JP4052213B2 - Three-dimensional workpiece evaluation apparatus and method - Google Patents

Description

  The present invention relates to a three-dimensional workpiece evaluation apparatus and method.

  As a 3D workpiece shape evaluation method, a 3D measurement device is used to measure the 3D shape of the 3D workpiece, and the measurement result is compared with the workpiece design data to complete the product. There is something to check the accuracy.

As a conventional 3D workpiece evaluation method, the measurement data of a measurement object measured by a shape database stored in advance and a 3D measurement device is extracted, and the vicinity surface of the measurement data is extracted and the reference surface is supported. Calculate the point, extract the nearest neighbor from the found corresponding points, and calculate the distance between this neighbor and the measurement data, and compare the shape of the object to be measured with its design data (See Patent Document 1).
Japanese Patent Laid-Open No. 07-021238

However, in the conventional three-dimensional workpiece evaluation method, the three-dimensional position of the center of the measuring element when the measuring element contacts the object to be measured is compared with the shortest distance in the perpendicular direction on the design data. For this reason, the design data of the three-dimensional workpiece itself, which is the workpiece, is not compared with the measurement result of the workpiece, but the shape data (hereinafter referred to as another object) of the other object in contact with the workpiece ( when compared with the design data or measured shape data of the object), for example, as shown in FIG. 14, when the Oite Keisokuko 120 to the measurement target point 10 of the measured object 5 is in contact with the object to be measured The surface straight point (point B in FIG. 14) on the other object closer to the evaluation reference point (point A in FIG. 14) where the object to be measured and the other object 3 will actually contact in the direction of the measurement point. In some cases, using this point B as a reference point for evaluation, the distance from the center point 1 of the tracing stylus to the point B may be output as an error.

  The error output in this way is different from the error intended for evaluation, and as a result, there is a problem that error evaluation is erroneous.

  Further, as shown in FIG. 15, in the portion where the shape data of the other object 3 is double, it is the point A2 on the lower surface of the other object that actually contacts the measured object 5. Regardless, the point A1 on the upper side of the other object 3 is closer to the probe center position 1 when the measured object 5 and the probe 120 contact each other, and therefore, from the probe center position 1 to the point A1 on the upper surface. This distance is output as an error, and the error from the point A2 on the lower surface that is actually required for the evaluation of the workpiece is not output. In this case, the error evaluation is erroneous.

  Accordingly, an object of the present invention is to provide a three-dimensional shape evaluation apparatus that can reliably evaluate an error at a position to be evaluated, when comparing the evaluation of the completion of a three-dimensional workpiece with the shape of another object, and It is to provide that method.

The above object is a three-dimensional workpiece evaluation apparatus for evaluating a finished error at a contact portion to be contacted with another object in a three-dimensional workpiece that is a measurement object,
Child Measurements in the three-dimensional shape measuring apparatus, the center of the Keisokuko in a state in which the contact with the contact portion of the three-dimensional workpiece in a predetermined measurement object point in the contact portion of the three-dimensional workpiece position as the top angle, the error evaluation range setting means for setting the error evaluation range of conical extending the measurement target point direction includes at least the measurement object point,
While acquiring the shape data of the other object stored in advance, aligning the shape data of the other object and the shape data of the three-dimensional workpiece obtained by measurement by the measuring element, and then the error wherein from said Keisokuko center within rated range other objects line drawn on the shape data of to detect a face straight point as a Menjika on shape data of the other objects, the measurement from the detected the face straight point and error calculating means for calculating the distance to the contact point a child is in contact with the abutment portion of the three-dimensional workpiece by the measurement object point as the Completion error,
It is achieved by a three-dimensional workpiece evaluation apparatus characterized by having

Further, the above object is a three-dimensional workpiece evaluation method for evaluating a finished error at a contact portion to be contacted with another object in a three-dimensional workpiece as a measurement object,
Child Measurements in the three-dimensional shape measuring apparatus, the center of the Keisokuko in a state in which the contact with the contact portion of the three-dimensional workpiece in a predetermined measurement object point in the contact portion of the three-dimensional workpiece position as the top angle, and setting the error evaluation range of conical extending the measurement target point direction includes at least the measurement object point,
While acquiring the shape data of the other object stored in advance, aligning the shape data of the other object and the shape data of the three-dimensional workpiece obtained by measurement by the measuring element, and then the error the method comprising the from the Keisokuko center within rated range other objects line drawn on the shape data of to detect the surface straight point as a Menjika on shape data of the other objects,
When detecting the face straight point is calculated as an error finished a distance from the detected the face straight point to the contact point where the contact with the contact portion of the three-dimensional workpiece the Keisokuko is in the measurement target point Stages,
It is achieved by a three-dimensional workpiece evaluation method characterized by comprising:

According to the present invention, since the error evaluation range of the conical shape is set, it is possible to reliably evaluate the finished error of the three-dimensional workpiece at the portion to be contacted with the other object at the measurement target point .

  Embodiments to which the present invention is applied will be described below with reference to the drawings.

  FIG. 1 is a schematic diagram showing an example of equipment for performing error evaluation of an object to be measured using a three-dimensional workpiece evaluation apparatus according to the present invention, and FIG. 2 is for explaining the function of the three-dimensional workpiece evaluation apparatus. FIG.

  Equipment for evaluating the error of the measurement object includes a three-dimensional workpiece evaluation apparatus 100 to which the present invention is applied and a three-dimensional measurement apparatus 110 that three-dimensionally measures the measurement object 5.

  Connected to the three-dimensional workpiece evaluation apparatus 100 are a database apparatus 130 that stores past measurement data and shape data of other objects, a display 141, a printer 142, and the like.

The three-dimensional measuring apparatus 110 has a measuring instrument 120 attached to the tip, and controls a measuring instrument 111 including a robot 121 that can freely move the measuring instrument 120, and the operation of the measuring instrument 111. And a controller 112 for storing data. In addition, such a three- dimensional measuring apparatus is a conventional one and is not special.

  Here, the three-dimensional workpiece (measurement object 5) to be measured is a jig for holding the panel member of the automobile body. Therefore, the other object that is the shape data source used to evaluate the finished error of the jig that is the object to be measured is a panel member of the automobile body.

  The three-dimensional workpiece evaluation apparatus 100 according to the present embodiment includes a data input / output unit 101, an error evaluation range setting unit 102, and an error calculation unit 102, as shown in FIG.

  The data input / output unit 101 acquires the three-dimensional data (position data of the measuring element) of the measured object 5 and the shape data of the other object from the controller 112 and the database device 130 of the three-dimensional measuring apparatus 110.

  The error evaluation range setting unit 102 is an error evaluation range setting unit, and sets a range for evaluating an error, as will be described later.

Error calculation unit 102 is an error calculating means, as described below, calculates the error evaluation range, the measurement target point (hereinafter, also referred to as measuring point) three-dimensional workpiece and another object in the error parts partial contact with To do.

  The three-dimensional workpiece evaluation apparatus 100 is actually a computer, and the functions of each unit are provided by executing a program created for processing a procedure described later by the computer.

Next, the operation of the three-dimensional workpiece evaluation apparatus 100 configured as described above will be described. Here, a procedure for obtaining an error obtained by comparing the shape data of the three-dimensional workpiece obtained by measurement at one measurement point and the shape data of another object will be described. An error obtained by comparison with other object shape data is obtained by a similar procedure at a plurality of predetermined measurement points on the measurement object.

  FIG. 3 is a flowchart showing an error evaluation processing procedure performed by the above apparatus, and FIGS. 4 to 13 are explanatory diagrams for explaining the error evaluation processing state.

  First, the data input / output unit 101 takes in the shape data of the other object 3 from the database device 130 (S1). The shape data of the other object 3 is, for example, design data or shape data obtained by actually measuring the other object 3 three-dimensionally.

Subsequently, the measuring element when the data input / output unit 101 brings the measuring element 120 into contact with the contact portion of the three-dimensional workpiece at the predetermined measurement point 10 of the measured object 5 from the three-dimensional shape measuring apparatus 110. The center position 1 (the coordinate position obtained by the three-dimensional shape measuring apparatus) is taken in (S2). Note that the data of the probe center position 1 may be data after all the measurement points 10 have been measured by the three-dimensional measurement device 110 in advance, or may be entered after measuring one. At the same time, the shape data of the measuring element (radius of the measuring element sphere, etc.) is also taken together.

  Further, the captured shape data of other objects, data on the center position of the probe, and shape data of the probe are mapped on the same coordinate system. At this time, the shape data of the other object is arranged such that the whole reference point of the shape data of the other object coincides with the position of the whole reference point of the measurement object arranged in advance in the same coordinate system. This is to perform overall alignment when performing error evaluation.

  In the measurement object, when one of the measurement points is set as the overall reference point, the overall reference point in the other object shape is provided at a position where the measurement point is in contact with the measurement point. Thereby, the positioning of the entire object to be measured and the other object is performed.

  Subsequently, as shown in FIG. 4, the error evaluation range setting unit 102 sets the measurement auxiliary point 2 at an arbitrary position in the direction perpendicular to the measurement point 10 passing through the probe center position 1 (S3). The measurement auxiliary point 2 is for determining a direction in which an error is detected.

The setting of the measurement auxiliary point 2 may be determined together when the measurement point position is determined in advance, for example. In this case, when the measurement auxiliary point 2 enters the measurement point from the direction perpendicular to the measurement point 10, the measurement auxiliary point 2 comes into contact with the three-dimensional workpiece at the measurement point stop direction (measurement point 10 at the measurement point 10) . It is recommended that the position be a certain distance before the stop position. In addition, when the approach direction of the measuring element is not from the direction perpendicular to the measurement point 10, the operator determines the direction perpendicular to the measurement point 10 to be a point separated by an arbitrary distance, or The direction perpendicular to the surface is calculated from the design shape of the object to be measured, and a point separated by an arbitrary distance is set. Furthermore, a plurality of other measurement points 10 are set on the same surface of the object to be measured including the target measurement point 10. Then, it is preferable to set a point that is in a direction perpendicular to the line connecting the probe center positions 1 as a result of measuring these measurement points 10 and that is separated by an arbitrary distance.

Note that the distance from the measurement point 10 to the measurement auxiliary point 2 may be basically arbitrary. For example, one of errors at the contact point between the three-dimensional workpiece and the other object 3 at the measurement point position estimated in advance is used. About 3 times is sufficient.

  Subsequently, the error evaluation range setting unit 102 sets the reference vector 4 in the direction of the measurement auxiliary point 2 from the probe center position 1 (S4).

  Subsequently, as shown in FIG. 5, the error evaluation range setting unit 102 sets a cylindrical provisional error evaluation range 6 in a predetermined range with the reference vector 4 as the central axis (S5). Here, the size of the temporary error evaluation range 6 is defined as the length from the probe center position 1 in the direction of the measurement auxiliary point 2 to d1, and the length in the reverse direction from the probe center position 1 to the measurement auxiliary point 2 is d2. A cylinder having a radius d3 with the reference vector 4 as the central axis. Here, it is necessary to secure d1 and d2 at least twice the estimated error. This is because an error is evaluated within the provisional error evaluation range 6, and if the provisional error evaluation range 6 is too small, the evaluation cannot be performed. In the illustrated case, the distance d1 does not reach the measurement auxiliary point 2, but may actually be set beyond the measurement auxiliary point 2.

By setting the columnar provisional error evaluation range 6, it is possible to prevent erroneous evaluation at least in the contact portion of the other object 3 outside this range. However, in the case of such a cylindrical shape, as shown in FIG. 6A, when the shape of the other object 3 is bent in the vicinity of the measurement point 10 such as an L shape, the cylindrical shape (the same applies to a prism). In the temporary error evaluation range 6, there is a possibility that the distance Δm with the horizontal portion of the L-shape is erroneously set as an error instead of the direction of the measurement point 10 to be actually evaluated within the range.

Further, in order not to evaluate such erroneous proximity points of the lateral parts minutes of L-shaped, for example, it is conceivable to a cylinder to be set around the reference vector 4 narrowing as possible. However, when the shape of the cylinder is reduced in this way, for example, as shown in FIG. 6 (b), if the shape is as close to a line as possible, if the space 31 of the other object 3 happens to be, Even though there is a proximity point 35 that is straight with respect to the center position 1 of the measuring element in a portion where error evaluation is possible, this may not be detected, and an error may occur and error evaluation may not be possible. There is not preferable.

Therefore, in order to prevent such erroneous evaluation in the horizontal direction, in this embodiment, as shown in FIG. 7, the center of the measuring element is set as the final error evaluation range 7 within the temporary error evaluation range 6. A cone with the position 1 as the vertex is set (S6). At this time, the error evaluation range 7 of the cone is set on both the measurement auxiliary point 2 side and the measurement point 10 side. However, as the positional relationship between the measurement object and the other object, the other object If it is only necessary to evaluate the case where the value is below, it may be set only on the measurement point side. The size of the cone is the range of the provisional error evaluation range 6 set in advance, that is, the length of d1 and d2, but the width of the base of the cone is the top as will be described later. It is determined by the angle of the corner. Here, after setting the temporary error evaluation range 6, the error evaluation range 7 is set, but the temporary error evaluation range 6 is used to roughly determine the error evaluation range. It is not necessary to set.

With the error evaluation range 7 of the thus conical shape, as shown in FIG. 7, be another object 3 is L-shaped, with a distance of min horizontal parts of the L-shaped and evaluated as an error Can be prevented.

The apex angle θ1 of the cone set at this time is basically arbitrary, but is initially narrow, for example, about 10 degrees. This is because, as will be described later, when a point perpendicular to the other object 3 cannot be taken within this range, the width is gradually increased by a predetermined step size. It should be noted that it is optional here, for example, when evaluating an error at the contact portion of the other object 3, the error evaluation with the other object 3 is performed at a position straight in the opposite direction of the reference vector 4. This is because if it is known in advance that there is no other object 3, it may be widened from the beginning.

  Subsequently, as shown in FIG. 8, the error calculation unit 102 has a line drawn on the shape of the other object 3 from the center position 1 of the measuring element within the cone-shaped error evaluation range 7 on the shape of the other object 3. A point that is perpendicular (plane perpendicular point 8) is searched (S7). FIG. 8 shows a portion where the shape data of the other object 3 is doubled.

  Subsequently, as a result of the search, it is determined whether or not there is a portion (referred to as a surface perpendicular point 8) that is straight on the shape data of the other object 3 (S8). In the example shown in FIG. 8, since it exists, it is Yes here. Note that the processing in the case of No will be described later.

  If there is a surface perpendicular point 8, then the surface perpendicular point 8 is a vector (referred to as an outer check vector 41) drawn from the center point 1 of the probe beyond the surface perpendicular point 8 in the direction of the surface perpendicular point 8. In step S9, it is determined whether or not there is a portion that intersects the other object 3 outside the surface perpendicular point 8 (referred to as the outer intersection 19; the outer intersection 19 is not a surface orthogonal).

  This determination is for determining whether or not the surface perpendicular point 8 is a portion in contact with the measured object 5 in the shape of the other object 3. For example, as shown in FIG. 9, if the other object shape 36 exists at a position far from the plane perpendicular point 8, this portion is actually a place where the measured object 5 is expected to come into contact. Therefore, if there is another object shape that intersects the outer check vector 41 at a portion farther from the plane perpendicular point 8 in step S9 (S9: No), the process proceeds to step S20 and later (details will be described later).

  On the other hand, in step S9, if there is no other object shape that intersects with the outer check vector 41 at a portion farther from the surface perpendicular point 8 (S9: Yes), it is subsequently determined whether or not there is only one surface perpendicular point. (S10).

  Here, if there is one plane perpendicular point 8, that plane perpendicular point 8 is set as a reference point for error measurement (S11).

  When there are two or more surface perpendicular points 8, of at least one surface perpendicular point 8 out of two or more surface perpendicular points 8, the measurement auxiliary point 2 is located on the opposite side of the probe center position 1. If the surface perpendicular point 8 at the farthest position is used as a reference point, and there are two or more surface perpendicular points 8 only on the measurement auxiliary point 2 side relative to the central point position 1, the measurement point is the most. The one closer to the center position 1 is set as a reference point (S12).

That is, as shown in FIG. 8, when the shape of the other object 3 is double, as shown in FIG. 10, two surface perpendicular points 8 (FIG. 8) exist in the opposite direction to the reference vector 4. The reference point 11 is the farthest side of the reference). Thereby, even when the other object shape has a double structure, it is possible to accurately find the position (that is, the point for evaluating the error) of the other object 3 to be brought into contact with the three-dimensional workpiece at the measurement point 10 . it can.

  After the reference point 11 is determined, processing for error calculation (S13 and 14) is performed (details will be described later).

  In step S8, when there is no plane perpendicular point 8 (S8: No), and when the outer intersection 19 exists in step S9 (S9: No), the error calculation unit 102 notifies the error evaluation range setting unit. 101, the error evaluation range setting unit 101 widens the apex angle of the conical error evaluation range 7 by a predetermined step angle θ (S20).

  For example, as shown in FIG. 12, when the shape of the other object 3 near the measurement point 10 does not have the surface perpendicular point 8 within the error evaluation range 7, as shown in FIG. By expanding the apex angle of the evaluation range 7 to θ2, it is possible to confirm whether or not the plane perpendicular point 8 exists therein.

  Subsequently, the error evaluation range setting unit 101 determines whether or not the apex angle of the cone is 180 degrees or less (S21). Here, when the apex angle of the cone exceeds 180 degrees, the shape is no longer a cone. Therefore, as described above, when the shape of the other object 3 is L-shaped, the lateral direction from the measurement point 10 is Since the proximity point is erroneously evaluated, the error evaluation range 7 is determined to be an appropriate range when the apex angle of the cone is widened.

  Here, if the apex angle of the cone is 180 degrees or less, the process returns to step S7, and the subsequent processing is continued, and the apex angle is increased by a predetermined step angle θ until a surface perpendicular point is detected. go. On the other hand, when the apex angle of the cone exceeds 180 degrees, since there is no surface perpendicular point for appropriate evaluation, this is displayed as an error (S22), and the process is terminated.

  Next, error calculation processing (S13 and S14) will be described.

First, the error calculation unit 102 abuts the three-dimensional workpiece on the measuring ball and the measuring point 10 from the reference point set in step S12, the radius of the measuring ball set in advance, and the position of the measurement auxiliary point 2. A position where this portion is actually in contact (referred to as a contact point 14) is calculated (S13).

This is because, as shown in FIG. 13, the tip of the measuring element 120 is usually spherical, so where is the portion actually contacting the contact portion of the three-dimensional workpiece at the measurement point 10 with respect to this sphere? This is a process for determining whether or not there is and finding its position. For this, the auxiliary measurement point 2 is used. As described above, the measurement auxiliary point 2 passes through the central point 1 of the measuring element and is in a position that is perpendicular to the measuring point 10, so that the position on the measuring element sphere that actually contacts the measuring point 10 is measured. It becomes a position on the measuring element sphere in the direction opposite to the side where the measurement auxiliary point 2 exists from the element center position 1.
Calculate (S13).

  Therefore, the position of the contact point 14 obtained in this way is a position obtained by adding the radius of the measuring element sphere from the measuring element center position 1 in the direction opposite to the reference vector 4.

  Subsequently, the error calculation unit 102 calculates an error 15 by calculating a difference in coordinates between the position of the contact point 14 and the reference point 11 determined earlier, and this value is set as the error 15 to the display 141. Or output to the printer 142 or the like (S14), and the process ends.

As described above, according to the present embodiment, since the conical error evaluation range 7 is set, even when a bent shape such as an L-shape as the shape of the other object 3 is in the vicinity of the measurement point 10 , the third order at the measurement point 10 . The finished error 15 at the contact portion between the original workpiece and the other object can be reliably evaluated.

  Further, since the error evaluation range 7 of the conical shape is evaluated by gradually increasing the angle of the apex angle, even when there is no point on the other object 3 in the direction perpendicular to the measurement point 10. Therefore, it is possible to reliably evaluate the error 15 between the part where the measurement point 10 is present and the other object part that is expected to come into contact.

It is the schematic which shows the example of an installation for performing the error evaluation of the to-be-measured object using the three-dimensional workpiece evaluation apparatus by this invention. It is a block diagram for demonstrating the function of a three-dimensional workpiece evaluation apparatus. It is a flowchart which shows the procedure of the evaluation process by the said apparatus. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the processing state of error evaluation. It is explanatory drawing for demonstrating the problem in the conventional three-dimensional workpiece evaluation. It is explanatory drawing for demonstrating the problem in the conventional three-dimensional workpiece evaluation.

Explanation of symbols

1 ... Center position of probe,
2 ... Measurement auxiliary point,
3. Other objects,
4 ... reference vector,
5 ... measured object,
6 ... Temporary error evaluation range,
7: Error evaluation range,
8 ... Straight point,
10: Measurement point,
11 ... Reference point,
14 ... contact point,
15 ... error,
19 ... Outer intersection,
31 ... space of other objects,
41 ... Outer check vector,
100 ... evaluation device,
101 ... Data input / output unit,
102: Error evaluation range setting unit,
102: Error calculation unit,
110 ... three-dimensional measuring device,
120 ... Measuring element,
130: Database device.

Claims (6)

A three-dimensional workpiece evaluation apparatus for evaluating a finished error at a contact portion to be contacted with another object in a three-dimensional workpiece as a measurement object,
Child Measurements in the three-dimensional shape measuring apparatus, the center of the Keisokuko in a state in which the contact with the contact portion of the three-dimensional workpiece in a predetermined measurement object point in the contact portion of the three-dimensional workpiece position as the top angle, the error evaluation range setting means for setting the error evaluation range of conical extending the measurement target point direction includes at least the measurement object point,
While acquiring the shape data of the other object stored in advance, aligning the shape data of the other object and the shape data of the three-dimensional workpiece obtained by measurement by the measuring element, and then the error wherein from said Keisokuko center within rated range other objects line drawn on the shape data of to detect a face straight point as a Menjika on shape data of the other objects, the measurement from the detected the face straight point and error calculating means for calculating the distance to the contact point a child is in contact with the abutment portion of the three-dimensional workpiece by the measurement object point as the Completion error,
A three-dimensional workpiece evaluation apparatus characterized by comprising: When two or more surface perpendicular points are detected, the error calculation unit is configured to measure at least one of the two or more detected surface perpendicular points from the center position of the measuring element. If it is on the target point side, the distance from the farthest surface perpendicular point to the contact point is calculated as a finished error , and all of the detected two or more surface perpendicular points are the center position of the measuring element. The distance from the surface perpendicular point closest to the center position of the measuring element to the contact point is calculated as a finished error when the distance is opposite to the measurement target point. The three-dimensional workpiece evaluation apparatus according to 1. When the error calculation unit cannot detect the perpendicular point, the error evaluation range setting unit sets the error evaluation range by widening the apex angle of the cone, and the error calculation unit is set wide. three-dimensional workpieces evaluation apparatus according to claim 1, wherein to detect the surface straight points in the error evaluation ranges. A three-dimensional workpiece evaluation method for evaluating a finished error at a contact portion to be contacted with another object in a three-dimensional workpiece to be measured,
Child Measurements in the three-dimensional shape measuring apparatus, the center of the Keisokuko in a state in which the contact with the contact portion of the three-dimensional workpiece in a predetermined measurement object point in the contact portion of the three-dimensional workpiece position as the top angle, and setting the error evaluation range of conical extending the measurement target point direction includes at least the measurement object point,
While acquiring the shape data of the other object stored in advance, aligning the shape data of the other object and the shape data of the three-dimensional workpiece obtained by measurement by the measuring element, and then the error the method comprising the from the Keisokuko center within rated range other objects line drawn on the shape data of to detect the surface straight point as a Menjika on shape data of the other objects,
When detecting the face straight point is calculated as an error finished a distance from the detected the face straight point to the contact point where the contact with the contact portion of the three-dimensional workpiece the Keisokuko is in the measurement target point Stages,
A three-dimensional workpiece evaluation method characterized by comprising: When two or more surface perpendicular points are detected, and at least one of the detected surface perpendicular points is located closer to the measurement target point than the center position of the probe. in calculates an error finished a distance between the orthogonal point located farthest to the contact points, all of the detected two or more surfaces straight points, the measurement target point of the center position of the Keisokuko 5. The three-dimensional machining according to claim 4 , wherein the distance between the surface perpendicular point closest to the center position of the measuring element and the contact point is calculated as a finished error when the distance is opposite to Object evaluation method. Characterized in that if it can not detect the surface straight point, and widening the apex angle of the conical setting the error evaluation range, to detect the face straight points in widely set the error evaluation range The three-dimensional workpiece evaluation method according to claim 4 or 5.

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