JP3783165B2 - Blade case - Google Patents

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Publication number
JP3783165B2
JP3783165B2 JP15223295A JP15223295A JP3783165B2 JP 3783165 B2 JP3783165 B2 JP 3783165B2 JP 15223295 A JP15223295 A JP 15223295A JP 15223295 A JP15223295 A JP 15223295A JP 3783165 B2 JP3783165 B2 JP 3783165B2
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Japan
Prior art keywords
blade
semi
blade case
elliptical
lid
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP15223295A
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Japanese (ja)
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JPH08323545A (en
Inventor
圭三 関家
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Disco Corp
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Disco Corp
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Priority to JP15223295A priority Critical patent/JP3783165B2/en
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  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
  • Buffer Packaging (AREA)

Description

【0001】
【産業上の利用分野】
本発明は、ハブブレード等の極薄ブレードを収容するためのブレードケースに関する。
【0002】
【従来の技術】
図6に示すように、半導体ウェーハをダイシングするダイサー等の精密切削装置においては、上下動するカセット載置領域Aに載置されたカセットC内からウェーハW(粘着テープNを介してフレームFに固定)が搬出入手段Bにて待機領域Dに搬出されると共に、旋回アームを有する搬送手段EにてチャックテーブルTに搬送され、このウェーハWを保持したチャックテーブルTをアライメント手段Gに位置付けてアライメントした後、図8のようにハブブレードJ等を備えた切削手段HにてウェーハWをダイシングするようになっている。
前記切削手段Hは、図7に示すようにスピンドルIの先端部にハブブレードJ等が取付用ナットKを介して着脱自在に装着され、その外周部に設けられた厚さ数μm〜数十μmの極薄の刃先部Jbにて切削する。
【0003】
【発明が解決しようとする課題】
前記ハブブレードJ等は、搬送の際又は保管の際に極薄の刃先部Jbが欠損しないように通常ハードケースに収容されるが、従来のハードケースの形状、構成には次のような欠点乃至問題点がある。
▲1▼ ハブブレード等に対応して円形を呈しているので転がり易く、安定性の面で多少問題がある。
▲2▼ 収容部と蓋部とが別体になっているため、使用時に取り扱いが不便であると共に分離した蓋部を紛失する恐れがある。
▲3▼ ハブブレード等をケースに収容したり、取り出したりする自動開閉機の構成が多少複雑になる。
本発明は、このような従来の欠点乃至問題点を解消するためになされ、転がり難くて安定性に優れ、収容部と蓋部とが一体に形成されていて使用時に取り扱い易いと共に蓋部を紛失することがなく、且つ自動開閉機の構成が簡単になるようにした、ブレードケースを提供することを課題とする。
【0004】
【課題を解決するための手段】
前記課題を技術的に解決するための手段として、本発明は、ハブブレード等の極薄ブレードの刃先部を保護するためのブレードケースにおいて、
収容部と蓋部とがヒンジを介して一体に形成され、少なくともヒンジを含む側部が直線になっていると共に、
前記収容部には、内側底部に前記ブレードの中央孔が遊嵌する円形凸部が形成され、この円形凸部の周囲には底部裏側に開口する半楕円型凹部が形成され、
前記蓋部の表側には、前記半楕円型凹部に遊嵌する半楕円型凸部が形成されていて、ブレードケースを積み重ねた際に脱落しないように構成され、しかも半楕円型凸部の直線部と半楕円型凹部の直線部とが相俟ってブレードケースの回転規制部となるように構成されているブレードケースを要旨とする。
又、収容部の内側底部にはブレードの刃部が底部に接触しないように受止用凸部が形成されていること、更にブレードケースが合成樹脂で形成されていること、を要旨とするものである。
【0005】
【作 用】
収容部と蓋部とがヒンジを介して一体に形成され、少なくともヒンジを含む側部が直線になっているため、転がり難くて安定性に優れ、使用時に取り扱い易いと共に蓋部を紛失することがなく、且つ自動開閉機の構成も簡単になる。
【0006】
【実施例】
以下、本発明の実施例を添付図面に基づいて詳説する。
図1において、1は合成樹脂で一体成型されたブレードケース本体であり、収容部2と、この収容部2にヒンジ4を介して開閉自在に形成された蓋部3とから構成されている。
【0007】
前記収容部2は、内側底部のほぼ中央にハブブレード遊嵌用の凸部2aが形成され、その凸部2aの周囲には図2に示すように底部裏側に開口する凹部2bが形成され、この凹部2bによって底部内側に膨出した段部2cは半楕円型を呈しており、つまり凹部2bの外形は段部2cより肉厚分だけ小さい半楕円型であって、直線部は後記のようにブレードケース本体1を積み重ねた際に回転規制部Pとなる。
【0008】
又、前記収容部2の内側底部には、前記凸部2aと同心で段部2cの外形よりやや大きい(但し、段部2cの直線の両端部は外側にはみ出している)円環状の受止用凸部2dが突出形成され、図2に示すようにその受止用凸部2dの高さは段部2cよりやや高くしてある。尚、前記ハブブレード遊嵌用の凸部2aの高さも収容部2の周壁2eより高く形成してある。
【0009】
更に、収容部2は前記段部2cを相似形に拡大したような半楕円型に形成され、円弧部側の中央は周壁2eを内側に凹ませると共にその凹陥部2fの上縁には係止用の小突起2gが形成され、これと反対側の側部2hは前記ヒンジ4を含む直線に形成されている。
【0010】
一方、前記蓋部3の表側には前記凹部2bに遊嵌する凸部3aが半楕円型に形成されていて、後記のようにブレードケース本体1を積み重ねた際に脱落しないように、しかも直線部は前記凹部2bの直線部と相俟って回転規制部Qとなるようにしてある。
【0011】
蓋部3の裏側には、前記凸部3aの形成によって生じた凹部3bを有し、即ち凹部3bの外形は凸部3aより肉厚分だけ小さい半楕円型となっている。又、蓋部3は凹部3bを相似形に拡大したような半楕円型に形成され、円弧部側の中央には前記収容部2の小突起2gに係脱する係止部3cが形成されている。
【0012】
本発明に係るブレードケースは上記のように構成され、これを使用するには図3に示すようにハブブレードJの中央孔Jaを収容部2の凸部2aに嵌めるようにして落とし込むと、図4に示すようにハブブレードJは円環状の受止用凸部2dにより受止され、極薄の刃先部Jbが収容部2の底面に接触せずに保護される。
【0013】
この時、凸部2aの上端部はハブブレードJの中央孔Jaよりやや突出した状態になり、図4に二点鎖線線で示すように前記ヒンジ4により蓋部3を回動させて収容部2に被せ、係止部3cを押し下げると弾性作用により小突起2gに係止し蓋部3を閉止することが出来る。前記凸部2aの上端部は、図5のように蓋部3の凹部3b内に収容される。
【0014】
このようにして、1つのブレードケース本体1内に1つのハブブレードJを収容することが出来、この状態にて搬送又は保管することが出来る。前記のようにヒンジ4を含む側部は直線に形成されているため、ブレードケース本体1が転がることはなく、極めて安定性に優れている。
【0015】
図5は複数個のブレードケース本体1を積み重ねた状態を示すもので、即ち上に載せるブレードケース本体1の収容部2の底部裏側の凹部2bを、下のブレードケース本体1の蓋部3の表側凸部3aに嵌合することにより順次上に積み重ねることが出来る。
この際、凹部2bと凸部3aとが嵌合しているため、積み重ねた際に脱落や位置ずれが生じる事無く、しかも凹部2bと凸部3aの回転規制部P、Qによって各ブレードケース本体1の軸回転が防止され、整列状態を保持することが出来る。従って、多数のブレードケース本体1の搬送や保管等に好都合である。
【0016】
ブレードケース本体1からハブブレードJを取り出すには、蓋部3の係止部3cを収容部2の小突起2gから外してヒンジ4を介して蓋部3を開き、ハブブレードJのハブ部に指を掛けて持ち上げ、収容部2の凸部2aから抜き取るようにすれば良い。
【0017】
前記のように蓋部3はヒンジ4を介して収容部2と一体に形成されているため、蓋部3を開いても従来のように収容部2から分離することはなく、蓋部3の紛失を未然に防止することが出来る。
又、使用時に蓋部3の取り扱いがし易くて便利であると共に、蓋部3の自動開閉機(図示せず)を導入した場合には蓋部がヒンジ結合されているため開閉操作機構が簡略となり、自動開閉機の構成を単純化することが可能である。
尚、本発明に係るブレードケースは、ハブブレードの収容に限るものではなくワッシャタイプのブレードを収容しても良い。
【0018】
【発明の効果】
以上説明したように、本発明によれば、ブレードケースにおいて収容部と蓋部とがヒンジを介して一体に形成され、少なくともヒンジを含む側部が直線になっているため、転がり難くて安定性に優れ、使用時に取り扱い易いと共に蓋部を紛失することがなく、且つ自動開閉機の構成も簡単になる。更に、収容部の底部裏側に開口する半楕円型凹部と、それに嵌合する蓋部表側の半楕円型凸部とを設けた構成により、ブレードケースを積み重ねた際に脱落を防ぐことができ、しかも半楕円型凸部の直線部と半楕円型凹部の直線部とが相俟って回転規制部として働くので、ブレードケースの軸回転が防止され、積み重ねの整列状態を保持することができる。
【図面の簡単な説明】
【図1】 本発明の一実施例を示すブレードケース本体の斜視図である。
【図2】 ブレードケース本体の中央縦断面図である。
【図3】 ハブブレードを収容する時の斜視図である。
【図4】 同、ハブブレードの収容状態を示す断面図である。
【図5】 ブレードケース本体を積み重ねた状態を示す一部破断面図である。
【図6】 ダイサーの一例を示す斜視図である。
【図7】 同、切削手段の要部分解斜視図である。
【図8】 切削手段でウェーハを切削する時の説明図である。
【符号の説明】
1…ブレードケース本体
2…収容部
2a…凸部 2b…凹部 2c…段部 2d…受止用凸部
2e…周壁 2f…凹陥部 2g…小突起 2h…側部
3…蓋部
3a…凸部 3b…凹部 3c…係止部
J…ハブブレード
Ja…中央孔 Jb…刃先部
P、Q…回転規制部
[0001]
[Industrial application fields]
The present invention relates to a blade case for accommodating an ultrathin blade such as a hub blade.
[0002]
[Prior art]
As shown in FIG. 6, in a precision cutting apparatus such as a dicer for dicing a semiconductor wafer, the wafer W (from the cassette C mounted on the vertically moving cassette mounting area A to the frame F via the adhesive tape N). Fixed) is carried out to the standby area D by the carrying-in / out means B, and is carried to the chuck table T by the carrying means E having a turning arm, and the chuck table T holding the wafer W is positioned on the alignment means G. After alignment, the wafer W is diced by cutting means H provided with a hub blade J and the like as shown in FIG.
As shown in FIG. 7, the cutting means H has a hub blade J or the like detachably attached to a tip end portion of a spindle I via a mounting nut K, and has a thickness of several μm to several tens of meters provided on the outer peripheral portion thereof. Cutting is performed with a very thin blade edge Jb of μm.
[0003]
[Problems to be solved by the invention]
The hub blade J and the like are normally accommodated in a hard case so that the extremely thin blade edge portion Jb is not lost during transportation or storage. However, the shape and configuration of the conventional hard case are as follows. There is a problem.
(1) Since it has a circular shape corresponding to a hub blade or the like, it is easy to roll and there are some problems in terms of stability.
{Circle around (2)} Since the housing part and the lid part are separate, handling is inconvenient during use and the separated lid part may be lost.
(3) The configuration of an automatic opening / closing device that accommodates or removes a hub blade or the like in a case is somewhat complicated.
The present invention is made in order to eliminate the conventional drawbacks and problems, and is difficult to roll and excellent in stability, and the housing portion and the lid portion are integrally formed so that it is easy to handle during use and the lid portion is lost. It is an object of the present invention to provide a blade case that does not need to be performed and that can simplify the configuration of an automatic switch.
[0004]
[Means for Solving the Problems]
As a means for technically solving the above problems, the present invention provides a blade case for protecting a cutting edge portion of an ultrathin blade such as a hub blade.
The housing part and the lid part are integrally formed via a hinge, and at least the side part including the hinge is straight,
In the housing portion, a circular convex portion in which the central hole of the blade is loosely fitted is formed on the inner bottom portion, and a semi-elliptical concave portion that opens on the back side of the bottom portion is formed around the circular convex portion,
On the front side of the lid portion, a semi-elliptical convex portion that is loosely fitted in the semi-elliptical concave portion is formed, and is configured not to fall off when the blade cases are stacked, and the straight line of the semi-elliptical convex portion The gist of the blade case is that the portion and the straight portion of the semi-elliptical concave portion are combined to form a rotation restricting portion of the blade case.
The gist of the invention is that a receiving convex portion is formed on the inner bottom portion of the housing portion so that the blade portion of the blade does not contact the bottom portion, and that the blade case is made of synthetic resin. It is.
[0005]
[Operation]
Since the housing part and the lid part are integrally formed via a hinge, and at least the side part including the hinge is straight, it is difficult to roll, has excellent stability, and is easy to handle during use and the lid part can be lost. In addition, the structure of the automatic switch is simplified.
[0006]
【Example】
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
In FIG. 1, reference numeral 1 denotes a blade case main body integrally formed of synthetic resin, and includes a housing portion 2 and a lid portion 3 that is formed in the housing portion 2 through a hinge 4 so as to be opened and closed.
[0007]
The accommodating portion 2 is formed with a convex portion 2a for loosely fitting a hub blade at the center of the inner bottom portion, and a concave portion 2b that opens to the back side of the bottom portion as shown in FIG. 2 is formed around the convex portion 2a. The step 2c bulged inside the bottom by the recess 2b has a semi-elliptical shape, that is, the outer shape of the recess 2b is a semi-elliptical shape smaller than the step 2c by the thickness, and the straight portion is as described below. When the blade case body 1 is stacked, the rotation restricting portion P is formed.
[0008]
Further, an annular bottom receiving portion is concentric with the convex portion 2a and slightly larger than the outer shape of the stepped portion 2c (however, both straight ends of the stepped portion 2c protrude outward) at the inner bottom portion of the accommodating portion 2. The convex part 2d for protrusion protrudes, and as shown in FIG. 2, the height of the convex part 2d for receiving is made a little higher than the step part 2c. Note that the height of the convex portion 2a for loosely fitting the hub blade is also made higher than the peripheral wall 2e of the accommodating portion 2.
[0009]
Further, the accommodating portion 2 is formed in a semi-elliptical shape in which the stepped portion 2c is enlarged in a similar shape, and the center on the arc portion side is recessed with the peripheral wall 2e inward and is locked to the upper edge of the recessed portion 2f. A small protrusion 2g is formed, and a side 2h opposite to the small protrusion 2g is formed in a straight line including the hinge 4.
[0010]
On the other hand, a convex portion 3a loosely fitted in the concave portion 2b is formed on the front side of the lid portion 3 in a semi-elliptical shape so that it does not fall off when the blade case body 1 is stacked as described later, The portion is configured to be a rotation restricting portion Q in combination with the straight portion of the concave portion 2b.
[0011]
On the back side of the lid portion 3, there is a concave portion 3 b generated by the formation of the convex portion 3 a, that is, the outer shape of the concave portion 3 b is a semi-elliptical shape smaller than the convex portion 3 a by a thickness. Further, the lid portion 3 is formed in a semi-elliptical shape in which the concave portion 3b is enlarged in a similar shape, and a locking portion 3c is formed at the center of the arc portion to engage and disengage with the small protrusion 2g of the housing portion 2. Yes.
[0012]
The blade case according to the present invention is configured as described above, and in order to use it, the center hole Ja of the hub blade J is dropped as shown in FIG. As shown in FIG. 4, the hub blade J is received by the annular receiving convex portion 2 d, and the extremely thin blade edge portion Jb is protected without contacting the bottom surface of the housing portion 2.
[0013]
At this time, the upper end portion of the convex portion 2a slightly protrudes from the central hole Ja of the hub blade J, and the lid portion 3 is rotated by the hinge 4 as shown by a two-dot chain line in FIG. 2 and the locking portion 3c is pushed down, the locking portion 3c can be locked by the elastic action and the lid portion 3 can be closed. The upper end portion of the convex portion 2a is accommodated in the concave portion 3b of the lid portion 3 as shown in FIG.
[0014]
In this way, one hub blade J can be accommodated in one blade case body 1 and can be transported or stored in this state. As described above, since the side portion including the hinge 4 is formed in a straight line, the blade case body 1 does not roll and is extremely excellent in stability.
[0015]
FIG. 5 shows a state in which a plurality of blade case bodies 1 are stacked, that is, the concave portion 2b on the back side of the bottom portion of the accommodating portion 2 of the blade case body 1 to be placed on the upper portion of the lid portion 3 of the lower blade case body 1. By fitting to the front-side convex portion 3a, it can be stacked up sequentially.
At this time, since the concave portion 2b and the convex portion 3a are fitted, there is no dropout or positional deviation when stacked, and each blade case body is controlled by the rotation restricting portions P and Q of the concave portion 2b and the convex portion 3a. 1 is prevented from rotating, and the alignment state can be maintained. Therefore, it is convenient for transportation and storage of a large number of blade case bodies 1.
[0016]
In order to take out the hub blade J from the blade case body 1, the locking portion 3 c of the lid portion 3 is removed from the small protrusion 2 g of the housing portion 2, the lid portion 3 is opened via the hinge 4, and the hub portion of the hub blade J is formed. What is necessary is just to lift it up with a finger | toe and to extract from the convex part 2a of the accommodating part 2. FIG.
[0017]
As described above, the lid portion 3 is formed integrally with the housing portion 2 via the hinge 4, so that even if the lid portion 3 is opened, it is not separated from the housing portion 2 as in the prior art. Loss can be prevented in advance.
In addition, the lid portion 3 is easy to handle and convenient during use, and when an automatic opening / closing device (not shown) for the lid portion 3 is introduced, the lid portion is hinged to simplify the opening / closing operation mechanism. Thus, the configuration of the automatic switch can be simplified.
The blade case according to the present invention is not limited to housing the hub blade, and may accommodate a washer type blade.
[0018]
【The invention's effect】
As described above, according to the present invention, in the blade case, the housing portion and the lid portion are integrally formed via the hinge, and at least the side portion including the hinge is a straight line. It is excellent in handling, is easy to handle at the time of use, does not lose the lid portion, and the structure of the automatic opening / closing device becomes simple. Furthermore, due to the configuration provided with a semi-elliptical recess opening on the back side of the bottom of the housing part and a semi-elliptical convex part on the front side of the lid part fitted thereto, it is possible to prevent dropping when the blade cases are stacked, In addition, since the straight portion of the semi-elliptical convex portion and the straight portion of the semi-elliptical concave portion work together as a rotation restricting portion, the shaft rotation of the blade case is prevented and the stacked alignment state can be maintained.
[Brief description of the drawings]
FIG. 1 is a perspective view of a blade case body showing an embodiment of the present invention.
FIG. 2 is a central longitudinal sectional view of a blade case main body.
FIG. 3 is a perspective view when the hub blade is accommodated.
FIG. 4 is a sectional view showing a housing state of the hub blade.
FIG. 5 is a partially broken sectional view showing a state in which blade case bodies are stacked.
FIG. 6 is a perspective view showing an example of a dicer.
FIG. 7 is an exploded perspective view of the main part of the cutting means.
FIG. 8 is an explanatory diagram when a wafer is cut by a cutting means.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Blade case main body 2 ... Accommodating part 2a ... Convex part 2b ... Concave part 2c ... Step part 2d ... Receiving convex part 2e ... Peripheral wall 2f ... Concave part 2g ... Small protrusion 2h ... Side part 3 ... Cover part 3a ... Convex part 3b ... Recess 3c ... Locking part J ... Hub blade Ja ... Central hole Jb ... Cutting edge part P, Q ... Rotation restricting part

Claims (3)

ハブブレード等の極薄ブレードの刃先部を保護するためのブレードケースにおいて、
収容部と蓋部とがヒンジを介して一体に形成され、少なくともヒンジを含む側部が直線になっていると共に、
前記収容部には、内側底部に前記ブレードの中央孔が遊嵌する円形凸部が形成され、この円形凸部の周囲には底部裏側に開口する半楕円型凹部が形成され、
前記蓋部の表側には、前記半楕円型凹部に遊嵌する半楕円型凸部が形成されていて、ブレードケースを積み重ねた際に脱落しないように構成され、しかも半楕円型凸部の直線部と半楕円型凹部の直線部とが相俟ってブレードケースの回転規制部となるように構成されているブレードケース。
In the blade case to protect the cutting edge of ultra-thin blades such as hub blades,
A housing portion and the lid portion are integrally formed through a hinge, with side comprising the hinge is in a straight line even without low,
In the housing portion, a circular convex portion in which the central hole of the blade is loosely fitted is formed on the inner bottom portion, and a semi-elliptical concave portion that opens on the back side of the bottom portion is formed around the circular convex portion,
On the front side of the lid portion, a semi-elliptical convex portion that is loosely fitted in the semi-elliptical concave portion is formed, and is configured not to fall off when the blade cases are stacked, and the straight line of the semi-elliptical convex portion The blade case is configured such that the portion and the straight portion of the semi-elliptical concave portion together serve as a rotation restricting portion of the blade case.
収容部の内側底部にはブレードの刃部が底部に接触しないように受止用凸部が形成されている、請求項1記載のブレードケース。The blade case according to claim 1 , wherein a receiving convex portion is formed on an inner bottom portion of the housing portion so that a blade portion of the blade does not contact the bottom portion . 合成樹脂で形成されている、請求項1又は請求項2記載のブレードケース。 The blade case according to claim 1 or 2, wherein the blade case is made of a synthetic resin .
JP15223295A 1995-05-26 1995-05-26 Blade case Expired - Lifetime JP3783165B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15223295A JP3783165B2 (en) 1995-05-26 1995-05-26 Blade case

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15223295A JP3783165B2 (en) 1995-05-26 1995-05-26 Blade case

Publications (2)

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JPH08323545A JPH08323545A (en) 1996-12-10
JP3783165B2 true JP3783165B2 (en) 2006-06-07

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4564638B2 (en) * 2000-09-14 2010-10-20 株式会社ディスコ Blade case
JP4989304B2 (en) * 2007-05-11 2012-08-01 株式会社ディスコ Blade case
JP5101979B2 (en) * 2007-10-15 2012-12-19 株式会社ディスコ Blade case
JP6896329B2 (en) * 2017-03-22 2021-06-30 株式会社ディスコ Blade case
JP6896330B2 (en) * 2017-03-24 2021-06-30 株式会社ディスコ Blade case
JP6998159B2 (en) * 2017-09-07 2022-01-18 株式会社ディスコ Cutting blade feeder

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