JP4177176B2

JP4177176B2 - Micro hand

Info

Publication number: JP4177176B2
Application number: JP2003159344A
Authority: JP
Inventors: 基英浮穴; 浩司石田
Original assignee: Hitachi High Technologies Corp
Current assignee: Hitachi High Tech Corp
Priority date: 2003-06-04
Filing date: 2003-06-04
Publication date: 2008-11-05
Anticipated expiration: 2023-06-04
Also published as: JP2004358601A

Description

【０００１】
【発明の属する技術分野】
本発明は、試料に対して微細な操作力を与える指片を駆動するマイクロハンド、特にμオーダーの微小試料を扱う装置、例えば、電子顕微鏡，イオンビーム加工装置その他種々の微小試料を扱う装置に使用可能なマイクロハンド（マイクロマニピュレータ，マニピュレータと称されることもある）に関する。
【０００２】
【従来の技術】
電子顕微鏡を用いてμオーダの生物試料(微小試料)を観察する場合、ハンド機構の要素となる針状の棒（指片）を単数或いは複数用いて、この指片を試料室外部から微細操作してその操作力を試料に加える技術が知られている。
【０００３】
電子顕微鏡など真空雰囲気の試料室に用いられるマイクロハンドは、試料室内部で動作する指片及びその駆動機構よりなるハンド機構と、このハンド機構を保持し且つその位置調整を試料室外部より行う位置調整機構とを備える。
【０００４】
針状の指片を用いる場合には、試料の表面を観察するだけではなく、内部の組織を表面に引き出して観察をすることができる。
【０００５】
電子顕微鏡やイオンビーム加工装置の試料にマイクロハンドを用いて操作力を与える場合、試料室は真空雰囲気にある。したがって、試料室外部（大気）より指片を操作する場合には、試料室を形成する壁体にハンド機構を支持するホルダーを気密状に貫通配置している。また、アクチュエータを駆動する電力供給用及び電気信号検出用のリード線を、試料室内から真空外へ引き出す必要がある。
【０００６】
この種のリード線配線技術としては、本願発明者らは、例えば、特許文献１（特開２００２−１０３２９８号公報）に示すものを提案している。この技術は、試料室の壁に気密端子を独自に貫通配置し、この端子の一端とハンド機構（指片及びその駆動機構を一つの組立体としたもの）とを、試料室内部でリード線を介して接続し、また、前記端子の他端には、試料室外部で制御装置に引き出されるリード線を接続している。
【０００７】
このような配線技術は、リード線のテンションがマイクロハンドの駆動機構にかかり易い構造であるため、指片の微細な動きを阻害し振動を発生させる要因となっている。
【０００８】
さらに本発明者らは、特許文献２（特開２００２−１８７０７９号）において、マイクロハンドの位置調整機構（ホルダー）と気密端子とを、一つのフランジに集約的に配設し、このフランジを試料室の壁部に取り付ける技術を提案している。これも前述と同様に、リード線のテンションがマイクロハンドの駆動機構にかかり易い構造になっている。この他に試料の微細作業を行う装置として、特許文献３（特開平１１−２５４３５６号公報）、特許文献４（特開２００１−９１８５７号公報）等があるが、リード線を真空外へ取り出す技術については、提案されていない。
【０００９】
また、本発明者は、特許文献５（特開平６−３１００６９号公報）に記載した電子顕微鏡の試料支持装置において、半導体試料を保持する支持装置（ホルダー）の内部に、半導体試料に電圧を印加するためのコードを通した技術を提案している。これは試料へ電圧を供給するためのものであり、マイクロハンドのように試料に微細な動きをさせるものではなく、試料に微細な動きを与える上でのリード線に作用するテンションの問題について示唆されていない。
【００１０】
特許文献６（特開平１０−６９６１８号公報）では、荷電粒子装置（例えば透過型電子顕微鏡）において、その鏡体の一部（試料室壁部）に移動機構を設けて、この移動機構が試料室内で試料固定台、端子、固定台保持部の組立体を保持する技術が開示されている。この公知例は、試料室内部（真空雰囲気）で試料−信号線（リード線）−端子−信号線（リード線）を接続し、この信号線を鏡体を通して外部に引き出す技術が開示されている。
【００１１】
この従来技術は、試料室内部のリード線の配線量が比較的多くなるので、アウトガスの対策が必要になる。ここで、アウトガスとは、リード線の被覆材から出る被覆材成分ガスや、リード線が撚り線の場合には、撚り線間に含まれる空気であり、コンタミネーション、真空低下の原因となるものである。
【００１２】
【特許文献１】
特開２００２−１０３２９８号公報の図１の実施例
【特許文献２】
特開２００２−１８７０７９号公報の図１の実施例
【特許文献３】
特開平１１−２５４３５６号公報
【特許文献４】
特開２００１−９１８５７号公報
【特許文献５】
特開平６−３１００６９号公報の図１、図２の実施例
【特許文献６】
特開平１０−６９６１８号公報の図１の実施例
【００１３】
【発明が解決しようとする課題】
マイクロハンドを駆動する電力供給用及び電気信号検出用のリード線を、試料室内から試料室外へ引き出すための電気配線には、種々の課題がある。
【００１４】
一つは、例えばマイクロハンドの適用対象が電子顕微鏡などの場合には、高い倍率で観察するのでリード線のテンションがハンド機構（指片とその駆動機構の組立体）にかかると指片先端の振動要因となって、それが拡大され焦点が合わなくなる等の精度低下の原因となる。
【００１５】
二つめは、電気信号を引き出すリード線からのアウトガスによるコンタミネーション発生、真空低下を抑制することが望まれる。
【００１６】
本発明の目的は、上記課題を解決して、電子顕微鏡のような真空下、電子線照射の下でも、支障なく、微小対象物を摘んだり、移動させたり、回転させたり、開放動作を行い、今まで以上に微小物の観察や組立等を可能にする精度の良いマイクロハンドを提供することにある。
【００１７】
【課題を解決するための手段】
本発明は、上記課題を解決するために基本的には、次のように構成した。
【００１８】
一つは、真空の試料室内で単数或いは複数の指片を電気信号に基づき駆動するマイクロハンドにおいて、前記指片及びその駆動機構を保持し且つ試料室内における前記指片の位置を試料室外部から調整し得る可動ホルダーと、前記指片を駆動する電力供給用及び電気信号検出用のリード線を試料室内から試料室外へ引き出すための気密端子と、前記気密端子を保持する端子保持部と、を備える。そして、前記可動ホルダーと前記端子保持部とが、同軸一体構造をなして気密シールを伴って前記試料室の内外を仕切る位置に設ける構成にした。
【００１９】
また、上記構成に関連して、前記可動ホルダーは、気密シールを伴って前記試料室の内外を仕切る位置に配置され、前記端子保持部は、前記可動ホルダー内に試料室内外を遮るようにして配置したマイクロハンドを提案する。
【００２０】
【発明の実施の形態】
以下、本発明の実施例を図面を参照して説明する。
【００２１】
図１は、本発明の一実施例であるマイクロハンドの取付け状態を示す断面図である。マイクロハンドは、一例として、走査電子顕微鏡に適用されている。
【００２２】
図２は、上記実施例に使用されるマイクロハンドのハンド機構（指片とその駆動機構との組立体）を示す図、図３はその指片の一つを示す図（図２のＡ部詳細図）である。
【００２３】
図１において、試料室２は、対物レンズ１の試料観察に使用され、対物レンズ１の下部に配置される。試料室２は、使用時に真空雰囲気にあり、試料３０を固定する試料台２９を収容している。
【００２４】
試料室２の内部には、マイクロハンド１０のハンド機構１０Ａが配置されている。ハンド機構１０Ａは、単数或いは複数の針状の指片１５，１６及びそれを駆動する駆動機構１１との組立体（ユニット）よりなる。
【００２５】
マイクロハンド１０は、ハンド機構１０Ａとそれを保持する可動ホルダー１０Ｂと備えて成る。
【００２６】
可動ホルダー１０Ｂは、軸方向に一体成形したスリーブ状の中空軸部１０Ｂ´とロッド１０B″とを有する。中空軸部１０Ｂ´はロッド１０Ｂ″よりも大径であり、両者は同一軸線上に配置されている。ハンド機構１０Ａは、可動ホルダー１０Ｂの先端（反ロッド１０Ｂ″側）に支持ベース６０を介して取り付けられている。
【００２７】
試料室２の壁体２ａに、可動ホルダー１０Ｂを保持する筒体３が壁体２ａを貫通するようにして気密状に固定されている。２ｂは、壁体２ａに設けた筒体３の貫通孔である。
【００２８】
本実施例では、筒体３は、フランジ３ａを有し、このフランジ３ａを壁体２ａにシールリング４０を介して、ねじ止め（図示省略）することで、耐真空的に取り付けられている。また、筒体３は溶接により壁体２ａに取り付けてもよい。
【００２９】
筒体３の内部に、可動ホルダー１０Ｂが、後述するスクリュー機構９および球面対偶４（首振運動機構５）を介して、Ｘ，Ｙ，Ｚ軸方向の動作が可能に組み込まれている。この可動ホルダー１０Ｂの組み込みは、気密シール３１を伴って組み込まれている。気密シール３１は、Oリングにより構成され、可動ホルダー１０Bの中空軸部１０Ｂ´の外周に設けた溝５０にはめ込まれている。
【００３０】
可動ホルダー１０Ｂは、この気密シール３１を支点として首振り動作（Ｙ軸，Ｚ軸方向の動作を含む）が可能になるようにしてある。
【００３１】
ここで、可動ホルダー１０Ｂのスクリュー機構９及び首振運動機構５について説明する。
【００３２】
筒体（外筒）３は、内部に凸球面４ａを形成した隔壁４１が形成されている。この隔壁４１を境にして、筒体３内部の試料室側に可動ホルダー１０Ｂの中空軸部１０Ｂ´が配置され、またロッド１０Ｂ″は、隔壁４１に設けた孔４３を通して隔壁４１よりも反試料室側に延出している。
【００３３】
ロッド１０Ｂ″は、その外周に首振運動機構５の軸６が嵌合している。軸６は、ロッド１０Ｂ″の溝４５にビス４４により固定されている。軸６の一端は凹球面４ｂをなし、先に述べた凸球面４ａと凹球面４ｂとが係合することで球面対偶（すべり対偶）４を構成している。この場合、隔壁４１側を凹球面、軸６側を凸球面としてもよい。
【００３４】
軸６の外周面には、Ｙ軸，Ｚ軸にそれぞれ首振り操作用の調整つまみ（ねじ）６１と戻しばね付の軸抑え４６とが配置されており、この調整ねじ６１と軸抑え４６は、筒体３に設けられている。
【００３５】
調整ねじ６１を進退動作させることにより、球面対偶４のすべり動作により可動ホルダー１０Ｂ（中空軸部１０Ｂ´）がシール３１を支点にして首振運動する。球面対偶４の球面の半径Ｒは、気密シール３１の半径と可動ホルダー１０Ｂの軸線とが交わる点から前記球面までの距離に一致する。
【００３６】
ロッド１０Ｂ″の後端部（反試料室側の端部）には、スクリュー機構９の雄ねじ９ａが設けられ、この雄ねじ９ａにつまみ（雌ねじ９ｂ）が螺合している。つまみ９ｂを回すことにより、可動ホルダー１０Ｂは、ロッド１０Ｂ″外周の溝４５の範囲内で進退動作（Ｘ軸方向の移動動作）を行う。
【００３７】
可動ホルダー１０Ｂ（中空軸部１０Ｂ´）内部の先端側には、端子保持部４７が試料室内外を遮るようにして固定配置されている。この端子保持部４７には、複数の気密端子２５が貫通保持されている。気密端子２５は、指片（ハンド機構１０Ａ）１５，１６を駆動するための電力供給用及び電気信号検出用のリード線２４，２６を試料室内から試料室外へ引き出すためのものである。
【００３８】
すなわち、可動ホルダー１０Ｂと端子保持部４７とは、同軸一体構造をなして気密シール３１を伴って試料室２の内外を仕切る位置に設けられている。また、ハンド機構１０Ａ（指片駆動機構）と可動ホルダー１０Ｂと端子保持部４７とが同軸上に配置されている。
【００３９】
可動ホルダー１０Ｂ内に設けた端子保持部４７は、少なくとも一部が試料室の内外を仕切る位置（壁２ａ）にかかるように配置され、球面対偶４が端子保持部４７よりも可動ホルダー１０Ｂの力点（つまみ）６１側に配置されている。
【００４０】
また、可動ホルダー１０Ｂが回動するための支点（気密シール３１）は、可動ホルダー１０Ｂの力点６１と作用点（ハンド機構１０Ａ）との間の中点よりも作用点側に位置して力点の動きを縮小して伝達するようにしてある。
【００４１】
端子保持部４７は、試料室内外のリード線２４，２６の中継点となる。それによって、気密端子２５の一端とハンド機構（指片の駆動機構）１０Ａとが試料室雰囲気の中でリード線２４を介して電気的に接続され、且つ気密端子２５のもう一端に接続されるリード線２６が試料室外部に引き出されている。
【００４２】
このようなリード線接続態様は、真空中のリード線２４の長さを最短にすることができる。
【００４３】
ハンド機構１０Ａのベース６０には、リード線２４を通す孔６０´が設けられている。また、可動ホルダー１０Ｂと筒体３の側面には、リード線２６を試料室外部に引き出すための窓４８，４９が設けられている。
【００４４】
本実施例に用いるハンド機構１０Ａの詳細は、図２に示してある。このハンド機構１０Ａについては、既に知られたものである。また、ハンド機構については、従来種々のタイプのものが知られているが、本発明は、これらに適用可能である。
【００４５】
本例におけるハンド機構１０Ａは、指片１５，１６とその駆動機構１１とによって構成される。駆動機構１１は、第１のパラレルリンク機構１１Ａと第２のパラレルリンク機構１１Bとによる簡便な機構により構成される。
【００４６】
パラレルリンク機構１１Ａの中心軸とパラレルリンク機構１１Ｂの中心線とが一致するように、これらのリンク機構１１、１１Ｂが対向配置されている。
【００４７】
パラレルリンク機構１１は、中心孔１３ａのある円板形状の基体１３およびこの基体１３に対向配置された円板形状の中間部材１４を備える。基体１３と中間部材１４とは、複数（例えば６本）のリンク１８により連結されている。一方、パラレルリンク機構１１Bは、パラレルリンク機構１１Ａの構成部材を兼ねる中間部材１４およびこの中間部材１４に対向配置された円板形状のベース１７を備える。この中間部材１４とベース１７とは、複数（例えば６本）のリンク１９により連結されている。
【００４８】
基体１３の上面には、第１の指片１５の基端部が固着され、第１指片１５の先端部が外方に延出している。この第１指片１５は、図３に詳細に示すように、基端部を形成する支柱１５ａにネジにより固着されたボールジョイント１５ｃと、このボールジョイント１５ｃのボール１５ｄに連結された筒体１５ｅと、この筒体１５ｅ内に挿入止着される先端部のニードル１５ｆとを備え、ボールジョイント１５ｃによりニードル１５ｆを任意方向に向けることができるように支持されている。ボールジョイント１５ｃは、支持体１５により支持され、支持体１５を介してボールジョイント１５ｃと支柱１５ａとが連結される。
【００４９】
一方、中間部材１４においては、基体１３より大きい円板の中心位置に、第２の指片１６の基端部が固着され、その先端部は、基体１３の中心孔１３ａを貫通して外方に延出させている。この指片１６は、基端部を形成する支柱１６ａと、この支柱１６ａの端部に止着された先端部のニードル１６ｂとを備える。この指片１６と指片１５のそれぞれの先端部、即ち、ニードル１６ｂとニードル１５ｆとが、両者間に微小な相対運動を生じさせるように対向配置されている。また、上記基体１３と中間部材１４とは、前述のように、６本のリンク１８により連結され、これらのリンク１８によって形成されるリンク機構は、主として指片１５と指片１６とに微小な相対運動を生成させる機能を果たすものである。更に、中間部材１４とベース部材１７とは、前述のように、６本のリンク１９により連結され、これらのリンク１９によって形成されるリンク機構は、主として、広い作業空間にある対象物に対する指片１５および指片１６の位置決め機能を果たすものである。
【００５０】
パラレルリンク機構１１Ａを構成する６本のリンク１８は、その３本ずつをそれぞれ１群とする。各群のリンク１８の基体１３および中間部材１４との接続点を、基体１３と中間部材１４との中心軸線の周りの円周上にほぼ等分に配する。且つ両群のリンク１８を互いに反対方向に傾斜させて配設する。更に詳細には、基体１３において一方の群の接続点と他方の群の接続点とは、上記中心軸線の周りのほぼ同じ位置に配設される。また、中間部材１４において一方の群の接続点と他方の群の接続点とは、上記中心軸線の周りのほぼ同じ位置に配設される。これによって、両群の互いに隣接するリンク１８は、所定の傾斜角をなすように配設している。
【００５１】
パラレルリンク機構１１Bを構成する６本のリンク１９もまた、その３本ずつをそれぞれ１群とする。各群のリンク１９の中間部材１４およびベース部材１７との接続点を中心軸線の周りにほぼ等分に配する。且つ両群のリンク１９を互いに反対方向に傾斜させて配設している。リンク１８、１９のそれぞれには、それらを伸縮にするアクチュエータ２０、２１がそれぞれ設けられる。それらのアクチュエータによってパラレルリンク機構１１Ａの動作を制御する第１駆動制御手段、およびパラレルリンク機構１１Bの動作を制御する第２駆動制御手段を形成している。上記各リンクに設けるアクチュエータとしては、積層型圧電素子などを採用している。
【００５２】
パラレルリンク機構１１Bに用いられているアクチュエータ２１は、広い作業空間にある対象物に対する位置決め制御を行うため、必要に応じて、パラレルリンク機構１１Ａのアクチュエータ２０に比べて伸縮量の大きいものを用いるのが望ましい。
【００５３】
アクチュエータ２０、２１として用いる積層型圧電素子は、応答が速く、微小変位と高出力が得られるものの、ヒシテリシスが非常に大きく、駆動電圧のみによるオープンループ制御では、正確な位置決めを行うことが困難であるため、変位量を測定してフィードバック制御することが望ましく、この場合には、特に、コンパクトな変位測定手段とサーボ駆動系が要求される。
【００５４】
このような変位測定手段としては、図２に示すように、圧電素子からなるアクチュエータ２０、２１の伸縮方向に直接貼設して、それら圧電素子の微小な変位を検出する歪みゲージ２２、２３を採用している。また、上記圧電素子のサーボ系としては、計算機を用いたソフトウエアサーボや演算増幅器を用いたアナログサーボ等を採用している。
【００５５】
アクチュエータ２０、２１および歪みゲージ２２、２３からのリード線２４は気密端子２５を介して大気側へ導びかれサーボ系制御回路（図示は省略してある）に接続している。
【００５６】
リード線２４の数はアクチュエータ２０、２１から２４本（アクチュエータの数１２個×２本）、歪みゲージ２２、２３から２４本（歪みゲージの数１２枚×２本）計４８本になっており、気密端子２５のピン数もその数に見合った数になっている。
【００５７】
次に、本実施例に係るマイクロハンド機構の動作を説明する。
【００５８】
マイクロハンドのハンド機構１０Ａは、予め試料室２にセットされ、走査電子顕微鏡を所定の手順で操作して表示画面に像を出す。そして、粗の位置調整機構をなす可動ホルダー１０Ｂをつまみ９ｂや６１を用いて操作することによって、所望の視野を選び、生物試料の場合次のような微細操作を行う。
【００５９】
必要に応じて、ハンド機構１０Ａに対して、つまみ９ｂによるＸ軸方向位置調整とつまみ４４（首振運動機構５）によるＹ軸，Ｚ軸方向位置調整を行なうことで、試料３０のどの部分に指片１５，１６の微細操作力を加えるのか決める。所定の対象物をハンドリングする場合は、アクチュエータ２１による６本のリンク１９により、下部パラレルリンク機構１２を制御し、第１指片１５と第２指片１６とを上記対象物に対して位置決めする。且つ、アクチュエータ２０による６本のリンク１８により、上部パラレルリンク機構１１を制御し、第１指片１５と第２指片１６とに微小な相対運動を生成させる。
【００６０】
すなわち、まず、６本のリンク１９のアクチュエータ２１を駆動して、それらリンク１９を所定量だけ伸縮させる。それによって、指片１５と指片１６とを広い作業空間にある対象物に対し位置決めするが、この位置決めは、歪みゲージ２２から各リンク１９の変位量を検出し、この変位量から指片１５および指片１６の現位置を算出し、これをフィードバックして指片１５および指片１６に対する位置決め指令値と比較し、その偏差量がなくなるまでアクチュエータ２１をサーボ駆動することにより行う。
【００６１】
そして、位置決めされた第２の指片１６に対し、６本のリンク１８のアクチュエータ２０を駆動してこれらリンク１８を所定量だけ伸縮させ、第１指片１５および第２指片１６とに微小な相対運動を生成させる。
【００６２】
この相対運動の生成は、上述の位置決めの場合と同様に、歪みゲージ２２から各リンク１８の変位量を検出して、この変位量から指片１５および１６の相互の相対位置を算出し、指片１５および１６に所定の相対運動を生成させるようにアクチュエータ２０をサーボ駆動することにより行う。次に、例えば、対象物を指片１５と１６とにより摘んで所定の場所に移動させる場合には、パラレルリンク機構１２を制御するだけでよい。
【００６３】
このように、パラレルリンク機構１１、１２にそれぞれ上記機能をそれぞれ分担させることにより、動作領域が広く、しかも広い動作領域内で微小な相対運動を生成して、容易に対象物をハンドリングすることができる。なお、上述したマイクロハンド機構は、真空中、電子線下で数ミクロンｍ程度の微小物体(例えば細胞等)を対象とし２本指でそれを摘んで、並進、回転移動による位置決め、把持、押付け、切断、引き伸ばし、圧搾、穴明け、かき混ぜ、はね飛ばし等を行うために有効なものである。
【００６４】
本実施例によれば、次のような効果を奏する。
【００６５】
▲１▼試料室の内外を仕切る位置にある可動ホルダー１０Bの内部に、端子保持部４７が試料室内外を遮るようにして配置される。それによって、可動ホルダー１０Bと端子保持部４７とが、同軸一体或いはそれに近い構造をなす。
【００６６】
このような構造は、端子保持部４７を試料室内外のリード線中継点とすることによって、試料室内のリード線２４の長さをできるだけ短くでき、省線ひいてはリード線２４のハンド機構１０Ａにかかる負荷を小さくすることができる（換言すれば、リード線の大部分は、符号２６に示す端子保持部４７より大気側に出たリード線となり、このリード線２６はハンド機構１０Ａに負荷を与えない）。特に、ハンド機構１０Ａと可動ホルダー１０Ｂと端子保持部４７とが同軸上に配置されると、リード線２４は接続対象物間に最短距離で接続されることになる。また、リード線２４により接続されるハンド機構１０Ａと端子保持部４７とは、可動ホルダー１０Bと一体に動くので、リード線２４にさほど弛みをもたせなくともリード線２４のテンションの影響をハンド機構１０Ａにほとんで与えない配線構造にすることができる。マイクロハンド１０の全体の動きに追随してリード線２４も同じ動きをするので、指片１５と１６に微細な動きをさせるときの妨げとなっていない。
【００６７】
したがって、リード線の配線は複数の針状指片の動きと干渉せずに引き出され、リード線によって針状指片の微細な動きが阻害されることがない。
【００６８】
それによって、試料の微細操作を精度良く行うことができる。
【００６９】
▲２▼また、首振り機構５の球面対偶４が端子保持部４７よりも力点６１側に配置されているので、球面対偶４と力点６１間の距離を短くすることで、振動に強い首振り機構が実現でき、それによってハンド機構ひいては指片に微細動作の精度をさらに向上させることができる。
【００７０】
▲３▼また、可動ホルダー１０Bが回動するための支点３１は、力点６１と作用点１０Ａの間の中点よりも作用点側に位置しているので、力点の動きを縮小して伝達することができ、微細動作の精度をさらに向上させることができる。
【００７１】
▲４▼また、試料室外（真空外）でリード線の大部分２６を引き出すことで、試料室内（真空中）のリード線を減少させ、それによって、アウトガスによるコンタミネーションの要因や真空を低下させる要因を大幅に減少させることができる。
【００７２】
特に、真空中では、リード線の種類に制限があるが（アウトガスの発生をさけるために被覆材の成分ガスが発生しにくい線材や隙間に空気含有が多い撚り線の使用をできるだけ避けるなど）、本実施例では、このような制限にとらわれず、リード線を使用できる利点がある。
【００７３】
▲５▼電子顕微鏡の持つ高い倍率と高い分解能は、マイクロハンドについても高精度の微細操作力を要求するが、本発明によれば、このような要求に応えることができる。それによって、本発明は、マイクロエレクトロニクス、バイオテクノロジー、医療の分野により貢献することが可能となる。
【００７４】
なお、本発明に係るマイクロハンドは、電子顕微鏡に限らず、種々のμオーダーの試料操作が要求されるものに適用可能である。
【００７５】
【発明の効果】
本発明によれば、例えば、電子顕微鏡のような真空下、電子線照射の下でも、試料に対して今まで以上に高精度の微細操作力を与えることにより、精度が高くい試料微小物の観察や組立等を可能にし、しかも、その試料操作の操作性を向上させることができる。
【００７６】
その他に、装置の省配線化を実現でき、また、配線からのアウトガスの低減、つまり真空の低下とコンタミテーションの要因を少なくすることができる。
【図面の簡単な説明】
【図１】本発明の一実施例であるマイクロハンドの取付け状態を示す断面図。
【図２】上記実施例に使用される二本指ハンド機構の斜視図。
【図３】図２のＡ部詳細を示す要部断面図。
【符号の説明】
２…試料室、２ａ…試料室の壁体、３…筒体、４…球面対偶、５…首振運動機構、１０…マイクロハンド、１０Ａ…ハンド機構、１０Ｂ…可動ホルダー、１１…指片駆動機構、１５，１６…指片、２４，２６…リード線、２５…気密端子、４７…端子保持部、３１…気密シール。[0001]
BACKGROUND OF THE INVENTION
The present invention is applied to a microhand that drives a finger piece that gives a fine operating force to a sample, particularly a device that handles a micro sample of μ order, such as an electron microscope, an ion beam processing device, and other devices that handle various micro samples. The present invention relates to a usable micro hand (micro manipulator, sometimes called a manipulator).
[0002]
[Prior art]
When observing μ-order biological specimens (micro specimens) using an electron microscope, one or more needle-shaped bars (finger pieces), which are elements of the hand mechanism, are used to finely manipulate the finger pieces from outside the sample chamber. A technique for applying the operating force to a sample is known.
[0003]
A micro hand used in a sample chamber in a vacuum atmosphere, such as an electron microscope, has a finger mechanism that operates in the sample chamber and a drive mechanism thereof, and a position that holds the hand mechanism and adjusts its position from the outside of the sample chamber. An adjustment mechanism.
[0004]
In the case of using a needle-like finger piece, not only the surface of the sample is observed but also the internal tissue can be pulled out and observed.
[0005]
When operating force is applied to a sample of an electron microscope or an ion beam processing apparatus using a micro hand, the sample chamber is in a vacuum atmosphere. Therefore, when the finger piece is operated from the outside of the sample chamber (atmosphere), a holder for supporting the hand mechanism is disposed in an airtight manner in the wall forming the sample chamber. Moreover, it is necessary to draw out the lead wires for power supply and electric signal detection for driving the actuator from the sample chamber to the outside of the vacuum.
[0006]
As this type of lead wiring technique, the inventors of the present application have proposed, for example, a technique disclosed in Patent Document 1 (Japanese Patent Laid-Open No. 2002-103298). In this technology, a hermetic terminal is uniquely placed through the wall of the sample chamber, and one end of this terminal and the hand mechanism (the finger piece and its drive mechanism are combined into one assembly) are connected to the lead wire inside the sample chamber. In addition, the other end of the terminal is connected to a lead wire drawn out to the control device outside the sample chamber.
[0007]
Such a wiring technique has a structure in which the tension of the lead wire is likely to be applied to the driving mechanism of the microhand, and thus is a factor that inhibits minute movement of the finger piece and generates vibration.
[0008]
Further, the inventors of the present invention disclosed in Patent Document 2 (Japanese Patent Laid-Open No. 2002-187079) that a microhand position adjusting mechanism (holder) and an airtight terminal are collectively arranged on one flange, and this flange is used as a sample. It proposes a technology to attach to the wall of the room. This also has a structure in which the tension of the lead wire is easily applied to the driving mechanism of the microhand, as described above. In addition to this, there are Patent Document 3 (Japanese Patent Laid-Open No. 11-254356), Patent Document 4 (Japanese Patent Laid-Open No. 2001-91857), etc. as apparatuses for performing a fine work on a sample. Has not been proposed.
[0009]
Further, the present inventor applied a voltage to the semiconductor sample inside the support device (holder) for holding the semiconductor sample in the sample support device for the electron microscope described in Patent Document 5 (Japanese Patent Laid-Open No. 6-310069). The technology through the code to do is proposed. This is to supply voltage to the sample, and does not cause the sample to move finely like a micro hand, but suggests a problem of tension acting on the lead wire in giving fine movement to the sample. It has not been.
[0010]
In Patent Document 6 (Japanese Patent Laid-Open No. 10-69618), in a charged particle device (for example, a transmission electron microscope), a moving mechanism is provided on a part of the mirror body (sample chamber wall), and this moving mechanism is a sample. A technique for holding an assembly of a sample fixing base, a terminal, and a fixing base holding part in a room is disclosed. This known example discloses a technique in which a sample-signal wire (lead wire) -terminal-signal wire (lead wire) is connected in a sample chamber (vacuum atmosphere), and the signal wire is drawn out through a mirror body. .
[0011]
In this prior art, the amount of lead wires in the sample chamber is relatively large, and therefore countermeasures against outgas are required. Here, outgas is a coating material component gas that comes out of the coating material of the lead wire, or, if the lead wire is a stranded wire, it is the air contained between the stranded wires, which causes contamination and reduced vacuum It is.
[0012]
[Patent Document 1]
FIG. 1 embodiment of Japanese Patent Laid-Open No. 2002-103298 [Patent Document 2]
FIG. 1 embodiment of Japanese Patent Laid-Open No. 2002-187079 [Patent Document 3]
JP-A-11-254356 [Patent Document 4]
JP 2001-91857 A [Patent Document 5]
Examples of FIGS. 1 and 2 of JP-A-6-310069 [Patent Document 6]
FIG. 1 embodiment of Japanese Patent Laid-Open No. 10-69618
[Problems to be solved by the invention]
There are various problems in electrical wiring for drawing out the lead wires for power supply and electric signal detection for driving the microhand from the sample chamber to the outside of the sample chamber.
[0014]
For example, when the application object of the micro hand is an electron microscope, for example, since observation is performed at a high magnification, if the tension of the lead wire is applied to the hand mechanism (the assembly of the finger piece and its driving mechanism), It becomes a vibration factor, which causes a reduction in accuracy such as expansion and loss of focus.
[0015]
Secondly, it is desired to suppress the occurrence of contamination due to outgas from the lead wire from which an electric signal is drawn out and the vacuum drop.
[0016]
The object of the present invention is to solve the above-mentioned problems and perform picking, moving, rotating, and opening operations of a micro object without any trouble even under vacuum or electron beam irradiation like an electron microscope. It is an object of the present invention to provide a micro hand with high accuracy that enables observation, assembly, and the like of minute objects than ever.
[0017]
[Means for Solving the Problems]
In order to solve the above problems, the present invention is basically configured as follows.
[0018]
One is a micro hand that drives one or more finger pieces in a vacuum sample chamber based on an electrical signal, and holds the finger pieces and the driving mechanism thereof, and positions the finger pieces in the sample chamber from the outside of the sample chamber. A movable holder that can be adjusted, an airtight terminal for pulling out a lead wire for power supply and electric signal detection for driving the finger piece from the sample chamber to the outside of the sample chamber, and a terminal holding portion for holding the airtight terminal. Prepare. Then, the movable holder and the terminal holding part are provided in a position that forms a coaxial integrated structure and partitions the inside and outside of the sample chamber with an airtight seal.
[0019]
Further, in relation to the above configuration, the movable holder is disposed at a position for partitioning the inside and outside of the sample chamber with an airtight seal, and the terminal holding portion is configured to block the outside of the sample chamber within the movable holder. Propose the arranged micro hand.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0021]
FIG. 1 is a cross-sectional view showing a mounting state of a microhand according to an embodiment of the present invention. The microhand is applied to a scanning electron microscope as an example.
[0022]
FIG. 2 is a view showing a hand mechanism (an assembly of finger pieces and their drive mechanisms) of the micro hand used in the above embodiment, and FIG. 3 is a view showing one of the finger pieces (part A in FIG. 2). Detailed view).
[0023]
In FIG. 1, a sample chamber 2 is used for observing a sample of the objective lens 1 and is disposed below the objective lens 1. The sample chamber 2 is in a vacuum atmosphere at the time of use, and accommodates a sample stage 29 for fixing the sample 30.
[0024]
Inside the sample chamber 2, a hand mechanism 10A of the microhand 10 is arranged. The hand mechanism 10A includes an assembly (unit) of one or a plurality of needle-like finger pieces 15 and 16 and a drive mechanism 11 that drives the finger pieces 15 and 16.
[0025]
The microhand 10 includes a hand mechanism 10A and a movable holder 10B that holds the hand mechanism 10A.
[0026]
The movable holder 10B has a sleeve-shaped hollow shaft portion 10B ′ and a rod 10B ″ integrally formed in the axial direction. The hollow shaft portion 10B ′ has a larger diameter than the rod 10B ″, and both are disposed on the same axis. Has been. The hand mechanism 10A is attached to the tip of the movable holder 10B (on the side opposite to the rod 10B ″) via a support base 60.
[0027]
A cylindrical body 3 that holds the movable holder 10B is fixed to the wall 2a of the sample chamber 2 in an airtight manner so as to penetrate the wall 2a. 2b is a through-hole of the cylinder 3 provided in the wall 2a.
[0028]
In the present embodiment, the cylindrical body 3 has a flange 3a, and is attached to the wall body 2a via a seal ring 40 by screwing (not shown) so as to be vacuum-resistant. Moreover, you may attach the cylinder 3 to the wall 2a by welding.
[0029]
A movable holder 10B is incorporated in the cylindrical body 3 through a screw mechanism 9 and a spherical pair 4 (oscillating motion mechanism 5), which will be described later, so as to be able to operate in the X, Y, and Z axis directions. The movable holder 10 </ b> B is incorporated with an airtight seal 31. The hermetic seal 31 is composed of an O-ring, and is fitted in a groove 50 provided on the outer periphery of the hollow shaft portion 10B ′ of the movable holder 10B.
[0030]
The movable holder 10B is capable of swinging (including operations in the Y-axis and Z-axis directions) with the hermetic seal 31 as a fulcrum.
[0031]
Here, the screw mechanism 9 and the swing motion mechanism 5 of the movable holder 10B will be described.
[0032]
The cylindrical body (outer cylinder) 3 is formed with a partition wall 41 having a convex spherical surface 4a formed therein. With the partition wall 41 as a boundary, the hollow shaft portion 10B ′ of the movable holder 10B is disposed on the sample chamber side inside the cylindrical body 3, and the rod 10B ″ passes through the hole 43 provided in the partition wall 41 and is more anti-sample than the partition wall 41. It extends to the room side.
[0033]
The shaft 10 of the swing motion mechanism 5 is fitted to the outer periphery of the rod 10B ″. The shaft 6 is fixed to the groove 45 of the rod 10B ″ by a screw 44. One end of the shaft 6 forms a concave spherical surface 4b, and the convex spherical surface 4a and the concave spherical surface 4b described above are engaged to constitute a spherical pair (sliding pair) 4. In this case, the partition wall 41 side may be a concave spherical surface, and the shaft 6 side may be a convex spherical surface.
[0034]
On the outer peripheral surface of the shaft 6, an adjustment knob (screw) 61 for swinging operation and a shaft stopper 46 with a return spring are arranged on the Y axis and the Z axis, respectively. The cylindrical body 3 is provided.
[0035]
By moving the adjustment screw 61 back and forth, the movable holder 10B (hollow shaft portion 10B ′) swings about the seal 31 by the sliding motion of the spherical pair 4. The radius R of the spherical surface of the spherical pair 4 coincides with the distance from the point where the radius of the hermetic seal 31 and the axis of the movable holder 10B intersect to the spherical surface.
[0036]
A male screw 9a of the screw mechanism 9 is provided at the rear end portion (end portion on the side opposite to the sample chamber) of the rod 10B ″, and a knob (female screw 9b) is screwed to the male screw 9a. The knob 9b is turned. Thus, the movable holder 10B performs an advance / retreat operation (a movement operation in the X-axis direction) within the range of the groove 45 on the outer periphery of the rod 10B ″.
[0037]
A terminal holding portion 47 is fixedly disposed at the distal end inside the movable holder 10B (hollow shaft portion 10B ′) so as to block the outside of the sample chamber. A plurality of airtight terminals 25 are held through the terminal holding portion 47. The airtight terminal 25 is used to pull out the lead wires 24 and 26 for power supply and electric signal detection for driving the finger pieces (hand mechanism 10A) 15 and 16 from the sample chamber to the outside of the sample chamber.
[0038]
That is, the movable holder 10 </ b> B and the terminal holding portion 47 are provided at a position where the inner and outer sides of the sample chamber 2 are partitioned with the airtight seal 31 with a coaxial integrated structure. Further, the hand mechanism 10A (finger drive mechanism), the movable holder 10B, and the terminal holding portion 47 are arranged coaxially.
[0039]
The terminal holding part 47 provided in the movable holder 10B is arranged so that at least a part thereof is placed at a position (wall 2a) that partitions the inside and outside of the sample chamber, and the spherical pair 4 is stronger than the terminal holding part 47 in the power of the movable holder 10B. It is arranged on the (knob) 61 side.
[0040]
Further, the fulcrum (airtight seal 31) for rotating the movable holder 10B is located closer to the action point than the midpoint between the force point 61 and the action point (hand mechanism 10A) of the movable holder 10B. The movement is reduced and transmitted.
[0041]
The terminal holding portion 47 serves as a relay point between the lead wires 24 and 26 inside and outside the sample chamber. Thereby, one end of the hermetic terminal 25 and the hand mechanism (finger driving mechanism) 10A are electrically connected through the lead wire 24 in the sample chamber atmosphere, and connected to the other end of the hermetic terminal 25. A lead wire 26 is drawn out of the sample chamber.
[0042]
Such a lead wire connection mode can minimize the length of the lead wire 24 in vacuum.
[0043]
The base 60 of the hand mechanism 10A is provided with a hole 60 'through which the lead wire 24 is passed. Further, windows 48 and 49 for drawing out the lead wire 26 to the outside of the sample chamber are provided on the side surfaces of the movable holder 10B and the cylinder 3.
[0044]
Details of the hand mechanism 10A used in the present embodiment are shown in FIG. This hand mechanism 10A is already known. Various types of hand mechanisms have been known in the past, but the present invention is applicable to these types.
[0045]
The hand mechanism 10 </ b> A in this example is constituted by finger pieces 15 and 16 and a driving mechanism 11 thereof. The drive mechanism 11 is configured by a simple mechanism including a first parallel link mechanism 11A and a second parallel link mechanism 11B.
[0046]
These link mechanisms 11 and 11B are arranged to face each other so that the central axis of the parallel link mechanism 11A and the center line of the parallel link mechanism 11B coincide.
[0047]
The parallel link mechanism 11 includes a disk-shaped base body 13 having a central hole 13 a and a disk-shaped intermediate member 14 disposed to face the base body 13. The base 13 and the intermediate member 14 are connected by a plurality of (for example, six) links 18. On the other hand, the parallel link mechanism 11B includes an intermediate member 14 that also serves as a constituent member of the parallel link mechanism 11A, and a disc-shaped base 17 that is disposed to face the intermediate member 14. The intermediate member 14 and the base 17 are connected by a plurality of (for example, six) links 19.
[0048]
The base end portion of the first finger piece 15 is fixed to the upper surface of the base 13, and the tip end portion of the first finger piece 15 extends outward. As shown in detail in FIG. 3, the first finger piece 15 includes a ball joint 15c fixed to a support column 15a forming a base end portion with a screw, and a cylindrical body 15e connected to the ball 15d of the ball joint 15c. And a needle 15f at the tip that is inserted and secured in the cylinder 15e, and is supported by a ball joint 15c so that the needle 15f can be directed in an arbitrary direction. The ball joint 15 c is supported by the support 15, and the ball joint 15 c and the support column 15 a are connected via the support 15.
[0049]
On the other hand, in the intermediate member 14, the base end portion of the second finger piece 16 is fixed to the center position of the disk larger than the base body 13, and the tip end portion passes through the center hole 13 a of the base body 13 and is outward. It is extended to. The finger piece 16 includes a support column 16a that forms a proximal end portion, and a needle 16b at a distal end portion that is fixed to the end portion of the support column 16a. The tip portions of the finger pieces 16 and the finger pieces 15, that is, the needles 16 b and 15 f are opposed to each other so as to cause a minute relative movement therebetween. Further, as described above, the base body 13 and the intermediate member 14 are connected by the six links 18, and the link mechanism formed by these links 18 is mainly composed of the finger pieces 15 and the finger pieces 16. It fulfills the function of generating relative motion. Further, as described above, the intermediate member 14 and the base member 17 are connected by the six links 19, and the link mechanism formed by these links 19 is mainly a finger piece for an object in a large work space. 15 and the finger piece 16 are positioned.
[0050]
Each of the six links 18 constituting the parallel link mechanism 11A is a group. The connection points between the base members 13 and the intermediate members 14 of the links 18 of each group are arranged almost equally on the circumference around the central axis of the base members 13 and the intermediate members 14. The two groups of links 18 are disposed so as to be inclined in opposite directions. More specifically, in the base 13, the connection point of one group and the connection point of the other group are arranged at substantially the same position around the central axis. Further, in the intermediate member 14, the connection point of one group and the connection point of the other group are disposed at substantially the same position around the central axis. As a result, the adjacent links 18 of both groups are arranged so as to form a predetermined inclination angle.
[0051]
The six links 19 constituting the parallel link mechanism 11B are also grouped in groups of three. The connection points between the intermediate members 14 and the base members 17 of the links 19 of each group are arranged approximately equally around the central axis. In addition, both groups of links 19 are disposed inclining in opposite directions. Each of the links 18 and 19 is provided with actuators 20 and 21 for expanding and contracting them. These actuators form first drive control means for controlling the operation of the parallel link mechanism 11A and second drive control means for controlling the operation of the parallel link mechanism 11B. As the actuator provided in each link, a laminated piezoelectric element or the like is employed.
[0052]
The actuator 21 used in the parallel link mechanism 11B performs positioning control with respect to an object in a wide work space. Therefore, if necessary, an actuator having a larger expansion / contraction amount than the actuator 20 of the parallel link mechanism 11A is used. Is desirable.
[0053]
The multilayer piezoelectric elements used as the actuators 20 and 21 have a quick response and a small displacement and a high output. However, the hysteresis is very large, and it is difficult to perform accurate positioning by open loop control using only the driving voltage. For this reason, it is desirable to measure the amount of displacement and perform feedback control. In this case, in particular, a compact displacement measuring means and a servo drive system are required.
[0054]
As such a displacement measuring means, as shown in FIG. 2, strain gauges 22 and 23 for directly attaching the actuators 20 and 21 made of piezoelectric elements in the expansion / contraction direction and detecting minute displacements of the piezoelectric elements are provided. Adopted. As the servo system of the piezoelectric element, a software servo using a computer, an analog servo using an operational amplifier, or the like is employed.
[0055]
Lead wires 24 from the actuators 20 and 21 and the strain gauges 22 and 23 are led to the atmosphere side via an airtight terminal 25 and connected to a servo system control circuit (not shown).
[0056]
The number of lead wires 24 is 24 from the actuators 20 and 21 (the number of actuators is 12 × 2) and the strain gauges 22 and 23 are 24 (the number of strain gauges is 12 × 2), for a total of 48. The number of pins of the airtight terminal 25 is also a number corresponding to the number.
[0057]
Next, the operation of the microhand mechanism according to the present embodiment will be described.
[0058]
The hand mechanism 10A of the microhand is set in the sample chamber 2 in advance, and operates the scanning electron microscope in a predetermined procedure to display an image on the display screen. Then, a desired visual field is selected by operating the movable holder 10B constituting the coarse position adjusting mechanism using the knobs 9b and 61, and the following fine operation is performed in the case of a biological sample.
[0059]
If necessary, the X-axis direction position adjustment by the knob 9b and the Y-axis and Z-axis direction position adjustment by the knob 44 (oscillation motion mechanism 5) are performed on the hand mechanism 10A, so Decide whether to apply the fine operation force of the finger pieces 15 and 16. In the case of handling a predetermined object, the lower parallel link mechanism 12 is controlled by the six links 19 by the actuator 21 to position the first finger piece 15 and the second finger piece 16 with respect to the object. . In addition, the upper parallel link mechanism 11 is controlled by the six links 18 by the actuator 20 to cause the first finger piece 15 and the second finger piece 16 to generate minute relative motion.
[0060]
That is, first, the actuators 21 of the six links 19 are driven to expand and contract the links 19 by a predetermined amount. Thereby, the finger piece 15 and the finger piece 16 are positioned with respect to the object in a wide work space. This positioning detects the displacement amount of each link 19 from the strain gauge 22, and the finger piece 15 is detected from the displacement amount. Then, the current position of the finger piece 16 is calculated, and this is fed back and compared with the positioning command values for the finger piece 15 and the finger piece 16, and the actuator 21 is servo-driven until the deviation amount disappears.
[0061]
Then, the actuators 20 of the six links 18 are driven with respect to the positioned second finger pieces 16 to expand and contract these links 18 by a predetermined amount, and the first finger pieces 15 and the second finger pieces 16 are minutely expanded. To generate relative motion.
[0062]
As in the case of the positioning described above, the relative motion is generated by detecting the displacement amount of each link 18 from the strain gauge 22 and calculating the relative position of the finger pieces 15 and 16 from the displacement amount. This is done by servo-driving the actuator 20 so that the pieces 15 and 16 generate a predetermined relative motion. Next, for example, when the object is picked by the finger pieces 15 and 16 and moved to a predetermined place, the parallel link mechanism 12 need only be controlled.
[0063]
In this way, by causing the parallel link mechanisms 11 and 12 to share the above functions, the motion area is wide, and a minute relative motion can be generated within the wide motion area, so that the object can be easily handled. it can. The above-mentioned microhand mechanism is intended for a minute object (for example, a cell, etc.) of several microns in a vacuum under an electron beam, picking it with two fingers, positioning, gripping, and pressing by translation and rotational movement. It is effective for cutting, stretching, squeezing, drilling, stirring, splashing and the like.
[0064]
According to the present embodiment, the following effects can be obtained.
[0065]
{Circle around (1)} The terminal holding portion 47 is disposed inside the movable holder 10 </ b> B at a position for partitioning the inside and outside of the sample chamber so as to block the outside of the sample chamber. Thereby, the movable holder 10B and the terminal holding part 47 are coaxially integrated or have a structure close thereto.
[0066]
In such a structure, by using the terminal holding portion 47 as a lead wire relay point inside and outside the sample chamber, the length of the lead wire 24 in the sample chamber can be shortened as much as possible. The load can be reduced (in other words, most of the lead wire is a lead wire that is exposed to the atmosphere side from the terminal holding portion 47 indicated by reference numeral 26, and this lead wire 26 does not apply a load to the hand mechanism 10A. ). In particular, when the hand mechanism 10A, the movable holder 10B, and the terminal holding portion 47 are arranged coaxially, the lead wires 24 are connected at the shortest distance between the connection objects. Further, since the hand mechanism 10A and the terminal holding portion 47 connected by the lead wire 24 move integrally with the movable holder 10B, the hand mechanism 10A can influence the influence of the tension of the lead wire 24 even if the lead wire 24 is not loosened so much. It is possible to make a wiring structure that is not given to Japan. Following the overall movement of the microhand 10, the lead wire 24 also moves in the same way, so that it does not hinder the fingers 15 and 16 from making a fine movement.
[0067]
Therefore, the wiring of the lead wire is drawn out without interfering with the movement of the plurality of needle-like finger pieces, and the fine movement of the needle-like finger pieces is not hindered by the lead wire.
[0068]
Thereby, fine manipulation of the sample can be performed with high accuracy.
[0069]
(2) Since the spherical pair 4 of the swing mechanism 5 is arranged closer to the force point 61 than the terminal holding portion 47, the swinging resistant to vibration is reduced by shortening the distance between the spherical pair 4 and the force point 61. A mechanism can be realized, thereby further improving the precision of the fine movement of the hand mechanism and thus the finger piece.
[0070]
(3) Further, since the fulcrum 31 for rotating the movable holder 10B is located closer to the action point than the midpoint between the force point 61 and the action point 10A, the movement of the force point is reduced and transmitted. And the precision of the fine operation can be further improved.
[0071]
(4) Also, by pulling out most of the lead wires 26 outside the sample chamber (outside the vacuum), the lead wires inside the sample chamber (in the vacuum) are reduced, thereby reducing the cause of outgassing contamination and the vacuum. Factors can be greatly reduced.
[0072]
Especially in vacuum, there are restrictions on the types of lead wires (such as avoiding the use of wire rods that do not easily generate component gas to prevent outgassing or stranded wires with high air content in the gap). In this embodiment, there is an advantage that a lead wire can be used without being restricted by such a restriction.
[0073]
{Circle around (5)} The high magnification and high resolution of the electron microscope require a highly precise fine manipulation force for the micro hand, but according to the present invention, such a demand can be met. Thereby, the present invention can contribute to the fields of microelectronics, biotechnology and medicine.
[0074]
Note that the microhand according to the present invention is not limited to an electron microscope, and can be applied to those requiring various μ-order sample operations.
[0075]
【The invention's effect】
According to the present invention, for example, even in a vacuum such as an electron microscope, even under irradiation with an electron beam, by applying a fine manipulation force with higher accuracy to the sample than ever, it is possible to obtain a sample with high accuracy. Observation, assembly, and the like are possible, and the operability of the sample operation can be improved.
[0076]
In addition, the wiring of the apparatus can be reduced, and the outgas from the wiring can be reduced, that is, the factor of vacuum drop and contamination can be reduced.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a mounting state of a microhand according to an embodiment of the present invention.
FIG. 2 is a perspective view of a two-finger hand mechanism used in the embodiment.
3 is a cross-sectional view of a main part showing details of a part A in FIG.
[Explanation of symbols]
2 ... sample chamber, 2a ... wall of sample chamber, 3 ... cylinder, 4 ... spherical pair, 5 ... oscillating motion mechanism, 10 ... micro hand, 10A ... hand mechanism, 10B ... movable holder, 11 ... finger drive Mechanism, 15, 16 ... finger pieces, 24, 26 ... lead wire, 25 ... airtight terminal, 47 ... terminal holding part, 31 ... airtight seal.

Claims

In a micro hand that drives one or more finger pieces that give a fine operating force to a sample in a vacuum sample chamber based on an electrical signal,
A movable holder that holds a hand mechanism including the finger piece and its driving mechanism in the sample chamber and can adjust the position of the finger piece in the sample chamber from the outside of the sample chamber, and a power supply and an electric for driving the finger piece An airtight terminal for drawing a signal detection lead wire out of the sample chamber from the sample chamber, and a terminal holding portion for holding the airtight terminal,
The movable holder and the terminal holding part are provided at a position where the inner and outer sides of the sample chamber are partitioned with an airtight seal in a coaxial integrated structure,
The drive mechanism, the movable holder, and the terminal holding portion are arranged on a coaxial line, and the hand mechanism and the terminal holding portion are configured to move integrally with the movable holder,
The movable holder can be rotated by a spherical pair provided on the atmosphere side, and a groove is provided on an outer periphery of the movable holder, and the hermetic seal including an O-ring is incorporated in the groove, and the hermetic seal is provided. The movable holder can be rotated with a portion in contact with the inner periphery of the cylindrical body as a fulcrum,
The terminal holding portion provided in the movable holder is disposed so that at least a part thereof is in a position to partition the inside and outside of the sample chamber,
The movable holder having the terminal holding portion from the wall body to the outside with reference to the wall body that partitions the inside and outside of the sample chamber, the spherical pair, and the axis on which the force point acts are described on the same axis. Arranged in order,
The spherical pair includes a fixed-side spherical pair element provided on the cylindrical body that holds the movable holder, and a movable-side spherical pair element provided on the shaft on which a force point acts, and these spherical pair elements are A shape consisting of a part of a sphere,
A through-hole is provided in the center of the spherical element on the fixed side, and a rod provided on the movable holder is inserted into the through-hole, and the movable holder and the shaft on which a force point acts are inserted through the rod. A micro hand characterized by being connected .

In a micro hand that drives one or more finger pieces that give a fine operating force to a sample in a vacuum sample chamber based on an electrical signal,
A movable holder that holds a hand mechanism including the finger piece and its driving mechanism in the sample chamber and can adjust the position of the finger piece in the sample chamber from the outside of the sample chamber, and a power supply and an electric for driving the finger piece An airtight terminal for drawing a signal detection lead wire out of the sample chamber from the sample chamber, and a terminal holding portion for holding the airtight terminal,
The movable holder is disposed at a position for partitioning the inside and outside of the sample chamber with an airtight seal, and the terminal holding portion is disposed so as to block the outside of the sample chamber inside the movable holder,
The drive mechanism, the movable holder, and the terminal holding portion are arranged on a coaxial line, and the hand mechanism and the terminal holding portion are configured to move integrally with the movable holder,
The movable holder can be rotated by a spherical pair provided on the atmosphere side, and a groove is provided on an outer periphery of the movable holder, and the hermetic seal including an O-ring is incorporated in the groove, and the hermetic seal is provided. The movable holder can be rotated with a portion in contact with the inner periphery of the cylindrical body as a fulcrum,
The terminal holding portion provided in the movable holder is disposed so that at least a part thereof is in a position to partition the inside and outside of the sample chamber,
The movable holder having the terminal holding portion from the wall body to the outside with reference to the wall body that partitions the inside and outside of the sample chamber, the spherical pair, and the axis on which the force point acts are described on the same axis. Arranged in order,
The spherical pair includes a fixed-side spherical pair element provided on the cylindrical body that holds the movable holder, and a movable-side spherical pair element provided on the shaft on which a force point acts, and these spherical pair elements are A shape consisting of a part of a sphere,
A through-hole is provided in the center of the spherical element on the fixed side, and a rod provided on the movable holder is inserted into the through-hole, and the movable holder and the shaft on which a force point acts are inserted through the rod. A micro hand characterized by being connected .

Fulcrum for said movable holder is rotated, the point of effort and the claim 1 or 2, wherein are to be transmitted by reducing the movement of the force point located on the action point side than the midpoint between the point Micro hand.

In a micro hand that drives one or more finger pieces that give a fine operating force to a sample in a vacuum sample chamber based on an electrical signal,
A movable holder that holds a hand mechanism including the finger piece and its driving mechanism in the sample chamber and can adjust the position of the finger piece in the sample chamber from the outside of the sample chamber, and a power supply and an electric for driving the finger piece An airtight terminal for drawing a signal detection lead wire out of the sample chamber from the sample chamber, and a terminal holding portion for holding the airtight terminal,
The movable holder and the terminal holding part are provided at a position where the inner and outer sides of the sample chamber are partitioned with an airtight seal in a coaxial integrated structure,
The drive mechanism, the movable holder, and the terminal holding portion are arranged on a coaxial line, and the hand mechanism and the terminal holding portion are configured to move integrally with the movable holder,
The movable holder can be rotated by a spherical pair provided on the atmosphere side, and a groove is provided on an outer periphery of the movable holder, and the hermetic seal including an O-ring is incorporated in the groove, and the hermetic seal is provided. The movable holder can be rotated with a portion in contact with the inner periphery of the cylindrical body as a fulcrum,
The fulcrum for rotating the movable holder is located closer to the action point than the midpoint between the force point and the action point, and transmits the reduced force movement. .

In a micro hand that drives one or more finger pieces that give a fine operating force to a sample in a vacuum sample chamber based on an electrical signal,
A movable holder that holds a hand mechanism including the finger piece and its driving mechanism in the sample chamber and can adjust the position of the finger piece in the sample chamber from the outside of the sample chamber, and a power supply and an electric for driving the finger piece An airtight terminal for drawing a signal detection lead wire out of the sample chamber from the sample chamber, and a terminal holding portion for holding the airtight terminal,
The movable holder is disposed at a position for partitioning the inside and outside of the sample chamber with an airtight seal, and the terminal holding portion is disposed so as to block the outside of the sample chamber inside the movable holder,
The drive mechanism, the movable holder, and the terminal holding portion are arranged on a coaxial line, and the hand mechanism and the terminal holding portion are configured to move integrally with the movable holder,
The movable holder can be rotated by a spherical pair provided on the atmosphere side, and a groove is provided on an outer periphery of the movable holder, and the hermetic seal including an O-ring is incorporated in the groove, and the hermetic seal is provided. The movable holder can be rotated with a portion in contact with the inner periphery of the cylindrical body as a fulcrum,
The fulcrum for rotating the movable holder is located closer to the action point than the midpoint between the force point and the action point, and transmits the reduced force movement. .

The movable holder is attached to a position where the inside and outside of the sample chamber are partitioned through a cylindrical airtight seal provided on the outer periphery thereof, and an operation for adjusting the position of the finger piece can be performed using the airtight seal as a fulcrum. Composed of
The terminal holding portion provided inside the movable holder serves as a relay point for relaying the lead wire inside and outside the sample chamber, and one end of the hermetic terminal and the drive mechanism of the finger piece connect the lead wire in the sample chamber atmosphere. via is electrically connected to, and the micro hand according lead wires connected to the other end to any one of claims 1 to 5 is drawn to the sample chamber outside the hermetic terminal.

A cylinder holding the movable holder is hermetically fixed to the wall of the sample chamber so as to pass through the wall, and the movable holder moves in the X, Y, and Z axes inside the cylinder. The microhand according to any one of claims 1 to 6 , wherein the microhand is incorporated with a hermetic seal.

The radius of the spherical surface of the spherical kinematic pair, the hermetic seal of the radius and the axis of the claims 1 to 7 any one micro hand description of matching the distance to the spherical surface from the point where intersects the movable holder.