JP3984480B2 - Mobile system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a mobile system that transports parts and equipment.
[0002]
[Prior art]
2. Description of the Related Art In a semiconductor factory or the like, a mobile body system is used that transports semiconductor components, moves a work robot, and the like by moving a mobile body relative to a fixed body. There are linear motor systems and ball screw systems, etc. for moving body systems, but the number of cases using linear motor systems is increasing due to its quietness and the ability to place multiple moving bodies on the same track of a fixed body. Yes.
In the linear motor type moving body system, magnets are arranged on the fixed body side and the moving body side, respectively, and the moving body is moved using the repulsive force and the attractive force of these magnets.
[0003]
[Problems to be solved by the invention]
In a linear motor type mobile system, foreign matter of magnetic material such as iron powder may be drawn into the mobile system by being attracted by the magnetic force of the magnet and get caught between the fixed body and the mobile body, possibly destroying the linear motor. There is.
The present invention has been made to solve such a problem, and an object of the present invention is to provide a mobile system that can prevent foreign matter from entering the inside.
[0004]
[Means for Solving the Problems]
In order to achieve the above object, a mobile body system according to the present invention includes a pair of fixed magnets that are arranged to face each other so as to form a gap and have a first opening that communicates with the gap on the upper surface , and the fixed magnet A fixed portion having a fixed case for holding the movable magnet, a movable magnet that is inserted into the gap from the first opening and is movable with respect to the fixed magnet, and is connected to the movable magnet and has the first opening A moving part base that closes a part of the part, a pair of first rollers that are rotatably arranged in the moving direction of the moving part base, and closer to the central part of the moving part base than the first roller, And a pair of second rollers disposed rotatably above the moving unit base and the first roller, and a sheet-shaped first moving cover disposed above the fixed unit. The first moving cover has both ends at the front Each of the fixed portions is connected to both ends, and in a range from each of these end portions to a position below each of the first rollers, along a top surface of the pair of fixed magnets having the first opening, Between one roller, it is lifted upward from the lower position of each first roller and is disposed so as to pass above the pair of second rollers, so that it is not blocked by the moving portion base. The first opening is configured to be closed corresponding to the movement of the moving part base . A first opening not blocked by the moving section base, that it has a first moving cover which closes in response to movement of the moving part base body, thereby preventing foreign material from entering the stationary part inside.
[0005]
(1) Here, the moving body system may further include a position detection unit that detects a position of the moving unit with respect to the fixed magnet.
By having the position detection means, the moving part can be moved to a more reliable position.
(2) The moving unit may include a support unit capable of supporting an object.
Since the moving part has the support part, the object can be supported and moved more reliably.
(3) The moving cover may include a sheet member formed of a magnetic material.
Since the sheet member is attracted to the fixed magnet, the opening can be more reliably closed.
[0006]
(4) The movable body system includes an external cover that covers the fixed portion and has a second opening corresponding to the first opening, and is connected to the moving portion and the second opening. And a second moving cover for closing the second opening that is not blocked by the moving member corresponding to the movement of the moving member.
By having the second moving cover that closes the opening of the outer cover in accordance with the movement of the moving member, it is possible to more reliably prevent the entry of foreign matter into the fixed portion.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(First embodiment)
FIG. 1 is a perspective view showing a mobile system 10 according to the first embodiment of the present invention. 2 is a top view showing a state in which the mobile system 10 is viewed from above (Z-axis direction in FIG. 1), and FIGS. 3 and 4 respectively show the mobile system 10 in the X-axis direction and the Y-axis in FIG. It is a partial sectional view showing the state seen from the direction.
As shown in FIGS. 1 to 4, the mobile body system 10 includes a fixed portion (fixed body) 20, a moving portion (movable body) 30 that moves on the fixed portion 20 in the X-axis direction, and between the fixed portion 20 and the moving portion 30. And a movable cover (shutter) 40 that prevents foreign matter from entering the fixed portion 20. As will be described later, the movement of the moving unit 30 is performed by the linear motor body 50.
[0008]
The fixing unit 20 includes a fixed case 21 and a pair of fixed magnets 23 installed in the fixed case 21.
The fixed case 21 includes a fixed case bottom plate 21a, a fixed case side plate 21b, and a fixed case end plate 21c, and the Z-axis direction is open.
The fixed magnet 23 includes a large number of fixed magnet elements 24, and is installed inside the fixed case 21 and on the fixed case side plate 21b. As a result, a gap 25 is generated between the pair of fixed magnets 23.
[0009]
The moving unit 30 functions as a device holding unit that appropriately holds a device or the like for performing a predetermined work. For example, when performing a semiconductor component mounting operation, a semiconductor component mounting head, a semiconductor component transfer robot, or the like is mounted. When simply performing a semiconductor component transfer operation, a rack for storing semiconductor components, etc. Is installed. The working device mounted on the moving unit 30 is not limited to those related to semiconductor manufacturing, and may be a robot or the like used for other purposes.
[0010]
The moving unit 30 includes a moving unit base 31, a moving magnet 32, a moving case 33, and rollers 34a to 34d.
The moving part base 31 is substantially flat and is installed on the upper surface of the fixed magnet 23 (the upper surface of the fixed part 20) and moves on the fixed part 20 in the X-axis direction.
The moving magnet 32 has a substantially rectangular parallelepiped shape, and one end is connected to the moving unit base 31 and the other end is inserted into the fixed unit 20 (between the gaps 25). As a result, the moving magnet 32 is sandwiched between the pair of fixed magnets 23 and is combined with the fixed magnet 23 to constitute the linear motor main body 50.
[0011]
The linear motor main body 50 operates by the repulsive force and attractive force of the magnetic field generated by the fixed magnet 23 and the moving magnet 32, and can move the moving unit 30 relative to the fixed unit 20.
This movement is performed by changing the direction (N / S) of the magnetic field of either the fixed magnet 23 or the moving magnet 32. For this reason, either the fixed magnet 23 or the moving magnet 32 is composed of an electromagnet. That is, the fixed magnet 23 and the moving magnet 32 are: (1) the fixed magnet 23 is an electromagnet, the moving magnet 32 is a permanent magnet, (2) the fixed magnet 23 is a permanent magnet, the moving magnet 32 is an electromagnet, (3) the fixed magnet 23, Any of the moving magnets 32 can have three combinations of electromagnets.
[0012]
The moving case 33 includes a moving case upper plate 33a, a moving case side plate 33b, and a moving case end plate 33c. The moving case 33 covers the moving unit base 31 and is connected to the side surface of the moving unit base 31 at the moving case side plate 33b.
[0013]
Each of the rollers 34a to 34d is in the moving case 33 and is rotatably fixed to the moving case side plate 33b by a shaft. The inner rollers 34a and 34d (first rollers) are respectively installed in the front and rear (X-axis positive / negative direction) in the traveling direction below the moving unit 30 (Z-axis negative direction). That is, the moving unit 30 can smoothly move on the fixed unit 20 by the rotation of the rollers 34a and 34d. Further, the rollers 34a and 34d press the moving cover 40 from above so that the moving cover 40 always closes the upper part (gap 25) of the fixed part 20 even if the moving part 30 moves. The rollers 34b and 34c (second rollers) are disposed slightly above the center of the fixed portion 20. The rollers 34 b and 34 c lift the moving cover 40 upward to secure a space for installing the moving unit base 31 (and thus the moving magnet 32) in the moving case 33.
[0014]
The movable cover 40 has a sheet shape, and both ends thereof are fixed to the fixed portion 20 (fixed case end plate 21c). The moving cover 40 covers the gap 25 to prevent foreign matters (in particular, a magnetic material such as metal powder) from entering the fixed portion 20. Here, the movable cover 40 is made of a magnetic material (for example, a metal sheet), so that the movable cover 40 is brought into close contact with the fixed magnet 23 (that is, above the fixed portion 20), and the fixed portion 20 is inside (the gap 25). ) Can be more strongly prevented from entering foreign matter.
The moving cover 40 is sandwiched between the rollers 34a and 34d and the upper surface of the fixed magnet 23 inside the moving case 33, and is further lifted upward by the rollers 34b and 34c.
[0015]
Next, the operation of the mobile system 10 will be described.
As already described, when the linear motor main body 50 operates, the moving body 30 moves on the fixed portion 20 along the X axis. The moving cover 40 is pressed against the upper surface of the fixed magnet 23 by the rollers 34 a and 34 d even when the moving body 30 moves, and covers the gap 25 to prevent foreign matter from entering the fixed portion 20.
[0016]
When the moving unit 30 moves, the location where the moving cover 40 is lifted (the space formed by the rollers 34a to 34d) also moves. As a result, even when the moving unit 30 moves, a space in which the moving unit base 31 is installed is always secured. Furthermore, when the rollers 34a to 34d are rotated, the moving unit 30 can be moved without receiving a large resistance.
[0017]
As described above, the gap 25 is hermetically sealed by the moving cover 40, thereby preventing foreign matter from entering the fixed portion 20. If the moving cover 40 is formed of a magnetic material, it is attracted to the fixed magnet 23, so that foreign matter can be prevented from entering the fixed portion 20 more reliably.
[0018]
Further, the roller 34 contributes to reduction of resistance when the moving unit 30 moves. Here, a foreign matter removing member (for example, a brush) for removing foreign matter adhering to the surface of the moving cover 40 can be disposed in front of the rollers 34a and 34d. Intrusion of foreign matter into the fixed portion 20 inside the moving case 33 can be prevented more reliably.
In addition, it is possible to accurately move the moving unit 30 to a desired position by appropriately providing a position detection unit that electrically or mechanically detects the position of the moving unit 30 with respect to the fixed unit 20. This configuration can also be applied to the second to sixth embodiments described later.
[0019]
(Second Embodiment)
FIG. 5 is a perspective view illustrating a mobile system 110 according to the second embodiment of the present invention. 6 is a partial cross-sectional view showing a state in which the mobile system 110 is viewed from the Y-axis direction of FIG.
As shown in FIGS. 5 and 6, the moving body system 110 includes a fixed portion 20, a moving portion (moving body) 130 that moves on the fixing portion 20 in the X-axis direction, and a fixed portion (fixed body) 20 between the moving portion 130 and the moving portion 130. And a moving cover (shutter) 140 that prevents foreign matter from entering the fixed portion 20.
[0020]
The moving unit 130 includes a moving unit base 31, a moving magnet 32, and a lubricating cover 35.
[0021]
The lubricating cover 35 covers the moving unit base 31 and reduces the resistance of the moving cover 140 when the moving unit 130 moves. Since the movable cover 140 slides on the lubrication cover 35, it is made of a material that is less worn and slippery, for example, a resin material.
The movable cover 140 has a sheet shape, and both ends thereof are fixed to the fixed portion 20 (fixed case end plate 21c). The moving cover 140 covers the gap 25 to prevent foreign matter (in particular, a magnetic material such as metal powder) from entering the fixed portion 20. Here, the movable cover 140 is made of a magnetic material (for example, a metal sheet), so that the movable cover 140 is brought into close contact with the fixed magnet 23 (that is, above the fixed portion 20), and the fixed portion 20 is inside (the gap 25). ) Can be more strongly prevented from entering foreign matter. The moving cover 140 is in contact with the lubricating cover 35 on the moving part base 31.
[0022]
As described above, since the gap 25 is covered by the moving cover 140, entry of foreign matter into the fixed portion 20 is prevented. When the moving cover 140 is formed of a magnetic material, the moving magnet 140 is attracted by the fixed magnet 23, so that foreign matter can be prevented from entering the fixed portion 20 more reliably. Further, the lubricating cover 35 contributes to the reduction of resistance when the moving body 130 moves.
Except for this point, there is no significant difference from the first embodiment, and a description thereof will be omitted.
[0023]
(Third embodiment)
FIG. 7 is a perspective view showing a mobile system 210 according to the third embodiment of the present invention. 8 is a side view showing a state in which the mobile system 210 is viewed from the Y-axis direction of FIG.
As shown in FIGS. 7 and 8, the moving body system 210 includes a fixed portion 20, a moving portion (moving body) 230 that moves in the X-axis direction on the fixing portion 20, and a space between the fixing portion (fixed body) 20 and the moving portion 230. The movable cover (shutter) 240 and rollers 251 to 254 for preventing foreign matter from entering the fixed portion 20.
[0024]
The moving unit 230 includes a moving unit base 31 and a moving magnet 32.
The moving cover 240 is in the form of a sheet, and both ends thereof are fixed to the front and rear ends of the moving part base 31, and make a round around the fixed part 20 by rollers 251 to 254. The moving cover 240 covers the gap 25 to prevent foreign matters (particularly magnetic materials such as metal powder) from entering the fixed portion 20. The moving cover 240 rotates around the fixed unit 20 as the moving unit 230 moves.
[0025]
Each of the rollers 251 to 254 is rotatably connected to a house or the like by a shaft. When the moving body 230 moves, the rollers 251 to 254 rotate, so that the moving cover 240 can rotate around the fixed portion 20 without receiving a large resistance.
[0026]
Here, the moving cover 240 is made of a magnetic material (for example, a metal sheet or a resin sheet in which magnetic powder is dispersed and contained), so that the moving cover 240 is positioned above the fixed magnet 23 (that is, above the fixed portion 20). ) To prevent the intrusion of foreign matter into the fixed portion 20 (gap 25).
[0027]
As described above, by covering the gap 25 with the moving cover 240, entry of foreign matter into the fixed portion 20 is prevented. When the moving cover 240 is formed of a magnetic material, the moving magnet 240 is attracted to the fixed magnet 23, so that foreign matter can be prevented from entering the fixed portion 20 more reliably. In addition, the rollers 251 to 254 contribute to the reduction in resistance when the moving body 230 moves.
Except for this point, there is no significant difference from the first embodiment, and a description thereof will be omitted.
[0028]
(Fourth embodiment)
FIG. 9 is a perspective view illustrating a mobile system 310 according to the fourth embodiment of the present invention. 10 and 11 are partial cross-sectional views showing a state in which the mobile system 310 is viewed from the X-axis direction and the Y-axis direction of FIG.
As shown in FIGS. 9 to 11, the moving body system 310 includes a fixed unit 20, a moving unit (moving unit) 330 that moves in the X-axis direction on the fixed unit 20, and a fixed unit (fixed unit) 20 between the moving unit 330 and the moving unit 330. And a moving cover (shutter) 340 that prevents foreign matter from entering the fixed portion 20.
[0029]
The moving unit 330 includes a moving unit base 31 and a moving magnet 32.
The moving cover 340 includes sheet-shaped moving cover elements 341 and 342. The movable cover elements 341 and 342 are each made of an elastic material such as a resin material, one of both ends and sides is fixed to the fixed portion 20 (fixed case end plate 21c, fixed case side plate 21b), and the other side. Overlap each other. The moving cover 340 covers the upper surface of the fixed portion 20 (gap 25) together with the moving portion base 31 to prevent foreign matter from entering the fixed portion 20. When the moving unit base 31 moves, the moving cover 340 expands and contracts due to its elasticity, and the overlapping portions of the moving cover elements 341 and 342 are displaced, so that the upper surface of the fixed unit 20 corresponds to the movement of the moving unit 330. Keep covered. Depending on the size of the moving part base 31, there may be a place on the moving part base 31 that is not covered with the moving cover 340 as shown in FIG. 9, but the moving part base 31 on the fixed part 20 does not exist. If the part is covered with the moving cover 340, it does not become a big problem.
[0030]
As described above, by covering the gap 25 with the moving cover 340, entry of foreign matter into the fixed portion 20 is prevented. At this time, the elasticity of the moving cover 340 and the displacement between the moving cover elements 341 and 342 contribute to the prevention of entry of foreign matter into the fixed portion 20.
Except for this point, there is no significant difference from the first embodiment, and a description thereof will be omitted.
[0031]
(Fifth embodiment)
FIG. 12 is a perspective view showing a mobile system 410 according to the fifth embodiment of the present invention. 13 is a partial cross-sectional view showing a state in which the mobile system 410 is viewed from the Y-axis direction of FIG.
As shown in FIGS. 12 and 13, the moving body system 410 includes a fixed unit 20, a moving unit (moving unit) 430 that moves in the X-axis direction on the fixed unit 20, and a fixed unit (fixed unit) 20 and a moving unit 430. And a moving cover (shutter) 440 that prevents foreign matter from entering the fixed portion 20.
[0032]
The moving unit 430 includes a moving unit base 31 and a moving magnet 32.
The moving cover 440 includes bellows-shaped moving cover elements 441 and 442 that can expand and contract in the X-axis direction. Both ends of the moving cover elements 441 and 442 are fixed to the end portion (fixed case end plate 21 c) of the fixing portion 20 and the moving portion base 31. The moving cover 440 covers the upper surface of the fixed portion 20 (gap 25) and prevents foreign matter from entering the fixed portion 20. Since the movable cover elements 441 and 442 expand and contract in the X-axis direction, there is no significant difference from the first embodiment in other points corresponding to the movement of the moving unit 430, and thus the description thereof is omitted.
[0033]
(Sixth embodiment)
FIG. 14 is a partial cross-sectional view showing a mobile system 510 according to the sixth embodiment of the present invention, and corresponds to FIG.
As shown in FIG. 14, the mobile body system 510 is configured such that the mobile body system 10 is further covered with an outer case 560 and a holding portion 570 connected to the mobile body system 10 is protruded from the opening 561.
[0034]
The outer case 560 has a substantially rectangular parallelepiped outer shape including an outer case upper plate 562 having an opening 561, an outer case side plate 563, an outer case end plate 564 (not shown), and an outer case bottom plate 565.
[0035]
The holding unit 570 includes a holding unit upper plate 571 and a holding unit bottom plate 572, and the holding unit bottom plate 572 is connected to the moving unit 30 of the mobile body system 10. As a result, by operating the linear motor main body 50, the holding portion 570 moves along the X axis.
[0036]
In the mobile body system 510, foreign matter that enters the fixed portion 20 from the outside passes through the opening 561 of the outer case 560. Therefore, by installing a means for preventing foreign matter from entering the opening 561, foreign matter can be prevented from entering the fixed portion 20 more reliably. As this means, the foreign substance intrusion prevention means shown in the first to fifth embodiments can be applied.
[0037]
As an example of this, the moving body system 510 uses a moving cover 540 corresponding to the moving cover 340 shown in the fourth embodiment. Similar to the fourth embodiment, the moving cover 540 includes moving cover elements 541 and 542, and holds the state where the opening 561 is shielded corresponding to the movement of the holding portion 570 due to its elasticity and the like.
[0038]
Prevention of entry of foreign matter by shielding the opening 561 can be achieved by using the means shown in any of the first to fifth embodiments.
Further, in order to prevent the entry of foreign matter on the fixed case 21 side, any of the means shown in the second to fifth embodiments can be used in addition to the means corresponding to the first embodiment shown in FIG. . In this way, the foreign matter intrusion preventing means can be used together appropriately on the outer case 560 side and the fixed case 21 side, respectively. Further, it is possible to use only one of the outer case 560 side and the fixed case 21 side as a foreign matter intrusion prevention means.
[0039]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a moving body system that can prevent the entry of foreign matter into the interior.
[Brief description of the drawings]
FIG. 1 is a perspective view illustrating a mobile system according to a first embodiment of the present invention.
FIG. 2 is a top view showing a state in which the mobile system shown in FIG. 1 is viewed from above.
FIG. 3 is a partial cross-sectional view showing a state in which a part of the mobile system shown in FIG. 1 is removed.
4 is a partial cross-sectional view showing a state in which a part of the mobile system shown in FIG. 1 is removed. FIG.
FIG. 5 is a perspective view showing a mobile system according to a second embodiment of the present invention.
6 is a partial cross-sectional view showing a state in which a part of the mobile system shown in FIG. 5 is removed. FIG.
FIG. 7 is a perspective view showing a mobile system according to a third embodiment of the present invention.
8 is a side view showing a state in which the mobile system shown in FIG. 7 is viewed from the side.
FIG. 9 is a perspective view showing a mobile system according to a fourth embodiment of the present invention.
10 is a partial cross-sectional view showing a state in which a part of the mobile system shown in FIG. 9 is removed.
11 is a partial cross-sectional view showing a state in which a part of the mobile system shown in FIG. 9 is removed.
FIG. 12 is a perspective view illustrating a mobile system according to a fifth embodiment of the present invention.
13 is a partial cross-sectional view showing a state in which a part of the mobile system shown in FIG. 12 is removed.
FIG. 14 is a partial cross-sectional view illustrating a mobile system according to a sixth embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Mobile body system, 20 ... Fixed part, 21 ... Fixed case, 23 ... Fixed magnet, 25 ... Gap, 30 ... Moving part, 31 ... Moving part base | substrate, 32 ... Moving magnet, 33 ... Moving case, 34 (34a-) 34d) ... roller, 35 ... cover for lubrication, 40 ... moving cover, 50 ... linear motor body

Claims (5)

A fixed portion having a pair of fixed magnets arranged to face each other so as to form a gap and having a first opening that leads to the gap on the upper surface , and a fixed case that holds the fixed magnet;
A moving magnet inserted into the gap from the first opening and movable with respect to the fixed magnet;
A moving unit base connected to the moving magnet and blocking a part of the first opening;
A pair of first rollers rotatably arranged before and after the moving unit base in the moving direction;
A pair of second rollers disposed closer to the center of the moving unit base than the first roller and rotatably above the moving unit base and the first roller;
A sheet-like first moving cover disposed above the fixed portion;
The first moving cover has both ends connected to both ends of the fixed portion, and has the first opening in a range from each end to a position below each first roller. Along the upper surfaces of the pair of fixed magnets, between the pair of first rollers, it is arranged so as to be lifted upward from the lower position of each first roller and pass above the pair of second rollers. Accordingly, the moving body system is configured to close the first opening that is not blocked by the moving unit base in accordance with the movement of the moving unit base. Mobile system according to claim 1, wherein the further comprising position detecting means for detecting the position of the moving part base relative to the stationary magnet. Mobile system according to claim 1, wherein connected to said moving unit base, and characterized by further comprising a supporting portion capable of supporting an object. The first mobile cover, mobile system according to claim 1, characterized in that it has a sheet member formed of a magnetic material. An external cover that covers the fixed portion and has a second opening corresponding to the first opening;
A moving member connected to the moving part base and blocking a part of the second opening;
Wherein said second opening is not blocked by the moving member, the moving body system according to claim 1, further comprising a second moving cover which closes in response to movement of the moving member .

Images