JP4005175B2 - solenoid valve - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a thin electromagnetic valve that can be integrated, and more particularly to a thin electromagnetic valve having a thickness of 5 mm or less.
[0002]
[Prior art]
Conventionally, in a semiconductor manufacturing process or the like, it has been strongly demanded to integrate a solenoid valve for gas supply to make the entire gas supply unit compact.
Therefore, a unit in which a spool type solenoid valve is attached to the manifold is used. The spool type solenoid valve is the thinnest and currently has a thickness of about 10 mm.
[0003]
On the other hand, as a technique applicable to a thin electromagnetic valve, a technique described in a microfilm (Japanese Utility Model Application No. 60-51376) of Japanese Utility Model Application No. 58-142330 is known.
As shown in FIG. 9, the first valve seat 104 is formed at the first port 101, the second valve seat 105 is formed at the second port 103, and the third port 103 is interposed between the first port 101 and the second port 103. A port 102 is formed. Further, a valve member 109 is held so as to be swingable with the fulcrum 108 as a fulcrum. A first valve body 106 is fixed to a position corresponding to the first port 101 below the valve member 109, and the second port A second valve body 107 is fixed to a position corresponding to 103. A first permanent magnet 111 is fixed to the upper side of the valve member 109 so as to correspond to the first valve body 106 with the north pole facing upward, and the second permanent magnet 110 is located at a position corresponding to the second valve body 107. Fixed with the north pole facing upward.
In addition, an electromagnet 112, a first magnetic frame 113, and a second magnetic frame 114 are fixed to a body 115 that encloses the whole and creates a sealed state.
[0004]
Next, the operation of the electromagnetic valve will be described. The polarity of the magnetic flux generated by the first magnetic frame and the second magnetic frame is changed by changing the energization direction to the electromagnet. Since both the first permanent magnet 111 and the second permanent magnet 110 have an N-pole surface facing the electromagnet, either the first permanent magnet 111 or the second permanent magnet 110 can be changed by changing the energization direction to the electromagnet. One of them can be attracted to an electromagnet.
Thereby, this valve can be used as a three-way valve by using the third port 102 as an input port.
[0005]
[Problems to be solved by the invention]
However, the solenoid valve disclosed in Japanese Utility Model Application No. 58-142330 has the following problems.
That is, the valve member 109 is a member having apparent rigidity. If the valve member 109 is assumed to be an elastic body, when the permanent magnet is attracted to the magnetic frame, the force that presses the valve body at the other end to the valve seat cannot be transmitted.
On the other hand, the permanent magnet and the magnetic frame cannot be brought into contact with each other. This is because if the permanent magnet is brought into contact with or collided with the magnetic frame, the permanent magnet has a brittle nature and is likely to be damaged. Therefore, as shown in FIG. 9, a certain gap is formed between the permanent magnet and the magnetic frame.
[0006]
When the gap between the permanent magnet and the magnetic frame changes, the attractive force changes in a square, so a slight change in the gap results in a large change in the attractive force. However, since the permanent magnet side is a movable part, it is difficult to manufacture the gap between the permanent magnet and the magnetic frame within a certain tolerance in all products, and there is a problem that causes an increase in cost.
If the pressing force with which the valve body abuts against the valve seat is too weak, the fluid may leak.If the pressing force is too strong, the rubber valve body may sag due to repeated use, and the fluid may still flow. There was a problem of leakage.
[0007]
An object of the present invention is to provide a solenoid valve that is a thin solenoid valve of about 5 mm and does not cause leakage even if it is used repeatedly.
[0008]
[Means for Solving the Problems]
The solenoid valve of the present invention has the following configuration in order to realize a thin solenoid valve with high durability and reliability.
(1) (a) a first port, a second port, a third port is formed between the first port and the second port, a first valve seat is formed in the first port, and a second port is formed in the second port; A valve body formed with two valve seats, and (b) an elastic flat plate having a first valve body and a second valve body at both ends, and the first valve body is applied to the first valve seat with a predetermined force. A valve body elastic plate for contacting the second valve body with the second valve seat with a predetermined force; and (c) a fulcrum for holding the central portion of the valve body elastic plate for swinging movement. And an oscillating magnetic piece.
Here, the valve body elastic flat plate may not be a single continuous flat plate, but may have a pair of elastic flat plate ends attached to both sides of the rigid body.
[0009]
(2) In the solenoid valve described in (1), between the first coil and the second coil arranged in parallel to the first port and the second port, and between the first coil and the second coil And a permanent magnet fixed to the solenoid valve.
Here, since the first coil and the second coil can be connected in series, a permanent magnet may be disposed at an intermediate position of the single coil as a single coil in appearance.
Further, the wiring for the first coil and the second coil may be set as separate systems, and the swinging magnetic piece may be driven by energizing the first coil and the second coil separately. In this case, a permanent magnet is not necessarily required.
However, as in claim 2, if the first coil and the second coil are connected in series and a permanent magnet is disposed at an intermediate position, there is an advantage of reducing power consumption.
[0010]
(3) In the solenoid valve described in (2), (a) when the first coil and the second coil are energized in the forward direction, the magnetic flux generated in the first coil and the permanent magnet are generated. The magnetic flux strengthens in the same direction, the magnetic flux generated in the second coil and the magnetic flux generated in the permanent magnet weaken in the opposite direction, and the swinging magnetic piece is attracted to the first coil side, The second valve body abuts on the second valve seat, and (b) generated by the magnetic flux generated by the first coil and the permanent magnet when the first coil and the second coil are energized in opposite directions. And the magnetic flux generated in the second coil and the magnetic flux generated in the permanent magnet are strengthened in the same direction, and the swinging magnetic piece is attracted to the second coil side, The first valve body abuts on the first valve seat, and (c) the forward direction or When the reverse current is cut off, by the magnetic flux which the permanent magnet occurs, the fluctuating magnetic piece is equal to or continue to be sucked.
[0011]
(4) In the solenoid valve described in (2), when the oscillating magnetic piece is not equal in right and left around the fulcrum, and the first coil and the second coil are not energized, The swinging magnetic piece is attracted to the second coil side.
(5) In the electromagnetic valve described in (4), after a remanent killer is disposed at the end of the oscillating magnetic piece on the second coil side and the first coil and the second coil are energized, When energization is interrupted, the remanent killer changes from the state in which the second valve body is in contact with the second valve seat to the state in which the first valve body is in contact with the first valve seat. It is characterized by self-return. Here, the remanent killer means one that is manufactured using a non-magnetic material as a material to reduce the remanent magnetic flux.
[0012]
(6) In the solenoid valve described in (4) or (5), the second port is closed, the third port is an input port, the first port is an output port, and a normally closed type is used. It is characterized by that.
(7) In the solenoid valve described in (4) or (5), the first port is closed, the third port is an input port, the second port is an output port, and a normal open type It is characterized by that.
(8) In the solenoid valve described in (4) or (5), the first port is used as an input port, the third port is used as a common port, and the second port is used as an output port. It is characterized by that.
[0013]
The solenoid valve having the above configuration operates as follows.
When the third port is an input port and the second port and the first port are output ports, the magnetic flux generated in the first coil and the permanent magnet when energized in the forward direction of the first coil and the second coil. The generated magnetic flux strengthens in the same direction, the magnetic flux generated in the second coil and the magnetic flux generated in the permanent magnet weaken in the opposite direction, and the swinging magnetic piece is attracted to the first coil side, and the second valve The body presses and abuts on the second valve seat with a predetermined elastic force due to the deformation amount of the valve elastic plate, the first port communicates with the third port, and the fluid input from the third port receives the first port Is output from.
[0014]
Further, when the first coil and the second coil are energized in opposite directions, the magnetic flux generated in the first coil and the magnetic flux generated in the permanent magnet are weakened in the opposite direction, and the magnetic flux generated in the second coil; The magnetic flux generated by the permanent magnet strengthens in the same direction, the oscillating magnetic piece is attracted to the second coil side, and the first valve body has a predetermined elastic force due to the deformation amount of the valve body elastic plate on the first valve seat. The second port and the third port communicate with each other by pressing and abutting, and the fluid input from the third port is output from the second port.
Further, when energization in the forward or reverse direction is interrupted, the oscillating magnetic piece is continuously attracted by the magnetic flux generated by the permanent magnet, so that the fluid output state from the first port or the second port is self-maintained. Is done.
[0015]
Here, since the pressing force when each valve element comes into contact with the valve seat is determined by the elastic force of the valve element elastic plate, each valve element is always pressed with a predetermined force. This can reduce the risk of damage to the valve body. Further, since the swinging magnetic piece comes into contact with the magnetic frame and stops, and the pressing force of the valve body is determined by the elastic force due to the deformation of the elastic plate of the valve body, the pressing force can be set in almost the same range, The problem of fluid leakage and valve sag can be solved.
[0016]
In addition, for example, by attaching a remanent killer to the first coil side of the portion of the oscillating magnetic piece that contacts the magnetic frame, a non-magnetic portion is formed in the magnetic circuit, so that the magnetic flux generated by the permanent magnet is not affected. The magnetic flux that attracts the oscillating magnetic piece to the second coil side becomes larger than the magnetic flux that attracts the oscillating magnetic piece to the first coil side when the coil is turned off and the energization to the coil is interrupted. Is always attracted to the second coil side. That is, when energization is interrupted while the second valve body is in contact with the second valve seat, the first valve body is self-returned to the state in which the first valve body is in contact with the first valve seat.
[0017]
Thus, for example, by setting the second port in a closed state, the third port as an input port, and the first port as an output port, a normally closed electromagnetic valve is obtained.
Further, the first port is closed with a stopper, and the third port is used as an input port, and the second port is used as an output port, whereby a normally open type electromagnetic valve is obtained.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the solenoid valve 9 according to the present invention will be described in detail with reference to the drawings.
FIG. 1 shows a three-way valve type solenoid valve.
Based on FIG. 1, the structure of the solenoid valve 9 is demonstrated. The valve body 10 is formed with a first port 11, a second port 12, and a third port 13 at an intermediate position between the first port 11 and the second port 12 in a straight line. A convex first valve seat 17 having a central hole communicating with the first port 11 is formed on the inner surface of the valve body 10 of the first port 11, and the inner surface of the valve body 10 of the second port 12 is A convex second valve seat 18 having a central hole communicating with the second port 12 is formed.
[0019]
A first coil 22 and a second coil 23 are arranged in parallel to the first port 11, the second port 12, and the third port 13. A first core 25 made of a ferromagnetic material for constituting a magnetic circuit is fixed to the left of the first coil 22. A second core 26 made of a ferromagnetic material for constituting a magnetic circuit is fixed to the right of the second coil 23.
A permanent magnet 21 is fixed below the first coil 22 and the second coil 23. A wiring 28 is connected to the first coil 22 and the second coil 23.
[0020]
Here, since the first coil 22 and the second coil 23 have the same coil winding direction and are wired in series, the first coil 22 and the second coil 23 are energized in the forward direction. In addition, a magnetic flux is generated in the direction indicated by arrow C in FIG. Further, when energized in the direction opposite to the forward direction, a magnetic flux is generated in the direction indicated by the arrow D in FIG.
On the other hand, the two magnetic fluxes indicated by the arrows A and B in FIG.
The permanent magnet 21 is fixed with a bracket 27 having a swing center convex portion 27a. The swing center convex portion 27 a is formed at the center position of the bracket 27.
[0021]
The swing magnetic piece 20 has a swing center recess 20a. The swing center recess 20a is engaged with the swing center protrusion 27a, and the swinging magnetic piece 20 is swingably held with the swing center recess 20a as a fulcrum. That is, the oscillating magnetic piece 20 is a magnetic body, and is attracted to the permanent magnet 21 and held so as to oscillate.
On the lower surface of the bracket 27, the center portion of the valve body elastic flat plate 14 which is an elastic flat plate such as phosphor bronze is fixed by a fixing portion 19. A first valve body 15 made of an elastic member such as rubber is fixed to the left end portion of the lower surface of the valve body elastic plate 14. A second valve body 16 made of an elastic member such as rubber is fixed to the right end of the lower surface of the valve body elastic plate 14. In the state of FIG. 1, the first valve body 15 is in contact with the first valve seat 17.
The space in which the oscillating magnetic piece 20 and the valve elastic plate 14 oscillate is a valve body 10, side plates 24 on both sides, an upper plate 29, and a pair of cover plates (not shown) that are parallel to the drawing and cover the whole. It is sealed by.
[0022]
FIG. 3 shows the outer diameter of the solenoid valve 9 of the present embodiment. The length is 36 mm, the width is 24 mm, and the thickness is 5 mm. FIG. 4 is a perspective view showing the external appearance when a plurality of solenoid valves 9A, 9B, 9C, 9D are connected.
According to the solenoid valve 9 of the present embodiment, (a) the first port 11, the second port 12, and the third port 13 are formed between the first port 11 and the second port 12, and the first port 11, a valve body 10 having a first valve seat 17 formed on the second port 12 and a second valve seat 18 formed on the second port 12, and (b) an elastic flat plate having a first valve body 15 and a second valve at both ends. The valve body 16 includes a valve body 16, the first valve body 15 is brought into contact with the first valve seat 17 with a predetermined force, and the second valve body 16 is brought into contact with the second valve seat 18 with a predetermined force. Since it has an elastic flat plate 14 and (c) a rocking magnetic piece 20 having a rocking center recess 20a for holding and rocking the central portion of the valve body elastic flat plate 14, the thickness is 5 mm. A solenoid valve can be realized.
[0023]
Next, the operation of the electromagnetic valve having the above configuration will be described.
When the third port 13 is an input port and the second port 12 and the first port 11 are output ports, the first coil 22 is generated when the first coil 22 and the second coil 23 are energized in the forward direction. The magnetic flux C and the magnetic flux A generated by the permanent magnet 21 are strengthened in the same direction, and the magnetic flux C generated by the second coil 23 and the magnetic flux B generated by the permanent magnet 21 are weakened in the opposite direction. As shown in FIG. 2, the swinging magnetic piece 20 is attracted to the first coil 22 side, and the second valve body 16 is pressed and brought into contact with the second valve seat 18 with a predetermined elastic force due to the deformation amount of the valve body elastic plate 14. The first port 11 and the third port 13 communicate with each other, and the fluid input from the third port 13 is output from the first port 11.
When the forward energization is interrupted, the swinging magnetic piece 20 is continuously attracted by the magnetic flux A generated by the permanent magnet 21, so that the output state of the fluid from the first port is self-maintained.
[0024]
Further, when the first coil 22 and the second coil 23 are energized in the opposite directions, the magnetic flux D generated by the first coil 22 and the magnetic flux A generated by the permanent magnet 21 are weakened in the opposite direction, and the second coil The magnetic flux D generated at 23 and the magnetic flux B generated at the permanent magnet 21 are strengthened in the same direction, and the oscillating magnetic piece 20 is attracted to the second coil 23, and as shown in FIG. Is pressed and brought into contact with the first valve seat 17 with a predetermined elastic force due to the deformation amount of the valve body elastic plate 14, the second port 12 and the third port 13 communicate with each other, and the fluid input from the third port 13 is Output from the second port 12.
When the energization in the reverse direction is interrupted, the oscillating magnetic piece 20 is continuously attracted by the magnetic flux B generated by the permanent magnet 21, so that the output state of the fluid from the second port is maintained.
[0025]
Here, the pressing force when the first valve body 15 or the second valve body 16 comes into contact with the first valve seat 17 or the second valve seat 18 is determined by the elastic force due to the deformation of the valve body elastic plate 14. Therefore, each valve body is always pressed against the valve seat with a predetermined force, so there is no risk of fluid leakage. Further, the risk of damage to the valve body due to repeated loads received by the valve body can be reduced.
Further, since the oscillating magnetic piece 20 comes into contact with the first core 25 or the second core 26 and stops, the deformation amount of the valve body elastic flat plate 14 is always constant, and the first valve body 15 or the second valve body 16 is constant. Since the pressing force is determined by the elastic force due to the deformation of the valve body elastic plate 14, the pressing force can be set in the substantially same range, and the problems of fluid leakage and valve body sag can be solved.
[0026]
As described in detail above, according to the solenoid valve 9 of the present embodiment, (a) the first port 11, the second port 12, and the third port 13 between the first port 11 and the second port 12. A valve body 10 in which a first valve seat 17 is formed in the first port 11 and a second valve seat 18 is formed in the second port 12, and (b) an elastic flat plate having a first plate at both ends. A first valve body 15 and a second valve body 16; the first valve body 15 is brought into contact with the first valve seat 17 with a predetermined force; and the second valve body 16 is fixed to the second valve seat 18 with a predetermined And (c) a rocking magnetic piece 20 having a rocking center recess 20a for holding and rocking the central portion of the valve body elastic flat plate 14. Therefore, a self-holding type 5mm thick solenoid valve can be provided, and the force with which the valve body presses the valve seat can be kept constant. Leaktight, also can provide a durable 5mm solenoid valve.
[0027]
Next, a solenoid valve 9 according to a second embodiment of the present invention will be described with reference to FIGS. Since the configuration of the electromagnetic valve 9 of the second embodiment is almost the same as that of the first embodiment, the same portions are denoted by the same reference numerals, description thereof is omitted, and only different points will be described.
A stopper plug 30 is attached to the first port 11, and a remanent killer 32 is attached and fixed to the end of the oscillating magnetic piece 20 on the second coil 23 side. By attaching the residual magnetism killer 32, the magnetic flux generated by the permanent magnet 21 differs between the first core 25 and the second core 26.
That is, since the magnetic flux A generated in the first coil 22 is larger than the magnetic flux B generated in the second coil 23, the first coil 22 and the second coil 23 are not energized as shown in FIG. As described above, the oscillating magnetic piece 20 is always attracted to the first core 25.
[0028]
Since the first port 11 is closed by the stopper plug 30, the second port 12 is closed in a non-energized state, and the third port 13 and the second port 12 are normally closed type solenoid valves. Become.
That is, in a state where the first coil 22 and the second coil 23 are energized, the oscillating magnetic piece 20 is attracted to the second core 26 as in the first embodiment. In this state, as shown in FIG. 6, the fluid input from the third port 13 is output from the second port 12.
Next, when the energization is stopped, the oscillating magnetic piece 20 self-returns to the state shown in FIG.
[0029]
Next, a solenoid valve 9 according to a third embodiment of the present invention will be described with reference to FIGS. Since the configuration of the electromagnetic valve 9 of the third embodiment is almost the same as that of the first embodiment, the same portions are denoted by the same reference numerals, description thereof is omitted, and only different points will be described.
A stopper plug 30 is attached to the second port 12, and a remanent killer 32 is attached and fixed to the end of the oscillating magnetic piece 20 on the second coil 23 side. By attaching the residual magnetism killer 32, the magnetic flux generated by the permanent magnet 21 differs between the first core 25 and the second core 26.
That is, since the magnetic flux A generated in the first coil 22 is larger than the magnetic flux B generated in the second coil 23, the first coil 22 and the second coil 23 are not energized as shown in FIG. As described above, the oscillating magnetic piece 20 is always attracted to the first core 25.
[0030]
Since the second port 12 is closed by the stopper plug 30, the first port 11 is opened in a non-energized state, and the third port 13 and the first port 11 are normally open type solenoid valves. Become.
That is, in a state where the first coil 22 and the second coil 23 are energized, the oscillating magnetic piece 20 is attracted to the second core 26 as in the first embodiment. In this state, as shown in FIG. 8, the fluid input from the third port 13 does not output from the second port 12.
Next, when the energization is stopped, the oscillating magnetic piece 20 self-returns to the state shown in FIG. 5 and the fluid input from the third port 13 is output from the second port 12. It becomes a solenoid valve.
[0031]
Here, as a matter of course, it can be used as a self-return type three-way valve with the residual magnet killer 32 attached.
As described above, as described in the first to third embodiments, according to the electromagnetic valve 9 of the present invention, the first port 11 or the second port 12 is easily closed with a stopper, so that the normally closed electromagnetic can be easily performed. Since a valve and a normally open type solenoid valve can be realized, as shown in Fig. 4, any solenoid valve 9 can be changed to a three-way valve, a normally closed type solenoid by simply connecting a plurality of the same solenoid valves and attaching a stopper. Since it can be properly used as a valve or a normally open type solenoid valve, a compact solenoid valve system can be constructed.
[0032]
In addition, this invention is not limited to the said embodiment, In the range which does not deviate from the meaning of invention, it can also implement as follows.
For example, in this embodiment, a phosphor bronze flat plate is used as the oscillating magnetic piece 20, but a thin flat plate such as SUS may be used.
In this embodiment, an iron piece is used as the oscillating magnetic piece, but electromagnetic stainless steel or the like may be used.
In the present embodiment, one permanent magnet 21 is provided between the first coil 22 and the second coil 23. However, two permanent magnets 21 are arranged outside the first coil 22 and the second coil 23. But the same is true.
[0033]
【The invention's effect】
According to the solenoid valve of the present invention, (a) the first port, the second port, the third port is formed between the first port and the second port, and the first valve seat is formed in the first port. A valve body in which a second valve seat is formed at the second port; and (b) an elastic flat plate having a first valve body and a second valve body at both ends, the first valve body being the first valve A valve body elastic flat plate for contacting the seat with a predetermined force and the second valve body contacting the second valve seat with a predetermined force; and (c) a central portion of the valve body elastic flat plate is held and shaken. Since the oscillating magnetic piece is provided with a fulcrum for dynamic movement, the force with which the valve body presses the valve seat can be kept constant, so there is no fluid leakage and durability. A high 5 mm solenoid valve can be provided.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a state in which a solenoid valve 9 according to a first embodiment of the present invention is energized in the reverse direction.
FIG. 2 is a cross-sectional view showing a state where a solenoid valve 9 is energized in the forward direction.
FIG. 3 is a view showing an outer diameter dimension of a solenoid valve 9;
4 is a perspective view showing a state in which a plurality of solenoid valves 9 are connected. FIG.
FIG. 5 is a cross-sectional view showing a non-energized state of a normally closed electromagnetic valve according to a second embodiment.
FIG. 6 is a cross-sectional view showing an energized state of a normally closed electromagnetic valve.
FIG. 7 is a cross-sectional view showing a non-energized state of a normally open type solenoid valve according to a third embodiment.
FIG. 8 is a cross-sectional view showing an energized state of a normally open type solenoid valve.
FIG. 9 is a cross-sectional view showing a configuration of a conventional thin electromagnetic valve.
[Explanation of symbols]
10 valve body 11 first port 12 second port 13 third port 14 valve body elastic plate 15 first valve body 16 second valve body 17 first valve seat 18 second valve seat 20 swinging magnetic piece 21 permanent magnet 22 first 1 coil 23 2nd coil

Claims (5)

A first port, a second port, a third port is formed between the first port and the second port, a first valve seat is formed in the first port, and a second valve is formed in the second port. A valve body in which a seat is formed;
It is an elastic flat plate comprising a first valve body and a second valve body at both ends, the first valve body is brought into contact with the first valve seat with a predetermined force, and the second valve body is A valve body elastic flat plate to be brought into contact with the second valve seat with a predetermined force;
Holding the central portion of the valve body elastic plates possess a fluctuating magnetic piece having a fulcrum for swinging movement,
The left end portion of the oscillating magnetic piece comes into contact with the first core to bring the second valve body into contact with the second valve seat with a predetermined force, and the right end portion of the oscillating magnetic piece comes into contact with the second core. An electromagnetic valve , wherein the first valve body is brought into contact with the first valve seat with a predetermined force by contact . In the solenoid valve according to claim 1,
A first coil and a second coil disposed in parallel to the first port and the second port;
An electromagnetic valve comprising a permanent magnet fixed between the first coil and the second coil. In the solenoid valve according to claim 2,
When the first coil and the second coil are energized in the first direction, the magnetic flux generated by the first coil and the magnetic flux generated by the permanent magnet are strengthened in the same direction, and are generated by the second coil. And the magnetic flux generated by the permanent magnet are weakened in opposite directions, the swinging magnetic piece is attracted to the first coil side, the second valve body abuts on the second valve seat,
When the first coil and the second coil are energized in the direction opposite to the first direction, the magnetic flux generated in the first coil and the magnetic flux generated in the permanent magnet are weakened in opposite directions, The magnetic flux generated by the two coils and the magnetic flux generated by the permanent magnet are strengthened in the same direction, the swinging magnetic piece is attracted to the second coil side, and the first valve body is moved to the first valve seat. Abut,
The electromagnetic valve, wherein when the energization in the first direction or the direction opposite to the first direction is interrupted, the oscillating magnetic piece is continuously attracted by the magnetic flux generated by the permanent magnet. In the solenoid valve according to claim 3 ,
A remanent killer is disposed at the end of the oscillating magnetic piece on the second coil side,
After the first coil and the second coil are energized, when the energization is interrupted, the remanent killer is brought into contact with the second valve seat from the state where the second valve body is in contact with the first valve seat. An electromagnetic valve characterized by self-returning a valve body to a state in contact with the first valve seat. In the solenoid valve according to claim 4 ,
An electromagnetic valve characterized in that the first port is an input port, the third port is a common port, the second port is an output port, and is a three-way valve type.

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