JP3693880B2 - Multipoint measuring apparatus and dimension measuring method using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a multi-point measuring apparatus and a dimension measuring method using the same, and more particularly to a multi-point measuring apparatus suitable for measuring the outer diameter of a journal portion of a crankshaft and a dimension measuring method using the multi-point measuring apparatus. It is.
[0002]
[Prior art]
Conventionally, as an apparatus for measuring the outer diameter Wd and the like of a cylindrical workpiece W (object to be measured) as shown in FIG.
That is, the conventional multipoint measuring device 90 includes a pair of linear gauges 92, a feeler 94 connected to a digital scale of the linear gauge 92, and a contact 96 attached to the tip of the feeler 94. The unit 91 is provided corresponding to each measurement location such as the outer diameter Wd of the workpiece W. The purpose of measuring the outer diameter Wd and the like of the workpiece W at multiple points is to determine whether or not the taper and the bulge of the outer peripheral surface that may occur in the cylindrical portion are within an allowable range.
[0003]
[Problems to be solved by the invention]
However, the conventional multipoint measuring apparatus 90 as shown in FIG. 9 has the following problems.
(1) If the number of measurement points is increased in order to expand the measurement range and the like, the entire measurement unit 91 including the linear gauge 92, the feeler 94, and the contact 96 must be added. For this reason, such a change in the measurement location necessitates an additional measurement unit 91 each time, resulting in an increase in setup man-hours and an increase in equipment costs.
(2) To change the measurement position by the contact 96, the position of the measurement unit 91 including the contact 96 or the shape of the feeler 94 having the contact 96 at the tip must be changed. Therefore, it is necessary to adjust the linear gauge 92 accompanying such a change, which causes a problem of increasing the number of man-hours for setup.
(3) Since a linear gauge 92 is required for each measurement location, the number of counter signals sent from the linear gauge 92 increases according to the measurement location, which makes wiring routing complicated and counter signal processing There is a problem that an interface port in the control device necessary for the system must be increased.
[0004]
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a multi-point measuring device capable of easily changing a measurement location and a measurement position and a dimension measurement method using the same. There is to do.
Another object of the present invention is to provide a multipoint measuring apparatus that can be realized with a simple configuration without affecting the measurement accuracy and a dimension measuring method using the same.
[0005]
[Means for Solving the Problems]
  In order to achieve the above object, in the multipoint measuring apparatus according to claim 1,YesMoving part,A moving means capable of detachably attaching the movable portion and moving the movable portion so as to be close to or away from the object to be measured;Enables contact with the object to be measuredSaidProvided in the moving partWhen the movable part is moved by the moving means in a direction approaching the object to be measured, one of the plurality of contacts abuts on the object to be measured, and the movable part is When the movable part moves in a direction approaching the object to be measured, instead of the contact that was previously in contact with the object to be measured, another one of the plurality of contacts is the object to be measured. To abut, 2 or more will not contact the object to be measured simultaneouslyIn positional relationshipA plurality of contacts;When any one of the plurality of contacts contacts the object to be measuredThe movable partMoves in the anti-contact directionAnd a detection means capable of detecting the amount of movement.
[0006]
  In order to achieve the above object, the dimension measuring method according to claim 2 is a dimension measuring method using the multipoint measuring apparatus according to claim 1, wherein a dimension reference value by a reference object is obtained by the multipoint measuring apparatus. A step of measuring, a step of measuring a dimension measurement value of the object to be measured by the multipoint measuring device, and the dimension reference valueDetermining whether the dimensional measurement is within a predetermined tolerance based on:It is a technical feature to include.
[0007]
  In the invention of claim 1,By means of transportationOn the object to be measuredAgainstThe movable part that can approach or be separated is provided with a plurality of contacts that do not contact two or more objects to be measured simultaneously, and the amount of movement of the movable part is detected by the detecting means. Thereby, when the movable part and the object to be measured are relatively moved by the moving means, one of the plurality of contacts comes into contact with the object to be measured, and the amount of movement of the movable part due to the contact is detected by the detecting means, When the movable part and the object to be measured are further moved relative to each other, another one of the plurality of contacts comes into contact with the object to be measured, and the amount of movement of the movable part due to the contact is detected by the detecting means. That is, it is possible to detect the amount of movement of the contact that is in contact with a plurality of locations by one detection means.Further, since the moving means allows the movable portion to be detachably attached, the movable portion can be easily replaced with another movable portion.
[0008]
  In the invention of claim 2,It is determined whether there is a dimension measurement value within a predetermined tolerance based on the dimension reference value.Thereby, the dimension of a to-be-measured object can be measured from the relative dimensional relationship with the dimension reference value by a reference | standard object.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, as an embodiment according to the multipoint measuring apparatus of the present invention, an embodiment applied to a measuring system 20 for measuring the outer diameter of a journal portion (hereinafter referred to as “work W”) of a crankshaft is shown in FIGS. Based on
First, the overall configuration of the measurement system 20 according to the present embodiment will be described with reference to FIG.
As shown in FIG. 2, the measurement system 20 mainly includes a measurement set 21, a multipoint measurement device 30, a sequencer 51, a data processing device 53, and the like.
[0010]
The measurement set 21 includes two pillars 22 suspended from the floor or the like of the installation location, a Y-axis slider 23 spanned between the pillars 22, and the Y-axis slider 23 movable in parallel with the pillars 22. It comprises an X-axis slider 25 attached to the part, and a table 26 on which a workpiece W, which is an object to be measured, can be placed. The multipoint measuring device 30 is attached to the movable part of the X-axis slider 25. Thereby, the movable part of the Y-axis slider 23 and the movable part of the X-axis slider 25 can be arbitrarily moved in the Y-axis direction or the X-axis direction by the rotation of each ball screw or the like. Therefore, since the multipoint measuring device 30 can move between the columns 22 by the Y-axis slider 23 and the vertical direction by the X-axis slider 25, the workpiece W located on the table 26 can be moved with respect to the workpiece W. Can be freely approached or separated.
[0011]
The sequencer 51 is a device that controls the operation of the Y-axis slider 23 and the X-axis slider 25 by a built-in microcomputer or the like. Specifically, pulse signals for controlling the respective rotations are appropriately sent to a servo motor 23a for driving the ball screw or the like of the Y-axis slider 23 and a servo motor 25a for driving the ball screw or the like of the X-axis slider 25. The sequencer 51 sends such a pulse signal, while notifying the data processor 53 of the movement timing of the multipoint measuring device 30 by the Y-axis slider 23 and the X-axis slider 25. At the same time, a predetermined timing signal is sent to the data processing device 53.
[0012]
The data processing device 53 has a configuration as shown in the block diagram of FIG.
That is, the data processing device 53 mainly includes a CPU 53a, a memory 53b, a secondary storage device 53c, interfaces 53d and 53e, a counter 53f, a display unit 53g, an operation unit 53h, and the like.
The CPU 53a includes a control unit, an arithmetic processing unit, a register, and the like, and performs predetermined information processing on each data read through the memory 53b and the interfaces 53d and 53e by each processing described later. The memory 53b is connected to the CPU 53a via a system bus (not shown), and stores a program for performing each process described later. The interfaces 53d and 53e are also connected to the CPU 53a via a system bus (not shown).
[0013]
The interface 53d has a display unit 53g for performing pass / fail judgment (OK, + NG, -NG) display, abnormality occurrence display, etc., an operation unit 53h for inputting various conditions and the like, and secondary storage for storing each filed program. A device 53c is connected.
The other interface 53e is connected to a linear gauge 32 or a sequencer 51 corresponding to an external device. A counter signal is input from the linear gauge 32 via a counter 53f, and a timing signal is input from the sequencer 51. The
[0014]
With this configuration, the CPU 53a reads the counter signal sent from the linear gauge 32 based on the timing signal sent from the sequencer 51, and when the reading of the counter signal is completed, In contrast, a read completion signal can be sent. Since the pulse signal output from the linear gauge 32 is a two-phase pulse, the opening / closing information of the linear gauge is obtained by this.
[0015]
Next, the configuration of the multipoint measuring apparatus 30 will be described with reference to FIG. In the measurement system 20, the two types of multipoint measuring devices 30 are configured to face each other so that the diameter Wd of the workpiece W can be measured at multiple points. 1A is a schematic configuration diagram showing the configuration of the multipoint measuring device 30, and FIG. 1B shows the positional relationship between the workpiece and the contact when FIG. 1A is viewed from the direction perpendicular to the page. It is explanatory drawing shown.
As shown in FIG. 1A, the multipoint measuring device 30 mainly includes a linear gauge 32, a head 34, fingers 35, and contacts 36a, 36b, and 36c.
[0016]
The linear gauge 32 detects the amount of movement of the rod 32a entering and exiting from the main body by a combination of a digital scale and a digital counter using magnetism and light. That is, after the protrusion amount of the rod 32a is detected by a coil or an optical shutter provided on one end side of the rod 32a, this is digitized by a digital counter and a counter signal is output. Note that the movement amount of the head 34 is measured by the linear gauge 32 because a relatively wide range of measurement is possible. Therefore, when the measurement range is not so wide, for example, when the measurement range is on the order of 100 μm, the linear gauge 32 need not be used, and the movement amount of the head 34 may be measured using a differential transformer or the like.
[0017]
The head 34 is formed in a thick flat plate shape, and is attached to the other end side of the rod 32a entering and exiting from the linear gauge 32 so as to form a T shape together with the rod 32a. That is, the flat head 34 is attached to the other end of the rod 32a via the cylindrical attachment 34a so as to be positioned at a right angle to the rod 32a. Since the attachment portion 34a is configured to be detachable from the other end portion of the rod 32a, even if the head 34 needs to be replaced with another one, it can be easily replaced with another head 34. it can.
[0018]
The fingers 35 are formed in a short cylindrical shape, and are suspended at three positions with respect to the plate surface of the head 34. That is, as shown in FIG. 1B, the fingers 35 are provided at three locations on the diagonal line M on the surface opposite to the surface on which the mounting portion 34a is provided. The reason why the finger 35 is positioned in this way will be described in the description of the contactor 36 described below.
[0019]
The contacts 36 a, 36 b, and 36 c are formed in a hemispherical shape, and are attached with the plane side facing the tip of the finger 35. That is, the contacts 36a, 36b, and 36c are attached to the finger 35 so that the spherical surface portion of the contact 36 can come into contact with the outer peripheral surface Wa of the workpiece W. As a result, as shown in FIG. 1B, the contacts 36 a, 36 b, and 36 c are also positioned on the diagonal line M of the head 34 in the same manner as the fingers 35 positioned on the diagonal line M of the head 34.
[0020]
For this reason, when the head 34 is moved in the arrow direction in the figure by the X-axis slider 25 in the positional relationship in which the contacts 36a, 36b, 36c can come into contact with the outer peripheral surface Wa of the workpiece W, first, In addition, only the contact 36a comes into contact with the outer peripheral surface Wa of the workpiece W at the position A on the central axis K of the workpiece W. When the head 34 is further moved in the workpiece W direction, the contact 36a that has been in contact with the outer circumferential surface Wa is separated from the workpiece W, and then only the contact 36b is located at the position B on the central axis K at the outer circumferential surface Wa. Abut. When the head 34 continues to move further in the workpiece W direction, the contact 36b that has been in contact with the outer circumferential surface Wa is separated from the workpiece W, and finally only the contact 36c contacts the outer circumferential surface Wa at the position C on the central axis K. Touch.
[0021]
Thus, by positioning the contacts 36a, 36b, and 36c on the diagonal line M of the head 34 via the fingers 35, the two or more contacts 36a, 36b, and 36c do not contact the workpiece W at the same time. The positional relationship is maintained. Therefore, as described with reference to FIG. 1B, when the head 34 and the workpiece W move relatively, only one of the three contacts 36a, 36b, 36c is brought into contact with the workpiece W. Can do. As a result, the linear gauge 32 can detect the amount of movement by one contacted member among the three contacts 36a, 36b, 36c. Therefore, even when measuring the outer diameter Wd or the like of the workpiece W at multiple points, that is, when determining whether the taper that can occur in the cylindrical portion or the swelling of the outer peripheral surface is within the allowable range, Multipoint measurement can be performed with one linear gauge 32 without providing the linear gauge 32 for each. In the case of this embodiment, if the amount of movement of the head 34 by the three contacts 36a, 36b, 36c is regarded as the output of the linear gauge 32, the three peaks (α, γ, ε) and the like shown in FIG. It can be grasped as two bottoms (β, δ).
[0022]
In the present embodiment, the contacts 36a, 36b, 36c are positioned on the diagonal line M of the head 34 via the fingers 35. However, in the present invention, two or more do not simultaneously contact the object to be measured. The positional relationship is not limited to this. Therefore, for example, a plurality of contacts may be arranged on a line that bends in a square shape.
[0023]
In the present embodiment, the cylindrical workpiece W such as the journal portion of the crankshaft is described as an example. However, in the present invention, the measurable object to be measured is not limited to the cylindrical shape, for example, a flat plate shape. It may be a thing. However, in this case, it is necessary that the measurement target portion of the object to be measured has a rod shape or a band shape narrower than the distances P1, P2 in the moving direction of the contacts 36a, 36b, 36c shown in FIG. Become. This is because if the portion to be measured is wider than the distances P1 and P2, two or more of the contacts 36a, 36b and 36c will be in contact with each other simultaneously.
[0024]
Subsequently, the operation of the measurement system 20 will be described with reference to FIGS. 1 and 2.
As shown in FIG. 2, alignment is performed by the Y-axis slider 23 so that the pair of multipoint measuring devices 30 is positioned above the workpiece W set on the table 26. When the pair of multipoint measuring devices 30 reaches above the workpiece W, the multipoint measuring device 30 is lowered by the X-axis slider 25 from above the workpiece W in a direction perpendicular to the central axis of the workpiece W. Come. At this time, the pair of multi-point measuring devices 30 are secured so that the facing interval is wider than the diameter Wd of the workpiece W, so that the multi-point measuring device 30 descends beyond the workpiece W until it is positioned below the workpiece W. it can.
[0025]
When the position of the pair of multipoint measuring devices 30 reaches below the work W, the facing distance of the multipoint measuring device 30 is closed so as to be narrower than the diameter Wd of the work W, and the pair of multipoint measuring devices 30 is maintained while maintaining the state. The measuring device 30 is moved upward of the workpiece W by the X-axis slider 25. As a result, the contacts 36a, 36b, 36c attached to the head 34 come into contact with the outer peripheral surface Wa of the workpiece W. That is, as described above with reference to FIG. 1B, the contact 36a sequentially contacts the outer peripheral surface Wa at the position A, and then the contact 36b contacts the outer peripheral surface Wa at the position B, and then the contact. 36c contacts the outer peripheral surface Wa at the position C. Since the contact with the outer peripheral surface Wa by the contacts 36a, 36b, and 36c is performed on both sides in the radial direction of the workpiece W, the linear gauge 32 obtained by the contact of the respective contacts 36a, 36b, and 36c. Counter signals are sequentially sent to the data processor 53, and the diameter Wd of the workpiece W is measured.
[0026]
As described above, in the pair of multipoint measuring devices 30, when the diameter Wd of the workpiece W is measured, a counter signal is sent from the linear gauge 32 to the data processing device 53. Thereby, each processing described below is performed by the data processing device 53. Hereinafter, a description will be given with reference to FIGS.
[0027]
As shown in FIG. 4A, first, in step S10, the data reading process, that is, the counter signal is read from the pair of linear gauges 32.
In step S12, the counter signal is added to calculate a measurement value corresponding to the diameter Wd of the workpiece W. In subsequent step S14, the measured value is compared with a master value which is a reference value measured in advance. Thereby, the dimension calculation of the diameter Wd of the workpiece | work W is performed.
[0028]
The diameter Wd of the workpiece W thus calculated is determined by the determination process in step S14 based on the comparison result with the master value to determine whether it is within a preset dimension allowable range. That is, if it is within the allowable dimension range, the process proceeds to step S16, and “OK”, which is a non-defective item display, is displayed on the display unit 53g. On the other hand, if it is not within the allowable dimension range and exceeds the lower limit value, “−NG”, which is a defective product display, is displayed on the display unit 53g (S15), but is not within the allowable dimension range and exceeds the upper limit value. Then, “+ NG”, which is a defective product display, is displayed on the display portion 53g (S17). In step S18, the dimension display of the diameter Wd of the workpiece W is displayed on the display means or the like, and the series of processes is completed.
[0029]
Here, the contents of the data reading process in step S10 will be further described. The contents can be divided into five steps as shown in FIG. This is a process performed to detect the three peaks (α, γ, ε) and the two bottoms (β, δ) shown in FIG.
[0030]
That is, the data reading process in step S10 includes a first peak detection process (S100) for detecting the first peak α shown in FIG. 8A and a first peak β for detecting the first bottom β shown in FIG. Bottom detection process (S150), second peak detection process (S200) for detecting the second peak γ shown in the figure, and second bottom detection process (S250) for detecting the second bottom δ shown in the figure And the 3rd peak detection process (S300) for detecting the 3rd peak (epsilon) shown in the figure is performed sequentially.
[0031]
As shown in FIG. 5A, the first peak detection process is first performed from the initial value storing process in step S110. That is, a process of storing each value and data number in a predetermined register or the like with the largest value among the data detected by the linear gauge 32 as the maximum value and the smallest value as the minimum value. I do.
[0032]
In the subsequent step S112, processing for determining whether or not the next data is larger than the previous data is performed. That is, if the next data is larger than the previous data (Yes in S112), the detected data tends to increase, so the process proceeds to step S113, and the next data is larger than the maximum value stored previously. Make a decision. On the other hand, if the next data is not larger than the previous data in step S112 (No in S112), the detected data does not tend to increase, so the process proceeds to step S114, and the next data subtracts 10 μm from the maximum value. It is determined whether or not the value is smaller than the value.
[0033]
A value obtained by subtracting 10 μm from the maximum value (maximum value−10 μm) is a boundary value for determining that the first peak α is detected. If the value is below this value (Yes in S114), the first value It is determined that the peak α has been detected, the first peak detection process is terminated (RET), and the process returns to the data reading process shown in FIG.
[0034]
If the next data is not smaller than the value obtained by subtracting 10 μm from the maximum value in step S114 (No in S114), the process proceeds to step S117, and whether the data number of the next data is larger than 300 or not. Judgment is made. If the first peak α cannot be detected even if it exceeds half of the total number of samplings 600 (Yes in S117), the abnormality detection process in step S119 is executed, and the fact is displayed on the display unit 53g of the data processing device 53. To notify the operator of the occurrence of an abnormality. On the other hand, if the data number is 300 or less (No in S117), the process proceeds again to step S112, and the same process as described above is performed for the next data.
[0035]
In step S113, it is determined whether or not the next data is larger than the previously stored maximum value. If the next data is larger than the previously stored maximum value (Yes in S113), a process of storing this next data as a new maximum value is performed in Step S115, otherwise (No in S113). The process again proceeds to step S112, and the same process as described above is performed for the next data.
[0036]
As shown in FIG. 5B, in the first bottom detection process, first, in step S160, the previous data is stored as a new minimum value.
In the subsequent step S162, processing for determining whether or not the next data is smaller than the previous data is performed. That is, if the next data is smaller than the previous data (Yes in S162), the detected data tends to decrease, so the process proceeds to step S163 and the data number of the next data is greater than 350. Make a decision. If the data number of the next data is greater than 350 (Yes in S163), the abnormality detection process in step S165 is executed, and this is notified to the operator or the like by the display unit 53g of the data processing device 53. . On the other hand, if the data number is 350 or less (No in S163), after performing the process of storing the next data as a new minimum value in step S167, the process proceeds to step S162 again, and the next data The same processing as described above is performed.
[0037]
On the other hand, if the next data is not smaller than the previous data in step S162 (No in S162), the detected data does not tend to decrease, so the process proceeds to step S164, and the next data adds 10 μm to the minimum value. It is determined whether or not the value is larger than the value. A value obtained by adding 10 μm to the minimum value (minimum value + 10 μm) is a boundary value for determining that the first bottom β is detected. If this value is exceeded (Yes in S164), the first bottom It is determined that β has been detected, the first bottom detection process is terminated (RET), and the process returns to the data reading process shown in FIG. On the other hand, if this value is not exceeded (No in S164), the process proceeds again to step S162, and the same process as described above is performed for the next data.
[0038]
As shown in FIG. 6A, in the second peak detection process, first, in step S210, the previous data is stored as a new maximum value.
In a succeeding step S212, processing for determining whether or not the next data is larger than the previous data is performed. That is, if the next data is larger than the previous data (Yes in S212), the detected data tends to increase. Therefore, the process proceeds to step S213 and the next data is stored as a new maximum value. Processing continues to step S214. On the other hand, if not (No in S212), since the detected data does not tend to increase, the process proceeds to the subsequent step S214.
[0039]
In step S214, it is determined whether or not the data number of the next data is greater than 400. If the data number of the next data is greater than 400 (Yes in S214), the abnormality detection process in step S215 is executed, and the fact is notified to the operator or the like by the display means. On the other hand, if the data number is 400 or less (No in S214), it is determined in the subsequent step S216 whether or not the next data is smaller than the value obtained by subtracting 10 μm from the maximum value.
[0040]
A value obtained by subtracting 10 μm from the maximum value (maximum value−10 μm) is a boundary value for determining that the second peak γ is detected. If the value is below this value (Yes in S216), the second value is obtained. It is determined that the peak γ has been detected, the second peak detection process is terminated (RET), and the process returns to the data reading process shown in FIG. On the other hand, if it is not less than this value (No in S216), the process proceeds to step S212 again, and the same process as described above is performed for the next data.
[0041]
As shown in FIG. 6B, the second bottom detection process is performed in substantially the same manner as the second bottom detection process shown in FIG. That is, first, in step S260, the previous data is stored as a new minimum value.
In the subsequent step S262, a process for determining whether or not the next data is smaller than the previous data is performed. If the next data is smaller than the previous data (Yes in S262), the detected data tends to decrease. Therefore, the process proceeds to step S263, and whether the data number of the next data is larger than 500 or not. Make a decision. If the data number of the next data is greater than 500 (Yes in S263), the abnormality detection process in step S265 is executed, and this is notified to the operator or the like by the display unit 53g of the data processing device 53. . On the other hand, if the data number is 500 or less (No in S263), after performing the process of storing this next data as a new minimum value in step S267, the process proceeds to step S262 again, and the next data The same processing as described above is performed.
[0042]
On the other hand, if the next data is not smaller than the previous data in step S262 (No in S262), the detected data does not tend to decrease, so the process proceeds to step S264, and the next data adds 10 μm to the minimum value. It is determined whether or not the value is larger than the value. A value obtained by adding 10 μm to the minimum value (minimum value + 10 μm) is a boundary value for determining that the second bottom δ is detected. If this value is exceeded (Yes in S264), the second bottom It is determined that δ has been detected, the second bottom detection process is terminated (RET), and the process returns to the data reading process shown in FIG. On the other hand, if this value is not exceeded (No in S264), the process proceeds to step S262 again, and the same process as described above is performed for the next data.
[0043]
As shown in FIG. 7, in the third peak detection process, first, the previous data is stored as a new maximum value in step S310.
In the subsequent step S312, a process for determining whether or not the next data is larger than the previous data is performed. That is, if the next data is larger than the previous data (Yes in S312), the detected data tends to increase. Therefore, the process proceeds to step S314, and the next data is stored as a new maximum value. The process moves to the subsequent step S316. On the other hand, if not (No in S312), since the detected data does not tend to increase, the process proceeds to step S318 without performing the processes in steps S314 and S316.
[0044]
In step S316, that is, if the next data is larger than the previous data, it is determined whether or not the data number of the next data is larger than 550. If the data number of the next data is greater than 550 (Yes in S316), the abnormality detection process in step S313 is executed, and the fact is notified to the operator or the like by the display unit 53g of the data processing device 53. On the other hand, if the data number is 550 or less (No in S316), the process proceeds to step S318.
[0045]
In step S318, it is determined whether or not the next data is smaller than a value obtained by subtracting 10 μm from the maximum value. A value obtained by subtracting 10 μm from the maximum value (maximum value−10 μm) is a boundary value for determining that the third peak ε has been detected. If the value is below this value (Yes in S318), the third value It is determined that the peak ε is detected, the third peak detection process is ended (RET), and the data reading process shown in FIG. 4B is also ended. On the other hand, if it is not less than this value (No in S318), the process proceeds to Step S315, and it is determined whether or not the data number of the next data is greater than 598.
[0046]
In step S315, it is determined whether or not the data number of the next data is just before reaching the total sampling number 600. That is, when it is not possible to determine that the third peak ε has been detected in step S318 (Yes in S315) despite being just before the end of sampling, the abnormality detection process in step S317 is executed, and the display unit 53g Announce the effect to the operator. On the other hand, if the data number is 598 or less (No in S315), the process proceeds to step S312 again, and the same process as described above is performed for the next data.
[0047]
By each processing by the data processor 53 described above, three peaks (α, γ, ε) and two bottoms (β, δ) as shown in FIG. 8A are detected, and further, FIG. A measured value corresponding to the diameter Wd diameter of the workpiece W is calculated from step S12 according to A). In addition, what is shown in FIG. 8 (A) is an example of characteristic data by a non-defective product in which each peak value is adapted to a dimension difference of 0, and what is shown in FIG. 8 (B) is the first peak α and the third peak ε. This is an example of characteristic data of a defective product in which the dimensional differences are generated by + Δd1 and -Δd2, respectively.
[0048]
According to the multipoint measuring device 30 according to the measurement system 20 described above, the head 34 that can approach or separate from the workpiece W has a plurality of contacts 36a, 36b, and 36c that do not simultaneously contact the workpiece W. The amount of movement of the head 34 is detected by the linear gauge 32. As a result, when the head 34 and the workpiece W are relatively moved by the X-axis slider 25, the contact 36a of the plurality of contacts 36a, 36b, 36c comes into contact with the workpiece W, and the amount of movement of the head 34 due to the contact 36a. Is detected by the linear gauge 32, and when the head 34 and the workpiece W move relative to each other, another contact 36b of the plurality of contacts 36a, 36b, 36c comes into contact with the workpiece W and thereby the head 34 Is detected by the linear gauge 32. That is, the amount of movement of the contacts 36 a, 36 b, and 36 c that are in contact with the positions A, B, and C of the outer peripheral surface Wa of the workpiece W can be detected by one linear gauge 32. Therefore, even if there is a request to change the measurement location or measurement position, the head 34 provided with the contact 36a or the like corresponding to the request may be replaced without changing the linear gauge 32. There is an effect that can be easily changed. Further, since the number of linear gauges 32 for detecting the amount of movement of the head 34 can be reduced to one, there is an effect that the multipoint measuring device 30 can be realized with a simple configuration without affecting the measurement accuracy. .
[0049]
The “measuring device” disclosed in Japanese Patent Application Laid-Open No. 11-325876 employs a configuration in which a linear gauge measuring element and a differential transformer measuring element are arranged in parallel. That is, the differential transformer is an essential component. Therefore, there are the following problems.
(A) Since a differential transformer is required, a signal processing circuit for the differential transformer is required, which increases the number of components and the configuration.
(B) Since wiring for transmitting a signal output from the differential transformer is required, processing of the wiring with respect to the movable portion, routing, and the like become complicated.
(C) Every time the measuring head is replaced, electrical and mechanical adjustment of the differential transformer is required, and inconveniences are likely to occur in terms of maintainability and maintainability.
[0050]
In this regard, in the multipoint measuring apparatus 30 according to the present embodiment, the movement of the contacts 36a, 36b, and 36c that respectively contact the positions A, B, and C of the outer peripheral surface Wa of the workpiece W without using a differential transformer. The quantity is detected by one linear gauge 32. For this reason, even if there is a request to change the measurement location or the like, if the head 34 is changed to another one, there is no need to change the linear gauge 32 itself. The mounting portion 34a of the head 34 is configured to be detachable from the other end of the rod 32a of the linear gauge 32. For this reason, even if it is necessary to replace the head 34 with another head, it can be easily replaced with another head 34. Therefore, the multipoint measuring apparatus 30 according to the present embodiment eliminates the problems (A) to (C) and has a simple configuration without affecting the measurement accuracy. 30 is realized.
[0051]
【The invention's effect】
  In the invention of claim 1,By means of transportationOn the object to be measuredAgainstThe movable part that can approach or be separated is provided with a plurality of contacts that do not contact two or more objects to be measured simultaneously, and the amount of movement of the movable part is detected by the detecting means. Thereby, when the movable part and the object to be measured are relatively moved by the moving means, one of the plurality of contacts comes into contact with the object to be measured, and the amount of movement of the movable part due to the contact is detected by the detecting means, When the movable part and the object to be measured are further moved relative to each other, another one of the plurality of contacts comes into contact with the object to be measured, and the amount of movement of the movable part due to the contact is detected by the detecting means. That is, it is possible to detect the amount of movement of the contact that is in contact with a plurality of locations by one detection means.Further, since the moving means allows the movable portion to be detachably attached, the movable portion can be easily replaced with another movable portion.Therefore, even if there is a request to change the measurement location or measurement position, it is possible to change the measurement location or measurement position easily by replacing the movable part that provides the contact corresponding to the request without changing the detection means. There is a possible effect. In addition, since the number of detection means for detecting the amount of movement of the movable part can be reduced to one, there is an effect that a multipoint measuring apparatus can be realized with a simple configuration without affecting the measurement accuracy.
[0052]
  In the invention of claim 2,It is determined whether there is a dimension measurement value within a predetermined tolerance based on the dimension reference value.Thereby, the dimension of a to-be-measured object can be measured from the relative dimensional relationship with the dimension reference value by a reference | standard object. Therefore, in addition to the effect of easily changing the measurement location and measurement position, the reference object and the object to be measured are similarly deformed even if there is a shape deformation due to changes in the ambient temperature. There is an effect that the dimensions can be measured more easily and accurately than the measurement by the absolute value. In addition, even if the number of detection means for detecting the amount of movement of the movable part is reduced to one, it is possible to measure the dimensions of the object to be measured more easily and accurately than by measuring the absolute value. There is an effect that the dimensions can be measured with a simple configuration without affecting.
[Brief description of the drawings]
FIG. 1 (A) is a schematic configuration diagram showing a configuration of a multipoint measuring apparatus according to an embodiment of the present invention, and FIG. 1 (B) is a plan view of FIG. It is explanatory drawing which shows the positional relationship of the workpiece | work and a contact in the case of seeing.
FIG. 2 is an explanatory diagram showing an overall configuration of a measurement system according to the present embodiment.
FIG. 3 is a block diagram showing a configuration of a data processing apparatus that constitutes the measurement system according to the present embodiment.
4A is a flowchart showing an overview of the entire processing by the data processing apparatus, and FIG. 4B is a flowchart showing an overview of the data reading process shown in FIG. 4A.
FIG. 5 (A) is a flowchart showing an outline of the first peak detection process shown in FIG. 4 (B), and FIG. 5 (B) shows the first bottom detection process shown in FIG. 4 (B). It is a flowchart which shows the outline | summary.
6 (A) is a flowchart showing the flow of the second peak detection process shown in FIG. 4 (B), and FIG. 6 (B) is the second bottom shown in FIG. 4 (B). It is a flowchart which shows the flow of a process of a detection process.
FIG. 7 is a flowchart showing an outline of third peak detection processing shown in FIG.
8A and 8B are data characteristic diagrams showing an example of measurement data measured by the measurement system according to the present embodiment, in which FIG. 8A shows good product data and FIG. 8B shows defective product data.
FIG. 9 is an explanatory diagram showing an overall configuration of a conventional multipoint measuring apparatus.
[Explanation of symbols]
20 Measuring system
23 Y-axis slider (moving means)
25 X-axis slider (moving means)
30 Multi-point measuring device
32 Linear gauge (detection means)
34 head (movable part)
35 fingers (movable parts)
36a, 36b, 36c Contact
51 Sequencer
53 Data processing equipment
α First peak
β 1st bottom
γ Second peak
δ 2nd bottom
ε Third peak

Claims (2)

And the moving parts,
A moving means capable of detachably attaching the movable portion and moving the movable portion so as to be close to or away from the object to be measured;
Wherein a plurality of contacts that provided in the movable portion contactable to the object to be measured, when the movable portion from said moving means is moved toward the object to be measured, among the plurality of contacts Instead of contacting the object to be measured when the movable part moves in a direction in which the movable part approaches the object to be measured. A plurality of contacts in a positional relationship such that two or more of the plurality of contacts do not contact the device under test at the same time, so that another one contacts the device under test ;
Detection means capable of detecting the amount of movement of the movable portion in the anti-contact direction when any one of the plurality of contacts contacts the object to be measured ;
A multi-point measuring device comprising: A dimension measuring method using the multipoint measuring apparatus according to claim 1, wherein the multipoint measuring apparatus measures a dimension reference value by a reference object,
A step of measuring a dimensional measurement value by an object to be measured by the multi-point measuring device;
Determining whether the dimension measurement value is within a predetermined tolerance based on the dimension reference value ;
A dimension measuring method comprising:

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