JP4141917B2 - Contactless displacement detector - Google Patents

Contactless displacement detector Download PDF

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JP4141917B2
JP4141917B2 JP2003276017A JP2003276017A JP4141917B2 JP 4141917 B2 JP4141917 B2 JP 4141917B2 JP 2003276017 A JP2003276017 A JP 2003276017A JP 2003276017 A JP2003276017 A JP 2003276017A JP 4141917 B2 JP4141917 B2 JP 4141917B2
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coil
rotating member
cylindrical
cylinder
shaft
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JP2005037295A (en
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倍勇 程
誠次 新井
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Tokyo Cosmos Electric Co Ltd
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Description

この発明は、無接点型変位検出装置に関し、特に、シャフトと一体化される導電性回動部材を回動させることより、この導電性回動部材に対向する円筒ハウジングの表面に形成されるコイルのインダクタンスを変化せしめ、このインダクタンス変化を電気信号に変換して出力する無接点型変位検出装置において、導電性回動部材を２半円筒同軸一体化導電性回動部材に変更して円筒ハウジングを２半円筒同軸一体化導電性回動部材の円筒間隙に進入した無接点型変位検出装置に関する。   The present invention relates to a contactless displacement detection device, and in particular, a coil formed on the surface of a cylindrical housing facing a conductive rotating member by rotating a conductive rotating member integrated with a shaft. In the non-contact type displacement detecting device that changes the inductance of the coil and converts the inductance change into an electrical signal and outputs the electric signal, the conductive rotating member is changed to a two-half-cylindrical coaxial conductive rotating member, and the cylindrical housing is changed. The present invention relates to a contactless displacement detecting device that has entered a cylindrical gap of a two semi-cylindrical coaxial integrated conductive rotating member.

無接点型変位検出装置の従来例を図３を参照して説明する。図３（ａ）は従来例の断面図であり、図３（ｂ）はその一部の分解斜視図である。
１はシャフト、２はEリング、３は軸受け、４は金属材料より成るケースである。５はコイル、６は円筒ハウジングである。コイル５は一方のコイル５ａと他方のコイル５bより成り、円筒ハウジング６の内表面に沿って円筒ハウジング６の中心軸に同軸に被着形成されている。円筒ハウジング６は渦電流効果の生じない材料である合成樹脂により構成される。７はシャフト１に同軸に一体化された半円柱状の導電性回動部材である。８は回路基板であり、その表面には発振器８３、整流回路８２、増幅回路８１、その他の部材より成る電子回路８０が形成されている。コイル５ａ、５ｂは直列接続して発振器８３に接続している。電子回路８０の出力端は入出力端子１０に接続している。 A conventional example of a contactless displacement detector will be described with reference to FIG. FIG. 3A is a sectional view of a conventional example, and FIG. 3B is an exploded perspective view of a part thereof.
1 is a shaft, 2 is an E-ring, 3 is a bearing, and 4 is a case made of a metal material. 5 is a coil, and 6 is a cylindrical housing. The coil 5 includes one coil 5 a and the other coil 5 b, and is coaxially attached to the central axis of the cylindrical housing 6 along the inner surface of the cylindrical housing 6. The cylindrical housing 6 is made of a synthetic resin that is a material that does not cause an eddy current effect. Reference numeral 7 denotes a semi-cylindrical conductive rotating member that is coaxially integrated with the shaft 1. Reference numeral 8 denotes a circuit board on which an oscillator 83, a rectifier circuit 82, an amplifier circuit 81, and an electronic circuit 80 made of other members are formed. The coils 5a and 5b are connected in series and connected to the oscillator 83. The output end of the electronic circuit 80 is connected to the input / output terminal 10.

ここで、シャフト１を駆動してこれに一体化されている導電性回動部材７を回動することにより導電性回動部材７とコイル５a、５bとが対向する面積は変化し、これによりコイル５a、５bのインダクタンスが変化する。このインダクタンスの変化は、回路基板８上に構成される電子回路８０により所要の電気信号に変換され、入出力端子１０を介して外部に出力される。これを簡単に説明するに、発振器８３に接続するコイル５ａ、５ｂに高周波を印加すると導電性回動部材７に渦電流が生じ、この状態でシャフト１を回動すると、コイル５ａ，５ｂに対する導電性回動部材７の対向面積が変化する。これにより渦電流値が変化してコイル５ａ，５ｂのインダクタンスが変化するに到る。この変化分を電気信号として取り出し、シャフト１の回動変位を検出することができる。９は無接点型変位検出装置の組み立ての最後に合成樹脂を充填して形成され封止基板である。   Here, by driving the shaft 1 and rotating the conductive rotation member 7 integrated therewith, the area where the conductive rotation member 7 and the coils 5a and 5b face each other changes. The inductance of the coils 5a and 5b changes. This change in inductance is converted into a required electrical signal by the electronic circuit 80 configured on the circuit board 8 and output to the outside via the input / output terminal 10. To briefly explain this, when a high frequency is applied to the coils 5a and 5b connected to the oscillator 83, an eddy current is generated in the conductive rotation member 7, and when the shaft 1 is rotated in this state, the conductivity to the coils 5a and 5b is generated. The opposing area of the sexual rotation member 7 changes. As a result, the eddy current value changes and the inductances of the coils 5a and 5b change. This change can be taken out as an electrical signal, and the rotational displacement of the shaft 1 can be detected. Reference numeral 9 denotes a sealing substrate formed by filling a synthetic resin at the end of the assembly of the contactless displacement detector.

図４を参照して他の従来例を説明するに、コイル５は円筒ハウジング６の外表面に円筒ハウジング６の中心軸に同軸に被着形成されている。この円筒ハウジング６も、渦電流効果の生じない材料である合成樹脂により構成されている。導電性回動部材７はシャフト１に同軸に一体化された半円筒状の導電性回動部材である。コイル５a、５bは、円筒ハウジング６の外表面に円筒ハウジング６の中心軸に同軸に被着形成されているので、回路基板８の表面の如き他のところに配置形成した場合と比較して、より大きい開口面積を確保することができ、依って、所要のインダクタンスと抵抗の確保をより容易に実行することができ、設計の自由度を大きいものとする（特許文献１ 参照）。
特開２００２−９０１７７ As will be described with reference to FIG. 4, the coil 5 is formed on the outer surface of the cylindrical housing 6 so as to be coaxial with the central axis of the cylindrical housing 6. The cylindrical housing 6 is also made of synthetic resin, which is a material that does not cause eddy current effects. The conductive rotation member 7 is a semi-cylindrical conductive rotation member that is coaxially integrated with the shaft 1. Since the coils 5a and 5b are formed on the outer surface of the cylindrical housing 6 so as to be coaxial with the central axis of the cylindrical housing 6, compared to the case where the coils 5a and 5b are arranged and formed elsewhere such as the surface of the circuit board 8, A larger opening area can be ensured, and therefore required inductance and resistance can be more easily ensured, and the degree of design freedom is increased (see Patent Document 1).
JP2002-90177

ところで、上述した無接点型変位検出装置には、シャフト１の回動操作が行われてはおらず、或いは導電性回動部材７とコイル５との間の対向面積の変化が生じていない場合においても、無接点型変位検出装置の設置使用状態において振動その他の外的要因により導電性回動部材７とコイル５との間に僅かな間隙の変化が発生すると、この変化に起因してコイル５のインダクタンスに変化が発生し、電子回路８０はこのインダクタンス変化をもシャフト１が回動操作されたものと誤認識し、電気信号に変換して出力する欠点を有する。これを図５を参照して説明するに、図５（ａ）において、コイル５ａおよびコイル５ｂと導電性回動部材７との間の間隙dが△dだけ変化することにより、コイル５ａおよびコイル５ｂのインダクタンスが△Lだけ変化する。このインダクタンス変化△Lはシャフト１の回動操作に依らない変化であるにも関わらずこれをも電気信号に変換し、誤差信号として出力されることとなる。 By the way, in the contactless displacement detecting device described above, the shaft 1 is not rotated, or the facing area between the conductive rotating member 7 and the coil 5 is not changed. However, if a slight gap change occurs between the conductive rotating member 7 and the coil 5 due to vibration or other external factors in the installed and used state of the contactless displacement detecting device, the coil 5 is caused by this change. The electronic circuit 80 has a defect that the electronic circuit 80 erroneously recognizes this inductance change as a result of the shaft 1 being turned, converts it into an electrical signal, and outputs it. To be described with reference to FIG. 5 this, in FIG. 5 (a), the by the gap d between the coils 5a and coils 5b and the conductive rotating member 7 is changed by △ d, coil 5a and the coil The inductance of 5b changes by ΔL. Although the inductance change ΔL is a change that does not depend on the turning operation of the shaft 1, it is also converted into an electric signal and output as an error signal.

この発明は、導電性回動部材７を２半円筒同軸一体化導電性回動部材７０に変更して円筒ハウジング６を２半円筒同軸一体化導電性回動部材７０の円筒間隙７１に進入する構成を採用することにより、上述の欠点を解消した無接点型変位検出装置を提供するものである。   In the present invention, the conductive rotating member 7 is changed to a two-half cylindrical coaxial integrated conductive rotating member 70 and the cylindrical housing 6 enters the cylindrical gap 71 of the two semi-cylindrical coaxial integrated conductive rotating member 70. By adopting the configuration, a non-contact type displacement detection device that eliminates the above-described drawbacks is provided.

シャフト１、シャフト１に同軸に一体化された導電性回動部材７、円筒ハウジング６の表面に形成されたコイル５を有し、導電性回動部材７を円筒ハウジング６にシャフト１を介して同軸に組み合わせ、シャフト１に関して導電性回動部材７を回動して導電性回動部材７とコイル５との間の対向面積を変化させてコイル５に生起せしめたインダクタンス変化を電気信号として取り出す無接点型変位検出装置において、導電性回動部材７は内側半円筒７ａおよび外側半円筒７ｂより成る２半円筒同軸一体化導電性回動部材７０より成り、円筒ハウジング６のコイル形成円筒部６０を内側半円筒７ａと外側半円筒７ｂとの間に形成される円筒間隙７１に進入して組み立てた無接点型変位検出装置を構成した。   A shaft 1, a conductive rotation member 7 that is coaxially integrated with the shaft 1, and a coil 5 formed on the surface of the cylindrical housing 6. The conductive rotation member 7 is connected to the cylindrical housing 6 via the shaft 1. Combined coaxially, the conductive rotation member 7 is rotated with respect to the shaft 1 to change the facing area between the conductive rotation member 7 and the coil 5, and the inductance change caused in the coil 5 is taken out as an electric signal. In the contactless displacement detecting device, the conductive rotation member 7 is composed of a two semi-cylindrical coaxial integrated conductive rotation member 70 including an inner half cylinder 7 a and an outer half cylinder 7 b, and a coil forming cylindrical portion 60 of the cylindrical housing 6. A contactless displacement detection device was constructed by assembling and entering a cylindrical gap 71 formed between the inner half cylinder 7a and the outer half cylinder 7b.

そして、先の無接点型変位検出装置において、内側半円筒７ａの外面とコイル５が被着形成されるコイル形成円筒部６０の外面との間の距離ｄ1と、外側半円筒７ｂの内面とコイル５が被着形成されるコイル形成円筒部６０の外面との間の距離ｄ2とを等しく設計製造した無接点型変位検出装置を構成した。 In the contactless displacement detection device, the distance d 1 between the outer surface of the inner semicylinder 7a and the outer surface of the coil-forming cylindrical part 60 on which the coil 5 is formed, and the inner surface of the outer semicylinder 7b A non-contact type displacement detecting device was designed in which the distance d 2 between the outer surface of the coil-forming cylindrical portion 60 on which the coil 5 is deposited is equally designed and manufactured.

以上の通りであって、この発明によれば、 シャフト１と一体化される導電性回動部材７を回動させることより、この導電性回動部材７に対向する円筒ハウジング６の表面に形成されるコイル５のインダクタンスを変化せしめ、このインダクタンス変化を電気信号に変換して出力する無接点型変位検出装置において、導電性回動部材７を２半円筒同軸一体化導電性回動部材７０に変更して円筒ハウジング６を２半円筒同軸一体化導電性回動部材７０の円筒間隙７１に進入する構成を採用することにより、無接点型変位検出装置の設置使用状態において振動その他の外的要因により導電性回動部材７とコイル５との間に僅かな間隙７１の変化が発生しても、コイル５のインダクタンスが不規則に変化することのない無接点型変位検出装置を提供することができる。 As described above, according to the present invention, the conductive rotating member 7 integrated with the shaft 1 is rotated to form the surface of the cylindrical housing 6 facing the conductive rotating member 7. In the contactless displacement detector that changes the inductance of the coil 5 and converts the inductance change into an electrical signal and outputs the electrical signal, the conductive rotating member 7 is replaced with the two semi-cylindrical coaxial integrated conductive rotating member 70. By adopting a configuration in which the cylindrical housing 6 is changed to enter the cylindrical gap 71 of the two semi-cylindrical coaxial integrated conductive rotating member 70, vibration and other external factors in the installed and used state of the contactless displacement detector Provides a contactless displacement detecting device in which the inductance of the coil 5 does not change irregularly even if a slight change in the gap 71 occurs between the conductive rotating member 7 and the coil 5. Can.

この発明を実施するための最良の形態を図１の実施例を参照して説明する。図１（ａ）は実施例の導電性回動部材の斜視図、図１（ｂ）は実施例のコイルおよび円筒ハウジングの斜視図、図１（ｃ）は実施例の動作を説明する図である。
この実施例は、従来例におけるシャフト１に同軸に一体化された半円筒状の導電性回動部材７を、２半円筒を円筒間隙７１を形成して同軸一体化した２半円筒同軸一体化導電性回動部材７０に構成している。即ち、内側半円筒７ａおよび外側半円筒７ｂより成る２半円筒を同軸にして上側の端部において一体化して下方を２層にし、外側半円筒７ｂの内側面と内側半円筒７ａの外側との間に円筒間隙７１を形成している。 The best mode for carrying out the present invention will be described with reference to the embodiment of FIG. FIG. 1A is a perspective view of the conductive rotation member of the embodiment, FIG. 1B is a perspective view of the coil and the cylindrical housing of the embodiment, and FIG. 1C is a diagram for explaining the operation of the embodiment. is there.
In this embodiment, the semi-cylindrical conductive rotating member 7 coaxially integrated with the shaft 1 in the conventional example is integrated with the two semi-cylinders by coaxially integrating the two semi-cylinders by forming the cylindrical gap 71. The conductive rotating member 70 is configured. That is, two semi-cylinders composed of the inner half-cylinder 7a and the outer half-cylinder 7b are coaxially integrated at the upper end to form two layers below, and the inner side surface of the outer half-cylinder 7b and the outer side of the inner half-cylinder 7a A cylindrical gap 71 is formed therebetween.

円筒ハウジング６は、コイル形成円筒部６０と、このコイル形成円筒部６０の下端に一体形成された閉塞基板６１より成る。円筒ハウジング６のコイル形成円筒部６０に形成されるコイル５は１対の一方のコイル５ａと他方のコイル５bより成り、コイル形成円筒部６０に被着形成されている。閉塞基板６１の中心部には、シャフト１の下端部を軸支する軸受け６１１が形成される。円筒ハウジング６は渦電流効果の生じない材料である合成樹脂により構成される。閉塞基板６１の内表面には、先の従来例と同様に、発振器８３、整流回路８２、増幅回路８１、その他の部材より成る電子回路８０が形成されている。コイル５ａ、５ｂは直列接続して発振器８３に接続している。電子回路８０の出力端は入出力端子１０に接続している。   The cylindrical housing 6 includes a coil forming cylindrical portion 60 and a closing substrate 61 integrally formed at the lower end of the coil forming cylindrical portion 60. The coil 5 formed in the coil forming cylindrical portion 60 of the cylindrical housing 6 is composed of a pair of one coil 5 a and the other coil 5 b, and is attached to the coil forming cylindrical portion 60. A bearing 611 that pivotally supports the lower end of the shaft 1 is formed at the center of the closing substrate 61. The cylindrical housing 6 is made of a synthetic resin that is a material that does not cause an eddy current effect. On the inner surface of the blocking substrate 61, an electronic circuit 80 including an oscillator 83, a rectifier circuit 82, an amplifier circuit 81, and other members is formed as in the prior art. The coils 5a and 5b are connected in series and connected to the oscillator 83. The output end of the electronic circuit 80 is connected to the input / output terminal 10.

シャフト１に同軸に一体化された２半円筒同軸一体化導電性回動部材７０と、コイル形成円筒部６０にコイル５が被着形成され、閉塞基板６１内表面に電子回路が形成された円筒ハウジング６が準備されたところで、無接点型変位検出装置を組み立てる。この組み立ては、２半円筒同軸一体化導電性回動部材７０に形成された円筒間隙７１に、円筒ハウジング６のコイル形成円筒部６０を進入せしめ、最後にシャフト１の下端部を軸受け６１１に嵌合軸支させることにより簡単に実施することができる。なお、円筒ハウジング６に対する２半円筒同軸一体化導電性回動部材７０の抜け止めは適宜の抜け止め部材を採用して実施することができる。そして、組み立てが終了したところで、円筒ハウジング６は２半円筒同軸一体化導電性回動部材７０の円筒間隙７１に全体が没入し、円筒ハウジング６の表面に形成されるコイル５を形成する１対の一方のコイル５ａと他方のコイル５bは回動により２半円筒同軸一体化導電性回動部材７０の外側半円筒７ｂと内側半円筒７ａの双方に対向する設計製造がなされている。そして、内側半円筒７ａの外面とコイル５が被着形成されるコイル形成円筒部６０の外面との間の距離ｄ1と、外側半円筒７ｂの内面とコイル５が被着形成されるコイル形成円筒部６０の外面との間の距離ｄ2とは、等しくｄ1＝ｄ2 に設計されている。 A two-cylindrical coaxial integrated conductive rotating member 70 that is coaxially integrated with the shaft 1, and a cylinder in which the coil 5 is attached and formed on the coil-forming cylindrical portion 60 and an electronic circuit is formed on the inner surface of the closing substrate 61. When the housing 6 is prepared, the contactless displacement detector is assembled. In this assembly, the coil forming cylindrical portion 60 of the cylindrical housing 6 is inserted into the cylindrical gap 71 formed in the two semi-cylindrical coaxial integrated conductive rotating member 70, and finally the lower end portion of the shaft 1 is fitted to the bearing 611. It can be easily implemented by supporting the joint shaft. The two semi-cylindrical coaxial integrated conductive rotating member 70 can be prevented from coming off from the cylindrical housing 6 by using an appropriate retaining member. When the assembly is completed, the cylindrical housing 6 is entirely immersed in the cylindrical gap 71 of the two semi-cylindrical coaxial integrated conductive rotating member 70 to form a pair of coils 5 formed on the surface of the cylindrical housing 6. one of the coils 5a and the other coil 5b of both pairs design manufacture countercurrent two semi-cylindrical coaxial integral conductive outer half-cylinder 7b and the inner half-cylinder 7a of the pivot member 70 is made by turning. The distance d 1 between the outer surface of the inner half cylinder 7a and the outer surface of the coil forming cylindrical portion 60 on which the coil 5 is formed, and the coil formation on which the inner surface of the outer half cylinder 7b and the coil 5 are formed. The distance d 2 between the cylindrical portion 60 and the outer surface is designed to be equal to d 1 = d 2 .

次に、実施例の動作について説明する。ここで、図１（ｃ）及び図５（ｂ）は、実施例においてインダクタンス変化が消去される概念を端的に説明する都合上、コイル５が被着形成されるコイル形成円筒部６０を省略して図示されている。無接点型変位検出装置に外部から振動或いは圧力の如き応力が印加されると、コイル５が被着形成されるコイル形成円筒部６０および２半円筒同軸一体化導電性回動部材７０の一方或いは双方に変位を発生する。即ち、この応力により、内側半円筒７ａとコイル形成面であるコイル形成円筒部６０の外面との間に△d1の変位を生ぜしめる。そして、外側半円筒７ｂとコイル形成円筒部６０の外面との間に△d2の変位を生ぜしめる。これらの変位により、コイル５と内側半円筒７ａとの間には△Ｌ1のインダクタンス変化が生じ、コイル５と外側半円筒７ｂとの間には△Ｌ2のインダクタンス変化が生ずるに到る。ところで、上述した通り、内側半円筒７ａの外面とコイル形成円筒部６０の外面との間の距離ｄ1と、外側半円筒７ｂの内面とコイル形成円筒部６０の外面との間の距離ｄ2とはｄ1＝ｄ2 に設計されているので、一方の変位△d1 を正とすれば、他方の変位△d2 は負である。従って、コイル形成円筒部６０の外面のコイル５と、内側半円筒７ａおよび外側半円筒７ｂとの間には、（△Ｌ1−△Ｌ2）のインダクタンス変化が生ずる。そして、内側半円筒７ａと外側半円筒７ｂとは相互に一体化されているので、一方の変位△d1 と他方の変位△d2 の絶対値は等しく、△d1 ＝△d2 ＝△dである。従って、個々のインダクタンス変化△Ｌ1とインダクタンス変化△Ｌ2 はほぼ等しく、応力に起因する全体のインダクタンス変化（△Ｌ1−△Ｌ2）は零になる。結局、外部から応力が印加されたことに起因するコイル５と２半円筒同軸一体化導電性回動部材７０の間に発生するインダクタンス変化は消去されるので、これをシャフト１が回動操作されたものと誤認識して電気信号に変換出力する欠点は根本的に解消される。 Next, the operation of the embodiment will be described. Here, FIG. 1C and FIG. 5B omit the coil-forming cylindrical portion 60 on which the coil 5 is formed for the sake of simplicity in explaining the concept that the inductance change is eliminated in the embodiment. Is shown. When a stress such as vibration or pressure is applied from the outside to the contactless displacement detector, one of the coil-forming cylindrical portion 60 and the two semi-cylindrical coaxial integrated conductive rotating member 70 on which the coil 5 is deposited or formed. Displacement occurs on both sides. That is, this stress causes a displacement of Δd 1 between the inner half cylinder 7a and the outer surface of the coil forming cylindrical portion 60 which is a coil forming surface. Then, a displacement of Δd 2 is caused between the outer half cylinder 7 b and the outer surface of the coil forming cylinder portion 60. Due to these displacements, an inductance change of ΔL 1 occurs between the coil 5 and the inner half cylinder 7a, and an inductance change of ΔL 2 occurs between the coil 5 and the outer half cylinder 7b. By the way, as described above, the distance d 1 between the outer surface of the inner half cylinder 7 a and the outer surface of the coil forming cylinder portion 60 and the distance d 2 between the inner surface of the outer half cylinder 7 b and the outer surface of the coil forming cylinder portion 60. Is designed so that d 1 = d 2 , if one displacement Δd 1 is positive, the other displacement Δd 2 is negative. Accordingly, an inductance change of (ΔL 1 −ΔL 2 ) occurs between the coil 5 on the outer surface of the coil forming cylindrical portion 60 and the inner half cylinder 7a and the outer half cylinder 7b. Since the inner half cylinder 7a and the outer half cylinder 7b are integrated with each other, the absolute values of one displacement Δd 1 and the other displacement Δd 2 are equal, and Δd 1 = Δd 2 = Δ. d. Accordingly, the individual inductance change ΔL 1 and the inductance change ΔL 2 are substantially equal, and the overall inductance change (ΔL 1 −ΔL 2 ) caused by the stress becomes zero. Eventually, since the inductance change generated between the coil 5 and the two semi-cylindrical coaxial integrated conductive rotating member 70 due to the application of stress from the outside is eliminated, the shaft 1 is rotated. The drawback of erroneously recognizing that the signal has been converted into an electrical signal is fundamentally eliminated.

図２を参照して実施例および他の従来例の動作特性を説明する。図２（ａ）は導電性回動部材がシャフトに垂直な方向であるｘ軸方向に振動、応力が印加された場合の移動距離（変位）−出力電圧変動率の特性を説明する図である。図２（ｂ）は導電性回動部材がシャフトの延伸方向であるｙ軸方向に振動、応力が印加された場合の移動距離（変位）−出力電圧変動率の特性を説明する図である。鎖線は従来例を示し、実線は実施例を示す。
図２（ａ）の場合は、ｘ軸方向に振動、応力が印加されてシャフト１、これに同軸に一体化された導電性回動部材７、円筒ハウジング６に大きく影響が及ぶ場合であるが、実線で示される実施例の特性曲線は、鎖線で示される従来例の特性曲線と比較して、変位に対する出力電圧変動率の増加の割合は１／６程度の小さな値を示しており、出力の不安定さに対する出力電圧変動の抑制効果は充分であることが認識される。図２（ｂ）はｙ軸方向に振動、応力が印加された場合であるが、この場合はてシャフト１、これに同軸に一体化された導電性回動部材７、円筒ハウジング６に及ぶ振動の影響は小さく、変位に対する出力電圧変動率の増加の割合は実施例および従来例の双方について充分に小さい。 With reference to FIG. 2, the operation characteristics of the embodiment and other conventional examples will be described. FIG. 2A is a diagram for explaining the characteristics of the moving distance (displacement) -output voltage fluctuation rate when the conductive rotating member is vibrated and stressed in the x-axis direction which is perpendicular to the shaft. . FIG. 2B is a diagram for explaining the characteristics of the moving distance (displacement) -output voltage fluctuation rate when the conductive rotating member is vibrated and stressed in the y-axis direction which is the extending direction of the shaft. A chain line indicates a conventional example, and a solid line indicates an example.
In the case of FIG. 2A, vibration and stress are applied in the x-axis direction to greatly affect the shaft 1, the conductive rotating member 7 and the cylindrical housing 6 integrated coaxially therewith. In the characteristic curve of the embodiment shown by the solid line, the increase rate of the output voltage fluctuation rate with respect to the displacement is a small value of about 1/6 as compared with the characteristic curve of the conventional example shown by the chain line, and the output It is recognized that the effect of suppressing fluctuations in the output voltage with respect to instability is sufficient. FIG. 2B shows a case where vibration and stress are applied in the y-axis direction. In this case, the vibration that extends over the shaft 1, the conductive rotating member 7 that is coaxially integrated with the shaft 1, and the cylindrical housing 6. Thus, the rate of increase in the output voltage fluctuation rate relative to the displacement is sufficiently small for both the example and the conventional example.

実施例の分解斜視図。The disassembled perspective view of an Example. 実施例および他の従来例の動作特性を説明する図。The figure explaining the operating characteristic of an Example and another prior art example. 従来例を説明する図。The figure explaining a prior art example. 他の従来例の分解斜視図。The exploded perspective view of other conventional examples. 従来例（ａ）と実施例（ｂ）の動作を説明する図。Diagram for explaining the operation of the slave come Example (a) Example (b).

符号の説明Explanation of symbols

１ シャフト １０ 入出力端子
２ Eリング ３ 軸受け
４ ケース ５ コイル
５ａ 一方のコイル ５b 他方のコイル
６ 円筒ハウジング ６０ コイル形成円筒部
６１ 閉塞基板 ６１１ 軸受け
７ 導電性回動部材 ７０ ２半円筒同軸一体化導電性回動部材 ７１ 円筒間隙 ７ａ 内側半円筒
７ｂ 外側半円筒 ８ 回路基板
８０ 電子回路 ８１ 増幅回路
８２ 整流回路 ９ 封止基板 DESCRIPTION OF SYMBOLS 1 Shaft 10 Input / output terminal 2 E ring 3 Bearing 4 Case 5 Coil 5a One coil 5b The other coil 6 Cylindrical housing 60 Coil formation cylindrical part 61 Closure board 611 Bearing 7 Conductive rotation member 70 2 Semi-cylinder coaxial integrated conductive Rotating member 71 Cylindrical gap 7a Inner half cylinder 7b Outer half cylinder 8 Circuit board 80 Electronic circuit 81 Amplifier circuit 82 Rectifier circuit 9 Sealing board

Claims (1)

シャフト、シャフトに同軸に一体化された導電性回動部材、円筒ハウジングの表面に形成されたコイルを有し、導電性回動部材を円筒ハウジングにシャフトを介して同軸に組み合わせ、シャフトに関して導電性回動部材を回動して導電性回動部材とコイルとの間の対向面積を変化させてコイルに生起せしめたインダクタンス変化を電気信号として取り出す無接点型変位検出装置において、
導電性回動部材は内側半円筒および外側半円筒より成る２半円筒同軸一体化導電性回動部材より成り、円筒ハウジングのコイル形成円筒部を内側半円筒と外側半円筒との間に形成される円筒間隙に進入して組み立て、
内側半円筒の外面とコイルが被着形成されるコイル形成円筒部の外面との間の距離と、外側半円筒の内面とコイルが被着形成されるコイル形成円筒部の外面との間の距離とが等しいことを特徴とする無接点型変位検出装置。 It has a shaft, a conductive rotating member that is coaxially integrated with the shaft, and a coil that is formed on the surface of the cylindrical housing, and the conductive rotating member is coaxially combined with the cylindrical housing via the shaft, and is conductive with respect to the shaft. In the contactless displacement detection device that rotates the rotating member and changes the facing area between the conductive rotating member and the coil to extract the inductance change generated in the coil as an electrical signal.
The conductive rotating member is composed of a two semi-cylindrical coaxial conductive rotating member composed of an inner semi-cylinder and an outer semi-cylinder, and a coil-forming cylindrical portion of the cylindrical housing is formed between the inner semi-cylinder and the outer semi-cylinder. assembly enters the cylinder gap that,
The distance between the outer surface of the inner semi-cylinder and the outer surface of the coil-forming cylindrical part on which the coil is formed, and the distance between the inner surface of the outer semi-cylinder and the outer surface of the coil-forming cylindrical part on which the coil is formed. Is a contactless displacement detecting device characterized in that
JP2003276017A 2003-07-17 2003-07-17 Contactless displacement detector Expired - Fee Related JP4141917B2 (en)

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