JP3671387B2 - Robot access system and robot access control method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a technique for controlling a plurality of robots each capable of accessing any region within an effective range.
[0002]
[Prior art]
For example, in a conventional robot access system that includes two robots each capable of accessing a certain area and two controllers that control each robot independently, the controller is the object to be controlled. When the above robot is accessed in the above area, the notification signal is continuously output while the other controller is being accessed. On the other hand, the other controller prevents the control target robot of the controller from accessing the area while the notification signal is input.
[0003]
However, in such a robot access system, when the controller is trying to access the control target robot, the controller makes the access as it is unless a notification signal is input from the partner controller. Therefore, when both controllers are trying to access their respective controlled robots simultaneously in the above area, neither controller receives a notification signal from the other controller. May simultaneously access the above-mentioned area, and there is a risk of causing mutual interference in the above-mentioned area.
[0004]
Therefore, in order to avoid this, in the conventional improved robot access system, when the robot to be controlled tries to access the area, the controller outputs a notification signal to the partner controller. After that, it is determined whether a notification signal is input from the controller of the other party for a certain period of time. If the notification signal is not input, the control target robot is accessed in the above area. Was not allowed to access the above area.
[0005]
[Problems to be solved by the invention]
However, in the above-described conventional robot access system, the area accessed by the robot is always the same area, and the area does not change. Therefore, for example, in a case where the robot can access any area within a predetermined effective range and the area accessed by the robot always changes, mutual interference between the robots during access is avoided. There was no particular consideration for this.
[0006]
Also, in the conventional robot access system, after the controller outputs the notification signal, whether or not the notification signal is input from the partner controller is always constant regardless of whether the notification signal is actually input or not. There is a problem that the average access speed of the robot becomes slow because it is necessary to determine the time.
[0007]
Therefore, the object of the present invention is to solve the above-mentioned problems of the prior art, and even when the area accessed by the robot is constantly changing, mutual interference between the robots during access can be avoided, and the average access of the robot It is an object to provide a robot access system and a robot access method capable of improving the speed.
[0008]
[Means for solving the problems and their functions and effects]
  In order to achieve at least a part of the above object, a first robot access system of the present invention includes:A buffer unit having a plurality of storage shelves stacked in multiple stages, first and second robots that can access any storage shelves of the buffer unit, and the first and second robots A robot access system comprising: a first controller and a second controller for independently controlling the two robots;
When the second controller makes the second robot access a certain storage shelf in the buffer unit, the second controller accesses the access target storage shelf that is the storage shelf to be accessed by the first controller. An access request signal for requesting access permission and position information indicating the position of the access storage shelf in the buffer unit, and thereafter permitting access to the access storage shelf from the first controller. Until the access permission signal is input, the second robot is not accessed to the access target storage shelf, and when the access permission signal is input, the second robot is accessed to the access target storage shelf. As well as
When the access request signal and the position information are input from the second controller, the first controller specifies a position of the access storage shelf in the buffer unit based on the position information. Determining whether the access target storage shelf is one of the storage shelf accessed or about to be accessed by the first robot and the storage shelf above and below the storage shelf. Assuming that there is no possibility of mutual interference between the first robot and the second robot, the access permission signal is output to the second controller. Since there is a possibility of mutual interference, the access permission signal is not output to the second controller, and then there is no possibility of mutual interference. If the access permission signal is output and the access permission signal is output, the first robot may cause the mutual interference until the access by the second robot is completed. Do not allow access to storage shelvesThis is the gist.
[0009]
  In addition, the present inventionFirstRobot accessSystem controlThe method isA buffer unit having a plurality of storage shelves stacked in multiple stages, first and second robots that can access any storage shelves of the buffer unit, and the first and second robots A control method for controlling a robot access system comprising: a first and a second controller for independently controlling two robots;
(A) When the second controller accesses the second robot to a certain storage shelf in the buffer unit, the second controller attempts to access the first controller. Outputting an access request signal for requesting access permission to the access target storage shelf which is the storage shelf and position information indicating the position of the access target storage shelf in the buffer unit;
(B) Until the second controller receives an access permission signal for permitting access to the access target storage shelf from the first controller, the second controller When the access permission signal is input from the first controller without allowing the robot to access the access target storage shelf, the step of causing the second robot to access the access target storage shelf;
(C) When the first controller receives the access request signal and the location information from the second controller, the first controller uses the buffer based on the location information. Whether the access target storage shelf is one of the storage shelf that is being accessed or about to be accessed by the first robot and the storage shelf above and below the storage shelf. Determining whether or not
(D) If the result of determination is none, the first controller assumes that there is no possibility of mutual interference between the first robot and the second robot, and the second controller Outputting the access permission signal to the controller;
(E) If the result of the determination is either, the first controller does not output the access permission signal to the second controller because there is a possibility that the mutual interference may occur. Thereafter, when there is no possibility of the mutual interference, outputting the access permission signal;
(F) When the first controller outputs the access permission signal to the second controller, the first controller until the access by the second robot is completed, Preventing the first robot from accessing a storage shelf where the mutual interference may occur;
WithThis is the gist.
[0014]
  Therefore, according to the first robot access system and the robot access system control method of the present invention, even when the area accessed by the robot changes, mutual interference between the robots does not occur during access.
AlsoThe present invention1Robot access systemOr robot access system control methodAccording to the second robot,A storage shelf in the buffer sectionTo access the second controller, it must wait until the access permission signal is input to the second controller, but the first controller is identified by the first robot.Storage shelfSince the access permission signal is output immediately as long as the second robot is not accessed, the second robot need not always wait for a certain period of time as in the prior art. In addition, the first robotA storage shelf in the buffer sectionAs long as there is no possibility of mutual interference with the second robot even if the first controller does not output the access permission signal to the second controller Without waiting, thatStorage rackCan be accessed immediately. Therefore, since the average access speed of the robot can be improved as a whole, it is possible to sufficiently cope with a case where the access frequency of the robot is high.
Since the second controller itself recognizes which storage shelf the second robot is trying to access, the first controller sends information indicating the position of the storage shelf to the first controller. Then, it is possible to accurately specify the storage shelf to be accessed by the second robot.
[0017]
  First of the present invention2Robot access systemA buffer unit having a plurality of storage shelves stacked in multiple stages, a plurality of robots each capable of accessing an arbitrary storage shelf of the buffer unit, and each robot is controlled independently. A robot access system comprising a plurality of controllers,
A flag setting means capable of setting a flag corresponding to each storage shelf in the buffer unit in common with the plurality of controllers;
Each of the plurality of controllers has an access target storage shelf that is the storage shelf to be accessed by the flag setting unit when the robot to be controlled accesses a storage shelf in the buffer unit, and It is determined whether or not a flag corresponding to any of the upper and lower storage shelves is set, and if the flag corresponding to either the access target storage shelf or the upper and lower storage shelves is not set, After setting a flag corresponding to the access target storage shelf in the flag setting means, the control target robot is made to access the access target storage shelf, and corresponds to either the access target storage shelf or the storage shelf above and below it. When the flag is set, the access target robot is not accessed until the flag is cleared. If the target storage shelf is not accessed and then the setting of the flag is canceled, a flag corresponding to the access target storage shelf is set in the flag setting means, and then the control target robot is accessed to the access target storage shelf. As well as
Thereafter, when the access to the access target storage shelf by the control target robot is completed, the flag set in the flag setting unit is canceled.This is the gist.
[0018]
  Further, the second robot access system control method of the present invention can respectively access a buffer unit having a plurality of storage shelves stacked in multiple stages and an arbitrary storage shelf of the buffer unit. A plurality of robots, a plurality of controllers for controlling each robot independently, and a flag setting capable of setting a flag corresponding to each storage shelf in the buffer unit in common with the plurality of controllers. A control method for controlling a robot access system comprising means,
(A) When the controller makes a robot to be controlled access a certain storage shelf in the buffer unit, the flag setting means accesses the access storage shelf that is the storage shelf to be accessed and its upper and lower Determining whether a flag corresponding to any of the storage shelves is set,
(B) As a result of the determination, if a flag corresponding to any of the access target storage shelves and the upper and lower storage shelves is not set, the controller sets the flag setting means to the access target storage shelves. After setting the corresponding flag, allowing the controlled robot to access the access target storage rack;
(C) As a result of the determination, when the flag corresponding to either the access target storage shelf or the storage shelf above and below the storage shelf is set, until the controller cancels the setting of the flag, If the control target robot is not accessed to the access target storage shelf and then the setting of the flag is canceled, a flag corresponding to the access target storage shelf is set in the flag setting means, and then the control target robot is Accessing the access storage shelf;
(D) when the access to the access target storage shelf by the control target robot is completed, the controller releases the flag set in the flag setting means;
It is a summary to provide.
[0019]
  Therefore, according to the second robot access system and the robot access system control method of the present invention, even when the area accessed by the robot changes, mutual interference between the robots does not occur during access.
AlsoThe present invention2Robot access systemAnd robot access system control methodAccording to the robot isStorage rackSpecific to flag setting means when accessingStorage shelfIf the flag corresponding to is not set, access targetStorage rackTherefore, it is not necessary to always wait for a certain period of time as in the prior art. Therefore, since the average access speed of the robot can be improved as a whole, it is possible to sufficiently cope with a case where the access frequency of the robot is high.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described based on examples. FIG. 1 is a block diagram showing a configuration of a robot access system as a first embodiment of the present invention. FIG. 2 is a plan view showing an overall configuration of a substrate processing apparatus to which the robot access system of FIG. 1 is applied. FIG. 3 is a front view of the interface unit in FIG. 2 as viewed from the exposure unit side. 2 and 3 are provided with an XYZ orthogonal coordinate system in order to clarify the positional relationship.
[0023]
Before describing the robot access system shown in FIG. 1, a substrate processing apparatus to which the robot access system is applied will be described.
[0024]
The substrate processing apparatus shown in FIG. 2 is a substrate processing apparatus for performing each substrate processing in a photolithography process on a semiconductor wafer (substrate), and includes an indexer 1, a processing unit 2, an interface unit (IF unit) 3, An exposure unit 4 is provided.
[0025]
The indexer 1 includes a carry-in / out table 11 for delivering the carrier C to / from the automatic carrier transfer apparatus 5, a carrier C placed on the carry-in / out table 11, and a substrate transfer robot in the processing unit 2 described later. A substrate carry-in / out robot 12 and the like for transferring the substrate W to and from 23 are provided.
[0026]
The processing unit 2 includes a first device placement unit 21, a second device placement unit 22, and a transport path 24 for the substrate transport robot 23. A plurality of spin coaters SC for performing resist coating, spin developers SD for performing development, and the like are disposed in the first apparatus placement section 21 along the X-axis direction of FIG. The second apparatus placement unit 22 is provided with a bake unit BU for performing pre-bake, post-bake, and the like, and a plurality of edge exposure units EEW. In addition, near the end of the second apparatus placement unit 22 on the IF unit 3 side, a substrate transfer table for transferring the substrate W to and from a first substrate transfer robot 31 described later in the IF unit 3. 25 is provided. A plurality of substrate support pins 25a are erected in the vertical direction on the substrate delivery table 25, and the substrate W is placed on these substrate support pins 25a to deliver the substrate W.
[0027]
A transfer path 24 of the substrate transfer robot 23 is provided between the first and second apparatus placement units 21 and 22. The substrate transfer robot 23 includes a horseshoe-shaped hand 23b having a plurality of protrusions 23a for mounting and supporting the substrate W, an extension / contraction part 23c for extending / contracting the hand 23b in the horizontal direction (XY plane), and an extension / contraction part 23c. A rotating part (not shown) for rotating the hand 23b around the Z axis via an expansion / contraction part 23c, a Z direction moving part 23e for moving the hand 23b in the Z axis direction via the rotation part, and an expansion / contraction part 23c, rotation And an X-direction moving unit 23f that moves the hand 23b in the X-axis direction via the Z-direction moving unit 23e. Among these, the expansion / contraction part 23c, the Z direction moving part 23e, and the X direction moving part 23f are configured by a well-known uniaxial moving mechanism including a screw shaft 23g, a motor 23h, and a guide shaft 23i.
[0028]
With the above-described configuration, the substrate transfer robot 23 can appropriately combine the rotation of the hand 23b around the Z axis, the movement in the X and Z axis directions, and the expansion and contraction to appropriately combine the spin coater SC, the spin developer SD, the bake unit BU, and the cooling device. , Access to a processing apparatus such as the edge exposure unit EEW (loading / unloading operation of the substrate W with respect to each apparatus), placement / removal of the substrate W with respect to the substrate transfer table 25, and substrates between the apparatuses in the processing unit 2 W is transported.
[0029]
The IF unit 3 is a portion to which the robot access system of the present invention is applied. As shown in FIGS. 2 and 3, the first substrate transfer robot 31, the buffer unit 32, the second substrate transfer robot 33, The substrate carry-in table 34 and the substrate carry-out table 35 are integrated into a unit. The IF unit 3 further includes two table bases 37a and 37b for setting the first and second cassettes 36a and 36b, respectively.
[0030]
The first substrate transport robot 31 includes a Z-direction drive unit 31a, a connecting member 31b, a rotation drive unit 31c, a telescopic drive unit 31d, a substrate support unit 31e, and the like. The Z-direction drive unit 31a is fixed to the lower surface of the IF unit 3, and a screw shaft 31aa standing in a rotatable manner along the Z-axis direction and a screw shaft 31aa are arranged in the interior thereof. A guide shaft (not shown) and a motor 31ab that rotates the screw shaft 31aa in the forward and reverse directions are provided. The connecting member 31b has a base end screwed to a screw shaft 31aa in the Z-direction drive portion 31a and is slidably fitted to the guide shaft, and the screw shaft 31aa rotates in the forward and reverse directions. It can be moved in the Z-axis direction. In addition, a rotation driving unit 31c is fixed to the distal end portion of the connecting member 31b.
[0031]
The rotation drive unit 31c includes therein a rotation shaft 31ca that is erected so as to be rotatable in the Z-axis direction, and a motor 31cb that rotates the rotation shaft 31ca in the forward and reverse directions. In addition, a telescopic drive unit 31d is fixed to the tip of the rotation shaft 31ca. The telescopic drive unit 31d includes a motor 31da and a timing belt 31db driven by the motor 31da. A base end portion of the substrate support portion 31e is connected to a part of the timing belt 31db. By driving the timing belt 31db, the substrate support portion 31e expands and contracts with respect to the expansion / contraction drive portion 31d. . In addition, by rotating the rotation shaft 31ca of the rotation drive unit 31c in the forward and reverse directions, the expansion / contraction drive unit 31d and the substrate support unit 31e are rotated around the Z axis, and an arbitrary direction in the XY plane (horizontal plane). The substrate support 31e can be extended and contracted. Furthermore, by rotating the screw shaft 31aa of the Z-direction drive portion 31a in the forward and reverse directions, the height of the substrate support portion 31e in the Z-axis direction via the connecting member 31b, the rotation drive portion 31c, and the telescopic drive portion 31d. Can be adjusted.
[0032]
With the configuration as described above, the first substrate transport robot 31 places / takes out the substrate W from / to the substrate transfer table 25 in the processing unit 2 and the substrate W to / from any storage shelf 32a of the buffer unit 32 described later. Store / remove. That is, the placement / removal of the substrate W with respect to the substrate transfer table 25 is performed by moving the expansion / contraction drive unit 31d and the like so that the front surface of the substrate support unit 31e faces the substrate transfer table 25, and moving the substrate support unit 31e in the X-axis direction. The substrate W is accommodated / removed from / to the buffer unit 32 by moving the expansion / contraction drive unit 31d and the like so that the front surface of the substrate support unit 31e faces the buffer unit 32. This is done by expanding and contracting in the axial direction.
[0033]
In FIG. 3, the opening 2 a is opened to pass the first substrate transport robot 31 that supports the substrate W when the substrate W is transferred between the processing unit 2 and the IF unit 3. .
[0034]
The second substrate transfer robot 33 includes a Y-direction drive unit 33a, a first connection member 33b, a Z-direction drive unit 33c, a second connection member 33d, a rotation drive unit 33e, a telescopic drive unit 33f, a substrate support unit 33g, and the like. It consists of The Y-direction drive unit 33a is fixed to the inner surface of the IF unit 3, and a screw shaft 33aa that is erected so as to be rotatable along the Y-axis direction and a screw shaft 33aa are disposed in the Y-direction drive unit 33a. A guide shaft 33ab and a motor 33ac that rotates the screw shaft 33aa in the forward and reverse directions. The first connecting member 33b is screwed to the screw shaft 33aa in the Y-direction drive unit 33a, and is slidably fitted to the guide shaft 33ab, and the screw shaft 33aa rotates in the forward and reverse directions. It can be moved in the Y-axis direction. A Z-direction drive unit 33c is fixed to the upper part of the first connecting member 33b.
[0035]
In the second substrate transport robot 33, the Z direction drive unit 33c, the second connecting member 33d, the rotation drive unit 33e, the telescopic drive unit 33f, and the substrate support unit 33g are respectively in the Z direction of the first substrate transport robot 31. The drive unit 31a, the connecting member 31b, the rotation drive unit 31c, the expansion / contraction drive unit 31d, and the substrate support unit 31e have the same configuration and can perform the same operation. That is, also in the second substrate transport robot 33, the substrate support portion 33g expands and contracts with respect to the expansion / contraction drive portion 33f, and the rotation drive portion 33e connects the expansion / contraction drive portion 33f and the substrate support portion 33g to Z. The substrate support 33g can be expanded and contracted in an arbitrary direction in the XY plane (horizontal plane) by rotating around the axis. Further, the height in the Z-axis direction of the substrate support portion 33g can be adjusted by the Z-direction drive portion 33c via the second connecting member 33d, the rotation drive portion 33e, and the telescopic drive portion 33f.
[0036]
In addition, in the second substrate transport robot 33, the first connecting member 33b, the Z direction driving unit 33c, and the second connecting unit 33b are rotated by rotating the screw shaft 33aa of the Y direction driving unit 33a in the forward and reverse directions. Through the member 33d and the rotation drive unit 33e, the positions of the expansion / contraction drive unit 33f and the substrate support unit 33g in the Y-axis direction can be changed.
[0037]
With the above-described configuration, the second substrate transport robot 33 stores / takes out the substrate W from / to an arbitrary storage shelf 32a of the buffer unit 32, places the substrate W on the substrate carry-in table 34, and carries out the substrate carry-out table. The substrate W is taken out from 35, and the substrate W is stored / taken out from cassettes 36a and 36b described later. That is, in storing / removing the substrate W with respect to the buffer unit 32, the expansion / contraction drive unit 33f is moved so that the front surface of the substrate support unit 33g faces the buffer unit 32, and the substrate support unit 33g is expanded and contracted in the Y-axis direction. The loading / unloading of the substrate W with respect to the substrate carry-in table 34 and the substrate carry-out table 35 is performed by moving the telescopic drive unit 33f and the like to the front of the substrate carry-in table 34 and the substrate carry-out table 35 and the substrate support unit 33g. The substrate support portion 31e is expanded and contracted in the X-axis direction by moving the front surface of the substrate support portion 31e toward the substrate carry-in table 34 and the substrate carry-out table 35.
[0038]
FIG. 4 is a perspective view showing a schematic configuration in the vicinity of the buffer portion in FIG. The buffer unit 32 is disposed between the first substrate transport robot 31 and the second substrate transport robot 33 described above, and is supported on the inner surface of the IF unit 3. As shown in FIG. 4, a plurality of (for example, 50) storage shelves 32 a are stacked in a multistage shape in the Z direction in the buffer unit 32. Further, each storage shelf 32a is opened at a portion facing the first substrate transport robot 31 and the second substrate transport robot 33, and as described above, the first and second substrate transport robots 31, 33 are opened. Thus, the substrate W can be stored / taken out. Each storage shelf 32a is numbered in order from the bottom. Therefore, by specifying the shelf number, an arbitrary shelf can be specified from a plurality of storage shelves.
[0039]
FIG. 5 is an explanatory diagram for explaining the operation when the substrate is stored by the first substrate transfer robot in FIG. When the first substrate transport robot 31 stores the substrate W in an arbitrary storage shelf 32a of the buffer unit 32, first, as shown in FIG. 5, the rotation support unit 31c causes the front surface of the substrate support unit 31e to face the buffer unit 32. And the height of the substrate support portion 31e is adjusted to the height of the storage shelf 32a that is to store the substrates W by the Z-direction drive portion 31a. Next, the substrate supporting portion 31e is extended by the extension / contraction driving portion 31d and the supporting substrate W is inserted into the storage shelf 32a to be stored, and then the substrate supporting portion 31e is slightly lowered by the Z direction driving portion 31a. Then, the substrate W is placed and stored on the storage shelf 32a, and then the substrate support portion 31e is stopped at a position away from the back surface of the stored substrate W. And the board | substrate support part 31e is contracted by the expansion-contraction drive part 31d, the board | substrate support part 31e is retracted from the storage shelf 32a, and the accommodation of the board | substrate W to arbitrary storage racks 32a is complete | finished.
[0040]
On the other hand, the removal of the substrate W from the arbitrary storage shelf 32a of the buffer unit 32 is performed by the reverse operation of the above-described storage operation of the substrate W, that is, the substrate support unit 31e moves the substrate W stored downward. It is done by lifting from.
[0041]
The storage / removal of the substrate W to / from the arbitrary storage shelf 32a of the buffer unit 32 by the second substrate transport robot 33 is performed by the same operation as the storage / removal of the first substrate transport robot 31.
[0042]
2 and 3, the substrate carry-in table 34 and the substrate carry-out table 35 have a plurality of substrate support pins 34a and 35a in the vertical direction, like the substrate delivery table 25 in the processing unit 2 described above. The substrate W is placed on the substrate support pins 34 a and 35 a, and the substrate W is transferred to and from the exposure unit 4.
[0043]
The first and second cassettes 36a and 36b are set on the table bases 37a and 37b, respectively, and a plurality of storages for storing a plurality of substrates W in a horizontal posture are provided therein. A shelf (not shown) is arranged. These cassettes 36a and 36b are used when a pilot board is accommodated and an exposure test is performed. When the cassettes 36a and 36b are used, the doors 38 provided on one side of the IF unit 3 are opened to open the table bases 37a and 37b. Set to
[0044]
Now, in the IF unit 3 in the substrate processing apparatus described above, the first substrate transport robot 31 and the second substrate transport robot 33 access the same buffer unit 32 (that is, storage / removal of the substrate W). ). The first substrate transfer robot 31 and the second substrate transfer robot 33 are independently controlled by the first controller 100 and the second controller 200 in the robot access system as shown in FIG. Has been accessed.
[0045]
In FIG. 1, a first controller 100 includes a CPU 110 for performing various processes and control according to a program, an internal memory 120 for storing the program and data generated during the process, and a first substrate transfer robot. 31 and an input / output circuit 130 for exchanging various signals with the second controller 200, and each component is connected by a bus 140. The second controller 200 has the same configuration as that of the first controller 100, and there are various configurations between the CPU 210, the internal memory 220, the second substrate transport robot 33, and the first controller 100. An input / output circuit 230 for exchanging signals and a bus 240 are provided.
[0046]
The input / output circuits 130 and 230 output control signals 150 and 250 for controlling the substrate transfer robots 31 and 33 to the substrate transfer robots 31 and 33, respectively. From 31 and 33, detection signals 160 and 260 representing the operation state of the substrate transfer robots 31 and 33 are output to the input / output circuits 130 and 230, respectively. Further, a specific signal as will be described later is exchanged between the input / output circuits 130 and 230.
[0047]
As described above, the buffer unit 32 has a plurality of storage shelves 32a. Both the first substrate transport robot 31 and the second substrate transport robot 33 have access to any storage shelf 32a. Therefore, if the first substrate transfer robot 31 and the second substrate transfer robot 33 access the same storage shelf 32a almost simultaneously, mutual interference occurs between them. Even if the same storage shelf 32a is not accessed, even if two storage shelves 32a adjacent in the vertical direction are accessed almost simultaneously, mutual interference occurs similarly. This is because, as described with reference to FIG. 5, when the substrate W is stored / removed from / from a certain storage shelf 32a, the substrate support portion always passes through the portion of the storage shelf immediately below the storage shelf. For this reason, if the other substrate support part is storing / removing the substrate W with respect to the lower storage shelf, the substrate support parts collide with each other in the storage shelf.
[0048]
Therefore, in the present embodiment, the first substrate transfer robot 31 and the first controller 100 are the main, the second substrate transfer robot 33 and the second controller 200 are the slaves, and the first and second controllers are connected. Thus, while the specific signal is exchanged, mutual interference between the first substrate transport robot 31 and the second substrate transport robot 33 is prevented.
[0049]
FIG. 6 is a flowchart showing a processing procedure in the second controller 200 of FIG. 1, and FIGS. 7 and 8 are flowcharts showing a processing procedure in the first controller 100 of FIG.
[0050]
First, the operations of the second controller 200 and the second substrate transport robot 33 on the slave side will be described with reference to FIG.
[0051]
As shown in FIG. 6, in the second controller 200, when processing is started, first, the CPU 210 receives a processing command (step S <b> 20), and the processing command is received by the buffer unit 32 by the second substrate transport robot 33. It is determined whether or not the access to the storage shelf 32a is executed (that is, storage / removal of the substrate W) (step S22). If it is a processing command other than execution of access, processing corresponding to the processing command is performed (step S38). However, when the processing command is execution of access, the CPU 210 outputs the shelf number signal 280 to the first controller 100 via the input / output circuit 230 (step S24). The output shelf number signal 280 is input to the CPU 110 via the input / output circuit 130 in the first controller 100. The shelf number signal 280 is a signal representing the number of the storage shelf 32a that is to be accessed by the second substrate transport robot 33. The shelf number signal 280 is continuously output until the output is stopped in step S36 described later.
[0052]
Next, the CPU 210 controls the second substrate transport robot 33 via the input / output circuit 230 to move the second substrate transport robot 33 to the front of the storage shelf 32a to be accessed (step S26). The access request signal 270 is output to the first controller 100 through the input / output circuit 230 (step S28). The output access request signal 270 is input to the CPU 110 via the input / output circuit 130 in the first controller 100. The access request signal 270 requests the first controller 100 to permit the second controller 200 to access the storage shelf (that is, the storage shelf to be accessed) 32a of the second substrate transport robot 33. It is a signal to do. The access request signal 270 is also continuously output until the output is stopped in step S36 described later.
[0053]
Subsequently, the CPU 210 waits until it is input while detecting whether or not the access permission signal 170 is input from the first controller 100 to the input / output circuit 230. The access permission signal 170 is a signal for allowing the second controller 200 to allow the first controller 100 to access the storage shelf (that is, the storage shelf to be accessed) 32 a of the second substrate transport robot 33. It is.
[0054]
Thereafter, when an access permission signal is input from the first controller 100 to the second controller 200 and the CPU 210 detects it, the CPU 210 controls the second substrate transfer robot 33 via the input / output circuit 230, The second substrate transfer robot 33 is made to start accessing the storage shelf 32a to be accessed (step S32). Then, after the second substrate transport robot 33 stores / removes the substrate W in / from the storage shelf 32a, when the CPU 210 detects the completion of the access (step S34), the CPU 210 notifies the first controller 100. The output of the shelf number signal 280 and the access request signal 270 that has been performed for the access is stopped (step S36).
[0055]
When a series of access processing relating to the second substrate transport robot 33 is completed in this way, the process returns to step S20 again and the same operation is repeated.
[0056]
Next, operations of the first controller 100 and the first substrate transfer robot 31 on the main side will be described with reference to FIGS. Note that the process of the first controller 100 includes a main process shown in FIG. 7 and a sub-process shown in FIG. 8, and both processes are performed in parallel. First, the sub-process shown in FIG. 8 will be described.
[0057]
As shown in FIG. 8, in the first controller 100, when the sub-process is started, first, the CPU 110 determines whether or not the access request signal 270 described above is input to the input / output circuit 130 from the second controller 200. Determination is made (step S60). When the access request signal 270 is input, the CPU 110 causes the first substrate transfer robot 31 to be controlled by the first controller 100 to access any storage shelf 32 a of the buffer unit 32. It is determined whether or not (or access is attempted) (step S62). As a result, when accessing (or trying to access), the CPU 110 controls the second controller 200 based on the shelf number signal 280 previously input from the second controller 200. The shelf number of the storage shelf 32a to be accessed by the target second substrate transport robot 33 is detected (step S64). When the CPU 110 permits access to the second controller 200 based on the detection result, the CPU 110 makes the access by the access by the second substrate transport robot 33 that is the control target of the second controller 200 ( It is also determined whether or not mutual interference occurs with the first substrate transfer robot 31 that is to be accessed (step S66). As described above, mutual interference occurs not only when the first and second substrate transfer robots 31 and 33 access the same storage rack 32a almost simultaneously, but also with the two storage racks 32a adjacent to each other in the vertical direction. It also occurs when accessing at the same time. Accordingly, in step S66, the CPU 110 accesses the first substrate transport robot 31 in the storage shelf that is accessing (or is about to access) and the storage shelf above and below the storage shelf. Determine whether you are trying to access. Specifically, the shelf number of the storage shelf that the first substrate transport robot 31 is accessed (or is about to access) is A, and the shelf of the storage shelf that the second substrate transport robot 33 is trying to access When the number is B, it is determined whether B matches any one of A, A + 1, and A-1.
[0058]
Now, in step S66, when it determines with mutual interference arising, it returns to step S62 and the same process is repeated again. However, if it is determined in step S66 that no mutual interference occurs, the CPU 110 outputs the access permission signal 170 to the second controller 200 via the input / output circuit 130 (step S68). The access permission signal 170 is also continuously output until the output is stopped in step S70 described later.
[0059]
If it is determined in step S62 that the first substrate transport robot 31 is not accessed (or not accessed) in any storage shelf 32a, access is permitted to the second controller 200. Even in this case, no mutual interference occurs due to the access by the second substrate transfer robot 33 that is the control target of the second controller 200, and in this case as well, the access permission signal 170 is output to the second controller 200 ( Step S68).
[0060]
Thus, when a series of processes for permitting access to the second controller 200 is completed, the process returns to step S60, and the CPU 110 again determines whether or not the access request signal 270 is input from the second controller 200 (step S60). ). At this time, if the access by the second substrate transfer robot 33 is completed and the access request signal 270 is not input from the second controller 200, the CPU 110 outputs the access permission signal 170 to the second controller 200. Stop (step S70).
[0061]
Next, the main process shown in FIG. 7 will be described. When the main processing is started in the first controller 100, first, as in the case of the second controller 200, the CPU 110 accepts a processing command (step S40), and the processing command is the first substrate transfer robot. It is determined whether or not the access to the storage shelf 32a in the buffer unit 32 by 31 (that is, storage / removal of the substrate W) is executed (step S42). If it is a processing command other than execution of access, processing corresponding to the processing command is performed (step S52). However, if the processing command is execution of access, the CPU 110 detects whether or not the access permission signal 170 is being output to the second controller 200 (step S44). If the access permission signal 170 is being output, the second controller 200 is executing an access by the second controller 200, so the CPU 110 is executing the first control target. When the substrate transfer robot 31 is accessed, it is determined whether or not the access causes mutual interference with the already accessed second substrate transfer robot 33 (step S46). That is, in step S46, the CPU 110 determines whether or not the first substrate transport robot 31 is to access either the storage shelf accessed by the second substrate transport robot 33 or the storage shelves above and below it. judge.
[0062]
If it is determined in step S46 that mutual interference occurs, the process returns to step S44 and the same processing is repeated again. However, if it is determined in step S46 that no mutual interference occurs, the CPU 110 controls the first substrate transfer robot 31 via the input / output circuit 130 to access the first substrate transfer robot 31. Access to the storage shelf 32a to be started is started (step S48). Then, after the first substrate transport robot 31 stores / removes the substrate W from / from the storage shelf 32a, when the CPU 110 detects the completion of the access (step S50), a series of operations related to the first substrate transport robot 31 is performed. Since the access process is completed, the process returns to step S40 again and the same operation is repeated.
[0063]
As described above, in the present embodiment, the first and second substrate transport robots 31 and 33 can access any storage shelf 32a in the buffer unit 32, and each substrate transport robot 31, Although the storage shelf 32a accessed by 33 is constantly changing, even in such a case, there is no mutual interference between the first and second substrate transfer robots 31 and 33 during access.
[0064]
Further, when the second substrate transfer robot 33 on the slave side tries to access a certain storage shelf 32 a in the buffer unit 32, an access permission signal 170 is input from the first controller 100 to the second controller 200. The first controller 100 must wait until the first substrate transport robot 31 is not accessing the storage shelf 32a or is accessing the storage shelf 32a. Since the access permission signal is immediately output unless the second substrate transfer robot 33 to be accessed has mutual interference with the second substrate transfer robot 31, the second substrate transfer robot 33 is always constant as in the prior art. There is no need to wait for hours. Further, when the first substrate transport robot 31 on the main side tries to access a certain storage shelf 32 a in the buffer unit 32, the first controller 100 outputs an access permission signal 170 to the second controller 200. If the first substrate transfer robot 31 to be accessed does not cause mutual interference with the second substrate transfer robot 33 that is being accessed even if it is not output or is not output, it does not wait. The storage shelf 32a can be accessed. Therefore, since the average access speed of the substrate transfer robot can be improved as a whole, it is possible to sufficiently cope with the case where the access frequency of the substrate transfer robot is high.
[0065]
In the present embodiment, as described above, the second substrate transfer robot 33 on the slave side is in a period until the access permission signal 170 is input to the second controller 200 when trying to access. Therefore, the average access speed is slower than that of the first substrate transfer robot 31 on the main side. However, since the processing time in the exposure unit 4 is longer than the processing time in the processing unit 2, the frequency of access to the buffer unit 32 of the second substrate transport robot 33 is lower than that of the first substrate transport robot 31. . Therefore, even if the average access speed of the second substrate transfer robot 33 on the slave side is low, no problem occurs.
[0066]
FIG. 9 is a block diagram showing the configuration of a robot access system as a second embodiment of the present invention. Also in this embodiment, as in the case of the robot access system shown in FIG. 1, a case where the robot access system shown in FIG. 9 is applied to the IF unit 3 in the substrate processing apparatus shown in FIG. 2 will be described.
[0067]
As shown in FIG. 9, the robot access system of the present embodiment includes first and second substrate transfer robots 31 and 33, and first and second controllers 300 and 400 that control them independently. In addition, a common memory 500 that can be accessed in common by the first and second controllers 300 and 400 is further provided.
[0068]
In FIG. 9, the first controller 300 is similar to the first and second controllers 100 and 200 shown in FIG. 1, and includes a CPU 310, an internal memory 320, a first substrate transfer robot 31, and a common memory 500. An input / output circuit 330 for exchanging various signals between them and a bus 340 are provided. Similarly, the second controller 400 includes a CPU 410, an internal memory 420, an input / output circuit 430 for exchanging various signals with the second substrate transport robot 33 and the common memory 500, and a bus. 440. Further, the common memory 500 includes a flag setting table 510 for setting a flag as described later corresponding to each storage shelf 32a in the buffer unit 32. The flag setting table 510 stores a shelf number of each storage shelf 32a in the buffer unit 32 and a flag set for each storage shelf.
[0069]
The input / output circuits 330 and 430 output control signals 350 and 450 for controlling the substrate transfer robots 31 and 33 to the substrate transfer robots 31 and 33, respectively. 31 and 33 output detection signals 360 and 460 indicating the operation state of the substrate transfer robots 31 and 33 to the input / output circuits 330 and 430, respectively. In addition, from each of the input / output circuits 130 and 230, instruction signals 370 and 470 for issuing various instructions to the common memory 500 and write data 390 and 490 to be written to the common memory 500 are sent to the common memory 500. The read data 380 and 480 read from the common memory 500 are output from the common memory 500 to the input / output circuits 130 and 230.
[0070]
In the embodiment shown in FIG. 1, the first substrate transport robot 31 and the first controller 100 are the main, the second substrate transport robot 33 and the second controller 200 are the slaves, and between them, In the present embodiment, the first substrate transfer robot 31 and the first controller 300 are the same as the second substrate transfer robot 33 and the second controller 400 in the present embodiment. And the second controller 300 and 400 commonly access the common memory 500 and set / cancel the flag in the flag setting table 510, so that the first substrate transfer robot 31 and the second substrate transfer robot 33 Mutual interference does not occur between them.
[0071]
FIG. 10 is a flowchart showing a processing procedure in the first and second controllers 300 and 400 of FIG. Since the first controller 300 and the first substrate transport robot 31 and the second controller 400 and the second substrate transport robot 33 are the same in the operation contents except for the operation timing, mainly, Operations of the first controller 300 and the first substrate transfer robot 31 will be described with reference to FIG.
[0072]
In the first controller 300, as shown in FIG. 10, the CPU 310 receives a processing command (step S80), and the processing command is accessed by the first substrate transfer robot 31 to the storage shelf 32a in the buffer unit 32 (ie, the storage controller 32a). Then, it is determined whether or not execution of storage / removal of the substrate W is performed (step S82). If it is a processing command other than execution of access, processing corresponding to the processing command is performed (step S94).
[0073]
However, when the processing command is execution of access, the CPU 310 detects whether or not a flag is set for the storage shelf corresponding to the interference area among the storage shelves 32 a in the buffer unit 32 in the common memory 500. (Step S84). This flag indicates which storage shelf 32a in the buffer unit 32 is accessed by the substrate transfer robot. If any substrate transfer robot is accessing, the flag is set for the storage shelf being accessed. It is set up.
[0074]
Further, as described above, mutual interference occurs when the first and second substrate transport robots 31 and 33 access the same storage shelf or two storage shelves 32a adjacent to each other substantially at the same time. Therefore, when one substrate transfer robot is trying to access a certain storage shelf, the other substrate transfer robot accesses the storage shelves of the storage shelf and the upper and lower storage shelves. If there is (or is going to be accessed), there is a possibility of causing mutual interference. Therefore, it is referred to as an interference region because it is a region that may cause mutual interference.
[0075]
11 and 12 are explanatory diagrams showing an example of temporal transition of the contents of the flag setting table 510 shown in FIG. 11 and 12, the number of storage shelves 32 a in the buffer unit 32 is 50, and the shelf numbers from “1” to “50” are assigned. For the flag, “1” is set when the flag is set, and “0” is set when the flag is released. Therefore, when the first controller 300 is accessing the first substrate transfer robot 31 to be controlled, the flag “1” is set to the shelf number of the storage shelf being accessed, and the first controller 300 When a substrate transfer robot other than the substrate transfer robot 31 (in this embodiment, the second substrate transfer robot 33) is accessing, the flag “1” is set to the shelf number of the storage shelf being accessed. become.
[0076]
Now, assuming that the first controller 300 is about to cause the first substrate transfer robot 31 to access the storage shelf with the shelf number “24”, the operation of step S84 will be specifically described.
[0077]
First, since the storage shelf to be accessed by the first substrate transfer robot 31 is the storage shelf with the shelf number “24”, the CPU 310 uses the storage shelf with the shelf number “24” and the storage shelves above and below it. A storage shelf with a certain shelf number “23”, “25” is recognized as a storage shelf in the interference area. Then, the CPU 310 outputs an instruction signal 370 to the common memory 500 via the input / output circuit 330, and reads the setting contents of the flags for the shelf numbers “23” to “25” of the storage shelves in the interference area. Instruct. Accordingly, when the setting content of the flag is input from the common memory 500 as the read data 380, it is determined whether or not the flag is set for the storage shelves with shelf numbers “23” to “25” based on the setting content. .
[0078]
  If the flag is set for the storage shelf in the interference area as a result of the determination, the CPU 310 repeats the process of step S84 and waits until the setting is canceled. For example, in FIG. 11A, since the flag is set (“1”) for the storage shelf with the shelf number “25” in the interference area, the setting is canceled as shown in FIG. CPU 310 waits until “0”). As a result of the determination, when the flag is not set for the storage shelf in the interference area (that is, when the flag is cleared), the CPU 310 proceeds to the process of the next step S86. For example, FIG.d), The flag is set for the storage shelf with the shelf number “26”, but the flags are not set for the storage shelves with the shelf numbers “23” to “25” in the interference area. It will move to the processing of. Further, in FIG. 11B, since the flag set for the storage shelf with the shelf number “25” is canceled, the process proceeds to step S86 also in this case.
[0079]
  In step S <b> 86, the CPU 310 sets a flag for the storage shelf to which the first substrate transport robot 31 is to be accessed with respect to the common memory 500. Specifically, the CPU 310 outputs an instruction signal 370 and write data 390 to the common memory 500 via the input / output circuit 330 and sets a flag for the storage shelf with the shelf number “24”. As a result, FIG. 11 (c) or FIG.e), A flag is set for the shelf number “24”.
[0080]
  Next, the CPU 310 controls the first substrate transport robot 31 via the input / output circuit 330 to store the storage shelf to be accessed by the first substrate transport robot 31 (that is, the storage shelf with the shelf number “24”). ) Is started (step S88). Then, the first substrate transfer robot 31 stores / takes out the substrate W from / to the storage shelf with the shelf number “24”.TheThereafter, when the CPU 310 detects the completion of the access (step S90), the CPU 310 cancels the flag set in step S86 for the common memory 500 (step S92). Specifically, the CPU 310 outputs an instruction signal 370 and write data 390 to the common memory 500 via the input / output circuit 330, and cancels the flag set for the storage shelf with the shelf number “24” ( The flag is rewritten from “1” to “0”).
[0081]
When a series of access processing relating to the first substrate transfer robot 31 is thus completed, the process returns to step S80 again and the same operation is repeated.
[0082]
In the above description, the operations of the first controller 300 and the first substrate transport robot 31 are described. As described above, the operations of the other second controller 400 and the second substrate transport robot 33 are performed. This also has the same contents as the operations of the first controller 300 and the first substrate transfer robot 31.
[0083]
Therefore, according to the present embodiment, when one substrate transfer robot tries to access a certain storage shelf 32a in the buffer unit 32, a flag is set for the storage shelf in the interference area in the common memory 500. Since the target storage rack is not accessed and is on standby, there is no risk of mutual interference with the other substrate transfer robot.
[0084]
Further, when one of the substrate transfer robots tries to access a certain storage shelf 32a, if the flag is not set for the storage shelf in the interference area, the target storage shelf can be immediately accessed. It is not always necessary to wait for a certain time. Therefore, since the average access speed of the substrate transfer robot can be improved as a whole, it is possible to sufficiently cope with the case where the access frequency of the substrate transfer robot is high.
[0085]
Further, in this embodiment, each set of the substrate transfer robot and the controller is handled equally, so that even if there are three or more sets of the substrate transfer robot and the controller, they can be operated without any trouble. Therefore, for example, it is possible to sufficiently cope with a case where three or more substrate transfer robots are to be accessed in the buffer unit 32.
[0086]
The present invention is not limited to the above-described examples and embodiments, and can be implemented in various modes without departing from the scope of the invention.
[0087]
In the above-described embodiment, the robot to be controlled is a substrate transfer robot, the access target is a storage shelf, and the access content is storage / removal of the substrate W. However, the present invention is limited to these. The access target is not limited as long as a plurality of areas are set within a certain effective range, and the robot can access any area within the effective range. The access content may be an operation content such that a part of the robot occupies the area.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a configuration of a robot access system as a first embodiment of the present invention.
FIG. 2 is a plan view showing an overall configuration of a substrate processing apparatus to which the robot access system of FIG. 1 is applied.
3 is a front view of the interface unit in FIG. 2 as viewed from the exposure unit side.
4 is a perspective view showing a schematic configuration in the vicinity of a buffer unit in FIG. 2. FIG.
FIG. 5 is an explanatory diagram for explaining an operation when the substrate is stored by the first substrate transfer robot in FIG. 4;
6 is a flowchart showing a processing procedure in the second controller 200 of FIG. 1;
FIG. 7 is a flowchart showing a processing procedure of main processing in the first controller 100 of FIG. 1;
FIG. 8 is a flowchart showing a processing procedure of sub processing in the first controller 100 of FIG. 1;
FIG. 9 is a block diagram showing a configuration of a robot access system as a second example of the present invention.
10 is a flowchart showing a processing procedure in the first and second controllers 300 and 400 of FIG.
11 is an explanatory diagram showing an example of a temporal transition of the contents of the flag setting table 510 shown in FIG. 9;
12 is an explanatory diagram showing another example of the temporal transition of the contents of the flag setting table 510 shown in FIG. 9. FIG.
[Explanation of symbols]
1 ... Indexer
2 ... Processing unit
2a ... opening
3 ... IF unit
4 ... Exposure unit
5 ... Automatic carrier transfer device
11 ... carry-in / out table
12 ... Board loading / unloading robot
21 ... 1st apparatus arrangement | positioning part
22 ... 2nd apparatus arrangement | positioning part
23. Substrate transfer robot
23a ... protrusions
23b ... hand
23c ... Extensible part
23e ... Z direction moving part
23f ... X direction moving part
23g ... Screw shaft
23h ... motor
23i ... guide shaft
24 ... transport route
25. Board delivery table
25a ... Board support pins
31 ... First substrate transfer robot
31a ... Z direction drive part
31aa ... Screw shaft
31ab ... motor
31b ... Connecting member
31c: Rotation drive unit
31ca ... rotating shaft
31cb ... motor
31d ... telescopic drive unit
31da ... motor
31db ... Timing belt
31e ... Substrate support part
32 ... Buffer section
32a ... Storage shelf
33 ... Second substrate transfer robot
33a ... Y direction drive unit
33aa ... Screw shaft
33ab ... guide shaft
33ac ... motor
33b ... 1st connection member
33c ... Z direction drive unit
33d ... Second connecting member
33e ... Rotation drive unit
33f ... telescopic drive unit
33g ... substrate support
34 ... Board loading table
34a, 35a ... substrate support pins
35 ... Board carrying table
36a, 36b ... cassette
37a, 37b ... Table stand
38 ... door
100: First controller
110 ... CPU
120: Internal memory
130: Input / output circuit
140 ... Bus
150 ... Control signal
160 ... Detection signal
170 ... access permission signal
200: Second controller
210 ... CPU
220 ... Internal memory
230 ... I / O circuit
240 ... Bus
250 ... Control signal
260 ... Detection signal
270 ... Access request signal
280 ... Shelf number signal
300 ... first controller
310 ... CPU
320 ... Internal memory
330 ... Input / output circuit
340 ... Bus
350 ... Control signal
360 ... Detection signal
370 ... Instruction signal
380: Read data
390 ... Write data
400 ... second controller
410 ... CPU
420 ... Internal memory
430 ... I / O circuit
440 ... Bus
450 ... Control signal
460 ... Detection signal
470 ... Instruction signal
480: Read data
490: Write data
500 ... Common memory
510: Flag setting table
BU ... Bake unit
C ... Career
EEW ... Edge exposure part
SC ... Spin coater
SD ... Spin Developer
W ... Board

Claims (4)

A buffer unit having a plurality of storage shelves stacked in multiple stages, first and second robots capable of accessing any storage shelves of the buffer unit, and the first and second robots A robot access system comprising: a first controller and a second controller for independently controlling the two robots;
When the second controller accesses the certain storage shelf in the buffer unit to the second robot, the second controller accesses the access target storage shelf that is the storage shelf to be accessed by the first controller. An access request signal for requesting access permission and position information indicating the position of the access storage shelf in the buffer unit , and then permitting access to the access storage shelf from the first controller. Until the access permission signal to be input is input, the second robot is not accessed to the access target storage shelf , and when the access permission signal is input, the second robot is accessed to the access target storage shelf . As well as
When the access request signal and the position information are input from the second controller, the first controller specifies a position of the access target storage shelf in the buffer unit based on the position information. Determining whether the access target storage shelf is one of the storage shelf accessed or about to be accessed by the first robot and the storage shelf above and below the storage shelf. Examples no likelihood of mutual interference between the first robot and the second robot, to the second controller, and outputs the access permission signal, if either, the as there is a likelihood of mutual interference, relative to the second controller, the access does not output the permission signal, then there is no likelihood of the interference Once Tsu, and outputs the access permission signal, when outputting the access permission signal until the access by the second robot is completed, the first robot, the previous SL Mutual interference occurs A robot access system characterized by preventing access to a potential storage shelf . A buffer unit having a plurality of storage shelves stacked in multiple stages, a plurality of robots each capable of accessing an arbitrary storage shelf of the buffer unit, and each robot is independently controlled A robot access system comprising a plurality of controllers,
The controller further includes flag setting means capable of setting a flag corresponding to each storage shelf in the buffer unit in common.
Wherein the plurality of controllers, respectively, the robot to be controlled when to access a certain storage rack in the buffer unit, Oite the flag setting means, access target storage rack is the storage rack which are trying to access And whether the flag corresponding to any of the upper and lower storage shelves is set, and if the flag corresponding to either the access target storage shelf or the upper and lower storage shelves is not set , the flag setting means, after setting the flag corresponding to the access target storage rack, the control target robot is accessing the access target storage shelf, to one of the access target storage rack and the upper and lower storage rack that If the corresponding flag is set, the access target robot is not accessed until the flag is cleared. Without access to the target storage rack, then, when the configuration of the flag is released, after setting the flag corresponding to the access target storage rack on the flag setting means, access to the control target robot to the access target storage rack As well as
After that, when the access to the access target storage shelf by the control target robot is completed, the flag set in the flag setting unit is canceled.   A buffer unit having a plurality of storage shelves stacked in multiple stages, first and second robots that can access any storage shelves of the buffer unit, and the first and second robots A control method for controlling a robot access system comprising: a first and a second controller for independently controlling two robots;
  (A) The second controller sends the second robot to the buffer unit. When accessing the storage shelf, the second controller requests the first controller to permit access to the access target storage shelf that is the storage shelf to be accessed and the buffer. Outputting position information indicating the position of the access target storage shelf in the unit;
  (B) Until the second controller receives an access permission signal for permitting access to the access target storage shelf from the first controller, the second controller When the access permission signal is input from the first controller without allowing the robot to access the access target storage shelf, the step of causing the second robot to access the access target storage shelf;
  (C) When the first controller receives the access request signal and the position information from the second controller, the first controller uses the position information to Whether the access target storage shelf is one of the storage shelf that is being accessed or about to be accessed by the first robot and the storage shelf above and below the storage shelf. Determining whether or not
  (D) If the result of the determination is none, the first controller assumes that there is no possibility of mutual interference between the first robot and the second robot. Outputting the access permission signal to the controller;
  (E) If the result of the determination is either, the first controller does not output the access permission signal to the second controller because there is a possibility that the mutual interference may occur. Thereafter, when there is no possibility of the mutual interference, outputting the access permission signal;
  (F) When the first controller outputs the access permission signal to the second controller, the first controller until the access by the second robot is completed, Preventing the first robot from accessing a storage shelf where the mutual interference may occur;
  A control method comprising:   A buffer unit having a plurality of storage shelves stacked in multiple stages, a plurality of robots each capable of accessing an arbitrary storage shelf of the buffer unit, and each robot is controlled independently. Control for controlling a robot access system comprising: a plurality of controllers; and flag setting means capable of setting a flag corresponding to each storage shelf in the buffer unit in common with the plurality of controllers. A method,
  (A) When the controller makes a robot to be controlled access a certain storage shelf in the buffer unit, the flag setting means accesses the access storage shelf that is the storage shelf to be accessed and its upper and lower Determining whether a flag corresponding to any of the storage shelves is set;
  (B) If the flag corresponding to either the access target storage shelf or the storage shelf above and below it is not set as a result of the determination, the controller sets the flag setting means to the access target storage shelf. After setting the corresponding flag, allowing the controlled robot to access the access target storage rack;
  (C) As a result of the determination, when the flag corresponding to either the access target storage shelf or the storage shelf above and below the storage shelf is set, until the controller cancels the setting of the flag, If the control target robot is not accessed to the access target storage shelf and then the setting of the flag is canceled, a flag corresponding to the access target storage shelf is set in the flag setting means, and then the control target robot is Accessing the access storage shelf;
  (D) when the controller completes access to the access target storage shelf, the controller releases the flag set in the flag setting means;
  A control method comprising:

Images