JP3993551B2 - Magnetic head, magnetic head assembly, manufacturing method thereof, and magnetic disk apparatus using the same - Google Patents

Description

  The present invention relates to a magnetic head, a magnetic head assembly, a manufacturing method thereof, and a magnetic disk apparatus using the same, and more particularly to a magnetic head and a magnetic head assembly suitable for writing and reading magnetic recording on a hard disk and a manufacturing method thereof. And a magnetic disk device using them.

  As is well known, a hard disk device has a magnetic disk disk as a magnetic recording medium, a magnetic head for writing and reading a magnetic recording signal on the disk, and accesses the magnetic head to a predetermined position on the disk. Main components include a servo mechanism for signal processing and an electric circuit for signal processing.

  One of the most important items of the performance of the hard disk drive is the surface recording density. As a magnetic head used for improving the recording density, a recording element for writing a magnetic recording signal to a recording medium on a disk, and a recording medium In general, a head provided with a reproducing element for reading a magnetic recording from a magnetic signal and converting a magnetic signal into an electric signal is used. A high-performance magnetic head having a structure in which a magnetoresistive effect element GMR (Giant Magneto-Resistive) sensor or TMR (Tunneling Magneto-Resistive) sensor is laminated is used as a reproducing element.

A general configuration of a conventional magnetic head will be described below.
An insulating film such as alumina is laid on a hard substrate such as alumina titanium carbide, a lower magnetic shield of the GMR sensor is formed on a predetermined portion of the insulating film, and an insulating film and a GMR sensor are formed on the lower magnetic shield. A GMR laminated film and an insulating film are sequentially laminated, and an upper magnetic shield is formed thereon.

  Such an upper magnetic shield film is also commonly used as a lower magnetic core of a recording head. A non-magnetic layer for shield separation is formed on the upper magnetic shield film, and a lower magnetic core of the recording portion and then a protective film such as alumina are deposited thereon, and then polishing processing such as CMP (Chemical Mechanical Polishing) is performed. The lower magnetic core and the protective film are planarized so that they are on the same plane.

  Next, a magnetic gap and a track portion magnetic body are formed, and the track width is adjusted by trimming. Further, a coil lower insulating layer, a coil, a coil upper insulating layer, and an upper magnetic core for driving the recording head are formed.

  Finally, the whole is covered with a protective film such as alumina. Such a magnetic head is manufactured by combining a thin film forming technique such as sputtering and various film forming techniques such as electroplating, and a photolithography technique is generally used to form various films at predetermined positions.

  A large number of such magnetic heads are simultaneously formed on the same substrate, and then the individual heads are separated from the substrate, and the air bearing surface is subjected to processing such as polishing to complete the magnetic head. Subsequently, the magnetic head is attached to the wiring flexible substrate and the suspension, thereby completing the magnetic head assembly.

  The GMR sensor or TMR sensor, the upper and lower magnetic shields, and the upper and lower magnetic cores use an aqueous solution used in the process, water containing dissolved oxygen and dissolved carbon dioxide, metals and alloys that easily corrode in the atmosphere, and these corrosions. Prevention has been an important issue for improving the yield and reliability of magnetic heads.

  Generally, in order to prevent corrosion of the GMR sensor or TMR sensor, upper and lower magnetic shields, and upper and lower magnetic cores, a protective film is formed on the air bearing surface, the chemical solution used in the process, the atmosphere in the manufacturing site and in the drive device Control is taking place.

  However, it is considered that corrosion protection is insufficient by itself, and in order to prevent corrosion when immersed in chemicals and water in the process, especially when there is no protective film or there are defects such as pinholes in the protective film, record It is more reliable to prepare a metal or alloy having a lower natural potential in an aqueous solution than the metal or alloy constituting the element and the reproducing element, and attach them to the GMR sensor or TMR sensor, the upper and lower magnetic shields, and the upper and lower magnetic cores. .

  As described above, the natural potential in the aqueous solution is lower than that of the metal or alloy constituting the recording element and the reproducing element, and when it is electrically connected to another metal or alloy, it itself becomes an anode for the purpose of anticorrosion. The metal or alloy used will be called the sacrificial anode.

  Examples of attaching the sacrificial anode to the air bearing surface or other surface of the magnetic head are described in, for example, Patent Document 1, Patent Document 2, Patent Document 3, Patent Document 4, and Patent Document 5.

Japanese Patent Laid-Open No. 11-39616

Japanese Patent Laid-Open No. 2001-93115 JP 2001-312806 Japanese Patent Laid-Open No. 2001-331908 JP 2001-344708

  As described above, when the sacrificial anode is attached to the air bearing surface or other surface of the magnetic head, there are the following problems. The sacrificial anode dissolves in the chemical solution and water, and the surface becomes rough or becomes porous. Alternatively, a brittle oxide film or hydroxide film is formed on the surface. That is, the sacrificial anode becomes a foreign matter source or a corrosion source.

  In particular, when it is attached to the air bearing surface, a hole is formed in the sacrificial anode portion or irregularities are formed, and the smoothness of the air bearing surface is lost. In a state where the disk rotates at a high speed and an air flow is generated, or in a state where the arm frequently reciprocates, foreign matters are easily separated and scattered. In corrosive atmospheres, corrosion may recur or progress.

  On the other hand, the sacrificial anode itself needs to remain even after being immersed in a chemical solution and water in the process in order to maintain the anticorrosion effect, and therefore cannot be removed or coated during the process.

  It is an object of the present invention to provide a novel magnetic head for solving these problems, a manufacturing process thereof, and a high-performance magnetic disk apparatus using the magnetic head.

  In order to achieve the above object, in the present invention, as a means for preventing the sacrificial anode from becoming a foreign matter generation source or a corrosion generation source and improving the yield and reliability of the magnetic disk device, the magnetic head manufacturing process In this stage, the surface of the sacrificial anode is covered with a protective film when the process of immersing in the chemical solution and water is completed, or the sacrificial anode is coated with this adhesive when the magnetic head is attached to the wiring board via the adhesive. It is characterized by having a covered structure.

  The recording element of the magnetic head includes a coil and a magnetic core, and the portion exposed to the air bearing surface is the magnetic core. This is mainly composed of a magnetic metal or magnetic alloy containing at least one of Fe, Co, and Ni.

  The reproducing element includes a magnetoresistive element such as GMR or TMR and a magnetic shield, and both are exposed on the air bearing surface. The magnetoresistive effect element is composed of a plurality of materials. As the corrosive element, a metal or alloy containing at least one of Co, Fe, and Ni, Cu, Al, and the like are used.

  The magnetic shield is mainly made of a magnetic metal or magnetic alloy containing at least one of Fe and Ni. The magnetoresistive effect element is mainly produced by a sputtering process, and the magnetic shield and recording element are produced by a sputtering process and a plating process, respectively.

  On the other hand, as the sacrificial anode used in the magnetic head of the present invention, for example, Mg, Zn, Al, Mn, etc. can be used as disclosed in paragraph (0012) of Patent Document 3. Specifically, the metal or alloy constituting the recording element and the reproducing element and the sacrificial anode material candidate are immersed in a chemical solution whose corrosiveness is to be investigated, and the respective polarization characteristics are examined to constitute the recording element and the reproducing element. A material that has a lower natural potential than the metal or alloy to be processed and does not passivate in the chemical solution is a candidate for a sacrificial anode.

  The sacrificial anode is formed by sputtering or plating using a thin film process. Further, it can be formed by adhesion, welding, paste application in which fine particles are dispersed, or the like. For the connection between the sacrificial anode and the metal or alloy constituting the recording element or reproducing element, wire bonding, ball bonding, or wedge bonding may be used.

  The sacrificial anode is installed so as to be exposed on the surface of the magnetic head, and the installation location may be the air bearing surface, but is preferably installed on the surface opposite to the air bearing surface or on the side surface adjacent to the air bearing surface.

  During the manufacturing process, when the magnetic head is immersed in a chemical solution for etching or cleaning, the recording element and reproducing element exposed on the air bearing surface become the cathode, the sacrificial anode becomes the anode, and the recording element and reproducing element are protected against corrosion. The

  When a process using a chemical solution or water having a high risk of corrosion during the processing step and the assembly step is completed, the surface of the sacrificial anode is covered or the sacrificial anode itself is removed.

  Examples of the material for covering the surface of the sacrificial anode include organic resins such as epoxy resins and polyimide resins, which are applied with a microsyringe, and are naturally cured, thermally cured, and photocured. Other coating materials include, for example, metal oxides such as alumina, silica, titania, tantalum oxide, molybdenum oxide, tungsten oxide, and chromium oxide, or metal nitrides such as aluminum nitride, silicon nitride, and tantalum nitride. Those that can be easily formed by a sputtering process; further, Au, Ag, Pt, Pd, Cr, or an alloy containing them as a main component that can be easily formed by sputtering or plating.

  On the other hand, methods for removing the sacrificial anode include mechanical peeling and scraping, peeling by ultrasonic vibration, and peeling by laser energy.

  By covering or removing the sacrificial anode as described above, the sacrificial anode is prevented from becoming a foreign matter source and a corrosion source. In addition, corrosion in the wet process can be prevented, and the yield and reliability thereafter can be improved.

  The present invention prevents a magnetic resistance effect element, a magnetic shield, and a magnetic core of a magnetic head from corroding during a wet process, and prevents a sacrificial anode for corrosion prevention from becoming a foreign matter generation source and a corrosion generation source. The structure and the manufacturing method thereof are provided. By using the magnetic head of the present invention and the manufacturing method thereof, a magnetic disk device with extremely high yield and high reliability can be provided at low cost.

The characteristics of the typical configuration example of the present invention are as follows.
That is, the magnetic head according to the configuration example of the first invention has a recording element and a reproducing element, and has a lower natural potential in an aqueous solution than the metal or alloy constituting the recording element and the reproducing element. Alternatively, the magnetic head has a sacrificial anode that is electrically connected to an alloy, and the sacrificial electrode is covered with a protective film.

  In the magnetic head according to the configuration example of the second invention, the sacrificial anode is Mg, Zn, Al, Mn, Fe, Co, Ni, Cu or an alloy containing them, and the protective film is made of epoxy resin or polyimide resin. Organic resin containing: at least one metal oxide selected from the group of alumina, silica, titania, tantalum oxide, molybdenum oxide, tungsten oxide and chromium oxide; at least one selected from the group of aluminum nitride, silicon nitride and tantalum nitride And a metal nitride selected from the group consisting of Au, Ag, Pt, Pd, Cr or alloys containing them as a main component.

  A method of manufacturing a magnetic head according to a configuration example of the third invention includes a recording element and a reproducing element, and has a lower natural potential in an aqueous solution than the metal or alloy constituting the recording element and the reproducing element. A method of manufacturing a magnetic head having a sacrificial anode that is electrically connected to a metal or an alloy, wherein the sacrificial anode is immersed in at least an etching solution and a cleaning solution in a series of magnetic head processing steps. In the subsequent assembly process, the surface of the sacrificial anode is selected from the group consisting of an organic resin containing an epoxy resin or a polyimide resin; alumina, silica, titania, tantalum oxide, molybdenum oxide, tungsten oxide, and chromium oxide. At least one metal oxide; at least one selected from the group of aluminum nitride, silicon nitride and tantalum nitride Metal nitrides; and Au, for Ag, Pt, Pd, characterized in that the coating with a protective layer selected from the group of alloys with Cr or main component thereof.

  According to a fourth aspect of the present invention, there is provided a method of manufacturing a magnetic head, wherein the sacrificial anode is exposed to the liquid during at least the etching liquid and the cleaning liquid in the series of magnetic head processing steps, and during the subsequent assembly process, The sacrificial anode is removed.

  A magnetic head assembly as a configuration example of a fifth invention is a magnetic head assembly in which a surface opposite to the air bearing surface of a magnetic head slider is connected to a suspension via a wiring flexible substrate, and the magnetic head slider includes: A sacrificial electrode electrically connected to the recording element and the reproducing element constituting the magnetic head is disposed on the connection facing surface of the wiring flexible substrate on the side opposite to the air bearing surface, and the wiring flexible substrate is interposed therebetween. When the magnetic head slider is connected, the surface of the sacrificial electrode is substantially covered with the flexible wiring substrate.

  In the magnetic head assembly according to the configuration example of the sixth invention, when the magnetic head slider is connected to the suspension via the wiring flexible substrate, the connection between the flexible substrate and the magnetic head slider is made of epoxy resin or polyimide resin. And at least the surface of the sacrificial electrode is coated with the organic resin.

  According to a seventh aspect of the present invention, there is provided a magnetic disk device comprising at least a magnetic disk, a magnetic disk rotational drive means, a magnetic head assembly, and a magnetic head assembly drive means, wherein the magnetic head assembly comprises: The magnetic head assembly shown in the first and second configuration examples is mounted, or the magnetic head assembly shown in the fifth and sixth configuration examples is used.

  Embodiments of the present invention will be specifically described below with reference to the drawings.

<Example 1>
A first embodiment of the present invention will be described in detail with reference to FIGS.
The magnetoresistive effect element 102, the magnetic shields 101 and 103, the magnetic cores 104 and 105, the coil 106, the terminal 109, the insulating layer 110, and the like are formed by known processes and methods. The connection portion to the sacrificial anode 115 is produced as follows.

  A conductor 114 is formed between the conducting wire 108 that connects between the lead electrode 107 of the magnetoresistive effect element 102 and the Au terminal 109. The sacrificial anode 115 is embedded in the insulating film 110 with its surface exposed so that its surface is flush with the slider substrate 111.

  The conductor 114 has such a length and shape as to be exposed in a cross section opposite to the air bearing surface when the magnetic head slider is cut out from the wafer. The material is preferably Au from the viewpoint of corrosion resistance, but may be FeNi alloy, Cu, or a combination thereof.

  The conductor 114 may be formed simultaneously with the production of the magnetic shields 101 and 103, the magnetic cores 104 and 105, and the coil 106, or may be formed before or after these processes. A series of processes of sputtering, photolithography, plating, ion milling or etching, and resist removal are used.

  Of course, the conductor 114 may be formed from the magnetic core constituting the recording element and connected to the sacrificial anode 115 in the same manner as described above.

  After the element formation on the wafer is completed, a block (commonly called a bar) including a plurality of magnetic heads is cut out. When the bar is cut out, the conductor 114 is exposed in the cross section. A sacrificial anode 115 is formed on the portion by a method such as sputtering, plating, colloid coating, or fine particle spraying. In the case of sputtering, the film may be formed over the entire plane including the exposed conductor 114, or may be locally formed using a photoresist so as to include the conductor 114. However, it should not adhere to the air bearing surface or the surface with connection terminals. The mass and film thickness of the sacrificial anode 115 to be deposited are estimated from the dissolution rate of the sacrificial anode in the chemical solution, but are set to 2 to 3 μm as an example.

  As the material of the sacrificial anode 115, a metal or alloy having a lower natural potential in an aqueous solution than the metal or alloy constituting the recording element and reproducing element is selected. Further, a solution in which the sacrificial anode 115 itself is not passivated is selected in this aqueous solution. Natural potential and polarization characteristics vary depending on the type of chemical solution. As an example, Mg, Zn, Al, and alloys containing them are promising candidates.

  The area (exposed surface) of the sacrificial anode is estimated as follows. For example, the magnetic film B of the recording element in the cleaning liquid A and the polarization characteristics of Al, Zn, and Mg are schematically shown in FIG. The larger the area of the sacrificial anode 115, the lower the potential shown when the sacrificial anode is connected to the metal or alloy constituting the recording element and the reproducing element, and the metal or alloy constituting the recording element and the reproducing element is dissolved. It is held at a potential that is difficult to resist and is anticorrosive.

  As an example, in FIG. 3, when the sacrificial anode is 10 times larger (point B in the figure) than when the area of the metal or alloy constituting the recording element and reproducing element and the sacrificial anode is the same (point A in the figure). In this case, since the potential at the time of connection becomes lower, the potential is more easily dissolved, and the recording element and the reproducing element are prevented from being corroded. However, if the potential shown when the metal or alloy constituting the recording element and the reproducing element is connected to the sacrificial anode is lowered and hydrogen is generated, the hydrogen embrittlement of the metal or alloy, the peeling of the sacrificial anode, etc. Problems arise. In that case, a material or an area ratio that shows a potential at which hydrogen is not generated is selected.

  After sacrificing the region including the exposed conductor 114 by ion milling, mechanical polishing, or the like, the sacrificial anode may be formed therein. Alternatively, in the element process, the sacrificial anode material may be formed by sputtering or the like when the element is formed, and the sacrificial anode material may be exposed in the cross section when the bar is cut out.

  Thereafter, the air bearing surface is polished, the head protective film is formed, and the air bearing surface is rail-processed, and divided into a single head to complete the magnetic head slider. Details such as separation of the bar and polishing of the air bearing surface are within a range well known to those skilled in the art.

  The sacrificial anode 115 may be formed immediately before the rail processing of the air bearing surface. Photolithography is used for rail processing of the air bearing surface. During the development, resist stripping, and cleaning steps at that time, the magnetoresistive effect element 102 is protected by the sacrificial anode 115. For example, the polarization characteristics of the magnetic films B and Zn of the recording element in the cleaning liquid A are as shown in FIG. 3, and the magnetic film B is kept at a potential at which it does not dissolve and is anticorrosive, and almost no hydrogen is generated.

  When the processing step is completed and the magnetic head slider is mounted on the wiring flexible substrate 112, the sacrificial anode 115 is coated as follows. Epoxy resin or polyimide resin is supplied onto the sacrificial anode with a minute dispenser. Subsequently, it is pressed against the wiring flexible substrate 112 to be cured and bonded. An epoxy resin may be attached to a predetermined position of the wiring flexible substrate, and the sacrificial anode 115 on the magnetic head may be pressed thereto. As a result, the surface of the sacrificial anode is coated, and as shown in Table 1, no foreign matter is generated from the sacrificial anode, and corrosion does not progress.

犠牲陽極115と接続された再生素子の一端102と接地されたジンバル、サスペンション等が、導電性接着剤によってショートする恐れがある場合には、予め、犠牲陽極上に樹脂等で絶縁被覆を施したり、磁気ヘッドスライダの表面よりも一段窪ませた部分に犠牲陽極を形成し、その上に樹脂等で絶縁被覆を施す。

If there is a possibility that the end 102 of the reproducing element connected to the sacrificial anode 115 and the grounded gimbal, suspension, or the like may be short-circuited by the conductive adhesive, an insulating coating is applied to the sacrificial anode with a resin or the like in advance. Then, a sacrificial anode is formed in a portion recessed by one step from the surface of the magnetic head slider, and an insulating coating is applied thereon with a resin or the like.

<Example 2>
A second embodiment will be described with reference to FIGS.
The magnetoresistive effect element 102, the magnetic shields 101 and 103, the magnetic cores 104 and 105, the coil 106, the terminal 109, the insulating layer 110, and the like are formed by known processes and methods. The connection portion to the sacrificial anode 115 is produced as follows.

  A part of the magnetic core 104 of the recording element is enlarged and extended so that when the magnetic head slider is cut out from the wafer, the length and shape are exposed to the cross section opposite to the air bearing surface. Alternatively, the conductor 114 is connected to the magnetic core of the recording element, and the conductor has a length and shape that is exposed to a cross section opposite to the air bearing surface when the magnetic head slider is cut out from the wafer. The material is preferably Au from the viewpoint of corrosion resistance, but may be FeNi alloy, Cu, or a combination thereof.

  The magnetic shield, magnetic core, and coil may be formed at the same time, or may be formed before or after these processes. A series of processes of sputtering, photolithography, plating, ion milling or etching, and resist removal are used.

  After the element formation on the wafer is completed, a block (bar) including a plurality of magnetic heads is cut out. When the bar is cut out, a part of the magnetic core or the conductor is exposed in the cross section. A sacrificial anode 115 is formed on the portion by a method such as sputtering, plating, colloid coating, or fine particle spraying. As the material for the sacrificial anode, a metal or alloy having a lower natural potential in an aqueous solution than the metal or alloy constituting the recording element and reproducing element is selected. As an example, Mg, Zn, Al, and alloys containing them are candidates, although they vary depending on the chemical solution.

  The sacrificial anode may be formed in the region including the exposed conductor after it is cut and recessed by ion milling, mechanical polishing, or the like.

  Thereafter, the air bearing surface is polished, the head protective film is formed, and the air bearing surface is rail-processed, and divided into a single head to complete the magnetic head slider. Details such as separation of the bar and polishing of the air bearing surface are within a range well known to those skilled in the art. The sacrificial anode 115 may be formed immediately before the rail processing of the air bearing surface. Photolithography is used when processing the rail of the air bearing surface. During the development, resist stripping, and cleaning processes at that time, the magnetic core is protected by the sacrificial anode.

  When the processing step is completed and the magnetic head slider is mounted on the wiring flexible substrate 112, the sacrificial anode 115 is coated as follows. Epoxy resin or polyimide resin is supplied onto the sacrificial anode with a minute dispenser. Subsequently, it is pressed against a flexible substrate for wiring, cured and adhered. As a result, as shown in Table 1, no foreign matter is generated from the sacrificial anode 115 and corrosion does not progress.

  Of course, both the corrosion protection of the magnetic shield of Example 1 and the corrosion protection of the magnetic core of Example 2 may be performed simultaneously.

<Example 3>
The third embodiment will be described in detail with reference to FIGS.
In addition to the connection terminal 109, a pad 117 similar to the connection terminal is formed on the element surface of the magnetic head slider (the surface where the connection terminal 109 is exposed). This is electrically connected to the extraction electrode 107 of the magnetoresistive effect element 102 via the conduction line 108.

  In order to prevent corrosion of the magnetic core, the same pad as in the case of the magnetoresistive element 102 connected to the magnetic core is formed. A sacrificial anode 115 is formed on these pads 117.

  The patterning of the sacrificial anode 115 may be a process of sputtering, photolithography, ion milling or etching, or resist removal, or may be a process of photolithography, sputtering, or lift-off by resist removal. Alternatively, the colloid resin may be applied directly or locally, and the fine particles may be sprayed. Alternatively, the sacrificial anode material may be connected to the pad by wire bonding, ball bonding, wedge bonding, solder connection, welding, or the like.

  Of course, a sacrificial anode may be provided on the connection terminal so as not to obstruct the connection between the magnetic head slider and the wiring flexible substrate 112, and the area of the connection terminal may be increased for that purpose.

  As shown in FIG. 7, when the magnetic head slider processing step is completed and the magnetic head slider is mounted on the wiring flexible substrate 112, the sacrificial anode 115 is coated as follows. As shown in FIG. 8, first, the connection terminals 109 and the terminals 119 of the wiring flexible substrate 112 are first connected by ball bonding or solder balls 118. Subsequently, the epoxy resin 120 is supplied onto the sacrificial anode with a minute dispenser. The epoxy resin may wrap around the sacrificial anode 115 or a ball bonded or soldered portion. A polyimide resin may be used instead of the epoxy resin.

  Alternatively, as shown in FIG. 9, an insulating inorganic material such as alumina 121, silica, titania, aluminum nitride, or silicon nitride may be sputtered on the surface of the sacrificial anode 115. After connecting between the connection terminal 109 and the terminal 119 of the wiring flexible substrate 112, the sputtered film adheres to the connection terminal and the air bearing surface by sputtering with the air bearing surface in close contact with a metal plate or resin sheet. Can be prevented.

Instead of sputtering the insulating inorganic material on the entire surface of the connection terminal and the sacrificial anode, sputtering may be performed only on the sacrificial anode 115 by mask sputtering that squeezes the sputtered particles 122 using the mask plate 123 as shown in FIG. . In that case, a metal that is chemically stable in the air, such as gold, platinum, titanium, tantalum, and palladium, can be used as the sputtered film in addition to the insulating inorganic material.
By covering the sacrificial anode in this way, as shown in Table 1, no foreign matter is generated from the sacrificial anode, and corrosion does not progress.

<Example 4>
The fourth embodiment will be described in detail with reference to FIG.
The steps up to the formation of the sacrificial anode 115 are as follows as in the third embodiment. In addition to the connection terminal 109, a pad 117 similar to the connection terminal is formed on the element surface of the magnetic head slider (the surface where the connection terminal is exposed). This is electrically connected to the extraction electrode 107 of the magnetoresistive effect element 102. In order to prevent corrosion of the magnetic core, a pad similar to the above is formed in conduction with the magnetic core. A sacrificial anode 115 is formed on these pads.

  When the wet process of the magnetic head slider processing step is completed, the sacrificial anode is irradiated with laser light 124, and the sacrificial anode material 115 is removed. As an example of the laser device, a laser interface system “Micropoint” (trade name of the company) manufactured by Photonic Instruments Co., Ltd. was used. In order to prevent the scattered sacrificial anode material from reattaching to the magnetic head slider, laser irradiation may be performed while a gas such as nitrogen gas is blown onto the magnetic head slider.

  By removing the sacrificial anode material 115 by the above method, as shown in Table 1, no foreign matter is generated from the sacrificial anode, and corrosion does not progress.

<Example 5>
The fifth embodiment will be described in detail with reference to FIG.
FIG. 12 is a perspective view showing an example in which the magnetic head 200 manufactured in the first to fourth embodiments is incorporated in a magnetic disk device. The magnetic head 200 of the present invention is mounted on a suspension 113 in advance and is driven by a servo actuator 202. The magnetic disk 203 has a mechanism in which a plurality of magnetic disks 203 are rotated by the same cylinder. It is well known to those skilled in the art to mount two magnetic heads on one magnetic disk in order to use both sides of the disk as a recording medium. In this way, the magnetic disk device 204 is completed.

  As shown in Table 1, the magnetic disk device 204 of the present invention can maintain high reliability in long-term use because no foreign matter is generated from the sacrificial anode and corrosion does not progress. Can do.

1 is a cross-sectional structure diagram of a magnetic head according to a first embodiment of the present invention. The perspective view of the magnetic head slider of this invention. FIG. 4 is a schematic diagram illustrating the polarization characteristics of the magnetic film B of the recording element and Al, Zn, and Mg in the cleaning liquid A. FIG. 6 is a sectional structural view of a magnetic head according to a second embodiment of the invention. The perspective view of the magnetic head slider of this invention. FIG. 6 is a cross-sectional structure diagram of a magnetic head according to a third embodiment of the invention. The perspective view of the magnetic head slider of this invention. FIG. 6 is a cross-sectional structure diagram of a magnetic head according to a third embodiment of the invention. FIG. 9 is a cross-sectional structure diagram of a magnetic head that is a modification of the third embodiment of the present invention. FIG. 9 is a cross-sectional structure diagram of a magnetic head that is a modification of the third embodiment of the present invention. FIG. 6 is a sectional view of a magnetic head according to a fourth embodiment of the invention. FIG. 10 is a perspective view of a magnetic disk device according to a fifth embodiment of the present invention.

Explanation of symbols

101… Lower magnetic shield,
102: magnetoresistive effect element,
103… Upper magnetic shield,
104… Lower magnetic core,
105… Upper magnetic core,
106 ... coil,
107 ... Lead electrode of magnetoresistive effect element,
108 ... conducting wire,
109 ... Au terminal electrode,
110… Insulating film,
111… Substrate,
112 ... Flexible substrate for wiring,
113 ... Suspension,
114… conductor,
115 ... Sacrificial anode,
116 ... coil extraction electrode,
117… The same pad as the connection terminal,
118: Bonding ball or solder ball,
119 ... terminals of flexible printed circuit board,
120… Epoxy resin,
121 ... Alumina,
122 ... Sputtered particles,
123 ... Mask board,
124… Laser light,
200 ... magnetic head,
202 ... Servo actuator,
203 ... Magnetic head,
204: Magnetic disk unit.

Claims (6)

  A recording element and a reproducing element, and has a lower natural potential in an aqueous solution than the metal or alloy constituting the recording element and the reproducing element, and is electrically connected to the metal or alloy; A magnetic head having a sacrificial anode, wherein the surface of the sacrificial electrode is covered with a protective film.   2. The magnetic head according to claim 1, wherein the sacrificial anode is Mg, Zn, Al, Mn, Fe, Co, Ni, Cu or an alloy containing them, and the protective film is an organic resin containing an epoxy resin or a polyimide resin. At least one metal oxide selected from the group consisting of alumina, silica, titania, tantalum oxide, molybdenum oxide, tungsten oxide and chromium oxide; at least one metal nitride selected from the group consisting of aluminum nitride, silicon nitride and tantalum nitride And a magnetic head selected from the group consisting of Au, Ag, Pt, Pd, Cr or an alloy containing them as a main component.   A recording element and a reproducing element, and has a lower natural potential in an aqueous solution than the metal or alloy constituting the recording element and the reproducing element, and is electrically connected to the metal or alloy; A method of manufacturing a magnetic head having a sacrificial anode, wherein the sacrificial anode is exposed to the liquid at least during immersion in an etching solution and a cleaning solution in a series of magnetic head processing steps. Organic resin containing epoxy resin or polyimide resin on the surface; at least one metal oxide selected from the group consisting of alumina, silica, titania, tantalum oxide, molybdenum oxide, tungsten oxide and chromium oxide; aluminum nitride, silicon nitride and tantalum nitride At least one metal nitride selected from the group of: and Au, Ag, Pt, Pd, Cr Method of manufacturing a magnetic head, characterized in that the properly be coated with a protective layer selected from the group consisting of an alloy mainly containing them.   A magnetic head assembly having a surface opposite to an air bearing surface of a magnetic head slider connected to a suspension via a wiring flexible substrate, wherein the magnetic head slider is connected to the wiring flexible substrate opposite to the air bearing surface of the magnetic head slider. A sacrificial electrode electrically connected to the recording element and the reproducing element constituting the magnetic head is arranged on the connection facing surface, and when the magnetic head slider is connected via the flexible substrate for wiring, the sacrificial electrode A magnetic head assembly, wherein the surface is substantially covered with the flexible wiring substrate. 5. The magnetic head assembly according to claim 4, wherein when the magnetic head slider is connected to the suspension via the wiring flexible substrate, the connection between the flexible substrate and the magnetic head slider is made of an organic resin including an epoxy resin or a polyimide resin. And at least a surface of the sacrificial electrode is coated with the organic resin. 3. A magnetic disk device comprising at least a magnetic disk, a magnetic disk rotational drive means, a magnetic head assembly, and a magnetic head assembly drive means, wherein the magnetic head assembly is mounted with the magnetic head according to claim 1 or 2. Or a magnetic head assembly according to claim 4 or 5 .

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