JP4021303B2 - Air pump device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention provides an air pump apparatus for use in such when holding the adsorbate in the suction force of the air, along with connecting the I that multiple pump unit particularly like configured integrally, parallel pump units The air pump device that is connected to the state to increase the suction flow rate is an air pump device that is suitable for, for example, vacuum suction of a semiconductor wafer in a clean room.
[0002]
[Prior art]
Examples of this type of air pump device include those disclosed in Patent Documents 1 to 3, and in these air pump devices, a diaphragm provided in the pump chamber is expanded or electromagnetically driven by an electromagnetic driving means using a combination of an electromagnet and a permanent magnet. Intake or exhaust is performed by a compression operation.
[0003]
[Patent Document 1]
Japanese Utility Model Publication No. 56-9103 [Patent Document 2]
Japanese Utility Model Publication No. 63-46704 [Patent Document 3]
Utility Model Registration No. 2565626 Publication [0004]
Since the conventional diaphragm type air pump device including the above-mentioned patent document is oil-free, it does not pollute the surrounding environment, low vibration and low noise generation, long-life due to less deterioration of components There are advantages compared to air pump devices by other methods , such as advantages in terms of maintenance, especially for example, a suction pump that vacuum-sucks semiconductor wafers and dislikes environmental damage and for a long time It is suitable for applications that maintain stable performance over time.
[0005]
However, when it is necessary to change the required pump capacity with a large increase that cannot be achieved by variable adjustment, for example, in an air pump intended for wafer adsorption, it is diverted to wafer adsorption with a large size and weight. the like time, or use by replacing the separate air pump high ability to satisfy the pumping capacity required, so far and what the added other one air pump of comparable capacity, outside the two flow paths It will be or used simultaneously in a state of being connected in series in the pipe.
[0006]
To this end, in the former case the consumed have or newly purchased high expensive air pump capable, bear the economic burden and loss have been air pump is not required to name Tsu or be Runado that you are using up to it In the latter case, not only the pump body but also two power supplies, including the power supply unit and external piping, are necessary. Due to the inconvenience of operation, manufacturers that supply these air pumps need to individually produce various air pumps with different pump capacities, which hinders cost reduction and inventory management. There were issues that needed improvement.
[0007]
The present inventors previously proposed an air pump device disclosed in Patent Document 4 as an air pump device that can improve the problems of the conventional technology as described above. In this air pump device, a plurality of air pump devices having the same configuration are provided. with connecting the pump unit to integrally connect the pump units in series state, thereby so that to increase the suction pressure.
[0008]
[Patent Document 4]
Japanese Patent Laid-Open No. 2001-3873
[Problems to be solved by the invention]
The air pump device of Patent Literature 4 can solve the various problems as described above in the air pump devices of Patent Literatures 1 to 3, and particularly when each pump unit is connected in series to increase the suction pressure. Although it is possible to increase the suction holding force of the suction disk with respect to the object to be adsorbed, there are still insufficient points depending on the application, and there remains room for improvement.
[0010]
That is, even if increasing the suction pressure by connecting the pump units in series state, since the suction flow rate does not change, when the diameter of the suction cup performing adsorption the outer peripheral edge portion in contact with the adsorbate is large Takes a long time to hold and hold adsorption because the amount of air held in the suction plate is too large to improve the responsiveness of the suction. When the amount of air is reduced, a large suction pressure acts locally on the object to be adsorbed, which may cause damage to the object to be adsorbed.
[0011]
In particular, in the case where the object to be adsorbed is a semiconductor wafer, the diameter has been increasing in recent years. Therefore, in order to stably and quickly hold a large-diameter semiconductor wafer, an adsorber having a large diameter and a suction device are used. the use of a large air pump apparatus of the flow rate is not to demand. Therefore, in the present invention is to provide these features air pump apparatus that can be achieved with a relatively inexpensive structure compact the main purpose.
[0012]
[Means for Solving the Problems]
A pump unit having an air supply / exhaust port is mounted on a predetermined surface of the partition plate, and a connection case main body provided with one shared suction port on the outside, and in a form surrounding each of the pump units, One case is mounted on a predetermined surface to form a housing by each case main body forming a pump chamber, and each lid main body mounted on the other surface of each case main body and provided with a discharge port. The suction port and the suction port of each pump unit are communicated with each other through a suction channel branched in the housing, and each discharge channel provided between the mounted lid body and the case body is provided. Thus, the discharge port of each lid body and the exhaust port of each pump unit were connected to each other, and the respective pump units were connected in parallel.
[0013]
According to this air pump device, for each of a plurality of pump units accommodated in an integrally formed housing, external piping as well as internal piping is not used, but through suction and discharge channels formed by the housing itself. In addition, it is possible to connect in parallel in an easy and downsized state, and it is possible to increase the suction flow rate to quickly and easily hold the object to be adsorbed. In addition, when a plurality of case bodies are mounted on a predetermined surface of the connection case body, and each lid body is mounted on each case body, an air pump device connected in parallel can be configured, so that assembly work is easy and maintenance is easy. It is.
[0014]
(Delete)
[0015]
(Delete)
[0016]
Over the previous disappeared Aponpu device, communicating the air introduced from the suction port, a slit-shaped suction opening provided in the connecting case body, the predetermined surface of the partition plate via a suction passage which is formed in the partition plate allowed to flow into the interior of the communicating portion to be, it may take the form of suction respectively at the inlet of the pump units with branches in communicating portion.
[0017]
State According to this e Aponpu device, which utilizes the partition plate connecting the case body to partition each pump chamber of each case body wearing the pump units in a predetermined plane, and miniaturized suction flow paths branching Can be easily formed.
[0018]
Over the previous disappeared Aponpu device, the pump unit is a diaphragm type air pump, for evacuating the first intake port for sucking the outside air into the first diaphragm chamber, the air in the first diaphragm chamber to said pump chamber a first outlet, a second intake port for the intake air of the pump chamber to the second diaphragm chamber, and a second exhaust port for exhausting air in the second diaphragm chamber to the outside, the first air inlet wherein while connected to the suction passage may take the form of connecting the second exhaust port to said discharge flow path.
[0019]
In this air pump device, it is possible to use various known pump units that can achieve the same function. However, if a diaphragm type air pump is used as in this embodiment, it is oil-free and does not pollute the surrounding environment. It is particularly suitable for a suction pump that performs vacuum suction of a semiconductor wafer by taking advantage of features such as less generation of noise due to vibration, less deterioration of constituent members, and longer life.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the air pump device of the present invention will be described in detail with reference to the accompanying drawings showing preferred embodiments. FIGS. 1 and 2 are exploded perspective views of a dual air pump device 1 to which the present invention is applied. 1 is an exploded perspective view as viewed from the upper surface side, and FIG. 2 is an exploded perspective view as viewed from the lower surface side. The upper lid portion 2, the first case portion 3, the connection case portion 4, and the second The case part 5 and the lower cover part 6 are the main components.
[0021]
The upper lid portion 2 includes an upper lid body 7 formed in a shallow box shape. The upper lid body 7 has a groove-shaped discharge hole 8A on the inner surface side, one end communicating with the discharge hole 8A, and the other end opened on the side surface side. A discharge flow path 8 including a discharge pipe 8B is provided, the power switch 9 is mounted in a manner exposed on the surface side of the upper lid body 7, and a plurality of mounting holes 10 penetrating the plate surface are provided.
[0022]
The first case portion 3 has a thin outer peripheral wall 12 protruding toward the upper lid portion 2 from the outer peripheral edge portion of the partition plate 11 provided in the middle, and a thick shape protruding toward the connection case portion 4 side. The first case body 14 having the other outer peripheral wall 13 is provided, and a shallow box-shaped space is formed inside the outer peripheral wall 12 and a deep box-shaped space is formed inside the outer peripheral wall 13.
[0023]
The first case body 14 is provided with a connecting portion 15 formed in a cylindrical shape that fits into the discharge hole 8 </ b> A in the partition plate 11, and the box-shaped space on the outer peripheral wall 12 side and the box of the outer peripheral wall 13 through the connecting portion 15. In addition to communicating the shape space, a filter 16 is attached to the communication portion 15, and a mounting screw hole 17 protruding in a boss shape is provided in the partition plate 11 at a position aligned with the mounting hole 10. A mounting hole 18 that penetrates the outer peripheral wall 13 is provided.
[0024]
As will be described in detail later, the connection case portion 4 is provided with a pump unit 20 (20A, 20B) on both sides of the connection case main body 19 and an intake receiving portion 37 provided on the side surface of the connection case main body 19 for suction. Part 21 is mounted.
[0025]
Similarly to the case of the first case portion 3, the second case portion 5 has one thin outer peripheral wall 23 that protrudes toward the lower lid portion 6 from the outer peripheral edge portion of the partition plate 22 provided in the middle. A second case body 25 having a thick outer peripheral wall 24 projecting toward the connection case portion 4 is provided, and a shallow box-shaped space is formed in the outer peripheral wall 23, and in the outer peripheral wall 13. A deep box-shaped space is formed.
[0026]
The second case body 25 is provided with a connecting portion 26 formed in a cylindrical shape on the partition plate 22, and the box-shaped space on the outer peripheral wall 23 side and the box-shaped space on the outer peripheral wall 24 are communicated with each other via the connecting portion 26. A filter (not shown) is attached to the communication portion 26, a mounting screw hole 27 protruding in a boss shape is provided in the partition plate 22, and a mounting hole 28 that penetrates the outer peripheral wall 24 is provided inside the outer peripheral wall 23. Yes.
[0027]
The lower lid portion 6 includes a lower lid main body 29 formed in a substantially flat plate shape, and has a concave groove-like discharge hole 30A in which the communication cylinder 26 is fitted on the inner surface side of the lower lid main body 29, and one end communicated with the discharge hole 30A. The other end of the lower lid main body 29 is provided with a discharge flow path 30 formed of a discharge pipe 30B that is open on the side surface side, and a leg portion 31 formed of an elastic member such as rubber is mounted on the surface side of the lower lid main body 29. A plurality of mounting holes 32 penetrating the plate surface are provided.
[0028]
As shown in FIGS. 3 to 5, the connecting case portion 4 has a thin outer peripheral wall 34 projecting from the outer peripheral edge portion of the partition plate 33 provided in the middle to the first case portion 3 side and the second case portion 5. in forming a connection case body 19, the one surface and the other surface of the partition plate 33, attached pump body 35 (35A, 35B) and the electromagnet 36 (36A, 36B) the pump unit 20 according to the (20A, 20B) In addition, a suction receiving portion 37 for mounting the suction portion 21 is formed on the side surface of the outer peripheral wall 34.
[0029]
The connection case main body 19 has a symmetrical shape on both sides of the partition plate 33 excluding the suction receiving portion 37, and a boss-like mounting portion 38 for mounting the pump main body 35 (35 </ b> A, 35 </ b> B) on both sides of the partition plate 33, and an electromagnet A boss-like attachment portion 39 for attaching 36 (36A, 36B) is projected, and a communication portion 40 is provided by a cylindrical body that allows both sides of the partition plate 33 to communicate with each other, and the partition plate 33 penetrates inside the outer peripheral wall 34. A mounting hole 41 is provided.
[0030]
The suction receiving portion 37 is formed of a bottomed cylindrical body protruding from the side surface of the outer peripheral wall 34, and the mounting receiving portion 43 is screwed to the mounting portion 42 of the suction portion 21 on the outer peripheral surface of the cylindrical body. A large number of small-diameter projections 44 are provided on the inner bottom surface of the cylindrical body so as to form a gap when a filter (a description including illustration will be described later) is attached.
[0031]
Further, a suction opening 45 in the form of a slit is formed in the center of the inner bottom surface of the suction receiving portion 37, and the suction opening 45 is separated by a partition plate through a suction channel 46 formed in a manner penetrating the partition plate 33. The suction channel 46 is branched into two inside the first and second case portions 3 and 5 on both sides of the communication portion 40.
[0032]
Although not shown in the drawings, as another embodiment of bifurcating the suction flow path, for example, slit-like suction openings 45 are formed in two locations so as to communicate with both sides of the partition plate 33, and the partition plate 33 Both sides are bulged to form suction passages 46 in the interior to communicate with the suction openings 45, and the suction passages 46 are opened in the communicating portions 40 separated by the partition plate 33 in the middle. It is also possible.
[0033]
Pump body 35 (35A, 35B) is a permanent magnet and the vibrating plate 48, 49 disposed in left and right opposite shape pivoted the base end side to the base 4 7, is attached to the distal end side of the vibrating plate 48, 49 50 and 51 and diaphragms 52 and 53 attached to both sides of the base 47 while being supported between the diaphragms 48 and 49 are formed as main constituent members. An intake port 54 and a second intake port 55 are provided, and a first exhaust port 56 and a second exhaust port 57 are provided on the other side of the base 47.
[0034]
The pump unit 20 (20A, 20B) has the same structure as that disclosed in Patent Document 4, and a detailed description including the internal structure of the pump body 35 is omitted. When the electromagnet 36 for switching between is operated, the diaphragms 48 and 49 are vibrated by the responding permanent magnets 50 and 51, and the diaphragms 52 and 53 are expanded and contracted in conjunction with this, so that the diaphragm chamber formed inside is operated. The air supply / exhaust operation is performed.
[0035]
That is, expansion and compression of the first and second diaphragms 52 and 53 are alternately repeated in the diaphragm chamber, and at the time of expansion, from the outside via the first air inlet 54 and the second air inlet 55. first, second diaphragm chamber 52a, together with air into the 53a is sucked at the time of compression first through the first exhaust port 56 and the second exhaust port 57, a second diaphragm chamber 52a, the air in the 53a external Is discharged.
[0036]
The pump unit 20 (20A, 20B) is mounted on the connection case main body 19 by mounting screws 58 in which the electromagnet 36 is screwed into the screw holes of the mounting portion 39, and the pump main body 35 (35A, 35B) is mounted at both ends of the base 47. A long attachment screw 59 screwed into the screw hole of the attachment portion 38 is inserted into the support rod 60 provided in the attachment rod 38 and attached to the connection case main body 19, thereby constituting the integral connection case portion 4.
[0037]
Next, FIGS. 6 to 8 show a longitudinal section of the dual air pump device 1 in the assembled state, and FIG. 6 is a perspective view of the housing with the pump unit 20 (20A, 20B) removed, and FIG. It is a perspective view in the state where a part of pump unit 20 (20A, 20B) was fractured, and Drawing 8 is the whole longitudinal section containing pump unit 20 (20A, 20B).
[0038]
As shown in each of these figures, the first case body 14 and the second case body 25 are fitted to both sides of the connection case body 19, and each of these case bodies has respective mounting holes 18, 41, 28. A nut is screwed into a long screw inserted through the screw (not shown), and the first case portion 3 and the second case portion 5 are integrally connected to the connecting case portion 4.
[0039]
Thereby, on both sides of the connection case main body 19 of the connection case portion 4, a pump chamber 61A formed between the first case main body 14 and a pump chamber 61B formed between the second case main body 25 are provided. The pump unit 20A is mounted in the pump chamber 61A, and the pump unit 20B is mounted in the pump chamber 61B. In order to seal each pump chamber 61 (61A, 61B), a seal member (not shown) is provided at the joint portion. Intervene.
[0040]
The upper lid body 7 is screwed into the mounting screw hole 17 with a screw inserted through the mounting hole 10 and screwed (not shown) to the first case body 14, and the lower lid body 29 is inserted into the mounting hole 32. The inserted screw is screwed into the mounting screw hole 27 and screwed to the second case body 25 (not shown), and the first case portion 3 and the upper lid portion 2 and the second case portion 5 and the lower lid portion 6 are integrated. Connect to
[0041]
In each pump chamber 61, the pump chamber 61A communicates with the discharge hole 8A of the upper lid body 7 through the communication portion 15, and the pump chamber 61B communicates with the discharge hole 30A of the lower lid body 29 through the communication portion 26. A communication hole that penetrates the partition plates 11 and 22 is provided at the center of the communication portions 15 and 26, and the communication that protrudes toward the pump chambers 61A and 61B in a manner surrounding the communication holes is provided in the partition plates 11 and 22. Tubes 62 and 63 are provided.
[0042]
In each pump chamber 61, the first intake port 54 of each pump unit 20 is inserted in the communication portion 40 in an airtight state, the second exhaust port 57 of the pump unit 20A is connected to the communication tube 62, and the second exhaust port of the pump unit 20B is inserted. The port 57 is inserted into the communication cylinder 63 in an airtight state, and the first exhaust port 55 and the second intake port 56 are opened in the pump chambers 61A and 61B, respectively.
[0043]
The suction portion 21 has a bottomed suction tube 64 with a suction hole formed therein, a suction tube 65 having one end communicating with the suction hole of the suction tube 64, and a flange-like protruding projection on the outer periphery of the suction tube 64 A mounting portion 42 is provided on the outer periphery of the mounting plate 66, and is screwed to the mounting receiving portion 43 of the suction receiving portion 37 via the mounting portion 42. An annular seal is provided between the suction receiving portion 37 and the suction receiving portion 37. A member 67 and a disk-shaped filter 68 are mounted.
[0044]
The communication parts 15 and 26 of the case main bodies 14 and 25 are also mounted with the same seal member 69 and filter 70 as in the case of the suction part 21, and the first member is connected via the seal member 69 and filter 70. The pump chambers 61 </ b> A and 61 </ b> B of the case portion 3 and the second case portion 5 are communicated with the discharge flow paths 8 and 30 .
[0045]
As a result, the air sucked into the suction pipe 65 of the suction part 21 flows into the communication part 40 from the suction cylinder 64 through the suction receiving part 37 and the suction flow path 46, and then branches into two in the communication part 40. One is inhaled by the first air inlet 54 of the pump unit 20A, and the other is a suction path through which air is taken in by the first air inlet 54 of the pump unit 20B.
[0046]
In addition, the air exhausted from the second exhaust port 57 of the pump unit 20A flows out from the communication cylinder 62 to the discharge hole 8A of the discharge flow path 8, and then is discharged to the outside via the discharge pipe 8B. After the air exhausted from the second exhaust port 57 of 20B flows out from the communication tube 63 to the discharge hole 30A of the discharge flow path 30, a discharge path is formed that is discharged to the outside through the discharge pipe 30B.
[0047]
Therefore, when the power switch 9 is turned on and the electromagnet 36 (36A, 36B) is activated, when the first and second diaphragms 52, 53 are expanded and contracted, the suction magnet 65 passes through the suction pipe 65. External air is sucked into the first diaphragm chamber 52a from the first intake port 54, and an intake operation is performed in which air in each of the pump chambers 61A and 61B is sucked into the second diaphragm chamber 53a from the second intake port 56. .
[0048]
Next, when both the diaphragms 52 and 53 are compressed, the air in the first diaphragm chamber 52a is exhausted from the first exhaust port 56 into the pump chambers 61A and 61B, and the discharge pipe 8B is discharged from the second exhaust port 57. , 30B, the exhaust operation for discharging the air in the second diaphragm chamber 53a to the outside is performed.
[0049]
When these series of intake / exhaust operations are repeated, the air pressure in the pump chambers 61A and 61B is gradually increased to a constant pressure, and the suction plate 65 is attached to the suction pipe 65 via the suction hose under this high pressure state. Then, an adsorption operation for the object to be adsorbed is performed.
[0050]
If the two pump units 20A and 20B are integrally formed in a state of being connected in parallel as in the double air pump device 1 according to this embodiment, the device can be reduced in size and the operability can be improved. Since the amount of air to be sucked doubles, the adsorption time of the object to be adsorbed by the adsorption plate can be greatly shortened, and stable adsorption holding can be performed without damaging the object to be adsorbed.
[0051]
Although illustration is omitted, AC power is supplied to the electromagnets 36 (36A, 36B) of each pump unit 20 via the power switch 9 and the power cord, and particularly in this embodiment, each electromagnet 36A. as part of the connection for 36B, the feed is being performed by diverting a threaded elongated connecting each casing body 19,14,25.
[0052]
FIG. 9 shows a triple-type air pump device 71, and a single-type air pump device 1 </ b> B is provided on the side surface of the double-type air pump device 1 </ b> A having the same configuration as that of the double-type air pump device 1 according to the first embodiment. It has a structure added integrally, and each of the three built-in pump units 20 (20A, 20B, 20C) is connected in parallel to increase the suction flow rate three times.
[0053]
That is, the air sucked by the common suction pipe 65 is increased in pressure in each pump chamber 61 (61A, 61B, 61C) containing each pump unit 20A, 20B, 20C, and discharged from each discharge hole 8A, 30A, 72A. Air is discharged through discharge pipes (not shown) forming flow paths.
[0054]
The air pump device 1B includes a third case portion 73 that forms a pump chamber 61C, and a side plate portion 74 that forms a discharge flow path with an exhaust hole 72A and a discharge pipe. Pump units 20A and 20B are provided in the third case portion 73. The pump unit 20C is housed in such a manner that the angle is displaced by 90 degrees.
[0055]
Since the configuration and operation including the pump unit 20C are the same as in the case of the first embodiment, redundant description will be omitted, but the air introduced from the suction pipe 65 and introduced into the communication portion 40 via the suction flow path 46 Is made to flow into the first intake port 54 of the pump unit 20C through a suction channel 76 (communication unit) that is branched into three at the communication unit 40 and is extended with the suction channel 46, and the second exhaust port 57. Is communicated with the discharge hole 72 </ b> A via the communication cylinder 77.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view of a dual air pump device according to an embodiment to which an air pump device of the present invention is applied, as viewed from the upper surface side.
FIG. 2 is an exploded perspective view of a dual air pump device according to an embodiment to which the air pump device of the present invention is applied, as viewed from the lower surface side.
FIG. 3 is a perspective view of a connection case body of a connection case portion constituting the dual air pump device of FIGS. 1 and 2, as viewed from the upper surface side.
4 is a side view of a pump unit used in the dual air pump device of FIGS. 1 and 2. FIG.
FIG. 5 is a perspective view of a connection case body of a connection case portion constituting the dual air pump device of FIGS. 1 and 2, as viewed from the lower surface side.
6 is a longitudinal sectional view of a main part of the dual air pump device of FIGS. 1 and 2, and is a perspective view of the housing in a state where the pump unit is removed. FIG.
7 is a longitudinal sectional view of the dual air pump device of FIGS. 1 and 2, and is a perspective view in a state in which a part of the pump unit is broken. FIG.
FIG. 8 is a longitudinal sectional view of the dual air pump device of FIGS. 1 and 2 and includes the entire pump unit.
FIG. 9 is a longitudinal sectional view of a triple air pump device according to an embodiment to which the air pump device of the present invention is applied, and is a perspective view in a state in which a part of the pump unit is broken.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Duplex air pump apparatus 2 Upper cover part 3 1st case part 4 Connection case part 5 2nd case part 6 Lower cover part 7 Upper cover main body 8,30 Discharge flow path 8A, 30A, 72A Discharge hole 8B, 30B Discharge pipe 9 Power supply Switch 10, 18, 28, 32, 41 Mounting hole 11 Partition plate 12, 13, 23, 24, 34 Outer wall 14 First case body 15, 26, 40 Communication portion 16, 68, 70 Filter 17, 27 Mounting screw hole 19 Connecting case body 20 Pump unit 21 Suction part 22, 33 Partition plate 25 Second case body 29 Lower lid body 31 Leg 35 Pump body 36 Electromagnet 37 Suction receiving part 38, 39, 42 Mounting part 43 Mounting receiving part 44 Small-diameter projection 45 suction opening 46 intake引流path 76 suction flow path (communicating portion)
47 Base 48, 49 Diaphragm 50, 51 Permanent magnet 52 First diaphragm
52a First diaphragm chamber 53 Second diaphragm
53a Second diaphragm chamber 54 First intake port 55 Second intake port 56 First exhaust port 57 Second exhaust port 58, 59 Diaphragm 60 Support rod 61 Pump chamber
62 and 63 communicating cylinder 64 suction tube 6 5 suction tube 66 the mounting plate 67, 69 seal member 71 triple-type pump device 73 third case portion 74 side plate
75 First intake port 77 Communicating tube

Claims (3)

A pump unit having an air supply / exhaust port is mounted on a predetermined surface of the partition plate, and a connection case main body provided with one shared suction port on the outside, and in a form surrounding each of the pump units, One case is mounted on a predetermined surface to form a housing by each case main body forming a pump chamber, and each lid main body mounted on the other surface of each case main body and provided with a discharge port. The suction port and the suction port of each pump unit are communicated with each other through a suction channel branched in the housing, and each discharge channel provided between the mounted lid body and the case body is provided. The air pump device is characterized in that the discharge port of each lid body and the exhaust port of each pump unit are in communication with each other and the pump units are connected in parallel. The suction channel includes a communication part that communicates a predetermined surface of the partition plate, and a slit-like suction channel part that is formed in the partition plate so as to communicate the suction port and the communication part. The double-type air pump device according to claim 1 configured. The pump unit is a diaphragm type air pump, a first exhaust port for exhausting a first intake port for sucking the outside air into the first diaphragm chamber, the air in the first diaphragm chamber to said pump chamber, said pump It comprises a second intake port for sucking the room air into the second diaphragm chamber, and a second exhaust port for exhausting air in the second diaphragm chamber to the outside, connecting the first inlet to the suction flow path with the dual type air pump apparatus according to the second exhaust port in claim 1 or claim 2 connected to the discharge flow channel.

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