JP4001270B2 - Ultrasonic levitation device, ultrasonic levitation method, ultrasonic suction device, and ultrasonic suction method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ultrasonic levitation device, an ultrasonic levitation method, an ultrasonic suction device, and an ultrasonic suction method.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, as a technique for levitating an object using ultrasonic waves, for example, a technique disclosed in JP-A-8-277033 is known. In this publication, an object conveying apparatus that vibrates a vibrating body of a predetermined size in a predetermined vibration mode by an ultrasonic excitation means including an oscillator, a vibrator, and a horn, and floats an object by a radiation pressure emitted from the vibrating body. Is described. In this object conveying apparatus, the radiation pressure generated from the vibrating body is set to be large at both ends in the width direction of the conveying path, thereby preventing the deviation of the object from the conveying path.
[0003]
Conventionally, a technique disclosed in Japanese Patent Laid-Open No. 5-15848 is known as a technique for sucking an object using ultrasonic waves. This publication describes a method of sucking a small object by a negative pressure generated in the vicinity of the generation end when a straight acoustic flow of ultrasonic waves is generated. When this method is implemented, a horn is connected to the ultrasonic transducer, and a tip having a smooth surface is attached to the tip of the horn. When ultrasonic vibration having a predetermined frequency is applied to the horn from the ultrasonic vibrator, a straight acoustic flow is emitted from the tip of the chip perpendicular to the smooth surface. Thereby, a negative pressure is generated in the vicinity of the smooth surface of the chip, and a small object such as a glass piece can be adsorbed to the tip of the chip in water or the like.
[0004]
These ultrasonic levitation techniques and ultrasonic suction techniques have fewer restrictions on the material of the object and simpler equipment than, for example, techniques using static electricity, magnetism, and negative gas pressure. It is expected to be put to practical use in a wide range of fields because it can be used.
[0005]
[Problems to be solved by the invention]
However, the above-described conventional ultrasonic levitation technique is intended to levitate an object in order to convey the object. For this reason, the levitation amount of the object in the conventional ultrasonic levitation technique is extremely small, about 0.1 mm at the upper limit. This amount of levitation is practically insufficient for applying the conventional ultrasonic levitation technique to applications other than conveyance. For example, when gripping an object using a manipulator, a handling device, or the like, even if the above-described ultrasonic levitation technique is applied to levitate an object to be gripped in advance, the obtained levitation amount is 0.1 mm or less. If so, restrictions on positioning of the gripping means and the shape of the gripping part that directly contacts the object become very strict. Further, although it has been confirmed that the ultrasonic suction method described in the above-mentioned Japanese Patent Application Laid-Open No. 5-15848 can exert a suction action in water, even if the same configuration is applied in the atmosphere, it is practically used. The required suction action cannot be obtained.
[0006]
Therefore, the present invention can float a floating object stably and reliably with a simple configuration, and can easily increase the amount of levitation, an ultrasonic levitation method, and a simple configuration. It is an object of the present invention to provide an ultrasonic suction apparatus and an ultrasonic suction method capable of stably and reliably sucking a suction object even in the atmosphere.
[0007]
[Means for Solving the Problems]
The first embodiment of the present invention relates to an ultrasonic levitation apparatus. The ultrasonic levitation apparatus includes ultrasonic generation means and a radiating member excited by the ultrasonic waves generated by the ultrasonic generation means. The inventors of the present invention have made extensive studies to increase the amount of levitation of this type of ultrasonic levitation device. As a result, in order to levitate the levitation object on the radiating member stably and reliably, the radiating member is provided with a flat radiating surface, and a concave portion recessed from the radiating surface at a substantially central portion of the radiating surface. It has been found that it is extremely effective to form the surface and to make the planar shape of the recess and the planar shape of the radiation surface substantially similar . Thus, by providing a recessed part in a radiation member, it becomes possible to greatly increase the amount of levitation of a levitating object compared with the past, and can stabilize a levitation state. Further, such a configuration can be realized extremely simply and at low cost without substantially increasing the cost of the levitation device.
[0008]
In this case, it is preferable that the surface facing the radiation surface of the floating object is flat.
[0009]
Moreover, it is preferable that the area of the recessed part in planar view is about 7.5% to 25% of the area of the radiation surface.
[0011]
Another aspect of the present invention relates to an ultrasonic levitation method in which a radiating member is excited by ultrasonic waves generated by an ultrasonic wave generating means, and a floating object is levitated on the radiating member. In this way, the radiating member, and a flat emitting surface, can contact to form a recess that is recessed from the emitting surface in a substantially central portion of the radiating surface, the planar shape of the recess, and the planar shape of the radiating surface It is almost similar . Thereby, it becomes possible to greatly increase the amount of levitation of the levitated object as compared with the conventional case, and the levitation state can be stabilized. Moreover, such a method can be implemented very simply and at low cost without substantially increasing the cost of the levitation device.
[0012]
In this case, it is preferable that the surface facing the radiation surface of the floating object is flat.
[0013]
Moreover, it is preferable to set the area of the recess in plan view to approximately 7.5% to 25% of the area of the radiation surface.
[0015]
The second embodiment of the present invention relates to an ultrasonic suction device. The ultrasonic suction device includes an ultrasonic wave generating unit and a radiation member excited by the ultrasonic wave generated by the ultrasonic wave generating unit. In addition to the ultrasonic levitation apparatus, the present inventors have further intensively studied to expand the application range of this type of ultrasonic suction apparatus. As a result, in order to suck a suction object having a convex portion to the radiating member stably and reliably, a flat radiating surface is provided on the radiating member, and the radiating surface is substantially recessed at the center of the radiating surface. Thus, it has been found that it is extremely effective to form a concave portion into which the convex portion of the suction object can enter , and that the planar shape of the concave portion and the planar shape of the radiation surface are substantially similar . As described above, by providing the radiating member with the concave portion, it is possible to stably and surely suck the suction object into the radiating member even in the atmosphere. Further, such a configuration can be realized extremely simply and at low cost without substantially increasing the cost of the suction device.
[0016]
In this case, it is preferable that the planar shape of the concave portion included in the radiation member is substantially similar to the planar shape of the convex portion included in the suction target.
[0017]
The ultrasonic suction device according to the present invention is preferably used in a state where the radiation surface of the radiation member is directed substantially vertically downward and the convex portion of the suction object is directed substantially vertically upward.
[0018]
Another embodiment of the present invention relates to an ultrasonic suction method in which a radiation member is excited by an ultrasonic wave generated by an ultrasonic wave generation unit, and a suction target having a convex portion is sucked into the radiation member. In this method, a flat radiating surface and a concave portion that is recessed from the radiating surface and into which the convex portion of the suction object can enter are formed in the radiating member. The concave portion is formed at a substantially central portion of the radiation surface, and the planar shape of the concave portion is substantially similar to the planar shape of the radiation surface. Thereby, even if it is in air | atmosphere, a suction target object can be attracted | sucked to a radiation member stably and reliably. Moreover, such a method can be implemented very easily and at low cost without substantially increasing the cost of the suction device.
[0019]
In this case, it is preferable to form the planar shape of the concave portion included in the radiating member so as to be substantially similar to the planar shape of the convex portion included in the suction target.
[0020]
Further, when the suction object is sucked by the radiating member, it is preferable that the radiation surface of the radiating member is directed substantially vertically downward and the convex portion of the suction object is directed substantially vertically upward.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of an ultrasonic levitation apparatus, an ultrasonic levitation method, an ultrasonic suction apparatus, and an ultrasonic suction method according to the present invention will be described in detail with reference to the drawings.
[0022]
[First Embodiment]
FIG. 1 is a schematic configuration diagram showing an ultrasonic levitation apparatus according to the first embodiment of the present invention. The ultrasonic levitation apparatus 1 shown in the figure includes an ultrasonic generation unit 2 and a radiation member 3. The ultrasonic generation unit 2 includes a vibrator, an ultrasonic oscillator, and the like, and generates ultrasonic vibration when supplied with power from the power source 4. The radiating member 3 is made of metal such as aluminum. The base end side of the radiating member 3 is attached to the ultrasonic wave generation unit 2, and the radiating surface 3 a is provided on the free end side thereof. When the radiating member 3 is excited by the ultrasonic wave generated by the ultrasonic wave generating unit 2, a radiating pressure for levitating the floating object is emitted from the radiating surface 3a. As shown in FIG. 1, in the present embodiment, the radiating member 3 is formed in a columnar shape having a diameter d1, and the radiating surface 3a is formed smoothly.
[0023]
Here, the present inventors have advanced earnestly research to increase the floating amount of this type of ultrasonic levitation device. As a result, it is extremely effective to increase the amount of levitation of the object to be levitated by forming a recess 3b that is recessed from the radiation surface 3a, for example, at a substantially central portion of the radiation surface 3a of the radiation member 3. I found. FIG. 2 and FIG. 3 show the experimental results that serve as the basis for the effectiveness of such a recess 3b.
[0024]
FIG. 2 is a chart showing the relationship between the diameter of the recess 3b and the amount of levitation when different values of current are applied to the ultrasonic wave generation unit 2 in order to generate ultrasonic waves. In this case, a disk-shaped aluminum plate having a diameter of 22 mm, a plate thickness of 0.25 mm, and a mass of about 0.27 g was used as a floating object. Moreover, the diameter d1 of the radiation member 3 (radiation surface 3a) was also set to 22 mm, similar to that of the floating object. The cross-sectional shape of the recess 3b was circular, and its diameter d2 was changed in 1 mm increments in the range of 6 mm to 15 mm, and the depth was 2 mm. Further, the current value was changed in increments of 0.2 A in the range of 0.2 A to 1.0 A. By setting the current value in such a range, the amplitude of the ultrasonic wave generated by the ultrasonic wave generating unit 2 changes proportionally in the range of 0.01 to 0.05 mm. In FIG. 2, plots P1, P2, P3, P4 and P5 are data in the case of current values of 0.2 A, 0.4 A, 0.6 A, 0.8 A and 1.0 A, respectively.
[0025]
On the other hand, FIG. 3 is a chart showing the relationship between the amount of levitation and the value of the current applied to the ultrasonic wave generation unit 2 in order to generate ultrasonic waves when there is no recess on the radiation surface. Also in this case, a disk-shaped aluminum plate having a diameter of 22 mm, a plate thickness of 0.25 mm, and a mass of about 0.27 g was used as a floating object. Moreover, the diameter d1 of the radiation member 3 (radiation surface 3a) was also set to 22 mm, similar to that of the floating object.
[0026]
As can be seen from the results shown in FIG. 3, when there is no recess in the radiating member 3 (when the radiating surface 3 a is completely flat), the ultrasonic generating unit 2 is approximately 0.2 A to 0.3 A. The levitation object is levitated only when the current is applied, and the levitation amount of the levitation object is as small as about 0.04 mm to 0.06 mm. On the other hand, if the recess 3b exists in the radiating member 3, as shown in FIG. 2, the levitating amount of the levitated object can be obtained by appropriately combining the current value (amplitude of ultrasonic waves) and the size of the recess. Can be significantly increased to about 1 mm as compared with the prior art. In the experiment related to FIG. 2, when the diameter of the concave portion 3b is in the range of about 10 mm to 12 mm, the floating state of the floating object becomes unstable, but the peak of the floating amount exists within this range. There is a possibility. Moreover, when the diameter of the recessed part 3b exceeded about 12 mm, although the levitation | floating object floated, the amount of levitation did not change so much with the conventional case.
[0027]
In any case, as described above, by providing the radiating member 3 constituting the ultrasonic levitation device 1 with the concave portion 3b, it becomes possible to significantly increase the levitation amount of the levitation object as compared with the prior art. The state can be stabilized. Further, such a configuration can be realized extremely simply and at low cost without substantially increasing the cost of the levitation device.
[0028]
Further, from the results shown in FIG. 2, it is understood that when a concave portion having a diameter of about 6 mm to 10 mm is provided for a disk-like levitation object having a diameter of 22 mm, the levitation amount of the levitation object is increased. From these results, if the relationship between the diameter of the recess and the diameter of the radiation surface is converted to the relationship between the areas of both, the cross-sectional area of the recess is approximately 7.5% to 25% of the area of the radiation surface. Thus, it can be seen that good practical results can be obtained.
[0029]
Furthermore, in order to stabilize the levitation of the levitation object and increase the levitation amount, it is reported in IEICE Technical Report US 96-74 (December 1996) "Theoretical study on levitation force of short-range acoustic waves" As described above, it is preferable that the surface of the object to be levitated facing the radiation surface 3a of the radiation member 3 is flat (smooth). Furthermore, it is preferable that the cross-sectional shape of the recess 3b is substantially similar to the cross-sectional shape of the radiation surface 3a (radiation member 3) as in this embodiment. This is because it is considered that an air layer flow suitable for levitation is formed by the radiation pressure from the radiation surface 3a.
[0030]
In addition, the present inventors further considered the relationship between the depth of the recess 3b of the radiating member 3 and the floating amount of the floating object. FIG. 4 shows the result of the consideration. In the experiment related to FIG. 4, the above-described cylindrical radiation member 3 (diameter 22 mm) is provided with a concave section 3b having a circular section of 7 mm and the depth of the concave section 3b is changed to 1.5 mm, 2 mm, and 4 mm. I let you. And the levitation | floating amount of the levitation | floating target object (the same thing as the case of FIG. 2) was measured, applying an electric current over the range of 0.2A-2.0A at a 0.2A step with respect to the ultrasonic generation unit 2. . In FIG. 4, plots p1, p2, and p3 are data when the diameter of the recess 3b is 1.5 mm, 2 mm, and 4 mm, respectively. In the case of a diameter of 4 mm, the current value range was set to 0.2 A to 1.0 A.
[0031]
From the results shown in FIG. 4, it can be seen that the levitation amount of the levitation object does not substantially depend on the depth of the recess. From this point, it can be seen that if the radiating member 3 is formed with a very shallow recess 3b, the amount of levitation of the levitated object is effectively increased. Therefore, the increase in the cost of the levitation device by providing the radiating member 3 with the recess 3b can be minimized.
[0032]
[Second Embodiment]
FIG. 5 is a schematic configuration diagram showing an ultrasonic suction device according to the second embodiment of the present invention. The ultrasonic suction device 11 shown in the figure is for sucking and holding a suction target 15 having a convex portion 15a as shown in FIG. 6 in a non-contact manner. Similarly to the above-described ultrasonic levitation apparatus 1, the ultrasonic suction apparatus 11 also includes an ultrasonic generation unit 12 and a radiation member 13. The ultrasonic generation unit 12 includes a vibrator, an ultrasonic oscillator, and the like, and generates ultrasonic vibration when supplied with power from the power source 14.
[0033]
The radiating member 13 is made of metal such as aluminum. Further, the base end side of the radiation member 13 is attached to the ultrasonic wave generation unit 12, and a radiation surface 13a is provided on the free end side thereof. When the radiation member 13 is excited by the ultrasonic wave generation unit 12, a negative pressure for sucking the suction object is formed in the vicinity of the radiation surface 13a. As shown in FIG. 5, also in the present embodiment, the radiating member 13 is formed in a columnar shape having a diameter d1 ′, and the radiating surface 13a is formed smoothly.
[0034]
Here, the present inventors have advanced earnestly research to expand the application range of this type of ultrasonic suction device. As a result, in order to suck the suction object 15 having the convex portion 15a as shown in FIG. 6 into the radiation member 13, the radiation surface 13a is provided with, for example, a substantially central portion of the flat radiation surface 13a. It has been found that it is extremely effective to form a recess 13b into which the protrusion 15a of the suction object 15 can enter.
[0035]
That is, the above-described ultrasonic suction device 11 can suck the suction target 15 in a practically good state under the following conditions. In this case, a disk-shaped aluminum plate having a convex portion 15a having a diameter of 22 mm, a plate thickness of 0.25 mm, and a mass of about 0.27 g was used as a floating object. The convex portion 15a was formed in a cylindrical shape having a diameter of 3.5 mm and a height of 1 mm. Further, the diameter d1 ′ of the radiating member 13 (radiating surface 13a) was also set to 22 mm as in the case of the floating object 15. The cross-sectional shape of the recess 13b was circular, its diameter d2 ′ was 10 mm, 11 mm, and 12 mm, and its depth was 2 mm.
[0036]
Under the above-mentioned conditions, as shown in FIG. 5, in the atmosphere, the radiation surface 13a of the radiation member 13 is directed substantially vertically downward, and the convex portion 15b of the suction object 15 is directed substantially vertically upward. Then, a current of 0.8 A was applied to the ultrasonic wave generation unit 12 to generate an ultrasonic wave having an amplitude of 0.04 mm. In this case, the suction object 15 was almost stationary without contact with the radiation member 13 in a stable state regardless of whether the diameter of the recess 13b was 10 mm, 11 mm, or 12 mm.
[0037]
As described above, if the radiating member 13 of the ultrasonic suction device 11 is provided with the recess 13b, the suction object 15 can be sucked into the radiating member 13 stably and reliably even in the atmosphere. Can be stabilized. Further, such a configuration can be realized extremely simply and at low cost without substantially increasing the cost of the suction device.
[0038]
Further, as in the case of the ultrasonic levitation apparatus 1 described above, the cross-sectional shape of the recess 13b included in the radiation member 13 and the suction target 15 are included in order to make the flow of the air layer around the radiation surface 13a appropriate. It is preferable that the cross-sectional shape of the protruding portion 15a is substantially similar. In the ultrasonic suction device 11, as shown in FIG. 5, the radiation surface 13a of the radiation member 13 is directed substantially vertically downward, and the convex portion 15a of the suction object 15 is directed substantially vertically upward. However, the present invention is not limited to this. That is, the ultrasonic suction device 11 can be used in an arbitrary state such as a state where the radiation surface 13a of the radiation member 13 faces substantially vertically upward.
[0039]
【The invention's effect】
As described above, in the first embodiment of the present invention, when a levitated object is levitated using ultrasonic waves, the radiation member excited by the ultrasonic waves generated by the ultrasonic wave generating means is flattened. A radiation surface and a recess that is recessed from the radiation surface are provided. Thereby, it becomes possible to levitate the levitated object stably and reliably with a simple configuration and easily increase the levitation amount.
[0040]
In the second embodiment of the present invention, when a suction object is sucked using ultrasonic waves, a flat radiating surface is provided on the radiating member excited by the ultrasonic waves generated by the ultrasonic wave generating means. It is recessed from the radiation surface and is provided with a recess into which the projection of the suction object can enter. Thereby, it becomes possible to suck the suction object stably and reliably even in the air with a simple configuration.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing an ultrasonic levitation apparatus according to the present invention.
FIG. 2 is a chart showing the relationship between the diameter of a recess and the amount of levitation when different values of current are applied to an ultrasonic wave generation unit.
FIG. 3 is a chart showing the relationship between the amount of levitation and the value of current applied to the ultrasonic wave generation unit when there is no recess on the radiation surface.
FIG. 4 is a chart showing the relationship between the amount of levitation and the value of current applied to the ultrasonic wave generation unit when the depth of the recess is changed.
FIG. 5 is a schematic configuration diagram showing an ultrasonic suction apparatus according to the present invention.
6 is a schematic configuration diagram showing an example of a suction object that can be sucked by the ultrasonic suction device of FIG. 5. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Ultrasonic levitation apparatus 2,12 Ultrasonic wave generation unit 3,13 Radiation member 3a, 13a Radiation surface 3b, 13b Concavity 11 Ultrasonic suction apparatus 15 Suction object 15a Convex part

Claims (12)

An ultrasonic levitation apparatus comprising an ultrasonic wave generation means and a radiating member excited by ultrasonic waves generated by the ultrasonic wave generation means, and capable of levitating a levitating object on the radiating member,
The radiation member has a flat radiation surface and a recess recessed from the radiation surface ;
The recess is provided at a substantially central portion of the radiation surface;
The ultrasonic levitation apparatus , wherein the planar shape of the recess and the planar shape of the radiation surface are substantially similar .   The ultrasonic levitation apparatus according to claim 1, wherein a surface of the levitation object facing the radiation surface is flat. The ultrasonic levitation apparatus according to claim 1 or 2, wherein an area of the concave portion in a plan view is approximately 7.5% to 25% of an area of the radiation surface. An ultrasonic levitation method in which a radiating member is excited by ultrasonic waves generated by an ultrasonic wave generating means, and a floating object is levitated on the radiating member,
Wherein the radiating member, and a flat emitting surface, can contact to form a recess that is recessed from the radiating surface,
The recess is provided at a substantially central portion of the radiation surface;
The ultrasonic levitation method , wherein the planar shape of the recess and the planar shape of the radiation surface are substantially similar . The ultrasonic levitation method according to claim 4 , wherein a surface of the levitating object facing the radiation surface is flat. The ultrasonic levitation method according to claim 4 or 5 , wherein an area of the concave portion in plan view is set to approximately 7.5% to 25% of an area of the radiation surface. An ultrasonic suction device that includes an ultrasonic wave generation unit and a radiation member excited by ultrasonic waves generated by the ultrasonic wave generation unit, and is capable of sucking a suction object having a convex portion into the radiation member. And
The radiating member has a flat radiating surface and a recessed portion that is recessed from the radiating surface and into which the convex portion of the suction object can enter ,
The recess is provided at a substantially central portion of the radiation surface;
The ultrasonic suction device , wherein the planar shape of the recess and the planar shape of the radiation surface are substantially similar . Wherein a planar shape of the recess contained in the radioactive member, ultrasonic aspirator according to claim 7, characterized in that in plan shape Togaryaku similar of the convex portion included in the suction object. The super radiating member according to claim 7 or 8 , wherein the radiating surface of the radiating member is directed substantially vertically downward, and the convex portion of the suction object is directed substantially vertically upward. Sonic suction device. An ultrasonic suction method in which a radiation member is excited by ultrasonic waves generated by an ultrasonic wave generation means, and a suction object having a convex portion is sucked into the radiation member,
Said radiating member, a flat emitting surface, is recessed than the emitting surface, can contact to form a recess in which the protrusion of the suction object can enter,
The recess is provided at a substantially central portion of the radiation surface;
The ultrasonic suction method , wherein the planar shape of the recess and the planar shape of the radiation surface are substantially similar . The ultrasonic suction according to claim 10 , wherein a planar shape of the concave portion included in the radiation member is formed to be substantially similar to a planar shape of the convex portion included in the suction object. Method. The suction object is sucked into the radiation member, the radiation surface of the radiation member is directed substantially vertically downward, and the convex portion of the suction object is directed substantially vertically upward. The ultrasonic suction method according to 10 or 11 .

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