JP3858543B2 - Heater lamp - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heater lamp used for semiconductor heating, glass heating or food heating.
[0002]
[Prior art]
Conventionally, as disclosed in JP-A-2-27686 and JP-A-7-60670, a heater lamp is made to emit infrared rays by coating ceramics, which are infrared emitting substances, on the outer surface of a glass envelope of a luminous body. Things are used.
[0003]
[Problems to be solved by the invention]
However, such a heater lamp has a problem that, when vibration or impact is applied to the ceramics formed on the outer surface of the sealed body, the surface portion peels off and contaminates the object to be heated.
[0004]
Moreover, since the ceramics is formed in a holus shape, it is easy to absorb moisture, and when it is used in a reaction container such as in a vacuum in a state of absorbing moisture, the moisture absorbed in the ceramics evaporates, The work environment will be worsened.
[0005]
Furthermore, if ceramics containing a regulating substance such as chrome are used to emit infrared rays of a desired wavelength, this regulating substance may be scattered during lighting, and the environment in which the scattering of these substances is restricted (food heating Etc.) has a problem that such a heater lamp cannot be used.
[0006]
In view of the various problems described above, the object of the present invention is to cause infrared radiation to be emitted very stably without causing separation or scattering of infrared radiation material, absorption and evaporation of moisture, etc. It is an object of the present invention to provide a heater lamp having a degree of freedom in selecting an infrared emitting material.
[0007]
[Means for Solving the Problems]
The present invention employs the following means in order to solve the above problems.
[0008]
First means, the halogen gas is enclosed in the inner portion of the sealing portion is formed tubular bulb at both ends, the filament made of tungsten along the tube axis in the interior of the tubular sealing member is disposed In the heater lamp
In the tubular envelope, an infrared radiation member is disposed so as to cover the filament,
The infrared radiation member is characterized by being disposed between away from the tubular sealing member by the holding member.
[0009]
The second means is characterized in that, in the first means, the infrared radiation member is a cylindrical ceramic tube.
[0010]
A third means is characterized in that, in the first means, the infrared radiation member is an inner tube arranged in a tube-shaped envelope and coated with an infrared radiation material on the outer surface.
[0011]
In the fourth means, halogen gas is sealed inside a tube-shaped envelope having sealing portions formed at both ends, and a filament made of tungsten is arranged along the tube axis inside the tube-shaped envelope. In the heater lamp,
A tubular inner tube formed so as to cover the filament and having an outer surface sealed to the inner surface of the tubular mold envelope at both ends is disposed in the tubular mold envelope, and the sealed tubular mold An infrared radiation member is disposed in a space formed in the inner surface of the sealed body and the outer surface tube of the inner tube.
[0012]
A fifth means is characterized in that, in the fourth means, the infrared radiation member is an infrared radiation material applied to the outer surface of the inner tube.
[0013]
A sixth means is characterized in that, in the fourth means, the infrared radiation member is a cylindrical member made of an infrared radiation material fitted on the outer surface of the inner tube.
[0014]
A seventh means is any one of the fourth to sixth means, wherein the space is formed in a vacuum state or a state in which an inert gas is sealed.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
A first embodiment of the present invention will be described with reference to FIGS.
[0017]
FIG. 1 is a cross-sectional view showing a configuration of a heater lamp according to the present embodiment, and FIG. 2 is an enlarged cross-sectional view of an end portion of the heater lamp shown in FIG.
[0018]
In these figures, 1 is a heater lamp composed of a halogen lamp in which a trace amount of halogen gas is added to an enclosed gas, 2 is an external quartz tube constituting a tubular envelope, and 3 is provided in the external quartz tube 2 and is ceramic-type. An inner tube 4 as an infrared radiation member made of a heat-resistant material, 4 is supported by a support member 5 inside the inner tube 3, a filament made of tungsten or the like as a heating element, and 6 is provided at both ends of the heater lamp 1 and connected to a power source. An external lead rod, 7 an internal lead rod, 8 a molybdenum foil connecting the external lead rod 6 and the internal lead rod 7, 9 a sealing portion, and 10 an intermediate between the external quartz tube 2 and the internal tube 3. A holding member that holds the inner tube 3, 11 is an exhaust tip, and 12 is a protrusion formed on the sealing portion 9 side at both ends of the outer quartz tube 2 that restricts movement of the inner tube 3 in the tube axis direction. The protrusion 12 is formed by dipping a part of the outer quartz tube 2 by heat at a position with a margin so that the inner tube 3 can be extended.
[0019]
As shown in these drawings, in the heater lamp 1 of this embodiment, both end portions of a sealing body made of an external quartz tube 2 are sealed with a sealing portion 9, and the filament 4 as a heating element is covered therein. The hollow cylindrical inner tube 3 that radiates infrared rays is arranged away from the outer quartz tube 2 by the holding member 10 (space portion 13).
[0020]
Here, for the inner tube 3 as the infrared radiation member, for example, a cylindrical ceramic tube obtained by sintering Al ₂ O ₃ (99.7%) is used. By using such a ceramic tube, the halogen gas sealed in the external quartz tube 2 is not adversely affected.
[0021]
In addition, if the substance that does not adversely affect the sealed gas such as halogen gas in which the infrared radiation material constituting the infrared radiation member is sealed, the inner tube 3 is composed of a normal quartz glass tube, You may apply | coat and use on the surface of a quartz glass tube.
[0022]
As described above, in the present embodiment, by using the infrared radiation member as described above, the radiation of the infrared radiation material is peeled off and scattered from the heater lamp without affecting the light emission of the heater lamp having the halogen cycle. Since it does not occur and there is no absorption and evaporation of moisture, it is possible to provide a heater lamp that radiates infrared rays very stably.
[0023]
Further, according to the present embodiment, the inner tube 3 is disposed apart from the outer quartz tube 2 via the holding member 10 and is not in direct contact, so that the heat of the inner tube 3 is directly applied to the outer quartz tube 2. Since it is not deprived, the rise of heating is fast, temperature unevenness does not occur, and further, overheating of the external quartz tube 2 can be prevented, so devitrification and dissolution of the external quartz tube 2 are prevented. be able to.
[0024]
Next, a second embodiment of the present invention will be described with reference to FIGS.
[0025]
3 is a cross-sectional view showing the configuration of the heater lamp according to the present embodiment, FIG. 4 is an enlarged cross-sectional view of the end portion of the heater lamp shown in FIG. 3, and FIG. 5 is an enlarged view of a portion A shown in FIG.
[0026]
In these drawings, 20 is a sealing portion that seals between the inner surface of the outer quartz tube 2 and the outer surface of the inner tube 3 at both ends of the inner tube 3 composed of a quartz glass tube or the like, and 21 is the outer surface of the inner tube 3. It is an infrared radiation material that emits infrared rays applied to the surface.
[0027]
Other configurations are substantially the same as the configurations with the same reference numerals shown in FIGS.
[0028]
In the present embodiment, when there is a possibility that the infrared radiation material applied to the outer surface of the inner tube 3 may peel off, scatter, or have some influence on light emission to the heater lamp having a halogen cycle, FIG. As shown in FIG. 5, the outer space 23 of the inner tube 3 coated with the infrared radiation material 21 is sealed by the sealing portion 22 of the sealing portion 20, and the space between the inner space 24 and the outer space 23 of the inner tube 3 is sealed. It is constructed by blocking.
[0029]
As a result, the heater lamp of this embodiment does not need to consider the influence of the infrared emitting material used as the infrared emitting member on the halogen cycle, etc., as compared with the first embodiment, so that the infrared emitting material can be easily selected. It becomes.
[0030]
In the present embodiment, the case where the infrared radiation material is applied to the outer surface of the inner tube 3 as the infrared radiation member has been described. However, the infrared radiation material is not limited to the material coated with the infrared radiation material, and may exhibit the same function. For example, a cylindrical member made of ceramics or metal (SUS, iron, etc.) may be externally fitted to the inner tube 3. Further, ceramic or metal (SUS, iron, etc.) powder may be enclosed in the external space 23.
[0031]
Further, when a metal is used as the infrared radiation member, the external space 23 may be evacuated or filled with an inert gas in order to prevent oxidation due to a high temperature while the heater lamp is turned on.
[0032]
【The invention's effect】
According to the first to third aspects of the present invention, there is no influence on the light emission of the heater lamp having a halogen cycle, the infrared radiation material is not peeled off or scattered, and the moisture is not absorbed and evaporated. Therefore, it is possible to provide a heater lamp that radiates infrared rays very stably.
[0033]
According to the invention described in claim 4 of the present application, since the inner tube is disposed away from the tube-shaped envelope via the holding member, the heat from the inner tube is directly taken away by the tube-shaped envelope. In this case, the heating rises quickly, temperature unevenness does not occur, and overheating of the tubular envelope can be prevented, and devitrification and dissolution of the tubular envelope can be prevented.
[0034]
Further, according to the invention described in claims 5 to 7 of the present application, in addition to the effects of the invention described in claims 1 to 4 of the present application, it is not necessary to consider the influence of the infrared emitting substance on the halogen cycle, etc. Infrared emitting material can be easily selected.
[0035]
According to the eighth aspect of the present invention, when an infrared radiation member such as metal is used, it is possible to prevent oxidation due to a high temperature during lighting of the heater lamp.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a configuration of a heater lamp according to a first embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view of an end portion of a heater lamp shown in FIG.
FIG. 3 is a cross-sectional view showing a configuration of a heater lamp according to a second embodiment of the present invention.
4 is an enlarged cross-sectional view of an end portion of a heater lamp shown in FIG. 3. FIG. 5 is an enlarged view of a portion A shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Heater lamp 2 External quartz tube 3 Inner tube 4 Filament 5 Support part 6 External lead rod 7 Internal lead rod 9 Sealing part 10 Holding member 12 Projection part 13 Space part 20 Sealing part 21 Infrared radiation substance 22 Sealing part 23 External space

Claims (7)

Both end portions halogen gas in the inner portion of the sealing portion is formed tubular bulb is sealed in a heater lamp filament made of tungsten along the tube axis inside is disposed in the tubular bulb,
In the tubular envelope, an infrared radiation member is disposed so as to cover the filament,
The infrared radiation element, the heater lamp, characterized by being arranged between away from the tubular sealing member by the holding member.   2. The heater lamp according to claim 1, wherein the infrared radiation member is a cylindrical ceramic tube.   2. The heater lamp according to claim 1, wherein the infrared radiation member is an inner tube disposed in a tube-shaped envelope and coated with an infrared radiation material on an outer surface. In a heater lamp in which halogen gas is sealed inside a tube-shaped envelope in which sealing portions are formed at both ends, and a filament made of tungsten is disposed along the tube axis inside the tube-shaped envelope,
A tubular inner tube formed so as to cover the filament and having an outer surface sealed to the inner surface of the tubular mold envelope at both ends is disposed in the tubular mold envelope, and the sealed tubular mold A heater lamp, wherein an infrared radiation member is disposed in a space formed between an inner surface of a sealed body and an outer surface of the inner tube.   5. The heater lamp according to claim 4, wherein the infrared radiation member is an infrared radiation material applied to the outer surface of the inner tube.   5. The heater lamp according to claim 4, wherein the infrared radiation member is a cylindrical member made of an infrared radiation material fitted on the outer surface of the inner tube.   The heater lamp according to any one of claims 4 to 6, wherein the space is formed in a vacuum state or a state in which an inert gas is sealed.

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