JP3660956B2 - Classification device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a classification device, and more particularly to a classification device that classifies solid particles using a standing shock wave generated using supersonic flow.
[0002]
[Prior art]
Conventionally, as a classification device for classifying solid particles using a standing shock wave generated by using supersonic flow, for example, disclosed in JP-A-5-115848 and JP-A-7-204585. There is something.
[0003]
As shown in FIG. 18, the conventional classification apparatus is configured such that a Laval tube (b1) is connected to a classification chamber (a1) and a particle recovery means (c1) is stored in the classification chamber (a1). Yes. The particle recovery means (c1) includes a pair of partition walls (c2, c2) which are parallel flat plates, a coarse particle recovery passageway (a2) is provided between the partition walls (c2, c2), and the partition walls (c2, c2) Both outer sides of these form fine particle recovery passages (a3, a3), respectively.
[0004]
The Laval tube (b1) ejects a solid-gas mixed gas (G) composed of fine solid particles and a carrier gas from the outlet (b2) to the classification chamber (a1) at supersonic speed. Then, the solid-gas mixed gas (G) ejected from the Laval tube (b1) flows into the classification chamber (a1) at supersonic speed toward the coarse particle recovery passage (a2). At this time, one end (not shown, but the lower end in FIG. 18) of the coarse particle recovery passageway (a2) is closed, so that the solid-gas mixed gas (G) flowing toward the inlet (a4) at the other end is blocked. Thus, the coarse particle collection passage (a2) becomes an obstacle. As a result, a standing shock wave (S) is generated in the supersonic flow field of the solid-gas mixed gas (G) in the vicinity of the inlet (a4) of the coarse particle recovery passageway (a2).
[0005]
Before and after the wave front of the standing shock wave (S), the flow velocity and the flow direction of the gas-solid mixed gas (G) are suddenly changed (see F1 in FIG. 18). The fine particles (Pf) with relatively small inertia force among the solid particles in the solid-gas mixed gas (G) flow into the fine particle recovery passageway (a3) with the flow of the solid-gas mixed gas (G) (Fig. 18 (see F2), the coarse particles (Pf) having a large inertial force go straight (see F3 in FIG. 18) and flow through the coarse particle collection passage (a2). In this way, the solid particles flowing into the classification chamber (a1) from the Laval tube (b1) are classified into coarse particles (Pr1) and fine particles (Pf1).
[0006]
Japanese Patent Laid-Open No. 5-115773 discloses an apparatus for performing classification and film formation at the same time by using such classification action using a standing shock wave.
[0007]
In the apparatus disclosed in this publication, as shown in FIG. 19, a substrate (d1) and its supporting and moving means (e1) are provided in the vicinity of the outlet of the Laval tube (c3). Then, the substrate (d1) is disposed in the film forming chamber so as to face the Laval tube (c3).
[0008]
In this apparatus, the carrier gas (G1) containing the polydispersed fine particle material is collided with the substrate (d1), thereby simultaneously performing film formation and classification. The gas-solid mixed gas (G1) containing the fine particles of the thin film material becomes a supersonic flow in the Laval tube (c3) and collides with the substrate (d1). At this time, a standing shock wave (c4) is generated on the substrate (d1). The solid-gas mixed flow flowing out from the outlet nozzle of the Laval tube (c3) is rapidly decelerated by the standing shock wave (c4), and the flow direction is greatly bent. At that time, the coarse particles having a large inertial force cannot follow the change in the direction of the air flow, and thus collide with the substrate (d1). On the other hand, the fine particles having a small inertia force follow the change in the direction of the air flow and do not collide with the substrate (d1). As a result, the coarse particles and the fine particles are separated, that is, classified, and a uniform film composed of particles having a predetermined particle diameter or more is formed on the substrate (d1).
[0009]
[Problems to be solved by the invention]
In the conventional classifier, the solid particle in the gas-solid mixed gas tends to be biased in the particle density distribution when flowing through the pipes (h1, h2). That is, in the same channel cross section, the difference between the average particle size of one region and the average particle size of another region was likely to occur. Therefore, the solid particles (Pa1, Pa2) in the gas-solid mixed gas flowing into the Laval pipe (b1, c3) from the pipe (h1, h2) are the parts where the cross-sectional area of the Laval pipe (b1, c3) decreases. There is a problem that it is easy to adhere to the wall surface (hereinafter referred to as “channel cross-sectional area reduction portion”). Therefore, for example, when film formation is performed, more solid particles are required to form a thin film having a certain thickness. That is, there was a lot of waste of material (solid particles).
[0010]
In addition, the solid particles adhering to the wall surface of the Laval tube (b1, c3) flow path cross-sectional area reduction part must be removed frequently, so the maintenance period is short and the device cannot be operated continuously for a long time. There was a problem.
[0011]
In particular, when an orifice is provided in the pipe (h1, h2) to adjust the pressure in the above apparatus, such a problem is remarkable because of a large deviation in the particle density distribution of the solid-gas mixed gas. It was.
[0012]
This invention is made | formed in view of this point, The place made into the objective is to reduce the solid particle adhering to the wall surface of supersonic flow generation means, such as a Laval pipe | tube.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, the present invention reduces the flow of the solid-gas mixed gas and diffuses the solid particles on the upstream side of the supersonic flow generating means such as a Laval tube to which the solid particles were easily attached. In order to prevent uneven distribution of particle density.
[0014]
Specifically, the means taken by the invention according to claim 1 is a conveying means (6A) having a mixed gas supply passage (6, 63) through which a solid-gas mixed gas formed by mixing solid particles into the conveying gas flows. A supersonic flow generating means (30) having a reduced portion (32) having a reduced flow path cross-sectional area is provided on the downstream side of the chamber, and a chamber (40, 140) through which an outlet of the supersonic flow generating means (30) communicates Inside, a shock wave generating means (50, 150) for generating a standing shock wave is provided, and in the classifying device for classifying solid particles in the solid-gas mixed gas flowing into the chamber (40, 140) by the standing shock wave, the conveying means ( 6A) is formed with an enlarged portion (20) in which the cross-sectional area of the flow path through which the gas-solid mixed gas flows is larger than the cross-sectional area of the mixed gas supply path (6, 63). It is what.
[0015]
The solid-gas mixed gas flowing through the conveying means (6A) is decelerated at the enlarged portion (20) due to the above-mentioned invention specific matters, so that the particles in the solid-gas mixed gas diffuse at the enlarged portion (20), and the particle density Distribution is uniform. Also, the flow disturbance is reduced. Therefore, a stable solid-gas mixed flow having a uniform particle density distribution flows through the flow path cross-sectional area reducing portion (32) of the supersonic flow generating means (30), so that the particles are difficult to adhere.
[0016]
According to a second aspect of the present invention, the shock wave generating means (50) includes a coarse particle collecting passage (53) and a fine particle collecting passage (54) in the classifying device according to the first aspect. The coarse particles (Pr) and the fine particles (Pf) are individually collected.
[0017]
Highly accurate classification can be performed according to the above-mentioned invention specific matters.
[0018]
On the other hand, the means provided by the invention according to claim 3 is the classification apparatus according to claim 1, wherein the shock wave generating means (150) is arranged so as to face the outlet of the supersonic flow generating means (130). (155) is supported, and a film of particles selected by classification is formed on the substrate (155).
[0019]
Film formation and classification can be performed at the same time according to the above-mentioned invention specific matters.
[0020]
According to a fourth aspect of the present invention, there is provided the classifier according to any one of the second or third aspect, wherein the conveying means (6A) is an adjustment for adjusting the pressure in the chamber (40,140). The means (7) is provided.
[0021]
The pressure in the chamber can be adjusted according to the above-mentioned invention specific matter.
[0022]
According to a fifth aspect of the present invention, there is provided the classifier according to any one of the first to fourth aspects, wherein the transport means (6A) further includes a transport gas supply passage (86) through which the transport gas flows. ), And the carrier gas supply passage (86) and the mixed gas supply passage (63) are assembled in the enlarged portion (20).
[0023]
According to the above-mentioned invention specific matter, the particle density distribution is further increased by joining the carrier gas that has passed through the carrier gas supply passage (86) and the solid-gas mixed gas that has passed through the mixed gas supply passage (63) in the enlarged portion (20). Therefore, the amount of particles adhering to the flow path cross-sectional area reducing portion (32) of the supersonic flow generating means (30) can be further reduced.
[0024]
Further, the means taken by the invention according to claim 6 is the classifying device according to any one of claims 1 to 4, wherein the enlarged portion (20) has an inlet communicating with the conveying means (6A), An outlet communicating with the supersonic flow generating means (30), a channel cross-section increasing portion (91) in which the channel cross-sectional area continuously increases from the inlet, and a channel cross-sectional area continuously toward the outlet In this configuration, the flow path cross-section reducing portion (93) is reduced.
[0025]
Because the cross-sectional area of the flow path through which the gas-solid mixed gas flows is continuously changed according to the above-mentioned matters specifying the invention, a secondary flow is hardly generated in the classifier, and the pressure loss of the gas-solid mixed flow is reduced.
[0026]
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0027]
As shown in FIG. 1 and FIG. 2, the present classifier (1) is an apparatus used for particle size measurement, etc., and includes a conveying means (6A) and a Laval pipe (30) as a supersonic flow generating means. A classification chamber (40) as a chamber and a vacuum pump (not shown) are connected in order so that a solid-gas mixed gas can flow therethrough.
[0028]
Here, the conveying means (6A) includes various fine particle production apparatuses (not shown) using a gas phase method, a pulverization method, a supercritical pressure method, a liquid phase method, etc., a pipe (6), and an expansion section. The mixing chamber (20) is connected in order so that the gas-solid mixed gas can flow.
[0029]
The pipe (6) is a circular pipe with a constant cross-sectional area. The cross-sectional shape of the pipe (6) may be other shapes such as a square, a rectangle, and an ellipse as long as it can communicate with the mixing chamber (20). Here, the pipe (6) is configured to convey the solid-gas mixed gas to the mixing chamber (20). The solid-gas mixed gas is generated by mixing solid particles having a particle size of 1 μm or less such as metal or ceramics generated by a fine particle manufacturing apparatus (not shown) into a carrier gas of an inert gas such as air, He, or Ar. Yes.
[0030]
The mixing chamber (20) is mainly formed of a sealed container having a substantially rectangular parallelepiped shape. A mixing chamber inlet (21) formed of a circular opening is formed on the upper surface shown in FIG. 1, and a mixing chamber outlet (22) formed of a rectangular opening is formed on the lower surface. The mixing chamber inlet (21) communicates with the outlet of the pipe (6), and the mixing chamber outlet (22) communicates with the inlet of the Laval tube (30). The area (hereinafter referred to as the channel cross-sectional area) of the cross-sectional area of the mixing chamber (20) (the cross-section perpendicular to the flow direction and the XY plane in FIG. 2) is several times the cross-sectional area of the pipe (6). For example, about 9 times larger. The flow passage cross-sectional area of the mixing chamber (20) is determined when the solid-gas mixed gas (F11) flowing through the pipe (6) passes through the mixing chamber inlet (21) and flows into the mixing chamber (20). The speed is set so that the particles in the gas-solid gas mixture (F11) diffuse. The cross-sectional area of the mixing chamber (20) is several times larger than the cross-sectional area of the inlet of the Laval tube (30), for example, about three times larger. The distance between the inner wall of the upper surface of the mixing chamber and the inner wall of the lower surface, that is, the height (L1) of the mixing chamber is about twice the distance between the side surfaces of the mixing chamber, that is, the width (D1) of the mixing chamber. is there. The height (L1) and width (D1) of the mixing chamber are set so that a sufficient particle diffusion effect can be obtained.
[0031]
The Laval pipe (30) has an inlet section (31) having a constant cross-sectional area, a flow-path cross-sectional area reduction section (32) in which the flow-path cross-sectional area continuously decreases toward the downstream side, A minimum throat portion (33) and a channel cross-sectional area enlarged portion (34) in which the channel cross-sectional area continuously increases are integrally formed in order. In order to stably generate a predetermined supersonic flow, the inner surface of the Laval tube is smoothly continuous. As shown in FIG. 2, the Laval tube (30) has a rectangular channel cross section, and is easy to increase in size. Note that the lengths in the Y direction (depth direction) shown in FIG. 2 of the inlet portion (31), the flow passage cross-sectional area reduction portion (32), the throat portion (33), and the flow passage cross-sectional area enlargement portion (34) are mutually equal. And their length is approximately equal to the cross-sectional width (D1) of the mixing chamber.
[0032]
The classification chamber (40) is formed in a rectangular box as shown in FIG. The classification chamber (40) has an opening communicating with the outlet of the Laval tube (30) at the center of the upper surface thereof. The opening is formed in a rectangular shape extending in the Y direction in FIG.
[0033]
A particle recovery means (50) is provided inside the classification chamber (40). The particle recovery means (50) is provided with two partition walls (51, 51), and these partition walls (51, 51) are arranged in parallel at a predetermined interval, and are arranged in the vertical direction of the classification chamber (40). Is provided.
[0034]
The space between the two partition walls (51, 51) is located in the central portion of the classification chamber and forms a coarse particle recovery passageway (53). Between the upper ends of both partition walls (51, 51), an inlet (55) of the coarse particle recovery passageway (53) is formed. Both the partition walls (51, 51) are arranged so that the inflow port (55) faces the outflow port of the Laval tube (30) with a predetermined interval. The lower end of the coarse particle recovery passageway (53) is closed, and the partition walls (51,51) and the coarse particle recovery passageway (53) are mixed with supersonic solid gas flowing into the classification chamber (40) from the Laval tube (30). It is an obstacle to the flow (F14). That is, the partition wall (51, 51) and the coarse particle recovery passageway (53) are located at a position between the outlet of the Laval pipe (30) and the inlet (55) of the coarse particle recovery passageway (53). A standing shock wave (56) facing the outlet (55) of (30) is generated.
[0035]
On the other hand, a vacuum pump (not shown) is connected to the lower end of the fine particle recovery passageway (54), and the gas inside the classification chamber (40) can be sucked by this vacuum pump.
[0036]
A flange (52) is formed at the upper end of each partition wall (51, 51). The flange portion (52) protrudes toward the inside which is the center side of the coarse particle recovery passageway (53). The upper surface of the flange portion (52) and the facing surface of the outlet of the Laval tube (30) is formed as a flat surface. That is, the upper surface of the flange portion (52) is formed to have an area sufficient to prevent the flow of the supersonic solid-gas mixed flow.
[0037]
The inner surface of the flange part (52) is formed so as to be continuous from the tip of the flange part (52) to the inner surface of the partition wall (51, 51), and from the tip of the flange part (52) to the partition wall (51, 51). ) Is formed with an inclined surface that inclines straight toward the inner surface.
[0038]
-Operation of classifier (1)-
Next, the operation of the classifier (1) will be described.
[0039]
First, the vacuum pump (not shown) is operated to suck the gas in the classification chamber (40), so that the pressure in the classification chamber (40) and the outlet pressure of the Laval tube (30) are lower than atmospheric pressure. That is, a vacuum is applied. Then, due to the difference between the pressure in the pipe (6) and the pressure in the classification chamber (40), the solid gas mixture gas (F11) flows into the mixing chamber (20) through the pipe (6) and circulates in the classification device. A solid-gas mixed flow is generated.
[0040]
At this time, the solid-gas mixed flow (F11) flowing in the pipe (6) is a solid-gas mixed flow with a large deviation in particle density distribution based on the difference in inertia of the solid particles due to the difference in particle size. In addition, this solid-gas mixed flow is a turbulent flow. The solid-gas mixed flow (F11) flows from the pipe (6) into the mixing chamber (20) through the mixing chamber inlet (21).
[0041]
At this time, since the cross-sectional area of the flow path is increased when flowing from the pipe (6) into the mixing chamber (20), the solid-gas mixed flow (F11) is decelerated (see F12). Then, the solid particles diffuse in the mixing chamber (20), and the particle density distribution becomes uniform. In addition, the flow turbulence is reduced, and the solid-gas mixed flow is rectified. That is, the mixing chamber (20) acts as a so-called relaxation tank that relaxes and rectifies the flow of the solid-gas mixed gas (F11) that has flowed through the pipe (6). Thereafter, the rectified solid-gas mixed flow (F13) flows into the Laval tube inlet (31) through the mixing chamber outlet (22).
[0042]
The solid-gas mixed flow that has passed through the Laval tube inlet (31) is accelerated at the flow path cross-sectional area reduction section (32) of the Laval tube (30), becomes sonic at the throat section (33), and then flows further. The road cross-sectional area enlargement section (34) increases the speed to a predetermined supersonic speed.
[0043]
The superficial gas-solid flow (F14) flows out of the Laval tube (30) and then flows into the classification chamber (40). At that time, since the lower end of the coarse particle recovery passageway (53) is closed, the upper surfaces of the coarse particle recovery passageway (53) and the flange portion (52) become obstacles to the solid-gas mixed flow. Therefore, a standing shock wave (56) facing the outlet of the Laval tube is generated near the upper part of the inlet (55). Since the upper surface of the flange portion (52) is a flat surface, the standing shock wave (56) is substantially flat.
[0044]
Then, as shown in FIG. 1, the direction of the carrier gas flow (Fg) in the solid-gas mixed flow (F14) is changed substantially at right angles by the standing shock wave (56). Of the solid particles in this solid-gas mixed flow (F14), the fine particles (Pf) have a small inertial force, so the flow direction surely changes following the change in direction of the carrier gas (Fg), and the partition wall (51 , 51) flows into the fine particle recovery passageway (54) and is recovered.
[0045]
On the other hand, the coarse particles (Pr) among the solid particles in the solid-gas mixed flow (F14) have a large inertial force, and thus flow straight (Fr) regardless of the direction change of the carrier gas, and the partition walls (51, 51) into the coarse particle recovery passageway (53) inside the inlet (55) and recovered.
[0046]
As described above, the solid particles in the solid-gas mixed flow are classified into fine particles (Pf) and coarse particles (Pr).
[0047]
Therefore, the classifier (1) operating as described above has the following effects.
[0048]
That is, since the mixing chamber (20) is provided between the pipe (6) and the Laval pipe (30) to enlarge the cross-sectional area of the flow path, the solid-gas mixed flow (F11 ) Does not flow into the Laval tube (30) in a state where the particle density distribution is non-uniform, but decelerates at the mixing chamber inlet (21). Therefore, since the flow velocity decreases in the mixing chamber (20), the particles in the solid-gas mixed flow can be diffused uniformly, and the particle density distribution becomes uniform. Further, since the flow in the mixing chamber (20) is rectified, the flow disturbance is reduced. Therefore, the solid-gas mixed flow flowing into the Laval tube (30) becomes a stable solid-gas mixed flow (F3) with no unevenness of the particle density distribution and less turbulence.
[0049]
As a result, since the solid-gas mixed flow having a uniform and uniform particle density distribution flows in the flow path cross-sectional area reduction section (32) of the Laval pipe (30), the flow path cross-section area reduction section (32 The amount of solid particles adhering to the wall surface is reduced. Therefore, the amount of solid particles that are not collected and is wasted is reduced.
[0050]
In addition, since the solid-gas mixed flow flowing into the Laval tube (30) is a stable flow, a stable supersonic flow can be generated, and a stable standing shock wave (56) is generated in the classification chamber (40). be able to. As a result, highly accurate classification can be performed in the classification chamber (40).
[0051]
Further, since the amount of solid particles adhering to the Laval tube (30) is reduced, the maintenance period of the classifier (1) becomes longer. Here, the maintenance period is a period from when the solid particles adhering to the Laval tube (30) are once removed until the solid particles adhering to the Laval tube (30) need to be removed again after that. It is. Therefore, continuous operation for a long time is possible, and the efficiency of the classification operation is improved.
[0052]
-Modification-
Next, FIG. 3 shows a classifier (1) in which the mixing chamber (20), Laval tube (30), and classifier (40) have a circular cross-sectional shape as a modification of the classifier (1). . The mixing chamber (20) is formed of a hollow cylindrical sealed container. The mixing chamber (20) is provided with a circular opening serving as a mixing chamber inlet (21) on one end surface and a circular opening serving as a mixing chamber outlet (22) on the other end surface. Yes. The pipe (6) communicates with the mixing chamber inlet (21), the inlet of the Laval pipe (30) communicates with the mixing chamber outlet (22), and a solid-gas mixed flow is fed from the pipe (6) to the mixing chamber. It can be distributed to Laval pipe (30) via (20).
[0053]
In this classifying device (1), the direction of change in particle diameter by classification is the radial direction of the classification chamber (40). The height of the mixing chamber (20) is about twice as long as the cross-sectional diameter. Other configurations are the same as those of the classifier (1).
[0054]
Therefore, the classifying device (1) having the above-described configuration also has the same effects as the classifying device (1).
[0055]
Further, in each of the classifiers (1), as shown in FIG. 4, an orifice is used as a means for adjusting the pressure of the classifying chamber (40) or the like in the portion close to the mixing chamber (20) in the pipe (6). (7) is preferably provided. By providing the orifice (7) in this way, it is possible to adjust the throttle of the orifice (7) and control the pressure difference across the orifice (7). Then, the pressure in the classification chamber can be adjusted, and the speed of the solid-gas mixed flow flowing in the classification device (1) can be adjusted, so that the classification accuracy can be further improved.
[0056]
Second Embodiment of the Invention
Next, as shown in FIG. 5, the classification device (1) of Embodiment 2 will be described.
[0057]
The classifier (1) mainly includes a mixing chamber (20), a Laval tube (30), a classification chamber (40) as a chamber, a first carrier gas supply unit (85), and a carrier gas supply passage. A carrier gas supply pipe (86), a second carrier gas supply part (83), a particle supply part (84), and a mixed gas supply pipe (63) as a mixed gas supply passage are configured. And the first carrier gas supply unit (85), the carrier gas supply pipe (86), the second carrier gas supply unit (83), the particle supply unit (84), the mixed gas supply pipe (63), The mixing chamber (20) constitutes the transport means (6A) as referred to in the present invention.
[0058]
The first carrier gas supply unit (85) and the mixing chamber (20) are sequentially connected via a carrier gas supply pipe (86) so that carrier gas can flow. The second carrier gas supply unit (83) and the particle supply unit (84) communicate with each other through the pipe (86b), and the particle supply unit (84) communicates with the mixing chamber (20) through the mixed gas supply pipe (63). ing.
[0059]
The first carrier gas supply unit (85) is a part that supplies an inert gas such as He or Ar or a carrier gas such as air to the mixing chamber (20).
[0060]
On the other hand, the second carrier gas supply unit (83) is a part that supplies a carrier gas for guiding the solid particles stored in the particle supplier (84) into the mixing chamber (20). As the carrier gas, an inert gas such as He or Ar, air, or the like is used.
[0061]
The particle supply part (84) is a part for supplying solid particles such as various metals and ceramics as film forming materials. As the solid particles, solid fine particles generated by various fine particle production apparatuses (not shown) using a gas phase method, a pulverization method, a supercritical pressure method, a liquid phase method, or the like are used.
[0062]
Next, details of the mixing chamber (20), the Laval tube (30), and the classification chamber (40) will be described. As shown in FIG. 6, a carrier gas supply pipe (86), a mixing chamber (20) as an enlarged portion, a Laval tube (30) as a supersonic flow generating means, a classification chamber (40) as a chamber, Is configured in such a manner that the carrier gas is sequentially connected so as to be able to flow, and the mixed gas supply pipe (63) is inserted into one side surface of the mixing chamber (20).
[0063]
The carrier gas supply pipe (86) communicated with the mixing chamber (20) is a circular pipe having a constant cross-sectional area. However, the cross-sectional shape of the carrier gas supply pipe (86) may be other shapes such as a square, a rectangle and an ellipse as long as it can communicate with the mixing chamber (20).
[0064]
An orifice (7) is provided in the carrier gas supply pipe (86) so that the pressure in the classification chamber (40) can be adjusted.
[0065]
The mixing chamber (20) is the same as the mixing chamber (20) of the classification device (1) of the first embodiment.
[0066]
However, in the classification device (1) of Embodiment 2, an opening (68) for inserting the mixed gas supply pipe (63) is provided above at least one side surface of the mixing chamber (20). The mixed gas supply pipe (63) passes through the opening (68). The mixed gas supply pipe (63) is a circular pipe, but may be a pipe having another shape. The mixed gas supply pipe (63) is gently bent about 90 degrees downward in the mixing chamber (20), and is mixed from the outlet (64) at the tip of the mixed gas supply pipe (63) to the mixing chamber (20 ) The traveling direction of the solid-gas mixed flow (F18) flowing into the mixing chamber (F18) and the traveling direction of the carrier gas flowing into the mixing chamber (20) from the carrier gas supply pipe (86) are substantially matched. . The outlet (64) of the mixed gas supply pipe (63) is located at the center of the flow path of the mixing chamber (20). In other words, the outlet (64) is connected to the carrier gas (F17), which has flowed through the mixed gas supply pipe (63), flows into the mixing chamber (20) through the carrier gas supply pipe (86) ( F16) is provided at such a position as to be conveyed.
[0067]
Since the Laval tube (30) and the classification chamber (40) are the same as those of the classification device (1) of the first embodiment, the description thereof is omitted.
[0068]
Next, the operation of the classifier (1) will be described.
[0069]
As shown in FIG. 5, the inside of the classification chamber (40) is sucked into a negative pressure by a vacuum pump (not shown), the pressure difference between the first carrier gas supply unit (85) and the classification chamber (40), and Based on the pressure difference between the second carrier gas supply unit (83) and the classification chamber (40), an air flow is generated that guides the carrier gas (F15) and the solid-gas mixed gas (F17) into the mixing chamber (20).
[0070]
The carrier gas (F15) flowing from the first carrier gas supply section (85) through the carrier gas supply pipe (86) decelerates when passing through the mixing chamber inlet (21) and is stable in the mixing chamber (20). (F16). On the other hand, the carrier gas that has flowed into the particle supply unit (84) through the pipe (86b) from the second carrier gas supply unit (84) is mixed with the solid particles in the particle supply unit (84), and the solid-gas mixed flow ( F17) and flows through the mixed gas supply pipe (63) toward the mixing chamber (20). The solid-gas mixed flow (F17) is decelerated when it flows into the mixing chamber (20) from the outlet (64). The solid-gas mixed flow (F18) flowing out from the outlet (64) joins the stable carrier gas flow (F16) and then flows into the Laval tube (30).
[0071]
Thereafter, classification is performed in the classification chamber (40) in the same manner as the classification device (1) of the first embodiment.
[0072]
As described above, in the classification device (1) according to the second embodiment, the solid-gas mixed flow flowing from the mixed gas supply pipe (63) is decelerated in the mixing chamber (20). As a result, particles in the solid-gas mixed gas (F18) can be diffused uniformly, and the particle density distribution becomes uniform. Also, the flow disturbance is reduced.
[0073]
Further, the carrier gas flow (F15) flowing into the mixing chamber (20) from the carrier gas supply pipe (86) is also decelerated and the flow is stabilized. Then, the solid-gas mixed flow (F18) and the carrier gas flow (F16) merge in the mixing chamber (20). As a result, the solid-gas mixed stream (F18) is further rectified by joining with the stable carrier gas stream (F16), so that the flow disturbance is further reduced. Therefore, the solid-gas mixed flow flowing into the Laval tube (30) is a stable solid-gas mixed flow (F19) with no unevenness of the particle density distribution and very little turbulence.
[0074]
Therefore, the amount of solid particles in the solid-gas mixed flow adhering to the wall surface of the flow path cross-sectional area reduction portion of the Laval tube (30) is reduced. As a result, the same effect as that of the classification device of the first embodiment can be achieved more efficiently, such as the amount of wasted solid particles is reduced.
[0075]
In the classification device (1) of Embodiment 2, the cross-sectional shapes of the mixing chamber (20), the Laval tube (30), and the classification chamber (40) can be circular.
[0076]
Also, the carrier gas of the second carrier gas supply unit (83) is mixed through the carrier gas supply pipe (86) without separating the first carrier gas supply unit (85) and the second carrier gas supply unit (83). It may flow directly into the chamber (20).
[0077]
Embodiment 3 of the Invention
FIG. 7 shows a classification device (1) of the third embodiment. This classifier (1) replaces the substantially rectangular parallelepiped mixing chamber (20) of the classifying apparatus (1) of Embodiment 1 with a mixing chamber (20) whose cross-sectional shape in the XZ plane shown in FIG. The pipe (6) is replaced with a rectangular pipe (6).
[0078]
The mixing chamber (20) includes a channel cross-section increasing portion (91) where the channel cross-sectional area continuously increases, a channel cross-section enlarged portion (92) where the channel cross-sectional area is constant, and a channel cross-sectional area continuously It consists of three parts arranged in the order of the decreasing flow path cross-section reducing part (93). The lengths in the depth direction, that is, the Y direction, of the channel cross section increasing portion (91), the channel cross section expanding portion (92), and the channel cross section decreasing portion (93) are all constant and constant.
[0079]
A rectangular opening having a cross-sectional area equal to the cross-sectional area of the pipe (6) is provided at the upper end of the mixing chamber (20), and the mixing chamber (20) and the pipe (6) communicate with each other through this opening. In addition, a rectangular opening is provided at the lower end of the mixing chamber (20), and the mixing chamber (20) and the Laval pipe (30) as supersonic flow generating means are communicated with each other through the opening. The area of the opening at the lower end of the mixing chamber (20) is equal to the area of the inlet of the Laval pipe (30). An orifice (7) is provided between the mixing chamber (20) and the pipe (6) to adjust the pressure in the classification chamber (40).
[0080]
Therefore, the classifying device (1) has a configuration in which the channel cross-sectional area continuously changes except before and after the orifice (7).
[0081]
The channel cross-sectional area of the channel cross-section enlarged portion (92) is about several times the cross-sectional area of the pipe (6).
[0082]
In the classifier (1), the solid-gas mixed flow that has flowed through the pipe (6) is decelerated when it flows into the mixing chamber (20) through the orifice (7). As a result, it has the same effect as the classification device (1) of the first embodiment.
[0083]
Furthermore, in this classifier (1), the cross-sectional area of the flow path changes continuously except before and after the orifice (7), and the solid-gas mixed flow immediately after flowing into the mixing chamber (20) Since it passes through the channel cross-section increasing portion where the area continuously increases, the stagnation generated at the corner of the mixing chamber is eliminated. Therefore, useless energy loss due to flow stagnation is eliminated, and there is an effect that the load of the airflow generating means such as a vacuum pump (not shown) is reduced.
[0084]
In addition, since the cross-sectional area of the flow path continuously decreases from the mixing chamber (20) to the Laval tube (30), the solid-gas mixed flow when flowing from the mixing chamber (20) to the Laval tube (30) The pressure loss is small and the energy loss is small. Therefore, it is possible to reduce the load on the airflow generation means such as a vacuum pump (not shown).
[0085]
Embodiment 4 of the Invention
Next, Embodiment 4 in which the classification device according to the present invention is used as a film forming device will be described. The classification device according to the fourth embodiment is a device that forms a film while performing classification by causing a carrier gas containing solid particles to collide with a substrate.
[0086]
First, as shown in FIG. 8, the outline of the configuration of the classification device (101) of the fourth embodiment will be described.
[0087]
The classifier (101) includes a carrier gas supply unit (103), a particle supply unit (104), a mixing chamber (20) as an enlargement unit, a Laval tube (30) as a supersonic flow generating means, and a film formation as a chamber A chamber (140), a backup filter (105), and a vacuum pump (102) are sequentially connected via a pipe (6) as a mixed gas supply passage so that a solid-gas mixed gas can flow therethrough. The carrier gas supply unit (103), the particle supply unit (104), the pipe (6), and the mixing chamber (20) constitute the carrier means (6A) in the present invention.
[0088]
The carrier gas supply unit (103) is a part that supplies a carrier gas for guiding the solid particles stored in the particle supply unit (104) into the mixing chamber (20). An inert gas such as He or Ar, air, or the like is used as the carrier gas.
[0089]
On the other hand, the particle supply unit (104) is a part for supplying solid particles such as various metals and ceramics as film forming materials. Solid particles include fine particles (b) and ultrafine particles excluding coarse particles produced by various fine particle production equipment (not shown) using vapor phase method, pulverization method, supercritical pressure method, liquid phase method, etc. A mixture with (c) is used.
[0090]
The backup filter (105) is provided between the film forming chamber (140) and the vacuum pump (102), and is provided to collect solid particles that have not been used for film formation.
[0091]
The vacuum pump (102) sucks the gas in the film formation chamber (140) and makes the pressure in the film formation chamber (140) smaller than the pressure in the carrier gas supply unit (103). A gas is introduced into the film forming chamber (140), and an air stream is generated in the classifier (101).
[0092]
Next, details of the mixing chamber (20), the Laval tube (30), and the film forming chamber (140) will be described.
[0093]
This classifying apparatus (101) is a so-called batch type apparatus that continuously forms films one after another on a substrate (155) cut into a predetermined size in a film forming chamber (140).
[0094]
As shown in FIGS. 9 and 10, a pipe (6), a mixing chamber (20) as an enlarged portion communicating with the pipe (6), a Laval pipe (30) as a supersonic flow generating means, and a chamber The film forming chamber (140) is configured in such a manner that a solid-gas mixed gas is sequentially connected so as to be able to flow therethrough.
[0095]
The pipe (6) communicated with the mixing chamber (20) is a circular pipe having a constant cross-sectional area. However, the cross-sectional shape of the pipe (6) may be other shapes such as a square, a rectangle and an ellipse as long as the pipe (6) can communicate with the mixing chamber (20).
[0096]
The mixing chamber (20) is mainly formed of a sealed container having a substantially rectangular parallelepiped shape, and constitutes a conveying means together with the pipe (6). A mixing chamber inlet (21) formed of a circular opening is formed on one side surface, and a mixing chamber outlet (22) formed of a rectangular opening is formed on the side surface opposite to the side surface. The mixing chamber inlet (21) is opened to the outlet of the pipe (6), and the mixing chamber outlet (22) is opened to the inlet of the Laval tube (30). The area (hereinafter referred to as the channel cross-sectional area) of the mixing chamber (20) in the channel cross-section (the cross-section perpendicular to the channel direction, XY plane in FIG. 10) is smaller than the cross-sectional area of the pipe (6). For example, about 9 times larger. The cross-sectional area of the flow path of the mixing chamber (20) is decelerated when the solid-gas mixed flow flowing through the pipe (6) passes through the mixing chamber inlet (21) and flows into the mixing chamber (20). It is set so that particles in the solid-gas mixed gas (F11) diffuse. The cross-sectional area of the mixing chamber (20) is several times larger than the cross-sectional area of the inlet of the Laval tube (30), for example, about three times larger. The distance between the inner wall of the upper surface in the mixing chamber (20) and the inner wall of the lower surface, that is, the height (L1) in the mixing chamber (20) is the distance between the side surfaces in the mixing chamber (20), that is, the mixing chamber. It is about twice the width (D1) of (20). The height (L1) and width (D1) of the mixing chamber are set so that a sufficient particle diffusion effect can be obtained.
[0097]
The Laval tube (30) has an inlet part (31) having a constant cross-sectional area, a channel cross-sectional area reduction part (32) in which the channel cross-sectional area continuously decreases, and a throat part in which the channel cross-sectional area is the smallest (33) and a channel cross-sectional area enlarged portion (34) in which the channel cross-sectional area continuously increases are integrally formed in order. In order to stably generate a predetermined supersonic flow, the inner surface of the Laval tube (30) is smoothly continuous. As shown in FIG. 10, the Laval tube (30) has a rectangular channel cross section, and is easy to increase in size. Note that the lengths in the Y direction (depth direction) shown in FIG. 10 of the inlet portion (31), the flow passage cross-sectional area reduction portion (32), the throat portion (33), and the flow passage cross-sectional area enlargement portion (34) are mutually equal. And their length is approximately equal to the length of the cross section of the mixing chamber in the Y direction.
[0098]
As shown in FIG. 11, the film forming chamber (140) as a chamber is a semi-sealed container having a rectangular cross section formed by a casing (141). The length of the film forming chamber (140) in the Y direction is substantially equal to the length of the Laval tube (30) in the Y direction. Inside the film forming chamber (140), a substrate supporting means (150) for supporting the substrate (155) and a moving means (152) for moving the substrate supporting means (150) are provided. The substrate support means (150) includes a support bar (153) and a mounting table (151) on which the substrate (155) disposed on the upper end of the support bar (153) is placed. The mounting table (151) is disposed so that the substrate (155) faces the outlet of the Laval tube (30). The substrate (155) is a rectangular thin plate and is disposed between the two side surfaces (141a) and (141b) of the casing (141) as shown in FIG.
[0099]
The film forming chamber (140), although not shown, is provided continuously with the film forming chamber (140) and stores a large number of substrates (155) so that solid particles do not adhere to the film forming chamber (140). Conveying means for conveying the substrate (155) is disposed between the storage section and the mounting table (151) of the substrate supporting means (150).
[0100]
-Operation of classifier (101)-
Next, the operation of the classifier (101) will be described.
[0101]
First, by operating the vacuum pump (102) to suck the gas in the film formation chamber (140), the pressure in the film formation chamber (140) and the outlet pressure of the Laval tube (30) are lower than atmospheric pressure. That is, a vacuum is applied. Then, due to the difference between the pressure of the carrier gas supply unit (103) and the particle supply unit (104) and the pressure of the film formation chamber (140), the classifier is moved from the carrier gas supply unit (103) toward the mixing chamber (20). (101) A solid-gas mixed flow flowing inside is generated. That is, the carrier gas is supplied from the carrier gas supply unit (103), and this carrier gas is mixed with the solid particles in the particle supply unit (104), and then becomes a solid-gas mixed flow containing the solid particles as the pipe (6). Flows in.
[0102]
At this time, the solid-gas mixed flow (F11) flowing in the pipe (6) is a solid-gas mixed flow with a large deviation in particle density distribution based on the difference in inertia of the solid particles due to the difference in particle size. In addition, this solid-gas mixed flow is a turbulent flow. The solid-gas mixed flow (F11) flows from the pipe (6) into the mixing chamber (20) through the mixing chamber inlet (21).
[0103]
At this time, since the cross-sectional area of the flow path is increased when flowing from the pipe (6) into the mixing chamber (20), the solid-gas mixed flow (F11) is decelerated (see F12). Then, the solid particles diffuse in the mixing chamber (20), and the particle density distribution becomes uniform. In addition, the flow turbulence is reduced, and the solid-gas mixed flow is rectified. That is, the mixing chamber (20) acts as a so-called relaxation tank that relaxes and rectifies the flow of the solid-gas mixed gas (F11) that has flowed through the pipe (6). Thereafter, the rectified solid-gas mixed flow (F13) flows into the Laval tube inlet (31) through the mixing chamber outlet (22).
[0104]
The solid-gas mixed flow that has passed through the Laval tube inlet (31) is accelerated at the flow path cross-sectional area reduction section (32) of the Laval tube (30), becomes sonic at the throat section (33), and then flows further. The road cross-sectional area enlargement section (34) increases the speed to a predetermined supersonic speed.
[0105]
After supersonic flow, the solid-gas mixed flow (F14) flows out from the Laval tube (30), then flows into the film formation chamber (140), and collides with the substrate (155) on the mounting table (151). . At this time, a standing shock wave (56) facing the outlet of the Laval tube (30) is generated on the substrate (155). This standing shock wave (56) is a pressure wave and is generated at a fixed position between the Laval tube outlet (34) and the substrate (155). The standing shock wave (56) is uniform in the Y direction and has a convex curved surface toward the outlet of the Laval tube (30).
[0106]
The solid-gas mixed flow (F14) decelerates rapidly before and after the standing shock wave (56), and the gas in the solid-gas mixed flow (F14) moves outside the horizontal direction (X direction) of the mounting table (151). It flows toward. For this reason, the fine particles (b) having a large inertia force of the supplied solid particles go straight on, while the ultrafine particles (c) having a small inertia force are carried on the airflow in the left-right direction (X Direction).
[0107]
In this way, the solid particles are classified so as to change from a large particle size to a small particle size from the center of the solid-gas mixed flow (F14) toward the left and right outwards of the mounting table (151). The classified particles collide with the substrate (155) and deposit to form a thin film.
[0108]
At the position of the substrate (155) as shown in FIG. 12, only fine particles (b) having a very uniform particle size can collide with the substrate, and a thin film having a uniform particle size is formed by the fine particles (b). can do.
[0109]
Further, the particle size of the solid particles constituting the thin film can be changed by changing the position where the substrate (155) is arranged. For example, the substrate (155) is moved in the particle size change direction (X direction) by the moving means (152), and the substrate (155) is positioned in the region in which the ultrafine particles (c) are distributed. A thin film of ultrafine particles (c) can be formed.
[0110]
Then, the solid particles not deposited on the substrate (155) pass through the film forming chamber (140), are captured by the backup filter (105), and are collected after being retained in the backup filter (105).
[0111]
The classifier (101) operating as described above has the following effects.
[0112]
That is, by providing the mixing chamber (20) that expands the cross-sectional area of the flow path between the pipe (6) and the Laval pipe (30), the solid-gas mixed flow (F11 ) Does not flow into the Laval tube (30) in a state where the particle density distribution is non-uniform, but decelerates at the mixing chamber inlet (21). Therefore, since the flow velocity decreases in the mixing chamber (20), the particles in the solid-gas mixed flow can be diffused uniformly, and the particle density distribution becomes uniform. Further, since the flow in the mixing chamber (20) is rectified, the flow disturbance is reduced. Therefore, the solid-gas mixed flow flowing into the Laval tube (30) is a stable solid-gas mixed flow (F13) with little unevenness of particle density distribution and less turbulence.
[0113]
As a result, since the solid-gas mixed flow having a uniform and uniform particle density distribution flows in the flow path cross-sectional area reduction section (32) of the Laval pipe (30), the flow path cross-section area reduction section (32 The amount of solid particles adhering to the wall surface is reduced. Therefore, the amount of solid particles that are wasted without actually forming a thin film is reduced.
[0114]
In addition, since the solid-gas mixed flow flowing into the Laval tube (30) is a stable flow, a stable supersonic flow can be generated, and a stable standing shock wave (56) is generated in the film formation chamber (140). can do. As a result, a high-quality thin film can be efficiently produced in the film formation chamber (140).
[0115]
Further, since the amount of solid particles adhering to the Laval tube (30) decreases, the maintenance period of the present classifier (101) becomes longer. Therefore, continuous operation over a long period of time is possible, and the productivity of film formation is improved.
[0116]
-Modification-
Next, as a modification of the classifier (101), FIG. 13 shows a classifier (101) in which the mixing chamber (20), the Laval tube (30), and the film forming chamber (140) have a circular cross-sectional shape. Show. The mixing chamber (20) is formed of a hollow cylindrical sealed container. The mixing chamber (20) is provided with a circular opening serving as a mixing chamber inlet (21) on one end surface and a circular opening serving as a mixing chamber outlet (22) on the other end surface. Yes. The pipe (6) communicates with the mixing chamber inlet (21), the inlet of the Laval pipe (30) communicates with the mixing chamber outlet (22), and a solid-gas mixed flow is fed from the pipe (6) to the mixing chamber. It can be distributed to Laval pipe (30) via (20).
[0117]
In this classifying apparatus (101), the direction of change in particle diameter by classification is the radial direction of the film forming chamber (140). The height of the mixing chamber (20) is about twice the diameter of the cross section. Other configurations are the same as those of the classifier (101).
[0118]
Therefore, the classifier (101) also has the same effects as the classifier (101).
Furthermore, in each of the classifiers (101), as shown in FIG. 14, as a means for adjusting the pressure of the film forming chamber (140) or the like in a portion in the pipe (6) adjacent to the mixing chamber (20). It is preferable to provide an orifice (7). By providing the orifice (7) in this way, it is possible to adjust the throttle of the orifice (7) and control the pressure difference across the orifice (7). The pressure in the film formation chamber (140) can be adjusted, and the flow rate of the solid-gas mixed flow impinging on the substrate (155) from the Laval tube (30) can be adjusted, so that the quality of the thin film is improved. Can be a thing.
[0119]
Embodiment 5 of the Invention
Next, as shown in FIG. 15, the classification device (101) of Embodiment 5 will be described.
[0120]
−Structure of film forming device (101) −
First, the outline of the configuration of the classification device (101) of the fifth embodiment will be described. The classifier (101) mainly includes a first carrier gas supply unit (85), a carrier gas supply pipe (86) as a carrier gas supply passage, a second carrier gas supply unit (83), and a particle supply unit (84). A mixed gas supply pipe (63) as a mixed gas supply passage, a mixing chamber (20), a Laval tube (30), a film forming chamber (140), a backup filter (105), and a vacuum pump (102) . The first carrier gas supply unit (85), mixing chamber (20), Laval tube (30), film formation chamber (140), backup filter (105), and vacuum pump (102) carry the carrier gas through piping. Connected in order as possible. Further, the second carrier gas supply unit (83) and the particle supply unit (84) communicate with each other through the pipe (86b), and the particle supply unit (84) communicates with the mixing chamber (20) through the mixed gas supply pipe (63). ing. The first carrier gas supply section (85), the carrier gas supply pipe (86), the second carrier gas supply section (83), the particle supply section (84), the mixed gas supply pipe (63), and the mixing chamber (20) are The conveying means (6A) referred to in the present invention is constituted.
[0121]
The first carrier gas supply unit (85) is a part that supplies an inert gas such as He or Ar or a carrier gas such as air to the mixing chamber (20).
[0122]
On the other hand, the second carrier gas supply unit (83) is a part that supplies a carrier gas for guiding the solid particles stored in the particle supplier (84) into the mixing chamber (20).
[0123]
The particle supply part (84) is a part for supplying solid particles such as various metals and ceramics as film forming materials. As the solid particles, solid fine particles generated by various fine particle production apparatuses (not shown) using a gas phase method, a pulverization method, a supercritical pressure method, a liquid phase method, or the like are used.
[0124]
The backup filter (105) and the vacuum pump (102) are the same as in the fourth embodiment. That is, the backup filter (105) is provided to collect solid particles that have not been used for film formation, and the vacuum pump (102) is provided with the carrier gas of the first carrier gas supply unit and the carrier gas of the second carrier gas supply unit. It is provided so as to guide the carrier gas to the mixing chamber (20).
[0125]
Next, details of the mixing chamber (20), the Laval tube (30), and the film forming chamber (140) will be described.
[0126]
Similar to the classification device (101) of the fourth embodiment, the classification device (101) is a so-called batch that continuously forms films one after another on a substrate cut into a predetermined size in the film formation chamber (140). Device of the type.
[0127]
As shown in FIG. 16, the classifier (101) includes a mixing chamber (20) as an enlarged portion communicated with the carrier gas supply pipe (86), a Laval pipe (30) as a supersonic flow generating means, The film forming chamber (140) is connected in order so that the carrier gas can flow therethrough.
[0128]
The carrier gas supply pipe (86) communicated with the mixing chamber (20) is a circular pipe having a constant cross-sectional area. However, as long as communication with the mixing chamber (20) is possible, the cross-sectional shape of the carrier gas supply pipe (86) may be other shapes such as a square, a rectangle, and an ellipse.
[0129]
An orifice (7) is provided in the carrier gas supply pipe (86), and the pressure in the film forming chamber (140) can be adjusted.
[0130]
The mixing chamber (20) is the same as the mixing chamber (20) of the classification device (101) of the fourth embodiment.
[0131]
However, in the classification device (101) of the fifth embodiment, an opening (68) for inserting the mixed gas supply pipe (63) is provided above at least one side surface of the mixing chamber (20). The mixed gas supply pipe (63) passes through the opening (68). The mixed gas supply pipe (63) is a circular pipe, but may be a pipe having another shape. The mixed gas supply pipe (63) is gently bent about 90 degrees downward in the mixing chamber (20), and is mixed from the outlet (64) at the tip of the mixed gas supply pipe (63) to the mixing chamber (20 ) The traveling direction of the solid-gas mixed flow (F18) flowing into the mixing chamber (F18) and the traveling direction of the carrier gas flowing into the mixing chamber (20) from the carrier gas supply pipe (86) are substantially matched. . The outlet (64) of the mixed gas supply pipe (63) is located at the center of the flow path of the mixing chamber (20). In other words, the outlet (64) is connected to the carrier gas (F17), which has flowed through the mixed gas supply pipe (63), flows into the mixing chamber (20) through the carrier gas supply pipe (86) ( F16) is provided at such a position as to be conveyed.
[0132]
The Laval tube (30) and the film forming chamber (140) are the same as those of the classification device (101) of the fourth embodiment, and thus the description thereof is omitted.
[0133]
-Operation of classifier (101)-
Next, the operation of the classifier (101) will be described.
[0134]
The film formation chamber (140) sucked by the vacuum pump (102) is in a vacuum state, the pressure difference between the first carrier gas supply unit (85) and the film formation chamber (140), and the second carrier gas supply unit (83 ) And a film forming chamber (140), an air flow is generated that guides the carrier gas (F15) and the solid-gas mixed flow (F17) into the mixing chamber (20).
[0135]
The carrier gas (F15) flowing from the first carrier gas supply section (85) through the carrier gas supply pipe (86) decelerates when passing through the mixing chamber inlet (21) and is stable in the mixing chamber (20). (F16). On the other hand, the carrier gas that has flowed into the particle supply unit (84) from the second carrier gas supply unit (84) through the carrier gas supply pipe (86) is mixed with the solid particles in the particle supply unit (84), and the solid gas It becomes a mixed flow (F17) and flows through the mixed gas supply pipe toward the mixing chamber (20). The solid-gas mixed flow (F17) is decelerated when it flows into the mixing chamber (20) from the outlet (64). The solid-gas mixed flow (F18) flowing out from the outlet (64) joins the stable carrier gas flow (F16) and then flows into the Laval tube (30).
[0136]
Thereafter, film formation is performed in the film forming chamber (140) in the same manner as the classifying apparatus (101) of the fourth embodiment.
[0137]
As described above, in the classification device (101) in the fifth embodiment, the solid-gas mixed flow flowing into the mixed gas supply pipe (63) is decelerated in the mixing chamber (20). As a result, particles in the solid-gas mixed gas (F18) can be diffused uniformly, and the particle density distribution becomes uniform. Also, the flow disturbance is reduced.
[0138]
Further, the carrier gas flow (F15) flowing into the mixing chamber (20) from the carrier gas supply pipe (86) is also decelerated and the flow is stabilized. Then, the solid-gas mixed flow (F18) and the carrier gas flow (F16) merge in the mixing chamber (20). As a result, the solid-gas mixed stream (F18) is further rectified by joining with the stable carrier gas stream (F16), so that the flow disturbance is further reduced. Therefore, the solid-gas mixed flow flowing into the Laval tube (30) is a stable solid-gas mixed flow (F19) with no unevenness of the particle density distribution and very little turbulence.
[0139]
Therefore, the amount of solid particles in the solid-gas mixed flow adhering to the wall surface of the flow path cross-sectional area reducing portion (32) of the Laval tube (30) is reduced. As a result, the same effects as those of the classification device of the fourth embodiment can be achieved more efficiently, such as the amount of wasted solid particles is reduced.
[0140]
In the classifying apparatus (101) of the fifth embodiment, the mixing chamber (20), the Laval tube (30), and the film forming chamber (140) may have a circular cross section.
[0141]
Also, the carrier gas of the second carrier gas supply unit (83) is mixed through the carrier gas supply pipe (86) without separating the first carrier gas supply unit (85) and the second carrier gas supply unit (83). It may flow directly into the chamber (20).
[0142]
Embodiment 6 of the Invention
FIG. 17 shows a classification device (101) of the sixth embodiment. This classifying device (101) replaces the substantially rectangular parallelepiped mixing chamber (20) of the classifying device (101) of Embodiment 4 with a mixing chamber (20) whose cross-sectional shape in the XZ plane shown in FIG. 17 is octagonal. The pipe (6) is replaced with a rectangular pipe (6).
[0143]
The mixing chamber (20) includes a channel cross-section increasing portion (91) where the channel cross-sectional area continuously increases, a channel cross-section enlarged portion (92) where the channel cross-sectional area is constant, and a channel cross-sectional area continuously It consists of three parts arranged in the order of the decreasing flow path cross-section reducing part (93). The lengths in the depth direction, that is, the Y direction, of the channel cross section increasing portion (91), the channel cross section expanding portion (92), and the channel cross section decreasing portion (93) are all constant and constant.
[0144]
A rectangular opening having a cross-sectional area equal to the cross-sectional area of the pipe (6) is provided at the upper end of the mixing chamber (20), and the mixing chamber (20) and the pipe (6) communicate with each other through this opening. In addition, a rectangular opening is provided at the lower end of the mixing chamber (20), and the mixing chamber (20) and the Laval pipe (30) as supersonic flow generating means are communicated with each other through the opening. The area of the opening at the lower end of the mixing chamber is equal to the area of the inlet of the Laval tube (30). An orifice (7) is provided between the mixing chamber (20) and the pipe (6) to adjust the pressure in the classifier (101).
[0145]
Therefore, the classifying device (101) has a configuration in which the channel cross-sectional area continuously changes except before and after the orifice (7).
[0146]
The channel cross-sectional area of the channel cross-section enlarged portion is about several times the cross-sectional area of the pipe (6).
[0147]
In this classifier (101), the solid-gas mixed flow that has flowed through the pipe (6) is decelerated when it passes through the orifice (7) and flows into the mixing chamber (20). As a result, it has the same effect as the classification device (101) of the fourth embodiment.
[0148]
Furthermore, in this classifier (101), the cross-sectional area of the flow path continuously changes except before and after the orifice (7), and the solid-gas mixed flow immediately after flowing into the mixing chamber (20) Since it passes through the channel cross-section increasing portion where the area continuously increases, the stagnation generated at the corner of the mixing chamber is eliminated. Therefore, useless energy loss due to flow stagnation is eliminated, and there is an effect that the load of the airflow generating means such as a vacuum pump (not shown) is reduced.
[0149]
In addition, since the cross-sectional area of the flow path continuously decreases from the mixing chamber (20) to the Laval tube (30), the solid-gas mixed flow when flowing from the mixing chamber (20) to the Laval tube (30) The pressure loss is small and the energy loss is small. Therefore, the load on the vacuum pump can be reduced.
[0150]
【The invention's effect】
As described above, according to the first aspect of the present invention, the gas-solid mixed gas that has flowed through the conveying means is provided at the downstream end of the conveying means by providing the enlarged portion that enlarges the cross-sectional area of the flow path. The flow rate of decreases. And the particle | grains in solid-gas mixed gas can be spread | diffused uniformly within an expansion part, and particle density distribution becomes uniform. Further, the flow of the solid gas mixture gas is rectified in the enlarged portion. Therefore, since the solid-gas mixed flow with uniform particle density distribution and less turbulence flows into the supersonic flow generating means, the amount of solid particles adhering to the wall surface of the flow path cross-sectional area reduction portion of the supersonic flow generating means is reduced. Can be reduced.
[0151]
As a result, the amount of solid particles that are not collected and is wasted can be reduced.
[0152]
In addition, since the maintenance period can be extended and continuous operation can be performed for a long time, the efficiency of the classification operation can be improved.
[0153]
Further, a stable supersonic flow can be generated by the supersonic flow generating means, and a stable standing shock wave can be generated in the chamber. As a result, highly accurate classification can be performed in the chamber.
[0154]
According to the second aspect of the present invention, in addition to the above effect, the classified particles are reliably recovered by providing shock wave generating means for individually recovering coarse particles and fine particles in the chamber. Can be classified with high accuracy.
[0155]
According to the third aspect of the present invention, the shock wave that supports the substrate in the chamber so as to face the outlet of the supersonic flow generating means and forms a film of particles selected by classification on the substrate. By providing the generating means, in addition to the above effects, classification and film formation can be performed simultaneously. In addition, a high-quality thin film can be formed efficiently.
[0156]
According to the invention described in claim 4, by providing the means for adjusting the pressure in the chamber in the conveying means, it is possible to adjust the pressure in the chamber, and it is possible to further classify or form a film. Can be done efficiently.
[0157]
According to the fifth aspect of the present invention, the solid-gas mixed gas and the carrier gas are merged at the enlarged portion, whereby the particle density distribution can be further uniformed and the flow can be further stabilized. As a result, it is possible to further reduce the amount of particles adhering to the flow path cross-sectional area reducing portion of the supersonic flow generating means.
[0158]
In addition, according to the invention described in claim 6, since the cross-sectional area of the flow path through which the solid / gas mixed flow circulates is continuously changed, the secondary flow in the mixing chamber hardly occurs, and the solid / gas mixed flow The pressure loss can be reduced.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a classification device according to a first embodiment.
FIG. 2 is a perspective view of the classification device according to the first embodiment.
FIG. 3 is a perspective view showing a modified example of the classification device according to the first embodiment.
FIG. 4 is a cross-sectional view of the classification device according to the first embodiment.
FIG. 5 is a diagram showing a classification device system.
FIG. 6 is a sectional view of a classification device according to a second embodiment.
FIG. 7 is a cross-sectional view of a classification device according to a third embodiment.
FIG. 8 is a diagram showing a classification device system.
FIG. 9 is a cross-sectional view of a classification device according to a fourth embodiment.
FIG. 10 is a perspective view of a classification device according to a fourth embodiment.
FIG. 11 is a cross-sectional view of a film forming chamber.
FIG. 12 is a diagram for explaining a film forming operation in a film forming chamber.
FIG. 13 is a perspective view showing a modification of the classification device according to the fourth embodiment.
FIG. 14 is a perspective view of a classification device according to a fourth embodiment.
FIG. 15 is a diagram showing a film forming apparatus system.
FIG. 16 is a cross-sectional view of a classification device according to a fifth embodiment.
FIG. 17 is a cross-sectional view of a classification device according to a sixth embodiment.
FIG. 18 is a cross-sectional view of a conventional classification device.
FIG. 19 is a cross-sectional view of a conventional apparatus for simultaneously performing classification and film formation.
[Explanation of symbols]
6 Piping
20 Mixing chamber
30 Laval tube
40 classification room
50 Substrate support means
63 Mixed gas supply piping
83 Second carrier gas supply unit
84 Particle supply unit
85 First carrier gas supply unit
86 Carrier gas supply piping
140 Film formation chamber

Claims (6)

On the downstream side of the conveying means (6A) having a mixed gas supply passage (6, 63) through which a solid gas mixed gas formed by mixing solid particles into the conveying gas is provided, a reduced portion (32) having a reduced channel cross-sectional area Supersonic flow generating means (30) having
In the chamber (40, 140) to which the outlet of the supersonic flow generating means (30) communicates, shock wave generating means (50, 150) for generating a standing shock wave is provided,
In a classification device for classifying solid particles in a solid-gas mixed gas flowing into the chamber (40, 140) by a standing shock wave,
At the downstream end of the transport means (6A), there is an enlarged portion (20) in which the cross-sectional area of the flow path through which the gas-solid mixed gas flows is larger than the cross-sectional area of the mixed gas supply passage (6, 63). A classification device characterized by being formed. The classification device according to claim 1,
The shock wave generating means (50) has a coarse particle collection passage (53) and a fine particle collection passage (54), and collects the coarse particles (Pr) and fine particles (Pf) individually. Classification device. The classification device according to claim 1,
The shock wave generating means (150) supports the substrate (155) so as to face the outlet of the supersonic flow generating means (30), and forms a film of particles selected by classification on the substrate (155). Classifying device characterized by letting In the classification apparatus as described in any one of Claim 2 or 3,
The classifying apparatus, wherein the conveying means (6A) has an adjusting means (7) for adjusting the pressure in the chamber (40, 140). In the classification apparatus as described in any one of Claims 1-4,
The transport means (6A) further includes a transport gas supply passage (86) through which the transport gas flows, and the transport gas supply passage (86) and the mixed gas supply passage (63) are assembled at the enlarged portion (20). A classification device characterized by that. In the classification apparatus as described in any one of Claims 1-4,
The enlarged part (20)
An inlet communicating with the conveying means (6A);
An outlet communicating with the supersonic flow generating means (30);
A channel cross-section increasing portion (91) where the channel cross-sectional area continuously increases from the inlet,
A flow path cross-section decreasing portion (93) in which the flow path cross-sectional area continuously decreases toward the outlet,
A classifying apparatus comprising:

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