JP4019428B2 - Manufacturing method of glass capillary tube - Google Patents
Manufacturing method of glass capillary tube Download PDFInfo
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- JP4019428B2 JP4019428B2 JP2005230368A JP2005230368A JP4019428B2 JP 4019428 B2 JP4019428 B2 JP 4019428B2 JP 2005230368 A JP2005230368 A JP 2005230368A JP 2005230368 A JP2005230368 A JP 2005230368A JP 4019428 B2 JP4019428 B2 JP 4019428B2
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本発明は、複数本の光ファイバを正確に並列保持し位置決めして固定するガラス毛細管の製造方法に関するものである。 The present invention relates to a method for manufacturing a glass capillary that accurately holds, positions, and fixes a plurality of optical fibers in parallel.
従来より、１本の光ファイバにより伝達される信号を複数本の光ファイバに分波する場合、或いは複数本の光ファイバの信号を１本の光ファイバに合波する場合等において、複数本の光ファイバを保持固定する毛細管が使用される。例えば、２本の光ファイバを正確に並列保持し位置決めして固定する際、図５に示すように、２本の光ファイバ５、６を挿入する円形断面の挿入孔２を有する毛細管１が使用される。 Conventionally, when a signal transmitted by one optical fiber is demultiplexed into a plurality of optical fibers, or when signals from a plurality of optical fibers are multiplexed into one optical fiber, etc. A capillary that holds and fixes the optical fiber is used. For example, when two optical fibers are accurately held in parallel and positioned and fixed, a capillary tube 1 having a circular section insertion hole 2 for inserting the two optical fibers 5 and 6 is used as shown in FIG. Is done.
この毛細管１の挿入孔２の内径は、挿入する２本の光ファイバ５、６の高い位置決め精度を達成できるように、例えば、直径１２５μｍの石英系光ファイバでは、１〜５μｍの隙間を設定して高精度に製作されている。
しかしながら、毛細管１の挿入孔２が円形断面であるので、図５（Ａ）に示すように、２本の光ファイバ５、６が挿入孔２中で捻れた場合、挿入孔２の中心軸Ｐと光ファイバ５の光軸５ｂ及び光ファイバ６の光軸６ｂとが各々角度Δθ１、Δθ２を成して中心軸Ｐとは平行とならず、光ファイバ５、６の光軸５ｂ、６ｂは、Δθ１＋Δθ２の角度に広がってしまう。即ち、捻れた光ファイバ５、６と中心軸Ｐと平行に並列配置される光ファイバ５、６に対して配置された発光素子、受光素子、光導波路形素子、光ファイバ等の光学素子とは、その相対位置が対応しなくなって接続損失が大きくなる問題がある。 However, since the insertion hole 2 of the capillary tube 1 has a circular cross section, when the two optical fibers 5 and 6 are twisted in the insertion hole 2 as shown in FIG. And the optical axis 5b of the optical fiber 5 and the optical axis 6b of the optical fiber 6 form angles Δθ1 and Δθ2, respectively, and are not parallel to the central axis P. The optical axes 5b and 6b of the optical fibers 5 and 6 are It spreads to an angle of Δθ1 + Δθ2. That is, optical elements such as a light emitting element, a light receiving element, an optical waveguide element, and an optical fiber arranged with respect to the twisted optical fibers 5 and 6 and the optical fibers 5 and 6 arranged in parallel with the central axis P. , There is a problem that the relative position becomes incompatible and the connection loss increases.
また、図５（Ｂ）に破線及びその移動角度Δθ３で示すように、挿入孔２内で２本の光ファイバは回転ずれを起こし、光ファイバ５、６に対応する光学素子との相対位置を調節する必要がある。光ファイバの中にはシングルモードファイバと呼ばれる光信号が通るコアの径が５μｍ〜１０μｍと小さいものもあり、上記の相対位置を調節する作業は極めて困難となる問題がある。 Further, as indicated by a broken line and its movement angle Δθ3 in FIG. 5B, the two optical fibers are deviated in the insertion hole 2 and the relative positions of the optical elements corresponding to the optical fibers 5 and 6 are changed. It needs to be adjusted. Some optical fibers, called single-mode fibers, have a small core diameter of 5 μm to 10 μm through which an optical signal passes, and there is a problem that the operation of adjusting the relative position becomes extremely difficult.
本発明は、以上のような従来の問題点を解決した、複数本の光ファイバを正確に並列保持し位置決めして固定できるガラス毛細管の製造方法を提供することを目的とする。 SUMMARY OF THE INVENTION An object of the present invention is to provide a glass capillary manufacturing method capable of accurately holding, positioning, and fixing a plurality of optical fibers in parallel, which solves the conventional problems as described above.
本願発明に係るガラス毛細管の製造方法は、複数本の光ファイバを正確に並列保持し位置決めして固定するガラス毛細管の製造方法であって、加熱したガラス管の内面を真空にして金型に密着させて成形するシュリンク法により略正方形の孔を有する予備成形体を作製し、前記予備成形体を加熱して、断面が略長方形を呈し、直径Ｄのｎ本（２≦ｎ）の光ファイバを並列に挿入する挿入孔を有しており、該挿入孔の相対向する長辺の間隔Ｌ１及び短辺の間隔Ｌ２と挿入される光ファイバの直径Ｄとが、Ｄ＜Ｌ１≦（１．０５）ＤかつｎＤ＜Ｌ２≦（ｎ＋０．０５）Ｄの関係を満たすガラス毛細管に延伸成形することを特徴とする。 The glass capillary manufacturing method according to the present invention is a glass capillary manufacturing method in which a plurality of optical fibers are accurately held in parallel, positioned, and fixed, and the inner surface of the heated glass tube is evacuated to adhere to the mold. to prepare a preform having a more nearly square holes shrink method of molding by, and heating the preform in cross-section has a substantially rectangular, the optical fiber of the n diameters D (2 ≦ n) Are inserted in parallel, and the distance L1 between the long sides facing each other and the length L2 between the short sides of the insertion hole and the diameter D of the optical fiber to be inserted are D <L1 ≦ (1. 05) D and nD <L2 ≦ (n + 0.05) A glass capillary satisfying the relationship of D is stretch-molded.
図１に示すように、直径Ｄを有するｎ本の光ファイバをクリアランスなしに並列保持する長方形の挿入孔２の長辺の間隔Ｌ１と直径Ｄとの関係は、Ｌ１＝Ｄで表され、短辺の間隔Ｌ２と直径Ｄとの関係は、Ｌ２＝ｎＤ（２≦ｎ）で表される。直径Ｄの光ファイバｎ本を挿入孔２に挿入するためには、クリアランスが必要であるから、長辺の間隔Ｌ１は、Ｄ＜Ｌ１の関係を満たす必要があり、短辺の間隔Ｌ２は、ｎＤ＜Ｌ２の関係を満たす必要がある。また、シングルモード光ファイバ５では、光信号が通るコア部５ａの径の直径Ｄに対する比は５〜１０％であるので、ｎ本の光ファイバの位置決め精度を少なくとも光ファイバ直径Ｄの約５％以内にするには、長辺の間隔Ｌ１は、Ｌ１≦（１．０５）Ｄの関係を満たす必要があり、短辺の間隔Ｌ２は、Ｌ２≦（ｎ＋０．０５）Ｄの関係を満たす必要がある。 As shown in FIG. 1, the relationship between the distance L1 between the long sides of the rectangular insertion holes 2 that hold n optical fibers having a diameter D in parallel without clearance and the diameter D is expressed as L1 = D, The relationship between the side interval L2 and the diameter D is represented by L2 = nD (2 ≦ n). In order to insert n optical fibers having a diameter D into the insertion hole 2, clearance is required. Therefore, the long side interval L1 needs to satisfy the relationship D <L1, and the short side interval L2 is It is necessary to satisfy the relationship of nD <L2. In the single mode optical fiber 5, the ratio of the diameter of the core portion 5a through which the optical signal passes to the diameter D is 5 to 10%. Therefore, the positioning accuracy of the n optical fibers is at least about 5% of the optical fiber diameter D. In order to be within the range, the long side interval L1 needs to satisfy the relationship L1 ≦ (1.05) D, and the short side interval L2 needs to satisfy the relationship L2 ≦ (n + 0.05) D. is there.
本発明のガラス毛細管の挿入孔が、略長方形の断面であることについて説明する。一般に、ガラスを加熱してガラス管を延伸成形した場合、ガラス管の外表面には圧縮応力が、内面には引張応力が生じる。ガラスは引張応力が最大になる部位で破壊するので、通常、内面に引張応力が集中するような角張った形状にしないように、できる限り丸みを帯びた形状にする。本発明のガラス毛細管の挿入孔の断面形状は、角部に丸みを設けた略長方形とすることにより、ガラス毛細管の内面に引張応力が集中することを避けて強度を確保しているものである。 The fact that the insertion hole of the glass capillary of the present invention has a substantially rectangular cross section will be described. Generally, when a glass tube is stretch-formed by heating glass, a compressive stress is generated on the outer surface of the glass tube and a tensile stress is generated on the inner surface. Since glass breaks at the site where the tensile stress is maximum, it is usually made as rounded as possible so as not to have an angular shape where the tensile stress is concentrated on the inner surface. The cross-sectional shape of the insertion hole of the glass capillary tube of the present invention is a substantially rectangular shape with rounded corners, thereby ensuring strength by avoiding the concentration of tensile stress on the inner surface of the glass capillary tube. .
また、本願発明のガラス毛細管は、挿入孔の少なくとも一方の開口端に、該挿入孔に滑らかに連続するフレア部が形成されてなることを特徴とする。 Further, the glass capillary of the present invention is characterized in that a flare portion that is smoothly continuous with the insertion hole is formed at at least one opening end of the insertion hole.
本発明のガラス毛細管によれば、延伸成形によって作製され、複数本の光ファイバを正確に並列保持し位置決めして固定するガラス毛細管であって、断面が略長方形を呈し、直径Ｄのｎ本（２≦ｎ）の光ファイバを並列に挿入する挿入孔を有しており、該挿入孔の相対向する長辺の間隔Ｌ１及び短辺の間隔Ｌ２と挿入される光ファイバの直径Ｄとが、Ｄ＜Ｌ１≦（１．０５）ＤかつｎＤ＜Ｌ２≦（ｎ＋０．０５）Ｄの関係を満たすので、ガラス毛細管にｎ本の光ファイバを挿入した際、ｎ本の光ファイバは捻れや回転ずれを起こさず、高い精度で光ファイバを並列保持し位置決めして固定することができる。 According to the glass capillary tube of the present invention, it is a glass capillary tube that is produced by stretch molding and accurately holds, positions, and fixes a plurality of optical fibers in parallel. 2 ≦ n) having an insertion hole for inserting the optical fiber in parallel, the distance L1 between the long sides facing each other and the distance L2 between the short sides of the insertion hole, and the diameter D of the optical fiber to be inserted, Since D <L1 ≦ (1.05) D and nD <L2 ≦ (n + 0.05) D are satisfied, when n optical fibers are inserted into the glass capillary tube, the n optical fibers are twisted or rotated. The optical fibers can be held in parallel and positioned and fixed with high accuracy without causing any problems.
また、挿入孔の少なくとも一方の開口端に、該挿入孔に滑らかに連続するフレア部が形成されてなるガラス毛細管によれば、複数本の光ファイバを略長方形の断面を有する挿入孔に容易に挿入できる。 Further, according to the glass capillary tube in which the flared portion that is smoothly continuous with the insertion hole is formed at at least one opening end of the insertion hole, a plurality of optical fibers can be easily formed into the insertion hole having a substantially rectangular cross section. Can be inserted.
図２は、本発明に係るガラス毛細管の説明図であって、１はガラス毛細管を、２は光ファイバの挿入孔を、３は光ファイバを挿入孔２に案内するフレア部を５、６は光ファイバを、９は接着剤を、１０はコネクタプラグを各々示しており、前記で説明した図５と同一部分には同一符号を付してそれぞれ示してある。 FIG. 2 is an explanatory view of a glass capillary according to the present invention, wherein 1 is a glass capillary, 2 is an insertion hole for an optical fiber, 3 is a flare portion for guiding the optical fiber to the insertion hole 2, The optical fiber, 9 is an adhesive, and 10 is a connector plug. The same parts as those in FIG. 5 described above are denoted by the same reference numerals.
本実施の形態に係るガラス毛細管１は、膨張係数が５．２×１０-6／℃のホウ珪酸ガラスからなり、外径が１．１４ｍｍ±０．００１ｍｍの寸法で高い真円度を有しており、その断面が略長方形を呈する挿入孔２は、その相対向する長辺の間隔Ｌ１と挿入される光ファイバの直径Ｄとが、Ｌ１と挿入される光ファイバの直径Ｄとが、Ｄ＜Ｌ１≦（１．０５）Ｄの関係を満たし、かつ短辺の間隔Ｌ２と挿入される光ファイバの直径Ｄとが、ｎＤ＜Ｌ２≦（ｎ＋０．０５）Ｄの関係を満たすようになっている。例えば、図２に示すように、直径Ｄが１２５μｍの光ファイバ２本を並列保持して固定する場合、挿入孔２の長辺の間隔Ｌ１は１２７μｍ±１μｍの寸法を有し、かつ短辺の間隔Ｌ２は２５２μｍ±１μｍの寸法を有して光ファイバ露出端面をガラス毛細管１内で正確に位置決めして並列保持できるようになっている。このガラス毛細管１の後端面１ｂには、光ファイバ５、６を断面が略長方形の挿入孔２内に円滑に案内して挿入するために、開口径が約１ｍｍで略円錐形状のフレア部３が設けられている。 The glass capillary tube 1 according to the present embodiment is made of borosilicate glass having an expansion coefficient of 5.2 × 10 −6 / ° C., and has a high roundness with an outer diameter of 1.14 mm ± 0.001 mm. The insertion hole 2 having a substantially rectangular cross section has a distance L1 between the long sides facing each other and a diameter D of the optical fiber to be inserted, and L1 and a diameter D of the optical fiber to be inserted are D <L1 ≦ (1.05) D is satisfied, and the distance L2 between the short sides and the diameter D of the inserted optical fiber satisfy the relationship nD <L2 ≦ (n + 0.05) D. Yes. For example, as shown in FIG. 2, when two optical fibers having a diameter D of 125 μm are held in parallel and fixed, the long side interval L1 of the insertion hole 2 has a dimension of 127 μm ± 1 μm and a short side The interval L2 has a size of 252 μm ± 1 μm so that the exposed end face of the optical fiber can be accurately positioned in the glass capillary 1 and held in parallel. In order to smoothly guide and insert the optical fibers 5 and 6 into the insertion hole 2 having a substantially rectangular cross section on the rear end surface 1b of the glass capillary tube 1, the flare portion 3 having an opening diameter of about 1 mm and a substantially conical shape is provided. Is provided.
上記ガラス毛細管１を構成する材料としては、ホウ珪酸ガラスやリチウム−アルミナ−シリケイト系のガラスセラミックス等が使用可能である。材料の膨張係数は、保持する光ファイバが膨張係数の低い石英系の場合、１×１０-5／℃以下の低いものであることが好ましい。 As a material constituting the glass capillary tube 1, borosilicate glass, lithium-alumina-silicate glass ceramics, or the like can be used. The expansion coefficient of the material is preferably as low as 1 × 10 −5 / ° C. or lower when the optical fiber to be held is a quartz system having a low expansion coefficient.
上記のガラス毛細管１を製造する場合、加熱したガラス管の内面を真空にして金型に密着させて成形するシュリンク法により略長方形の孔を有する予備成形体を作製し、その予備成形体を加熱して所定の断面寸法・形状に制御しながら所望の高い寸法精度の挿入孔２を有する毛細管に延伸形成する。得られた長尺の毛細管を所定長さに切断し、その一端にケミカルエッチング法等によりフレア部３を設けてガラス毛細管１を作製する。 When producing a glass capillary tube 1 above, to produce a preform having a more substantially rectangular hole the inner surface of the heated glass tube to shrink method of molding is brought into close contact with the mold in the vacuum, the preform A capillary tube having an insertion hole 2 having a desired high dimensional accuracy is stretched and formed while being heated and controlled to have a predetermined cross-sectional size and shape. The obtained long capillary tube is cut into a predetermined length, and a flare portion 3 is provided at one end thereof by a chemical etching method or the like to produce a glass capillary tube 1.
以上のようにして得られたガラス毛細管１を用いて２本の光ファイバを並列に位置決めする例を示す。図２に示すように、ガラス毛細管１の挿入孔２にフレア部３から、２本のシングルモードファイバ５、６を挿入し、エポキシ樹脂接着剤９で固着し、端面１ａより突き出た光ファイバを除去した後、周知の方法により端面１ａを研磨してコネクタプラグ１０を作製した。 An example in which two optical fibers are positioned in parallel using the glass capillary tube 1 obtained as described above will be described. As shown in FIG. 2, two single mode fibers 5 and 6 are inserted from the flare 3 into the insertion hole 2 of the glass capillary tube 1 and fixed with an epoxy resin adhesive 9, and an optical fiber protruding from the end face 1a is inserted. After the removal, the end face 1a was polished by a known method to produce a connector plug 10.
次に、図３に示すように、同様にして２本の光ファイバ７、８をガラス毛細管１に固着してコネクタプラグ１１を作り、双方の突き合わされる端面に屈折率整合材１２を塗布し、ガラス毛細管１の外径より１μｍだけ大きな内径を有するガラススリーブ１３の内孔１３ａに両側から挿入し、押圧ばね等を用いた適当な手段により突き合わせた端面１ａ同士の接触が維持されるように保持した。光ファイバ５から７への信号光の強度をモニターしながら相互にコネクタプラグ１０、１１を回転させて接続の最適位置に設定したときの接続損失値は、光ファイバ５から７及び６から８ともに０．３ｄＢ以下であった。 Next, as shown in FIG. 3, two optical fibers 7 and 8 are fixed to the glass capillary tube 1 in the same manner to form a connector plug 11, and a refractive index matching material 12 is applied to both end faces. The glass caps 1 are inserted into the inner holes 13a of the glass sleeve 13 having an inner diameter 1 μm larger than the outer diameter of the glass capillaries 1 from both sides so that the contact between the end faces 1a abutted by appropriate means using a pressing spring or the like is maintained. Retained. The connection loss values when the connector plugs 10 and 11 are mutually rotated to set the optimum connection position while monitoring the intensity of the signal light from the optical fibers 5 to 7 are the optical fiber 5 to 7 and 6 to 8 respectively. It was 0.3 dB or less.
また、予備成形体を延伸形成し得られた長尺の毛細管を所定の長さに切断する前に、図２（Ａ）に示すように、直線状のマーカ１４を挿入孔２の中心軸と平行にガラス毛細管１の外表面に設け、その後切断してフレア部３を設けて一対のガラス毛細管１、１'を作成した。この一対のガラス毛細管１、１'を用いて前記と同様に２個のコネクタプラグ１０、１１を作製し、図３に示すように、ガラススリーブ１３に挿入した。光ファイバ５から７または６から８への光の接続損失を確認する代わりに、顕微鏡下で先に設けたマーカ１４の位置が、図３のように直線上になるようにコネクタプラグ１０、１１を回転させて位置決めした。このようにして得られた光ファイバ接続部の接続損失値は、光ファイバ５から７及び６から８ともに０．３ｄＢ以下となり、光信号をモニターしなくてもコネクタプラグ１０、１１を接続の最適位置に設定できることを確認した。 Further, before the long capillary tube obtained by stretching the preform is cut to a predetermined length, the linear marker 14 is connected to the central axis of the insertion hole 2 as shown in FIG. A pair of glass capillaries 1, 1 ′ were formed by providing them in parallel on the outer surface of the glass capillary 1 and then cutting to provide a flare portion 3. Using this pair of glass capillaries 1 and 1 ′, two connector plugs 10 and 11 were produced in the same manner as described above, and inserted into a glass sleeve 13 as shown in FIG. Instead of checking the connection loss of light from the optical fibers 5 to 7 or 6 to 8, the connector plugs 10 and 11 are arranged so that the position of the marker 14 previously provided under the microscope is on a straight line as shown in FIG. Was positioned by rotating. The connection loss values of the optical fiber connection portions obtained in this way are 0.3 dB or less for both the optical fibers 5 to 7 and 6 to 8, and the optimal connection of the connector plugs 10 and 11 without monitoring the optical signal Confirmed that the position can be set.
図４は、本発明に係る他の実施の形態を示すものである。断面が略長方形を呈し長辺の間隔Ｌ１が１２７μｍ±１μｍ、短辺の間隔Ｌ２が２５２μｍ±１μｍの挿入孔２を有し、その両端にフレア部３を設けたガラス毛細管１を準備する。そのガラス毛細管１の挿入孔２内に予め屈折率整合材１２を注入し、両端のフレア部３から劈開切断された端面を有する４本のシングルモード光ファイバ５、６、７、８のうち光ファイバ５と７、６と８がそれぞれ突き合うように挿入し、突き合わせた端面同士の接触が維持されるように保持した。余分な屈折率整合材１２は、光ファイバの挿入時に略長方形の挿入孔２とファイバとの隙間を通じて外部へ排出されるので、光ファイバの挿入に困難はなく、端面同士の接触界面に気泡が介在することもなかった。このとき、光ファイバ５から７及び６から８とも接続損失は０．３ｄＢ以下の良好な接続が達成された。本実施の形態の両端にフレア部３を設けたガラス毛細管１を用いれば、並列する２本の光ファイバ同士を挿入孔２内で対向させ突き合わせるだけで、各光ファイバの光軸を正確に整合でき、高い品位の接続が直ちに達成できることを確認した。 FIG. 4 shows another embodiment according to the present invention. A glass capillary tube 1 having an insertion hole 2 having a substantially rectangular cross section, a long side interval L1 of 127 μm ± 1 μm, and a short side interval L2 of 252 μm ± 1 μm and provided with flare portions 3 at both ends thereof is prepared. A refractive index matching material 12 is injected into the insertion hole 2 of the glass capillary tube 1 in advance, and light out of the four single mode optical fibers 5, 6, 7, 8 having end faces cleaved from the flare portions 3 at both ends. The fibers 5 and 7 and 6 and 8 were inserted so as to abut each other, and held so that the contact between the abutted end faces was maintained. The extra refractive index matching material 12 is discharged to the outside through the gap between the substantially rectangular insertion hole 2 and the fiber when the optical fiber is inserted, so there is no difficulty in inserting the optical fiber, and bubbles are formed at the contact interface between the end faces. There was no intervention. At this time, a good connection with a connection loss of 0.3 dB or less was achieved in both the optical fibers 5 to 7 and 6 to 8. If the glass capillary tube 1 having the flared portions 3 provided at both ends of the present embodiment is used, the optical axes of the optical fibers can be accurately set only by facing and abutting the two parallel optical fibers in the insertion hole 2. It was confirmed that a consistent and high quality connection could be achieved immediately.
以上のように、本実施の形態のガラス毛細管１は、２本の光ファイバが挿入孔２内で捻れや回転ずれを起こさないので、それらのコア部５ａの相対位置を保持でき、正確かつ容易に並列配置に位置決めができるものである。 As described above, the glass capillary tube 1 according to the present embodiment can maintain the relative position of the core portion 5a because the two optical fibers do not twist or rotate in the insertion hole 2, and is accurate and easy. Can be positioned in a parallel arrangement.
上記実施の形態では、２本の光ファイバ同士を接続する場合を示したが、これに限定されるものではなく、多芯光ファイバテープや多芯ケーブルなどに使用されている２本〜３２本程度の複数本の光ファイバを正確に並列配置できる挿入孔を有するガラス毛細管であればよい。 Although the case where two optical fibers are connected was shown in the said embodiment, it is not limited to this, 2 ~ 32 used for a multi-core optical fiber tape, a multi-core cable, etc. Any glass capillary tube having an insertion hole capable of accurately arranging a plurality of optical fibers in parallel can be used.
１ 毛細管
２ 挿入孔
３ フレア部
５、６、７、８ 光ファイバ
９ 接着剤
１０、１１ コネクタプラグ
１２ 屈折率整合剤
１３ スリーブ
１４ マーカ
DESCRIPTION OF SYMBOLS 1 Capillary tube 2 Insertion hole 3 Flare part 5, 6, 7, 8 Optical fiber 9 Adhesive agent 10, 11 Connector plug 12 Refractive index matching agent 13 Sleeve 14 Marker
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| Application Number | Priority Date | Filing Date | Title |
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| JP2005230368A JP4019428B2 (en) | 2005-08-09 | 2005-08-09 | Manufacturing method of glass capillary tube |
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| JP2005230368A JP4019428B2 (en) | 2005-08-09 | 2005-08-09 | Manufacturing method of glass capillary tube |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23329397A Division JPH1164672A (en) | 1997-08-13 | 1997-08-13 | Glass capillary tube |
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| JP2005326889A JP2005326889A (en) | 2005-11-24 |
| JP4019428B2 true JP4019428B2 (en) | 2007-12-12 |
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