JP3900319B2 - Image measuring apparatus and image display method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an image measuring apparatus and an image display method thereof, and more specifically, an image of an object is captured and displayed on a display screen of the image display apparatus, and two-dimensional image data obtained by imaging is used. An image measuring apparatus that performs object shape recognition, contour detection, and other predetermined measurement processes, and an image is displayed on the display screen for instructing measurement of the image of the object when the image data exceeds the number of display pixels in the image measuring apparatus. The present invention relates to an image display method to be displayed.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in an image measurement system used in the industrial and medical fields, a dedicated image measurement device is connected to a personal computer (hereinafter referred to as “PC” as appropriate), and an image of an object obtained by imaging on this dedicated device. Data was captured, image processing and measurement processing were performed, and only the results were transferred to the personal computer for display.
[0003]
In recent years, with the improvement of the performance of personal computers, it has become possible to directly capture image data on a personal computer and perform image processing and measurement processing on the personal computer. For example, an image input device using a two-dimensional CCD as an imaging device can be used. In this case, image data of 600 × 400 pixels, that is, about 240000 pixels is handled. A display of a current personal computer can display up to about 1024 × 1280 pixels, and image data input by the image input device can be displayed on the display over the entire area.
[0004]
However, if measurement processing with a higher-accuracy image is to be performed, the image data having the number of pixels of about 240000 pixels may not always be sufficient, so that it is possible to capture image data having a larger number of pixels. Recently, an image input device using a two-dimensional CCD (that is, a line sensor) has been developed, and such a device can handle image data with a very large data amount of about 6000 × 6000 = 36000000 pixels.
[0005]
[Problems to be solved by the invention]
In an image measuring apparatus that handles image data with a very large amount of data as described above, the number of pixels of the image data exceeds the display limit of the display, so that the entire area of the image to be measured cannot be displayed at once. . In such a case, conventionally, there is no method other than switching the screen for each part of the image and displaying it on the display, and the entire shape of the object cannot be displayed.
[0006]
However, since a measurement instruction for an image to be measured is performed by designating a desired position on the image displayed on the display with the mouse, only a part of the image is displayed on the display as described above. In this case, the remaining portion that is not displayed cannot be designated with the mouse, and it is necessary to switch the screen sequentially to display the region portion to be measured on the display and to give a measurement instruction. For this reason, there is a disadvantage that the measurement instruction is troublesome. In this case, it is also essential to always consider the relationship between each part of the image and the whole.
[0007]
The present invention has been made under such circumstances, and its purpose is to easily give instructions such as measurement to an image of an object even in the case of image data having a large amount of data exceeding the display limit of a display device. An object of the present invention is to provide an image measurement apparatus and an image display method thereof that can be performed.
[0008]
[Means for Solving the Problems]
  From a first viewpoint, the present invention provides:An image measurement device that performs a predetermined measurement process using an image displayed on the display screen of the display device (43), and captures an image of the object (27) and is larger than the number of pixels that can be displayed on the display screen. An image capturing unit (25) that captures the first image data (51B) of the number of pixels; a memory (41D) in which the first image data (51B) is stored; and a first stored in the memory (41D) Display data generating means (53B) for generating a second image data (51D) having a number of pixels that can be displayed on the display screen by subjecting the image data (51B) to a predetermined number of pixels for every predetermined number of pixels. Display control means (53D) for displaying the second image based on the second image data (51D) created by the display data creation means (53B) on the display screen; at least for the image displayed on the display screen; Area to measure Measurement condition input means for inputting measurement conditions including the indication (42a, 42b, 53F) and;HaveAnd a first image measurement device that performs measurement using the first image data stored in the memory, based on the measurement condition input during display of the second image..
[0009]
  According to this, when an image of the object is captured by the image capturing unit and the first image data having a number of pixels larger than the number of pixels that can be displayed on the display screen is captured, the first image data is stored in the memory. Is done. Next, in the display data creation means, the second image data having the number of pixels that can be displayed on the display screen by subjecting the first image data stored in the memory to a predetermined pixel number reduction process for each predetermined number of pixels. And a second image based on the created second image data is displayed on the display screen by the display control means. For this reason, it becomes possible to display the whole shape of a target object. Therefore, it becomes easy to input measurement conditions including at least an instruction of a region to be measured for the image displayed on the display screen by the measurement condition input means.Further, measurement using the first image data stored in the memory is performed based on the measurement condition input while displaying the second image. As a result, more accurate measurement processing is quickly performed using the first image data (raw image data) including more information stored in the memory.
[0010]
  In this case, since it is possible to instruct an area to be measured with respect to the image based on the second image data displayed on the display screen, the first image data (raw image data) is not necessarily displayed on the display screen. There is no need to display it,For exampleThe display control means (53D) displays a part of the first image based on the first image data (51B) on the display screen simultaneously or separately with the second image according to the measurement condition, The measurement condition input means (42a, 42b, 53F) may be used to input measurement conditions for the first image displayed on the display screen. In this way, even when the object has a fine structure and the image based on the second image data having a small number of pixels cannot accurately indicate the measurement position, the object is based on the first image data displayed on the display screen. It is possible to specify an accurate measurement position for the image.
[0014]
  From a second viewpoint, the present invention is an image measurement device that performs a predetermined measurement process using an image displayed on the display screen of the display device (43), and captures an image of the object (27). An image capturing unit (25) that captures the first image data (51B) having a larger number of pixels than can be displayed on the display screen; and a memory (41D) that stores the first image data (51B); Second image data (51D) having the number of pixels that can be displayed on the display screen by subjecting the first image data (51B) stored in the memory (41D) to a predetermined pixel number reduction process for each predetermined number of pixels. Display data creation means (53B) for creating a display; and display control means (53D) for displaying a second image based on the second image data (51D) created by the display data creation means (53B) on a display screen; The image displayed on the display screen Measurement condition input means for inputting measurement conditions including an indication of a region to be at least measured relative (42a, 42b, 53F) and;When the shape to be measured is instructed by the measurement condition input means (42a, 42b, 53F),in frontThe image processing for shape extraction is performed using the second image data (51D), the corresponding shape is extracted, and the measurement condition is set according to the measurement method stored in advance for the shape to be measured.And a measurement control means (53H).
[0015]
  According to this, only by designating the shape to be measured by the measurement condition input means, the shape is automatically extracted, and the measurement condition for the shape is automatically set. Also in this case, the processing speed can be increased by performing image processing for shape extraction and setting of measurement conditions using the second image data having a small data amount..
[0016]
  From a third viewpoint, the present invention provides:An image display method for an image measurement device for displaying an image having a larger number of pixels than the number of pixels that can be displayed on the display screen of the display device (43) for a measurement instruction, wherein the pixels are larger than the number of pixels that can be displayed on the display screen. Capture first image data (51B)In memory (41D)A first step of storing; second image data (51D) having a number of pixels that can be displayed on a display screen by performing a predetermined pixel number reduction process for each pixel of a fixed number of pixels of the first image data (51B); For creating and measuring instructionsA second image based on the second image data;The second step of displaying on the display screen;A third step of performing measurement using the first image data stored in the memory based on a measurement condition input while displaying the second image;includingIt is an image display method of an image measuring device.
[0017]
  According to this, the first image data having a number of pixels larger than the number of pixels that can be displayed on the display screen is captured and stored, and a predetermined pixel number reduction process is performed for each pixel of a certain number of pixels of the first image data. Second image data of the number of pixels that can be displayed on the display screen is created and used for measurement instructionsThe second image by the second image data isDisplayed on the display screen. For this reason, even if the first image data has a large amount of data that exceeds the display limit of the display device, an instruction to measure an image of the entire object by the second image data in which the data is subjected to the pixel number reduction process is given. Therefore, it can be displayed on the display screen. Therefore, it is possible to easily give a measurement instruction to the entire image of the object based on the second image data displayed on the display screen.Further, measurement using the first image data stored in the memory is performed based on the measurement condition input while displaying the second image. As a result, more accurate measurement processing is quickly performed using the first image data (raw image data) including more information stored in the memory.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
[0019]
FIG. 1 schematically shows the overall configuration of an image measurement apparatus according to an embodiment. The image measuring apparatus in FIG. 1 includes an image capturing unit 25 including an imaging unit 21, a light source unit 21J, and an interface unit 23, and a host computer 40.
[0020]
The imaging unit 21 includes an object 27 (for example, a semiconductor chip, a liquid crystal display panel, etc.) and a one-dimensional photoelectric conversion element (line sensor) 21H in the X direction that is an arrangement direction of light receiving elements constituting the line sensor 21H (see FIG. 1 is a component that captures the image of the object 27 line by line by the line sensor 21H while relatively moving in the Y direction (right and left direction in the sheet in FIG. 1) orthogonal to the sheet 1 orthogonal direction in FIG. The imaging unit 21 is held by a stage 21B on which an object 27 is placed and movable in the Y direction on the base 21D, and a support 28 that is disposed above the stage 21B and is implanted on the base 21D. The optical system unit 21C, a holding member 21E fixed above the optical system unit 21C, and a line that is held by the holding member 21E and disposed on the imaging surface of the objective lens 21F in the optical system unit 21C. And a sensor 21H. The line sensor 21H has 6000 pixels and outputs an image signal of 6000 pixels for one line in the X direction in the image of the object 27 as a unit. In addition to the objective lens 21F, a half mirror for epi-illumination is accommodated in the optical system unit 21C.
[0021]
The stage 21B is fixed on the base 21D in the Y direction orthogonal to the element arrangement direction of the line sensor 13 via a drive system including a linear actuator (not shown) controlled by a control unit 23B in the interface unit 23 described later. Accordingly, the object 27 and the line sensor 21H are relatively moved in a direction orthogonal to the element arrangement direction of the line sensor 21H. The amount of movement of the stage 21B in the Y direction is measured by an encoder 21L provided between the base 21D and the stage 21B.
[0022]
Here, as the encoder 21L, an optical linear encoder including an encoder scale having an optical lattice pattern with a predetermined pitch similar to a normal one is used. The encoder 21L moves the stage 21B by one scale pitch in the Y direction. Output a phase A signal (pseudo sine wave) whose phase changes 360 degrees each time and a phase B signal (pseudo sine wave) that is 90 degrees out of phase with this, and from this phase change of A phase and B phase, The amount of movement of the stage 21B in the Y direction, that is, the distance of relative movement between the line sensor 21H and the object 27 is detected.
[0023]
In the imaging unit 21, the object 27 is illuminated with epi-illumination (or transmitted illumination from below) from above in FIG. 1 by light from a light source (not shown) in the light source unit 21 </ b> J described later, and an image of the object 27. Is imaged on the imaging plane by the objective lens 21F in the optical system unit 21C, and this image is picked up by the line sensor 21H arranged on the imaging plane.
[0024]
The light source unit 21J outputs incident or transmitted illumination light to the image pickup unit 21 through an optical fiber or the like. The light source unit 21J includes a light source that includes a light source and can adjust the amount of light, and the light from the light control device. And an optical system for guiding to an optical fiber. Selection of epi-illumination and transmission illumination and adjustment of the amount of light of these lights are controlled by a control unit 23B in the interface unit 23 described later.
[0025]
The interface unit 23 includes a control unit 23B, an imaging synchronization circuit 23D, and a line sensor imaging control unit 23F.
[0026]
The control unit 23B receives a control signal from the host computer 40 and controls the linear actuator of the stage 21B to move the stage 21B at a constant speed, select epi-illumination and transmission illumination, or output from the light source unit 21J. This is a component for controlling the amount of light to be emitted, and is composed of a microprocessor and its firmware.
[0027]
The imaging synchronization circuit 23D is a circuit that outputs an imaging synchronization signal to the imaging control unit 23F when the two-phase pseudo sine waves of phase A and phase B, which are detection outputs of the encoder 21L, have a predetermined phase angle.
[0028]
The imaging control unit 23F receives an imaging synchronization signal from the imaging synchronization circuit 23D, sends a predetermined imaging control signal to the line sensor 21H to control the imaging timing, and A / D converts the image signal from the line sensor 21H. This is a circuit for outputting an image data signal to the host computer 40. In addition, the imaging control unit 23F also performs control such as an imaging enabled state and an imaging stopped state of the line sensor 21H based on a control signal from the host computer 40.
[0029]
According to the image capturing unit 25 configured as described above, an imaging synchronization signal is output from the imaging synchronization circuit 23D each time the relative movement between the object 27 and the line sensor 21H advances by a predetermined distance, and the imaging control unit 23F performs control. Thus, an image of the object 27 is taken line by line by the line sensor 21H. The image signal for one line is A / D converted by the imaging control unit 23F and sent to the host computer 40 as image data. By moving the stage 21B and sequentially capturing one line of the image of the object 27, a two-dimensional image of the object 27 is imaged and the image data of the two-dimensional image (first image data). Is obtained. Here, a two-dimensional image of the object 27 is composed of 1 byte (monochrome 256 gradations) and 6000 lines per pixel. In this way, the first image data having a large number of pixels of 6000 × 6000 is captured by the image capturing unit 25 and stored in the memory of the host computer 40 described later.
[0030]
In the present embodiment, the host computer (hereinafter referred to as “computer” as appropriate) 40 is configured by using a personal computer that operates on a predetermined operating system (for example, Windows 95), and a keyboard that is an input device in the computer main body 41. 42a, a mouse 42b and a display 43 as a display device are connected. The computer main body 41 includes a microprocessor 41B, a memory 41D, and a PCI bus 41F. A keyboard interface (keyboard controller) 41H for connecting a keyboard 42a and a mouse 42b via the PCI bus 41F and a display 43 are connected to the computer main body 41. A video interface 41J, a serial interface 41L, a hard disk 41P, and an image input board 41R are connected. In addition, a digital signal processor board 41T can be connected to the computer 40 as necessary, and a part of image processing performed by the microprocessor 41B can also be performed by this board 41T.
[0031]
An imaging control unit 23F of the interface unit 23 is connected to the serial interface (RS422) of the image input board 41R, and the host computer 40 controls the imaging enabled state and imaging stopped state of the line sensor 21H, and the imaging control unit. First image data obtained by A / D conversion at 23F is temporarily stored in the buffer memory (2 MB × 2) of the image input board 41R and transferred to the memory 41D (this will be further described later).
[0032]
In this embodiment, by loading a control program stored in the hard disk 41P into the memory 41D and starting the program, a control signal is sent to the control unit 23B of the interface unit 23 via the serial interface (RS232C), and the stage 21B The linear actuator control, optical system magnification control, light amount control, and the like can be performed, and these settings can be stored in the hard disk 41P. The hard disk 41P stores various programs for performing various image processing / measurement processes on the image data of the measurement object such as edge (contour) detection and pitch measurement, and other control programs. Image processing / measurement processing can be performed by loading the program into the memory 41D and starting the program.
[0033]
The memory 41D stores not only the first image data 51B (data amount 36 MB) but also the second image data 51D, a control program, a program for performing image processing / measurement processing, and the like, and therefore has a sufficiently large capacity. is there. Specifically, the program for performing the image processing / measurement processing includes an alignment setting / correction program 53A, a display data creation program 53B, a display control program 53D, and a measurement condition input program 53F. In addition, a program 53H for measurement control and the like are included. Of course, each of the above programs can be composed of one execution module (or execution file), but any number of programs can be composed of one execution module, or all can be composed of a single execution module. Is possible. What kind of configuration is to be determined may be determined based on an operating system, a development language, or the like.
[0034]
The alignment setting / correction program 53A is a program for correcting a shift in the installation position of the object as will be described later.
[0035]
The display data creation program 53B can display the first image data 51B stored in the memory 41D on the display screen of the display 43 by subjecting the first image data 51B to a predetermined number-of-pixels reduction process for each pixel. This is a program for creating the second image data 51D of the number of pixels and storing it in the memory 41D, thereby realizing display data creation means. Here, a multi-scan display capable of displaying VGA (640 × 480), SVGA (1024 × 768), and XGA (1280 × 1024) is used as the display 43. The display data creation program 53B, by default, performs a predetermined pixel number reduction process such as a thinning process for every 10 × 10 pixels (ie, 100 pixels) in the first image data 51B of 6000 × 6000 pixels, or The second image data 51D (360 KB) of 600 × 600 pixels that can be displayed on the display screen of the display 43 by performing the averaging process of the gradation of the 100 pixels is generated. It can be changed according to the display mode of the display 43.
[0036]
The display control program 53D transfers the image data on the memory 41D to the video interface 41J and sends a control command to the video interface 41J to display an image based on the second image data 51D after the pixel number reduction processing on the display 43. And an image formed by a part of the first image data 51B is displayed in a predetermined region on the display screen simultaneously with or separately from the image formed by the second image data 51D. The display control means is constituted by this program.
[0037]
The program 53F for inputting measurement conditions is displayed in a state where a measurement condition menu (displayed by a task bar, a tool bar, a tool box, etc.) and an image of the image data in the memory 41D are displayed on the display screen of the display 43. In order to input a measurement condition, a position and a region on an image displayed on the display screen of the display 43, etc. by detecting the position of the mouse cursor (or graphic cursor or cursor) by operating the mouse 42b (or keyboard 42a). It is a program. In the present embodiment, measurement conditions including at least an indication of an area to be measured with respect to the image displayed on the display screen of the display 43 are determined by the mouse 42b (and the keyboard 42a) and the program 53F for inputting measurement conditions. A measurement condition input means for inputting is realized, and the measurement condition input means inputs a measurement condition including an instruction of a region to be measured for an image based on the first image data 51B displayed on the display screen of the display 43. It is also used for
[0038]
The measurement control program 53H is a program for performing measurement processing in accordance with the measurement condition input for the region designated by the measurement condition after the measurement condition is input by the measurement condition input means. The contents of processing include edge detection (contour detection), shape recognition, length measurement, area measurement, error detection, and the like. In addition to the case where the displayed image is based on a part of the first image data and the case where the displayed image is based on the second image data, in response to the input of the measurement condition, the first region of the area designated by the measurement condition is displayed. Measurement processing is performed using one image data. As a result, a measurement control unit that performs measurement processing according to the measurement condition using the first image data 51B in the region instructed by the measurement condition is realized. In the measurement control program 53H, after recognizing the schematic shape of the object 27 based on the second image data 51D, the first image of the area instructed by the measurement condition according to the measurement condition is measured. This can be performed using the data 51B.
[0039]
Next, the overall operation of the image measuring apparatus according to the present embodiment configured as described above will be described.
[0040]
First, the object 27 is placed on the stage 21 </ b> B, the input device of the computer 40 is operated, and imaging of the object 27 is started. At this time, the line sensor 21H is ready for imaging by the control signal from the computer 40, and the stage 21B moves at a constant speed. The imaging position of the line sensor 21H moves within the imaging range, and an image for one line of the object 27 is taken by the line sensor 21H at every predetermined distance interval of the movement. The image signal for one line is A / D converted by the imaging control unit 23F, output to the host computer 40 as image data, and stored in the memory of the computer main body 41. When the position of the line sensor 21H reaches the opposite end from the start, the scanning imaging of the object 27 is completed, and the first image data 51D corresponding to the two-dimensional image of the object 21 is stored in the memory 41D of the computer main body 41. Is remembered.
[0041]
FIG. 2 shows a state until the first image data 51B obtained by reading the image of the object 27 with the line sensor 21H is stored in the memory 41D of the computer 40 via the image input board 41R. . The image input board 41R includes two 2 megabyte buffer memories 41S, for a total of 4 megabytes, and one line of image data 51B obtained by imaging with the line sensor 21H is one of the buffer memories 41S (for example, the buffer memory (1 )). When this one buffer memory 41S is filled with 2 megabytes of the first image data, the image data 51B is stored in the other (for example, buffer memory (2)) of the buffer memory 41S. The full image data 51B of the buffer memory 41S is block-transferred to the memory 41D via the PCI bus 41F. At this time, the transfer speed is 30 MHz or higher, and in order to secure this speed, the microprocessor 41B does not perform other jobs other than the transfer.
[0042]
With this high transfer rate, the transfer to the memory 41D is completed before the other buffer memory for storing the image data 51B for one line obtained by imaging with the line sensor 21H becomes full. When it is full, the buffer memory for storing the image data 51B is switched. By repeating the switching of the buffer memory, that is, by interleaving the buffer memory 41S, the transfer of 36 megabytes of image data 51B obtained by imaging with the line sensor 21 is completed. As a result, the transfer to the memory 41D is performed almost simultaneously with the reading of the image of the object 27 by the line sensor 21H, and the transfer to the memory 41D is completed in the time required to complete the reading of the image of the object 27 (about 2.5 seconds). Also finish.
[0043]
When the transfer of the image data 51B to the memory 41D is completed, the number of pixels is reduced by the program 53B for creating display data with respect to the first image data 51B of 6000 × 6000 pixels stored in the memory 41D. The second image data 51D that can be displayed on the display 43 is created and stored in the memory 41D, and the second image data 51D on the memory 41D is stored in the video interface 41J by the program 53D for display control. And an image based on the second image data 51D is displayed in a predetermined area (window) of the display screen of the display 43.
[0044]
Then, while viewing the entire image of the object based on the second image data 51D, it is possible to substantially indicate the location where the object image should be measured. In accordance with the measurement condition menu, the instructed position is replaced with a measurement location in the first image data 51B which is a raw image, and image processing and measurement processing are performed on the first image data 51B.
[0045]
In addition, when the object 27 has a fine structure and the measurement position cannot be accurately indicated in the second image having a small number of pixels, the vicinity of the place where the second image is to be measured is indicated by the mouse 42b. The first image based on the first image data of the object 27 corresponding to the portion in the vicinity of the designated location is enlarged and displayed in a predetermined area (window) 43A by the display control program 53D. In this case, if a plurality of locations are indicated, the first image of the object 27 in the vicinity of the specified location is enlarged and displayed in a separate window. For this reason, the mouse 42b, the keyboard 42a, and the program 53F for inputting the measurement conditions are used to specify the position (or region) on the image displayed on the display screen, and to input / specify the measurement conditions such as the measurement contents. This can be performed on the image of the object 27 displayed enlarged on 43A or the like. Then, in accordance with the input measurement condition, the measurement condition input by using the first image data corresponding to the image displayed on the window is instructed by the program 53H for measurement control. Measurement processing corresponding to the area is performed.
[0046]
Thus, in the present embodiment, when an image having a larger number of pixels than the number of pixels that can be displayed on the display screen of the display 43 is handled, the first image data 51B having a larger number of pixels than the number of pixels that can be displayed on the display screen. The second image data 51D having the number of pixels that can be displayed on the display screen is generated by subjecting the first image data 51D to a predetermined number of pixels for each pixel having a certain number of pixels, and generating a measurement instruction. Therefore, the image display method of displaying on the display screen is adopted. Therefore, the entire image of the object 27 can be displayed on the display screen by the second image data 51D, and the entire image of the object 27 can be easily grasped.
[0047]
In addition, for inputting the measurement conditions, the entire image of the object 27 displayed on the display screen is input with the measurement conditions including the instruction of the area to be measured by operating the input device (mouse 42b) of the computer 40. This program 53F can be easily performed.
[0048]
Furthermore, since the amount of data handled becomes small, the operation becomes very fast. For example, if the first image data of a raw image of 6000 × 60000 = 36000000 (36 MB) is subjected to pixel number reduction processing to generate second image data of 600 × 600 = 360000 (360 KB), the amount of data handled Is reduced to 1/100, and the processing time is reduced to one hundredth.
[0049]
By the way, when there are multiple objects of the same shape to be measured and the same measurement is repeated, in order to improve operability and measurement efficiency, the first object is imaged and then teaching is performed on the first object. It is desirable to create data (measurement procedure file) and perform measurement processing such as edge detection using the teaching data when measuring the second and subsequent objects.
[0050]
FIG. 3 shows a schematic flow when teaching data is created and an edge is detected for the first object 27. Hereinafter, teaching data creation and the like will be briefly described with reference to FIG.
[0051]
First, when the image 43B of 6000 × 6000 pixels of the object 27 is captured as the first image data 51B as described above, the first of 36000000 (6000 × 6000) pixels is obtained by the program 53B for creating display data. The image data 51 </ b> B is subjected to pixel number reduction processing such as thinning (sampling), and second image data 51 </ b> D of an image 43 </ b> D having 360,000 (600 × 600) pixels is created. Is displayed.
[0052]
Therefore, first, a predetermined portion of the object is measured in order to set the reference installation position of the object prior to the creation of teaching data. This is called alignment.
[0053]
More specifically, when an operator operates an input device of the computer 40 and inputs alignment settings via the alignment setting / correction program 53A, a program 53F for inputting measurement conditions is started by the microprocessor 41B. .
[0054]
By operating the mouse 42b of the computer 40 while viewing the second image 43D based on the second image data displayed on the screen, the measurement conditions for measuring the predetermined portion in an interactive manner with the display screen are input. To do. Next, the measurement control program 53H is activated and, as described above, the measurement result including the coordinate value of the predetermined location is obtained using the first image data. Then, information on the work coordinate system set on the object 27 based on the measurement result is stored as alignment data.
[0055]
Next, the program 53F is activated again, and measurement conditions are input to the original measurement location of the object in the same manner as described above. When the measurement condition input ends, the coordinates of the stage 21B at that time, the caliper displayed on the screen (the center position of edge detection, the normal direction of the edge, and the mark indicating the range of the edge detection target in the vicinity of the position) ) Setting information (initial setting of edge detection) and data when the object 27 is imaged such as the magnification of the objective lens 21F and illumination conditions (illumination method, brightness, etc.) are configured as teaching data, The measurement procedure file 51F is stored in the hard disk 41P. At this time, the data regarding the position is stored as a value in the work coordinate system. The above work is called teaching.
[0056]
Here, the stage 21B is a predetermined object or a predetermined object when a plurality of objects are installed on the stage or when the object is very large and difficult to fit in one image. Is moved to fit in the image. This moved position is stored as a coordinate system.
[0057]
Then, a program 53H for measurement control is started by the microprocessor 41B. By this program 53H, edge detection is performed using the first image data in accordance with the various conditions recorded in the measurement procedure file 51F, and the contour of the object is detected. This result is displayed in a predetermined area of the display 43 screen. If there is no point to be corrected in the result displayed on this screen, the operation is terminated. If there is a point to be corrected, re-teaching is input, and the operation in the program 53F for inputting measurement conditions is performed. Returning to the step, the measurement condition is input again and the above-described operation is repeated. The stored teaching data is updated to the data at the time of remeasurement.
[0058]
When it is necessary to move the stage 21B, the stage 21B is moved, and measurement conditions are input to the second image at that time.
[0059]
As described above, the display for instructing the measurement location for setting the reference installation position of the object is also processed using the second image data 51D with a small data amount, so the processing speed is increased. .
[0060]
FIG. 4 schematically shows a flow when measurement processing (edge detection) is performed on the second and subsequent objects. Hereinafter, an example of the measurement process for the second and subsequent objects will be described with reference to FIG.
[0061]
When the operator operates the input device of the host computer 40 and inputs an alignment correction command, first, the measurement procedure file 51F is read, and the magnification of the objective lens 21F and the positioning of the stage 21B are automatically determined according to the measurement procedure recorded therein. , The image 43B ′ of 6000 × 6000 pixels of the second object (hereinafter referred to as “object 27 ′” for convenience) is converted into the first image data (hereinafter referred to as “first image data 51B for convenience”). '). Subsequently, the first image data 51B ′ having 36000000 (6000 × 6000) pixels is subjected to pixel number reduction processing such as thinning by the program 53B for display data creation, and the image 43D ′ having 360000 (600 × 600) pixels. The second image data (hereinafter referred to as “second image data 51D ′” for convenience) is created, and the image 43D ′ is displayed on the display screen of the display 43.
[0062]
Next, a program 53F for inputting measurement conditions is started by the microprocessor 41B, whereby the operator sees the second image 43D ′ by the second image data 51D ′ displayed on the screen, and the mouse of the computer 40 42b is operated to input measurement conditions such as an indication of a measurement position for a predetermined portion of the object measured for alignment setting during the teaching.
[0063]
When the input of the measurement conditions is finished, the microprocessor 41B activates the program 53H for measurement control, and the predetermined location is measured using the first image data at the predetermined location according to the input measurement conditions. Is done. Based on the measurement result, a workpiece coordinate system similar to that at the time of the alignment setting is obtained. The amount of deviation between the workpiece coordinate system set at the time of the alignment setting and the workpiece coordinate system obtained here corresponds to the amount of deviation of the installation position of the second object relative to the reference installation position of the object.
[0064]
Next, the measurement procedure file 51F previously created based on the alignment correction result is corrected by the program 53H (more specifically, according to the deviation amount of the two workpiece coordinate systems obtained above, the measurement procedure file 51F in the measurement procedure file 51F is corrected. Measurement procedure file 51F ′, which is translated and rotated to the coordinates of the second image data 51D, is created and stored in the hard disk 41P.
[0065]
Next, the position and direction of the caliper are corrected based on the setting for starting edge detection according to the corrected measurement procedure recorded in the measurement procedure file 51F ′ by the program 53H, and edge detection is performed using the first image data. The contour of the second object 27 'is detected. This result is displayed in a predetermined area of the display 43 screen.
[0066]
In FIG. 4 described above, the alignment correction is performed using the mouse 42b after imaging, but the measurement conditions at the time of the alignment setting are stored as a part of the measurement procedure file 51F and determined on the stage 21B. By using a positioning jig for placing the target object at a position, it is possible to suppress the positional deviation of the target object and to select processing for automatically performing alignment correction measurement. FIG. 5 conceptually shows the flow of processing in that case.
[0067]
In the case of FIG. 5, first, when placing the second object 27 ′ on the stage 21 </ b> B, the position is set to be approximately the same as the first object 27 using a positioning jig.
[0068]
When the operator instructs the computer 40 to start measurement, a previously created measurement procedure file 51F is read, and the magnification of the projection lens 21F and the positioning of the stage 21B are automatically set according to the contents of the measurement procedure. Later, an image 43B ′ of 6000 × 6000 pixels of the second object 27 ′ is captured as the first image data 51B ′. Then, by the display data creation program 53B, the first image data 51B ′ having 36000000 (6000 × 6000) pixels is subjected to pixel number reduction processing such as thinning, and the second image having 360000 (600 × 600) pixels. Data 51D ′ is created, and an image 43D ′ corresponding to the data 51D ′ is displayed on the display screen of the display 43.
[0069]
Next, alignment correction is performed. In this case, an instruction of a measurement position for alignment (see dotted line 44 in FIG. 5) and other measurement conditions that are stored in advance in the measurement procedure file and other measurement conditions are input.
[0070]
Therefore, after the image 43D 'is displayed on the display screen of the display 43, the program 41H for measurement control is started by the microprocessor 41B. By this program 53H, measurement is performed under the measurement conditions read from the measurement procedure file 51F. The subsequent steps are the same as in FIG.
[0071]
Furthermore, the same pattern as the figure (or pattern) in the image of the object can be stored in the memory 41D in advance, and the measurement conditions can be set to automatically perform alignment correction by performing a search based on this pattern. It is. FIG. 6 conceptually shows a processing flow in the case of the setting.
[0072]
In this case, in the creation of teaching data, the pixel number reduction process such as thinning out is performed by the program 53B for creating display data from the first image data 51B obtained by capturing the 36000000 (6000 × 6000) pixel image 43B of the object 27. The second image data 51D of an image 43D having 360,000 (600 × 600) pixels is created, and the image 43D is displayed on the display screen of the display 43.
[0073]
Therefore, a predetermined range of the object is designated in order to set the reference installation position of the object by operating the mouse 42b of the computer 40 while viewing the displayed image 43D. The predetermined range may be a plurality of locations as necessary. The second image data corresponding to the designated range is stored in the memory 41D as part of the measurement procedure file 51F as the pattern comparison image data 43H. In FIG. 6, one range including the entire object 27 is designated as the predetermined range.
[0074]
The second image data may be CAD data indicating the outer shape of a predetermined location.
[0075]
Next, the second object 27 'is placed on the stage 21B. After the measurement procedure file 51F is read and the setting according to the content of the measurement procedure is automatically performed as described above, the 6000 × 6000 pixel image 43B ′ of the second object 27 ′ is the first image data. It is taken in as 51B ′. Then, by the display data creation program 53B, the first image data 51B ′ having 36000000 (6000 × 6000) pixels is subjected to pixel number reduction processing such as thinning, and the second image having 360000 (600 × 600) pixels. Image data 51D ′ is created, and an image 43D ′ corresponding thereto is displayed on the display screen of the display 43.
[0076]
Next, based on the alignment correction setting, the predetermined pattern comparison image data 43H is compared with the second image data 51D ′ of the second object 27 ′ by the measurement control program 53H, and pattern matching is performed. Processing is performed, and the amount of translation and the rotation angle when the patterns match are obtained. This corresponds to the shift amount of the workpiece coordinate system. Next, a measurement procedure file 51F ′ obtained by correcting the measurement procedure file 51F created in advance using the above-described deviation amount (parallel movement amount, rotation angle) is created by the measurement control program 53H and stored in the hard disk 41P. .
[0077]
Thereafter, according to the measurement procedure of the measurement procedure file 51F ′ corrected by the program 53H, the position of the caliper is corrected by the setting of the start of edge detection, the edge detection is performed using the first image data, and the second object. 27 'contour is detected. This result is displayed in a predetermined area of the display 43 screen.
[0078]
In addition, after performing the alignment correction by pattern matching, you may make it perform the alignment correction further demonstrated in FIG. 3, FIG. Even if the installation position / posture of the second and subsequent objects are greatly different from the reference installation position, accurate alignment correction can be performed.
[0079]
In addition, it is also possible to select a process of recognizing a rough figure by performing image processing such as labeling using second image data with a small data amount.
[0080]
When an image of the second image data is displayed, if an instruction for a geometric shape to be measured is input by operating the mouse 42b and using the measurement condition input program 53F, a program for measurement control Shape by measurement processing such as labeling using the second image data by 53H (detecting pixels constituting a closed loop such as a rectangle or a circle in the image and assigning different identification codes to the image data of each pixel). Extraction is performed, and the size, position, and orientation of the shape are measured using the first image data corresponding to the pixel according to the input measurement condition.
[0081]
For example, when “circle” is designated as the geometric shape to be measured and this shape is measured, the circumference, area, etc. of the closed loop labeled using the second image data 51D are calculated. Then, the roundness of each closed loop is obtained from the obtained circumference and area, and a circle can be extracted from the image by selecting a closed loop having the obtained roundness of a predetermined value or less. At this time, since the diameter of the circle can also be obtained, it is possible to extract only a circle having a predetermined diameter range by including the diameter range in the indication of the geometric shape to be measured. Then, a highly accurate measurement is performed by performing the following measurement process using the first image data while referring to the extracted closed loop (circle) identification code and the coordinates of each pixel to which the identification code is attached. Results are obtained.
[0082]
FIG. 7 shows an example of an image (a) based on the second image data 51D and an image (b) based on the first image data 51B.
[0083]
When an image of the second image data 51D is instructed by the mouse 42b with the shape of a “circle”, and this instruction content is input as a labeling and measurement condition via the measurement condition input program 53F, measurement control is performed. 10 circles as shown in FIG. 7A are extracted using the second image data with a small number of pixels by the program 53H for the purpose, and for example, 1, 2,... The identification code is attached. In FIG. 7 (a), for convenience, identification codes given to the respective pixels constituting each circle are shown accompanying the respective circles.
[0084]
Then, according to a predetermined measurement method with reference to the position and size of the circle, the position of the caliper for measuring the circle is calculated. Then, the caliper (see the arrow in FIG. 5B) is displayed on the display screen of the display 43 together with the image based on the first image data having a large number of pixels via the display control program 53D. In this case, when a specific circle identification code, for example, 6 is input, a caliper may be set only for the circle corresponding to this identification code.
[0085]
Even in such a case, in the present embodiment, the processing speed can be increased by calculating the labeling and caliper setting positions using the second image data with a reduced number of pixels. Then, the edge coordinates at the caliper position of the first image are detected using the first image data, and the diameter and center coordinates of the circle are obtained from the detected coordinates. As described above, when accuracy such as a rough indication of the measurement location is not required, efficient and quick processing is performed by using the second image data and measuring with high accuracy using the first image data having a large number of pixels. It is carried out.
[0086]
Further, by using the position / shape of the figure obtained by quickly recognizing the approximate shape by labeling, the moment, the center of gravity, the circumference, the area, etc. of the shape can be quickly obtained. Therefore, it can also be used as a measure of measurement in pattern matching including rotation, pattern search, best fit processing in error evaluation of contour shape, and the like.
[0087]
In the above embodiment, the case of using a mouse for inputting measurement conditions has been described. However, it is needless to say that a keyboard may be used, and various pointing devices such as a trackball and a light pen may be used.
[0088]
In the above-described embodiment, the case of using a line sensor has been described as an example of capturing and capturing an image with a large number of pixels. However, the present invention is not limited to this, and a two-dimensional CCD having a large number of pixels such as for high-definition is used. Also good.
[0089]
Furthermore, although the case where the line sensor 21H and the object 27 are moved relative to each other by the movement of the stage 21B has been described in the above embodiment, the present invention is not limited to this, and a fixed stage for placing the object instead of the stage 21B. The line sensor may be configured to be movable so that the line sensor and the object are moved relative to each other, or both the stage and the line sensor may be moved. In addition, as in the above-described embodiment, the relative movement may be realized by rotating either one of the object and the line sensor in a linear manner without rotating the object. In such a case, it is necessary to measure the position by measuring the angle of the rotary encoder as the encoder.
[0090]
In the above embodiment, the case where the pixel number reduction process is performed by software has been described. However, the present invention is not limited to this, and the second image data may be generated using the digital signal processor 41T or other hardware. Good. Further, the second image data may be created in parallel with the transfer of the first image data from the image input board 41R to the memory 41D.
[0091]
【The invention's effect】
  As explained above,First image measuring apparatus of the present inventionAccording to the above, the second image data having the number of pixels that can be displayed on the display screen by subjecting the first image data stored in the memory by the display data creating means to a predetermined pixel number reduction process for each predetermined number of pixels. Since the created second image data is displayed on the display screen by the display control means, at least the region to be measured with respect to the image displayed on the display screen by the measurement condition input means. It becomes easy to input measurement conditions including instructions. Therefore, even when handling a large amount of image data exceeding the display resolution of the display device, there is an unprecedented advantage that it is possible to easily instruct measurement of the image of the object.
[0095]
  Also,Second image measuring apparatus of the present inventionAccording to, TotalThe effect that it is possible to automatically extract the shape and automatically set the measurement condition of the shape simply by specifying the shape to be measured by the measurement condition input meansButis there.
[0096]
  Image measuring method of image measuring apparatus of the present inventionAccording to the present invention, it is easy to specify the area to be measured for the entire image of the object displayed on the display screen.effective.
[Brief description of the drawings]
FIG. 1 is a diagram schematically showing an overall configuration of an image measurement apparatus according to an embodiment.
FIG. 2 is a diagram illustrating a state in which first data obtained by reading an image of an object with a line sensor is stored in a memory 41 of a computer via an image input board.
FIG. 3 is a diagram schematically showing a flow when creating teaching data and performing edge detection processing on the first object.
FIG. 4 is a diagram schematically showing a flow of measurement processing for second and subsequent objects.
FIG. 5 is a diagram schematically showing a process flow when a process for automatically performing alignment using a positioning jig is selected.
FIG. 6 is a diagram schematically showing a flow of processing in a case where alignment is automatically performed by pattern matching.
FIG. 7 is a diagram illustrating an example of an image (a) based on second image data and an image (b) based on first image data.
[Explanation of symbols]
25 Image capture unit
27 Object
41D memory
42a Keyboard (part of measurement condition input means)
42b Mouse (part of measurement condition input means)
43 Display (display device)
51B First image data
51D second image data
53B Display data creation program (display data creation means)
53D Display control program (display control means)
53F Measurement condition input program (part of measurement condition input means)
53H Program for measurement control (measurement control means)

Claims (4)

An image measurement device that performs a predetermined measurement process using an image displayed on a display screen of a display device,
An image capturing unit that captures an image of an object and captures first image data having a number of pixels larger than the number of pixels that can be displayed on the display screen;
A memory for storing the first image data;
A display that generates a second image data having a number of pixels that can be displayed on the display screen by subjecting the first image data stored in the memory to a predetermined pixel number reduction process for each pixel having a certain number of pixels. Data creation means;
Display control means for displaying on the display screen a second image based on the second image data created by the display data creating means;
Have a; a measurement condition input means for inputting measurement conditions including an indication of a region to be at least measured against the image displayed on the display screen
An image measurement device that performs measurement using the first image data stored in the memory, based on the measurement condition input during display of the second image .   The display control means displays a part of the first image based on the first image data on the display screen simultaneously with or separately from the second image according to the measurement condition, and The image measurement apparatus according to claim 1, wherein the condition input unit is also used to input the measurement condition for the first image displayed on the display screen. An image measurement device that performs a predetermined measurement process using an image displayed on a display screen of a display device,
An image capturing unit that captures an image of an object and captures first image data having a number of pixels larger than the number of pixels that can be displayed on the display screen;
A memory for storing the first image data;
A display that generates a second image data having a number of pixels that can be displayed on the display screen by subjecting the first image data stored in the memory to a predetermined pixel number reduction process for each pixel having a certain number of pixels. Data creation means;
Display control means for displaying on the display screen a second image based on the second image data created by the display data creating means;
Measurement condition input means for inputting measurement conditions including at least an instruction of a region to be measured with respect to the image displayed on the display screen;
When the shape to be measured by the measuring condition input unit is instructed, for the previous SL by using the second image data to extract the appropriate shape by performing image processing for shape extraction, to be measured shape a measurement control unit for setting the measurement conditions according to the measurement method is previously stored; images measuring device with a. An image display method for an image measurement device that handles an image having a larger number of pixels than the number of pixels that can be displayed on a display screen of a display device,
A first step of capturing first image data having a larger number of pixels than the number of pixels that can be displayed on the display screen and storing the first image data in a memory ;
The first image data is subjected to a predetermined pixel number reduction process for each pixel having a certain number of pixels to generate second image data having the number of pixels that can be displayed on the display screen, and the second image data for measurement instructions . A second step of displaying a second image based on the image data on the display screen ;
An image display method for an image measurement apparatus, comprising : a third step of performing measurement using the first image data stored in the memory based on a measurement condition input during display of the second image. .

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