JP3938310B2 - Inspection image processing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a means for forming a background for image processing by a work holder in an image processing apparatus for inspecting a deviation of the position / posture of the work held by the work holder and the quality of the work.
[0002]
[Prior art]
In order to accurately inspect the position of the workpiece held by the workpiece holder, the position of the workpiece, and the quality of the workpiece with the image processing device, the workpiece to be inspected and the background of the workpiece holder on the image It must be clearly distinguishable. For this purpose, it is effective to take an image so that the contrast between the work and the work holder is increased. Therefore, in order to suppress the reflected light on the surface of the work holder, the surface of the work holder is painted black on the white work.
[0003]
[Problems to be solved by the invention]
However, due to the friction generated between the workpiece holder and the workpiece when the workpiece is attached and detached, the black paint on the surface of the workpiece holder peels off and shines, which causes false detection in the image processing process. Accordingly, the object of the present invention is to increase the contrast between the work and the background of the work holder on the image when the work held by the work holder is detected by the image processing apparatus, and prevent false detection in the image processing process. It is to be.
[0004]
[Means for Solving the Problems]
Based on the above problems , the present invention forms a large number of parallel grooves on the surface of the work holder by mechanical means, not by means such as painting, and reflects the irradiation light by the large number of parallel grooves. The characteristic ensures the necessary contrast between the workpiece and the background of the workpiece holder.
[0005]
The invention according to claim 1 is to form a background for image processing. In an inspection image processing apparatus that holds a white or near-white color workpiece by a workpiece holder, and makes an image processing camera face the workpiece, and irradiates irradiation light obliquely from the imaging side of the workpiece. , by forming a number of grooves in the background the surface from which the image of the same direction as the irradiation light of the work holder, to reduce the reflected light incident from the surface of the workpiece holder to the camera, on the image, and the work The contrast between the work holder and the background is greater than the contrast between the work and the background without the groove .
[0006]
The invention according to claim 2 holds a workpiece of black or a color close to black by the workpiece holder, makes an image processing camera face the workpiece, and emits irradiation light from an oblique direction on the imaging side of the workpiece. In the inspection image processing apparatus to be irradiated , the reflected light incident on the camera from the surface of the work holder is formed by forming a number of grooves in the direction intersecting the irradiation light on the background surface on the image of the work holder. In the image, the contrast between the work and the background of the work holder is made larger than the contrast between the work and the background of the work holder without a groove .
[0007]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an inspection image processing apparatus 1 according to the present invention. The inspection image processing apparatus 1 holds a workpiece 3 of white or a color close to white by a workpiece holder 2, and makes an image processing camera 4 face the workpiece 3 so that the workpiece 3 is imaged on the imaging side of the workpiece 3. Irradiation light 10 is emitted from the light source 5 from an oblique direction. The camera 4 faces the work 3 and its periphery as an imaging range, and is installed in a state where the optical axis coincides with the work 3 on a vertical line (normal line).
[0008]
The work holder 2 is attached to the outer peripheral edge portion of the index table 6 with a fixture 7 in the radial direction. According to this example, the work holder 2 is an air-type chuck, and has a recessed holding surface 8 on the lower side in order to hold the workpiece 3 having a width of about 1 to 2 mm. And has an adsorption hole 9. The holding surface 8 is formed as a plane having a width that is slightly larger than the width of the workpiece 3, and holds the workpiece 3 and becomes a background when the workpiece 3 to be inspected is imaged.
[0009]
FIG. 2 shows details of the holding surface 8. The holding surface 8 is formed with a large number of fine parallel grooves 8 a in the direction in which the optical path of the irradiation light 10 is projected onto the holding surface 8. The grooves 8a is intended to alter the reflective properties of the holding surface 8, Ru is directly formed as a machining mark on lifting surface 8 by a mechanical processing method. The cross section of the groove 8a is formed in, for example, a V shape or a U shape . Due to the formation of the grooves 8a, the flat surface (flat reflective surface) of the holding surface 8 is almost eliminated.
[0010]
Next, the optical path of the irradiation light 10 irradiated to the holding surface 8 and the reflected light 11 will be described.
[0011]
First, FIG. 3 shows an optical path when the groove 8 a is not formed on the holding surface 8. The irradiation light 10 is reflected by the flat holding surface 8, and a part of the reflected light 11 dispersed at that time enters the camera 4. As the incident angle of the irradiation light 10 decreases , the reflected light 11 entering the camera 4 increases , so that the holding surface 8 becomes brighter on the image of the camera 4.
[0012]
Next, FIG. 4 shows an optical path when a large number of grooves 8 a are formed on the holding surface 8. In this case, the irradiation light 10, the presence of multiple groove 8a of the surface of the holding surface 8 Therefore, for incident on the surface of the groove 8a having a constant slope angle, distributed with a certain regularity. For this reason, compared with the case where the groove 8 a is not formed, the reflected light 11 incident on the camera 4 is reduced, and the holding surface 8 becomes a dark background on the image of the camera 4. Therefore , when the workpiece 3 of white or a color close to white is to be inspected, the contrast between the workpiece 3 and the dark background (holding surface 8) on the image is the same as that of the workpiece 3 and no groove 8a (formation of the groove 8a). Since the contrast with the background (holding surface 8) of the previous work holder 2 is larger , it becomes possible to clearly distinguish and image the work 3 and the background of the non-inspected holding surface 8; False detection of the inspection image processing apparatus 1 can be prevented.
[0013]
FIG. 5A is an enlarged photograph of the holding surface 8 where the groove 8a is not formed. Since the black coating of the holding surface 8 has been peeled off, the holding surface 8 is brightened by the reflected light 11. FIG. 5B is an enlarged photograph of the holding surface 8 in which the groove 8a is formed according to the present invention. By forming the groove 8a, the reflected light 11 is dispersed and the amount of the reflected light 11 incident on the camera 4 is reduced, so that the holding surface 8 is darker than that in FIG. 5a.
[0014]
In the above example, a large number of grooves 8a are formed on the holding surface 8 in the same direction as the irradiation light 10 in correspondence with the workpiece 3 of white or a color close to white being the inspection object. In the case where the color is black or a color close to black , the plurality of grooves 8 a are formed in a direction intersecting the irradiation light 10, for example, a direction orthogonal.
[0015]
FIG. 6 shows a case where a large number of fine parallel grooves are formed on the holding surface 8 in a direction intersecting the irradiation light 10, that is, in a direction perpendicular to the direction in which the optical path of the irradiation light 10 is projected onto the holding surface 8. Is shown. When the holding surface 8 is irradiated with the incident angle of the irradiation light 10 adjusted, as shown in FIG. 7, a part of the irradiation light 10 incident on the holding surface 8 is formed on the surface of the holding surface 8 by a large number of grooves 8a. The light enters the surface of the groove 8 a having a certain inclination and is reflected in the optical axis direction of the camera 4. For this reason, compared with the case where the groove | channel 8a is not formed, the light quantity of the reflected light 11 which injects into the camera 4 increases, and the holding surface 8 becomes bright on an image. Therefore , when the workpiece 3 of black or a color close to black is to be inspected, the contrast between the workpiece 3 and the background (holding surface 8) on the image is the same as the workpiece 3 and no groove 8a (before the groove 8a is formed). Since the contrast with the background (holding surface 8) by the work holder 2 is larger , it becomes possible to clearly distinguish and image the work 3 and the holding surface 8 of the work holder 2 that is not subject to inspection. False detection of the inspection image processing apparatus 1 can be prevented.
[0016]
【The invention's effect】
According to the first aspect of the present invention, when a workpiece of white or a color close to white is to be inspected, the contrast between the workpiece and the holding surface of the workpiece holder is increased on the image, and the background of the workpiece and the workpiece holder not to be inspected. Can be clearly distinguished from each other, and erroneous detection of the inspection image processing apparatus can be prevented. Also, there is no need to paint the holding surface of the work holder, and the groove is formed directly on the holding surface by mechanical processing. Compared to the case where the holding surface of the work holder is coated. Therefore, there is little change over time, and it is possible to improve positioning accuracy in image processing and improve reliability of defect inspection.
[0017]
According to claim 2, when a black or near black workpiece is to be inspected, the contrast between the workpiece and the holding surface of the workpiece holder is increased on the image, and the workpiece and the workpiece holder not to be inspected are separated. Since it becomes possible to clearly distinguish and image, it is possible to prevent erroneous detection of the inspection image processing apparatus. In addition, the holding surface of the work holder does not need to be painted, and the groove is formed directly on the holding surface by mechanical processing. Therefore, it is possible to improve the positioning accuracy in image processing and the reliability of defect inspection.
[Brief description of the drawings]
FIG. 1 is a side view of an inspection image processing apparatus 1. FIG.
FIG. 2 is a detailed view of a holding surface 8 of the work holder 2;
FIG. 3 is an optical path diagram of irradiation light 10 when the inspection image processing apparatus 1 is viewed from the side.
4 is an optical path diagram of irradiated light 10 and reflected light 11 when viewed from the direction of arrows AA in FIG. 2;
5A is an enlarged photograph of the holding surface 8 in which no groove is formed, and FIG. 5B is an enlarged photograph of the holding surface 8 in which the groove 8a of the present invention is formed.
6 is a detailed view of a holding surface 8 of the work holder 2. FIG.
7 is an optical path diagram of irradiated light 10 and reflected light 11 when viewed from the direction of arrows BB in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Inspection image processing apparatus 2 Work holder 3 Work 4 Camera 5 Light source 6 Index table 7 Attachment 8 Holding surface 8a Groove 9 Suction hole 10 Irradiation light 11 Reflected light

Claims (2)

In an inspection image processing apparatus that holds a white or near-white color workpiece by a workpiece holder, and makes an image processing camera face the workpiece, and irradiates irradiation light obliquely from the imaging side of the workpiece. ,
By parallel to the large number of grooves in the background the surface from which the image of the same direction as the irradiation light of the work holder, to reduce the reflected light incident from the surface of the workpiece holder to the camera, on the image, a work An inspection image processing apparatus characterized in that the contrast between the workpiece and the background of the work holder is larger than the contrast between the workpiece and the background of the work holder without grooves . In an image processing apparatus for inspection that holds a black or near-black color workpiece by a workpiece holder, and makes an image processing camera face the workpiece, and irradiates the workpiece with irradiation light obliquely from the imaging side of the workpiece. ,
By forming a large number of grooves parallel to the irradiation light on the background surface on the image of the work holder, the reflected light incident on the camera from the surface of the work holder is increased, and on the image An inspection image processing apparatus characterized in that the contrast between the work and the background of the work holder is larger than the contrast between the work and the background of the work holder without grooves .

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