JP4214466B2 - Magnetic encoder and rotation angle calculation method thereof - Google Patents

Magnetic encoder and rotation angle calculation method thereof Download PDF

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JP4214466B2
JP4214466B2 JP2003136157A JP2003136157A JP4214466B2 JP 4214466 B2 JP4214466 B2 JP 4214466B2 JP 2003136157 A JP2003136157 A JP 2003136157A JP 2003136157 A JP2003136157 A JP 2003136157A JP 4214466 B2 JP4214466 B2 JP 4214466B2
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temperature
detection element
magnetic field
output signal
phase
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JP2004340681A5 (en
JP2004340681A (en
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浩司 上村
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、例えば、産業用ロボット、NC工作機械等に用いられるモータの回転位置を検出する磁気式エンコーダとその回転角度算出方法に関する。
【0002】
【従来の技術】
図3は、従来の磁気式エンコーダであって、(a)はその構成図、(b)は磁界検出素子から出力される各相信号を処理する信号処理回路のブロック図である(例えば特許文献1参照)。
【0003】
【特許文献1】
国際公開番号WO99/13296 (明細書第6頁〜7頁、図1〜図2)
【0004】
図3(a)において、1は回転機械、1Aは回転機械1の回転軸、2は回転軸1Aの端部に固定された円板状の発磁体を構成する永久磁石で、永久磁石2の表面は回転軸1Aに垂直な一方向に磁化されている。3は永久磁石2の外周側に設けられたリング状の固定体、7は回転機械1の回転中心に対し同心円状にして設けられ、且つ、固定体3の周方向に互いに等間隔に設置された磁界検出素子であって、4個の磁界検出素子71、72、73、74から構成されている。この各磁界検出素子は、永久磁石2の外周面に対して空隙を介して対向し、且つ、互いに機械角で90度位相をずらしてA1相検出素子71とB1相検出素子73を設け、さらにA1相検出素子71に対して機械角で180度位相をずらしてA2相検出素子72を、B1相検出素子73に対して機械角で180度位相をずらしてB2相検出素子74を設けている。なお、回転軸1Aの偏心量が極めて小さい場合は、磁界検出素子7を互いに周方向に機械角で90度位相をずらして固定されたA1相検出素子71と、B1相検出素子73の、2個の検出信号だけを得るようにしてもよい。
次に、磁界検出素子から出力される各相信号を処理する信号処理回路について説明する。
図3(b)において、8は信号処理回路であって、A1相検出素子71の出力信号 V71とA2相検出素子72の出力信号 V72の差動信号Vaを出力する差動増幅器81と、B1相検出素子73の出力信号 V73とB2相検出素子74の出力信号V74の差動信号Vbを出力する差動増幅器82と、差動信号VaとVbとから
arctan(Va/Vb)・・・(1)
の演算を行って回転角度を算出する角度演算回路83とを設けている。
1 相検出素子71とB1 相検出素子73の2個の検出信号だけを用いる場合は、差動増幅器81および差動増幅器82は差動構成ではなく増幅器とし、A1 相検出素子71とB1 相検出素子73の2個の検出信号の増幅信号Va とVbとから、同様に(1)の演算および回転角度の算出が角度演算回路83で行なわれる。
【0005】
【発明が解決しようとする課題】
ところが、このような従来の磁気式エンコーダでは、磁界検出素子の出力は、感度やオフセット値の温度変動により変動していた。すなわち、永久磁石2の磁束密度や、磁界検出素子7の感度の温度変動量は、前記の信号Va およびVbに対し同じ比率で発生するため、角度演算時の式(1)において相殺される。しかしながら、磁界検出素子7のオフセット値の温度変動量は素子によりばらつきがあるため、温度変動により回転角度の算出に誤差が発生する。そこで、磁界検出素子を選別することによりオフセット値の温度変動量の低減を図っていたが、磁界検出素子の選別工程が増えるという問題があった。
さらに、温度変動によるオフセット値の変動量を、あらかじめ記憶し、温度を計測して補正することが考えられる。しかしながら、温度計測のため温度検出素子を磁界検出素子近傍に配置することは、デバイス点数が多くなるため高価になり、大型化する、配線数が増えるなどの問題があり、磁気式エンコーダの適用範囲を狭めていた。
本発明は上記課題を解決するためになされたものであり、磁界検出素子の選別や温度検出装置を取り付けることなく、温度変動による磁気式エンコーダの回転角度の算出誤差を低減することができる磁気式エンコーダの回転角度算出方法を提供することを目的とする。
【0006】
【課題を解決するための手段】
上記問題を解決するため、本発明に係る磁気式エンコーダは、回転機械1に固定された回転軸1Aと、垂直方向の一方向に磁化され、前記回転軸1Aに固定された永久磁石2と、前記永久磁石2に空隙を介して対向し、固定体3に少なくとも2つ取り付けられた磁界検出素子7と、前記磁界検出素子7から出力される信号を処理する信号処理回路を備えた磁気式エンコーダにおいて、前記磁界検出素子7から取得される少なくとも2つの出力信号V、Vから振幅の正規化及び位相補正を行うための演算を実施し、前記位相補正された出力信号を用いて、R=(V +V 1/2の演算を実施し、前記演算により求めたR値を用いて、予め記憶しているR値に対する温度の比較表に基づいて温度を推定し、前記推定した温度を用いて、予め記憶している温度に対する前記出力信号のオフセット補正値の比較表に基づいてオフセット補正値を推定し、前記推定したオフセット補正値を前記位相補正された出力信号に加える演算を実施し、前記推定オフセット補正値を加えた出力信号を用いて回転角度を算出するようにしたものである。
【0007】
【発明の実施の形態】
以下、本発明の実施例を図に基づいて説明する。
図1は本発明の実施例を示す磁気式エンコーダの角度算出に係るフローチャートである。なお、磁気式エンコーダの構成要素及び信号処理回路は前述の図3と同じである。
本発明では、はじめにステップST1にて、少なくとも2つの磁界検出素子7から温度T0における少なくとも2つの出力信号Va(T0)、Vb(T0)を取得する。次にステップST2にて、(2)式を用いて一方の出力で振幅の正規化と(3)式を用いて位相補正を行う。
ax=Va、Vbx=Va/Vb・・・(2)
ay=Vax+Vbx、Vby=Vax−Vbx・・・(3)
次にステップST3にて、
R(T)=(Va(T)2+Vb(T)21/2
を用いてR(T0)を算出し、ステップST4にて、予め記憶しているR(T)値に対する温度Tの比較表(表1)に基づいて温度T0を推定する。このときR(T0)に等しいR(T)値がない場合は、もっとも近い2つのR(T)値より、比例配分で推定温度Tnを求めればよい。
【0008】
【表1】

Figure 0004214466
【0009】
図2はR(T)値より求めた推定温度Tnと計測温度Tとの関係を示すグラフである。図2の縦軸は推定温度Tnを、横軸は計測温度Tを示しており、両者はほぼ等しいことがわかる。その理由は、磁界検出素子7から得られる回転角度に応じたそれぞれの正弦波信号の振幅値は、温度に対し均一な比率で変動するため、前記のそれぞれの正弦波信号のベクトルの大きさを算出することにより、温度を推定する事ができるからである。
なお、磁界検出素子が1つだけの場合は、回転機械の回転軸の位置により出力の大きさが変動するのでこのような処理は不可能である。
次にステップST5にて、前記推定した温度Tnを用いて、予め記憶している温度に対する前記出力信号のオフセット補正値の比較表(表1)に基づいてオフセット補正値Vaoff(Tn)、Vboff(Tn)を推定する。
次にステップST6にて、式
az=Vay(T)+Vaoff(Tn
bz=Vby(T)+Vboff(Tn
よりVaz、Vbzを導出する。
最後にステップST7にて、前記ステップST6で求めた前記推定オフセット補正値を加えた出力信号Vaz、Vbzを式(1)に代入し補正された回転角度θ(T0)を算出する。
【0010】
補正の効果を検証するため、本発明と従来例の回転角度算出方式を用いた磁気式エンコーダを各10ヶ準備した。表2に本発明、及び従来の実施例の絶対角度誤差の結果を示す。
【0011】
【表2】
Figure 0004214466
【0012】
温度を室温時と85℃、−20℃にしたときの各々の1回転における絶対角度誤差を求めた。永久磁石には希土類磁石を用い、磁界検出素子にはGaAsからなるホール素子を用いた。その結果、従来例では絶対角度誤差が最小のものでも±0.8%であったが、本発明では絶対角度誤差が最大のもので±0.02%であり、本発明が高精度な磁気式エンコーダになりうることがわかった。
したがって、本発明の実施例に係る磁気式エンコーダの回転角度算出方法は、回転機械1に固定された回転軸1Aと、垂直方向の一方向に磁化され、前記回転軸1Aに固定された永久磁石2と、前記永久磁石2に空隙を介して対向し、固定体3に少なくとも2つ取り付けられた磁界検出素子7と、前記磁界検出素子7から出力される信号を処理する信号処理回路を備えた磁気式エンコーダにおいて、前記磁界検出素子7から取得される少なくとも2つの出力信号Va、Vbから振幅の正規化及び位相補正を行うための演算を実施し、前記位相補正された出力信号を用いて、R=(Va 2+Vb 21/2の演算を実施し、前記演算により求めたR値を用いて、予め記憶しているR値に対する温度の比較表に基づいて温度を推定し、前記推定した温度を用いて、予め記憶している温度に対する前記出力信号のオフセット補正値の比較表に基づいてオフセット補正値を推定し、前記推定したオフセット補正値を前記位相補正された出力信号に加える演算を実施し、前記推定オフセット補正値を加えた出力信号を用いて回転角度を算出するようにしているため、磁界検出素子の選別や温度検出装置を取り付けることなく、温度変動による磁気式エンコーダの回転角度の算出誤差を低減することができる。
【0013】
【発明の効果】
以上述べたように、本発明の磁気式エンコーダ及びその回転角度算出方法によれば、回転機械1に固定された回転軸1Aと、垂直方向の一方向に磁化され、前記回転軸1Aに固定された永久磁石2と、前記永久磁石2に空隙を介して対向し、固定体3に少なくとも2つ取り付けられた磁界検出素子7と、前記磁界検出素子7から出力される信号を処理する信号処理回路を備えた磁気式エンコーダにおいて、前記磁界検出素子7から取得される少なくとも2つの出力信号V、Vから振幅の正規化及び位相補正を行うための演算を実施し、前記位相補正された出力信号を用いて、R=(V +V 1/2の演算を実施し、前記演算により求めたR値を用いて、予め記憶しているR値に対する温度の比較表に基づいて温度を推定し、前記推定した温度を用いて、予め記憶している温度に対する前記出力信号のオフセット補正値の比較表に基づいてオフセット補正値を推定し、前記推定したオフセット補正値を前記位相補正された出力信号に加える演算を実施し、前記推定オフセット補正値を加えた出力信号を用いて回転角度を算出するようにしているため、磁界検出素子の選別や温度検出装置を取り付けることなく、温度変動による磁気式エンコーダの回転角度の算出誤差を低減することができる。
【図面の簡単な説明】
【図1】本発明の実施例を示す磁気式エンコーダの角度算出に係るフローチャートである。
【図2】R(T)値より求めた推定温度Tnと計測温度Tとの関係を示すグラフである。
【図3】従来の磁気式エンコーダであって、(a)はその構成図、(b)は磁界検出素子から出力される各相信号を処理する信号処理回路のブロック図である。
【符号の説明】
1 回転機械
1A 回転軸
2 永久磁石
3 固定体
7、71、72、73、74 磁界検出素子
8 信号処理回路
81、82 差動増幅器
83 角度演算回路[0001]
BACKGROUND OF THE INVENTION
The present invention is, for example, an industrial robot, related to the rotation angle calculating method of a magnetic encoder and its for detecting the rotational position of the motor used in NC machine tools or the like.
[0002]
[Prior art]
3A and 3B show a conventional magnetic encoder, in which FIG. 3A is a configuration diagram thereof, and FIG. 3B is a block diagram of a signal processing circuit that processes each phase signal output from a magnetic field detection element (for example, Patent Documents). 1).
[0003]
[Patent Document 1]
International Publication Number WO99 / 13296 (Specifications, pages 6-7, FIGS. 1-2)
[0004]
In FIG. 3 (a), 1 is a rotating machine, 1A is a rotating shaft of the rotating machine 1, 2 is a permanent magnet constituting a disc-shaped magnet generator fixed to the end of the rotating shaft 1A, The surface is magnetized in one direction perpendicular to the rotation axis 1A. 3 is a ring-shaped fixed body provided on the outer peripheral side of the permanent magnet 2, 7 is provided concentrically with the rotation center of the rotary machine 1, and is installed at equal intervals in the circumferential direction of the fixed body 3. The magnetic field detection element includes four magnetic field detection elements 71, 72, 73, and 74. Each of the magnetic field detection elements faces the outer peripheral surface of the permanent magnet 2 via a gap, and is provided with an A 1 phase detection element 71 and a B 1 phase detection element 73 with a mechanical angle shifted by 90 degrees from each other. , further a 2-phase detecting element 72 by shifting the phase by 180 degrees in mechanical angle with respect to a 1 phase detection element 71, B 1 phase detection element 73 mechanical angle 180 degrees out of phase B 2 phase detection for An element 74 is provided. When the amount of eccentricity of the rotating shaft 1A is extremely small, the magnetic field detecting element 7 includes an A 1 phase detecting element 71 and a B 1 phase detecting element 73, which are fixed with a mechanical angle shifted by 90 degrees in the circumferential direction. Only two detection signals may be obtained.
Next, a signal processing circuit that processes each phase signal output from the magnetic field detection element will be described.
In FIG. 3 (b), 8 is a signal processing circuit, and outputs a differential signal V a of the output signal V 72 of the output signal V 71 and the A 2 phase detection element 72 of the A 1 phase detection element 71 Differential an amplifier 81, a differential amplifier 82 for outputting a differential signal V b of the output signal V 74 of the output signal V 73 and the B 2 phase detection element 74 B 1 phase detection element 73, a differential signal V a and V b Arctan (V a / V b ) (1)
And an angle calculation circuit 83 for calculating the rotation angle.
In the case of using only two detection signals of the A 1 phase detection element 71 and B 1 phase detection element 73, a differential amplifier 81 and the differential amplifier 82 is an amplifier rather than a differential configuration, the A 1 phase detection element 71 From the amplified signals V a and V b of the two detection signals of the B 1 phase detection element 73, the calculation of (1) and the calculation of the rotation angle are similarly performed by the angle calculation circuit 83.
[0005]
[Problems to be solved by the invention]
However, in such a conventional magnetic encoder, the output of the magnetic field detecting element fluctuates due to temperature fluctuations in sensitivity and offset value. That is, since the magnetic flux density of the permanent magnet 2 and the temperature fluctuation amount of the sensitivity of the magnetic field detection element 7 are generated at the same ratio with respect to the signals V a and V b, they are canceled in the equation (1) at the time of angle calculation. The However, since the temperature fluctuation amount of the offset value of the magnetic field detection element 7 varies depending on the element, an error occurs in the calculation of the rotation angle due to the temperature fluctuation. Therefore, although the amount of temperature variation of the offset value is reduced by selecting the magnetic field detection elements, there is a problem that the number of steps for selecting the magnetic field detection elements increases.
Furthermore, it is conceivable that the amount of change in the offset value due to temperature variation is stored in advance, and the temperature is measured and corrected. However, disposing the temperature detection element in the vicinity of the magnetic field detection element for temperature measurement is expensive due to the increased number of devices, resulting in problems such as an increase in size and an increase in the number of wires. Was narrowing.
The present invention has been made to solve the above problems, and can reduce a calculation error of a rotation angle of a magnetic encoder due to a temperature change without selecting a magnetic field detection element or attaching a temperature detection device. An object of the present invention is to provide a method for calculating the rotation angle of an encoder.
[0006]
[Means for Solving the Problems]
In order to solve the above problem, a magnetic encoder according to the present invention includes a rotating shaft 1A fixed to the rotating machine 1, a permanent magnet 2 magnetized in one vertical direction and fixed to the rotating shaft 1A, A magnetic encoder comprising a magnetic field detection element 7 opposed to the permanent magnet 2 with a gap and attached to the fixed body 3, and a signal processing circuit for processing a signal output from the magnetic field detection element 7. 2, an operation for normalizing the amplitude and correcting the phase is performed from the at least two output signals V a and V b acquired from the magnetic field detection element 7, and using the output signal corrected in phase, R = (V a 2 + V b 2 ) 1/2 is calculated, and using the R value obtained by the calculation, the temperature is estimated based on a temperature comparison table with respect to the R value stored in advance, The estimated temperature The offset correction value is estimated based on a comparison table of offset correction values of the output signal with respect to the temperature stored in advance, and an operation for adding the estimated offset correction value to the phase-corrected output signal is performed. The rotation angle is calculated using the output signal to which the estimated offset correction value is added.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a flowchart relating to angle calculation of a magnetic encoder showing an embodiment of the present invention. The components and signal processing circuit of the magnetic encoder are the same as those in FIG.
In the present invention, first, in step ST1, at least two output signals V a (T 0 ) and V b (T 0 ) at temperature T 0 are obtained from at least two magnetic field detecting elements 7. Next, in step ST2, amplitude normalization is performed on one output using equation (2) and phase correction is performed using equation (3).
V ax = V a , V bx = V a / V b (2)
V ay = V ax + V bx , V by = V ax −V bx (3)
Next, in step ST3,
R (T) = (V a (T) 2 + V b (T) 2 ) 1/2
Is used to calculate R (T 0 ), and in step ST4, the temperature T 0 is estimated based on a comparison table (Table 1) of the temperature T with respect to the R (T) value stored in advance. At this time, if there is no R (T) value equal to R (T 0 ), the estimated temperature Tn may be obtained by proportional distribution from the two closest R (T) values.
[0008]
[Table 1]
Figure 0004214466
[0009]
FIG. 2 is a graph showing the relationship between the estimated temperature Tn obtained from the R (T) value and the measured temperature T. The vertical axis in FIG. 2 indicates the estimated temperature Tn, and the horizontal axis indicates the measured temperature T. It can be seen that both are substantially equal. The reason is that the amplitude value of each sine wave signal corresponding to the rotation angle obtained from the magnetic field detecting element 7 fluctuates at a uniform ratio with respect to the temperature. This is because the temperature can be estimated by calculating.
In the case where there is only one magnetic field detection element, such a process is not possible because the magnitude of the output varies depending on the position of the rotating shaft of the rotating machine.
Next, in step ST5, using the estimated temperature Tn, an offset correction value V aoff (T n ) based on a comparison table (Table 1) of offset correction values of the output signal with respect to the temperature stored in advance, Estimate V boff (T n ).
Next, in step ST6, the formula V az = V ay (T) + V aoff (T n )
V bz = V by (T) + V boff (T n )
Thus, V az and V bz are derived.
Finally, in step ST7, the corrected rotation angle θ (T 0 ) is calculated by substituting the output signals V az and V bz to which the estimated offset correction value obtained in step ST6 is added into the equation (1).
[0010]
In order to verify the effect of the correction, ten magnetic encoders using the present invention and the conventional rotation angle calculation method were prepared. Table 2 shows the absolute angle error results of the present invention and the conventional examples.
[0011]
[Table 2]
Figure 0004214466
[0012]
The absolute angle error in each rotation when the temperature was room temperature, 85 ° C., and −20 ° C. was obtained. A rare earth magnet was used as the permanent magnet, and a Hall element made of GaAs was used as the magnetic field detection element. As a result, in the conventional example, the absolute angle error is ± 0.8% even when the absolute value is minimum, but in the present invention, the absolute angle error is ± 0.02% when the absolute value is maximum. It turns out that it can be an expression encoder.
Therefore, the rotation angle calculation method of the magnetic encoder according to the embodiment of the present invention includes a rotating shaft 1A fixed to the rotating machine 1, and a permanent magnet magnetized in one direction in the vertical direction and fixed to the rotating shaft 1A. 2, a magnetic field detection element 7 facing the permanent magnet 2 with a gap and attached to the fixed body 3, and a signal processing circuit for processing a signal output from the magnetic field detection element 7. In the magnetic encoder, an operation for normalizing the amplitude and correcting the phase is performed from at least two output signals V a and V b acquired from the magnetic field detecting element 7, and the phase-corrected output signal is used. Then, the calculation of R = (V a 2 + V b 2 ) 1/2 is performed, and the temperature is estimated based on the temperature comparison table for the stored R value using the R value obtained by the calculation. And the estimated temperature Is used to estimate an offset correction value based on a comparison table of offset correction values of the output signal with respect to a temperature stored in advance, and to perform an operation of adding the estimated offset correction value to the phase-corrected output signal Since the rotation angle is calculated using the output signal to which the estimated offset correction value is added, the rotation angle of the magnetic encoder due to temperature fluctuations can be reduced without selecting a magnetic field detection element or attaching a temperature detection device. Calculation error can be reduced.
[0013]
【The invention's effect】
As described above, according to the magnetic encoder and the rotation angle calculation method of the present invention, the rotary shaft 1A fixed to the rotary machine 1 is magnetized in one vertical direction and fixed to the rotary shaft 1A. The permanent magnet 2, the magnetic field detection element 7 facing the permanent magnet 2 with a gap and attached to the fixed body 3, and a signal processing circuit for processing a signal output from the magnetic field detection element 7 In the magnetic encoder provided with the above, the phase-corrected output is obtained by performing an operation for normalizing the amplitude and correcting the phase from at least two output signals V a and V b acquired from the magnetic field detecting element 7. Using the signal, R = (V a 2 + V b 2 ) 1/2 is calculated, and using the R value obtained by the above calculation, based on the temperature comparison table for the previously stored R value Estimate the temperature Using the estimated temperature, estimating an offset correction value based on a comparison table of offset correction values of the output signal with respect to a temperature stored in advance, and outputting the estimated offset correction value to the phase-corrected output signal The rotation angle is calculated using the output signal to which the estimated offset correction value is added, so that the magnetic type due to temperature fluctuations can be used without selecting a magnetic field detection element or attaching a temperature detection device. The calculation error of the rotation angle of the encoder can be reduced.
[Brief description of the drawings]
FIG. 1 is a flowchart relating to angle calculation of a magnetic encoder according to an embodiment of the present invention.
FIG. 2 is a graph showing a relationship between an estimated temperature Tn obtained from an R (T) value and a measured temperature T.
3A is a block diagram of a conventional magnetic encoder, and FIG. 3B is a block diagram of a signal processing circuit that processes each phase signal output from a magnetic field detection element.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Rotating machine 1A Rotating shaft 2 Permanent magnet 3 Fixed body 7, 71, 72, 73, 74 Magnetic field detection element 8 Signal processing circuit 81, 82 Differential amplifier 83 Angle calculation circuit

Claims (2)

回転機械に固定された回転軸と、垂直方向の一方向に磁化され、前記回転軸に固定された永久磁石と、前記永久磁石に空隙を介して対向し、固定体に少なくとも2つ取り付けられた磁界検出素子と、前記磁界検出素子から出力される信号を処理する信号処理回路を備えた磁気式エンコーダにおいて、
前記磁界検出素子から取得される少なくとも2 つの出力信号V、Vから振幅の正規化及び位相補正を行うための演算を実施し、
前記位相補正された出力信号を用いて、R=(V +V 1/2の演算を実施し、
前記演算により求めたR値を用いて、予め記憶しているR値に対する温度の比較表に基づいて温度を推定し、
前記推定した温度を用いて、予め記憶している温度に対する前記出力信号のオフセット補正値の比較表に基づいてオフセット補正値を推定し、
前記推定したオフセット補正値を前記位相補正された出力信号に加える演算を実施し、前記推定オフセット補正値を加えた出力信号を用いて回転角度を算出するようにしたことを特徴とする磁気式エンコーダの回転角度算出方法。
A rotating shaft fixed to the rotating machine, a permanent magnet magnetized in one direction in the vertical direction, fixed to the rotating shaft, and opposed to the permanent magnet through a gap, and attached to the fixed body. In a magnetic encoder comprising a magnetic field detection element and a signal processing circuit for processing a signal output from the magnetic field detection element,
Performing calculations for amplitude normalization and phase correction from at least two output signals V a and V b acquired from the magnetic field detection element;
Using the phase-corrected output signal, R = (V a 2 + V b 2 ) 1/2 is calculated,
Using the R value obtained by the above calculation, the temperature is estimated based on a temperature comparison table for the R value stored in advance,
Using the estimated temperature, the offset correction value is estimated based on a comparison table of offset correction values of the output signal with respect to the temperature stored in advance,
A magnetic encoder that performs an operation of adding the estimated offset correction value to the phase-corrected output signal and calculates a rotation angle using the output signal to which the estimated offset correction value is added. Rotation angle calculation method.
回転機械に固定された回転軸と、垂直方向の一方向に磁化され、前記回転軸に固定された永久磁石と、前記永久磁石に空隙を介して対向し、固定体に少なくとも2つ取り付けられた磁界検出素子と、前記磁界検出素子から出力される信号を処理する信号処理回路を備えた磁気式エンコーダにおいて、A rotating shaft fixed to the rotating machine, a permanent magnet magnetized in one direction in the vertical direction, fixed to the rotating shaft, and opposed to the permanent magnet through a gap, and attached to the fixed body. In a magnetic encoder including a magnetic field detection element and a signal processing circuit that processes a signal output from the magnetic field detection element,
前記磁界検出素子から取得される少なくとも2At least 2 obtained from the magnetic field detection element つの出力信号VOutput signal V a 、V, V b から振幅の正規化及び位相補正を行うための演算を実施し、To perform normalization of amplitude and phase correction from
前記位相補正された出力信号を用いて、R=(VUsing the phase corrected output signal, R = (V a 2 +V+ V b 2 ) 1/21/2 の演算を実施し、The operation of
前記演算により求めたR値を用いて、予め記憶しているR値に対する温度の比較表に基づいて温度を推定し、Using the R value obtained by the above calculation, the temperature is estimated based on the temperature comparison table for the R value stored in advance,
前記推定した温度を用いて、予め記憶している温度に対する前記出力信号のオフセット補正値の比較表に基づいてオフセット補正値を推定し、Using the estimated temperature, an offset correction value is estimated based on a comparison table of offset correction values of the output signal with respect to the temperature stored in advance,
前記推定したオフセット補正値を前記位相補正された出力信号に加える演算を実施し、前記推定オフセット補正値を加えた出力信号を用いて回転角度を算出するようにしたことを特徴とする磁気式エンコーダ。A magnetic encoder that performs an operation of adding the estimated offset correction value to the phase-corrected output signal, and calculates a rotation angle using the output signal to which the estimated offset correction value is added. .
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