JP3967534B2 - Radiation beam equipment irradiated object cassette - Google Patents

Description

[0001]
[Field of the Invention]
The present invention relates to an irradiated object cassette of a radiation beam apparatus that can directly measure the temperature of an irradiated object.
[0002]
[Prior art]
FIG. 1 shows one schematic example of an electron beam drawing apparatus. In the figure, reference numeral 1 denotes an electron gun 2, a focusing lens (not shown), beam section shaping means (for example, two upper and lower molding slits each having a square slit, a molding lens disposed between the slits, and a molding deflection. A means for creating a beam with a square or rectangular cross section of any size by controlling the position on the lower slit of the beam that has passed through the upper shaping slit with a shaping deflector), and positioning deflection An electron optical system barrel 3 equipped with a container (not shown), etc., 3 is a drawing chamber provided with a stage 4 and the like. Note that exhaust means (not shown) is connected to the electron optical system barrel 1 and the drawing chamber 3 via exhaust ports (not shown).
[0003]
In such an apparatus, outside the drawing chamber 3, the cassette 5 holding the drawing material is staged by a conveying means (not shown) via a gate (not shown) provided in the drawing chamber 3. 4 Set on top. Based on the pattern data from the control device (not shown), the molding data based on the shape and size data of the pattern to be drawn is sent to the molding deflector of the beam section shaping means, and the pattern drawing position data Is sent to a positioning deflector (not shown) to cause the electron beam from the electron gun 2 having a shaped cross section to be shot at a predetermined position on the drawing material, thereby drawing a pattern.
[0004]
In recent years, such an electron beam lithography apparatus has become indispensable for the production of semiconductor elements with higher density. On the other hand, in such an electron beam drawing apparatus, the pattern drawing accuracy is improved with an increase in the density of such semiconductor elements.
[0005]
Now, the drawing material undergoes a temperature change due to an external temperature change, and generates a strain based on the temperature change. When such a distortion occurs, the drawing accuracy decreases.
[0006]
[Problems to be solved by the invention]
Therefore, for example, by measuring the temperature of the cassette 5 for each area drawing, for example, the temperature of the drawing material is estimated, and the temperature and the drawing area are associated with each other and managed on the data. Although it is possible to control the temperature of the cassette (that is, the material to be drawn) to a predetermined temperature based on the measured temperature, or to correct the shot position of the electron beam by the amount of distortion of the material to be drawn, In practice, it is difficult to perform such controls and corrections successfully.
[0007]
However, since the temperature of the drawing material is estimated by measuring the temperature of the cassette 5, the actual temperature of the drawing material cannot be obtained at present.
[0008]
Recently, it has been proposed to directly measure the temperature of the wafer by applying a temperature sensor to the lower surface near the center and end of the wafer, which is one of the drawing materials. There is a possibility that distortion occurs in the region, which affects the drawing accuracy.
The present invention has been made to solve such problems, and an object of the present invention is to provide a material cassette for a new radiation beam apparatus.
[0009]
[Means for Solving the Problems]
The irradiated object cassette of the radiation beam apparatus according to the present invention is configured such that the irradiated object is sandwiched from above and below by a plurality of pairs of upper surface support members and lower surface support members attached to the cassette body at a plurality of different positions. In the irradiated object cassette of the radiation beam apparatus to be supported, a temperature sensor is provided on at least one of the supporting members so as to contact the irradiated object.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0011]
FIG. 2 is a schematic view of the irradiated object cassette shown as an example of the present invention, and FIG. 3 is a cross-sectional view taken along the line AA ′ of FIG.
[0012]
In the figure, reference numeral 11 denotes a cassette body, which has a space 12 whose ceiling portion is blown out. The space portion 12 has a two-story structure, and includes a first-floor space portion 13 and a second-floor space portion 14, and the two space portions are partitioned by a push-up holder support plate 20.
[0013]
Upper surface restricting plates 15A, 15B, and 15C are attached to three positions on the upper surface of the cassette body 11. The lower surface of the tip of each upper surface regulating plate is formed in a hemispherical shape.
[0014]
Push-up holders 16A, 16B, and 16C (16C not shown) are slidably fitted in the vertical direction at the positions of the push-up holder support plate 20 corresponding to the positions of the upper surface regulating plates.
[0015]
Each push-up holder has a semispherical bottomed cylinder at its upper tip, and the apex of each hemispherical part and the apex of the hemispherical part of each upper surface regulating plate are parallel to the optical axis O. Each push-up holder is attached to the support plate 20 so as to be positioned on the same axis Qa, Qb, Qc (Qc is not shown).
[0016]
On the other hand, push-up spring supports 17A, 17B, and 17C (17C not shown) are attached to locations on the lower surface of the support plate 20 that face the push-up holders 16A, 16B, and 16C. The convex portions 18A, 18B, and 18C (18B and 18C are not shown) inside each of the push-up spring supports are configured so that the bottom portion of the push-up holder facing the tip portion presses upward. Push-up springs 19, 19B, 19C (19B, 19C are not shown) are attached.
[0017]
A hole is formed in the center of the hemispherical bottom of the push-up holder 16A, and a temperature sensor 21 having a curved surface having the same radius of curvature as that of the hemispherical bottom is attached to the hole. Reference numeral 22 denotes a lead wire for electrically taking out a temperature signal from the sensor, and one end of the lead wire is connected to an external terminal 25 which is inserted into the side wall 23 of the cassette body 11 via insulating spacers 24A and 24B. It is connected. In addition, a hole 26 through which a part of the temperature sensor 21 passes is formed in the center of the convex portion 18A of the push-up spring support 17A.
[0018]
When the material to be drawn is set in the material cassette having such a structure, the push-up holders 16A, 16B, and 16C are appropriately moved to the axes Qa and QB against the push-up springs 19A, 19B, and 19C by push-up holder lowering means (not shown). , Qc, and the drawing material 27 is put into the space 14 in this state. At this time, predetermined three portions of the non-drawing region at the edge portion of the drawing material 27 are the hemispherical center point of each of the upper surface regulating plates 15A, 15B, 15C and the hemispherical shape of each of the push-up holders 16A, 16B, 16C. The drawing material 27 is placed in the space portion 14 so as to come to a position between the surface center points. Then, by releasing the lowered state by the holder lowering means, the drawing material 27 is supported by the upper surface regulating plate and the push-up holder at the three points by the push of the push-up springs 19A, 19B, 19C.
[0019]
The cassette supporting the drawing material 27 in this way is set on the stage 4 in the drawing chamber 3 as shown in FIG. When the cassette is set on the stage 4, one end of the external terminal 25 is an end of a terminal body (not shown) provided by penetrating the side wall of the drawing chamber 3 through an O-ring or the like. It is comprised so that it may contact.
[0020]
Then, drawing on the drawing material by the electron beam is started. In the drawing, the temperature signal of the drawing material 27 measured by the temperature sensor 21 is taken out to the outside through the lead wire 22, the external terminal 25 and the terminal body (not shown). Corresponding to field drawing, the temperature directly to the drawing material is obtained. In such an apparatus, the three support portions of the drawing material are in the non-drawing region of the drawing material, and the temperature sensor 21 is the central portion of the hemispherical surface portion of the push-up holder that supports the drawing material. Since it is attached to the push-up holder so as to form, there is no concern that the drawing material will be distorted.
In the above example, the upper surface regulating plate and the tip portion of the push-up holder facing the material to be drawn are formed in a hemispherical shape, but if they can make point contact with the material to be drawn, they are formed on other curved surfaces. May be.
[0021]
In the above example, the drawing material is supported at three points. However, the material is not limited to three points, and for example, four points may be used.
[0022]
In the above example, a mask material such as glass has been described as an object to be irradiated. However, the present invention is not limited to such a mask material. For example, the present invention also applies to a cassette that supports an object to be irradiated such as a semiconductor material such as a wafer. Is applicable.
[0023]
In the above example, the irradiation object cassette used in the electron beam drawing apparatus has been described. However, the irradiation object cassette used in the ion beam drawing apparatus or the laser drawing apparatus, or a large sample is observed or inspected. The present invention can also be applied to a sample cassette used in such a scanning electron microscope.
[Brief description of the drawings]
FIG. 1 shows one schematic example of electron beam drawing as an example of a charged particle beam apparatus.
FIG. 2 is a schematic view of an irradiated object cassette shown as an example of the present invention.
FIG. 3 is a cross-sectional view taken along the line AA ′ of FIG.
[Explanation of numbers]
DESCRIPTION OF SYMBOLS 1 ... Electro-optic system lens barrel 2 ... Electron gun 3 ... Drawing chamber 4 ... Stage 5 ... Cassette 11 ... Cassette main body 12,13,14 ... Space part 15A, 15B, 15C ... Upper surface control board 16A, 16B, 16C ... Push-up holder 17A, 17B, 17C ... Push-up spring supports 18A, B, 18C ... Projections 19A, 19B, 19C ... Push-up spring 20 ... Push-up holder support plate 21 ... Temperature sensor 22 ... Lead wire 23 ... Side walls 24A, 24B ... Insulating spacer 25 ... External terminal 26 ... Hole 27 ... Draw material

Claims (6)

Irradiation object cassette of a radiation beam apparatus configured to support an irradiation object by sandwiching the irradiation object from above and below by a plurality of pairs of upper surface support members and lower surface support members attached to the cassette body at a plurality of different locations. An irradiated object cassette of a radiation beam apparatus, wherein a temperature sensor is provided so that at least one of the support members contacts the irradiated object. The irradiated object cassette of the charged particle beam apparatus according to claim 1, wherein the irradiated object contact portion of each support member is formed so as to make point contact with the irradiated object. The irradiated object cassette of the radiation beam apparatus according to claim 1, wherein the irradiated object contact portion of each support member is formed in a curved surface shape. The irradiated object of the radiation beam apparatus according to claim 2 or 3, wherein the irradiated object contact portions of the upper surface supporting member and the lower surface supporting member facing each other through the irradiated object are arranged so as to sandwich the same position of the irradiated object from above and below. Cassette. The irradiated object cassette of the radiation beam apparatus according to claim 3, wherein the irradiated object contact portion of the temperature sensor is disposed on a top portion of the curved surface portion. The irradiated object cassette of the radiation beam apparatus according to claim 1, wherein the lower surface support member is movably attached to the cassette body and is pressed toward the irradiated object surface by an elastic body.

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