JP4103562B2

JP4103562B2 - Piezoelectric diaphragm pump and electric shaver with treatment agent discharge mechanism using the same

Info

Publication number: JP4103562B2
Application number: JP2002342939A
Authority: JP
Inventors: 治倫北原; 司法上; 達治川口
Original assignee: Matsushita Electric Works Ltd
Current assignee: Panasonic Electric Works Co Ltd
Priority date: 2002-11-26
Filing date: 2002-11-26
Publication date: 2008-06-18
Anticipated expiration: 2022-11-26
Also published as: JP2004176613A

Description

【０００１】
【発明の属する技術分野】
本発明は、圧電ダイヤフラム型ポンプやこれを用いて処理剤吐出機構を備えた電気かみそりに関する。
【０００２】
【従来の技術】
圧電ダイヤフラム型ポンプとは、圧電素子板と金属板を用いて形成したダイヤフラム板の撓みが該圧電素子板の伸縮により増減することを利用して、このダイヤフラム板の撓みに応じて容積が変動するポンプ室をポンプ本体内に備えたものである。ポンプ本体には、ポンプ室とポンプ本体外部とを連通させる吸入経路及び吐出経路を貫設しており、吸入経路には流体の吸入方向にのみ開く吸入側逆止弁を、吐出経路には流体の吐出方向にのみ開く吐出側経路をそれぞれ備えているので、圧電素子板への通電により該圧電素子板を伸縮させてポンプ室の容積を増減させると、吸入経路に連通させてある外部の動作流体供給部から吸入経路を介して動作流体がポンプ室内に流入し、更に吐出流路からポンプ本体外部に動作流体が送り出されるようになっている。そして、上記の圧電ダイヤフラム型ポンプは電気かみそりの処理剤吐出機構としても好適に利用されるものであり、この場合、動作流体をシェービングローションである肌塗布用の処理剤とした圧電ダイヤフラム型ポンプにより処理剤を吐出しながらのシェービングが可能となるものである。
【０００３】
しかしながら、上記の圧電ダイヤフラム型ポンプにおいて動作流体が複数成分を含むものである場合には、この動作流体によるポンプ本体内部の汚染が問題となる。具体的には、動作流体として例えばアルコールに粉末等の固形物を含有させたものを用いた場合に、動作流体がポンプ本体内部に残留すると該動作流体の各種成分が逆止弁等の構成部材に付着したり、また、ひどい場合には構成部材を溶かしてしまう可能性があった。これにより逆止弁が劣化したり開閉が正常に行われなくなったりすればポンプ自体の寿命が著しく低下することとなる。
【０００４】
上記問題に対して、ポンプ使用時以外にポンプ室内を洗浄する手段は従来から提案されており、例えば、ポンプ室の内部気圧と外部気圧との圧力差によりポンプ室内に外気圧を吸入してクリーニングを行う手段のものがある（特許文献１参照）。ところが、上記手段によればポンプ室の内部気圧が低い場合にしか外気を吸入することができないといった問題がある。
【０００５】
【特許文献１】
特開平１０−６８３８６号公報
【０００６】
【発明が解決しようとする課題】
本発明は上記の点に鑑みてなされたものであり、ポンプ本体内部に洗浄用流体を自在に吸入して残留物を外部に排除することで寿命の低下を防止することができる圧電ダイヤフラム型ポンプ及びそれを用いた処理剤吐出機構付き電気かみそりを提供することを課題とするものである。
【０００７】
【課題を解決するための手段】
上記課題を解決するために本発明を、ポンプ本体に、圧電素子板を用いて通電により変形自在に形成したダイヤフラム板と、該ダイヤフラム板の変形に伴い容積が変動するポンプ室とを備え、ポンプ室とポンプ本体外部とを連通させる吸入経路及び吐出経路をポンプ本体に貫設し、吸入経路中には流体の吸入方向にのみ開く吸入側逆止弁を備え、吐出経路中には流体の吐出方向にのみ開く吐出側逆止弁を備え、動作流体を供給する動作流体供給部を吸入経路の外部側端部に連通させて成る圧電ダイヤフラム型ポンプにおいて、洗浄用流体を供給する洗浄用流体供給部を吸入経路の外部側端部に連通させるとともに、ダイヤフラム板の変形に伴うポンプ室の容積変動を、洗浄用流体を洗浄用流体供給部からポンプ本体内に導入する駆動源とし、ポンプ室内に洗浄用流体を吸入した状態で吸入側逆止弁又は吐出側逆止弁を閉じる弁固定機構を備えたことを特徴としたものとする。
【０００８】
このようにすることで、ポンプ本体内に洗浄用流体を自在に吸入して残留物を除去し、構成部材を初期状態に戻すことでポンプ全体の能力の低下や寿命の低下を防止することができるとともに、洗浄流体を吸入する為の駆動源としてダイヤフラム板の変形を利用することができるので、外部に別に駆動源を設ける必要が無くコンパクト且つ低コストなものとなる。加えて、弁固定機構を備えたことで、ポンプ室の容積変動により洗浄用流体に圧力変動を発生させると、この圧力変動が弁固定機構により閉じた側と逆側の弁に集中して作用し、表裏両面が効率的に洗浄される。
【０００９】
また、本発明を、ポンプ本体に、圧電素子板を用いて通電により変形自在に形成したダイヤフラム板と、該ダイヤフラム板の変形に伴い容積が変動するポンプ室とを備え、ポンプ室とポンプ本体外部とを連通させる吸入経路及び吐出経路をポンプ本体に貫設し、吸入経路中には流体の吸入方向にのみ開く吸入側逆止弁を備え、吐出経路中には流体の吐出方向にのみ開く吐出側逆止弁を備え、動作流体を供給する動作流体供給部を吸入経路の外部側端部に連通させて成る圧電ダイヤフラム型ポンプにおいて、洗浄用流体を供給する洗浄用流体供給部を吸入経路の外部側端部に連通させるとともに、洗浄用流体を洗浄用流体供給部からポンプ本体内に送り出す駆動部を、洗浄用流体供給部と吸入経路との間に介在するようにポンプ本体外部に備え、ポンプ室内に洗浄用流体を吸入した状態で吸入側逆止弁又は吐出側逆止弁を閉じる弁固定機構を備えたことを特徴としたものとすることも好ましい。
【００１０】
このようにすることで、ポンプ本体内に洗浄用流体を自在に吸入して残留物を除去し、構成部材を初期状態に戻すことでポンプ全体の能力の低下や寿命の低下を防止することができるとともに、駆動部による外部圧力の任意変更によって洗浄運転時の圧力を容易に制御することができる。加えて、弁固定機構を備えたことで、ポンプ室の容積変動により洗浄用流体に圧力変動を発生させると、この圧力変動が弁固定機構により閉じた側と逆側の弁に集中して作用し、表裏両面が効率的に洗浄される。
【００１１】
また、本発明を、ポンプ本体に、圧電素子板を用いて通電により変形自在に形成したダイヤフラム板と、該ダイヤフラム板の変形に伴い容積が変動するポンプ室とを備え、ポンプ室とポンプ本体外部とを連通させる吸入経路及び吐出経路をポンプ本体に貫設し、吸入経路中には流体の吸入方向にのみ開く吸入側逆止弁を備え、吐出経路中には流体の吐出方向にのみ開く吐出側逆止弁を備え、動作流体を供給する動作流体供給部を吸入経路の外部側端部に連通させて成る圧電ダイヤフラム型ポンプにおいて、洗浄用流体を供給する洗浄用流体供給部を吸入経路の外部側端部に連通させるとともに、洗浄用流体を洗浄用流体供給部からポンプ本体内に吸入する駆動部を吐出経路に接続させてポンプ本体外部に備え、ポンプ室内に洗浄用流体を吸入した状態で吸入側逆止弁又は吐出側逆止弁を閉じる弁固定機構を備えたことを特徴としたものとすることも好ましい。
【００１２】
このようにすることで、ポンプ本体内に洗浄用流体を自在に吸入して残留物を除去し、構成部材を初期状態に戻すことでポンプ全体の能力の低下や寿命の低下を防止することができるとともに、駆動部による外部圧力の任意変更によって洗浄運転時の圧力を容易に制御することができ、更に、洗浄運転時にポンプ本体内には負圧が生じることから残留物が複数成分を有するものであってもこれを分離させずに外部に吐出することができる。加えて、弁固定機構を備えたことで、ポンプ室の容積変動により洗浄用流体に圧力変動を発生させると、この圧力変動が弁固定機構により閉じた側と逆側の弁に集中して作用し、表裏両面が効率的に洗浄される。
【００１３】
また、吸入経路の外部側端部に管路を接続させ、該管路をその途中で切替え弁を介して分岐させ、分岐した一方を動作流体供給部に接続し、他方を洗浄用流体供給部に接続させることも好ましい。このようにすることで、弁を切替えるだけで通常運転と洗浄運転とを容易に切替えることができる。
【００１４】
また、吐出経路の外部側端部に管路を接続させ、該管路をその途中で切替え弁を介して分岐させ、分岐した一端側を動作流体の吐出端とし、他端側を洗浄用流体の吐出端とすることも好ましい。このようにすることで、動作流体と洗浄流体とでそれぞれの吐出される場所を適当な箇所に設定することができる。
【００１５】
また、ダイヤフラム板を超音波域で振動自在に設けることで、洗浄用流体を吸入した状態でポンプ室内に超音波振動を発生させる超音波洗浄機構を形成することも好ましい。このようにすることで、ポンプ室内や吸入及び吐出逆止弁の表面に付着した残留物を超音波振動により剥がれ易くして洗浄効果を向上させることができるとともに、別に新たな装置を設ける必要がなくコンパクト且つ低コストなものとなる。
【００１６】
また、洗浄用流体及びその流速をポンプ室内で乱流となるように設定することも好ましい。このようにすることで、ポンプ室内における流路内面近傍での洗浄用流体の停留が防止できて洗浄効果が高まる。
【００１７】
また、ポンプ本体の吐出経路の外部側端部と洗浄用流体供給部とを、洗浄用流体再生部を介在させた循環経路により連通させることも好ましい。このようにすることで、洗浄用流体を再生したうえで洗浄用流体供給部に戻すことが可能になり、洗浄に必要な洗浄用流体の量を大幅に削減してコストを低減することができる。
【００１８】
また、吸入経路と吸入側逆止弁との接触部分と、吐出経路と吐出側逆止弁との接触部分とのうち、少なくとも一方に鏡面を形成することも好ましい。このようにすることで、これら弁部材の周辺部において残留物が付着し難くなり、ポンプ全体としての能力の低下防止や高寿命化が実現される。
【００１９】
また、吸入側逆止弁と吐出側逆止弁のうち少なくとも一方の根元角部を、緩やかな略円弧状に形成することも好ましい。このようにすることで、根元角部に応力が集中に難くなって寿命が向上し、ポンプ全体としての能力の低下防止や高寿命化が実現される。
【００２０】
また、洗浄用流体が洗浄用気体であることも好ましい。このようにすることで、洗浄用気体を用いてポンプ本体内の残留物を良好に排除することができる。
【００２１】
また、洗浄用流体が洗浄用液体であることも好ましい。このようにすることで、洗浄用液体を用いてポンプ本体内の残留物を良好に排除することができる。
【００２２】
そして、本発明を、上記の圧電ダイヤフラム型ポンプを用いるとともに動作流体を肌塗布用の処理剤としたことを特徴とした処理剤吐出機構付き電気かみそりとすることも好ましい。このようにすることで、洗浄運転による能力の低下防止や高寿命化が実現されたポンプを駆動源として、肌塗布用の処理剤を常に一定量だけ吐出して快適なシェービングを長時間行うことができる。
【００２３】
【発明の実施の形態】
以下、本発明を添付図面に示す実施の形態に基づいて説明する。なお、以下に用いる上下方向は図中の上下方向を基準としたものとする。図１３（ａ）、（ｂ）には、本発明の実施の形態における一例の圧電ダイヤフラム型ポンプを示している。本例の圧電ダイヤフラム型ポンプの基本構成は従来の技術で既述したものと同様であるが、本例においては図示のように、一対の経路２ａ，２ｂを上下方向に貫設して備えたパイプ部２と、スリットを介して一対の弁３ａ，３ｂを一体に形成してあるシート状の弁部３と、一対の貫通孔４ａ、４ｂを上下方向に貫設して備えた筐体部４と、リング状の弾性体５と、圧電素子板８と金属板９とで円盤状に形成したダイヤフラム板６、下方に開口した有底筒状を成すダイヤフラム押え部７とを、下方から順に組み立ててポンプ本体１を形成している。
【００２４】
ダイヤフラム板６は、その外縁部を筐体部４とダイヤフラム押え部７とで挟持されており、更にダイヤフラム板６と筐体部４との間に弾性体５を介在させることでポンプ本体１内に弾性的に支持されている。ダイヤフラム板６とダイヤフラム押え部７の間であって挟持箇所以外の部分には空所１０が形成され、該空所１０内でダイヤフラム板６が上に凸に撓むように変形可能となっている。また、ダイヤフラム板６と筐体部４との間にも空所が形成されており、この空所が本例のポンプ室１１となっている。筐体部４とパイプ部２との間には弁部３を挟持しており、この状態で、筐体部４の貫通孔４ａとパイプ部２の経路２ａとが弁部３の弁３ａを介して一直線状に連続し、筐体部４の貫通孔４ｂとパイプ部２の経路２ｂとが弁部３の弁３ｂを介して一直線上に連続している。そして、弁３ａは上方にのみ開いて貫通孔４ａと経路２ａとを連通させ、弁３ｂは下方にのみ開いて貫通孔４ｂと経路２ｂとを連通させるようになっているので、貫通孔４ａと経路２ａとで本例の吸入経路１２が形成され、貫通孔４ｂと経路２ｂとで本例の吐出経路１３が形成されるとともに、弁３ａが吐出方向にのみ開く本例の吸入側逆止弁１４をなし、弁３ｂが吐出方向にのみ開く本例の吐出側逆止弁１５をなすものである。
【００２５】
円盤状の圧電素子板８の上下面には電極を形成しており、該電極には電流を供給する電線（図示せず）を接続させている。また、圧電素子板８には厚み方向に予め分極処理を行っており、電流供給により電極間に電界が生じると、図１５（ｃ）に示すようにこの電界の向き（図中の矢印方向）が圧電素子板８の分極の向きと同方向である場合には、圧電素子板８が厚み方向に伸び且つ径方向に縮むように変形する。また、図１５（ｂ）に示すように電界の向き（図中の矢印方向）が圧電素子板８の分極の向きと逆方向である場合には、圧電素子板８が厚み方向に縮み且つ径方向に伸びるように変形する。これに対して金属板９は伸縮しないので、伸縮量の差によりダイヤフラム板６全体としては、圧電素子板８への通電に応じてその撓み量が変更される。
【００２６】
ポンプ室１１はダイヤフラム板６と筐体部４とで囲まれて形成されているので、上記の通電に応じたダイヤフラム板６の変形に伴い容積が変動する。図１６（ａ）は初期状態であるが、図１６（ｂ）のようにダイヤフラム板６の撓み量の増加に伴ってポンプ室１１の容積が増加すれば、吸入側逆止弁１４が開き且つ吐出側逆止弁１５が閉じて、吸入経路１２を通って外部からポンプ室１１内に流体が吸入され、逆に、図１６（ｃ）のようにダイヤフラム板６の撓み量の減少に伴ってポンプ室１１の容積が減少すれば、吸入側逆止弁１４が閉じ且つ吐出側逆止弁１５が開いて、ポンプ室１１内から吸入経路１２を通って外部に流体が吐出される。したがって、図１５（ａ）に示すように印加電圧をＶ_ＨとＶ_Ｌとで交互に切替えてダイヤフラム板６の上記変形を繰り返し発生させれば流体を吸入経路１２側から吐出経路１３側へと送り出し続けることができる。
【００２７】
なお、図１４には、ダイヤフラム板６を支持する為にダイヤフラム押え部７を設けるのでなく、ダイヤフラム板６をその内周部に挟持して弾性的に支持するリング状の弾性支持体５´を、弾性体５の代りに用いた場合を示しているが、この場合もポンプの駆動形式としては同様である。
【００２８】
吸入経路１２及び吐出経路１３の外部側端部１２ａ，１３ａ（即ち、パイプ部２の経路２ａ及び経路２ｂの外部側端部）はそれぞれが外部との配管接続部を司るものであり、図１に示すように、吸入経路１２の外部側端部１２ａには管路１６を接続させている。管路１６はその途中で切替え弁１７を介して二手に分岐させており、一方の分岐管路１６ａを本例の動作流体供給部１８である動作流体タンク１９に接続させ、もう一方の分岐管路１６ｂを本例の洗浄用流体供給部２０である洗浄用気体タンク２１に接続させている。動作流体タンク１９内には動作流体５０が貯蔵されている。洗浄用気体タンク２１内には洗浄用気体５２が貯蔵されており、この洗浄用気体５２が本例の洗浄用流体５１となっている。また、吐出経路１３の外部側端部１３ａには管路２２の一端側を接続させるとともに他端側を動作流体５０及び洗浄用気体５２の吐出端２５としている。
【００２９】
本例においては、動作流体５０は複数の成分を含む液体であり、例えばアルコールに粉体等の固形物を含有させたものである。動作流体タンク１９と吸入経路１２の外部側端部１２ａとが連通するように切替え弁１７を切替え、既述したようにダイヤフラム板６の変形に伴いポンプ室１１の容積を変動させると、動作流体タンク１９内に貯蔵された動作流体５０が吸入経路１２側からポンプ室１１を介して吐出経路１３側へと送り出されて、管路２２の吐出端２５から外部に吐出され続けるものであり、これが通常運転時の動作である。この場合、ポンプ本体１の内部に動作流体５０が残留すると、該動作流体５０の各成分が吸入側逆止弁１４や吐出側逆止弁１５といった構成部材に付着して場合によってはこれを溶かしてしまう可能性があり、吸入側逆止弁１４や吐出側逆止弁１５の開閉が正常に行われなくなったり劣化したりすれば、ポンプ自体の寿命が著しく低下する原因となる。
【００３０】
そこで、本例においては、通常運転時以外に洗浄運転を行ってポンプ本体１内の残留物を外部に排出可能にしている。具体的には、洗浄用気体タンク２１と吸入経路１２の外部側端部１２ａとが連通するように切替え弁１７を切替えたうえで、通常運転と同様にダイヤフラム板６の変形に伴いポンプ室１１の容積を変動させれば良い。これにより、洗浄用気体タンク２１内に貯蔵された洗浄用気体５２が吸入経路１２側からポンプ室１１を介して吐出経路１３側へと送り出されて、管路２２の吐出端２５から外部に吐出され続ける。この際、ポンプ本体１内の残留物は除去されて洗浄用気体５２と共に外部に排出されることとなり、吸入側逆止弁１４や吐出側逆止弁１５といった構成部材は初期状態に保持され、動作が安定化して劣化が防止されることから、ポンプ自体の能力低下防止及び寿命向上が実現される。そして、洗浄用気体５２を洗浄用気体タンク２１からポンプ本体１内に導入する駆動源として、上記のようにダイヤフラム板６の変形に伴うポンプ室１１の容積変動を利用していることから、残留物排除用に別に駆動源を設置する必要がなく、コンパクト且つ低コストな圧電ダイヤフラム型ポンプとなっている。
【００３１】
なお、洗浄用気体５２としては、窒素やヘリウムといった不活性ガスを用いることが好ましい。これにより、動作流体５０の残留物を排除すると同時に、洗浄用気体５２自身の影響で構成部材を劣化させてしまうといったこともなくなり、ポンプ本体１内は常に初期状態に維持されて、ポンプ全体の能力の低下防止や高寿命化が実現されるものである。
【００３２】
また、洗浄運転時の駆動源として、上記のようにダイヤフラム板６の変形によるポンプ室１１の容積変動を利用するのでなく、図２に示すように切替え弁１７と洗浄用気体タンク２１とを接続させる分岐管路１６ｂの途中に送風機やポンプ等の気体導入装置２３を介在させても良い。この気体導入装置２３は、洗浄用気体タンク２１からポンプ本体１内にまで洗浄用気体５２を強制的に送り込む駆動部２４をなすものであり、洗浄用気体タンク２１と吸入経路１２の外部側端部１２ａとが連通するように切替え弁１７を切替えたうえで気体導入装置２３を駆動することで、洗浄用気体タンク２１内の洗浄用気体５２が吸入経路１２側からポンプ室１１を介して吐出経路１３側へと送り出されて、同様にポンプ本体１内の洗浄がなされるものである。
【００３３】
このようにして、駆動部２４である気体導入装置２３を、洗浄用気体タンク２１と吸入経路１２との間に介在するようにポンプ本体１の外部に備えることで、気体導入装置２３による外部圧力の任意変更によって洗浄運転時の圧力を容易に制御することができるという利点がある。
【００３４】
また、図３に示すように、吐出経路１３の外部側端部１３ａに接続した管路２２を途中で切替え弁３０を介して分岐させて、一方の分岐管路２２ａの端部を動作流体５０の吐出端２６として他方の分岐管路２２ｂの端部を洗浄用気体５２の吐出端２７とし、分岐管路２２ｂの途中に送風機やポンプ等の気体排出装置２８を介在させても良い。この場合、気体排出装置２８が、洗浄運転時に洗浄用気体５２を洗浄用気体タンク２１からポンプ本体１内に吸入する駆動部２９をなし、洗浄用気体タンク２１と吸入経路１２の外部側端部１２ａとが連通するように切替え弁１７を切替え、且つ、吐出経路１３の外部側端部１３ａと洗浄用気体５２の吐出端２７とが連通するように切替え弁３０を切替えたうえで、気体排出装置２８を駆動することで、洗浄用気体タンク２１内の洗浄用気体５２が吸入経路１２側からポンプ室１１内に吸入されて、ポンプ本体１内で同様の洗浄がなされた後に、分岐管路２２ｂを通って吐出端２７から洗浄用気体５２が外部に排出されるものである。
【００３５】
そして、このような気体排出装置２８を吐出経路１３に接続させてポンプ本体１の外部に備えたことで、気体排出装置２８による外部圧力の任意変更によって洗浄運転時の圧力を容易に制御することができるとともに、ポンプ本体１内には負圧が発生することから複数成分を有する残留物に対してこれを分離させずに外部に排出させることができるという利点がある。
【００３６】
なお、上記の洗浄運転ではなく通常運転を行う場合には、動作流体タンク１９と吸入経路１２の外部側端部１２ａとが連通するように切替え弁１７を切替え、且つ、吐出経路１３の外部側端部１３ａと吐出端２６とが連通するように切替え弁３０を切替えたうえで、ダイヤフラム板６の変形によりポンプ室１１の容積を変動させれば良い。
【００３７】
また、図４に示すように、管路２２の分岐管路２２ａ側の吐出端２７を洗浄用流体再生部３２であるフィルタ３１に接続させ、このフィルタ３１と洗浄用気体タンク２１とを接続する管路３１を設けることで、吐出経路１３の外部側端部１３ａと洗浄用気体タンク２１とを連通させる循環経路３３を形成することができる。循環経路３３中にはフィルタ３１が介在しているので、洗浄により残留物と一体にポンプ本体１内から排出された洗浄用気体５２をフィルタ３１により再生した後に洗浄用気体タンク２１に戻して再利用し、洗浄運転に要する洗浄用気体５２の量を大幅に削減してコストを削減することができる。
【００３８】
また、ポンプ本体１内での洗浄を更に効果的に行う為には、例えば図５に示すようにポンプ室１１内にて超音波振動を発生させることも好適である。具体的には、洗浄用気体５２をポンプ室１１内に導入して動作流体５０と入れ換えた状態で、圧電素子板８を２０ｋＨｚ以上の超音波領域で駆動してダイヤフラム板６を振動させ、超音波領域での微振動によりポンプ室１１内や吸入及び吐出側逆止弁１４，１５の表面に付着した残留物を剥がれ易くして洗浄効果を高めることができる。超音波振動の発生後にはポンプ室１１内の洗浄用気体５２を外部に輩出する。この場合、ダイヤフラム板６を超音波領域で振動自在に設けることで、洗浄用気体５２を吸入した状態でポンプ室１１内に超音波振動を発生させる超音波洗浄機構を形成しているので、超音波振動を発生させる為に外部に別の装置を付加する必要がないものである。
【００３９】
また、ポンプ本体１内での洗浄を更に効果的に行う為には、洗浄運転中にポンプ室１１内に導入する洗浄用気体５２をこれが乱流となるように充分に大きなレイノルズ数に設定することも好適である。レイノルズ数は、洗浄部位の管路幅や流体の流速や粘度に比例し且つ流体の密度に反比例するものであるから、洗浄用気体５２として粘度の高いものを用いたり流速を大きくする等の手段により、大きな値に設定することができる。洗浄用気体５２が層流である場合には、ポンプ本体１内の流路内面近傍において境界層が発達して澱み点が生じるのに対して、乱流である場合には流路内面近傍で境界層の剥離が生じて洗浄用気体５２の停留が防止される。したがって、上記のように洗浄用気体５２の性質やその流速をポンプ室１１内で乱流となるように設定することで、流路内面近傍での洗浄用気体５２の停留が防止できて洗浄効果が高まるものである。
【００４０】
また、ポンプ本体１内での洗浄を更に効果的に行う為には、ポンプ室１１内に洗浄用気体５２を吸入した状態で、図６に示すように弁固定機構４１により吸入側逆止弁１４を閉じたり、図７に示すように弁固定機構４２により吐出側逆止弁１５を閉じたりすることも好適である。例えば吸入側逆止弁１４を閉状態に固定した場合、ダイヤフラム板６の変形によりポンプ室１１の容積を変動させると、ポンプ室１１内にて洗浄用気体５２に生じる圧力変動が、固定されていない吐出側逆止弁１５に集中して作用し、これにより吐出側逆止弁１５の表裏両面を効率的に洗浄することができる。また、吐出側逆止弁１５を閉状態に固定した場合には、ポンプ室１１の容積変動により吸入側逆止弁１４の表裏両面を効率的に洗浄することができる。
【００４１】
また、ポンプ本体１内での動作流体５０の残留物の付着を予防する為に、例えば図８に示すように、吸入経路１２と吸入側逆止弁１４との互いの接触部分に鏡面３５を形成することも好適である。これにより、吸入側逆止弁１４の周辺部において流路抵抗や管路摩擦が低減されるので、動作流体５０の残留物が吸入側逆止弁１４の周辺に付着し難くなる。そして、弁部分での動作が安定し且つ劣化も防止されることで、ポンプ全体として能力の低下防止や高寿命化が実現されるものである。なお、同様の鏡面３５を、吐出経路１３と吐出側逆止弁１５との互いの接触部分に形成しても良いし、吸入側と吐出側の両方に形成しても良いのはもちろんである。
【００４２】
また、弁部分での劣化を更に防止する為に、例えば吸入側逆止弁１４の根元角部３６を、図９（ａ）に示すような略直角に形成するのでなく、図９（ｂ）に示すような緩やかな略円弧状に形成することも好適である。根元角部３６が略直角であれば吸入側逆止弁１４の開閉に際して該根元角部３６に応力が集中するのに対して、根元角部３６を上記略円弧状にすることで応力の集中を防止することができ、残留物による劣化の影響も略均等に作用することとなるので、吸入側逆止弁１４の寿命が向上して、ポンプ全体として能力の低下防止や高寿命化が実現されるものである。上記のような応力緩和構造は、吸入側逆止弁１４が他の形態のものであっても適用可能であり、図１０（ａ）〜（ｄ）に示すように弁体３７を一対の弁押さえ３８，３８で挟持して成るものにおいて、弁体３７と弁押さえ３８との当接箇所に形成される根元角部３６が図１０（ａ）、（ｂ）に示すように略直角であればこの弁体３７の開閉に際して根元角部３６に応力が集中するのに対して、図１０（ｃ）、（ｄ）に示すように根元角部３６が略円弧状となるように弁体３７を根元側ほど幅広に形成することで、同様に応力の集中を防止することができる。なお、同様の構造を吐出側逆止弁１５側に形成しても良いし、吸入側逆止弁１４と吐出側逆止弁１５の両側に形成しても良いのはもちろんである。
【００４３】
ここで、上記においては洗浄用流体５１が洗浄用気体５２である場合の圧電ダイヤフラム型ポンプの構成について説明してきたが、洗浄用流体５１は気体に限定されるものではなく液体であっても構わない。この場合、洗浄用流体供給部２０として、洗浄用液体（図示せず）を貯蔵した洗浄用液体タンク（図示せず）を備えた構成となり、上記した構成と同様の構成によりポンプ本体１内に洗浄用液体を導入して洗浄することができる。洗浄用液体としては、例えば非浸食性液体である不活性な水等を用いる。これにより、動作流体５０の残留物を排除すると同時に、洗浄用液体自身の影響で構成部材を劣化させてしまうといったことがなく、ポンプ本体１内を初期状態に維持することができるので、ポンプ全体の能力の低下防止や高寿命化が実現されるものである。
【００４４】
図１１（ｃ）には、図３に基づいて既述した圧電ダイヤフラム型ポンプを用いて処理剤吐出機構６０を構成した電気かみそりを示している。このものにおいては上記の動作流体５０がシェービングローションである肌塗布用の処理剤６１であって、動作流体タンク１９が処理剤６１を貯蔵する処理剤容器６２、動作流体５０の吐出端２６が処理剤６１の吐出端６３となっている。この吐出端６３は電気かみそり本体７０の上端に設けた刃部７１に近接して設けてあって、圧電ダイヤフラム型ポンプの駆動により電気かみそり使用時に吐出端６３から処理剤６１を塗布するようになっている。そして、洗浄用気体タンク２１と吐出端２７とを連通させた状態で気体導入装置２３を駆動することで、洗浄用気体５２をポンプ本体１内に導入して洗浄した後に吐出端２７から排出するものである。
【００４５】
なお、図１１（ａ）、（ｂ）に示すように、洗浄用気体５２をポンプ本体１内に導入する駆動源として、図１に基づいて既述したようにポンプ室１１の容積変動を利用しても良いし、図２に基づいて既述したように気体排出装置２８を設けても良い。また、洗浄用気体５２の代りに洗浄用液体を利用しても良く、圧電ダイヤフラム型ポンプについて既述した構成のいずれを組み合わせて用いても良いことはもちろんである。なお、図１２には、図１１（ａ）に示す電気かみそりの更に詳細な構成を示している。
【００４６】
そして、これらの圧電ダイヤフラム型ポンプを用いて構成した処理剤吐出機構６０を備えることで、洗浄運転による能力の低下防止や高寿命化が実現されたポンプを駆動源として、処理剤６１を常に一定量だけ吐出して快適なシェービングを長時間行うことができるものである。
【００４７】
【発明の効果】
上記のように請求項１記載の発明にあっては、ポンプ本体内に洗浄用流体を自在に吸入して残留物を除去し、構成部材を初期状態に戻すことでポンプ全体の能力の低下や寿命の低下を防止することができるとともに、洗浄流体を吸入する為の駆動源としてダイヤフラム板の変形を利用することができるので、外部に別に駆動源を設ける必要が無くコンパクト化及び低コスト化が可能であるという効果や、ポンプ室の容積変動により洗浄用流体に圧力変動を発生させると、この圧力変動が弁固定機構により閉じた側と逆側の弁に集中して作用し、表裏両面が効率的に洗浄されるという効果がある。
【００４８】
また、請求項２記載の発明にあっては、ポンプ本体内に洗浄用流体を自在に吸入して残留物を除去し、構成部材を初期状態に戻すことでポンプ全体の能力の低下や寿命の低下を防止することができるとともに、駆動部による外部圧力の任意変更によって洗浄運転時の圧力を容易に制御することができるという効果や、ポンプ室の容積変動により洗浄用流体に圧力変動を発生させると、この圧力変動が弁固定機構により閉じた側と逆側の弁に集中して作用し、表裏両面が効率的に洗浄されるという効果がある。
【００４９】
また、請求項３記載の発明にあっては、ポンプ本体内に洗浄用流体を自在に吸入して残留物を除去し、構成部材を初期状態に戻すことでポンプ全体の能力の低下や寿命の低下を防止することができるとともに、駆動部による外部圧力の任意変更によって洗浄運転時の圧力を容易に制御することができ、更に、洗浄運転時にポンプ本体内には負圧が生じることから残留物が複数成分を有するものであってもこれを分離させずに外部に吐出することができるという効果や、ポンプ室の容積変動により洗浄用流体に圧力変動を発生させると、この圧力変動が弁固定機構により閉じた側と逆側の弁に集中して作用し、表裏両面が効率的に洗浄されるという効果がある。
【００５０】
また、請求項４記載の発明にあっては、請求項１〜３のいずれか記載の発明の効果に加えて、弁を切替えるだけで通常運転と洗浄運転とを容易に切替えることができるという効果がある。
【００５１】
また、請求項５記載の発明にあっては、請求項１〜４のいずれか記載の発明の効果に加えて、動作流体と洗浄流体とでそれぞれの吐出される場所を適当な箇所に設定することができるという効果がある。
【００５２】
また、請求項６記載の発明にあっては、請求項１〜５のいずれか記載の発明の効果に加えて、ポンプ室内や吸入及び吐出逆止弁の表面に付着した残留物を超音波振動により剥がれ易くして洗浄効果を向上させることができるとともに、別に新たな装置を設ける必要がないのでコンパクト化及び低コスト化が可能になるという効果がある。
【００５３】
また、請求項７記載の発明にあっては、請求項１〜６のいずれか記載の発明の効果に加えて、ポンプ室内における流路内面近傍での洗浄用流体の停留が防止できて洗浄効果が高まるという効果がある。
【００５４】
また、請求項８記載の発明にあっては、請求項１〜７のいずれか記載の発明の効果に加えて、洗浄用流体を再生したうえで洗浄用流体供給部に戻すことが可能になり、洗浄に必要な洗浄用流体の量を大幅に削減してコストを低減することができるという効果がある。
【００５５】
また、請求項９記載の発明にあっては、請求項１〜８のいずれか記載の発明の効果に加えて、弁部材の周辺部において残留物が付着し難くなり、ポンプ全体としての能力の低下防止や高寿命化が実現されるという効果がある。
【００５６】
また、請求項１０記載の発明にあっては、請求項１〜９のいずれか記載の発明の効果に加えて、根元角部に応力が集中に難くなって寿命が向上し、ポンプ全体としての能力の低下防止や高寿命化が実現されるという効果がある。
【００５７】
また、請求項１１記載の発明にあっては、請求項１〜１０のいずれか記載の発明の効果に加えて、洗浄用気体を用いてポンプ本体内の残留物を良好に排除することができるという効果がある。
【００５８】
また、請求項１２記載の発明にあっては、請求項１〜１０のいずれか記載の発明の効果に加えて、洗浄用液体を用いてポンプ本体内の残留物を良好に排除することができるという効果がある。
【００５９】
また、請求項１３記載の発明にあっては、請求項１〜１２のいずれか記載の発明の効果を備えた圧電ダイヤフラム型ポンプを利用することによって、洗浄運転による能力の低下防止や高寿命化が実現されたポンプを駆動源として処理剤を常に一定量だけ吐出して、快適なシェービングを長時間行うことができるという効果がある。
【図面の簡単な説明】
【図１】本発明の実施の形態における一例の圧電ダイヤフラム型ポンプの第一の構成を示す説明図である。
【図２】同上の圧電ダイヤフラム型ポンプの第二の構成を示す説明図である。
【図３】同上の圧電ダイヤフラム型ポンプの第三の構成を示す説明図である。
【図４】同上の圧電ダイヤフラム型ポンプを循環型にした場合を示す説明図である。
【図５】同上の超音波振動を発生させる方法を示す説明図である。
【図６】同上の吸入側の弁固定機構を示す説明図である。
【図７】同上の吐出側の弁固定機構を示す説明図でる。
【図８】同上の吸入側に鏡面を形成した場合の説明図であり、（ａ）は開弁状態、（ｂ）閉弁状態を示している。
【図９】同上の吸入側逆止弁に形成する応力緩和構造の説明図であり、（ａ）は形成前の状態、（ｂ）は形成後の状態を示している。
【図１０】同上の別形態の吸入側逆止弁に形成する応力緩和構造の説明図であり、（ａ）は形成前の斜視状態、（ｂ）は形成前の側面視状態、（ｃ）は形成後の斜視状態、（ｄ）は形成後の側面視状態である。
【図１１】同上の圧電ダイヤフラム型ポンプを利用した処理剤吐出機構付き電気かみそりの説明図であり、（ａ）は第一の形態、（ｂ）は第二の形態（ｃ）は第三の形態を示している。
【図１２】図１１（ａ）に示す圧電ダイヤフラム型ポンプの構成を更に詳しく示した説明図である。
【図１３】同上のポンプ本体を示しており、（ａ）は分解斜視図、（ｂ）は断面図である。
【図１４】同上の別形態のポンプ本体を示す分解斜視図である。
【図１５】ダイヤフラム板の駆動原理の説明図であり、（ａ）は印加電圧、（ｂ）は（ａ）の印加電圧ＶＨ時の変形、（ｃ）は（ａ）の印加電圧ＶＬ時の変形を示している。
【図１６】圧電ダイヤフラム型ポンプの駆動原理の説明図であり、（ａ）は初期状態、（ｂ）は吸入状態、（ｃ）は吐出状態を示している。
【符号の説明】
１ポンプ本体
６ダイヤフラム板
８圧電素子板
１１ポンプ室
１２吸入経路
１２ａ外側端部
１３吐出経路
１３ａ外側端部
１４吸入側逆止弁
１５吐出側逆止弁
１６管路
１７切替え弁
１８動作流体供給部
１９動作流体タンク
２０洗浄用流体供給部
２１洗浄用気体タンク
２２管路
２３気体導入装置
２４駆動部
２５吐出端
２６吐出端
２８気体排出装置
２９駆動部
３０切替え弁
３２洗浄用流体再生部
３４循環経路
３５鏡面
３６根元角部
４１弁固定機構
４２弁固定機構
５０動作流体
５１洗浄用流体
５２洗浄用気体
６０処理剤吐出機構
６１処理剤[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a piezoelectric diaphragm type pump and an electric shaver provided with a treatment agent discharge mechanism using the same.
[0002]
[Prior art]
  Piezoelectric diaphragm type pumps use the fact that the deflection of a diaphragm plate formed by using a piezoelectric element plate and a metal plate increases or decreases due to expansion and contraction of the piezoelectric element plate, and the volume varies according to the deflection of the diaphragm plate. A pump chamber is provided in the pump body. The pump body is provided with a suction path and a discharge path that allow communication between the pump chamber and the outside of the pump body. The suction path includes a suction-side check valve that opens only in the fluid suction direction, and the discharge path has a fluid flow. Since the discharge side path that opens only in the discharge direction is provided, if the piezoelectric element plate is expanded and contracted by energizing the piezoelectric element plate to increase or decrease the volume of the pump chamber, the external operation communicated with the suction path The working fluid flows into the pump chamber from the fluid supply unit via the suction path, and the working fluid is sent out from the discharge channel to the outside of the pump body. The above-mentioned piezoelectric diaphragm type pump is also suitably used as a processing agent discharge mechanism for an electric razor. In this case, a piezoelectric diaphragm type pump using a working fluid as a processing agent for skin application as a shaving lotion is used. Shaving while discharging the treatment agent is possible.
[0003]
  However, in the above piezoelectric diaphragm type pump, when the working fluid contains a plurality of components, contamination inside the pump body due to the working fluid becomes a problem. Specifically, when a working fluid containing a solid substance such as powder in alcohol is used as the working fluid, if the working fluid remains inside the pump body, various components of the working fluid are components such as a check valve. In some cases, the component member may be melted. As a result, if the check valve is deteriorated or the opening / closing is not performed normally, the life of the pump itself is significantly reduced.
[0004]
  In order to solve the above problem, a means for cleaning the pump chamber other than when the pump is used has been proposed. For example, the external pressure inside the pump chamber is sucked into the pump chamber due to the pressure difference between the internal pressure and the external pressure in the pump chamber. There is a means for performing (see Patent Document 1). However, according to the above means, there is a problem that the outside air can be sucked only when the internal pressure of the pump chamber is low.
[0005]
[Patent Document 1]
  Japanese Patent Laid-Open No. 10-68386
[0006]
[Problems to be solved by the invention]
  The present invention has been made in view of the above points, and a piezoelectric diaphragm type pump that can prevent a decrease in life by freely sucking a cleaning fluid into the pump body and removing residues to the outside. It is another object of the present invention to provide an electric shaver with a treatment agent discharge mechanism using the same.
[0007]
[Means for Solving the Problems]
  In order to solve the above-mentioned problems, the present invention provides a pump body comprising a diaphragm plate formed by a piezoelectric element plate so as to be freely deformable by energization, and a pump chamber whose volume varies with the deformation of the diaphragm plate. A suction path and a discharge path for communicating between the chamber and the outside of the pump body are provided in the pump body, and a suction-side check valve that opens only in the fluid suction direction is provided in the suction path. Cleaning fluid supply for supplying a cleaning fluid in a piezoelectric diaphragm type pump having a discharge-side check valve that opens only in the direction and having a working fluid supply portion that supplies the working fluid communicated with an outer end portion of the suction path And the volume fluctuation of the pump chamber accompanying the deformation of the diaphragm plate as a drive source for introducing the cleaning fluid into the pump body from the cleaning fluid supply unit, And those comprising the closing valve fixing mechanism suction-side check valve or the discharge side check valve in a state of inhalation of cleaning fluid to the pump chamber.
[0008]
  By doing this, the cleaning fluid can be freely sucked into the pump body to remove the residue, and the components can be returned to the initial state, thereby preventing a decrease in the overall pump capacity and a decrease in the service life. In addition, since the deformation of the diaphragm plate can be used as a drive source for sucking the cleaning fluid, there is no need to provide a separate drive source outside, and the size and cost can be reduced. In addition, by providing a valve fixing mechanism, if pressure fluctuations are generated in the cleaning fluid due to volume fluctuations in the pump chamber, these pressure fluctuations are concentrated on the valve on the side opposite to the one closed by the valve fixing mechanism. In addition, both front and back surfaces are efficiently cleaned.
[0009]
  Further, the present invention comprises a pump body having a diaphragm plate formed by a piezoelectric element plate so as to be freely deformable by energization, and a pump chamber whose volume varies with deformation of the diaphragm plate. A suction check valve that opens only in the fluid suction direction is provided in the suction route, and the discharge that opens only in the fluid discharge direction is provided in the discharge route. In a piezoelectric diaphragm type pump having a side check valve, wherein a working fluid supply part for supplying a working fluid is communicated with an outer side end of the suction path, a cleaning fluid supply part for supplying a cleaning fluid is provided in the suction path. A drive unit that communicates with the external side end and sends the cleaning fluid from the cleaning fluid supply unit into the pump body is provided outside the pump body so as to be interposed between the cleaning fluid supply unit and the suction path., Equipped with a valve fixing mechanism that closes the suction-side check valve or the discharge-side check valve while the cleaning fluid is sucked into the pump chamberIt is also preferable to be characterized by the above.
[0010]
  By doing this, the cleaning fluid can be freely sucked into the pump body to remove the residue, and the components can be returned to the initial state, thereby preventing a decrease in the overall pump capacity and a decrease in the service life. In addition, the pressure during the cleaning operation can be easily controlled by arbitrarily changing the external pressure by the drive unit.In addition, by providing a valve fixing mechanism, if pressure fluctuations are generated in the cleaning fluid due to volume fluctuations in the pump chamber, these pressure fluctuations are concentrated on the valve on the side opposite to the one closed by the valve fixing mechanism. In addition, both front and back surfaces are efficiently cleaned.
[0011]
  Further, the present invention comprises a pump body having a diaphragm plate formed by a piezoelectric element plate so as to be freely deformable by energization, and a pump chamber whose volume varies with deformation of the diaphragm plate. A suction check valve that opens only in the fluid suction direction is provided in the suction route, and the discharge that opens only in the fluid discharge direction is provided in the discharge route. In a piezoelectric diaphragm type pump having a side check valve, wherein a working fluid supply part for supplying a working fluid is communicated with an outer side end of the suction path, a cleaning fluid supply part for supplying a cleaning fluid is provided in the suction path. In addition to communicating with the external end, a drive unit that sucks cleaning fluid from the cleaning fluid supply unit into the pump body is connected to the discharge path and provided outside the pump body., Equipped with a valve fixing mechanism that closes the suction-side check valve or the discharge-side check valve while the cleaning fluid is sucked into the pump chamberIt is also preferable to be characterized by the above.
[0012]
  By doing this, the cleaning fluid can be freely sucked into the pump body to remove the residue, and the components can be returned to the initial state, thereby preventing a decrease in the overall pump capacity and a decrease in the service life. In addition, the pressure during the cleaning operation can be easily controlled by arbitrarily changing the external pressure by the drive unit. Further, since the negative pressure is generated in the pump body during the cleaning operation, the residue has multiple components. Even so, it can be discharged outside without being separated.In addition, by providing a valve fixing mechanism, if pressure fluctuations are generated in the cleaning fluid due to volume fluctuations in the pump chamber, these pressure fluctuations are concentrated on the valve on the side opposite to the one closed by the valve fixing mechanism. In addition, both front and back surfaces are efficiently cleaned.
[0013]
  In addition, a pipe line is connected to the external end of the suction path, the pipe line is branched through a switching valve in the middle, one of the branches is connected to the working fluid supply part, and the other is connected to the cleaning fluid supply part It is also preferable to connect to. In this way, it is possible to easily switch between normal operation and cleaning operation simply by switching the valve.
[0014]
  In addition, a pipe line is connected to the outer end of the discharge path, the pipe is branched through a switching valve in the middle thereof, one end of the branch is used as the discharge end of the working fluid, and the other end is the cleaning fluid It is also preferable to use the discharge end. By doing in this way, the place where each of the working fluid and the cleaning fluid is discharged can be set to an appropriate place.
[0015]
  It is also preferable to form an ultrasonic cleaning mechanism that generates ultrasonic vibrations in the pump chamber in a state in which the cleaning fluid is sucked by providing the diaphragm plate so as to freely vibrate in the ultrasonic range. In this way, the residue adhering to the pump chamber and the surfaces of the suction and discharge check valves can be easily peeled off by ultrasonic vibration to improve the cleaning effect, and a separate device needs to be provided. And compact and low cost.
[0016]
  It is also preferable to set the cleaning fluid and its flow rate so as to be turbulent in the pump chamber. By doing so, the cleaning fluid can be prevented from staying near the inner surface of the flow path in the pump chamber, and the cleaning effect is enhanced.
[0017]
  It is also preferable that the external end of the discharge path of the pump main body and the cleaning fluid supply unit are communicated with each other through a circulation path with a cleaning fluid regenerating unit interposed therebetween. By doing so, it becomes possible to regenerate the cleaning fluid and return it to the cleaning fluid supply unit, and the amount of cleaning fluid required for cleaning can be greatly reduced, thereby reducing costs..
[0018]
  It is also preferable to form a mirror surface on at least one of a contact portion between the suction path and the suction side check valve and a contact portion between the discharge path and the discharge side check valve. By doing in this way, a residue becomes difficult to adhere in the peripheral part of these valve members, and the fall of the capability as a whole pump and life extension are realized.
[0019]
  In addition, it is also preferable that at least one root corner portion of the suction side check valve and the discharge side check valve is formed in a gentle substantially arc shape. By doing in this way, stress becomes difficult to concentrate on the corners of the corners and the life is improved, so that the pump as a whole can be prevented from being lowered in performance and have a long life.
[0020]
  It is also preferable that the cleaning fluid is a cleaning gas. By doing in this way, the residue in a pump main body can be excluded favorably using cleaning gas.
[0021]
  It is also preferred that the cleaning fluid is a cleaning liquid. By doing in this way, the residue in a pump main body can be excluded favorably using cleaning liquid.
[0022]
  It is also preferable that the present invention is an electric razor with a treatment agent discharge mechanism characterized in that the piezoelectric diaphragm type pump is used and the working fluid is a treatment agent for skin application. By doing this, using a pump that has been able to prevent the deterioration of the ability due to cleaning operation and achieve a long life as a driving source, a constant amount of treatment agent for skin application is always discharged to perform comfortable shaving for a long time Can do.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, the present invention will be described based on embodiments shown in the accompanying drawings. Note that the vertical direction used below is based on the vertical direction in the figure. FIGS. 13A and 13B show an example of a piezoelectric diaphragm pump in the embodiment of the present invention. The basic configuration of the piezoelectric diaphragm type pump of this example is the same as that described in the prior art, but in this example, as shown in the figure, a pair of paths 2a and 2b are provided so as to penetrate vertically. A casing portion provided with a pipe portion 2, a sheet-like valve portion 3 in which a pair of valves 3a and 3b are integrally formed via a slit, and a pair of through-holes 4a and 4b penetrating vertically. 4, a ring-shaped elastic body 5, a diaphragm plate 6 formed in a disk shape with a piezoelectric element plate 8 and a metal plate 9, and a diaphragm pressing portion 7 having a bottomed cylindrical shape opened downward, in order from the bottom The pump body 1 is formed by assembling.
[0024]
  The outer edge of the diaphragm plate 6 is sandwiched between the housing part 4 and the diaphragm pressing part 7, and the elastic body 5 is further interposed between the diaphragm plate 6 and the housing part 4 so that the inside of the pump main body 1. It is elastically supported by. A space 10 is formed between the diaphragm plate 6 and the diaphragm pressing portion 7 and other than the clamping portion, and the diaphragm plate 6 can be deformed so as to bend upward in the space 10. Further, a space is also formed between the diaphragm plate 6 and the housing portion 4, and this space is the pump chamber 11 of this example. The valve portion 3 is sandwiched between the housing portion 4 and the pipe portion 2, and in this state, the through hole 4 a of the housing portion 4 and the path 2 a of the pipe portion 2 connect the valve 3 a of the valve portion 3. The through hole 4b of the housing part 4 and the path 2b of the pipe part 2 are continuously arranged in a straight line via the valve 3b of the valve part 3. The valve 3a is opened only upward to communicate the through hole 4a and the path 2a, and the valve 3b is opened only downward to communicate the through hole 4b and the path 2b. The suction path 12 of the present example is formed by the path 2a, the discharge path 13 of the present example is formed by the through hole 4b and the path 2b, and the suction side check valve of the present example in which the valve 3a is opened only in the discharge direction. 14, and the discharge side check valve 15 of this example that the valve 3 b opens only in the discharge direction is formed.
[0025]
  Electrodes are formed on the upper and lower surfaces of the disk-shaped piezoelectric element plate 8, and electric wires (not shown) for supplying current are connected to the electrodes. The piezoelectric element plate 8 is previously polarized in the thickness direction, and when an electric field is generated between the electrodes by supplying current, the direction of the electric field (in the direction of the arrow in the figure) as shown in FIG. Is the same direction as the polarization direction of the piezoelectric element plate 8, the piezoelectric element plate 8 is deformed so as to extend in the thickness direction and contract in the radial direction. 15B, when the direction of the electric field (in the direction of the arrow in the figure) is opposite to the direction of polarization of the piezoelectric element plate 8, the piezoelectric element plate 8 contracts in the thickness direction and has a diameter. Deforms to extend in the direction. On the other hand, since the metal plate 9 does not expand and contract, the deflection amount of the diaphragm plate 6 as a whole is changed in accordance with energization to the piezoelectric element plate 8 due to the difference in expansion and contraction amount.
[0026]
  Since the pump chamber 11 is formed so as to be surrounded by the diaphragm plate 6 and the casing 4, the volume varies with the deformation of the diaphragm plate 6 in response to the energization. FIG. 16A shows the initial state, but if the volume of the pump chamber 11 increases as the amount of deflection of the diaphragm plate 6 increases as shown in FIG. 16B, the suction side check valve 14 opens and The discharge side check valve 15 is closed, and fluid is sucked into the pump chamber 11 from the outside through the suction path 12, and conversely, as the deflection amount of the diaphragm plate 6 decreases as shown in FIG. When the volume of the pump chamber 11 decreases, the suction side check valve 14 closes and the discharge side check valve 15 opens, and fluid is discharged from the pump chamber 11 through the suction path 12 to the outside. Therefore, as shown in FIG._HAnd V_LIf the above deformation of the diaphragm plate 6 is repeatedly generated by alternately switching between and the fluid, the fluid can be continuously sent from the suction path 12 side to the discharge path 13 side.
[0027]
  In FIG. 14, the diaphragm pressing portion 7 is not provided to support the diaphragm plate 6, but a ring-shaped elastic support 5 ′ that elastically supports the diaphragm plate 6 by sandwiching the diaphragm plate 6 between its inner peripheral portions. Although the case where it uses instead of the elastic body 5 is shown, it is the same as a drive type of a pump also in this case.
[0028]
  The outer end portions 12a and 13a of the suction passage 12 and the discharge passage 13 (that is, the outer end portions of the passage 2a and the passage 2b of the pipe portion 2) each serve as a pipe connection portion with the outside. As shown in the figure, a pipe line 16 is connected to the outer side end portion 12 a of the suction path 12. The pipe line 16 is bifurcated in the middle through the switching valve 17, and one branch pipe line 16 a is connected to the working fluid tank 19 which is the working fluid supply unit 18 of this example, and the other branch pipe is placed. The path 16b is connected to a cleaning gas tank 21 which is the cleaning fluid supply unit 20 of this example. A working fluid 50 is stored in the working fluid tank 19. A cleaning gas 52 is stored in the cleaning gas tank 21, and this cleaning gas 52 is the cleaning fluid 51 of this example. Further, one end side of the pipe line 22 is connected to the external side end portion 13 a of the discharge path 13, and the other end side is used as the discharge end 25 of the working fluid 50 and the cleaning gas 52.
[0029]
  In this example, the working fluid 50 is a liquid containing a plurality of components, for example, alcohol containing solids such as powder. When the switching valve 17 is switched so that the working fluid tank 19 and the outer end 12a of the suction path 12 communicate with each other, and the volume of the pump chamber 11 is changed with the deformation of the diaphragm plate 6 as described above, the working fluid is changed. The working fluid 50 stored in the tank 19 is sent from the suction path 12 side to the discharge path 13 side through the pump chamber 11 and continuously discharged from the discharge end 25 of the pipe line 22. This is the operation during normal operation. In this case, when the working fluid 50 remains in the pump body 1, the components of the working fluid 50 adhere to components such as the suction-side check valve 14 and the discharge-side check valve 15, and in some cases, dissolve them. If the suction-side check valve 14 and the discharge-side check valve 15 are not normally opened or closed, the life of the pump itself may be significantly reduced.
[0030]
  Therefore, in this example, the cleaning operation is performed in addition to the normal operation so that the residue in the pump body 1 can be discharged to the outside. Specifically, after switching the switching valve 17 so that the cleaning gas tank 21 and the outer end 12a of the suction path 12 communicate with each other, the pump chamber 11 is accompanied by the deformation of the diaphragm plate 6 as in the normal operation. What is necessary is just to change the volume of. As a result, the cleaning gas 52 stored in the cleaning gas tank 21 is sent from the suction path 12 side to the discharge path 13 side via the pump chamber 11 and discharged from the discharge end 25 of the pipe line 22 to the outside. Continue to be. At this time, the residue in the pump body 1 is removed and discharged to the outside together with the cleaning gas 52, and the constituent members such as the suction side check valve 14 and the discharge side check valve 15 are held in the initial state, Since the operation is stabilized and deterioration is prevented, the capability of the pump itself is prevented from being lowered and the life is improved. Since the cleaning gas 52 is used as a drive source for introducing the cleaning gas 52 from the cleaning gas tank 21 into the pump body 1, the volume variation of the pump chamber 11 accompanying the deformation of the diaphragm plate 6 is used as described above. There is no need to install a separate drive source for object exclusion, and the piezoelectric diaphragm pump is compact and low cost.
[0031]
  As the cleaning gas 52, it is preferable to use an inert gas such as nitrogen or helium. As a result, the residue of the working fluid 50 is eliminated, and at the same time, the components are not deteriorated by the influence of the cleaning gas 52 itself, and the inside of the pump body 1 is always maintained in the initial state, so that the entire pump is maintained. It is possible to prevent a decrease in capacity and increase the service life.
[0032]
  Further, as a driving source at the time of the cleaning operation, instead of using the volume variation of the pump chamber 11 due to the deformation of the diaphragm plate 6 as described above, the switching valve 17 and the cleaning gas tank 21 are connected as shown in FIG. A gas introduction device 23 such as a blower or a pump may be interposed in the middle of the branch pipe 16b to be made. The gas introduction device 23 forms a drive unit 24 for forcibly sending the cleaning gas 52 from the cleaning gas tank 21 into the pump body 1, and the cleaning gas tank 21 and the external end of the suction path 12. By switching the switching valve 17 so as to communicate with the section 12a and driving the gas introduction device 23, the cleaning gas 52 in the cleaning gas tank 21 is discharged from the suction path 12 side through the pump chamber 11. It is sent out to the path 13 side, and the inside of the pump body 1 is similarly cleaned.
[0033]
  In this way, by providing the gas introduction device 23 that is the driving unit 24 outside the pump body 1 so as to be interposed between the cleaning gas tank 21 and the suction path 12, an external pressure by the gas introduction device 23 is provided. There is an advantage that the pressure at the time of the cleaning operation can be easily controlled by arbitrarily changing the above.
[0034]
  Further, as shown in FIG. 3, the pipe line 22 connected to the external side end part 13 a of the discharge path 13 is branched in the middle through the switching valve 30, and the end part of the one branch pipe line 22 a is moved to the working fluid 50. As the discharge end 26, the end of the other branch line 22b may be the discharge end 27 of the cleaning gas 52, and a gas discharge device 28 such as a blower or a pump may be interposed in the middle of the branch line 22b. In this case, the gas discharge device 28 forms a drive unit 29 for sucking the cleaning gas 52 from the cleaning gas tank 21 into the pump body 1 during the cleaning operation, and the cleaning gas tank 21 and the outer end of the suction path 12 are arranged. The switching valve 17 is switched so as to communicate with 12a, and the switching valve 30 is switched so that the external end 13a of the discharge path 13 and the discharge end 27 of the cleaning gas 52 communicate with each other. By driving the device 28, the cleaning gas 52 in the cleaning gas tank 21 is sucked into the pump chamber 11 from the suction path 12 side and the same cleaning is performed in the pump body 1, and then the branch pipe The cleaning gas 52 is discharged from the discharge end 27 to the outside through 22b.
[0035]
  And by connecting such a gas discharge device 28 to the discharge path 13 and providing it outside the pump body 1, it is possible to easily control the pressure during the cleaning operation by arbitrarily changing the external pressure by the gas discharge device 28. In addition, since a negative pressure is generated in the pump body 1, there is an advantage that the residue having a plurality of components can be discharged to the outside without being separated.
[0036]
  In addition, when performing normal operation instead of the above-described cleaning operation, the switching valve 17 is switched so that the working fluid tank 19 and the outer end 12a of the suction path 12 communicate with each other, and the outer side of the discharge path 13 is set. After switching the switching valve 30 so that the end portion 13a and the discharge end 26 communicate with each other, the volume of the pump chamber 11 may be changed by deformation of the diaphragm plate 6.
[0037]
  As shown in FIG. 4, the discharge end 27 of the pipe line 22 on the branch pipe line 22 a side is connected to a filter 31 that is a cleaning fluid regenerating unit 32, and the filter 31 and the cleaning gas tank 21 are connected. By providing the pipe line 31, it is possible to form a circulation path 33 that communicates the outer end portion 13 a of the discharge path 13 and the cleaning gas tank 21. Since the filter 31 is interposed in the circulation path 33, the cleaning gas 52 discharged from the pump body 1 together with the residue by cleaning is regenerated by the filter 31, and then returned to the cleaning gas tank 21 to be reused. By using this, the amount of the cleaning gas 52 required for the cleaning operation can be greatly reduced to reduce the cost.
[0038]
  Further, in order to perform the cleaning in the pump body 1 more effectively, it is also preferable to generate ultrasonic vibration in the pump chamber 11 as shown in FIG. Specifically, with the cleaning gas 52 introduced into the pump chamber 11 and replaced with the working fluid 50, the piezoelectric element plate 8 is driven in an ultrasonic region of 20 kHz or more to vibrate the diaphragm plate 6, It is possible to enhance the cleaning effect by facilitating peeling off the residue adhered to the inside of the pump chamber 11 and the surfaces of the suction and discharge side check valves 14 and 15 by the slight vibration in the sound wave region. After the generation of the ultrasonic vibration, the cleaning gas 52 in the pump chamber 11 is produced outside. In this case, since the diaphragm plate 6 is provided so as to freely vibrate in the ultrasonic region, an ultrasonic cleaning mechanism that generates ultrasonic vibrations in the pump chamber 11 while the cleaning gas 52 is inhaled is formed. In order to generate the sonic vibration, it is not necessary to add another device outside.
[0039]
  Further, in order to perform the cleaning in the pump body 1 more effectively, the cleaning gas 52 introduced into the pump chamber 11 during the cleaning operation is set to a sufficiently large Reynolds number so that the gas becomes turbulent. It is also suitable. Since the Reynolds number is proportional to the pipe width of the cleaning site, the flow velocity and viscosity of the fluid, and inversely proportional to the density of the fluid, means such as using a high viscosity as the cleaning gas 52 or increasing the flow velocity. Thus, a large value can be set. When the cleaning gas 52 is a laminar flow, a boundary layer develops near the inner surface of the flow channel in the pump body 1 and a stagnation point is generated, whereas when it is a turbulent flow, near the inner surface of the flow channel. Separation of the boundary layer occurs and the retention of the cleaning gas 52 is prevented. Therefore, by setting the property of the cleaning gas 52 and the flow rate thereof to be turbulent in the pump chamber 11 as described above, the cleaning gas 52 can be prevented from staying in the vicinity of the inner surface of the flow path, and the cleaning effect can be prevented. Will increase.
[0040]
  Further, in order to perform the cleaning inside the pump body 1 more effectively, the suction side check valve 41 is used by the valve fixing mechanism 41 as shown in FIG. 6 while the cleaning gas 52 is sucked into the pump chamber 11. It is also preferable to close 14 or close the discharge-side check valve 15 by the valve fixing mechanism 42 as shown in FIG. For example, when the suction side check valve 14 is fixed in the closed state, if the volume of the pump chamber 11 is changed by deformation of the diaphragm plate 6, the pressure fluctuation generated in the cleaning gas 52 in the pump chamber 11 is fixed. Therefore, both the front and back surfaces of the discharge side check valve 15 can be efficiently cleaned. In addition, when the discharge side check valve 15 is fixed in the closed state, both the front and back surfaces of the suction side check valve 14 can be efficiently washed by the volume variation of the pump chamber 11.
[0041]
  Further, in order to prevent the residue of the working fluid 50 from adhering in the pump body 1, for example, as shown in FIG. 8, a mirror surface 35 is provided at the contact portion between the suction path 12 and the suction side check valve 14. It is also suitable to form. As a result, the flow resistance and the pipe friction are reduced in the peripheral portion of the suction side check valve 14, so that the residue of the working fluid 50 is less likely to adhere to the periphery of the suction side check valve 14. And since the operation | movement in a valve part is stabilized and deterioration is also prevented, the fall of a capability and long life are implement | achieved as the whole pump. It should be noted that the same mirror surface 35 may be formed at the contact portion between the discharge path 13 and the discharge side check valve 15 or may be formed on both the suction side and the discharge side. .
[0042]
  Further, in order to further prevent deterioration at the valve portion, for example, the root corner portion 36 of the suction side check valve 14 is not formed at a substantially right angle as shown in FIG. It is also preferable to form a gentle substantially arc shape as shown in FIG. If the root corner portion 36 is substantially perpendicular, stress concentrates on the root corner portion 36 when the suction-side check valve 14 is opened and closed, whereas stress is concentrated by making the root corner portion 36 substantially arc-shaped. As a result, the life of the suction side check valve 14 is improved, and the pump as a whole can be prevented from lowering its performance and extending its life. It is what is done. The stress relief structure as described above can be applied even if the suction side check valve 14 is of another form, and the valve element 37 is replaced with a pair of valves as shown in FIGS. In the structure sandwiched between the pressers 38, 38, the root corner portion 36 formed at the contact portion between the valve element 37 and the valve presser 38 should be substantially perpendicular as shown in FIGS. 10 (a) and 10 (b). When the valve body 37 is opened and closed, stress concentrates on the root corner portion 36, while the valve body 37 has a substantially arc shape as shown in FIGS. 10 (c) and 10 (d). In the same manner, stress can be prevented from being concentrated by forming the base as wide as the base side. Of course, the same structure may be formed on the discharge side check valve 15 side, or on both sides of the suction side check valve 14 and the discharge side check valve 15.
[0043]
  Here, the configuration of the piezoelectric diaphragm type pump in the case where the cleaning fluid 51 is the cleaning gas 52 has been described above. However, the cleaning fluid 51 is not limited to gas but may be liquid. Absent. In this case, the cleaning fluid supply unit 20 includes a cleaning liquid tank (not shown) that stores cleaning liquid (not shown), and the pump main body 1 has the same configuration as that described above. Cleaning can be performed by introducing a cleaning liquid. As the cleaning liquid, for example, inert water that is a non-erodible liquid is used. This eliminates the residue of the working fluid 50 and, at the same time, does not deteriorate the constituent members due to the influence of the cleaning liquid itself, so that the inside of the pump body 1 can be maintained in the initial state. Thus, it is possible to prevent the deterioration of the capacity and to increase the service life.
[0044]
  FIG. 11C shows an electric shaver in which the treatment agent discharge mechanism 60 is configured using the piezoelectric diaphragm type pump described above with reference to FIG. In this, the working fluid 50 is a treatment agent 61 for skin application in which a shaving lotion is used, the working fluid tank 19 stores the treating agent 61, and the discharge end 26 of the working fluid 50 is treated. A discharge end 63 of the agent 61 is formed. The discharge end 63 is provided close to the blade 71 provided at the upper end of the electric razor main body 70, and the treatment agent 61 is applied from the discharge end 63 when the electric razor is used by driving a piezoelectric diaphragm type pump. ing. Then, by driving the gas introducing device 23 in a state where the cleaning gas tank 21 and the discharge end 27 are in communication with each other, the cleaning gas 52 is introduced into the pump body 1 and cleaned, and then discharged from the discharge end 27. Is.
[0045]
  As shown in FIGS. 11A and 11B, the volume variation of the pump chamber 11 is used as a drive source for introducing the cleaning gas 52 into the pump body 1 as described above with reference to FIG. Alternatively, the gas discharge device 28 may be provided as described above with reference to FIG. In addition, a cleaning liquid may be used instead of the cleaning gas 52, and it is a matter of course that any of the configurations described above for the piezoelectric diaphragm type pump may be used in combination. In addition, in FIG. 12, the further detailed structure of the electric shaver shown to Fig.11 (a) is shown.
[0046]
  And, by providing the processing agent discharge mechanism 60 configured using these piezoelectric diaphragm type pumps, the processing agent 61 is always kept constant by using a pump that realizes prevention of deterioration in performance and long life due to the cleaning operation as a driving source. It is possible to perform a comfortable shaving for a long time by discharging only the amount.
[0047]
【The invention's effect】
  As described above, in the first aspect of the invention, the cleaning fluid is freely sucked into the pump body to remove the residue, and the components are returned to the initial state, thereby reducing the capacity of the entire pump. It is possible to prevent a decrease in the service life and to use the deformation of the diaphragm plate as a drive source for sucking in the cleaning fluid, so that it is not necessary to provide a separate drive source outside, thereby reducing the size and cost. If pressure fluctuation is generated in the cleaning fluid due to the effect of being possible or due to the volume fluctuation of the pump chamber, this pressure fluctuation is concentrated on the valve on the side opposite to the side closed by the valve fixing mechanism, and both the front and back sides There is an effect that it is efficiently cleaned.
[0048]
  In the invention according to claim 2, the cleaning fluid is freely sucked into the pump body to remove the residue, and the components are returned to the initial state, so that the capacity of the pump as a whole is reduced and the life of the pump is reduced. The effect that the pressure at the time of washing operation can be easily controlled by arbitrarily changing the external pressure by the drive unit while preventing the decrease.When pressure fluctuations are generated in the cleaning fluid due to volume fluctuations in the pump chamber, the pressure fluctuations are concentrated on the valve on the closed side and the opposite side by the valve fixing mechanism, and both front and back surfaces are efficiently cleaned. EffectThere is.
[0049]
  In the invention according to claim 3, the cleaning fluid is freely sucked into the pump body to remove the residue, and the components are returned to the initial state, thereby reducing the capacity of the pump as a whole and reducing the life of the pump. It is possible to prevent a decrease, and the pressure during the cleaning operation can be easily controlled by arbitrarily changing the external pressure by the drive unit. Further, since a negative pressure is generated in the pump body during the cleaning operation, the residue Even if it has multiple components, it can be discharged outside without separating itWhen pressure fluctuations are generated in the cleaning fluid due to volume fluctuations in the pump chamber, the pressure fluctuations are concentrated on the valve on the closed side and the opposite side by the valve fixing mechanism, and both front and back surfaces are efficiently cleaned. EffectIs.
[0050]
  Claims4In the described invention, claims 1 to3In addition to the effect of any of the inventions described above, there is an effect that the normal operation and the cleaning operation can be easily switched by simply switching the valve.
[0051]
  Claims5In the described invention, claims 1 to4In addition to the effect of any of the inventions described above, there is an effect that it is possible to set the discharge locations of the working fluid and the cleaning fluid at appropriate locations.
[0052]
  Claims6In the described invention, claims 1 to5In addition to the effects of any of the inventions described above, the residue adhering to the pump chamber and the surfaces of the suction and discharge check valves can be easily peeled off by ultrasonic vibration to improve the cleaning effect. Since there is no need to provide an apparatus, there is an effect that it is possible to reduce the size and cost.
[0053]
  Claims7In the described invention, claims 1 to6In addition to the effect of any one of the inventions described above, there is an effect that the cleaning fluid can be prevented from staying in the vicinity of the inner surface of the flow path in the pump chamber, and the cleaning effect is enhanced.
[0054]
  Claims8In the described invention, claims 1 to7In addition to the effects of any of the inventions described above, it becomes possible to regenerate the cleaning fluid and return it to the cleaning fluid supply unit, thereby greatly reducing the amount of cleaning fluid required for cleaning and reducing costs. There is an effect that it can be reduced.
[0055]
  Claims9In the described invention, claims 1 to8In addition to the effects of any of the inventions described above, it is difficult for residues to adhere to the periphery of the valve member, and there is an effect that the performance of the pump as a whole can be prevented from being lowered and the life can be increased.
[0056]
  Claims10In the described invention, claims 1 to9In addition to the effects of any of the inventions described above, there is an effect that stress is difficult to concentrate at the corners of the corners and the life is improved, so that the performance of the pump as a whole can be prevented from being lowered and the life can be increased.
[0057]
  Claims11In the described invention, claims 1 to10In addition to the effect of any of the inventions described above, there is an effect that the residue in the pump body can be favorably eliminated using the cleaning gas.
[0058]
  Claims12In the described invention, claims 1 to10In addition to the effect of any of the inventions described above, there is an effect that the residue in the pump body can be favorably eliminated using the cleaning liquid.
[0059]
  Claims13In the described invention, claims 1 to12By using a piezoelectric diaphragm type pump that has the effect of any of the inventions described above, a fixed amount of processing agent is always discharged by using a pump that has been able to prevent deterioration in performance due to cleaning operation and achieve a long service life as a drive source. Thus, there is an effect that comfortable shaving can be performed for a long time.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing a first configuration of an example piezoelectric diaphragm pump in an embodiment of the present invention.
FIG. 2 is an explanatory diagram showing a second configuration of the piezoelectric diaphragm pump of the above.
FIG. 3 is an explanatory diagram showing a third configuration of the piezoelectric diaphragm pump of the above.
FIG. 4 is an explanatory view showing a case where the piezoelectric diaphragm pump of the same type is a circulation type.
FIG. 5 is an explanatory diagram showing a method of generating ultrasonic vibrations as described above.
FIG. 6 is an explanatory view showing a valve fixing mechanism on the suction side of the above.
FIG. 7 is an explanatory view showing a valve fixing mechanism on the discharge side of the above.
FIGS. 8A and 8B are explanatory diagrams when a mirror surface is formed on the suction side, in which FIG. 8A shows a valve open state and FIG. 8B shows a valve closed state.
FIGS. 9A and 9B are explanatory views of a stress relaxation structure formed on the suction side check valve, wherein FIG. 9A shows a state before formation, and FIG. 9B shows a state after formation.
FIGS. 10A and 10B are explanatory views of a stress relaxation structure formed in a suction side check valve according to another embodiment of the same, wherein FIG. 10A is a perspective state before formation, FIG. 10B is a side view state before formation, and FIG. Is a perspective state after formation, and (d) is a side view state after formation.
FIGS. 11A and 11B are explanatory diagrams of an electric razor with a processing agent discharge mechanism using the piezoelectric diaphragm type pump, and FIG. 11A is a first embodiment, FIG. 11B is a second embodiment, and FIG. The form is shown.
FIG. 12 is an explanatory view showing the configuration of the piezoelectric diaphragm type pump shown in FIG.
FIG. 13 shows the same pump body, (a) is an exploded perspective view, and (b) is a cross-sectional view.
FIG. 14 is an exploded perspective view showing another embodiment of the pump body.
FIGS. 15A and 15B are explanatory diagrams of the driving principle of the diaphragm plate, where FIG. 15A shows the applied voltage, FIG. 15B shows the deformation when the applied voltage VH of FIG. 15A, and FIG. 15C shows the applied voltage VL of FIG. Deformation is shown.
FIGS. 16A and 16B are explanatory diagrams of the driving principle of the piezoelectric diaphragm type pump, where FIG. 16A shows an initial state, FIG. 16B shows a suction state, and FIG. 16C shows a discharge state.
[Explanation of symbols]
  1 Pump body
  6 Diaphragm plate
  8 Piezoelectric element plate
  11 Pump room
  12 Inhalation route
  12a outer edge
  13 Discharge route
  13a outer edge
  14 Suction side check valve
  15 Discharge check valve
  16 pipelines
  17 Switching valve
  18 Working fluid supply unit
  19 Working fluid tank
  20 Cleaning fluid supply unit
  21 Gas tank for cleaning
  22 pipeline
  23 Gas introduction device
  24 Drive unit
  25 Discharge end
  26 Discharge end
  28 Gas discharge device
  29 Drive unit
  30 Switching valve
  32 Cleaning fluid regeneration unit
  34 Circulation route
  35 mirror surface
  36 Root corner
  41 Valve fixing mechanism
  42 Valve fixing mechanism
  50 Working fluid
  51 Cleaning fluid
  52 Gas for cleaning
  60 Processing agent discharge mechanism
  61 treatment agent

Claims

The pump body includes a diaphragm plate formed by a piezoelectric element plate so as to be freely deformable by energization, and a pump chamber whose volume varies with deformation of the diaphragm plate, and communicates the pump chamber with the outside of the pump body. In addition, the discharge passage is provided in the pump body, the suction passage includes a suction-side check valve that opens only in the fluid suction direction, and the discharge passage includes a discharge-side check valve that opens only in the fluid discharge direction. In a piezoelectric diaphragm type pump in which a working fluid supply portion for supplying a working fluid is communicated with an outer end portion of the suction path, a cleaning fluid supply portion for supplying a cleaning fluid is communicated with an outer end portion of the suction path. The volume variation of the pump chamber accompanying the deformation of the diaphragm plate is used as a drive source for introducing the cleaning fluid into the pump body from the cleaning fluid supply unit, and the cleaning fluid is sucked into the pump chamber. In piezoelectric diaphragm pump, characterized in that it comprises closing the intake side check valve or the discharge side check valve valve fixing mechanism.

The pump body includes a diaphragm plate formed by a piezoelectric element plate so as to be freely deformable by energization, and a pump chamber whose volume varies with deformation of the diaphragm plate, and communicates the pump chamber with the outside of the pump body. In addition, the discharge passage is provided in the pump body, the suction passage includes a suction-side check valve that opens only in the fluid suction direction, and the discharge passage includes a discharge-side check valve that opens only in the fluid discharge direction. In a piezoelectric diaphragm type pump in which a working fluid supply portion for supplying a working fluid is communicated with an outer end portion of the suction path, a cleaning fluid supply portion for supplying a cleaning fluid is communicated with an outer end portion of the suction path. washed with thereby, the driving unit for feeding the cleaning fluid from the cleaning fluid supply to the pump body, with the pump body outside so as to be interposed between the cleaning fluid supply portion and the suction passage, into the pump chamber The piezoelectric diaphragm pump, characterized in that a valve fixing mechanism for closing the suction-side check valve or the discharge side check valve in a state of inhalation of use fluid.

The pump body includes a diaphragm plate formed by a piezoelectric element plate so as to be freely deformable by energization, and a pump chamber whose volume varies with deformation of the diaphragm plate, and communicates the pump chamber with the outside of the pump body. In addition, the discharge passage is provided in the pump body, the suction passage includes a suction-side check valve that opens only in the fluid suction direction, and the discharge passage includes a discharge-side check valve that opens only in the fluid discharge direction. In a piezoelectric diaphragm type pump in which a working fluid supply portion for supplying a working fluid is communicated with an outer end portion of the suction path, a cleaning fluid supply portion for supplying a cleaning fluid is communicated with an outer end portion of the suction path. together is, the driving unit for sucking cleaning fluid from the cleaning fluid supply unit into the pump body is connected to a discharge passage provided in the pump body outside, the suction side in a state of inhalation of cleaning fluid into the pump chamber Check valve or close the discharge-side check valve piezoelectric diaphragm pump, characterized in that a valve fixing mechanism.

Connect a pipe line to the external end of the suction path, branch the pipe through a switching valve in the middle, connect one branch to the working fluid supply, and connect the other to the cleaning fluid supply The piezoelectric diaphragm type pump according to any one of claims 1 to 3, wherein the piezoelectric diaphragm type pump is provided.

A pipe line is connected to the outer end of the discharge path, the pipe is branched through a switching valve in the middle, and one end of the branch is used as the discharge end of the working fluid, and the other end is discharged from the cleaning fluid. The piezoelectric diaphragm pump according to any one of claims 1 to 4, wherein the piezoelectric diaphragm pump is an end.

6. An ultrasonic cleaning mechanism for generating ultrasonic vibration in the pump chamber in a state in which a cleaning fluid is sucked in by providing a diaphragm plate so as to freely vibrate in an ultrasonic region. A piezoelectric diaphragm type pump as described above .

The piezoelectric diaphragm pump according to any one of claims 1 to 6, wherein the cleaning fluid and the flow velocity thereof are set so as to be turbulent in the pump chamber .

8. The piezoelectric device according to claim 1, wherein the external end of the discharge path of the pump body and the cleaning fluid supply section are communicated with each other through a circulation path having a cleaning fluid regenerating section interposed therebetween. Diaphragm type pump.

9. A mirror surface is formed on at least one of a contact portion between the suction path and the suction side check valve and a contact portion between the discharge path and the discharge side check valve. The piezoelectric diaphragm type pump as described .

The piezoelectric diaphragm pump according to any one of claims 1 to 9, wherein a base corner portion of at least one of the suction side check valve and the discharge side check valve is formed in a gentle substantially arc shape .

The piezoelectric diaphragm pump according to any one of claims 1 to 10, wherein the cleaning fluid is a cleaning gas .

The piezoelectric diaphragm pump according to any one of claims 1 to 10, wherein the cleaning fluid is a cleaning liquid .

An electric shaver with a treatment agent discharge mechanism, wherein the piezoelectric diaphragm pump according to any one of claims 1 to 12 is used and the working fluid is a treatment agent for skin application.