JP3785905B2 - Electro-optical device and electronic apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention belongs to a technical field of an electro-optical device such as a liquid crystal device, and particularly belongs to a technical field of an electro-optical device having a reflective electrode.
[0002]
[Prior art]
2. Description of the Related Art In recent years, a liquid crystal display device including a reflective liquid crystal panel has attracted attention as an electro-optical device used in electronic devices such as notebook personal computers, PDAs (personal data assistants), and liquid crystal projectors.
[0003]
The reflective liquid crystal panel includes, for example, a glass or silicon (Si) substrate provided with a switching element such as a data line, a scanning line, a transistor, a charge storage capacitor, and a reflective pixel electrode such as aluminum, and a transparent conductive material. A liquid crystal layer is sandwiched between a glass substrate provided with a counter electrode made of a film and the like. Since the pixel electrode is a reflection type, a switching element such as a transistor can be provided below the pixel electrode, and even when the resolution is increased, the aperture ratio of the panel does not decrease, and both high resolution and high luminance are achieved. Can do.
[0004]
However, when driving a reflective liquid crystal panel having such a configuration, the potential of the data line is temporarily stored in a charge storage capacitor provided in the pixel, and the potential is also applied to the reflective pixel electrode. Since a driving method in which an image signal voltage is applied to the liquid crystal layer for each pixel is employed, current leakage from the liquid crystal capacitor and the charge storage capacitor may occur. Therefore, the potential held by the liquid crystal capacitance is lowered, which may cause deterioration of the display state such as a decrease in brightness and contrast.
[0005]
For this reason, in order to maintain a high-quality display image, it is necessary to supply signals to the data lines and scanning lines, periodically write a voltage to each pixel, and maintain the potential. There was a problem that it was difficult to make it easier.
[0006]
In order to solve such problems, for example, as disclosed in Japanese Patent Application Laid-Open No. 8-286170, etc., a liquid crystal in which a 1-bit memory cell is disposed below the reflective pixel electrode of each pixel. A panel was proposed.
[0007]
In a liquid crystal panel provided with such a memory cell for each pixel, an image signal from a data line is latched by the memory cell, and the signal is applied to the liquid crystal layer of each pixel. Since the memory cell holds the previous signal until a new signal is written, once the signal is written, even if the supply of the signal to the data line and the scanning line is stopped, Images written so far can be continuously displayed as still images. As a result, input of an image signal from the outside can be stopped when a still image is displayed, and power consumption can be reduced.
[0008]
Further, by digitizing the pixel voltage, there is an advantage that display quality is hardly deteriorated due to crosstalk or the like.
[0009]
[Problems to be solved by the invention]
As described above, in the case of a liquid crystal display device that employs a driving method in which an image signal voltage is applied to the liquid crystal layer for each pixel, a conventional reflective liquid crystal display device starts from a liquid crystal capacitor and a charge storage capacitor. Current leakage may occur, and the potential held by the liquid crystal capacitance may decrease, leading to deterioration of the display state such as a decrease in brightness and contrast and the occurrence of crosstalk.
[0010]
Further, as disclosed in JP-A-8-286170 and the like, in the case of a liquid crystal display device in which a 1-bit memory cell is provided below the reflective pixel electrode of each pixel, A substrate on which a semiconductor such as silicon is formed is used. For this reason, as shown in FIG. 8, the pixel electrode 803 is directly formed on a silicon (hereinafter referred to as Si) substrate 801. In order to enlarge the screen, the Si substrate must be enlarged. Since Si is an expensive material, the entire device becomes expensive even when trying to realize a display device with a size of about 1 to 2 inches diagonal, which is the size used for mobile phones and the like. There is a problem.
[0011]
Accordingly, an object of the present invention is to provide a reflection type electro-optical device that solves the above-described problems and does not deteriorate the display state such as a decrease in brightness and contrast and the occurrence of crosstalk. Another object is to reduce the amount of expensive Si substrate used and to reduce the cost of the entire apparatus.
[0012]
[Means for Solving the Problems]
The electro-optical device of the present invention includes a first substrate,
A second substrate that is light transmissive and provided opposite the first substrate;
A plurality of pixel electrodes provided in a matrix on the first substrate and defining each pixel;
The electro-optic element sandwiched between the first substrate and the second substrate, and the electricity mounted on a surface opposite to the surface on which the plurality of pixel electrodes are formed on the first substrate. A driving IC for driving an optical element; and a plurality of connecting means connected to the plurality of pixel electrodes, respectively, passing through the first substrate, and connecting the driving IC and the plurality of pixel electrodes; A wiring for connecting the driving IC and the connecting means is provided.
The driving IC of the electro-optical device according to the invention includes a switch for selecting a driving voltage to be applied to the pixel electrode, a data storage unit for storing display data, and a display data of the data storage unit and a count value. And a comparator for controlling the switch.
[0013]
According to the electro-optical device of the present invention, since the liquid crystal driving circuit can be constituted by a switch, a comparator, and data holding means, the driving circuit can be reduced, and the entire device can be made inexpensive.
[0014]
Furthermore, the data storage means is a static RAM or a dynamic RAM formed using a switching element.
[0015]
According to the present invention, it is possible to easily increase the number of bits even when the size of the pixel electrode is reduced as the electro-optical device has higher resolution.
[0016]
Further, the driving waveform of the electrode of the second substrate is a DC waveform.
[0017]
According to the present invention, since the driving waveform of the electrode of the second substrate is a direct current waveform, display without image quality deterioration such as crosstalk can be achieved.
[0018]
Further, the drive waveform for driving the electrode on the second substrate is opposite in phase to the ON drive waveform for driving the pixel electrode on the first substrate.
[0019]
According to the present invention, since the driving waveform for driving the electrode of the second substrate is opposite in phase to the driving waveform at the time of driving the pixel electrode of the first substrate, the electro-optical device Can be halved.
[0020]
Furthermore, it has a shield electrode for shielding an electric field in the inner layer of the first substrate.
[0021]
According to the present invention, the electric field due to the drive waveform can be shielded from the drive circuit and other circuits by having the shield electrode for shielding the electric field in the inner layer of the first substrate.
[0022]
Furthermore, the intervals of the count values indicating the drive waveform switching timing for gradation display for driving the pixel electrodes are not uniform.
[0023]
According to the present invention, the characteristics of the electro-optical element are corrected because the interval of the count bus indicating the switching timing of the drive waveform for gradation display that drives the pixel electrode output from the controller is uneven. In addition, the gradation to be displayed can be made linear.
[0024]
Furthermore, the driving IC is divided into a plurality of chips.
[0025]
According to the present invention, since the driving IC is divided into a plurality of chips, even when the number of display pixels is changed, it is possible to easily cope with the problem by increasing or decreasing the number of chips.
[0026]
Further, the surface of the pixel electrode of the first substrate is uneven by a dummy micro via, a sandblasting method, an etching process using a resist mask, or the like.
[0027]
According to the present invention, since the surface of the pixel electrode of the first substrate is uneven, the incident light is scattered by the pixel electrode, thereby enabling a bright display.
[0028]
Further, the first substrate is made of glass epoxy.
[0029]
Further, the first substrate is made of ceramic.
[0030]
Further, the first substrate is made of resin.
[0031]
According to the above inventions, a multilayer substrate can be easily produced by making the first substrate with a material for producing a normal circuit board.
[0032]
Furthermore, an electronic apparatus according to the present invention includes the electro-optical device, and a circuit for controlling the electronic apparatus is mounted on the first substrate.
[0033]
According to the present invention, the mounting density of electronic devices can be increased and the entire device can be downsized.
[0034]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0035]
FIG. 1 is a diagram for explaining the configuration of a reflective liquid crystal display device which is an electro-optical device according to this embodiment. (A) is a top view, (b) is a cross-sectional view, and (c) is a bottom view.
[0036]
In the liquid crystal display device of the present invention, a lower substrate, which is a first substrate for forming pixel electrodes in a matrix, is a multi-layer substrate, and an IC having a circuit as a liquid crystal driving means for driving liquid crystal, that is, a driver is provided on the back side of the substrate. This is characterized by reducing the amount of Si used for the display area and reducing the cost of the entire apparatus. For the first substrate, it is desirable to use the same glass epoxy material, ceramic, resin or the like as a normal circuit board.
[0037]
A first embodiment of the present invention will be described with reference to FIGS. 1 (a), (b) and (c). In FIG. 1, an upper substrate 105, which is a second substrate made of a light transmissive material such as glass or plastic, has a polarizing plate 104 on its upper surface and a Y electrode covering the entire screen on its lower surface. The second substrate is also called a counter substrate because it faces the first substrate. Further, since the Y electrode faces the pixel electrode 102, it may be called a counter electrode. The Y electrode has a part of the seal 107 made of conductive anisotropic rubber, and is connected to the wiring 108 through the micro via 103 of the lower substrate 110. Further, it is connected to the IC 109b by a Y electrode connection 111.
[0038]
Pixel electrodes 102 are formed in a matrix on a lower substrate 110 that is a first substrate. Each pixel electrode 102 is connected to a micro via 103 which is an electrical connection means. At the junction between the micro via 103 and the pixel electrode 102, the hole is closed so that the reflected light does not leak. The pixel electrode 102 is connected to IC 109a and IC 109b which are liquid crystal driving means for driving liquid crystal by a micro via 103 and wiring 108 which are connection means. The ICs 109 a and b are provided on the back surface of the lower substrate 110. Note that another substrate may be provided so that the IC is sandwiched between the lower substrate. Alternatively, a photosensitive resin can be applied to the surface on which the IC is mounted after the IC is mounted to form a further wiring layer.
[0039]
Although not shown, the lower substrate 110 includes a shield electrode in the inner layer of the substrate, and an electric field that generates a voltage waveform applied to the pixel electrode 102 is applied to the IC 109a, IC 109b, or another IC not shown. It is preventing the influence.
[0040]
A liquid crystal layer 106 is provided between the upper substrate 105 and the lower substrate 110 and sealed by a seal 107.
[0041]
The liquid crystal that enters the liquid crystal layer 106 includes a twisted nematic (TN) liquid crystal, a super twisted nematic (STN) liquid crystal, a TN liquid crystal having bistable memory properties, a super homeotropic (SH) liquid crystal, a guest Various liquid crystals such as a host (GH) type liquid crystal can be used. However, a polarizer such as a polarizing plate or a polarizing beam splitter is required outside the upper substrate except for the GH type.
[0042]
A pixel electrode 102 that reflects incident light is formed on the lower substrate 110 in a divided manner for each pixel. Each pixel electrode 102 has a mirror surface when used in a light valve, but has a surface with irregularities in a direct-view type, which is a direct-view type. This unevenness may be made by sandblasting or the like on the surface of the electrode material Au (copper) or Al (aluminum), or by etching by resist masking. In addition, it is possible to provide micro vias 103 that penetrate through the lower substrate 110 in dummy in a plurality of pixels, thereby forming a large number of concave shapes and light scattering surfaces. After making this irregularity, a reflective film on the surface is made of a highly reflective material such as Al by plating or vapor deposition. The incident light is scattered by the unevenness, and the light reaching the observer watching the display device is more than the specular reflection of the mirror surface, and a bright display is possible.
[0043]
A selective reflection film can be formed by stacking a low refractive index material SiO2 and a high refractive index material TiO2 in multiple layers on the reflection film. Accordingly, color display is possible by reflecting light in a specific wavelength range.
[0044]
The IC 109a and IC 109b are connected by an internal bus, and either of them has a built-in controller. However, only one controller is required for one display panel, and it may be constituted by another IC. The reason why the IC is divided into a plurality of chips is that even if the number of display pixels changes, it can be easily handled by changing the number of chips. If it is not divided into a plurality of parts, the design of the internal circuit of the IC must be changed, resulting in a great cost.
[0045]
Next, drive waveforms for driving the liquid crystal will be described. In this embodiment, a case where a TN liquid crystal is used will be described.
[0046]
FIG. 2 and FIG. 3 each show an embodiment of drive waveforms, and FIG. 4 is a circuit block diagram for explaining the inside of the ICs 109a and 109b which are liquid crystal drive means. FIG. 5 shows the relationship between the applied voltage and the reflectance in the normally white mode of the TN liquid crystal.
[0047]
First, a first embodiment of driving will be described with reference to FIGS. A feature of this drive is that a DC waveform, which is a constant voltage with no waveform switching, is applied to the Y electrode on the upper substrate. For this reason, a clear screen free from crosstalk or the like can be realized with low power consumption without causing waveform distortion on the Y electrode substrate. FIG. 2A shows the Y electrode drive waveform. It is the direct current waveform which has selected the V2 potential. FIG. 2B shows a black display waveform of the pixel electrode in the normally white mode. Voltages V1-V2 and V2-V3 are always applied to the liquid crystal. Each of these voltages is about 4.0V, and the voltage from V1 to V3 is the withstand voltage of the entire drive circuit, and this voltage is 8.0V. Here, the waveform changes from positive polarity to negative polarity every 1/60 seconds, that is, 16.6 milliseconds, and is applied to the liquid crystal. This is to prevent a phenomenon called burn-in that remains thin on the display panel even if the image changes when the same image is displayed on the liquid crystal display panel for a long time. FIG. 2C shows a waveform of a pixel electrode for displaying a gray level, and shows a case of 85 gradations out of 256 gradations. 16.6 msec, which is one frame period, is divided into 256, and voltage is applied to the liquid crystal layer for 85 tones, that is, 5.5 msec, and no voltage is applied for the remaining 11.1 msec. To express the gray level.
[0048]
FIG. 4 shows a circuit block for realizing this liquid crystal driving circuit. The circuit block includes a controller 401 that is a control unit for the entire apparatus, a switch 404 that is a waveform selection unit, a comparator 407 that is a waveform control unit for controlling the switch 404, and a RAM 408 that is a data storage unit. . Further, the controller 401 includes a counter 402, a memory controller 403, and waveform generation means (not shown). As described above, since the liquid crystal driving circuit can be configured by a simple switch, comparator, RAM, and controller, an IC for driving the liquid crystal can be configured by a small circuit, and thus the entire apparatus can be made inexpensive.
[0049]
The RAM 408 is a static RAM (SRAM) or a dynamic RAM (DRAM) formed using a switching element. The number of bits can be easily increased even when the pixel electrode is downsized in accordance with an increase in resolution of a pixel displayed by the liquid crystal display device.
[0050]
Here, only one controller 401 is required for the entire liquid crystal display device, and the other comparators 407, RAM 408, and switches 404 are independent for each pixel.
[0051]
The ON waveform generated in the controller 401 is the waveform shown in FIG. 2B, and the OFF waveform is the waveform shown in FIG. The counter 402 in the controller 401 counts 256 (8 bits), for example. There are eight count buses. The memory controller 403 is accessed only when an image to be displayed is changed from the outside, and rewrites the contents of the RAM 408 of each pixel. Here, for example, it is assumed that the gradation data 85 is written in the RAM 408. The counter 402 counts in order from 1 to 255 in 1 frame period from 0 to 255. The comparator 407 compares the count value of the count bus from the counter 402 with the data of the memory value of the RAM 408, and controls the switch 404 so that the ON waveform is selected until the count value is 84, and when the count value is 85 or later, the OFF waveform is displayed. The switch 404 is controlled to select. As a result, the gray level 85 is displayed on the liquid crystal 405.
[0052]
As described above, 256 gradations can be displayed by switching the waveform once during one frame period (16.6 milliseconds). Conventionally, time division is performed according to the number of scanning lines in the Y-axis direction. For this number, for example, if there are 480 scanning lines, time division of 480 or more is performed, and time division or voltage modulation for gradation display is performed. Although it was necessary, in the present invention, in order to display 256 gradations, no matter how the number of pixels increases, one frame is divided into 256, and the waveform can be switched only once. For this reason, the charge / discharge current of the liquid crystal is suppressed, the power consumption is low, and the switching of the waveform is small, so that the distortion of the liquid crystal voltage waveform due to capacitive coupling between the Y electrode and the pixel electrode is prevented, and the display image is disturbed. High-quality display that does not cause talk or flicker is possible.
[0053]
Next, a second embodiment of driving will be described. In the case of FIG. 3, the amplitude of the voltage waveform applied to the pixel electrode is reversed by setting the phase of the waveform of the voltage waveform applied to the Y electrode, which is the counter electrode, to the phase of the waveform of the voltage waveform applied to the pixel (ON display). Halve. Since the voltage amplitude is halved, the power consumption is further reduced compared to the first embodiment. FIG. 3A shows a voltage waveform applied to the Y electrode, and FIG. 3B shows an ON waveform having a phase opposite to that of the voltage waveform applied to the Y electrode, and a black display waveform in the normally white mode. Is shown. A voltage of V1-V3 and-(V1-V3) is sequentially applied to the liquid crystal every 16.6 milliseconds. The voltage value of V1-V3 is the same as the voltage value of V1-V2 in FIG. 2B, and is 4.0V. The amplitude width of the waveform is halved. The withstand voltage of the entire electro-optical device is 4.0V. FIG. 3C shows an effective voltage waveform when 85 gray levels in 256 gray levels are displayed. The value of V1-V3 is set equal to the voltage value of V1-V2 in FIG. 2C, and the same effective voltage is applied to the liquid crystal.
[0054]
The circuit block is shown in FIG. 4 and is the same as that of the first embodiment. The difference is that the ON waveform is shown in FIG. 3B and the OFF waveform is shown in FIG.
[0055]
Up to this point, the gray level display (gradation display) has been described with equal time allocation. However, as shown in FIG. 5, the relationship between the applied voltage and the reflectance of the liquid crystal is not a linear relationship between the applied voltage and the reflectance. In order to correct this, as shown in FIG. 6, the interval of the clocks supplied to the counter 402 of the controller 401 is set not to be equally divided but to unequal times, and the change of each count bus is made unequal, It is possible to correct the nonlinearity of the liquid crystal and make the gradation uniform. As described above, even if the number is divided equally, the number of divisions into 256 does not change, so the power consumption does not increase.
[0056]
Here, when the number of pixels displayed by one IC is 256, the connection between the IC 109a and the IC 109b is one ON waveform, one OFF waveform, eight count buses, eight address buses, and eight data buses. Commonly connected, one selection signal for each IC chip is connected to each IC. Because of this bus connection, when the number of display pixels is increased, the number of ICs to be mounted may be increased, and there is no need to change the design of the Si substrate as in the prior art, and the apparatus can cope with an increase or decrease in the number of display pixels. The whole can be configured at low cost.
[0057]
Further, in a direct-view type liquid crystal display device made on a conventional Si substrate, the area of the Si substrate must be increased in accordance with the display area. In the liquid crystal display device of the present invention, the size of the IC chip (driver) is required. The number of display pixels can be changed and the size of the screen can be changed depending on the size and number of pixel electrodes built on a substrate made of a material cheaper than a silicon substrate such as glass epoxy. it can. For this reason, the entire apparatus can be configured at low cost even when the display size is increased.
[0058]
Furthermore, in a direct-view type liquid crystal display device made on a conventional Si substrate, when the display area is optically enlarged, a lens must be installed on the front surface. The lens must be installed at a position separated from the second substrate by the thickness and focal length of the lens, and the entire display device is thick. However, in the liquid crystal display device of the present invention, since the resolution is determined by the size and pitch of the pixel electrodes on the first substrate, the display resolution can be set large or small by this design. For this reason, it is not necessary to use a lens, and the entire apparatus can be made thin, light and small.
[0059]
In this embodiment, the lower substrate, which is the first substrate, is made of the same material as that of a normal circuit substrate such as glass epoxy or ceramic. Therefore, a liquid crystal that is an electro-optical device on the same circuit substrate as the circuit substrate of the entire device such as a cellular phone. An electronic device equipped with a display device can be configured. An example of this configuration is shown in FIG. The liquid crystal display portion 701 uses the lower substrate, which is the first substrate, as the substrate 702 as the substrate of the entire apparatus. Here, a driver 703 which is an IC for driving liquid crystal, a switch 704 of a mobile phone, and an IC 705 for controlling sound and radio waves are mounted. For this reason, compared to the conventional case where the display device is independently provided, there is an advantage that the entire device can be made thinner and lighter because there is no need for a connector and the area of the circuit board is reduced.
[0060]
As described above, the black-and-white display has been mainly described. Needless to say, the color display can be performed by forming a color filter layer made of a pigment or the like on the pixel electrode or the transparent second substrate. It goes without saying that the present invention can also be applied to a reflective projector using the reflective liquid crystal display device of this embodiment.
[0061]
As described above, the electro-optical device and the electronic apparatus according to the present invention can be applied not only to an image display unit such as a notebook personal computer, a small VTR camera, a head-mounted monitor, a reflective projector, or a television, but also to a mobile phone. Even when it is used, good gradation display with high resolution can be performed with low power consumption, and the entire apparatus can be thinned and miniaturized and provided at low cost.
[0062]
【The invention's effect】
In the present invention, no matter how the number of pixels increases, for example, in order to display 256 gradations, one frame is divided into 256, and the waveform can be switched only once. For this reason, the charge / discharge current of the liquid crystal is suppressed, the power consumption is low, and the switching of the waveform is small, so that the distortion of the liquid crystal voltage waveform due to capacitive coupling between the Y electrode and the pixel electrode is prevented, and the display image is disturbed. High-quality display that does not cause talk or flicker is possible.
[Brief description of the drawings]
1A and 1B are schematic views of a liquid crystal display device that is an electro-optical device according to an embodiment of the present invention, in which FIG. 1A is a top view, FIG. 1B is a cross-sectional view, and FIG.
FIG. 2 is a drive waveform diagram of a liquid crystal display device which is an electro-optical device according to the first embodiment of the invention.
FIG. 3 is a drive waveform diagram of a liquid crystal display device which is an electro-optical device according to a second embodiment of the invention.
FIG. 4 is a circuit block diagram showing an outline of a circuit of a liquid crystal display device which is an electro-optical device according to an embodiment of the invention.
FIG. 5 is a diagram showing a relationship between an applied voltage and a reflectance in a normally white mode of a TN liquid crystal in a liquid crystal display device that is an electro-optical device according to an embodiment of the invention.
FIG. 6 sets the interval of clocks supplied to the counter 402 of the controller 401 of the liquid crystal display device, which is an electro-optical device according to an embodiment of the present invention, as non-equal times, It is a figure explaining correcting the nonlinearity of a liquid crystal and making a gradation equal by making change non-uniform.
FIG. 7 is a diagram showing an example in which the circuit board of the entire apparatus such as a mobile phone in the electronic apparatus according to the embodiment of the present invention is configured on the same circuit board.
FIG. 8 is a diagram showing a schematic configuration of a conventional reflective liquid crystal display device.
[Explanation of symbols]
101 ... Y electrode 102 ... pixel electrode 103 ... micro via 104 ... polarizing plate 105 ... upper substrate 106 ... liquid crystal layer 107 ... seal 108 ... wiring 109a, b ... IC
110 ... Lower substrate 111 ... Y electrode connection

Claims (13)

A first substrate;
A second substrate that is light transmissive and provided opposite the first substrate;
A plurality of pixel electrodes provided in a matrix on the first substrate and defining each pixel;
An electro-optic element sandwiched between the first substrate and the second substrate;
A driving IC for driving the electro-optic element mounted on a surface opposite to the surface on which the plurality of pixel electrodes are formed on the first substrate;
A plurality of connection means connected to the plurality of pixel electrodes, respectively, penetrating through the first substrate and connecting the driving IC and the plurality of pixel electrodes;
An electro-optical device comprising: the driving IC and a wiring for connecting the connecting means.   The driving IC includes a switch that selects a driving voltage to be applied to the pixel electrode, a data storage unit that stores display data, and a comparator that controls the switch by comparing the display data of the data storage unit with a count value. The electro-optical device according to claim 1, wherein the electro-optical device is provided.   3. The electro-optical device according to claim 2, wherein the data storage unit is a static RAM or a dynamic RAM formed using a switching element.   The electro-optical device according to claim 1, wherein the driving waveform of the electrode of the second substrate is a direct current waveform.   2. The drive waveform for driving the electrode on the second substrate is opposite in phase to the ON drive waveform for driving the pixel electrode on the first substrate. 4. The electro-optical device according to claim 3.   6. The electro-optical device according to claim 1, further comprising a shield electrode for shielding an electric field on an inner layer of the first substrate.   7. The electricity according to claim 2, wherein the intervals of the count values indicating the switching timing of the drive waveform for gradation display for driving the pixel electrode are unequal. Optical device.   The electro-optical device according to claim 1, wherein the driving IC is divided into a plurality of chips.   9. The surface of the pixel electrode of the first substrate is uneven by a dummy micro via, a sandblasting method, an etching process using a resist mask, or the like. The electro-optical device according to any one of the above.   The electro-optical device according to claim 1, wherein the first substrate is made of glass epoxy.   The electro-optical device according to claim 1, wherein the first substrate is made of ceramic.   The electro-optical device according to claim 1, wherein the first substrate is made of a resin.   13. An electronic apparatus device comprising the electro-optical device according to claim 1, wherein a circuit for controlling the electronic device is mounted on the first substrate.

Images