JP3985546B2 - Cleaning device and cleaning method - Google Patents

Cleaning device and cleaning method Download PDF

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Publication number
JP3985546B2
JP3985546B2 JP2002046993A JP2002046993A JP3985546B2 JP 3985546 B2 JP3985546 B2 JP 3985546B2 JP 2002046993 A JP2002046993 A JP 2002046993A JP 2002046993 A JP2002046993 A JP 2002046993A JP 3985546 B2 JP3985546 B2 JP 3985546B2
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cleaning
tank
liquid
cleaning liquid
tanks
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JP2003245615A (en
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隆志 細田
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Seiko Epson Corp
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Seiko Epson Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、洗浄液を複数の洗浄槽で使用し、順次被洗浄物を浸漬洗浄する洗浄装置および洗浄方法に関する。さらに詳しくは、洗浄液を効率的に循環排出し、洗浄品質を向上する洗浄装置及び洗浄方法に関する。
【0002】
【従来の技術】
多くの工業分野において、製品等の物品(被洗浄物)の洗浄が行われており、洗浄装置の一部や全ての洗浄槽において、洗浄液を使用し、順次被洗浄物を浸漬洗浄する洗浄装置が知られている。このような洗浄装置においては、洗浄液の使用量削減等の観点から、被洗浄物の洗浄順序とは反対に、洗浄液を順次送り供給使用する、カスケード方式や直接オーバーフロー方式などと呼ばれる方法が採用されてきた。本発明では、被洗浄物の洗浄順序とは反対に、洗浄液を順次送り供給し、使用することを「前送り」と称することとする。
【0003】
本発明において、洗浄液とは、洗浄剤、洗浄溶剤、リンス水、リンス溶剤およびオゾン水、電解水等に代表される一般的に機能水と呼ばれる洗浄水等の洗浄に関する液体全般を言う。
【0004】
カスケード方式とは、図2に示すように第二の洗浄槽2からオーバーフローした洗浄液をカスケード槽13に一旦供給し、第一の洗浄槽1に洗浄液を供給する方式である。カスケード槽13と第一の洗浄槽1は仕切り板14の下部で貫通しており、貫通部分より、洗浄液を供給する。
【0005】
直接オーバーフロー方式とは、図3に示すように、第二の洗浄槽2の縁部の高さと第一の洗浄槽1の縁部の高さを所定の高低差を付けて配置し、槽間接続板15等で接合し、第二の洗浄槽2の洗浄液が直接、第一の洗浄槽1へオーバーフローする方式である。
【0006】
【発明が解決しようとする課題】
しかしながら、上記の洗浄液の前送り方法には、いくつか課題がある。
カスケード方式によって前送りされた洗浄液はカスケード槽に入るが、洗浄槽(後槽)内で被洗浄物より剥離した汚れ(異物、パーティクル等)は、浮遊して前送りされ、オーバーフローの際、カスケード槽の下部に沈み、仕切り板の下部より洗浄槽(前槽)内に入り込んでしまう。仮に、カスケード槽に残ったとしても、カスケード槽内に浮遊を続け、いずれ、洗浄槽(前槽)を汚してしまう。洗浄槽(前槽)が濾過循環機能を有していた場合でも、前送りによって供給する洗浄液自体に汚れが混入しており、洗浄槽内に分散するため、槽内の液の濾過循環機能だけでは完全には濾過しきれない。このため、これらの汚れが被洗浄物に付着し、洗浄品質がえられなくなる。
【0007】
直接オーバーフロー方式の場合は、直接、洗浄槽(前槽)に、洗浄槽(後槽)の浮遊汚れが前送りされるため、洗浄槽(前槽)内の汚れが被洗浄物に付着してしまい、洗浄品質がえられない。
【0008】
カスケード方式や直接オーバーフロー方式の場合、前送りのみで洗浄液の供給が行われ、前槽から供給された分のみしかオーバーフローしない。この時、洗浄槽から汚れを排出する量が十分えられないため、洗浄液が浄化できない状態となる。したがって、汚れが洗浄槽内に残り易く、洗浄品質がえられない。
【0009】
さらに、カスケード方式や直接オーバーフロー方式の槽構造の場合、必ず縁部全周の一部は、槽からのオーバーフローがとれないため、多くても残りの縁部からのオーバーフローとなる。洗浄槽は、縁部全周から均等にオーバーフローさせることによって、槽内の液がよどむことなく、洗浄槽内の浄化を助けるが、一部からのオーバーフローしかないため、槽内の浄化ができずに洗浄品質が確保できない。
【0010】
また、カスケード方式や直接オーバーフロー方式の槽構造の場合、液面の高さが各槽ごと異なる。このため、前送りする洗浄槽が増えると洗浄槽の液面高さが最初の洗浄槽と最後の洗浄槽では、極端に変わってしまう。槽の深さは、被洗浄物により限定されるため、前送りできる槽の数が限られてしまう。槽の数を増やすために前送りを途中で区切っても良いが、新たな洗浄液の供給が必要になり、洗浄液の使用量が増え、ランニングコストが高くなる。
【0011】
また、各洗浄槽間の搬送を自動化する場合には、洗浄槽の液面高さの高低差を考慮しなくてはならないため、構造が複雑となり、装置化のコストが高くなるなどの問題を有していた。
【0012】
本発明は上記事情に鑑みなされたもので、洗浄液を使用する複数の洗浄槽において、洗浄液を前送りする際に浄化された洗浄液を前送りし、効率的に洗浄液を使用する洗浄装置および洗浄方法を提供することを目的とする。
【0013】
【課題を解決するための手段】
本発明者は、上記目的を達成するため鋭意検討を重ねた結果、複数の洗浄槽の各々の周縁部に洗浄槽から流出した洗浄液を回収する貯液槽を設け、隣接する貯液槽を所定の高低差になるように配置、接合して更に、洗浄槽から流出した貯液槽の洗浄液を濾過して当該洗浄槽に循環、供給することが有効であることを知見した。
【0014】
すなわち、被洗浄物が順次洗浄される洗浄槽の後ろの槽から前の槽に洗浄液を前送りする際、必ず濾過を行い清浄度の高い洗浄液を供給することが可能になる。また、洗浄槽のオーバーフロー量を循環によって多くし、洗浄槽内の汚れ(特にパーティクル)を効率よく系外に排出(濾過による捕捉)することも可能になる。
【0015】
したがって、洗浄槽内の汚れを系外に排出(濾過による捕捉)することによって被洗浄物への汚れの再付着がなくなり、洗浄品質が得られるようになる。そして、前送りする洗浄液を直接洗浄槽内に入れないように、貯液槽内に入れるようにし、貯液槽内から濾過機構を有した循環機構を通じて当該洗浄槽内に供給することにより、洗浄槽から排出された汚れを濾過分離することができる。これにより、洗浄槽からの汚れが前送りした洗浄槽に入ることがなく、被洗浄物への再付着を防ぐことができ、洗浄品質がえられる。
【0016】
また、循環経路を利用し、洗浄液が洗浄槽内に供給されるため、オーバーフロー量が十分となり、洗浄装置への洗浄液の供給が少なくても、洗浄槽内の浄化が十分でき、洗浄品質が確保できる。
【0017】
洗浄槽の縁部全周(四角の槽であれば4辺)とも構造上の制約を受けなくなり、縁部全周からオーバーフローすることが可能になる。洗浄液が縁部全周から均等にオーバーフローすることによって、洗浄液の流れによどみ(液の停滞部分)が生じず、洗浄液の浄化が十分でき、洗浄品質が確保できる。
【0018】
また、洗浄槽の液面高さに制約が無いことから、各槽の液面を略一定にできる。このため、洗浄装置を自動化する場合においても、液面の高低差を考慮しなくて良く、各洗浄槽間を同じ動きで搬送できるので、搬送機構が単純となり、装置コストが安価になる。
【0019】
したがって、請求項1に記載の発明は、洗浄液を使用する複数の洗浄槽を有し、被洗浄物を順次浸漬して洗浄する洗浄装置であって、
洗浄液を使用する洗浄槽のうち、最後に洗浄を行う洗浄槽に洗浄液を供給する洗浄液供給部と、
洗浄液を使用する洗浄槽から流出した洗浄液を回収する貯液槽と、
洗浄液を使用する洗浄槽のうち最初に洗浄する洗浄槽の貯液槽から流出した洗浄液を回収して排出する洗浄液排出部と、
洗浄槽から貯液槽に流出した洗浄液を濾過して、当該洗浄槽に循環、供給する循環濾過装置とを有しており、
隣接する貯液槽の互いの縁部が、所定の高低差を持つように接合されていることを特徴とする洗浄装置を提供する。
【0020】
請求項2に記載の発明は、請求項1記載の洗浄装置において、洗浄液を回収する貯液槽を洗浄槽の周縁部に配置することを特徴とする洗浄装置を提供する。
【0021】
請求項3に記載の発明は、請求項1もしくは2記載の洗浄装置において、すべての洗浄槽のオーバーフローを、洗浄槽の縁部全周から行うことを特徴とする洗浄装置を提供する。
【0022】
請求項4に記載の発明は、請求項1から3のいずれかに記載の洗浄装置において、各洗浄槽の液面が略一定の高さであることを特徴とする洗浄装置を提供する。
【0023】
請求項5に記載の発明は、洗浄液を満たした複数の洗浄槽に順次、被洗浄物を浸漬して洗浄する洗浄方法であって、
被洗浄物を最後に洗浄する洗浄槽に洗浄液を供給し、各洗浄槽から流出した洗浄液を貯液槽で回収し、当該貯液槽で回収した洗浄液を濾過して当該洗浄槽に循環供給し、隣接する2つの貯液槽において洗浄液の供給側に配置された貯液槽から流出した洗浄液をもう一方の貯液槽で回収し、被洗浄物を最初に洗浄する洗浄槽の貯液槽から流出した洗浄液を回収、排出することを特徴とする洗浄方法を提供する。
【0024】
請求項6に記載の発明は、請求項5記載の洗浄方法において、洗浄槽の周縁部に貯液槽を配置することを特徴とする洗浄方法を提供する。
【0025】
請求項7に記載の発明は、請求項5または6記載の洗浄方法において、洗浄液を満たした複数の洗浄槽の液面高さを略一定にすることを特徴とする洗浄方法を提供する。
【0026】
【発明の実施の形態】
以下、本発明の形態について説明するが、本発明は下記の実施の形態に限定されるのもではない。
【0027】
図を参照に本発明を説明する。
図1は、本発明による洗浄装置の一例示す図である。図1は、2槽の洗浄槽で構成されている例を示しているが、本発明における洗浄槽の数は、これに限定されない。aが横方向から見た構成図に当たり、bが上方向から見た図である。
【0028】
同じ洗浄液で満たされた2つ洗浄槽1、2の周りに貯液槽3、4が配置されている。各洗浄槽はそれぞれ、循環機構5を有し、循環機構は、ポンプ6と濾過機構7を有している。
【0029】
第二の洗浄槽2には洗浄液を供給する供給機構8が接続されており、供給機構8は、供給する洗浄液を濾過する濾過機構7を有している。第一の貯液槽3は、流出する洗浄液を回収排水する排水機構9を有している。
【0030】
また、洗浄槽の上部に、被洗浄物wを搬送する搬送機構10が配置されている。
【0031】
洗浄液は、供給機構8により第二の洗浄槽2に供給され、オーバーフローし、第二の貯液槽4に流出する。第二の貯液槽4から第二の洗浄槽2へは、循環機構5により濾過供給される。第二の貯液槽4からは、供給機構8より供給された分だけ洗浄液がオーバーフローし、第一の貯液槽3に流入する。第一の洗浄槽1へは、循環機構5によって濾過浄化された洗浄液が供給される。
【0032】
被洗浄物wは、搬送機構10によって第一の洗浄槽1にて浸漬洗浄された後、搬送経路11に沿って搬送され、第二の洗浄槽2にて浸漬洗浄され、搬送経路11にそって、搬出される。
【0033】
図示はしないが、洗浄槽が3槽以上の場合でも被洗浄物を洗浄する最終洗浄槽に洗浄液が供給され、循環濾過された洗浄液が各洗浄槽内に供給され、被洗浄物が最初に洗浄される洗浄槽の貯液槽からオーバーフローする洗浄液が、排水機構によって排出される。
【0034】
また、洗浄液の供給は、第二の貯液槽4に行ってもかまわない。この場合、供給機構8内の濾過機構7はなくてもかまわない。
【0035】
炭化水素系の洗浄剤のような蒸留再生可能な洗浄液の場合、排出機構9から排出された洗浄液を蒸留再生機等に送り、蒸留再生を行った後、供給機構8より供給する構造を取ることもできる。
【0036】
また、図4は、本発明による洗浄装置の別の一例を示す図である。図1と洗浄液の流れの基本は同じであるが、洗浄槽の周縁部には洗浄液を回収する機構のみが有り、回収された洗浄液は、洗浄槽1、2と離れた位置に設定された、貯液槽3,4に集められる。貯液槽3、4は、洗浄液が第二の貯液槽4から第一の貯液槽にオーバーフローするよう液面に所定の高低差を設けてある。洗浄液は、循環装置5によって、洗浄槽へ濾過され供給される。このように、貯液槽は、槽の周縁部に無くてもかまわない。
【0037】
<実施例1>
以下の洗浄液構成によって、ガラス部材の洗浄を行った。
【0038】
第1槽 洗浄剤槽
第2槽 洗浄剤槽
第3槽 リンス(純水)
第4槽 リンス(純水)
乾燥
3、4槽目のリンス工程において、図1に示す構造を有する洗浄槽の構造を採用した。また、3、4槽とも四角の槽の4辺全てからのオーバーフロー構造である。
洗浄を行ったところ、異物の付着が見られず、不良が発生しなかった。
【0039】
<比較例1>
実施例1に示した洗浄液構成にて、同じガラス部材の洗浄を行った。
3、4槽目のリンス工程において、図3に示す直接オーバーフロー方式の構造を有する洗浄槽の構造を採用した。構造上、3、4槽とも1面のオーバーフロー構造となった。
【0040】
この装置で洗浄した結果、ガラス部材に、異物の付着する不良が、10%発生した。
【0041】
【発明の効果】
本発明の洗浄槽の構造によって、洗浄液を少なくとも2槽に使用でき、各槽へは濾過装置にて濾過を行った洗浄液を供給するため、異物の付着等がなく、品質の異常を起こすことなく洗浄することができる。
【図面の簡単な説明】
【図1】本発明による洗浄装置の一例を示す図である。
【図2】従来の技術の一例であるカスケード方式を有する洗浄装置を示す図である。
【図3】従来の技術の一例である直接オーバーフロー方式を有する洗浄装置を示す図である。
【図4】本発明による洗浄装置の他の例を示す図である。
【符号の説明】
1 第一の洗浄槽
2 第二の洗浄槽
3 第一の貯液槽
4 第二の貯液槽
5 循環機構
6 ポンプ
7 濾過機構
8 供給機構
9 排出機構
10 搬送機構
11 搬送経路
12 液流
13 カスケード槽
14 仕切り板
15 槽間接続板
16 オーバーフロー回収部
w 被洗浄物
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cleaning apparatus and a cleaning method for using a cleaning liquid in a plurality of cleaning tanks and immersing and cleaning objects to be cleaned sequentially. More specifically, the present invention relates to a cleaning apparatus and a cleaning method that efficiently circulates and discharges cleaning liquid and improves cleaning quality.
[0002]
[Prior art]
In many industrial fields, products such as products (objects to be cleaned) are cleaned, and a cleaning device is used to immerse and clean the objects to be cleaned sequentially in part of the cleaning device or in all cleaning tanks. It has been known. In such a cleaning apparatus, from the viewpoint of reducing the amount of cleaning liquid used, a method called a cascade method or a direct overflow method, in which the cleaning liquid is sequentially fed and used, as opposed to the cleaning order of the objects to be cleaned, is employed. I came. In the present invention, contrary to the cleaning order of the objects to be cleaned, the supply and use of the cleaning liquid sequentially is referred to as “pre-feed”.
[0003]
In the present invention, the cleaning liquid refers to all liquids related to cleaning, such as cleaning water generally called functional water, represented by cleaning agents, cleaning solvents, rinsing water, rinsing solvents, ozone water, electrolytic water, and the like.
[0004]
The cascade system is a system in which the cleaning liquid overflowed from the second cleaning tank 2 is once supplied to the cascade tank 13 and the cleaning liquid is supplied to the first cleaning tank 1 as shown in FIG. The cascade tank 13 and the first cleaning tank 1 penetrate through the lower part of the partition plate 14, and supply the cleaning liquid from the penetrating part.
[0005]
As shown in FIG. 3, the direct overflow method is arranged such that the height of the edge of the second cleaning tank 2 and the height of the edge of the first cleaning tank 1 are provided with a predetermined height difference between the tanks. This is a method in which the cleaning liquid in the second cleaning tank 2 is directly overflowed into the first cleaning tank 1 by joining with the connection plate 15 or the like.
[0006]
[Problems to be solved by the invention]
However, there are several problems with the above-described method of feeding the cleaning liquid.
The cleaning solution forwarded by the cascade system enters the cascade tank, but dirt (foreign matter, particles, etc.) peeled off from the object to be cleaned in the cleaning tank (rear tank) floats forward and is forwarded. It sinks in the lower part of the tank and enters the cleaning tank (front tank) from the lower part of the partition plate. Even if it remains in the cascade tank, it will continue to float in the cascade tank, and eventually the cleaning tank (front tank) will be soiled. Even when the washing tank (front tank) has a filtration / circulation function, dirt is mixed in the cleaning liquid supplied by forward feeding and is dispersed in the washing tank, so only the filtration / circulation function of the liquid in the tank Then, it cannot filter completely. For this reason, these stains adhere to the object to be cleaned, and the cleaning quality cannot be obtained.
[0007]
In the case of the direct overflow method, floating dirt in the washing tank (rear tank) is directly fed to the washing tank (front tank), so that dirt in the washing tank (front tank) adheres to the object to be cleaned. As a result, the cleaning quality cannot be obtained.
[0008]
In the case of the cascade method or the direct overflow method, the cleaning liquid is supplied only by forward feeding, and only the amount supplied from the previous tank overflows. At this time, the amount of dirt discharged from the cleaning tank is not sufficient, so that the cleaning liquid cannot be purified. Therefore, dirt is likely to remain in the cleaning tank, and the cleaning quality cannot be obtained.
[0009]
Furthermore, in the case of the cascade structure or the direct overflow tank structure, a part of the entire periphery of the edge portion cannot overflow from the tank, and therefore overflows from the remaining edge portion at most. Even if the washing tank overflows evenly from the entire periphery of the edge, the liquid in the tank does not stagnate and helps to clean the inside of the washing tank. The cleaning quality cannot be ensured.
[0010]
Moreover, in the case of a cascade structure or a direct overflow tank structure, the liquid level is different for each tank. For this reason, when the number of cleaning tanks to be forwarded increases, the liquid level of the cleaning tank changes extremely between the first cleaning tank and the last cleaning tank. Since the depth of the tank is limited by the object to be cleaned, the number of tanks that can be forwarded is limited. In order to increase the number of tanks, the forward feed may be divided in the middle, but it is necessary to supply a new cleaning liquid, the amount of the cleaning liquid used increases, and the running cost increases.
[0011]
In addition, when transporting between cleaning tanks is automated, the difference in height between the liquid levels of the cleaning tanks must be taken into account, resulting in problems such as a complicated structure and increased equipment costs. Had.
[0012]
The present invention has been made in view of the above circumstances, and in a plurality of cleaning tanks that use a cleaning liquid, a cleaning apparatus and a cleaning method that use the cleaning liquid efficiently by pre-feeding the cleaning liquid purified when the cleaning liquid is forward-feeded The purpose is to provide.
[0013]
[Means for Solving the Problems]
As a result of intensive studies to achieve the above object, the present inventor has provided a liquid storage tank for collecting the cleaning liquid flowing out from the cleaning tank at each peripheral portion of the plurality of cleaning tanks, and sets the adjacent liquid storage tanks to a predetermined one. It was found that it is effective to filter and circulate and supply the cleaning liquid in the storage tank that has flowed out of the cleaning tank and then supplied to the cleaning tank after being arranged and joined so as to have a height difference.
[0014]
That is, when the cleaning liquid is forwarded from the tank behind the cleaning tank in which the objects to be cleaned are sequentially cleaned to the previous tank, it is possible to supply the cleaning liquid with high cleanness without fail by filtering. It is also possible to increase the overflow amount of the cleaning tank by circulation and efficiently discharge (capture by filtration) the dirt (particularly particles) in the cleaning tank to the outside of the system.
[0015]
Therefore, by discharging the dirt in the cleaning tank out of the system (capturing by filtration), the dirt does not reattach to the object to be cleaned, and the cleaning quality can be obtained. Then, the cleaning liquid to be fed forward is not directly put into the cleaning tank, but is put into the liquid storage tank, and the cleaning liquid is supplied from the liquid storage tank into the cleaning tank through a circulation mechanism having a filtration mechanism. The dirt discharged from the tank can be separated by filtration. As a result, dirt from the cleaning tank does not enter the pre-forwarded cleaning tank, and reattachment to the object to be cleaned can be prevented, and the cleaning quality can be obtained.
[0016]
In addition, since the cleaning liquid is supplied into the cleaning tank using the circulation path, the overflow amount is sufficient, and even if there is little supply of the cleaning liquid to the cleaning device, the cleaning tank can be sufficiently purified and the cleaning quality is ensured. it can.
[0017]
The entire periphery of the edge of the cleaning tank (four sides in the case of a square tank) is not subject to structural restrictions, and can overflow from the entire periphery of the edge. When the cleaning liquid uniformly overflows from the entire periphery of the edge, no stagnation (stagnation part of the liquid) occurs and the cleaning liquid can be sufficiently purified, and the cleaning quality can be ensured.
[0018]
Moreover, since there is no restriction | limiting in the liquid level height of a washing tank, the liquid level of each tank can be made substantially constant. For this reason, even when the cleaning apparatus is automated, it is not necessary to consider the difference in level of the liquid level, and since it can be transferred between the cleaning tanks with the same movement, the transfer mechanism becomes simple and the apparatus cost is reduced.
[0019]
Therefore, the invention according to claim 1 is a cleaning apparatus that has a plurality of cleaning tanks using a cleaning liquid and sequentially immerses and cleans an object to be cleaned,
Among the cleaning tanks that use the cleaning liquid, a cleaning liquid supply unit that supplies the cleaning liquid to the cleaning tank that performs the final cleaning,
A liquid storage tank for collecting the cleaning liquid flowing out from the cleaning tank using the cleaning liquid;
A cleaning liquid discharger that collects and discharges the cleaning liquid that has flowed out of the storage tank of the cleaning tank to be cleaned first among the cleaning tanks that use the cleaning liquid;
It has a circulation filtration device that filters the cleaning liquid that has flowed out of the cleaning tank into the liquid storage tank, and circulates and supplies it to the cleaning tank.
Provided is a cleaning apparatus characterized in that the edges of adjacent liquid storage tanks are joined so as to have a predetermined height difference.
[0020]
According to a second aspect of the present invention, there is provided the cleaning apparatus according to the first aspect, wherein a liquid storage tank for recovering the cleaning liquid is disposed at a peripheral portion of the cleaning tank.
[0021]
A third aspect of the present invention provides the cleaning apparatus according to the first or second aspect, wherein the overflow of all the cleaning tanks is performed from the entire circumference of the edge of the cleaning tank.
[0022]
According to a fourth aspect of the present invention, there is provided the cleaning apparatus according to any one of the first to third aspects, wherein the liquid level of each cleaning tank is substantially constant.
[0023]
The invention according to claim 5 is a cleaning method of immersing and cleaning an object to be cleaned sequentially in a plurality of cleaning tanks filled with a cleaning liquid,
The cleaning liquid is supplied to the cleaning tank that finally cleans the object to be cleaned, the cleaning liquid flowing out from each cleaning tank is collected in the storage tank, and the cleaning liquid collected in the liquid storage tank is filtered and circulated and supplied to the cleaning tank. In the two adjacent storage tanks, the cleaning liquid that has flowed out of the storage tank disposed on the supply side of the cleaning liquid is collected in the other storage tank, and from the storage tank of the cleaning tank that first cleans the object to be cleaned. A cleaning method is provided that collects and discharges outflowing cleaning liquid.
[0024]
According to a sixth aspect of the present invention, there is provided the cleaning method according to the fifth aspect, wherein a liquid storage tank is disposed at a peripheral portion of the cleaning tank.
[0025]
A seventh aspect of the present invention provides the cleaning method according to the fifth or sixth aspect, wherein the liquid surface heights of the plurality of cleaning tanks filled with the cleaning liquid are made substantially constant.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, although the form of this invention is demonstrated, this invention is not limited to the following embodiment.
[0027]
The present invention will be described with reference to the drawings.
FIG. 1 is a view showing an example of a cleaning apparatus according to the present invention. Although FIG. 1 shows an example configured with two cleaning tanks, the number of cleaning tanks in the present invention is not limited to this. a is a configuration diagram viewed from the lateral direction, and b is a diagram viewed from above.
[0028]
Liquid storage tanks 3 and 4 are arranged around two cleaning tanks 1 and 2 filled with the same cleaning liquid. Each washing tank has a circulation mechanism 5, and the circulation mechanism has a pump 6 and a filtration mechanism 7.
[0029]
A supply mechanism 8 for supplying a cleaning liquid is connected to the second cleaning tank 2, and the supply mechanism 8 has a filtration mechanism 7 for filtering the supplied cleaning liquid. The first liquid storage tank 3 has a drainage mechanism 9 that collects and drains the outflowing cleaning liquid.
[0030]
Moreover, the conveyance mechanism 10 which conveys the to-be-cleaned object w is arrange | positioned at the upper part of the washing tank.
[0031]
The cleaning liquid is supplied to the second cleaning tank 2 by the supply mechanism 8, overflows, and flows out to the second liquid storage tank 4. From the second liquid storage tank 4 to the second cleaning tank 2, it is filtered and supplied by the circulation mechanism 5. The cleaning liquid overflows from the second liquid storage tank 4 by the amount supplied from the supply mechanism 8 and flows into the first liquid storage tank 3. A cleaning liquid filtered and purified by the circulation mechanism 5 is supplied to the first cleaning tank 1.
[0032]
The object to be cleaned w is immersed and cleaned in the first cleaning tank 1 by the transport mechanism 10, then transported along the transport path 11, immersed and cleaned in the second cleaning tank 2, and then along the transport path 11. To be carried out.
[0033]
Although not shown, even when there are three or more cleaning tanks, the cleaning liquid is supplied to the final cleaning tank for cleaning the objects to be cleaned, and the circulating and filtered cleaning liquid is supplied to each cleaning tank, and the objects to be cleaned are cleaned first. The cleaning liquid overflowing from the storage tank of the cleaning tank is discharged by the drainage mechanism.
[0034]
Further, the cleaning liquid may be supplied to the second liquid storage tank 4. In this case, the filtration mechanism 7 in the supply mechanism 8 may not be provided.
[0035]
In the case of a cleaning liquid that can be distilled and regenerated, such as a hydrocarbon-based cleaning agent, the cleaning liquid discharged from the discharge mechanism 9 is sent to a distillation regenerator or the like, and after distillation regeneration, a structure that is supplied from the supply mechanism 8 is adopted. You can also.
[0036]
Moreover, FIG. 4 is a figure which shows another example of the washing | cleaning apparatus by this invention. Although the basic flow of the cleaning liquid is the same as in FIG. 1, there is only a mechanism for recovering the cleaning liquid at the periphery of the cleaning tank, and the recovered cleaning liquid is set at a position away from the cleaning tanks 1 and 2. Collected in storage tanks 3 and 4. The liquid storage tanks 3 and 4 are provided with a predetermined height difference on the liquid level so that the cleaning liquid overflows from the second liquid storage tank 4 to the first liquid storage tank. The cleaning liquid is filtered and supplied to the cleaning tank by the circulation device 5. As described above, the liquid storage tank may not be provided at the peripheral edge of the tank.
[0037]
<Example 1>
The glass member was cleaned with the following cleaning liquid configuration.
[0038]
1st tank Detergent tank 2nd tank Detergent tank 3rd tank Rinse (pure water)
Tank 4 Rinse (pure water)
In the rinsing step for the third and fourth drying tanks, the structure of the cleaning tank having the structure shown in FIG. 1 was adopted. Further, both the three and four tanks are overflow structures from all four sides of the square tank.
As a result of cleaning, no foreign matter was observed and no defects occurred.
[0039]
<Comparative Example 1>
The same glass member was cleaned with the cleaning liquid configuration shown in Example 1.
In the rinsing process of the third and fourth tanks, the structure of the cleaning tank having the direct overflow system structure shown in FIG. 3 was adopted. Due to the structure, the overflow structure of one surface was obtained for both the three and four tanks.
[0040]
As a result of washing with this apparatus, 10% of defects in which foreign substances adhere to the glass member occurred.
[0041]
【The invention's effect】
Due to the structure of the cleaning tank of the present invention, the cleaning liquid can be used in at least two tanks, and since the cleaning liquid filtered by the filtration device is supplied to each tank, there is no adhesion of foreign matters, etc., and no quality abnormality occurs. Can be washed.
[Brief description of the drawings]
FIG. 1 is a diagram showing an example of a cleaning apparatus according to the present invention.
FIG. 2 is a view showing a cleaning apparatus having a cascade system, which is an example of a conventional technique.
FIG. 3 is a view showing a cleaning apparatus having a direct overflow method, which is an example of a conventional technique.
FIG. 4 is a view showing another example of the cleaning apparatus according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st washing tank 2 2nd washing tank 3 1st liquid storage tank 4 2nd liquid storage tank 5 Circulation mechanism 6 Pump 7 Filtration mechanism 8 Supply mechanism 9 Discharge mechanism 10 Conveyance mechanism 11 Conveyance path 12 Liquid flow 13 Cascade tank 14 Partition plate 15 Inter-tank connection plate 16 Overflow recovery part w

Claims (7)

洗浄液を使用する複数の洗浄槽を有し、被洗浄物を順次浸漬して洗浄する洗浄装置であって、
洗浄液を使用する洗浄槽のうち、最後に洗浄を行う洗浄槽に洗浄液を供給する洗浄液供給部と、
洗浄液を使用する洗浄槽から流出した洗浄液を回収する貯液槽と、
洗浄液を使用する洗浄槽のうち最初に洗浄する洗浄槽の貯液槽から流出した洗浄液を回収して排出する洗浄液排出部と、
洗浄槽から貯液槽に流出した洗浄液を濾過して、当該洗浄槽に循環、供給する循環濾過装置とを有しており、
隣接する貯液槽の互いの縁部が、所定の高低差を持つように接合されていることを特徴とする洗浄装置。
A cleaning device that has a plurality of cleaning tanks that use a cleaning liquid and sequentially immerses and cleans an object to be cleaned,
Among the cleaning tanks that use the cleaning liquid, a cleaning liquid supply unit that supplies the cleaning liquid to the cleaning tank that performs the final cleaning,
A liquid storage tank for collecting the cleaning liquid flowing out from the cleaning tank using the cleaning liquid;
A cleaning liquid discharger that collects and discharges the cleaning liquid that has flowed out of the storage tank of the cleaning tank to be cleaned first among the cleaning tanks that use the cleaning liquid;
It has a circulation filtration device that filters the cleaning liquid that has flowed out of the cleaning tank into the liquid storage tank, and circulates and supplies it to the cleaning tank.
A cleaning apparatus, wherein the adjacent edges of the liquid storage tanks are joined so as to have a predetermined height difference.
請求項1記載の洗浄装置において、洗浄液を回収する貯液槽を洗浄槽の周縁部に配置することを特徴とする洗浄装置。2. The cleaning apparatus according to claim 1, wherein a liquid storage tank for recovering the cleaning liquid is disposed at a peripheral portion of the cleaning tank. 請求項1もしくは2記載の洗浄装置において、すべての洗浄槽のオーバーフローを、洗浄槽の縁部全周から行うことを特徴とする洗浄装置。3. The cleaning apparatus according to claim 1, wherein overflow of all cleaning tanks is performed from the entire circumference of the edge of the cleaning tank. 請求項1から3のいずれかに記載の洗浄装置において、各洗浄槽の液面が略一定の高さであることを特徴とする洗浄装置。4. The cleaning apparatus according to claim 1, wherein the liquid level of each cleaning tank is substantially constant. 洗浄液を満たした複数の洗浄槽に順次、被洗浄物を浸漬して洗浄する洗浄方法であって、
被洗浄物を最後に洗浄する洗浄槽に洗浄液を供給し、各洗浄槽から流出した洗浄液を貯液槽で回収し、当該貯液槽で回収した洗浄液を濾過して当該洗浄槽に循環供給し、隣接する2つの貯液槽において洗浄液の供給側に配置された貯液槽から流出した洗浄液をもう一方の貯液槽で回収し、被洗浄物を最初に洗浄する洗浄槽の貯液槽から流出した洗浄液を回収、排出することを特徴とする洗浄方法。
It is a cleaning method of immersing and cleaning an object to be cleaned sequentially in a plurality of cleaning tanks filled with a cleaning liquid,
The cleaning liquid is supplied to the cleaning tank that finally cleans the object to be cleaned, the cleaning liquid flowing out from each cleaning tank is collected in the storage tank, and the cleaning liquid collected in the storage tank is filtered and circulated and supplied to the cleaning tank. In the two adjacent storage tanks, the cleaning liquid flowing out from the storage tank arranged on the supply side of the cleaning liquid is collected in the other storage tank, and the cleaning tank is first cleaned of the object to be cleaned. A cleaning method characterized by collecting and discharging outflowing cleaning liquid.
請求項5記載の洗浄方法において、洗浄槽の周縁部に貯液槽を配置することを特徴とする洗浄方法。6. The cleaning method according to claim 5, wherein a liquid storage tank is disposed at the peripheral edge of the cleaning tank. 請求項5または6記載の洗浄方法において、洗浄液を満たした複数の洗浄槽の液面高さを略一定にすることを特徴とする洗浄方法。7. The cleaning method according to claim 5 or 6, wherein the liquid level height of the plurality of cleaning tanks filled with the cleaning liquid is made substantially constant.
JP2002046993A 2002-02-22 2002-02-22 Cleaning device and cleaning method Expired - Fee Related JP3985546B2 (en)

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CN102553852A (en) * 2010-12-28 2012-07-11 北京京东方光电科技有限公司 Cleaning device

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JP6028317B2 (en) * 2011-09-08 2016-11-16 東洋紡株式会社 Method for producing polymer electrolyte membrane
CN104018171A (en) * 2014-05-04 2014-09-03 高峰 Circulating type acid washing device
CN108604688A (en) * 2016-02-15 2018-09-28 东丽株式会社 The manufacturing method and manufacturing device of ion-conductive membranes
CN113634188B (en) * 2021-07-30 2023-12-12 徐州中辉光伏科技有限公司 Be used for abluent accurate liquid equipment of joining in marriage of graphite boat

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102553852A (en) * 2010-12-28 2012-07-11 北京京东方光电科技有限公司 Cleaning device

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