JP4164968B2 - Contact state observation method and contact state observation apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is, for example, a state of contact with an object to be observed used in contact with or sliding on an object such as a seal surface of a seal product or a surface of a friction material incorporated in a wet clutch for an automatic transmission. The present invention relates to a contact state observation method and apparatus for reproducing and observing the above.
[0002]
[Prior art]
For example, in the control of the sealing function of an elastic seal product typified by rubber, it is important to clearly measure the contact state between the seal product and a contacted object sealed by the seal surface of the seal product. However, since it is difficult to directly observe the state where the seal surface of the seal product is in contact with the contacted object, the contact state between the seal surface to be observed and the surface of the contacted object can be observed. It is necessary to reproduce the state.
For this reason, conventionally, as a method for reproducing the contact state between the surface to be observed and the surface of the contacted object, for example, as disclosed in JP-A-8-247747, a substantially smooth surface is used. A method of observing the contact state by bringing a transparent observation member such as a glass plate or prism into contact with the surface to be observed is employed.
[0003]
Specifically, in JP-A-8-247747, the contact state of the surface to be observed of the sample is observed by a method as shown in FIG.
First, the surface to be observed of the sample 101 is placed on the upper surface of the inverted trapezoidal transparent prism 102, and a thrust load F is applied to the sample 101 through the pressing block 103 to make the sample 101 smooth with the transparent prism 102. Press on top.
On the other hand, a light source 104, a collimator lens 105, a polarizing plate 106, and a quarter wavelength plate 107 are provided below one side of the transparent prism 102, and a polarizing plate 108, a condensing lens 109, and a reflection are provided on the other side. A mirror 110, a CCD camera 111, and an image processing device 112 are provided, and light from the light source 104 passes through a collimator lens 105, a polarizing plate 106, and a ¼ wavelength plate 107 from one side of the transparent prism 102. The light enters perpendicularly into the transparent prism 102 and is reflected by the lower surface, which is the surface to be observed, of the sample 101. The reflected light exits in the vertical direction from the other surface of the transparent prism 102, is reflected by the reflecting mirror 110 through the polarizing plate 108 and the condenser lens 109, and enters the CCD camera 111.
The image data captured by the CCD camera 111 is between the surface to be observed of the sample 101 and the upper surface of the transparent prism 102, and the light incident from the transparent prism 102 side is the surface to be observed of the sample 101 and the upper surface of the transparent prism 102. In the non-contact portion where no contact is made, the light is totally reflected on the upper surface of the transparent prism 102 and is absorbed by the sample 101 in the contact portion, so that an image that is bright in the non-contact portion and relatively dark in the contact portion.
The image processing apparatus 112 multi-values the image data in this state according to, for example, light and dark, and displays the image data on the display device, thereby grasping the contact state between the observation surface of the sample 101 and the transparent prism 102. can do.
[0004]
[Problems to be solved by the invention]
By the way, in the conventional method as described above, an optical system such as the light source 104 or the CCD camera 111 is used to cause total reflection of light at a non-contact portion between the observation surface of the sample 101 and the transparent prism 102. Must be installed with a certain angle with respect to the surface of the sample 101 to be observed.
Therefore, it is necessary to observe the observation surface of the sample 101 from an oblique direction, and the observed image is reduced along the observation direction.
Therefore, in order to observe the true contact state when the surface to be observed of the sample 101 is viewed from the vertical direction, it is necessary to correct the influence of the observation angle.
Further, for example, when it is desired to observe the contact state at a high magnification using a microscope, the observation surface of the sample 101 from the oblique direction is observed compared to the case of observing from the vertical direction. The optical path length with the surface becomes longer. On the other hand, the larger the magnification of the microscope, the shorter the working distance of the microscope lens system, which may be shorter than the above optical path length. There was something I couldn't do.
Further, in the conventional method as described above, the upper surface of the transparent prism 102 is a smooth surface. However, for example, when the sample 101 is a seal product or the like, the surface of an object to be contacted with which the seal surface or the like of the seal product contacts in actual use is not necessarily a smooth surface. In addition, the seal surface of the seal product actually contacts, for example, a metal surface or the like, and the state of the metal surface is different from the state of the glass surface. For this reason, in the conventional methods as described above, the contact state in the actual use state such as the seal surface of the seal product with respect to the contact object having the roughness on the surface cannot be reproduced.
[0005]
The present invention has been made in view of the above-described problems, and can reproduce the contact state of the contact surface of the observation object actually used in contact with the contacted object, and the reproduced contact state. It is an object of the present invention to provide a contact state observation method and a contact state observation apparatus that allow detailed and clear observation.
[0006]
[Means for Solving the Problems]
  According to the present invention,
  One surface is uneven, and the other surface facing the one surface is flat, the one surface of the light transmitting glass plate has the same or similar refractive index as the light transmitting glass plate. Applying a translucent material and filling the translucent material in the recesses on the one surface,
  The translucent liquid of the glass plate is filled in a recess.In the state where the unevenness is smoothed byAn elastic observation object is brought into contact with one surface,
  The observation object is elastically deformedDoTo a certain extent, relatively press the observation object and the glass plate,
  In the pressed state, light is emitted from the other surface of the glass plate toward the first surface that is in contact with the observation object,
  In response to the light irradiation, the light-transmitting material of the glass plate is filled in the recesses.In the state where the unevenness is smoothed byDepends on the contact state between the observation object and the one surface on one surfaceBrightness of the observed image from the one surfaceThe state of contact between the observation object and the one surface that changes depending onThe brightness weakness or strength is defined as contact or non-contact between the observation object and the one surface,Magnifying and observing from the one surface of the glass plate,
  A contact state observation method is provided.
[0007]
  Also according to the invention,
  One surface is uneven, and the other surface facing the one surface is flat, and the one surface is made of a light-transmitting material having the same or similar refractive index as the light-transmitting glass plate. The light-transmitting liquid of the light-transmitting glass plate that is coated and filled with the light-transmitting material in the concave portion on the one surface is filled in the concave portion.In the state where the unevenness is smoothed byAn elastic observation object is brought into contact with one surface, and the observation object is elastically deformed.To the extent thatA pressing means for relatively pressing the observation object and the glass plate;
  A light source that emits light from the other surface of the glass plate toward the first surface that is in contact with the observation object in a state in which the observation object is pressed;
  From the one surface of the glass plate accompanying the light irradiation, the light-transmitting material of the glass plate is filled in the recess.The above unevenness has become smoothIn order to observe the contact state between the observation object and the one surface on the one surface,Regarding the contact state between the observation object and the one surface, which changes according to the luminance of the observation image from the one surface depending on the contact state between the observation object and the one surface on the one surface , By defining the low or strong luminance as contact or non-contact between the observation object and the one surface,Optical detection means for optically observing a contact portion between the observation object and the one surface;
  Imaging means for imaging the result detected by the optical detection means;
  Display means for displaying an image captured by the imaging means;
  Is provided.
[0008]
  Preferably, the surface roughness of the unevenness on one surface of the glass plate is sufficiently smaller than the surface roughness of the portion of the observation object that contacts the one surface of the glass plate.
[0009]
  Preferably, the average height (d) of the unevenness of one surface of the glass plate and the unevenness of the contact surface of the observation object in which the observation object and one surface of the glass plate are in contact with each other. The ratio (d / λ) to the average interval (λ) is adjusted to a predetermined value with respect to the surface roughness of the portion of the observation object that contacts one surface of the glass plate.
  More preferably, 3 <λ / d <25 and 1 μm <d <20 μm.
[0010]
  Preferably, the contact portion between the pressed observation object and one surface of the glass plate is observed from one surface of the glass plate by an optical magnifying means.  More preferably, the enlarged image is obtained by making the optical axis of the optical enlarging means substantially perpendicular to one surface of the glass plate.
  More preferably, the enlarged image is picked up by the image pickup means, and the image pickup data is displayed on the display means for observation.
[0011]
  Preferably, the shape of the unevenness on the one surface of the glass plate is adjusted according to the application condition of the translucent material filled in the concave portion on the one surface of the glass plate.
  More preferably, the transparent material is made of a liquid material or a solid material.  Preferably, the elastic observation object is formed of rubber.
[0012]
  In the present invention, one surface is uneven, the other surface facing the one surface is flat, and the one surface has the same or similar refractive index as the translucent glass plate. A glass plate in which the light-transmitting liquid of the light-transmitting glass plate in which the light-transmitting material is applied and the light-transmitting material is filled in the concave portion on the one surface is used.
  An elastic observation object is brought into contact with one surface of the glass plate, and the observation object is elastically deformed.LikeThe observation object and the glass plate are relatively pressed.
  And in the state which pressed the said observation target object, it irradiates light toward the said 1st surface which is in contact with the said observation target object from the said other surface of the said glass plate, and accompanies the irradiation of the said light From the one surface of the glass plate, the observation target is observed in order to observe the contact state between the observation target object and the one surface on the one surface filled with the light-transmitting material of the glass plate. The contact portion between the object and the one surface is optically enlarged and imaged and observed.
[0013]
  Glass plateThe uneven surface and the observation surface of the observation objectBy pressingIn the contact portion, a contact area and a non-contact area with the uneven surface are generated by the unevenness of the surface to be observed.
  From the other side of the glass plateIncident light is incident on the surface to be observed.Uneven portion on one side of glass plateA part or all of the light is absorbed by the surface to be observed in the contact area. In the non-contact region, an air layer is formed between the uneven surface and the surface to be observed, and is irregularly reflected by the uneven surface.
  For this reason,Glass plateThroughOf the observation objectThe surface to be observedGlass plateWhen the contact area and the non-contact area with the uneven surface are observed, the amount of reflected light from the contact area is relatively smaller than the amount of reflected light from the non-contact area, and therefore the contact area becomes relatively dark. The non-contact area becomes relatively bright. As a result, the contrast between the contact area and the non-contact area on the surface to be observed and the uneven surface is clearly generated.
  Further, the contrast between the contact area and the non-contact area on the surface to be observed and the uneven surface can be obtained without tilting the incident angle of light with respect to the observation member, and in any direction regardless of the incident angle of light. It can be observed from.
[0014]
  In the present invention, a glass plateBy making the surface roughness of the uneven surface sufficiently smaller than the surface roughness of the surface to be observed, a contact or non-contact state corresponding to the unevenness of the surface to be observed can be appropriately obtained. That is,Glass plateIf the surface roughness of the uneven surface is larger than the surface roughness of the surface to be observed,Glass plateContact or non-contact state occurs due to any unevenness of the uneven surface, so it is difficult to obtain a contact or non-contact state according to the unevenness of the observed surface,Glass plateBy making the surface roughness of the concavo-convex surface sufficiently small, the contact or non-contact state generated between the concavo-convex surface and the observed surface can be caused only by the unevenness of the observed surface.
[0015]
  In the present invention,Glass plateBy applying a transparent material to the uneven surface ofGlass plateThe uneven surface of the object can be arbitrarily adjusted, for example, it can be an uneven surface in any state depending on the application conditions such as the coating amount of the transparent material and the uneven shape of the uneven surface, It is possible to reproduce the contact state during actual use as accurately as possible.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, embodiments of the present invention will be described with reference to the drawings.
  First embodiment
  FIG. 1 is a configuration diagram of a contact state observation apparatus according to an embodiment of the present invention.
  The contact state observation device 1 shown in FIG.(Up and down)The holding plate 4 guided freely, the glass plate 11 held on the lower surface of the holding plate 4, the microscope barrel 41 installed on the holding plate 4, the light source 35, and the microscope barrel 41 were connected. A CCD camera 42, an actuator 21 provided on the base 2 below the holding plate 4, a support base 22 connected to the actuator 21 to support the observation object W, and an image processing device 31 connected to the CCD camera 42. And a display device 32 connected to the image processing device 31.
  Here, the glass plate 11 corresponds to a specific example of the observation member of the present invention, the microscope barrel 41 corresponds to a specific example of the optical magnifying means of the present invention, and the light source 35 is a specific example of the light source of the present invention. Corresponding to the example, the CCD camera 42 corresponds to a specific example of the imaging means of the present invention, and the display device 32 and the image processing device 31 correspond to a specific example of the display means of the present invention.
[0017]
The holding plate 4 is provided so as to be raised and lowered to an arbitrary position of the guide bar 3 by rotating a lifting handle 5 provided on the side of the holding plate 4 in any direction.
The holding plate 4 has an opening 4a, and a glass plate 11 is fixed to the lower portion of the opening 4a.
[0018]
  The actuator 21 supports the support base 22 with a rod 21a.Rod 21aIn the direction of arrows A1 and A2StretchThen, the support base 22 is moved to an arbitrary position in the directions of the arrows A1 and A2. For example, an air cylinder can be used as the actuator 21.
  The support base 22 is supported so that the upper surface thereof is substantially parallel to the glass plate 11, and the observation object W is supported on the upper surface.
  The actuator 21 moves the support base 22 in the direction of the arrow A1, so that the observation object W placed on the support base 22 is moved to the glass plate 11.Press. That is, the actuator 21, the support base 22, and the holding plate 4 holding the glass plate 11 constitute the pressing means of the present invention.
[0019]
The microscope barrel 41 placed on the holding plate 4 is arranged so that its optical axis is substantially perpendicular to the upper surface of the support base 22, and is observed through the opening 4 a of the holding plate 4 and the glass plate 11. The optical image of the object W can be enlarged to an arbitrary magnification.
The CCD camera 42 connected to the microscope barrel 41 is a camera using a charge coupled device, captures an optical image magnified by the microscope barrel 41, and outputs the captured data to the image processing device 31.
[0020]
A light source 35 provided adjacent to the microscope barrel 41 emits light toward the observation object W placed on the support base 22. That is, the light source 35 illuminates the observation object W through the opening 4 a of the holding plate 4.
[0021]
  The image processing device 31 is formed of, for example, a personal computer, captures image data captured by the CCD camera 42 after A / D conversion, and performs predetermined image processing on the captured image data. concretePredetermined image processingWill be described later.
  The display device 32 includes, for example, a CRT or a liquid crystal display device, and displays the image data processed by the image processing device 31 on the screen.
[0022]
The observation object W is, for example, an elastic body such as a rubber seal member, and is used in a state of being in contact with or sliding with another solid surface in actual use, and the contact state is important. There is no particular limitation as long as it has a certain surface to be observed.
[0023]
  FIG. 2 is a cross-sectional view showing an example of the cross-sectional shape of the glass plate 11.
  As shown in FIG. 2, one surface of the glass plate 11 is an uneven surface 11a having unevenness, and the other surface is a substantially smooth smooth surface 11b. In addition, the uneven surface 11a is formed on the observation object W.Contact sideIs formed.
  The concavo-convex surface 11a of the glass plate 11 is formed to be finer than the concavo-convex of the surface of the observation object W while having a roughness for causing light incident from the smooth surface 11b side to cause irregular reflection on the concavo-convex surface 11a. .
  The uneven state of the uneven surface 11a is defined by the surface roughness, for example. As shown in FIG. 2, the surface roughness is represented by a ratio λ / d between the average height d of the unevenness of the uneven surface 11a and the average interval λ between the uneven portions of the unevenness.
  When the average height d is the same, the smaller the surface roughness λ / d, the larger the number of irregularities per unit area, and the larger the value of λ / d, the larger the number of irregularities per unit area. Less is.
  In the present embodiment, the surface roughness of the concavo-convex surface 11a is sufficiently smaller than the surface roughness of the surface of the observation object W (surface to be observed), but the value of the surface roughness λ / d is too small. In addition, the surface roughness λ / d needs to be set to an appropriate value for reasons such as deterioration of the contact between the surface of the observation object W and the uneven surface 11a.
[0024]
Specifically, as a result of investigation using an O-ring made of a rubber material having various surface roughness as the observation object W, the glass is so formed as to satisfy the conditions of 3 <λ / d <25, 1 μm <d <20 μm. The unevenness of the uneven surface 11a of the plate 11 is finely formed. More preferably, an uneven surface shape with conditions of 4 <λ / d <20, 2 μm <d <10 μm is desirable.
[0025]
In order to form the uneven surface 11a of the glass plate 11, a method such as blasting, etching, molding, polishing, or the like can be used, but any method that can form a minute uneven shape on the glass surface may be used.
Moreover, as a forming material of the glass plate 11, although silica glass etc. are mentioned, it is not necessarily limited to this. Moreover, in this embodiment, although the glass plate 11 was mentioned as an example of the member for observation, as long as it is a transparent glass-like material, what kind of material can be utilized.
[0026]
Next, a method for observing the contact state between the surface of the observation object W and the concavo-convex surface 11a (observed surface) of the glass plate 11 using the contact state observation apparatus 1 having the above configuration will be described.
First, the observation object W is placed on the support base 22, and the position of the holding plate 4 is adjusted to a predetermined position. From this state, the actuator 21 is driven to raise the observation object W placed on the support base 22 in the direction of the arrow A1, and the observation object W is brought into contact with the uneven surface 11a of the glass plate 11.
[0027]
At this time, the observation object W is pressed against the glass plate 11 so as to have a predetermined load or a predetermined crushing rate.
Here, the crushing rate is, for example, when the observation object W is an O-ring, the diameter of the O-ring is D and the distance between the glass plate 11 and the upper surface of the support base 22 is δ as shown in FIG. As (D−δ) / D × 100 (%).
As for the general use conditions of the O-ring, this crushing rate is about 5 to 30%. Therefore, the crushing rate is changed in a range of about 5 to 30 (%), and the contact state between the O-ring surface and the uneven surface 11a of the glass plate 11 is observed. For the purpose of research, the crushing rate is changed within a range of 0 to 50 (%), for example, and the contact state between the O-ring surface and the uneven surface 11a of the glass plate 11 is observed.
[0028]
When light is irradiated from the light source 35 in a state where the uneven surface 11a of the glass plate 11 is pressed against the observation object W so as to have a predetermined load or a predetermined crushing rate, the light is incident from the smooth surface 11b side of the glass plate 11. To do.
Here, FIG. 4 is an enlarged view of a contact portion between the uneven surface 11 a of the glass plate 11 and the surface of the observation object W.
As shown in FIG. 4, when unevenness exists on the surface of the observation object W, a contact region and a non-contact region are generated between the surface of the observation object W and the uneven surface 11 a of the glass plate 11.
As can be seen from FIG. 4, the surface roughness of the uneven surface 11 a of the glass plate 11 is sufficiently smaller than the surface roughness of the surface of the observation object W, so that the surface of the observation object W and the glass plate 11 The contact area and the non-contact area generated between the uneven surface 11a are generated according to the unevenness of the surface of the observation object W. That is, when the surface roughness of the uneven surface 11 a of the glass plate 11 is large, the contact area and the non-contact area generated between the surface of the observation object W and the uneven surface 11 a of the glass plate 11 are the same as those of the observation object W. This occurs not only due to the unevenness of the surface but also due to the unevenness of the uneven surface 11a of the glass plate 11, but this is not the case in this embodiment.
[0029]
On the other hand, the light L incident on the glass plate 11 from the light source 35 is partially or on the surface of the observation object W through the uneven surface 11a in the contact area between the surface of the observation object W and the uneven surface 11a of the glass plate 11. All are permeated and absorbed.
In a non-contact region between the surface of the observation object W and the uneven surface 11 a of the glass plate 11, an air layer is formed on the uneven surface 11 a of the glass plate 11 and the surface of the observation object W. Since the refractive indexes are different, the light L incident on the glass plate 11 from the light source 35 is irregularly reflected by the uneven surface 11a.
[0030]
From this, when the contact portion between the surface of the observation object W and the uneven surface 11a of the glass plate 11 is observed from the smooth surface 11b side of the glass plate 11, the surface of the observation object W and the uneven surface 11a of the glass plate 11 are observed. The contact area will appear dark and the non-contact area will appear bright.
[0031]
The contact portion between the surface of the observation object W in such a state and the concavo-convex surface 11a of the glass plate 11 is optically enlarged by the microscope barrel 41, and this optical enlarged image is taken by the CCD camera.
The imaging data output from the CCD camera 42 is input to the image processing device 31, and the image processing device 31 displays the image data on the display device 32. Further, the image processing device 31 performs predetermined image processing on the input image data, thereby obtaining data such as the true contact area and contact ratio distribution between the surface of the observation object W and the uneven surface 11a of the glass plate 11. Analyze.
[0032]
In the enlarged image of the contact portion between the surface of the observation object W displayed on the display device 32 and the uneven surface 11a of the glass plate 11, the non-contact region is displayed as a relatively bright portion, and the contact region is a relatively dark portion. The image is displayed and has a high contrast. Therefore, by observing the brightness and darkness of the image displayed on the display device 32, the contact state between the surface of the observation object W and the uneven surface 11a of the glass plate 11 can be grasped.
[0033]
Example 1
Next, a specific observation result using the contact state observation apparatus 1 having the above configuration will be described.
As an observation object W, an N-ring (nitrile butadiene rubber) O-ring (inner diameter: φ9.5 mm, wire diameter: φ1.5 mm) is used, and the uneven surface 11 a of the glass plate 11 is a polishing powder having a predetermined roughness. It was formed by blasting using
The surface roughness λ / d of the glass plate 2 was 4.5. Further, in order to examine whether or not a fine contact state can be observed, the surface of the O-ring was previously roughened.
[0034]
FIG. 5 is a diagram showing an observation image of the contact state between the observation object W and the glass plate 11 obtained under the above conditions. The magnification by the microscope barrel 41 is 200 times.
In the drawing shown in the upper part of the observation image in FIG. 5, the dark region R1 is a region where the surface of the O-ring as the observation object W is crushed by contact with the uneven surface 11a of the glass plate 11, that is, contact. The light-colored region R2 is a non-contact region where the surface of the O-ring and the uneven surface 11a of the glass plate 11 are not in contact with each other.
As can be seen from the observed image in FIG. 5, the boundary between the contact region R1 and the non-contact region R2 is clear, and a high-contrast image is obtained.
Furthermore, even in the contact region R1, it can be clearly confirmed that there is a non-contact region generated between the uneven surface 11a of the glass plate 11 due to the unevenness existing on the surface of the O-ring.
[0035]
Comparative Example 1
As a comparative example, FIG. 6 shows a result of observing the contact state between the glass plate and the O-ring under the same conditions as described in FIG. 5 using a glass plate that does not have the uneven surface 11a, that is, both surfaces are smooth. .
As can be seen from the observation image shown in FIG. 6, the boundary between the contact region R1 and the non-contact region R2 is not clear, that is, the contrast is weak and it is difficult to clearly separate the contact region R1 and the non-contact region R2. It turns out that it is.
Furthermore, it is also difficult to confirm a non-contact area generated between the surface of the glass plate 11 due to the unevenness present on the surface of the O-ring in the contact area R1.
[0036]
Comparative Example 2
As a further comparative example, in FIG. 7, the surface of the glass plate 11 with the irregular surface 11 a formed by blasting using a polishing powder having a predetermined roughness was used. The result of having observed the contact state of O-ring is shown. The surface roughness λ / d of the glass plate 1 is 1.5. That is, the surface roughness λ / d is smaller than that described with reference to FIG.
As can be seen from FIG. 7, the boundary between the contact region R1 and the non-contact region R2 is not clear, and the non-uniformity generated between the surface of the glass plate 11 due to the unevenness present on the surface of the O-ring in the contact region R1. It is also difficult to confirm the contact area.
Therefore, if the surface roughness λ / d is too small, that is, if the interval between the irregularities is too narrow, even if the irregular surface 11a of the glass plate 11 and the surface of the O-ring are in contact, the elastically deformed O-ring is irregular. It is conceivable as an application that an appropriate contact state cannot be obtained without entering a valley and that irregular reflection of light easily occurs even in the contact region.
That is, the surface roughness of the uneven surface 11a of the glass plate 11 needs to be sufficiently smaller than the surface roughness of the surface of the O-ring, but appropriate contact between the uneven surface 11a of the glass plate 11 and the surface of the O-ring. It is necessary to make it within a range where the properties can be obtained.
[0037]
As described above, according to the present embodiment, the surface of the observation object W (O-ring) and the uneven surface 11a of the glass plate 11 are utilized using the irregular reflection of light generated on the uneven surface 11a formed on the glass plate 11. A high-contrast image can be obtained in which the contact area and the non-contact area can be clearly distinguished.
For this reason, in the image processing apparatus 31, the analysis of the true contact area between the surface of the observation object W (O-ring) and the concavo-convex surface 11a of the glass plate 11, the analysis of the distribution of the contact region, and the like can be performed easily and accurately. Can be done.
Furthermore, according to the present embodiment, the incident direction of light applied to the surface (observed surface) of the observation object W is not particularly limited, and the direction of the microscope barrel 41 is not particularly limited, and the observation object An image can be obtained in which the contact area and the non-contact area between the surface of the W (O-ring) and the uneven surface 11a of the glass plate 11 can be clearly distinguished. For this reason, since the optical axis of the microscope barrel 41 can be oriented perpendicularly to the glass plate 11 and as close to the glass plate 11 as possible, the surface of the observation object W (O-ring) and the glass plate 11 An image obtained by enlarging the contact portion with the uneven surface 11a at a high magnification can be easily obtained.
[0038]
Second embodiment
Next, another observation method using the contact state observation apparatus will be described as a second embodiment of the present invention.
For example, an elastic body represented by a seal product is used as a seal between processed metal surfaces, for example. The metal surface is characterized by plastic deformation during processing. On the other hand, since the glass material which comprises the above-mentioned glass plate 11 is a brittle material, the processed surface shape differs fundamentally. In the case of metal, it becomes a smooth uneven shape as compared with the glass processed surface due to plastic deformation.
That is, for example, as shown in FIG. 8A, the uneven surface 11 a formed on the glass plate 11 is in a state where the uneven surface 11 a is sharply sharp due to the properties of the glass material. Conceivable. On the other hand, as shown in FIG. 8B, for example, the unevenness of the processed surface 201a of the metal plate 201 is considered to be a relatively smooth unevenness due to the properties of the metal material described above.
[0039]
Therefore, in the above-described embodiment, when the O-ring that is the observation object W is brought into contact with the uneven surface 11a of the glass plate 11, the state of the O-ring is different from that in actual use.
In this embodiment, in order to eliminate the difference in the uneven shape of the uneven surface 11a of the glass plate 11 as much as possible, for example, as shown in FIG. 8C, a transparent liquid is applied to the uneven surface 11a of the glass plate 11. The transparent film LF is formed by coating.
[0040]
The uneven surface 11a of the glass plate 11 on which the transparent film LF is formed is smoothed by the transparent film LF.
For the transparent film LF, a transparent liquid having the same refractive index as the material constituting the glass plate 11 can be used.
[0041]
It is possible to arbitrarily control the height of the valleys by filling the irregularities on the irregular surface 11a of the glass plate 11 with the transparent liquid and adjusting the amount of transparent liquid to be applied.
The transparent liquid is appropriately selected depending on the properties of the glass plate 11 in consideration of the identification of chemical structure and viscosity. For example, when quartz glass is used as the glass plate 11, silicone oil is selected in consideration of wettability with glass.
Further, a silicone oil having a polar functional group is selected, and a functional group-modified silicone oil such as an epoxy-modified silicone oil, a carboxyl-modified silicone oil, or a carbinol-modified silicone oil is more preferably selected. Furthermore, the viscosity of the silicone oil is appropriately selected from a low viscosity to a high viscosity in consideration of the type of glass and the surface uneven shape. Preferably, it is desirable to use a silicone oil of 500 cSt or less.
[0042]
In the contact state observation method according to the present embodiment, as described above, the contact state observation apparatus having the above-described configuration is used in which the transparent film LF is formed on the uneven surface 11a of the glass plate 11 and the unevenness is smooth. 1 is performed.
[0043]
Example 1
Here, the specific result which observed the contact state of the surface of the O-ring as the observation target object W and the glass plate 11 using the glass plate 11 in which the transparent film LF was formed in the uneven | corrugated surface 11a is demonstrated.
The uneven surface 11a of the glass plate 11 was formed by blasting using a polishing powder having a predetermined roughness. In order to examine the possibility of observing the contact state, the surface of the O-ring was previously given roughness.
Furthermore, carbinol-modified silicone oil X-22-160AS (manufactured by Shin-Etsu Chemical Co., Ltd.) was used as the silicone oil. The silicone oil has a viscosity of 160 cSt.
In addition, any method can be used to apply the silicone oil to the uneven surface 11a of the glass plate 11, but in order to apply it uniformly, it is preferable to use, for example, a spin coater.
[0044]
FIG. 9 is a photomicrograph of the surface of the irregular surface 11a of the glass plate 11 after application of silicone oil.
As can be seen from FIG. 9, the uneven surface 11a of the glass plate 11 and a random sea-island structure with silicone oil are observed, and it can be seen that the desired uneven shape is formed.
[0045]
FIG. 10 is an observation image of a contact state between the observation target object W and the glass plate 11 on which the transparent film LF is formed on the uneven surface 11a.
The observation object W was an O-ring (wire diameter: φ1.5 mm, inner diameter: φ9.5 mm) made of NBR (nitrile butadiene rubber).
In the figure shown on the upper side of the observation image in FIG. 10, the dark region R1 is a region where the surface of the O-ring as the observation object W is crushed by contact with the uneven surface 11a of the glass plate 11, that is, a contact region. The lightly colored region R2 indicates a non-contact region where the surface of the O-ring and the uneven surface 11a of the glass plate 11 are not in contact.
As can be seen from the observed image in FIG. 10, the boundary between the contact region R1 and the non-contact region R2 is clear, and a high-contrast image is obtained.
Further, even in the contact region R1, there is a non-contact region having a size of about several microns to several tens of microns generated between the uneven surface 11a of the glass plate 11 due to the unevenness existing on the surface of the O-ring. This can be clearly observed.
[0046]
FIG. 11 is a graph showing a change in luminance along the line segment A-A ′ in the observation image in FIG. 10. Note that the luminance was displayed in 8 bits (256 gradations).
In FIG. 11, the contact portion (dark portion) in the contact region R1 has a luminance close to zero, and the luminance of the non-contact portion in the contact region R1 is equal to that of the non-contact region R2 outside the contact portion. You can see that.
That is, in this embodiment, not only can the boundary between the contact region R1 and the non-contact region R2 be clearly distinguished, but also the non-contact portion in the contact region R1 can be clearly observed.
[0047]
Comparative Example 1
As a comparative example, FIG. 12 shows an observation image in the case of using a smooth glass plate on which the uneven surface 11a is not formed. FIG. 13 shows the luminance distribution along the line segment B-B ′ in the observation image of FIG.
As can be seen from FIG. 12 and FIG. 13, when a smooth glass plate on which the uneven surface 11a is not formed is used, it is difficult to identify the boundary between the contact region R1 and the non-contact region R2. I understand.
[0048]
As described above, according to this embodiment, in addition to the same effects as those of the first embodiment described above, it is possible to reproduce the contact state under a condition close to the state in which the observation object W is actually used. An accurate contact state can be obtained.
[0049]
Third embodiment
As a third embodiment of the present invention, another contact state observation method using the contact state observation apparatus having the above-described configuration will be described.
In the second embodiment described above, a transparent liquid is applied to the uneven surface 11a of the glass plate 11 to form the transparent film LF, and the state of the uneven surface 11a of the glass plate 11 is changed to the actual state of the O-ring that is the observation object W. As a configuration that approximates the state at the time of use, the contact state of the O-ring was reproduced in a state close to that at the time of actual use.
However, in the second embodiment described above, since the silicone oil that is a transparent liquid is applied to the uneven surface 11a of the glass plate 11, the amount of crushing by the uneven surface 11a of the glass plate 11 of the O-ring that is the observation object W is reduced. When it becomes larger, due to the wettability between the silicone oil and the O-ring surface, the silicone oil penetrates into the fine gap formed between the uneven surface 11a of the glass plate 11 and the O-ring surface, and in the contact region R1 It may become impossible to observe the non-contact portion.
[0050]
For this reason, in this embodiment, not a transparent liquid but a solid transparent film is applied to the uneven surface 11a of the glass plate 11. A solid transparent film having a refractive index substantially the same as that of the glass plate 11 is used.
The solid transparent film needs to be selected appropriately in consideration of the adhesion with the glass plate 11.
For example, when quartz glass is used, high adhesion can be obtained by using a siloxane-based coating agent as the solid transparent film.
In selecting a solid transparent film and in close contact with the concavo-convex surface 11a of the glass plate 11, the object of achieving this configuration is any method such as the type of solid transparent film, a coating method, a curing (gelling) method, and a vapor deposition method. Can be used.
Moreover, arbitrary surface uneven | corrugated shape can be formed by controlling the uneven | corrugated shape of the uneven surface 11a of the glass plate 11, the characteristic of a solid transparent film, and coating conditions.
[0051]
By applying a solid transparent film instead of a transparent liquid on the irregular surface 11a of the glass plate 11, the irregularity of the irregular surface 11a of the glass plate 11 is adjusted smoothly, and the smooth irregularities make it incident on the glass plate 11. The reflected light is diffusely reflected on the surface and brightly observed.
Thus, even if the uneven surface 11a of the glass plate 11 coated with the solid transparent film is strongly pressed against the O-ring which is the observation object W, the solid transparent film is formed between the O-ring surface like the liquid transparent film. The contact state between the glass plate 11 and the O-ring surface can be clearly observed without penetrating into the fine gaps formed.
[0052]
Example 1
Next, a specific observation result of the contact state between the glass plate 11 coated with the solid transparent film and the O-ring as the observation object W will be described.
The uneven surface 11a of the glass plate 11 was blasted using a polishing powder having a predetermined roughness.
Moreover, in order to form a solid transparent film, KP854 (made by Shin-Etsu Chemical Co., Ltd.) which is a siloxane hard coat agent was used.
As an observation object W, an N-ring (nitrile butadiene rubber) O-ring (wire diameter: φ1.5 mm, inner diameter: φ9.5 mm) was used.
[0053]
FIG. 14 is a diagram showing the SPM measurement result of the uneven surface 11a of the glass plate 11 on which the solid transparent film is formed.
Before the film formation, the height of the unevenness of the uneven surface 11a was 7 μm or more. However, the formation of the film gave a smooth shape with the height of the unevenness of about 1 μm.
[0054]
FIG. 15 is an observation image of a contact state between the glass plate 11 on which the solid transparent film is formed on the uneven surface 11a and the O-ring as the observation object W.
In the figure shown on the upper side of the observation image in FIG. 15, the dark region R1 is a region where the surface of the O-ring as the observation object W is crushed by contact with the uneven surface 11a of the glass plate 11, that is, a contact region. The lightly colored region R2 indicates a non-contact region where the surface of the O-ring and the uneven surface 11a of the glass plate 11 are not in contact.
[0055]
As can be seen from the observed image in FIG. 15, the boundary between the contact region R1 and the non-contact region R2 is clear, and a high-contrast image is obtained.
Further, even in the contact region R1, there is a non-contact region having a size of about several microns to several tens of microns generated between the uneven surface 11a of the glass plate 11 due to the unevenness existing on the surface of the O-ring. This can be clearly observed.
[0056]
Comparative Example 1
As a comparative example, FIG. 16 shows an observation image of a contact state when a transparent liquid having the same fluidity as that used in the second embodiment is used. Silicone oil was used as the transparent liquid, and the concavo-convex surface 11a of the glass plate 11 was blasted using a polishing powder having a predetermined roughness.
As the silicone oil, carbinol-modified silicone oil X-22-160AS (manufactured by Shin-Etsu Chemical Co., Ltd.) was used. The viscosity is 160 cSt. The observation object W is the same O-ring as in the first embodiment.
[0057]
As can be seen from FIG. 16, the boundary between the contact region R1 and the non-contact region R2 is clear, and a high-contrast image is obtained. However, in the contact region R1, between the uneven surface 11a of the glass plate 11 It can be seen that the generated non-contact portion having a size of several microns to several tens of microns cannot be observed.
This is because the silicone oil penetrates into the fine gap formed between the O-ring surface and the uneven surface 11a of the glass plate 11 due to the wettability between the silicone oil and the O-ring surface.
[0058]
【The invention's effect】
According to the present invention, for example, the contact state between the observed surface of the observation object made of an elastic body and the uneven surface of the observation member can be observed with high contrast and high magnification. As a result, predetermined image processing is performed based on the obtained high-contrast image, and data analysis such as the true contact area and the contact rate distribution can be performed efficiently and with high accuracy.
Furthermore, according to the present invention, it is possible to reproduce the contact state between the surfaces having an arbitrary surface irregularity shape of the observation object, and accurately reproduce the contact state in a state where the observation object is actually used. Can be observed.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a contact state observation apparatus according to an embodiment of the present invention.
FIG. 2 is an enlarged sectional view showing an example of a sectional shape of a glass plate 11;
FIG. 3 is a diagram for explaining a crushing rate of an O-ring.
4 is an enlarged view of a contact portion between the uneven surface 11a of the glass plate 11 and the surface of the observation object W. FIG.
FIG. 5 is a view showing an observation image of a contact state between an observation object W and a glass plate 11;
FIG. 6 is a view showing an observation image of a contact state between a glass plate 11 without an uneven surface 11a and an observation object W.
7 is a view showing an observation image of a contact state between the glass plate 11 and the observation object W when the surface roughness of the concavo-convex surface 11a is too small. FIG.
8A is a cross-sectional view showing an example of the shape of the uneven surface 11a formed on the glass plate 11, and FIG. 8B is a cross-sectional view showing an example of the uneven shape of the metal processed surface; ) Is a cross-sectional view showing a state in which a transparent film is formed on the uneven surface 11 a of the glass plate 11.
FIG. 9 is a photomicrograph of the surface of the irregular surface 11a of the glass plate 11 after application of silicone oil.
FIG. 10 is an observation image of a contact state between a glass plate 11 with a transparent film LF formed on an uneven surface 11a and an observation object W.
11 is a graph showing a change in luminance along a line segment A-A ′ in the observation image in FIG. 10;
12 is a diagram showing an observation image of a contact state between the glass plate 11 and the observation object W when a smooth glass plate on which the uneven surface 11a is not formed is used. FIG.
13 shows a luminance distribution along line B-B ′ in the observation image of FIG.
FIG. 14 is a diagram showing the SPM measurement result of the uneven surface 11a of the glass plate 11 on which the solid transparent film is formed.
15 is a view showing an observation image of a contact state between a glass plate 11 having a solid transparent film formed on an uneven surface 11a and an O-ring as an observation object W. FIG.
FIG. 16 is a view showing an observation image of a contact state when a transparent liquid having the same fluidity as that used in the second embodiment is used.
FIG. 17 is a diagram illustrating an example of a conventional contact state observation method.
[Explanation of symbols]
1 ... Contact state observation device
2 ... Base
3 ... guide rod
4 ... Holding plate
5 ... Elevating handle
11 ... Glass plate
21 ... Actuator
22 ... Support stand
31. Image processing apparatus
32 ... Display device
35 ... Light source
41 ... Microscope tube
42 ... CCD camera
W ... Observation object

Claims (16)

One surface is uneven, and the other surface facing the one surface is flat, the one surface of the light transmitting glass plate has the same or similar refractive index as the light transmitting glass plate. Applying a translucent material and filling the translucent material in the recesses on the one surface,
The translucent liquid is filled in the recess abut the resilient observation object to the one surface in a state where the asperities became smooth Rukoto of the glass plate,
To the extent that the observed object is elastically deformed, and relatively pressing the glass plate and the observation object,
In the pressed state, light is emitted from the other surface of the glass plate toward the first surface that is in contact with the observation object,
According to the irradiation of the light, contact with the observation object and the one surface translucent material is in Rukoto filled in the recess in the one surface in a state where the asperities became smoother of the glass plate With respect to the contact state between the observation object and the one surface, which changes according to the luminance of the observation image from the one surface depending on the state , the weakness or strongness of the luminance is expressed as the observation object and the one surface. By enlarging and observing from the one surface of the glass plate by stipulating contact or non-contact with the surface,
Contact state observation method. The surface roughness of the irregularities on one surface of the glass plate is sufficiently smaller than the surface roughness of the portion that contacts the one surface of the glass plate of the observation object,
The contact state observation method according to claim 1. The contact portion between the pressed observation object and one surface of the glass plate is enlarged and observed from one surface of the glass plate by an optical magnifying means.
The contact state observation method according to claim 1. The optical axis of the optical magnifying means is substantially perpendicular to one surface of the glass plate to obtain the magnified image.
The contact state observation method according to claim 3. The average height (d) of the unevenness on one surface of the glass plate and the average distance between the unevenness on the contact surface of the observation object where the observation object and one surface of the glass plate are in contact with each other The ratio (d / λ) to (λ) is adjusted to a predetermined value with respect to the surface roughness of the portion of the observation object that contacts one surface of the glass plate,
The contact state observation method according to claim 1. 3 <λ / d <25 and 1 μm <d <20 μm.
The contact state observation method according to claim 5. The contact state observation method according to claim 3, wherein the enlarged image is captured by an imaging unit, and the imaging data is displayed on a display unit and observed. The contact state observation method according to claim 1, wherein the shape of the unevenness on one surface of the glass plate is adjusted according to the application condition of the translucent material filled in the concave portion on one surface of the glass plate. The contact state observation method according to claim 8, wherein the transparent material is made of a liquid material. The contact state observation method according to claim 8, wherein the transparent material is made of a solid material. The elastic observation object is formed of rubber.
The contact state observation method according to claim 1. One surface is uneven, and the other surface facing the one surface is flat, and the one surface is made of a light-transmitting material having the same or similar refractive index as the light-transmitting glass plate. the one surface in a state in which the light transmitting liquid coating to satisfy the light-transmitting material in the recess of the one surface translucent glass plate becomes smooth the uneven at Rukoto filled in the recess A pressing means for pressing the observation object and the glass plate relative to each other until the elastic observation object is brought into contact with the elastic observation object;
A light source that emits light from the other surface of the glass plate toward the first surface that is in contact with the observation object in a state in which the observation object is pressed;
From the one surface of the glass plate due to the irradiation of the light, the observation object in the one surface in a state in which light-transmitting material of the glass plate becomes smooth the uneven at Rukoto filled in the recess Change in accordance with the brightness of the observation image from the one surface depending on the contact state between the observation object on the one surface and the one surface. With respect to the contact state between the observation object and the one surface, the luminance weakness or strength is defined as contact or non-contact between the observation object and the one surface. An optical detection means for optically observing a contact portion with one surface;
Imaging means for imaging the result detected by the optical detection means;
A contact state observation device comprising: a display unit configured to display an image captured by the imaging unit. The surface roughness of the irregularities on one surface of the glass plate is sufficiently smaller than the surface roughness of the portion that contacts the one surface of the glass plate of the observation object,
The contact state observation apparatus according to claim 12. The shape of the unevenness on one surface of the glass plate is adjusted by the application condition of the translucent material filled in the concave portion on one surface of the glass plate,
The contact state observation apparatus according to claim 12. The contact state observation apparatus according to claim 14, wherein the transparent material is made of a liquid material. The contact state observation apparatus according to claim 14, wherein the transparent material is made of a solid material.

Images