JP3785740B2

JP3785740B2 - Method and apparatus for measuring secondary electron emission ability

Info

Publication number: JP3785740B2
Application number: JP13638297A
Authority: JP
Inventors: 伸昭古谷; 彰金子; 由雄渡辺
Original assignee: Panasonic Corp; Matsushita Electric Industrial Co Ltd
Current assignee: Panasonic Corp; Panasonic Holdings Corp
Priority date: 1997-05-27
Filing date: 1997-05-27
Publication date: 2006-06-14
Anticipated expiration: 2017-05-27
Also published as: JPH10332609A

Description

【０００１】
【発明の属する技術分野】
本発明は、荷電粒子による物質からの２次電子放出能の測定方法および装置に関するものであり、放電や荷電粒子を扱う技術分野に関するものである。
【０００２】
【従来の技術】
荷電粒子が物質に入射すると二次電子が放出される。この二次電子放出能を知ることは、放電現象、荷電粒子ビーム等を扱うデバイスにとって非常に重要なことである。特に、放電管、蛍光灯、プラズマ・ディスプレイ等、ガス封入デバイスにとって、荷電粒子による構成材料からの二次電子放出の有無は、その特性に大きな影響を与える重要な問題である。それ故、デバイス構成材料の二次電子放出能を知ることは、デバイス設計の段階で性能予測ができ、有益な効果を持つ。
【０００３】
従来、荷電粒子による二次電子放出能の測定は、電子による二次電子放出能の測定と類似の方法で行っていた。即ち、電子による二次電子放出能の測定は、電子銃により発生させた電子を被測定物質に照射し、その時に発生する二次電子の量を入射電子量と比較して二次電子放出能を求めていた。一方、荷電粒子による二次電子放出能の測定は、電子による測定の時の電子銃の代わりに、イオン銃を用いてイオンを発生させ、そのイオンを被測定物に照射して被測定物質の二次電子放出能を求めていた。例えば、テレビジョン学会技術報告ＩＰＵ９５−７１、５１ページ（１９９５年）に記載されている構成の測定方法である。
【０００４】
この従来の荷電粒子による二次電子放出能の測定方法について、図４を用いて説明する。図４において、１０１はチャンバー、１０２はイオン銃、１０３は陰極電極、１０４はコレクター電極、１０５は開口部、１０６は加速電源、１０７はコレクター電源、１０８は試料、１０９〜１１１は電流計を示す。
【０００５】
測定系は、図４に示すように、チャンバー１０１の中にイオン銃１０２と、陰極電極１０３と、陰極電極１０３を囲むように形成され、試料１０８に荷電粒子が入射できるように開口部１０５を持った二次電子捕獲用コレクター電極１０４で構成されている。さらに、加速電源１０６によりイオン銃１０２と陰極電極１０３の間に加速電圧を、またコレクター電源１０７によりコレクター電極１０４に電子捕獲用コレクター電圧を印加し、各回路系に流れる電流量を電流計１０９〜１１１で測定する構成となっている。
【０００６】
そして、二次電子放出能の測定は、求めたい元素の荷電粒子をイオン源１０２から放射し、電極間の電場で加速して試料１０８に照射し、試料１０８から放出される二次電子を陰極電極１０３より電位の高いコレクター電極１０４によって捕獲する。すると、電流計１１０に二次電子電流Ｉｅが流れ、電流計１０９には荷電粒子電流Ｉｐと二次電子電流Ｉｅの合算した電流Ｉｋが流れ、電流計１１１には荷電粒子電流Ｉｐが流れる。このようにして得られた各電流値を用いて、荷電粒子による二次電子放出能γを、
【０００７】
【数１】

【０００８】
として求めていた。
【０００９】
【発明が解決しようとする課題】
しかしながら、上記従来の技術では、低真空度環境での二次電子放出能を測定しようとすると、放出された二次電子は陰極電極１０３とコレクター電極１０４との間に存在するガス分子や入射荷電粒子との相互作用により、二次電子放出電流量を正確に測定できなくなる。そのため、荷電粒子ビームを照射して二次電子放出能を求めるために、チャンバー１０１の内部を真空に排気して測定する必要がある。よって、ガス封入デバイスと同様の低真空度環境での二次電子放出能を求めることができないという課題がある。
【００１０】
本発明は、ガス封入デバイスと同様の低真空度環境での二次電子放出能の値を容易に、かつ正確に測定することができる方法および装置を提供することを目的とするものである。
【００１１】
【課題を解決するための手段】
この課題を解決するために本発明は、所定のガス雰囲気中において、対向して配置された陽極電極と被測定物質を配した複数に分割された陰極電極とに電圧を印加し、両電極間の空間内でガスをイオン化させ、分割された複数の陰極電極に流れる電荷量により、二次電子放出能を測定するものである。
【００１２】
さらに、複数の陰極電極上に異なった被測定物質を配置することにより、また複数の被測定物質のうち１種類を二次電子放出能の既知な物質とし、分割された複数の陰極電極に流れる電荷量により、二次電子放出能を測定するものである。
【００１３】
この本発明によれば、ガス封入デバイスと同様の低真空度環境での二次電子放出能の値を容易に、かつ正確に測定する方法および装置を提供することができる。
【００１４】
【発明の実施の形態】
本発明の第１の発明は、所定のガス雰囲気中において、対向して配置された陽極電極と被測定物質を配し複数に分割された陰極電極とに電圧を印加し、両電極間の空間内でガスをイオン化させ、分割された複数の陰極電極に流れる電荷量により、二次電子放出能を測定するもので、実デバイスと同様なガス封入（低真空度）環境で測定可能で、真のデバイス動作に近い二次電子放出能の値を容易に、かつ正確に測定することができるという作用を有する。
【００１５】
第本発明の２の発明は、複数の陰極電極上に異なった被測定物質を配置して、各電極に流れる電荷量を測定することにより、イオン電流と二次電子放射が同一時刻に起こる現象として、かつ同時刻での電流として得られるために、正確に二次電子放出能の値を測定することができるという作用を有する。
【００１６】
本発明の第３の発明は、複数の被測定物のうち、１種類が二次電子放出能の既知な物質とすることにより、未知の物質の二次電子放出能は両者により容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００１７】
本発明の第４の発明は、イオン化電極を用いてガスのイオン化を行えば、従来のように高価なイオン銃を用いることなく安価で容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００１８】
本発明の第５の発明は、レーザ光を用いてガスのイオン化を行えば、内部の電界（陽極−陰極間）を乱すことなくイオン化ができるために容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００１９】
本発明の第６の発明は、測定したいイオン種元素を含むガスを所定の雰囲気ガスとすれば、実デバイスと同様のガス雰囲気での二次電子放出能を求めることができるために容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２０】
本発明の第７の発明は、各被測定物質面に開口部を有する視野制限板を設けたもので、開口部の面積を調整することにより容易に既知の被測定物と未知の被測定物との整合性をとることができ、二次電子放出能の値の測定を容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２１】
本発明の第８の発明は、所定の雰囲気ガスをＨｅ、Ｎｅ、Ｘｅ、Ａｒ、Ｋｒあるいはこれらのガスを主とする混合ガスとすることにより、ＰＤＰや放電管などの実デバイスと同じ環境で二次電子放出能を求めることができるために容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２２】
本発明の第９の発明は、所定のガス雰囲気中に、対向して配置された陽極電極と被測定物質を配した複数に分割された陰極電極と、陽極電極および陰極電極に電圧を印加する電圧印加手段と、両電極間の空間内でガスをイオン化させるイオン化手段と、各電極に流れる電荷量を測定する電荷量測定手段と、分割された複数の陰極電極に流れる電荷量により二次電子放出能を測定する二次電子測定部とを備えたもので、実デバイスと同様なガス封入（低真空度）環境で測定可能で、真のデバイス動作に近い二次電子放出能の値を容易に、かつ正確に測定することができるという作用を有する。
【００２３】
本発明の第１０の発明は、複数の陰極電極上に異なった被測定物質を配置して、各電極に流れる電荷量を測定することにより、イオン電流と二次電子放射が同一時刻に起こる現象として、かつ同時刻での電流として得られるために、正確に二次電子放出能の値を測定することができるという作用を有する。
【００２４】
本発明の第１１の発明は、複数の被測定物のうち、１種類が二次電子放出能の既知な物質とすることにより、未知の物質の二次電子放出能は両者により容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２５】
本発明の第１２の発明は、イオン化電極を用いてガスのイオン化を行えば、従来のように高価なイオン銃を用いることなく安価で容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２６】
本発明の第１３の発明は、レーザ光を用いてガスのイオン化を行えば、内部の電界（陽極−陰極間）を乱すことなくイオン化ができるために容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２７】
本発明の第１４の発明は、測定したいイオン種元素を含むガスを所定の雰囲気ガスとすれば、実デバイスと同様のガス雰囲気での二次電子放出能を求めることができるために容易に、かつ正確に二次電子放出能の値を測定することができるという作用を有する。
【００２８】
以下、本発明の実施の形態について、図１から図３を用いて説明する。
（実施の形態１）
図１は本発明の実施の形態１における荷電粒子による二次電子放出能測定装置を示す構成図である。図１において、１はチャンバー、２は陽極電極、３は陰極電極Ａ、４は陰極電極Ｂ、５はイオン化部、６、７、８は電荷量測定部、９は電圧印加部、１０は被測定物質Ａ、１１は被測定物質Ｂ、１２は二次電子測定部、１３は端子、１４は視野制限板を示す。
【００２９】
図１に示すように、チャンバー１の中に陽極電極２と、複数の陰極電極Ａ３と陰極電極Ｂ４と、陽極−陰極電極間の空間で封入されたガスをイオン化するイオン化部５を備え、かつ陽極電極２と陰極電極３および４間に電圧印加できる電圧印加部９と、各電極に流れる電荷量を測定する電荷量測定部６〜８とを備えた構成となっている。そして、被測定物Ａ１０と被測定物Ｂ１１をそれぞれ陰極電極Ａ３と陰極電極Ｂ４の上にセットし、イオン化部５によってガスをイオン化し、陽イオンの荷電粒子を被測定物質１０および１１上に照射させる。すると各被測定物質１０および１１から二次電子が放出され、荷電粒子と合算した電荷が各電荷量測定部６、７に流れ、全電荷量が電荷量測定部８に流れる。二次電子測定部１２は、電荷量測定部６、７および８からの電荷量から二次電子放出能γを求め、端子１３に出力する。
【００３０】
陽極電極および陰極電極間の空間で、ガスを放電させてプラズマ化し、被測定物質に流入する荷電粒子の電荷量をＱｉ、陰極電極に流れる電荷量（荷電粒子量＋二次電子量）をＱｋとすると、二次電子放出能γは、簡単に表すと、
【００３１】
【数２】

【００３２】
と書くことができる。
ここで、電荷量測定部６および７に流れる総電荷量をそれぞれＱａおよびＱｂ、被測定物質Ａ１０および被測定物質Ｂ１１に流入する荷電粒子の電荷量をそれぞれＱiaおよびＱibまた二次電子放出能をそれぞれγａおよびγｂとすると、
【００３３】
【数３】

【００３４】
の関係が成り立つ。
また、ガスがイオン化される部分から、複数の陰極電極Ａ３と陰極電極Ｂ４のそれぞれの電極が等価に見込めるように配すると、例えば複数の陰極電極Ａ３と陰極電極Ｂ４のそれぞれの総面積を等しくすると、陰極電極Ａ３と陰極電極Ｂ４への流入荷電粒子量、即ち被測定物質Ａ１０および被測定物質Ｂ１１に流入する荷電粒子の電荷量ＱiaおよびＱibが等しくなる。よって、γａとγｂとの間には次の関係が成り立つ。
【００３５】
【数４】

【００３６】
ここで、例えば被測定物質Ａ１０の二次電子放出能γａの値が既知とすると、二次電子放出能の値が未知な物質である被測定物質Ｂ１１の二次電子放出能γｂの値を、電荷量測定部６および７に流れる総電荷量ＱａおよびＱｂを測定することにより、二次電子測定部１２で（数４）を用いて二次電子放出能γｂを求めることができる。二次電子測定部１２で求めた二次電子放出能γｂは、端子１３を介して出力される。
【００３７】
なお、ここで複数の陰極電極として、２つの陰極電極を用いて説明したが、その数は２つに限定されるものでないことは無論である。また、本発明では、複数の陰極電極上に異なった被測定物質を配置して、各電極に流れる電流を測定するようにしたもので、イオン電流と二次電子放射が同一時刻に起こる現象として、かつ同時刻での電流として得ることができる。これは、従来、イオン電流と二次電子電流の測定は陰極電極と二次電子電流を集めるコレクター電極とにより別電極で測定していたために、その間を電子が走行する時間だけ、イオン電流と二次電子電流に時間的な差があり誤差を招いていたものを改善することができる。
【００３８】
さらに、ガスのイオン化部分から各被測定物質に荷電粒子が等価に照射されるように、各測定物質面に開口部を有する視野制限板１４を設け、開口部の面積を調整することにより、被測定物質Ａ１０および被測定物質Ｂ１１に流入する荷電粒子の電荷量ＱiaおよびＱibが等しくまたは校正することができ、より精度の高い二次電子放射能を求めることができることは無論である。また、開口部の形状は特に限定するものではなく、円形でも矩形でも良く、視野制限板１４の材質は二次電子放出の小さいものが良い。
【００３９】
また、陰極電極Ａおよび陰極電極Ｂの総面積を等しい場合で説明したが、面積比率によって、それぞれの陰極電極に入射する荷電粒子量および陰極電極に流れる総電荷量を較正すれば同様に二次電子放射能を求めることができることは無論である。
【００４０】
さらに、３種類以上の複数の被測定物質を同時に陰極電極上に配すれば、同時に同じ条件下で、それぞれの二次電子放射能を求めることができることは無論である。
【００４１】
上述のように、本発明によって、ガス封入デバイスと同様の低真空度環境での二次電子放出能の値を容易に、かつ正確に測定することができる方法および装置を提供することができる。
【００４２】
また、本発明は低真空度環境でなく高真空度下においても、求めたい荷電粒子を等価に、あるいは既知の配分比率で、被測定物質に照射することにより、同様に二次電子放射能を求めることができることは無論である。
【００４３】
（実施の形態２）
図２は本発明の実施の形態２の荷電粒子による二次電子放出能測定装置を示す構成図である。図２に示すように、チャンバー２１の中に例えばＨｅ、Ｎｅ、Ｘｅ、Ａｒ、Ｋｒあるいはこれらを主とする混合ガスを封入し、陽極電極２２と、複数の陰極電極Ａ２３と陰極電極Ｂ２４との間に、電圧印加部２９によって、例えば１００Ｖ〜３ＫＶ程の電圧を印加し、陽極電極２２と陰極電極２３および２４の間の空間で、イオン化電極２５に数十ＫＶの高電圧パルスを印加することにより、封入したガスをイオン化する。イオン化された陽イオン粒子が陰極電極Ａ２３および陰極電極Ｂ２４上の既知の値の被測定物Ａ３０、例えばＳｉ、Ａｕ、Ｐｔ等と被測定物Ｂ３１、例えばＭｇＯ、ＳｉＯ２、ＷまたはＭｏに照射され、各被測定物質３０および３１から二次電子が放出される。
【００４４】
各被測定物質３０および３１から放出された二次電子量および荷電粒子量と合算した電荷量ＱａおよびＱｂが各電荷量測定部２６、２７に流れる。この流れる電荷量を、例えば電流計、ストレージ・オシロあるいはコンピュータへの取り込み機能を備えた電荷量測定部２６〜２８で測定し、二次電子測定部３２で（数４）を用いて未知の物質の二次電子放出能γｂを求めることができる。
【００４５】
（実施の形態３）
図３は本発明の実施の形態の荷電粒子による二次電子放出能測定装置を示す構成図である。図３に示すように、チャンバー４１の中に例えばＡｒ、Ｈｅ、ＮｅあるいはＸｅを封入し、陽極電極４２と、複数の陰極電極Ａ４３と陰極電極Ｂ４４との間に、電圧印加部４９によって、例えば５０Ｖ〜５ＫＶ程の電圧を印加し、陽極電極４２と陰極電極４３および４４の間の空間で、例えばＣＯ２レーザあるいはエキシマ・レーザ４５をチャンバー４１に設けた窓５３からレンズ５２により集光して、封入したガスをイオン化する。すると、イオン化された陽イオン粒子が陰極電極Ａ４３および陰極電極Ｂ４４上の既知の値の被測定物質Ａ５０、例えばＣ、Ｎｉ、Ａｕ、Ｐｔ等と被測定物Ｂ５１、例えばＭｇＯ、ＳｉＯ２、Ａｌ２Ｏ３またはＭｏに照射され、各被測定物質５０および５１から二次電子が放出される。
【００４６】
各被測定物質５０および５１から放出された二次電子量および荷電粒子量と合算した電荷量ＱａおよびＱｂが各電荷量測定部４６、４７に流れる。この流れる電荷量を、例えば電流計、ストレージ・オシロあるいはコンピュータへの取り込み機能を備えた電荷量測定部４６〜４８で測定し、二次電子測定部５２で（数４）を用いて未知の物質の二次電子放出能γｂを求めることができる。
【００４７】
【発明の効果】
以上のように本発明によれば、対向して配置された陽極電極と被測定物質を設けた複数に分割された陰極電極とに電圧を印加し、両電極間の空間内でガスをイオン化させ、分割された複数の陰極電極に流れる電荷量により、二次電子放出能を測定するもので、低真空度環境での二次電子放出能の値を容易に、かつ正確に測定することができるという有利な効果が得られる。
【００４８】
また、同時に本発明の電極構成にすれば、低真空度環境でなく、従来の高真空度下においても、求めたい荷電粒子を等価に、あるいは既知の配分比率で、被測定物質に照射することにより、同様に容易に二次電子放射能を求めることができるという有利な効果が得られる。
【図面の簡単な説明】
【図１】本発明の実施の形態１による二次電子放出能測定装置を示す構成図
【図２】本発明の実施の形態２による二次電子放出能測定装置を示す構成図
【図３】本発明の実施の形態３による二次電子放出能測定装置を示す構成図
【図４】従来の技術による二次電子放出能測定方法を示す構成図
【符号の説明】
１、２１、４１チャンバー
２、２２、４２陽極電極
３、２３、４３陰極電極Ａ
４、２４、４４陰極電極Ｂ
５イオン化部
６、７、８、２６、２７、２８、４６、４７、４８電荷量測定部
９、２９、４９電圧印加部
１０、３０、５０被測定物質Ａ
１１、３１、５１被測定物質Ｂ
１２、３２、５２二次電子測定部
１３、３３、５３端子
１４視野制限板
２５イオン化電極
４５レーザ光
５２レンズ
５３窓[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and apparatus for measuring the ability of secondary electrons to be emitted from a substance by charged particles, and relates to the technical field of handling discharges and charged particles.
[0002]
[Prior art]
When charged particles enter the material, secondary electrons are emitted. Knowing this secondary electron emission capability is very important for devices that handle discharge phenomena, charged particle beams, and the like. In particular, for gas-filled devices such as discharge tubes, fluorescent lamps, and plasma displays, the presence or absence of secondary electrons emitted from constituent materials by charged particles is an important problem that greatly affects the characteristics. Therefore, knowing the secondary electron emission ability of the device constituent material has a beneficial effect because performance can be predicted at the device design stage.
[0003]
Conventionally, measurement of secondary electron emission ability by charged particles has been performed by a method similar to measurement of secondary electron emission ability by electrons. That is, the secondary electron emission ability is measured by irradiating the material to be measured with electrons generated by an electron gun, and comparing the amount of secondary electrons generated at that time with the amount of incident electrons. I was looking for. On the other hand, the measurement of secondary electron emission ability using charged particles is performed by generating ions using an ion gun instead of an electron gun at the time of measurement by electrons, and irradiating the object to be measured with the ions. We wanted secondary electron emission ability. For example, it is a measuring method of the structure described in Television Society Technical Report IPU95-71, 51 pages (1995).
[0004]
A conventional method for measuring the secondary electron emission ability using charged particles will be described with reference to FIG. In FIG. 4, 101 is a chamber, 102 is an ion gun, 103 is a cathode electrode, 104 is a collector electrode, 105 is an opening, 106 is an acceleration power source, 107 is a collector power source, 108 is a sample, and 109 to 111 are ammeters. .
[0005]
As shown in FIG. 4, the measurement system is formed in a chamber 101 so as to surround the ion gun 102, the cathode electrode 103, and the cathode electrode 103, and has an opening 105 so that charged particles can enter the sample 108. It has a collector electrode 104 for capturing secondary electrons. Further, an acceleration voltage is applied between the ion gun 102 and the cathode electrode 103 by the acceleration power source 106, and a collector voltage for electron capture is applied to the collector electrode 104 by the collector power source 107. 111 is configured to measure.
[0006]
The secondary electron emission ability is measured by emitting charged particles of the element to be obtained from the ion source 102, accelerating the electric field between the electrodes and irradiating the sample 108, and discharging the secondary electrons emitted from the sample 108 to the cathode. Captured by the collector electrode 104 having a higher potential than the electrode 103. Then, the secondary electron current Ie flows through the ammeter 110, the current Ik obtained by adding the charged particle current Ip and the secondary electron current Ie flows through the ammeter 109, and the charged particle current Ip flows through the ammeter 111. Using each current value obtained in this way, the secondary electron emission ability γ by the charged particles,
[0007]
[Expression 1]

[0008]
Was asking.
[0009]
[Problems to be solved by the invention]
However, in the conventional technique described above, when the secondary electron emission ability in a low vacuum environment is measured, the emitted secondary electrons are gas molecules existing between the cathode electrode 103 and the collector electrode 104 or incident charge. The amount of secondary electron emission current cannot be measured accurately due to the interaction with the particles. Therefore, in order to obtain the secondary electron emission ability by irradiating the charged particle beam, the inside of the chamber 101 needs to be evacuated and measured. Therefore, there is a problem that the secondary electron emission ability in a low vacuum environment similar to that of the gas-sealed device cannot be obtained.
[0010]
An object of the present invention is to provide a method and an apparatus capable of easily and accurately measuring a secondary electron emission ability value in a low vacuum environment similar to that of a gas-sealed device.
[0011]
[Means for Solving the Problems]
In order to solve this problem, the present invention applies a voltage to an anode electrode arranged oppositely and a plurality of divided cathode electrodes provided with a substance to be measured in a predetermined gas atmosphere. The secondary electron emission ability is measured by ionizing a gas in the space and measuring the amount of charge flowing through the plurality of divided cathode electrodes.
[0012]
Further, by disposing different substances to be measured on the plurality of cathode electrodes, one kind of the substances to be measured is made a known substance having a secondary electron emission ability and flows to the plurality of divided cathode electrodes. The secondary electron emission ability is measured by the amount of charge.
[0013]
According to the present invention, it is possible to provide a method and an apparatus for easily and accurately measuring the value of secondary electron emission ability in a low vacuum environment similar to that of a gas-sealed device.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
According to a first aspect of the present invention, in a predetermined gas atmosphere, a voltage is applied to an anode electrode arranged opposite to a cathode electrode divided into a plurality of substances to be measured and a space between the electrodes. The secondary electron emission ability is measured by the amount of charge flowing through the divided cathode electrodes, and the gas can be measured in the same gas-filled (low vacuum) environment as the actual device. The secondary electron emission ability value close to the device operation can be easily and accurately measured.
[0015]
The second invention of the present invention is a phenomenon in which ion current and secondary electron emission occur at the same time by disposing different substances to be measured on a plurality of cathode electrodes and measuring the amount of charge flowing through each electrode. As a current obtained at the same time, the secondary electron emission ability value can be measured accurately.
[0016]
According to a third invention of the present invention , one of a plurality of objects to be measured is a known substance having a secondary electron emission ability, so that the secondary electron emission ability of an unknown substance can be easily determined by both. The secondary electron emission ability value can be accurately measured.
[0017]
According to a fourth aspect of the present invention , if ionization of a gas is performed using an ionization electrode, the value of secondary electron emission ability is measured easily and accurately at low cost without using an expensive ion gun as in the prior art. It has the effect of being able to.
[0018]
According to the fifth aspect of the present invention, if ionization of gas is performed using laser light, ionization can be performed easily and accurately without disturbing the internal electric field (between the anode and the cathode). The value of can be measured.
[0019]
In the sixth aspect of the present invention, if the gas containing the ion species element to be measured is a predetermined atmosphere gas, the secondary electron emission ability in the same gas atmosphere as the actual device can be obtained easily. And it has the effect | action that the value of secondary electron emission ability can be measured correctly.
[0020]
According to a seventh aspect of the present invention, there is provided a field-limiting plate having an opening on each surface of the substance to be measured, and the known object and the unknown object can be easily measured by adjusting the area of the opening. And the value of the secondary electron emission ability can be measured easily and accurately.
[0021]
In an eighth aspect of the present invention, the predetermined atmosphere gas is He, Ne, Xe, Ar, Kr, or a mixed gas mainly composed of these gases, so that it can be used in the same environment as an actual device such as a PDP or a discharge tube. Since the secondary electron emission ability can be obtained, the secondary electron emission ability can be measured easily and accurately.
[0022]
According to a ninth aspect of the present invention , in a predetermined gas atmosphere, a voltage is applied to the anode electrode and the cathode electrode which are divided into a plurality of cathode electrodes which are arranged to face each other and an anode electrode which is arranged opposite to the substance to be measured. Secondary electrons by voltage application means, ionization means for ionizing gas in the space between both electrodes, charge amount measurement means for measuring the amount of charge flowing to each electrode, and the amount of charge flowing to the plurality of divided cathode electrodes Equipped with a secondary electron measuring unit that measures the emission ability, and can be measured in the same gas-filled (low vacuum) environment as the actual device, making it easy to obtain a secondary electron emission ability value close to true device operation In addition, it has the effect of being able to measure accurately.
[0023]
The tenth aspect of the present invention is a phenomenon in which ion current and secondary electron emission occur at the same time by disposing different substances to be measured on a plurality of cathode electrodes and measuring the amount of charge flowing through each electrode. As a current obtained at the same time, the secondary electron emission ability value can be measured accurately.
[0024]
In an eleventh aspect of the present invention , one of a plurality of objects to be measured is a known substance having a secondary electron emission ability, so that the secondary electron emission ability of an unknown substance can be easily determined by both. The secondary electron emission ability value can be accurately measured.
[0025]
In the twelfth aspect of the present invention, if ionization of gas is performed using an ionization electrode, the value of secondary electron emission ability can be measured easily and accurately at low cost without using an expensive ion gun as in the prior art. It has the effect of being able to.
[0026]
In the thirteenth aspect of the present invention, if ionization of gas is performed using laser light, ionization can be performed easily and accurately without disturbing the internal electric field (between the anode and the cathode). The value of can be measured.
[0027]
In the fourteenth aspect of the present invention, if the gas containing an ion species element to be measured is a predetermined atmosphere gas, the secondary electron emission ability in a gas atmosphere similar to that of an actual device can be easily obtained. And it has the effect | action that the value of secondary electron emission ability can be measured correctly.
[0028]
Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 3.
(Embodiment 1)
FIG. 1 is a configuration diagram showing a secondary electron emission capacity measuring apparatus using charged particles according to Embodiment 1 of the present invention. In FIG. 1, 1 is a chamber, 2 is an anode electrode, 3 is a cathode electrode A, 4 is a cathode electrode B, 5 is an ionization section, 6, 7 and 8 are charge amount measurement sections, 9 is a voltage application section, and 10 is a cover. Measured substances A and 11 are measured substances B, 12 is a secondary electron measuring unit, 13 is a terminal, and 14 is a field limiting plate.
[0029]
As shown in FIG. 1, the chamber 1 includes an anode electrode 2, a plurality of cathode electrodes A 3 and cathode electrodes B 4, and an ionization unit 5 that ionizes a gas sealed in a space between the anode and the cathode electrode, and The voltage application unit 9 that can apply a voltage between the anode electrode 2 and the cathode electrodes 3 and 4 and the charge amount measurement units 6 to 8 that measure the amount of charge flowing through each electrode are provided. Then, the object to be measured A10 and the object to be measured B11 are set on the cathode electrode A3 and the cathode electrode B4, respectively, the gas is ionized by the ionization unit 5, and the charged substances of the cation are irradiated onto the substances to be measured 10 and 11. Let Then, secondary electrons are emitted from each of the substances to be measured 10 and 11, the charge combined with the charged particles flows to the charge amount measuring units 6 and 7, and the total charge amount flows to the charge amount measuring unit 8. The secondary electron measuring unit 12 obtains the secondary electron emission ability γ from the charge amount from the charge amount measuring units 6, 7 and 8, and outputs it to the terminal 13.
[0030]
In the space between the anode electrode and the cathode electrode, the gas is discharged into plasma, the charge amount of charged particles flowing into the substance to be measured is Qi, and the charge amount flowing to the cathode electrode (charged particle amount + secondary electron amount) is Qk Then, the secondary electron emission ability γ is simply expressed as follows:
[0031]
[Expression 2]

[0032]
Can be written.
Here, the total charge amount flowing through the charge amount measuring units 6 and 7 is Qa and Qb, the charge amount of charged particles flowing into the measured substance A10 and the measured substance B11 is Qia and Qib, respectively, and the secondary electron emission ability is If γa and γb, respectively,
[0033]
[Equation 3]

[0034]
The relationship holds.
Further, when the electrodes are arranged so that the respective electrodes of the plurality of cathode electrodes A3 and B4 can be equivalently expected from the portion where the gas is ionized, for example, the total area of each of the plurality of cathode electrodes A3 and cathode electrodes B4 is made equal. The amount of charged particles flowing into the cathode electrode A3 and the cathode electrode B4, that is, the amount of charges Qia and Qib of charged particles flowing into the substance to be measured A10 and the substance to be measured B11 become equal. Therefore, the following relationship is established between γa and γb.
[0035]
[Expression 4]

[0036]
Here, for example, when the value of the secondary electron emission ability γa of the substance A10 to be measured is known, the value of the secondary electron emission ability γb of the substance B11 to be measured, which is a substance whose secondary electron emission value is unknown, By measuring the total charge amounts Qa and Qb flowing in the charge amount measuring units 6 and 7, the secondary electron measuring unit 12 can obtain the secondary electron emission ability γb using (Equation 4). The secondary electron emission ability γb obtained by the secondary electron measuring unit 12 is output via the terminal 13.
[0037]
In addition, although demonstrated using two cathode electrodes here as a some cathode electrode, it cannot be overemphasized that the number is not limited to two. In the present invention, different substances to be measured are arranged on a plurality of cathode electrodes, and the current flowing through each electrode is measured. As a phenomenon in which ion current and secondary electron emission occur at the same time And can be obtained as a current at the same time. Conventionally, the measurement of the ion current and the secondary electron current has been performed with a separate electrode by the cathode electrode and the collector electrode that collects the secondary electron current. It is possible to improve the secondary electron current which has a time difference and causes an error.
[0038]
Furthermore, a field limiting plate 14 having an opening on each measurement substance surface is provided so that charged particles are equivalently irradiated from the ionized portion of the gas to each measurement substance, and by adjusting the area of the opening, Of course, the charge amounts Qia and Qib of the charged particles flowing into the measurement substance A10 and the measurement substance B11 can be equal or calibrated, and more accurate secondary electron radioactivity can be obtained. The shape of the opening is not particularly limited, and may be circular or rectangular, and the material for the field limiting plate 14 is preferably a material that emits a small amount of secondary electrons.
[0039]
In addition, although the case where the total areas of the cathode electrode A and the cathode electrode B are equal is described, if the amount of charged particles incident on each cathode electrode and the total amount of charge flowing to the cathode electrode are calibrated according to the area ratio, the secondary area is similarly obtained. Of course, it is possible to obtain electron radioactivity.
[0040]
Furthermore, if three or more kinds of substances to be measured are simultaneously arranged on the cathode electrode, it is needless to say that the secondary electron radioactivity can be obtained simultaneously under the same conditions.
[0041]
As described above, according to the present invention, it is possible to provide a method and an apparatus capable of easily and accurately measuring a secondary electron emission ability value in a low vacuum environment similar to that of a gas-sealed device.
[0042]
Further, the present invention irradiates the substance to be measured with the charged particles to be obtained equivalently or at a known distribution ratio even in a high vacuum degree but not in a low vacuum environment, thereby similarly increasing the secondary electron radioactivity. Of course, it can be sought.
[0043]
(Embodiment 2)
FIG. 2 is a block diagram showing a secondary electron emission capacity measuring apparatus using charged particles according to Embodiment 2 of the present invention. As shown in FIG. 2, for example, He, Ne, Xe, Ar, Kr or a mixed gas mainly containing these is sealed in the chamber 21, and the anode electrode 22, the plurality of cathode electrodes A23, and the cathode electrode B24 In the meantime, a voltage of about 100 V to 3 KV is applied by the voltage application unit 29, and a high voltage pulse of several tens of KV is applied to the ionization electrode 25 in the space between the anode electrode 22 and the cathode electrodes 23 and 24. To ionize the enclosed gas. The ionized cation particles are irradiated to the measured object A30 having a known value on the cathode electrode A23 and the cathode electrode B24, for example, Si, Au, Pt, and the measured object B31, for example, MgO, SiO2, W, or Mo. Secondary electrons are emitted from each of the substances to be measured 30 and 31.
[0044]
Charge amounts Qa and Qb added to the amount of secondary electrons and the amount of charged particles emitted from the measured substances 30 and 31 flow to the charge amount measuring units 26 and 27, respectively. The flowing charge amount is measured by, for example, an ammeter, a storage oscilloscope, or a charge amount measuring unit 26 to 28 having a function of taking in a computer, and the secondary electron measuring unit 32 uses (Expression 4) to determine an unknown substance. The secondary electron emission ability γb can be obtained.
[0045]
(Embodiment 3)
FIG. 3 is a block diagram showing a secondary electron emission capacity measuring apparatus using charged particles according to an embodiment of the present invention. As shown in FIG. 3, for example, Ar, He, Ne, or Xe is enclosed in a chamber 41, and a voltage applying unit 49 is provided between the anode electrode 42, the plurality of cathode electrodes A 43, and the cathode electrode B 44, for example. A voltage of about 50 V to 5 KV is applied, and in the space between the anode electrode 42 and the cathode electrodes 43 and 44, for example, a CO 2 laser or excimer laser 45 is condensed by the lens 52 from the window 53 provided in the chamber 41, The enclosed gas is ionized. Then, the ionized cation particles become a measured substance A50 having a known value on the cathode electrode A43 and the cathode electrode B44, for example, C, Ni, Au, Pt and the like, and a measured object B51, for example, MgO, SiO2, Al2O3 or Mo. , And secondary electrons are emitted from each of the substances to be measured 50 and 51.
[0046]
Charge amounts Qa and Qb added to the amount of secondary electrons and the amount of charged particles emitted from the measured substances 50 and 51 flow to the charge amount measuring units 46 and 47, respectively. The flowing charge amount is measured by, for example, an ammeter, a storage oscilloscope, or a charge amount measuring unit 46 to 48 having a function of taking in a computer, and the secondary electron measuring unit 52 uses (Equation 4) to determine an unknown substance. The secondary electron emission ability γb can be obtained.
[0047]
【The invention's effect】
As described above, according to the present invention, a voltage is applied to the anode electrode arranged oppositely and the plurality of divided cathode electrodes provided with the substance to be measured, and the gas is ionized in the space between both electrodes. The secondary electron emission ability is measured by the amount of charge flowing through the divided cathode electrodes, and the secondary electron emission ability value in a low vacuum environment can be easily and accurately measured. The advantageous effect is obtained.
[0048]
At the same time, if the electrode configuration of the present invention is used, the charged substance to be obtained is irradiated equivalently or at a known distribution ratio to the substance to be measured not in a low vacuum environment but also in a conventional high vacuum degree. Thus, an advantageous effect that the secondary electron radioactivity can be easily obtained in the same manner can be obtained.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a secondary electron emission capacity measuring apparatus according to Embodiment 1 of the present invention. FIG. 2 is a block diagram showing a secondary electron emission capacity measuring apparatus according to Embodiment 2 of the present invention. FIG. 4 is a block diagram showing a secondary electron emission capacity measuring apparatus according to Embodiment 3 of the present invention. FIG. 4 is a block diagram showing a secondary electron emission capacity measuring method according to the prior art.
1, 2, 41 Chamber 2, 22, 42

Anode electrode

3, 23, 43 Cathode electrode A
4, 24, 44 Cathode electrode B
5

Ionization unit

6, 7, 8, 26, 27, 28, 46, 47, 48 Charge amount measurement unit 9, 29, 49

Voltage application unit

10, 30, 50 Measured substance A
11, 31, 51 Measured substance B
12, 32, 52 Secondary

electron measuring unit

13, 33, 53 Terminal 14 Field-of-view restriction plate 25 Ionization electrode 45 Laser beam 52 Lens 53 Window

Claims

In a predetermined gas atmosphere, a voltage is applied to the anode electrode arranged oppositely and the cathode electrode divided into a plurality of substances to be measured, and the gas is ionized in the space between the two electrodes. a plurality of the arranged differently measured substance on the cathode electrode, the amount of charge flowing through the respective electrodes, the secondary electron emission capability measuring how to measure the secondary electron emission capability was.

One secondary electron emission capability measurement method of claim 1 wherein Ru known substances der of the secondary electron emission capability of the plurality of the object to be measured.

Secondary electron emission capability measurement method of row intends claim 1 or 2, wherein the ionization of the gas by using an ionization electrode.

Secondary electron emission capability measurement method of row intends claim 1 or 2, wherein the ionization of the gas by using a laser beam.

Secondary electron emission capability measurement method according to any one of claims 1 to 4 gas shall be the predetermined atmospheric gas containing ionic species element to be measured.

Secondary electron emission capability measurement method according to claim 1 or 2, wherein Ru is provided a view restrictor plate having an opening in the substance to be measured surface.

A predetermined atmospheric gas He, Ne, Xe, Ar, Kn or secondary electron emission capability measurement method according to any one of claims 1 to 5 shall be the mixed gas mainly these gases.

During a predetermined gas atmosphere, and the oppositely disposed anode electrode, a cathode electrode divided into a plurality of arranged substance to be measured of the double type is known at least one secondary electron emission capability, the anode voltage applying means for applying a voltage to the electrode and the cathode electrode, an ionization means for ionizing the gas in the space between the electrodes, a charge quantity measuring means for measuring the amount of charge flowing through the respective electrodes, a plurality of the cathode electrode A secondary electron emission capacity measuring device comprising: a secondary electron measuring section that measures the secondary electron emission capacity using the amount of charge flowing in the first electrode and the known secondary electron emission capacity.

Secondary electron emission capability measurement device row intends claim 8, wherein the ionization of the gas by using an ionization electrode.

Secondary electron emission capability measurement device row intends claim 8 or 9, wherein the ionization of the gas by using a laser beam.

Secondary electron emission capability measurement device according to any one of claims 8 to 10 you gas containing ionic species element to be measured with a predetermined atmospheric gas.