JP4189990B2 - Ingot removal jig - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ingot take-out jig used in a single crystal pulling apparatus, and more specifically, a single crystal ingot is slipped from a pull chamber of a Czochralski method (CZ method) single crystal pulling apparatus having a pull chamber. The present invention relates to an ingot removing jig that can be safely removed without danger.
[0002]
[Prior art]
High purity single crystal wafers such as silicon single crystal wafers are mainly used for semiconductor element substrates. Most of these wafers, for example, the silicon single crystal wafers described above, are manufactured from a single crystal ingot by a so-called Czochralski method using a single crystal pulling apparatus.
By the way, the above-described single crystal pulling apparatus generally contains therein a quartz crucible for storing a silicon melt, a carbon receiver for supporting the quartz crucible, the carbon receiver, a heating heating element, and the like. The main chamber includes an upper portion of the main chamber and a pull chamber that accommodates the pulled single crystal ingot.
[0003]
As shown in FIG. 6, the pull chamber 10 is generally a door 10b whose front surface can be freely opened and closed, and the single crystal ingot A that is pulled up uses an ingot removal jig from the opening 10a of the door. And is configured to be taken out. Reference numeral 11 in FIG. 6 denotes a main chamber in which the carbon receiver and the heating element for heating are accommodated.
[0004]
Next, a conventional ingot removing jig will be described with reference to FIG. FIG. 7 is a cross-sectional view showing a state where the ingot removing jig is inserted into the pull chamber.
The ingot take-out jig 20 includes a pair of claw portions 21a and 21b. The base portions of the pair of claw portions 21a and 21b are screwed to the screw shaft 22 which is a right screw 22a and a left screw 22b. Further, through holes are formed in the end portions of the pair of claw portions 21a and 21b, and the guide rod 23 passes therethrough.
As a result, when the handle 24 is rotated, the screw shaft 22 rotates, the pair of claws 21a and 21b move in the closing direction, and the single crystal ingot A is clamped from the left and right directions. The pair of claws 21a and 21b are moved in the opening direction by rotating the handle 24 in the reverse direction, so that the holding state of the single crystal ingot A is released.
[0005]
The ingot take-out jig 20 configured as described above is inserted into the pull chamber 10 through the opening 10a, the claws 21a and 21b are closed, and the straight barrel portion circumferential side surface A1 of the ingot A is gripped.
In this state, the seed part (not shown) that suspends the ingot A is folded, and the jig 20 is moved to take out the ingot A.
[0006]
[Problems to be solved by the invention]
As described above, in the ingot removing jig, the single crystal ingot is gripped only by friction with the claw portion.
However, there are irregularities on the peripheral surface (side surface) of the straight body portion of the single crystal ingot, and there is a problem that the single crystal ingot cannot be securely held by the irregularities. In order to solve such a problem, a flexible material that increases the contact area by pressing, for example, fluorine-based rubber, is provided on the portion of the claw portion that contacts the ingot to ensure the holding.
[0007]
However, since the heat resistance temperature of the rubber used is low (for example, in the case of fluorine rubber, the service temperature is 300 ° C. or less), it was necessary to wait for the single crystal ingot to cool to the heat resistance temperature or less before taking it out. .
In addition to the fact that the gripping force is weakened due to deterioration or wear of rubber, in the worst case, the single crystal ingot may fall off, and there is a risk of significant damage.
[0008]
Furthermore, if the inner width of the claw portion opens larger than the diameter of the straight body of the single crystal ingot and the outer width of the claw portion is not narrower than the door opening, an ingot take-out jig is inserted into the pull chamber, The crystal ingot cannot be gripped.
That is, the diameter of the single crystal ingot that can be pulled up is determined from the opening width of the pull chamber and the width of the claw portion.
Therefore, the thinner the nail portion, the larger the diameter of the single crystal ingot that can be handled, which is preferable.However, the nail portion must be designed to have the strength necessary to hold the single crystal ingot. There was a problem that the thickness could not be less than the predetermined thickness.
[0009]
In recent years, in order to reduce the cost of semiconductor elements, the demand for larger single crystal ingots has increased, the ingots have become larger and longer, and the weight of the ingots has become significantly heavier.
For this reason, there has been a strong demand for an ingot removing jig that can safely and reliably take out a large-diameter, high-weight single crystal ingot from the pull chamber.
[0010]
The present invention has been made to solve the above-described problems. Even when the opening size of the pull chamber is the same, a single crystal ingot having a larger diameter and a higher weight can be slid, fallen, etc. It is an object of the present invention to provide an ingot taking-out jig that can be taken out safely, surely, and easily without causing the above disadvantages.
Another object of the present invention is to provide an ingot removing jig capable of taking out a single crystal ingot from a pull chamber even at a high temperature.
[0011]
[Means for Solving the Problems]
The present invention has been made to achieve the above object, and an ingot take-out jig according to the present invention takes out a single crystal ingot pulled up by a single crystal pulling apparatus having a pull chamber from the inside of the pull chamber. in the jig, the jig main body, a receiving unit for supporting the cone tail portion of the single crystal ingot, and the support unit is provided for supporting the cylindrical body portion side surface of the single crystal ingot, wherein the receiving unit is a single crystal It comprises a ring-shaped member that inserts the tip of the cone tail portion of the ingot and supports the circumferential surface of the cone tail portion of the single crystal ingot, and a seat member that detachably holds the outer peripheral portion of the ring-shaped member. To do.
[0012]
In this way, the cone unit of the single crystal ingot is supported by the receiving unit, and the straight body side of the single crystal ingot is supported by the support unit. It can be taken out safely, reliably and easily without causing inconvenience such as a fall.
[0013]
Here, the receiving unit inserts the tip of the cone tail portion of the single crystal ingot and holds the ring-shaped member that supports the peripheral surface of the cone tail portion of the single crystal ingot, and the outer peripheral portion of the ring-shaped member is detachably held. It is desirable to consist of a seat member.
Thus, since the tip of the cone tail portion of the single crystal ingot is inserted to support the tail surface of the single crystal ingot, the ingot can be reliably supported. Moreover, since the ring-shaped member is detachably held with respect to the seat member, the ring-shaped member can be appropriately replaced according to the diameter of the single crystal ingot.
[0014]
In addition, the support unit includes a belt-like support portion and a block support portion, and the belt-like support portion is formed in a closed ring shape, and a part of the inner side surface of the ring-closed band is a side surface of the straight body portion of the single crystal ingot The block support portion is formed to be movable in a closed band of the belt-like support portion, and presses a side surface facing the contact surface of the belt-like support portion, so that the straight body of the single crystal ingot It is desirable to sandwich and support the part between the belt-like support part and the block support part.
Since it is configured in this way, the thickness can be reduced compared to the conventional claw part of a jig, and it is not necessary to widen the claw part for gripping. be able to.
[0015]
The support unit includes a base attached to the jig main body so as to be movable up and down, a rotatable handle provided on the base, a right screw portion and a left screw portion that are rotated by the rotation of the handle. A block support portion base that is screwed to any one of the left and right screw portions, a belt-like support portion base that is screwed to another screw portion, and a tip portion of the block support portion base And a ring-shaped belt-like support portion having ends attached to both ends of the belt-like support portion base, and both ends of the block support portion base are provided on the inner wall of the belt-like support portion. It is desirable that the belt-shaped support base is configured to slide on a guide portion provided, and to be guided and moved by a guide portion provided on the base.
Since it is configured in this way, the single crystal ingot can be easily held by a handle operation.
[0016]
Further, the screw pitch of the left screw portion and the right screw portion is formed to be the same, the movement amount of the block support portion and the movement amount of the belt-like support portion are made the same, and the transverse cross-sectional center of the ingot being sandwiched is It is desirable to make the vertical line substantially the same as the center of the ring member.
Since it is comprised in this way, an ingot can be hold | maintained in a substantially vertical state, and stable extraction operation can be performed.
[0017]
The pad provided on at least a portion of the ring-shaped member that contacts the single crystal ingot and a portion of the support unit that contacts the side surface of the straight body portion of the single crystal ingot is selected from graphite and a carbon fiber reinforced composite material. It is desirable to consist of
As described above, at least the portion in contact with the single crystal ingot is made of one kind selected from graphite and carbon fiber reinforced composite material, and thus has excellent heat resistance and can be taken out even at high temperatures.
[0018]
Moreover, it is more desirable from the viewpoint of holding stability of the ingot that a plurality of the support units are arranged in the height direction of the jig body.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of an ingot taking-out jig according to the present invention will be described in detail with reference to FIGS.
1 is a perspective view showing an embodiment according to the present invention, FIG. 2 is a plan view for explaining the structure of the support unit shown in FIG. 1, and FIGS. 3 to 5 are according to the present invention. It is the schematic for demonstrating the ingot taking-out method using a jig | tool.
[0020]
As shown in FIG. 1, the ingot take-out jig 1 according to the present invention is provided with a receiving unit 2 for supporting a single crystal ingot A at the lower end portion of the main body thereof.
The receiving unit 2 includes a ring-shaped member 2a and a seat member 2b that holds the outer peripheral edge thereof. One end portion of the seat member 2b is fixed to the frame 1a of the main body, and the peripheral portion of the ring-shaped member 2a is held at the front end portion thereof.
Then, the tip of the cone tail portion of a single crystal ingot (not shown) is inserted and inserted into the annular hole 2a1 of the ring-shaped member 2a disposed in the seat member 2b, and the bottom peripheral surface of the cone tail portion Is made to contact the peripheral edge 2a2 of the annular hole to support the single crystal ingot A.
[0021]
At least a portion of the ring-shaped member 2a that is in contact with the single crystal ingot is formed of a material having excellent heat resistance and appropriate hardness, such as graphite or a carbon fiber reinforced composite material. The entire ring-shaped member 2a may be formed of a material having excellent heat resistance and appropriate hardness, such as graphite or a carbon fiber reinforced composite material.
[0022]
The ring-shaped member 2a is configured to be detachable from the seat member 2b. Specifically, the peripheral edge of the ring-shaped member 2a is locked to the side wall of the through hole formed in the seat member 2b.
Thus, since the ring-shaped member 2a is detachably attached to the seat member 2b, the ring-shaped member 2a can be appropriately replaced according to the diameter of the single crystal ingot and the shape of the cone tail portion.
[0023]
As described above, the receiving unit 2 supports the cone tail portion at the lower end portion of the ingot. Therefore, in order to avoid the instability caused by this, the jig body is provided with a support unit 3 for locking the straight body portion A1 of the single crystal ingot. FIG. 1 shows a case where two support units 3 are provided above the receiving unit 2.
[0024]
The support unit 3 includes a base 3a whose one end is attached to the main body 1 so as to be movable up and down, a rotatable handle 3b provided on the base 3a, and a right-hand screw that is rotated by the rotation of the handle 3b. A screw portion 3c having a portion 3C2 and a left screw portion 3C1, a block support portion base 3d screwed with the right screw portion 3C2, a belt-like support portion base 3e screwed with the left screw portion 3C1, and the support A block support portion 3f provided on the front end surface of the portion base 3d, and a closed belt-like support portion 3g having ends attached to both ends of the support portion base 3e are provided.
[0025]
Further, both ends of the block support portion base 3d are configured to slide on guide portions 3h provided on the inner wall of the belt-like support portion 3g, and the belt-like support portion base 3e is provided on the base 3a. It is configured to move along the guide portion 3i.
[0026]
Since it is configured in this way, when the handle 3b is rotated, the block support portion 3f moves forward while being guided by the guide portion 3h inside the belt-like support portion 3g. On the other hand, by the rotation of the handle 3b, the belt-like support portion base 3e moves backward while being guided by the guide portion 3i provided on the base 3a. As a result, as indicated by the phantom line in FIG. 2, the distance between the block support portion 3f and the belt-like support portion 3g is reduced, and the single crystal ingot A is sandwiched.
Further, by rotating the handle 3b in the reverse direction, as shown by the solid line in FIG. 2, the space between the block support portion 3b and the belt-like support portion 3g is widened, and the single crystal ingot holding state is released.
[0027]
In addition, by making the screw pitch of the right screw portion 3C2 and the left screw portion 3C1 the same, the movement amount of the block support portion 3f and the movement amount of the belt-like support portion 3g are made the same, and the sandwiched ingot A is traversed. The center of the surface can be on the same vertical line as the center of the ring member 2 a of the receiving unit 2. As a result, the ingot A can be held in a substantially vertical state.
The means for raising and lowering the support unit 3 is not particularly limited. For example, a screw shaft is erected on the main body 1 and a screw that engages with the screw shaft is provided on the support unit 3. Means for moving the support unit 3 up and down by rotating the screw shaft can be used.
[0028]
In addition, a plurality of pads 3j that come into contact with the side surface of the straight body portion of the single crystal ingot are provided on the inner side surface of the belt-like support portion 3g. The pad 3j is preferably formed of a material having excellent heat resistance and appropriate hardness, such as graphite or a carbon fiber reinforced composite material.
Further, since the block support portion 3f is also in contact with the side surface of the straight body portion of the single crystal ingot, it is formed of a material having excellent heat resistance and appropriate hardness, such as graphite or carbon fiber reinforced composite material. Is preferred. The entire block support portion 3f is formed of a material having excellent heat resistance and moderate hardness, such as graphite or carbon fiber reinforced composite material, as well as the portion that contacts the side of the straight body portion of the single crystal ingot. May be.
[0029]
A stopper guide 4 is provided on the side of the main body 1 where the band-like support portion 3g is formed. The stopper guide 4 is preferably composed of a slidable material, for example, Teflon (registered trademark) resin. The stopper guide 4 has a guide portion 4a that slides on the inner surface of the opening, and a stopper portion 4b that contacts the wall surface of the front surface of the opening.
Thereby, the guide and stopper function when inserting the belt-like support portion 3g of the main body 1 into the opening portion 10a can be effectively performed, and the receiving unit 2 and the support unit 3 can be moved to appropriate positions.
[0030]
As described above, since the ingot taking out jig according to the present invention uses the belt-like support portion 3g, the lateral width can be made smaller than that of the jig having the conventional claw portion, and the opening of the pull chamber having the same width can be obtained. The diameter of the single crystal ingot that can be taken out from the portion can be increased.
In addition, the portion of the single crystal ingot that comes into contact with the side surface of the straight body is formed of a material having excellent heat resistance and appropriate hardness, such as graphite or carbon fiber reinforced composite material. It can be taken out even at a temperature of 300 ° C. or higher.
[0031]
Next, a method for taking out a single crystal ingot from the pull chamber using the ingot taking out jig according to the present invention will be described with reference to FIGS.
As shown in FIG. 3, first, the pulled single crystal ingot A is raised to the upper limit position in the pull chamber 10.
On the other hand, the support unit 3 of the ingot take-out jig 1 is positioned at the lower limit position, and the gap between the belt-like support part 3g and the block support part 3f is maximized or at least larger than the diameter of the single crystal ingot A. Next, the belt-like support portion 3g and the block support portion 3f are positioned.
[0032]
Next, as shown in FIG. 4, the door of the pull chamber 10 is opened, and the receiving unit 2 and the support unit 3 are inserted between the lower end of the opening 10 a and between the lower end of the ingot A and the bottom of the opening 10 a, and the stopper Insert to the position where guide 4 hits.
Thereafter, the single crystal ingot A is lowered from the upper limit position to a position where the load cell 5 provided in the single crystal pulling apparatus becomes 0 kg (see FIGS. 4 and 5).
That is, the tip of the cone tail portion A2 of the single crystal ingot A is inserted through the annular hole 2a1 of the ring-shaped member 2a disposed in the seat member 2b, and the bottom peripheral surface of the cone tail portion A2 is the peripheral portion of the annular hole. 2a2 is brought into contact with and lowered to a position where the ring-shaped member 2a supports the ingot A.
[0033]
Thereafter, the support unit 3 is raised to a position where the mounting state of the single crystal ingot A is considered to be most stable.
When the handle 3b is rotated, the block support portion 3b moves forward while being guided by the guide portion 3h inside the belt-like support portion 3g. On the other hand, by the rotation of the handle 3b, the support base 3e moves backward while being guided by the guide 3i provided on the base 3a. As a result, the distance between the block support portion 3b and the belt-like support portion 3g is narrowed, and the straight body portion of the single crystal ingot is sandwiched to prevent the ingot A from being locked and toppled (see FIG. 5).
[0034]
In this state, the seed part A3 suspending the ingot A is folded (see FIG. 5), and the single crystal ingot A is taken out by pulling out the ingot taking-out jig backward.
By rotating the handle 3b in the reverse direction, the space between the block support portion 3b and the belt-like support portion 3g is widened, and the single crystal ingot holding state can be released.
[0035]
【The invention's effect】
According to the present invention, when the pulled single crystal ingot is taken out from the pull chamber, the ingot can be prevented from being accidentally dropped, and the accompanying damage to the single crystal pulling device, possible accidents caused by the accident, operational loss, etc. It can be prevented in advance.
Further, in contrast to the conventional jig holding the straight body portion of the ingot at the claw portion, according to the present invention, since the ingot is supported so as not to fall down, the strength of the support portion that supports the ingot straight body portion. , Rigidity can be lowered. As a result, the lateral width of the support portion can be reduced, and the diameter of the single crystal ingot that can be taken out can be increased.
[0036]
Furthermore, according to the present invention, since a material having good heat resistance is used for the portion in contact with the ingot, the cooling time of the ingot in the pull chamber during operation can be shortened, and the cycle time during operation can be reduced. It can be shortened.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an embodiment of an ingot removing jig according to the present invention.
FIG. 2 is a plan view of the ingot support unit of the ingot take-out jig shown in FIG.
FIG. 3 is a schematic view for explaining an ingot removing method using the ingot removing jig according to the present invention.
FIG. 4 is a schematic view for explaining an ingot removing method using the ingot taking-out jig according to the present invention, and is a schematic view showing steps subsequent to FIG. 3;
FIG. 5 is a schematic diagram for explaining an ingot extracting method using the ingot extracting jig according to the present invention, and is a schematic diagram showing steps subsequent to FIG. 4;
FIG. 6 is a perspective view showing a pull chamber.
FIG. 7 is a cross-sectional view showing a state where a conventional ingot removing jig is inserted into a pull chamber.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Ingot taking-out jig 2 Receiving unit 2a Ring-shaped member 2b Seat member 3 Support unit 3a Base 3b Handle 3c Screw part 3d Block support base 3e Band-shaped support part base 3f Block support part 3g Band-shaped support part 3h Guide part 3i Guide part 3j Pad 4 Stopper guide 5 Load cell 10 Pull chamber 10a Opening part A Single crystal ingot A1 Single crystal ingot straight body part A2 Cone tail part A3 Seed part

Claims (6)

In an ingot takeout jig for taking out a single crystal ingot pulled up by a single crystal pulling apparatus having a pull chamber from the inside of the pull chamber,
The jig body is provided with a receiving unit that supports the cone tail portion of the single crystal ingot, and a support unit that supports the side surface of the straight body portion of the single crystal ingot .
The receiving unit is
A ring-shaped member that inserts the tip of the cone tail of the single crystal ingot and supports the peripheral surface of the cone tail of the single crystal ingot; and a seat member that detachably holds the outer periphery of the ring-shaped member. Characteristic ingot removal jig. The support unit is composed of a belt-like support part and a block support part,
The band-shaped support portion is formed in a closed band shape, and abuts on the side surface of the straight body portion of the single crystal ingot in a part of the inner side surface of the ring band,
The block support portion is formed so as to be movable in a closed band of the belt-like support portion, and presses a side surface facing the contact surface of the belt-like support portion,
The ingot take-out jig according to claim 1, wherein the straight body part of the single crystal ingot is sandwiched and supported by a belt-like support part and a block support part. In an ingot takeout jig for taking out a single crystal ingot pulled up by a single crystal pulling apparatus having a pull chamber from the inside of the pull chamber,
The jig body is provided with a receiving unit that supports the cone tail portion of the single crystal ingot, and a support unit that supports the side surface of the straight body portion of the single crystal ingot.
The support unit is composed of a belt-like support part and a block support part,
The band-shaped support portion is formed in a closed band shape, and abuts on the side surface of the straight body portion of the single crystal ingot in a part of the inner side surface of the ring band,
The block support portion is formed so as to be movable in a closed band of the belt-like support portion, and presses a side surface facing the contact surface of the belt-like support portion,
Said straight body portion of the single crystal ingot sandwiched between planar support portion and the block supporting portion, wherein the to Louis ingots extraction jig to be supported. The support unit includes a base attached to the jig main body so as to be movable up and down, a rotatable handle provided on the base, and a right screw portion and a left screw portion that are rotated by the rotation of the handle. Provided at a screw portion, a block support base that is screwed with any one of the left and right screw portions, a belt-like support base that is screwed with another screw portion, and a tip of the block support base A block support portion, and a belt-like support portion having a ring shape with ends attached to both ends of the belt-like support portion base,
Both ends of the block support portion base are configured to slide on guide portions provided on the inner wall of the belt-like support portion,
The ingot take-out jig according to claim 2 or 3, wherein the belt-like support portion base is configured to be guided and moved by a guide portion provided on the base. The left screw portion and the right screw portion are formed to have the same screw pitch,
5. The movement amount of the block support portion and the movement amount of the belt-like support portion are the same, and the center of the cross section of the ingot to be sandwiched is substantially on the same vertical line as the center of the ring member of the receiving unit. Ingot take-out jig. Pads provided on at least a portion of the ring-shaped member that contacts the single crystal ingot and a portion of the support unit that contacts the side surface of the single crystal ingot of the single crystal ingot were selected from graphite and a carbon fiber reinforced composite material. It consists of 1 type, The ingot extraction jig | tool described in Claim 2 characterized by the above-mentioned.

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