JP3655243B2 - Copying device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a copying apparatus that follows the surface of a workpiece by contact, and particularly to a technique that is effective when applied to the surface of a workpiece with high accuracy.
[0002]
[Prior art]
When a semiconductor chip cut from a semiconductor wafer is transported and mounted on a die pad, or when inner leads are pressed against bumps formed on the semiconductor chip, the surface of the semiconductor chip is parallel to the surface of various tools. Since the degree is required, a copying apparatus is used. The copying apparatus is also used when connecting the optical fiber and the connector by aligning the optical axes.
[0003]
As a conventional copying apparatus, for example, there is an apparatus in which a copying member having a convex hemispherical surface is rotatably provided on a support member having a concave hemispherical surface. The copying member has a contact surface that comes into contact with the workpiece surface. When the contact surface comes into contact with the workpiece surface, the copying member tilts along the workpiece surface. By this tilting, a copying operation that makes the contact surface and the workpiece surface parallel is performed.
[0004]
[Problems to be solved by the invention]
However, the fulcrum where the copying member tilts along the workpiece surface, that is, the sliding contact portion between the concave hemisphere and the convex hemisphere is always in mechanical contact. Therefore, the inclination of the copying member is limited by the sliding resistance generated in the sliding contact portion, and it is difficult to perform the copying operation with high accuracy. Therefore, there is a need for a copying apparatus that reduces the sliding resistance and performs the copying operation with high accuracy.
[0005]
An object of the present invention is to provide a copying apparatus that enables a highly accurate copying operation.
[0006]
[Means for Solving the Problems]
The copying apparatus of the present invention includes a support block and a tilting block that is held in a non-contact manner with the support block, and is a copying apparatus that tilts the tilting block along the workpiece surface, and is held by the support block. A copying curved surface that forms a curved surface, a fluid discharge hole provided at a position retracted from the holding curved surface, a fluid guide surface that connects the fluid discharge hole and the holding curved surface, and faces the holding curved surface on the tilting block A nozzle that guides fluid from the fluid discharge hole along the fluid guide surface is provided in the support block, and is generated when the fluid passes between the holding curved surface and the copying curved surface. The tilting block is held on the support block by pressure.
[0007]
Thereby, the tilting block can be held in a non-contact manner with respect to the support block, and the tilting block can be tilted without being affected by the sliding resistance. Therefore, a highly accurate copying operation can be performed. In addition, since the support block and the tilting block are held in a non-contact manner by supplying fluid, a low-cost copying apparatus can be obtained.
[0008]
The copying apparatus according to the present invention is characterized in that the copying curved surface is larger than the holding curved surface. Thereby, even when the tilting block tilts, the fluid can always be supplied to the holding curved surface, and the tilting block can be held in a non-contact manner with respect to the support block.
[0009]
The copying apparatus of the present invention is characterized in that one of the holding curved surface and the copying curved surface is formed in a convex shape and the other is formed in a concave shape. Thereby, even when the tilting block tilts, the change in the clearance formed between the holding curved surface and the copying curved surface can be reduced. Therefore, the flow velocity with respect to the holding curved surface can be stabilized, and the tilting block can be stably held in a non-contact manner with respect to the support block.
[0010]
The copying apparatus according to the present invention is characterized in that one of the holding curved surface and the copying curved surface has a convex curvature radius larger than the other curvature radius. Thereby, the clearance between the holding curved surface and the copying curved surface can be narrowed without hindering the flow of fluid, and a high-precision copying operation can be performed.
[0011]
The copying apparatus of the present invention has a fluid suction hole that opens at an end surface of the support block, and after the tilting block tilts, the fluid is sucked from the fluid suction hole, whereby the holding curved surface and the scanning curved surface A negative pressure is applied between the tilt blocks and the tilt block is fixed to the support block. As a result, the tilting block can be sucked and fixed to the support block, and the copying operation can be easily maintained fixedly. Furthermore, the tilting block is sucked and fixed to the support block by forming one of the holding curved surface and the copying curved surface with a convex curvature radius larger than the other curvature radius. In this case, the copying operation can be maintained with high accuracy.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0013]
FIG. 1 is a perspective view showing a pressing device 11 having a copying apparatus 10 according to an embodiment of the present invention. As shown in FIG. 1, the pressing device 11 has an arm 12 that moves up and down, and a support block 13 that constitutes the copying device 10 is fixed to the arm 12. Further, a tilting block 14 constituting the copying apparatus 10 is held at the lower end surface of the support block 13, and a pressing portion 15 is formed at the lower end of the tilting block 14. By lowering the arm 12 with respect to the workpiece Wa arranged on the work stage 16, the contact surface 17 of the pressing portion 15 comes into contact with the upper surface 18 of the workpiece Wa, and by tilting the tilting block 14, the contact surface 17. And the workpiece Wa surface are made parallel. After performing the copying operation in this manner, the arm 12 is further lowered to press the workpiece Wa.
[0014]
FIG. 2 is a perspective view showing the arm 12 and the support block 13 of FIG. As shown in FIG. 2, the support block 13 fixed to the tip of the arm 12 has a cylindrical shape, and has an annular holding curved surface 19 at the lower end surface. A plurality of fluid discharge holes 20 are formed at a position that is retracted from the holding curved surface 19, that is, above the holding curved surface 19 as shown in FIG. Further, a nozzle 21 that is mounted so as to cover the fluid discharge hole 20 and rectifies the fluid discharged from the fluid discharge hole 20 is provided. Furthermore, a fluid guide surface 22 that smoothly connects the fluid discharge hole 20 and the holding curved surface 19 is formed. The arrows shown in FIG. 2 indicate the flow direction of the fluid discharged from the fluid discharge hole 20 and rectified by the nozzle 21.
[0015]
FIG. 3 is a cross-sectional view showing the periphery of the fluid discharge hole 20. As shown in FIG. 3, the fluid discharge hole 20 that opens to the lower end surface of the support block 13 is communicated with a flow path 23 formed in the support block 13. The flow path 23 is connected to an air pressure source (not shown), and compressed air that is a fluid from the air pressure source is discharged from the fluid discharge hole 20. An annular slit 24 is formed between the nozzle 21 and the fluid guide surface 22, and the discharge direction of the compressed air discharged from the fluid discharge hole 20 is changed by the nozzle 21 as shown by the arrow in FIG. Then, the ink is discharged from the slit 24 along the fluid guide surface 22. Accordingly, the compressed air is discharged in the radial direction around the nozzle 21.
[0016]
FIG. 4 is a cross-sectional view showing a part of the support block 13 and the tilting block 14. As shown in FIG. 4, the annular holding curved surface 19 formed on the lower end surface of the support block 13 is formed in a concave shape. A convex copying curved surface 25 is formed on the upper end surface of the tilting block 14 so as to face the holding curved surface 19, and the copying curved surface 25 is formed larger than the holding curved surface 19. Compressed air that is discharged from the slit 24 and flows along the fluid guide surface 22 passes between the holding curved surface 19 and the copying curved surface 25 thus formed. Therefore, a predetermined clearance is formed between the support block 13 and the tilting block 14 where the holding curved surface 19 and the copying curved surface 25 face each other. Further, a negative pressure is generated when the compressed air passes, and the tilting block 14 is sucked toward the support block 13 by the differential pressure between the negative pressure and the atmospheric pressure. Therefore, the tilting block 14 is held by the support block 13 through a predetermined clearance without falling. A fluid suction hole 26 connected to a vacuum supply source (not shown) is provided on the lower end surface of the support block 13.
[0017]
As shown in FIG. 4, the curvature radius of the copying curved surface 25 formed in a convex shape is larger than the curvature radius of the holding curved surface 19 formed in a concave shape. For this reason, the clearance formed between the support block 13 and the tilting block 14 is formed so that the edge of the support block 13 illustrated by β is smaller than the center illustrated by α. Become.
[0018]
Hereinafter, the operation of the copying apparatus 10 when pressing the workpiece Wa using the pressing apparatus 11 having such a copying apparatus 10 will be described. 5, 6 and 7 are explanatory diagrams showing the operation of the copying apparatus 10 until the copying operation is performed on the upper surface 18 of the workpiece Wa. Note that the upper surface 18 of the workpiece Wa is inclined with respect to the lower surface of the workpiece Wa.
[0019]
First, as shown in FIG. 5, the copying apparatus 10 is gradually moved downward toward the workpiece Wa placed on the work stage 16. At this time, compressed air is discharged from the fluid discharge hole 20 of the support block 13, and the tilting block 14 is held by the support block 13 by the differential pressure. Subsequently, as shown in FIG. 6, the contact surface 17 formed at the end of the pressing portion 15 of the tilting block 14 contacts the upper surface 18 of the workpiece Wa, and the upper surface 18 and the contact surface 17 are parallel to each other. The tilting block 14 tilts so as to become. Here, since the support block 13 and the tilting block 14 are not in contact with each other and are not affected by the sliding resistance, a high-precision copying operation is performed even if the tilt angle of the upper surface 18 of the workpiece Wa is small. Can do. Further, since the copying curved surface 25 is formed larger than the holding curved surface 19, the copying curved surface 25 always faces the holding curved surface 19 even when the tilting block 14 tilts with the copying operation. ing. Therefore, a negative pressure is always generated over the entire holding curved surface 19, and the tilting block 14 does not fall off.
[0020]
Next, as shown in FIG. 7, when the copying operation by the tilting of the tilting block 14 is completed, the fluid supply from the fluid discharge hole 20 is stopped and air is sucked from the fluid suction hole 26. For this reason, the tilting block 14 is attracted and fixed to the support block 13 while maintaining the tilted state. At this time, since the radius of curvature of the convex copying curved surface 25 is larger than the radius of curvature of the concave holding curved surface 19, the clearance β formed at the edge of the support block 13 that is in contact with suction and fixing is set to flow of compressed air. Therefore, even after the suction fixation, a highly accurate copying operation can be maintained. Then, after the tilting block 14 is fixed by suction fixing, the arm is lowered to press the work Wa.
[0021]
As described above, by attaching the copying apparatus 10, the pressing portion 15 is in contact with the entire upper surface 18 even when the inclination angle of the workpiece Wa upper surface 18 is different, so that a uniform pressing load can be applied to the workpiece Wa. It is possible to press the workpiece Wa without damaging it. Moreover, there is no influence by the sliding resistance between the support block 13 and the tilting block 14, and a high-precision copying operation can be performed.
[0022]
FIGS. 8A and 8B are explanatory views showing a copying apparatus 30 according to another embodiment of the present invention. The method for holding the tilting block 32 with respect to the support block 31 is the same as the method for holding the tilting block 14 with respect to the support block 13 described above. As shown in FIG. 8, the copying apparatus of the present invention can be used even when the support block and the tilting block are inverted upside down to tilt the workpiece side. For example, when pressing the workpiece Wb, as shown in FIG. 8A, the support block 31 is fixed to the work stage 33 and the workpiece Wb is mounted on the tilting block 32 held by the support block 31. Then, the pressing tool 34 is moved downward toward the workpiece Wb.
[0023]
Subsequently, as shown in FIG. 8B, when the contact surface 35 of the pressing tool 34 and the upper surface 36 of the workpiece Wb come into contact with each other, the tilting block 32 tilts, and the upper surface 36 of the workpiece Wb and the pressing tool 34 contact. The surface 35 can be parallel. At this time, since the support block 31 and the tilting block 32 are not in contact with each other, a highly accurate copying operation can be performed. Thus, by making the tool contact surface 35 and the upper surface 36 of the workpiece Wb parallel, a uniform pressing load can be applied to the workpiece Wb, and damage to the workpiece Wb can be prevented. Further, when pressing, by supplying a negative pressure from the fluid suction hole 37 and fixing the tilting block 32 by suction, the workpiece Wb can be fixed and a pressing load can be applied reliably.
[0024]
The illustrated curved surfaces 19 and 25, the tilt angles of the surfaces of the workpieces Wa and Wb, the tilt angles of the tilt blocks 14 and 32, the clearance between the support blocks 13 and 31 and the tilt blocks 14 and 32, and the like are for ease of explanation. It is exaggerated than it actually is.
[0025]
As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the present invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say. For example, although the pressing portion 15 is provided in the illustrated tilting block 14, a suction tool may be attached to the tilting block 14 to transport the workpiece that has undergone the copying operation. Thereby, even if the workpiece surface is inclined, the workpiece can be reliably sucked, and high-precision positioning and conveyance can be easily performed without being affected by each workpiece. That is, even when the inclination angles of the workpiece surfaces are different from each other, the relative position between the support block 13 and the workpiece at the time of adsorption becomes constant by adhering after performing the copying operation. The workpiece can be conveyed to a fixed position.
[0026]
Further, although the fluid discharge hole 20 and the fluid suction hole 26 are formed separately, an air pressure source and a vacuum supply source are respectively connected to the fluid discharge hole 20, and the air pressure source and the vacuum supply source are switched for use. You may do it. Thereby, the fluid suction hole 26 can be reduced and it can be set as the copying apparatus which has a simple structure.
[0027]
Further, the holding curved surface 19 of the support block 13 is formed in a concave shape, and the copying curved surface 25 of the tilting block 14 is formed in a convex shape. However, the holding curved surface 19 of the support block 13 is formed in a convex shape, and the tilting block 14 The copying curved surface 25 may be formed in a concave shape.
[0028]
Further, the compressed air from the fluid discharge hole 20 is rectified by the disk-shaped nozzle 21, but a tubular nozzle may be provided in each fluid discharge hole 20, and a support block is provided along the fluid guide surface 22. 13 may be formed directly.
[0029]
The curved surfaces 19 and 25 shown in the figure are part of a spherical surface, so that the tilting direction of the tilting block 14 is not limited, but the curved surfaces 19 and 25 may be formed in a cylindrical surface to limit the tilting direction of the tilting block 14. .
[0030]
【The invention's effect】
According to the copying apparatus of the present invention, by supplying a fluid between the support block and the tilting block, the tilting block can be held in a non-contact manner with respect to the support block, and is affected by sliding resistance. The tilting block can be tilted without any change. As a result, a highly accurate copying operation can be performed. In addition, since the support block and the tilting block are held in a non-contact manner by supplying fluid, a low-cost copying apparatus can be obtained.
[0031]
According to the copying apparatus of the present invention, by making the copying curved surface larger than the holding curved surface, it is possible to always supply fluid to the holding curved surface even when the tilting block tilts, and to tilt the support block. The block can be held in a non-contact manner.
[0032]
According to the copying apparatus of the present invention, by forming one of the holding curved surface and the copying curved surface in a convex shape and the other in a concave shape, even if the tilting block tilts, the holding curved surface and the copying curved surface The change of the clearance formed between them can be reduced, the flow velocity with respect to the holding curved surface can be stabilized, and the tilting block can be stably held in a non-contact manner with respect to the support block.
[0033]
According to the copying apparatus of the present invention, of the holding curved surface and the copying curved surface, one curvature radius formed in a convex shape is larger than the other curvature radius formed in a concave shape, so that the flow of fluid is increased. The clearance between the holding curved surface and the copying curved surface can be narrowed without hindering, and a highly accurate copying operation can be performed.
[0034]
According to the copying apparatus of the present invention, by placing the holding curved surface and the copying curved surface in a negative pressure state, the tilting block can be sucked and fixed to the support block, and the copying operation can be easily maintained fixedly. it can. Furthermore, the tilting block is sucked and fixed to the support block by forming one of the holding curved surface and the profiling curved surface with a convex curvature radius larger than the other curvature radius. In this case, the copying operation can be maintained with high accuracy.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a pressing device having a copying apparatus according to an embodiment of the present invention.
FIG. 2 is a perspective view showing a part of the copying apparatus in FIG. 1;
3 is a cross-sectional view showing the periphery of a fluid discharge hole of the copying apparatus of FIG. 1;
4 is a cross-sectional view showing a part of the copying apparatus of FIG. 1;
FIG. 5 is an explanatory diagram showing an operation of the copying apparatus of FIG. 1;
6 is an explanatory diagram showing an operation of the copying apparatus following FIG.
7 is an explanatory diagram showing the operation of the copying apparatus following FIG. 6. FIG.
FIGS. 8A and 8B are explanatory diagrams showing the operation of the copying apparatus according to another embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Copy apparatus 11 Press apparatus 12 Arm 13 Support block 14 Tilt block 15 Press part 16 Work stage 17 Contact surface 18 Upper surface 19 Holding curved surface 20 Fluid discharge hole 21 Nozzle 22 Fluid guide surface 23 Flow path 24 Slit 25 Copy curved surface 26 Fluid suction hole 30 Copying device 31 Support block 32 Tilt block 33 Work stage 34 Press tool 35 Contact surface 36 Upper surface 37 Fluid suction hole Wa, Wb Work α, β Clearance

Claims (5)

A copying apparatus having a support block and a tilting block that is held in a non-contact manner, and tilting the tilting block following the workpiece surface,
The support block is formed with a holding curved surface, a fluid discharge hole provided at a position retracted from the holding curved surface, and a fluid guide surface connecting the fluid discharge hole and the holding curved surface,
Forming a copying curved surface facing the holding curved surface on the tilting block;
A nozzle for guiding fluid from the fluid discharge hole along the fluid guide surface is provided in the support block,
A copying apparatus, wherein the tilting block is held on the support block by a negative pressure generated when the fluid passes between the holding curved surface and the copying curved surface. 2. The copying apparatus according to claim 1, wherein the copying curved surface is larger than the holding curved surface. 3. The copying apparatus according to claim 1, wherein one of the holding curved surface and the copying curved surface is formed in a convex shape and the other is formed in a concave shape. 4. The copying apparatus according to claim 3, wherein one of the holding curved surface and the copying curved surface has a convex curvature radius that is larger than the other curvature radius. The copying apparatus according to any one of claims 1 to 4, further comprising a fluid suction hole that opens to an end surface of the support block,
After the tilting block is tilted, by sucking fluid from the fluid suction hole, a negative pressure state is established between the holding curved surface and the copying curved surface, and the tilting block is fixed to the support block by suction. A characteristic copying apparatus.

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