JP4039017B2 - Fire extinguishing system for precision processing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a fire extinguishing system for a precision machining apparatus such as an electric discharge machining apparatus.
[0002]
[Prior art]
Conventionally, a precision processing apparatus using a flammable processing liquid is often used for precision processing. In particular, when performing precision machining such as mold machining for producing a metal mold, an electric discharge machining apparatus is used as the precision machining apparatus.
[0003]
In the electric discharge machining performed by the electric discharge machining apparatus, the machining tank is filled with an insulating machining liquid, a metal workpiece is placed in the machining liquid filled in the machining tank, and one is positive and the other is negative. The tool electrode electrically connected to the workpiece is brought close to the workpiece, and the workpiece is removed by applying a voltage between the tool electrode and the workpiece to generate an electric discharge. It is.
[0004]
In such electric discharge machining, a flammable oil such as kerosene is usually used as a machining fluid. Electric discharge machining is performed by generating an electric discharge between the tool electrode and the object to be machined facing each other through a slight gap in the machining liquid filled in the machining tank. When it occurs in the liquid, that is, when the parts where the discharge of the tool electrode and the object to be processed are opposed to each other are located in the machining liquid, the oxygen is not contained in the machining liquid even if these processed parts become high temperature. Because there is no, it does not ignite. However, for some reason, for example, when a discharge occurs near the liquid level of the machining liquid filled in the machining tank, there is oxygen in the air above the liquid level, so the work liquid is ignited and a fire occurs. It was dangerous. Therefore, the following provisions are provided by regulations and laws.
・ Install a device that automatically stops electrical discharge machining when the temperature of the machining fluid other than the machining area in the machining tank exceeds the set temperature. ・ When the liquid level of the machining fluid falls below the set value. Install a device that automatically stops electrical discharge machining. • If an abnormality that raises the tool electrode due to arc discharge is detected, install a device that automatically stops electrical discharge machining (the tool electrode rises due to arc discharge). An abnormality that occurs is that carbide is generated between the tool electrode and the workpiece and grows, thereby pushing up the lower end of the tool electrode inserted into the lower liquid surface from above the liquid surface of the machining liquid. Thus, if the discharge is performed in such a state that the lower end portion of the tool electrode is located near the liquid surface, there is a risk of igniting the machining fluid)
・ Install a device that automatically extinguishes when the machining fluid ignites ・ Do not use a machining fluid with a flash point of 70 ° C or less ・ Do not perform spraying ・ Abnormal discharge with the tool electrode securely attached・ To prevent fires from occurring and to carry out necessary inspections and maintenance, and to keep them effective for fire prevention. However, even if various devices are installed in accordance with these regulations and these devices are properly managed, Since there is still a risk of fires occurring during electrical discharge machining due to human error / error of the operator, some parts can be operated automatically in order to reduce such human error / error. The full-automatic operation of the system was not achieved, and it was still necessary for the workers to work, and there was a risk of human life in the event of a fire.
[0005]
Therefore, when performing such a machining operation, it has been considered to arrange a monitor for monitoring the occurrence of a fire at a remote site separately from the worker at the site (that is, the machining room). The fire extinguishing system of this conventional precision processing apparatus will be described.
[0006]
First, the structure in the fire extinguishing system of the conventional precision processing apparatus is demonstrated. A precision processing device is installed in a sealable processing chamber, a power supply and control means are provided to drive the precision processing device, and an automatic fire extinguishing device that detects and extinguishes fires that occur in the precision processing device is a precision processing device. Provided. In addition, there is provided a fire detection means for detecting when a fire has occurred in the processing chamber, a fire extinguishing means capable of extinguishing the fire, and a remote operation means capable of performing fire extinguishing by the fire extinguishing means by remote control. Provide. As the fire detection means, a smoke sensor and a temperature sensor are arranged in the processing chamber. The supervisor is arranged in a monitoring room as a remote place away from the site, and extinguishes fire by the fire extinguishing means by remote control means.
[0007]
In such a conventional fire extinguishing system for precision processing equipment, if the heat detection sensor of the automatic fire extinguishing equipment detects a fire, and the temperature sensor provided in the processing room detects a fire in the processing room, The fact that a fire has been detected is transmitted, and the supervisor in the monitoring room recognizes the fire based on these transmission signals, and the fire extinguishing device is operated by remote operation by remote control means to extinguish the fire.
[0008]
By the way, extinguishing with a fire extinguishing device is performed by injecting a fire extinguisher such as carbon dioxide or nitrogen into the flame. This fire extinguishing agent such as carbon dioxide or nitrogen is harmful to the human body, especially in the case of carbon dioxide. Inhaled in large quantities can cause poisoning and death.
[0009]
In the case of fire extinguishing by remote monitoring by the supervisor, the supervisor is in the monitoring room and recognizes the fire by the signal from the fire extinguisher that detects the fire or the signal from the fire detection means that detects the fire. Although it is extinguished by operating remotely, it is impossible to recognize whether there is an operator in the processing chamber. For this reason, when the supervisor performs fire extinguishing by remote control from the monitoring room based on the signal from the fire extinguisher or the fire detection means, if the worker is in the processing room, the fire extinguishing means There is a risk of workers being poisoned by fire extinguishing agents such as carbon dioxide injected, so when a fire actually occurs, a supervisor or someone other than the worker rushes to the processing room and extinguishes the fire manually. It was something to do.
[0010]
[Problems to be solved by the invention]
The present invention has been made in view of the above points, and an object of the present invention is to provide a supervisor in a fire extinguishing system for a precision machining apparatus in which a fire extinguisher can extinguish a fire in a processing chamber by fire extinguishing means by remote control. To provide a fire extinguishing system for precision machining equipment that can determine whether or not a worker can be extinguished by checking whether or not there is an operator in the processing room when performing fire extinguishing remotely from the monitoring room It is to be an issue.
[0011]
[Means for Solving the Problems]
Extinguishing system precision machining apparatus according to the present invention in order to solve the aforementioned problems is a precision machining apparatus 2 in fire extinguishing systems using flammable processing fluid such as discharge machining apparatus 2a, precision machining apparatus 2 is processed This is a die-sinking electric discharge machining apparatus 2b comprising an apparatus main body 21, a power supply / control means 22 and a machining liquid tank 24. The machining apparatus main body 21 is disposed in a sealable machining chamber 1, and the power supply / control means 22 and machining are performed. A liquid tank 24 is disposed outside the processing chamber 1 , and an automatic fire extinguishing device 23 for detecting and extinguishing a fire generated in the precision processing device 2 is provided in the precision processing device 2, and a power source for driving the precision processing device 2 and A power supply control means 3a for air conditioning separate from the control means 22 is provided, and an air conditioner 4 for adjusting the air in the processing chamber 1 driven by the power supply control means 3a for air conditioning is provided in the processing chamber 1, Inside the processing chamber 1 in the chamber 1 The fire detection means 5 and the person detection means 6 for detecting the fire and the presence or absence of the person M are provided, and the fire detection means 7 capable of extinguishing the fire in the processing chamber 1 is provided. It is possible to provide determination means 3b for determining whether or not to extinguish a fire in the processing chamber 1 based on the detection result by the above, and based on the determination result by the determination means 3b, the fire extinguishing means 7 can be extinguished by remote operation. The remote control means 3c is provided. With such a configuration, when a supervisor tries to extinguish a fire in the processing chamber 1 with the fire extinguishing means 7 by remote operation, the fire extinguishing means can be remotely operated when the worker M is in the processing chamber 1. 7, it is possible to prevent the person M in the processing chamber 1 from being killed by causing carbon dioxide poisoning of the fire extinguisher or the like by injecting the digestive agent. Further, by disposing a portion that generates a large amount of heat outside the processing chamber 1, less energy is required for the air conditioner 4 to air-condition, and the processing liquid tank 24 is disposed outside the processing chamber 1. Thus, when a fire occurs in the processing chamber 1, it is possible to prevent the processing liquid from catching fire and spreading.
[0012]
Further, when the automatic fire extinguishing device 23 provided in the precision processing device 2 detects a fire and extinguishes the fire, the detection result by the fire detection means 5 is in a fire and the detection result by the human detection means 6 is unmanned. It is preferable to provide determination means 3b for determining whether to perform fire extinguishing by the fire extinguishing means 7. By adopting such a configuration, when the supervisor tries to extinguish a fire in the processing chamber 1 by the fire extinguishing means 7 by remote control, when the worker M exists in the processing chamber 1, the determination means 3b Since it is not determined that the fire is extinguished, it is possible to prevent the person M in the processing chamber 1 from causing carbon dioxide poisoning of the fire extinguisher and causing death by injecting the digestive agent from the fire extinguishing means 7 by remote control. Further, when there is no worker in the processing chamber 1, the determination means 3b determines that the fire is extinguished, so that the fire extinguishing means 7 can quickly extinguish the fire.
[0013]
Moreover, it is preferable to comprise the wall of the processing chamber 1 with a non-combustible material or a semi-incombustible material. With such a configuration, when a fire occurs in the processing chamber 1, it is possible to prevent the fire from spreading outside the processing chamber 1.
[0015]
Further, a concentration measuring means for measuring the inert gas concentration in the processing chamber 1 and an exhaust means 83 for exhausting the gas in the processing chamber 1 are provided, and the inert gas is introduced into the processing chamber 1 during processing by the precision processing apparatus 2. It is preferable that the inert gas in the processing chamber 1 is exhausted by the exhaust means 83 other than during filling and during processing. By adopting such a configuration, it is possible to prevent flammable working fluid from being ignited during electric discharge machining, and to improve safety against fire. By preventing M from entering the processing chamber 1, it is possible to prevent the worker M from being damaged by fire when a fire occurs in the processing chamber 1.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.
[0017]
In the present invention, the electric discharge machining apparatus 2 a is used as the precision machining apparatus 2. The electric discharge machining apparatus 2a is often used in the case of performing precision machining such as mold machining for producing a metal mold. Although not particularly illustrated, the machining tank is filled with an insulating machining fluid, A metal workpiece is placed in the filled machining fluid, and a tool electrode electrically connected to the workpiece is brought close to the workpiece so that one is positive and the other is negative. The workpiece is removed by applying a voltage between the workpiece and the workpiece to generate an electric discharge. In electric discharge machining, flammable oil such as kerosene is used as the machining fluid, and there is a risk of igniting the machining fluid and causing a fire. Therefore, an apparatus such as the automatic fire extinguishing device 23 may be installed. This is mandatory and will be explained below.
[0018]
First, the structure of this embodiment is demonstrated based on FIG.
[0019]
The sealable processing chamber 1 is formed using a wall material made of a non-combustible material or a semi-incombustible material. In this way, the wall of the processing chamber 1 is formed using the wall material made of the non-combustible material or the semi-incombustible material, and the processing chamber 1 is formed so as to seal the interior with the wall, thereby causing a fire in the processing chamber 1. If this occurs, the fire can be prevented from spreading outside the processing chamber 1. Here, the non-combustible material (non-combustible material) means that the material itself does not burn within 20 minutes after the start of heating when fire heat is applied to the building material, and there is no deformation or melting harmful to fire prevention. When used on the indoor surface, it is a material that does not generate harmful smoke and gas, and examples thereof include concrete, brick, tile, asbestos slate, iron, aluminum, glass, mortar, and plaster. In addition, quasi-incombustible material (quasi-incombustible material) has fire-proof performance equivalent to that of non-combustible material, and the material itself does not burn for 10 minutes after the start of heating when fire heat from a normal fire is applied to building materials. Examples include wood wool cement boards and gypsum boards.
[0020]
In the machining chamber 1, the above-described electric discharge machining apparatus 2a is disposed. The electric discharge machining apparatus 2a includes a machining apparatus main body 21 in which a machining object and a tool electrode are arranged and electric discharge machining is performed, and a power source and control means 22 for driving the machining apparatus main body 21. Since the electric discharge machining apparatus 2a uses a flammable machining fluid and there is a risk of fire, the electric discharge machining apparatus 2a is provided with the automatic fire extinguishing apparatus 23 as described above. The automatic fire extinguisher 23 is provided with a heat sensor (not shown), and when a fire occurs in the electric discharge machining apparatus 2a, the heat sensor senses heat from the fire and extinguishes such as nitrogen gas. The fire is extinguished by injecting into the flame. Moreover, in this embodiment, the temperature sensor 51 as the fire detection means 5 mentioned later is installed in the electric discharge machining apparatus 2a, and the fire in the processing chamber 1 can be detected by this temperature sensor 51.
[0021]
The processing chamber 1 is provided with an air conditioner 4 that adjusts the state of air in the processing chamber 1. The air conditioner 4 is driven by a power supply control means 3a for air conditioning that is separate from the power supply and control means 22 that drives the electric discharge machining apparatus 2a. The power supply control means 3 a for air conditioning is provided as a part of the processing chamber control unit 3 disposed outside the processing chamber 1. Further, a temperature sensor 41 for measuring the temperature of the air in the processing chamber 1 is provided in the processing chamber 1, and the air conditioner 4 is operated based on the temperature measured by the temperature sensor 41. It is connected to the power control means 3a for air conditioning.
[0022]
Furthermore, the processing chamber 1 is provided with a fire detection means 5 for detecting a fire in the processing chamber 1 and a fire extinguishing means 7 capable of extinguishing the fire. The fire extinguishing means 7 is connected to the remote control means 3c, and the automatic fire extinguishing apparatus 23 is also connected to the remote control means 3c. The remote control means 3c is provided in the monitoring room 9 provided at a remote location from the processing chamber 1. Connected to an operation unit (not shown). The fire detection means 5 includes a temperature sensor 51 installed in the electric discharge machining apparatus 2a and a smoke sensor 52 provided in the machining chamber 1, and these are connected to the remote control means 3c. The remote control means 3c is provided separately from the power control means 3a for air conditioning of the processing chamber control section 3 described above, but is connected to the power control means 3a for air conditioning so that it can be controlled remotely. is there. The fire extinguishing means 7 receives a signal when a fire is detected from the fire detecting means 5 and is extinguished by a remote control from the operation part of the monitoring room 9 by a supervisor. A gas such as carbon dioxide or nitrogen The fire is extinguished by injecting into the flame.
[0023]
Further, in the present embodiment, the human detection means 6 for detecting the presence or absence of a person (worker M) in the processing chamber 1 is provided and connected to the remote control means 3c. Based on detection signals from the means 6 and the fire detection means 5, a determination means 3b for determining whether or not to extinguish a fire is provided. As the human detection means 6, a human sensor 61 for detecting infrared rays or the like or a human sensor 61 for detecting signals from other persons is installed in the processing chamber 1. The determination means 3b is provided in the processing chamber control unit 3 separately from the remote control means 3c and the power supply control means 3a for air conditioning, and is connected to the remote control means 3c. In the present embodiment, the monitoring camera 81 is provided in the processing chamber 1 and is connected to the remote control means 3c, so that the monitor can monitor the video from the monitoring camera 81 in the monitoring room 9. is there.
[0024]
Further, a speaker and microphone 82 are installed in the processing chamber 1 and connected to the remote control means 3c, and a speaker and microphone (not shown) are also installed in the monitoring room 9 and connected to the remote control means 3c. Thus, it is possible to give an instruction to the monitoring person in the monitoring room 9 and the worker M in the processing room 1 or to receive an instruction from the worker.
[0025]
Next, the determination method in the determination means 3b is demonstrated based on FIG.
[0026]
When a fire occurs in the electric discharge machining apparatus 2a disposed in the machining chamber 1, the heat detector of the automatic fire extinguishing apparatus 23 installed in the electric discharge machining apparatus 2a detects the fire and automatically injects a fire extinguishing agent. At this time, the detection of fire by the heat detector of the automatic fire extinguishing device 23 is transmitted to the determination means 3b, and the determination means 3b starts operation upon receiving the detection of this fire. The determination means 3b receives detection signals from the fire detection means 5 (that is, the temperature sensor 51 and the smoke sensor 52) and the human detection means 6, and first determines whether the fire is spreading or has been extinguished based on the detection signals from the fire detection means 5. . If the fire is extinguished at this time, the fire extinguishing is finished and the operation of the determination means 3b is also finished. If the fire is not extinguished, the determination unit 3 b next determines whether or not there is a person (worker M) in the processing chamber 1 based on the detection signal from the person detection unit 6. Here, when there is no person, the determination unit 3b notifies the monitor through the operation unit of the monitoring room 9 that the fire extinguishing unit 7 performs fire extinguishing, and the monitor extinguishes the fire by remote control. Fire extinguishing is performed by means 7 and fire extinguishing is terminated. When there is a person in the processing room 1, the supervisor in the monitoring room 9 instructs the person M in the processing room 1 to leave the processing room 1 through the speaker and the microphone 82. And after confirming that the person M who stayed in the processing room 1 left by the monitoring camera 81 and the inside of the processing room 1 is unattended, the fire extinguishing means 7 is extinguished by remote control.
[0027]
According to the above configuration, by providing the human detection means 6 and the determination means 3b in the processing chamber 1, the supervisor extinguishes the fire in the processing chamber 1 by the fire extinguishing means 7 by remote control. When there is a worker M in the processing chamber 1, the determination means 3 b does not determine that the fire is extinguished. Therefore, a person in the processing chamber 1 can be remotely controlled by injecting a digestive agent from the fire extinguishing means 7. Can be prevented from causing death due to carbon dioxide poisoning of the extinguishing agent, and when the worker M is not in the processing chamber 1, the determination means 3b determines that the fire is extinguished, The fire extinguishing means 7 can quickly extinguish the fire.
[0028]
Next, another embodiment will be described with reference to FIG. The present embodiment shown in FIG. 3 is basically the same as the upper embodiment shown in FIG. 1, and only different points will be described.
[0029]
In the present embodiment, the precision processing device 2 includes a processing device main body 21, a power source and control means 22 including a processing power supply unit 22a, a control device unit 22b, and a processing fluid temperature control device 22c, and a processing fluid tank 24. The die-sinking electric discharge machine 2a which consists of is used. In the die-sinking electric discharge machining apparatus 2 a, the machining apparatus main body 21 is disposed in the machining chamber 1, and the power source and control means 22 and the machining liquid tank 24 are disposed outside the machining chamber 1.
[0030]
According to such a configuration, the machining power supply unit 22a and the control device unit 22b that generate a large amount of heat in the electric circuit, and the machining fluid temperature control device 22c that serves as a heat source for cooling the machining fluid by the radiator are provided outside the machining chamber 1. As a result, the energy required for air-conditioning by the air conditioner 4 can be reduced, and by disposing the processing liquid tank 24 outside the processing chamber 1, a fire occurs in the processing chamber 1. It is possible to prevent the working fluid from catching fire and spreading.
[0031]
In addition to this, although not particularly shown, a concentration measuring means for measuring the inert gas concentration in the processing chamber 1 and an exhaust means 83 for exhausting the gas in the processing chamber 1 are provided, and a die-sinking electric discharge precision machining apparatus. 2 may be filled with an inert gas in the machining chamber 1, and the inert gas in the machining chamber 1 may be exhausted by the exhaust means 83 other than during machining.
[0032]
By doing so, it is possible to prevent flammable machining fluid from being ignited during electric discharge machining, and it is possible to increase the safety against fire. By preventing entry into the chamber 1, it is possible to prevent the worker from being damaged by fire when a fire occurs in the processing chamber 1.
[0033]
【The invention's effect】
As described above, the invention according to claim 1 of the present invention is a fire extinguishing system for a precision machining apparatus that uses a flammable machining fluid such as an electric discharge machining apparatus, and the precision machining apparatus includes a machining apparatus body and a power source. In addition, it is a die-sinking electric discharge machining device consisting of a control means and a machining liquid tank. The machining apparatus main body is arranged in a hermetically sealable machining chamber, and the power supply, control means and machining liquid tank are arranged outside the machining chamber. An automatic fire extinguishing device that detects and extinguishes fires generated in the precision processing device is provided in the processing device, and a power supply control means for air conditioning separate from the power source and control means for driving the precision processing device is provided in the processing chamber. An air conditioner that regulates the air in the processing chamber driven by the power control means for air conditioning is provided, and the processing chamber is provided with a fire detection means and a human detection means for detecting a fire in the processing chamber and the presence or absence of a person, respectively. Fire in the processing chamber There is provided a fire extinguishing means capable of extinguishing the fire, and a judgment means for judging whether or not to extinguish the fire in the processing chamber based on the detection results of the fire detection means and the human detection means is provided. Since the remote control means that enables the fire extinguishing by means of remote control is provided, the fire detection means and the fire extinguishing means can detect and extinguish the fire at an early stage to prevent the spread of fire. When fire extinguishing means is used to extinguish a fire in the processing chamber, if there is an operator in the processing chamber, the digester is sprayed from the extinguishing means by remote control, and the person in the processing chamber poisons the extinguisher with carbon dioxide, etc. It is possible to prevent death from occurring. By disposing the part that generates a large amount of heat outside the processing chamber, less energy is required for the air conditioner to air-condition, and by disposing the processing liquid tank outside the processing chamber, In the event of a fire, it is possible to prevent the working fluid from catching fire and spreading.
[0034]
Further, in the invention according to claim 2, in addition to the effect of the invention according to claim 1, when the automatic fire extinguishing device provided in the precision processing device detects a fire and extinguishes the fire, the fire detecting means Since there is a judgment means to make a judgment to extinguish by the fire extinguishing means when the detection result is in fire and the detection result by the human sensing means is unattended, the fire in the processing room can be remotely controlled by the supervisor When there is an operator in the processing chamber, it is not determined that the fire is extinguished by the determination means. It is possible to prevent death due to carbon dioxide poisoning, etc., and when there is no worker in the processing chamber, the judgment means judges that the fire is extinguished. Ukoto can.
[0035]
Further, in the invention according to claim 3, in addition to the effect of the invention according to claim 1 or 2, the wall of the processing chamber is made of non-combustible material or quasi-incombustible material, so a fire has occurred in the processing chamber. The fire can be prevented from spreading outside the processing chamber.
[0037]
In the invention according to claim 4 , in addition to the effect of the invention according to any one of claims 1 to 3, the concentration measuring means for measuring the inert gas concentration in the processing chamber and the gas in the processing chamber Exhaust means for exhausting is provided, and the processing chamber is filled with inert gas at the time of machining by the precision machining equipment, and the inert gas in the processing chamber is exhausted by the exhaust means other than at the time of machining, so that it is flammable during electric discharge machining. It is possible to prevent ignition of the machining fluid and increase the safety against fire. In addition, by preventing the worker from entering the machining chamber during electric discharge machining, a fire can occur in the machining chamber. It is possible to prevent the worker from being damaged by fire when this occurs.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of an embodiment of the present invention.
FIG. 2 is a flowchart of the determination method of the determination means in the same as above.
FIG. 3 is an explanatory diagram of another embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Processing chamber 2 Precision machining apparatus 2a Electric discharge machining apparatus 22 Power supply and control apparatus 23 Automatic fire extinguishing apparatus 3a Power supply control means 3b for air conditioning Determination means 3c Remote control means 4 Air conditioning apparatus 5 Fire detection means 6 Person detection means 7 Fire extinguishing means

Claims (4)

A fire extinguishing system for a precision machining apparatus using a flammable machining fluid such as an electric discharge machining apparatus, wherein the precision machining apparatus is a die-sinking electrical discharge machining apparatus comprising a machining apparatus main body, a power supply and control means, and a machining liquid tank. Automatic that disposes the main body of the processing device inside the sealable processing chamber as well as the power supply and control means and the processing liquid tank outside the processing chamber to detect and extinguish the fire generated in the precision processing device. A fire extinguishing device is provided, and a power control means for air conditioning that is separate from the power source and control means for driving the precision machining apparatus is provided, and the air in the processing chamber driven by the power control means for air conditioning is adjusted in the processing chamber. An air conditioner is provided, and a fire detecting means and a human detecting means for detecting a fire in the processing chamber and the presence or absence of a person are provided in the processing chamber, and a fire extinguishing means capable of extinguishing the fire in the processing chamber is provided. Detection A remote control that includes a determination unit that determines whether or not to extinguish a fire in the processing chamber based on the detection result of the step, and allows the fire extinguishing unit to be extinguished by remote operation based on the determination result of the determination unit A fire extinguishing system for precision machining equipment, characterized in that means are provided. When an automatic fire extinguishing device installed in a precision processing device detects a fire and extinguishes the fire, if the detection result by the fire detection means is in fire and the detection result by the human detection means is unattended, extinguish the fire by the fire extinguishing means. The fire extinguishing system for a precision machining apparatus according to claim 1, further comprising a determination unit that performs determination to be performed. The fire extinguishing system for a precision processing apparatus according to claim 1 or 2, wherein the wall of the processing chamber is made of a non-combustible material or a semi-incombustible material. A concentration measuring means for measuring the inert gas concentration in the processing chamber and an exhaust means for exhausting the gas in the processing chamber are provided. The processing chamber is filled with an inert gas during processing by the precision processing apparatus, and the exhaust means other than during processing is used. extinguishing system of the precision machining apparatus according to any one of claims 1 to 3, characterized in that to evacuate the processing chamber of the inert gas.

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