JP3950613B2 - Sample holder, sample holder transport member, and sample holder delivery method - Google Patents

Sample holder, sample holder transport member, and sample holder delivery method Download PDF

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JP3950613B2
JP3950613B2 JP2000049223A JP2000049223A JP3950613B2 JP 3950613 B2 JP3950613 B2 JP 3950613B2 JP 2000049223 A JP2000049223 A JP 2000049223A JP 2000049223 A JP2000049223 A JP 2000049223A JP 3950613 B2 JP3950613 B2 JP 3950613B2
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裕一郎 所
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Jeol Ltd
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【０００１】
【発明の属する技術分野】
本発明は、電子顕微鏡等の荷電粒子線装置で使用する試料ホルダ、試料ホルダ搬送部材と、試料ホルダ受渡し方法に関し、特に、試料ホルダに対して試料ホルダ搬送部材を接近および離隔させるだけで着脱可能な試料ホルダ、試料ホルダ搬送部材、および試料ホルダ受渡し方法に関する。
【０００２】
【従来の技術】
従来の前記試料ホルダ搬送部材は、真空室を貫通する棒状搬送部材と、その内端に設けたホルダ保持部材と、外端部に設けた操作部材とを有している。前記ホルダ保持部材に試料ホルダを保持して、前記棒状搬送部材の外端部の操作部材を内外に移動させることにより試料ホルダを搬送する。また、試料ホルダをホルダ保持部材を着脱する操作は、前記操作部材を回転させることにより行っている。
【０００３】
【発明が解決しようとする課題】
前記従来技術では、試料ホルダ搬送部材の搬送方向への移動操作と、試料ホルダの着脱作業は全く異なる作業を行わなければならず、作業が複雑で、作業時間も長くかかるという問題点があった。
また、試料ホルダ搬送部材の棒状搬送部材を真空室の外側で折り曲げるように構成したものも従来知られている。この折り曲げ可能な試料ホルダ搬送部材では、前記操作部材の回転位置が所定の回転位置でのみ折り曲げ可能となったものが知られているが、このような試料ホルダ搬送部材では折り曲げの際に前記操作部材の回転位置を所定位置に回転させなければ折り曲げられないという問題点もあった。
【０００４】
本発明は前述の事情に鑑み、下記（Ｏ01），（Ｏ02）の記載内容を課題とする。
（Ｏ01）試料ホルダ搬送部材をその搬送方向に沿う軸回りに回転させることなく、試料ホルダと着脱できるようにすること。
（Ｏ02）試料ホルダを保持したホルダ保持部材と試料ホルダを保持していないホルダ保持部材とを接近させた後に離隔させる動作のみにより両ホルダ保持部材間で試料ホルダの受渡しを可能にすること。
【０００５】
【課題を解決するための手段】
次に、前記課題を解決するために案出した本発明を説明するが、本発明の要素には、後述の実施例の要素との対応を容易にするため、実施例の要素の符号をカッコで囲んだものを付記する。
また、本発明を後述の実施例の符号と対応させて説明する理由は、本発明の理解を容易にするためであり、本発明の範囲を実施例に限定するためではない。
【０００６】
（第１発明）
前記課題を解決するために、第１発明の試料ホルダは、下記の要件（Ａ01）〜（Ａ05）を備えたことを特徴とする、
（Ａ01）試料ホルダ搬送部材（Ｈ２）に保持されるときに試料ホルダ搬送部材（Ｈ２）に対向する側面であるホルダ後面（１）および試料ステージ（ＳＴ）に装着されるときに試料ステージ（ＳＴ）に対向する側面であって前記ホルダ後面（１）と反対側のホルダ前面（２）と前記ホルダ後面（１）およびホルダ前面（２）を接続する左右一対のホルダ側面（３，４）と前記左右のホルダ側面（３，４）の上端から左右に突出する被支持部（６）とを有する試料ホルダ（Ｈ１）、
（Ａ02）前記ホルダ後面（１）の左右にそれぞれ設けられて、ホルダ前面（２）側から接近した前面側ホルダ保持アーム（２４，２４）の後側の端部に設けられた回転可能な第２のホルダ保持ローラ（２５，２５）によって挟持されるとともにホルダ後面（１）側から接近した一対の後面側ホルダ保持アーム（１６，１６）の前側の端部に設けられた回転可能な第１のホルダ保持ローラ（１７，１７）が接触する後側被挟持部（１ａ，１ａ）、
（Ａ03）前記ホルダ前面（２）の左右にそれぞれ設けられて、ホルダ後面（１）側から接近した後面側ホルダ保持アーム（１６，１６）の前側の端部の第１のホルダ保持ローラ（１７，１７）によって挟持されるとともにホルダ前面（２）側から接近した一対の前面側ホルダ保持アーム（２４，２４）の後側の端部の第２のホルダ保持ローラ（２５，２５）が接触する前側被挟持部（２ａ，２ａ）、
（Ａ04）前記前面側ホルダ保持アーム（２４，２４）の第２のホルダ保持ローラ（２５，２５）により挟持された後側被挟持部（１ａ，１ａ）に接近した前記後面側ホルダ保持アーム（１６，１６）の第１のホルダ保持ローラ（１７，１７）を前記第２のホルダ保持ローラ（２５，２５）の内側にガイドするように形成された前記ホルダ後面（１）、
（Ａ05）前記後面側ホルダ保持アーム（１６，１６）の第１のホルダ保持ローラ（１７，１７）により挟持された前側被挟持部（２ａ，２ａ）に接近した前記前面側ホルダ保持アーム（２４，２４）の第２のホルダ保持ローラ（２５，２５）を前記第１のホルダ保持ローラ（１７，１７）の内側にガイドするように形成された前記ホルダ前面（２）。
【０００７】
（第１発明の作用）
前記構成を備えた第１発明の試料ホルダ（Ｈ１）は、試料ホルダ搬送部材（Ｈ２）に保持されるときに試料ホルダ搬送部材（Ｈ２）に対向する側面であるホルダ後面（１）および試料ステージ（ＳＴ）に装着されるときに試料ステージ（ＳＴ）に対向する側面であって前記ホルダ後面（１）と反対側のホルダ前面（２）と前記ホルダ後面（１）およびホルダ前面（２）を接続する左右一対のホルダ側面（３，４）と前記左右のホルダ側面（３，４）の上端から左右に突出する被支持部（６）とを有する。
【０００８】
前記ホルダ後面（１）の左右にそれぞれ設けられた後側被挟持部（１ａ，１ａ）は、ホルダ前面（２）側から接近した前面側ホルダ保持アーム（２４，２４）の後側の端部に設けられた回転可能な第２のホルダ保持ローラ（２５，２５）によって挟持される。前記前面側ホルダ保持アーム（２４，２４）の第２のホルダ保持ローラ（２５，２５）により後側被挟持部（１ａ，１ａ）が挟持された状態で、前記後面側ホルダ保持アーム（１６，１６）に設けられた回転可能な第１のホルダ保持ローラ（１７，１７）がホルダ後面（１）に接近したとき、第１のホルダ保持ローラ（１７，１７）は前記ホルダ後面（１）の後側被挟持部（１ａ，１ａ）に接触する。前記ホルダ後面（１）は、第１のホルダ保持ローラ（１７，１７）を前記第２のホルダ保持ローラ（２５，２５）の内側にガイドする。
したがって、後面側ホルダ保持アーム（１６，１６）の第１のホルダ保持ローラ（１７，１７）は、前記第２のホルダ保持ローラ（２５，２５）および前面側ホルダ保持アーム（２４，２４）を押し広げながら、試料ホルダ（Ｈ１）の側面（３，４）に沿って移動し、ホルダ前面（２）の前側被挟持部（２ａ，２ａ）を挟持する。
【０００９】
また、逆に前記後面側ホルダ保持アーム（１６，１６）の第１のホルダ保持ローラ（１７，１７）により前側被挟持部（２ａ，２ａ）が挟持された状態で、前記前面側ホルダ保持アーム（２４，２４）の第２のホルダ保持ローラ（２５，２５）がホルダ前面（２）に接近したとき、第２のホルダ保持ローラ（２５，２５）は前記ホルダ前面（２）の前側被挟持部（２ａ，２ａ）に接触する。前記ホルダ前面（２）は、第２のホルダ保持ローラ（２５，２５）を前記第１のホルダ保持ローラ（１７，１７）の内側にガイドする。
したがって、前面側ホルダ保持アーム（２４，２４）の第２のホルダ保持ローラ（２５，２５）は、前記第１のホルダ保持ローラ（１７，１７）および後面側ホルダ保持アーム（１６，１６）を押し広げながら、試料ホルダ（Ｈ１）の側面（３，４）に沿って移動（前進）し、ホルダ後面（１）の後側被挟持部（１ａ，１ａ）を挟持する。
【００１０】
（第２発明）
前記課題を解決するために、第２発明の試料ホルダ搬送部材は、下記の要件（Ｂ01）〜（Ｂ07）を備えたことを特徴とする、
（Ｂ01）試料ホルダ搬送部材に対向する側面であるホルダ後面（１）と前記ホルダ後面（１）と反対側のホルダ前面（２）と前記ホルダ後面（１）およびホルダ前面（２）を接続する左右一対のホルダ側面（３，４）とが設けられたホルダ下部（Ｈ１ａ）と、前記左右のホルダ側面（３，４）の上端から左右に突出する被支持部（６）が設けられたホルダ上部（Ｈ１ｂ）とを有する試料ホルダ（Ｈ１）を支持するホルダ支持部材（１２）、
（Ｂ02）前端部が開口するＵ字状に形成され且つ前記ホルダ下部（Ｈ１ａ）が挿入されるホルダ下部挿入溝（１３）と前記ホルダ上部（Ｈ１ｂ）の被支持部（６）の下面を支持するホルダ上部支持部（１４，１４）とを有する前記ホルダ支持部材（１２）、
（Ｂ03）前記ホルダ支持部材（１２）の下面に回転可能に支持され且つ左右方向に離れて前後方向に延びる一対のホルダ保持アーム（１６，１６）、
（Ｂ04）前記一対のホルダ保持アーム（１６，１６）の前端部にそれぞれ回転可能に設けられ、前記試料ホルダ（Ｈ１）のホルダ前面（２）の両側に設けた被挟持部（２ａ，２ａ）を挟持するホルダ保持ローラ（１７，１７）、
（Ｂ05）前記一対のホルダ保持アーム（１６，１６）の前端部を接近させるように作用するアーム前端部接近用弾性部材（１８）、
（Ｂ06）前記一対のホルダ保持アーム（１６，１６）の前端部の間隔を所定間隔以上に保持するアーム間隔保持部材（１９，１９）、
（Ｂ07）前記アーム間隔保持部材（１９，１９）により所定間隔に保持された前記一対のホルダ保持アーム（１６，１６）の前端部のホルダ保持ローラ（１７，１７）を試料ホルダ（Ｈ１）のホルダ後面（１）に押圧したときに前記一対のホルダ保持ローラ（１７，１７）が前記試料ホルダ（Ｈ１）の側面（１，３，４）により押し広げられて左右の側面（３，４）に沿ってホルダ前面（２）に移動した状態で前記試料ホルダ（Ｈ１）を保持する前記一対のホルダ保持アーム（１６，１６）。
【００１１】
（第２発明の作用）
前記構成を備えた第２発明の試料ホルダ搬送部材（Ｈ２）は、試料ホルダ搬送部材に対向する側面であるホルダ後面（１）と前記ホルダ後面（１）と反対側のホルダ前面（２）と前記ホルダ後面（１）およびホルダ前面（２）を接続する左右一対のホルダ側面（３，４）とが設けられたホルダ下部（Ｈ１ａ）と、前記左右のホルダ側面（３，４）の上端から左右に突出する被支持部（６）が設けられたホルダ上部（Ｈ１ｂ）とを有する試料ホルダ（Ｈ１）を支持して搬送する際に使用される。
試料ホルダ搬送部材（Ｈ２）のホルダ支持部材（１２）は、前端部が開口するＵ字状に形成されたホルダ下部挿入溝（１３）とホルダ上部支持部（１４，１４）とを有する。前記ホルダ下部挿入溝（１３）は前記ホルダ下部（Ｈ１ａ）が挿入される。ホルダ上部支持部（１４，１４）は、前記ホルダ上部（Ｈ１ｂ）の被支持部（６）の下面を支持する。
【００１２】
前記ホルダ支持部材（１２）の下面に回転可能に支持された一対のホルダ保持アーム（１６，１６）は、左右方向に離れて前後方向に延びている。アーム前端部接近用弾性部材（１８）は、前記一対のホルダ保持アーム（１６，１６）の前端部を接近させるように作用し、アーム間隔保持部材（１９，１９）は、前記一対のホルダ保持アーム（１６，１６）の前端部の間隔を所定間隔以上に保持する。
前記アーム前端部接近用弾性部材（１８）およびアーム間隔保持部材（１９，１９）により前記一対のホルダ保持アーム（１６，１６）の前端部のホルダ保持ローラ（１７，１７）は、通常は所定間隔に保持される。前記所定間隔に保持されたホルダ保持ローラ（１７，１７）を試料ホルダ（Ｈ１）のホルダ後面（１）に押圧したときに前記一対のホルダ保持ローラ（１７，１７）が前記試料ホルダ（Ｈ１）の側面（１，３，４）により押し広げられて左右の側面（３，４）に沿ってホルダ前面（２）に移動する。そのとき、前記一対のホルダ保持アーム（１６，１６）前端部にそれぞれ回転可能に設けられたホルダ保持ローラ（１７，１７）は、前記試料ホルダ（Ｈ１）のホルダ前面（２）の両側に設けた被挟持部（２ａ，２ａ）を挟持する。この状態で試料搬送部材（Ｈ２）は、前記試料ホルダ（Ｈ１）を保持する。
【００１３】
（第３発明）
第３発明の試料ホルダ受渡し方法は、ホルダ前面（２）と前記ホルダ前面（２）と反対側のホルダ後面（１）と前記ホルダ前面（２）およびホルダ後面（１）を接続する左右一対のホルダ側面（３，４）とが設けられた試料ホルダ（Ｈ１）を、試料ホルダ（Ｈ１）の前面側に配置された前面側ホルダ保持部材（ＳＴ）と前記試料ホルダ（Ｈ１）の後面側に配置された後面側ホルダ保持部材（Ｈ２）との間で受渡しを行う試料ホルダ受渡し方法において、
前記後面側ホルダ保持部材（Ｈ２）は試料ホルダ（Ｈ１）を保持した状態では試料ホルダ（Ｈ１）の左右のホルダ側面（３，４）に沿って前記試料ホルダ（Ｈ１）の前面の左右両側部に延びる一対の後面側ホルダ保持アーム（１６，１６）と前記後面側ホルダ保持アーム（１６，１６）の前側の端部に回転可能に設けられ且つ前記試料ホルダ（Ｈ１）の前面の左右両側部を挟持する第１のホルダ保持ローラ（１７，１７）とを有し、
前記前面側ホルダ保持部材（ＳＴ）は試料ホルダ（Ｈ１）を保持した状態では試料ホルダ（Ｈ１）の左右のホルダ側面（３，４）に沿って前記試料ホルダ（Ｈ１）の後面の左右両側部に延びる一対の前面側ホルダ保持アーム（２４，２４）と前記前面側ホルダ保持アーム（２４，２４）の後側の端部に回転可能に設けられ且つ前記試料ホルダ（Ｈ１）の後面の左右両側部を挟持する第２のホルダ保持ローラ（２５，２５）とを有し、
前記後面側ホルダ保持部材（Ｈ２）および前面側ホルダ保持部材（ＳＴ）のうちの一方のホルダ保持部材（Ｈ２）に試料ホルダ（Ｈ１）を保持した状態で前記試料ホルダ（Ｈ１）と他方のホルダ保持部材（ＳＴ）とを接近させたとき、一方のホルダ保持部材（Ｈ２）のホルダ保持アーム（１６，１６）の内側に他方のホルダ保持部材（ＳＴ）のホルダ保持アーム（２４，２４）が進入して前記一方のホルダ保持部材（Ｈ２）のホルダ保持アーム（１６，１６）は前記他方のホルダ保持アーム（２４，２４）の外側に移動し、他方のホルダ保持部材（ＳＴ）が前記試料ホルダ（Ｈ１）を保持する状態となることを特徴とする試料ホルダ受渡し方法。
【００１４】
（第３発明の作用）
前記第３発明の試料ホルダ受渡し方法では、前記後面側ホルダ保持部材（Ｈ２）および前面側ホルダ保持部材（ＳＴ）のうちの一方のホルダ保持部材（Ｈ２）に試料ホルダ（Ｈ１）を保持した状態で前記試料ホルダ（Ｈ１）を保持していない他方のホルダ保持部材（ＳＴ）に接近させたとき、一方のホルダ保持部材（Ｈ２）のホルダ保持アーム（１６，１６）の内側に他方のホルダ保持部材（ＳＴ）のホルダ保持アーム（２４，２４）が進入して前記一方のホルダ保持部材（Ｈ２）のホルダ保持アーム（１６，１６）は前記他方のホルダ保持アーム（２４，２４）の外側に移動し、他方のホルダ保持部材（ＳＴ）が前記試料ホルダ（Ｈ１）を保持する状態となる。
すなわち、ホルダ保持部材（Ｈ２）および（ＳＴ）のいずれか一方に試料ホルダ（Ｈ１）を保持し他方に保持していない状態で、ホルダ保持部材（Ｈ２）および（ＳＴ）を互いに接近させた後に離隔させる動作だけで、ホルダ保持部材（Ｈ１）および（ＳＴ）間で試料の受渡しを行うことができる。
【００１５】
【発明の実施の形態】
次に図面を参照しながら、本発明の試料ホルダ搬送部材の実施の形態の例（実施例）を説明するが、本発明は以下の実施例に限定されるものではない。
なお、以後の説明の理解を容易にするために、図面において、前後方向をＸ軸方向、右左方向をＹ軸方向、上下方向をＺ軸方向とし、矢印Ｘ，−Ｘ，Ｙ，−Ｙ，Ｚ，−Ｚで示す方向、示す側および示す側の端をそれぞれ、前方（Ｘ方向）、後方（−Ｘ方向）、右方（Ｙ方向）、左方（−Ｙ方向）、上方（Ｚ方向）、下方（−Ｚ方向）、前側（Ｘ側）、後側（−Ｘ側）、右側（Ｙ側）、左側（−Ｙ側）、上側（Ｚ側）、下側（−Ｚ側）、および前端（Ｘ端）、後端（−Ｘ端）、右端（Ｙ端）、左端（−Ｙ端）、上端（Ｚ端）、下端（−Ｚ端）とする。
また、図中、「○」の中に「・」が記載されたものは紙面の裏から表に向かう矢印を意味し、「○」の中に「×」が記載されたものは紙面の表から裏に向かう矢印を意味するものとする。
【００１６】
（実施例１）
図１は本発明の実施例１の試料ホルダ搬送部材およびそれに保持された試料ホルダの説明図であり、図１Ａは試料ホルダ搬送部材の先端部に保持された試料ホルダの上面図、図１Ｂは前記図１ＡのＩＢ−ＩＢ線断面図、図１Ｃは前記図１Ａの矢印ＩＣから見た図、図１Ｄは前記図１Ｂの矢印ＩＤから見た図である。
図２は同実施例１の試料ホルダ搬送部材に保持した試料ホルダを試料ステージに装着する場合の作用説明図で、図２Ａは試料ホルダ搬送部材に保持した試料ホルダを試料ステージに搬送した状態を示す図、図２Ｂは前記図２Ａの状態から試料ホルダ搬送部材をさらに前進させた状態を示す図、図２Ｃは前記図２Ｂの状態から試料ホルダ搬送部材をさらに前進させた状態を示す図、図２Ｄは前記図２Ｃの状態から試料ホルダ搬送部材をさらに前進させた状態を示す図、図２Ｅは前記図２Ｄの状態から試料ホルダ搬送部材をさらに前進させた試料ホルダが試料ステージに保持された状態を示す図である。
図３は実施例１の試料ホルダ搬送部材に保持した試料ホルダを試料ステージに装着する場合の断面図で、図３Ａは前記図２ＡのIIIＡ−IIIＡ線断面図、図３Ｂは前記図３ＡのIIIＢ−IIIＢ線断面図、図３Ｃは前記図３ＡのIIIＣ−IIIＣ線断面図である。
図４は前記図２Ａまたは図３Ａに示す部材の斜視図である。
【００１７】
図１において、試料ホルダＨ１は、ホルダ下部Ｈ１ａおよび円形のホルダ上部Ｈ１ｂを有している。ホルダ下部Ｈ１ａは、試料ホルダ搬送部材Ｈ２に保持されるとともに試料ホルダ搬送部材（後面側ホルダ保持部材）Ｈ２に対向する側面であるホルダ後面１および試料ステージ（前面側ホルダ保持部材）ＳＴ（図４参照）に装着されるとき試料ステージＳＴに対向する側面であって前記ホルダ後面１と反対側のホルダ前面２と、前記ホルダ後面１およびホルダ前面２を接続する左右一対のホルダ側面３，４とを有している。
前記ホルダ後面１には上下方向に延びる凹部により形成された左右一対の後側被挟持部１ａ，１ａが形成されており、前記ホルダ前面２には上下方向に延びる凹部により形成された左右一対の前側被挟持部２ａ，２ａが形成されている。
前記ホルダ下部Ｈ１ａの下面には、前後に延びるあり溝５が形成されている。
【００１８】
前記ホルダ上部Ｈ１ｂは前記ホルダ下部Ｈ１ａの上端から外方に広がる部分（被支持部）６を有している。被支持部６は前記ホルダ側面３，４の上端から左右に突出する部分を有しており、その部分は試料ホルダ搬送部材Ｈ２により支持される部分である。また、ホルダ上部Ｈ１ｂの上面の中央部には試料（図示せず）が保持されるように構成されている。
【００１９】
試料ホルダ搬送部材Ｈ２は、搬送方向に延びるロッド１１と、ロッド１１の前端部に連結された板状のホルダ支持部材１２とを有している。ホルダ支持部材１２の前端部はＵ字状に形成されており、前端が開口するホルダ下部挿入溝１３が形成されている。前記ホルダ下部挿入溝１３は前記試料ホルダＨ１の側面が挿入される溝である。前記ホルダ下部挿入溝１３の左右両側部分の上面によりホルダ上部支持部１４，１４が構成されており、ホルダ上部支持部１４，１４は、前記試料ホルダＨ１の被支持部６の下面を支持する部分である。
【００２０】
前記ホルダ支持部材１２の下面には左右一対の搬送側ホルダ保持アーム（後面側ホルダ保持アーム）１６，１６の後端部が回転可能に支持されており、前記ホルダ保持アーム１６，１６が前後方向（Ｘ軸方向）に延びている。前記ホルダ保持アーム１６，１６の前端部にはそれぞれホルダ保持ローラ（アーム前端挟持部）１７，１７が上下軸回りに回転可能に支持されている。また、前記ホルダ保持アーム１６，１６は引張ばね（アーム前端部接近用弾性部材）１８により、前端部のホルダ保持ローラ１７，１７が常時接近する方向の力が作用し、且つ後端部（−Ｘ側端部）が開く方向の力が作用している。前記ホルダ保持アーム１６，１６の後端部は、前記ホルダ支持部材１２に固定されたストッパ（アーム間隔保持部材）１９，１９に当接するので、ホルダ保持アーム１６，１６の前端のホルダ保持ローラ１７，１７は所定距離に保持される。
【００２１】
図４において、試料ステージＳＴは、テーブル２１を有しており、前記テーブル２１の上面には、カンナ台２２が設けられている。カンナ台２２は前記ホルダ下部Ｈ１ａが前進してきたときに前記あり溝５が嵌合する部材である。カンナ台２２の前側（Ｘ側）にはストッパ２３が固定されている。
前記試料ステージＳＴ上面には前記カンナ台２２の左右に一対のステージ側ホルダ保持アーム（前面側ホルダ保持アーム）２４，２４の前端部（Ｘ端部）が回転可能に支持されている。前記ステージ側ホルダ保持アーム２４，２４の後端部（−Ｘ端部）にはそれぞれホルダ保持ローラ（アーム後端挟持部）２５，２５が上下軸回りに回転可能に支持されている。また、前記ステージ側ホルダ保持アーム２４，２４には引張ばね２６により、前端部のホルダ保持ローラ２５，２５が常時接近する方向の力（前端部（Ｘ側端部）が開く方向の力）が作用している。
【００２２】
試料ステージＳＴに試料ホルダＨ１が装着されていない状態では、前記ホルダ保持アーム２４，２４前端部（Ｘ端部）のホルダ保持ローラ２５，２５は、常時、前記カンナ台２２の前端部に当接した状態で保持される。
図４において、試料ホルダＨ１を保持した試料ホルダ搬送部材Ｈ２が試料ステージＳＴに向かって前進したとき、試料ステージＳＴのホルダ保持ローラ２５，２５は、ホルダ保持ローラ１７，１７の内側の周面に当接するようになっている。その状態でさらに試料ホルダ搬送部材Ｈ２を前進させると、ホルダ保持ローラ２５，２５は、試料ホルダＨ１の側面とホルダ保持ローラ１７，１７との間に侵入して、ホルダ保持ローラ１７，１７およびホルダ保持アーム１６，１６を外側に押し広げる。
【００２３】
（実施例１の作用）
前記構成を備えた本発明の実施例１の試料ホルダ搬送部材Ｈ２は、図２Ａ、図４に示す状態（試料ホルダＨ１を保持した試料ホルダ搬送部材Ｈ２が試料ステージＳＴに向かって前進して、試料ステージＳＴのホルダ保持ローラ２５，２５が、ホルダ保持ローラ１７，１７の内側の周面に当接した状態）において、さらに試料ステージＳＴ側に前進すると、図２Ｂに示すように、試料ホルダＨ１を保持していたホルダ保持ローラ１７，１７およびホルダ保持アーム１６，１６はホルダ保持ローラ２５，２５により外側に押し広げられる。このとき、ホルダ保持ローラ２５，２５は試料ホルダＨ１の前側被挟持部２ａ，２ａの側面とホルダ保持ローラ１７，１７との間に侵入する。
このとき、試料ホルダＨ１下面のあり溝５の前端部（Ｘ端部）は、試料ステージＳＴのカンナ台２２の後端部（−Ｘ端部）に嵌合する。
【００２４】
前記図２Ｂの状態から試料ホルダ保持部材Ｈ２および試料ホルダＨ１をさらに試料ステージＳＴ側に前進させると、図２Ｃ、図２Ｄに示すように、ホルダ保持ローラ２５，２５は試料ホルダＨ１の左右のホルダ側面３，４に沿って後方（−Ｘ方向）に移動する。このとき、試料ホルダ保持部材Ｈ２のホルダ保持アーム１６，１６は外側に広がってホルダ保持ローラ１７，１７は、試料ステージＳＴのホルダ保持アーム２４，２４の外側面に沿って前方に移動する。
前記図２Ｄの状態から試料ホルダ保持部材Ｈ２および試料ホルダＨ１をさらに試料ステージＳＴ側に前進（Ｘ方向に移動）させると、図２Ｅに示すように、試料ステージＳＴのホルダ保持アーム２４，２４後端部（−Ｘ端部）のホルダ保持ローラ２５，２５は試料ホルダＨ１の後側被挟持部１ａ，１ａを挟持する。この図２Ｅの状態では、試料ホルダＨ１下面のあり溝５は、試料ステージＳＴのカンナ台２２に嵌合しており、試料ホルダＨ１のホルダ前面２は試料ステージＳＴのストッパ２３の後端面（−Ｘ端面）に当接している。
【００２５】
前記図２Ｅに示す状態は試料ホルダＨ１が試料ステージＳＴに装着された状態である。この図２Ｅに示す状態で、試料ホルダ保持部材Ｈ２を後退させる（−Ｘ方向に移動させる）と、試料ホルダＨ１は試料ステージＳＴに装着されたまま、試料ホルダ保持部材Ｈ２のみが後退し、試料ステージＳＴから離れる。
【００２６】
なお、前記試料ステージＳＴに試料ホルダＨ１が装着された状態（図２Ｅに示す状態、すなわち、試料ステージＳＴのホルダ保持アーム２４，２４後端部（−Ｘ端部）のホルダ保持ローラ２５，２５が試料ホルダＨ１の後側被挟持部１ａ，１ａを挟持する状態）で、後方（−Ｘ方向）から試料ホルダ保持部材Ｈ２が試料ステージＳＴに向かって前進してきた場合には、前記図２で説明したホルダ保持アーム２４，２４とホルダ保持アーム１６，１６との作用が逆になる。
すなわち、試料ステージＳＴのホルダ保持アーム２４，２４先端部のホルダ保持ローラ２５，２５が試料ホルダＨ１の後側被挟持部１ａ，１ａを挟持している状態（図２Ｅ参照）で、試料ホルダ保持部材Ｈ２が前進してくると、試料ホルダ保持部材Ｈ２のホルダ保持アーム１６，１６のホルダ保持ローラ１７，１７が、試料ホルダＨ１の後側被挟持部１ａ，１ａの側面とホルダ保持ローラ１７，１７との間に侵入する。そして、さらに試料ホルダ保持部材Ｈ２を前進させると、ホルダ保持ローラ１７，１７は試料ホルダＨ１の左右のホルダ側面３，４に沿って前進し、前側被挟持部２ａ，２ａを挟持する。その状態で、試料ホルダ保持部材Ｈ２を後退させることにより、試料ホルダＨ１を試料ステージＳＴから離脱させて後方（−Ｘ方向）に移動させることができる。
【００２７】
したがって、前記試料ステージＳＴ、試料ホルダＨ１、試料ホルダ保持部材Ｈ２は、試料ホルダ保持部材Ｈ２の前進および後退のみで、試料ホルダＨ１を試料ステージＳＴと試料ホルダ保持部材Ｈ２との間で交換可能（着脱可能）であり、且つ、試料ホルダ保持部材Ｈ２に装着した試料ホルダＨ１を搬送可能である。
【００２８】
（変更例）
以上、本発明の実施例を詳述したが、本発明は、前記実施例に限定されるものではなく、特許請求の範囲に記載された本発明の要旨の範囲内で、種々の変更を行うことが可能である。次に変更例を示す。
（Ｈ01）あり溝５とカンナ台２２の代わりに、一対の向き合った断面コ字型のガイド溝とその溝に嵌合する凸条とを使用することが可能である。
【００２９】
【発明の効果】
前述の本発明の試料ホルダ搬送部材は、下記の効果を奏することができる。
（Ｅ01）試料ホルダ搬送部材をその搬送方向に沿う軸回りに回転させることなく、試料ホルダと着脱させることができる。
（Ｅ02）試料ホルダを保持したホルダ保持部材と試料ホルダを保持していないホルダ保持部材とを接近させた後に離隔させる動作のみにより両ホルダ保持部材間で試料ホルダの受渡しを可能にすることができる。
【図面の簡単な説明】
【図１】 図１は本発明の実施例１の試料ホルダ搬送部材およびそれに保持された試料ホルダの説明図であり、図１Ａは試料ホルダ搬送部材の先端部に保持された試料ホルダの上面図、図１Ｂは前記図１ＡのＩＢ−ＩＢ線断面図、図１Ｃは前記図１Ａの矢印ＩＣから見た図、図１Ｄは前記図１Ｂの矢印ＩＤから見た図である。
【図２】 図２は同実施例１の試料ホルダ搬送部材に保持した試料ホルダを試料ステージに装着する場合の作用説明図で、図２Ａは試料ホルダ搬送部材に保持した試料ホルダを試料ステージに搬送した状態を示す図、図２Ｂは前記図２Ａの状態から試料ホルダ搬送部材をさらに前進させた状態を示す図、図２Ｃは前記図２Ｂの状態から試料ホルダ搬送部材をさらに前進させた状態を示す図、図２Ｄは前記図２Ｃの状態から試料ホルダ搬送部材をさらに前進させた状態を示す図、図２Ｅは前記図２Ｄの状態から試料ホルダ搬送部材をさらに前進させた試料ホルダが試料ステージに保持された状態を示す図である。
【図３】 図３は実施例１の試料ホルダ搬送部材に保持した試料ホルダを試料ステージに装着する場合の断面図で、図３Ａは前記図２ＡのIIIＡ−IIIＡ線断面図、図３Ｂは前記図３ＡのIIIＢ−IIIＢ線断面図、図３Ｃは前記図３ＡのIIIＣ−IIIＣ線断面図である。
【図４】 図４は前記図２Ａまたは図３Ａに示す部材の斜視図である。
【符号の説明】
Ｈ１…試料ホルダ、Ｈ１ａ…ホルダ下部、Ｈ１ｂ…ホルダ上部、Ｈ２…試料ホルダ搬送部材、ＳＴ…試料ステージ、
１…ホルダ後面、１ａ…後側被挟持部、２…ホルダ前面、２ａ…前側被挟持部、３，４…左右のホルダ側面、６…被支持部、１２…ホルダ支持部材、１３…ホルダ下部挿入溝、１４…ホルダ上部支持部、１６…後面側ホルダ保持アーム、１７…アーム前端挟持部、１８…アーム前端部接近用弾性部材、１９…アーム間隔保持部材、２４…前面側ホルダ保持アーム、２５…アーム後端挟持部。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a sample holder, a sample holder transport member, and a sample holder delivery method used in a charged particle beam apparatus such as an electron microscope, and in particular, can be attached and detached simply by moving the sample holder transport member toward and away from the sample holder. The present invention relates to a sample holder, a sample holder conveying member, and a sample holder delivery method.
[0002]
[Prior art]
The conventional sample holder transport member has a rod-shaped transport member that penetrates the vacuum chamber, a holder holding member provided at the inner end thereof, and an operation member provided at the outer end portion. The sample holder is held by the holder holding member, and the sample holder is transferred by moving the operation member at the outer end of the rod-shaped transfer member in and out. The operation of attaching and detaching the sample holder to and from the holder holding member is performed by rotating the operation member.
[0003]
[Problems to be solved by the invention]
In the prior art, there has been a problem that the operation of moving the sample holder transport member in the transport direction and the work of attaching and detaching the sample holder have to be performed completely differently, which is complicated and takes a long time. .
In addition, a structure in which the rod-shaped transport member of the sample holder transport member is bent outside the vacuum chamber is also known. In this foldable sample holder transport member, it is known that the operation member can be bent only at a predetermined rotation position. However, in such a sample holder transport member, the operation is performed when the sample holder is folded. There is also a problem that the member cannot be bent unless the rotational position of the member is rotated to a predetermined position.
[0004]
In view of the above-described circumstances, the present invention has the following contents described in (O01) and (O02).
(O01) To enable the sample holder transport member to be attached to and detached from the sample holder without rotating around the axis along the transport direction.
(O02) To enable the sample holder to be transferred between the holder holding members only by moving the holder holding member holding the sample holder and the holder holding member not holding the sample holder close to each other.
[0005]
[Means for Solving the Problems]
Next, the present invention devised to solve the above problems will be described. Elements of the present invention are parenthesized with reference numerals of elements of the embodiments in order to facilitate correspondence with elements of the embodiments described later. Append what is enclosed in brackets.
The reason why the present invention is described in correspondence with the reference numerals of the embodiments described later is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.
[0006]
(First invention)
In order to solve the above problems, the sample holder of the first invention is characterized by comprising the following requirements (A01) to (A05):
(A01) The sample stage (ST) when mounted on the holder rear surface (1), which is the side facing the sample holder transport member (H2) when held by the sample holder transport member (H2), and the sample stage (ST). ) And a pair of left and right holder side surfaces (3, 4) connecting the holder rear surface (1) and the holder front surface (2). A sample holder (H1) having a supported portion (6) protruding left and right from the upper ends of the left and right holder side surfaces (3, 4);
(A02) Front holder holding arms (24, 24) provided on the left and right sides of the holder rear surface (1) and approaching from the holder front surface (2) side. A rotatable second holder holding roller provided at the end on the rear side (25, 25) of the pair of rear surface side holder holding arms (16, 16) which are sandwiched between the holder rear surface (1) and approached from the holder rear surface (1) side A rotatable first holder holding roller provided at the front end (17, 17) the rear side sandwiched portions (1a, 1a) that come into contact with,
(A03) The rear side holder holding arms (16, 16) provided on the left and right sides of the holder front side (2), respectively, approached from the holder rear side (1) side. Front edge of First holder holding roller (17, 17) of the pair of front side holder holding arms (24, 24) which are sandwiched between the holder front side (2) side and approached from the holder front side (2) side Rear edge of Second holder holding roller (25, 25) the front side sandwiched portions (2a, 2a) that come into contact with,
(A04) of the front holder holding arm (24, 24) Second holder holding roller (25, 25) of the rear side holder holding arm (16, 16) approaching the rear side clamping portion (1a, 1a) clamped by (25, 25) First holder holding roller (17,17) Second holder holding roller The holder rear surface (1) formed so as to be guided inside (25, 25),
(A05) of the rear side holder holding arm (16, 16) First holder holding roller (17, 17) of the front side holder holding arm (24, 24) approaching the front side clamped portion (2a, 2a) held by Second holder holding roller (25, 25) First holder holding roller The holder front surface (2) formed so as to be guided inside (17, 17).
[0007]
(Operation of the first invention)
The sample holder (H1) of the first invention having the above configuration includes a holder rear surface (1) and a sample stage, which are side surfaces facing the sample holder transport member (H2) when held by the sample holder transport member (H2). The holder front surface (2) opposite to the holder rear surface (1), the holder rear surface (1), and the holder front surface (2) are the side surfaces facing the sample stage (ST) when mounted on (ST). A pair of left and right holder side surfaces (3, 4) to be connected and a supported portion (6) protruding left and right from the upper ends of the left and right holder side surfaces (3, 4).
[0008]
The rear clamped portions (1a, 1a) provided on the left and right sides of the holder rear surface (1) are the front side holder holding arms (24, 24) approaching from the holder front surface (2) side. A rotatable second holder holding roller provided at the end on the rear side (25, 25). Of the front side holder holding arm (24, 24) Second holder holding roller (25, 25), the rear side holder holding arm (16, 16) in a state where the rear side clamped portion (1a, 1a) is clamped. 1st holder holding roller which can be rotated provided in When (17,17) approaches the holder rear surface (1), First holder holding roller (17, 17) is in contact with the rear sandwiched portion (1a, 1a) of the holder rear surface (1). The holder rear surface (1) First holder holding roller (17,17) Second holder holding roller Guide inside (25, 25).
Therefore, the rear side holder holding arms (16, 16) First holder holding roller (17, 17) Second holder holding roller (25, 25) and the front-side holder holding arm (24, 24) are moved along the side surfaces (3, 4) of the sample holder (H1) while spreading, and the front-side clamping portion ( 2a, 2a) is sandwiched.
[0009]
Conversely, the rear-side holder holding arms (16, 16) First holder holding roller (17, 17) of the front side holder holding arm (24, 24) in a state where the front side clamping portion (2a, 2a) is clamped. Second holder holding roller When (25, 25) approaches the holder front surface (2), Second holder holding roller (25, 25) is in contact with the front side sandwiched portions (2a, 2a) of the holder front surface (2). The holder front surface (2) Second holder holding roller (25, 25) First holder holding roller Guide inside (17, 17).
Therefore, the front holder holding arm (24, 24) Second holder holding roller (25, 25) First holder holding roller (17, 17) and the rear surface side holder holding arm (16, 16) are moved (advanced) along the side surface (3, 4) of the sample holder (H1) while expanding the rear surface of the holder rear surface (1). The to-be-clamped part (1a, 1a) is clamped.
[0010]
(Second invention)
In order to solve the above problems, the sample holder transport member of the second invention is characterized by comprising the following requirements (B01) to (B07):
(B01) The holder rear surface (1), which is the side facing the sample holder transport member, is connected to the holder front surface (2) opposite to the holder rear surface (1), the holder rear surface (1), and the holder front surface (2). A holder provided with a holder lower part (H1a) provided with a pair of left and right holder side faces (3, 4) and a supported part (6) protruding left and right from the upper ends of the left and right holder side faces (3, 4) A holder support member (12) for supporting a sample holder (H1) having an upper portion (H1b);
(B02) Supports the lower surface of the holder lower insertion groove (13) into which the holder lower portion (H1a) is inserted and the supported portion (6) of the holder upper portion (H1b), which is formed in a U-shape with an open front end. The holder support member (12) having a holder upper support portion (14, 14) for
(B03) A pair of holder holding arms (16, 16) rotatably supported on the lower surface of the holder support member (12) and extending in the front-rear direction away in the left-right direction;
(B04) At the front ends of the pair of holder holding arms (16, 16), respectively To be rotatable Clamped portions (2a, 2a) provided on both sides of the holder front surface (2) of the sample holder (H1) are provided. Holder holding roller (17, 17),
(B05) An arm front end approaching elastic member (18) that acts to approach the front ends of the pair of holder holding arms (16, 16);
(B06) Arm interval holding members (19, 19) for holding the interval between the front end portions of the pair of holder holding arms (16, 16) at a predetermined interval or more;
(B07) The front end portions of the pair of holder holding arms (16, 16) held at a predetermined interval by the arm interval holding members (19, 19). Holder holding roller (17, 17) is pressed against the holder rear surface (1) of the sample holder (H1). Holder holding roller (17, 17) is pushed and spread by the side surfaces (1, 3, 4) of the sample holder (H1) and moved to the holder front surface (2) along the left and right side surfaces (3, 4). The pair of holder holding arms (16, 16) for holding (H1).
[0011]
(Operation of the second invention)
The sample holder transport member (H2) of the second invention having the above configuration includes a holder rear surface (1) which is a side surface facing the sample holder transport member, and a holder front surface (2) opposite to the holder rear surface (1). From the holder lower part (H1a) provided with a pair of left and right holder side surfaces (3, 4) connecting the holder rear surface (1) and the holder front surface (2), and from the upper ends of the left and right holder side surfaces (3, 4) It is used when supporting and transporting a sample holder (H1) having a holder upper part (H1b) provided with a supported part (6) protruding left and right.
The holder support member (12) of the sample holder transport member (H2) has a holder lower insertion groove (13) and a holder upper support portion (14, 14) formed in a U-shape with an open front end. The holder lower part (H1a) is inserted into the holder lower part insertion groove (13). The holder upper support portion (14, 14) supports the lower surface of the supported portion (6) of the holder upper portion (H1b).
[0012]
A pair of holder holding arms (16, 16) rotatably supported on the lower surface of the holder support member (12) are separated in the left-right direction and extend in the front-rear direction. The arm front end portion approaching elastic member (18) acts to bring the front end portions of the pair of holder holding arms (16, 16) closer, and the arm interval holding member (19, 19) is the pair of holder holding members. The interval between the front end portions of the arms (16, 16) is maintained at a predetermined interval or more.
The front end portion of the pair of holder holding arms (16, 16) is supported by the elastic member (18) for approaching the arm front end portion and the arm interval holding member (19, 19). Holder holding roller (17, 17) is normally held at a predetermined interval. Held at the predetermined interval Holder holding roller (17, 17) is pressed against the holder rear surface (1) of the sample holder (H1). Holder holding roller (17, 17) is spread by the side surfaces (1, 3, 4) of the sample holder (H1) and moves to the holder front surface (2) along the left and right side surfaces (3, 4). At that time, the front end portions of the pair of holder holding arms (16, 16) respectively To be rotatable Provided Holder holding roller (17, 17) clamps the clamped portions (2a, 2a) provided on both sides of the holder front surface (2) of the sample holder (H1). In this state, the sample transport member (H2) holds the sample holder (H1).
[0013]
(Third invention)
The sample holder delivery method of the third invention is a pair of left and right connecting the holder front surface (2), the holder rear surface (1) opposite to the holder front surface (2), the holder front surface (2) and the holder rear surface (1). The sample holder (H1) provided with the holder side surfaces (3, 4) is placed on the front side holder holding member (ST) disposed on the front side of the sample holder (H1) and the rear side of the sample holder (H1). In the sample holder delivery method for delivering between the rear surface side holder holding member (H2) arranged,
In the state where the sample holder (H1) is held, the rear side holder holding member (H2) is located on the left and right sides of the front surface of the sample holder (H1) along the left and right holder side surfaces (3, 4) of the sample holder (H1). Of the pair of rear surface side holder holding arms (16, 16) and the rear surface side holder holding arms (16, 16) Front edge In To be rotatable It is provided and sandwiches the left and right sides of the front surface of the sample holder (H1). First holder holding roller (17, 17)
In the state where the sample holder (H1) is held, the front side holder holding member (ST) is located on the left and right sides of the rear surface of the sample holder (H1) along the left and right holder side surfaces (3, 4) of the sample holder (H1). Of a pair of front side holder holding arms (24, 24) and the front side holder holding arms (24, 24) Rear edge In To be rotatable The left and right sides of the rear surface of the sample holder (H1) are provided and sandwiched Second holder holding roller (25, 25)
The sample holder (H1) and the other holder in a state where the sample holder (H1) is held by one of the rear side holder holding member (H2) and the front side holder holding member (ST). When the holding member (ST) is brought closer, the holder holding arm (24, 24) of the other holder holding member (ST) is located inside the holder holding arm (16, 16) of one holder holding member (H2). Upon entering, the holder holding arm (16, 16) of the one holder holding member (H2) moves to the outside of the other holder holding arm (24, 24), and the other holder holding member (ST) is moved to the sample. A sample holder delivery method, wherein the holder (H1) is held.
[0014]
(Operation of the third invention)
In the sample holder delivery method according to the third aspect of the invention, the sample holder (H1) is held by one holder holding member (H2) of the rear side holder holding member (H2) and the front side holder holding member (ST). When the sample holder (H1) is moved closer to the other holder holding member (ST), the other holder is held inside the holder holding arms (16, 16) of the one holder holding member (H2). The holder holding arm (24, 24) of the member (ST) enters and the holder holding arm (16, 16) of the one holder holding member (H2) is placed outside the other holder holding arm (24, 24). The other holder holding member (ST) is in a state of holding the sample holder (H1).
That is, after holding the sample holder (H1) on one of the holder holding members (H2) and (ST) and not holding the other on the other, the holder holding members (H2) and (ST) are brought close to each other. The sample can be delivered between the holder holding members (H1) and (ST) only by the separating operation.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Next, an example (example) of an embodiment of the sample holder transport member of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples.
In order to facilitate understanding of the following description, in the drawings, the front-rear direction is the X-axis direction, the left-right direction is the Y-axis direction, the up-down direction is the Z-axis direction, and arrows X, -X, Y, -Y, The direction indicated by Z and -Z, the side indicated and the end of the side indicated are respectively forward (X direction), backward (-X direction), right (Y direction), left (-Y direction), and upward (Z direction). ), Downward (−Z direction), front side (X side), rear side (−X side), right side (Y side), left side (−Y side), upper side (Z side), lower side (−Z side), The front end (X end), the rear end (-X end), the right end (Y end), the left end (-Y end), the upper end (Z end), and the lower end (-Z end).
In the figure, “•” in “○” means an arrow heading from the back of the page to the front, and “×” in “○” is the front of the page. It means an arrow pointing from the back to the back.
[0016]
Example 1
FIG. 1 is an explanatory view of a sample holder transport member and a sample holder held by the sample holder transport member according to Embodiment 1 of the present invention, FIG. 1A is a top view of the sample holder held at the tip of the sample holder transport member, and FIG. 1A is a cross-sectional view taken along line IB-IB in FIG. 1A, FIG. 1C is a view seen from the arrow IC in FIG. 1A, and FIG. 1D is a view seen from the arrow ID in FIG.
FIG. 2 is an operation explanatory diagram when the sample holder held on the sample holder transfer member of the first embodiment is mounted on the sample stage. FIG. 2A shows a state in which the sample holder held on the sample holder transfer member is transferred to the sample stage. FIG. 2B is a diagram illustrating a state in which the sample holder transport member is further advanced from the state of FIG. 2A. FIG. 2C is a diagram illustrating a state in which the sample holder transport member is further advanced from the state of FIG. 2B. 2D is a view showing a state in which the sample holder transport member is further advanced from the state of FIG. 2C, and FIG. 2E is a state in which the sample holder in which the sample holder transport member is further advanced from the state of FIG. FIG.
3 is a cross-sectional view when the sample holder held on the sample holder conveying member of Example 1 is mounted on the sample stage. FIG. 3A is a cross-sectional view taken along line IIIA-IIIA of FIG. 2A, and FIG. 3B is IIIB of FIG. -IIIB sectional view, FIG. 3C is a sectional view taken along the line IIIC-IIIC of FIG. 3A.
FIG. 4 is a perspective view of the member shown in FIG. 2A or 3A.
[0017]
In FIG. 1, the sample holder H1 has a holder lower part H1a and a circular holder upper part H1b. The holder lower portion H1a is held by the sample holder transport member H2 and also has a holder rear surface 1 which is a side facing the sample holder transport member (rear side holder holding member) H2 and a sample stage (front side holder holding member) ST (FIG. 4). And a pair of left and right holder side surfaces 3 and 4 for connecting the holder rear surface 1 and the holder front surface 2 to each other and the side opposite to the holder rear surface 1. have.
The holder rear surface 1 is formed with a pair of left and right rear sandwiched portions 1a, 1a formed by recesses extending in the vertical direction, and the holder front surface 2 is formed of a pair of left and right formed by recesses extending in the vertical direction. Front side sandwiched portions 2a and 2a are formed.
A dovetail groove 5 extending in the front-rear direction is formed on the lower surface of the holder lower portion H1a.
[0018]
The holder upper portion H1b has a portion (supported portion) 6 that spreads outward from the upper end of the holder lower portion H1a. The supported portion 6 has a portion protruding left and right from the upper ends of the holder side surfaces 3 and 4, and this portion is a portion supported by the sample holder transport member H2. In addition, a sample (not shown) is held at the center of the upper surface of the holder upper portion H1b.
[0019]
The sample holder transport member H2 includes a rod 11 extending in the transport direction and a plate-shaped holder support member 12 connected to the front end portion of the rod 11. A front end portion of the holder support member 12 is formed in a U-shape, and a holder lower insertion groove 13 having an open front end is formed. The holder lower insertion groove 13 is a groove into which the side surface of the sample holder H1 is inserted. Holder upper support portions 14 and 14 are formed by upper surfaces of the left and right side portions of the holder lower insertion groove 13, and the holder upper support portions 14 and 14 support the lower surface of the supported portion 6 of the sample holder H1. It is.
[0020]
A rear end portion of a pair of left and right transport side holder holding arms (rear side holder holding arms) 16, 16 is rotatably supported on the lower surface of the holder support member 12, and the holder holding arms 16, 16 are arranged in the front-rear direction. It extends in the (X-axis direction). Holder holding rollers (arm front end clamping portions) 17 and 17 are respectively supported at the front end portions of the holder holding arms 16 and 16 so as to be rotatable about the vertical axis. Further, the holder holding arms 16 and 16 are subjected to a force in a direction in which the holder holding rollers 17 and 17 at the front end always approach by a tension spring (an elastic member for approaching the front end of the arm) 18 and the rear end (− The force in the direction in which the X-side end portion opens is acting. Since the rear end portions of the holder holding arms 16 and 16 are in contact with stoppers (arm interval holding members) 19 and 19 fixed to the holder support member 12, the holder holding roller 17 at the front end of the holder holding arms 16 and 16 is used. , 17 are held at a predetermined distance.
[0021]
In FIG. 4, the sample stage ST has a table 21, and a cannula table 22 is provided on the upper surface of the table 21. The cannula base 22 is a member into which the dovetail groove 5 is fitted when the holder lower portion H1a advances. A stopper 23 is fixed to the front side (X side) of the cannula base 22.
Front end portions (X end portions) of a pair of stage side holder holding arms (front side holder holding arms) 24 and 24 are rotatably supported on the upper surface of the sample stage ST on the left and right sides of the cannula 22. Holder holding rollers (arm rear end clamping portions) 25 and 25 are supported on the rear end portions (−X end portions) of the stage side holder holding arms 24 and 24 so as to be rotatable about the vertical axis. The stage-side holder holding arms 24, 24 are subjected to a force in a direction in which the holder holding rollers 25, 25 at the front end always approach by the tension spring 26 (force in a direction to open the front end (X side end)). It is working.
[0022]
When the sample holder H1 is not mounted on the sample stage ST, the holder holding rollers 25 and 25 at the front end portions (X end portions) of the holder holding arms 24 and 24 are always in contact with the front end portions of the cannula base 22. It is held in the state.
In FIG. 4, when the sample holder transporting member H2 holding the sample holder H1 moves forward toward the sample stage ST, the holder holding rollers 25 and 25 of the sample stage ST are placed on the inner peripheral surfaces of the holder holding rollers 17 and 17. It comes to contact. When the sample holder transport member H2 is further advanced in this state, the holder holding rollers 25 and 25 enter between the side surface of the sample holder H1 and the holder holding rollers 17 and 17, and the holder holding rollers 17 and 17 and the holder The holding arms 16, 16 are pushed outward.
[0023]
(Operation of Example 1)
The sample holder transport member H2 of the first embodiment of the present invention having the above configuration is in the state shown in FIGS. 2A and 4 (the sample holder transport member H2 holding the sample holder H1 advances toward the sample stage ST, When the holder holding rollers 25 and 25 of the sample stage ST are in contact with the inner peripheral surfaces of the holder holding rollers 17 and 17) and further advance toward the sample stage ST, as shown in FIG. 2B, the sample holder H1 The holder holding rollers 17, 17 and the holder holding arms 16, 16 that have been holding are held outward by the holder holding rollers 25, 25. At this time, the holder holding rollers 25 and 25 enter between the side surfaces of the front side sandwiched portions 2a and 2a of the sample holder H1 and the holder holding rollers 17 and 17, respectively.
At this time, the front end portion (X end portion) of the dovetail groove 5 on the lower surface of the sample holder H1 is fitted to the rear end portion (−X end portion) of the cannula 22 of the sample stage ST.
[0024]
When the sample holder holding member H2 and the sample holder H1 are further advanced to the sample stage ST side from the state of FIG. 2B, as shown in FIGS. 2C and 2D, the holder holding rollers 25, 25 are the left and right holders of the sample holder H1. It moves backward (−X direction) along the side surfaces 3 and 4. At this time, the holder holding arms 16 and 16 of the sample holder holding member H2 spread outward, and the holder holding rollers 17 and 17 move forward along the outer surfaces of the holder holding arms 24 and 24 of the sample stage ST.
When the sample holder holding member H2 and the sample holder H1 are further moved forward (moved in the X direction) from the state of FIG. 2D to the sample stage ST side, as shown in FIG. 2E, after the holder holding arms 24, 24 of the sample stage ST. The holder holding rollers 25 and 25 at the end portions (−X end portions) hold the rear sandwiched portions 1a and 1a of the sample holder H1. In the state of FIG. 2E, the dovetail groove 5 on the lower surface of the sample holder H1 is fitted to the cannula base 22 of the sample stage ST, and the holder front surface 2 of the sample holder H1 is the rear end surface (− X end face).
[0025]
The state shown in FIG. 2E is a state in which the sample holder H1 is mounted on the sample stage ST. When the sample holder holding member H2 is retracted (moved in the −X direction) in the state shown in FIG. 2E, only the sample holder holding member H2 is retracted while the sample holder H1 is mounted on the sample stage ST, and the sample Leave the stage ST.
[0026]
The sample holder H1 is mounted on the sample stage ST (the state shown in FIG. 2E, that is, the holder holding rollers 25 and 25 at the rear end portions (−X end portions) of the holder holding arms 24 and 24 of the sample stage ST. 2 is a state in which the rear holder 1a, 1a is held between the sample holder H1 and the sample holder holding member H2 advances from the rear (−X direction) toward the sample stage ST in FIG. The operations of the holder holding arms 24 and 24 and the holder holding arms 16 and 16 described are reversed.
That is, the sample holder is held in a state in which the holder holding rollers 25 and 25 at the tips of the holder holding arms 24 and 24 of the sample stage ST hold the rear holding parts 1a and 1a of the sample holder H1 (see FIG. 2E). When the member H2 moves forward, the holder holding rollers 17 and 17 of the holder holding arms 16 and 16 of the sample holder holding member H2 are connected to the side surfaces of the rear clamped portions 1a and 1a of the sample holder H1 and the holder holding rollers 17 and 17 It infiltrates between 17. When the sample holder holding member H2 is further advanced, the holder holding rollers 17 and 17 advance along the left and right holder side surfaces 3 and 4 of the sample holder H1, and the front side sandwiched portions 2a and 2a are clamped. In this state, by retracting the sample holder holding member H2, the sample holder H1 can be detached from the sample stage ST and moved backward (−X direction).
[0027]
Therefore, the sample stage ST, the sample holder H1, and the sample holder holding member H2 can be exchanged between the sample stage ST and the sample holder holding member H2 only by moving the sample holder holding member H2 forward and backward ( The sample holder H1 mounted on the sample holder holding member H2 can be transported.
[0028]
(Example of change)
As mentioned above, although the Example of this invention was explained in full detail, this invention is not limited to the said Example, A various change is performed within the range of the summary of this invention described in the claim. It is possible. An example of modification is shown below.
(H01) Instead of the dovetail groove 5 and the cannula base 22, it is possible to use a pair of opposed U-shaped guide grooves and convex ridges that fit into the grooves.
[0029]
【The invention's effect】
The sample holder conveying member of the present invention described above can achieve the following effects.
(E01) The sample holder transport member can be attached to and detached from the sample holder without rotating around the axis along the transport direction.
(E02) The sample holder can be transferred between both holder holding members only by moving the holder holding member holding the sample holder and the holder holding member not holding the sample holder close to each other. .
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a sample holder transport member and a sample holder held by the sample holder transport member according to Embodiment 1 of the present invention, and FIG. 1A is a top view of the sample holder held at the tip of the sample holder transport member 1B is a cross-sectional view taken along the line IB-IB in FIG. 1A, FIG. 1C is a view seen from the arrow IC in FIG. 1A, and FIG. 1D is a view seen from the arrow ID in FIG.
FIG. 2 is an operation explanatory diagram when the sample holder held on the sample holder transport member of Example 1 is mounted on the sample stage. FIG. 2A is a diagram illustrating the sample holder held on the sample holder transport member on the sample stage. FIG. 2B is a diagram showing a state in which the sample holder transport member is further advanced from the state of FIG. 2A, and FIG. 2C is a diagram in which the sample holder transport member is further advanced from the state of FIG. 2B. 2D is a view showing a state in which the sample holder transport member is further advanced from the state of FIG. 2C, and FIG. 2E is a view of the sample holder in which the sample holder transport member is further advanced from the state of FIG. 2D on the sample stage. It is a figure which shows the state hold | maintained.
3 is a cross-sectional view when the sample holder held on the sample holder transport member of Example 1 is mounted on the sample stage, FIG. 3A is a cross-sectional view taken along the line IIIA-IIIA of FIG. 2A, and FIG. 3A is a cross-sectional view taken along line IIIB-IIIB in FIG. 3A, and FIG. 3C is a cross-sectional view taken along line IIIC-IIIC in FIG. 3A.
4 is a perspective view of the member shown in FIG. 2A or FIG. 3A. FIG.
[Explanation of symbols]
H1 ... Sample holder, H1a ... Lower holder, H1b ... Upper holder, H2 ... Sample holder transport member, ST ... Sample stage,
DESCRIPTION OF SYMBOLS 1 ... Holder rear surface, 1a ... Rear side clamping part, 2 ... Holder front surface, 2a ... Front side clamping part, 3, 4 ... Left and right holder side surface, 6 ... Supported part, 12 ... Holder support member, 13 ... Holder lower part Insertion groove, 14 ... Holder upper support portion, 16 ... Rear side holder holding arm, 17 ... Arm front end clamping portion, 18 ... Arm front end approaching elastic member, 19 ... Arm interval holding member, 24 ... Front side holder holding arm, 25: Arm rear end clamping portion.

Claims (3)

下記の構成要件（Ａ01）〜（Ａ05）を備えたことを特徴とする試料ホルダ、
（Ａ01）試料ホルダ搬送部材に保持されるときに試料ホルダ搬送部材に対向する側面であるホルダ後面および試料ステージに装着されるときに試料ステージに対向する側面であって前記ホルダ後面と反対側のホルダ前面と、前記ホルダ後面およびホルダ前面を接続する左右一対のホルダ側面と、前記左右のホルダ側面の上端から左右に突出する被支持部とを有する試料ホルダ、
（Ａ02）前記ホルダ後面の左右にそれぞれ設けられて、ホルダ前面側から接近した前面側ホルダ保持アームの後側の端部に設けられた回転可能な第２のホルダ保持ローラによって挟持されるとともにホルダ後面側から接近した一対の後面側ホルダ保持アームの前側の端部に設けられた回転可能な第１のホルダ保持ローラが接触する後側被挟持部、
（Ａ03）前記ホルダ前面の左右にそれぞれ設けられて、ホルダ後面側から接近した後面側ホルダ保持アームの前側の端部の第１のホルダ保持ローラによって挟持されるとともにホルダ前面側から接近した一対の前面側ホルダ保持アームの後側の端部の第２のホルダ保持ローラが接触する前側被挟持部、
（Ａ04）前記前面側ホルダ保持アームの第２のホルダ保持ローラにより挟持された後側被挟持部に接近した前記後面側ホルダ保持アームの第１のホルダ保持ローラを前記第２のホルダ保持ローラの内側にガイドするように形成された前記ホルダ後面、
（Ａ05）前記後面側ホルダ保持アームの第１のホルダ保持ローラにより挟持された前側被挟持部に接近した前記前面側ホルダ保持アームの第２のホルダ保持ローラを前記第１のホルダ保持ローラの内側にガイドするように形成された前記ホルダ前面。A sample holder comprising the following constituent elements (A01) to (A05):
(A01) A holder rear surface, which is a side surface facing the sample holder transport member when held by the sample holder transport member, and a side surface facing the sample stage when mounted on the sample stage, which is opposite to the holder rear surface. A sample holder having a holder front surface, a pair of left and right holder side surfaces connecting the holder rear surface and the holder front surface, and a supported portion protruding left and right from the upper ends of the left and right holder side surfaces;
(A02) The holder is provided on each of the left and right sides of the rear surface of the holder and is clamped by a rotatable second holder holding roller provided at the rear end portion of the front side holder holding arm approaching from the holder front side. A rear sandwiched portion that contacts a rotatable first holder holding roller provided at the front end of a pair of rear surface holder holding arms approaching from the rear surface side;
(A03) A pair of a pair provided on the left and right sides of the front surface of the holder and sandwiched by the first holder holding roller at the front end of the rear side holder holding arm approaching from the rear side of the holder and approaching from the front side of the holder A front sandwiched portion with which the second holder holding roller at the rear end of the front holder holding arm comes into contact;
(A04) of the second of said first holder holding rollers of the rear side holder holding arms close to the side clamped portion after being held by the holder holding roller second holder holding the roller of the front-side holder holding arms The holder rear surface formed to guide inward;
(A05) The second holder holding roller of the front side holder holding arm that is close to the front holding portion held by the first holder holding roller of the rear side holder holding arm is moved to the inside of the first holder holding roller . The holder front surface formed so as to be guided. 下記の構成要件（Ｂ01）〜（Ｂ07）を備えたことを特徴とする試料ホルダ搬送部材、
（Ｂ01）試料ホルダ搬送部材に対向する側面であるホルダ後面と前記ホルダ後面と反対側のホルダ前面と前記ホルダ後面およびホルダ前面を接続する左右一対のホルダ側面とが設けられたホルダ下部と、前記左右のホルダ側面の上端から左右に突出する被支持部が設けられたホルダ上部とを有する試料ホルダを支持するホルダ支持部材、
（Ｂ02）前端部が開口するＵ字状に形成され且つ前記ホルダ下部が挿入されるホルダ下部挿入溝と前記ホルダ上部の被支持部の下面を支持するホルダ上部支持部とを有する前記ホルダ支持部材、
（Ｂ03）前記ホルダ支持部材の下面に回転可能に支持され且つ左右方向に離れて前後方向に延びる一対のホルダ保持アーム、
（Ｂ04）前記一対のホルダ保持アームの前端部にそれぞれ回転可能に設けられ、前記試料ホルダのホルダ前面の両側に設けた被挟持部を挟持するホルダ保持ローラ、
（Ｂ05）前記一対のホルダ保持アームの前端部を接近させるように作用するアーム前端部接近用弾性部材、
（Ｂ06）前記一対のホルダ保持アームの前端部の間隔を所定間隔以上に保持するアーム間隔保持部材、
（Ｂ07）前記アーム間隔保持部材により所定間隔に保持された前記一対のホルダ保持アームの前端部のホルダ保持ローラを試料ホルダのホルダ後面に押圧したときに前記一対のホルダ保持ローラが前記試料ホルダの側面により押し広げられて左右の側面に沿ってホルダ前面に移動した状態で前記試料ホルダを保持する前記一対のホルダ保持アーム。A sample holder conveying member comprising the following constituent elements (B01) to (B07):
(B01) a holder lower surface provided with a holder rear surface that is a side surface facing the sample holder transport member, a holder front surface opposite to the holder rear surface, and a pair of left and right holder side surfaces that connect the holder rear surface and the holder front surface; A holder support member for supporting a sample holder having a holder upper portion provided with a supported portion protruding left and right from the upper ends of the left and right holder side surfaces;
(B02) The holder support member that is formed in a U-shape with an open front end and has a holder lower insertion groove into which the lower part of the holder is inserted and a holder upper support part that supports the lower surface of the supported part of the holder upper part. ,
(B03) A pair of holder holding arms that are rotatably supported on the lower surface of the holder support member and extend in the front-rear direction and separated in the left-right direction;
(B04) wherein each rotatably provided at a front end portion of the pair of holders holding arm, the holder holding roller for holding the clamped portion provided on both sides of the holder front surface of the sample holder,
(B05) An elastic member for approaching the front end of the arm that acts to approach the front end of the pair of holder holding arms,
(B06) an arm interval holding member that holds the interval between the front end portions of the pair of holder holding arms at a predetermined interval or more;
(B07) When the holder holding roller at the front end of the pair of holder holding arms held at a predetermined interval by the arm interval holding member is pressed against the holder rear surface of the sample holder, the pair of holder holding rollers The pair of holder holding arms that hold the sample holder in a state of being pushed and spread by the side surfaces and moved to the front of the holder along the left and right side surfaces. ホルダ前面と前記ホルダ前面と反対側のホルダ後面と前記ホルダ前面およびホルダ後面を接続する左右一対のホルダ側面とが設けられた試料ホルダを、試料ホルダの前面側に配置された前面側ホルダ保持部材と前記試料ホルダの後面側に配置された後面側ホルダ保持部材との間で受渡しを行う試料ホルダ受渡し方法において、
前記後面側ホルダ保持部材は試料ホルダを保持した状態では試料ホルダの左右のホルダ側面に沿って前記試料ホルダの前面の左右両側部に延びる一対の後面側ホルダ保持アームと前記後面側ホルダ保持アームの前側の端部に回転可能に設けられ且つ前記試料ホルダの前面の左右両側部を挟持する第１のホルダ保持ローラとを有し、
前記前面側ホルダ保持部材は試料ホルダを保持した状態では試料ホルダの左右のホルダ側面に沿って前記試料ホルダの後面の左右両側部に延びる一対の前面側ホルダ保持アームと前記前面側ホルダ保持アームの後側の端部に回転可能に設けられ且つ前記試料ホルダの後面の左右両側部を挟持する第２のホルダ保持ローラとを有し、
前記後面側ホルダ保持部材および前面側ホルダ保持部材のうちの一方のホルダ保持部材に試料ホルダを保持した状態で前記試料ホルダと他方のホルダ保持部材とを接近させたとき、一方のホルダ保持部材のホルダ保持アームの内側に他方のホルダ保持部材のホルダ保持アームが進入して前記一方のホルダ保持部材のホルダ保持アームは前記他方のホルダ保持アームの外側に移動し、他方のホルダ保持部材が前記試料ホルダを保持する状態となることを特徴とする試料ホルダ受渡し方法。A front-side holder holding member disposed on the front side of the sample holder, a sample holder provided with a holder front surface, a holder rear surface opposite to the holder front surface, and a pair of left and right holder side surfaces connecting the holder front surface and the holder rear surface And a sample holder delivery method for delivering between the rear holder holding member arranged on the rear side of the sample holder,
In a state where the sample holder is held by the rear surface side holder holding member, a pair of rear surface side holder holding arms extending to the left and right sides of the front surface of the sample holder along the left and right holder side surfaces of the sample holder and the rear surface side holder holding arm A first holder holding roller rotatably provided at the front end and sandwiching the left and right sides of the front surface of the sample holder;
The front-side holder holding member includes a pair of front-side holder holding arms and a pair of front-side holder holding arms that extend to the left and right sides of the rear side of the sample holder along the left and right holder side surfaces of the sample holder in a state where the sample holder is held. A second holder holding roller rotatably provided at the rear end and sandwiching the left and right sides of the rear surface of the sample holder;
When the sample holder and the other holder holding member are brought close to each other while holding the sample holder in one of the rear side holder holding member and the front side holder holding member, The holder holding arm of the other holder holding member enters inside the holder holding arm, the holder holding arm of the one holder holding member moves to the outside of the other holder holding arm, and the other holder holding member moves to the sample. A sample holder delivery method, wherein the holder is held.
JP2000049223A 2000-02-25 2000-02-25 Sample holder, sample holder transport member, and sample holder delivery method Expired - Fee Related JP3950613B2 (en)

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