JP3881567B2

JP3881567B2 - Heat treatment boat and vertical heat treatment apparatus

Info

Publication number: JP3881567B2
Application number: JP2002058262A
Authority: JP
Inventors: 貴庸浅野; 学本間; 知久島津
Original assignee: Tokyo Electron Ltd
Current assignee: Tokyo Electron Ltd
Priority date: 2002-03-05
Filing date: 2002-03-05
Publication date: 2007-02-14
Anticipated expiration: 2022-03-05
Also published as: JP2003257958A

Description

【０００１】
【発明の属する技術分野】
本発明は、熱処理用ボート及び縦型熱処理装置に関する。
【０００２】
【従来の技術】
半導体装置の製造においては、被処理体例えば半導体ウエハに例えば酸化、拡散、ＣＶＤ、アニール等の各種の熱処理を施す工程があり、これらの工程を実行するための熱処理装置の一つとして多数枚のウエハを一度に熱処理することが可能な縦型熱処理装置が用いられている。
【０００３】
一般的に、従来の縦型熱処理装置は、熱処理炉の炉口を開閉すべく昇降可能に設けられた蓋体を備え、この蓋体上には回転導入機構によって回転される回転テーブルが設けられ、この回転テーブル上に、多数枚のウエハを上下方向に多段に支持する熱処理用ボートを炉口保温手段である保温筒を介して載置する構造になっている。
【０００４】
なお、ボートとしては、一本足の支持台の上に載置するようにしたものも提案されている（例えば、特開平８−１０２４４７号公報、特開２００１−１５６００５号公報等参照）。
【０００５】
【発明が解決しようとする課題】
しかしながら、前記縦型熱処理装置においては、ボートを保温筒や支持台の上に載置しただけであるため、耐震性に劣り、強い地震や振動等によってボートや保温筒などが落下したり、転倒して破損する恐れがある。また、ボート本体に一本足の脚部を一体に形成した一本足ボートの提案もなされているが、石英製の一本足ボートの脚部と金属製の回転導入機構の回転軸部とを確実に連結する方法が無かった。
【０００６】
本発明は、前記事情を考慮してなされたもので、一本足ボートの脚部と回転軸部とを確実に連結することができ、ボートの落下、転倒、破損を防止することができ、耐震性の向上が図れる熱処理用ボート及び縦型熱処理装置を提供することを目的とする。
【０００７】
【課題を解決するための手段】
本発明のうち、請求項１の発明は、多数の被処理体を上下方向に多段に支持するボート本体と、該ボート本体を被処理体の周方向に回転させるための回転軸部に連結される一本足の脚部とを備えた熱処理用ボートにおいて、前記ボート本体と脚部が一体に形成され、前記脚部の回転軸部との連結部にはフランジ部が形成され、該フランジ部にはこれを回転軸部にネジで締結するための孔部が設けられ、前記フランジ部の回転軸部と接触する面には鏡面加工が施されていることを特徴とする。
【０００８】
請求項２の発明は、多数の被処理体を上下方向に多段に支持するボート本体と、該ボート本体を被処理体の周方向に回転させるための回転軸部に連結される一本足の脚部とを備えた熱処理用ボートにおいて、前記ボート本体と脚部が一体に形成され、前記脚部の回転軸部との連結部にはフランジ部が形成され、該フランジ部にはこれを回転軸部にネジで締結するための孔部が設けられ、前記フランジ部と回転軸部との間にはフランジ部よりも大径の台座が介在され、該台座の回転軸部と接触する面には鏡面加工が施されていることを特徴とする。
【０００９】
請求項３の発明は、熱処理炉と、該熱処理炉の炉口を開閉すべく昇降可能に設けられた蓋体と、該蓋体の上部に設けられ多数の被処理体を上下方向に多段に搭載して熱処理炉に搬入搬出される熱処理用ボートと、該ボートを回転すべく蓋体に設けられた回転導入機構とを備えた熱処理装置おいて、前記回転導入機構は蓋体を貫通して炉内に露出する回転軸部を有し、前記ボートはボート本体に一本足の脚部を一体に形成してなり、該脚部にはフランジ部が形成され、該フランジ部が前記回転軸部にネジで締結され、前記フランジ部の回転軸部と接触する面には鏡面加工が施されていることを特徴とする。
【００１０】
請求項４の発明は、熱処理炉と、該熱処理炉の炉口を開閉すべく昇降可能に設けられた蓋体と、該蓋体の上部に設けられ多数の被処理体を上下方向に多段に搭載して熱処理炉に搬入搬出される熱処理用ボートと、該ボートを回転すべく蓋体に設けられた回転導入機構とを備えた熱処理装置おいて、前記回転導入機構は蓋体を貫通して炉内に露出する回転軸部を有し、前記ボートはボート本体に一本足の脚部を一体に形成してなり、該脚部にはフランジ部が形成され、該フランジ部が前記回転軸部にネジで締結され、前記フランジ部と回転軸部との間にはフランジ部よりも大径の台座が介在され、該台座の回転軸部と接触する面には鏡面加工が施されていることを特徴とする。
【００１１】
請求項５の発明は、請求項３記載の縦型熱処理装置において、前記回転軸部の前記フランジと接触する面には複合セラミックス被膜がコーティングされていることを特徴とする。
【００１２】
請求項６の発明は、請求項４記載の縦型熱処理装置において、前記回転軸部の前記台座と接触する面には複合セラミックス被膜がコーティングされていることを特徴とする。
【００１３】
請求項７の発明は、請求項３記載の縦型熱処理装置において、前記フランジ部は、蓋体の回転軸部が貫通する軸孔部の上面を不活性ガスが噴出する所定の隙間を存して覆っており、その隙間を調整すべく前記回転軸部が高さ調整可能に設けられていることを特徴とする。
【００１４】
請求項８の発明は、請求項４記載の縦型熱処理装置において、前記台座は、蓋体の回転軸部が貫通する軸孔部の上面を不活性ガスが噴出する所定の隙間を存して覆っており、その隙間を調整すべく前記回転軸部が高さ調整可能に設けられていることを特徴とする。
【００１５】
請求項９に係る発明は、請求項３又は４記載の縦型熱処理装置において、前記ネジには超合金被膜がコーティングされていることを特徴とする。
【００１６】
請求項１０に係る発明は、請求項３又は４記載の縦型熱処理装置において、前記フランジ部にはネジの頭部側を覆って不活性ガスでパージするためのカバー部材が取付けられていると共に回転軸部側からカバー部材内に不活性ガスを導入する不活性ガス導入孔が設けられていることを特徴とする。
【００１７】
【発明の実施の形態】
以下に、本発明の実施の形態を添付図面に基いて詳述する。
【００１８】
図１において、１は縦型熱処理装置で、この縦型熱処理装置１は被処理体例えば半導体ウエハｗを収容して所定の処理例えば酸化処理を施すための縦型の熱処理炉２を備えている。この熱処理炉２は、下部が炉口３として開口された縦長の処理容器例えば石英製の反応管４と、この反応管４の炉口３を開閉する昇降可能な蓋体５と、前記反応管４の周囲に設けられ、反応管（炉）４内を所定の温度例えば３００〜１２００℃に加熱制御可能な発熱抵抗体を備えたヒータ６とから主に構成されている。
【００１９】
反応管４は、例えば石英製であり、図示例（実施例）では一重管からなっている。この反応管４の下端部には外向きのフランジ部４ａが形成され、このフランジ部４ａがフランジ保持部材７を介してベースプレート８の下部に保持されている。ベースプレート８には反応管４が下方から貫通されている。また、ベースプレート８上に前記ヒータ６が設置されている。
【００２０】
反応管４のフランジ部４ａには反応管４内に処理ガスやパージ用の不活性ガスを導入する複数のガス導入管９が設けられ、これらガス導入管９にはガス供給系の配管が接続されている。また、反応管４の頂部は漸次縮径され、この頂部には排気口１０が形成されており、この排気口１０には反応管４内を減圧制御可能な真空ポンプや圧力制御弁等を有する排気系の配管が接続されている（図示省略）。
【００２１】
熱処理炉２の下方は、蓋体５上に設けられた後述の熱処理用ボート１６を熱処理炉（すなわち反応管４）２内に搬入（ロード）したり、熱処理炉２から搬出（アンロード）したり、或いはボート１６に対するウエハｗの移載を行うための作業領域（ローディングエリア）１２となっている。この作業領域１２にはボート１６の搬入、搬出を行うべく蓋体５を昇降させるための昇降機構１３が設けられている。
【００２２】
前記蓋体５は、例えばＳＵＳ製であり、複数の緩衝機構１４を介して保持板１５上に保持されており、この保持板１５が前記昇降機構１３に連結されている。蓋体５は炉口３の開口端に当接して炉口３を密閉するように構成されている。蓋体５の下部中央部にはボート１６を回転するための後述の回転軸部２７を有する回転導入機構２６が設けられている。
【００２３】
前記ボート１６は、例えば石英製であり、大口径例えば直径３００ｍｍの多数例えば７５〜１００枚程度のウエハｗを水平状態で上下方向に間隔をおいて多段に支持するボート本体１７と、このボート本体１７をウエハの周方向に回転させるための回転軸部２７に連結される一本足の脚部１８とを備え、これらボート本体１７と脚部１８が一体に形成されている。図２に示すように前記脚部１８の回転軸部との連結部にはフランジ部１９が形成され、このフランジ部１９にはこれを回転軸部２７にネジ２０で締結するための複数例えば６つの孔部２１が設けられている。
【００２４】
前記ボート本体１７は、底板２２と天板２３の間に前記複数の支柱２４を介設してなり、支柱２４と底板２２及び天板２３とは例えば溶接等により一体的に接合されている。支柱２４は、ウエハｗを囲むように周方向に所定の間隔で配置され、両側の支柱２４間の正面側（図１の左側）が図示しない移載機構によりウエハｗの出し入れを行うための開口とされている。支柱２４には多数のウエハｗを多段に保持するための溝部２５が形成されている。前記脚部１８は所定の太さ例えば外径３０〜５０ｍｍ程度、及び所定の高さ例えばフランジ部１９を含めた高さが２５０〜３５０ｍｍ程度で形成されている。前記脚部１８は熱容量を減らすために上端（底板２２を含む）からフランジ部１９近傍まで中空に形成されていることが好ましい。
【００２５】
前記回転導入機構２６は、例えば図２に示すように、前記蓋体５の下部中央部に一体的に設けられて回転軸部２７を回転可能に収容する筒状の上部ハウジング２８と、この上部ハウジング２８の下端部に気密に連結された下部ハウジング２９とを備えている。下部ハウジング２９の下側外周には軸心部に回転軸３０を一体的に有する有底筒状の回転筒体３１が玉軸受３２を介して回転可能に設けられ、回転筒体３１の底部中央から起立した回転軸３０が下部ハウジング２９内を封止手段例えばＯリングまたは磁性流体シール３３を介して気密に貫通されている。
【００２６】
前記回転筒体３１には回転駆動手段であるモータがベルトを介して連結され（図示省略）、これにより回転軸３０が回転駆動されるようになっている。前記蓋体５の中央部には前記回転軸部２７が貫通する軸孔部３４が形成され、この軸孔部３４が上部ハウジング２８内と略同径で連通している。
【００２７】
前記ボート１６の脚部１８のフランジ部１９と回転軸部２７との間にはフランジ部１９よりも大径の台座３５が介在され、この台座３５が前記蓋体５の軸孔部３４の上面を覆っている。この台座３５は、ボート１６と同じ材質、例えば石英製である。この台座３５は、後述の炉口保温手段である炉口加熱機構（サーモプラグ）６２の貫通穴６７にボート１６の脚部１８が挿通し得るようフランジ部１９の大きさ（外径）が制限されている関係でフランジ部１９とは別体とされているが、このような制限が無ければフランジ部１９と一体に形成されていても良く、或いは、フランジ部１９の外径を大きくすることにより台座３５を不要にしても良い。
【００２８】
石英製のフランジ部１９と金属製の回転軸部２７とを石英製の台座３５を介してネジ２０で締結していることによる熱膨張時の熱膨張差に起因する接触面（特に台座側）の擦れ傷みを防止するために、前記台座３５の回転軸部２７と接触する面（実施例では下面全体）には鏡面加工（研磨仕上げ）が施されている。また、同様の理由により前記回転軸部２７の前記台座３５と接触する面（上面全体）には例えばアルミナ（Ａｉ_２Ｏ_３）、シリカ（ＳｉＯ_２）、クロミア（ＣｒＯ_３）を主成分とする耐熱性及び耐食性に富む硬質の複合セラミックス被膜がコーティングされている。
【００２９】
この複合セラミックス被膜（クロム酸化物被膜ともいう）のコーティング方法としては、例えば特開昭６３−３１７６８０号公報に記載されているクロム酸化物被膜の形成方法等が利用できる。なお、台座３５を有しない場合は、フランジ部１９の回転軸部２７との接触面に鏡面加工が施され、回転軸部２７のフランジ部１９との接触面に複合セラミックス被膜がコーティングされる。
【００３０】
前記フランジ部１９または台座（実施例では台座）３５は、図４にも示すように、蓋体５の回転軸部２７が貫通する軸孔部３４の上面を不活性ガス例えば窒素ガス（Ｎ_２）が噴出する所定の隙間Ｓを存して覆っており、その隙間Ｓを調整すべく前記回転軸部２７が高さ調整可能に設けられている。この回転軸部２７は、上端が閉塞された筒状の上部材（上ハブ）３６と、この上部材３６が昇降可能に被冠（嵌合）された下部材（下ハブ）３７とから構成されている。
【００３１】
下部材３７は、上端軸心部に芯出し用の突軸部３８を有し、下端軸心部に前記回転導入機構２６の回転軸３０の上端部が嵌合する嵌合孔３９を有している。また、下部材３７の下端にはフランジ部４０が形成され、このフランジ部４０から軸心部にねじ込んだ固定ネジ４１により下部材３７が前記回転軸３０の上端部に固定されている。上部材３６、脚部１８のフランジ部１９及び台座３５の軸心部には下部材３７の突軸部３８が嵌合する芯出し孔４２，４３，４４が形成されている。
【００３２】
また、下部材３７のフランジ部４０上面には位置決めピン４５が立設され、上部材３６、脚部１８のフランジ部１９及び台座３５には前記位置決めピン４５が嵌合する位置決め孔４６，４７，４８が形成されている。なお、上部材３６に形成された位置決め孔４６は位置決め溝であっても良い。前記上部材３６は熱容量を減らすために外周に環状溝４９が形成されていることが好ましい。
【００３３】
前記蓋体５の軸孔部３４ないし上部ハウジング２８内に腐食性を有する処理ガスが侵入するのを防止するために、軸孔部３４ないし上部ハウジング２８内に不活性ガス例えば窒素ガス（Ｎ_２）が導入されるようになっている。すなわち、図２にも示すように、下部材３７の下面と対向する下部ハウジング２９の上面部には環状溝５０が設けられ、下部ハウジング２９にはその環状溝５０に不活性ガスを導入する不活性ガス導入管５１が接続されている。また、下部材３７のフランジ部４０には環状溝５０から上部ハウジング２８内に不活性ガスが入り易いように切欠部５２が設けられている。
【００３４】
回転軸部２７の高さ調整すなわち上部材３６の高さ調整を行うために、図３ないし図４に示すように、上部材３６には下部材３７のフランジ部４０上面に対して引き寄せたり押し返したりするための引きネジ５３及び押しネジ５４が複数例えば３本ずつ設けられている。引きネジ５３の下端部は下部材３７のフランジ部４０に形成したネジ孔７０にねじ込まれ、押しネジ５４は下部材３７のフランジ部４０上面に当接されている。前記上部材３６には、ボート１６のフランジ部１９を締結するネジ（締結ネジ）２０、引きネジ５２及び押しネジ５４をねじ込むまたは挿入するためのネジ孔５５，５６，５７が周方向に適宜間隔で且つバランス良い配置で設けられている。
【００３５】
前記ボート１６の脚部１８のフランジ部１９を固定（締結）するネジ２０は、フランジ部１９上面から台座３５を介して上部材３６のネジ孔５５にねじ込まれている。前記ネジ２０は、例えばＳＵＳ製ないしインコネル製であり、ネジ２０のかじり付きを防止するために例えばニッケルアルミニウム（ＮｉＡｌ）からなる硬い超合金被膜がコーティングされている。
【００３６】
熱膨張によるネジ２０の弛みを防止するために、前記フランジ部１９とネジ２０の頭部２０ａとの間には多数の皿バネ５８が介設されている。なお、フランジ部１９と皿バネ５８の間には図示しない座金が介設されている。皿バネ５８は、ネジ２０の熱膨張を吸収し得るよう図５に示すように凹面側同士及び凸面側同士が対向するように複数例えば９枚積み重ねて用いられている。
【００３７】
腐食性を有する処理ガスによるネジ２０の頭部２０ａや皿バネ５８の腐食を防止するために、図２ないし図６に示すように前記フランジ部１９にはネジ２０の頭部２０ａ側を覆って不活性ガス例えば窒素ガスでパージするためのカバー部材５９が取付けられていると共に、回転軸部２７側からカバー部材５９内に不活性ガスを導入する不活性ガス導入孔６０が設けられている。カバー部材５９は、例えば石英製であり、フランジ部１９上面に載ってネジ２０の頭部２０ａ側を覆うように断面逆Ｕ字形状で環状に形成されており、また、着脱が容易にできるよう半割に形成されている。上部材３６及び台座３５にはフランジ部１９の不活性ガス導入孔６０と対応して連通する不活性ガス導入孔６１が設けられている（図３参照）。
【００３８】
前記蓋体５上には炉口保温手段である炉口加熱機構６２が固定されている。この炉口加熱機構６２は、蓋体５の上面を覆うように載置される環状の覆い板６３と、この覆い板６３上に周方向に適宜間隔で立設された複数の支柱６４と、これら支柱６４の上端部に水平に掛け渡した設けられた面状の発熱抵抗体６５と、この発熱抵抗体６５の下方に適宜間隔で支柱６４に掛け渡して設けられた複数例えば２枚の遮熱板６６とから主に構成されている。
【００３９】
前記覆い板６３、支柱６４及び遮熱板６６は、例えば石英製であり、覆い板６６により蓋体５上面が腐食性を有する処理ガスから保護されている。前記発熱抵抗体６５及び遮熱板６６にはボート１６のフランジ部１９を含む脚部１８が貫通する貫通穴６７が設けられている。また、前記発熱抵抗体６５に電気を供給するケーブルを導通するための導通管６８が保持板１５から蓋体５を気密に貫通した状態で設けられている。前記覆い板６３上には、前記フランジ部１９の周囲及び上方を覆う環状の遮熱カバー６９が図示例で二重に設けられている。これら遮熱カバー６９は、例えば石英製であり、着脱が容易にできるよう半割に形成されている。
【００４０】
以上の構成からなる熱処理用ボート１６によれば、多数のウエハｗを上下方向に多段に支持するボート本体１７と、このボート本体１７をウエハｗの周方向に回転させるための回転軸部２７に連結される一本足の脚部１８とを備え、前記ボート本体１７と脚部１８が一体に形成され、前記脚部１８の回転軸部２７との連結部にはフランジ部１９が形成され、このフランジ部１９にはこれを回転軸部にネジ２０で締結するための孔部２１が設けられているため、例えば石英製の一本足ボート１６の脚部１８と例えば金属製の回転軸部２７とを確実に連結することができ、ボート１６の落下、転倒、破損を防止することができ、耐震性の向上が図れる。
【００４１】
また、前記フランジ部（実施例では台座）１９の回転軸部２７と接触する面には鏡面加工が施されて摩擦抵抗の低減が図られているため、熱膨張時の石英製フランジ部１９と金属製回転軸部２７の熱膨張差に起因するフランジ部１９の擦れ傷みを防止することができ、耐久性の向上が図れる。実施例の場合、前記フランジ部１９と回転軸部２７との間にはフランジ部１９よりも大径の台座３５が介在され、この台座３５の回転軸部２７と接触する面には鏡面加工が施されているため、熱膨張時の石英製台座３５と金属製回転軸部２７の熱膨張差に起因する台座３５の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００４２】
また、縦型熱処理装置１によれば、熱処理炉２と、この熱処理炉２の炉口３を開閉すべく昇降可能に設けられた蓋体５と、この蓋体５の上部に設けられ多数のウエハｗを上下方向に多段に搭載して熱処理炉２に搬入搬出される熱処理用ボート１６と、このボート１６を回転すべく蓋体５に設けられた回転導入機構２６とを備え、前記回転導入機構２６は蓋体５を貫通して炉内に露出する回転軸部２７を有し、前記ボート１６はボート本体１７に一本足の脚部１８を一体に形成してなり、この脚部１８にはフランジ部１９が形成され、このフランジ部１９が前記回転軸部２７にネジ２０で締結されているため、石英製の一本足ボート１６の脚部１８と金属製の回転軸部２７とを確実に連結することができ、ボートの落下、転倒、破損を防止することができ、耐震性の向上が図れる。
【００４３】
また、前記回転軸部２７の前記フランジ部（なお実施例では台座）１９と接触する面には複合セラミックス被膜がコーティングされて摩擦抵抗の低減が図られているため、熱膨張時の石英製フランジ部１９と金属製回転軸部２７の熱膨張差に起因するフランジ部１９の擦れ傷みを防止することができ、耐久性の向上が図れる。前記フランジ部１９または台座５３５は、蓋体５の回転軸部２７が貫通する軸孔部３４の上面を不活性ガス例えば窒素ガスが噴出する所定の隙間Ｓを存して覆っており、その隙間Ｓを調整すべく前記回転軸部２７が高さ調整可能に設けられているため、腐食防止用の不活性ガスを噴出する隙間Ｓの調整を容易に行うことができる。
【００４４】
前記隙間Ｓの調整により回転側のフランジ部１９または台座３５と固定側の蓋体５との接触及び接触にによる擦れ傷みを防止することができると共に、隙間Ｓからの不活性ガスの適正な噴出量を確保することができる。また、前記隙間Ｓから不活性ガスを吹出すことにより熱処理に使用した腐食性を有する処理ガスが蓋体５の軸孔部３４から上部ハウジング２８内へ侵入するのを防止でき、回転軸部２７等の腐食を防止することができる。前記回転軸部２７が上部材３６とこの上部材３６を上下移動可能に支持する下部材３７とからなり、これら上部材３６と下部材３７の間に引きネジ５３及び押しネジ５４を設けて上部材３６を高さ調整可能にしているため、簡単な構造で回転軸部２７の高さ調整を容易に行うことができる。
【００４５】
前記ネジ２０にはＮｉＡｌ等の超合金被膜がコーティングされているため、ネジ２０のかじり付きを防止することができる。引きネジ５３及び押しネジ５４も同様の理由により超合金被膜がコーティングされていることが好ましい。更に、前記フランジ部１９とネジ２０の頭部２０ａとの間には多数の皿バネ５８が介設されているため、熱膨張時のネジ２０の弛みを防止することができる。
【００４６】
前記フランジ部１９にはネジ２０の頭部２０ａ側を覆って不活性ガスでパージするためのカバー部材５９が取付けられていると共に回転軸部２７側からカバー部材５９内に不活性ガスを導入する不活性ガス導入孔６０が設けられているため、ネジ２０の頭部２０ａ側の腐食を防止することができる。前記蓋体５上には炉口保温手段例えば炉口加熱機構６２が固定され、この炉口加熱機構６２には前記ボート１６の脚部１８が貫通する貫通穴６７が設けられているため、炉口加熱機構６２とは非接触状態でボート１６のみを回転させることができると共に、炉口加熱機構６２の落下、転倒、破損を防止することができ、耐震性及び耐久性の向上が図れる。
【００４７】
以上、本発明の実施の形態を図面により詳述してきたが、本発明は前記実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲での種々の設計変更等が可能である。例えば、熱処理装置としては、酸化処理以外に、ＣＶＤ処理、拡散処理、アニール処理等を行うように構成されていてもよい。前記ボートの材質としては、石英以外に、例えば炭化珪素やポリシリコン（Ｓｉ）等であっても良い。被処理体としては、半導体ウエハ以外に、例えばＬＶＤ基板等であっても良い。また、反応管は、内管と外管の二重管構造とされていても良い。炉口保温手段としては、保温筒であってもよい。
【００４８】
【発明の効果】
以上要するに本発明によれば、次のような効果を奏することができる。
【００４９】
（１）請求項１の発明によれば、多数の被処理体を上下方向に多段に支持するボート本体と、該ボート本体を被処理体の周方向に回転させるための回転軸部に連結される一本足の脚部とを備えた熱処理用ボートにおいて、前記ボート本体と脚部が一体に形成され、前記脚部の回転軸部との連結部にはフランジ部が形成され、該フランジ部にはこれを回転軸部にネジで締結するための孔部が設けられ、前記フランジ部の回転軸部と接触する面には鏡面加工が施されているため、一本足ボートの脚部と回転軸部とを確実に連結することができ、ボートの落下、転倒、破損を防止することができ、耐震性の向上が図れると共に、熱膨張時の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００５０】
（２）請求項２の発明によれば、多数の被処理体を上下方向に多段に支持するボート本体と、該ボート本体を被処理体の周方向に回転させるための回転軸部に連結される一本足の脚部とを備えた熱処理用ボートにおいて、前記ボート本体と脚部が一体に形成され、前記脚部の回転軸部との連結部にはフランジ部が形成され、該フランジ部にはこれを回転軸部にネジで締結するための孔部が設けられ、前記フランジ部と回転軸部との間にはフランジ部よりも大径の台座が介在され、該台座の回転軸部と接触する面には鏡面加工が施されているため、一本足ボートの脚部と回転軸部とを確実に連結することができ、ボートの落下、転倒、破損を防止することができ、耐震性の向上が図れると共に、熱膨張時の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００５１】
(３)請求項３の発明によれば、熱処理炉と、該熱処理炉の炉口を開閉すべく昇降可能に設けられた蓋体と、該蓋体の上部に設けられ多数の被処理体を上下方向に多段に搭載して熱処理炉に搬入搬出される熱処理用ボートと、該ボートを回転すべく蓋体に設けられた回転導入機構とを備えた熱処理装置おいて、前記回転導入機構は蓋体を貫通して炉内に露出する回転軸部を有し、前記ボートはボート本体に一本足の脚部を一体に形成してなり、該脚部にはフランジ部が形成され、該フランジ部が前記回転軸部にネジで締結され、前記フランジ部の回転軸部と接触する面には鏡面加工が施されているため、一本足ボートの脚部と回転軸部とを確実に連結することができ、ボートの落下、転倒、破損を防止することができ、耐震性の向上が図れると共に、熱膨張時の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００５２】
（４）請求項４の発明によれば、熱処理炉と、該熱処理炉の炉口を開閉すべく昇降可能に設けられた蓋体と、該蓋体の上部に設けられ多数の被処理体を上下方向に多段に搭載して熱処理炉に搬入搬出される熱処理用ボートと、該ボートを回転すべく蓋体に設けられた回転導入機構とを備えた熱処理装置おいて、前記回転導入機構は蓋体を貫通して炉内に露出する回転軸部を有し、前記ボートはボート本体に一本足の脚部を一体に形成してなり、該脚部にはフランジ部が形成され、該フランジ部が前記回転軸部にネジで締結され、前記フランジ部と回転軸部との間にはフランジ部よりも大径の台座が介在され、該台座の回転軸部と接触する面には鏡面加工が施されているため、一本足ボートの脚部と回転軸部とを確実に連結することができ、ボートの落下、転倒、破損を防止することができ、耐震性の向上が図れると共に、熱膨張時の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００５３】
（５）請求項５の発明によれば、前記回転軸部の前記フランジ部と接触する面には複合セラミックス被膜がコーティングされているため、熱膨張時の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００５４】
（６）請求項６の発明によれば、前記回転軸部の前記台座と接触する面には複合セラミックス被膜がコーティングされているため、熱膨張時の擦れ傷みを防止することができ、耐久性の向上が図れる。
【００５５】
（７）請求項７の発明によれば、前記フランジ部は、蓋体の回転軸部が貫通する軸孔部の上面を不活性ガスが噴出する所定の隙間を存して覆っており、その隙間を調整すべく前記回転軸部が高さ調整可能に設けられているため、腐食防止用の不活性ガスを噴出する隙間の調整を容易に行うことができる。
【００５６】
（８）請求項８の発明によれば、前記台座は、蓋体の回転軸部が貫通する軸孔部の上面を不活性ガスが噴出する所定の隙間を存して覆っており、その隙間を調整すべく前記回転軸部が高さ調整可能に設けられているため、腐食防止用の不活性ガスを噴出する隙間の調整を容易に行うことができる。
【００５７】
（９）請求項９に係る発明によれば、前記ネジには超合金被膜がコーティングされているため、ネジのかじり付きを防止することができる。
【００５８】
（１０）請求項１０に係る発明によれば、前記フランジ部にはネジの頭部側を覆って不活性ガスでパージするためのカバー部材が取付けられていると共に回転軸部側からカバー部材内に不活性ガスを導入する不活性ガス導入孔が設けられているため、ネジの頭部側の腐食を防止することができる。
【図面の簡単な説明】
【図１】本発明の実施の形態を示す縦型熱処理装置の縦断面図である。
【図２】同縦型熱処理装置の要部拡大断面図である。
【図３】回転軸部上面の概略的平面図である。
【図４】図３のＡ−Ａ線断面図である。
【図５】皿バネの断面図である。
【図６】ボートのフランジに取付けられるネジカバーの構成を示す平面図である。
【符号の説明】
１縦型熱処理装置
ｗ半導体ウエハ（被処理体）
Ｓ隙間
２熱処理炉
３炉口
５蓋体
１６熱処理用ボート
１７ボート本体
１８脚部
１９フランジ部
２０ネジ
２１孔部
２６回転導入機構
２７回転軸部
３４軸孔部
５８皿バネ
５９カバー部材
６０ガス導入孔
６２炉口加熱機構（炉口保温手段）
６７貫通穴[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat treatment boat and a vertical heat treatment apparatus.
[0002]
[Prior art]
In the manufacture of semiconductor devices, there are processes for subjecting an object to be processed, such as a semiconductor wafer, to various heat treatments such as oxidation, diffusion, CVD, annealing, etc. A vertical heat treatment apparatus capable of heat treating a wafer at a time is used.
[0003]
Generally, a conventional vertical heat treatment apparatus includes a lid body that can be moved up and down to open and close a furnace port of a heat treatment furnace, and a rotary table that is rotated by a rotation introducing mechanism is provided on the lid body. The heat treatment boat for supporting a large number of wafers in multiple stages in the vertical direction is mounted on the rotary table via a heat insulation cylinder as a furnace port heat insulation means.
[0004]
In addition, as a boat, what was mounted on the support stand of one leg is also proposed (for example, refer Unexamined-Japanese-Patent No. 8-102447, Unexamined-Japanese-Patent No. 2001-156005 etc.).
[0005]
[Problems to be solved by the invention]
However, in the vertical heat treatment apparatus, since the boat is merely placed on the heat insulating cylinder or the support base, it is inferior in earthquake resistance, and the boat or the heat insulating cylinder falls or falls due to strong earthquake or vibration. There is a risk of damage. There has also been a proposal for a single-leg boat in which a single leg is integrally formed on the boat body, but the leg of a quartz single-leg boat and the rotation shaft of a metal rotation introduction mechanism There was no way to connect them securely.
[0006]
The present invention was made in consideration of the above circumstances, can reliably connect the leg portion of the single-legged boat and the rotating shaft portion, and can prevent the boat from falling, falling, and being damaged, An object of the present invention is to provide a heat treatment boat and a vertical heat treatment apparatus capable of improving the earthquake resistance.
[0007]
[Means for Solving the Problems]
Among the present inventions, the invention of claim 1 is connected to a boat body that supports a number of objects to be processed in multiple stages in the vertical direction, and a rotating shaft portion for rotating the boat body in the circumferential direction of the objects to be processed. The boat body and the leg portion are integrally formed, and a flange portion is formed at a connection portion between the leg portion and the rotation shaft portion, and the flange portion. Is provided with a hole for fastening it to the rotating shaft with a screw. The surface of the flange portion that comes into contact with the rotating shaft portion is mirror-finished. It is characterized by that.
[0008]
The invention of claim 2 Heat treatment provided with a boat main body that supports a large number of objects to be processed in multiple stages in the vertical direction, and a single leg leg connected to a rotating shaft for rotating the boat body in the circumferential direction of the object to be processed In the boat, the boat body and the leg are integrally formed, and a flange is formed at a connecting portion between the leg and the rotating shaft, and the flange is fastened to the rotating shaft with a screw. And a pedestal having a diameter larger than that of the flange portion is interposed between the flange portion and the rotating shaft portion. The surface that contacts the rotating shaft portion is mirror-finished.
[0009]
The invention of claim 3 A heat treatment furnace, a lid body that can be moved up and down to open and close the furnace port of the heat treatment furnace, and a large number of objects to be processed that are provided on the top of the lid body are mounted in multiple stages in the vertical direction and carried into the heat treatment furnace In a heat treatment apparatus including a heat treatment boat to be carried out and a rotation introduction mechanism provided in a lid for rotating the boat, the rotation introduction mechanism is a rotating shaft that passes through the lid and is exposed in the furnace. The boat has a single leg formed integrally with the boat body, the leg is formed with a flange, and the flange is fastened to the rotating shaft with a screw, The flange part The surface that contacts the rotating shaft portion is mirror-finished.
[0010]
According to a fourth aspect of the present invention, there is provided a heat treatment furnace, a lid body that can be moved up and down to open and close a furnace port of the heat treatment furnace, and a large number of objects to be treated that are provided above the lid body in a vertical direction. In a heat treatment apparatus including a heat treatment boat that is loaded and carried into a heat treatment furnace, and a rotation introduction mechanism that is provided on the lid to rotate the boat, the rotation introduction mechanism penetrates the lid. The boat has a rotating shaft portion exposed in the furnace, and the boat has a single leg formed integrally with the boat body, the leg portion having a flange portion, and the flange portion is the rotating shaft. Are fastened with screws A pedestal having a diameter larger than that of the flange portion is interposed between the flange portion and the rotating shaft portion, and a surface that contacts the rotating shaft portion of the pedestal is mirror-finished. It is characterized by that.
[0011]
The invention of claim 5 claims 3 In the vertical heat treatment apparatus described above, a surface of the rotating shaft portion that contacts the flange is coated with a composite ceramic film.
[0012]
The invention of claim 6 claims 4 In the vertical heat treatment equipment The surface of the rotating shaft that contacts the pedestal is coated with a composite ceramic film. It is characterized by that.
[0013]
The invention of claim 7 is claimed in claim 3 In the vertical heat treatment equipment The flange portion covers the upper surface of the shaft hole portion through which the rotation shaft portion of the lid body passes with a predetermined gap through which inert gas is jetted, and the rotation shaft portion has a height to adjust the gap. Adjustable provided It is characterized by that.
[0014]
The invention of claim 8 claims 4 In the vertical heat treatment equipment The pedestal covers the upper surface of the shaft hole portion through which the rotation shaft portion of the lid passes with a predetermined gap through which inert gas is ejected, and the height of the rotation shaft portion is adjusted to adjust the gap. Possible It is characterized by that.
[0015]
The invention according to claim 9 is the claim 3 or 4 In the vertical heat treatment equipment The screw is coated with a superalloy film It is characterized by that.
[0016]
The invention according to claim 10 is the claim 3 or 4 In the vertical heat treatment apparatus described above, A cover member for covering the head portion of the screw and purging with an inert gas is attached to the flange portion, and an inert gas introduction hole for introducing an inert gas into the cover member from the rotating shaft side is provided. Has been It is characterized by that.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0018]
In FIG. 1, reference numeral 1 denotes a vertical heat treatment apparatus. The vertical heat treatment apparatus 1 includes a vertical heat treatment furnace 2 for accommodating an object to be processed such as a semiconductor wafer w and performing a predetermined process such as an oxidation process. . The heat treatment furnace 2 includes a vertically long processing vessel having a lower portion opened as a furnace port 3, for example, a reaction tube 4 made of quartz, a lid 5 that can open and close the furnace port 3 of the reaction tube 4, and the reaction tube 4 is mainly composed of a heater 6 provided with a heating resistor capable of controlling the inside of the reaction tube (furnace) 4 to be heated to a predetermined temperature, for example, 300 to 1200 ° C.
[0019]
The reaction tube 4 is made of, for example, quartz, and is a single tube in the illustrated example (example). An outward flange portion 4 a is formed at the lower end portion of the reaction tube 4, and the flange portion 4 a is held at the lower portion of the base plate 8 via the flange holding member 7. The reaction tube 4 passes through the base plate 8 from below. The heater 6 is installed on the base plate 8.
[0020]
The flange 4a of the reaction tube 4 is provided with a plurality of gas introduction pipes 9 for introducing a processing gas and an inert gas for purging into the reaction tube 4, and a gas supply system pipe is connected to the gas introduction pipes 9 Has been. In addition, the diameter of the top of the reaction tube 4 is gradually reduced, and an exhaust port 10 is formed at the top, and the exhaust port 10 has a vacuum pump, a pressure control valve, and the like that can control the inside of the reaction tube 4 under reduced pressure. Exhaust piping is connected (not shown).
[0021]
Below the heat treatment furnace 2, a heat treatment boat 16 (described later) provided on the lid 5 is loaded (loaded) into the heat treatment furnace (that is, the reaction tube 4) 2 or unloaded from the heat treatment furnace 2. Or a work area (loading area) 12 for transferring the wafer w to the boat 16. The work area 12 is provided with an elevating mechanism 13 for elevating the lid 5 so that the boat 16 can be carried in and out.
[0022]
The lid 5 is made of, for example, SUS, and is held on a holding plate 15 via a plurality of buffer mechanisms 14, and the holding plate 15 is connected to the elevating mechanism 13. The lid 5 is configured to abut against the open end of the furnace port 3 so as to seal the furnace port 3. A rotation introducing mechanism 26 having a rotation shaft portion 27 to be described later for rotating the boat 16 is provided at the lower center portion of the lid 5.
[0023]
The boat 16 is made of, for example, quartz, and has a boat body 17 that supports a large number of wafers w having a large diameter, for example, 300 mm, for example, about 75 to 100 wafers in a horizontal state with a plurality of stages spaced in the vertical direction, and the boat body. The boat body 17 and the leg 18 are integrally formed with a single leg 18 connected to a rotary shaft 27 for rotating the 17 in the circumferential direction of the wafer. As shown in FIG. 2, a flange portion 19 is formed at a connecting portion of the leg portion 18 with the rotation shaft portion, and a plurality of, for example, 6 for fastening the flange portion 19 to the rotation shaft portion 27 with screws 20. Two holes 21 are provided.
[0024]
The boat body 17 includes a plurality of support columns 24 interposed between a bottom plate 22 and a top plate 23, and the support columns 24, the bottom plate 22 and the top plate 23 are integrally joined by welding or the like. The support posts 24 are arranged at predetermined intervals in the circumferential direction so as to surround the wafer w, and the front side (left side in FIG. 1) between the support posts 24 on both sides is an opening for taking in and out the wafer w by a transfer mechanism (not shown). It is said that. Grooves 25 for holding a large number of wafers w in multiple stages are formed in the support posts 24. The leg portion 18 is formed to have a predetermined thickness, for example, an outer diameter of about 30 to 50 mm, and a predetermined height, for example, a height including the flange portion 19 of about 250 to 350 mm. The leg portion 18 is preferably hollow from the upper end (including the bottom plate 22) to the vicinity of the flange portion 19 in order to reduce the heat capacity.
[0025]
For example, as shown in FIG. 2, the rotation introducing mechanism 26 includes a cylindrical upper housing 28 that is integrally provided at a lower center portion of the lid 5 and rotatably accommodates a rotating shaft portion 27, and an upper portion thereof. A lower housing 29 is hermetically connected to the lower end of the housing 28. A bottomed cylindrical rotating cylinder 31 integrally having a rotating shaft 30 at the shaft center is rotatably provided on the lower outer periphery of the lower housing 29 via a ball bearing 32, and the bottom center of the rotating cylinder 31 is provided. A rotary shaft 30 rising from the inside of the lower housing 29 is hermetically penetrated through a sealing means such as an O-ring or a magnetic fluid seal 33.
[0026]
A motor, which is a rotation driving means, is connected to the rotating cylinder 31 via a belt (not shown), whereby the rotating shaft 30 is driven to rotate. A shaft hole portion 34 through which the rotary shaft portion 27 passes is formed at the center portion of the lid 5, and the shaft hole portion 34 communicates with the inside of the upper housing 28 with substantially the same diameter.
[0027]
A pedestal 35 having a diameter larger than that of the flange portion 19 is interposed between the flange portion 19 of the leg portion 18 of the boat 16 and the rotary shaft portion 27, and this pedestal 35 is an upper surface of the shaft hole portion 34 of the lid body 5. Covering. The pedestal 35 is made of the same material as the boat 16, for example, quartz. This pedestal 35 is limited in size (outer diameter) of the flange portion 19 so that the leg portion 18 of the boat 16 can be inserted into a through hole 67 of a furnace port heating mechanism (thermo plug) 62 which is a furnace port heat retaining means described later. However, if there is no such restriction, it may be formed integrally with the flange portion 19 or the outer diameter of the flange portion 19 may be increased. Therefore, the pedestal 35 may be omitted.
[0028]
Contact surface (particularly on the pedestal side) due to a difference in thermal expansion caused by fastening the quartz flange portion 19 and the metal rotating shaft portion 27 with a screw 20 via a quartz pedestal 35. In order to prevent scuffing, the surface (in the embodiment, the entire lower surface) of the pedestal 35 that is in contact with the rotating shaft portion 27 is mirror-finished (polished). For the same reason, for example, alumina (Ai) is formed on the surface (entire upper surface) of the rotating shaft portion 27 that contacts the pedestal 35. ₂ O ₃ ), Silica (SiO ₂ ), Chromia (CrO ₃ ) As a main component and coated with a hard composite ceramic film rich in heat resistance and corrosion resistance.
[0029]
As a method for coating this composite ceramic film (also referred to as a chromium oxide film), for example, a method for forming a chromium oxide film described in JP-A-63-317680 can be used. When the pedestal 35 is not provided, the contact surface of the flange portion 19 with the rotating shaft portion 27 is mirror-finished, and the contact surface of the rotating shaft portion 27 with the flange portion 19 is coated with the composite ceramic film.
[0030]
As shown in FIG. 4, the flange portion 19 or the pedestal (pedestal in the embodiment) 35 has an inert gas such as nitrogen gas (N) on the upper surface of the shaft hole portion 34 through which the rotation shaft portion 27 of the lid 5 passes. ₂ ) Covers a predetermined gap S to be ejected, and the rotary shaft portion 27 is provided so that the height can be adjusted in order to adjust the gap S. The rotary shaft portion 27 includes a cylindrical upper member (upper hub) 36 whose upper end is closed, and a lower member (lower hub) 37 that is crowned (fitted) so that the upper member 36 can be moved up and down. Has been.
[0031]
The lower member 37 has a projecting shaft portion 38 for centering at the upper end shaft center portion, and a fitting hole 39 into which the upper end portion of the rotation shaft 30 of the rotation introducing mechanism 26 is fitted at the lower end shaft center portion. ing. A flange portion 40 is formed at the lower end of the lower member 37, and the lower member 37 is fixed to the upper end portion of the rotating shaft 30 by a fixing screw 41 screwed from the flange portion 40 into the shaft center portion. Centering holes 42, 43, and 44 into which the protruding shaft portion 38 of the lower member 37 is fitted are formed in the upper member 36, the flange portion 19 of the leg portion 18, and the shaft center portion of the pedestal 35.
[0032]
Further, positioning pins 45 are provided upright on the upper surface of the flange portion 40 of the lower member 37, and positioning holes 46, 47, in which the positioning pins 45 are fitted in the upper member 36, the flange portion 19 of the leg portion 18, and the pedestal 35. 48 is formed. The positioning hole 46 formed in the upper member 36 may be a positioning groove. The upper member 36 is preferably formed with an annular groove 49 on the outer periphery in order to reduce the heat capacity.
[0033]
In order to prevent corrosive processing gas from entering the shaft hole 34 or the upper housing 28 of the lid 5, an inert gas such as nitrogen gas (N ₂ ) Has been introduced. That is, as shown also in FIG. 2, an annular groove 50 is provided in the upper surface portion of the lower housing 29 facing the lower surface of the lower member 37, and the lower housing 29 is not allowed to introduce an inert gas into the annular groove 50. An active gas introduction pipe 51 is connected. The flange portion 40 of the lower member 37 is provided with a notch 52 so that an inert gas can easily enter the upper housing 28 from the annular groove 50.
[0034]
In order to adjust the height of the rotary shaft portion 27, that is, the height of the upper member 36, the upper member 36 is pulled or pushed back against the upper surface of the flange portion 40 of the lower member 37 as shown in FIGS. 3 to 4. A plurality of, for example, three pull screws 53 and three push screws 54 are provided. The lower end portion of the pull screw 53 is screwed into a screw hole 70 formed in the flange portion 40 of the lower member 37, and the push screw 54 is in contact with the upper surface of the flange portion 40 of the lower member 37. Screw holes 55, 56, and 57 for screwing or inserting screws (fastening screws) 20, pulling screws 52, and push screws 54 for fastening the flange portion 19 of the boat 16 are appropriately spaced in the circumferential direction in the upper member 36. And in a well-balanced arrangement.
[0035]
The screw 20 that fixes (fastens) the flange portion 19 of the leg portion 18 of the boat 16 is screwed into the screw hole 55 of the upper member 36 through the base 35 from the upper surface of the flange portion 19. The screw 20 is made of, for example, SUS or Inconel, and is coated with a hard superalloy film made of, for example, nickel aluminum (NiAl) in order to prevent the screw 20 from being seized.
[0036]
In order to prevent loosening of the screw 20 due to thermal expansion, a large number of disc springs 58 are interposed between the flange portion 19 and the head 20 a of the screw 20. A washer (not shown) is interposed between the flange portion 19 and the disc spring 58. As shown in FIG. 5, a plurality of, for example, nine disc springs 58 are stacked and used so that the concave sides and the convex sides are opposed to each other so that the thermal expansion of the screw 20 can be absorbed.
[0037]
In order to prevent corrosion of the head 20a of the screw 20 and the disc spring 58 by the corrosive processing gas, the flange portion 19 covers the head 20a side of the screw 20 as shown in FIGS. A cover member 59 for purging with an inert gas such as nitrogen gas is attached, and an inert gas introduction hole 60 for introducing the inert gas into the cover member 59 from the rotating shaft portion 27 side is provided. The cover member 59 is made of, for example, quartz, and is formed in an annular shape with an inverted U-shaped cross section so as to cover the head 20a side of the screw 20 on the upper surface of the flange portion 19, and can be easily attached and detached. It is formed in half. The upper member 36 and the pedestal 35 are provided with an inert gas introduction hole 61 corresponding to the inert gas introduction hole 60 of the flange portion 19 (see FIG. 3).
[0038]
A furnace port heating mechanism 62 that is a furnace port heat retaining means is fixed on the lid 5. The furnace port heating mechanism 62 includes an annular cover plate 63 placed so as to cover the upper surface of the lid 5, and a plurality of support columns 64 erected on the cover plate 63 at appropriate intervals in the circumferential direction, A planar heating resistor 65 provided horizontally over the upper ends of the columns 64, and a plurality of, for example, two shields provided over the column 64 at appropriate intervals below the heating resistors 65. The heat plate 66 is mainly composed.
[0039]
The cover plate 63, the support column 64, and the heat shield plate 66 are made of, for example, quartz, and the cover plate 66 protects the upper surface of the lid 5 from a processing gas having corrosive properties. The heating resistor 65 and the heat shield plate 66 are provided with through holes 67 through which the leg portions 18 including the flange portions 19 of the boat 16 pass. A conducting pipe 68 for conducting a cable for supplying electricity to the heating resistor 65 is provided in a state of airtightly penetrating the lid 5 from the holding plate 15. On the cover plate 63, an annular heat shield cover 69 covering the periphery and the top of the flange portion 19 is provided in a double manner in the illustrated example. These heat shield covers 69 are made of, for example, quartz, and are formed in half so that they can be easily attached and detached.
[0040]
According to the heat treatment boat 16 having the above-described configuration, the boat main body 17 that supports a large number of wafers w in multiple stages in the vertical direction, and the rotating shaft portion 27 for rotating the boat main body 17 in the circumferential direction of the wafer w. A leg portion 18 to be connected, the boat body 17 and the leg portion 18 are integrally formed, and a flange portion 19 is formed at a connection portion between the leg portion 18 and the rotation shaft portion 27; Since the flange portion 19 is provided with a hole portion 21 for fastening the flange portion 19 to the rotation shaft portion with a screw 20, for example, a leg portion 18 of a single foot boat 16 made of quartz and a rotation shaft portion made of metal, for example. 27 can be reliably connected, and the boat 16 can be prevented from falling, falling, and being damaged, and the earthquake resistance can be improved.
[0041]
Further, since the surface of the flange portion (the pedestal in the embodiment) 19 that comes into contact with the rotary shaft portion 27 is mirror-finished to reduce the frictional resistance, the quartz flange portion 19 during thermal expansion and It is possible to prevent the flange portion 19 from being scratched due to the difference in thermal expansion of the metallic rotating shaft portion 27, and to improve durability. In the case of the embodiment, a pedestal 35 having a diameter larger than that of the flange portion 19 is interposed between the flange portion 19 and the rotary shaft portion 27, and the surface that contacts the rotary shaft portion 27 of the pedestal 35 is mirror-finished. Therefore, the abrasion of the pedestal 35 due to the difference in thermal expansion between the quartz pedestal 35 and the metal rotary shaft 27 during thermal expansion can be prevented, and the durability can be improved.
[0042]
Further, according to the vertical heat treatment apparatus 1, a heat treatment furnace 2, a lid body 5 that can be moved up and down to open and close the furnace port 3 of the heat treatment furnace 2, and a large number of pieces provided on the top of the lid body 5. A heat treatment boat 16 in which wafers w are loaded in multiple stages in the vertical direction and carried into and out of the heat treatment furnace 2, and a rotation introduction mechanism 26 provided on the lid 5 for rotating the boat 16 are provided. The mechanism 26 has a rotating shaft portion 27 that penetrates the lid body 5 and is exposed in the furnace. The boat 16 is formed by integrally forming one leg portion 18 on the boat body 17. Is formed with a flange portion 19, and the flange portion 19 is fastened to the rotary shaft portion 27 with a screw 20. Therefore, the leg portion 18 of the single foot boat 16 made of quartz, the metal rotary shaft portion 27, Can be securely connected to prevent the boat from falling, falling, or breaking. Door can be, thereby improving the earthquake resistance.
[0043]
Further, the surface of the rotary shaft 27 that contacts the flange portion (in the embodiment, a pedestal) 19 is coated with a composite ceramic film to reduce the frictional resistance. As a result, it is possible to prevent the flange portion 19 from being scratched due to the difference in thermal expansion between the portion 19 and the metal rotating shaft portion 27, and to improve durability. The flange portion 19 or the base 535 covers the upper surface of the shaft hole portion 34 through which the rotation shaft portion 27 of the lid 5 passes with a predetermined gap S through which inert gas, for example, nitrogen gas is jetted, and the gap Since the rotary shaft portion 27 is provided so as to be adjustable in height so as to adjust S, the clearance S for ejecting the inert gas for preventing corrosion can be easily adjusted.
[0044]
The adjustment of the gap S can prevent contact between the rotating flange portion 19 or the pedestal 35 and the fixed lid body 5 and scuffing damage caused by the contact, and can also properly eject the inert gas from the gap S. The amount can be secured. Further, by blowing inactive gas from the gap S, it is possible to prevent the corrosive processing gas used for the heat treatment from entering the upper housing 28 from the shaft hole portion 34 of the lid 5, and the rotating shaft portion 27. Corrosion such as can be prevented. The rotary shaft portion 27 includes an upper member 36 and a lower member 37 that supports the upper member 36 so as to be movable up and down. A pull screw 53 and a push screw 54 are provided between the upper member 36 and the lower member 37 and are Since the height of the member 36 can be adjusted, the height of the rotary shaft 27 can be easily adjusted with a simple structure.
[0045]
Since the screw 20 is coated with a superalloy film such as NiAl, the screw 20 can be prevented from being galling. The pull screw 53 and the push screw 54 are preferably coated with a superalloy film for the same reason. Furthermore, since a number of disc springs 58 are interposed between the flange portion 19 and the head 20a of the screw 20, it is possible to prevent the screw 20 from loosening during thermal expansion.
[0046]
A cover member 59 for covering the head 20a side of the screw 20 and purging with an inert gas is attached to the flange portion 19 and an inert gas is introduced into the cover member 59 from the rotary shaft portion 27 side. Since the inert gas introduction hole 60 is provided, corrosion on the head 20a side of the screw 20 can be prevented. A furnace port heat retaining means, for example, a furnace port heating mechanism 62 is fixed on the lid 5, and the furnace port heating mechanism 62 is provided with a through hole 67 through which the leg portion 18 of the boat 16 passes. Only the boat 16 can be rotated in a non-contact state with the mouth heating mechanism 62, and the furnace mouth heating mechanism 62 can be prevented from falling, falling, and being damaged, and improvement in earthquake resistance and durability can be achieved.
[0047]
Although the embodiments of the present invention have been described in detail with reference to the drawings, the present invention is not limited to the above-described embodiments, and various design changes and the like can be made without departing from the scope of the present invention. is there. For example, the heat treatment apparatus may be configured to perform a CVD process, a diffusion process, an annealing process, etc. in addition to the oxidation process. The material of the boat may be, for example, silicon carbide or polysilicon (Si) other than quartz. The object to be processed may be, for example, an LVD substrate other than the semiconductor wafer. The reaction tube may have a double tube structure of an inner tube and an outer tube. The furnace port heat retaining means may be a heat retaining cylinder.
[0048]
【The invention's effect】
In short, according to the present invention, the following effects can be obtained.
[0049]
(1) According to the first aspect of the present invention, the boat main body supports a large number of objects to be processed in multiple stages in the vertical direction, and is connected to the rotating shaft portion for rotating the boat main body in the circumferential direction of the objects to be processed. The boat body and the leg portion are integrally formed, and a flange portion is formed at a connection portion between the leg portion and the rotation shaft portion. Is provided with a hole for fastening it to the rotating shaft with a screw. The surface of the flange portion that comes into contact with the rotating shaft portion is mirror-finished. Therefore, the leg portion of the single-legged boat and the rotating shaft portion can be reliably connected, and the boat can be prevented from falling, falling, and being damaged, and the earthquake resistance can be improved. At the same time, it is possible to prevent scratches during thermal expansion and improve durability. .
[0050]
(2) According to the invention of claim 2, Heat treatment provided with a boat main body that supports a large number of objects to be processed in multiple stages in the vertical direction, and a single leg leg connected to a rotating shaft for rotating the boat body in the circumferential direction of the object to be processed In the boat, the boat body and the leg are integrally formed, and a flange is formed at a connecting portion between the leg and the rotating shaft, and the flange is fastened to the rotating shaft with a screw. And a pedestal having a diameter larger than that of the flange portion is interposed between the flange portion and the rotating shaft portion. Since the mirror surface is applied to the surface that comes into contact with the rotating shaft, the leg of the single-legged boat and the rotating shaft can be securely connected to prevent the boat from falling, falling, or breaking. Can improve earthquake resistance At the same time, it is possible to prevent scratches during thermal expansion and improve durability. .
[0051]
(3) According to the invention of claim 3, A heat treatment furnace, a lid body that can be moved up and down to open and close the furnace port of the heat treatment furnace, and a large number of objects to be processed that are provided on the top of the lid body are mounted in multiple stages in the vertical direction and carried into the heat treatment furnace In a heat treatment apparatus including a heat treatment boat to be carried out and a rotation introduction mechanism provided in a lid for rotating the boat, the rotation introduction mechanism is a rotating shaft that passes through the lid and is exposed in the furnace. The boat has a single leg formed integrally with the boat body, the leg is formed with a flange, and the flange is fastened to the rotating shaft with a screw, The flange part Because the surface that comes into contact with the rotating shaft is mirror-finished, The leg part of the single-leg boat and the rotating shaft part can be reliably connected, and the boat can be prevented from falling, falling, breaking, and improving the earthquake resistance. It is possible to prevent scuffing at the time of thermal expansion and improve durability.
[0052]
(4) According to the invention of claim 4, a heat treatment furnace, a lid body that can be raised and lowered to open and close the furnace port of the heat treatment furnace, and a large number of objects to be treated provided on the top of the lid body A heat treatment apparatus comprising a heat treatment boat mounted in multiple stages in the vertical direction and carried into and out of a heat treatment furnace, and a rotation introduction mechanism provided on a lid for rotating the boat, wherein the rotation introduction mechanism is a lid The boat has a rotating shaft portion that penetrates the body and is exposed to the furnace, and the boat is formed by integrally forming a single leg portion on the boat body, and the flange portion is formed on the leg portion. The part is fastened with screws to the rotating shaft part A pedestal having a diameter larger than that of the flange portion is interposed between the flange portion and the rotating shaft portion, and a surface that contacts the rotating shaft portion of the pedestal is mirror-finished. Therefore, the leg portion of the single-legged boat and the rotating shaft portion can be reliably connected, and the boat can be prevented from falling, falling, and being damaged, and the earthquake resistance can be improved. At the same time, it is possible to prevent scratches during thermal expansion and improve durability. .
[0053]
(5) According to the invention of claim 5, since the composite ceramic coating is coated on the surface of the rotating shaft portion that contacts the flange portion, it is possible to prevent scuffing at the time of thermal expansion and durability. Can improve the performance.
[0054]
(6) According to the invention of claim 6, The surface of the rotating shaft that contacts the pedestal is coated with a composite ceramic film. For, Can prevent rubbing damage during thermal expansion and improve durability .
[0055]
(7) According to the invention of claim 7, The flange portion covers the upper surface of the shaft hole portion through which the rotation shaft portion of the lid body passes with a predetermined gap through which inert gas is jetted, and the rotation shaft portion has a height to adjust the gap. Adjustable provided For, It is possible to easily adjust the gap for injecting the inert gas for preventing corrosion. .
[0056]
(8) According to the invention of claim 8, The pedestal covers the upper surface of the shaft hole portion through which the rotation shaft portion of the lid passes with a predetermined gap through which inert gas is ejected, and the height of the rotation shaft portion is adjusted to adjust the gap. Possible For, It is possible to easily adjust the gap for injecting the inert gas for preventing corrosion. .
[0057]
(9) According to the invention of claim 9, The screw is coated with a superalloy film For, It can prevent the screw from being galling .
[0058]
(10) According to the invention of claim 10, the A cover member for covering the head portion of the screw and purging with an inert gas is attached to the flange portion, and an inert gas introduction hole for introducing an inert gas into the cover member from the rotating shaft side is provided. Has been For, Corrosion on the head side of the screw can be prevented .
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a vertical heat treatment apparatus showing an embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view of a main part of the vertical heat treatment apparatus.
FIG. 3 is a schematic plan view of an upper surface of a rotation shaft portion.
4 is a cross-sectional view taken along line AA in FIG.
FIG. 5 is a cross-sectional view of a disc spring.
FIG. 6 is a plan view showing a configuration of a screw cover attached to a flange of a boat.
[Explanation of symbols]
1 Vertical heat treatment equipment
w Semiconductor wafer (object to be processed)
S clearance
2 Heat treatment furnace
3 Furnace
5 lid
16 Heat treatment boat
17 Boat body
18 legs
19 Flange
20 screws
21 hole
26 Rotation introduction mechanism
27 Rotating shaft
34 Shaft hole
58 Disc spring
59 Cover member
60 Gas introduction hole
62 Furnace port heating mechanism (furnace port heat retaining means)
67 Through hole

Claims

Heat treatment provided with a boat main body that supports a large number of objects to be processed in multiple stages in the vertical direction, and a single leg leg connected to a rotating shaft for rotating the boat body in the circumferential direction of the object to be processed In the boat, the boat body and the leg are integrally formed, and a flange is formed at a connecting portion between the leg and the rotating shaft, and the flange is fastened to the rotating shaft with a screw. The heat treatment boat is characterized in that a hole portion is provided , and a surface that contacts the rotating shaft portion of the flange portion is mirror-finished .

Heat treatment provided with a boat main body that supports a large number of objects to be processed in multiple stages in the vertical direction, and a single leg leg connected to a rotating shaft for rotating the boat body in the circumferential direction of the object to be processed In the boat, the boat body and the leg are integrally formed, and a flange is formed at a connecting portion between the leg and the rotating shaft, and the flange is fastened to the rotating shaft with a screw. A hole having a diameter larger than that of the flange is interposed between the flange and the rotary shaft, and a surface that contacts the rotary shaft of the base is mirror-finished. A boat for heat treatment characterized by

A heat treatment furnace, a lid body that can be moved up and down to open and close the furnace port of the heat treatment furnace, and a large number of objects to be processed that are provided on the top of the lid body are mounted in multiple stages in the vertical direction and carried into the heat treatment furnace In a heat treatment apparatus including a heat treatment boat to be carried out and a rotation introduction mechanism provided in a lid for rotating the boat, the rotation introduction mechanism is a rotating shaft that passes through the lid and is exposed in the furnace. The boat has a single leg formed integrally with the boat body, the leg is formed with a flange, and the flange is fastened to the rotating shaft with a screw, A vertical heat treatment apparatus, wherein a surface of the flange portion that contacts the rotating shaft portion is mirror-finished .

A heat treatment furnace, a lid body that can be moved up and down to open and close the furnace port of the heat treatment furnace, and a large number of objects to be processed that are provided on the top of the lid body are mounted in multiple stages in the vertical direction and carried into the heat treatment furnace In a heat treatment apparatus including a heat treatment boat to be carried out and a rotation introduction mechanism provided in a lid for rotating the boat, the rotation introduction mechanism is a rotating shaft that passes through the lid and is exposed in the furnace. The boat has a single leg formed integrally with the boat body, the leg is formed with a flange, and the flange is fastened to the rotating shaft with a screw, A vertical type characterized in that a pedestal having a diameter larger than that of the flange portion is interposed between the flange portion and the rotating shaft portion, and a surface that contacts the rotating shaft portion of the pedestal is mirror-finished. Heat treatment equipment .

The vertical heat treatment apparatus according to claim 3 , wherein a surface of the rotating shaft portion that contacts the flange is coated with a composite ceramic film.

Vertical heat treatment apparatus of the on the surface in contact with the base of the rotary shaft portion is characterized in that the composite ceramic film is coated claim 4 Symbol mounting.

The flange portion covers the upper surface of the shaft hole portion through which the rotation shaft portion of the lid body passes with a predetermined gap through which inert gas is jetted, and the rotation shaft portion has a height to adjust the gap. adjustably it is provided the vertical heat treatment apparatus according to claim 3 Symbol mounting characterized.

The pedestal covers the upper surface of the shaft hole portion through which the rotation shaft portion of the lid passes with a predetermined gap through which inert gas is ejected, and the height of the rotation shaft portion is adjusted to adjust the gap. that it is capable provided the vertical heat treatment apparatus according to claim 4 Symbol mounting characterized.

Vertical heat treatment apparatus of the screw according to claim 3 or 4 Symbol mounting, characterized in that super-alloy coating is coated.

A cover member for covering the head portion of the screw and purging with an inert gas is attached to the flange portion, and an inert gas introduction hole for introducing an inert gas into the cover member from the rotating shaft side is provided. vertical heat treatment apparatus according to claim 3 or 4 further characterized in that is provided.