JP3988792B2 - LIGHT SOURCE DEVICE, LIGHT SOURCE DEVICE MANUFACTURING METHOD, AND PROJECTOR - Google Patents

Description

  The present invention relates to an arc tube having a light emitting portion where discharge light emission is performed between electrodes and sealing portions provided at both ends of the light emitting portion, and an elliptical reflector that emits a light beam emitted from the arc tube in a certain direction. A light source device including a sub-reflecting mirror, the reflecting surface of which is opposed to the reflecting surface of the elliptical reflector, covers the front side of the luminous tube in the luminous flux emission direction and reflects the luminous flux emitted from the luminous tube to the elliptical reflector, The present invention relates to a projector including the light source device and a method for manufacturing the light source device.

  Conventionally, a projector that modulates a light beam emitted from a light source according to image information and enlarges and projects an optical image is used. Such a projector is used for a presentation at a conference or the like together with a personal computer. In recent years, such projectors are used for home theater applications in response to the need to watch movies on a large screen at home.

As a light source for such a projector, a discharge arc tube such as a metal halide lamp or a high-pressure mercury lamp is used. This discharge arc tube has a spherical light emission in which discharge light is emitted between a pair of electrodes that are spaced apart from each other. And a sealing part that is provided at both ends of the light emitting part and in which a metal foil for applying a voltage to the electrode is enclosed.
In this discharge-type arc tube, as described in Patent Document 1, for example, a discharge-type arc tube has been proposed in which a reflection / heat retention film in which silica / alumina is vapor-deposited is formed in the front part of the light-emitting part of the light-emitting part. Yes.

According to such a discharge-type arc tube, the luminous flux emitted from the light emitting part is converted into heat by the reflection and heat insulating film and contributes to the temperature rise inside the light emitting part. There is an advantage that the vapor pressure can be stabilized, and unevenness of color, illuminance, and the like of the projected image of the projector due to the discharge arc tube can be prevented.
JP-A-8-69775 (refer to [0020] and FIG. 2)

However, since the conventional discharge-type arc tube has a reflection / protection film coated with a mixture of white alumina and silica, the reflection efficiency of the reflection / protection film is low, and the light emitted from the light emitting portion is low. There is a problem that the use efficiency of the light source device is low and the illumination brightness of the light source device is lowered.
In addition, since the reflective / protective film is formed by vapor deposition, the reflective surface of the film depends on the outer shape of the spherical light emitting portion of the arc tube, and an optimal reflective surface for use as light source light is formed. There is a problem that is not always possible.

An object of the present invention is to provide a light source device, a projector, and a method of manufacturing the light source device that can significantly improve the utilization rate of the light source light by using a sub-reflecting mirror whose reflecting surface is disposed opposite to the reflecting surface of the elliptical reflector. Is to provide.

  The method of manufacturing a light source device according to the present invention includes a light emitting portion that emits discharge light between electrodes, a light emitting tube having sealing portions provided at both ends of the light emitting portion, and a light beam emitted from the light emitting tube in a certain direction. An elliptical reflector that emits light in a uniform manner and a reflective surface that is disposed opposite to the reflective surface of the elliptical reflector, covers the front side of the luminous tube in the direction of luminous flux, and reflects the luminous flux emitted from the luminous tube to the elliptical reflector. A light source device manufacturing method for manufacturing a light source device comprising a mirror, wherein the sub-reflecting mirror is disposed on an arc tube whose discharge emission center is positioned and held in the vicinity of a first focal position of the elliptical reflector in advance. A step of inserting into the sealing portion of the arc tube, a step of calculating the center of curvature of the reflecting surface from the curvature of the reflecting surface of the sub-reflecting mirror, and a step of calculating the discharge emission center between the electrodes from the position of the electrode When, Based on the center of curvature of the reflecting surface of the sub-reflecting mirror and the emission center between the electrodes, the position of the sub-reflecting mirror is such that the positional deviation between the center of curvature and the emission center is a predetermined deviation amount. Adjusting the arc tube with respect to the arc tube, and fixing the sub-reflector with respect to the arc tube at a position where a deviation of the center of curvature and the arc center has a predetermined deviation amount. It is characterized by being.

  According to this invention, since the center of curvature of the reflecting surface of the sub-reflecting mirror and the emission center between the electrodes can be calculated and grasped without lighting the arc tube, the step of lighting the arc tube can be omitted. . In addition, since the center of curvature of the reflecting surface of the sub-reflecting mirror and the emission center between the electrodes are deviated by a predetermined amount of deviation, light emission due to plasma absorption accompanying the overlap of the arc image and arc reflection image generated when the arc tube is turned on Since the temperature rise inside the unit can be prevented and both arc images can contribute to the light source light, it is possible to easily and precisely manufacture the light source device that reliably improves the utilization rate of the light source light.

  In the method of manufacturing the light source device according to the aspect of the invention, the step of fixing the sub-reflecting mirror to the arc tube may be performed after the step of adjusting the position of the sub-reflecting mirror with respect to the arc tube. It is preferable that an adhesive is applied to the sub-reflecting mirror, and the adhesive is cured and fixed.

  According to the present invention, since the adhesive is applied to the sealing portion and the sub-reflecting mirror after the position of the sub-reflecting mirror with respect to the arc tube is adjusted, the adhesive is cured during the position adjustment of the sub-reflecting mirror. The position adjustment can be performed without any problems, and the other portions of the arc tube are not soiled with an adhesive during the position adjustment.

  In the method of manufacturing the light source device of the present invention, the step of fixing the sub-reflecting mirror to the arc tube is an adhesive applied before the step of adjusting the position of the sub-reflecting mirror with respect to the arc tube Is preferably cured and fixed.

  According to the present invention, the adhesive is interposed between the sealing portion and the sub-reflecting mirror before adjusting the position of the sub-reflecting mirror with respect to the arc tube. The adhesive can be applied to the adhesive surface of the mirror, the manufacturing process can be simplified, and the adhesive can be firmly fixed.

  A projector according to the present invention is a projector that modulates a light beam emitted from a light source in accordance with image information to form an optical image and projects an enlarged image, and includes a light source device obtained by the above-described method for manufacturing a light source device. It is characterized by.

  According to the present invention, since the light source device has the operations and effects as described above, the same operations and effects can be enjoyed, and a projector in which the utilization rate of the light source light is greatly improved can be obtained. .

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[First Embodiment]
(Projector configuration)
FIG. 1 is a schematic diagram showing an optical system of a projector 1 according to the first embodiment of the present invention. The projector 1 modulates a light beam emitted from a light source according to image information to produce an optical image. , And enlarged and projected on a screen, and includes a light source device 10, a uniform illumination optical system 20, a color separation optical system 30, a relay optical system 35, an optical device 40, and a projection optical system 50. The optical elements constituting these optical systems 20 to 35 are positioned and adjusted and accommodated in the optical component casing 2 in which a predetermined illumination optical axis A is set.

  The light source device 10 emits a light beam emitted from the light source lamp 11 in a fixed direction and illuminates the optical device 40. As will be described in detail later, the light source lamp 11, the elliptical reflector 12, and the sub-reflecting mirror 13 are used. Although not shown, the lamp housing is configured to include a lamp housing, and a collimating concave lens 14 is provided downstream of the elliptical reflector 12 in the light beam emission direction. The collimating concave lens 14 may be integrated with the light source device 10 or may be a separate body.

  The light beam emitted from the light source lamp 11 is emitted as convergent light by the elliptical reflector 12 with the emission direction aligned to the front side of the light source device 10, collimated by the collimating concave lens 14, and emitted to the uniform illumination optical system 20. Is done.

  The uniform illumination optical system 20 is an optical system that divides the light beam emitted from the light source device 10 into a plurality of partial light beams and uniformizes the in-plane illuminance of the illumination area. The first lens array 21 and the second lens array 22 are used. , A polarization conversion element 23, a superimposing lens 24, and a reflection mirror 25.

  The first lens array 21 has a function as a light beam splitting optical element that splits the light beam emitted from the light source lamp 11 into a plurality of partial light beams, and is arranged in a matrix in a plane orthogonal to the illumination optical axis A. A plurality of small lenses are provided, and the contour shape of each small lens is set so as to be substantially similar to the shape of the image forming area of the liquid crystal panels 42R, 42G, and 42B constituting the optical device 40 described later. Yes.

  The second lens array 22 is an optical element that collects a plurality of partial light beams divided by the first lens array 21 described above, and in the same manner as the first lens array 21, a matrix is formed in a plane orthogonal to the illumination optical axis A. However, since it is intended to collect light, the outline shape of each small lens corresponds to the shape of the image forming area of the liquid crystal panels 42R, 42G, and 42B. There is no need.

The polarization conversion element 23 is a polarization conversion element that aligns the polarization direction of each partial light beam divided by the first lens array 21 with linear polarization in one direction.
Although not shown, the polarization conversion element 23 has a configuration in which polarization separation films and reflection mirrors that are inclined with respect to the illumination optical axis A are alternately arranged. The polarization separation film transmits one polarized light beam among the P-polarized light beam and S-polarized light beam included in each partial light beam, and reflects the other polarized light beam. The other polarized light beam reflected is bent by the reflecting mirror and emitted in the emission direction of the one polarized light beam, that is, the direction along the illumination optical axis A. One of the emitted polarized light beams is polarized and converted by a phase difference plate provided on the light beam exit surface of the polarization conversion element 23, and the polarization directions of all the polarized light beams are aligned. By using such a polarization conversion element 23, the light beam emitted from the light source lamp 11 can be aligned with a polarized light beam in one direction, so that the utilization rate of the light source light used in the optical device 40 can be improved. it can.

The superimposing lens 24 condenses a plurality of partial light beams that have passed through the first lens array 21, the second lens array 22, and the polarization conversion element 23, and superimposes them on the image forming regions of the liquid crystal panels 42R, 42G, and 42B. It is. In this example, the superimposing lens 24 is a spherical lens in which the incident-side end surface of the light beam transmission region is flat and the exit-side end surface is spherical, but an aspherical lens whose exit-side end surface is a hyperboloid can also be used.
The light beam emitted from the superimposing lens 24 is bent by the reflection mirror 25 and emitted to the color separation optical system 30.

  The color separation optical system 30 includes two dichroic mirrors 31 and 32, and a reflection mirror 33. A plurality of partial light beams emitted from the uniform illumination optical system 20 from the dichroic mirrors 31 and 32 are converted into red (R), It has a function of separating light of three colors, green (G) and blue (B).

  The dichroic mirrors 31 and 32 are optical elements in which a wavelength selection film that reflects a light beam in a predetermined wavelength region and transmits a light beam of another wavelength is formed on the substrate. The dichroic mirror 31 disposed in the front stage of the optical path is A mirror that transmits red light and reflects other color light. The dichroic mirror 32 disposed in the latter stage of the optical path is a mirror that reflects green light and transmits blue light.

  The relay optical system 35 includes an incident side lens 36, a relay lens 38, and reflection mirrors 37 and 39, and has a function of guiding the blue light transmitted through the dichroic mirror 32 constituting the color separation optical system 30 to the optical device 40. Have. The reason why such a relay optical system 35 is provided in the optical path of the blue light is that the optical path length of the blue light is longer than the optical path lengths of the other color lights, so that the light use efficiency is reduced due to light divergence or the like. It is for preventing. In this example, since the optical path length of blue light is long, such a configuration is adopted. However, when the optical path length of red light is increased, a relay optical system 35 may be provided in the optical path of red light.

  The red light separated by the dichroic mirror 31 described above is bent by the reflection mirror 33 and then supplied to the optical device 40 via the field lens 41. Further, the green light separated by the dichroic mirror 32 is supplied to the optical device 40 through the field lens 41 as it is. Further, the blue light is condensed and bent by the lenses 36 and 38 and the reflecting mirrors 37 and 39 constituting the relay optical system 35 and supplied to the optical device 40 via the field lens 41. The field lens 41 provided in the front stage of the optical path of each color light of the optical device 40 is provided to convert each partial light beam emitted from the second lens array 22 into a light beam parallel to the illumination optical axis. Yes.

  The optical device 40 modulates an incident light beam according to image information to form a color image, and includes liquid crystal panels 42R, 42G, and 42B as light modulation devices to be illuminated, and a color combining optical system. And a cross dichroic prism 43. An incident-side polarizing plate 44 is interposed between the field lens 41 and the liquid crystal panels 42R, 42G, and 42B. Although not shown, between the liquid crystal panels 42R, 42G, and 42B and the cross dichroic prism 43, the illustration is omitted. In this case, an exit side polarizing plate is interposed, and light modulation of incident color light is performed by the entrance side polarizing plate 44, the liquid crystal panels 42R, 42G, and 42B, and the exit side polarizing plate.

  The liquid crystal panels 42R, 42G, and 42B are a pair of transparent glass substrates in which liquid crystal, which is an electro-optical material, is hermetically sealed. For example, incident side polarization is performed according to a given image signal using a polysilicon TFT as a switching element. The polarization direction of the polarized light beam emitted from the plate 44 is modulated. The image forming area for modulating the liquid crystal panels 42R, 42G, and 42B is rectangular, and the diagonal dimension is 0.7 inches, for example.

  The cross dichroic prism 43 is an optical element that synthesizes an optical image modulated for each color light emitted from the exit side polarizing plate to form a color image. The cross dichroic prism 43 has a substantially square shape in plan view in which four right angle prisms are bonded together, and a dielectric multilayer film is formed in a substantially X shape at the interface where the right angle prisms are bonded together. One of the approximately X-shaped dielectric multilayer films reflects red light, and the other dielectric multilayer film reflects blue light. These dielectric multilayer films cause red light and blue light to be reflected. The light is bent and aligned with the traveling direction of the green light, so that the three color lights are synthesized.

  The color image emitted from the cross dichroic prism 43 is enlarged and projected by the projection optical system 50 to form a large screen image on a screen (not shown).

(Configuration of light source device)
As shown in FIG. 2, the light source device 10 has a configuration in which a light source lamp 11 as an arc tube is arranged inside an elliptical reflector 12. In the present invention, the light emission direction of the light source device 10 is indicated as the front side or the front end side, and the direction opposite to the light emission direction of the light source device 10 is indicated as the rear side or the base end side.

The light source lamp 11 as a light-emitting tube is composed of a quartz glass tube having a spherically bulged central portion, the central portion is a light-emitting portion 111, and portions extending to both the front and rear sides of the light-emitting portion 111 are sealing portions 1121. , 1122.
Inside the light emitting unit 111, a pair of tungsten electrodes 111A spaced apart from each other by a predetermined distance, mercury, a rare gas, and a small amount of halogen are enclosed.
Molybdenum metal foils 112A electrically connected to the electrodes of the light emitting part 111 are inserted into the sealing parts 1121 and 1122 extending to both the front side and the rear side of the light emitting part 111, respectively. Etc. are sealed. Each metal foil 112 </ b> A is further connected to a lead wire 113 as an electrode lead wire, and the lead wire 113 extends to the outside of the light source lamp 11.
Then, when a voltage is applied to the lead wire 113, as shown in FIG. 3, a potential difference is generated between the electrodes 111A via the metal foil 112A, a discharge is generated, an arc image D is generated, and the light emitting unit 111 emits light.

As shown in FIG. 2, the elliptical reflector 12 includes a neck-like part 121 through which the sealing part 1121 on the base end side (rear side) of the light source lamp 11 is inserted, and an ellipsoidal reflecting part extending from the neck-like part 121. 122 is an integrally molded product made of glass.
An insertion hole 123 is formed at the center of the neck portion 121, and a sealing portion 1121 is disposed at the center of the insertion hole 123.
The reflecting portion 122 is configured by depositing a metal thin film on an elliptical glass surface, and the reflecting surface 122A of the reflecting portion 122 is a cold mirror that reflects visible light and transmits infrared rays and ultraviolet rays.

The reflecting surface 122A of the elliptical reflector 12 is an elliptical surface having a first focal point L1 and a second focal point L2, and the first focal point L1 and the second focal point L2 are arranged on the illumination optical axis A.
In the light source lamp 11 arranged inside the reflection part 122 of the elliptical reflector 12, the light emission center between the electrodes 111A in the light emission part 111 is in the vicinity of the first focal position L1 of the elliptical surface of the reflection surface 122A of the reflection part 122. It arrange | positions so that it may become.

When the light source lamp 11 is turned on, the light beam emitted from the light emitting unit 111 is reflected by the reflecting surface 122A of the reflecting unit 122 and becomes converged light that converges to the second focal position L2 of the elliptical reflector 12. The central axis of the light beam emitted from the elliptical reflector 12 substantially coincides with the illumination optical axis A.
At this time, the inner part of the cone indicated by boundary lines L3 and L4 connecting the second focal position L2 of the elliptical reflector 12 and the end of the front end of the sealing portion 1122 on the front end side (front side) of the light source lamp 11 in the light beam emission direction. Is a light flux unusable region where the light flux reflected by the elliptical reflector 12 is blocked by the sealing portion 1122 and cannot reach the second focal position L2. In other words, the boundary lines L3 and L4 connecting the second focal position L2 of the elliptical reflector 12 and the end of the front end of the sealing portion 1122 on the front side (front side) of the light source lamp 11 in the light beam emission direction are the elliptical reflector 12. This is a boundary ray between the reflected light beam reaching the second focal position L2 and the light ray blocked by the sealing portion 1122.

  When fixing the light source lamp 11 to such an elliptical reflector 12, the sealing portion 1121 on the rear side of the light source lamp 11 is inserted into the insertion hole 123 of the elliptical reflector 12 to emit light between the electrodes 111 </ b> A in the light emitting unit 111. It arrange | positions so that the center may become the 1st focus position L1 vicinity of the elliptical reflector 12, and the inside of the insertion hole 123 is filled with the inorganic type adhesive which has a silica / alumina as a main component.

  Further, the dimension of the reflecting portion 122 in the optical axis direction is shorter than the length of the light source lamp 11. When the light source lamp 11 is fixed to the elliptical reflector 12 in this way, the sealing portion 1122 on the front side of the light source lamp 11 is used. Protrudes from the light beam exit opening of the elliptical reflector 12.

  The sub-reflecting mirror 13 is a reflecting member that covers substantially the front half of the light emitting portion 111 of the light source lamp 11. As shown in FIG. 4, the inner reflecting surface 131 is a spherical reflecting surface 131, and the outer peripheral surface 132 is the reflecting surface 131. It is configured in a bowl shape configured in a curved surface shape that follows the curvature. Note that a reflective film is formed on the reflective surface 131 by vapor-depositing metal, and this reflective film is a cold mirror like the reflective surface 122A of the elliptical reflector 12.

  In addition, an opening 133 is formed in the bottom surface portion of the bowl shape of the sub-reflecting mirror 13, and an inner peripheral surface of the opening 133 is an adhesive filled with a fixing adhesive with the sealing portion 1122 as described later. The surface 134 is used.

Furthermore, the height of the bowl shape gradually decreases from the edge of the reflecting surface 131 toward the edge of the outer peripheral surface 132 of the bowl-shaped upper end side end face of the sub-reflecting mirror 13 (left end face in FIG. 4B). The inclined surface 135 is used.
As shown in FIG. 5A, the inclined surface 135 is formed by a light beam emission direction base end side (rear side) of the illumination optical axis A and a light beam emitted from the light emitting unit 111 and directly incident on the elliptical reflector 12. It is a truncated cone shape that is inclined along the maximum angle θ. The angle θ is the maximum angle formed by the light beam emitted from the light emitting unit 111 and directly incident on the elliptical reflector 12, and is 105 ° or less in order to shorten the length of the elliptical reflector 12 in the direction of the illumination optical axis A. Is preferable.

  Such a sub-reflecting mirror 13 is made of an inorganic material such as quartz or alumina ceramics, or a crystallized glass such as quartz or neo-serum (trade name of Asahi Glass Co., Ltd.), sapphire, alumina ceramics or the like. As shown in FIG. 4B, the thick cylindrical member 136 having an outer diameter D1 and an inner diameter D2 can be manufactured by polishing.

  First, after polishing one end surface of the cylindrical member 136 into a concave curved surface to form the reflective surface 131, the convex curved outer peripheral surface 132 is polished so as to follow the reflective surface 131, and the inclined surface 135 is polished. I do. Finally, a dielectric multilayer film made of tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2) is formed on the reflecting surface 131 by vapor deposition.

  As shown in FIG. 5A, the attachment position of the sub-reflecting mirror 13 with respect to the light emitting unit 111 of the light source lamp 11 radiates from the light emitting direction base end side (rear side) of the illumination optical axis A and the light emitting unit 111. The position of the inclined surface 135 along the maximum angle θ formed by the light beam directly incident on the elliptical reflector 12 and the outer peripheral surface 132 of the sub-reflecting mirror 13 from the cone indicated by the boundary lines L3 and L4. It is assumed that the illumination optical axis A does not protrude from the orthogonal direction position.

  In this example, the inclined surface 135 is an inclined surface along the angle θ. However, as shown in FIG. 5B, the inclined surface 135 is not incident on the reflecting surface 131 of the sub-reflecting mirror 13 and is end face 135 </ b> A of the sub-reflecting mirror 13. If the amount of the light beam shielded by is small, the end surface 135A on the light emitting unit 111 side of the sub-reflecting mirror 13 may be configured as a surface orthogonal to the illumination optical axis A.

As shown in FIG. 5A, the sub-reflecting mirror 13 is fixed to the light source lamp 11 between the adhesive surface 134 and the outer peripheral surface of the sealing portion 1122 on the front end side (front side) of the light source lamp 11. The sub-reflecting mirror 13 is bonded and fixed with a gap interposed therebetween. The adhesive 137 is applied so as to rise on the outer peripheral surface 132 of the sub-reflecting mirror 13. As the material of the adhesive 137, a silica / alumina based inorganic adhesive can be employed as in the case where the light source lamp 11 is bonded and fixed to the elliptical reflector 12.
The adhesive 137 may be intermittently applied around the illumination optical axis A as shown in FIGS. 6 (A) and 6 (B), and as shown in FIGS. 7 (A) and 7 (B), It may be applied all around the illumination optical axis A.

(Configuration of light source device manufacturing apparatus)
FIG. 8 shows a manufacturing apparatus 60 that manufactures the light source device 10 described above. The manufacturing apparatus 60 includes a holding frame 61, a light beam detection unit 62, and a position adjustment mechanism 63.

  The holding frame 61 is a portion that holds the light source device main body in which the elliptical reflector 12 and the light source lamp 11 are integrated, and is configured as a frame-like member having an opening corresponding to the light beam emission opening of the elliptical reflector 12. The light beam exit aperture of the reflector is engaged and held by the portion.

  The light beam detector 62 is a part that detects a light beam emitted from the elliptical reflector 12 when the light source lamp 11 of the light source device 10 mounted on the holding frame 61 is turned on, and an optical element that constitutes the projector 1. Optical elements similar to those of 14, 21, 22, 23, 24, 41, 43, and 50 and a frame member 421 are linearly arranged along the illumination optical axis A. The arrangement of the optical elements 14, 21, 22, 23, 24, 41, 43, 50 is matched to the optical path length of the green light of the projector 1. The frame member 421 has an opening having the same shape as the image forming area of each of the liquid crystal panels 42R, 42G, and 42B of the projector 1 described above, and is disposed on the light emission side of the field lens.

  Further, an integrating sphere 621 is provided in the rear stage of the optical path of the projection optical system 50 arranged at the last stage, and the opening of the frame member 421 passes through these optical elements 14, 21, 22, 23, 24, 41. The luminous flux passing through the optical elements 43 and 50 is measured by the integrating sphere 621 for illuminance.

  The position adjustment mechanism 63 is a part that three-dimensionally adjusts the position of the sub-reflecting mirror 13 with respect to the light source lamp 11 fixed to the elliptical reflector 12 attached to the holding frame 61, and the light beam emitted from the elliptical reflector 12. When the light emission direction of the central axis of the Z axis is the Z axis, the tilt of the sub-reflector 13 with respect to the Z axis direction, the X and Y axis directions orthogonal to the Z axis, and the XY plane can be adjusted. ing. The position adjustment mechanism 63 includes a base 631, a Y-axis direction adjustment unit 632, an X-axis direction adjustment unit 633, a Z-axis direction adjustment unit 634, a Y-axis rotation adjustment unit 635, an X-axis rotation adjustment unit 636, and a sub-reflecting mirror. A holder 640 is provided.

  The base 631 is provided with a shaft member 631A extending in the Y-axis direction, and a Y-axis direction adjusting portion 632 is supported by the shaft member 631A so as to be slidable along the extending direction of the shaft member 631A. ing.

  Although not shown, the Y-axis direction adjusting unit 632 has a pinion that meshes with a rack formed on the shaft member 631A. When the micrometer head 632A is rotated, the Y-axis direction adjusting unit 632 is rotated along the shaft member 631A. 632 moves up and down in the Y-axis direction.

The upper surface of the Y-axis direction adjusting unit 632 is a table 632B, and a rail 632C extending in the X-axis direction is provided on the table 632B.
An X-axis direction adjustment unit 633 is slidably attached to the rail 632C, and the X-axis direction adjustment unit 633 includes a table 633A and a micrometer head 633B. When the micrometer head 633B is rotated, the table 633A moves along the X-axis direction.

  Although not shown, a rail extending in the Z-axis direction is provided on the table 633A, and a Z-axis direction adjusting portion 634 is slidably supported on the rail.

  The Z-axis direction adjusting portion 634 includes an arm portion 634A and a micrometer head 634B extending in the Z-axis direction. When the micrometer head 634B is rotated, the arm portion 634A moves in the Z-axis direction.

  Although not shown in the drawing, the tip surface of the arm 634A is a convex curved surface formed in an arc shape around the Y axis, and a Y-axis adjustment unit 635 is provided on the convex curved surface.

The Y-axis adjustment unit 635 includes a main body 635A and a micrometer head 635B. When the micrometer head 635B is rotated, the main body 635A rotates about the Y axis along the convex curved surface.
The front end surface of the main body 635A is a convex curved surface formed in an arc shape around the X axis, and an X axis adjustment section 636 is provided on the convex curved surface.

The X-axis adjustment unit 636 includes a main body 636A and a micrometer head 636B. When the micrometer head 636B is rotated, the main body 636A rotates about the X axis.
A sub-reflecting mirror holder 640 is provided at the tip of the main body 636A via an arm portion 636C.

  As shown in FIGS. 9 and 10, the sub-reflecting mirror holder 640 is a part that holds the sub-reflecting mirror 13 and positions the light-emitting unit 111 of the light source lamp 11, and includes a base part 641, a pair of shaft parts 642, and Grip portions 643 and 644 are provided.

  The base portion 641 includes a main body portion 641A attached to the arm portion 636C of the X-axis rotation adjusting portion 636, and a groove-like rail 641B extending in the X-axis direction is formed on the upper surface of the main body portion 641A. An air supply joint 641D is provided on the lower surface of the main body portion 641A.

  Two slide pieces 641C that are slidably supported in the X-axis direction in FIGS. 9 and 10 are provided on the rail 641B, and the slide pieces 641C slide so as to approach and separate from each other.

  The pair of shaft portions 642 are support bodies that respectively support the grip portions 643 and 644, and the pair of shaft portions 642 are columnar members that are provided upright on the pair of slide pieces 641C. Although not shown in FIGS. 9 and 10, two female screw holes are formed on the upper surfaces of the pair of shaft portions 642, respectively.

  As shown in FIG. 10, the gripping portions 643 and 644 are sheet metal working members whose base ends are fixed to the upper surfaces of the pair of shaft portions 642, respectively, and a gripping surface is formed at the bent tip. , 644 are formed with holes 643A and 644A for fixing to the female screw hole of the shaft portion 642.

As shown in FIG. 10 and FIG. 11A, the grip portion 643 includes a base end portion 643B and a bent portion 643C, and a pressing member that holds the end face of the sub-reflector 13 at the light beam emission opening is provided at the distal end of the bent portion 643C. A surface 643D and two claw portions 643E that protrude in the out-of-plane direction from the pressing surface 643D and abut against the outer peripheral surface of the sub-reflecting mirror 13 are provided.
Plural types of gripping portions 643 are set according to the size of the sub-reflecting mirror 13, and for example, when a sub-reflecting mirror having a smaller diameter than that of the present embodiment is attached, the gripping portion 643 is shown in FIG. As described above, the sub-reflecting mirror 13 having various diameters can be gripped by changing the gripping portion 645 in which the diameter of the pressing surface 645D at the tip portion is small and the shape of the claw portion 645E is different.

  The grip portion 644 includes a base end portion 644B and a bent portion 644C, similar to the grip portion 643, but the tip portion thereof is a flat surface that follows the shape of the outer peripheral surface of the opening of the sub-reflecting mirror 13.

When holding the sub-reflecting mirror 13 with the grips 643 and 644 described above, the slide piece 641C of the main body 641A is brought close to each other, and the sub-reflector 13 is held by the pressing surface 643D of the gripping part 643 as shown in FIG. , And the outer surface side of the sub-reflecting mirror is supported by the claw portion 643E.
At this time, the gripping portion 644 holds the outer peripheral edge of the light beam emission opening portion of the sub-reflecting mirror 13 at the tip surface thereof, whereby the sub-reflecting mirror 13 is gripped by the gripping portions 643 and 644.

(Method for manufacturing light source device)
Next, a procedure for manufacturing the light source device 10 using the above-described manufacturing apparatus 60 will be described based on the flowchart of FIG.

(Process S <b> 1) The integrated light source lamp 11 and elliptical reflector 12 before the sub-reflecting mirror 13 is attached are set on the holding frame 61 of the manufacturing apparatus 60.
(Processing S2) The sub-reflecting mirror 13 is set on the gripping parts 643 and 644 of the sub-reflecting mirror holder 640.
(Processing S3) The light source lamp 11 is turned on, and a light beam is emitted from the elliptical reflector 12.
(Process S4) Illuminance detection by the integrating sphere 621 of the light beam detector 62 is started.
(Process S5) It is determined whether or not the illuminance of the light beam from the light source device 10 detected by the integrating sphere 621 is maximized.
(Processing S6) When it is determined that the position of the sub-reflecting mirror 13 is the maximum in illuminance, the Y-axis direction adjustment unit 632, the X-axis direction adjustment unit 633, the Z-axis direction adjustment unit 634, Y of the position adjustment mechanism 63 The axis adjustment unit 635 and the X axis adjustment unit are operated to adjust the X, Y, and Z axis orientations of the sub-reflecting mirror 13.
(Process S7) When it is determined that the illuminance is maximum, as shown in FIG. 13, first, the sub-reflecting mirror 13 is moved from the maximum illuminance position to the light emitting unit 111 side (FIG. 13A), After the adhesive is applied to the end surface on the outer peripheral surface 132 side of the bonding surface 134 of the reflecting mirror 13 (FIG. 13B), the sub-reflecting mirror 13 is moved, and between the bonding surface 134 and the outer peripheral surface of the sealing portion 1122. The sub-reflecting mirror 13 is returned to the maximum illuminance position so that the adhering agent is applied and the outer peripheral surface 132 of the sub-reflecting mirror 13 is raised, and the adhesive is cured (FIG. 13C).
(Process S8) When the adhesive is cured, the light source lamp 11 is turned off, and the light source device 10 is removed from the holding frame 61 and the sub reflector mirror 640.

(Effect of embodiment)
According to this embodiment as described above, there are the following effects.

 (1) Since the sub-reflecting mirror 13 is separated from the light source lamp 11, the reflective film depends on the outer shape of the light emitting unit 111 as in the case of depositing a reflective film on the light emitting unit 111 of the light source lamp 11. There is nothing. Therefore, the shape of the reflecting surface of the sub-reflecting mirror 13 can be changed to a reflecting surface shape that allows the light reflected by the sub-reflecting mirror 13 to be effectively used by the elliptical reflector 12, and the light source lamp 11, Since the position adjustment can be performed between the reflecting mirror 13 and the ellipsoidal reflector 12, the light source utilization rate of the light source device 10 using the sub-reflecting mirror 13 can be greatly improved.

 (2) The outer peripheral surface 132 of the sub-reflecting mirror 13 is indicated by boundary lines L3 and L4 connecting the second focal position L2 of the elliptical reflector 12 and the distal end side end of the sealing portion 1122 on the distal end side (front side) of the light source lamp 11. Since the light reflected by the elliptical reflector 12 is not blocked by the outer peripheral surface 132 and the front sealing portion 1122 of the sub-reflecting mirror 13, the utilization rate of the light source light Can be further improved.

 (3) Since the sub-reflecting mirror 13 is formed by polishing the cylindrical member 136, the accuracy of the curvature of the reflecting surface 131 can be improved, so that the utilization factor of the light source light can be further improved. Can do.

 (4) Since the end surface on the base end side (rear side) of the sub-reflecting mirror 13 in the light beam emission direction is an inclined surface 135, it is emitted from the light emission center of the arc image D of the light emitting unit 111 and is directly reflected by the elliptical reflector 12. Since the light to be reflected can be reflected by the elliptical reflector 12 without being blocked by the end face on the base end side (rear side) in the light beam emission direction of the sub-reflecting mirror 13, it is possible to reliably improve the utilization rate of the light source light. it can.

 (5) Since the outer peripheral surface 132 is polished so as to follow the spherical polished portion of the reflecting surface 131 of the sub-reflecting mirror 13, the surface accuracy of the outer peripheral surface 132 is ensured and light is blocked by the sub-reflecting mirror 13. Can be reliably prevented. Further, by polishing the reflecting surface 131 and the outer peripheral surface 132, it is difficult to apply a mechanical load to the material when the cylindrical member 136 is processed, and the sub-reflecting mirror 13 can be reduced in size, weight, and thickness. Can do.

 (6) When the sub-reflecting mirror 13 is fixed to the front sealing portion 1122 of the light source lamp 11, when an adhesive is applied to the entire surface without a gap between the adhesive surface 134 and the outer peripheral surface of the sealing portion 1122, the light source lamp 11, the sub-reflecting mirror 13 can be firmly fixed. On the other hand, by intermittently applying the adhesive at 3 or 4 locations, gaps are formed in other portions, so that the heated light emitting portion 111 can be used as a cooling air flow path. This is advantageous for cooling.

 (7) By adopting the light source device 10 for the projector 1, the projector 1 that can enjoy the above-described effects can be obtained, and the projector 1 can be reduced in size and brightness.

(8) The light beam directly reflected by the elliptical reflector 12 from the light source lamp 11 and the sub-reflecting mirror 1
3, while adjusting the position of the sub-reflecting mirror 13 so that the illuminance is optimal while detecting the illuminance of the light beam reflected by the elliptical reflector 12, Since the light source device 10 can be fixed to the lamp 11, the light source device 10 that greatly improves the utilization rate of the light source light can be reliably manufactured.

 (9) When applying an adhesive between the adhesive surface 134 of the sub-reflecting mirror 13 and the outer peripheral surface of the sealing portion 1122 on the front side of the light source lamp 11, the sub-reflecting mirror 13 is moved from the maximum illuminance position to the light emitting unit 111 side. After the movement, the adhesive is applied to the end face on the outer peripheral surface 132 side of the adhesive surface 134, and the sub-reflector 13 is again moved to the maximum illuminance position so that the adhesive is blended between the adhesive surface 134 and the reflective surface 132. Since it is restored, the adhesive can be sufficiently blended between the adhesive surface 134 where the gap is narrow and the adhesive is difficult to apply and the outer peripheral surface of the sealing portion 1122, and even an adhesive with a short curing time can be used for a single time. Can sufficiently blend the adhesive between the adhesive surface 134 and the outer peripheral surface of the sealing portion 1122, so that the sub-reflecting mirror 13 can be firmly fixed to the sealing portion 1122 at the maximum illuminance position. Producing light source device 10 with high utilization efficiency Can.

 (10) Since the adhesive 137 is applied so as to rise outside the outer peripheral surface 132 of the sub-reflecting mirror 13, after the adhesive 137 is cured, the sub-reflecting mirror 13 becomes an elliptical reflector with respect to the light source lamp 11. 12 can be controlled to move to the front side (right side in FIG. 5A) of the central axis of the light beam emitted from the light beam 12 in the light beam emission direction. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

[2] Second Embodiment Next, a second embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In the first embodiment described above, the outer peripheral surface 132 of the sub-reflecting mirror 13 has a curved surface shape that follows the curvature of the reflecting surface 131, and the sub-reflecting mirror 13 reflects the cylindrical member 136 by polishing it. The surface 131 and the outer peripheral surface 132 were formed.
In contrast, in the sub-reflecting mirrors 71 to 74 according to the second embodiment, as shown in FIGS. 14 and 15, the outer peripheral surfaces 712, 722, 732, and 742 have a substantially cylindrical column shape or a substantially truncated cone shape. The point is different. Such sub-reflecting mirrors 71 to 74 are formed by polishing the reflecting surface 131 of the cylindrical member 136, but can be formed by processing the outer peripheral surfaces 712, 722, 732, and 742 at all or by simple cutting. .

  As shown in FIG. 14A, the sub-reflecting mirror 71 according to the second embodiment is an end surface on the side where the cylindrical outer peripheral surface 712 and the reflecting surface 131 of the sub-reflecting mirror 71 are formed. A proximal end surface 715 perpendicular to 712, a distal end surface 716 which is the end surface opposite to the proximal end surface 715, and a reflecting surface 131 having a center of curvature disposed on the central axis of the cylindrical outer peripheral surface 712. And has a substantially trapezoidal cross-sectional shape facing each other. The sub-reflecting mirror 71 can be manufactured by processing the cylindrical member 136. The sub-reflecting mirror 71 is formed only by processing the reflecting surface 131, and the outer peripheral surface and end surface of the cylindrical member 136 are completely processed. The outer peripheral surface 712 and the end surfaces 715 and 716 are cut surfaces of the base material.

  The distal end side (front side) of the illumination optical axis A of the sub-reflecting mirror 71 in the direction of light flux emission fits the end portion of the distal end surface 716 and the outer peripheral surface 712 into the inner part of the cone indicated by the boundary lines L3 and L4. Further, since the base end side end surface 715 is an end surface perpendicular to the illumination optical axis A, the range of the angle θa shown in FIG. 14A among the light beams emitted from the light emitting unit 111 is the base end side end surface. Although it is blocked by 715, the proximal end surface 715 is small so that the utilization rate of light emitted from the light emitting unit 111 does not deteriorate.

  As shown in FIG. 14B, the distal-side end surface 715 of the sub-reflecting mirror 71 is similar to the inclined surface 135 of the first embodiment in the light beam emission direction proximal end side (rear side) of the illumination optical axis A. And an inclined surface 725 that matches the angle θ formed by the light beam emitted from the light emitting unit 111 and directly incident on the elliptical reflector 12.

Further, the sub-reflecting mirror 71 has a tapered surface 726 </ b> C formed by chamfering a joint portion between the distal end side end surface 716 and the adhesive surface 134.
The tapered surface 726 </ b> C is formed to facilitate the flow of the adhesive between the outer peripheral surface of the sealing portion 112 and the adhesive surface 134.

  Further, as shown in FIG. 15A, the sub-reflecting mirror 73 has a front end side end surface 736 and a base end side end surface 735 that are the same as the front end side end surface 725 and the base end side end surface 726 of the sub reflecting mirror 72, and The surface 732 has a truncated cone shape indicated by a straight line inside the cone indicated by the boundary lines L3 and L4 and substantially parallel to the boundary lines L3 and L4. That is, the inclination angle of the outer peripheral surface 73 with respect to the illumination optical axis A is substantially equal to the inclination angle of the boundary line L3 or L4 with respect to the illumination optical axis A. The sub-reflecting mirror 73 can be manufactured by processing a cylindrical member. The sub-reflecting mirror 73 is formed by polishing the reflecting surface 131, and the outer peripheral surface 732 is a substantially frustoconical side surface as a whole. Is formed by cutting. With such a shape, the length of the sub-reflecting mirror 73 in the direction of the illumination optical axis A can be increased, so that the length of the bonding surface 134 can be sufficiently secured and the bonding area can be improved.

  Further, as shown in FIG. 15B, the sub-reflecting mirror 74 has a front end side end surface 746 similar to the front end side end surface 736 of the sub reflecting mirror 73, and the base end side end surface 745 has a luminous flux of the illumination optical axis A. The inclination angle formed between the base end side (rear side) in the emission direction and the base end side end surface 745 is an inclined surface having an inclination angle larger than the angle θ, so that light can be more reliably prevented from being blocked. In addition, the sub-reflecting mirror 74 has a tilt angle with respect to the illumination optical axis A of the outer peripheral surface 742 that is tighter, that is, larger than the tilt angle of the boundary line L3 or L4 with respect to the illumination optical axis A, and is indicated by boundary destinations L3 and L4. Even if the gap between the outer cone 742 and the outer peripheral surface 742 is widened and the position of the sub-reflecting mirror 74 is adjusted with respect to the light source lamp 11, the outer peripheral surface 742 becomes more difficult to protrude from the cone indicated by the boundary lines L3 and L4. It is a shape like this. The sub-reflecting mirror 74 can be manufactured by processing a cylindrical member. The sub-reflecting mirror 74 is formed by polishing the reflecting surface 131, and the outer peripheral surface 742 is generally a truncated cone-shaped side surface. Is formed by cutting.

  The light source device including the sub-reflecting mirrors 71 to 74 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.

  According to the second embodiment as described above, in addition to the effects (1) to (4) and (6) to (10) described in the above embodiment, the following effects can be obtained.

(11) Since the outer peripheral surfaces 732 and 742 have a truncated cone shape like the sub-reflecting mirrors 73 and 74, the light emitted from the elliptical reflector 12 can be more reliably prevented. The utilization efficiency of the emitted light can be further improved, and illumination light with high illuminance can be emitted from the light source device.
Further, by adopting such a shape, the size of the sub-reflecting mirrors 73 and 74 in the direction of the illumination optical axis A can be lengthened to secure a large area of the bonding surface. Adhesive strength can be improved. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

 (12) In the case of the sub-reflecting mirror 71, since the outer peripheral portion is not processed, the manufacturing of the sub-reflecting mirror 71 is further simplified.

 (13) Since the sub-reflecting mirror 71 has a tapered surface 726 </ b> C formed by chamfering at the portion where the tip end side end surface, which is an adhesive application portion, and the adhesive surface are joined, the adhesive is bonded to the adhesive surface 134 and the sealing portion 1122. The adhesive strength can be further improved. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

[3] Third Embodiment Next, a third embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
The sub-reflecting mirror 13 according to the first embodiment described above or the sub-reflecting mirrors 71, 73, 74 according to the second embodiment, as shown in FIGS. 4, 14, and 15, are outer peripheral surfaces 132, 712, 732. , 742 and the bonding surface 134 were not processed at all.
On the other hand, as shown in FIG. 16A, the sub-reflecting mirror 76 according to the third embodiment has a plurality of cutout grooves 761 along the ridgeline of the joint portion between the outer peripheral surface 132 and the adhesive surface 134. It differs in that it is formed.

The notch groove 761 is formed so as to expand outward from the periphery of the opening for inserting the sealing portion 1122 of the sub-reflecting mirror 76, and the shape of each notch groove 761 is substantially triangular when viewed from the front.
Such a cut-out groove 761 can be formed by intentionally causing 0.1 mm or more of chipping at the periphery of the opening of the outer peripheral surface 132 when the opening of the sub-reflecting mirror 76 is processed. In FIG. 16A, notch grooves 761 are formed at eight locations so as to expand outward from the opening, but the position and number of the notch grooves 761 are appropriately changed according to the material of the adhesive 137 and the like. It is possible.

  Further, not only the notch groove 761 by chipping but also a sub-reflecting mirror 77 in which a groove 771 is formed by a grinder or the like on the peripheral edge of the opening of the outer peripheral surface 132 as shown in FIG.

The light source device including the sub-reflecting mirrors 76 and 77 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.
However, when the silica / alumina-based adhesive 137 is applied between the adhesive surface 134 and the outer peripheral surface of the sealing portion 1122, the adhesive 137 is also filled in the notch grooves 761 and the grooves 771. Then, an adhesive is applied and fixed to the outer peripheral surface 132 outside the opening.

  The sub-reflecting mirrors 76 and 77 according to the third embodiment have the following effects in addition to the effects (1) to (10) described in the above-described embodiment.

 (14) Since the notch groove 761 and the groove 771 are formed on the periphery of the opening of the sub-reflecting mirrors 76 and 77, the notch groove 761 and the groove 771 can be filled with the adhesive 137. After curing, the sub-reflecting mirrors 76 and 77 are restricted from rotating with respect to the light source lamp 11, and the sub-reflecting mirrors 76 and 77 positioned with respect to the light source lamp 11 are displaced after the adhesive 137 is cured. You can prevent it from happening. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

[4] Fourth Embodiment Next, a fourth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
As described above, in the sub-reflecting mirror 13 according to the first embodiment, the outer peripheral surface 132 of the sub-reflecting mirror 13 has a curved surface shape that follows the curvature of the reflecting surface 131, and the outer peripheral surface so as to follow the reflecting surface 131. 132 was polished and formed to have a substantially uniform thickness (FIG. 4B).
On the other hand, the sub-reflecting mirror 81 according to the present embodiment has a different cross-sectional shape.
In addition, when a dielectric multilayer film is formed on the reflecting surface by vapor deposition, preparations described later are made.

In the sub-reflecting mirror 81, as shown in FIG. 17, the reflecting surface 131 and the outer peripheral surface 811 are both spherical surfaces, and in the portion where the adhesive surface 812 to be attached to the front sealing portion 1122 is formed. The thickness of the adhesive surface 812 is larger than that of the end portion where the reflecting surface 131 that contacts the light emitting portion 111 is formed.
Such a difference in thickness depends on the fact that the center of curvature O3 of the outer peripheral surface 811 and the center of curvature O1 of the reflective surface 131 are shifted on the illumination optical axis A.

  Such a sub-reflecting mirror 81 is accommodated so as to substantially occupy a space between the cone (see also FIG. 2) indicated by the boundary lines L3 and L4 and the light source lamp 11.

  Here, the distance between the center of curvature O3 of the outer peripheral surface 811 and the center of curvature O1 of the reflecting surface 131 varies depending on the shape of the sub-reflecting mirror 81 and the light source lamp 11, but is set to 1.7 mm in this embodiment. Yes.

  In the present embodiment, the sphere center O4 of the light emitting unit 111 substantially coincides with the light emission center O2 (FIG. 29) between the electrodes 111A in the light emitting unit 111. The outer peripheral surface 811 is formed in a spherical shape with a diameter of 14.4 mm. When the sub-reflecting mirror 81 is attached to the front sealing portion 1122, the spherical center O4 of the light emitting portion 111 and the center of curvature O1 of the reflecting surface 131 are formed. The distance between the spherical center O4 of the light emitting unit 111 and the outer peripheral surface 811 is 7.2 mm, which is the radius of the sphere including the outer peripheral surface 811. Thereby, the outer peripheral part of the sub-reflecting mirror 81 is stored inside the cone shown by the boundary lines L3 and L4. The angle θ formed by the portion on the proximal end side (rear side) of the illumination optical axis A in the light beam emission direction and the light beam emitted from the light emitting unit 111 and directly incident on the elliptical reflector 12 is 105 ° or less.

Here, for example, the outer peripheral surface of the sub-reflecting mirror having the centers of curvature O1 and O3 of the reflecting surface 131 and the outer peripheral surface 811 as the same axis is the front sealing portion as shown by a two-dot chain line CL1 in FIG. The thickness dimension T2 of the portion where the bonding surface on the 1122 side is formed becomes thinner than the thickness dimension T1 of the sub-reflecting mirror 81 where the center of curvature O3 deviates from the center of curvature O1, and a large area of the bonding surface 812 cannot be secured. .
Further, the outer peripheral surface of the sub-reflecting mirror having the same thickness as the thickness dimension T1 is set out from the cone indicated by the boundary lines L3 and L4 as indicated by the two-dot chain line CL2 in FIG. The light beam reflected by the elliptical reflector 12 is blocked.
Such a sub-reflecting mirror 81 is formed, for example, by polishing a thick cylindrical member 136a (in this case, an outer diameter of Φ14 mm). A surface 811 is formed.

  At this time, a plurality of notch grooves 761, 771 as in the third embodiment described above along the ridgeline of the portion where the outer peripheral surface 811 and the adhesive surface 812 of the sub-reflecting mirror 81 are joined (FIG. 22A ( B)) may be formed.

  Then, a dielectric multilayer film made of tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2) is deposited on the reflective surface 131. As a preparatory step, the adhesive surface 812 is masked by the following method.

  18A and 18B show the masked sub-reflecting mirror 81. FIG.

As shown in FIG. 18A, the adhesive surface 812 is masked by applying a sealing material SL that cures in a rubber (or gel) shape. When the dielectric multilayer film MF deposition on the reflective surface 131 is performed in this state, the dielectric multilayer film does not go around and adhere to the adhesive surface 812, and the adhesive surface 812 is kept smooth. The sealing material SL is removed after the formation of the dielectric multilayer film MF.
Masking of the adhesive surface 812 is performed by covering the adhesive surface 812 with a jig J that fits into the opening for inserting the sealing portion 1122 of the sub-reflecting mirror 81 as shown in FIG. May be. The front end portion of the jig J is a disc-shaped fitting portion J1 that abuts the entire bonding surface 812. The dielectric multilayer film MF is formed by vapor deposition while the jig J closes the opening of each sub-reflecting mirror 81 and masks the adhesive surface 812.

  Then, the sub-reflecting mirror 81 manufactured in this way is attached to the sealing portion 1122 of the light source lamp 11, and a silica / alumina adhesive 137 is applied from the outer peripheral surface 811 side. At this time, the coating is applied so as to rise outside the outer peripheral surface 811.

  The light source device including the sub-reflecting mirror 81 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.

  According to the fourth embodiment, in addition to the effects (1) to (10) described in the above embodiment, the following effects can be obtained.

(15) The center of curvature O3 of the outer peripheral surface 811 is shifted from the center of curvature O1 of the reflecting surface 131 to the front side on the illumination optical axis A so that the sub-reflecting mirror 81 is located inside the cones indicated by the boundary lines L3 and L4. By being positioned, the light emitted from the elliptical reflector 12 can be more reliably prevented from being blocked, the use efficiency of the light emitted from the light source lamp 11 can be further improved, and the illuminance from the light source device is high. Illumination light can be emitted.
Further, by adopting such a shape, the sub-reflecting mirror 81 is located in the range in which the sub-reflecting mirror 81 is located inside the cones indicated by the boundary lines L3 and L4, that is, within the above-described light flux unusable region. The area of the bonding surface 812 can be expanded by increasing the size, and the light source lamp 11 can be firmly bonded. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

 (16) The sub-reflecting mirror 81 extends toward the base end side (rear side) in the light beam emission direction of the illumination optical axis A between the cone indicated by the boundary lines L3 and L4 and the outer peripheral portion of the light source lamp 11. The area where the mirror 81 covers the light emitting unit 111 can be expanded, and the maximum angle θ formed by the portion of the illumination optical axis A on the rear side in the light beam emission direction and the light beam directly incident on the elliptical reflector 12 from the light emitting unit 111 is reduced. As a result, the size of the elliptical reflector 12 in the direction of the illumination optical axis A can be further reduced.

 (17) Also, since the adhesive surface 812 is masked and the dielectric multilayer film does not adhere to the adhesive surface 812 when the dielectric multilayer film is deposited on the reflective surface 131, the adhesive strength can be improved. it can. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

[5] Fifth Embodiment Next, a fifth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In the above-described embodiment, the sub-reflecting mirrors 13, 71, 73, 74, 76, 81 are manufactured by cutting or polishing using a cylindrical member as a base.
In contrast, the sub-reflecting mirror according to the fifth embodiment is different in that raw materials such as quartz and alumina ceramics are in a molten state and are embossed.

  That is, as shown in FIG. 21, the sub-reflecting mirror 75 according to the fifth embodiment is formed with a neck portion 753 extending from the reflecting surface 751 and the outer peripheral surface 752 side to the front end side (front side) of the light source lamp 11. An adhesive surface 754 is formed on the inner surface side of the neck portion 753. The adhesive surface 754 is formed as an inner peripheral surface of a truncated cone-shaped hole whose diameter gradually increases from the reflecting surface 751 toward the tip side (front side), and injects adhesive from the tip side (front side) of the sub-reflecting mirror 75. The structure is easy to do.

  The base end side end surface 755 of the sub-reflecting mirror 75 has a light side emitted from the light emitting unit 111 and directly incident on the elliptical reflector 12 and a part on the base end side (rear side) in the light beam emission direction of the illumination optical axis A. It is formed as an inclined surface along the maximum angle θ formed, and the part of contact with the outer peripheral surface 752 is R-chamfered and has a shape that fits inside the cone indicated by the boundary lines L3 and L4.

  Furthermore, the front end side end surface 756 of the sub-reflecting mirror 75 is formed in an R-shaped cross section.

  The formation of the R surface at the end of the sub-reflecting mirror 75 takes into account demolding at the time of pressing, and the end is engaged with the mold at the time of demolding so that the reflecting surface 751 is not distorted. .

  The light source device including the sub-reflecting mirror 75 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.

  Note that the sub-reflecting mirror 75 is formed with a frustoconical hole bonding surface 754 whose diameter gradually increases from the reflecting surface 751 toward the tip side (front side). If the adhesive can be sufficiently injected between the adhesive surface 754 of the reflecting mirror 75 and the outer peripheral surface of the light source lamp 11, the operation of moving the sub-reflecting mirror 75 and allowing the adhesive to blend in (Step S7) may be omitted. .

  According to the fifth embodiment, in addition to the effects (1), (2), (4), and (6) to (10) described in the above embodiment, the following effects are obtained.

(18) Since the sub-reflecting mirror 75 is manufactured by stamping, a high-precision sub-reflecting mirror 75 can be produced in a large amount of time in a short time compared to the case where a cylindrical member is processed.
In addition, since the degree of freedom of shape of the sub-reflecting mirror 75 is improved by stamping as compared with cutting and polishing, various sub-reflecting mirror shapes can be handled.

 (19) Since the neck portion 753 is formed in the sub-reflecting mirror 75, the adhesive surface 754 can be secured long, and the adhesive area with the sealing portion 1122 is increased, so that the light source lamp 11 is strong. Can be fixed to. And by making the adhesive surface 754 into the shape of an inner surface of a truncated cone that expands to the front end side (front side), it becomes easy to inject an adhesive, and the adhesive fixation can be further strengthened. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

(20) Since the sub-reflecting mirror 75 is formed with a frustoconical hole adhering surface 754 whose diameter gradually increases from the reflecting surface 751 toward the tip side (front side), the luminous flux emission direction of the illumination optical axis A It is easy to inject adhesive from the front end side (front side) from the front end side (front side) of the adhesive surface 754 and the light flux of the sub-reflector 75.
Further, the sub-reflecting mirror 75 having the adhesive surface 745 having such a shape has the sub-reflecting mirror 75 with respect to the light source lamp 11 after the adhesive 137 is cured. 19 can be restricted from moving to the right side. Therefore, it is possible to prevent a decrease in illuminance of the illumination light emitted from the light source device 10.

 (21) In the method of manufacturing the light source device including the sub-reflecting mirror 75, the sub-reflecting mirror 75 is formed with a frustoconical hole bonding surface 754 whose diameter gradually increases from the reflecting surface 751 toward the front end side (front side). Thus, it is easy to inject adhesive from the front end side (front side) of the illumination optical axis A in the light beam emission direction, and from the front end side (front side) of the light flux of the sub-reflecting mirror 75. Since the adhesive 137 can be sufficiently filled between the surfaces, the operation of moving the sub-reflecting mirror 75 to blend the adhesive can be omitted, and the manufacturing operation can be simplified.

[6] Sixth Embodiment Next, a sixth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
The adhesive surfaces 134 and 812 according to the above-described embodiment are formed in a cylindrical shape having the same diameter from the reflective surface 131 to the outer peripheral surface or the end surface on the front end side.
On the other hand, in the sub-reflecting mirror 84 according to the present embodiment, the adhesive surface 841 is different in that it is a frustoconical tapered surface that gradually decreases in diameter from the outer peripheral surface 132 toward the reflecting surface 131. The above-described embodiment can be applied to an outer peripheral surface or the like having other configurations.

  As shown in FIG. 20, the bonding surface 841 of the sub-reflecting mirror 84 is configured as a truncated cone-shaped tapered surface that gradually decreases in diameter from the outer peripheral surface 132 toward the reflecting surface 131. That is, on the reflective surface 131 side, the space between the adhesive surface 841 and the sealing portion 1122 is narrow, and the area of the reflective surface 131 is increased accordingly. In contrast to the reflective surface 131 side, the space between the adhesive surface 841 and the sealing portion 1122 is wide on the outer peripheral surface 132 side.

  The light source device including the sub-reflecting mirror 84 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.

  The sub-reflecting mirror 84 is formed with a frustoconical hole bonding surface 841 whose diameter gradually increases from the reflecting surface 131 toward the outer peripheral surface 132, so that the sub-reflecting mirror whose position is adjusted to the maximum illuminance position is formed. If the adhesive can be sufficiently injected between the adhesive surface 841 of 84 and the outer peripheral surface of the light source lamp 11, the operation of moving the sub-reflecting mirror 84 and allowing the adhesive to conform in (Process S7) may be omitted.

  According to the sixth embodiment, in addition to the effects described in the above-described embodiments, the following effects can be obtained.

(22) Adhesive 137 can be easily injected from the outer peripheral surface 132 side where the space between the adhesive surface 841 and the sealing portion 1122 is wide, and the adhesive 137 overflows in the vicinity of the adhesive surface 841 on the reduced reflective surface 131 side. And the reflection performance of the sub-reflecting mirror 84 is not impaired. Furthermore, since the reflecting surface 131 is expanded at the reduced diameter portion, it can further contribute to the utilization rate of the light source light.
Further, the taper portion having a reduced diameter can mechanically restrict the movement of the sub-reflecting mirror 83 toward the rear side in the light beam emission direction with respect to the light source lamp 11 after the adhesive 137 is cured.

[7] Seventh Embodiment Next, a seventh embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In each of the above embodiments, no step or protrusion is formed on the bonding surfaces 134, 754, 812, 841 of the sub-reflecting mirror.
In contrast, the sub-reflecting mirror 83 according to the present embodiment is different in that a step is formed on the bonding surface 831. The above-described embodiment can be applied to an outer peripheral surface or the like having other configurations.

In this sub-reflecting mirror 83, as shown in FIG. 21, the end of the adhesive surface 831 on the reflective surface 131 side protrudes toward the outer peripheral surface of the sealing portion 1122, and has a surface continuous with the reflective surface 131. A step portion is formed, and this portion is a step portion 831A. That is, the step portion 831A is a joint portion between the adhesive surface 831 and the reflective surface 131 on the reflective surface 131 side.
In addition, the space between the bonding surface 831 and the sealing portion 1122 is wide from the portion where the outer peripheral surface 132 and the bonding surface 831 are joined to the step portion 831A.

The light source device including the sub-reflecting mirror 83 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.
The sub-reflecting mirror 83 is positioned at the maximum illuminance position because the space between the adhesive surface 831 and the sealing portion 1122 is wide from the joint portion between the outer peripheral surface 132 and the adhesive surface 831 to the step portion 831A. If the adhesive can be sufficiently injected between the adhesive surface 831 of the sub-reflecting mirror 83 and the outer peripheral surface of the light source lamp 11, the operation of moving the sub-reflecting mirror 83 and blending the adhesive in (Step S7) is omitted. May be.

  According to the seventh embodiment, in addition to the effects described in the above-described embodiments, there are the following effects.

(23) The adhesive 137 can be easily injected from the outer peripheral surface 132 side where the space between the adhesive surface 132 and the sealing portion 1122 is wide, and the adhesive 137 is blocked by the step portion 831A. It can prevent overflowing and getting dirty.
Further, the step portion 831A can mechanically restrict the movement of the sub-reflecting mirror 83 to the rear side in the light emission direction of the light emitting unit 111 with respect to the light source lamp 11 after the adhesive 137 is cured.
Furthermore, since the light beam emitted from the light emitting unit 111 can be reflected even at the joint portion between the step portion 831A and the reflecting surface 131, it is possible to contribute to the utilization rate of the light source light.

[8] Eighth Embodiment Next, an eighth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
The bonding surfaces 134 and 812 of the sub-reflecting mirror according to the above-described embodiment are formed in a cylindrical shape having the same diameter from the reflecting surface 131 to the outer peripheral surface or the end surface on the front end side.
On the other hand, as shown in FIG. 22, the sub-reflecting mirror 78 according to the present embodiment has a truncated cone that gradually decreases in diameter as the adhesive surface 781 on the inner peripheral surface of the opening portion moves from the reflective surface 131 toward the outer peripheral surface 132. It differs in that it is configured as a tapered surface. The above-described embodiment can be applied to an outer peripheral surface or the like having other configurations.

  Such a sub-reflecting mirror 78 is attached to the sealing portion 1122 of the light source lamp 11, and the adhesive 137 is applied from the outer peripheral surface 132 side. At this time, the adhesive 137 is applied so as to rise to the outside of the outer peripheral surface 132.

Here, in the sub-reflecting mirror 82, as shown in FIG. 23, the taper angle AG1 of the bonding surface 821 is set to 10 ° with respect to the illumination optical axis A.
When the outer peripheral surface of the sealing portion 1122 and the illumination optical axis A are parallel, the adhesive surface 821 forms a taper angle AG1 with respect to the outer peripheral surface of the sealing portion 1122.

  Further, as shown in FIG. 24A, the adhesive 137 applied between the adhesive surface 821 and the sealing portion 1122 is formed so as to bulge about 1 mm from the adhesive surface 821 outside the outer peripheral surface 132. (See H1 in FIG. 24 (A)). When the portion to which the adhesive 137 is applied is viewed from the front side in the light emission direction of the light emitting portion 111, the adhesive 137 is used for inserting the sealing portion 1122 of the sub-reflecting mirror 82 as shown in FIG. A raised portion is continuous in a ring shape along the periphery of the opening.

  Here, the taper angle AG1 (FIG. 23) can be appropriately set in a range of 1 ° to 10 ° depending on the shape of the sub-reflecting mirror 82, the elliptical reflector 12, and the light source lamp 11.

  In the present embodiment, for example, the diameter of the opening for inserting the sealing portion 1122 of the sub-reflecting mirror 82 on the outer peripheral surface 132 side is the size N2 obtained by adding 0.5 mm to the maximum outer diameter N1 of the sealing portion 1122. Is set. The reflecting surface 131 is sufficiently secured so that the light usable angle AG2 formed by the ridge line of the joint portion between the reflecting surface 131 and the adhesive surface 821 and the illumination optical axis A is 40 ° or less. The diameter dimension on the reflecting surface 131 side of the opening of the reflecting mirror 82 is shown as N3 in FIG.

  The adhesive 137 is appropriately filled according to the shape of the sub-reflecting mirror 81 and the light source lamp 11, the material of the adhesive 137, the viscosity, and the like. For example, the dimension of the adhesive surface 821 in the direction of the illumination optical axis A is 2 .94 mm, and the dimension of the adhesive 137 outside the outer peripheral surface 132 in the same direction is set to 1 mm. Further, the adhesive 137 is applied so as to rise 1 mm from the adhesive surface 821.

  The light source device including the sub-reflecting mirrors 78 and 82 of the present embodiment can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.

  According to the eighth embodiment, in addition to the effects (1) to (21) described in the above embodiment, the following effects can be obtained.

 (24) Since the adhesive 137 is applied so as to rise to the outside of the outer peripheral surface 132 of the sub-reflecting mirror 78, after the adhesive 137 is cured, the sub-reflecting mirror 78 applies illumination light to the light source lamp 11. Movement to the tip side (front side) of the shaft A (right side in FIG. 22) can be restricted. The movement of the sub-reflecting mirror 78 toward the base end side (rear side) (left side in FIG. 22) of the illumination optical axis A in the light beam emission direction is a tapered surface where the adhesive surface 781 expands to the base end side (rear side). Therefore, it can be regulated if the adhesive 137 is cured. Therefore, according to the sub-reflecting mirror 78 having such an adhesive surface 781, the movement in the direction of the illumination optical axis A can be restricted when the light source lamp 11 is fixed to the light source lamp 11 by the adhesive 137 and is emitted from the light source device 10. It is possible to prevent a decrease in illuminance of the illumination light.

(25) The adhesive surface 137 is filled with the adhesive 137 so that the adhesive surface 821 and the outer peripheral surface 132 are sandwiched from both sides by an acute angle at the contact portion between the adhesive surface 821 and the outer peripheral surface 132. Even when a silica / alumina-based adhesive that can be firmly bonded and has high heat resistance but cannot sufficiently secure adhesiveness as the adhesive 137 is adopted, the movement of the sub-reflecting mirror 82 can be reliably controlled.
In addition, since the taper angle AG1 of the adhesive surface 821 is set to 1 ° or more and 10 ° or less, a larger reflecting surface 131 can be secured and the light beam emitted from the light emitting unit 111 can be used without waste.
Therefore, according to the sub-reflecting mirror 81 having such an adhesive surface 821, when the light source lamp 11 is fixed by the adhesive 137, the sub-reflecting mirror 82 emits light while sufficiently restricting the movement of the sub-reflecting mirror 82 in the direction of the illumination optical axis A. It is possible to contribute to an improvement in the utilization efficiency of the light source light emitted from the unit, and the illuminance of the illumination light emitted from the light source device 10 can be improved.

[9] Ninth Embodiment Next, a ninth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In each of the above-described embodiments, the surface of the bonding surfaces 134, 754, 781, 812, 821, 831, 841 of the sub-reflecting mirror was not particularly processed.
On the other hand, as shown in FIG. 25, the sub-reflecting mirror 79 according to this embodiment is different in that the adhesive surface 791 of the sub-reflecting mirror 79 is a rough surface on which irregularities are formed. The above-described embodiment can be applied to an outer peripheral surface or the like having other configurations.

The unevenness of the adhesive surface 791 can be formed by roughening the surface by processing or performing chemical treatment at the material stage.
When the adhesive 137 is applied to the adhesive surface 791, the adhesive 137 enters the projections and depressions, so that the movement in the direction of the illumination optical axis A is restricted as described above, and the rotation around the illumination optical axis A and Deviation in the direction of the illumination optical axis A can also be regulated.

  The light source device including the sub-reflecting mirror 79 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment.

  The sub-reflecting mirror 79 according to the ninth embodiment has the following effects in addition to the effects described in the above-described embodiments.

 (26) Since the adhesive surface 791 of the sub-reflecting mirror 79 is configured such that the adhesive 137 enters the uneven surface, the movement of the light source lamp 11 in the direction of the illumination optical axis A is restricted after the adhesive 137 is cured. In addition, rotation around the illumination optical axis A can also be restricted. Therefore, according to the sub-reflecting mirror 78 having such an adhesive surface 781, the movement in the direction of the illumination optical axis A can be restricted when the light source lamp 11 is fixed to the light source lamp 11 by the adhesive 137 and is emitted from the light source device 10. It is possible to prevent a decrease in illuminance of the illumination light.

[10] Tenth Embodiment Next, a tenth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In each of the above embodiments, the outer peripheral surface of the sub-reflecting mirror was not subjected to any processing other than cutting, polishing, or stamping. On the other hand, the sub-reflecting mirror 85 according to the present embodiment is from the outer peripheral surface 851. The difference is that the outer peripheral surface 851 is mirror-finished and translucent so that the adhesive surface 134 can be seen through (FIG. 26). The embodiment described above can be applied to the outer shape and the like of the outer peripheral surface which is another configuration.

  As described above, the sub-reflecting mirror 85 is formed by polishing the cylindrical member 136 made of a light-transmitting material such as crystallized glass such as quartz, neo-ceram (trade name of Asahi Glass Co., Ltd.), sapphire, or alumina ceramics. However, the outer peripheral surface 851 is mirror-finished by further polishing. As shown in FIG. 26, the sub-reflecting mirror 85 extends from the outer peripheral surface 851 to the back surface of the dielectric multilayer film on the reflecting surface 131 surface. It is transparent from the surface 851 to the adhesive surface 134.

  Here, as the mirror finish, film formation, heat treatment of the outer peripheral surface 851, and the like can be employed.

  Note that it is also conceivable that light is transmitted by partial polishing or coating so that only the portion of the outer peripheral surface 851 from the processed portion to the end of the adhesive surface 134 on the reflective surface 131 side can be seen through.

  Since the sub-reflecting mirror 85 is ground from the translucent cylindrical member 136, the sub-reflecting mirror 85 is translucent from the outer peripheral surface 851 to the adhesive surface 134 without polishing the adhesive surface 134 more smoothly. Thus, the adhesive surface 134 side can be seen from the outer peripheral surface 851 side.

  Of course, the adhesive surface 134 may be polished more smoothly or heated in substantially the same manner as the outer peripheral surface 851.

  Furthermore, the space between the adhesive surface 134 and the sealing portion 1122 is set narrow, and the area of the reflective surface 131 is expanded accordingly.

  The light source device including the sub-reflecting mirror 85 can be manufactured using the manufacturing apparatus 60 of the first embodiment in the same manner as the manufacturing method of the first embodiment. The sub-reflecting mirror 85 can be seen through the reflecting surface 131 from the outer peripheral surface 851, so that the sub-reflecting mirror 85 is injected between the adhesive surface 841 of the sub-reflecting mirror 84 adjusted to the maximum illuminance position and the outer peripheral surface of the light source lamp 11. If injection can be performed while viewing the adhesive application range, the operation of moving the sub-reflecting mirror 84 and allowing the adhesive to blend in (Processing S7) may be omitted.

  According to the tenth embodiment, in addition to the effects described in the above-described embodiments, the following effects can be obtained.

(27) The outer peripheral surface 851 is processed so that the side of the adhesive surface 134 can be seen through from the outer peripheral surface 851, and the sub-reflecting mirror 85 is translucent, and the adhesive 137 between the adhesive surface 134 and the sealing portion 1122 is made transparent. While visually checking the filling state, the injection amount can be optimally adjusted so that the adhesive 137 does not overflow to the reflecting surface 131 side.
Therefore, the adhesive 137 does not hinder the reflection performance of the sub-reflecting mirror 85. In addition, since the injection management of the adhesive 137 is easy as described above, the area between the opposing surfaces of the adhesive surface 134 and the sealing portion 1122 can be reduced, and the area of the reflective surface 131 can be increased. Can also contribute.

[11] Eleventh Embodiment Next, the present embodiment will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In the manufacturing method of the light source device including the sub-reflecting mirror of the above-described embodiment, when the position of the sub-reflecting mirror of the above-described embodiment is adjusted with respect to the light source lamp 11 using the manufacturing device 60, the light source lamp 11 is turned on, In the light beam detector 62, the illuminance of the light beam emitted from the projection optical system 50 is detected by the integrating sphere 621, and the sub-reflection of the above-described embodiment with respect to the light source lamp 11 so that the illuminance detected by the integrating sphere 621 becomes maximum. The position of the mirror was adjusted.
In contrast, the method of manufacturing the light source device according to the eleventh embodiment is formed by the arc image D between the electrodes in the light emitting unit 111 and the sub-reflecting mirror 13 in the position adjustment of the sub-reflecting mirror with respect to the light source lamp 11. Using a manufacturing apparatus including a light beam detection unit that detects a deviation amount from the arc reflection image DM, an image of the arc image D and the arc reflection image DM of the lighted light source lamp 11 is converted into a CCD or the like of the light beam detection unit. The deviation detected by the light flux detection unit while detecting the amount of deviation between the arc image D and the arc reflection image DM from the image picked up by the imaging device through the reflection unit 122 of the elliptical reflector 12 and picked up by the image processing unit. The difference is that the position of the sub-reflecting mirror is adjusted with respect to the light source lamp 11 so that the amount becomes the optimum shift amount.

  The manufacturing apparatus of this embodiment includes a holding frame 61 and a position adjustment mechanism 63 that are the same as those of the manufacturing apparatus 60. Furthermore, the manufacturing apparatus of the present embodiment transmits the light emitting unit 111 through the reflecting unit 122 of the elliptical reflector 12 and the arc image D between the electrodes in the light emitting unit 111 and the arc reflected image DM formed by the sub-reflecting mirror 13. Calculated by a plurality of image pickup devices such as CCDs for picking up images, an image processing unit for processing an image picked up by the image pickup device to calculate a deviation amount between the arc image D and the arc reflection image DM, and an image processing unit. And a determination unit that determines whether the amount of deviation is the optimum amount of deviation.

  Next, the manufacturing method of the light source device provided with the sub-reflecting mirror 71 using the manufacturing apparatus will be described based on the flowchart shown in FIG. In addition, the light source device provided with the other subreflecting mirror of embodiment mentioned above can also be manufactured with the same manufacturing method.

(Process S11) The integrated light source lamp 11 and elliptical reflector 12 before the sub-reflecting mirror 71 is attached are set on the holding frame 61.
(Process S12) The sub-reflecting mirror 71 is set on the grips 643 and 644 of the sub-reflecting mirror holder 640.
(Process S13) As shown in FIG. 28A, an adhesive is applied so as to straddle the distal end side end surface 716 of the sub-reflecting mirror 71 and the outer peripheral surface of the sealing portion 112.
(Process S14) The light source lamp 11 is turned on.
(Process S15) An image of the actual arc image D inside the light emitting unit 111 and the arc reflected image DM formed by the sub-reflecting mirror 71 is captured by an image sensor such as a CCD.
(Process S16) The amount of deviation between the arc image D and the arc reflected image DM is calculated by the image processing unit from the images of the arc image D and the arc reflected image DM captured by the image sensor.
(Process S17) The determination unit determines whether or not the deviation amount between the arc image D and the arc reflection image DM calculated by the image processing unit is the optimum deviation amount.
Here, the determination of the amount of positional deviation between the arc image D and the arc image reflection DM is performed as follows. That is, as shown in FIG. 29A, if the arc image D formed between the electrodes 111A and the arc reflected image DM formed between the reflected images 111AM of the electrode 111A are too far apart, an arc reflected image is obtained. The DM is separated from the first focal position of the elliptical reflector, and the arc reflection image DM cannot be sufficiently used as the light source light. On the other hand, as shown in FIG. 29B, when the arc image D and the arc reflection image DM are completely matched, the temperature inside the light emitting unit 111 rises due to the plasma absorption, and the light quantity of the arc reflection image DM is overwhelmed. It will fall. Therefore, as shown in FIG. 29C, a position shift amount that slightly shifts the arc image D and the arc reflected image DM and partially overlaps is selected as the optimum position shift amount.
(Process S18) When the determination unit determines that the deviation amount between the arc image D and the arc reflection image DM is not the optimum deviation amount, the Y-axis direction adjustment unit 632, the X-axis direction adjustment unit 633 of the position adjustment mechanism 63, The Z-axis direction adjustment unit 634, the Y-axis rotation adjustment unit 635, and the X-axis rotation adjustment unit are operated to adjust the X, Y, and Z-axis orientations of the sub-reflecting mirror 71. At this time, as shown in FIGS. 28B and 28C, first, the operation of moving the sub-reflecting mirror 71 to the front end side of the light source lamp 11 and then returning it is repeated. Position adjustment is performed so that the adhesive fits between the outer peripheral surface and the adhesive surface 134.
(Process S19) When the determination unit determines that the shift amount between the arc image D and the arc reflection image DM is the optimal shift amount, the adhesive is cured.
(Process S20) When the adhesive is cured, the light source lamp is turned off and the light source device 10 is removed from the manufacturing apparatus.

  As the adhesive used in the present embodiment, it is preferable to employ an adhesive that can ensure a certain degree of curing time, or it is preferable to employ a special adhesive such as a thermosetting adhesive.

  The eleventh embodiment as described above has the following effects.

 (28) Since the relative positions of the light source lamp 11 and the sub-reflecting mirror 71 are adjusted while detecting the positional deviation amount between the arc image D and the arc reflected image DM, the arc image is in a state where the light energy is maximized. D, the position of the arc reflection image DM is adjusted, and the utilization factor of the light source light can be reliably improved.

 (29) If the position adjustment is performed after applying the adhesive in advance, the adhesive can be blended between the outer peripheral surface and the adhesive surface of the sealing portion 1122 together with the position adjustment, thereby simplifying the manufacturing process. And can be firmly bonded and fixed.

[12] Twelfth Embodiment Next, a twelfth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In the eleventh embodiment described above, when the light source device is manufactured, the light source lamp 11 is turned on, and the arc image D and the arc reflected image DM are detected by the image sensor 621a, and the arc image between the electrodes in the light emitting unit 111 is detected. The position of the sub-reflecting mirror 71 with respect to the light source lamp 11 is adjusted so that the amount of deviation between D and the arc reflection image DM formed by the sub-reflecting mirror 13 becomes the optimum amount of deviation.
In contrast, in the method of manufacturing the light source device according to the twelfth embodiment, the reflected image of each electrode 111A formed by the pair of electrodes 111A and the sub-reflecting mirror in the light emitting unit 111 without turning on the light source lamp 11. The difference is that the position of the sub-reflecting mirror is adjusted with respect to the light source lamp 11 so that the shift amount between each electrode 111A and the reflected image 111AM becomes the optimal shift amount while the 111AM is imaged with an image pickup device such as a CCD. To do.

  That is, as shown in FIG. 30, a reflected image 111AM of each electrode 111A formed by a pair of spaced apart electrodes 111A and a sub-reflecting mirror is picked up by an image pickup device, and the picked-up images are processed and processed. Position adjustment is performed while confirming the positions of the electrode images 111A and 111AM.

  Basically, the position of the sub-reflecting mirror 71 is adjusted with respect to the light source lamp 11 as in the manufacturing method according to the eleventh embodiment, but the deviation between the arc image D and the arc reflected image DM detected by turning on the light source lamp 11 is detected. Instead of determining whether the amount is the optimum deviation amount, the deviation amount between the electrode 111A and the reflected image 111AM is detected without turning on the light source lamp 11, and it is judged whether the deviation amount is the optimum deviation amount. . In addition, the light source device provided with the other subreflecting mirror of embodiment mentioned above can also be manufactured with the same manufacturing method.

If the positions of the image of the electrode 111A and the reflected image 111AM are too far apart as shown in FIG. 30A, the arc image D and the arc reflected image DM formed between them are too far away, and the arc reflected image DM is used as the light source light. It is thought that it cannot be used effectively.
In addition, as shown in FIG. 30B, when the image of the electrode 111A and the reflected image 111AM are completely matched, the arc image D generated between the electrodes 111A and the arc reflected image DM overlap, and plasma absorption increases. End up.
Therefore, as shown in FIG. 30C, a position at which the image of the electrode 111A partially overlaps the reflected image 111AM is used as a reference for position adjustment determination as an optimum shift amount.

  According to this embodiment as described above, there are the following effects.

 (29) Since the position adjustment is performed by picking up the image of the electrode 111A and its reflection image 111AM, it is not necessary to adjust the position by turning on the light source lamp, the process can be simplified, and the light source Since the lamp does not emit light, when removing the light source device from the manufacturing apparatus, each part of the manufacturing apparatus such as the holding frame is not heated and can be quickly removed.

[13] Thirteenth Embodiment Next, a thirteenth embodiment of the present invention will be described. In the following description, parts and members that have already been described are assigned the same reference numerals, and descriptions thereof are omitted or simplified.
In the twelfth embodiment described above, the image of the electrode 111A and the reflected image 111AM that has passed through the sub-reflecting mirror of the electrode 111A are picked up by the image sensor, and based on this, the amount of shift between the electrode 111A and the reflected image 111AM is the optimum shift. The position of the sub-reflecting mirror with respect to the light source lamp 11 is adjusted so that the amount of the light source lamp 11 becomes equal.
In contrast, in the method of manufacturing the light source device according to the thirteenth embodiment, the emission center O2 of the light emitting unit 111 is obtained from the positions of the pair of electrodes, and the curvature center of the spherical reflecting surface is obtained from the reflecting surface image of the sub-reflecting mirror. The position of O1 is obtained, and based on these, the position of the sub-reflecting mirror is adjusted with respect to the light source lamp 11 so that the amount of deviation between the center of curvature O1 and the emission center O2 of the reflecting surface 131 becomes the optimum amount of deviation. Is different.

  That is, in the present embodiment, as shown in FIG. 31A, the spherical curved surface shape of the reflecting surface 131 of the sub-reflecting mirror 71 is grasped, and based on this, the center of curvature O1 of the reflecting surface 131 is obtained, The light emission center O2 is obtained from the position of the pair of spaced apart electrodes 111A.

  The curvature center O1 of the reflective surface 131 is obtained by grasping the internal cross-sectional shape of the sub-reflecting mirror 71 using an X-ray diffractometer or the like, and performing image processing of the circular cross-sectional shape image of the reflective surface 131 to obtain the curvature center O1. be able to. Further, it is also possible to obtain an image of the reflecting surface 131 by an imaging device such as a CCD from the direction of the arrow in FIG. 31A, and obtain the center of curvature O1 using the depth of focus.

  The light emission center O2 is obtained by taking a pair of electrodes 111A as an image with an image sensor such as a CCD and performing image processing to obtain a midpoint between the electrodes 111A, which is set as the light emission center O2.

  Except for obtaining the curvature center O1 and the light emission center O2, it can be manufactured basically in the same procedure as the manufacturing method of the eleventh embodiment. However, the light source lamp 11 is turned on, and the arc image D and the arc reflection image DM In place of the step of detecting the amount of deviation and determining whether the amount of deviation is the optimum amount of deviation, the amount of deviation between the curvature center O1 and the light emission center O2 of the reflecting surface 131 without turning on the light source lamp 11 is the optimum amount of deviation. Determine whether or not. In addition, the light source device provided with the other subreflecting mirror of embodiment mentioned above can also be manufactured with the same manufacturing method.

  The determination of whether or not the amount of displacement of the center position is optimal is made when the curvature center O1 and the light emission center O2 are too far apart as shown in FIG. 31A, and the arc image D and arc reflection image DM formed between them. It is considered that the arc reflection image DM cannot be effectively used as the light source light. Further, as shown in FIG. 31 (B), if the curvature center O1 and the light emission center O2 are completely coincident with each other, there is a concern about temperature rise due to plasma absorption. The relative position where the curvature center O1 and the light emission center O2 are slightly displaced and the arc image D and the arc reflected image DM are predicted to partially overlap is defined as an optimum deviation amount.

 (30) According to such a thirteenth embodiment, the sub-reflecting mirror 71 can be bonded and fixed on the light emitting portion 111 of the light source lamp 11 without turning on the light source lamp, as in the third embodiment. .

[14] Modifications of Embodiments The present invention is not limited to the above-described embodiments, and includes the following modifications.

  The base end side end surface of the sub-reflecting mirror 74 of the above-described embodiment is emitted from the light emitting unit 111 and directly enters the elliptical reflector 12 as in the first embodiment described above. You may form so that it may become an inclined surface along the largest angle (theta) which the light beam to make.

  The inclined surfaces or the base end side end surfaces of the sub-reflecting mirrors 13, 71, 73 to 79, 81 to 85 of the above-described embodiment are set to the angle θ similarly to the base end side end surface 745 of the sub-reflecting mirror 74 of the second embodiment. You may form so that it may become an inclined surface which has an inclination angle larger than the inclination angle made to the light beam emission direction base end side (rear side) of the illumination optical axis A of the combined inclined surface.

  A tapered surface 726 </ b> C is formed on the outer surface of the sub-reflecting mirrors 13, 73 to 77, 78, 79, and 82 to 85 of the above-described embodiment or a joint portion between the end surface and the bonding surface, as in the above-described second embodiment. It may be formed.

  In the same manner as in the third embodiment described above, on the outer peripheral surface of the sub-reflecting mirrors 13, 71, 73 to 75, 78, 79, 82 to 85 in the embodiment described above or the ridgeline of the joint portion between the end surface and the adhesive surface. A notch groove 761 or a groove 771 may be formed.

  When the dielectric multilayer film is deposited on the reflecting surfaces of the sub-reflecting mirrors 13, 71, 73 to 77, 78, 79, and 82 to 85 according to the above-described embodiment, an adhesive surface is provided in the same manner as in the above-described fourth embodiment. Masking may be performed so that the dielectric multilayer film does not adhere to the adhesive surface.

  The bonding surface of the sub-reflecting mirrors 13, 71, 73, 74, 76, 77, 79, 81, 85 of the above-described embodiment is directed from the outer peripheral surface or the end surface on the front end side to the reflecting surface as in the above-described sixth embodiment. Alternatively, it may be formed on a truncated cone-shaped tapered surface that gradually decreases in diameter.

  A stepped portion having an adhesive surface of the sub-reflecting mirrors 13, 71, 73 to 77, 79, 81, 83, 85 of the embodiment described above having a surface continuous with the reflecting surface as in the seventh embodiment described above. You may form so that it may have.

  The adhesive surfaces of the sub-reflecting mirrors 13, 71, 73 to 76, 79, 81, 85 of the above-described embodiment are gradually reduced in diameter as they go from the reflecting surface to the outer peripheral surface or the end surface on the front end side as in the above-described eighth embodiment. It may be formed on a truncated cone-shaped tapered surface.

  The adhesive surfaces of the sub-reflecting mirrors 13, 71, 73 to 78, 81 to 85 of the above-described embodiment may be processed so that irregularities are formed on the adhesive surface as in the above-described ninth embodiment.

  The outer peripheral surface and / or the front end side end surface of the sub-reflecting mirrors 13, 71, 73 to 79, 81 to 84 of the above-described embodiment are mirror-finished so that the adhesive surface can be seen through similarly to the above-described tenth embodiment. Also good.

  In the method of manufacturing the light source device including the sub-reflecting mirror according to the first embodiment described above, the sub-reflecting mirror is applied to the light source lamp 11 by applying an adhesive after the position of the sub-reflecting mirror is adjusted to the optimum position. However, the present invention is not limited to this, and the adhesive is applied before adjusting the position of the sub-reflecting mirror, as in the method of manufacturing the light source device including the sub-reflecting mirror of the eleventh embodiment. Then, when the position of the sub-reflecting mirror is adjusted to the optimum position, a method of manufacturing a light source device in which the adhesive is cured and the sub-reflecting mirror is fixed to the light source lamp 11 may be adopted in the present invention. .

  In the manufacturing method of the light source device including the sub-reflecting mirror according to the eleventh embodiment, the twelfth embodiment, and the thirteenth embodiment described above, an adhesive is applied before adjusting the position of the sub-reflecting mirror, and the optimum position is obtained. When the position of the sub-reflecting mirror is adjusted, the adhesive is cured and the sub-reflecting mirror is fixed to the light source lamp 11. However, the present invention is not limited to this, and the sub-reflecting of the first embodiment is performed. Similar to the manufacturing method of the light source device equipped with the mirror, do not apply the adhesive before adjusting the position of the sub-reflecting mirror, and apply the adhesive after the position of the sub-reflecting mirror is adjusted to the optimum position. Thus, a method of manufacturing a light source device in which the sub-reflecting mirror is fixed to the light source lamp 11 may be adopted in the present invention.

  In the above embodiment, only the example of the projector 1 using the three liquid crystal panels 42R, 42G, and 42B is given. However, the present invention is a projector using only one liquid crystal panel, a projector using two liquid crystal panels, Alternatively, it can be applied to a projector using four or more liquid crystal panels.

  In the embodiment, a transmissive liquid crystal panel having a different light incident surface and light emitting surface is used. However, a reflective liquid crystal panel having the same light incident surface and light emitting surface may be used.

  In the above-described embodiment, the liquid crystal panels 42R, 42G, and 42B are employed as the light modulation devices. However, the present invention is not limited to this, and the present invention is used as a light source device that illuminates a device that performs light modulation using a micromirror. It may be adopted. In this case, polarizing plates on the light beam incident side and the light beam emission side can be omitted.

  In the above-described embodiment, the light source device of the present invention is employed in the projector including the light modulation device. However, the present invention is not limited to this, and the light source device of the present invention may be applied to other optical devices. .

  In the above embodiment, only an example of a front type projector that performs projection from the direction of observing the screen has been described. However, the present invention is also applicable to a rear type projector that performs projection from the side opposite to the direction of observing the screen. Is possible.

  The shape of the sub-reflecting mirror described in each of the above embodiments is merely an example. In short, the outer shape fits inside the cone indicated by the line connecting the second focal position of the elliptical reflector and the end of the sealing portion of the arc tube. Other shapes may be used as long as they are sub-reflecting mirrors.

  In addition, the specific structure, shape, and the like when implementing the present invention may be other structures as long as the object of the present invention can be achieved.

  The present invention can be used not only for projectors but also for other optical devices.

FIG. 2 is a schematic diagram illustrating a structure of a projector according to an embodiment of the invention. 1 is a schematic diagram showing the structure of a light source device according to a first embodiment of the present invention. The outline perspective view showing the structure of the light source lamp in a 1st embodiment of the present invention. The front view and sectional drawing showing the structure of the sub-reflection mirror in 1st Embodiment of this invention. The optical axis direction sectional drawing showing the state which fixed the sub-reflecting mirror to the light source lamp in 1st Embodiment of this invention. The optical axis direction and optical axis orthogonal direction sectional drawing showing the application | coating state of the adhesive agent in 1st Embodiment of this invention. The optical axis direction and optical axis orthogonal direction sectional drawing showing the application | coating state of the adhesive agent in 1st Embodiment of this invention. The side view showing the manufacturing apparatus of the light source device in 1st Embodiment of this invention. The side view showing the structure of the sub-reflection mirror holder which comprises the manufacturing apparatus in 1st Embodiment of this invention. The top view showing the structure of the subreflection mirror holder which comprises the manufacturing apparatus in 1st Embodiment of this invention. The front view showing the holding part shape of the sub reflector holder in 1st Embodiment of this invention. The flowchart showing the manufacturing method of the light source device in 1st said embodiment of this invention. The schematic diagram showing the application | coating method of the adhesive agent in 1st Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror in 2nd Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror in 2nd Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 3rd Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 4th Embodiment of this invention. Sectional drawing showing the masking state of the sub-reflecting mirror in 4th Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 5th Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 6th Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 7th Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 8th Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 8th Embodiment of this invention. The principal part sectional drawing showing the structure of the subreflective mirror which comprises the light source device in 8th Embodiment of this invention, and the top view seen from the light beam emission direction front side. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device in 9th Embodiment of this invention. The principal part sectional drawing showing the structure of the sub-reflection mirror which comprises the light source device which concerns on 10th Embodiment of this invention. The flowchart showing the manufacturing method of the light source device in 11th Embodiment of this invention. The schematic diagram showing the coating method of the adhesive agent in 11th Embodiment of this invention. The schematic diagram showing the procedure of the optimal value determination of the deviation | shift amount of the arc image and arc reflected image in 11th Embodiment of this invention. The schematic diagram showing the procedure of the optimal value determination of the deviation | shift amount of the electrode image and electrode reflected image in the manufacturing method of the light source device which concerns on 12th Embodiment of this invention. The schematic diagram showing the procedure of the optimal value determination of the deviation | shift amount of the light emission center position and the curvature center of a reflective surface in the manufacturing method of the light source device which concerns on 13th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Projector, 10 ... Light source device, 11 ... Light source lamp (arc tube), 12 ... Ellipse reflector, 13, 71, 73, 74, 75, 76, 78, 79, 81, 82, 83, 84, 85 ... Sub Reflector 111, light emitting part, 111A ... electrode (electrode, electrode image), 111AM ... electrode reflected image, 112 ... sealing part, 131, 751 ... reflective surface, 132, 712, 732, 742, 751, 811 ... outer periphery Surface (peripheral portion), 134, 754, 781, 791, 812, 821, 831, 841 ... Adhesive surface, 135, 725, 735, 745, 755 ... Base end side end surface (inclined surface), 716, 736, 746 ... End surface on the front end side, 726C ... taper surface (chamfered portion), 753 ... neck portion, 831A ... stepped portion (step), 851 ... outer peripheral surface (related to translucency), A ... illumination optical axis, D ... arc image, DM ... Ark Projection image, L1 ... first focal position, L2 ... second focal position, L3, L4 ... boundary line (line connecting the second focal position and the tip of the sealed portion of the arc tube), O1 ... center of curvature of the reflecting surface, O2 ... center of light emission, O3 ... center of curvature of outer peripheral surface

Claims (4)

An arc tube having a light emitting portion where discharge light emission is performed between the electrodes and sealing portions provided at both ends of the light emitting portion, an elliptical reflector that emits light emitted from the arc tube in a certain direction, and a reflecting surface Is disposed opposite to the reflecting surface of the elliptical reflector, covers the front side of the luminous tube in the direction of luminous flux emission, and manufactures a light source device including a sub-reflecting mirror that reflects the luminous flux emitted from the luminous bulb to the elliptical reflector. A method of manufacturing a light source device,
Inserting the sub-reflecting mirror into the sealing portion of the arc tube with respect to the arc tube whose discharge emission center is positioned and held in the vicinity of the first focal position of the elliptical reflector in advance;
Calculating the center of curvature of the reflecting surface from the curvature of the reflecting surface of the sub-reflecting mirror;
Calculating a discharge emission center between the electrodes from the position of the electrodes;
Based on the calculated center of curvature of the reflecting surface of the sub-reflecting mirror and the emission center between the electrodes, the position of the sub-reflecting mirror is such that the positional deviation between the center of curvature and the emission center becomes a predetermined deviation amount. Adjusting the arc tube with respect to the arc tube;
And a step of fixing the sub-reflecting mirror to the arc tube at a position where a positional deviation between the curvature center and the light emission center becomes a predetermined deviation amount. In the manufacturing method of the light source device according to claim 1,
The step of fixing the sub-reflecting mirror to the arc tube includes applying an adhesive to the sealing portion and the sub-reflecting mirror after the step of adjusting the position of the sub-reflecting mirror with respect to the arc tube. A method of manufacturing a light source device, wherein the adhesive is cured and fixed. In the manufacturing method of the light source device according to claim 1 or 2,
The step of fixing the sub-reflecting mirror to the arc tube includes curing and fixing the adhesive applied before the step of adjusting the position of the sub-reflecting mirror with respect to the arc tube. A method for manufacturing a light source device. A projector that modulates a light beam emitted from a light source according to image information to form an optical image, and projects an enlarged image.
A projector comprising a light source device manufactured by the method for manufacturing a light source device according to any one of claims 1 to 3.

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