JP3830485B2 - Wire loop shape, semiconductor device having the wire loop shape, and wire bonding method - Google Patents

Wire loop shape, semiconductor device having the wire loop shape, and wire bonding method Download PDF

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JP3830485B2
JP3830485B2 JP2003376440A JP2003376440A JP3830485B2 JP 3830485 B2 JP3830485 B2 JP 3830485B2 JP 2003376440 A JP2003376440 A JP 2003376440A JP 2003376440 A JP2003376440 A JP 2003376440A JP 3830485 B2 JP3830485 B2 JP 3830485B2
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wire
bonding
point
capillary
bonding point
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JP2005142314A (en
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瑞穂 白戸
洋生 藤澤
忠寿 秋田
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Kaijo Corp
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Description

本発明は、第１ボンディング点と第２ボンディング点との間をワイヤで接合するワイヤループ形状、そのワイヤループ形状を備えた半導体装置、ワイヤボンディング方法に関するものである。   The present invention relates to a wire loop shape in which a wire is bonded between a first bonding point and a second bonding point, a semiconductor device having the wire loop shape, and a wire bonding method.

従来から行われていたワイヤボンディング方法として、図４に示すように、リードフレーム１にマウントされた半導体チップ２のパッド２ａ（第１ボンディング点Ａ）とリードフレーム１のリード１ａ（第２ボンディング点Ｚ）とをワイヤ３により接続する方法がある。この場合におけるワイヤ３のループ形状として、図４（ａ）に示す台形形状と図４（ｂ）に示す三角形状とがある（例えば、特許文献１又は特許文献２参照）。 As a conventional wire bonding method, as shown in FIG. 4 , the pad 2a (first bonding point A) of the semiconductor chip 2 mounted on the lead frame 1 and the lead 1a (second bonding point) of the lead frame 1 are used. Z) can be connected by a wire 3. As a loop shape of the wire 3 in this case, there is a triangular shape illustrated in trapezoidal shape and 4 shown in FIG. 4 (a) (b) (e.g., see Patent Document 1 or Patent Document 2).

図４（ａ）に示す台形形状は、図５に示す工程により形成される。図５（ａ）に示すように、キャピラリ４が下降して第１ボンディング点Ａに対しワイヤ先端に形成されたボール３０をボンディングする。
次に図５（ｂ）に示すように、キャピラリ４はＢ点まで上昇してワイヤ３を繰
り出す。次に図５（ｃ）に示すように、キャピラリ４を第２ボンディング点Ｚと
反対方向にＣ点まで水平移動させる。 The trapezoidal shape shown in FIG. 4A is formed by the process shown in FIG. As shown in FIG. 5A , the capillary 4 is lowered to bond the ball 30 formed at the wire tip to the first bonding point A.
Next, as shown in FIG. 5B, the capillary 4 rises to the point B and feeds the wire 3. Next, as shown in FIG. 5C , the capillary 4 is moved horizontally to the point C in the direction opposite to the second bonding point Z.

一般に、キャピラリ４を第２ボンディング点Ｚと反対方向に移動させることをリバース動作という。これにより、ワイヤ３は、Ａ点からＣ点まで傾斜した形状となり、ワイヤ３の部分に癖３ａが付く。このＡ点からＣ点までの工程で繰り出されたワイヤ３は、図４（ａ）に示すネック高さ部Ｈ（２ａ〜３ａ間）となる。 続いて、図５（ｄ）に示すように、キャピラリ４はＤ点まで上昇してワイヤ３を繰り出す。その後、図５（ｅ）に示すように、キャピラリ４は再び第２ボンディング点Zと反対方向にＥ点まで水平移動、即ちリバース動作を行う。これにより、ワイヤ３は、Ｃ点からＥ点まで傾斜した形状となり、ワイヤ３の部分に癖３ｂが付く。 Generally, moving the capillary 4 in the direction opposite to the second bonding point Z is called a reverse operation. Thereby, the wire 3 becomes a shape inclined from the point A to the point C, and the hook 3a is attached to the wire 3 portion. The wire 3 drawn out in the process from the point A to the point C becomes a neck height portion H (between 2a and 3a) shown in FIG . Subsequently, as shown in FIG. 5 (d), the capillary 4 rises to the point D and feeds the wire 3. After that, as shown in FIG. 5E , the capillary 4 again moves horizontally to the point E in the direction opposite to the second bonding point Z, that is, performs a reverse operation. Thereby, the wire 3 becomes a shape inclined from the point C to the point E, and the hook 3b is attached to the wire 3 portion.

このＣ点からＥ点まで繰り出されたワイヤ３は、図４（ａ）に示す台形部長さ部分Ｌ（３ａ−３ｂ間）となる。次に、図５（ｆ）に示すように、キャピラリ４はＦ点まで上昇して図４（ａ）に示す傾斜部Ｓ（３ｂ−１ａ）分だけワイヤ３を繰り出す。そして、図５（ｆ）のｆ′、ｆ″に示すように、キャピラリ４は下降して第２ボンディング点Ｚに位置し、第２ボンディング点Ｚにワイヤ３をボンディングする。 The wire 3 drawn out from the point C to the point E becomes a trapezoidal length portion L (between 3a and 3b) shown in FIG . Next, as shown in FIG. 5 (f), the capillary 4 rises to the point F and feeds out the wire 3 by an amount corresponding to the inclined portion S (3b-1a) shown in FIG. 4 (a). Then, as indicated by f ′ and f ″ in FIG. 5 (f), the capillary 4 is lowered and positioned at the second bonding point Z, and the wire 3 is bonded to the second bonding point Z.

また、図４（ｂ）に示す三角ループは、図６に示す工程により形成される。三角ループは、台形ループの台形部長さ部分Ｌ（３ａ−３ｂ）を形成しないものであるので、図５（ｄ）（ｅ）に示す第２回目のリバース動作を行っていない。従って、図５（ｄ）（ｅ）（ｆ（ｆ′、ｆ″を除く））の工程は、図６（ｄ）の工程のみとなる。即ち、図５（ｂ）（ｃ）は図６（ｂ）（ｃ）と同じ工程であり、図６（ｃ）に示す第１回目のリバース動作後、図６（ｄ）に示すように、キャピラリ４はＦ点まで上昇してワイヤ３を繰り出す。その後、キャピラリ４は図５（ｆ）のｆ′、ｆ″と同様の図６（ｅ（ｅ′を含む））の動作を行って第２ボンディング点Ｚにワイヤ３をボンディングする。 Further, the triangular loop shown in FIG. 4 (b), is formed by the process shown in FIG. Since the triangular loop does not form the trapezoidal portion length portion L (3a-3b) of the trapezoidal loop, the second reverse operation shown in FIGS. 5D and 5E is not performed. Thus, the process of FIG. 5 (d) (e) ( f (f ', except f ")) is only the steps of FIG. 6 (d). That is, FIG. 5 (b) (c) Figure 6 (B) It is the same process as (c), and after the first reverse operation shown in FIG. 6 (c), the capillary 4 rises to the point F and feeds the wire 3 as shown in FIG. 6 (d) . Thereafter, the capillary 4 bonds the wire 3 to the second bonding point Z by performing the operation of Fig. 6 (including e ') including f' and f "of Fig. 5 (f).

このようなボンディング方法でワイヤループを形成した場合、第２ボンディング点１ａ（Ｚ点）でのワイヤ接続形状は、キャピラリの端部で押しつぶされるため三日月状になるので、剥離（ＰＵＬＬ）強度を適正に保つことができない恐れがある。
そこで、セキュリティボンディング方法が提案されている。この方法は、特許文献３に記載されているように、第２ボンディング点にワイヤをボンディングした後、一旦ワイヤを切断してワイヤの先端にボールを形成した後、再度第２ボンディング点に上からボールボンディングする方法である。ボールボンディングした後は、そのままワイヤを切断するか、あるいはさらにボールボンディングした位置に重ならない点にエンドボンディングするようにしている。 When a wire loop is formed by such a bonding method, the wire connection shape at the second bonding point 1a (Z point) becomes a crescent shape because it is crushed at the end of the capillary, so the peel (PULL) strength is appropriate. There is a fear that it cannot be kept.
Therefore, a security bonding method has been proposed. In this method, as described in Patent Document 3, after bonding a wire to a second bonding point, the wire is once cut to form a ball at the tip of the wire, and then again to the second bonding point from above. This is a ball bonding method. After the ball bonding, the wire is cut as it is, or end bonding is performed at a point that does not overlap the position where the ball bonding is performed.

特開平１０−２５６２９７号公報（図６）Japanese Patent Laid-Open No. 10-256297 (FIG. 6) 特開２０００−２２７５５８号公報（図２）Japanese Unexamined Patent Publication No. 2000-227558 (FIG. 2) 特開昭５７−１２５３０号公報（４図，６図、発明の詳細な説明）Japanese Patent Laid-Open No. 57-12530 (FIGS. 4 and 6, detailed description of the invention)

しかしながら、上記セキュリティボンディング方法では、一旦第２ボンディング点にワイヤボンディングした後ワイヤを切断し、新たにワイヤ先端にボールを形成して第２ボンディング点にボールボンディングをするために、時間が掛かるという問題がある。   However, in the above-described security bonding method, it takes a long time to perform wire bonding at the second bonding point after the wire bonding is performed once to the second bonding point, and then the ball is newly formed at the tip of the wire and then bonded to the second bonding point. There is.

本発明の課題は、第２ボンディング点でワイヤ接合強度を高め、かつワイヤリング時間が少なくて済む、ワイヤループ形状、その形状を備えた半導体装置及びワイヤボンディング方法の提供をすることにある。   An object of the present invention is to provide a wire loop shape, a semiconductor device having the shape, and a wire bonding method that increase the wire bonding strength at the second bonding point and reduce the wiring time.

上記課題を解決するために請求項１記載のワイヤループ形状は、第１ボンディング点と第２ボンディング点との間をワイヤで接続するワイヤループ形状において、第１ボンディング点にワイヤを接続する第１の工程と、次にキャピラリを設定されたｎ点（ｎは予めキャピラリの移動通過点として座標軸Ｘ，Ｙ，Ｚに設定した点で、１，２，３・・・の何れかを示す。）を通過する上昇下降移動・水平移動によるループコントロールを行う第２の工程と、続いて第２ボンディング点へボンディングを行う第３の工程と、次にワイヤを繰り出しながらキャピラリを所定距離垂直に上昇させ、更に第１ボンディング点方向に所定距離水平移動し、続いて所定距離上昇、更に第２ボンディング点上方付近まで水平移動して第１ボンディング点方向にワイヤループを形成する第４の工程と、続いて第２ボンディング点付近でワイヤの一部を含めて潰した状態にボンディングする第５の工程とにより形成したことを特徴としている。
上記の工程において、設定されたｎ点、とは予めキャピラリの移動通過点として座標軸（Ｘ，Ｙ，Ｚ）に設定したｎ（ｎは１，２，３・・・の何れかを示す。）個の点をいう（以下、同じ）。 In order to solve the above problem, the wire loop shape according to claim 1 is a wire loop shape in which a wire is connected between a first bonding point and a second bonding point, and a first wire is connected to the first bonding point. And n points where the capillary is set next (n is a point set in advance on the coordinate axes X, Y, Z as a moving passage point of the capillary and indicates any of 1, 2, 3,...) A second step of performing loop control by ascending / descending movement and horizontal movement passing through the wire , followed by a third step of bonding to the second bonding point, and then raising the capillary vertically by a predetermined distance while feeding the wire. Further, it moves horizontally by a predetermined distance in the direction of the first bonding point, then rises by a predetermined distance, further moves horizontally to the vicinity above the second bonding point, and moves in the direction of the first bonding point. A fourth step of forming a Yarupu, and the subsequently characterized by forming by a fifth step of bonding in a state of collapsed, including a portion of the wire in the second near the bonding point.
In the above process, the set n point is n previously set on the coordinate axis (X, Y, Z) as the moving passage point of the capillary (n indicates any one of 1, 2, 3,...). Points (hereinafter the same).

なお、上記工程中において、第４の工程と第５の工程をｎ回（ｎは１,２,３・・・）繰り返してワイヤループ形状を形成したことを特徴としている。   In the above process, the fourth process and the fifth process are repeated n times (n is 1, 2, 3,...) To form a wire loop shape.

また、上記課題を解決するために請求項３記載のワイヤボンディング方法は、第１ボンディング点と第２ボンディング点との間をワイヤボンディングする方法において、第１ボンディング点にワイヤを接続する第１の工程と、次にキャピラリを設定されたｎ点（ｎは予めキャピラリの移動通過点として座標軸Ｘ，Ｙ，Ｚに設定した点で、１，２，３・・・の何れかを示す。）を通過する上昇下降移動・水平移動及びこれらを合成した移動等のループコントロールを行う第２の工程と、続いて第２ボンディング点にボンディングを行う第３の工程と、次にワイヤを繰り出しながらキャピラリを所定距離垂直に上昇させ、更に第１ボンディング点方向に所定距離水平移動し、続いて所定距離上昇、更に第２ボンディング点上方付近まで水平移動して第１ボンディング点方向にワイヤループを形成する第４の工程と、続いて第２ボンディング点付近でボンディングする第５の工程とを備えたことを特徴としている。 According to a third aspect of the present invention, there is provided a wire bonding method in which a wire is bonded to a first bonding point in the method of wire bonding between a first bonding point and a second bonding point. Step and n point where the capillary is set next (n is a point set in advance on the coordinate axes X, Y, Z as a moving passage point of the capillary and indicates any of 1, 2, 3...). The second step of performing loop control such as upward / downward movement / horizontal movement passing through and the movement combining these , followed by the third step of bonding to the second bonding point, and then moving the capillary while feeding the wire Move vertically by a predetermined distance, further move horizontally by a predetermined distance in the direction of the first bonding point, then move upward by a predetermined distance, and then move horizontally to the vicinity above the second bonding point. It is a fourth step of forming a first bonding point direction wire loop, followed by a fifth step of bonding the second near bonding points and comprising the.

上記方法の場合、第４の工程と第５の工程を交互にｎ回（ｎは１,２,３・・・）繰り返すことを特徴としている。   In the case of the above method, the fourth step and the fifth step are alternately repeated n times (n is 1, 2, 3,...).

また、請求項５記載の半導体装置は、第１ボンディング点と第２ボンディング点との間をワイヤで接続したワイヤループ形状を有する半導体装置において、前記ワイヤループ形状が、第１ボンディング点にワイヤを接続する第１の工程と、次にキャピラリを設定されたｎ点（ｎは予めキャピラリの移動通過点として座標軸Ｘ，Ｙ，Ｚに設定した点で、１，２，３・・・の何れかを示す。）を通過する上昇下降移動・水平移動によるループコントロールを行う第２の工程と、続いて第２ボンディング点にボンディングを行う第３の工程と、次にワイヤを繰り出しながらキャピラリを所定距離垂直に上昇させ、更に第１ボンディング点方向に所定距離水平移動し、続いて所定距離上昇、更に第２ボンディング点上方付近まで水平移動して第１ボンディング点方向にワイヤループを形成する第４の工程と、続いて第２ボンディング点付近でワイヤの一部を含めて潰した状態にボンディングする第５の工程とにより形成されたことを特徴としている。 The semiconductor device according to claim 5 is a semiconductor device having a wire loop shape in which a wire is connected between a first bonding point and a second bonding point, and the wire loop shape has a wire at the first bonding point. The first step of connection and the n point where the capillary is set next (n is a point set in advance on the coordinate axes X, Y, Z as the moving passage point of the capillary, and is any one of 1, 2, 3... The second step of performing loop control by ascending / descending movement / horizontal movement passing through 3 ) , subsequently, the third step of bonding to the second bonding point, and then moving the capillary a predetermined distance while feeding the wire The first bonding point is moved up vertically, further moved horizontally by a predetermined distance in the direction of the first bonding point, then moved upward by a predetermined distance, and further moved horizontally to the vicinity of the second bonding point. A fourth step of forming a Ingu point direction to the wire loop, and the subsequently fifth feature that it is formed by the steps of bonding in a state of collapsed, including a portion of the wire at a second vicinity of bonding points .

なお、前記半導体装置におけるワイヤループの形状は、前記第４の工程と第５の工程を交互にｎ回（ｎは１,２,３・・・）繰り返して形成したことを特徴としている。   The shape of the wire loop in the semiconductor device is characterized in that the fourth step and the fifth step are alternately formed n times (n is 1, 2, 3,...).

本発明によれば、第２ボンディング点でワイヤ接合強度を高め、かつワイヤリング時間が少なくて済む、ワイヤループ形状、その形状を備えた半導体装置及びワイヤボンディング方法の提供ができる。   According to the present invention, it is possible to provide a wire loop shape, a semiconductor device having the shape, and a wire bonding method that increase the wire bonding strength at the second bonding point and reduce the wiring time.

以下、本発明の半導体装置１０の一実施形態を図１に基づき説明する。なお、図４(ａ)と同じ又は相当部材若しくは相当部分には同一符号を付して説明する。
第１ボンディング点Ａと第２ボンディング点Ｚとに接続したワイヤループ形状は、ネック高さ部Ｈ（２ａ−３ａ）、台形部長さ部分Ｌ（３ａ−３ｂ）及び傾斜部Ｓ（３ｂ−１ａ）とからなっており、台形部長さ部分Ｌの両端には癖３ａ、３ｂが付けられている。 Hereinafter, an embodiment of a semiconductor device 10 of the present invention will be described with reference to FIG . Incidentally, it will be denoted by the same reference numerals to the same or corresponding members or corresponding portions as in FIG. 4 (a).
The wire loop shape connected to the first bonding point A and the second bonding point Z includes a neck height H (2a-3a), a trapezoidal length L (3a-3b), and an inclined part S (3b-1a). Both ends of the trapezoidal length portion L are provided with flanges 3a and 3b.

以上は従来の半導体装置と同じである。本実施の形態ににおいては、第２ボンディング点付近に特徴がある。
すなわち、第２ボンディング点において、ワイヤボンディングが行われた後、ワイヤを切断することなく再度ワイヤループを形成してその位置にワイヤの一部を含めて潰した状態のボンディングが行われる。これにより、半導体装置１０は、第２ボンディング点での接合面積が拡大されたワイヤループ形状を備えるものとなる。 The above is the same as the conventional semiconductor device. This embodiment is characterized in the vicinity of the second bonding point.
That is, after wire bonding is performed at the second bonding point, bonding is performed in a state in which a wire loop is formed again without cutting the wire and a part of the wire is crushed at that position. Thereby, the semiconductor device 10 has a wire loop shape in which the bonding area at the second bonding point is enlarged.

次に、図１に示すような半導体装置１０を得るための本発明によるワイヤボンディング方法及びこの方法によって形成されたワイヤループ形状の実施の形態を図２により説明する。なお、図４(ａ)及び図５と同一又は相当する部材若しくは相当する部分には同一符号を付して説明する。 Next, an embodiment of a wire bonding method according to the present invention for obtaining a semiconductor device 10 as shown in FIG. 1 and a wire loop shape formed by this method will be described with reference to FIG. Note that the member or corresponding parts the same as or corresponding to FIG. 4 (a) and 5 are denoted by the same reference numerals.

図２（ａ）に示すように、キャピラリ４が下降して第１ボンディング点Ａに対しワイヤ先端に形成されたボール３０をボンディングする。
次に図２（ｂ）に示すように、キャピラリ４はＢ点まで上昇してワイヤ３を繰り出す。次に図２（ｃ）に示すように、キャピラリ４を第２ボンディング点Ｚと反対方向にＣ点まで水平移動させる。 As shown in FIG. 2A, the capillary 4 is lowered and the ball 30 formed at the tip of the wire is bonded to the first bonding point A.
Next, as shown in FIG. 2 (b), the capillary 4 rises to the point B and feeds the wire 3. Next, as shown in FIG. 2C, the capillary 4 is moved horizontally to the point C in the direction opposite to the second bonding point Z.

これにより、ワイヤ３は、Ａ点からＣ点まで傾斜した形状となり、ワイヤ３の部分に癖３ａが付く。このＡ点からＣ点までの工程で繰り出されたワイヤ３は、図１に示すネック高さ部Ｈ（２ａ〜３ａ間）となる。
続いて、図２（ｄ）に示すように、キャピラリ４はＤ点まで上昇してワイヤ３を繰り出す。続いて、図２（ｅ）に示すように、キャピラリ４は再び第２ボンディング点Zと反対方向にＥ点まで水平移動、即ちリバース動作を行う。これにより、ワイヤ３は、Ｃ点からＥ点まで傾斜した形状となり、ワイヤ３の部分に癖３ｂが付く。 Thereby, the wire 3 becomes a shape inclined from the point A to the point C, and the hook 3a is attached to the wire 3 portion. The wire 3 fed out in the process from the point A to the point C becomes a neck height portion H (between 2a and 3a) shown in FIG .
Subsequently, as shown in FIG. 2 (d), the capillary 4 rises to the point D and feeds the wire 3. Subsequently, as shown in FIG. 2E, the capillary 4 again moves horizontally to the point E in the direction opposite to the second bonding point Z, that is, performs a reverse operation. Thereby, the wire 3 becomes a shape inclined from the point C to the point E, and the hook 3b is attached to the wire 3 portion.

このＣ点からＥ点まで繰り出されたワイヤ３は、図１に示す台形部長さ部分Ｌ（３ａ−３ｂ間）となる。次に、図２（ｆ）に示すように、キャピラリ４はＦ点まで上昇して図１に示す傾斜部Ｓ（３ｂ−１ａ）分だけワイヤ３を繰り出す。そして、図２（ｆ）のｆ′、ｆ″に示すように、キャピラリ４は下降して第２ボンディング点Ｚに位置し、第２ボンディング点Ｚにワイヤ３をボンディングする。 The wire 3 fed out from the point C to the point E becomes a trapezoidal length portion L (between 3a and 3b) shown in FIG . Next, as shown in FIG. 2 (f), the capillary 4 rises to the point F and feeds the wire 3 by the amount of the inclined portion S (3b-1a) shown in FIG . 2 (f), the capillary 4 descends and is positioned at the second bonding point Z, and the wire 3 is bonded to the second bonding point Z.

従来の台形ループのワイヤループ形状は、ここでワイヤ３を切断するのであるが、本発明の実施形態では、続いて、図２（ｇ）に示すように、キャピラリ４を上昇させてワイヤ３を繰り出し、図２（ｈ）に示すように、キャピラリ４を第２ボンディング点Ｚと反対方向（第１ボンディング点方向）に水平移動させる。これにより、ワイヤ３は傾斜した形状となる。続いて、図２（ｉ）に示すように、キャピラリ４を上昇させワイヤ３を繰り出す。その後、図２（ｊ）に示すように、キャピラリ４を第２ボンディング点Z方向に水平移動させる。次に、図２（ｋ）に示すように、キャピラリ４を下降させて第２ボンディング点（付近を含む）にワイヤボンディングする。   The wire loop shape of the conventional trapezoidal loop is that the wire 3 is cut here, but in the embodiment of the present invention, as shown in FIG. As shown in FIG. 2 (h), the capillary 4 is moved horizontally in the direction opposite to the second bonding point Z (in the direction of the first bonding point). Thereby, the wire 3 becomes an inclined shape. Subsequently, as shown in FIG. 2 (i), the capillary 4 is raised and the wire 3 is fed out. Thereafter, as shown in FIG. 2 (j), the capillary 4 is moved horizontally in the second bonding point Z direction. Next, as shown in FIG. 2 (k), the capillary 4 is lowered and wire-bonded to the second bonding point (including the vicinity).

なお、図２（ｇ）〜（ｋ）の工程が、本発明に示す第４の工程と第５の工程に該当する。この工程を行うことで、ワイヤ３が潰されて、第２ボンディング点の接合面積が広がり、第２ボンディング強度を向上させることになる。なお、この工程は複数回繰り返しても良い。
上記の各工程を行うに当たり、予めキャピラリ４の移動通過点を座標軸（Ｘ，Ｙ，Ｚ）上に複数個所（ｎ点）設定しておいて行う。 2G to 2K correspond to the fourth and fifth steps shown in the present invention. By performing this step, the wire 3 is crushed, the bonding area of the second bonding point is expanded, and the second bonding strength is improved. This process may be repeated a plurality of times.
In performing each of the above steps, a plurality of (n points) moving passage points of the capillary 4 are set in advance on the coordinate axes (X, Y, Z).

この方法によれば、従来提案されている、第２ボンディング点でワイヤボンディングした後に、一旦ワイヤを切断して、新たにワイヤ先端にボールを形成して第２ボンディング点に上からボールボンディングするセキュリティボンディングに比べ、同様な接合強度を持つが、ワイヤループ形状の形成時間は短縮する。   According to this method, after wire bonding at the second bonding point, which has been conventionally proposed, the wire is once cut, a ball is newly formed at the tip of the wire, and the ball bonding is performed from above on the second bonding point. Compared to bonding, it has similar bonding strength, but shortens the time for forming the wire loop shape.

これらの工程によって、ワイヤループ形状は、図３（ａ）に示すように、ワイヤの一部が第２ボンディング点に接触する滑走路ループ形状Ｇが得られ、接合強度が向上する。 By these steps, as shown in FIG. 3A , the wire loop shape is a runway loop shape G in which a part of the wire is in contact with the second bonding point, and the bonding strength is improved.

ワイヤループ形状が、図４（ｂ）に示す三角形状の場合でも、同様に行えば図３（ｂ）に示すような滑走路ループ形状Ｇが得られる。 Wire loop shape, even in the case of a triangular shape shown in FIG. 4 (b), be carried out in the same manner runway loop-shaped G as shown in FIG. 3 (b) is obtained.

なお、図２（ｇ）〜（ｋ）の工程は、キャピラリ４の動きが第２ボンディング点を基準として、第１ボンディング点方向に移動させたり、或いは反対方向に移動させたりしているが、３６０°の範囲で自在に方向を決めて行うことができ、潰されたワイヤの向きが異なる形状のものを得ることができる。そして、それで得られる接合強度も同様である。 2 (g) to 2 (k), the movement of the capillary 4 is moved in the direction of the first bonding point with respect to the second bonding point, or in the opposite direction. The direction can be freely determined within a range of 360 °, and a shape in which the direction of the crushed wire is different can be obtained. And the joint strength obtained by it is the same.

半導体装置の製造において、ボンディング点に対するワイヤの接合強度が高く、かつワイヤリング時間が少なくて済む、ワイヤボンディング方法として利用可能である。   In the manufacture of semiconductor devices, the present invention can be used as a wire bonding method in which the bonding strength of a wire to a bonding point is high and the wiring time is short.

本発明に係る半導体装置及びそのワイヤループ形状の実施の形態を示す図である。 It is a figure which shows embodiment of the semiconductor device which concerns on this invention, and its wire loop shape . 図１に示すワイヤループ形状を形成する工程図である。A view illustrating a process of forming a wire loop shape shown in Figure 1. 本発明による効果を説明する図である。It is a figure explaining the effect by this invention. 従来から用いられているワイヤループ形状を示し、（ａ）は台形形状、（ｂ）は三角形状を示す図である。The wire loop shape currently used conventionally is shown, (a) is a trapezoid shape, (b) is a figure which shows a triangular shape. （ａ）〜（ｅ）は図４（ａ）の台形ループを形成するキャピラリの移動軌跡による各時点でのワイヤ形状を示す状態図である。(A)-(e) is a state figure which shows the wire shape in each time by the movement locus | trajectory of the capillary which forms the trapezoidal loop of Fig.4 (a). （ａ）〜（ｅ）は図４（ｂ）の三角ループを形成するキャピラリの移動軌跡による各時点でのワイヤ形状を示す状態図である。(A)-(e) is a state figure which shows the wire shape in each time by the movement locus | trajectory of the capillary which forms the triangular loop of FIG.4 (b).

符号の説明Explanation of symbols

１ リードフレーム
１ａ リード
２ チップ
２ａ パッド
３ ワイヤ
４ キャピラリ
３０ ボール
Ｈ（2a-3a） ネック高さ部
Ｌ（3a-3b） フラット部
Ｓ（3b-1a） 傾斜部
Ａ 第１ボンディング点
Ｚ 第２ボンディング点
Ｇ 滑走路ループ形状 1 Lead frame 1a Lead 2 Chip 2a Pad 3 Wire 4 Capillary 30 Ball H (2a-3a) Neck height L (3a-3b) Flat part S (3b-1a) Inclined part A First bonding point Z Second bonding Point G Runway loop shape

Claims (6)

第１ボンディング点と第２ボンディング点との間をワイヤで接続するワイヤループ形状において、第１ボンディング点にワイヤを接続する第１の工程と、次にキャピラリを設定されたｎ点（ｎは予めキャピラリの移動通過点として座標軸Ｘ，Ｙ，Ｚに設定した点で、１，２，３・・・の何れかを示す。）を通過する上昇下降移動・水平移動によるループコントロールを行う第２の工程と、続いて第２ボンディング点へボンディングを行う第３の工程と、次にワイヤを繰り出しながらキャピラリを所定距離垂直に上昇させ、更に第１ボンディング点方向に所定距離水平移動し、続いて所定距離上昇、更に第２ボンディング点上方付近まで水平移動して第１ボンディング点方向にワイヤループを形成する第４の工程と、続いて第２ボンディング点付近でワイヤの一部を含めて潰した状態にボンディングする第５の工程とにより形成したことを特徴とするワイヤループ形状。 In a wire loop shape in which a wire is connected between the first bonding point and the second bonding point, the first step of connecting the wire to the first bonding point, and then the n point where the capillary is set (n is defined in advance) A point set on the coordinate axes X, Y, Z as a moving passage point of the capillary, indicating any one of 1, 2, 3,...) Step, followed by a third step of bonding to the second bonding point, then raising the capillary vertically by a predetermined distance while feeding the wire, and further horizontally moving the capillary by a predetermined distance in the direction of the first bonding point. A fourth step of increasing the distance and moving horizontally to the vicinity of the second bonding point and forming a wire loop in the direction of the first bonding point; Wire loop shape, characterized in that formed by the fifth step of bonding the state crushed by including some of the wires in the near. 前記第４の工程と第５の工程を交互にｎ回（ｎは１,２,３・・・）繰り返して形成することを特徴とする請求項１記載のワイヤループ形状。   The wire loop shape according to claim 1, wherein the fourth step and the fifth step are alternately formed n times (n is 1, 2, 3, ...). 第１ボンディング点と第２ボンディング点との間をワイヤボンディングする方法において、第１ボンディング点にワイヤを接続する第１の工程と、次にキャピラリを設定されたｎ点（ｎは予めキャピラリの移動通過点として座標軸Ｘ，Ｙ，Ｚに設定した点で、１，２，３・・・の何れかを示す。）を通過する上昇下降移動・水平移動によるループコントロールを行う第２の工程と、続いて第２ボンディング点にボンディングを行う第３の工程と、次にワイヤを繰り出しながらキャピラリを所定距離垂直に上昇させ、更に第１ボンディング点方向に所定距離水平移動し、続いて所定距離上昇、更に第２ボンディング点上方付近まで水平移動して第１ボンディング点方向にワイヤループを形成する第４の工程と、続いて第２ボンディング点付近でワイヤの一部を含めて潰した状態にボンディングする第５の工程とを備えたことを特徴とするワイヤボンディング方法。 In a method of wire bonding between a first bonding point and a second bonding point, a first step of connecting a wire to the first bonding point, and then an n point where a capillary is set (n is a movement of the capillary in advance) A point set on the coordinate axes X, Y, Z as a passing point, indicating any one of 1, 2, 3,...) Subsequently, a third step of bonding to the second bonding point, and then raising the capillary vertically by a predetermined distance while feeding the wire, further moving horizontally by a predetermined distance in the direction of the first bonding point, and subsequently increasing the predetermined distance, Furthermore a fourth step of forming a second bonding point upward around the horizontal movement to the first bonding point direction wire loop until followed by the second near bonding points Wire bonding method characterized by comprising a fifth step of bonding in a state of collapsed, including a portion of the ear. 前記第４の工程と第５の工程を交互にｎ回（ｎは１,２,３・・・）繰り返して形成することを特徴とする請求項３記載のワイヤボンディング方法。   4. The wire bonding method according to claim 3, wherein the fourth step and the fifth step are alternately formed n times (n is 1, 2, 3,...). 第１ボンディング点と第２ボンディング点との間をワイヤで接続したワイヤループ形状を有する半導体装置において、前記ワイヤループ形状が、第１ボンディング点にワイヤを接続する第１の工程と、次にキャピラリを設定されたｎ点（ｎは予めキャピラリの移動通過点として座標軸Ｘ，Ｙ，Ｚに設定した点で、１，２，３・・・の何れかを示す。）を通過する上昇下降移動・水平移動によるループコントロールを行う第２の工程と、続いて第２ボンディング点にボンディングを行う第３の工程と、次にワイヤを繰り出しながらキャピラリを所定距離垂直に上昇させ、更に第１ボンディング点方向に所定距離水平移動し、続いて所定距離上昇、更に第２ボンディング点上方付近まで水平移動して第１ボンディング点方向にワイヤループを形成する第４の工程と、続いて第２ボンディング点付近でワイヤの一部を含めて潰した状態にボンディングする第５の工程とにより形成されたことを特徴とする半導体装置。 In a semiconductor device having a wire loop shape in which a wire is connected between a first bonding point and a second bonding point, the wire loop shape has a first step of connecting a wire to the first bonding point, and then a capillary. Up / down movement passing through n points (where n is a point set in advance on the coordinate axes X, Y, Z as a moving passage point of the capillary and indicates any one of 1, 2, 3,...). A second step of performing loop control by horizontal movement, a third step of subsequently bonding to the second bonding point, and then raising the capillary vertically by a predetermined distance while feeding the wire, and further in the direction of the first bonding point To the first bonding point to form a wire loop in the direction of the first bonding point. That the fourth step, followed by a second semiconductor device according to the fifth characterized in that it is formed by a step of bonding in the vicinity of the bonding point in a state of collapsed, including a portion of the wire. 前記第４の工程と第５の工程を交互にｎ回（ｎは１,２,３・・・）繰り返して形成することを特徴とする請求項５記載の半導体装置。   6. The semiconductor device according to claim 5, wherein the fourth step and the fifth step are alternately formed n times (n is 1, 2, 3,...).
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