JP3794861B2

JP3794861B2 - Clean transfer method and apparatus

Info

Publication number: JP3794861B2
Application number: JP7106799A
Authority: JP
Inventors: 俊彦宮嶋; 勉岡部
Original assignee: TDK Corp
Current assignee: TDK Corp
Priority date: 1999-03-16
Filing date: 1999-03-16
Publication date: 2006-07-12
Anticipated expiration: 2019-03-16
Also published as: JP2000269316A

Description

【０００１】
【発明の属する技術分野】
本発明は、半導体、電子部品関連製品、光ディスク等の製造プロセスにおいて必要な被搬送物を、汚染物質のないクリーン気体で封止した状態で移送することが可能で、とくに被搬送物を側面開口より搬出、搬入する構成のクリーンボックスを用いたクリーン搬送方法及び装置に関する。
【０００２】
【従来の技術】
従来、被搬送物をクリーン気体で封止して搬送する装置としては、特開平６−８４７３８号公報に記載された技術がある。但し、これは、底面開口式のボックスを用いるものである。
【０００３】
一方、本出願人提案の特願平９−１４７２０５号では、側面開口式のクリーンボックスを開示しており、図５に示すように、横蓋５で開閉されるボックス本体１の側面開口２を囲む吸着環状溝３を形成し、これに連通した給排気口４を付加蓋６で閉じる構成とし、前記給排気口４を真空排気することで吸排気路７を介して前記吸着用環状溝３により前記横溝５を真空吸着（真空チャック）する。
【０００４】
さらに、付加蓋周辺の構造を改善するとともに付加蓋を開閉する機構を設けた図６の構成が、本出願人から提案されている。図６から判るように、クリーンボックスＣＢのボックス本体１底面側の吸排気路７に連通した吸排気口４を閉成するための付加蓋６は、下面側（背面側）に係合部４５を一体化したものであり、係合部４５は軸部４６とその下端に固着された大径部（若しくは幅広部）４７とからなっている。そして、前記吸排気口４を囲む（覆う）ように前記ボックス本体１にビス４８で固定された固定支持部材４３にて前記付加蓋６の軸部４６が上下方向に摺動自在に支持されている。そして、軸部４６の周囲にコイルばね（圧縮ばね）４９が配設されていて、付加蓋６を吸排気口４方向に押圧付勢している。
【０００５】
また、クリーンボックスＣＢのボックス本体１に対して横蓋を真空吸着させる目的で吸排気口４、吸排気路７を通して横蓋吸着用の吸着環状溝内を真空排気したり、あるいは大気圧に戻したりする真空チェンジャー６０（真空排気手段を具備する）は、昇降回転軸６２を有し、その上端にはボックス本体１側吸排気口４から付加蓋６を引下げるためのチェンジャー側昇降用係合部材としての引っ掛けアーム部材６３が固定されている。この引っ掛けアーム部材６３は付加蓋６側の軸部４６及び大径部（若しくは幅広部）４７からなる係合部４５に係合自在となっている。この引っ掛けアーム部材６３は、後述するように、真空チェンジャー６０の載置台６１上にクリーンボックス本体１を載置し、付加蓋６を含むボックス本体外側の密閉空間を真空排気して付加蓋６の内外圧力差を無くした状態において、前記引っ掛けアーム部材６３で付加蓋６を下降（吸排気口４から離脱）させる動作を実行するためのものである。
【０００６】
【発明が解決しようとする課題】
ところで、図６のクリーンボックスＣＢの構成において、クリーンボックス本体１で図５に示す横蓋５を真空吸着している場合、コイルばね４９で付加蓋６を吸排気口４に押し付けているため、横蓋の真空チャックが正常であるか、不良であるかにかかわらず付加蓋６がコイルばね４９で閉じた状態であり、真空チェンジャー６０側ではクリーンボックスの真空チャックが正常であるか否かを判断することが出来ない。とくに、横蓋がクリーンボックス本体から直ちに脱落しないように機械的な脱落防止手段を併用した場合には横蓋の真空チャックが不良となってクリーンボックス内部に大気がリークしていても外観からは全く判別できない事態となる。
【０００７】
本発明は、上記の点に鑑み、付加蓋を吸排気口方向に付勢するのをやめて、横蓋の真空チャックが不良で付加蓋が吸排気口から離脱している状態をセンサで検出することで、横蓋の真空チャック不良を確実かつ容易に検出可能としたクリーン搬送方法及び装置を提供することを目的とする。
【０００８】
本発明のその他の目的や新規な特徴は後述の実施の形態において明らかにする。
【０００９】
【課題を解決するための手段】
上記目的を達成するために、本願請求項１のクリーン搬送方法は、一側面に開口を有し、該開口を囲む吸着用環状溝を当該一側面に形成するとともに他の面に前記吸着用環状溝に連通した吸排気口を有するボックス本体と、該ボックス本体への装着状態で前記吸着用環状溝を気密に覆って吸着用空間を形成するとともに、該吸着用空間内外の圧力差により当該ボックス本体に吸着されて前記開口を気密に閉成する横蓋と、前記吸排気口を内外圧力差により気密に閉成する付加蓋と、該付加蓋を前記吸排気口に対する閉成状態と離脱状態との間で上下移動自在に支持し、かつ離脱状態で保持可能な付加蓋支持機構とを備え、排気手段及び移送手段を持たないクリーンボックスを用いるとともに、前記付加蓋が重力により前記吸排気口から離脱した離脱状態で前記付加蓋支持機構によって保持されていることを感知するセンサを有する真空チェンジャーを用い、
前記真空チェンジャーに前記クリーンボックスが結合された状態で、前記センサにより前記付加蓋の離脱状態を感知することで、前記クリーンボックスの気密封止不良を検出することを特徴としている。
【００１０】
本願請求項２のクリーン搬送方法は、一側面に開口を有し、該開口を囲む吸着用環状溝を当該一側面に形成するとともに他の面に前記吸着用環状溝に連通した吸排気口を有するボックス本体と、該ボックス本体への装着状態で前記吸着用環状溝を気密に覆って吸着用空間を形成するとともに、該吸着用空間内外の圧力差により当該ボックス本体に吸着されて前記開口を気密に閉成する横蓋と、前記吸排気口を内外圧力差により気密に閉成する付加蓋と、該付加蓋を前記吸排気口に対する閉成状態と離脱状態との間で上下移動自在に支持し、かつ離脱状態で保持可能な付加蓋支持機構とを備え、排気手段及び移送手段を持たないクリーンボックスを用いるとともに、前記付加蓋が重力により前記吸排気口から離脱した離脱状態で前記付加蓋支持機構によって保持されていることを感知するセンサを有する真空チェンジャーを用い、
側壁面に形成されたゲート口をゲート弁で気密に閉成したクリーン装置の当該ゲート口に、前記クリーンボックスを気密に連結し、前記センサで前記付加蓋の離脱状態が感知されなければ、前記真空チェンジャーで前記付加蓋を含むボックス本体外側の密閉空間を真空排気して前記付加蓋の内外圧力差を無くし、前記前記付加蓋を前記吸排気口より離脱させて前記吸排気口を開き、前記吸排気口を通して前記吸着用空間を大気圧とした後、前記ゲート弁で前記横蓋を保持して前記クリーン装置内に引き込んで前記クリーンボックス内部空間と前記クリーン装置内部とを連通させ、両者間で被搬送物を移送することを特徴としている。
【００１１】
本願請求項３のクリーン搬送方法は、請求項２において、前記横蓋を開く前において前記センサで前記付加蓋の離脱状態が感知されたときは、前記クリーンボックスの気密封止不良として前記真空チェンジャーは前記付加蓋を含むボックス本体外側の密閉空間の真空排気を行わないことを特徴としている。
【００１２】
本願請求項４のクリーン搬送方法は、請求項２又は３において、前記クリーンボックス内部空間と前記クリーン装置内部とを連通させた状態から前記ゲート弁で前記横蓋を保持して前記開口を気密に閉成した後、前記付加蓋の前記吸排気口よりの離脱状態にて前記真空チェンジャーで前記吸排気口を通して前記吸着用空間を真空排気し、その後前記付加蓋で前記吸排気口を気密に閉成するとともに前記付加蓋を含むボックス本体外側の密閉空間を大気圧とする構成である。
【００１３】
本願請求項５のクリーン搬送装置は、一側面に開口を有し、該開口を囲む吸着用環状溝を当該一側面に形成するとともに他の面に前記吸着用環状溝に連通した吸排気口を有するボックス本体と、該ボックス本体への装着状態で前記吸着用環状溝を気密に覆って吸着用空間を形成するとともに、該吸着用空間内外の圧力差により当該ボックス本体に吸着されて前記開口を気密に閉成する横蓋と、前記吸排気口を内外圧力差により気密に閉成する付加蓋と、該付加蓋を前記吸排気口に対する閉成状態と離脱状態との間で上下移動自在に支持し、かつ離脱状態で保持可能な付加蓋支持機構とを備え、排気手段及び移送手段を持たないクリーンボックスと、
側壁面に形成されたゲート口と、該ゲート口を開閉自在で当該ゲート口に連結されたクリーンボックスの横蓋を保持可能なゲート弁とを有するクリーン装置と、
前記付加蓋が重力により前記吸排気口から離脱した離脱状態で前記付加蓋支持機構によって保持されていることを感知するセンサと、前記ゲート口に連結されたクリーンボックスの付加蓋を含むボックス本体外側の密閉空間を真空排気する真空排気手段とを有する真空チェンジャーとを備え、
前記センサにより前記付加蓋の離脱状態を感知することで、前記クリーンボックスの気密封止不良を検出することを特徴としている。
【００１４】
本願請求項６のクリーン搬送装置は、請求項５において、前記センサで前記付加蓋の離脱状態が感知されなければ、前記真空チェンジャーの前記真空排気手段により前記付加蓋を含むボックス本体外側の密閉空間を真空排気し、前記センサで前記付加蓋の離脱状態が感知されたときは、前記クリーンボックスの気密封止不良として前記真空排気手段は動作しないことを特徴としている。
【００１５】
本願請求項７のクリーン搬送装置は、請求項５又は６において、前記センサが近接センサであり、真空チェンジャーの前記クリーンボックスを載置する載置台に取り付けられている構成である。
本願請求項８のクリーン搬送装置は、請求項５，６又は７において、前記付加蓋支持機構は、前記付加蓋と一体化された係合部を上下移動自在に支持する固定支持部材を有し、該固定支持部材には前記係合部よりも高さの大きなガードが設けられていて前記ボックス本体に固定されている構成である。
【００１６】
【発明の実施の形態】
以下、本発明に係るクリーン搬送方法及び装置の実施の形態を図面に従って説明する。
【００１７】
図１は本発明の実施の形態において、クリーンボックスを真空チェンジャー上に載置、結合した状態の要部拡大断面図で付加蓋が吸排気口を閉じている状態、図２は同じく付加蓋が吸排気口から離脱している状態である。図３はクリーンボックスの全体構成を示す正断面図、図４はクリーン搬送方法及び装置の全体構成を示す正断面図である。
【００１８】
まず、クリーンボックスＣＢの構成について説明する。クリーンボックスＣＢの全体構成を示す図３、要部構成を示す図１及び図２において、クリーンボックスＣＢは、一側面に側面開口２を有し、該側面開口２を囲む吸着用環状溝３を当該一側面に形成するとともに底面に吸着用環状溝３に吸排気路７を通して連通した吸排気口４を有するボックス本体１と、ボックス本体１への装着状態で吸着用環状溝３を気密に覆って吸着用空間Ｓを形成するとともに、吸着用空間Ｓの内外の圧力差により当該ボックス本体１に吸着されて側面開口２を気密に閉成する横蓋５と、前記吸排気口４を内外圧力差により気密に閉成する付加蓋６と、該付加蓋６を前記吸排気口４に対する閉成状態と離脱状態との間で移動自在に保持する付加蓋支持機構４０とを備え、横蓋５及び付加蓋６の閉成時にクリーン状態を維持できる気密性を有していて真空排気手段及び移送手段を持たない構造である。
【００１９】
図１及び図２から判るように、前記吸排気口４をボックス本体１の底面よりも引っ込んだ位置に設けるために、ボックス本体１の底部の厚肉部分に、吸排気路７に連通した円形凹部４１が形成され、該円形凹部４１を覆うように偏平な上端面付円筒部材４２がビス４８で固定され、その上端面付円筒部材４２の上端面中央に吸排気口４が形成されている。吸排気口４を閉成するための付加蓋６は、下面側（背面側）に係合部４５を一体化したものであり、係合部４５は軸部４６とその下端部に固着された一対の大径部（若しくは幅広部）４７とからなっている。そして、前記吸排気口４を囲む（覆う）ように前記ボックス本体１に前記ビス４８で固定された固定支持部材４３にて前記付加蓋６の軸部４６が上下方向に摺動自在に支持されている。つまり、付加蓋６と一体の係合部４５と固定支持部材４３とで、付加蓋６を吸排気口４に対する閉成状態（図１の状態）と離脱状態（図２の状態）との間で移動自在に保持する付加蓋支持機構を構成しており、横蓋５を外した状態又は横蓋５の真空チャック不良の場合には付加蓋６は吸排気口４から離脱して付加蓋６及びこれと一体の係合部４５の自重で付加蓋６は吸排気口４から離脱状態となる。
【００２０】
なお、クリーンボックスＣＢを載置したとき等に係合部４５に衝撃が加わらないように、固定支持部材４３にはガード用円筒部４４が一体に形成されている。また、固定支持部材４３には通気孔４３ａが設けられている。
【００２１】
図３のクリーンボックスの全体構成に示すように、前記ボックス本体１の側面開口２の周囲は側面フランジ部１ａとなっており、前記吸着用環状溝３は側面フランジ部１ａの横蓋対接面（横蓋接合面）を１周するように形成されている。吸着用環状溝３と吸排気口４とは、ボックス本体１底部の厚肉部分の内部に形成された吸排気路７及び円形凹部４１の内部を通して接続されている。
【００２２】
また、気密性確保のために、ボックス本体１の側面フランジ部１ａに当接する横蓋５の対接面には、吸着用環状溝３の内周側及び外周側をそれぞれ気密シール（気密シール）する位置に環状溝５ａが形成され、該環状溝５ａ内に気密シール（気密封止）用のＯリング５ｂがそれぞれ配設されている。さらに、図１の如く上端面付円筒部材４２のボックス本体１底面に対接する面に環状溝４２ａが形成され、環状溝４２ａ内に気密シール（気密封止）用のＯリング４２ｂが配設されている。前記吸排気口４の周縁部に当接する付加蓋６の対接面にも、気密性確保のために、環状溝６ａが形成され、該環状溝６ａ内に気密シール（気密封止）用のＯリング６ｂが配設されている。
【００２３】
なお、前記ボックス本体１内には、図３のように半導体ウエハー等の被搬送物１５を支えるホルダー８が取り付けられている。該ホルダー８は、例えば被搬送物１５を多数等間隔で水平状態で収納できる構造となっている。
【００２４】
図４に示すように、クリーンルーム５０にはクリーンボックスＣＢを用いて半導体ウエハー等の被搬送物１５を搬入したり、クリーンボックスＣＢへ被搬送物１５を搬出したりするために、その側壁５１にゲート口（搬出入口）５２が形成されている。このゲート口５２はゲート弁５３で開閉自在である。すなわち、ゲート弁５３はその背後のゲート弁開閉機構（図示せず）によって図４矢印Ｐのようにゲート口５２を気密に閉じた状態とゲート口５２を開いて被搬送物１５を搬出入可能な状態（クリーン装置内部に引き込んだ状態）との間で駆動されるようになっている。気密性確保のために、ゲート口５２の周縁部に当接するゲート弁５３の対接面には、環状溝５３ａが形成され、該環状溝５３ａ内に気密シール（気密封止）用のＯリング５３ｂが配設されている。
【００２５】
なお、ゲート弁５３には、クリーンボックスＣＢ側の横蓋５を真空吸着するための吸引用凹部５９が形成されており、さらにこの吸引用凹部５９を囲んで環状溝５９ａが形成され、該環状溝５９ａ内に気密シール（気密封止）用のＯリング５９ｂが配設されている。
【００２６】
また、クリーンボックスＣＢのボックス本体１に対して横蓋５を真空吸着させる目的で吸排気口４を通して吸着用環状溝３内を真空排気したり、あるいは大気圧に戻すために真空チェンジャー６０（真空排気手段を具備する）が設けられており（通常、クリーンルーム５０の外側でゲート口５２の下方位置に配置されており）、この真空チェンジャー６０はクリーンボックスＣＢを前記クリーンルーム５０のゲート口５２に連結可能な高さ位置で保持するボックス保持部材としてのカップ状載置台６１を横方向（矢印Ｒ方向）に摺動自在に有している。すなわち、カップ状載置台６１は真空チェンジャー６０の固定基台７０に対し横方向スライダ６７を介して取り付けられており、クリーンルーム５０の側壁５１に近接又は離脱することが可能となっている。
【００２７】
このカップ状載置台６１には、図１及び図２に示すように、クリーンボックスＣＢが載置されたときの付加蓋６の状態を検出するための近接センサ８０が取り付け固定されている。ここでは、横蓋５のボックス本体１に対する真空吸着、つまり真空チャックが不良で図２のように付加蓋６と一体の係合部４５の下端部が近接センサ８０に近接した場合を当該近接センサ８０で感知するようにしている。
【００２８】
前記カップ状載置台６１の内側中心部を上下方向に貫通した昇降回転軸６２の上端にはボックス本体１側吸排気口４に対して付加蓋６を強制的に下降又は上昇させるチェンジャー側昇降用係合部材としての引っ掛けアーム部材６３が固定されている。この引っ掛けアーム部材６３は、付加蓋６に一体化された軸部４６及び一対の大径部（若しくは幅広部）４７からなる係合部４５に係合自在（引っ掛けることが可能）であり、また昇降回転軸６２を回転させることで係合解除が可能である。
【００２９】
前記カップ状載置台６１のクリーンボックス載置面には、これに載置、結合されたクリーンボックスＣＢの底面を真空吸着するための吸着用環状溝６５が形成され、この吸着用環状溝６５の内側及び外側に気密性確保のための環状溝６１ａがそれぞれ形成され、該環状溝６１ａ内に気密シール（気密封止）用のＯリング６１ｂが配設されている。
【００３０】
なお、図４のようにクリーンボックスＣＢの側面フランジ部１ａ（側面開口２の周縁部）が当接する側壁５１の外側対接面には、気密性確保のために、ゲート口５２を囲む環状溝５１ａが形成され、該環状溝５１ａ内に気密シール（気密封止）用のＯリング５１ｂが配設されている。
【００３１】
次に、この実施の形態の動作説明を行う。
【００３２】
図３のように、半導体ウエハー等の被搬送物１５を窒素等のクリーン気体で封止、収納したクリーンボックスＣＢは、側面フランジ部１ａの吸着用環状溝３が横蓋５で気密に覆われることで形成された吸着用空間Ｓが真空に減圧されている状態において横蓋５及び付加蓋６が内外圧力差（吸着用環状溝３及び吸排気口４内側が真空で、クリーンボックス外側は大気圧）により側面開口２及び吸排気口４を気密に密閉しており、この状態で自由に搬送、保管が可能である。このとき、付加蓋６と一体の係合部４５と固定支持部材４３とで、付加蓋６を吸排気口４に対する閉成状態（図１の状態）と離脱状態（図２の状態）との間で移動自在に保持する付加蓋支持機構を構成しているから、横蓋５を外した状態又は横蓋５の真空チャック不良の場合に付加蓋６が吸排気口４から離脱しても付加蓋６は固定支持部材４３にて保持されているから、付加蓋６の紛失のおそれがなく、取り扱いが容易となる。また、仮に吸着用環状溝３にリークが生じた場合、付加蓋６が吸排気口４から自重で離間状態にあることから目視により作業者が横蓋５の真空チャック不良を発見することもできる。
【００３３】
クリーンボックスＣＢとクリーンルーム５０との間で、被搬送物１５の受け渡しを行う場合、図４の如く真空チェンジャー６０のカップ状載置台６１上にクリーンボックスＣＢを載置、結合する。
【００３４】
このとき、クリーンボックスＣＢ側の横蓋の真空チャックが正常であれば、付加蓋６は吸排気口４に吸着された図１の状態にあり、近接センサ８０は付加蓋６の離脱状態を検出しない。
【００３５】
一方、クリーンボックスＣＢ側の横蓋の真空チャックが不良であれば、付加蓋６は吸排気口４から離脱した図２の状態にあり、近接センサ８０は付加蓋６の離脱状態を感知する。この付加蓋６の離脱状態が感知された場合、真空チェンジャー６０はクリーンボックスＣＢ内部が汚染されている可能性有りとして、以後の動作を停止して作業者にクリーンボックスＣＢの真空チャック不良をアラーム等で報知する。
【００３６】
前記近接センサ８０が付加蓋６の離脱状態を感知しない場合、真空チェンジャー６０は、以後の動作を開始し、吸着用環状溝６５を真空吸引することでカップ状載置台６１に対してクリーンボックスＣＢ（ボックス本体１）底面を吸着保持する。このクリーンボックスＣＢの保持状態で、カップ状載置台６１を側壁５１に近接させてボックス本体１の側面フランジ部１ａをゲート口５２周縁部の側壁５１外側面に気密に圧接させる。このとき、図４のように横蓋５はゲート口５２に入り込み、ゲート口５２を密閉しているゲート弁５３に密着するとともに、ゲート弁５３側の吸引用凹部５９の真空吸引を行ってゲート弁５３側でも横蓋５を吸着保持する。
【００３７】
クリーンボックスＣＢで上面が密閉されたカップ状載置台６１の内部空間Ｕを真空排気し、付加蓋６についての内外圧力差を無くし（吸排気口４の内部と内部空間Ｕが共に真空となる）、付加蓋６及びこれと一体の係合部４５を自重で降下させるか、あるいは、昇降回転軸６２を回転させて引っ掛けアーム部材６３を付加蓋６側の係合部４５に引っ掛け、昇降回転軸６２を下降させることで、付加蓋６を強制下降させる。これにより、付加蓋６はボックス本体１底面側の吸排気口４から離脱して吸排気口４を開いた状態とする。
【００３８】
次いで、カップ状載置台６１の内部空間Ｕをクリーンな空気、窒素等のクリーン気体によりリークして内部空間Ｕ及びこれに連通状態となったクリーンボックスＣＢ側の吸排気口４及びこれに連通した吸着用環状溝３内部を大気圧に戻す。これにより、横蓋５の真空吸着は解除されるから（吸着用環状溝３及びクリーンルーム５０内が共に大気圧となる）、横蓋５はゲート弁５３のみに吸着保持された状態となるので、ゲート弁開閉機構にてゲート口５２からゲート弁５３を離脱させてから、下降させて被搬送物１５の搬出入のじゃまにならない位置とする。この結果、横蓋５はクリーンルーム５０内に引き込まれ、ゲート口５２は開放される。この状態では、クリーンボックスＣＢの内部とクリーンルーム５０とが連続した空間となるから、クリーンボックスＣＢ内のホルダー８から半導体ウエハー等の被搬送物１５をクリーンルーム５０内部の搬送用ロボット等を用いて水平に移送して取り出すことができる。
【００３９】
逆に、横蓋５がクリーンボックスＣＢ内に引き込まれた状態では、空になっているクリーンボックスＣＢのホルダー８に対してクリーンルーム５０側の搬送用ロボット等で被搬送物１５を順次水平に移送することができ、所要の枚数の被搬送物１５をクリーンボックスＣＢに収納したら、ゲート弁開閉機構にてゲート弁５３をゲート口５２の形成された側壁５１の内側周縁部に圧接して、ゲート口５２を気密に閉塞するとともにゲート弁５３で真空吸着されている横蓋５をボックス本体１の側面フランジ部１ａに圧接させる。クリーンボックスＣＢの側面開口２が横蓋５で気密に閉塞された状態において、当初付加蓋６は開いた状態に設定されているから、カップ状載置台６１の内部空間Ｕ及びこれに連通しているクリーンボックスＣＢ側の吸着用環状溝３内部（吸着用空間Ｓの内部）を吸排気口４を通して真空排気し、真空排気が完了したら昇降回転軸６２を回転させ引っ掛けアーム部材６３と付加蓋６側係合部４５（一対の大径部４７）とを係合させて付加蓋６を吸排気口４に圧接させる。その後、カップ状載置台６１の内部空間Ｕをクリーンな空気、窒素等のクリーン気体によりリークして内部空間Ｕを大気圧に戻すことにより、横蓋５及び付加蓋６は、クリーンボックスＣＢ側の吸着用環状溝３及び吸排気口４内部が真空で外部が大気圧となるため、内外の圧力差により確実に側面開口２及び吸排気口４を気密に封止する。それから、ゲート弁５３による横蓋５の吸着を解除するとともに引っ掛けアーム部材６３と付加蓋６側係合部４５（一対の大径部４７）との係合を解除することで、図３のようにクリーンボックスＣＢのみを自由に持ち運び可能な状態とすることができ、クリーンボックスＣＢを無人搬送車等で任意の位置に搬送可能である。
【００４０】
この実施の形態によれば、次の通りの効果を得ることができる。
【００４１】
(1) クリーンボックスＣＢのボックス本体１の側面開口端面に、開口面以外の一面に配置した吸排気口４を通して真空排気可能な吸着用環状溝３を形成して、横蓋５を真空吸着する構成としており、メカニカルシールの場合よりも横蓋５の密着性を高めることができ、被搬送物取り出し用の側面開口２を横蓋５で、吸排気口４を付加蓋６でそれぞれ気密に閉成することができる。そして、真空チェンジャー６０側に近接センサ８０を設けて、クリーンボックスＣＢ側の真空チャック不良に起因して付加蓋６が吸排気口４から離脱状態にあることを検出可能としており、真空チャック不良により内部が汚染された可能性のある被搬送物１５の搬出入を未然に防止できる。このため、クリーン搬送の信頼性の向上が可能である。
【００４２】
(2) 真空チェンジャー６０のクリーンボックスを載置する載置台６１に近接センサ８０を取り付けて、付加蓋６と一体の係合部材４５の下降を感知するようにしており、機構が簡単で、動作が確実である。
【００４３】
(3) 付加蓋６及びこれを支持する機構を吸排気口４の周囲にコンパクトにまとめることができ、真空チェンジャー６０側のカップ状載置台６１の内部空間Ｕは小さくて済む。つまり、ボックス本体１底面側の付加蓋６及び落下防止手段４０をカップ状載置台６１が囲む必要があるが、付加蓋６及び落下防止手段４０の配置スペースが小さいため、カップ状載置台６１の内部空間Ｕも小さくできる。従って、クリーンボックスＣＢの横蓋５の開閉のために内部空間Ｕを真空排気、あるいは大気圧にリークする工程を迅速に実施できる。
【００４４】
(4) 吸排気口４がボックス本体１の底面よりも内側に引っ込んだ位置に設けられているため、ボックス本体１の底面側の突出量を減じることができ、あわせて付加蓋６に一体化された係合部４５よりも高さの大きなガード用円筒部４４をボックス本体１側に固定の固定支持部材４３に設けているため、クリーンボックスＣＢの運搬移送時、もしくは保管時に係合部４５に外部衝撃が加わることを防止でき、取り扱いを容易にすることが可能である。
【００４５】
(5) クリーンボックスＣＢが側面開口式であるため、クリーンルーム５０にクリーンボックスＣＢを連結状態で被搬送物１５を水平方向に移送して被搬送物１５の受け渡しができ、各種処理装置とのインターフェースにも余分な動きが必要なくなる。
【００４６】
(6) 付加蓋６は吸排気口４から離間した状態であっても付加蓋支持機構により常に保持され、ボックス本体１から脱落することがないため、真空チェンジャー６０側に付加蓋６を受け止める機構を設ける必要がなくなり、付加蓋６の係合部４５に係合して付加蓋６を上下させる昇降用係合手段を真空チェンジャー６０側に設ければよい。このため、真空チェンジャー６０の機構の簡素化が可能である。
【００４７】
なお、クリーンボックスとして横蓋の脱落防止手段を併用したものの場合、前記横蓋をゲート弁で吸着して外す前に横蓋と脱落防止手段との係合を解除しておけば、上記実施の形態と全く同様な動作で被搬送物のクリーン搬送が可能である。
【００４８】
また、クリーンルーム５０のゲート口５２をゲート弁５３で開閉する機構は、その目的を達成するために多様な構成を適宜採用することができる。
【００４９】
以上本発明の実施の形態について説明してきたが、本発明はこれに限定されることなく請求項の記載の範囲内において各種の変形、変更が可能なことは当業者には自明であろう。
【００５０】
【発明の効果】
以上説明したように、本発明に係るクリーン搬送方法及び装置によれば、クリーンボックスの真空チャック不良に起因する付加蓋の吸排気口からの離脱状態を真空チェンジャー側に設けたセンサで感知でき、クリーンボックス内部の被搬送物が汚染されている可能性があることを認識可能である。このため、真空チャック不良のクリーンボックスについては被搬送物の搬出入を行わないことで、クリーン搬送の信頼性の向上を図ることができる。
【図面の簡単な説明】
【図１】本発明の実施の形態であって、クリーンボックスを真空チェンジャー上に載置した状態で、クリーンボックス側の真空チャックが正常のときの要部拡大断面図である。
【図２】同じくクリーンボックス側の真空チャックが不良のときの要部拡大断面図である。
【図３】分離状態のクリーンボックスを示す正断面図である。
【図４】本発明の実施の形態において、クリーンボックスを真空チェンジャー上に載置し、クリーンボックスとクリーンルームとを連結する段階を示す正断面図である。
【図５】本出願人提案の従来のクリーン気体封止タイプのクリーンボックスを示す正断面図である。
【図６】本出願人提案の従来のクリーンボックスにおける付加蓋周辺の機構を示す拡大断面図である。
【符号の説明】
１ボックス本体
２側面開口
３吸着用環状溝
４吸排気口
５横蓋
６付加蓋
７吸排気路
１５被搬送物
６０真空チェンジャー
４１円形凹部
４２上端面付円筒部材
４３固定支持部材
４５係合部
４６軸部
４７大径部（若しくは幅広部）
５０クリーンルーム
５１側壁
５２ゲート口
５３ゲート弁
６０真空チェンジャー
６１カップ状載置台
６２昇降回転軸
６３引っ掛けアーム部材
ＣＢクリーンボックス[0001]
BACKGROUND OF THE INVENTION
The present invention is capable of transporting objects to be transported that are necessary in the manufacturing process of semiconductors, electronic component-related products, optical disks, etc., with a clean gas free of contaminants. The present invention relates to a clean conveyance method and apparatus using a clean box configured to carry out and carry in more.
[0002]
[Prior art]
Conventionally, there is a technique described in Japanese Patent Application Laid-Open No. 6-84738 as an apparatus for transporting an object to be transported with a clean gas. However, this uses a bottom opening type box.
[0003]
On the other hand, Japanese Patent Application No. 9-147205 proposed by the present applicant discloses a side-opening type clean box, and as shown in FIG. An adsorbing annular groove 3 is formed, and an air supply / exhaust port 4 communicating with the adsorbing annular groove 3 is closed by an additional lid 6, and the air supply / exhaust port 4 is evacuated to evacuate the adsorbing annular groove 3. Thus, the horizontal grooves 5 are vacuum-adsorbed (vacuum chuck).
[0004]
Further, the present applicant has proposed the configuration of FIG. 6 in which the structure around the additional lid is improved and a mechanism for opening and closing the additional lid is provided. As can be seen from FIG. 6, the additional lid 6 for closing the intake / exhaust port 4 communicating with the intake / exhaust passage 7 on the bottom side of the box body 1 of the clean box CB has an engaging portion 45 on the lower surface side (rear surface side). The engaging portion 45 is composed of a shaft portion 46 and a large-diameter portion (or wide portion) 47 fixed to the lower end thereof. The shaft portion 46 of the additional lid 6 is slidably supported in the vertical direction by a fixed support member 43 fixed to the box body 1 with screws 48 so as to surround (cover) the intake / exhaust port 4. Yes. A coil spring (compression spring) 49 is disposed around the shaft portion 46 and presses and urges the additional lid 6 toward the intake / exhaust port 4.
[0005]
Further, for the purpose of vacuum-adsorbing the horizontal lid to the box body 1 of the clean box CB, the suction annular groove for horizontal lid adsorption is evacuated through the intake / exhaust port 4 and the intake / exhaust passage 7 or returned to atmospheric pressure. The vacuum changer 60 (having vacuum evacuation means) has an up-and-down rotating shaft 62, and at its upper end, a changer-side lifting engagement for pulling down the additional lid 6 from the box body 1 side intake / exhaust port 4 is provided. A hook arm member 63 as a member is fixed. The hook arm member 63 is freely engageable with an engaging portion 45 including a shaft portion 46 and a large diameter portion (or wide portion) 47 on the additional lid 6 side. As will be described later, the hook arm member 63 mounts the clean box main body 1 on the mounting table 61 of the vacuum changer 60, and evacuates the sealed space outside the box main body including the additional lid 6. This is for executing the operation of lowering (detaching from the intake / exhaust port 4) the additional lid 6 by the hook arm member 63 in a state where the internal / external pressure difference is eliminated.
[0006]
[Problems to be solved by the invention]
In the configuration of the clean box CB in FIG. 6, when the horizontal lid 5 shown in FIG. 5 is vacuum-sucked by the clean box body 1, the additional lid 6 is pressed against the intake / exhaust port 4 by the coil spring 49. Whether the side cover vacuum chuck is normal or defective, the additional cover 6 is closed by the coil spring 49, and the vacuum changer 60 side determines whether the clean box vacuum chuck is normal. I can't judge. In particular, when mechanical lids are used together to prevent the side cover from falling off the clean box body immediately, even if the vacuum chuck of the side cover is defective and air leaks inside the clean box, It becomes a situation that cannot be determined at all.
[0007]
In view of the above points, the present invention stops the biasing of the additional lid in the direction of the intake / exhaust port, and detects a state in which the vacuum lid of the horizontal lid is defective and the additional lid is detached from the intake / exhaust port. Accordingly, it is an object of the present invention to provide a clean transfer method and apparatus that can detect a vacuum chuck defect of a horizontal lid reliably and easily.
[0008]
Other objects and novel features of the present invention will be clarified in embodiments described later.
[0009]
[Means for Solving the Problems]
  In order to achieve the above object, the clean transfer method according to claim 1 of the present application has an opening on one side surface, and an adsorption annular groove surrounding the opening is formed on the one side surface, and the adsorption ring is formed on the other surface. A box main body having an intake / exhaust port communicating with the groove, and an adsorption space is formed by airtightly covering the adsorption annular groove in a state of being attached to the box main body, and the pressure difference between the inside and the outside of the adsorption space A horizontal lid that is adsorbed by the main body and hermetically closes the opening, an additional lid that hermetically closes the intake and exhaust ports due to an internal and external pressure difference, and a closed state and a detached state of the additional lid with respect to the intake and exhaust ports BetweenSupports movability up and down and can be held in a detached stateAn additional lid support mechanism and a clean box having no exhaust means and no transfer means, and the additional lidIs held by the additional lid support mechanism in a detached state where it is separated from the intake / exhaust port due to gravity.Using a vacuum changer with a sensor to sense,
  In a state where the clean box is coupled to the vacuum changer, a hermetic sealing failure of the clean box is detected by sensing a detached state of the additional lid by the sensor.
[0010]
  The clean transfer method according to claim 2 of the present invention has an opening on one side surface, an adsorption annular groove surrounding the opening is formed on the one side surface, and an intake / exhaust port communicated with the adsorption annular groove on the other surface. A box main body, and an adsorption space that airtightly covers the suction annular groove in a state of being attached to the box main body, and is adsorbed by the box main body due to a pressure difference inside and outside the adsorption space to open the opening. A lateral lid that is hermetically closed, an additional lid that hermetically closes the intake / exhaust port due to an internal / external pressure difference, and the additional lid between a closed state and a detached state with respect to the intake / exhaust portSupports movability up and down and can be held in a detached stateAn additional lid support mechanism and a clean box having no exhaust means and no transfer means, and the additional lidIs held by the additional lid support mechanism in a detached state where it is separated from the intake / exhaust port due to gravity.Using a vacuum changer with a sensor to sense,
  When the clean box is hermetically connected to the gate port of the clean device in which the gate port formed on the side wall surface is hermetically closed with a gate valve, and the sensor does not detect the detached state of the additional lid, A vacuum changer is used to evacuate a sealed space outside the box body including the additional lid to eliminate the pressure difference between the inside and outside of the additional lid, to release the additional lid from the intake / exhaust port and to open the intake / exhaust port, After the suction space is brought to atmospheric pressure through the intake / exhaust port, the lateral cover is held by the gate valve and pulled into the clean device to communicate the clean box internal space with the clean device, It is characterized in that the object to be transported is transported by.
[0011]
The clean transfer method according to claim 3 of the present application is the vacuum changer according to claim 2, wherein when the sensor detects that the additional lid is detached before the horizontal lid is opened, the vacuum changer is regarded as a hermetic seal failure of the clean box. Is characterized in that the sealed space outside the box body including the additional lid is not evacuated.
[0012]
The clean transfer method according to claim 4 of the present invention is the method of claim 2 or 3, wherein the gate cover holds the horizontal lid from the state in which the clean box internal space and the clean apparatus are in communication, and the opening is made airtight. After closing, the adsorption space is evacuated through the intake / exhaust port with the vacuum changer in a state where the additional lid is detached from the intake / exhaust port, and then the intake / exhaust port is closed airtight with the additional lid. And a sealed space outside the box body including the additional lid is configured to be atmospheric pressure.
[0013]
  The clean transfer device according to claim 5 of the present invention has an opening on one side surface, an adsorption annular groove surrounding the opening is formed on the one side surface, and an intake / exhaust port communicated with the adsorption annular groove on the other surface. A box main body, and an adsorption space that airtightly covers the suction annular groove in a state of being attached to the box main body, and is adsorbed by the box main body due to a pressure difference inside and outside the adsorption space to open the opening. A lateral lid that is hermetically closed, an additional lid that hermetically closes the intake / exhaust port due to an internal / external pressure difference, and the additional lid between a closed state and a detached state with respect to the intake / exhaust portSupports movability up and down and can be held in a detached stateAn additional lid support mechanism, and a clean box having no exhaust means and transfer means;
  A clean device having a gate port formed on the side wall surface, and a gate valve capable of opening and closing the gate port and capable of holding a horizontal lid of a clean box connected to the gate port;
  Additional lidIs held by the additional lid support mechanism in a detached state where it is separated from the intake / exhaust port due to gravity.A vacuum changer comprising: a sensor for sensing; and a vacuum evacuation means for evacuating a sealed space outside the box body including an additional lid of a clean box connected to the gate port,
  It is characterized in that a defective hermetic seal of the clean box is detected by sensing the detached state of the additional lid by the sensor.
[0014]
The clean transfer device according to claim 6 of the present application is the sealed space outside the box body including the additional lid by the vacuum exhausting means of the vacuum changer if the sensor does not detect the detached state of the additional lid. When the sensor detects the detached state of the additional lid, the vacuum evacuation means does not operate due to the hermetic sealing failure of the clean box.
[0015]
  The clean transfer device according to claim 7 of the present application is the structure according to claim 5 or 6, wherein the sensor is a proximity sensor and is attached to a mounting table on which the clean box of a vacuum changer is mounted.
  The clean transport device according to claim 8 of the present invention is the clean transport device according to claim 5, 6 or 7, wherein the additional lid support mechanism has a fixed support member that supports the engaging portion integrated with the additional lid so as to be movable up and down. The fixed support member is provided with a guard having a height higher than that of the engaging portion and is fixed to the box body.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a clean transfer method and apparatus according to the present invention will be described below with reference to the drawings.
[0017]
FIG. 1 is an enlarged sectional view of a main part of a clean box placed on and coupled to a vacuum changer according to an embodiment of the present invention, with an additional lid closing an intake / exhaust port, and FIG. It is in a state of being detached from the intake / exhaust port. FIG. 3 is a front sectional view showing the entire configuration of the clean box, and FIG. 4 is a front sectional view showing the entire configuration of the clean transfer method and apparatus.
[0018]
First, the configuration of the clean box CB will be described. 3 showing the entire configuration of the clean box CB, and FIGS. 1 and 2 showing the main configuration, the clean box CB has a side opening 2 on one side surface, and has an annular groove 3 for suction surrounding the side surface opening 2. A box body 1 having an intake / exhaust port 4 formed on the side surface and communicated to the adsorption annular groove 3 through the intake / exhaust passage 7 on the bottom surface, and the adsorption annular groove 3 in an attached state to the box body 1 is airtightly covered. The adsorbing space S is formed, the lateral lid 5 is adsorbed by the box body 1 due to the pressure difference between the inside and outside of the adsorbing space S, and the side opening 2 is hermetically closed. An additional lid 6 that is airtightly closed by the difference, and an additional lid support mechanism 40 that holds the additional lid 6 movably between a closed state and a detached state with respect to the intake / exhaust port 4. And the clean state when the additional lid 6 is closed Have airtightness capable lifting with a structure having no vacuum evacuation means and transfer means.
[0019]
As can be seen from FIGS. 1 and 2, in order to provide the intake / exhaust port 4 at a position retracted from the bottom surface of the box body 1, a circular shape communicating with the intake / exhaust passage 7 is formed in the thick portion at the bottom of the box body 1. A concave portion 41 is formed, and a flat cylindrical member 42 with an upper end surface is fixed with screws 48 so as to cover the circular concave portion 41, and the intake / exhaust port 4 is formed at the center of the upper end surface of the cylindrical member 42 with the upper end surface. . The additional lid 6 for closing the intake / exhaust port 4 is obtained by integrating an engaging portion 45 on the lower surface side (rear surface side), and the engaging portion 45 is fixed to the shaft portion 46 and its lower end portion. It consists of a pair of large diameter portions (or wide portions) 47. The shaft portion 46 of the additional lid 6 is slidably supported in the vertical direction by a fixed support member 43 fixed to the box body 1 with the screws 48 so as to surround (cover) the intake / exhaust port 4. ing. That is, the engagement portion 45 and the fixed support member 43 integral with the additional lid 6 are disposed between the closed state (the state shown in FIG. 1) and the detached state (the state shown in FIG. 2). In the state where the horizontal lid 5 is removed or the vacuum chuck of the horizontal lid 5 is defective, the additional lid 6 is detached from the intake / exhaust port 4 and the additional lid 6 is configured. Further, the additional lid 6 is detached from the intake / exhaust port 4 due to its own weight of the engaging portion 45 integrated therewith.
[0020]
A cylindrical guard portion 44 is formed integrally with the fixed support member 43 so that no impact is applied to the engaging portion 45 when the clean box CB is placed. The fixed support member 43 is provided with a vent hole 43a.
[0021]
As shown in the overall configuration of the clean box in FIG. 3, the periphery of the side opening 2 of the box main body 1 is a side flange portion 1a, and the suction annular groove 3 is a side surface of the side flange portion 1a facing the horizontal lid. It is formed so as to go around the (horizontal lid joint surface) once. The adsorption annular groove 3 and the intake / exhaust port 4 are connected through the inside of an intake / exhaust passage 7 and a circular recess 41 formed in the thick portion of the bottom of the box body 1.
[0022]
Moreover, in order to ensure airtightness, the inner peripheral side and the outer peripheral side of the suction annular groove 3 are hermetically sealed on the contact surface of the horizontal lid 5 that contacts the side flange portion 1a of the box body 1, respectively. An annular groove 5a is formed at a position where the O-ring 5b is formed, and an O-ring 5b for hermetic sealing (air-tight sealing) is disposed in the annular groove 5a. Further, as shown in FIG. 1, an annular groove 42a is formed on the surface of the cylindrical member 42 with an upper end surface that contacts the bottom surface of the box body 1, and an O-ring 42b for hermetic sealing (airtight sealing) is disposed in the annular groove 42a. ing. An annular groove 6a is also formed on the contact surface of the additional lid 6 that contacts the peripheral edge of the intake / exhaust port 4 to ensure airtightness, and an airtight seal (airtight seal) is formed in the annular groove 6a. An O-ring 6b is provided.
[0023]
In the box body 1, a holder 8 for supporting an object 15 such as a semiconductor wafer is attached as shown in FIG. The holder 8 has a structure that can accommodate, for example, a large number of objects 15 to be conveyed in a horizontal state at equal intervals.
[0024]
As shown in FIG. 4, a clean box CB is used to carry a transported object 15 such as a semiconductor wafer into the clean room 50 or to transport the transported object 15 to the clean box CB. A gate port (carrying port) 52 is formed. The gate port 52 can be opened and closed by a gate valve 53. That is, the gate valve 53 can carry the object 15 in and out by opening the gate port 52 in an airtight manner as shown by the arrow P in FIG. 4 and opening the gate port 52 by a gate valve opening / closing mechanism (not shown) behind the gate valve 53. Between different states (states drawn into the clean device). In order to ensure airtightness, an annular groove 53a is formed on the contact surface of the gate valve 53 that contacts the peripheral edge of the gate port 52, and an O-ring for hermetic sealing (airtight sealing) is formed in the annular groove 53a. 53b is provided.
[0025]
The gate valve 53 is formed with a suction recess 59 for vacuum-sucking the horizontal lid 5 on the clean box CB side, and further, an annular groove 59a is formed surrounding the suction recess 59. An O-ring 59b for airtight sealing (airtight sealing) is disposed in the groove 59a.
[0026]
Further, a vacuum changer 60 (vacuum) is used to evacuate the suction annular groove 3 through the intake / exhaust port 4 or return it to atmospheric pressure for the purpose of vacuum-adsorbing the horizontal lid 5 to the box body 1 of the clean box CB. The vacuum changer 60 connects the clean box CB to the gate port 52 of the clean room 50. The vacuum changer 60 is connected to the gate port 52 of the clean room 50. A cup-shaped mounting table 61 serving as a box holding member that holds at a possible height position is slidable in the lateral direction (arrow R direction). That is, the cup-shaped mounting table 61 is attached to the fixed base 70 of the vacuum changer 60 via the horizontal slider 67 and can be close to or detached from the side wall 51 of the clean room 50.
[0027]
As shown in FIGS. 1 and 2, a proximity sensor 80 for detecting the state of the additional lid 6 when the clean box CB is placed is attached and fixed to the cup-like mounting table 61. Here, the case where the vacuum lid is attracted to the box body 1 of the horizontal lid 5, that is, the case where the vacuum chuck is defective and the lower end portion of the engaging portion 45 integral with the additional lid 6 approaches the proximity sensor 80 as shown in FIG. It is made to sense at 80.
[0028]
A changer side lift for forcibly lowering or raising the additional lid 6 with respect to the box body 1 side intake / exhaust port 4 at the upper end of the lift rotary shaft 62 penetrating the inner center portion of the cup-shaped mounting table 61 in the vertical direction. A hook arm member 63 as an engaging member is fixed. The hook arm member 63 is freely engageable (can be hooked) with an engaging portion 45 including a shaft portion 46 and a pair of large-diameter portions (or wide-width portions) 47 integrated with the additional lid 6. The engagement can be released by rotating the lifting rotary shaft 62.
[0029]
On the clean box mounting surface of the cup-shaped mounting table 61, a suction annular groove 65 is formed for vacuum-sucking the bottom surface of the clean box CB placed and coupled thereto. An annular groove 61a for ensuring airtightness is formed on the inner side and the outer side, respectively, and an O-ring 61b for hermetic sealing (airtight sealing) is disposed in the annular groove 61a.
[0030]
As shown in FIG. 4, an annular groove surrounding the gate port 52 is provided on the outer contact surface of the side wall 51 with which the side flange portion 1a (the peripheral edge portion of the side surface opening 2) of the clean box CB contacts. 51a is formed, and an O-ring 51b for hermetic sealing (airtight sealing) is disposed in the annular groove 51a.
[0031]
Next, the operation of this embodiment will be described.
[0032]
As shown in FIG. 3, in the clean box CB in which the object 15 such as a semiconductor wafer is sealed and stored with a clean gas such as nitrogen, the suction annular groove 3 of the side flange portion 1a is airtightly covered with the horizontal lid 5. In the state where the suction space S formed in this manner is decompressed to a vacuum, the lateral lid 5 and the additional lid 6 have a pressure difference between the inside and outside (the inside of the suction annular groove 3 and the intake / exhaust port 4 is vacuum, and the outside of the clean box is large. The side opening 2 and the intake / exhaust port 4 are hermetically sealed by atmospheric pressure), and can be freely transported and stored in this state. At this time, the engagement portion 45 integrated with the additional lid 6 and the fixing support member 43 cause the additional lid 6 to be in a closed state (the state shown in FIG. 1) and a detached state (the state shown in FIG. 2) with respect to the intake / exhaust port 4. Since the additional lid support mechanism is configured so as to be movably held between them, the additional lid 6 can be added even if the additional lid 6 is detached from the intake / exhaust port 4 when the horizontal lid 5 is removed or when the horizontal lid 5 has a vacuum chuck failure. Since the lid 6 is held by the fixed support member 43, there is no risk of the additional lid 6 being lost, and the handling becomes easy. Further, if a leak occurs in the suction annular groove 3, the additional lid 6 is separated from the intake / exhaust port 4 by its own weight, so that the operator can find a vacuum chuck failure of the horizontal lid 5 by visual observation. .
[0033]
When the transported object 15 is transferred between the clean box CB and the clean room 50, the clean box CB is mounted and coupled on the cup-shaped mounting table 61 of the vacuum changer 60 as shown in FIG.
[0034]
At this time, if the vacuum chuck of the horizontal lid on the clean box CB side is normal, the additional lid 6 is in the state of FIG. 1 adsorbed to the intake / exhaust port 4, and the proximity sensor 80 detects the detached state of the additional lid 6. do not do.
[0035]
On the other hand, if the vacuum chuck of the horizontal lid on the clean box CB side is defective, the additional lid 6 is in the state of FIG. 2 detached from the intake / exhaust port 4, and the proximity sensor 80 detects the detached state of the additional lid 6. When the detached state of the additional lid 6 is detected, the vacuum changer 60 is assumed to be contaminated inside the clean box CB, and the subsequent operation is stopped to alert the operator of the vacuum chuck failure of the clean box CB. Etc.
[0036]
When the proximity sensor 80 does not detect the detached state of the additional lid 6, the vacuum changer 60 starts the subsequent operation, and vacuums the suction annular groove 65 to clean the cup-shaped mounting table 61 with the clean box CB. (Box body 1) Adsorbs and holds the bottom surface. In the state of holding the clean box CB, the cup-shaped mounting table 61 is brought close to the side wall 51 so that the side flange portion 1a of the box body 1 is pressure-contacted with the outer side surface of the side wall 51 at the peripheral edge of the gate port 52. At this time, as shown in FIG. 4, the horizontal lid 5 enters the gate port 52 and is in close contact with the gate valve 53 that seals the gate port 52, and vacuum suction is performed on the suction recess 59 on the gate valve 53 side. The horizontal lid 5 is also sucked and held on the valve 53 side.
[0037]
The internal space U of the cup-shaped mounting table 61 whose upper surface is sealed by the clean box CB is evacuated to eliminate the internal / external pressure difference with respect to the additional lid 6 (both the inside and the internal space U of the intake / exhaust port 4 are evacuated). The additional lid 6 and the engaging portion 45 integral therewith are lowered by their own weight, or the lifting / lowering rotating shaft 62 is rotated to hook the hook arm member 63 on the engaging portion 45 on the additional lid 6 side, and the lifting / lowering rotating shaft. By lowering 62, the additional lid 6 is forcibly lowered. Thus, the additional lid 6 is separated from the intake / exhaust port 4 on the bottom surface side of the box body 1 and the intake / exhaust port 4 is opened.
[0038]
Next, the internal space U of the cup-shaped mounting table 61 was leaked by clean air such as clean air or nitrogen, and communicated with the internal space U and the intake / exhaust port 4 on the clean box CB side in communication with the internal space U. The inside of the adsorption annular groove 3 is returned to atmospheric pressure. As a result, the vacuum suction of the horizontal lid 5 is released (both the suction annular groove 3 and the clean room 50 are at atmospheric pressure), and the horizontal lid 5 is in a state of being held by adsorption only to the gate valve 53. After the gate valve 53 is detached from the gate port 52 by the gate valve opening / closing mechanism, the gate valve 53 is lowered to a position where it does not interfere with the loading / unloading of the object 15 to be conveyed. As a result, the horizontal lid 5 is drawn into the clean room 50 and the gate port 52 is opened. In this state, the interior of the clean box CB and the clean room 50 become a continuous space. Therefore, the object 15 such as a semiconductor wafer is horizontally transferred from the holder 8 in the clean box CB using a transfer robot or the like in the clean room 50. It can be taken out and transported to.
[0039]
On the contrary, when the horizontal lid 5 is pulled into the clean box CB, the transported object 15 is sequentially and horizontally transferred to the empty clean box CB holder 8 by a transport robot or the like on the clean room 50 side. When the required number of conveyed objects 15 is stored in the clean box CB, the gate valve 53 is pressed against the inner peripheral edge of the side wall 51 where the gate port 52 is formed by the gate valve opening / closing mechanism, and the gate The opening 52 is hermetically closed, and the horizontal lid 5 vacuum-adsorbed by the gate valve 53 is pressed against the side flange portion 1 a of the box body 1. In the state where the side opening 2 of the clean box CB is airtightly closed by the horizontal lid 5, the additional lid 6 is initially set to an open state, so that it communicates with the internal space U of the cup-shaped mounting table 61 and this. The inside of the adsorbing annular groove 3 on the clean box CB side (the inside of the adsorbing space S) is evacuated through the intake / exhaust port 4, and when the evacuation is completed, the elevating rotary shaft 62 is rotated to engage the hook arm member 63 and the additional lid 6 The additional lid 6 is brought into pressure contact with the intake / exhaust port 4 by engaging the side engaging portions 45 (the pair of large diameter portions 47). Thereafter, the internal space U of the cup-shaped mounting table 61 is leaked with clean air such as clean air or nitrogen to return the internal space U to atmospheric pressure, so that the horizontal lid 5 and the additional lid 6 are disposed on the clean box CB side. Since the inside of the adsorbing annular groove 3 and the intake / exhaust port 4 is vacuum and the outside is at atmospheric pressure, the side opening 2 and the intake / exhaust port 4 are securely sealed by the pressure difference between the inside and outside. Then, the suction of the horizontal lid 5 by the gate valve 53 is released and the engagement between the hook arm member 63 and the additional lid 6 side engaging portion 45 (a pair of large diameter portions 47) is released, as shown in FIG. In addition, only the clean box CB can be freely carried, and the clean box CB can be transported to an arbitrary position by an automatic guided vehicle or the like.
[0040]
According to this embodiment, the following effects can be obtained.
[0041]
(1) A suction annular groove 3 that can be evacuated through an intake / exhaust port 4 arranged on one surface other than the opening surface is formed on the side opening end surface of the box body 1 of the clean box CB, and the horizontal lid 5 is vacuum-adsorbed. It has a configuration, and the adhesiveness of the horizontal lid 5 can be improved as compared with the case of a mechanical seal. The side opening 2 for taking out the object to be conveyed is closed with the horizontal lid 5 and the intake / exhaust port 4 is closed with the additional lid 6 in an airtight manner. Can be made. A proximity sensor 80 is provided on the vacuum changer 60 side to detect that the additional lid 6 is in a detached state from the intake / exhaust port 4 due to a vacuum chuck failure on the clean box CB side. Carrying in / out of the transported object 15 that may have been contaminated inside can be prevented in advance. For this reason, the reliability of clean conveyance can be improved.
[0042]
(2) The proximity sensor 80 is attached to the mounting table 61 on which the clean box of the vacuum changer 60 is mounted, so that the lowering of the engaging member 45 integral with the additional lid 6 is detected. Is certain.
[0043]
(3) The additional lid 6 and the mechanism for supporting it can be compactly assembled around the intake / exhaust port 4, and the internal space U of the cup-shaped mounting table 61 on the vacuum changer 60 side can be small. That is, the cup-shaped mounting base 61 needs to surround the additional lid 6 and the fall prevention means 40 on the bottom surface side of the box body 1. However, since the space for arranging the additional lid 6 and the fall prevention means 40 is small, the cup-shaped mounting base 61 The internal space U can also be reduced. Therefore, the process of evacuating the internal space U or leaking to the atmospheric pressure for opening and closing the horizontal lid 5 of the clean box CB can be performed quickly.
[0044]
(4) Since the intake / exhaust port 4 is provided at a position retracted inward from the bottom surface of the box body 1, the amount of protrusion on the bottom surface side of the box body 1 can be reduced and integrated with the additional lid 6. Since the guard cylindrical portion 44 having a height higher than the engaging portion 45 is provided on the fixed support member 43 fixed to the box body 1 side, the engaging portion 45 is transported or transferred when the clean box CB is transported or stored. It is possible to prevent external impact from being applied to the battery and to facilitate handling.
[0045]
(5) Since the clean box CB is of a side opening type, the transported object 15 can be transferred in the horizontal direction while the clean box CB is connected to the clean room 50, and the transported object 15 can be delivered, and interfaces with various processing apparatuses. There is no need for extra movement.
[0046]
(6) Since the additional lid 6 is always held by the additional lid support mechanism even if it is separated from the intake / exhaust port 4 and does not fall off from the box body 1, a mechanism for receiving the additional lid 6 on the vacuum changer 60 side. There is no need to provide a lifting engagement means for raising and lowering the additional lid 6 by engaging with the engaging portion 45 of the additional lid 6 on the vacuum changer 60 side. For this reason, the mechanism of the vacuum changer 60 can be simplified.
[0047]
In the case where the side cover is prevented from falling off as a clean box, if the engagement between the side cover and the drop-off preventing means is released before the side cover is sucked and removed by the gate valve, It is possible to cleanly transport the object to be transported by the same operation as the form.
[0048]
Moreover, the mechanism which opens and closes the gate port 52 of the clean room 50 with the gate valve 53 can employ | adopt various structures suitably, in order to achieve the objective.
[0049]
Although the embodiments of the present invention have been described above, it will be obvious to those skilled in the art that the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the claims.
[0050]
【The invention's effect】
As described above, according to the clean conveyance method and apparatus according to the present invention, the separation state from the intake / exhaust port of the additional lid due to the vacuum chuck failure of the clean box can be detected by the sensor provided on the vacuum changer side, It is possible to recognize that the object to be transported inside the clean box may be contaminated. For this reason, the reliability of clean conveyance can be improved by not carrying in / out the object to be conveyed in a clean box having a defective vacuum chuck.
[Brief description of the drawings]
BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is an enlarged cross-sectional view of a main part when a clean box-side vacuum chuck is normal in a state where a clean box is placed on a vacuum changer according to an embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view of the main part when the vacuum chuck on the clean box side is also defective.
FIG. 3 is a front sectional view showing a clean box in a separated state.
FIG. 4 is a front sectional view showing a stage in which the clean box is placed on the vacuum changer and the clean box and the clean room are connected in the embodiment of the present invention.
FIG. 5 is a front sectional view showing a conventional clean gas sealed type clean box proposed by the present applicant.
FIG. 6 is an enlarged sectional view showing a mechanism around an additional lid in a conventional clean box proposed by the present applicant.
[Explanation of symbols]
1 Box body
2 Side opening
3 Adsorption annular groove
4 Intake and exhaust ports
5 Side cover
6 Additional lid
7 Intake and exhaust passage
15 Transported object
60 vacuum changer
41 Circular recess
42 Cylindrical member with upper end
43 Fixed support member
45 engaging part
46 Shaft
47 Large diameter part (or wide part)
50 Clean room
51 side wall
52 Gate entrance
53 Gate valve
60 vacuum changer
61 Cup-shaped mounting table
62 Rotating shaft
63 Hook arm member
CB clean box

Claims

A box body having an opening on one side surface, an adsorption annular groove surrounding the opening formed on the one side surface, and an intake / exhaust port communicating with the adsorption annular groove on the other surface; A horizontal lid that airtightly covers the adsorption annular groove in the mounted state and forms an adsorption space, and is adsorbed by the box body due to a pressure difference inside and outside the adsorption space to airtightly close the opening; An additional lid that closes the intake / exhaust port in an airtight manner by an internal / external pressure difference, and the additional lid can be supported to move up and down between a closed state and a detached state with respect to the intake / exhaust port , and can be held in a detached state. A clean box that has an additional lid support mechanism and does not have an exhaust means and a transfer means, and that the additional lid is held by the additional lid support mechanism in a detached state in which the additional lid is separated from the intake / exhaust port by gravity. Feeling A vacuum changer including a sensor for,
A clean conveyance method, wherein a hermetic seal failure of the clean box is detected by sensing a detached state of the additional lid by the sensor in a state where the clean box is coupled to the vacuum changer.

A box body having an opening on one side surface, an adsorption annular groove surrounding the opening formed on the one side surface, and an intake / exhaust port communicating with the adsorption annular groove on the other surface; A horizontal lid that airtightly covers the adsorption annular groove in the mounted state and forms an adsorption space, and is adsorbed by the box body due to a pressure difference inside and outside the adsorption space to airtightly close the opening; An additional lid that closes the intake / exhaust port in an airtight manner by an internal / external pressure difference, and the additional lid can be supported to move up and down between a closed state and a detached state with respect to the intake / exhaust port , and can be held in a detached state. A clean box that has an additional lid support mechanism and does not have an exhaust means and a transfer means, and that the additional lid is held by the additional lid support mechanism in a detached state in which the additional lid is separated from the intake / exhaust port by gravity. Feeling A vacuum changer including a sensor for,
When the clean box is hermetically connected to the gate port of the clean device in which the gate port formed on the side wall surface is hermetically closed with a gate valve, and the sensor does not detect the detached state of the additional lid, A vacuum changer is used to evacuate a sealed space outside the box body including the additional lid to eliminate the pressure difference between the inside and outside of the additional lid, to release the additional lid from the intake / exhaust port and to open the intake / exhaust port, After the suction space is brought to atmospheric pressure through the intake / exhaust port, the lateral cover is held by the gate valve and pulled into the clean device to communicate the clean box internal space with the clean device, A clean transport method characterized by transporting an object to be transported.

If the sensor detects that the additional lid is detached before opening the horizontal lid, the vacuum changer may evacuate the sealed space outside the box body including the additional lid as a hermetic seal failure of the clean box. The clean transfer method according to claim 2, wherein:

A state in which the additional lid is detached from the intake / exhaust port after the opening is hermetically closed by holding the lateral lid with the gate valve from a state where the clean box interior space and the interior of the clean device are in communication with each other. The vacuum changer is used to evacuate the adsorption space through the intake / exhaust port, and then the intake / exhaust port is hermetically closed with the additional lid and the sealed space outside the box body including the additional lid is atmospheric pressure. The clean transfer method according to claim 2 or 3.

A box body having an opening on one side surface, an adsorption annular groove surrounding the opening formed on the one side surface, and an intake / exhaust port communicating with the adsorption annular groove on the other surface; A horizontal lid that airtightly covers the adsorption annular groove in the mounted state and forms an adsorption space, and is adsorbed by the box body due to a pressure difference inside and outside the adsorption space to airtightly close the opening; An additional lid that closes the intake / exhaust port in an airtight manner by an internal / external pressure difference, and the additional lid can be supported to move up and down between a closed state and a detached state with respect to the intake / exhaust port , and can be held in a detached state An additional lid support mechanism, and a clean box having no exhaust means and transfer means;
A clean device having a gate port formed on the side wall surface, and a gate valve capable of opening and closing the gate port and capable of holding a horizontal lid of a clean box connected to the gate port;
A box body outer side including a sensor for detecting that the additional lid is held by the additional lid support mechanism in a detached state in which the additional lid is separated from the intake / exhaust port due to gravity, and an additional lid of a clean box connected to the gate port A vacuum changer having a vacuum exhaust means for vacuum exhausting the sealed space of
A clean conveying apparatus, wherein the sensor detects a detached state of the additional lid by the sensor to detect a hermetic sealing failure of the clean box.

If the sensor does not detect the detached state of the additional lid, the vacuum exhaust means of the vacuum changer evacuates the sealed space outside the box body including the additional lid, and the sensor detects whether the additional lid is detached. 6. The clean transfer apparatus according to claim 5, wherein when detected, the vacuum evacuation means does not operate as a hermetic seal failure of the clean box.

The clean transfer device according to claim 5 or 6, wherein the sensor is a proximity sensor and is attached to a mounting table on which the clean box of a vacuum changer is mounted.

The additional lid support mechanism includes a fixed support member that supports an engaging portion integrated with the additional lid so as to be movable up and down, and the fixed supporting member has a guard having a height higher than that of the engaging portion. The clean transfer device according to claim 5, 6 or 7, which is provided and fixed to the box body.