mounted, the insertion unevenness was likely to occur and the sealing performance was likely to vary.
[0005]
The present invention has been made to solve the above-described problems, and in particular, by simultaneously fitting an O-ring over the entire circumference using a fastening force of a fastening screw with a combination of two valve plates. It is an object of the present invention to provide a divided valve plate for a vacuum valve that is easy to be attached by being fixed, is free from mounting unevenness, and has improved sealing performance.
[0006]
[Means for Solving the Problems]
The split valve plate according to the present invention includes a first valve plate to which a valve stem is connected, a recess formed on one surface of the first valve plate, and an opening of the recess formed on the inner peripheral wall of the recess. A first tapered portion having a reduced shape, a second valve plate fitted in the recess, and an outer wall formed on the outer peripheral wall of the second valve plate, the first tapered portion having a shape in which the opening is reduced in a direction opposite to the first tapered portion. 2 taper portions, a minimum outer diameter portion consisting of a straight section in section formed continuously from the second taper portion on the outer periphery of the second valve plate, and O sandwiched between the first and second taper portions A ring and a fastening screw body inserted from the first valve plate side in order to fasten the first and second valve plates along the thickness direction, and the second screw plate is moved by the fastening screw body. O-ring first using a fastening force when fastening the first valve plate, is sandwiched between the second tapered portion, before The O-ring in the second valve plate alone can hold the minimum outside diameter of the second valve plate, a structure in which the sealing function is formed by the second tapered portion and the O-ring of the second valve plate.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of a split valve plate according to the present invention will be described with reference to the drawings.
In FIG. 1 to FIG. 5, what is denoted by reference numeral 1 is a divided valve plate having an O-ring 2 that is horizontally long and annularly formed as shown in FIG. 1. The first valve plate 4 is supported by a second valve plate 5 superposed on the first valve plate 4, and the first and second valve plates 4 and 5 are clamped through the first valve plate 4. It is fixed integrally by the attached screw body 6.
[0008]
As shown in FIG. 4, an inner peripheral wall 11 of the first tapered portion 10 formed in a ring shape is formed on the inner edge of the concave portion 7 formed on the one surface 4 </ b> A of the first valve plate 4. The opening 7a faces the outer side 11a .
[0009]
The first tapered portion 10 has an opening 7a of the recess 7 is formed in a shape smaller toward the outer 11a, formed on the outer peripheral wall 15 of the second valve plate 5 provided in the recess 7 Further, as shown in FIG. 5, the second taper portion 16 is formed in a shape opposite to the first taper portion 10, that is, in a shape in which the opening 7a is reduced .
[0010]
Accordingly, when the valve plates 4 and 5 are combined, the tapered portions 10 and 16 form a substantially triangular gap in cross section, and therefore, as shown in FIGS. 6A to 6E in the assembly drawing of FIG. In addition, after attaching the O- ring 2 to the outer periphery of the second tapered portion 16 of the second valve plate 5 in advance and then inserting the second valve plate 5 into the recess 7 of the first valve plate 4, each tapered portion 10. 11, the entire O-ring 2 is pushed in at the same time, and the entire O-ring 2 is mounted evenly (the state shown in FIG. 2, FIG. 3 and FIG. 6E). A part of the peripheral surface of the O-ring 2 protrudes outward from the opening surface 7aA of the second valve body 5.
[0011]
Further, the axial direction 3a of the valve stem 3 provided on the first valve plate 4 is configured to be in a non-parallel relationship with the surface direction 7aB of the opening surface 7aA of the opening 7a of the recess 7, as is well known. In addition, when the valve stem 3 is lifted and tilted, the opening surface 7aA and the O-ring 2 can be smoothly joined to the valve seat 100 of the vacuum gate valve as shown in FIG. .
[0012]
Next, whether or not the O-ring 2 can be smoothly mounted between the valve plates 4 and 5 as described above is determined with the O-ring 2 held in the minimum outer diameter portion 5M of the second valve plate 5. This is because the outer diameter D1 is set in the vicinity of the minimum inner diameter D2 of the first taper portion 10. This vicinity is about ± 5% and may be coincident, but not necessarily coincident.
As shown in FIG. 8, the minimum outer diameter portion 5 </ b> M is formed from a straight cross-sectional straight portion 16 a that is linear with a cross-sectional shape formed continuously from the second tapered portion 16 on the outer periphery of the second valve plate 5. It is configured.
[0013]
Because of this feature, when the O-ring 2 is mounted by fastening the first valve plate 4 and the second valve plate 5 with the tightening screw body 6, contact with the second tapered portion 16 of the second valve plate 5 The torsional force of the O-ring 2 does not work, and there is almost no force for deforming the O-ring 2 until the O-ring 2 comes into contact with the push-up surface of the O-ring 2. .
[0014]
Next, in the above-described configuration, the first valve plate 4 does not need a sealing property.
That is, as shown in FIG. 8, the split valve plate 1 of the present invention is sealed by the second valve plate 5, the second tapered portion 16, the O-ring 2 and the valve seat 100. The one valve plate 4 does not require a sealing function. That is, the divided valve plate 1 itself has a sealing function formed by the second tapered portion 16 and the O-ring 2.
[0015]
The first valve plate 4 is connected to the valve stem 3 and the second valve plate 5 , has a role of uniformly transmitting the seat force transmitted from the valve stem 3 to the O-ring 3, and the first taper portion 10 and the O-ring 2 push-up surface. The O-ring 2 is firmly formed between the second tapered portion 16 of the second valve plate 5, the push-up surface of the O-ring 2 of the first valve plate 4, and the first tapered portion 10 of the first valve plate 4. It plays the role of pinching.
[0016]
Further, since the seal is realized between the surface of the second tapered portion 16 of the second valve plate 5 and the valve seat 100, the screw head of the tightening screw body 6 comes to the non-seat surface side of the first valve plate 4. Such a configuration can be realized without the need for another sealing material.
Therefore, the O-ring 2 can be clamped between the taper portions 10 and 16 by using the fastening force when the second valve plate 5 is fastened to the first valve plate 4 by the fastening screw body 6.
Further, when the divided valve plate 1 is assembled, the O-ring 2 can be held by the minimum outer diameter portion 5M of the second valve plate 5 even with the second valve plate 5 alone. The second valve plate 5 can be easily assembled by engaging the first valve plate 4 while being attached to the first valve plate 4.
Further, when the valve plates 4 and 5 are assembled together via the O-ring 2, when the second taper portion 16 is joined to the O-ring 2, the second taper portion 16 has a sealing function due to its inclination. Therefore, a highly reliable sealing property can be obtained.
In addition, although the above-mentioned division | segmentation valve plate described about the case where the whole shape was a rectangle, it is needless to say that not only the case of a rectangle but the case where it was made into other shapes, such as a round shape, is contained in this invention. is there.
[0017]
【The invention's effect】
Since the divided valve plate according to the present invention is configured as described above, the following effects can be obtained.
That is, by particularly fitting the O-ring all around the circumference using the fastening force of the tightening screw body as a combination of two valve plates, it is difficult to fall off due to fixation, and easy to install, and It is possible to provide a valve plate for a vacuum valve that eliminates mounting unevenness and improves sealing performance.
Further, since the outer diameter of the O-ring is in the vicinity of the minimum inner diameter of the first taper portion, there is almost no action for deforming the O-ring, and the mounting operation becomes extremely easy.
Further, since the sealing function is performed by the second tapered portion, the O-ring and the valve seat, the sealing function is not required for the first valve plate, and the tightening screw body can be tightened from the first valve plate side.
[Brief description of the drawings]
FIG. 1 is a front view of a split valve plate according to the present invention.
FIG. 2 is a cross-sectional view of FIG.
3 is a cross-sectional view of the center portion of FIG.
4 is an enlarged cross-sectional view of a main part of FIG.
5 is an enlarged cross-sectional view of a main part of FIG.
6 is a configuration diagram showing an assembled state of the split valve plate of FIG. 2;
FIG. 7 is a cross-sectional view showing a joined state with a valve seat.
FIG. 8 is an enlarged view showing a main part of FIG. 7;
FIG. 9 is an enlarged view showing a conventional joining state.
FIG. 10 is a configuration diagram showing an assembled state of a conventional valve plate.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Divided valve plate 2 O-ring 3 Valve rod 3a Axial direction 4 1st valve plate 4A One surface 5 2nd valve plate 5M Minimum outer diameter part 6 Tightening screw body 7 Recessed part 7a Opening 7aA Opening surface 7aB Surface direction 10 1st taper part 11a outer side 11 inner peripheral wall 15 outer peripheral wall 16 2nd taper part
16a Straight section D1 O-ring outer diameter D2 Minimum inner diameter of the first taper

Claims (1)

弁棒(3)が接続される第１弁板(4)と、前記第１弁板(4)の一面に形成された凹部(7)と、前記凹部(7)内周壁(11)に形成され外側(11a)へ向けて前記凹部(7)の開口(7a)が小さくなる形状の第１テーパ部(10)と、前記凹部(7)に嵌入される第２弁板(5)と、前記第２弁板(5)の外周壁(15)に形成され前記第１テーパ部(10)とは逆方向で前記開口 (7a) が小さくなる形状の第２テーパ部(16)と、前記第２弁板 (5) の外周に前記第２テーパ部 (16) から連続して形成された断面直線部 (16a) からなる最小外径部 (5M) と、前記第１、第２テーパ部(10、16)間に挟持されたＯリング(2)と、前記第１、第２弁板(4、5)を肉厚方向(T)に沿って締結するために前記第１弁板(4)側から挿入された締結ネジ体(6)とを備え、前記締結ネジ体(6)により前記第２弁板(5)を前記第１弁板(4)に締結するときの締結力を利用してＯリング(2)が前記第１、第２テーパ部(10、16)間に挟持され、前記第２弁板(5)単体でも前記Ｏリング(2)は前記第２弁板(5)の前記最小外径部(5M)に保持でき、前記第２弁板 (5) の第２テーパ部 (16) とＯリング (2) とでシール機能が形成されていることを特徴とする分割弁板。A first valve plate (4) to which a valve stem (3) is connected, a recess (7) formed on one surface of the first valve plate (4), and an inner peripheral wall (11) of the recess (7) A first tapered portion (10) having a shape in which the opening (7a) of the concave portion (7) becomes smaller toward the outer side (11a), a second valve plate (5) fitted into the concave portion (7) , the second tapered portion before Symbol shape the opening in the opposite direction (7a) is smaller the first tapered portion is formed on an outer peripheral wall (15) and (10) of the second valve plate (5) and (16), A minimum outer diameter portion (5M) comprising a straight section (16a) formed continuously from the second taper portion (16 ) on the outer periphery of the second valve plate (5) ; and the first and second tapers. The first valve plate for fastening the O-ring (2) sandwiched between the parts (10, 16) and the first and second valve plates (4, 5) along the thickness direction (T) (4) A fastening screw body (6) inserted from the side, and a fastening force when fastening the second valve plate (5) to the first valve plate (4) by the fastening screw body (6) Profit O-ring (2) is the first and, sandwiched between the second tapered portion (10, 16), said second valve plate (5) said even alone O-ring (2) is the second valve plate (5 ) wherein it can be held to a minimum outer diameter (5M), and wherein the sealing function de second tapered section and (16) O-ring and (2) of the second valve plate (5) is formed Split valve plate.
JP2003059617A 2003-03-06 2003-03-06 Divided valve plate Expired - Lifetime JP4227818B2 (en)

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JP2003059617A JP4227818B2 (en) 2003-03-06 2003-03-06 Divided valve plate

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JP2003059617A JP4227818B2 (en) 2003-03-06 2003-03-06 Divided valve plate

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JP4227818B2 true JP4227818B2 (en) 2009-02-18

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JP5108292B2 (en) * 2005-12-20 2012-12-26 ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト Pendulum vacuum valve and slide gate vacuum valve

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