JP3893070B2 - Alignment apparatus and alignment method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an alignment apparatus and an alignment method used for aligning optical components such as optical fibers and optical lenses.
[0002]
[Prior art]
In recent years, communication technology using optical fibers has become widespread. Here, in order to perform long-distance signal transmission using an optical fiber, it is necessary to align the optical fiber components and connect the optical fiber components by welding or the like so that the bonding loss between the optical fibers is reduced.
[0003]
Such optical fiber component alignment, for example, alignment of two optical fiber components, is achieved by fixing each fiber component to the tip of a motor-driven stage having multiple degrees of freedom and moving the stage. Align the optical fiber parts. Specifically, two optical fiber components are separated by a predetermined minute interval, and one or both of the stages are moved while passing through the two optical fiber components while measuring the amount of light passing through the two optical fiber components. A position where the amount of light is maximized is searched, and the two optical fiber components are brought into contact with each other at that position and welded to fix the two optical fiber components.
[0004]
[Problems to be solved by the invention]
However, when such an alignment method is used, in order to perform alignment in a state where the optical fiber components are separated from each other, and then perform surface alignment, a slight misalignment occurs when the optical fiber components are moved. there is a possibility. As a result, it is difficult to minimize the joining loss between the optical fiber components, and it is difficult to determine the optimum welding position and a considerable time is required.
[0005]
For this reason, it is preferable that the alignment of the optical fiber components is performed in a state where the optical fiber components are aligned with each other. However, in the conventional alignment apparatus, two optical fiber components that are aligned and have surface friction exist. When the relative movement is performed with a certain force, a stick-slip phenomenon occurs between the contact surfaces, and it is difficult to stably move the optical fiber component minutely.
[0006]
In addition, in the conventional alignment apparatus, when the joint surface of the optical fiber component is inclined, the angle of the optical fiber component must be changed so that the joint surfaces are surely aligned with each other. The adjustment mechanism needs to be able to finely adjust the angle of the joint surface, which causes a problem in that the structure of the angle adjustment mechanism becomes complicated and the alignment apparatus becomes large.
[0007]
The present invention has been made in view of such circumstances, and an alignment device capable of easily adjusting the angle of the component and aligning the component in a state where the components are face to face. And an alignment method. Another object of the present invention is to provide an alignment apparatus and an alignment method capable of aligning parts in a short time. Furthermore, an object of the present invention is to provide an alignment apparatus that can perform a small and accurate alignment.
[0008]
[Means for Solving the Problems]
That is, according to the first aspect of the present invention, the third component is sandwiched between the first component and the second component, the contact surface between the first component and the third component, and the first component. The positioning of the first, second, and third parts, where one of the contact surfaces of the second part and the third part is a curved surface and the other is a flat surface, is performed by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element. An alignment device that uses a shocking inertial force to be generated,
First holding means for holding the first component;
Second holding means for holding the second component;
The first component and the second component so that a predetermined frictional force is generated on the contact surface of the first component and the third component and the contact surface of the second component and the third component. A pressing mechanism that applies a predetermined pressing force between
A piezoelectric element or a magnetostrictive element, and an impact inertia force generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element is applied to the first, second, and third parts, the first holding means, and the first holding means; An actuator applied to at least one of the two holding means;
Comprising
The first, second, and third parts are aligned by sliding any one of the first, second, and third parts that are in contact with each other by an impact inertial force applied by the actuator. An alignment device is provided that is characterized in that it performs.
[0009]
According to a second aspect of the present invention, a third component is sandwiched between the first component and the second component, a contact surface between the first component and the third component is a curved surface, and Impact inertia force generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element when aligning the first, second and third parts whose contact surfaces between the second part and the third part are flat. An alignment apparatus that performs using
First holding means for holding the first component;
A stage portion having an X stage, a Y stage, a θx stage, and a θy stage;
A second holding means that is held on the upper surface of the stage portion and holds the second component;
The first component and the second component so that a predetermined frictional force is generated on the contact surface of the first component and the third component and the contact surface of the second component and the third component. A pressing mechanism that applies a predetermined pressing force between
The four stages constituting the stage unit are arranged so as to be able to be beaten individually, have a piezoelectric element or a magnetostrictive element, and each of the shock inertial forces generated by the rapid expansion and contraction of the piezoelectric element or the magnetostrictive element is described above. An actuator for moving each stage in a predetermined direction in addition to the stage;
Comprising
The second part and the third part are aligned by moving the X stage and the Y stage to shift the relative positions of the second part and the third part,
The first part and the third part are aligned by moving the θx stage and the θy stage to shift the relative positions of the first part and the third part. An alignment device is provided.
[0010]
According to the third aspect of the present invention, a third component is sandwiched between the first component and the second component, the contact surface between the first component and the third component, and the second component. Impact inertia force generated by steep expansion and contraction of the piezoelectric element or the magnetostrictive element when aligning the first, second and third parts whose contact surfaces of the part and the third part are curved surfaces having different curvatures. An alignment apparatus that performs using
First holding means for holding the first component;
A stage unit having first and second θx stages having different curvatures and first and second θy stages having different curvatures;
A second holding means that is held on the upper surface of the stage portion and holds the second component;
The first component and the second component so that a predetermined frictional force is generated on the contact surface of the first component and the third component and the contact surface of the second component and the third component. A pressing mechanism that applies a predetermined pressing force between
The four stages constituting the stage unit are arranged so as to be able to be beaten individually, have a piezoelectric element or a magnetostrictive element, and each of the shock inertial forces generated by the rapid expansion and contraction of the piezoelectric element or the magnetostrictive element is described above. An actuator that moves in a predetermined direction in addition to the stage;
Comprising
By moving the first θx stage and the first θy stage to shift the relative positions of the second component and the third component, the second component and the third component are moved. Alignment is done,
By moving the second θx stage and the second θy stage to shift the relative positions of the first component and the third component, the first component and the third component are moved. An alignment device is provided that is characterized in that alignment is performed.
[0011]
According to the fourth aspect of the present invention, the third optical component is sandwiched between the first optical component and the second optical component, and the contact surface between the first optical component and the third optical component. Is a curved surface, and the contact surface of the second optical component and the third optical component is a flat surface. An alignment device that uses the shocking inertial force generated by
First holding means for holding the first optical component;
A stage portion having an X stage, a Y stage, a θx stage, and a θy stage;
A second holding means that is held on the upper surface of the stage unit and holds the second optical component;
The first optical component and the first optical component such that a predetermined frictional force is generated between the contact surface of the first optical component and the third optical component and the contact surface of the second optical component and the third optical component; A pressing mechanism that applies a predetermined pressing force to the second optical component;
The four stages constituting the stage unit are arranged so as to be able to be beaten individually, have a piezoelectric element or a magnetostrictive element, and each of the shock inertial forces generated by the rapid expansion and contraction of the piezoelectric element or the magnetostrictive element is described above. An actuator that moves in a predetermined direction in addition to the stage;
The relative positions of the second component and the third component are shifted by moving the X stage and the Y stage, and the first component and the θy stage are moved by moving the θx stage and the θy stage. Control for finding the state of the first, second, and third optical components by shifting the relative position of the third component to maximize the amount of light transmitted through the first, second, and third optical components. Equipment,
An alignment device is provided.
[0012]
In the alignment apparatus according to the third and fourth aspects, the first, second, and third optical components are maintained in a state where the contact states of the first, second, and third optical components are maintained. By providing a rotation mechanism that can rotate the lens around the optical axis, the first, second, and third optical components can be easily welded or the like with the first, second, and third optical components aligned. Two actuators are placed across the X stage in the X direction, two Y stages are placed across the Y direction, two actuators are placed across the θx stage in the X direction, and the θy stage is sandwiched in the Y direction. If two are arranged, each stage can be easily reciprocated in each direction.
[0013]
In the alignment apparatus according to the third aspect, two actuators are arranged so as to sandwich the first and second θx stages, and the first and second θy stages are sandwiched. If two are arranged, each stage can be easily reciprocated in each direction.
[0014]
In the alignment apparatus according to the first to fourth aspects, as an actuator, a piezoelectric element or a magnetostrictive element that generates a shocking inertial force by steep expansion and contraction, and a tip member that contacts an object to which the inertial force is applied A device having a preload mechanism that presses the tip member and the piezoelectric element or magnetostrictive element so that the tip member portion is pressed against the object with a predetermined force is preferably used. As the preload mechanism, for example, an air cylinder is preferably used, whereby the actuator can be easily positioned.
[0015]
According to the fifth aspect of the present invention, the third optical component is sandwiched between the first optical component and the second optical component, and the contact surface between the first optical component and the third optical component. Is an alignment method for aligning the first, second, and third optical components, wherein the first optical component is a curved surface, and the contact surface of the second optical component and the third optical component is a plane,
Holding the first optical component on a first holding means;
Holding in the second holding means of the second optical component;
The third optical component is sandwiched between the first optical component and the second optical component, and the first holding means is pressed against the second holding means with a predetermined force, thereby A predetermined frictional force is generated on the contact surface between the first optical component and the third optical component and on the contact surface between the second optical component and the third optical component, so that the first, second, second 3 holding the optical component;
While measuring the amount of light transmitted through the first, second, and third optical components, shock inertia generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element in the second component or the second holding means. A step of finding a position where the amount of light transmitted through the first, second, and third optical components is maximized by applying a force to shift the contact surface between the second optical component and the third optical component. When,
While measuring the amount of light transmitted through the first, second, and third optical components, shock inertia that is generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element in the first component or the first holding means. A step of finding a position where the amount of light transmitted through the first, second, and third optical components is maximized by applying a force to shift the contact surface between the first optical component and the third optical component. When,
There is provided an alignment method characterized by comprising:
[0016]
According to the sixth aspect of the present invention, the third optical component is sandwiched between the first optical component and the second optical component, and the contact surface between the first optical component and the third optical component. Is an alignment method for aligning the first, second, and third optical components, wherein the first optical component is a curved surface, and the contact surface of the second optical component and the third optical component is a plane,
Holding the first optical component on a first holding means;
Holding in the second holding means of the second optical component;
Holding the second holding means on the upper surface of a stage portion having an X stage, a Y stage, a θx stage, and a θy stage;
A third optical component is sandwiched between the first optical component and the second optical component, and the first holding means is pressed against the second holding means with a predetermined force, thereby A predetermined frictional force is generated on the contact surface between the first optical component and the third optical component and the contact surface between the second optical component and the third optical component, and the first, second, Holding the third optical component;
While measuring the amount of light transmitted through the first, second, and third optical components, an impact inertia force generated by a sudden expansion or contraction of a piezoelectric element or a magnetostrictive element is applied to either the X stage or the Y stage. In addition, the relative positions of the second component and the third component are shifted, and the first and second light amounts that are transmitted through the first, second, and third optical components are maximized. , Searching for the state of the third optical component;
While measuring the amount of light transmitted through the first, second, and third optical components, an impact inertia force generated by a sudden expansion or contraction of a piezoelectric element or a magnetostrictive element is applied to either the θx stage or the θy stage. In addition, the relative positions of the first component and the third component are shifted, and the first and second light amounts that are transmitted through the first, second, and third optical components are maximized. , Searching for the state of the third optical component;
There is provided an alignment method characterized by comprising:
[0017]
According to such an alignment apparatus and alignment method, since the components are brought into contact with each other by pressing, the angle adjustment when the components are brought into contact with each other can be easily performed. Further, by utilizing an inertial impact force generated by a piezoelectric element (particularly, a multilayer piezoelectric actuator) or a magnetostrictive element, it is possible to shift only a predetermined part in a state where the parts are face to face. This makes it possible to perform more accurate alignment as compared with the case where alignment is performed in a state where components are separated by a minute distance. Furthermore, by using such an alignment method, the components can be aligned in a short time. The alignment apparatus of the present invention has a feature that it is small compared with the conventional alignment apparatus.
[0018]
In the present invention, for example, when “the contact surface of the first component and the third component is a curved surface”, this is at least one member of the first component and the third component. Has a curved surface, and the curved surface is in contact with the other component, and it is not always necessary that the entire curved surface is in contact with the other component. Specifically, it is a case where a spherical surface is brought into contact with a spherical surface or a spherical surface having a different curvature is brought into contact, but the surface which contacts one member in the other member needs to be not a flat surface. Further, for example, in the case where “the contact surface of the second component and the third component is a flat surface”, both the second component and the third component have flat surfaces. Contact on a flat surface.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. Here, an alignment apparatus that aligns three optical components in a row and aligns these optical components so as to maximize the amount of light transmitted through these optical components will be described. FIG. 1 is a schematic plan view of the alignment apparatus 10, and FIG. 2 is a schematic side view thereof.
[0020]
The alignment device 10 aligns the three optical components 11a, 11b, and 11c. As shown in FIG. 2, the optical component 11c is disposed so as to be sandwiched between the optical component 11a and the optical component 11b.
[0021]
FIG. 3 is an explanatory diagram showing the structure of the optical components 11a to 11c in more detail. The optical component 11a includes a cylindrical component 61a and a cylindrical component 61b that is provided at the center of the cylindrical component 61a and that actually transmits light. These cylindrical parts 61a and cylindrical parts 61b are welded in advance and are integrated. A cylindrical part 61a contacts the optical part 11c. The contact surface of the cylindrical component 61b with the optical component 11c is processed into a substantially conical shape. Moreover, in the optical component 11c, the surface which contacts the cylindrical component 61c is a substantially spherical curved surface. The contact surface between the optical component 11b and the optical component 11c is a flat surface. The optical component 11b includes a cylindrical component 62a and a cylindrical component 62b that is provided at the center of the cylindrical component 62a and that actually transmits light. The cylindrical part 62a and the cylindrical part 62b are welded in advance and integrated.
[0022]
The alignment apparatus 10 includes a first chuck 12a that holds the optical component 11a, a second chuck 12b that holds the optical component 11b, an X stage 13, a Y stage 14, a θx stage 15, and a θy stage 16 in this order from the top. The stage unit 17 is configured to be stacked with each other, the two actuators 23a and 23b for striking the X stage 13, the two actuators 24a and 24b for striking the Y stage 14, and the θx stage 15 Two actuators 25a and 25b for hitting and two actuators 26a and 26b for hitting the θy stage 16 are provided.
[0023]
The first chuck 12a is held by an elevating / pressing mechanism 18, and the elevating / pressing mechanism 18 can press the first chuck 12a downward (Z direction) with a predetermined force. The second chuck 12b is held on the upper surface of the stage portion 17 (that is, the upper surface of the X stage 13). The first chucks 12a and 12b hold the optical components 11a and 11b firmly, for example, by a mechanical tightening force. The first chuck 12a holds a cylindrical part 61a constituting the optical part 11a, and the second chuck 12b holds a cylindrical part 62a constituting the optical part 11b. An air chuck (vacuum chuck) can also be used as the first chuck 12a and the second chuck 12b.
[0024]
The optical component 11c is placed on the optical component 11b held by the second chuck 12b, and the first chuck 12a holding the optical component 11a is lowered by the lifting / pressing mechanism 18, whereby the optical component 11a and the optical component 11a are optically moved. A predetermined frictional force is generated on the contact surface of the component 11c and the contact surface of the optical component 11b and the optical component 11c, and the optical components 11a to 11c are held. Since the optical component 11b and the optical component 11c are in contact with each other in a plane, the surface alignment between the optical component 11b and the optical component 11c is performed by a simple operation of placing the optical component 11c on the optical component 11b. Can be complicated and does not require an angle adjustment mechanism. In addition, the surface alignment between the optical component 11a and the optical component 11c can be performed by simply sliding the optical component 11a down, so that it is not necessary to perform complicated angle adjustment. Thus, the alignment apparatus 10 has a structure that can easily adjust the angle between the optical components 11a to 11c.
[0025]
The stage unit 17 is held on a rotary stage 19. The rotary stage 19 can rotate the stage portion 17 around the Z axis, but rotates the actuators 23a, 23b, 24a, 24b, 25a, 25b, 26a, and 26b (hereinafter referred to as “actuators 23a etc.”). There is no. As will be described later, after the alignment of the optical components 11a to 11c is completed, a process of performing welding between these components is performed. The rotary stage 19 is configured to attach the optical components 11a to 11c to Z during the welding. Used to rotate around the axis.
[0026]
The X stage 13 can slide only in the X direction, and the Y stage 14 can slide only in the Y direction. The θx stage 15 has a predetermined curvature corresponding to the curvature of the curved surface of the optical component 11c, and moves like a pendulum in the θx direction. The θy stage 16 has a predetermined curvature corresponding to the curvature of the curved surface of the optical component 11c, and moves like a pendulum in the θy direction.
[0027]
Note that the direction in which the θx direction is projected on the XY plane is shifted by 45 degrees from the X direction, and the direction in which the θy direction is projected on the XY plane is shifted by 45 degrees from the Y direction. However, the arrangement of the θx stage 15 and the θy stage 16 is not limited to such a form. For example, the θx stage 15 and the θy stage 16 can be held at positions where the θx stage 15 and the θy stage 16 are rotated in the XY plane at an angle of more than 0 degrees and less than 90 degrees from the state shown in FIG. .
[0028]
The actuator 23a strikes the side surface of the X stage 13 and slides the X stage 13 in the + X direction by a minute distance. The actuator 23b strikes the side surface of the X stage 13 and slides the X stage 13 in the -X direction by a minute distance. By arranging the two actuators 23a and 23b with the X stage 13 in between, for example, when the X stage 13 is moved too much in the + X direction, the operation of returning to the -X direction can be performed easily and quickly. it can.
[0029]
The actuator 23a includes a head (tip member portion) 31c, a piezoelectric element 31b, and an air cylinder 31a. The actuators 23b, 24a, 24b, 25a, 25b, 26a, and 26b also have the same structure as the actuator 23a. When the actuator 23 a strikes the X stage 13, the actuator 23 a gives the X stage 13 a shocking inertial force (hereinafter referred to as “impact force”) generated by the rapid expansion and contraction of the piezoelectric element 31 b. Thereby, the X stage 13 can be slid instantaneously for a minute distance.
[0030]
The head 31c can reliably apply the impact force generated in the piezoelectric element 31b to the X stage 13, and can increase the magnitude of the impact force generated in the piezoelectric element 31b. It is formed using a metal such as. As the piezoelectric element 31b, a multilayer piezoelectric element (multilayer piezoelectric actuator) is preferably used, and its expansion / contraction direction coincides with the longitudinal direction of the actuator 23a, that is, the X direction. The air cylinder 31 a presses the piezoelectric element 31 b and the head 31 c against the X stage 13 with a predetermined force so that the head 31 c contacts the side surface of the X stage 13. The X stage 13 is prevented from moving in the X direction by the pressing force of the air cylinder 31a. In place of the air cylinder 31a, an elastic body such as a spring or urethane rubber can be used.
[0031]
Similarly, the actuator 24a strikes the side surface of the Y stage 14 to give an impact force to the Y stage 14, and slides the Y stage 14 in the + Y direction by a minute distance. Further, the actuator 24b strikes the side surface of the Y stage 14 to give an impact force to the Y stage 14, and slides the Y stage 14 by a minute distance in the -Y direction. When the Y stage 14 slides in the Y direction, the X stage 13 also moves in the Y direction integrally with the Y stage 14.
[0032]
The actuators 23a and 23b are respectively held by the holding jig 34a, and the actuators 24a and 24b are respectively held by the holding jig 34b. The holding jig 34a and the holding jig 34b move the actuators 23a and 23b and the actuators 24a and 24b to a predetermined height so that the actuators 23a and 23b and the actuators 24a and 24b can strike the X stage 13 and the Y stage 14, respectively. Hold on.
[0033]
The actuator 25a strikes the side surface of the θx stage 15 to give an impact force to the θx stage 15, and slides the θx stage 15 in a pendulum shape for a minute distance in the direction of + θx. The actuator 25b strikes the side surface of the θx stage 15 to give an impact force to the θx stage 15, and slides the θx stage 15 in the direction of −θx by a minute distance. When the θx stage 15 is inclined, the X stage 13 and the Y stage 14 are also integrally inclined.
[0034]
The actuator 26a strikes the side surface of the θy stage 16 to give an impact force to the θy stage 16, and slides the θy stage 16 in a pendulum shape in the direction of + θy for a minute distance. Further, the actuator 26b strikes the side surface of the θy stage 16 to give an impact force to the θy stage 16, and slides the θy stage 16 by a minute distance in the direction of −θy. When the θy stage 16 is inclined, the X stage 13, the Y stage 14, and the θx stage 15 are also integrally inclined.
[0035]
The actuators 25a and 25b are respectively held by the holding jig 35a, and the actuators 26a and 26b are respectively held by the holding jig 35b. The holding jig 35a and the holding jig 35b move the actuators 25a and 25b and the actuators 26a and 26b to a predetermined height so that the actuators 25a and 25b and the actuators 26a and 26b can strike the θx stage 15 and the θy stage 16, respectively. Hold on.
[0036]
The actuators 25a, 25b, 26a, and 26b may be arranged according to the positions of the θx stage 15 and the θy stage 16, but the actuators 25a, 25b, 26a, and 26b must be held in a horizontal posture as shown in FIG. It is not a must. For example, it is also preferable to arrange the actuators 25a and 25b so that the head 31c is on the lower side and the air cylinder 31a is on the upper side so that the θx stage 15 can be hit from the tangential direction in the θx direction. . Furthermore, the θx stage 15 can also be slid in the θx direction by hitting a predetermined position (near the side surface on the θx direction side) of the θy stage 16 from above with the actuators 25a and 25b. The actuators 26a and 26b can be similarly arranged.
[0037]
In the alignment apparatus 10 having such a structure, for example, when the optical parts 11a to 11c are frictionally held, the actuators 23a and 23b are driven to slide the X stage 13 in the X direction. The second chuck 12b held by the second chuck 12b and the optical component 11b held by the second chuck 12b slide together with the X stage 13. At this time, the contact surface between the optical component 11b and the optical component 11c slips, and the optical component 11b is displaced in the X direction, so that the relative positions of the optical component 11b and the optical component 11c change. On the other hand, since the optical component 11a and the optical component 11c are in contact with the conical surface at the spherical surface, no slip occurs on the contact surface, and the relative positional relationship between the optical component 11a and the optical component 11c is maintained.
[0038]
Note that when the air cylinder 31a and the piezoelectric element 31b are gradually and continuously displaced and a static pressing force is applied to the X stage 13, the pressing force causes friction between the optical component 11b and the optical component 11c. Since the optical component 11b slides abruptly when the holding force is exceeded, minute alignment between the optical component 11b and the optical component 11c cannot be performed.
[0039]
Similarly, when the actuators 24a and 24b are driven and the Y stage 14 is slightly slid in the Y direction, the relative positional relationship between the optical component 11a and the optical component 11c does not change, and the optical component 11b and the optical component 11b are optically changed. The relative position of the component 11c is slightly shifted in the Y direction. In this way, the actuators 23a, 23b, 24a, and 24b are driven and the X stage 13 and the Y stage 14 are slightly slid to align the optical component 11b and the optical component 11c.
[0040]
On the other hand, when the optical parts 11a to 11c are frictionally held, for example, when the actuators 25a and 25b are driven to move the θx stage 15 in a pendulum shape, the relative positions of the optical parts 11b and 11c Since the optical component 11b and the optical component 11c both incline with the inclination of the θx stage 15 without changing the relationship, the optical component 11c slides in the θx direction on the contact surface between the optical component 11a and the optical component 11c.
[0041]
Similarly, when the actuators 26a and 26b are driven to move the θy stage 16 in a pendulum shape, the relative positional relationship between the optical component 11b and the optical component 11c does not change, and the optical component 11b and the optical component 11c are not changed. Is inclined, the optical component 11c slides in the θy direction on the contact surface between the optical component 11a and the optical component 11c. As described above, the actuators 25a, 25b, 26a, and 26b are driven to slide the θx stage 15 and the θy stage 16, whereby the optical component 11a and the optical component 11c can be aligned.
[0042]
Such an alignment apparatus 10 has a simple structure because it is not necessary to move the optical component by independently operating a plurality of mechanisms holding the optical component, unlike the conventional alignment apparatus. Miniaturization is easy.
[0043]
Next, the alignment work process of the optical components 11a to 11c using the alignment apparatus 10 will be described. FIG. 4 is an explanatory diagram showing a configuration of an alignment system 100 including the alignment device 10. Optical fiber cables 29a and 29b are attached to the optical parts 11a and 11b, respectively, and these optical fiber cables 29a and 29b are connected to a light amount measuring device 30 having a light emitting part and a light receiving part, and the optical parts 11a to 11c are connected. The amount of light passing through can be measured. The light quantity measuring device 30 is connected to the centralized control device 40 so that the transmitted light amount data measured by the light quantity measuring device 30 performing the relative position adjustment of the optical components 11a to 11c is sent to the centralized control device 40. It has become.
[0044]
The central control device 40 is connected to a first actuator driver 32a, a second actuator driver 32b, and a stage driver 32c. The first actuator driver 32a receives the signal from the central control device 40 and drives the actuators 23a, 23b, 24a, and 24b, and the second actuator driver 32b receives the signal from the central control device 40 and outputs the actuators 25a, 25b, and 26a. -Drive 26b. The stage driver 32c receives a signal from the central control device 40, and performs a rotation operation of the rotary stage 19, a lifting / lowering operation of the lifting / pressing mechanism 18, and a holding / release operation of the first chuck 12a and the second chuck 12b.
[0045]
After the alignment of the optical components 11a to 11c is completed, welding between the optical component 11a and the optical component 11c and between the optical component 11b and the optical component 11c is performed using a YAG laser. For this reason, control signals indicating the start / end of the alignment process in the alignment apparatus 10 and the welding process by the YAG laser apparatus 50 can be exchanged between the YAG laser apparatus 50 and the centralized control apparatus 40. It is like that.
[0046]
The central control device 40 is connected to a personal computer (PC) 41 in which software for controlling the central control device 40 is installed. An operator can operate the alignment system 100 from a personal computer (PC) 41.
[0047]
In such an alignment system 100, an appropriate processing flow is configured by combining four types of basic processing such as initialization processing, search, alignment, and YAG welding according to the shape of the optical components 11a to 11c, and the like. The optical components 11a to 11c are aligned according to this processing flow. Attachment of the optical components 11a to 11c to the alignment apparatus 10 and removal of the optical components 11a to 11c are performed manually by an operator or automatically by a robot. An instruction to start, interrupt, end, etc. of the basic process can be given from a personal computer (PC) 41.
[0048]
The initialization process is a process of returning various movable members provided in the alignment apparatus 10 to their original positions. For example, the elevating / pressing mechanism 18 is operated so as to retract the first chuck 12a upward, the stage portion 17 and the rotary stage 19 are returned to the state without deviation, and the first chuck 12a and the second chuck 12b are opened. The actuator 23a and the like are retracted from the stage unit 17, respectively. Normally, this initialization process is performed when the optical components 11a to 11c are taken out after the YAG welding is completed.
[0049]
In the state where the initialization of the alignment device 10 has been completed, the optical component 11b is held by the second chuck 12b, the optical component 11a is held by the first chuck 12a, and the optical component 11c is held by the optical component 11b. After being placed on top, the lifting / pressing mechanism 18 is operated to lower the first chuck 12a. Accordingly, the optical components 11a to 11c are frictionally held with a predetermined friction force.
[0050]
In most cases, the optical axes of the optical components 11a to 11c thus frictionally held do not match each other. In such a state, the amount of light transmitted through the optical components 11a to 11c (hereinafter, actually the optical components 11a to 11c). Is smaller than a predetermined value (hereinafter referred to as “determination transmitted light value PA”). Then, search and alignment are performed next. Search and alignment are continuously performed, and the positions of the optical components 11a to 11c where the transmitted light amount P exceeds the transmitted light value for determination PA are searched by these processes.
[0051]
The search includes an XY search performed in the XY direction and a θxθy search performed in the θxθy direction. Similarly, alignment includes an XY alignment performed after the XY search and a θxθy alignment performed after the θxθy search. In the search and alignment, for example, one set of processing of XY search and XY alignment and one set of processing of θxθy search and θxθy alignment are alternately performed, and the transmitted light amount P is predetermined in the process. It ends when it converges to a certain value greater than or equal to the value. Since the procedure of the XY search and the procedure of the θxθy search are the same, and the procedure of the XY alignment and the θxθy alignment are the same, the procedure will be described below using the XY search and the XY alignment as examples.
[0052]
In the XY search, by sliding the X stage 13 and the Y stage 14 in the X direction and the Y direction, respectively, the optical component 11b is slid with respect to the optical component 11c, thereby changing the transmitted light amount P. This is a process of searching for a position that is equal to or greater than the determination transmitted light amount PA.
[0053]
A flowchart of this XY search is shown in FIG. FIG. 6 is an explanatory diagram showing a movement locus of the position of the point O which is the center of the second chuck 12b (that is, the center of the optical component 11b) at the time of XY search. First, as parameters of the XY search, (1) the maximum area S in which the XY search is performed, (2) the value of the transmitted light amount PA for determination, (3) the search impact intensity, (4) the search step L, (5) the search pulse Set the cycle.
[0054]
The setting of the maximum area S for performing the XY search is performed by setting the maximum number of impacts (number of hits) of the actuators 23a, 23b, 24a, and 24b. When the maximum impact number is set large, the maximum area S becomes wide. The value of the transmitted light amount for determination PA is set to some value of the transmitted light amount required when the alignment of the optical components 11a to 11c is completed, or is determined empirically.
[0055]
The search impact strength is the magnitude of impact force when hitting the X stage 13 or the Y stage 14 by the actuators 23a, 23b, 24a, and 24b. When the search impact strength is small, the slide amount of the X stage 13 or the Y stage 14 by one hit is small, so that the X stage 13 or the Y stage 14 can be precisely slid. The search step L is a distance by which the X stage 13 or the Y stage 14 is moved by one or more hits by the actuators 23a, 23b, 24a, and 24b. If a precise search is performed, the search step L is shortened. Set.
[0056]
The search pulse period is a hitting interval of the X stage 13 or the Y stage 14 by the actuators 23a, 23b, 24a, and 24b. In order to ensure that the X-stage 13 or the Y-stage 14 can be moved by a certain distance, the search pulse cycle is repeated after the slide of the X-stage 13 or the Y-stage 14 is stopped once. It is preferable to set so as to do.
[0057]
As an XY search method, as shown in FIG. 6, for example, the point O is in the direction of + X, 1 search step L, the direction of -Y is 1 search step L, the direction of -X is 2 search steps (2L), 2 search steps (2L) in the + Y direction, 3 search steps (3L) in the + X direction, 3 search steps (3L) in the -Y direction, 4 search steps (4L) in the -X direction, + Y direction There is a method of hitting the X stage 13 or the Y stage 14 by selecting one of the actuators 23a, 23b, 24a, and 24b so as to move in a spiral shape, such as 4 search steps (4L).
[0058]
In the process of moving the point O in this way, the transmitted light amount P is measured for each hit by the actuators 23a, 23b, 24a, and 24b, and compared with the determination transmitted light amount PA. The hitting of the X stage 13 and the Y stage 14 ends when P ≧ PA. Of course, if the relationship of P ≧ PA is satisfied in the initial state without moving the X stage 13 and the Y stage 14 at all, the next XY alignment is performed without performing the XY search. On the other hand, if P ≧ PA is not satisfied in the maximum area S, an error message is displayed on the personal computer (PC) 41. In this case, for example, the operator confirms the mounting state of the optical components 11a to 11c and performs processing from the beginning.
[0059]
After the XY search is completed in this way, XY alignment that determines the XY position of the point O is performed more precisely. FIG. 7 is a flowchart of X direction alignment in XY alignment. The Y-direction alignment is performed in the same manner as the X-direction alignment. In XY alignment, (1) transmitted light intensity lower limit PB, (2) alignment impact intensity, (3) maximum number of repetitions, (4) convergence range, and (5) alignment pulse period are set as parameters. .
[0060]
The transmitted light amount lower limit value PB is a value smaller than the determination transmitted light amount PA used in the XY search. When the transmitted light amount P falls below the transmitted light amount lower limit PB during XY alignment, for example, the XY alignment is stopped and the operation is restarted from the XY search. The alignment impact strength is the magnitude of the impact force when hitting the X stage 13 or the Y stage 14 by the actuators 23a, 23b, 24a, and 24b. This alignment impact strength is set at the time of XY search. A value smaller than the search impact strength is set.
[0061]
As the alignment impact strength, in the strength range smaller than the search impact strength, the coarse alignment impact strength used when performing rough alignment (coarse alignment) at first and the fine adjustment for final fine alignment. It is preferable to set at least two values of the core impact strength. This enables efficient XY alignment.
[0062]
As will be described later, in the XY alignment, the X stage 13 is reciprocated in the X direction, and the Y stage 14 is reciprocated in the Y direction to find a point where the transmitted light amount P converges to a constant value. The maximum number of repetitions defines an operation limit for the movement of the X stage 13 in the X direction and the movement of the Y stage 14 in the Y direction when the transmitted light amount P does not converge to a constant value. The convergence range is a range of the transmitted light amount that should be satisfied by the value of the transmitted light amount P for each set when the X direction movement of the X stage 13 and the Y direction movement of the Y stage 14 are taken as one set.
[0063]
In the XY alignment, first, the X stage 13 is struck a set number of times (for example, twice) with the alignment impact strength (preferably coarse alignment impact strength) in the + X direction. The X stage 13 is further struck with the alignment impact strength in the + X direction when it is raised, and in the -X direction when the transmitted light amount P is lowered. When the X stage 13 continues to be struck in a predetermined direction (+ X direction or -X direction) and the transmitted light amount P decreases, the X direction X is adjusted in the opposite direction with the alignment impact strength (preferably fine alignment impact strength). If the stage 13 is struck and the transmitted light amount P decreases at this time, the alignment in the X direction is temporarily terminated at that time. Such processing is X-direction alignment. Similar processing is performed for Y direction alignment in the Y direction.
[0064]
One X-direction alignment and one Y-direction alignment are set as one set, and the value of the transmitted light amount P when this processing is completed is stored. Furthermore, the X-direction alignment and the Y-direction alignment are set as one set, and this process is repeated. For example, when the value of three sets of transmitted light amounts P falls within a defined convergence range, the XY alignment is terminated. .
[0065]
If the transmitted light amount P does not converge even if a set of X-direction alignment and Y-direction alignment is repeated for a predetermined maximum number of times, the XY alignment is terminated and the personal computer (PC) 41 receives the result. Display a message indicating the result. In order to cancel this display, for example, the operator starts XY alignment again, starts over from the XY search, or stops the processing.
[0066]
Further, in the XY alignment, the X-direction alignment and the Y-direction alignment are continued even when the transmitted light amount P is smaller than the determination transmitted light amount PA. However, when the transmitted light amount P is smaller than the transmitted light amount lower limit PB, the XY alignment is stopped and a message to that effect is displayed on the personal computer (PC) 41. In this case, for example, the processing is restarted after returning to the XY search.
[0067]
After the XY search and the XY alignment described above are completed once, the optical component 11a and the optical component 11c are aligned by the θxθy search and the θxθy alignment. The relative positional relationship between the optical component 11b and the optical component 11c does not change depending on the θxθy search and the θxθy alignment, but the XY position where the transmitted light amount P is maximized after the θxθy alignment is determined first. It may be out of place. For this reason, after θxθy alignment, XY search and XY alignment are performed again.
[0068]
After the second XY alignment, the θxθy position where the transmitted light amount P is maximum may deviate from the previously determined θxθy position. Therefore, after the second XY alignment, the θxθy search and the θxθy alignment are performed again. In this way, even if the XY search, the XY alignment, the θxθy search, and the θxθy alignment are repeated, if the transmitted light amount P has converged to a constant value, the search and alignment are terminated at that point.
[0069]
After the alignment of the optical components 11a to 11c is thus completed, YAG welding is performed between the optical components 11a and 11c and between the optical components 11b and 11c in a state where the optical components 11a to 11c are aligned. The YAG welding at this time is first partially performed to such an extent that the positional relationship between the optical components 11a to 11c is not shifted. Thereafter, the holding state of the optical component 11a by the first chuck 12a is released, and the YAG laser is irradiated to the welding position while rotating the rotary stage 19, and welding is performed at a necessary welding position, or optical The parts 11a to 11c may be removed from the alignment apparatus 10 and final welding may be performed using another apparatus.
[0070]
According to such an alignment system 100, since most of the alignment of the optical components 11a to 11c can be automatically performed, accurate alignment can be performed in a short time.
[0071]
In addition, the alignment form of the three optical components 11a to 11c described above is an alignment configuration in the case where the cylindrical component 61a and the cylindrical component 61b are integrated with each other as described above. However, in the optical component 11a, the cylindrical component 61a and the cylindrical component 61b may not be integrated in advance. In this case, after performing XY alignment and θxθy alignment, an operation (Z-axis alignment) for adjusting the height of the cylindrical part 61b (insertion length into the cylindrical part 61a) must be performed. .
[0072]
In this case, as shown in FIG. 8, a third chuck 12c that can be moved up and down in the Z direction by a stepping motor 71 is provided in the alignment apparatus 10, and the cylindrical component 61 is held by the first chuck 12a, The cylindrical part 61b is held by the three chucks 12c. The alignment of the optical components 11a to 11c is performed by the above-described search and alignment. At this time, the columnar component 61b is inserted into the cylindrical component 61a as much as possible. After the alignment is completed, the transmitted light amount P is measured while the cylindrical part 61b is moved up by a predetermined step by operating the stepping motor 71, and the third chuck 12c is held at the maximum position. Thereafter, the YAG laser is irradiated to a predetermined welding position, so that the optical component 11a can be integrated.
[0073]
As mentioned above, although embodiment of this invention has been described, this invention is not limited to such a form. For example, in the above-described embodiment, the case where a piezoelectric element is used as an element that generates a shocking inertial force in the actuator 23 or the like has been described. However, an element that can operate in the same manner as a piezoelectric element, such as a magnetostrictive element. Can be used.
[0074]
In the above embodiment, the case where the XY search and the θxθy search are performed by an instruction from the personal computer (PC) 41 has been described. However, the X stage 13, the Y stage 14, the θx stage 15, and the θy stage 16 are respectively set in predetermined directions. A joystick for operating the actuator 23a and the like to slide may be provided in the central control apparatus 40, and the operator may manually operate this joystick to detect a place where the transmitted light amount P is equal to or greater than the determination transmitted light amount PA. In this method, for example, in the XY search described above, when the position where the transmitted light amount P is greater than or equal to the transmitted light amount for determination PA within the range of the maximum area S cannot be detected, the transmitted light amount P becomes the transmitted transmitted light amount for determination. It is also effective as a coping method for detecting a place that is higher than PA.
[0075]
In the above embodiment, the case where one surface is a curved surface and one surface is a flat surface as the optical component 11c has been described. For example, the optical component 11a and the optical component 11c are in contact with each other with a curved surface (hereinafter referred to as “curved surface A”). The optical component 11b and the optical component 11c may be in contact with each other on a curved surface (hereinafter referred to as “curved surface B”). In this case, in order to align the optical component 11a and the optical component 11c, the first θx stage and the first θy stage having curvatures corresponding to the curvature of the curved surface A and the curvature of the curved surface B are supported. Search and alignment using the first θx stage and the first θy stage, and the second θx stage and the second θy stage provided with a second θx stage and a second θy stage having curvature The search using and the alignment may be repeated.
[0076]
Further, in the above embodiment, the relative positions of the optical components 11a to 11c are indirectly shifted by hitting each stage constituting the stage unit 17 using the actuator 23a or the like, thereby aligning the optical components 11a to 11c. However, the optical components 11a to 11c may be aligned by directly striking the optical components 11a and 11b and shifting their positions.
[0077]
As shown in FIG. 3, when the optical component 11 a and the optical component 11 c are in contact with the conical surface and the spherical surface, and the optical component 11 b and the optical component 11 c are in contact with each other on the plane, the stage unit 17 is connected to the X stage 13. The first chuck 12a is fixed to the second stage portion, and the second chuck 12b is fixed to the first stage, divided into a first stage portion including the Y stage 14 and a second stage portion including the θx stage 15 and the θy stage 16. It is good to use the form fixed to the part. In this case, the first chuck 12a, the second chuck 12b, and the optical components 11a to 13c are sandwiched between the first stage portion and the second stage portion. The actuators 25a, 25b, 26a, and 26b are held at positions where the θx stage 15 and the θy stage 16 can be tapped according to the height position where the second stage portion is disposed.
[0078]
Furthermore, although the case where the three optical components 11a to 11c are aligned has been described in the above embodiment, the alignment apparatus 10 can also be used to align the two optical components. For example, when two optical components are in contact with each other on a plane, the alignment may be performed by performing XY search and XY alignment, and when two optical components are in contact with a curved surface, θxθy search is performed. And θxθy alignment may be performed.
[0079]
In the above description, the alignment device and the alignment method for aligning the optical components 11a to 11c have been described. However, the component for alignment is not limited to the optical component. For example, the present invention can be applied to alignment of machine parts.
[0080]
【The invention's effect】
As described above, according to the present invention, it is possible to easily adjust the angle between the parts that are in contact with each other on the curved surface and the angle between the parts that are in contact with each other on a plane, and the positions of the parts are in a state where the parts are face to face. Since alignment can be performed, it is possible to perform precise alignment between components. Further, according to the present invention, it is easy to reduce the size of the apparatus. Furthermore, according to the present invention, the parts can be aligned in a short time by automatic processing using a personal computer, so that the production efficiency can be increased. In addition, when the configuration of the alignment apparatus is configured such that alignment of parts can be performed manually, it is easy to quickly deal with a problem that occurred during automatic processing.
[Brief description of the drawings]
FIG. 1 is a schematic plan view showing an embodiment of an alignment apparatus of the present invention.
FIG. 2 is a schematic side view of the alignment apparatus shown in FIG.
3 is a cross-sectional view showing the structure of the optical component shown in FIG.
4 is an explanatory diagram showing a schematic configuration of an alignment system including the alignment apparatus shown in FIG. 1. FIG.
FIG. 5 is an explanatory diagram (flow chart) showing an XY search process;
FIG. 6 is an explanatory diagram showing a movement locus of a position of a point O that is the center of the second chuck at the time of XY search.
FIG. 7 is an explanatory diagram (flow chart) showing an XY alignment process.
8 is a cross-sectional view showing another structure of the optical component shown in FIG.
[Explanation of symbols]
10; Positioning device
11a, 11b, 11c; optical components
12a; first chuck
12b; second chuck
12c; third chuck
13; X stage
14; Y stage
15; θx stage
16; θy stage
17: Stage part
18; Elevating / pressing mechanism
19: Rotary stage
23a, 23b, 24a, 24b, 25a, 25b, 26a, 26b; Actuator
29a, 29b; optical fiber cable
30; Light quantity measuring device
31a; air cylinder
31b: Piezoelectric element
31c; head (tip member)
32a; first actuator driver
32b; second actuator driver
32c; stage driver
34a / 34b / 35a / 35b; holding jig
40; Central control device
41; Personal computer (PC)
50; YAG laser device
61a; cylindrical parts
61b; cylindrical parts
62a; cylindrical parts
62b; cylindrical parts
71; Stepping motor
100; alignment system

Claims (9)

A third part is sandwiched between the first part and the second part, and a contact surface of the first part, the third part, a contact surface of the second part, and the third part. Alignment of the first, second, and third parts, one of which is a curved surface and the other is a plane, is performed using a shocking inertial force generated by a sudden expansion or contraction of a piezoelectric element or a magnetostrictive element. A device,
First holding means for holding the first component;
Second holding means for holding the second component;
The first component and the second component so that a predetermined frictional force is generated on the contact surface of the first component and the third component and the contact surface of the second component and the third component. A pressing mechanism that applies a predetermined pressing force between
A piezoelectric element or a magnetostrictive element, and an impact inertia force generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element is applied to the first, second, and third parts, the first holding means, and the first holding means; An actuator applied to at least one of the two holding means;
Comprising
The first, second, and third parts are aligned by sliding any one of the first, second, and third parts that are in contact with each other by an impact inertial force applied by the actuator. An alignment apparatus characterized by performing. A third part is sandwiched between the first part and the second part, a contact surface between the first part and the third part is a curved surface, and the second part and the third part An alignment apparatus that performs alignment of the first, second, and third components, whose contact surfaces are flat, using a shocking inertial force generated by steep expansion and contraction of a piezoelectric element or a magnetostrictive element,
First holding means for holding the first component;
A stage portion having an X stage, a Y stage, a θx stage, and a θy stage;
A second holding means that is held on the upper surface of the stage portion and holds the second component;
The first component and the second component so that a predetermined frictional force is generated on the contact surface of the first component and the third component and the contact surface of the second component and the third component. A pressing mechanism that applies a predetermined pressing force between
The four stages constituting the stage unit are arranged so as to be able to be beaten individually, have a piezoelectric element or a magnetostrictive element, and each of the shock inertial forces generated by the rapid expansion and contraction of the piezoelectric element or the magnetostrictive element is described above. An actuator for moving each stage in a predetermined direction in addition to the stage;
Comprising
The second part and the third part are aligned by moving the X stage and the Y stage to shift the relative positions of the second part and the third part,
The first part and the third part are aligned by moving the θx stage and the θy stage to shift the relative positions of the first part and the third part. An alignment device characterized by. A third part is sandwiched between the first part and the second part, and a contact surface between the first part and the third part and a contact surface between the second part and the third part An alignment apparatus that performs alignment of the first, second, and third parts, which are curved surfaces having different curvatures, by using a shocking inertial force generated by steep expansion and contraction of a piezoelectric element or a magnetostrictive element,
First holding means for holding the first component;
A stage unit having first and second θx stages having different curvatures and first and second θy stages having different curvatures;
A second holding means that is held on the upper surface of the stage portion and holds the second component;
The first component and the second component so that a predetermined frictional force is generated on the contact surface of the first component and the third component and the contact surface of the second component and the third component. A pressing mechanism that applies a predetermined pressing force between
The four stages constituting the stage unit are arranged so as to be able to be beaten individually, have a piezoelectric element or a magnetostrictive element, and each of the shock inertial forces generated by the rapid expansion and contraction of the piezoelectric element or the magnetostrictive element is described above. An actuator that moves in a predetermined direction in addition to the stage;
Comprising
By moving the first θx stage and the first θy stage to shift the relative positions of the second component and the third component, the second component and the third component are moved. Alignment is done,
By moving the second θx stage and the second θy stage to shift the relative positions of the first component and the third component, the first component and the third component are moved. An alignment apparatus characterized in that alignment is performed. A third optical component is sandwiched between the first optical component and the second optical component, a contact surface between the first optical component and the third optical component is a curved surface, and the second optical component Positioning of the first, second, and third optical components whose contact surface of the third optical component is a plane is made using a shocking inertial force generated by a sharp expansion or contraction of the piezoelectric element or the magnetostrictive element. An alignment device to perform,
First holding means for holding the first optical component;
A stage portion having an X stage, a Y stage, a θx stage, and a θy stage;
A second holding means that is held on the upper surface of the stage unit and holds the second optical component;
The first optical component and the first optical component such that a predetermined frictional force is generated between the contact surface of the first optical component and the third optical component and the contact surface of the second optical component and the third optical component; A pressing mechanism that applies a predetermined pressing force to the second optical component;
The four stages constituting the stage unit are arranged so as to be able to be beaten individually, have a piezoelectric element or a magnetostrictive element, and each of the shock inertial forces generated by the rapid expansion and contraction of the piezoelectric element or the magnetostrictive element is described above. An actuator that moves in a predetermined direction in addition to the stage;
The relative positions of the second component and the third component are shifted by moving the X stage and the Y stage, and the first component and the θy stage are moved by moving the θx stage and the θy stage. Control for finding the state of the first, second, and third optical components by shifting the relative position of the third component to maximize the amount of light transmitted through the first, second, and third optical components. Equipment,
An alignment apparatus comprising: A rotating mechanism is further provided that can rotate the first, second, and third optical components about their optical axes while maintaining the contact state of the first, second, and third optical components. The alignment apparatus according to claim 4, wherein: The actuator is
Two X stages are arranged with the X stage sandwiched in the X direction so that the X stage can be reciprocated in the X direction.
Two Y stages are arranged in the Y direction so that the Y stage can be reciprocated in the Y direction,
Two θx stages are arranged with the θx stage sandwiched in the X direction so that the θx stage can be reciprocated in the θx direction,
5. The two θy stages are arranged with the θy stage sandwiched in the Y direction so that the θy stage can be reciprocated in the θy direction. 6. Alignment device. The actuator is
A piezoelectric element or a magnetostrictive element that generates a shocking inertial force by steep expansion and contraction;
A tip member in contact with an object to which the inertial force is applied;
A preload mechanism for pressing the tip member and the piezoelectric element or the magnetostrictive element so that the tip member portion is pressed against the object with a predetermined force;
The alignment apparatus according to any one of claims 1 to 6, further comprising: A third optical component is sandwiched between the first optical component and the second optical component, a contact surface between the first optical component and the third optical component is a curved surface, and the second optical component And an alignment method for aligning the first, second and third optical components, wherein the contact surface of the third optical component is a plane,
Holding the first optical component on a first holding means;
Holding in the second holding means of the second optical component;
The third optical component is sandwiched between the first optical component and the second optical component, and the first holding means is pressed against the second holding means with a predetermined force, thereby A predetermined frictional force is generated on the contact surface between the first optical component and the third optical component and on the contact surface between the second optical component and the third optical component, so that the first, second, second 3 holding the optical component;
While measuring the amount of light transmitted through the first, second, and third optical components, shock inertia generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element in the second component or the second holding means. A step of finding a position where the amount of light transmitted through the first, second, and third optical components is maximized by applying a force to shift the contact surface between the second optical component and the third optical component. When,
While measuring the amount of light transmitted through the first, second, and third optical components, shock inertia that is generated by abrupt expansion and contraction of the piezoelectric element or the magnetostrictive element in the first component or the first holding means. A step of finding a position where the amount of light transmitted through the first, second, and third optical components is maximized by applying a force to shift the contact surface between the first optical component and the third optical component. When,
An alignment method comprising: A third optical component is sandwiched between the first optical component and the second optical component, a contact surface between the first optical component and the third optical component is a curved surface, and the second optical component And an alignment method for aligning the first, second and third optical components, wherein the contact surface of the third optical component is a plane,
Holding the first optical component on a first holding means;
Holding in the second holding means of the second optical component;
Holding the second holding means on the upper surface of a stage portion having an X stage, a Y stage, a θx stage, and a θy stage;
A third optical component is sandwiched between the first optical component and the second optical component, and the first holding means is pressed against the second holding means with a predetermined force, thereby A predetermined frictional force is generated on the contact surface between the first optical component and the third optical component and the contact surface between the second optical component and the third optical component, and the first, second, Holding the third optical component;
While measuring the amount of light transmitted through the first, second, and third optical components, an impact inertia force generated by a sudden expansion or contraction of a piezoelectric element or a magnetostrictive element is applied to either the X stage or the Y stage. In addition, the relative positions of the second component and the third component are shifted, and the first and second light amounts that are transmitted through the first, second, and third optical components are maximized. , Searching for the state of the third optical component;
While measuring the amount of light transmitted through the first, second, and third optical components, an impact inertia force generated by a sudden expansion or contraction of a piezoelectric element or a magnetostrictive element is applied to either the θx stage or the θy stage. In addition, the relative positions of the first component and the third component are shifted, and the first and second light amounts that are transmitted through the first, second, and third optical components are maximized. , Searching for the state of the third optical component;
An alignment method comprising:

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