JP3914186B2 - Temperature sensor using electro-optic effect - Google Patents

Description

  The present invention relates to a temperature sensor using an electro-optical effect that detects a temperature change of an object using a phase difference of detection light corresponding to the electro-optical effect.

  The primary electro-optic (EO) effect is also called the Pockels effect. For example, in a crystal having no inversion symmetry such as an electro-optic crystal (hereinafter also referred to as an EO crystal), the normal light and the extraordinary light 2 Represents the property that the refractive index of seed light waves changes in proportion to the applied electric field (voltage) applied to the crystal, and methods for detecting physical quantities of objects using this electro-optic effect have been studied. (For example, refer nonpatent literature 1).

  In addition, research and development of a transceiver capable of communicating information via a living body using the electro-optic effect of an EO crystal as an information communication means between a wearable computer and another computer (another wearable computer or the like) has been promoted. (For example, refer to Patent Document 1).

Tadashi Shiogama “Development and Application of Ferroelectric Materials”, CMC Publishing JP 2001-352298 A (page 5-10, FIGS. 1 to 4).

  The conventional physical quantity detection method of an object using the electro-optic effect based on the EO crystal is an electro-optic crystal corresponding to a change in an applied electric field according to contact of an object to be detected with an electrode attached to the electro-optic crystal. In this method, a change in refractive index is detected as a phase difference of detection light.

  That is, the conventional physical quantity detection method of an object using the electro-optical effect is to detect a change in intensity of detection light according to the presence or absence of contact of the object with the electrode, in a binary (digital) manner. It has been difficult to detect continuous (analog) changes in objects, particularly temperature changes.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to provide a temperature sensor using an electro-optic effect that can easily detect a temperature change of an object using the electro-optic effect. .

  Further, the present invention has been made in view of the above-described circumstances, and detects a temperature change of an object using the electro-optic effect, and based on the detection result, the moving direction of the object that moves continuously and / or It is another object of the present invention to provide a temperature sensor using an electro-optic effect that can detect the amount of movement.

  In order to achieve the above-described object, the present invention provides a temperature using an electro-optical effect that detects a temperature change of an object using a phase difference of detection light corresponding to the electro-optical effect. A sensor that is disposed on an optical path of the detection light, has an electro-optic crystal part having the electro-optic effect, a pyroelectric element having a pyroelectric effect, and is attached to the pyroelectron, and is attached to the electro-optic crystal part A first electrode portion disposed adjacent to the first electrode portion on the pyroelectric element is mounted at a position different from the first electrode portion, and an insulating member with which the object abuts is used to detect a temperature change of the object. A temperature detection unit; a temperature electric field relationship information storage unit for storing information representing a relationship between a temperature of the pyroelectric element corresponding to the pyroelectric effect and a parameter relating to an electric field in the pyroelectric element; and the electro-optic crystal Part, with the optical path of the detection light in between And it includes a second electrode portion attached to face the first electrode portion.

In the invention according to claim 2, the parameter is a magnitude of polarization generated in the pyroelectric element .

  4. The electro-optic crystal part according to claim 3, wherein the electro-optic crystal part is disposed adjacent to the electro-optic crystal having the electro-optic effect, and is opposed to the second electrode part with the detection light interposed therebetween. A first detection electrode for detecting the phase change, and the first electrode portion is directly or indirectly attached to a first surface of the pyroelectric element facing the first detection electrode. A second detection electrode for detecting a temperature change, and a first connection electrode having temperature conductivity and electrically connecting between the first detection electrode and the second detection electrode. ing.

  5. The temperature detecting unit according to claim 4, wherein the temperature detecting unit is configured to detect a third change in temperature in contact with a second surface of the pyroelectric element facing the first surface to which the second detection electrode is attached. A detection electrode, a fourth detection electrode for detecting a temperature change, spaced from the third detection electrode toward the opposite side of the pyroelectric element, and disposed opposite to the third detection electrode; A second connection electrode having temperature conductivity and elastically deformable to electrically connect the third detection electrode to the fourth detection electrode is provided.

  According to a fifth aspect of the present invention, the electric field for generating the electro-optic effect is applied to the electro-optic crystal part through the second electrode part as a potential difference between the second electrode part and the first electrode part. Applying means is further provided.

  7. The invention according to claim 6, wherein the object is an electric field transmission medium, and an electric field for generating the electro-optic effect is induced in the electric field transmission medium in a state where the electric field transmission medium is in contact with the insulating member. At this time, the induced electric field is configured to be applied to the first electrode portion via the electric field transmission medium.

  According to the seventh aspect of the present invention, the object contacts the insulating member, and the temperature change of the object is transmitted to the pyroelectric element of the temperature detecting unit via the insulating member. Due to the electric effect, the magnitude of the spontaneous polarization changes according to the temperature change of the object, and an electric field is generated in the pyroelectric element according to the change of the spontaneous polarization. When the phase difference of the detection light is changed by the electric field applied to the electro-optic crystal part, the phase difference of the detection light is detected and detected. Detection means for detecting the temperature change based on the phase difference is further provided.

  In order to achieve the above-described object, the present invention uses an electro-optic effect that detects a temperature change of an object by using a phase difference of a plurality of detection lights according to the electro-optic effect. A plurality of electro-optic crystal parts each having an electro-optic effect disposed on an optical path of the plurality of detection lights, and a focus sensor arranged so that one end faces thereof are positioned on the same plane. A plurality of pyroelectric elements having an electric effect, and a temperature change detection of the object having a plurality of first electrode parts attached to each of the plurality of pyroelectric elements and disposed adjacent to the plurality of electro-optic crystal parts A temperature detecting portion of the plurality of pyroelectric elements that can contact the object and directly or indirectly cover one end surface of each of the plurality of pyroelectric elements; and the pyroelectric effect of each of the plurality of pyroelectric elements Corresponding to In each of the plurality of pyroelectric elements, a temperature / electric field relation information storage unit that stores information representing a relationship between parameters related to the electric field inside each of the plurality of pyroelectric elements, and the plurality of electro-optic crystal units, A plurality of second electrode portions attached to face the plurality of first electrode portions across the optical path of the detection light.

  As described above, according to the temperature sensor of the present invention, using the pyroelectric effect of the pyroelectric element, the temperature change of the object is detected as the electric field change inside the pyroelectric element corresponding to the temperature change, By applying the detected electric field change to the electro-optic crystal part having an electro-optic effect, the temperature change can be detected as a phase difference change corresponding to the electric field change of the detection light transmitted through the electro-optic crystal part. it can.

  Then, the change of the parameter related to the electric field inside the pyroelectric element corresponding to the change in phase difference of the detection light is obtained, and the temperature change corresponding to the parameter change is changed to the temperature of the pyroelectric element and the electric field inside the pyroelectric element. It can be obtained from information representing the relationship with related parameters.

  As a result, it is possible to easily detect a continuous (analog) temperature change generated in the object.

  Embodiments of a temperature sensor using an electro-optic effect according to the present invention will be described with reference to the accompanying drawings.

(First embodiment)
FIG. 1 is a diagram showing a schematic configuration of a temperature sensor 1 using an electro-optic effect according to the first embodiment of the present invention.

  The temperature sensor 1 of the present embodiment is a sensor that detects a temperature change of, for example, the living body H that is a grounded object.

  As shown in FIG. 1, the temperature sensor 1 has, for example, a rectangular parallelepiped shape, and includes an electro-optic crystal (electro-optic crystal member, hereinafter referred to as an EO crystal) 2 having an electro-optic effect (Pockels effect). ing. Examples of the EO crystal 2 include a crystal having a perovskite structure (a ferroelectric material such as PZT and LiNbO3).

  The EO crystal 2 has a first side surface 2a along the longitudinal direction, and a second side surface 2b opposite to the first side surface 2a. The first side surface 2a and the second side surface The distance (thickness) between 2b is a constant value (hereinafter referred to as d).

  The temperature sensor 1 includes a detection electrode 3 that is disposed adjacent to the first side surface 2a of the EO crystal 2 and is attached so as to cover the first side surface 2a. The detection electrode 3 has, for example, a substantially thin plate shape and is formed of a material such as metal having high temperature conductivity.

  The temperature sensor 1 is attached to one surface 3a of the detection electrode 3, and is a flexible and highly heat-conductive insulating member such as silicon rubber that covers the one surface 3a, or the electrode material of the detection electrode 2 And an insulating film 4 made of an ultra-thin insulating material such as silicon dioxide or alumina, which has good adhesiveness and high temperature conductivity, and has a rectangular parallelepiped shape, for example, and has a pyroelectric effect, that is, the magnitude of polarization depending on temperature And a pyroelectric element 5 having an effect of changing.

  As the pyroelectric element 5, for example, a crystal having a perovskite structure (a ferroelectric material such as PZT or LiNbO3), a crystal of ZnO, CdTe, or GaAs (a III-V or II-VI group semiconductor material). Etc. The pyroelectric element 5 may be formed of a material different from that of the EO crystal 2 or may be formed of the same material.

  The pyroelectric element 5 has a first side surface 5a along the longitudinal direction and a second side surface 5b opposite to the first side surface 5a. The lengths of the side surfaces 5a and 5b in the longitudinal direction are longer than, for example, the length of the detection electrode 3 in the longitudinal direction.

  An insulating film 4 is attached to the second side surface 5b of the pyroelectric element 5, and covers the second side surface 5b.

  Furthermore, the temperature sensor 1 is attached to the first side surface 5a of the pyroelectric element 5, and is made of an insulating member made of a flexible and high temperature conductive insulating material such as silicon rubber that covers the first side surface 5a. A membrane 6 is provided. The surface 6a opposite to the pyroelectric element side of the insulating film 6 is exposed to the outside, and at least a part of the living body H can be contacted.

  The temperature sensor 1 converts, for example, laser light, which is detection light having a substantially single wavelength, into laser light parallel to the longitudinal direction of the detection electrode 3 as detection light for detecting a change in living body temperature, and converts the parallel laser light. The detection light output unit 10 that outputs the laser light L1 in a state of being polarized, for example, circularly polarized light or linearly polarized light rotated by 45 ° with respect to the main axis of the EO crystal 2 is provided. Is arranged on the optical path of the laser beam output from the detection light output unit 10.

  The temperature sensor 1 includes an application electrode 12 that is attached to the second side surface 2b of the EO crystal 2 and is disposed to face the detection electrode 3, and applies an electric field to the EO crystal 2 via the application electrode 12. The electric field application unit 13 is provided. The application electrode 12 has substantially the same shape as the detection electrode 3.

  Furthermore, the temperature sensor 1 detects a change in the phase difference of the laser light L2 that has passed through the EO crystal 2 as a change in the intensity of the laser light by a polarization detection optical system including a wave plate, a polarizer, a polarization beam splitter, and the like. A detection unit 15 is provided for converting the detected intensity change of the laser light into an electric signal via a photoelectric converter such as a photodetector. In the first embodiment, the EO crystal 2, the detection light output unit 10, and the detection unit 15 constitute the electric field detection optical unit 20.

  In the first embodiment, the detection electrode 3, the insulating film 4, the pyroelectric element 5, and the insulating film 6 constitute a temperature detection unit 30.

  2 shows a schematic configuration of an electric field detection unit 32 and an information processing circuit 42 that are electrically connected to the electric field detection optical unit 20 in the temperature sensor 1 shown in FIG. FIG.

  That is, the electric field detection unit 32 includes a signal processing circuit 38. The signal processing circuit 38 forms a receiving unit 36 together with the electric field detection optical unit 20, is connected to the detection unit 15 of the electric field detection optical unit 20, and amplifies the electric signal output from the detection unit 15. Signal processing such as processing and noise removal processing is performed.

  The electric field detection unit 32 is connected to the signal processing circuit 38, and a waveform shaping circuit 40 that performs waveform shaping processing on the electric signal signal-processed by the signal processing circuit 38, and the electric signal as reception data, An I / O circuit 44 that transmits to an information processing circuit (for example, a circuit incorporating a computer) 42 for physical quantity detection processing is provided.

  The information processing circuit 42 in the temperature sensor 1 includes, for example, the pyroelectric element 5 which is a parameter relating to the value of the temperature T of the pyroelectric element 5 corresponding to the pyroelectric effect of the pyroelectric element 5 and the electric field inside the pyroelectric element 5. Relation data RD in which the value of the magnitude P of the generated polarization is associated with each other based on a predetermined resolution is stored in advance in a table format, for example.

  On the other hand, the electric field applying unit 13 generates an electric field based on a signal input via the I / O circuit 46 for connecting an external device and, for example, the I / O circuit 46, and a potential difference V between the applying electrode 12 and the detecting electrode 3. And an electric field applying circuit 48 for applying to the EO crystal 2 through the applying electrode 12.

  Next, the overall operation of the temperature sensor 1 of the present embodiment will be described.

According to Maxwell's equation, the electric displacement (electric flux density) D in the pyroelectric element 5 is ε _{0 for} the dielectric constant of the vacuum, E for the electric field in the pyroelectric element 5, and the polarization generated in the pyroelectric element 5. If the size is P, it can be expressed by the following formula (1).

D = ε ₀ E + P (1)
From the equation (1), it can be seen that if the polarization magnitude P in the pyroelectric element 5 changes, the potential displacement D in the pyroelectric element 5 changes and the electric field E in the pyroelectric element 5 changes. .

  Here, as shown in FIG. 3A, the polarization directions (the directions of + and −) in the pyroelectric element 5 in the non-contact state of the living body H are uneven.

  On the other hand, in this embodiment, the laser beam L1 output from the detection light output unit 10 is incident on the EO crystal 2. When the external electric field E1 (E1 = V / d) corresponding to the potential difference V applied between the detection electrode 3 and the application electrode 12 with respect to the EO crystal 2 changes, the EO crystal 2 changes due to its electro-optic effect. The polarization P and the refractive index n of the EO crystal 2 change. As a result, a phase difference Ψ expressed by the following equation (2) is generated for the laser light L1 passing through the EO crystal 2.

Ψ = (2π / λ) · n ³ γV (2)
Here, λ is the wavelength of the laser beam L1, and γ is the Pockels coefficient of the EO crystal 2.

  Here, when the grounded living body H comes into contact with the insulating film 6 through, for example, a part thereof (such as a finger), the temperature change ΔT of the living body H is applied to the pyroelectric element 5 through the insulating film 6. (See FIG. 3B).

  That is, as shown in FIG. 4, the pyroelectric element 5 has an applied temperature T from the temperature Tn in a non-polarized state corresponding to the temperature Tn (a state in which the directions of polarization are uneven; see FIG. 3A). As it increases, the direction of polarization in the pyroelectric element 5 gradually becomes uniform, and the polarization magnitude P of the pyroelectric element 5 changes reversibly (see arrow S1 in FIG. 4).

  When the applied temperature T exceeds the Curie temperature Tc, the magnitude P of the polarization of the pyroelectric element 5 corresponding to the temperature of the living body H is indicated by arrows S2, S3, S4 and S5 in FIG. Thus, the hysteresis loop HL changes so as to be drawn.

  That is, once the pyroelectric element 5 exceeds the Curie temperature Tc, for example, even if the living body H moves away from the insulating film 6 (pyroelectric element 5) and the temperature of the pyroelectric element 5 decreases, the pyroelectric element The magnitude P of the polarization of 5 does not reversibly return along the arrow S1 shown in FIG. 4, but changes along the hysteresis loop HL.

In this way, in a state where the polarization magnitude P of the pyroelectric element 5 changes along the hysteresis loop HL, when the living body H comes into contact with the insulating film 6 again via a part (finger or the like), for example, The temperature change ΔT is applied to the pyroelectric element 5 through the insulating film 6. The electric field E inside the pyroelectric element 5 changes due to the change in the magnitude P of this polarization. It is detected by the detection electrode 3 through the film 4 and applied to the EO crystal 2.

  As a result, the potential difference V already applied to the EO crystal 2 between the detection electrode 3 and the application electrode 12 changes due to the electric field change ΔE newly applied via the pyroelectric element 5.

  Due to the change in the potential difference V generated in the EO crystal 2, the phase difference Ψ1 of the laser light L1 changes as shown in the above equation (2).

  Thus, when passing through the EO crystal 2, the laser light L2 whose phase difference Ψ1 has changed in accordance with the temperature change ΔT of the living body H is converted into an electrical signal representing an intensity change via the detection unit 15, Amplification, waveform shaping processing, and the like are performed via the signal processing circuit 38 and the waveform shaping circuit 40, and then transmitted to the information processing circuit 42 via the I / O circuit 44.

  The information processing circuit 42 receives the transmitted data, that is, data representing the laser light intensity change corresponding to the temperature change ΔT of the living body H (change in the phase difference Ψ1 of the laser light L2).

  At this time, the information processing circuit 42 calculates a change in the polarization magnitude P corresponding to the received data based on the received data, and calculates a temperature change ΔT corresponding to the calculated change in the polarization magnitude P. It can be extracted with reference to the relational data RD shown in FIG.

  Since the relation data RD of the pyroelectric element 5 has a correspondence relation along the hysteresis loop HL shown in FIG. 4, there are two temperature values corresponding to the value of the calculated polarization magnitude P. Will do.

  Therefore, the information processing circuit 42 recognizes the temperature change direction (rising or falling) of the pyroelectric element 5 and corresponds to the rising loops S1 and S5 when rising (in the case of arrows S1 and S5). The temperature value is extracted as a temperature value corresponding to the value of the calculated polarization magnitude P. On the other hand, in the case of descent (in the case of arrows S2 and S3), the temperature value corresponding to the descent loop S2 and S3 is extracted. By extracting as a temperature value corresponding to the value of the calculated polarization magnitude P, an accurate temperature is detected.

  As described above, according to the temperature sensor 1 according to the present embodiment, the pyroelectric element 5 having the pyroelectric effect causes the temperature change ΔT of the living body H to change to the electric field of the pyroelectric element 5 corresponding to the temperature change ΔT. By detecting the change ΔE and applying the detected electric field change ΔE to the EO crystal 2, it can be detected as a change in the phase difference Ψ1 of the laser light L1 passing through the EO crystal 2.

  The temperature change ΔT of the living body H can be calculated from the correspondence between the change in the polarization P of the pyroelectric element 5 corresponding to the change in the phase difference Ψ1 of the laser light L1 and the change in the temperature T.

  As a result, a temperature change that is a continuous (analog) change occurring in the living body H can be easily detected.

  In the temperature sensor 1 shown in FIGS. 1 and 2, the insulating film 4 is interposed between the second side surface 5 b of the pyroelectric element 5 and the detection electrode 3, and the electrode is formed by the detection electrode 3 and the insulating film 4. However, the present invention is not limited to this configuration. For example, like the temperature sensor 1A shown in FIG. 5, the insulating film 4 is removed from the configuration of FIG. The side surface 5b may be arranged adjacent to the detection electrode 3.

  Further, as shown in the temperature sensor 1B shown in FIG. 6, for example, in the configuration shown in FIG. 5, an electrode 50 may be interposed between the first side surface 5a of the pyroelectric element 5 and the insulating film 6.

(Second Embodiment)
FIG. 7 is a diagram showing a schematic configuration of a temperature sensor 1C according to the second embodiment of the present invention. FIG. 8 is electrically connected to the electric field detection optical unit 60 in the temperature sensor 1C shown in FIG. 2 is a block diagram showing a schematic configuration of an electric field detection unit 32 and an information processing circuit 42 which are signal processing systems, and a schematic configuration of an electric field application unit 13, respectively.

  The electric field detection optical unit 60 of the temperature sensor 1C of the present embodiment is, for example, a first electrode (detection) having a substantially thin plate shape that is attached to the first side surface 2a adjacent to the first side surface 2a of the EO crystal 2. Electrode) 61. The first electrode 61 is made of, for example, metal having high temperature conductivity, and the detection electrode 3 in the temperature detection unit 30 is spaced from the first electrode 61 by a predetermined distance. Are arranged opposite each other.

  The temperature sensor 1C is a connection electrode such as a ribbon cable formed of a conductive material such as a metal or a semiconductor that electrically connects the first electrode 61 and the detection electrode (second electrode) 3. (Detection electrode section) 62 is provided.

  The connection electrode 62 physically separates the temperature detection unit 30 and the electric field detection optical unit 60, and maintains only the electrical connection relationship.

  Since the other components of the temperature sensor 1C according to the second embodiment are substantially the same as the components of the temperature sensor 1 according to the first embodiment, the same reference numerals are used for the description. Is omitted or simplified.

  Next, the overall operation of the temperature sensor 1C of the present embodiment will be described.

  As in the first embodiment, when the grounded living body H contacts the insulating film 6 through, for example, a part thereof, the electric field change ΔE generated on the pyroelectric element 5 due to the temperature change ΔT of the living body H is The first electrode 61 of the electric field detection optical unit 60 is electrically sent through the detection electrode (second electrode) 3 and the connection electrode 62, and applied to the EO crystal 2 through the first electrode 61. Is done.

  In accordance with the electric field change ΔE applied to the EO crystal 2, the phase difference Ψ1 of the laser light L1 passing through the EO crystal 2 can be changed by the electro-optic effect of the EO crystal 2.

  At this time, in this embodiment, since the temperature detection unit 30 and the electric field detection optical unit 60 are physically separated by the connection electrode 62 and only the electrical connection relationship is maintained, the insulating film 6 of the living body H It is possible to suppress the pressure and temperature change generated in the temperature detection unit 30 due to the contact with respect to the electric field detection optical unit 60 (EO crystal 2).

  As a result, the phase change component caused by the contact pressure of the living body H or the temperature fluctuation of the EO crystal 2 itself is suppressed with respect to the change in the phase difference Ψ1 of the laser light L1 generated in the EO crystal 2. Can do.

  Therefore, it is possible to reduce noise components caused by the contact pressure of the living body H and the temperature variation of the EO crystal 2 itself, which are included in the electrical signal representing the intensity change of the laser light detected via the detection unit 15. It is possible to maintain a high temperature change detection accuracy associated with the H contact operation.

(Third embodiment)
FIG. 9 is a diagram showing a schematic configuration of a temperature sensor 1D according to the third embodiment of the present invention. FIG. 10 is electrically connected to the electric field detection optical unit 60 in the temperature sensor 1D shown in FIG. 2 is a block diagram showing a schematic configuration of an electric field detection unit 32 and an information processing circuit 42 which are signal processing systems, and a schematic configuration of an electric field application unit 13, respectively.

  In the temperature detection unit 70 of the present embodiment, the insulating film 6 is disposed with a predetermined interval from the first side surface 5 a of the pyroelectric element 5, and the first side surface of the pyroelectric element 5. A third electrode 71 having, for example, a substantially thin plate shape is attached to 5a, and the third electrode 71 is formed of, for example, a metal having high temperature conductivity.

  Further, the temperature detection unit 70 includes a fourth electrode 72 having substantially the same shape as the third electrode 71 disposed to face the third electrode 71 at a predetermined interval. The electrode 72 is made of, for example, metal having high temperature conductivity.

  Further, the temperature detection unit 70 includes an elastically deformable connection electrode 73 that electrically connects the third electrode 71 to the fourth electrode 72, and the insulating film 6 includes the fourth electrode 72. Is covered with a surface 72a opposite to the third electrode 71 side.

  The connection electrode 73 is made of a material having conductivity, high temperature conductivity, and elastic deformation. Further, for example, a metal foil (aluminum foil or the like) may be formed in a bellows shape.

  In addition, about the other structure of temperature sensor 1D concerning 3rd Embodiment, since it is substantially equivalent to the component of temperature sensor 1C concerning 2nd Embodiment, the same code | symbol is attached | subjected and the description is given. Is omitted or simplified.

  Next, the overall operation of the temperature sensor 1D of the present embodiment will be described.

  Similarly to the second embodiment, when the grounded living body H comes into contact with the insulating film 6 through, for example, a part thereof, the insulating film 6, the fourth electrode 72, the connection electrode 73, and the third electrode 71 are Since each has high temperature transferability, the temperature change ΔT of the living body H is transferred to the pyroelectric element 5 through the insulating film 6, the fourth electrode 72, the connection electrode 73 and the third electrode 71 as a heat change with almost no loss. The electric field change ΔE occurs in the pyroelectric element 5 due to the transmitted temperature change ΔT.

  At this time, in the present embodiment, the fourth electrode 72 on the side in contact with the living body H is separated from the pyroelectric element 5, and the material has a higher temperature conductivity than the third electrode 71 on the pyroelectric element 5 side. The connection electrode 73 is formed so as to be elastically deformable.

  For this reason, the pressure generated in the fourth electrode 72 due to the contact of the living body H with the insulating film 6 can be absorbed by the elastic deformation of the connection electrode 73, and the contact pressure of the living body H is applied to the pyroelectric element 5. It can suppress acting.

  As a result, with respect to the change of the phase difference Ψ1 of the laser light L1 corresponding to the electric field change ΔE applied to the EO crystal 2 based on the temperature change ΔT of the living body H transmitted to the pyroelectric element 5, It can suppress that the phase change component resulting from a contact pressure is contained.

  Therefore, the noise component resulting from the contact pressure of the living body H included in the electrical signal representing the intensity change of the laser light detected via the detection unit 15 can be reduced, and the temperature change accompanying the contact operation of the living body H High detection accuracy can be maintained.

(Fourth embodiment)
FIG. 11 is a diagram showing a schematic configuration of a temperature sensor 1E according to the fourth embodiment of the present invention, and FIG. 12 is electrically connected to the electric field detection optical unit 80 in the temperature sensor 1E shown in FIG. Disclosed in Patent Document 1 for applying an electric field to the detection electrode 3 through the living body H which is an electric field transmission medium, and a schematic configuration of the electric field detection unit 32 and the information processing circuit 42 which are signal processing systems It is a block diagram which shows schematic structure of a transceiver, respectively.

  As shown in FIG. 11, the electric field detection optical unit 80 in the temperature sensor 1 </ b> E of the present embodiment is attached to the second side surface 2 b of the EO crystal 2 instead of the application electrode, and is disposed to face the detection electrode 3. A ground electrode 81 is provided, and the ground electrode 81 is grounded.

  On the other hand, a transceiver 85 as a part of a wearable computer is attached to the living body H in the temperature sensor 1E of the present embodiment, for example.

  The transceiver 85 includes an application electrode 86 disposed so as to be in contact with the living body H directly or via an insulating member such as an insulating film, an information processing circuit 88 having an information generation function for generating an electric field, and the like. An I / O circuit 90 having an interface function related to input / output of information to / from the circuit 88, and a constant electric field based on the electric field generation information input through the I / O circuit 90 are applied to the living body H through the application electrode 86. And an electric field applying unit 92 including an electric field applying circuit 92a for inducing the electric field.

  In addition, about the other structure of the temperature sensor 1E concerning 4th Embodiment, since it is substantially equivalent to the component of the temperature sensor 1 concerning 1st Embodiment, the same code | symbol is attached | subjected and the description is given. Is omitted or simplified.

  Next, the overall operation of the temperature sensor 1E of this embodiment will be described.

  In the present embodiment, an electric field is induced through the information processing circuit 88 and the electric field application unit 92 of the transceiver 85 on the application electrode 86 that is brought into contact with the living body H directly or through an insulating film or the like.

  At this time, when the living body H comes into contact with the insulating film 6 through, for example, a part thereof, the electric field induced in the living body H is applied to the detection electrode 3 through the insulating film 6, the pyroelectric element 5, and the insulating film 4. Applied.

  Since the ground electrode 81 disposed opposite the EO crystal 2 with respect to the detection electrode 3 to which an electric field is applied is grounded, the applied electric field is applied to the EO crystal 2 between the detection electrode 3 and the ground electrode 81. A potential difference V corresponding to is applied.

  On the other hand, as in the first embodiment, the electric field change ΔE generated in the pyroelectric element 5 due to the temperature change ΔT generated in the living body H in contact with the insulating film 6 is applied to the EO crystal 2 via the detection electrode 3. Applied.

  At this time, the potential difference V applied to the EO crystal 2 as the potential difference V between the detection electrode 3 and the ground electrode 81 changes according to the electric field change ΔE newly applied to the EO crystal 2.

  The phase difference ψ1 of the laser light L1 changes due to the change in the potential difference V generated in the EO crystal 2.

  In this way, the laser light L2 whose phase difference Ψ1 has changed in accordance with the temperature change ΔT of the living body H when passing through the EO crystal 2 is converted into an electrical signal representing the intensity change via the detection unit 15, Amplification, waveform shaping processing, and the like are performed via the signal processing circuit 38 and the waveform shaping circuit 40, and then transmitted to the information processing circuit 42 via the I / O circuit 44.

  The information processing circuit 42 receives the transmitted data, that is, data representing the laser light intensity change corresponding to the temperature change ΔT of the living body H (change in the phase difference Ψ1 of the laser light L2).

  At this time, the information processing circuit 42 calculates a change in the polarization magnitude P corresponding to the received data based on the received data, and calculates a temperature change ΔT corresponding to the calculated change in the polarization magnitude P. It can be extracted with reference to the relational data RD shown in FIG.

  As described above, according to this embodiment, when the transceiver 85 is attached to the living body H, the electric field induced from the transceiver 85 on the living body H is applied to the detection electrode 3 of the temperature sensor 1E. The potential difference V between the detection electrode 3 and the ground electrode 81 is applied to the EO crystal 2.

  For this reason, in the temperature sensor 1E, the potential is applied to the EO crystal 2 by simply providing the ground electrode 81 without providing the electric field applying unit in the temperature sensors 1 and 1A to 1D according to the first to third embodiments. It becomes possible to apply.

  As a result, in addition to the effects of the first embodiment, the temperature sensor 1E can be downsized. Even if a living body that does not have the transceiver 85 contacts the insulating film 6 of the temperature sensor 1E, only the contact is detected by the temperature sensor 1E. For this reason, the living body used as the detection target of the temperature sensor 1E can be limited, and the security property in the temperature change detection using the temperature sensor 1E can be improved.

(Fifth embodiment)
FIG. 13 is a diagram showing a schematic configuration of a temperature sensor 1F according to the fifth embodiment of the present invention. FIG. 14 is electrically connected to the electric field detection optical unit 80A in the temperature sensor 1F shown in FIG. The schematic configuration of the electric field detection unit 32 and the information processing circuit 42 which are the signal processing system, and the schematic configuration of the transceiver disclosed in Patent Document 1 for applying an electric field to the detection electrode 2 via the living body H It is a block diagram shown respectively.

  As in the second embodiment, the electric field detection optical unit 80A of the temperature sensor 1F of the present embodiment is adjacent to the first side surface 2a of the EO crystal 2 as shown in FIGS. The first electrode 61 having, for example, a substantially thin plate shape attached to one side surface 5a is provided. The first electrode 61 is formed of, for example, a metal having high temperature conductivity, and the temperature detection unit 30. The detection electrode (second electrode) 3 in FIG. 2 is disposed to face the first electrode 61 with a predetermined interval.

  Further, the temperature sensor 1F is a connection electrode such as a ribbon cable formed of a conductive material such as a metal or a semiconductor that electrically connects the first electrode 61 and the detection electrode (second electrode) 3. 62. The connection electrode 62 physically separates the temperature detection unit 30 and the electric field detection optical unit 80A, and holds only the electrical connection relationship.

  And the electric field detection optical part 80A in the temperature sensor 1F of the present embodiment is attached to the second side surface 2b of the EO crystal 2 as shown in FIGS. 13 and 14, as in the fourth embodiment. The transceiver 85 having the same configuration as that of the fourth embodiment is attached to the living body H in the temperature sensor 1F of the present embodiment.

  The other components of the temperature sensor 1F according to the fourth embodiment are substantially the same as those of the temperature sensor 1C according to the second embodiment and the temperature sensor 1E according to the fourth embodiment. For this reason, the same reference numerals are used and the description thereof is omitted or simplified.

  Next, the overall operation of the temperature sensor 1F of the present embodiment will be described.

  Also in the present embodiment, as in the fourth embodiment, the application electrode 86 brought into contact with the living body H directly or through an insulating film or the like is connected to the application electrode 88 of the transceiver 85 via the information processing circuit 88 and the electric field application unit 92. An electric field is induced.

  Now, when the living body H comes into contact with the insulating film 6 through, for example, a part thereof, the electric field induced in the living body H is applied to the detection electrode 3 through the insulating film 6, the pyroelectric element 5, and the insulating film 4. Is done.

  The electric field applied to the detection electrode 3 is electrically sent to the first electrode 61 of the electric field detection optical unit 80 via the connection electrode 62.

  At this time, since the ground electrode 81 disposed opposite to the first electrode 61 is grounded to the EO crystal 2, the potential difference V corresponding to the applied electric field is different from that of the first electrode 61 of the EO crystal 2. It is applied to the ground electrode 81.

  On the other hand, as in the second embodiment, the electric field change ΔE generated on the pyroelectric element 5 due to the temperature change ΔT generated in the living body H in contact with the insulating film 6 is detected by the detection electrode (second electrode) 3 and the connection electrode. Electrically sent to the first electrode 61 of the electric field detection optical unit 80A through 62 and applied to the EO crystal 2 through the first electrode 61.

  At this time, the potential difference V applied to the EO crystal 2 between the first electrode 61 and the ground electrode 81 changes in accordance with the electric field change ΔE newly applied to the EO crystal 2.

  The phase difference ψ1 of the laser light L1 changes due to the change in the potential difference V generated in the EO crystal 2.

  In this way, the laser light L2 whose phase difference Ψ1 has changed in accordance with the temperature change ΔT of the living body H when passing through the EO crystal 2 is converted into an electrical signal representing the intensity change via the detection unit 15, Amplification, waveform shaping processing, and the like are performed via the signal processing circuit 38 and the waveform shaping circuit 40, and then transmitted to the information processing circuit 42 via the I / O circuit 44.

  The information processing circuit 42 receives the transmitted data, that is, data representing the laser light intensity change corresponding to the temperature change ΔT of the living body H (change in the phase difference Ψ1 of the laser light L2).

  At this time, the information processing circuit 42 calculates a change in the polarization magnitude P corresponding to the received data based on the received data, and calculates a temperature change ΔT corresponding to the calculated change in the polarization magnitude P. It can be extracted with reference to the relational data RD shown in FIG.

  As described above, according to the present embodiment, when the transceiver 85 is attached to the living body H, the electric field induced from the transceiver 85 on the living body H is affected by the insulating film 6 and pyroelectric element of the temperature sensor 1F. 5, applied to the first electrode 61 via the insulating film 4, the detection electrode 3 and the connection electrode 62, and applied to the EO crystal 2 as a potential difference V between the first electrode 61 and the ground electrode 81.

  For this reason, in the temperature sensor 1F, the potential is applied to the EO crystal 2 by simply providing the ground electrode 81 without providing the electric field applying unit in the temperature sensors 1 and 1A to 1D according to the first to third embodiments. It becomes possible to apply.

  As a result, in addition to the effects of the second embodiment, the temperature sensor 1F can be downsized. Even if a living body that does not have the transceiver 85 contacts the insulating film 6 of the temperature sensor 1F, the temperature sensor 1F detects only the contact. For this reason, the living body used as the detection target of the temperature sensor 1E can be limited, and the security property in the temperature change detection using the temperature sensor 1F can be improved.

(Sixth embodiment)
FIG. 15 is a diagram showing a schematic configuration of a temperature sensor 1G according to the sixth embodiment of the present invention.

As shown in FIG. 15, the temperature sensor 1G includes a plurality of temperature detection units 30x ₁ ,..., 30x _n corresponding to the temperature detection units shown in FIGS. _1, ..., 30x _n is a pyroelectric element _5x 1 corresponding to the pyroelectric element shown in FIGS. 1 and 2, includes ..., a 5x _n respectively, the pyroelectric element _5x 1, · ..., the second side 5b of 5x _n, dielectric film _4x 1 corresponding to the insulating film shown in FIGS. 1 and 2, · · ·, 4x _n are respectively attached.

The pyroelectric elements 5x ₁ ,..., 5x _n are arranged so as to be in non-contact with each other, for example, in a row or matrix, and their first side surfaces 5a are located on the same plane.

Further, a plurality of temperature detecting unit _30x 1, · · ·, insulation film 6x of 30x _n, all of the temperature detecting portion _30x 1, · · ·, are common in 30x _n, the insulating film 6x is a pyroelectric element 5x _1, · · ·, on each of the first side 5a of 5x _n, is mounted so as to cover all of the first side surface 5a of a substantially uniform thickness.

Further, the temperature detecting unit _30x 1, · · ·, pyroelectric _5x 1 of 30x _n, · · ·, to the second side 5b of 5x _n, the insulating film _4x 1, · · ·, through a 4x _n , the detection electrodes _3x 1 corresponding to the detecting electrodes in Figures 1 and 2, · · ·, 3x _n are respectively attached.

Then, the temperature sensor 1G, a plurality of temperature detecting unit _30x 1, · · ·, is provided corresponding to each 30x _n, each of the temperature detecting portion _30x 1, · · ·, are detected via the 30x _n Electric field detectors 32x _{1 to} 32x _n (corresponding to the electric field detector 32) for detecting electric field changes corresponding to the temperature changes.

Furthermore, the temperature sensor 1G, the electric field detecting unit _32x 1 _~32x is provided corresponding to _n, each of the electric field detecting unit _32x 1 _{~32x n} electric field applying unit _13x 1 for applying an electric field to ~13x _n (corresponding to the electric field applying unit 13).

FIG. 16 is a block diagram showing a schematic configuration of the electric field detection units 32x _{1 to} 32x _n and the information processing circuit 42 in the temperature sensor 1G shown in FIG. 15 and a schematic configuration of the electric field application units 13x _{1 to} 13x _n .

As shown in FIG. 16, each of the electric field detection units 32x _{1 to} 32x _n includes an electric field detection optical unit 20, and the electric field detection optical unit 20 is arranged in the longitudinal direction in the same manner as in the first embodiment. each detection electrode _3x 1 _{~3x n} corresponding to the first side surface 2a along which is attached, and the EO crystal 2 having an electro-optic effect (see FIG. 1), the respective detection electrodes _3x 1 _{~3x n} A detection light output unit that outputs laser light parallel to the longitudinal direction as laser light L1 in a state of being polarized with respect to the EO crystal 2, for example, circularly polarized light or linearly polarized light rotated by 45 ° with respect to the main axis of the EO crystal 2 10 (see FIG. 1) and a detection unit 15 that detects a change in phase difference of the laser light L2 that has passed through the EO crystal 2 as an intensity change of the laser light and converts the detected intensity change of the laser light L2 into an electrical signal. (See FIG. 1)

Each electric field applying unit _13x 1 _{~13x n} is opposed to each EO crystal 2 of the electric field detecting unit _32x 1 _{~32x n,} in the respective detection electrodes _3x 1 _{~3x n} across the optical path of the laser beam L1 the application electrode 12, the I / O circuit 46 for external equipment connection, for example, a constant electric field based on the signal input through the I / O circuit 46, for each electric field applying unit _13x 1 _{~13x n} and a field application circuit 48 to be applied to the EO crystal 2 via the application electrode 12 as a constant potential difference V between the application electrode 12 and the detection electrodes 3x ₁ ~3x _n.

The electric field detectors 32x _{1 to} 32x _n receive the signal processing such as amplification processing and noise removal processing on the electrical signal output from the detection unit 15 as in the first embodiment. Signal processing circuit 38, a waveform shaping circuit 40 for performing waveform shaping processing on the electrical signal processed by the signal processing circuit 38, and an I / O for transmitting the electrical signal to the information processing circuit 42 as received data. Circuit 44.

The information processing circuit 42 in the temperature sensor 1G, similar to the first embodiment, each pyroelectric element _5x 1, · · ·, each pyroelectric element _5x 1 corresponding to the pyroelectric effect of 5x _n, · · -, values and the pyroelectric element _5x 1 temperature T of 5x _n, ..., 5x _n parameter a is for example the pyroelectric element _5x 1 according to the internal electric field, ..., polarization occurring in 5x _n size The relation data RD in which the value P is associated with each other based on a predetermined resolution is stored in advance in a table format, for example. In the present embodiment, the pyroelectric elements 5x ₁ ,..., 5x _n of the electric field detectors 32x _{1 to} 32x _n have the same shape made of the same material, and the above relationship The data RD is assumed to be common to all the pyroelectric elements 5x ₁ ,..., 5x _n .

  Next, the overall operation of the temperature sensor 1G of the present embodiment will be described.

Now, for example, at time A, bio H being grounded, the pyroelectric element 5x ₁ ～5X first side area is small operating portion than 5a of _n (e.g., fingertip or the like) through a 17 as shown, contacts the part between the pyroelectric element _{5x k-1} and the pyroelectric element _5x k in the insulating film 6x (1 ≦ k ≦ n) , hereinafter, the contact site pyroelectric element 5x _k will continuously moving towards, at time B, to reach the portion facing the pyroelectric element 5x _k of the insulating film 6x, beyond the portion facing the pyroelectric element 5x _k at time C, the pyroelectric at time Z Assume that each of the portions facing the element 5xk _{+ 1} is reached.

Here, when the operating part of a living body H is directed to the opposite position of the pyroelectric element 5x _k away from the opposing position of the pyroelectric element _{5x k-1,} the detection electrodes _{3x k-1} corresponding to the pyroelectric element _{5x k-1} The temperature of the living body H detected by the information processing circuit 42 is lowered via the electric field detection unit 32x _k-1 and the electric field application unit 13x _k-1, and the detection electrode 3x _k corresponding to the pyroelectric element 5x _k is detected. The temperature of the living body H detected by the information processing circuit 42 increases through the unit 32x _k and the electric field applying unit 13x _k .

Similarly, when the operation portion of the subject H is directed to the opposite position of the pyroelectric element _{5x k + 1} away from the position facing the pyroelectric element 5x _k, the detection electrodes 3x _k corresponding to the pyroelectric element 5x _k, the electric field detecting unit 32x _k and the temperature of the living H detected by the information processing circuit 42 is lowered through the electric field applying section 13x _k, pyroelectric detector corresponding to _{5x k + 1} electrode _{3x k + 1,} the electric field detecting unit _{32x k + 1} and the electric field applying section _{13x k + 1} Accordingly, the temperature of the living body H detected by the information processing circuit 42 rises.

Therefore, the information processing circuit 42 detects, for example, the last temperature change from the electric field detection unit in which the temperature change was first detected based on the phase difference change (temperature change) detected by the electric field detection units 32x _{1 to} 32x _n. The detected distance to the electric field detection unit and the direction thereof can be easily detected as the movement amount and movement direction of the operation portion of the living body H, that is, the contact portion with respect to the insulating film 6x.

Also in the present embodiment, for example, as in the fourth embodiment, the electric field application units 13x _{1 to} 13x _n are replaced with the ground electrodes, and the electric field application units 13x _{1 to} 13x _n are removed. the electric field induced in the living body H by the transceiver attached to each pyroelectric element _5x 1, · · ·, 5x _n and the insulating film _4x 1, · · ·, each of the detection electrodes _3x 1 through 4x _n, ..., by applying to 3x _n, it can also be applied to the EO crystal 2.

In the present embodiment, as the temperature sensor 1H shown in FIG. 18, a pyroelectric element _5x 1, · · ·, electrodes 100x ₁ between 5x _n and the insulating film 6x, · · ·, a 100x _n Each can also be inserted.

  In the first to sixth embodiments and modifications thereof, an object that causes a temperature change, which is a detection target of the temperature sensor, is a living body. However, the present invention is not limited to this and is not a living body. An object having a temperature of

  In the first to sixth embodiments, the signal processing circuit is configured outside the electric field detection unit, but may be configured integrally in the electric field detection unit.

  Furthermore, in the first to sixth embodiments, as a parameter relating to the electric field inside the pyroelectric element 5 that represents the relationship of the pyroelectric element 5 to the temperature T, for example, the magnitude P of polarization generated in the pyroelectric element 5 is set. Although used, the present invention is not limited to this configuration, and may be a parameter such as the electric field itself in the pyroelectric element 5 as long as it is a parameter related to the electric field in the pyroelectric element 5.

1 is a diagram showing a schematic configuration of a temperature sensor using an electro-optic effect according to a first embodiment of the present invention. FIG. 2 is a block diagram showing a schematic configuration of an electric field detection unit and an information processing circuit, which are signal processing systems electrically connected to an electric field detection optical unit in the temperature sensor shown in FIG. 1, and a schematic configuration of an electric field application unit. (A) is a figure which shows the polarization state of the pyroelectric element before temperature application, (b) is a figure which shows the polarization state of the pyroelectric element at the time of temperature application. The graph which shows notionally the relational data showing the relationship between the magnitude | size of the polarization inside a pyroelectric element and temperature concerning 1st Embodiment. The figure which shows schematic structure of the temperature sensor using the electro-optical effect concerning the modification of 1st Embodiment. The figure which shows schematic structure of the temperature sensor using the electro-optical effect concerning the modification of 1st Embodiment. The figure which shows schematic structure of the temperature sensor using the electro-optic effect concerning the 2nd Embodiment of this invention. FIG. 8 is a block diagram showing a schematic configuration of an electric field detection unit and an information processing circuit that are signal processing systems electrically connected to an electric field detection optical unit in the temperature sensor shown in FIG. 7, and a schematic configuration of an electric field application unit. The figure which shows schematic structure of the temperature sensor using the electro-optic effect concerning the 3rd Embodiment of this invention. 9 is a schematic configuration of an electric field detection unit and an information processing circuit which are signal processing systems electrically connected to an electric field detection optical unit in the temperature sensor shown in FIG. 9, and an electric field with respect to a detection electrode via a living body which is an electric field transmission medium. FIG. 3 is a block diagram showing a schematic configuration of a transceiver for applying a signal to each other. The figure which shows schematic structure of the temperature sensor using the electro-optic effect concerning the 4th Embodiment of this invention. 11 is a signal processing system electrically connected to the electric field detection optical unit in the temperature sensor shown in FIG. The block diagram which shows the schematic structure of a transceiver, respectively. The figure which shows schematic structure of the temperature sensor concerning the 5th Embodiment of this invention. FIG. 14 is a block diagram showing a schematic configuration of an electric field detection unit and an information processing circuit and a schematic configuration of an electric field application unit in the temperature sensor shown in FIG. 13. The figure which shows schematic structure of the temperature sensor concerning the 6th Embodiment of this invention. FIG. 16 is a block diagram showing a schematic configuration of an electric field detection unit and an information processing circuit and a schematic configuration of an electric field application unit in the temperature sensor shown in FIG. 15. The figure showing the relationship between the movement of the biological body concerning 6th Embodiment, and a detection electrode and an electric field detection part. The figure which shows schematic structure of the temperature sensor using the electro-optical effect concerning the modification of 6th Embodiment.

Explanation of symbols

1,1A～1H ... Temperature sensor 2 ... EO crystal 2a ... first side surface 2b ... second side 3 ... detection electrode 3,3x ₁ ~3x n _... detection electrode 4,4x ₁ ~4x n _... insulating film 5, 5 x _{1 to} 5 x _n ... pyroelectric element 5 a ... first side face 5 b ... second side face 6, 6 x ... insulating film 10 ... detection light output part 12 ... application electrode 13, 13 x _{1 to} 13 x _n , 92 ... electric field application part 15 ... detector 20,60,80,80A ... field detecting optical section 30,30x ₁ ~30x _n ...... temperature detector 32,32x ₁ ~32x n _... field detecting unit 36 ... receiving portion 38 ... signal processing circuit 40 ... waveform shaping circuit 42 ... data processing circuit 44,46,90 ... I / O circuit 48 ... field application circuit 50,100x ₁ ~100x n _... electrode 61 ... first electrode 62 ... connection electrode 62: second electrode 63 ... Connection electrode 70 ... Temperature Out section 71 ... third electrode 72 ... fourth electrode 73 and 81 ... connection electrodes 85 ... transceiver 86 ... application electrode 88 ... information processing circuit 92a ... field application circuit

Claims (8)

A temperature sensor using an electro-optic effect that detects a temperature change of an object using a phase difference of detection light corresponding to the electro-optic effect,
An electro-optic crystal part having the electro-optic effect disposed on the optical path of the detection light;
A pyroelectric element having a pyroelectric effect, a first electrode part attached to the pyroelectron and disposed adjacent to the electro-optic crystal part, and a position different from the first electrode part on the pyroelectric element A temperature detection unit for detecting a temperature change of the object, and an insulating member that is in contact with the object,
A temperature electric field relation information storage unit for storing information representing a relation between a temperature of the pyroelectric element corresponding to the pyroelectric effect and a parameter relating to an electric field in the pyroelectric element;
A second electrode portion attached to the electro-optic crystal portion so as to be opposed to the first electrode portion across an optical path of the detection light;
A temperature sensor comprising: The temperature sensor according to claim 1 , wherein the parameter is a magnitude of polarization generated in the pyroelectric element . The electro-optic crystal part includes an electro-optic crystal having the electro-optic effect, and a phase change detection first electrode disposed adjacent to the electro-optic crystal and facing the second electrode part with the detection light interposed therebetween. 1 detection electrode,
While the first electrode portion includes a second detection electrode for temperature change detection that is directly or indirectly attached to a first surface of the pyroelectric element facing the first detection electrode,
The temperature sensor according to claim 1, further comprising a first connection electrode having temperature conductivity and electrically connecting the first detection electrode and the second detection electrode. . The temperature detection unit includes a third detection electrode for detecting a temperature change that is in contact with a second surface of the pyroelectric element that faces the first surface to which the second detection electrode is attached, and the third detection electrode. A fourth detection electrode for detecting a temperature change that is spaced from the detection electrode toward the opposite side of the pyroelectric element and is disposed to face the third detection electrode; The temperature sensor according to claim 3, further comprising an elastically deformable second connection electrode that electrically connects the third detection electrode to the fourth detection electrode. And an applying means for applying the electric field for generating the electro-optic effect to the electro-optic crystal part as a potential difference between the second electrode part and the first electrode part via the second electrode part. The temperature sensor according to any one of claims 1 to 4, wherein: The object is an electric field transmission medium, and when the electric field for generating the electro-optic effect is induced in the electric field transmission medium in a state where the electric field transmission medium is in contact with the insulating member, the induced electric field is generated. 4. The temperature sensor according to claim 1, wherein the temperature sensor is applied to the first electrode portion via the electric field transmission medium. 5. The object comes into contact with the insulating member, and the temperature change of the object is transmitted to the pyroelectric element of the temperature detecting unit via the insulating member, and the temperature change of the object is caused by the pyroelectric effect of the pyroelectric element. In response to the change in the spontaneous polarization, an electric field is generated in the pyroelectric element in response to the change in the spontaneous polarization, and the electric field is transmitted through the first electrode portion and the second electrode portion. When the phase difference of the detection light is changed by the electric field applied to the optical crystal portion and the electric field applied to the electro-optic crystal portion, the phase difference of the detection light is detected, and the temperature change is based on the detected phase difference. The temperature sensor according to any one of claims 1 to 3, further comprising a detecting means for detecting. A temperature sensor using an electro-optic effect that detects a temperature change of an object using a phase difference of a plurality of detection lights according to the electro-optic effect,
A plurality of electro-optic crystal parts each having an electro-optic effect disposed on an optical path of the plurality of detection lights;
A plurality of pyroelectric elements having a pyroelectric effect arranged so that one end faces thereof are positioned on the same plane, and attached to each of the plurality of pyroelectric elements, and disposed adjacent to the plurality of electro-optic crystal parts. A temperature detecting unit for detecting a temperature change of the object having a plurality of first electrode units;
An insulating covering member that can contact the object and directly or indirectly cover one end face of each of the plurality of pyroelectric elements;
Temperature electric field relationship for storing information indicating the relationship between the temperature of each of the plurality of pyroelectric elements corresponding to the pyroelectric effect of each of the plurality of pyroelectric elements and the parameter relating to the electric field inside each of the plurality of pyroelectric elements An information storage unit;
A plurality of second electrode portions attached to the plurality of electro-optic crystal portions so as to face the plurality of first electrode portions across an optical path of the detection light;
A temperature detection sensor comprising:

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