JP3990101B2 - Combustion exhaust gas treatment equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
In the present invention, for example, silane gas (SiH_Four) Or halogen gas (NF)_Three, ClF_Three, SF₆, CHF_Three, C₂F₆, CF_FourThe present invention relates to a combustion type exhaust gas treatment apparatus for combustion treatment of harmful flammable or hardly decomposable exhaust gas including
[0002]
[Prior art]
The combustion type exhaust gas treatment apparatus as described above includes a burner section and a combustion chamber on the downstream side of the burner section, supplies auxiliary combustion gas to the burner section, and burns the auxiliary combustion gas to form a flame. It is comprised so that exhaust gas may be burned by. As the auxiliary gas, hydrogen gas, city gas, propane gas or the like is used as the fuel gas, and oxygen or air is usually used as the oxidant.
[0003]
In the combustion type exhaust gas treatment apparatus as described above, a combustion flame is stably obtained in the burner section, the fuel gas pipe is broken by backfire or pressure increase due to abnormal combustion, or the fuel gas supply line or oxygen gas Danger due to leakage of fuel gas and oxygen gas from the supply line, particularly when hydrogen gas is used as the fuel gas, there is a risk of explosion if hydrogen gas and oxygen gas leak. Therefore, there is a demand for the realization of a combustion type exhaust gas treatment apparatus that can cope with these dangers, stabilize combustion of auxiliary combustion gas, and can safely and efficiently perform exhaust gas combustion treatment.
[0004]
[Problems to be solved by the invention]
The present invention has been made in view of the above points. In particular, when ignition or extinguishing, the fuel gas piping can be prevented from being damaged by backfire or pressure increase due to abnormal combustion, and oxygen gas or fuel gas leakage can be easily checked. An object of the present invention is to provide a combustion type exhaust gas treatment apparatus that can stably burn the auxiliary combustion gas and can safely and efficiently treat the exhaust gas.
[0005]
[Means for Solving the Problems]
  In order to solve the above problems, the invention according to claim 1 is provided with a burner portion and a combustion chamber on the downstream side of the burner portion, and a combustion flame is formed from the burner portion toward the combustion chamber. In a combustion exhaust gas treatment apparatus that introduces exhaust gas into the exhaust gas and oxidatively decomposes the exhaust gas, a mixer is provided outside the burner section, and oxygen gas is supplied from the oxygen gas supply line to the mixer, and fuel gas is supplied from the fuel gas supply line to the mixer. Supplying and mixing, supplying the mixed gas to the burner section and combusting to form a combustion flame;A fuel gas chamber for supplying the mixed gas from the mixer is provided on the outer periphery of the burner portion, and the mixed gas is injected from the fuel gas chamber through the nozzle into the burner portion, and the temperature in the fuel gas chamber is detected. A temperature sensor is provided, and means for automatically extinguishing the burner section when the temperature in the fuel gas chamber reaches a predetermined temperature lower than the natural ignition temperature of the mixed gas.It is provided.
[0006]
As described above, a mixer is provided outside the burner unit, and oxygen gas and fuel gas are supplied from the oxygen gas supply line to the mixer to be mixed and supplied to the burner unit. It becomes easy to adjust the mixing ratio of oxygen gas and fuel gas in the inside, and it becomes easy to efficiently treat exhaust gas and to prevent abnormal ignition and backfire during ignition and extinguishing.
[0007]
  Also, as aboveBy providing a temperature sensor for detecting the temperature in the fuel gas chamber and providing means for automatically extinguishing the burner when the temperature in the fuel gas chamber reaches a predetermined temperature lower than the natural ignition temperature of the mixed gas When the temperature in the combustion gas chamber reaches a predetermined temperature equal to or lower than the natural ignition temperature of the mixed gas, the burner portion is automatically extinguished, so there is no risk of backfire.
[0009]
  The invention described in claim 22. The combustion type exhaust gas treatment apparatus according to claim 1, wherein a first stop valve and a first check valve are sequentially provided in each of the lowermost stage of the oxygen gas supply line and the combustion gas supply line on the upstream side of the mixer, A second check valve and a second stop valve, and a branch valve for injecting a leak check gas between the first stop valve and the second stop valve of each of the oxygen gas supply line and the fuel gas supply line. TheIt is provided.
[0010]
  as mentioned aboveBy providing check valves on both the oxygen gas supply line and the fuel gas supply line, the reverse flow of the fuel gas from the fuel gas supply line to the oxygen gas supply line and the oxygen gas supply against the pressure increase downstream. Backflow of oxygen gas from the line to the fuel gas supply line can be prevented, and backfire of these supply lines can be prevented. In addition, since the branch valve capable of injecting the leak check gas is provided between the first stop valve and the second stop valve, the leak check becomes extremely easy. In particular, when using hydrogen gas that easily leaks as a fuel gas, the leak can be easily checked.
[0011]
  Claim3The invention described in claim 1Or 2In the described combustion exhaust gas treatment device,An oxygen gas supply valve and a fuel gas supply valve are provided on each of the oxygen gas supply line and the fuel gas supply line on the upstream side of the mixer, and an incombustible gas supply line is provided, and oxygen gas is supplied from the incombustible gas supply line. Incombustible gas injection means for injecting downstream of the valve and the fuel gas supply valve is provided, the oxygen gas supply valve and the fuel gas supply valve are closed at the time of fire extinguishing, and the nonflammable gas is used as a purge gas in the oxygen gas supply line and the fuel gas supply line SupplyIt is characterized by that.
[0012]
  as mentioned above,After the oxygen gas supply valve and the fuel gas supply valve are closed during fire extinguishing, the oxygen gas and the fuel gas are stopped, and then the non-combustible gas is supplied as a purge gas to the oxygen gas supply line and the fuel gas supply line. It can be eliminated, and backfire during fire extinguishing can be prevented.
[0013]
  Claim4The invention according to claim 1 is the combustion exhaust gas treatment apparatus according to any one of claims 1 to 3,The mixer is an ejector that sucks and mixes fuel gas using oxygen gas as the driving force.It is characterized by that.
[0014]
  as mentioned above,Since the mixer is an ejector that sucks and mixes fuel gas using oxygen gas as the driving force, for example, fuel gas with a low supply pressure, such as propane gas, has a predetermined range fluctuation or a pressure fluctuation on the burner side. Even if it exists, an actual fuel gas flow rate fluctuation | variation can be restrained low.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration example of a combustion type exhaust gas treatment apparatus according to the present invention. In the figure, arrow A and arrow A, arrow B and arrow B, arrow C and arrow C are connected, respectively. This combustion exhaust gas treatment device uses hydrogen (H₂Gas) and oxygen (O₂) Combustion type exhaust gas treatment apparatus that mixes gas to form a combustion flame, introduces exhaust gas into the combustion flame, and oxidatively decomposes the exhaust gas. In FIG. 1, reference numeral 10 denotes an exhaust gas processing apparatus main body, and the exhaust gas processing apparatus main body 10 includes a burner portion 11 and a combustion chamber 12 on the downstream side of the burner portion 11.
[0016]
An air chamber 13 for holding combustion air is provided at the upper outer periphery of the burner portion 11, a fuel gas chamber 14 for holding a mixed gas of hydrogen gas and oxygen gas is provided at the outer peripheral middle portion, and a cooling water chamber for holding cooling water at the lower outer periphery. 15 is provided. A plurality of (up to four) exhaust gas inlet pipes 16 are provided at the top of the burner unit 11, and each exhaust gas inlet pipe 16 is provided with an exhaust gas inflow pressure sensor 19 and an exhaust gas inflow temperature sensor 20. A pilot burner 17 is provided at the center of the top of the burner portion 11. The detailed structure of the exhaust gas treatment apparatus main body 10 is disclosed in the specification and drawings of PCT / JP99 / 00632, and the description thereof is omitted because it is not directly related to the present invention.
[0017]
A UV sensor 18 for detecting a combustion flame is provided in the combustion chamber 12. The fuel gas chamber 14 is provided with a fuel gas chamber temperature sensor 21. A mixer 23 is connected to the fuel gas chamber 14 through a mixed gas pipe 22, and a backfire detection temperature sensor 24 is provided in the mixed gas pipe 22. The mixer 23 is oxygen (O₂) Gas supply line 25 and hydrogen (H₂) A gas supply line 26 is connected.
[0018]
A stop valve 27, a check valve 28, a supply valve 29, a mass flow controller 30, a pressure reducing valve 31, a check valve 32, and a stop valve 33 are sequentially connected to the oxygen gas supply line 25 from the downstream side. An oxygen pressure sensor 34 for detecting an oxygen gas pressure is connected between the valves 31, and a branch valve 35 for leak check gas injection is connected between the check valve 32 and the stop valve 33. The oxygen gas supply line 25 is connected to an oxygen source (not shown).
[0019]
Further, a stop valve 36, a check valve 37, a supply valve 38, a supply valve 39, a mass flow controller 40, a pressure reducing valve 41, a check valve 42, and a stop valve 43 are sequentially connected to the hydrogen gas supply line 26 from the downstream side. Further, a hydrogen pressure sensor 44 for detecting the hydrogen gas pressure is connected between the mass flow controller 40 and the pressure reducing valve 41, and a branch valve 45 for leak check gas injection is connected between the check valve 42 and the stop valve 43. The hydrogen gas supply line 26 is connected to a hydrogen gas source (not shown).
[0020]
In addition, the combustion exhaust gas treatment apparatus has an air supply line 47 connected to an air supply source (not shown) via a check valve 46, a pressure reducing valve 49, and a nitrogen (N₂) A nitrogen gas supply line 50 connected to a source (not shown) is provided.
[0021]
The pilot burner 17 is supplied with hydrogen gas from a pilot burner hydrogen gas supply line 83 branched from the upstream side of the mass flow controller 40 of the hydrogen gas supply line 26, and the pilot burner hydrogen gas supply line A flow sensor (area type flow meter) 51, a supply valve 52, a supply valve 53, a check valve 54 and a stop valve 55 are connected to 83. In addition, air can be supplied to the pilot burner 17 from the air supply line 47 through a pressure reducing valve 56, a flow sensor (insertion type flow meter) 57, a flow rate adjusting valve 58, a supply valve 59 and a check valve 60. .
[0022]
Air can be supplied from the air supply line 47 to the air chamber 13 of the exhaust gas treatment apparatus main body 10 through the pressure reducing valve 61, the flow rate sensor (insertion type flow meter) 62, the flow rate adjusting valve 63, the supply valve 64 and the check valve 65. It has become. Further, a heat-insulating material filling chamber 12 a provided on the outer periphery of the combustion chamber 12 of the exhaust gas processing apparatus main body 10 is connected to a pressure reducing valve 66, a flow sensor (insertion type flow meter) 67 and a flow rate sensor (area type flow meter) from the air supply line 47. ) 68 can be supplied with purge air. Further, purge air is also supplied to the UV sensor 18, and the purge air can be monitored by a flow rate sensor (area type flow meter) 91.
[0023]
Between the check valve 42 and the stop valve 43 of the hydrogen gas supply line 26, nitrogen gas can be supplied from the nitrogen gas supply line 50 through the stop valve 69 and the check valve 70. Between the check valve 28 and the supply valve 29 of the oxygen gas supply line 25, the nitrogen gas is supplied from the nitrogen gas supply line 50 through a flow sensor (insertion type flow meter) 71, a flow rate adjustment valve 72, a supply valve 73 and a check valve 74. Can be supplied. Further, between the check valve 37 and the supply valve 38 of the hydrogen gas supply line 26, a flow rate sensor (insertion type flow meter) 75, a flow rate adjustment valve 76, a supply valve 77 and a check valve 78 are passed from the nitrogen gas supply line 50. Nitrogen gas can be supplied.
[0024]
Between the supply valve 53 and the check valve 54 of the pilot burner hydrogen gas supply line 83, a flow rate sensor (insertion type flow meter) 79, a flow rate adjustment valve 80, a supply valve 81 and a check valve 82 are connected from the nitrogen gas supply line 50. Nitrogen gas can be supplied through. Further, the cooling water chamber 15 of the exhaust gas treatment apparatus main body 10 is supplied with cold water (H through a flow rate sensor (insertion type flow meter) 92 and a flow rate adjustment valve 89 from a cold water source (not shown).₂O) is supplied and is monitored by the flow sensor 92.
[0025]
FIG. 2 is a diagram showing a configuration example of a combustion exhaust gas treatment apparatus according to the present invention. This combustion type exhaust gas treatment apparatus uses fuel gas or propane gas supplied at a low pressure (about 100 kPa or less) such as 13A city gas as the combustion gas. Here, it is a combustion type exhaust gas treatment apparatus in which oxygen gas is mixed with the propane gas to form a combustion flame, exhaust gas is introduced into the combustion flame, and the exhaust gas is oxidized and decomposed. 2, the same reference numerals as those in FIG. 1 denote the same or corresponding parts. In FIG. 2, arrow A and arrow A, arrow B and arrow B, arrow C and arrow C are connected, respectively.
[0026]
The combustion-type exhaust gas treatment apparatus differs greatly from the combustion-type exhaust gas treatment apparatus shown in FIG. 1 in that a propane gas supply line 87 is provided in place of the hydrogen gas supply line 26 and the propane gas and oxygen gas are mixed by the mixer 23. This is the point. A check valve 37, a supply valve 38, a supply valve 39, a flow sensor (area type flow meter) 85, and a stop valve 43 are sequentially connected to the propane gas supply line 87 from the downstream side. The pilot burner propane gas supply line 83 ′ is branched from the upstream side of the stop valve 43 of the propane gas supply line 87.
[0027]
In the combustion type exhaust gas treatment apparatus having the above-described configuration, oxygen supplied from the oxygen gas supply line 25 and hydrogen supplied from the hydrogen gas supply line 26 (or propane gas supplied from the propane gas supply line 87) are mixed in the mixer 23. The mixed gas is supplied to the fuel gas chamber 14 of the exhaust gas treatment apparatus body 10 through the mixed gas pipe 22, and is supplied from the fuel gas chamber 14 into the burner unit 11 by a fuel gas injection nozzle (not shown). Further, combustion air is supplied from the air chamber 13 into the burner unit 11 through an air injection nozzle (not shown). Further, when hydrogen gas (or propane gas) and air are supplied to the pilot burner 17 and ignited by the ignition device 90, the mixed gas of hydrogen (or propane gas) and oxygen is combusted, and the combustion flame is transferred from the burner unit 11 to the combustion chamber 12. Form towards. This combustion flame is preferably formed so as to swirl diagonally downward from the burner portion 11 toward the center portion of the combustion chamber 12.
[0028]
For example, silane (SiH) from a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus is passed through the exhaust gas inlet pipe 16 through the combustion flame._Four) And disilane (Si₂H₆By introducing exhaust gas containing harmful combustible gas such as), the exhaust gas is oxidatively decomposed and rendered harmless.
[0029]
As shown in FIG. 1, the hydrogen gas is used as the fuel, the hydrogen gas and the oxygen gas are mixed in the mixer 23, and the piping that supplies the burner unit 11 is configured as follows, thereby igniting safely and reliably. In addition to being able to extinguish fire, it becomes a combustion exhaust gas treatment device that can detect abnormalities.
[0030]
A stop valve 27, a check valve 28, a supply valve 29, a mass flow controller 30, a pressure reducing valve 31, a check valve 32, and a stop valve 33 are sequentially connected to the oxygen gas supply line 25 from the downstream side, and downstream to the hydrogen gas supply line 26. A stop valve 36, a check valve 37, a supply valve 38, a supply valve 39, a mass flow controller 40, a pressure reducing valve 41, a check valve 42, and a stop valve 43 are sequentially connected from the side. This is because the equipment with weak pressure resistance is arranged on the upstream side, and the equipment with high pressure resistance or is not likely to cause problems even if it breaks down on the downstream side. It is possible to protect the oxygen gas supply line 25 and the hydrogen gas supply line 26 when the temperature rises. The same applies to the combustion type exhaust gas treatment apparatus using propane gas as the fuel shown in FIG.
[0031]
Further, the volume of the mixer 23 for mixing the oxygen gas and the hydrogen gas is reduced, and the length of the mixed gas pipe 22 connecting the mixer 23 and the burner unit 11 is shortened. Thereby, when a backfire occurs, the mixed gas in the burner unit 11 from the mixer 23 burns at once, but by reducing the volume of the mixer 23 and shortening the length of the mixed gas pipe 22, The combustion energy is reduced, and damage to the equipment due to temperature rise and pressure rise of the pipe can be minimized.
[0032]
Further, a check valve 32 and a check valve 42 are provided on both the oxygen gas supply line 25 and the hydrogen gas supply line 26 upstream of the mixer 23. As a result, it is possible to prevent the backflow of hydrogen gas to the oxygen gas supply line 25 side and, conversely, backflow of oxygen gas to the hydrogen gas supply line 26 side with respect to the downstream pressure rise. Backfire to the gas supply line 26 can be prevented.
[0033]
When the exhaust gas flowing in from the exhaust gas inlet pipe 16 is extremely reduced, the burner portion 11 that has been cooled thereby is heated, the temperature of the fuel gas chamber 14 is increased, and the fuel gas (mixed gas of hydrogen and oxygen) When the temperature exceeds the natural ignition temperature, flashback occurs. For this reason, the temperature of the fuel gas chamber 14 is monitored by the fuel gas chamber temperature sensor 21, and when it reaches a predetermined temperature below the temperature at which spontaneous ignition may occur, the fire is automatically extinguished to prevent the risk of backfire.
[0034]
When the mass flow controllers 30 and 40 are used instead of a flow meter and a flow rate adjustment valve, as shown in FIG. 1 and the mass flow controller 40-2. Reference numerals 30-3 and 40-3 are flow rate indicators, respectively. With this combination, the flow indicators 30-3 and 40-3 display the detection values of the mass flow meters 30-1 and 40-1, and the flow rate adjustment is performed with values set for the mass flow controllers 30-2 and 40-2 alone. To. As a result, when either one of the flow rate detection function of the mass flow meters 30-1 and 40-1 or the flow rate adjustment function of the mass flow controllers 30-2 and 40-2 fails, in either case, the display value is abnormal. Can be detected.
[0035]
An oxygen pressure sensor 34 for detecting the oxygen gas pressure is detected in the oxygen gas supply line 25, and a hydrogen pressure sensor 44 (or propane gas pressure) for detecting the hydrogen gas pressure is detected in the hydrogen gas supply line 26 (or propane gas supply line 87). A propane gas pressure sensor 44 ′) is provided so that the supplied oxygen gas pressure and hydrogen gas pressure (or propane gas pressure) can be monitored. As a result, it is possible to detect fluctuations in supply pressure, which is the largest cause of fluctuations in oxygen gas and hydrogen gas flow rates (or propane gas flow rates), and flow rate fluctuations that cause flame backfire and blowout occur. Anomalies can be detected before.
[0036]
Stop valves 27 and 36 are provided between the check valves 28 and 37 on the most downstream side of the oxygen gas supply line 25 and the hydrogen gas supply line 26 and the mixer 23, respectively, and upstream of the check valves 32 and 42 on the most upstream side. Since stop valves 33 and 43 are provided on the side, and branch valves 35 and 45 are provided between the stop valves 33 and 43 and the check valves 32 and 42, respectively, the most downstream stop valves 27 and 36 and the most upstream By closing the stop valves 33 and 43 and injecting a leak check gas (for example, helium gas or nitrogen gas) through the branch valves 35 and 45, an airtight test (leak check test) can be easily performed. Thus, the ability to easily carry out the airtight test is particularly effective when hydrogen gas that is likely to leak is used as the fuel.
[0037]
The hydrogen gas supply line 26 and the pilot burner hydrogen gas supply line 83 are provided with supply valves 38 and 39 and supply valves 52 and 53, respectively. Thereby, even if one of the hydrogen gas supply valves cannot reliably shut off the hydrogen gas due to a failure such as a bite of dust, the other supply valve can back up and shut off the hydrogen gas.
[0038]
The pipe diameter is set such that the flow velocity of the mixed gas flowing in the mixed gas pipe 22 after the mixer 23 is slower than the combustion speed. Further, a bent portion 22a is provided in the mixed gas pipe 22 immediately after the outlet of the mixer 23 as shown in FIG. 4, and a temperature sensor 24 for detecting backfire is provided there to monitor the temperature. As a result, when backfire occurs, the stagnation of the flow occurs at the bent portion 22a, and a flame is always formed. Therefore, the backfire can be reliably detected.
[0039]
In particular, in the combustion type exhaust gas treatment apparatus using propane gas as the fuel in FIG. 2, when a fuel having a low supply pressure of propane gas (about 2 kPa) is used, as a mixer for mixing propane gas and oxygen gas as fuel, As shown in FIG. 5, an ejector 100 was used in which oxygen gas was used as the driving force, and the suction port pressure could be −15 kPa or less. As a result, even if a propane gas supply pressure fluctuation within 1.5 kPa or a pressure fluctuation on the burner unit 11 side occurs even at a low propane gas supply pressure, the actual fuel flow fluctuation can be suppressed to within 5%. .
[0040]
When using the ejector having the configuration shown in FIG. 5 for the mixer 23, the suction pressure sensor 86 of the ejector is provided, the suction port pressure is monitored, and if at least the suction port pressure becomes −15 kPa, it is determined as abnormal. The fuel gas and oxygen gas flowing into the mixer 23 are shut off. The increase in the suction pressure of the ejector is caused by a decrease in the oxygen gas flow rate, clogging of the fuel pipe, or an abnormal pressure increase in the burner portion 11 downstream. Therefore, by blocking the fuel gas and oxygen gas by increasing the suction pressure of the ejector as described above, abnormal combustion and backflow of oxygen to the propane gas supply line can be prevented.
[0041]
Further, when the ejector having the configuration shown in FIG. 5 is used for the mixer 23, the nozzle unit 101 can be divided into a nozzle unit 101 to which oxygen gas as a driving gas is supplied and a diffuser unit 102 that actually generates suction pressure. The combination of the diameter of the 101 nozzle 101a and the diameter of the diffuser 102a of the diffuser portion 102 can be easily changed. Thereby, when changing the flow volume of the propane gas which is a fuel, and the flow volume of oxygen gas, the ejector which has required performance can be selected easily.
[0042]
Further, as described above, the oxygen gas supply line 25 is provided with a purge line that can supply nitrogen gas from the nitrogen gas supply line 50 through the flow rate sensor 71, the flow rate adjustment valve 72, the supply valve 73, and the check valve 74 to supply hydrogen gas. A purge line is provided between the check valve 37 and the supply valve 38 in the line 26 so that nitrogen gas can be supplied from the nitrogen gas supply line 50 through the flow rate sensor 75, the flow rate adjustment valve 76, the supply valve 77, and the check valve 78. Since the injection point is on the downstream side of the supply valve 29 and the supply valve 38, the same amount of nitrogen gas as the fuel gas (hydrogen gas or propane gas) can be replaced at the time of fire extinguishing, and the fluctuation in flow rate is eliminated. Can prevent backfire.
[0043]
As described above, in the combustion type exhaust gas treatment apparatus in which oxygen gas and fuel gas (hydrogen gas or propane gas) are mixed in the mixer 23 and supplied to the burner unit 11 to ignite, the fuel gas, particularly the propane gas shown in FIG. In the case where fuel is used, the propane gas supply pressure is low (about 2 kPa) or the combustion speed is slow (the combustion speed in air is 1 m / s or less). Can be ignited and burned safely and reliably.
[0044]
In the ejector (see FIG. 5), which is the mixer 23, at the time of ignition, not the oxygen as the initial drive pressure but the ignition air supply valve 29 and the supply valve 87 ′ are opened, air is supplied from the air supply line 47, and suction is performed. After securing the pressure, the supply valve 38 and the supply valve 39 are opened to start the flow of fuel gas (propane gas), and then the supply valve 87 ′ is closed and the supply valve 84 is opened to switch from ignition air to oxygen. As a result, the ratio of oxygen gas to fuel gas temporarily increases, and backfire due to an increase in combustion speed can be prevented.
[0045]
When the pilot burner 17 ignites the burner unit 11, which is the main burner, the supply valve 64 is opened after the burner unit 11 is ignited, and swirling air is introduced from the air supply line 47. If the fuel to be used is a fuel having a slow flame propagation speed, the supply valve 64 is opened and closed once every one second at the beginning of the inflow of swirling air, and the inflow and the interruption are repeated. As a result, after ignition of the burner portion 11 which is the main burner, even if some of the fuel injection nozzles are not ignited, the direction of the flame of the ignited fuel injection nozzle is changed by the strong flow of swirling air, so that In addition, a flame can be formed in all the fuel injection nozzles.
[0046]
【The invention's effect】
As described above, according to the invention described in each claim, the following excellent effects can be obtained.
[0047]
According to the first aspect of the present invention, the mixer is provided outside the burner unit, and the mixer is supplied with the fuel gas from the oxygen gas supply line or the oxygen gas and the fuel gas supply line, and mixed. Therefore, it is easy to adjust the mixing ratio of oxygen gas and fuel gas in the mixer, and it is easy to efficiently treat exhaust gas and prevent abnormal ignition and backfire during ignition and extinguishing. Become.
[0048]
  According to the invention of claim 1,By providing a temperature sensor for detecting the temperature in the fuel gas chamber and providing means for automatically extinguishing the burner when the temperature in the fuel gas chamber reaches a predetermined temperature lower than the natural ignition temperature of the mixed gas When the temperature in the combustion gas chamber reaches a predetermined temperature equal to or lower than the natural ignition temperature of the mixed gas, the burner portion is automatically extinguished, so there is no risk of backfire.
[0050]
  According to invention of Claim 2,By providing check valves on both the oxygen gas supply line and the fuel gas supply line, the reverse flow of the fuel gas from the fuel gas supply line to the oxygen gas supply line and the oxygen gas supply against the pressure increase downstream. Backflow of oxygen gas from the line to the fuel gas supply line can be prevented, and backfire of these supply lines can be prevented. In addition, since the branch valve capable of injecting the leak check gas is provided between the first stop valve and the second stop valve, the leak check becomes extremely easy. In particular, when using hydrogen gas that easily leaks as a fuel gas, the leak can be easily checked.
[0051]
  Claim3According to the invention described inAfter the oxygen gas supply valve and the fuel gas supply valve are closed at the time of fire extinguishing, the oxygen gas and the fuel gas are stopped, and then the non-combustible gas is supplied as a purge gas to the oxygen gas supply line and the fuel gas supply line, thereby eliminating fluctuations in the flow rate. It is possible to prevent backfire during fire extinguishing.
[0052]
  Claim4According to the invention described inSince the mixer is an ejector that sucks and mixes fuel gas using oxygen gas as the driving force, for example, fuel gas with a low supply pressure, such as propane gas, has a predetermined range fluctuation or a pressure fluctuation on the burner side. Even if it exists, an actual fuel gas flow rate fluctuation | variation can be restrained low.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration example of a combustion exhaust gas treatment apparatus according to the present invention.
FIG. 2 is a diagram showing a configuration example of a combustion exhaust gas treatment apparatus according to the present invention.
FIG. 3 is a diagram showing a configuration example of a mass flow controller used in a combustion exhaust gas treatment apparatus according to the present invention.
FIG. 4 is a view showing the vicinity of the outlet of the mixer of the combustion exhaust gas treatment apparatus according to the present invention.
FIG. 5 is a diagram showing a configuration example of a mixer used in the combustion exhaust gas treatment apparatus according to the present invention.
[Explanation of symbols]
10 Exhaust gas treatment device body
11 Burner
12 Combustion chamber
13 Air chamber
14 Fuel gas chamber
15 Cooling water chamber
16 Exhaust gas inlet pipe
17 Pilot burner
18 UV sensor
19 Exhaust gas inflow pressure sensor
20 Exhaust gas inflow temperature sensor
21 Fuel gas chamber temperature sensor
22 Mixed gas piping
23 Mixer
24 Temperature sensor for detecting backfire
25 Oxygen gas supply line
26 Hydrogen gas supply line
27 Stop valve
28 Check valve
29 Supply valve
30 Mass flow controller
31 Pressure reducing valve
32 Check valve
33 Stop valve
34 Oxygen pressure sensor
35 Branch valve
36 Stop valve
37 Check valve
38 Supply valve
39 Supply valve
40 Mass Flow Controller
41 Pressure reducing valve
42 Check valve
43 Stop valve
44 Hydrogen pressure sensor
44 'propane gas pressure sensor
45 Branch valve
46 Check valve
47 Air supply line
48 Check valve
49 Pressure reducing valve
50 Nitrogen gas supply line
51 Flow sensor
52 Supply valve
53 Supply valve
54 Check valve
55 Stop valve
56 Pressure reducing valve
57 Flow sensor
58 Flow control valve
59 Supply valve
60 Check valve
61 Pressure reducing valve
62 Flow sensor
63 Flow control valve
64 Supply valve
65 Check valve
66 Pressure reducing valve
67 Flow sensor
68 Flow sensor
69 Stop valve
70 Check valve
71 Flow sensor
72 Flow control valve
73 Supply valve
74 Check valve
75 Flow sensor
76 Flow control valve
77 Supply valve
78 Check valve
79 Flow sensor
80 Flow control valve
81 Supply valve
82 Check valve
83 Hydrogen gas supply line for pilot burner
83 'Propane gas supply line for pilot burner
84 Supply valve
85 Flow sensor
86 Ejector pressure sensor
87 Propane gas supply line
87 'supply valve
88 Flow sensor
89 Flow control valve
90 Ignition system
91 Flow sensor

Claims (4)

Combustion exhaust gas comprising a burner section and a combustion chamber on the downstream side of the burner section, forming a combustion flame from the burner section toward the combustion chamber, introducing exhaust gas into the combustion flame, and oxidizing and decomposing the exhaust gas In the processing device,
A mixer is provided outside the burner unit, oxygen gas is supplied from the oxygen gas supply line to the mixer, fuel gas is supplied from the fuel gas supply line, and the mixed gas is supplied to the burner unit for combustion. And configured to form the combustion flame,
A fuel gas chamber for supplying a mixed gas from the mixer is provided on the outer periphery of the burner portion, and the mixed gas is injected into the burner portion from the fuel gas chamber through a nozzle. Combustion-type exhaust gas characterized in that a temperature sensor for detecting is provided, and means for automatically extinguishing the burner part when the temperature in the fuel gas chamber reaches a predetermined temperature lower than the natural ignition temperature of the mixed gas Processing equipment. In the combustion type exhaust gas treatment apparatus according to claim 1,
A first stop valve and a first check valve are sequentially provided in the lowermost stage of the oxygen gas supply line and the combustion gas supply line upstream of the mixer, respectively, and a second check valve and a second check valve are provided in the uppermost stage respectively. the stop valve is provided, further combustion type, characterized in that a branch valve for injecting a leak check gas between each first stop valve and the second stop valve of the oxygen gas supply line and the fuel gas supply line Exhaust gas treatment equipment. In the combustion type exhaust gas treatment apparatus according to claim 1 or 2,
An oxygen gas supply valve and a fuel gas supply valve are provided in each of the oxygen gas supply line and the fuel gas supply line upstream of the mixer, and an incombustible gas supply line is provided, and the incombustible gas from the incombustible gas supply line is supplied to the oxygen gas supply line and the fuel gas supply line. Incombustible gas injection means for injecting downstream of the oxygen gas supply valve and the fuel gas supply valve is provided, and when the fire is extinguished, the oxygen gas supply valve and the fuel gas supply valve are closed, and the oxygen gas supply line and the fuel gas supply line are incombustible. A combustion-type exhaust gas treatment apparatus, wherein gas is supplied as purge gas. The combustion-type exhaust gas treatment apparatus according to any one of claims 1 to 3,
The combustion-type exhaust gas treatment apparatus, wherein the mixer is an ejector that sucks and mixes fuel gas using oxygen gas as a driving force.

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