JP3759948B2 - Mask pattern design method - Google Patents

Description

  The present invention relates to a mask pattern design method for creating a photomask for pattern exposure used for manufacturing a semiconductor device or a liquid crystal display device.

  In recent years, as a result of the progress in miniaturization of large-scale integrated circuit devices (hereinafter referred to as LSIs) realized by using semiconductors, mask patterns and processing patterns (for example, in a lithography process which is one of LSI manufacturing processes) A shape error or a dimensional error between a resist pattern and a resist pattern formed by pattern transfer on a resist film cannot be ignored.

  Further, as a result of miniaturization of pattern dimensions in LSIs to the resolution limit defined by the wavelength of exposure light or the numerical aperture of the projection optical system of the exposure machine, etc., the manufacturing margin related to the yield in LSI manufacturing For example, the depth of focus and the like have been significantly reduced.

  When a pattern having a desired shape is formed as a resist pattern on a wafer by a conventional pattern formation method, a light-shielding pattern, that is, a mask pattern having a desired shape is formed on a transparent substrate using a light-shielding film made of a metal such as chromium. After the formation, the wafer coated with a resist film is exposed using the transparent substrate on which the mask pattern is formed as a mask. By this exposure step, a light intensity distribution having a shape similar to a mask pattern made of a light shielding film is projected onto the resist film. Further, the light intensity distribution causes accumulated energy in the resist film, and a reaction occurs in a portion where the accumulated energy in the resist film exceeds a predetermined level. Here, the light intensity corresponding to the stored energy having a magnitude that causes the reaction of the resist film is called the critical intensity.

  For example, when a positive resist is used as the resist film, the resist film is developed to remove a portion of the resist film where the light intensity is higher than the critical intensity. That is, a resist pattern having a desired shape can be formed by matching the distribution shape or size of the critical intensity value in the light intensity distribution generated in the material to be exposed by pattern exposure to the desired pattern shape.

  53 (a) to 53 (d) are cross-sectional views showing respective steps of a conventional pattern forming method.

  First, as shown in FIG. 53A, a processing film 801 made of a metal film, an insulating film or the like is formed on a substrate 800, and then, as shown in FIG. Then, a positive resist film 802 is formed. Thereafter, as shown in FIG. 53C, exposure light 820 is applied to the resist film 802 through a photomask 810 in which a mask pattern 812 having a predetermined shape made of a chromium film or the like is formed on a transparent substrate 811. Irradiate. As a result, a portion corresponding to the mask pattern 812 in the resist film 802 (a portion where only light intensity less than the critical intensity occurs) becomes a non-exposed portion 802a, and another portion in the resist film 802 (a portion where light intensity greater than the critical intensity occurs). ) Is the exposure portion 802b. Thereafter, as shown in FIG. 53 (d), the resist film 802 is developed to form a resist pattern 803 including non-exposed portions 802a.

  In the pattern forming method as described above, a reduction projection exposure machine is generally used. The reduction projection exposure apparatus uses, for example, a photosensitive substrate formed on a wafer serving as a substrate, using a transparent substrate on which a mask pattern in which the size of a resist pattern to be formed is enlarged several times, that is, a photomask, is used. Pattern formation is performed by performing reduced projection exposure on the resist film. Hereinafter, in the description of this specification, each symbol is defined as follows.

NA: Numerical aperture of projection optical system of exposure machine (for example, 0.6)
λ: wavelength of exposure light (light source) (for example, 0.193 μm)
M: magnification of exposure machine (reciprocal of reduction ratio, for example, 4 or 5)
L: Pattern dimension (design value) on the wafer (material to be exposed)
For example, when the desired pattern dimension (design value) on the wafer is 0.1 μm, L = 0.1 μm. At this time, the mask pattern dimension on the photomask used in the exposure machine having the magnification M = 4 is 0. 1 × 4 = 0.4 μm. In order to simplify the following explanation, even when the mask pattern dimension on the photomask is expressed, unless otherwise specified, the design value on the wafer, that is, the conversion value on the wafer (the reduction ratio is applied). The latter value is used.

  As is well known, when light is shielded by a pattern having a dimension less than half of its wavelength, the contrast of the shielded image is reduced by the light diffraction phenomenon. This is because when the wavelength of exposure light is λ, the magnification is M, and the numerical aperture is NA in the reduction projection optical system, the mask pattern becomes smaller than half of the value defined by M × λ / NA. This means that the contrast of the image transferred, that is, the light-shielded image is lowered.

  FIG. 54A shows an example of the layout of the mask pattern 812 on the photomask 810 used in the exposure step shown in FIG. As shown in FIG. 54A, the mask pattern 812 has a size (actual size) of 0.26 × M [μm] (M: magnification of an exposure machine used in the exposure process).

  FIG. 54B shows a simulation result of the light intensity distribution projected onto the resist film 802 by the photomask 810 shown in FIG. The simulation conditions are that the wavelength λ of the exposure light 820 is 193 nm and the numerical aperture NA of the projection optical system of the exposure machine is 0.6. At this time, 0.26 × M [μm] ≈0.8 × M × λ / NA. In FIG. 54B, the light intensity distribution is shown using contour lines of relative light intensity (light intensity when the light intensity of exposure light is 1) in a two-dimensional relative coordinate system. As shown in FIG. 54B, the light intensity distribution transferred to the resist film 802 is almost equal to 0 at a position corresponding to the vicinity of the center of the mask pattern 812. That is, the light shielding property of the mask pattern 812 is very good.

  54C shows a simulation result of the light intensity distribution along the line AA ′ in FIG. 54B, and FIG. 54D shows a resist pattern from the simulation result of the light intensity distribution shown in FIG. 54B. The result of predicting the shape of the pattern 803 is shown. Assuming that the critical intensity is 0.3 as shown in FIG. 54 (c), the distribution shape of the critical intensity value in the light intensity distribution shown in FIG. 54 (b) almost coincides with the shape of the mask pattern 812. As shown in 54 (d), a resist pattern 803 (shaded portion) having a substantially desired shape (shape indicated by a broken line) can be formed.

  FIG. 55A shows another example of the layout of the mask pattern 812 on the photomask 810 used in the exposure step shown in FIG. As shown in FIG. 55A, the mask pattern 812 has a size (actual size) of 0.13 × M [μm] (M: magnification of an exposure machine used in the exposure process).

  FIG. 55B shows a simulation result of the light intensity distribution projected onto the resist film 802 by the photomask 810 shown in FIG. As in the case of FIG. 54B, the simulation conditions are the wavelength λ of the exposure light 820 = 193 nm and the numerical aperture NA = 0.6 of the projection optical system of the exposure machine. At this time, 0.13 × M [μm] ≈0.4 × M × λ / NA. In FIG. 55 (b), the light intensity distribution is shown by using the contour lines of the relative light intensity in the two-dimensional relative coordinate system. As shown in FIG. 55B, the light intensity distribution transferred to the resist film 802 reaches about half the critical intensity value (0.3) even at a position corresponding to the vicinity of the center of the mask pattern 812. That is, the light shielding property of the mask pattern 812 is lowered due to the influence of the diffraction phenomenon of the exposure light 820.

  FIG. 55C shows a simulation result of the light intensity distribution along the line AA ′ in FIG. 55B, and FIG. 55D shows the resist from the simulation result of the light intensity distribution shown in FIG. The result of predicting the shape of the pattern 803 is shown. If the critical intensity is 0.3 as shown in FIG. 55 (c), the distribution shape of the critical intensity value in the light intensity distribution shown in FIG. 55 (b) is not similar to the shape of the mask pattern 812. As shown in (d), the shape of the resist pattern 803 (shaded portion) is distorted from a desired shape (shape shown by a broken line).

  That is, in the conventional pattern forming method shown in FIGS. 53A to 53D, even if the mask pattern is formed using, for example, a complete light shielding film, the desired pattern having a dimension less than half of λ / NA depending on the mask pattern. It is difficult to form the pattern. Therefore, there is a limit to the size of the resist pattern that can be formed on the wafer.

  Therefore, in order to enhance the contrast of the light intensity distribution caused by the mask pattern and form a desired pattern having a dimension less than half of λ / NA, a pattern made of a light shielding film as a mask pattern on a transparent substrate A method for forming a phase shifter that generates a phase difference of 180 degrees with respect to exposure light with a light transmitting portion (portion where a mask pattern is not formed) in a transparent substrate is also described. Y. Proposed by Liu et al. (Non-Patent Document 1). In this method, when the light-transmitting part and the phase shifter are arranged with a pattern (hereinafter sometimes referred to as a light-shielding pattern) made of a light-shielding film having a dimension of half or less of λ / NA interposed therebetween, The light transmitted through each of the phase shifters and diffracted to the back side of the light shielding pattern cancels each other, so that the light shielding property of the light shielding pattern can be improved.

  Hereinafter, H.C. Y. A method by Liu et al. Will be described with reference to the drawings.

  FIG. 56A shows an example of the layout of a desired pattern (resist pattern) to be formed. As shown in FIG. 56 (a), the pattern 830 has a partial pattern 830a having a dimension equal to or less than half of λ / NA.

  56 (b) and 56 (c) are plan views of two conventional photomasks used for forming the pattern shown in FIG. 56 (a). As shown in FIG. 56B, a light shielding film 842 is formed on a transparent substrate 841 constituting the first photomask 840, and the light shielding film 842 has a first light transmitting portion. An opening 843 and a second opening 844 serving as a phase shifter are provided with a light shielding pattern 842a for forming the partial pattern 830a interposed therebetween. Further, as shown in FIG. 56C, a pattern 830 (FIG. 56 (FIG. 56 ()) is formed on the transparent substrate 851 constituting the second photomask 850 by combination with the light shielding pattern 842a of the first photomask 840. A light shielding pattern 852 for forming a) is formed.

  A pattern forming method using the two photomasks shown in FIGS. 56B and 56C is as follows.

First, using a first photomask shown in FIG. 56B, exposure is performed on a substrate coated with a resist film made of a positive resist. Thereafter, the latent image formed by exposure using the first photomask and the latent image formed by exposure using the second photomask shown in FIG. 56C are shown in FIG. Alignment is performed so that a pattern is formed. Thereafter, exposure is performed using the second photomask shown in FIG. 56C, and then the resist film is developed to form a resist pattern. As a result, an extra pattern (a pattern other than the pattern shown in FIG. 56A) that is formed when development is performed after exposure using only the first photomask is used for the second photomask. It can be removed by the exposure used. As a result, a pattern having a dimension less than half of λ / NA that cannot be formed by exposure using only the second photomask can be formed.
H. Y. Liu et al., Proc. SPIE, Vol. 3334, P.I. 2 (1998)

  H. Y. In the method by Liu et al., The contrast of the light-shielded image generated by the light-shielding pattern is improved by sandwiching the light-shielding pattern between the light transmitting portion and the phase shifter. However, in order for this effect to occur, the translucent part and the phase shifter must be adjacent to each other at an interval of half or less of λ / NA. On the other hand, even when the translucent part and the phase shifter are continuously arranged on the photomask without interposing the light-shielding pattern, the light intensity corresponding to the boundary between the translucent part and the phase shifter is higher than the critical intensity. Will also get smaller. That is, a light-shielded image corresponding to the boundary between the translucent part and the phase shifter is formed. Therefore, when only a photomask as shown in FIG. 56B is used, a light-shielding distribution having an arbitrary shape (distribution of a region smaller than the critical intensity in the light intensity distribution) cannot be formed. A pattern cannot be formed. As a result, in order to create a pattern having a complicated shape such as an ordinary LSI pattern layout, in addition to the photomask (first photomask) shown in FIG. Exposure using a photomask (second photomask) as shown in (c) is essential. As a result, mask costs increase and throughput decreases or manufacturing costs increase due to an increase in the number of steps in lithography.

  H. Y. The method by Liu et al. Has another problem as described below.

  FIG. 57A shows another example of the layout of a desired pattern (resist pattern) to be formed. As shown in FIG. 57 (a), the pattern 860 includes a T-shaped partial pattern 860a having a dimension of half or less of λ / NA.

  FIGS. 57B and 57C are plan views of two conventional photomasks used for forming the pattern shown in FIG. 57A. As shown in FIG. 57B, a light shielding film 872 is formed on a transparent substrate 871 constituting the first photomask 870, and the light shielding film 872 has a first light transmitting portion. An opening 873 and a second opening 874 and a third opening 875 serving as a phase shifter are provided with a light shielding pattern 872a for forming the partial pattern 860a interposed therebetween. Further, as shown in FIG. 57C, a pattern 860 (FIG. 57 (FIG. 57 (B)) is formed on the transparent substrate 881 constituting the second photomask 880 by combination with the light shielding pattern 872a of the first photomask 870. A light shielding pattern 882 for forming a) is formed.

  However, as shown in FIG. 57B, in the first photomask 870, a part of the light shielding pattern 872a is sandwiched between the phase shifters (the second opening 874 and the third opening 875). Therefore, in other words, since the entire light shielding pattern 872a cannot be provided only between the light transmitting portion and the phase shifter having opposite phases, the light shielding property of the light shielding pattern 872a cannot be improved. That is, the pattern layout that can use the effect of the phase shifter is limited.

  In view of the above, an object of the present invention is to enable a pattern having an arbitrary size or shape to be formed by exposure using a single photomask.

  In order to achieve the above object, a first photomask according to the present invention is provided with a mask pattern having a light blocking property on exposure light on a transparent substrate having a light transmitting property on exposure light. Assuming that the photomask is a photomask, the mask pattern is (150 + 360 × n) degrees or more and (210 + 360 × n) degrees or less with respect to the exposure light with respect to the light transmitting portion where the mask pattern is not formed on the transparent substrate. (Where n is an integer) having a phase shifter, and the first light intensity generated in the light-shielded image forming region corresponding to the mask pattern on the exposed material by the exposure light transmitted through the phase shifter, It is 4 times or less the second light intensity generated in the light-shielding image forming region by the exposure light that passes through the peripheral portion of the mask pattern on the transparent substrate and goes around the back side of the mask pattern.

  According to the first photomask, the first light intensity generated in the light-shielded image forming region by the exposure light that passes through the phase shifter provided in the mask pattern on the transparent substrate (hereinafter referred to as shifter transmission light) is transmitted. It is 4 times or less the second light intensity generated in the light-shielded image forming region by exposure light (hereinafter referred to as mask pattern diffracted light) that passes through the periphery of the mask pattern on the conductive substrate and goes around to the back side of the mask pattern. At this time, since the shifter transmission light and the mask pattern diffracted light have a phase difference of 180 degrees, the first light intensity and the second light intensity cancel each other, and finally occur in the light-shielding image forming region. The light intensity is smaller than the second light intensity. Therefore, the light shielding property of the mask pattern can be improved as compared with a mask pattern made of only a complete light shielding film, so that a pattern having an arbitrary size or shape can be formed by exposure using a single photomask. it can.

  The second photomask according to the present invention is based on a photomask in which a mask pattern having a light-shielding property for exposure light is provided on a transparent substrate having a light-transmitting property to exposure light. Is a phase difference of not less than (150 + 360 × n) degrees and not more than (210 + 360 × n) degrees (where n is an integer) with respect to the exposure light with respect to the light-transmitting portion where the mask pattern is not formed on the transparent substrate. The first light intensity generated in the light-shielded image forming region corresponding to the mask pattern on the exposed material by the exposure light transmitted through the phase shifter is a peripheral portion of the mask pattern on the transparent substrate. Is not less than 0.5 times and not more than twice the second light intensity generated in the light-shielded image forming region by the exposure light that passes through the back side of the mask pattern.

  According to the second photomask, the first light intensity generated in the light-shielded image formation region by the shifter transmitted light is 0.5 to 2 times the second light intensity generated in the light-shielded image formation region by the mask pattern diffracted light. It is. At this time, since the shifter transmission light and the mask pattern diffracted light have a phase difference of 180 degrees, the first light intensity and the second light intensity cancel each other, and finally occur in the light-shielding image forming region. The light intensity is very small. Therefore, since the light shielding property of the mask pattern can be dramatically improved, a pattern having an arbitrary size or shape can be formed by exposure using one photomask.

  In the first or second photomask, a phase shifter in which a transmissive film having a transmittance different from that of the transmissive substrate with respect to the exposure light may be used, or transmission may be performed. A phase shifter formed by engraving a conductive substrate may be used. Further, the phase shifter may be disposed in an opening provided in the light shielding film having the same outer shape as the mask pattern. At this time, the light-shielding film having the same outer shape as the mask pattern has a transmittance of 15% or less with respect to the exposure light, and is (−30 + 360 × n) degrees or more with respect to the exposure light between the light-transmitting portion and A phase difference of (30 + 360 × n) degrees or less (where n is an integer) may be generated.

A first pattern forming method according to the present invention is based on the pattern forming method using the first or second photomask according to the present invention, and a step of forming a positive resist film on a substrate, and a resist film Irradiating the exposure light through the photomask and developing the resist film irradiated with the exposure light, and removing the portions other than the portions corresponding to the mask pattern in the resist film, And forming a width of a portion corresponding to the mask pattern in the resist film as L,
L ≦ 0.4 × λ / NA
(Where λ is the wavelength of the exposure light, and NA is the numerical aperture of the reduction projection optical system of the exposure machine)
It is.

  According to the first pattern forming method, since the exposure using the first or second photomask according to the present invention is performed, the dimensional accuracy of the resist pattern can be greatly improved as compared with the conventional case. Further, by utilizing the difference between the defocus characteristic of the shifter transmitted light and the defocus characteristic of the mask pattern diffracted light, the defocus characteristic in the light intensity distribution that finally occurs in the light shielding image formation region can be improved. The focus margin can be improved.

A second pattern forming method according to the present invention is based on the pattern forming method using the first or second photomask according to the present invention, and a step of forming a negative resist film on a substrate, and a resist film Irradiating exposure light through a photomask, and developing the resist film irradiated with the exposure light to remove a portion corresponding to the mask pattern in the resist film, thereby forming a resist pattern. Provided, when the width of the portion corresponding to the mask pattern in the resist film is L,
L ≦ 0.4 × λ / NA
(Where λ is the wavelength of the exposure light, and NA is the numerical aperture of the reduction projection optical system of the exposure machine)
It is.

  According to the second pattern forming method, since the exposure using the first or second photomask according to the present invention is performed, the dimensional accuracy of the resist pattern can be greatly improved as compared with the conventional case. Further, by utilizing the difference between the defocus characteristic of the shifter transmitted light and the defocus characteristic of the mask pattern diffracted light, the defocus characteristic in the light intensity distribution that finally occurs in the light shielding image formation region can be improved. The focus margin can be improved.

  In the first or second pattern formation method, the step of irradiating the exposure light preferably uses an oblique incidence illumination method.

  In this way, optimal exposure can be performed both in forming an isolated pattern and in forming a pattern arranged with a small period, so that a fine pattern having an arbitrary layout can be formed with high accuracy.

  When the oblique incidence illumination method is used, the incident direction of the exposure light with respect to the photomask is set so that the intensity of the exposure light applied to the resist film has a minimum value at a portion corresponding to the mask pattern in the resist film. In this case, it is more preferable that the minimum value is set to be smaller than the best focus position at the defocus position.

  A first photomask producing method according to the present invention is a photomask producing method in which a mask pattern having a light shielding property to exposure light is provided on a transparent substrate having a light transmitting property to exposure light. And (150 + 360 × n) degrees or more and (210 + 360 × n) degrees or less with respect to the exposure light with respect to the light transmitting portion where the mask pattern is not formed on the transparent substrate in the region to be the mask pattern. A step of forming a phase shifter that generates a phase difference (where n is an integer), and the step of forming the phase shifter is a light-shielding image formation region corresponding to the mask pattern on the material to be exposed by the exposure light transmitted through the phase shifter The first light intensity generated in the light-shielding image forming region by exposure light that passes through the periphery of the mask pattern on the transmissive substrate and wraps around the back side of the mask pattern. Forming a phase shifter in proportion to the resulting second light intensity.

  According to the first photomask producing method, the phase shifter is generated in the region to be the mask pattern, and the first light intensity generated in the light-shielded image forming region by the shifter transmitted light is generated in the light-shielded image forming region by the mask pattern diffracted light. 2 so as to be proportional to the light intensity of 2. At this time, since the shifter transmission light and the mask pattern diffracted light have a phase difference of 180 degrees, the first light intensity and the second light intensity cancel each other, and finally occur in the light-shielding image forming region. The light intensity can be made smaller than the second light intensity. Accordingly, the light shielding property of the mask pattern can be improved as compared with a mask pattern made of only a complete light shielding film, so that a pattern having an arbitrary size or shape can be formed by exposure using a single photomask. .

  A second photomask producing method according to the present invention is a photomask producing method in which a mask pattern having a light-shielding property for exposure light is provided on a transparent substrate having a light-transmitting property for exposure light. And (150 + 360 × n) degrees or more and (210 + 360 × n) degrees or less with respect to the exposure light with respect to the light transmitting portion where the mask pattern is not formed on the transparent substrate in the region to be the mask pattern. (Where n is an integer) is provided with a step of forming a phase shifter that generates a phase shift, and the step of forming the phase shifter is performed when the peripheral portion of the mask pattern on the transparent substrate is covered with a light shielding film. The first light intensity generated in the light shielding image forming region corresponding to the mask pattern on the exposed material by the exposure light transmitted through the mask is that the mask pattern is formed only by the light shielding film. And a step of forming a phase shifter so as to be proportional to the second light intensity generated in the light-shielded image forming region by the exposure light transmitted through the photomask.

  According to the second photomask producing method, the phase shifter is provided in the region to be the mask pattern, and the exposure light that passes through the photomask when the peripheral portion of the mask pattern on the transmissive substrate is covered with the light shielding film ( In other words, the first light intensity generated in the light-shielded image formation region by the shifter transmission light) is shielded by the exposure light (that is, mask pattern diffracted light) that passes through the photomask when the mask pattern is constituted only by the light-shielding film. It is formed so as to be proportional to the second light intensity generated in the image forming region. At this time, since the shifter transmission light and the mask pattern diffracted light have a phase difference of 180 degrees, the first light intensity and the second light intensity cancel each other, and finally occur in the light-shielding image forming region. The light intensity can be made smaller than the second light intensity. Therefore, the light shielding property of the mask pattern can be improved as compared with a mask pattern made of only a complete light shielding film, so that a pattern having an arbitrary size or shape can be formed by exposure using a single photomask. it can. In addition, since the light intensity of each of the shifter transmitted light and the mask pattern diffracted light can be calculated independently, the calculation of each light intensity becomes easy.

  In the second method for producing a photomask, the light shielding film constituting the mask pattern has a transmittance of 15% or less with respect to the exposure light, and (-30 + 360 × n) with respect to the exposure light with respect to the light transmitting portion. ) Degrees or more and (30 + 360 × n) degrees or less (where n is an integer).

  In the first or second photomask manufacturing method, the phase shifter has a transmittance different from that of the transmissive substrate with respect to the exposure light. In the step of forming the phase shifter, the first light intensity is the first light intensity. It is preferable to include a step of determining the formation position and transmittance of the phase shifter so that the light intensity of 2 is 4 times or less.

  In this way, the light intensity finally generated in the light-shielding image forming region can be surely made smaller than the second light intensity, so that the light-shielding property of the mask pattern can be reliably improved.

  In the first or second photomask manufacturing method, the phase shifter has a transmittance different from that of the transmissive substrate with respect to the exposure light. In the step of forming the phase shifter, the first light intensity is the first light intensity. It is preferable to include a step of determining the phase shifter formation position and transmittance so that the light intensity of 2 is 0.5 times or more and 2 times or less.

  In this way, the light intensity finally generated in the light-shielding image formation region can be made very small, so that the light-shielding property of the mask pattern can be greatly improved.

  In the first or second photomask manufacturing method, the mask pattern has a light shielding film having the same outer shape, and the phase shifter is disposed in an opening provided in the light shielding film, thereby forming the phase shifter. The step preferably includes a step of determining the width of the opening so that the first light intensity becomes equal to a predetermined value.

  In this way, since the transmittance of the phase shifter can be made uniform, the photomask can be easily created.

  In the first or second photomask manufacturing method, the mask pattern has a light shielding film having the same outer shape, and the phase shifter is disposed in an opening provided in the light shielding film, thereby forming the phase shifter. The step preferably includes a step of determining the width of the opening so that the first light intensity is four times or less of the second light intensity.

  In this way, since the transmittance of the phase shifter can be made single, the photomask can be easily created, and the light intensity finally generated in the light-shielding image forming region can be surely made smaller than the second light intensity. Therefore, the light shielding property of the mask pattern can be improved reliably.

  In the first or second photomask manufacturing method, the mask pattern has a light shielding film having the same outer shape, and the phase shifter is disposed in an opening provided in the light shielding film, thereby forming the phase shifter. The step preferably includes a step of determining the width of the opening so that the first light intensity is not less than 0.5 times and not more than twice the second light intensity.

  In this way, since the transmittance of the phase shifter can be made uniform, it becomes easy to create a photomask, and the light intensity finally generated in the light-shielding image forming region can be made very small, so that the mask pattern can be shielded from light. The sex can be improved dramatically.

When the phase shifter is disposed in the opening provided in the light shielding film having the same outer shape as the mask pattern, when the width of the mask pattern is Lm,
Lm ≦ (0.5 × λ / NA) × M
(Where λ is the wavelength of the exposure light, NA is the numerical aperture of the reduction projection optical system of the exposure machine, and M is the magnification of the reduction projection optical system)
It is preferable that

  In this way, the shape of the opening can be freely set within a range in which the area of the opening is kept constant. Therefore, the photomask can be selected by selecting the shape of the opening in consideration of the degree of adhesion between the light shielding film and the substrate. Can improve the reliability.

  A third photomask producing method according to the present invention is a photomask producing method in which a mask pattern having a light shielding property to exposure light is provided on a transparent substrate having a light transmitting property to exposure light. And (150 + 360 × n) degrees or more and (210 + 360 × n) degrees or less with respect to the exposure light with respect to the light transmitting portion where the mask pattern is not formed on the transparent substrate in the region to be the mask pattern. (Where n is an integer) and a step of forming a phase shifter having a transmittance T (where 0 <T <1) with respect to the exposure light. The step of forming the phase shifter includes a mask pattern The light intensity Ia generated in the light-shielding image forming region corresponding to the mask pattern on the material to be exposed by the exposure light passing through the photomask when it is constituted only by the light-shielding film. Light that is generated in the light-shielded image forming region by exposure light that passes through the photomask when the calculation step and the transmittance T are 1 and the periphery of the mask pattern on the transparent substrate is covered with the light-shielding film A step of calculating the intensity Ib, and a step of determining the formation position of the phase shifter and the transmittance T so that 4 × Ia ≧ T × Ib is satisfied.

  According to the third method for producing a photomask, the light intensity (T × Ib) of the shifter transmitted light and the light intensity (Ia) of the mask pattern diffracted light can be calculated independently, so that the calculation of each light intensity is easy. Become. Further, since the light intensity of the shifter transmitted light is set to four times or less than the light intensity of the mask pattern diffracted light, the light intensity finally generated in the light-shielding image forming region is smaller than the second light intensity. Therefore, the light shielding property of the mask pattern can be improved as compared with a mask pattern made of only a complete light shielding film, so that a pattern having an arbitrary size or shape can be formed by exposure using a single photomask. it can.

  A fourth photomask producing method according to the present invention is a photomask producing method in which a mask pattern having a light shielding property to exposure light is provided on a transparent substrate having a light transmitting property to exposure light. And (150 + 360 × n) degrees or more and (210 + 360 × n) degrees or less with respect to the exposure light with respect to the light transmitting portion where the mask pattern is not formed on the transparent substrate in the region to be the mask pattern. (Where n is an integer) and a step of forming a phase shifter having a transmittance T (where 0 <T <1) with respect to the exposure light. The step of forming the phase shifter includes a mask pattern The light intensity Ia generated in the light-shielding image forming region corresponding to the mask pattern on the material to be exposed by the exposure light passing through the photomask when it is constituted only by the light-shielding film. Light that is generated in the light-shielded image forming region by exposure light that passes through the photomask when the calculation step and the transmittance T are 1 and the periphery of the mask pattern on the transparent substrate is covered with the light-shielding film Calculating the intensity Ib, and determining the phase shifter formation position and the transmittance T so that 2 × Ia ≧ T × Ib ≧ 0.5 × Ia is satisfied.

  According to the fourth method for creating a photomask, the light intensity (T × Ib) of the shifter transmitted light and the light intensity (Ia) of the mask pattern diffracted light can be calculated independently, making it easy to calculate each light intensity. Become. Further, since the light intensity of the shifter transmitted light is set to 0.5 to 2 times the light intensity of the mask pattern diffracted light, the light intensity finally generated in the light-shielding image forming region becomes very small. Therefore, since the light shielding property of the mask pattern can be dramatically improved, a pattern having an arbitrary size or shape can be formed by exposure using one photomask.

  In the third or fourth method for producing a photomask, the light shielding film constituting the mask pattern has a transmittance of 15% or less with respect to the exposure light, and with respect to the exposure light (− A phase difference of 30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) may be generated.

  The first mask pattern designing method according to the present invention is for creating a photomask in which a mask pattern having a light blocking property for exposure light is provided on a transparent substrate having a light transmission property for exposure light. And the mask pattern is not less than (150 + 360 × n) degrees with respect to the exposure light and (210 + 360 × n) with respect to the exposure light with the light-transmitting portion of the transmissive substrate where the mask pattern is not formed. It has a phase shifter that produces a phase difference of less than or equal to degrees (where n is an integer). Specifically, a first mask pattern design method according to the present invention includes a step of creating a pattern layout which is a mask pattern layout and determining a phase shifter transmittance T, and dividing the pattern layout into a plurality of patterns. The light generated in the light-shielded image forming area corresponding to each divided pattern on the material to be exposed by the exposure light that passes through the photomask when the light-shielding film is arranged in the entire pattern layout and the process of generating the divided pattern A step of calculating the intensity Ic, and an opening is arranged in a divided pattern in which the corresponding light intensity Ic is larger than a predetermined value among the divided patterns, and a light shielding film is arranged in the other part of the photomask. Calculating the light intensity Io generated in the light-shielded image forming region by the exposure light transmitted through the photomask when A phase shifter is disposed in each divided pattern where Ic / Io> T is satisfied, and a light shielding portion is disposed in each divided pattern where T / 4> Ic / Io is satisfied. Among these, the division pattern in which T ≧ Ic / Io ≧ T / 4 is provided with a step of arranging a light shielding portion having an opening serving as a phase shifter.

  According to the first mask pattern design method, the light intensity of the mask pattern diffracted light and the light intensity of the shifter transmitted light can be calculated independently, and the light shielding property can be maximized based on the ratio of each light intensity. The transmittance of the phase shifter and the opening size of the mask enhancer can be obtained. For this reason, it is possible to easily obtain the transmittance of the phase shifter and the opening size of the mask enhancer capable of maximizing the light shielding property for an arbitrary layout of the mask pattern.

  The second mask pattern design method according to the present invention is for creating a photomask in which a mask pattern having a light blocking property for exposure light is provided on a transparent substrate having a light transmission property for exposure light. And the mask pattern is not less than (150 + 360 × n) degrees with respect to the exposure light and (210 + 360 × n) with respect to the exposure light with the light-transmitting portion of the transmissive substrate where the mask pattern is not formed. It has a phase shifter that produces a phase difference of less than or equal to degrees (where n is an integer). Specifically, the second mask pattern design method according to the present invention includes a step of creating a pattern layout which is a mask pattern layout and determining a phase shifter transmittance T, and dividing the pattern layout into a plurality of patterns. The light generated in the light-shielded image forming area corresponding to each divided pattern on the material to be exposed by the exposure light that passes through the photomask when the light-shielding film is arranged in the entire pattern layout and the process of generating the divided pattern A step of calculating the intensity Ic, and an opening is arranged in a divided pattern in which the corresponding light intensity Ic is larger than a predetermined value among the divided patterns, and a light shielding film is arranged in the other part of the photomask. Calculating the light intensity Io generated in the light-shielded image forming region by the exposure light transmitted through the photomask when A step of arranging a phase shifter for a divided pattern satisfying Ic / Io ≧ T / 4 among the divided patterns, and a step of arranging a light shielding portion for a divided pattern satisfying T / 4> Ic / Io among the divided patterns. I have.

  According to the second mask pattern design method, the following effects can be obtained in addition to the effects of the first mask pattern design method. That is, as the mask pattern, only the phase shifter and the light shielding part are used without using a mask enhancer, and therefore mask pattern data capable of realizing sufficient light shielding properties can be easily created.

  The third mask pattern design method according to the present invention is for creating a photomask in which a mask pattern having a light-blocking property for exposure light is provided on a transparent substrate having a light-transmitting property to exposure light. And the mask pattern is not less than (150 + 360 × n) degrees with respect to the exposure light and (210 + 360 × n) with respect to the exposure light with the light-transmitting portion of the transmissive substrate where the mask pattern is not formed. It has a phase shifter that produces a phase difference of less than or equal to degrees (where n is an integer). Specifically, the third mask pattern design method according to the present invention includes a step of creating a pattern layout which is a layout of a mask pattern and determining a transmittance T of the phase shifter, and a phase shifter for the exposure light. A step of calculating a maximum width Lmax where the light shielding effect is higher than that of the light shielding film, and a light shielding portion is arranged in a partial pattern having a width larger than Lmax in the pattern layout, and a partial pattern having a width of Lmax or less in the pattern layout. Comprises a step of arranging a phase shifter.

  According to the third mask pattern design method, the mask pattern can be designed easily by improving the light shielding property based on the width of the pattern layout without using the optical simulation using the mask data.

A fourth mask pattern design method according to the present invention is for creating a photomask in which a mask pattern having a light-shielding property for exposure light is provided on a transparent substrate having a light-transmitting property for exposure light. And the mask pattern is not less than (150 + 360 × n) degrees with respect to the exposure light and (210 + 360 × n) with respect to the exposure light with the light-transmitting portion of the transmissive substrate where the mask pattern is not formed. It has a phase shifter that produces a phase difference of less than or equal to degrees (where n is an integer). Specifically, in the fourth mask pattern design method according to the present invention, a pattern layout which is a mask pattern layout is created and two types of transmittances T1 and T2 (where T1> T2) of the phase shifter are determined. A process, a process of generating a plurality of divided patterns by dividing the pattern layout, and each division on the material to be exposed by the exposure light transmitted through the photomask when the light shielding film is arranged on the entire pattern layout A step of calculating the light intensity Ic generated in the light-shielding image forming region corresponding to the pattern, and the other portion of the photomask in which the opening is arranged in the divided pattern in which the corresponding light intensity Ic is larger than a predetermined value among the divided patterns If a light-shielding film is placed on the entire surface, the light-shielding image formation area is exposed by exposure light that passes through the photomask. And a phase shifter is arranged in each divided pattern where Ic / Io ≧ T2 / 4 is satisfied, and among the divided patterns, division where T2 / 4> Ic / Io is satisfied. The pattern shifter is disposed in the pattern, and in the divided pattern in which Ic / Io> (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) among the divided patterns in which the phase shifter is arranged, the transmittance of the phase shifter Is set to T1, and among the divided patterns in which the phase shifters are arranged, the transmittance of the phase shifter is set to T2 in the divided patterns satisfying Ic / Io ≦ (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ). Process.

  According to the fourth mask pattern design method, the following effects can be obtained in addition to the effects of the first mask pattern design method. That is, as the mask pattern, only the phase shifter and the light shielding part are used without using a mask enhancer, and therefore mask pattern data capable of realizing sufficient light shielding properties can be easily created. In addition, in a situation where a phase shifter having a plurality of transmittances can be used, a phase shifter having each transmittance can be set so as to realize higher light shielding properties, so that phase shifters having different transmittances can be placed at appropriate positions. Can be arranged.

  In the first to fourth mask pattern design methods, the light shielding film or the light shielding portion arranged in the pattern layout has a transmittance of 15% or less with respect to the exposure light, and with respect to the exposure light with respect to the light transmission portion. A phase difference of (−30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) may be generated.

  According to the present invention, the mask pattern diffracted light can be canceled out by the shifter transmitted light, so that the light shielding property of the mask pattern can be improved. Therefore, any size or shape can be obtained by exposure using one photomask. The pattern which has can be formed. Further, by utilizing the difference between the defocus characteristic of the shifter transmitted light and the defocus characteristic of the mask pattern diffracted light, the defocus characteristic in the light intensity distribution that finally occurs in the light shielding image formation region can be improved. The focus margin can be improved. Furthermore, the light intensity of the mask pattern diffracted light and the light intensity of the shifter transmitted light can be calculated independently, and based on the ratio of each light intensity, the light shielding ability can be maximized and the transmittance of the phase shifter and the mask enhancer. Therefore, the transmittance and the opening dimension can be easily obtained for an arbitrary layout of the mask pattern.

  Hereinafter, a mask pattern having a higher effective light-shielding property than a mask pattern made of a complete light-shielding film, created in order to realize the present invention, is formed by using interference between light having a phase of 0 degrees and light having a phase of 180 degrees. The method will be described with reference to the drawings.

  First, the reason why there is a lower limit in the pattern dimensions that can be formed in pattern formation using light exposure will be described with reference to FIGS.

  FIG. 1A is a plan view of a photomask having a mask pattern made of a complete light-shielding film. As shown in FIG. 1A, a mask pattern 11 having a line width L made of a complete light-shielding film is formed on a transmissive substrate 10.

  FIG. 1B shows a state where exposure is performed using the photomask shown in FIG. 1A, and FIG. 1C shows exposure using the photomask shown in FIG. 2 shows the light intensity distribution transferred to the position corresponding to the line AA ′ in FIG. As shown in FIG. 1B, the exposure light 12 is blocked by the mask pattern 11, but a part of the exposure light 12 transmitted through the periphery of the mask pattern 11 in the transmissive substrate 10, that is, the transmitted light 13 is mask pattern 11. Diffracts into a region R on the back side of As a result, as shown in FIG. 1C, the light intensity Ic does not become zero even at a position (0 on the horizontal axis) corresponding to the central portion of the mask pattern 11 on the exposed material.

  FIG. 1D shows a simulation result of the light intensity distribution transferred onto the material to be exposed when the line width L of the mask pattern 11 is variously changed in the exposure using the photomask shown in FIG. Show. The optical conditions in the simulation are the exposure light wavelength λ = 0.193 μm, the exposure optical system's projection optical system NA = 0.6, and the exposure device interference (coherence) σ = 0.8. At this time, the value of 0.4 × λ / NA is about 0.13 μm. As shown in FIG. 1 (d), when the line width L is changed from 0.14 μm to 0.1 μm, the position is abrupt at a position (0 on the horizontal axis) corresponding to the center of the mask pattern 11 on the exposed material. The light intensity is high. That is, as the line width L of the mask pattern 11 decreases, the light that wraps around the back side of the mask pattern 11 increases, so that the light shielding property of the mask pattern 11 deteriorates and the pattern size that can be formed is limited. Specifically, when the line width L of the mask pattern 11 becomes smaller than about 0.8 × λ / NA, the light that wraps around the back side of the mask pattern 11 starts to increase and the line width L of the mask pattern 11 becomes 0.4. If it becomes smaller than about × λ / NA, the light that wraps around the back side of the mask pattern 11 increases rapidly, and pattern formation becomes difficult.

  FIG. 2 shows the change in the light intensity distribution transferred onto the material to be exposed (specifically, the resist film) when the line width of the mask pattern is changed variously in the exposure using the photomask, and the resist film Changes in the shape of the resist pattern formed after development are shown.

  As shown in FIG. 2, in order to form a resist pattern with a small line width, it is necessary to reduce the line width of the mask pattern. Further, in the case of a mask pattern having a sufficiently large line width such as the mask pattern C, exposure light is sufficiently shielded, so that a resist pattern C having a desired shape is formed. Further, as the line width of the mask pattern is reduced, the light shielding property of the mask pattern is reduced, and the light intensity in the region corresponding to the mask pattern on the resist film is increased. At this time, when the light intensity does not exceed the critical intensity due to the light (hereinafter referred to as mask pattern diffracted light) that wraps around the mask pattern from the periphery of the mask pattern even if the light shielding property is reduced, as in the mask pattern B The pattern resolution is possible, and the line width of the resist pattern can be reduced by reducing the line width of the mask pattern. However, when the light intensity exceeds the critical intensity by the mask pattern diffracted light as in the mask pattern A, the resist pattern can no longer be formed.

  Next, a method (hereinafter referred to as an image enhancement method) for effectively increasing the light shielding property of the mask pattern by canceling the mask pattern diffracted light described above and thereby realizing a desired light intensity distribution. This will be described with reference to FIGS.

  FIG. 3 is a schematic diagram showing the principle of the image enhancement method of the present invention.

  In general, lights having an opposite phase relationship with each other, that is, lights having a phase difference of 180 degrees, have light intensity opposite to each other in the phase space. Therefore, when light having a phase difference of 180 degrees is caused to interfere with each other, the light intensity of each other can be canceled out. Using this principle, if the diffracted light from the periphery of the mask pattern interferes with the light in the opposite phase, the light intensity of each other can be canceled out. It will be possible.

  In the image enhancement mask of the present invention shown in FIG. 3, a phase shifter that transmits light having an opposite phase to light transmitted through a normal light transmitting portion is provided as a mask pattern, and light that passes through the phase shifter (hereinafter referred to as “light”). The intensity of the light transmitted through the shifter is made to coincide with the intensity of the diffracted light (that is, mask pattern diffracted light) from the light transmitting portion around the phase shifter, that is, around the mask pattern. This realizes a state in which light is completely shielded on the back side of the mask pattern. At this time, the intensity of the shifter transmitted light can be adjusted by adjusting the size or transmittance (relative to the exposure light) of the phase shifter.

  Note that the intensity of the mask pattern diffracted light in the image enhancement mask can be obtained using the light shielding mask shown in FIG. 3 (a light shielding portion made of a complete light shielding film is provided in place of the phase shifter of the image enhancement mask). . Further, the intensity of the shifter transmission light in the image enhancement mask is obtained using a phase shift transmission mask (a light shielding portion made of a complete light shielding film is provided in place of the light transmission portion of the image enhancement mask) shown in FIG. Can do. At this time, assuming that the intensity of the mask pattern diffracted light is Ic and the intensity of the shifter transmitted light is Io, the condition for realizing the state where the light is completely shielded on the back side of the mask pattern of the image enhancement mask is as follows: Ic = Io.

  FIG. 4 shows a simulation result of the light intensity distribution transferred onto the material to be exposed when the mask pattern, that is, the line width of the phase shifter is varied in the exposure using the image enhancement mask shown in FIG. Note that in an image enhancement mask having a phase shifter of each line width, the transmittance of the phase shifter is optimized so that the mask pattern diffracted light is most canceled by the opposite phase shifter transmitted light. The optical conditions in the simulation are the same as the optical conditions in the simulation shown in FIG.

  Comparing the result shown in FIG. 4 with the result shown in FIG. 1D, the line width is about 0.8 × λ / NA by the exposure method using the image enhancement mask, that is, the image enhancement method of the present invention. It can be seen that the light-shielding property of the smaller mask pattern is improved, and thereby the desired light intensity distribution can be realized.

(First embodiment)
Hereinafter, a photomask according to a first embodiment of the present invention, a method for producing the photomask, and a pattern forming method using the photomask will be described with reference to the drawings.

By the way, if the magnification of the reduction projection optical system of the exposure apparatus is M, usually a desired pattern (generally a resist pattern) is designed by using a material such as chromium which becomes a complete light-shielding film for exposure light. A photomask is created by drawing a mask pattern having a size M times the value on a substrate (hereinafter referred to as a transmissive substrate) made of a material having a high transmittance with respect to exposure light. The exposure is performed using. As the exposure light, i-line (wavelength 365 nm), KrF excimer laser light (wavelength 248 nm), ArF excimer laser light (wavelength 193 nm), F ₂ excimer laser light (wavelength 157 nm), or the like is used. In the present specification, when expressing the dimension of the mask pattern, the dimension of the resist pattern may be used instead of the actual dimension on the photomask (a value obtained by multiplying the dimension of the resist pattern by M).

  The first feature of the first embodiment is that when a mask pattern corresponding to a desired pattern is created using a light shielding film, the mask pattern is transferred to an exposed material (specifically, a resist film) by the mask pattern during exposure. A mask pattern is created by replacing a light-shielding film portion corresponding to a region where the light intensity in the light intensity distribution is not sufficiently lowered with a phase shifter, and exposure is performed using a photomask having the mask pattern. Here, the phase shifter is 180 degrees (specifically, (150 + 360 × n) degrees or more and (210 + 360 × n) with respect to the phase of the light transmitted through the normal light transmitting portion. ) Degrees or less (where n is an integer)) means a translucent part that is inverted. Specifically, the phase shifter can be created using a transmissive film having a thickness that produces an optical path difference that is half the wavelength of the exposure light, for example.

  The second feature of the first embodiment is that the phase shifter provided as a mask pattern may have a plurality of transmittances, and the light transferred to the material to be exposed by the mask pattern made of only the light shielding film. The light-shielding film portion corresponding to the region where the light intensity lowering degree in the intensity distribution is weak is to be replaced with a phase shifter having a high transmittance.

  FIG. 5A shows an example of a design layout of a desired pattern (resist pattern) to be formed in the first embodiment. As shown in FIG. 5A, the width of the pattern 20 is 0.13 μm.

  FIG. 5B shows a plan view of the photomask according to the first embodiment used for forming the pattern shown in FIG. As shown in FIG. 5B, the photomask according to the first embodiment is formed by forming a mask pattern 40 corresponding to the pattern shown in FIG. The mask pattern 40 has a size (actual size) of 0.13 × M [μm] (M: magnification of the reduction projection optical system of the exposure machine). The mask pattern 40 includes a light shielding portion 41 made of a light shielding film such as a chromium film, a first phase shifter 42 having a transmittance of 10%, and a second phase shifter 43 having a transmittance of 50%. .

  For comparison, a plan view of a conventional photomask used to form the pattern shown in FIG. 5A and having a mask pattern made only of a light shielding film is shown in FIG. 55A (“Prior Art”). FIG. 55 (b) shows the simulation result of the light intensity distribution projected onto the resist film by the photomask shown in FIG. 55 (a). That is, in the mask pattern 40 shown in FIG. 5B, the portion of the light shielding film constituting the mask pattern 812 shown in FIG. 55A that has sufficient light shielding properties is left as the light shielding portion 41 as it is. Among them, a portion where the light shielding property is not sufficient is replaced with a phase shifter (first phase shifter 42 and second phase shifter 43). Here, a portion corresponding to the tip of the mask pattern 812 having a particularly weak light shielding property is replaced with a phase shifter (second phase shifter 43) having a higher transmittance.

  6A to 6C are cross-sectional views showing each step of the pattern forming method according to the first embodiment, specifically, the pattern forming method by exposure using the photomask shown in FIG. 5B. FIG. First, as shown in FIG. 6A, a film 51 to be processed made of a metal film or an insulating film is formed on a substrate 50, and then a positive resist film 52 is formed on the film 51 to be processed. . Thereafter, as shown in FIG. 6B, the resist film 52 is formed on the resist film 52 through the photomask (see FIG. 5B) according to the first embodiment in which the mask pattern 40 is formed on the transparent substrate 30. On the other hand, exposure light 53 is irradiated. Thereby, the part corresponding to the mask pattern 40 in the resist film 52 becomes the non-exposed part 52a, and the other part in the resist film 52 becomes the exposed part 52b. Thereafter, as shown in FIG. 6C, the resist film 52 is developed to form a resist pattern 54 including the non-exposed portion 52a.

  FIG. 7A shows a simulation result of the light intensity distribution projected onto the resist film 52 by the photomask shown in FIG. The simulation conditions are the wavelength λ = 193 nm of the exposure light 53, the numerical aperture NA of the projection optical system of the exposure machine, and the interference degree σ of the exposure machine = 0.8 (hereinafter, unless otherwise specified, the simulation results are This simulation condition is used when shown). At this time, the relationship of 0.13 × M [μm] ≈0.4 × M × λ / NA holds for the dimensions of the mask pattern 40 shown in FIG. In FIG. 7A, the light intensity distribution is shown by using contour lines of relative light intensity in a two-dimensional relative coordinate system.

  When the simulation result shown in FIG. 7A is compared with the simulation result shown in FIG. 55B, the following can be understood. That is, when a conventional photomask having a mask pattern made only of a light shielding film is used, if the mask pattern dimension is reduced to about half of λ / NA or less, the light shielding performance is extremely reduced at the tip portion of the mask pattern, etc. The shape of the light intensity distribution is significantly different from the desired pattern shape. On the other hand, when the photomask according to the first embodiment is used, a mask pattern can be obtained by providing a phase shifter with a higher transmittance in a portion where sufficient light shielding properties cannot be obtained depending on the light shielding film in the mask pattern. Since sufficient light-shielding properties can be realized over the whole, a resist pattern having a shape closer to a desired shape can be formed. This is based on the condition that the effective light-shielding property of the phase shifter is better than that of the light-shielding film by utilizing the interference between the light having the phase 0 degree and the light having the phase 180 degrees.

  FIG. 7B shows a simulation result of the light intensity distribution along the line AA ′ in FIG. 7A, and FIG. 7C shows a resist pattern from the simulation result of the light intensity distribution shown in FIG. The result of having predicted the shape of the pattern 54 is shown. If the critical intensity is 0.3 as shown in FIG. 7B, the distribution shape of the critical intensity value in the light intensity distribution shown in FIG. As shown in FIG. 7C, a resist pattern 54 (shaded portion) having a substantially desired shape (shape indicated by a broken line) can be formed.

  As described above, according to the first embodiment, the mask pattern diffracted light is canceled by the shifter transmitted light by providing the phase shifter on the mask pattern on the photomask. For this reason, the light-shielding property of the mask pattern can be improved as compared with a mask pattern made of only a complete light-shielding film, so that a pattern having an arbitrary size or shape can be formed by exposure using a single photomask. Can do.

  Hereinafter, the relationship between the transmittance and line width of the phase shifter provided as a mask pattern on the photomask according to the first embodiment and the light intensity distribution projected onto the material to be exposed by the mask pattern will be described in detail.

  FIG. 8A is a plan view of a photomask having a mask pattern made of a phase shifter. As shown in FIG. 8A, a mask pattern 61 having a line width L made of a transmissive film serving as a phase shifter is formed on a transmissive substrate 60.

  FIG. 8B shows a state in which exposure is performed using the photomask shown in FIG. As shown in FIG. 8B, the exposure light 62 passes through the periphery of the mask pattern 61 in the transmissive substrate 60 to become the first transmitted light 63 and passes through the mask pattern 61 to obtain the second transmitted light. 64.

  FIG. 9A corresponds to the AA ′ line in FIG. 8A on the material to be exposed when the transmittance of the phase shifter is changed variously in the exposure using the photomask shown in FIG. 8A. The simulation result of the light intensity distribution transferred to the position is shown. The simulation conditions are: exposure light wavelength λ = 0.193 μm, exposure device projection optical system NA = 0.6, exposure device interference σ = 0.8, and line width L = 0.1 μm. is there. Further, the point O on the AA ′ line is located at the center of the mask pattern 61.

  As shown in FIG. 9A, as the transmittance of the phase shifter increases, the light intensity at a position (0 on the horizontal axis) corresponding to the center O of the mask pattern 61 on the exposed material decreases. The shape of the light intensity distribution is improved. Further, when the mask pattern 61 is made of a complete light shielding film (transmittance 0%), the shape of the light intensity distribution is the worst. However, in the first embodiment, it is not always necessary that the phase shifter has a high transmittance. The reason will be described below.

  FIG. 9 (b) shows the state of FIG. 8 (a) on the material to be exposed when the transmittance of the phase shifter and the line width L of the mask pattern are varied in the exposure using the photomask shown in FIG. 8 (a). The simulation result of the light intensity produced in the position corresponding to the point O is shown.

  As shown in FIG. 9B, a line width L having the highest effective light shielding property exists for the mask pattern composed of the phase shifters of each transmittance, and the light shielding property is higher than that of the complete light shielding film. There is a line width L that begins to deteriorate. By the way, in the photomask shown in FIG. 8A, light that passes through the periphery of the mask pattern 61 in the transparent substrate 60 and goes around the back side of the mask pattern 61 (that is, mask pattern diffracted light) is transmitted through the mask pattern 61. The light shielding property of the mask pattern 61 is improved by canceling with the light to be transmitted (that is, the shifter transmitted light). For this reason, when the balance between the mask pattern diffracted light and the shifter transmitted light is optimized, the effective light shielding performance of the mask pattern 61 is maximized. On the other hand, when the shifter transmission light is excessive with respect to the mask pattern diffracted light, the effective light shielding property of the mask pattern 61 is lowered, and in some cases, it may be lower than the light shielding property of the mask pattern made of a complete light shielding film.

  FIG. 9 (c) shows the state of FIG. 8 (a) on the material to be exposed when the transmittance T of the phase shifter and the line width L of the mask pattern are varied in the exposure using the photomask shown in FIG. 8 (a). ) Shows the simulation result of the light intensity generated at the position corresponding to the point O with the transmittance T and the line width L taken on the vertical axis and the horizontal axis, respectively, and represented by contour lines of the light intensity.

  In FIG. 9C, the shaded area indicates the combination condition of the line width L of the mask pattern and the transmittance T of the phase shifter that maximizes the effective light shielding property of the mask pattern. . That is, this combination condition is a condition in which the mask pattern diffracted light and the shifter transmitted light are offset. Therefore, based on this combination condition, by defining the transmittance T of the phase shifter that maximizes the effective light shielding property of each mask pattern with respect to the line width L of each mask pattern, The shape of the light intensity distribution projected on the exposure material can be made close to a desired shape.

  By the way, in FIG. 9C, by actually calculating the light intensity distribution transferred onto the material to be exposed using the line width L of the various mask patterns and the transmittance T of the phase shifter, A combination condition (light shielding maximization condition) of the line width L and the transmittance T that maximizes the effective light shielding property is obtained. However, since it takes a very long calculation time to obtain the light shielding maximization condition by this method, it is difficult to obtain the optimum transmittance T of the phase shifter for an arbitrary line width L of the mask pattern, for example.

  Therefore, next, a simple calculation method of the light shielding performance maximization condition found by the inventor of the present application, specifically, a simple calculation for obtaining the optimum transmittance T of the phase shifter for an arbitrary line width L of the mask pattern. A method (hereinafter referred to as a mask pattern overlay method) will be described.

  FIG. 10 is a schematic diagram showing the principle of the mask pattern superposition method of the present invention in the case of a mask pattern having a line width L made of a phase shifter having transmittance T.

As shown in FIG. 10, in exposure using a photomask (image enhancement mask) having a mask pattern having a line width L made of a phase shifter having transmittance T, the exposure pattern is positioned at a position corresponding to the center of the mask pattern on the material to be exposed. The generated light intensity is assumed to be Ih (L, T). In addition, the light intensity generated at the position corresponding to the center of the mask pattern on the exposed material in exposure using a photomask (light-shielding mask) in which a complete light-shielding film is provided as a mask pattern instead of the phase shifter of the image enhancement mask Is Ic (L). Further, a photomask (transmission mask) in which a normal light-transmitting portion is provided in place of the phase shifter of the image enhancement mask and a light-shielding portion made of a complete light-shielding film is provided in place of the light-transmitting portion of the image enhancement mask. In the exposure, the light intensity generated at the position corresponding to the center of the mask pattern on the material to be exposed is defined as Io (L). At this time, as described in the principle of the image enhancement method of the present invention (see FIG. 3), in the image enhancement mask, the intensity of the mask pattern diffracted light generated at the position corresponding to the center of the mask pattern on the exposed material is Ic. In addition to (L), the light intensity of the shifter transmitted light generated at a position corresponding to the center of the mask pattern on the material to be exposed corresponds to T × Io (L). Therefore, the light intensity Ih (L, T) is a value obtained by superimposing the light intensity Ic (L) and the light intensity T × Io (L) in terms of the light intensity on the phase space and superimposing the results. Can be approximated by That is,
Ih (L, T) = ((Ic (L)) ^0.5- (T × Io (L)) ^0.5 ) ²
It is.

Accordingly, in the image enhancement mask, the condition for minimizing Ih (L, T), that is, the condition for maximizing the light shielding property of the mask pattern is as follows:
Ic (L) = T × Io (L)
It is. That is, the optimum transmittance T of the phase shifter for an arbitrary line width L of the mask pattern is
T = Ic (L) / Io (L)
It can ask for.

  FIGS. 11A to 11C show mask patterns on the material to be exposed when the transmittance T of the phase shifter and the line width L of the mask pattern are varied in the exposure using the image enhancement mask shown in FIG. The simulation result of the light intensity Ih (L, T) generated at the position corresponding to the center of the light intensity is shown as a contour line of the light intensity with the transmittance T and the line width L taken on the vertical axis and the horizontal axis, respectively. . Here, in each of FIGS. 11A to 11C, the graph representing the above-described relationship of T = Ic (L) / Io (L) is overwritten. The simulation results shown in FIGS. 11A to 11C are obtained using different exposure light sources, and the simulation results shown in FIG. 11A are obtained by normal exposure using a circular light source. The simulation result shown in FIG. 11B is obtained by annular exposure using an annular light source, and the simulation result shown in FIG. This is obtained by quadrupole exposure using a light source located at a point. Other simulation conditions are the exposure light wavelength λ = 0.193 μm and the exposure optical system's projection optical system NA = 0.6.

  As shown in FIGS. 11A to 11C, the dependence of the light intensity Ih (L, T) on the transmittance T of the phase shifter and the line width L of the mask pattern is slightly different depending on the shape of the exposure light source. However, the conditions under which the light intensity Ih (L, T) is minimized can be accurately expressed by the relationship T = Ic (L) / Io (L) regardless of the shape of the exposure light source.

FIG. 12 is a schematic diagram showing the principle of the mask pattern superposition method in the case of an image enhancement mask having a mask pattern having a square shape (the length of one side is L) made of a phase shifter of transmittance T. Also in the image enhancement mask shown in FIG. 12, the light intensity of the mask pattern diffracted light generated at a position corresponding to the center of the mask pattern on the material to be exposed corresponds to Ic (L), and the mask pattern on the material to be exposed has The light intensity of the shifter transmitted light generated at the position corresponding to the center corresponds to T × Io (L). Therefore, also in the image enhancement mask shown in FIG. 12, the optimum transmittance T of the phase shifter for an arbitrary width L of the mask pattern is
T = Ic (L) / Io (L)
It can ask for.

  FIGS. 13A to 13C show mask patterns on the material to be exposed when the transmittance T of the phase shifter and the line width L of the mask pattern are varied in the exposure using the image enhancement mask shown in FIG. The simulation result of the light intensity Ih (L, T) generated at the position corresponding to the center of the light intensity is shown as a contour line of the light intensity with the transmittance T and the line width L taken on the vertical axis and the horizontal axis, respectively. . Here, in each of FIGS. 13A to 13C, the graph representing the above-described relationship of T = Ic (L) / Io (L) is overwritten. The simulation results shown in FIGS. 13A to 13C are obtained using different exposure light sources, and the simulation results shown in FIG. 13A are obtained by normal exposure using a circular light source. The simulation result shown in FIG. 13B was obtained by annular exposure using an annular light source, and the simulation result shown in FIG. This is obtained by quadrupole exposure using a light source located at a point. Other simulation conditions are the exposure light wavelength λ = 0.193 μm and the exposure optical system's projection optical system NA = 0.6.

  As shown in FIGS. 13A to 13C, the dependency of the light intensity Ih (L, T) on the transmittance T of the phase shifter and the width L of the mask pattern is slightly different depending on the shape of the exposure light source. The conditions for minimizing the light intensity Ih (L, T) can be accurately expressed by the relationship T = Ic (L) / Io (L) regardless of the shape of the exposure light source.

  That is, the shape of the mask pattern to which the mask pattern overlay method of the present invention can be applied is not particularly limited.

Specifically, the calculation method of the transmittance T of the phase shifter that maximizes the effective light shielding property of the mask pattern having an arbitrary shape made of the phase shifter by the image enhancement method of the present invention is as follows.
(1) The light intensity Ic (r) generated at the position r corresponding to the vicinity of the center of the mask pattern on the exposed material in the exposure using the light shielding mask provided with the complete light shielding film instead of the phase shifter of the image enhancement mask. calculate.
(2) In exposure using a transmission mask in which a normal light-transmitting portion is provided in place of the phase shifter of the image enhancement mask and a light-shielding portion made of a complete light-shielding film is provided in place of the light-transmitting portion of the image enhancement mask Then, the light intensity Io (r) generated at the position r corresponding to the vicinity of the center of the mask pattern on the exposed material is calculated.
(3) The optimum transmittance T of the phase shifter is obtained based on the relationship T = Ic (L) / Io (L).

  Since the upper limit of the transmittance T is 1, when the transmittance T obtained by T = Ic (L) / Io (L) exceeds 1, the optimum transmittance T is 1.

  In the above description, a mask pattern having a simple shape has been targeted. However, when the mask pattern has a complicated shape, the mask pattern is divided into a plurality of patterns having a simple shape, The mask pattern overlay method of the present invention may be applied for each pattern. Thereby, the optimum transmittance T of the phase shifter is determined for each divided pattern.

  As described above, in the photomask according to the first embodiment, after calculating the intensity of the mask pattern diffracted light, the phase shifter so that the intensity of the shifter transmitted light becomes equal to the intensity of the mask pattern diffracted light. By calculating the transmittance T, the light shielding property of the mask pattern can be maximized. In addition, when the mask pattern has a complicated shape, the mask pattern is divided into a plurality of patterns having a simple shape so that the intensity of transmitted light is equal to the intensity of diffracted light for each pattern. By calculating the transmittance T of the phase shifter, the light shielding property can be maximized over the entire mask pattern.

In the first embodiment, the relationship of T = Ic (L) / Io (L) is used when maximizing the effective light shielding performance of the mask pattern in consideration of the principle of the image enhancement method of the present invention. The transmittance T of the phase shifter may be determined based on the above, but if the effective light shielding property of the mask pattern is only made higher than that of the mask pattern made of a complete light shielding film, T = Ic (L) / Io (L The transmittance T of the phase shifter may be determined so that the relationship (1) is substantially satisfied. Specifically, even if the complete light-shielding film is replaced with a phase shifter, the light-shielding property of the mask pattern is not improved because the optimum transmittance T obtained from the relationship of T = Ic (L) / Io (L) is 4 This is a case where a phase shifter having a transmittance of double or more is provided as a mask pattern. The reason for this will be described below. As described above, the light intensity Ih (L, T) generated at the position corresponding to the center of the mask pattern on the exposed material by the image enhancement mask having the mask pattern formed of the phase shifter having the line width L and the transmittance T is as follows.
Ih (L, T) = ((Ic (L)) ^0.5- (T × Io (L)) ^0.5 ) ²
(Where Ic (L) is the light intensity of the mask pattern diffracted light, and Io (L) is the light intensity of the shifter transmitted light). Here, since the superposition of Ic (L) and T × Io (L) is a coherent superposition, it is necessary to add the light intensities in the phase space. Therefore, in order to convert each light intensity into a value on the phase space, the square root of each light intensity is taken. Then, the result of adding the square roots of the light intensities in consideration of the phases of the mask pattern diffracted light and the shifter transmitted light is the superposition of the light intensities on the phase space. Squared to convert to light intensity.

As described above, when the square of Ih (L, T), that is, ((Ic (L)) ^0.5- (T × Io (L)) ^0.5 ) is minimized, in other words, the light shielding effect by the mask pattern is the most. Since Ic (L) = T × Io (L) holds when it becomes higher, the optimum transmittance T of the phase shifter (hereinafter referred to as optimum transmittance Tb) is
Tb = Ic (L) / Io (L)
It can ask for.

On the other hand, the condition that the shifter transmitted light becomes excessive and the effective light shielding property of the mask pattern decreases until it becomes the same as the mask pattern made of a complete light shielding film is Ih (L, T) = Ic (L)
− ((Ic (L)) ^0.5 − (T × Io (L)) ^0.5 ) = (Ic (L)) ^0.5
Can be considered. At this time,
(T × Io (L)) ^0.5 = 2 × (Ic (L)) ^0.5
So
T × Io (L) = 4 × (Ic (L))
Holds. That is, when the light intensity of the shifter transmitted light reaches four times the light intensity of the mask pattern diffracted light, the effective light shielding property of the mask pattern becomes the same as that of the mask pattern made of a complete light shielding film. The transmittance T of the phase shifter that satisfies this condition (hereinafter referred to as the limiting transmittance Tw) is
Tw = 4 × Ic (L) / Io (L) = 4 × Tb
It can ask for. Therefore, when a phase shifter having a transmittance of four times or more of the optimum transmittance Tb is provided as a mask pattern instead of a complete light shielding film, the effective light shielding performance of the mask pattern is lower than that of a mask pattern made of a complete light shielding film. To do. In other words, if the transmittance of the phase shifter is 4 times or less of the optimum transmittance Tb, the effective light shielding performance of the mask pattern can be improved by providing the phase shifter as a mask pattern instead of the complete light shielding film. it can.

  FIGS. 14A to 14C show Ih (L, T) = when the phase shifter transmittance T and the mask pattern line width L are varied in the exposure using the image enhancement mask shown in FIG. The conditions for satisfying Ic (L) are shown. Here, in each of FIGS. 14A to 14C, a graph (Tw is represented as T in the figure) representing the above-described relationship of Tw = 4 × Ic (L) / Io (L) is overlaid. I am writing. The simulation results shown in FIGS. 14A to 14C are obtained using different exposure light sources, and the simulation results shown in FIG. 14A are obtained by normal exposure using a circular light source. The simulation result shown in FIG. 14B is obtained by annular exposure using an annular light source, and the simulation result shown in FIG. This is obtained by quadrupole exposure using a light source located at a point. Other simulation conditions are the exposure light wavelength λ = 0.193 μm and the exposure optical system's projection optical system NA = 0.6.

  As shown in FIGS. 14A to 14C, the dependency of the condition that Ih (L, T) = Ic (L) on the transmittance T of the phase shifter and the line width L of the mask pattern depends on the exposure light source. However, the conditions for satisfying Ih (L, T) = Ic (L) are accurately expressed by the relationship of T = 4 × Ic (L) / Io (L) regardless of the shape of the exposure light source. be able to.

  In the above description, the limit transmittance Tw of the phase shifter is obtained for an arbitrary line width L of the mask pattern. Conversely, the limit line width Lo of the mask pattern is set for a predetermined transmittance To of the phase shifter. You can ask for it. Specifically, since Ic (L) / Io (L) decreases as the line width L of the mask pattern increases, Ic (L) / Io (L) is less than the predetermined transmittance To of the phase shifter. Assuming that the line width L that becomes To / 4 is the limit line width Lo, in the mask pattern having a line width equal to or larger than the limit line width Lo, it is more effective to use the phase shifter instead of the light shielding film. Will be reduced. Therefore, when a phase shifter having a predetermined transmittance To is provided in a mask pattern having an arbitrary layout, the line width is equal to or smaller than a limit line width Lo determined from the relationship of Ic (L) / Io (L) = To / 4. It is preferable to provide a phase shifter in the mask pattern portion and provide a light shielding film in the mask pattern portion having a line width equal to or larger than the limit line width Lo. In this way, it is possible to improve the effective light shielding performance of the entire mask pattern as compared with the case where the entire mask pattern is formed of the light shielding film. The dimension for switching between the arrangement of the phase shifter and the arrangement of the light shielding film is not necessarily limited to the limit line width Lo determined from the relationship of Ic (L) / Io (L) = To / 4, and is not more than the limit line width Lo. Any line width may be used.

In the above description, the optimum transmittance T is obtained by Tb = Ic (L) / Io (L), and the limit transmittance Tw is calculated as Tw = 4 × Ic (L) / Io (L) = 4 ×. Although it was calculated | required by Tb, you may determine the transmittance | permeability T of a phase shifter as follows corresponding to a more general condition. That is, when it is desired to reduce the light intensity Ih generated at a position corresponding to the center of the mask pattern on the exposed material to 1 / D of the intensity Ic of the mask pattern diffracted light,
− ((Ic) ^0.5 − (T × Io)) ^0.5 ) <(Ic / D) ^0.5
<((Ic) ^0.5- (T × Io)) ^0.5 )
It is sufficient to use a transmittance T such that From this relational expression, as an allowable range of the transmittance T,
(Ic / Io) × ((D−D ^0.5 ) / D) × ((D−D ^0.5 ) / D) <T
<(Ic / Io) × ((D + D ^0.5 ) / D) × ((D + D ^0.5 ) / D)
Is obtained. Specifically, when D = 3, the allowable range of the transmittance T is not less than 0.18 times and not more than 2.5 times (Ic / Io). When D = 5, the allowable range of the transmittance T is not less than 0.31 times and not more than 2.1 times (Ic / Io). Further, when D = 10, the allowable range of the transmittance T is 0.48 times or more and 1.7 times or less of (Ic / Io). Practically, it is not always necessary to maximize the light-shielding property of all mask patterns, so that the phase shifter transmittance T is not less than about 1/3 times (Ic / Io) and not more than about 2 times. Thus, the light shielding property of the mask pattern is sufficiently improved.

In addition, for example, when two types of phase shifters having different transmittances can be used as a mask pattern, it is determined by the following method which phase shifter having a higher transmittance can realize higher light shielding properties. can do. That is, when the transmittances of the two types of phase shifters are T1 and T2 (T1> T2), respectively, the use of the phase shifter with the transmittance T1 provides a higher light shielding property than when the phase shifter with the transmittance T2 is used. The conditions
(Ic ^0.5 − (T1 × Io) ^0.5 ) × (Ic ^0.5 − (T1 × Io) ^0.5 )
<(Ic ^0.5- (T2 × Io) ^0.5 ) × (Ic ^0.5- (T2 × Io) ^0.5 )
It is. Organizing this formula,
Ic / Io> (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) / 2
Is obtained. Therefore,
Ic / Io> (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) / 2
In the mask pattern portion where is established, a phase shifter with transmittance T1 is selected,
Ic / Io ≦ (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) / 2
In the mask pattern portion where the above holds, a phase shifter having transmittance T2 may be selected.

  Further, in the pattern forming method according to the first embodiment, that is, the pattern forming method using the photomask according to the first embodiment, the resist film may be a positive type or a negative type. A thing may be used. When using a positive resist film, the positive resist film irradiated with the exposure light is developed, and other portions other than the portion corresponding to the mask pattern in the positive resist film are removed, whereby a resist having a mask pattern shape is obtained. A pattern can be formed. When using a negative resist film, the negative resist film irradiated with the exposure light is developed, and the portion corresponding to the mask pattern in the negative resist film is removed, thereby providing a resist pattern having a mask pattern-shaped opening. Can be formed. Regardless of whether a positive resist film or a negative resist film is used, if the mask pattern width L is smaller than about 0.4 × λ / NA, the dimensions of the resist pattern compared to the conventional case The accuracy can be greatly improved.

(Second Embodiment)
Hereinafter, a photomask according to a second embodiment of the present invention, a method for producing the photomask, and a pattern forming method using the photomask will be described with reference to the drawings.

  Similar to the first embodiment, the second embodiment is characterized in that when a mask pattern corresponding to a desired pattern is created using a light shielding film, a material to be exposed (specifically, depending on the mask pattern during exposure) A mask pattern is created by replacing the light shielding film portion corresponding to the region where the light intensity in the light intensity distribution transferred to the resist film is not sufficiently lowered with a phase shifter, and exposure is performed using a photomask having the mask pattern. Is to do.

  The second embodiment is different from the first embodiment as follows. That is, in the first embodiment, in order to control the intensity of the shifter transmitted light by the transmittance of the phase shifter, there are a plurality of transmittances of the phase shifter provided as a mask pattern. On the other hand, in the second embodiment, all phase shifters provided as mask patterns have the same transmittance, and the intensity of the shifter transmitted light is partially covered by a light shielding film. Control.

  FIG. 15A shows an example of a design layout of a desired pattern (resist pattern) to be formed in the second embodiment. As shown in FIG. 15A, the width of the pattern 70 is 0.13 μm. The design layout of the pattern 70 is the same as the design layout of the pattern 20 to be formed in the first embodiment shown in FIG.

  FIG. 15B is a plan view of a photomask according to the second embodiment that is used to form the pattern shown in FIG. As shown in FIG. 15B, the photomask according to the second embodiment is formed by forming a mask pattern 90 corresponding to the pattern shown in FIG. The mask pattern 90 has a size (actual size) of 0.13 × M [μm] (M: magnification of the reduction projection optical system of the exposure machine). The mask pattern 90 includes a light shielding part 91 made of a light shielding film such as a chromium film, and a phase shifter 92 disposed in an opening provided in the light shielding film.

  Comparing the photomask according to the second embodiment shown in FIG. 15B with the photomask according to the first embodiment shown in FIG. That is, in the second embodiment, the light shielding film serving as the light shielding portion 91 is large in the region where the phase shifter (second phase shifter 43) having high transmittance in the first embodiment is provided. An opening is provided, and the opening serves as a phase shifter 92. Further, for the region where the phase shifter having the low transmittance (the first phase shifter 42) is provided in the first embodiment, a small opening is provided in the light shielding film that becomes the light shielding portion 91, and the opening This portion is a phase shifter 92.

  16A to 16C are cross-sectional views showing respective steps of the pattern forming method according to the second embodiment, specifically, the pattern forming method by exposure using the photomask shown in FIG. 15B. FIG. First, as shown in FIG. 16A, a film to be processed 101 made of a metal film or an insulating film is formed on a substrate 100, and then a positive resist film 102 is formed on the film to be processed 101. . After that, as shown in FIG. 16B, the resist film 102 is formed through the photomask (see FIG. 15B) according to the second embodiment in which the mask pattern 90 is formed on the transparent substrate 80. On the other hand, exposure light 103 is irradiated. Thereby, the part corresponding to the mask pattern 90 in the resist film 102 becomes the non-exposed part 102a, and the other part in the resist film 102 becomes the exposed part 102b. Thereafter, as shown in FIG. 16C, the resist film 102 is developed to form a resist pattern 104 including the non-exposed portion 102a.

  FIG. 17A shows a simulation result of the light intensity distribution projected onto the resist film 102 by the photomask shown in FIG. The simulation conditions are that the wavelength λ of the exposure light 103 is 193 nm, the numerical aperture NA of the projection optical system of the exposure machine is 0.6, and the interference degree σ of the exposure machine is 0.8. At this time, the relationship of 0.13 × M [μm] ≈0.4 × M × λ / NA holds for the dimensions of the mask pattern 90 shown in FIG. In FIG. 17A, the light intensity distribution is shown using contour lines of relative light intensity in a two-dimensional relative coordinate system.

  When the simulation result of the second embodiment shown in FIG. 17A is compared with the simulation result of the first embodiment shown in FIG. That is, when the photomask according to the second embodiment is used, a larger opening is provided in a portion where sufficient light shielding performance cannot be obtained depending on the light shielding film in the mask pattern, and a phase shifter is provided in the opening. Thus, sufficient light-shielding properties can be realized over the entire mask pattern, so that a resist pattern having a shape closer to a desired shape can be formed as in the first embodiment.

  FIG. 17B shows a simulation result of the light intensity distribution along the line AA ′ of FIG. 17A, and FIG. 17C shows a resist pattern from the simulation result of the light intensity distribution shown in FIG. The result of having predicted the shape of the pattern 104 is shown. If the critical intensity is 0.3 as shown in FIG. 17B, the distribution shape of the critical intensity value in the light intensity distribution shown in FIG. As shown in FIG. 17C, a resist pattern 104 (shaded portion) having a substantially desired shape (shape indicated by a broken line) can be formed.

  As described above, according to the second embodiment, the mask pattern diffracted light is canceled by the shifter transmitted light by providing the phase shifter on the mask pattern on the photomask. For this reason, the light-shielding property of the mask pattern can be improved as compared with a mask pattern made of only a complete light-shielding film, so that a pattern having an arbitrary size or shape can be formed by exposure using a single photomask. Can do.

  Hereinafter, the point that the second embodiment is superior to the first embodiment will be described. As described above, theoretically, when a mask pattern corresponding to a desired pattern is created using a light shielding film, the portion where the effective light shielding performance of the light shielding film is reduced is reduced to an optimum transmittance. By replacing it with the phase shifter, it is possible to improve the effective light shielding property over the entire mask pattern. In this case, it is necessary to form the phase shifter as a deposited film on a transparent substrate made of quartz or the like that is a transparent material for exposure light, and a material having different transmittance at different positions on the transparent substrate It is necessary to provide a deposited film. However, this is difficult considering the labor and cost in manufacturing the mask. On the other hand, even if the transmittance of the phase shifter is controlled by the thickness of the deposited film instead of the material of the deposited film, the thickness of the deposited film is limited to a thickness that causes an optical path difference corresponding to a phase difference of 180 degrees. For this reason, it is difficult to change the transmittance of the phase shifter in each part of the mask pattern by changing the thickness of the single material deposited film. On the other hand, in the second embodiment, the shifter transmitted light is provided not on the phase shifter transmittance but on the opening provided in the mask pattern (specifically, the light shielding film having the outer shape of the mask pattern). Therefore, the transmittance of the phase shifter arranged in the opening can be made uniform. Of course, at this time, a plurality of phase shifter transmittances may exist.

  Hereinafter, the relationship between the width of the opening provided in the mask pattern of the photomask according to the second embodiment and the light intensity distribution projected onto the material to be exposed by the mask pattern will be described in detail. Note that the second embodiment is also similar to the first embodiment in that the principle of the image enhancement method of canceling the mask pattern diffracted light by the shifter transmitted light is used. Further, in the first embodiment, the transmittance of the phase shifter is appropriately set with respect to the mask pattern line width, whereas in the second embodiment, the opening width with respect to the mask pattern line width. Is set appropriately.

  FIG. 18A is a plan view of a photomask having a mask pattern including a light shielding film and an opening provided in the light shielding film and serving as a phase shifter. As shown in FIG. 18A, a transparent film 111 that is patterned into a mask pattern and is used as a phase shifter is formed on a transparent substrate 110 so as to cover the transparent film 111. A light shielding film 112 such as a chromium film is formed. In addition, the light shielding film 112 is provided with an opening 113 so as to expose the transmissive film 111, whereby the opening 113 functions as a phase shifter. In FIG. 18A, the transmittance (T) of the permeable film 111 is 50%, the mask pattern line width is L, and the width of the opening 113 (hereinafter referred to as the opening width) is S. It is.

  FIG. 18B shows how exposure is performed using the photomask shown in FIG. As shown in FIG. 18B, the exposure light 114 passes through the periphery of the mask pattern in the transmissive substrate 110 to become the first transmitted light 115 and the second transmitted light 116 through the opening 113. Become.

  FIG. 19A shows a position corresponding to the AA ′ line in FIG. 18A on the material to be exposed when the opening width S is variously changed in the exposure using the photomask shown in FIG. The simulation result of the light intensity distribution transcribed in FIG. The simulation conditions are as follows: exposure light wavelength λ = 0.193 μm, exposure device projection optical system NA = 0.6, exposure device interference σ = 0.8, mask pattern line width L = 0. 1 μm. Further, the point O on the line AA ′ is located at the center of the mask pattern.

  As shown in FIG. 19 (a), as the opening width S increases, the light intensity at the position (0 on the horizontal axis) corresponding to the mask pattern center O on the material to be exposed decreases, and the light intensity distribution. The shape of is getting better. Further, when the opening width S is 0 (when the mask pattern is made of a complete light shielding film), the shape of the light intensity distribution is the worst. That is, as compared with the simulation result shown in FIG. 9A, increasing the width of the opening provided in the mask pattern has the same effect as increasing the transmittance of the phase shifter provided in the mask pattern. Recognize.

  FIG. 19B shows the point of FIG. 18A on the material to be exposed when the mask pattern line width L and the opening width S are variously changed in the exposure using the photomask shown in FIG. The simulation result of the light intensity generated at the position corresponding to O is shown as a contour line of the light intensity with the mask pattern line width L and the opening width S taken on the vertical axis and the horizontal axis, respectively.

  In FIG. 19B, the shaded area indicates the combination condition of the mask pattern line width L and the opening width S that maximizes the effective light shielding property of the mask pattern. That is, this combination condition is a condition in which the light intensities of the mask pattern diffracted light and the shifter transmitted light are offset. Therefore, based on this combination condition, for each mask pattern line width L, an opening width S that maximizes the effective light shielding property of each mask pattern is determined. The shape of the projected light intensity distribution can be made close to a desired shape.

  By the way, in the photomask shown in FIG. 18A, even when the opening width S is equal to the mask pattern line width L (when the light shielding film 112 is not provided on the transmissive film 111 serving as the phase shifter). In addition, the maximum value of the shifter transmitted light is limited by the transmittance of the transmissive film 111. On the other hand, in the second embodiment, the transmittance of the phase shifter is preferably high unless there is a special reason for suppressing the maximum value of the transmittance of the phase shifter.

  Therefore, in the second embodiment, instead of the photomask as shown in FIG. 18A, a photomask as shown in FIG. 20A, that is, a thickness that generates an optical path difference corresponding to a phase difference of 180 degrees. It is preferable to use a photomask provided with a phase shifter formed by engraving only a transmissive substrate. In this case, the transmittance of the phase shifter is substantially equal to the transmittance of the transmissive substrate. In the present specification, the transmittance of the transparent substrate is used as the transmittance reference (1.0).

  FIG. 20A is a plan view of a photomask having a mask pattern including a light shielding film and an opening provided in the light shielding film and serving as a phase shifter. As shown in FIG. 20A, a light shielding film 121 such as a chromium film having an outer shape of a mask pattern is formed on a transparent substrate 120. In addition, an opening 123 is provided in the light shielding film 121, and an engraved portion 122 serving as a phase shifter is formed below the opening 123 in the transmissive substrate 120. In FIG. 20A, the mask pattern line width is L, and the width of the opening 123 (hereinafter referred to as the opening width) is S.

  FIG. 20B shows a state where exposure is performed using the photomask shown in FIG. As shown in FIG. 20B, the exposure light 124 passes through the periphery of the mask pattern in the transmissive substrate 120 to become the first transmitted light 125 and the second transmitted light 126 through the opening 123. Become.

  FIG. 21A shows a position corresponding to the AA ′ line in FIG. 20A on the material to be exposed when the opening width S is variously changed in the exposure using the photomask shown in FIG. The simulation result of the light intensity distribution transcribed in FIG. The simulation conditions are the same as in the case of FIG. Further, the point O on the line AA ′ is located at the center of the mask pattern.

  As shown in FIG. 21A, as the opening width S increases, the light intensity at the position corresponding to the mask pattern center O on the material to be exposed (0 on the horizontal axis) decreases, and the light intensity distribution. The shape of is getting better. Further, when the opening width S is 0 (when the mask pattern is made of a complete light shielding film), the shape of the light intensity distribution is the worst. Furthermore, compared with the simulation result shown in FIG. 19A, the light shielding property of the mask pattern is further improved due to the increased transmittance of the phase shifter.

  FIG. 21B shows the point of FIG. 20A on the material to be exposed when the mask pattern line width L and the opening width S are variously changed in the exposure using the photomask shown in FIG. The simulation result of the light intensity generated at the position corresponding to O is shown as a contour line of the light intensity with the mask pattern line width L and the opening width S taken on the vertical axis and the horizontal axis, respectively. Comparing the simulation result shown in FIG. 21 (b) with the simulation result shown in FIG. 19 (b), the smaller mask is obtained in FIG. 21 (b) due to the increased transmittance of the phase shifter. It can be seen that the effective light shielding property of the mask pattern is kept high even with respect to the pattern line width L.

  In FIG. 21B, the shaded area indicates the combination condition of the mask pattern line width L and the opening width S that maximizes the effective light shielding property of the mask pattern. That is, this combination condition (hereinafter referred to as the light shielding maximization condition) is a condition in which the light intensity of each of the mask pattern diffracted light and the shifter transmitted light is offset.

  As shown in FIG. 21B, under the light shielding maximization condition, there is a relationship in which the opening width S increases as the mask pattern line width L decreases. That is, in the second embodiment, when the mask pattern line width L is sufficiently large, the opening width S is set to 0, and the maximum light shielding property shown in FIG. When the opening width S is increased in accordance with the conversion conditions and the mask pattern line width L is reduced to some extent, the mask pattern is configured by only the phase shifter. In other words, the mask pattern structure is continuously formed by the mask pattern line width L. Therefore, the light shielding property of the mask pattern can always be optimized.

  In FIG. 21C, the mask pattern line width L is variously changed in the exposure using the photomask (the “optimized mask” in the figure) in which the light shielding property of the mask pattern is optimized as described above. In this case, a simulation result of light intensity generated at a position corresponding to the center of the mask pattern on the material to be exposed is shown. For comparison, FIG. 21C shows a mask pattern in exposure using a conventional photomask (“chrome mask” in the drawing) provided with a mask pattern made of only a complete light-shielding film such as a chromium film. Also shown are simulation results of light intensities generated at positions corresponding to the center of the mask pattern on the exposed material when the line width L is varied.

  As shown in FIG. 21C, in the exposure using a chrome mask, the light shielding property of the mask pattern starts to decrease when the mask pattern line width L is about 0.2 μm or less. On the other hand, in the exposure using the optimized mask, it is possible to prevent the light shielding property of the mask pattern from being lowered until the mask pattern line width L is about 0.1 μm or less.

  By the way, in FIG. 19B or FIG. 21B, by actually calculating the light intensity distribution transferred onto the exposed material using various mask pattern line widths L and opening widths S, A combination condition (light shielding maximization condition) of the mask pattern line width L and the opening width S that maximizes the effective light shielding performance of the mask pattern is obtained. However, since it takes a very long calculation time to obtain the light shielding maximization condition by this method, it is difficult to obtain the optimum opening width S with respect to an arbitrary mask pattern line width L, for example.

  Therefore, next, the inventors have found a simple calculation method of the light shielding maximization condition, specifically, a simple method for obtaining the optimum opening width S with respect to an arbitrary mask pattern line width L (hereinafter referred to as the following). Will be referred to as a mask pattern overlay method). However, in the following description, the calculation results are shown on the assumption that the transmittance of the phase shifter is the same as the transmittance (1.0) of the transmissive substrate as the mask substrate, but the transmittance of the phase shifter is not transmitted. If it is not the same as the transmittance of the conductive substrate, the intensity of the shifter transmitted light transmitted through the opening may be converted based on the difference in transmittance.

  FIG. 22 is a schematic diagram showing the principle of the mask pattern superimposing method of the present invention in the case of an image enhancement mask having a mask pattern with a line width L made of a mask enhancer with an opening width S. In the following description, the structure of the present invention in which an opening serving as a phase shifter is provided in a light shielding film in a mask pattern is referred to as a mask enhancer.

  As shown in FIG. 22, in exposure using a photomask (image enhancement mask) having a mask pattern with a line width L made of a mask enhancer with an opening width S, a position corresponding to the mask pattern center on the material to be exposed. The generated light intensity is assumed to be Ie (L, S). In addition, in the exposure using a photomask (light-shielding mask) in which a complete light-shielding film is provided as a mask pattern instead of the mask enhancer of the image enhancement mask, the light intensity generated at a position corresponding to the center of the mask pattern on the material to be exposed Let Ic (L). In addition, a normal light-transmitting portion is provided in place of the opening portion of the image enhancement mask (phase shifter having a transmittance of 1.0), and a light-shielding portion made of a complete light-shielding film is provided in place of the light-transmitting portion of the image enhancement mask. In the exposure using the photomask (transmission mask), the light intensity generated at a position corresponding to the center of the mask pattern on the material to be exposed is defined as Io (S).

At this time, in the image enhancement mask, the intensity of the mask pattern diffracted light generated at a position corresponding to the mask pattern center on the material to be exposed corresponds to Ic (L), and a position corresponding to the mask pattern center on the material to be exposed. The light intensity of the shifter transmitted light generated in (1) corresponds to Io (S). Accordingly, the light intensity Ie (L, S) is approximated by a value obtained by superimposing the light intensity Ic (L) and the light intensity Io (S) in terms of the light intensity on the phase space and superimposing the results. can do. That is,
Ie (L, S) = ((Ic (L)) ^0.5- (Io (S)) ^0.5 ) ²
It is.

Therefore, in the image enhancement mask, the condition for minimizing Ie (L, S), that is, the light shielding maximization condition is
Ic (L) = Io (S)
It is. That is, the mask pattern line width L and the opening width S satisfying Ic (L) = Io (S) may be obtained as the light shielding maximization condition.

  23A to 23C show the center of the mask pattern on the material to be exposed when the mask pattern line width L and the opening width S are varied in the exposure using the image enhancement mask shown in FIG. A simulation result of the light intensity Ie (L, S) generated at the corresponding position is shown as a contour line of the light intensity with the opening width S and the mask pattern line width L taken on the vertical axis and the horizontal axis, respectively. . Here, in each of FIGS. 23A to 23C, the graph representing the relationship of Ic (L) = Io (S) described above is overwritten. The simulation results shown in FIGS. 23A to 23C are obtained using different exposure light sources, and the simulation results shown in FIG. 23A are obtained by normal exposure using a circular light source. The simulation result shown in FIG. 23B is obtained by annular exposure using an annular light source, and the simulation result shown in FIG. This is obtained by quadrupole exposure using a light source located at a point. Other simulation conditions are the exposure light wavelength λ = 0.193 μm and the exposure optical system's projection optical system NA = 0.6.

  As shown in FIGS. 23A to 23C, the dependency of the light intensity Ie (L, S) on the mask pattern line width L and the opening width S is slightly different depending on the shape of the exposure light source. The condition for minimizing the intensity Ie (L, S) can be accurately expressed by the relationship Ic (L) = Io (S) regardless of the shape of the exposure light source.

  FIG. 24 is a schematic diagram showing the principle of the mask pattern superposition method of the present invention in the case of an image enhancement mask having a mask pattern of a square shape (the length of one side is L) made of a mask enhancer having an opening width S. FIG. Also in the image enhancement mask shown in FIG. 24, the light intensity of the mask pattern diffracted light generated at a position corresponding to the mask pattern center on the material to be exposed corresponds to Ic (L), and the mask pattern center on the material to be exposed The light intensity of the shifter transmitted light generated at the corresponding position corresponds to Io (S). Therefore, also in the image enhancement mask shown in FIG. 24, the mask pattern width L and the opening width S that minimize Ie (L, S) can be obtained from the relationship of Ic (L) = Io (S).

  25A to 25C correspond to the mask pattern center on the material to be exposed when the mask pattern width L and the opening width S are variously changed in the exposure using the image enhancement mask shown in FIG. The simulation result of the light intensity Ie (L, S) generated at the position is shown as a contour line of the light intensity with the opening width S and the mask pattern width L taken on the vertical axis and the horizontal axis, respectively. Here, in each of FIGS. 25A to 25C, the graph representing the relationship of Ic (L) = Io (S) described above is overwritten. The simulation results shown in FIGS. 25A to 25C are obtained using different exposure light sources, and the simulation results shown in FIG. 25A are obtained by normal exposure using a circular light source. The simulation result shown in FIG. 25B is obtained by annular exposure using an annular light source, and the simulation result shown in FIG. This is obtained by quadrupole exposure using a light source located at a point. Other simulation conditions are the exposure light wavelength λ = 0.193 μm and the exposure optical system's projection optical system NA = 0.6.

  As shown in FIGS. 25A to 25C, the dependency of the light intensity Ie (L, S) on the mask pattern width L and the opening width S is slightly different depending on the shape of the exposure light source. The condition for minimizing Ie (L, S) can be accurately expressed by the relationship Ic (L) = Io (S) regardless of the shape of the exposure light source.

  That is, the shape of the mask pattern to which the mask pattern overlay method of the present invention can be applied is not particularly limited.

Specifically, the calculation method of the opening width that maximizes the effective light shielding property of the mask pattern in the image enhancement mask having an arbitrarily shaped mask pattern made of the mask enhancer is as follows.
(1) In light exposure using a light shielding mask in which a complete light shielding film is provided as a mask pattern instead of the mask enhancer of the image enhancement mask, light intensity Ic ( r) is calculated.
(2) The aperture width is determined so that the intensity of light transmitted through the aperture is equal to Ic (r), and a phase shifter is provided in the aperture.

  Since the opening width cannot be made larger than the mask pattern width, if the opening width obtained by the above-described method exceeds the mask pattern width, the entire mask pattern is used as a phase shifter. In addition, if the mask pattern as a whole is a phase shifter and the light shielding property is insufficient, the dimension of the original mask pattern may be enlarged and the opening width may be obtained again by the method described above.

  In the above description, a mask pattern having a simple shape has been targeted. However, when the mask pattern has a complicated shape, the mask pattern is divided into a plurality of patterns having a simple shape, The mask pattern overlay method of the present invention may be applied for each pattern. Thereby, the optimum opening width is determined for each divided pattern.

  As described above, in the photomask according to the second embodiment, after calculating the intensity of the mask pattern diffracted light, the mask enhancer is set so that the intensity of the shifter transmitted light becomes equal to the intensity of the mask pattern diffracted light. By calculating the opening width of the mask pattern, the light shielding property of the mask pattern can be maximized. In addition, when the mask pattern has a complicated shape, the mask pattern is divided into a plurality of patterns having a simple shape, and an opening is made so that the intensity of transmitted light is equal to the intensity of diffracted light for each pattern. By calculating the part width, the light shielding property can be maximized over the entire mask pattern.

  By the way, in the second embodiment, the shape of the opening of the mask enhancer for generating the shifter transmitted light is different from the shape of the phase shifter of the first embodiment and does not need to match the shape of the mask pattern. . In other words, the shape of the opening of the mask enhancer can be arbitrarily set within a range that fits within the mask pattern. In the image enhancement method of the present invention, the method of controlling the shifter transmitted light by changing the transmittance of the phase shifter in the first embodiment is the same as the size of the opening of the mask enhancer in the second embodiment. This can be considered as one of the methods for controlling the shifter transmitted light by changing the light. That is, one mask pattern made of a phase shifter having a predetermined transmittance is provided in a light-shielding film having the same outer shape as the one mask pattern with an opening serving as a phase shifter having a transmittance higher than the predetermined transmittance. Other mask patterns can be substituted. Furthermore, generally speaking, an opening having a predetermined transmittance and a predetermined shape and size is equivalent to an opening having a transmittance different from the predetermined transmittance and a shape and size different from the predetermined shape and size. Can be replaced. However, this is realized under the condition that the dimension of the mask pattern is about half or less of λ / NA. Here, an important point is that an opening provided in a fine mask pattern has the same optical behavior regardless of the shape of the opening if the intensity of light transmitted therethrough is the same. . Hereinafter, an effect that occurs when this is used in the second embodiment will be described.

  FIG. 26A shows a translucent pattern made of a translucent film having a line width L and a transmittance T. Here, it is assumed that L = 0.1 μm.

  FIGS. 26B to 26D each show an opening pattern in which an opening having a transmittance of 1.0 is provided in a transmissive substrate. FIG. 26B shows a width at the center of the region of line width L. FIGS. FIG. 26C shows an opening pattern in which an opening of one line of S (S <L) is provided, and FIG. 26C shows an opening of two lines of width S / 2 in the region of line width L. FIG. 26D shows an opening pattern in which a square opening having an area S is provided in the center of a region having an area L. FIG.

  FIG. 26 (e) shows each aperture pattern of light transmitted through the aperture when the aperture pattern shown in each of FIGS. 26 (b) to (d) is irradiated with light while changing the dimension S from 0 to L. The result of having evaluated the light intensity in the position corresponding to a center by simulation is shown. In FIG. 26 (e), the light intensity at the position corresponding to the center of the semi-transparent pattern of the light transmitted through the semi-transparent film when the semi-transparent pattern shown in FIG. Using the transmissivity T (vertical axis) of the translucent film when it becomes equal to the light intensity at the position corresponding to each opening pattern center, the light intensity at the position corresponding to each opening pattern center is evaluated. In FIG. 26 (e), the light intensity at a position corresponding to the center of each aperture pattern is plotted as a function having the aperture area ratio S / L (horizontal axis) as a parameter.

  As shown in FIG. 26 (e), the dependence of the transmissivity T (hereinafter referred to as equivalent transmissivity T) of the translucent film in the translucent pattern equivalent to each aperture pattern on the aperture area ratio S / L is as follows. Although slightly different depending on the shape of the opening pattern, it can be seen that there is a strong correlation between the equivalent transmittance T and the opening area ratio S / L in any opening pattern.

  FIG. 27A shows the intensity distribution of the light transmitted through the semitransparent film when the semitransparent pattern shown in FIG. Show. In FIG. 27A, position 0 (the origin of the horizontal axis) corresponds to the center of the translucent pattern. FIG. 27A also shows the simulation result of the focus characteristic of the light intensity distribution. The focus characteristics are evaluated for the best focus position and the positions defocused by 0.15, 0.30, and 0.45 μm from the best focus position, respectively.

  27B to 27D show the intensity distribution of the light transmitted through the opening when the opening patterns shown in FIGS. 26B to 26D are irradiated with light, and the equivalent transmittance T is 0. 5 shows the result of evaluation by simulation. At this time, as can be seen from FIG. 26 (e), S in the opening pattern shown in FIG. 26 (b) is 0.068 μm, and S in the opening pattern shown in FIG. 26 (c) is 0.070 μm. S in the opening pattern shown in FIG. 26 (d) is 0.069 μm (however, in any case, L is 0.10 μm). In FIGS. 27B to 27D, position 0 (the origin of the horizontal axis) corresponds to the center of each opening pattern. FIGS. 27B to 27D also show the simulation results of the focus characteristics of the light intensity distribution. The focus characteristics are evaluated for the best focus position and the positions defocused by 0.15, 0.30, and 0.45 μm from the best focus position, respectively.

  As shown in FIGS. 27B to 27D, it can be seen that the optical characteristics of the aperture patterns are exactly the same if the light intensities at the positions corresponding to the centers match.

  Further, in the image enhancement method of the present invention in which the mask pattern diffracted light is canceled by the shifter transmission light, it is only necessary to adjust the effective intensity of the shifter transmission light, and if the intensity is the same, a method of generating the shifter transmission light The method that can be most easily realized may be selected.

  Furthermore, if the aperture area ratio is the same, the dependence of the intensity of the shifter transmitted light transmitted through the aperture on the aperture shape is small and not strictly, but practically the intensity of the shifter transmitted light depends on the aperture area ratio. It can be determined almost uniquely.

For example, as shown in FIG. 26 (e), the dependency of the equivalent transmittance T of each opening pattern shown in FIGS. 26 (b) to (d) on the opening area ratio S / L is
T = 1.45 × (S / L) −0.45
Can be approximately represented by: This approximation is inaccurate for transmissions as low as 0.1 or less, but is quite accurate for transmissions above 0.2. However, in the above equation, the coefficient (1.45) and the constant (0.45) of (S / L) vary depending on the wavelength of the exposure light and the mask pattern dimensions.

  Therefore, in the photomask according to the second embodiment, the shape of the opening in the mask pattern can be arbitrarily modified within a range in which the opening area ratio is kept constant. For example, when the mask pattern is actually formed, it is not preferable that an extremely long light-shielding film pattern is generated in consideration of the degree of adhesion between the light-shielding film and the substrate. In such a case, for example, by arranging the openings so as not to change the opening area ratio for each region in the range of the radius λ / NA so that the elongated light shielding film pattern does not exist alone. Good.

  In the second embodiment, when the effective light shielding property of the mask pattern is maximized in consideration of the principle of the image enhancement method of the present invention, it is based on the relationship of Ic (L) = Io (S). However, if the effective light shielding property of the mask pattern is made higher than that of the mask pattern made of a complete light shielding film, the relationship of Ic (L) = Io (S) is almost satisfied. As described above, the opening width S may be determined.

Specifically, as described above, the light intensity Ie (generated at the position corresponding to the center of the mask pattern on the exposed material by the image enhancement mask having the mask pattern with the line width L made of the mask enhancer with the opening width S. L, S) is
Ie (L, S) = ((Ic (L)) ^0.5- (Io (S)) ^0.5 ) ²
(Ic (L) is the light intensity of the mask pattern diffracted light, and Io (S) is the light intensity of the shifter transmitted light). Accordingly, the condition that the shifter transmitted light becomes excessive and the effective light shielding property of the mask pattern decreases until it becomes the same as that of the mask pattern made of a complete light shielding film is: Ie (L, S) = Ic (L)
− ((Ic (L)) ^0.5 − (Io (S)) ^0.5 ) = (Ic (L)) ^0.5
Can be considered. At this time,
(Io (S)) ^0.5 = 2 × (Ic (L)) ^0.5
So
Io (S) = 4 × (Ic (L))
Holds. That is, when the light intensity of the shifter transmitted light reaches four times the light intensity of the mask pattern diffracted light, the effective light shielding property of the mask pattern becomes the same as that of the mask pattern made of a complete light shielding film. In other words, by setting the opening width S so that the light intensity of the shifter transmitted light is four times or less than the light intensity of the mask pattern diffracted light, the mask pattern has an effective light shielding property of the complete light shielding film. This can be improved over the mask pattern.

In the second embodiment, the opening width may be determined as follows in response to a more general situation. That is, when it is desired to reduce the light intensity Ih generated at the position corresponding to the center of the mask pattern on the exposed material to 1 / D of the intensity Ic of the mask pattern diffracted light,
− ((Ic) ^0.5 − (Io)) ^0.5 ) <(Ic / D) ^0.5
<((Ic) ^0.5- (Io)) ^0.5 )
An opening width that satisfies the above may be used. Specifically, when D = 3, the opening width is set so that Io (light intensity of the shifter transmitted light) is not less than 0.18 times and not more than 2.5 times Ic. When D = 5, the opening width is set so that Io is not less than 0.31 times and not more than 2.1 times Ic. When D = 10, the opening width S is set so that Io is 0.48 times or more and 1.7 times or less of Ic. In practice, it is not always necessary to maximize the light-shielding property of all mask patterns. Therefore, if the opening width is set so that Io is about 1/3 times or more than Ic and about 2 times or less, the mask pattern The light-shielding property is sufficiently improved.

  In the pattern forming method according to the second embodiment, that is, the pattern forming method using the photomask according to the second embodiment, the resist film may be a positive type or a negative type. A thing may be used. When using a positive resist film, the positive resist film irradiated with the exposure light is developed, and other portions other than the portion corresponding to the mask pattern in the positive resist film are removed, whereby a resist having a mask pattern shape is obtained. A pattern can be formed. When using a negative resist film, the negative resist film irradiated with the exposure light is developed, and the portion corresponding to the mask pattern in the negative resist film is removed, thereby providing a resist pattern having a mask pattern-shaped opening. Can be formed. Regardless of whether a positive resist film or a negative resist film is used, if the mask pattern width L is smaller than about 0.4 × λ / NA, the dimensions of the resist pattern compared to the conventional case The accuracy can be greatly improved.

(Modification of the second embodiment)
Hereinafter, a photomask according to a second embodiment of the present invention, a method for producing the photomask, and a pattern forming method using the photomask will be described with reference to the drawings.

  The modification of the second embodiment is different from the second embodiment as follows. In other words, in the second embodiment, it has been implicitly assumed that the light-shielding portion constituting the mask pattern made up of the mask enhancer is a complete light-shielding portion, but in the modification of the second embodiment, the mask A semi-light-shielding part having a predetermined transmittance for exposure light is used as the light-shielding part constituting the pattern. It is ideal that the semi-light-shielding portion does not cause a phase difference with respect to the exposure light between the translucent portion, but this phase difference is not less than (−30 + 360 × n) degrees and (30 + 360 ×). n) degrees or less (where n is an integer) is considered negligible.

  In the modification of the second embodiment, the principle of the image enhancement method can be considered basically the same as in the case of FIG. 3, but slightly different effects are produced. Hereinafter, the effect produced by using the semi-light-shielding portion as the light-shielding portion constituting the mask pattern will be described with reference to FIGS. Here, FIG. 28 shows a case where the line width L of the mask pattern made of the mask enhancer is sufficiently narrow, that is, the line width L is smaller than 0.8 × λ / NA (λ is the wavelength of exposure light, and NA is the numerical aperture). FIG. 29 is a schematic diagram showing the principle of the image enhancement method in the case of a small case, and FIG. 29 shows a case where the line width L of the mask pattern formed by the mask enhancer is sufficiently thick, that is, the line width L is larger than 0.8 × λ / NA. It is a schematic diagram which shows the principle of the image enhancement method in the case.

  As shown in FIGS. 28 and 29, the image enhancement mask includes a semi-light-shielding mask provided with a semi-light-shielding portion corresponding to the mask pattern of the image enhancement mask, and a phase shifter of the image enhancement mask on the complete light-shielding portion covering the mask surface. And a phase shift transmission mask provided with a corresponding phase shift pattern. In FIGS. 28 and 29, the amplitude intensity of light transmitted through the semi-light-shielding mask, the phase shift transmission mask, and the image enhancement mask and transferred to the position corresponding to the line segment AA ′ is also shown. .

  First, as shown in FIG. 28, when the line width L of the mask pattern made of the mask enhancer is smaller than 0.8 × λ / NA, when the semi-light-shielding part is used as the light-shielding part, the principle of the image enhancement method is This is almost the same as the case of FIG. 3 using a complete light-shielding part as the light-shielding part. However, as can be seen from the amplitude intensity of the light transmitted through the semi-light-shielding mask, the intensity transferred to the position corresponding to the center of the semi-light-shielding pattern made of the semi-light-shielding part is not only due to the light from the periphery of the semi-light-shielding pattern. There is also a light-transmitting pattern that is transmitted through light. For this reason, the light intensity transferred to the position corresponding to the center of the semi-light-shielding pattern shown in FIG. 28 is increased by the amount of light transmitted through the semi-light-shielding pattern, compared to the case where the complete light-shielding part is used as the light shielding part. . Therefore, in order to cancel the increase, it is necessary to increase the width of the phase shifter as compared with the case where the complete light-shielding part is used as the light-shielding part. This is the only difference between using a semi-light-shielding part as a light-shielding part and a complete light-shielding part as a light-shielding part when the line width L of the mask pattern is smaller than 0.8 × λ / NA. It is.

  By the way, when the line width of the complete light-shielding pattern composed of the complete light-shielding portion is larger than 0.8 × λ / NA, there is almost no light that wraps around from the pattern periphery to the back side of the pattern. The intensity of the light transferred to is almost zero. Therefore, when the phase shifter is arranged in such a complete light shielding pattern, the contrast is lowered no matter how small the width of the phase shifter is.

  On the other hand, as shown in FIG. 29, when the line width L of the mask pattern made of the mask enhancer is larger than 0.8 × λ / NA, when the semi-light-shielding part is used as the light-shielding part, the line width L is 0. No matter how much larger than .8 × λ / NA, there is light that passes through the semi-light-shielding pattern of the semi-light-shielding mask corresponding to the image enhancement mask. For this reason, the intensity of light transferred to a position corresponding to the center of the semi-light-shielding pattern does not become zero. Therefore, if the phase shifter has a dimensional width that transmits light having an intensity that directly cancels the light transmitted through the semi-light-shielding pattern at this time, the contrast is not lowered no matter where the phase-shifter is arranged in the semi-light-shielded pattern. Further, when the line width L of the mask pattern is at least twice as large as 0.8 × λ / NA, a plurality of phase shifters having the above-described dimensional width can be used if they are arranged at a distance of 0.8 × λ / NA or more. It may be arranged.

  Next, a description will be given of an advantage generated in mask creation by using a semi-light-shielding portion instead of a complete light-shielding portion as a light-shielding portion constituting a mask pattern in an image enhancement mask.

  FIG. 30A is a plan view of a photomask provided with a complete light-shielding pattern with a line width L made of a complete light-shielding portion, and light transferred through the mask to a position corresponding to a line segment AA ′. FIG. 30B shows a plan view of a photomask provided with a semi-light-shielding pattern having a line width L made of a semi-light-shielding part, and corresponds to the line segment AA ′ through the mask. It shows the light intensity of the light transferred to the position.

  When the line width L of the complete light shielding pattern is larger than 0.8 × λ / NA, the intensity of light transferred to the position corresponding to the center of the complete light shielding pattern is 0 as shown in FIG. It becomes. That is, when a complete light-shielding portion is used as the light-shielding portion constituting the mask pattern in the image enhancement mask, the width of the phase shifter decreases as the width L of the complete light-shielding pattern increases as shown in FIG. When the line width L becomes larger than 0.8 × λ / NA, it is necessary to eliminate the phase shifter. However, when actually creating a mask, the change of the line width of the phase shifter is changed in units of a mask grid (minimum width capable of adjusting the mask dimension: usually about 1 nm), and the mask. Due to processing limitations, there is also a limitation on the minimum line width of the phase shifter that can be created. For this reason, if the complete light-shielding part is used as the light-shielding part constituting the mask pattern in the image enhancement mask, it is impossible to always arrange the optimum phase shifter in the light-shielding pattern.

  On the other hand, as shown in FIG. 30B, even when the semi-light-shielding pattern has a line width larger than 0.8 × λ / NA, the light intensity corresponding to the center of the semi-light-shielding pattern is 0. In other words, there is a residual light intensity due to light transmitted through the semi-light-shielding pattern. That is, any line width phase shifter commensurate with the residual light intensity can be arranged in a semi-light-shielding pattern having any line width. Specifically, as shown in FIG. 30 (d), the line width of the phase shifter decreases as the line width L of the semi-light-shielding pattern increases, but the line width of the phase shifter matches the above-mentioned residual light intensity. When it becomes smaller, it is not necessary to further reduce the line width of the phase shifter. As described above, when a semi-light-shielding portion is used as the light-shielding portion constituting the mask pattern in the image enhancement mask, a phase shifter having a predetermined line width can be arranged at an arbitrary position in the semi-light-shielding pattern. Therefore, if the transmissivity of the semi-light-shielding part is adjusted so that the residual light intensity of the semi-light-shielding part corresponds to the minimum width of the phase shifter that can be created on the actual mask, the optimum phase in any semi-light-shielding pattern Shifters can be placed. If the transmissivity of the semi-light-shielding portion at this time is low enough not to expose the resist, a phase shifter is disposed or erased in a semi-light-shielding pattern having a line width of 0.8 × λ / NA or more. Moreover, it can be decided arbitrarily. Furthermore, if the distance between the phase shifters in the semi-light-shielding pattern is 0.8 × λ / NA or more, a plurality of phase shifters can be arranged in the semi-light-shielding pattern. In this case, if the phase shifter is disposed not at the center of the semi-light-shielding pattern but at the periphery of the semi-light-shielded pattern, contrast enhancement at the periphery of the semi-light-shielded pattern can also be realized.

  As described above, according to the modification of the second embodiment, by using a semi-light-shielding portion instead of the complete light-shielding portion as the light-shielding portion constituting the mask pattern made of the mask enhancer, the light intensity of the mask pattern is increased. The arrangement of the phase shifter for enhancing the contrast can be accurately realized for any pattern shape. In addition, since the phase shifter can be arranged at an arbitrary position in the mask pattern for the light transmitted through the semi-light-shielding portion constituting the mask pattern, the contrast is emphasized by arranging the phase shifter. There is also a specific effect that can be arbitrarily set in the mask pattern.

  In the modification of the second embodiment, it is preferable that the transmittance of the semi-light-shielding part used as the light-shielding part constituting the mask pattern made of the mask enhancer is about 15% or less. The reason is as follows. That is, assuming that the light intensity Ith is the critical intensity to which the resist film is exposed and the light intensity Ib is the background intensity of the light transmitted through the semi-light-shielding portion, the higher the Ith / Ib, the more the resist film is reduced during pattern formation. This means that the higher the value, the better. In general, the value of Ith / Ib is desired to be 2 or more. However, since Ith / Ib becomes lower as the transmittance of the semi-light-shielding portion becomes higher, it is not preferable that the transmittance of the semi-light-shielding portion becomes too high for improvement of Ith / Ib. Specifically, since the transmissivity of the semi-light-shielding portion is about 15% and Ith / Ib is smaller than 2, the transmissivity of the semi-light-shielding portion is preferably about 15% or less.

(Third embodiment)
Hereinafter, in the pattern formation method according to the third embodiment of the present invention, the focus margin is improved by exposure using a photomask having a mask pattern made of a mask enhancer (an example of a photomask according to the second embodiment). The method will be described as an example with reference to the drawings. The focus margin improvement effect in the third embodiment is realized by a combination of the image enhancement method and the exposure method of the present invention in which the mask pattern diffracted light is canceled by the shifter transmitted light. It can be considered that increasing or decreasing the opening width of the mask enhancer in the photomask according to the present invention has the same effect as increasing or decreasing the transmittance of the phase shifter in the photomask according to the first embodiment. That is, the pattern forming method according to the third embodiment is a pattern forming method that can be realized by using either of the photomasks according to the first or second embodiment.

  FIGS. 31A to 31G show the incident direction of exposure light from the light source to the photomask (hereinafter simply referred to as the exposure light incident direction) in the light intensity distribution generated on the material to be exposed by exposure using the mask enhancer. It is a figure for demonstrating the dependence with respect to). Specifically, a simulation result was performed to evaluate how the profile shape of the light intensity distribution formed by canceling the mask pattern diffracted light with the shifter transmitted light is affected by the exposure light incident direction. Is shown. More specifically, as shown in FIG. 31A, exposure is performed by exposure using a linear mask enhancer (mask pattern width L, opening width S) provided in parallel along the Y axis of the light source coordinates. The light intensity distribution transferred onto the material is calculated and evaluated by simulation for various exposure light incident directions.

  FIGS. 31B to 31D show the arrangement positions of the small light sources used in the simulation on the light source coordinates, and FIG. 31B shows that the exposure light incident direction is incident from the center direction of the light source coordinates (perpendicular incidence). (C) is a light source in which the exposure light incident direction is obliquely incident from the X-axis direction or the Y-axis direction of the light source coordinates, and (d) is a 45-degree direction of the exposure light incident direction ( Y = X or Y = -X linear direction). Here, the light sources shown in FIGS. 31B to 31D used in the simulation are circular light sources having a radius of 0.05 on the light source coordinates. However, all numerical values on the light source coordinates are normalized by the numerical aperture NA of the reduction projection optical system of the exposure machine.

  FIGS. 31E to 31G show light intensity distributions generated at positions corresponding to the X axis of FIG. 31A on the material to be exposed by exposure with various mask pattern structures. 31E to 31G, 0 on the horizontal axis (position) is a position corresponding to the mask pattern center.

  Here, FIG. 31E shows the light intensity distribution in each exposure light incident direction when the entire mask pattern having a width L = 0.12 μm is made of a light shielding film (S = 0.0 μm). However, optical conditions other than the exposure light incident direction are the same for the exposure light wavelength λ = 193 nm and the numerical aperture NA = 0.6.

  As shown in FIG. 31E, the effective light shielding property of the mask pattern differs depending on the exposure light incident direction, and the light shielding property in the case of oblique incidence from the 45 degree direction is the worst.

  FIG. 31F shows the light intensity distribution when the mask pattern width L is adjusted so that the light intensity at position 0 on the light intensity distribution shown in FIG. Show.

  FIG. 31G shows an opening serving as a phase shifter so that the effective light shielding property of the mask pattern with the width L adjusted as shown in FIG. 31F in each exposure light incident direction is maximized. The light intensity distribution when (width S) is provided by the image enhancement method of the present invention is shown. Here, in order to observe how the shifter transmitted light affects the profile shape of the light intensity distribution by canceling the mask pattern diffracted light, the arrangement of the light sources shown in FIGS. The evaluation is performed with the same light intensity of the shifter transmitted light and the mask pattern diffracted light at the position. Further, the scale of the vertical axis (light intensity) in FIG. 31 (g) is offset by 0.1 so that the profile shapes of the light intensity distributions shown in FIGS. 31 (f) and 31 (g) can be easily compared. is doing.

  Comparing the profile shapes of the light intensity distributions shown in FIGS. 31 (f) and 31 (g), respectively, when the exposure light incident direction is from the center direction of the light source coordinates, the mask pattern diffracted light is converted by the shifter transmitted light. By canceling out, it can be seen that the profile shape of the light intensity distribution is flat at a position corresponding to the center of the mask pattern. This means that while the light shielding property of the mask pattern is improved, the profile shape of the light intensity distribution is dull (deteriorated).

  In addition, the profile shapes of the light intensity distributions shown in FIGS. 31 (f) and 31 (g) are compared when the exposure light incident direction is oblique incidence from the X-axis direction or the Y-axis direction of the light source coordinates. It can be seen that even if the mask pattern diffracted light is canceled by the shifter transmitted light, the profile shape of the light intensity distribution hardly changes.

  On the other hand, when the profile shape of the light intensity distribution shown in each of FIGS. 31 (f) and 31 (g) is compared in the case where the exposure light incident direction is oblique incidence from the 45-degree direction of the light source coordinates, the shifter transmitted light is compared. By canceling out the mask pattern diffracted light, the profile shape of the light intensity distribution is sharpened (improved) at a position corresponding to the center of the mask pattern.

  That is, by using the image enhancement method of the present invention in which the mask pattern diffracted light is canceled by the shifter transmitted light, the light shielding property at the position corresponding to the mask pattern center can be maximized in any exposure light incident direction. However, the influence of the light intensity distribution on the profile shape varies depending on the exposure light incident direction.

  Hereinafter, in the image enhancement method of the present invention described above, by using the fact that the profile shape of the light intensity distribution does not deteriorate when oblique incidence from the 45 degree direction is used as the exposure light incident direction, the exposure is performed using a mask enhancer. A method for improving the defocus characteristic in pattern formation will be described.

  FIGS. 32A to 32D and FIGS. 33A to 33D are diagrams illustrating the principle of a defocus characteristic improving method using a mask enhancer. 32A to 32D and FIGS. 33A to 33D are all calculated from the oblique incidence exposure from the 45-degree direction of the light source coordinates shown in FIG. 31D. It is a simulation result using.

  FIG. 32A shows the light intensity distribution projected onto the material to be exposed in the exposure using the photomask in which the light shielding film having the width L and the opening having the width S are provided independently. FIG. 32A shows the result when L = 0.15 μm and the result when S = 0.045 μm, 0.060 μm, 0.075 μm and 0.090 μm. . In FIG. 32A, 0 on the horizontal axis (position) is a position corresponding to the center of the light shielding film or the center of the opening on the material to be exposed.

  FIG. 32B shows how the light intensity at a position corresponding to the center of the light shielding film or the center of the opening in the light intensity distribution shown in FIG. 32A changes with respect to defocus in exposure.

  As shown in FIG. 32B, the light intensity generated by the light shielding film increases as the defocus increases, whereas the light intensity generated by the opening decreases as the defocus increases.

  By the way, when the mask pattern diffracted light and the shifter transmitted light are caused to interfere with each other as light having opposite phases by providing an opening serving as a phase shifter in the light shielding film to create a mask enhancer structure, this is realized by the mask enhancer. The light intensity is proportional to the difference between the light intensity of the mask pattern diffracted light and the light intensity of the shifter transmitted light. At this time, if the light intensity of the shifter transmitted light is set to be larger than the light intensity of the mask pattern diffracted light at the best focus (defocus is 0), the difference in the light intensity decreases as the defocus increases. Then, the light intensity difference becomes 0 at a certain defocus amount, and thereafter, the light intensity of the mask pattern diffracted light becomes larger than the light intensity of the shifter transmitted light, and the difference of each light intensity increases as the defocus increases. To do.

  In the third embodiment, this effect can be used to improve the defocus characteristic. For example, a photomask provided with a mask pattern having a pattern width L (L = 0.15 μm) made of a mask enhancer having an opening width S (S = 0.045 μm, 0.060 μm, 0.075 μm, 0.090 μm). The light intensity at the position corresponding to the mask pattern center on the material to be exposed in the exposure used is the light intensity generated by the light shielding film and the light intensity generated by the opening shown in FIG. It is obtained by adding together. At this time, first, by taking the square root of each light intensity, the light intensity on the phase space generated by each of the light shielding film and the opening can be obtained. The light intensity in the phase space generated by the opening serving as the phase shifter is a negative value in consideration of the phase.

  FIG. 32 (c) shows how the light intensity on the phase space generated by each of the light shielding film and the opening obtained as described above changes with respect to defocus in exposure.

  FIG. 32D shows a state in which the total value of the light intensity on the phase space generated by each of the light shielding film and the opening shown in FIG. 32C changes with respect to defocus in exposure. . That is, the result shown in FIG. 32D is that the pattern width L (L = 0.15 μm) made of the mask enhancer having the opening width S (S = 0.045 μm, 0.060 μm, 0.075 μm, 0.090 μm). 3 shows the defocus characteristic of light intensity (in phase space) at a position corresponding to the center of the mask pattern on the material to be exposed in exposure using a photomask provided with the above mask pattern.

  As shown in FIG. 32 (d), when the opening width S = 0.06 μm, the mask pattern diffracted light and the shifter transmitted light completely cancel each other out at the best focus. The light intensity (in phase space) is almost zero. On the other hand, when the opening width S is 0.06 μm or more, the shifter transmitted light becomes excessive in the best focus, and the light intensity (in the phase space) at the position corresponding to the center of the mask pattern has a negative value. . However, even when the shifter transmitted light becomes excessive at the best focus, the mask pattern diffracted light changes to an excessive state as the defocus increases.

  FIG. 33A shows a case where the light intensity in the real space (corresponding to the energy intensity) obtained by squaring the light intensity in the phase space shown in FIG. Shows how it changes. That is, the result shown in FIG. 33A is the pattern width L (L = 0.15 μm) made of the mask enhancer having the opening width S (S = 0.045 μm, 0.060 μm, 0.075 μm, 0.090 μm). 3 shows defocus characteristics of light intensity (in real space) at a position corresponding to the center of the mask pattern on the material to be exposed in exposure using a photomask provided with the above mask pattern.

  As shown in FIG. 33A, in the case of a mask enhancer in which the shifter transmitted light becomes excessive in the best focus, the effective light shielding performance is maximized in the defocus state. At this time, if the effective light-shielding performance at the best focus is not within the range that is not a problem in practice, the focus position that maximizes the light-shielding performance is caused by defocusing by the amount moved to the defocusing position. Deterioration of light shielding property is less likely to occur. That is, this is the principle of the defocus characteristic improving method using the mask enhancer in the third embodiment.

  FIG. 33B shows the light intensity distribution projected onto the material to be exposed when the mask enhancer having each opening width S described above is used at the best focus. As shown in FIG. 33B, a light intensity distribution having substantially the same contrast is realized in each opening width S regardless of whether the shifter transmitted light is optimal or excessive. That is, for all the opening widths S, a sufficient light shielding property of the mask pattern is realized.

  FIG. 33C shows the light intensity distribution projected on the material to be exposed when the mask enhancer having the opening width S of 0.09 μm is used at various defocus positions. As shown in FIG. 33 (c), according to this mask enhancer, the light intensity distribution at the position corresponding to the outside of the mask pattern area is changed by defocusing, but the position corresponding to the inside of the mask pattern area. The light intensity distribution at has hardly changed by defocusing. For reference, FIG. 33D shows the light intensity distribution projected on the material to be exposed when the complete light-shielding film is used as a mask pattern at various defocus positions instead of the mask enhancer.

  As described above, according to the third embodiment, the shifter transmitted light is excessively increased with respect to the mask pattern diffracted light by utilizing the effect that the mask enhancer can control the shifter transmitted light with respect to the mask pattern diffracted light. By setting, the defocus characteristic in the light intensity distribution can be improved, so that the focus margin in pattern formation can be drastically improved.

  In the third embodiment, when the shifter transmitted light is excessively set with respect to the mask pattern diffracted light, if the condition that the light shielding property is not deteriorated as compared with the mask pattern made of a complete light shielding film is provided, the shifter transmitted light The light intensity at the position corresponding to the center of the mask pattern should not be more than four times the light intensity at the position corresponding to the mask pattern center of the mask pattern diffracted light. That is, the upper limit is determined from this condition with respect to the opening width of the mask enhancer (when the transmittance of the phase shifter is adjusted for the control of the shifter transmitted light).

  Up to now, the principle of the defocus characteristic improving method using the mask enhancer has been described with reference to FIGS. 32A to 32D and FIGS. 33A to 33D. When the light intensity distribution is formed by combining the diffracted light and the shifter transmitted light, the profile shape is greatly affected by the exposure light incident direction (see FIG. 31G). Accordingly, the following describes how the defocus characteristic improving method using the mask enhancer is affected by the exposure light incident direction.

  34 (a) to (c), 35 (a) to (c), and 36 (a) to 36 (c) show the dependence of the profile shape change of the light intensity distribution due to defocus on the exposure light incident direction. It is a figure for demonstrating. Specifically, using the exposure light incident directions shown in FIGS. 31B to 31D, adjustment is made so that the light shielding property with respect to each exposure light incident direction is maximized as shown in FIG. The result of having obtained the defocus characteristic of the mask enhancer obtained by simulation is shown. Here, the results shown in FIGS. 34A to 34C are obtained when the exposure light incident direction is made incident from the center direction of the light source coordinates, and FIGS. 35A to 35C show the results. The results shown are the results obtained when the exposure light incident direction is oblique incidence from the X-axis direction or Y-axis direction of the light source coordinates, and the results shown in FIGS. 36A to 36C are the exposure light incident directions. Is a result obtained when oblique incidence is performed from the direction of 45 degrees of the light source coordinates. In addition, the results shown in FIGS. 34A, 35A, and 36A show the light intensity distribution (that is, the mask pattern) when a light shielding film having the same outer dimensions is used as the mask pattern instead of the mask enhancer. FIG. 34 (b), FIG. 35 (b), and FIG. 36 (c) show the defocus characteristics of the light intensity distribution by diffracted light. The results shown in FIG. 34 (b), FIG. FIG. 34C, FIG. 35C, and FIG. 36C show the defocus characteristics of the light intensity distribution (that is, the light intensity distribution by the shifter transmitted light) when the light shielding film is provided. The result shows the defocus characteristic of the light intensity distribution (that is, the light intensity distribution by the combined light of the mask pattern diffracted light and the shifter transmitted light) when using the mask enhancer. Here, in order to easily compare the results shown in FIG. 34 (c), FIG. 35 (c), and FIG. 36 (c) with the results shown in other figures, FIG. 34 (c), FIG. 35 (c), The scale of the vertical axis (light intensity) in FIG. 36 (c) is offset by 0.1.

  As shown in FIGS. 34 (b), 35 (b), and 36 (b), the defocus characteristic of the light intensity distribution by the shifter transmitted light has a dependency on the exposure light incident direction. The difference in the defocus characteristic corresponding to each exposure light incident direction is not so large. However, as shown in FIGS. 34 (a), 35 (a), and 36 (a), the defocus characteristic of the light intensity distribution by the mask pattern diffracted light varies significantly depending on the exposure light incident direction. In particular, when the exposure light incident direction is the center direction of the light source coordinates, the profile is such that the light intensity at a position corresponding to the vicinity of the center of the mask pattern increases locally by defocusing. Therefore, when the exposure light incident direction is incident from the center direction of the light source coordinates and this shifter transmitted light is added to the mask pattern diffracted light, this profile is further deteriorated. Actually, when the defocus characteristic of the profile shape of the light intensity distribution shown in FIG. 34 (a) is compared with the defocus characteristic of the profile shape of the light intensity distribution shown in FIG. 34 (c), the light intensity distribution by the mask enhancer is compared. It can be seen that the profile shape is greatly degraded by defocusing. On the other hand, when the exposure light incident direction is oblique incidence from the X-axis direction or the Y-axis direction of the light source coordinates, as shown in FIGS. In addition, the profile shape of the light intensity distribution is neither degraded nor improved. When the exposure light incident direction is oblique incidence from the direction of 45 degrees of the light source coordinates, as shown in FIGS. 36A to 36C, by adding shifter transmitted light to the mask pattern diffracted light, It can be seen that the profile shape of the light intensity distribution is improved.

  In order to clarify the above-mentioned results, the inventor of the present application uses DOF (focus) when exposure is performed from each exposure light incident direction using a photomask having different sizes of openings serving as phase shifters in the mask enhancer. The depth characteristic was calculated by simulation. FIGS. 37A to 37C show the results, FIG. 37A shows the results when the exposure light incident direction is incident from the center direction of the light source coordinates, and FIG. 37B shows the results. FIG. 37C shows the result when the exposure light incident direction is oblique incidence from the X-axis direction or the Y-axis direction of the light source coordinates, and FIG. 37C is an oblique incidence from the 45-degree direction of the light source coordinates. The result is shown in some cases. Here, as a mask enhancer, a mask enhancer having an opening width (hereinafter referred to as an optimum opening width) adjusted to maximize the light shielding property in each exposure light incident direction, and an optimum opening width A mask enhancer having a smaller opening width and a mask enhancer having an opening width larger than the optimum opening width were used. For comparison, the DOF characteristics in the case where a complete light-shielding film having the same outer shape instead of the mask enhancer is used as a mask pattern were also calculated by simulation. As for DOF characteristics, how the pattern dimensions change due to defocus when the exposure energy is set such that the dimension of the pattern (resist pattern) formed at the best focus for each mask pattern is 0.12 μm. Is evaluated on the basis of 37A to 37C, L indicates the mask pattern width, S indicates the opening width, and the focus position (horizontal axis) 0 corresponds to the best focus position.

  As shown in FIG. 37A, when the exposure light incident direction is incident from the center direction of the light source coordinates, the DOF characteristics deteriorate as the opening width of the mask enhancer is increased, and the complete light shielding film is masked. The DOF characteristics are most excellent when used as a pattern (L / S = 0.12 / 0 μm).

  On the other hand, as shown in FIG. 37B, when the exposure light incident direction is oblique incidence from the X-axis direction or the Y-axis direction of the light source coordinates, the DOF characteristic does not depend on the opening width of the mask enhancer. The same DOF characteristics are obtained when the mask enhancer is used and when the complete light-shielding film is used (L / S = 0.13 / 0 μm).

  However, as shown in FIG. 37 (c), when the exposure light incident direction is oblique incidence from the 45-degree direction of the light source coordinates, the DOF characteristics are improved as the opening width of the mask enhancer is increased. The DOF characteristic is the lowest when the light shielding film is used as a mask pattern (L / S = 0.15 / 0 μm).

  That is, in order to improve the defocus characteristic of the light intensity distribution caused by the interference between the mask pattern diffracted light and the shifter transmitted light in the oblique incidence exposure from the 45 degree direction, it is possible to realize the minimum necessary effective light shielding property. It can be seen that the shifter transmission light should be increased as much as possible in the range.

  Up to this point, the method for improving the defocus characteristic by the mask enhancer using the oblique incidence exposure from the 45 degree direction has been described. Next, the method for setting the light source position that actually realizes the effect of improving the defocus characteristic. explain.

  FIGS. 38A to 38C are diagrams showing DOF maps corresponding to various light source positions in exposure using a mask pattern made of a complete light-shielding film. Specifically, as a mask pattern for DOF map evaluation, a linear mask pattern parallel to the Y axis on the light source coordinates as shown in FIG. Further, as the light source position, that is, the exposure light incident direction, the DOF map corresponding to the linear mask pattern parallel to the X axis on the light source coordinates produces the same characteristics as the mask pattern shown in FIG. As shown in FIG. 38B, a light source position that is symmetrical with respect to the X axis and the Y axis on the light source coordinates and that is four-fold symmetric is assumed. At this time, there are always eight light source positions at the same time, except when the light source positions are on the X axis, Y axis, or diagonal line (Y = X or Y = −X). Here, all the numerical values on the light source coordinates are normalized by the numerical aperture NA of the reduction projection optical system of the exposure machine.

  FIG. 38 (c) shows a mask pattern (width) made of a complete light-shielding film when exposure is performed using a circular light source having a radius of 0.05 from the light source position of coordinates (x, y) shown in FIG. 38 (b). The result of mapping DOF of L = 0.15 μm, opening width S = 0 μm, see FIG. 38A to each light source position is shown. Here, exposure is performed with an exposure intensity such that the dimension of the line pattern (resist pattern) formed at the best focus is 0.12 μm, and the pattern dimension is 0.12 ± 0 with respect to the focus fluctuation at the time of exposure. The DOF is defined using the maximum focus width that fits within the .012 μm dimension. Further, an ArF light source is used as the exposure light source, and 0.6 is used as the numerical aperture of the reduction projection optical system of the exposure machine.

  As shown in FIG. 38C, the average value of DOF corresponding to various light source positions is about 0.3 μm, and a light source position whose distance from the origin (X = 0, Y = 0) is 1 is used. When the pattern is exposed, the DOF is about 0.3 μm. The light source position where the DOF is higher than the average is rotated by 90 degrees, 180 degrees, and 270 degrees around the coordinates (X = 0.5, Y = 0.5) and the origin as the center. By using the oblique incidence exposure from these four light source positions, a superior DOF can be obtained. However, as can be seen from FIG. 38C, in the case of a mask pattern made of a complete light-shielding film, for example, even if the DOF is improved using the above-described light source position, the degree is about twice the average value of the DOF. Only.

  FIGS. 39A to 39D and FIGS. 40A to 40D are diagrams showing DOF maps corresponding to various light source positions in exposure using a mask pattern made of a mask enhancer. Specifically, as a mask pattern for DOF map evaluation, as shown in FIG. 39A, the mask pattern width is L (0.15 μm), and the width of the opening serving as a phase shifter is S (0 .04 μm, 0.08 μm or 0.10 μm). Here, as described above, the DOF map is four-fold symmetric with respect to the origin on the light source coordinates. Therefore, in the following description, in the DOF map, the first quadrant on the light source coordinates (X ≧ 0 and Y ≧ 0). Only the portion corresponding to the (region) is shown.

  FIGS. 39B to 39D show the result of mapping the DOF of the mask pattern formed by the mask enhancer shown in FIG. 39A to each light source position, and FIG. 39B shows the opening width. FIG. 39C shows the result obtained when S is 0.04 μm, FIG. 39C shows the result obtained when the opening width S is 0.08 μm, and FIG. 39D shows the opening width S. This is the result obtained when the thickness is 0.10 μm. Here, an ArF light source is used as the exposure light source, and 0.6 is used as the numerical aperture of the reduction projection optical system of the exposure machine. As shown in FIGS. 39B to 39D, when the opening width S of the mask enhancer increases, the light source position exists near the coordinates (X = 0.5, Y = 0.5). It can be seen that the DOF is significantly increased by the oblique incidence exposure.

  FIG. 40A shows the results of plotting the DOF values corresponding to the light source positions on the X = Y line (diagonal line) in the DOF maps shown in FIGS. 38C and 39B to 39D. Show. As shown in FIG. 40 (a), in the oblique incidence exposure from the 45 degree direction, the oblique incidence exposure is performed at the light source position whose distance from the origin on the light source coordinates is 0.4 or more and 0.85 or less. Thus, the DOF can be dramatically improved as the opening width S of the mask enhancer increases. On the other hand, in oblique incidence exposure from the 45 degree direction, when oblique incidence exposure is performed at a light source position whose distance from the origin on the light source coordinates is 0.4 or less, DOF increases as the opening width S of the mask enhancer increases. Will fall.

FIGS. 40B to 40D show DOF maps (masks made of a mask enhancer) shown in FIGS. 39B to 39D, respectively. The area in which the DOF is increased or decreased by 0.05 μm or more as compared with the mask pattern). From the results shown in FIGS. 40B to 40D, the light source position exists near the coordinates (X = 0.5, Y = 0.5), and the distance from the origin on the light source coordinates is a predetermined value (0). It can be seen that the DOF can be improved reliably by performing the optical setting of the reduction projection optical system of the exposure machine so that exposure with the light source removed in the following region can be performed. In order to confirm whether or not this is a general-purpose tendency, the inventor of the present application applied a DOF map of a mask pattern (L / S = 0.15 / 0 μm) made of a complete light-shielding film and a mask pattern made of a mask enhancer. A DOF map (L / S = 0.15 / 0.02, 0.04, 0.06 μm) was used with a KrF light source and an F ₂ light source with a numerical aperture of the reduction projection optical system of the exposure machine set to 0.6. In each case, and when the ArF light source is used with the numerical aperture of the reduction projection optical system of the exposure machine set to 0.7 and 0.8, based on each DOF map, as shown in FIG. The DOF value corresponding to the light source position on the diagonal line was obtained. 41 (a) to 41 (d) show the results. FIG. 41 (a) shows the light source position on the diagonal line when the numerical aperture of the reduction projection optical system of the exposure apparatus is 0.6 and a KrF light source is used. FIG. 41B shows the DOF value corresponding to the light source position on the diagonal line when the numerical aperture of the reduction projection optical system of the exposure apparatus is 0.6 and the F ₂ light source is used. FIG. 41C shows DOF values corresponding to light source positions on a diagonal line when an ArF light source is used with a numerical aperture of the reduction projection optical system of the exposure machine set to 0.7, and FIG. The DOF value corresponding to the light source position on the diagonal line when the numerical aperture of the reduction projection optical system is 0.8 and the ArF light source is used is shown. From the results shown in FIGS. 41A to 41D, the tendency that DOF is improved by oblique incidence exposure in which the light source position exists near the coordinates (X = 0.5, Y = 0.5) is a general-purpose tendency. I know that there is.

  In general, it is known that when oblique incidence exposure is used to form a pattern arranged with a period of about λ / NA or less, the DOF characteristics are improved. However, when the oblique incidence exposure is used for forming the isolated pattern, the DOF characteristic is hardly improved and the contrast of the light intensity distribution is lowered. Therefore, it is not preferable to use the oblique incidence exposure for forming the isolated pattern. . On the other hand, in the third embodiment, even when an isolated pattern is formed, oblique incidence exposure is the optimum exposure method due to the DOF improvement effect and contrast improvement effect of the mask enhancer. Therefore, according to the third embodiment, the optimum exposure method matches in forming an isolated pattern and in a pattern arranged with a small period, so that a fine pattern having an arbitrary layout can be formed with high accuracy. be able to.

(Fourth embodiment)
Hereinafter, the mask pattern design method according to the fourth embodiment of the present invention, specifically, the photomask according to the first or second embodiment, that is, the mask pattern diffracted light by the shifter transmitted light having the opposite phase to the photomask. A mask pattern design method for creating a photomask that improves the contrast and focus margin of the light intensity distribution during exposure by canceling will be described with reference to the drawings.

  FIG. 42 is a flowchart showing each step of the mask pattern design method according to the fourth embodiment.

  First, in step S1, a mask pattern layout (hereinafter referred to as a pattern layout) for forming a desired pattern (resist pattern) is created, and the transmittance T of a phase shifter arranged in the mask pattern is set. . FIG. 43A shows an example of the pattern layout created in step S1.

  Next, in step S2, the pattern layout created in step S1 is divided, and an evaluation point r is set near the center of each divided pattern (hereinafter referred to as a divided pattern). FIG. 43B shows a state in which the evaluation point r is set for each divided pattern in step S2.

  Next, in step S3, mask data is generated on the assumption that a light shielding pattern made of a light shielding film is arranged in the entire pattern layout. This corresponds to an evaluation mask for calculating the light intensity of the mask pattern diffracted light. FIG. 43C shows an example of an evaluation mask corresponding to the mask data created in step S3. The light intensity Ic (r) projected and transferred to the position corresponding to each evaluation point r on the material to be exposed in the exposure using this evaluation mask is used to simulate the light intensity using the optical conditions of the exposure machine in actual use. Etc. are calculated.

  Next, in step S4, a divided pattern containing an evaluation point r where Ic (r) calculated in step S3 is greater than a predetermined value It, that is, a divided pattern with insufficient light shielding performance at the evaluation point r is extracted. FIG. 43D shows a divided pattern extracted in step S4 and having insufficient light shielding performance at the evaluation point r. The divided pattern extracted in step S4 is a portion where even if a light shielding film is arranged there, a large amount of light that passes through the periphery of the light shielding film and wraps around the back side of the light shielding film, so that sufficient light shielding properties cannot be obtained. It is.

  Next, in step S5, mask data is created on the assumption that openings are arranged in the divided pattern extracted in step S4, and light shielding parts are arranged in other portions of the photomask. This corresponds to the evaluation mask for calculating the maximum value of the light intensity of the shifter transmitted light. FIG. 43E shows an example of an evaluation mask corresponding to the mask data created in step S5. The light intensity Io (r) projected and transferred to the position corresponding to each evaluation point r on the material to be exposed in the exposure using this evaluation mask is used to simulate the light intensity using the optical conditions of the exposure machine in actual use. Etc. are calculated. As a result, the maximum value of the light intensity of the shifter transmitted light when the phase shifter is arranged in the divided pattern extracted in step S4 can be estimated as T × Io (r), and thus the light intensity of the mask pattern diffracted light It can be determined whether or not (light intensity Ic (r)) can be canceled.

  Next, in step S6, the light intensity of the shifter transmitted light and the mask pattern diffracted light is evaluated using the value of the light intensity Io (r) and the value of the light intensity Ic (r) at each evaluation point r. Thus, a condition determination for improving the light shielding property is performed.

By the way, as described above, when a mask enhancer is used, a phase shifter corresponding to an arbitrary transmittance from 0 to T can be formed by partially covering the phase shifter of transmittance T with a light shielding film. However, in consideration of actual mask processing, a lower limit occurs in the size of the opening, and therefore it is necessary to set a minimum dimension in the opening. Therefore, the minimum transmittance Tmin that can be substantially generated based on this minimum dimension is assumed. In this case, in each division pattern,
Tmin × Io (r) ≧ 4 × Ic (r)
Then, since the light shielding performance is higher when the opening, that is, the phase shifter is not provided (see the first or second embodiment), Ic (r) / Io () with respect to Z4 where Z4 = Tmin / 4 A light-shielding portion is arranged in the divided pattern in which r) is smaller than Z4.

On the other hand, the width of the light shielding film that covers the phase shifter becomes smaller as the opening is made larger, so that there is a limit to the dimension that can be formed on the photomask as the light shielding part. That is, since there is an upper limit for the light transmitted through the phase shifter provided in the light shielding film, a maximum transmittance Tmax (Tmax <T) that can be substantially generated is assumed based on this upper limit. In this case, in each division pattern,
Ic (r) ≧ Tmax × Io (r)
Then, instead of providing a phase shifter (that is, a mask enhancer) partially covered with a light-shielding film, providing only a phase shifter increases the light-shielding performance, so that Z1 where Z1 = Tmax is satisfied. Thus, a phase shifter is arranged in the division pattern in which Ic (r) / Io (r) is larger than Z1.

  That is, in each divided pattern, if Z4> Ic (r) / Io (r), a light shielding portion is set, and if Z1 ≧ Ic (r) / Io (r) ≧ Z4, a mask enhancer is set, and Ic If (r) / Io (r)> Z1, the phase shifter is set. However, for simplicity, when Tmin and Tmax are not assumed, Z1 = T and Z4 = T / 4. FIG. 43F shows a state in which a phase shifter or a mask enhancer is set in step S6 for the divided pattern extracted in step S4 and having insufficient light shielding properties.

Next, in step S7, the size of the opening serving as a phase shifter in the mask enhancer set in the division pattern in step S6 is determined. At this time, the condition that the transmittance Te effectively generated by the mask enhancer maximizes the light shielding effect is expressed by Te = Ic (r) / Io (r). In addition, as described in the second embodiment, the equivalent transmittance of the opening is expressed by an approximate expression proportional to the opening area ratio (see FIG. 26E). Therefore, in order to make the phase shifter having the transmittance T substantially equivalent to the phase shifter having the transmittance Te, the area of the opening may be reduced based on the rule expressed by α × (Te / T) + β. Here, the coefficients such as α and β are values determined depending on the optical parameters of the exposure machine such as the wavelength of exposure light and the mask pattern dimensions, as described in the second embodiment. Specifically, the aperture area ratio is α × (Ic (r) / (Io (r)) so that the divided pattern in which the mask enhancer is set effectively becomes a phase shifter of the transmittance Te according to the above-described rules. × T)) Set an opening such that + β. At this time, if the area of the divided pattern is Sc and the area of the opening is So,
So = Sc × (α × (Ic (r) / (Io (r) × T)) + β)
It is. In addition, the shape of the opening is not particularly limited as long as the opening area ratio is a predetermined value. However, a shape obtained by simply reducing the pattern layout shape according to the opening area ratio is simply used. It may be used as FIG. 43 (g) shows a state where an opening having a shape obtained by reducing the pattern layout shape in step S7 is set for the mask enhancer set in the divided pattern in step S6.

  Next, in step S8, a pattern obtained by removing the phase shifter (including the mask enhancer opening) set up to step S7 from the pattern layout is created as a light shielding part pattern.

  Finally, in step S9, mask pattern data including a light shielding portion pattern and a phase shifter pattern is created. FIG. 43 (h) shows an example of the mask pattern data created in step S9. Thereafter, the mask pattern data is output to finish the mask pattern design. This improves the light shielding effect by using the shifter transmitted light having the opposite phase of the mask pattern diffracted light in the region where the light shielding effect is not sufficiently obtained when the light shielding pattern is arranged in the entire desired pattern layout. It is possible to create mask pattern data for realizing a mask structure that can be used.

  As described above, according to the fourth embodiment, the light intensity of the mask pattern diffracted light and the light intensity of the shifter transmitted light are calculated independently, and based on the ratio of each light intensity, Thus, the transmittance of the phase shifter and the size of the opening of the mask enhancer can be obtained. For this reason, it is possible to easily obtain the transmittance of the phase shifter and the opening size of the mask enhancer capable of maximizing the light shielding property for an arbitrary layout of the mask pattern.

  In the fourth embodiment, as the shape of the opening set as the mask enhancer in step S7, a shape obtained by simply reducing the pattern layout shape in accordance with the opening area ratio is used. Any shape may be used as long as the opening area ratio is a predetermined value and fits within the pattern layout. That is, the opening shape may be deformed as long as the opening area ratio or the area of the opening provided in a predetermined range is the same. However, in general, a shape that does not cause difficulty in actual mask processing is desirable. For example, the shape of the opening is not preferable so that an elongated light-shielding part pattern that causes peeling of the light-shielding film from the substrate is formed. FIG. 44 (a) shows the result of transforming the shape of the opening shown in FIG. 43 (g) so that the chromium film serving as the light shielding film on the mask is not easily peeled off, that is, so as not to produce an elongated light shielding part pattern. Show. FIG. 44B shows mask pattern data corresponding to FIG.

  In the fourth embodiment, the light shielding film or the light shielding portion arranged in the pattern layout (including the divided pattern) has a transmittance of 15% or less with respect to the exposure light and is exposed to the light transmitting portion. A phase difference of (−30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) may be generated with respect to light.

(First Modification of Fourth Embodiment)
Hereinafter, a mask pattern design method according to a first modification of the fourth embodiment of the present invention, specifically, a mask pattern design method for creating a photomask according to the first or second embodiment, This will be described with reference to the drawings.

  45 and 46 are flowcharts showing the steps of the mask pattern design method according to the first modification of the fourth embodiment.

  The first modification of the fourth embodiment is different from the fourth embodiment in the calculation method of the opening area of the mask enhancer. Specifically, in the fourth embodiment, the opening area of the mask enhancer is obtained by an approximate calculation using only the opening area ratio, but in the first modification of the fourth embodiment, the mask enhancer Find the opening area more accurately.

  45 and 46, the processes in steps S1 to S6 and the processes in steps S8 and S9 in the first modification of the fourth embodiment are the same as those in the fourth embodiment shown in FIG. The processes in steps S1 to S6 are exactly the same as the processes in steps S8 and S9. That is, in the first modification of the fourth embodiment, the process of step S7 in the fourth embodiment is performed in steps S10 to S14. Specifically, the mask enhancer has a sufficient light shielding effect. This is replaced with a procedure for verifying whether or not can be realized and correcting the opening area based on the result. Thereby, it is possible to create mask pattern data that can realize sufficient light shielding performance by the mask enhancer.

  Hereinafter, the processing from step S10 to step S14 will be described with reference to FIGS.

In step S10, the aperture area ratio is set using only the ratio of the transmittance T of the phase shifter and the optimum transmittance Te (= Ic (r) / Io (r)) that achieves the maximum light shielding effect in the mask enhancer. The size of the opening of the mask enhancer is determined based on the opening area ratio. Specifically, if the area of the divided pattern is Sc and the area of the opening is So,
So = Sc × Ic (r) / (Io (r) × T)
It is. Hereinafter, description will be made assuming that FIG. 43 (g) shows the opening set in step S10.

  Next, in step S11, when an opening is disposed in a portion where the phase shifter (including the opening of the mask enhancer) has been set up to step S10, and a light shielding portion is disposed in the other portion of the photomask. Create mask data. This corresponds to an evaluation mask for accurately calculating the light intensity of the shifter transmitted light. FIG. 47 shows an example of an evaluation mask corresponding to the mask data created in step S11. The light intensity Io (r) projected and transferred to the position corresponding to each evaluation point r on the material to be exposed in the exposure using this evaluation mask is used to simulate the light intensity using the optical conditions of the exposure machine in actual use. Recalculate by etc. As a result, the light intensity of the shifter transmitted light can be accurately estimated by T × Io (r), so that whether or not the light intensity of the mask pattern diffracted light (light intensity Ic (r)) can be sufficiently canceled is accurately determined. Judgment can be made.

Next, in step S12, it is verified whether or not Io (r) recalculated in step S11 has an intensity appropriate for realizing the maximum light shielding effect. Here, in the portion where the size of the opening of the mask enhancer realizes Io (r) having an appropriate strength for realizing the maximum light shielding effect, the opening of the mask enhancer is determined as it is. On the other hand, in the portion other than that, only the ratio between the transmittance T of the phase shifter and the optimum transmittance Te (= Ic (r) / Io (r)) that achieves the maximum light shielding effect at the present time in the mask enhancer is obtained again. The opening area ratio is set by using and the size of the opening of the mask enhancer is determined based on the opening area ratio. Specifically, if the area of the opening obtained in step S10 is So,
So × Ic (r) / (Io (r) × T)
Is determined as the area of the new opening. Here, whether the size of the opening of the mask enhancer realizes the maximum light shielding effect depends on whether the mask pattern diffracted light is sufficiently canceled by the shifter transmitted light, in other words, T × Io (r) It can be determined depending on whether or not Ic (r) holds. Therefore, according to So ′ = So × Ic (r) / (Io (r) × T), correction is made to reduce the opening if the shifter transmitted light is excessive, and correction to increase the opening if the shifter transmitted light is excessive. Will be added.

  Next, in step S13, it is determined whether or not the opening area has been corrected in step S12. If the opening area has been corrected, the opening area So is set as the opening area in step S14. After updating by So ′, the process returns to step S11. That is, based on the correction content of the opening area, a process for re-calculating the light intensity Io (r) by re-creating the mask data corresponding to the evaluation mask for accurately calculating the light intensity of the shifter transmitted light, Repeat until Ic (r) is sufficiently canceled by Io (r). On the other hand, if the opening area has not been updated, the process proceeds to step S8 and subsequent steps.

  According to the first modification of the fourth embodiment, the following effects are obtained in addition to the effects of the fourth embodiment. In other words, it is verified whether the aperture of the mask enhancer can realize a sufficient light shielding effect, and the aperture area is corrected based on the result, so that the mask pattern data that can realize sufficient light shielding by the mask enhancer is surely obtained. Can be created.

  In the first modification of the fourth embodiment, the light shielding film or the light shielding portion arranged in the pattern layout (including the divided pattern) has a transmittance of 15% or less with respect to the exposure light and the light transmitting portion. And a phase difference of (−30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) with respect to the exposure light.

(Second modification of the fourth embodiment)
Hereinafter, a mask pattern design method according to a second modification of the fourth embodiment of the present invention, specifically, a mask pattern design method for creating a photomask according to the first or second embodiment, This will be described with reference to the drawings.

  FIG. 48 is a flowchart showing each step of the mask pattern design method according to the second modification of the fourth embodiment.

  The second modification of the fourth embodiment is different from the fourth embodiment as follows. That is, in the fourth embodiment, the phase shifter, the mask enhancer, and the light shielding unit are used as the mask pattern. However, in the second modification of the fourth embodiment, the mask enhancer is not used as the mask pattern. Only the phase shifter and the light shielding part are used.

  As shown in FIG. 48, the processes in steps S1 to S5 and the process in step S9 in the second modification of the fourth embodiment are the same as steps S1 to S5 in the fourth embodiment shown in FIG. These processes are the same as those in step S9. That is, in the second modification of the fourth embodiment, each process of steps S6 to S8 in the fourth embodiment is replaced with the process of step S20. Specifically, in step S6 in the fourth embodiment, the range of the transmittance Te effectively generated by the mask enhancer is set from Tmin to Tmax represented by 0 <Tmin ≦ Tmax <T. In the second modification of the fourth embodiment, a situation is assumed in which Tmin = Tmax = T.

  That is, in step S20, the light intensity of the shifter transmitted light and the mask pattern diffracted light is evaluated using the value of the light intensity Io (r) and the value of the light intensity Ic (r) at each evaluation point r. Thus, the condition judgment for improving the light shielding property is performed. At this time, in each divided pattern, if T / 4> Ic (r) / Io (r), a light shielding portion is set, and if Ic (r) / Io (r) ≧ T / 4, a phase shifter is set. To do. Accordingly, the light shielding property of each divided pattern can be improved based on a simple determination as to whether the light shielding property of each divided pattern is higher using the phase shifter or the light shielding unit. . FIG. 49A shows a state in which the phase shifter is set in step S20 for the divided pattern extracted in step S4 and having insufficient light shielding properties.

  In the second modification of the fourth embodiment, the step of setting the opening of the mask enhancer (the process of step S7 in the fourth embodiment) and the phase shifter including the opening of the mask enhancer are arranged in the pattern layout. There is no need for a step (step S8 in the fourth embodiment) for removing the light from the light and creating a light shielding portion pattern.

  FIG. 49B shows an example of mask pattern data created in the second modification of the fourth embodiment.

  According to the second modification of the fourth embodiment, the following effects are obtained in addition to the effects of the fourth embodiment. That is, as the mask pattern, only the phase shifter and the light shielding part are used without using a mask enhancer, and therefore mask pattern data capable of realizing sufficient light shielding properties can be easily created.

  In the second modification of the fourth embodiment, the light shielding film or the light shielding portion arranged in the pattern layout (including the divided pattern) has a transmittance of 15% or less with respect to the exposure light and the light transmitting portion. And a phase difference of (−30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) with respect to the exposure light.

(Third Modification of Fourth Embodiment)
Hereinafter, a mask pattern design method according to a third modification of the fourth embodiment of the present invention, specifically, a mask pattern design method for creating a photomask according to the first or second embodiment, This will be described with reference to the drawings.

  FIG. 50 is a flowchart showing each step of the mask pattern design method according to the third modification of the fourth embodiment.

  The third modification of the fourth embodiment is different from the fourth embodiment as follows. That is, in the fourth embodiment, a mask pattern capable of improving the light shielding property is designed based on the result of optical simulation using the mask data. On the other hand, in the third modification of the fourth embodiment, the condition determination that the phase shifter of the transmittance T achieves higher light shielding performance than the light shielding film is not perfect, but the light shielding is performed based on the pattern layout width. The mask pattern that can improve the performance is designed.

  Specifically, first, in step S1, as in the fourth embodiment, a pattern layout of a mask pattern for forming a desired pattern (resist pattern) is created, and a phase shifter arranged in the mask pattern is created. The transmittance T is determined.

  Next, in step S30, the light intensity Ih (T, L) projected and transferred to a position corresponding to the center of the mask pattern on the material to be exposed in the exposure using the mask pattern including the phase shifter having the transmittance T and the width L. Is calculated by optical simulation using the optical conditions of the exposure machine during actual use. Further, in exposure using a mask pattern made of a light shielding film having a width L, the light intensity Ic (L) projected and transferred to a position corresponding to the center of the mask pattern on the material to be exposed is calculated by the same method. Then, the minimum width L in which the light intensity Ih (T, L) is smaller than the light intensity Ic (L), in other words, the maximum width L in which the light shielding effect of the phase shifter is higher than that of the light shielding film is calculated as the critical width Ls. .

  Next, in step S31, a partial pattern whose width is equal to or less than the critical width Ls is extracted from the pattern layout.

  Next, in step S32, a phase shifter is arranged in the partial pattern extracted in step S31, and a light shielding part is arranged in the other part.

  Finally, in step S9, as in the fourth embodiment, after creating mask pattern data including a light shielding portion pattern and a phase shifter pattern, the mask pattern data is output and the mask pattern design is completed.

  According to the third modification of the fourth embodiment, the mask pattern can be easily designed based on the pattern layout width without using the optical simulation using the mask data, so that the mask pattern can be easily designed. Become.

  In the third modification of the fourth embodiment, the light shielding film or the light shielding portion arranged in the pattern layout (including the divided pattern) has a transmittance of 15% or less with respect to the exposure light and the light transmitting portion. And a phase difference of (−30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) with respect to the exposure light.

(Fourth modification of the fourth embodiment)
Hereinafter, a mask pattern design method according to a fourth modification of the fourth embodiment of the present invention, specifically, a mask pattern design method for creating a photomask according to the first or second embodiment, This will be described with reference to the drawings.

  FIG. 51 is a flowchart showing each step of the mask pattern design method according to the fourth modification example of the fourth embodiment.

  The fourth modification of the fourth embodiment is different from the fourth embodiment as follows. That is, in the fourth embodiment, one type of transmittance T is used as the transmittance of the phase shifter. However, in the fourth modification of the fourth embodiment, two types of transmission are used as the transmittance of the phase shifter. Use rates T1 and T2 (where T1> T2). In the fourth embodiment, the phase shifter, the mask enhancer, and the light shielding unit are used as the mask pattern. However, in the fourth modification example of the fourth embodiment, the second modification example of the fourth embodiment is used. Similarly to the above, only the phase shifter and the light shielding portion are used as the mask pattern without using the mask enhancer.

  As shown in FIG. 51, the processes in steps S2 to S5 and the process in step S9 in the fourth modification of the fourth embodiment are the same as steps S2 to S5 in the fourth embodiment shown in FIG. These processes are the same as those in step S9. That is, in the fourth modification of the fourth embodiment, the process of step S1 in the fourth embodiment is replaced with the process of step S40, and each of steps S6 to S8 in the fourth embodiment is performed. The processing is replaced with the processing in steps S41 and S42.

  That is, in step S40, a pattern layout of a mask pattern for forming a desired pattern (resist pattern) is created, and two types of transmittances T1 and T2 (where T1> T2) of phase shifters arranged in the mask pattern are created. ).

  Further, after performing each processing of steps S2 to S5, in step S41, the shifter transmitted light and the mask are used by using the light intensity Io (r) value and the light intensity Ic (r) value at each evaluation point r. By evaluating the light intensity of each pattern diffracted light, a condition judgment for improving the light shielding property is performed. At this time, in each divided pattern, if T2 / 4> Ic (r) / Io (r), a light shielding portion is set, and if Ic (r) / Io (r) ≧ T2 / 4, a phase shifter is set. To do. In other words, the phase shifter having the lowest transmittance among the usable phase shifters is used as a reference, and a portion where the light shielding performance is improved by using the phase shifter is first extracted. This is because the portion of the light-shielding property that is improved by using a phase shifter having a higher transmittance than that of the light-shielding film can be improved by using a phase shifter having a lower transmittance than that of the light-shielding film. This is because it is limited to the inside of the portion. Note that the processing of step S41 is the same as the processing of step S20 in the second modification of the fourth embodiment shown in FIG. 48, and the single transmittance T is set to the lowest usable transmittance (T2). It has been replaced.

Next, in step S42, it is determined which transmission phase shifter is appropriate for each divided pattern in which the phase shifter is set. At this time, as described in the first embodiment,
Ic / Io> (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) / 2
In the mask pattern portion where is established, a phase shifter with transmittance T1 is selected,
Ic / Io ≦ (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) / 2
In the mask pattern portion where the above holds, a phase shifter having transmittance T2 may be selected. FIG. 52A shows a state in which phase shifters having two types of transmittances T1 and T2 are set in steps S41 and S42 for the divided pattern extracted in step S4 and having insufficient light shielding properties. ing.

  In the fourth modification of the fourth embodiment, the step of setting the opening of the mask enhancer (the process of step S7 in the fourth embodiment) and the phase shifter including the opening of the mask enhancer are arranged in the pattern layout. There is no need for a step (step S8 in the fourth embodiment) for removing the light from the light and creating a light shielding portion pattern.

  FIG. 52B shows an example of mask pattern data created in the fourth modification of the fourth embodiment.

  According to the 4th modification of 4th Embodiment, in addition to the effect of 4th Embodiment, the following effects are acquired. That is, as the mask pattern, only the phase shifter and the light shielding part are used without using a mask enhancer, and therefore mask pattern data capable of realizing sufficient light shielding properties can be easily created. In addition, in a situation where a phase shifter having a plurality of transmittances can be used, a phase shifter having each transmittance can be set so as to realize higher light shielding properties, so that phase shifters having different transmittances can be placed at appropriate positions. Can be arranged.

  In the fourth modification of the fourth embodiment, the phase shifter may have three or more transmittances.

  In the fourth modification of the fourth embodiment, the light shielding film or the light shielding portion arranged in the pattern layout (including the divided pattern) has a transmittance of 15% or less with respect to the exposure light and the light transmitting portion. And a phase difference of (−30 + 360 × n) degrees or more and (30 + 360 × n) degrees or less (where n is an integer) with respect to the exposure light.

  The present invention relates to a mask pattern design method and, when applied to a mask pattern design method for creating a photomask for pattern exposure used for manufacturing a semiconductor device or a liquid crystal display device, exposure using a single photomask. As a result, it is possible to form a pattern having an arbitrary size or shape and to improve the defocus characteristic, which is very useful.

(A) is a top view of the photomask which has a mask pattern which consists of perfect light shielding films, (b) is a figure which shows a mode that exposure is performed using the photomask shown to (a), (c) (A) is a figure which shows the light intensity distribution transcribe | transferred on a to-be-exposed material in the exposure using the photomask shown to (a), (d) is a mask pattern line | wire width in the exposure using the photomask shown to (a). It is a figure which shows the simulation result of the light intensity distribution transcribe | transferred on a to-be-exposed material when changing L variously. Changes in the light intensity distribution transferred onto the resist film and changes in the shape of the resist pattern formed after development of the resist film when the line width of the mask pattern is changed in various ways during exposure using a photomask. FIG. It is a schematic diagram which shows the principle of the image enhancement method of this invention. It is a figure which shows the simulation result of the light intensity distribution transcribe | transferred on to-be-exposed material when the line | wire width of a phase shifter is changed variously in the exposure using the image enhancement mask shown in FIG. (A) is a figure which shows an example of the design layout of the desired pattern used as the formation object in the pattern formation method concerning the 1st Embodiment of this invention, (b) is for forming the pattern shown to (a) It is a top view of the photomask which concerns on the 1st Embodiment of this invention used for. (A)-(c) is sectional drawing which shows each process of the pattern formation method which concerns on the 1st Embodiment of this invention. (A) is a figure which shows the simulation result of the light intensity distribution projected on a resist film by the photomask shown in FIG.5 (b), (b) is the light intensity distribution of Aa 'line along (a). It is a figure which shows a simulation result, (c) is a figure which shows the result of having predicted the shape of the resist pattern from the simulation result of the light intensity distribution shown to (a). (A) is a top view of the photomask which has a mask pattern which consists of a phase shifter, (b) is a figure which shows a mode that exposure is performed using the photomask shown to (a). (A) is a figure which shows the simulation result of the light intensity distribution transcribe | transferred on to-be-exposed material when the transmittance | permeability of a phase shifter is changed variously in the exposure using the photomask shown to Fig.8 (a), FIG. 8B shows a simulation result of light intensity generated on the material to be exposed when the transmittance of the phase shifter and the line width L of the mask pattern are variously changed in the exposure using the photomask shown in FIG. FIG. 8C is a diagram showing the light intensity generated on the material to be exposed when the transmittance T of the phase shifter and the mask pattern line width L are varied in the exposure using the photomask shown in FIG. It is a figure which shows a mode that the transmittance | permeability T and the line width L were taken on the vertical axis | shaft and the horizontal axis, respectively, and the simulation result was represented with the contour line of the light intensity. It is the schematic diagram which showed the principle of the mask pattern superposition method of this invention about the case of the image enhancement mask which has a mask pattern of the line | wire width L which consists of a phase shifter of the transmittance | permeability T. (A) to (c) show the light intensity Ih (L generated on the material to be exposed when the transmittance T of the phase shifter and the mask pattern line width L are varied in the exposure using the image enhancement mask shown in FIG. , T) is a diagram showing a state in which the transmittance T and the line width L are plotted on the vertical axis and the horizontal axis, respectively, and are represented by contour lines of light intensity. It is the schematic diagram which showed the principle of the mask pattern superimposition method of this invention about the case of the image enhancement mask which has a mask pattern of the square shape (the length of one side is L) which consists of the phase shifter of the transmittance | permeability T. (A) to (c) show the light intensities Ih (L, L) generated on the material to be exposed when the transmittance T of the phase shifter and the mask pattern width L are variously changed in the exposure using the image enhancement mask shown in FIG. It is a figure which shows a mode that the transmittance | permeability T and the width | variety L were taken on the vertical axis | shaft and the horizontal axis, respectively, and the simulation result of T) was represented with the contour line of the light intensity. (A) to (c) show Ih (L, T) = Ic (L) when the transmittance T of the phase shifter and the mask pattern line width L are varied in the exposure using the image enhancement mask shown in FIG. It is a figure which shows the conditions with which is satisfied. (A) is a figure which shows an example of the design layout of the desired pattern used as the formation object in the pattern formation method concerning the 2nd Embodiment of this invention, (b) is for forming the pattern shown to (a) It is a top view of the photomask based on the 2nd Embodiment of this invention used for this. (A)-(c) is sectional drawing which shows each process of the pattern formation method which concerns on the 2nd Embodiment of this invention. (A) is a figure which shows the simulation result of the light intensity distribution projected on a resist film with the photomask shown in FIG.15 (b), (b) is the light intensity distribution of Aa 'line along (a). It is a figure which shows a simulation result, (c) is a figure which shows the result of having predicted the shape of the resist pattern from the simulation result of the light intensity distribution shown to (a). (A) is a top view of the photomask which has a mask pattern which consists of a light shielding film and the opening part which is provided in this light shielding film, and becomes a phase shifter, (b) is exposed using the photomask shown to (a) It is a figure which shows a mode that it is performing. (A) is a figure which shows the simulation result of the light intensity distribution transcribe | transferred on to-be-exposed material when opening part width S is changed variously in the exposure using the photomask shown to Fig.18 (a), FIG. 18B shows a simulation result of the light intensity generated on the material to be exposed when the mask pattern line width L and the opening width S are variously changed in the exposure using the photomask shown in FIG. It is a figure which shows a mode that the width L and the opening part width | variety S were taken on the vertical axis | shaft and the horizontal axis, respectively, and it represented with the contour line of the light intensity. (A) is a top view of the photomask which has a mask pattern which consists of a light shielding film and the opening part which is provided in this light shielding film, and becomes a phase shifter, (b) is exposed using the photomask shown to (a) It is a figure which shows a mode that it is performing. (A) is a figure which shows the simulation result of the light intensity distribution transcribe | transferred on a to-be-exposed material when opening part width S is variously changed in exposure using the photomask shown to Fig.20 (a), b) shows the simulation result of the light intensity generated on the material to be exposed when the mask pattern line width L and the opening width S are variously changed in the exposure using the photomask shown in FIG. It is a figure which shows a mode that the width L and the opening part width | variety S were taken on the vertical axis | shaft and the horizontal axis, respectively, and was represented with the contour line of light intensity, (c) used the photomask by which the light-shielding property of the mask pattern was optimized. It is a figure which shows the simulation result of the light intensity which arises on a to-be-exposed material when the mask pattern line width L is changed variously in exposure. It is the schematic diagram which showed the principle of the mask pattern superposition method of this invention about the case of the image enhancement mask which has a mask pattern of the line width L which consists of a mask enhancer of the opening part width S. FIG. (A) to (c) show the light intensities Ie (L, S generated on the material to be exposed when the mask pattern line width L and the opening width S are varied in the exposure using the image enhancement mask shown in FIG. ) Is a diagram showing a state in which the opening width S and the mask pattern line width L are plotted on the vertical axis and the horizontal axis, respectively, and are represented by contour lines of light intensity. It is the schematic diagram which showed the principle of the mask pattern superimposition method of this invention about the case of the image enhancement mask which has a mask pattern of the square shape (the length of one side is L) which consists of a mask enhancer of the opening part width S. (A) to (c) show the light intensity Ie (L, S) generated on the material to be exposed when the mask pattern width L and the opening width S are variously changed in the exposure using the image enhancement mask shown in FIG. FIG. 6 is a diagram showing a state in which the simulation results are expressed by contour lines of light intensity with the opening width S and the mask pattern width L taken on the vertical axis and the horizontal axis, respectively. (A) is a figure which shows the semi-transparent pattern which consists of a semi-transparent film | membrane of the line | wire width L and the transmittance | permeability T, (b)-(d) is each provided with the opening part of the transmittance | permeability 1.0 in a permeable board | substrate. (E) is a diagram showing an opening pattern when light is irradiated to the opening patterns shown in (b) to (d) while changing the dimension S from 0 to L. It is a figure which shows the result of having evaluated the intensity | strength of measured light by simulation. (A) is a figure which shows the result of having evaluated the intensity distribution of the light which permeate | transmitted the semi-transparent film | membrane at the time of irradiating light to the semi-transparent pattern shown to Fig.26 (a), and evaluated by simulation by setting the transmittance | permeability T to 0.5. (B) to (d) show the intensity distribution of the light transmitted through the opening when the opening patterns shown in FIGS. 26 (b) to (d) are irradiated with light, and the equivalent transmittance T is 0. 5 is a diagram showing a result of evaluation by simulation as 5. FIG. The schematic diagram which shows the principle of the image enhancement method of this invention in case a semi-light-shielding part is used as the light-shielding part which comprises a mask pattern in case the line width of the mask pattern which consists of a mask enhancer is smaller than 0.8 * lambda / NA It is. The schematic diagram which shows the principle of the image enhancement method of this invention in case a semi-light-shielding part is used as a light-shielding part which comprises a mask pattern in case the line width of the mask pattern which consists of mask enhancers is larger than 0.8 * lambda / NA It is. (A)-(d) is a figure explaining the advantage of using a semi-light-shielding part instead of a complete light-shielding part as a light-shielding part which comprises a mask pattern in the image enhancement mask of this invention. (A)-(g) is a figure for demonstrating the dependence with respect to the exposure light incident direction of the light intensity distribution which arises on a to-be-exposed material by exposure using a mask enhancer. (A)-(d) is a figure which shows the principle of the defocusing characteristic improvement method using a mask enhancer. (A)-(d) is a figure which shows the principle of the defocusing characteristic improvement method using a mask enhancer. (A)-(c) is a figure for demonstrating the dependence with respect to the exposure light incident direction of the profile shape change of the light intensity distribution by defocusing. (A)-(c) is a figure for demonstrating the dependence with respect to the exposure light incident direction of the profile shape change of the light intensity distribution by defocusing. (A)-(c) is a figure for demonstrating the dependence with respect to the exposure light incident direction of the profile shape change of the light intensity distribution by defocusing. (A)-(c) is a figure which shows the result of having calculated by the simulation the DOF characteristic at the time of performing exposure from each exposure light incident direction using the photomask from which the dimension of the opening part used as the phase shifter in a mask enhancer differs. It is. (A) is a figure which shows the linear mask pattern parallel to the Y-axis on a light source coordinate, (b) is a light source which is symmetrical with respect to the X-axis and Y-axis on a light-source coordinate, and is four-fold symmetrical. FIG. 6C is a diagram showing a position, and FIG. 5C is a mask pattern made of a complete light-shielding film when exposure is performed using a circular light source having a radius of 0.05 from the light source position of coordinates (x, y) shown in FIG. It is a figure which shows the result of having mapped DOF of each with respect to each light source position. (A) is a figure which shows the mask enhancer whose mask pattern width is L and the width | variety of the opening part used as a phase shifter is S, (b)-(d) is a mask which consists of a mask enhancer shown to (a). It is a figure which shows the result of mapping DOF of a pattern with respect to each light source position. (A) is a figure which shows the result of having plotted the DOF value corresponding to the light source position on the diagonal in the DOF map shown to each of FIG.38 (c) and FIG.39 (b)-(d), (b)- (D) is a figure which shows the area | region where 0.05 micrometer or more DOF is increasing or decreasing compared with the DOF map shown in FIG.38 (c) in the DOF map shown in each of FIG.39 (b)-(d). . (A) to (d) are a DOF map of a mask pattern (L / S = 0.15 / 0 μm) made of a complete light-shielding film, and a mask pattern (L / S = 0.15 / 0.02) made of a mask enhancer. 0.04, 0.06 μm) when the KrF light source and the F ₂ light source are used with the numerical aperture of the reduction projection optical system of the exposure machine set to 0.6, and the numerical aperture of the reduction projection optical system of the exposure machine It is a figure which shows the result of having calculated | required about each when an ArF light source was used by setting 0.7 and 0.8, and calculated | required the DOF value corresponding to the light source position on a diagonal line based on each DOF map. It is a flowchart which shows each process of the mask pattern design method which concerns on the 4th Embodiment of this invention. (A)-(h) is a figure for demonstrating the mask pattern design method which concerns on the 4th Embodiment of this invention. (A) And (b) is a figure for demonstrating the mask pattern design method based on the 4th Embodiment of this invention. It is a flowchart which shows each process of the mask pattern design method which concerns on the 1st modification of the 4th Embodiment of this invention. It is a flowchart which shows each process of the mask pattern design method which concerns on the 1st modification of the 4th Embodiment of this invention. It is a figure for demonstrating the mask pattern design method which concerns on the 1st modification of the 4th Embodiment of this invention. It is a flowchart which shows each process of the mask pattern design method which concerns on the 2nd modification of the 4th Embodiment of this invention. (A) And (b) is a figure for demonstrating the mask pattern design method which concerns on the 2nd modification of the 4th Embodiment of this invention. It is a flowchart which shows each process of the mask pattern design method which concerns on the 3rd modification of the 4th Embodiment of this invention. It is a flowchart which shows each process of the mask pattern design method which concerns on the 4th modification of the 4th Embodiment of this invention. (A) And (b) is a figure for demonstrating the mask pattern design method which concerns on the 4th modification of the 4th Embodiment of this invention. (A)-(d) is sectional drawing which shows each process of the conventional pattern formation method. (A) is a figure which shows an example of the layout of the mask pattern on the photomask used at the exposure process shown in FIG.53 (c), (b) is the light projected on a resist film by the photomask shown in (a). It is a figure which shows the simulation result of intensity distribution, (c) is a figure which shows the simulation result of light intensity distribution along the AA 'line of (b), (d) is a figure of the light intensity distribution shown in (b). It is a figure which shows the result of having predicted the shape of the resist pattern from the simulation result. (A) is a figure which shows the other example of the layout of the mask pattern on the photomask used at the exposure process shown in FIG.53 (c), (b) is projected on a resist film with the photomask shown in (a). It is a figure which shows the simulation result of light intensity distribution, (c) is a figure which shows the simulation result of light intensity distribution along the AA 'line of (b), (d) is the light intensity distribution shown in (b). It is a figure which shows the result of having predicted the shape of the resist pattern from the simulation result. (A) is a figure which shows an example of the layout of the desired pattern used as the formation object in the conventional pattern formation method, (b), (c) is used in order to form the pattern shown to (a), It is a top view of two photomasks. (A) is a figure which shows the other example of the layout of the desired pattern used as the formation object in the conventional pattern formation method, (b), (c) is used in order to form the pattern shown to (a). It is a top view of two conventional photomasks.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Transparent substrate 11 Mask pattern 12 Exposure light 13 Transmitted light 20 Pattern 30 Transparent substrate 40 Mask pattern 41 Light-shielding part 42 1st phase shifter 43 2nd phase shifter 50 Substrate 51 Processed film 52 Resist film 52a Non-exposed part 52b Exposure unit 53 Exposure light 54 Resist pattern 60 Transparent substrate 61 Mask pattern 62 Exposure light 63 First transmission light 64 Second transmission light 70 Pattern 80 Transmission substrate 90 Mask pattern 91 Light shielding unit 92 Phase shifter 100 Substrate 101 Covered Processed film 102 Resist film 102a Non-exposed portion 102b Exposed portion 103 Exposure light 104 Resist pattern 110 Transparent substrate 111 Transparent film 112 Light-shielding film 113 Opening portion 114 Exposure light 115 First transmitted light 116 Second transmitted light 120 Transmissivity Board 12 Shielding film 122 Engraved portion 123 Opening portion 124 Exposure light 125 First transmitted light 126 Second transmitted light L Mask pattern width S Opening width T Transmittance R Area on the back side of mask pattern Ic Light intensity Io Light intensity Ih Light intensity Ie Light intensity

Claims (6)

A mask pattern design method for creating a photomask provided with a mask pattern having a light-shielding property with respect to the exposure light on a transparent substrate having a light-transmitting property with respect to the exposure light,
The mask pattern has a phase shifter that generates an opposite phase with respect to the exposure light between the transparent substrate and the light transmitting portion where the mask pattern is not formed.
Creating a pattern layout which is the layout of the mask pattern and determining the transmittance T of the phase shifter;
A step (b) of dividing the pattern layout to generate a plurality of divided patterns;
The light intensity Ic generated at the center of the light-shielding image forming region corresponding to each of the divided patterns on the exposed material by the exposure light passing through the photomask when the light-shielding film is disposed on the entire pattern layout. Calculating step (c);
When the opening is arranged in a division pattern in which the corresponding light intensity Ic is larger than a predetermined value among the division patterns, and the light-shielding film is arranged all over the other part of the photomask, the photo A step (d) of calculating a light intensity Io generated at the center of the light-shielding image forming region by the exposure light transmitted through the mask;
Among the divided patterns, the phase shifter is arranged in a divided pattern in which Ic / Io> T is satisfied, and in the divided patterns in which T / 4> Ic / Io is satisfied, the first light shielding unit is arranged. And a step (e) of disposing a second light-shielding portion having an opening serving as the phase shifter in a division pattern in which T ≧ Ic / Io ≧ T / 4 among the division patterns. A mask pattern design method characterized by the above. In the mask pattern design method according to claim 1,
After the step (e), a step (f) of setting a size of the opening with respect to the divided pattern in which the second light shielding portion is disposed;
After the step (f), a step (g) of creating a light shielding portion pattern by removing an arrangement region of the phase shifter including the opening from the pattern layout;
After the step (g), a step (h) of creating mask pattern data composed of the light shielding portion pattern and the phase shifter pattern,
In the step (f), when the area So of the opening portion is Sc, the area of the divided pattern in which the second light shielding portion is disposed is Sc.
So = Sc × (α × (Ic / (Io × T)) + β)
(However, the coefficients α and β are values determined depending on the optical parameters of the exposure machine such as the wavelength of exposure light and the mask pattern dimensions.)
A mask pattern design method characterized in that the mask pattern is set to be A mask pattern design method for creating a photomask provided with a mask pattern having a light-shielding property with respect to the exposure light on a transparent substrate having a light-transmitting property with respect to the exposure light,
The mask pattern has a phase shifter that generates an opposite phase with respect to the exposure light between the transparent substrate and the light transmitting portion where the mask pattern is not formed.
Creating a pattern layout which is the layout of the mask pattern and determining the transmittance T of the phase shifter;
A step (b) of dividing the pattern layout to generate a plurality of divided patterns;
The light intensity Ic generated at the center of the light-shielding image forming region corresponding to each of the divided patterns on the exposed material by the exposure light passing through the photomask when the light-shielding film is disposed on the entire pattern layout. Calculating step (c);
When the opening is arranged in a division pattern in which the corresponding light intensity Ic is larger than a predetermined value among the division patterns, and the light-shielding film is arranged all over the other part of the photomask, the photo A step (d) of calculating a light intensity Io generated at the center of the light-shielding image forming region by the exposure light transmitted through the mask;
Among the divided patterns, the phase shifter is arranged in a divided pattern satisfying Ic / Io ≧ T / 4, and a light shielding portion is arranged in a divided pattern satisfying T / 4> Ic / Io among the divided patterns. And (e) a mask pattern design method comprising the step (e). In the mask pattern design method according to claim 3,
A mask pattern design method comprising a step of creating mask pattern data including the light shielding part pattern and the phase shifter pattern after the step (e). A mask pattern design method for creating a photomask provided with a mask pattern having a light-shielding property with respect to the exposure light on a transparent substrate having a light-transmitting property with respect to the exposure light,
The mask pattern has a phase shifter that generates an opposite phase with respect to the exposure light between the transparent substrate and the light transmitting portion where the mask pattern is not formed.
A step (a) of creating a pattern layout which is a layout of the mask pattern and determining two types of transmittances T1 and T2 (where T1> T2) of the phase shifter;
A step (b) of dividing the pattern layout to generate a plurality of divided patterns;
The light intensity Ic generated at the center of the light-shielding image forming region corresponding to each of the divided patterns on the exposed material by the exposure light passing through the photomask when the light-shielding film is disposed on the entire pattern layout. Calculating step (c);
When the opening is arranged in a division pattern in which the corresponding light intensity Ic is larger than a predetermined value among the division patterns, and the light-shielding film is arranged all over the other part of the photomask, the photo A step (d) of calculating a light intensity Io generated at the center of the light-shielding image forming region by the exposure light transmitted through the mask;
Among the divided patterns, the phase shifter is disposed in a divided pattern where Ic / Io ≧ T2 / 4 is satisfied, and a light shielding portion is disposed in a divided pattern where T2 / 4> Ic / Io is satisfied among the divided patterns. Step (e);
Among the divided patterns in which the phase shifter is arranged, in the divided pattern where Ic / Io> (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ), the transmittance of the phase shifter is set to T1, and the phase In the divided pattern in which Ic / Io ≦ (T1 ^0.5 + T2 ^0.5 ) × (T1 ^0.5 + T2 ^0.5 ) among the divided patterns in which the shifters are arranged, the step (f) of setting the transmittance of the phase shifter to T2; A mask pattern design method characterized by comprising: In the mask pattern design method according to claim 5 ,
A mask pattern design method comprising a step of creating mask pattern data including the light shielding portion pattern and the phase shifter pattern after the step (f).

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