JP3649848B2 - Magnetoresistive head and magnetic disk drive having the same - Google Patents

Magnetoresistive head and magnetic disk drive having the same Download PDF

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JP3649848B2
JP3649848B2 JP06691497A JP6691497A JP3649848B2 JP 3649848 B2 JP3649848 B2 JP 3649848B2 JP 06691497 A JP06691497 A JP 06691497A JP 6691497 A JP6691497 A JP 6691497A JP 3649848 B2 JP3649848 B2 JP 3649848B2
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magnetoresistive
magnetic disk
magnetoresistive head
film
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JPH10269527A (en
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晃樹 神田
実 高橋
克己 木内
誉生 越川
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Fujitsu Ltd
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Priority to US08/834,436 priority patent/US6282061B1/en
Priority to DE19723998A priority patent/DE19723998C2/en
Priority to KR1019970025714A priority patent/KR100275368B1/en
Priority to CN97112780A priority patent/CN1091287C/en
Publication of JPH10269527A publication Critical patent/JPH10269527A/en
Priority to US09/898,806 priority patent/US7142393B2/en
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40—Protective measures on heads, e.g. against excessive temperature 
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/488—Disposition of heads
    • G11B5/4886—Disposition of heads relative to rotating disc
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B19/00—Driving, starting, stopping record carriers not specifically of filamentary or web form, or of supports therefor; Control thereof; Control of operating function ; Driving both disc and head
    • G11B19/02—Control of operating function, e.g. switching from recording to reproducing
    • G11B19/04—Arrangements for preventing, inhibiting, or warning against double recording on the same blank or against other recording or reproducing malfunctions
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/012—Recording on, or reproducing or erasing from, magnetic disks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following

Description

【０００１】
【発明の属する技術分野】
本発明は、磁気ディスクに対して情報の記録再生を行う磁気ディスク装置に使用される磁気抵抗効果型ヘッドに関する。
近年、磁気ディスクが小径化されて磁気ディスク装置の小型化が進んでいる。磁気ディスクが小径化すると、磁気ディスクとヘッドとの相対速度が遅くなる。磁気抵抗効果型ヘッドは、磁気抵抗効果の原理でもって磁気ディスク上の信号を読み出すものであり、磁気ディスクと磁気抵抗効果型ヘッドとの相対速度が大きくなくても出力レベルの大きい読みだし信号を得ることができるため、磁気ディスク装置の小型化に好適である。
【０００２】
この磁気抵抗効果型ヘッドは、後述するサーマルアスペリティによる信号異常の問題があり、これを解決する必要がある。
また、近年の高密度記録化に伴って磁気抵抗効果型ヘッドの磁気ディスクに対する浮上量が小さくなっている。浮上量が小さくなると、サーマルアスペリティによる信号異常の程度が大きくなり易くなるため、これに対する解決を図ることが重要となる。
【０００３】
【従来の技術】
図１４（Ａ），（Ｂ）は、従来の磁気抵抗効果型ヘッド１０を示す。磁気抵抗効果型ヘッド１０は、スライダ１１と、スライダ１１の空気流出端の面１１ａ上の膜構造部１２とを有する。膜構造部１２は、磁気抵抗効果素子１３を有する。膜構造部１２の端面１２ａは、スライダ１１の浮上面１１ｂの延長面上に位置している。即ち、端面１２ａは浮上面１１ｂと同じ面である。
【０００４】
磁気ディスク２０が矢印ＣＣ方向に回転し、磁気抵抗効果型ヘッド１０は、空気流２１の作用で、浮上量ｈ、浮上角αで（磁気抵抗効果素子１３側が下がった姿勢で）磁気ディスク２０の上面２０ａから浮上し続け、信号を読み出す。
【０００５】
磁気ヘッドがコンタクトスタートストップするときの磁気ヘッドの磁気ディスクへの吸着を防止する目的で、磁気ディスクは、基板にテクスチャリングを施し、このテクスチャリングを施した面に膜を形成して製造される。磁気ディスクの表面の粗さＲａは、１０〜５０Å程度であり、浮上している磁気抵抗効果型ヘッドに当たらないようになっている。
【０００６】
【発明が解決しようとする課題】
テクスチャリングはメカニカル的に形成され又はレーザによって形成されており、磁気ディスクの表面の粗さＲａはばらつく。図１４（Ｂ）に示すように、上面２０ａから突き出した微小突起２１を有する場合がある。
近年の高密度記録化に伴って磁気抵抗効果型ヘッドの磁気ディスクに対する浮上量ｈは、３０〜５０ｎｍと小さくなってきており、この微小突起２１が、図１４（Ｂ）に二点鎖線で示すように、膜構造部１２の端面１２ａに衝突し易い。また、サーマルアスペリティによる盛り上がり変形量Ｎｈ（図７（Ｂ）参照）が約５ｎｍだと、マージンが悪くなり、当たる確率は更に高くなる。
【０００７】
微小突起２１が膜構造部１２の端面１２ａのうち磁気抵抗効果素子１３に衝突することが起きると、磁気抵抗効果素子１３が一時的に発熱し、これによって磁気抵抗効果素子１３の抵抗値が一時的に変化し、読みだし信号２５に、図１４（Ｃ）に符号２６で示すような異常信号が発生する。この異常信号２６を、サーマルアスペリティによる信号異常という。
【０００８】
従来は、サーマルアスペリティ対策として、磁気ディスクの表面品質を改善すること、或いは、サーマルアスペリティによる信号異常を抑える信号処理回路を設けることが採られている。
磁気抵抗効果型ヘッド１０の浮上量ｈが少なくなると、微小突起２１が膜構造部１２の端面１２ａに衝突するエネルギーが増すため、異常信号２６の出力レベルＬが大きくなる傾向にある。よって、上記の対策では十分でなくなってきつつある。
【０００９】
そこで、本発明は上記課題を解決した磁気抵抗効果型ヘッド及びこれを有する磁気ディスク装置を提供することを目的とする。
【００１０】
【課題を解決するための手段】
請求項１の発明は、磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、上記磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法を有する構成としたものである。
【００１２】
請求項２の発明は、磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、 該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法に、上記膜状素子構造部が熱膨張したときの上記端面の盛り上がり変形量を加算した寸法を有する構成としたものである。
【００１３】
請求項３の発明は、磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、 該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法に、上記スライダが上記磁気ディスク上の微小突起を相対的に乗り越えたときのステップダウン分を加算した寸法を有する構成としたものである。
【００１４】
請求項４の発明は、磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法に、上記膜状素子構造部が熱膨張したときの上記端面の盛り上がり変形量と上記スライダが上記磁気ディスク上の微小突起を相対的に乗り越えたときのステップダウン分とを加算した寸法を有する構成としたものである。
【００１５】
請求項５の発明は、磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、該膜状素子構造部の上記端面の空気流出端の端部を上記仮想面より上側に位置させるに足る寸法を有する構成としたものである。
【００１６】
請求項６の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ１が、
Ｙ１≧ｔ１×ｔａｎα
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角である。）
を満たす大きさである構成としたものである。
【００１７】
請求項７の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ２が、
Ｙ２≧ｔ２×ｔａｎα
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角である。）
を満たす大きさである構成としたものである。
【００１８】
請求項８の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ３が、
Ｙ３≧（ｔ１×ｔａｎα）＋Ｎｈ
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量である。）
を満たす大きさである構成としたものである。
【００１９】
請求項９の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ４が、
Ｙ４≧（ｔ１×ｔａｎα）＋Ｚ
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたものである。
【００２０】
請求項１０の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ５が、
Ｙ５≧（ｔ１×ｔａｎα）＋Ｎｈ＋Ｚ
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたものである。
【００２１】
請求項１１の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ３’が、
Ｙ３’≧（ｔ２×ｔａｎα）＋Ｎｈ
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量である。）を満たす大きさである構成としたものである。
【００２２】
請求項１２の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ４’が、
Ｙ４’≧（ｔ２×ｔａｎα）＋Ｚ
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたものである。
【００２３】
請求項１３の発明は、磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ５’が、
Ｙ５’≧（ｔ２×ｔａｎα）＋Ｎｈ＋Ｚ
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたものである。
【００２４】
請求項１４の発明は、回転する磁気ディスクと、
請求項１乃至請求項１３のうちいずれか一項記載の磁気抵抗効果型ヘッドと、 該磁気抵抗効果型ヘッドを上記磁気ディスク上を移動するように支持する支持手段とを有する構成としたものである。
請求項１５の発明は、請求項１４において、該支持手段は、配線パターンが形成されており、磁気抵抗効果型ヘッドが固定してあるサスペンションよりなり、 該磁気抵抗効果型ヘッドの端子部と該配線パターンの端子とが金ボールによって接続されている構成としたものである。
【００２５】
【発明の実施の形態】
〔第１実施例〕
図１及び図２（Ａ）、（Ｂ）は、本発明の第１実施例になる磁気抵抗効果型ヘッド３０を示す。矢印ＣＣ方向は空気流の方向であり、磁気抵抗効果型ヘッド３０の構成は、空気流の方向を基準に説明する。
【００２６】
磁気抵抗効果型ヘッド３０は、空気流入端３１と空気流出端３２とを有する。磁気抵抗効果型ヘッド３０は、Ａｌ2 Ｏ3 ＴｉＣからなりブロック状にカットされたスライダ３３と、スライダ３３に半導体術により成膜された膜状素子構造部３４とを有する。
スライダ３３は、下面（磁気ディスク装置に組み込まれた状態で磁気ディスクに対向する面）に、２つのレール３３ａ，３３ｂを有し、且つ２つのレール３３ａ，３３ｂの間に浅い凹部３３ｃを有する。レール３３ａ，３３ｂ及び浅い凹部３３ｃは、共に、ＣＣ方向に延在している。３３ｄ，３３ｅは浮上面であり、レール３３ａ，３３ｂの下面である。
【００２７】
３３ｇはスライダ３３の浮上面３３ｄと空気流出端３２の面３３ｆとによって形成されている角部（アルチックエッジ）である。
膜状素子構造部３４は、スライダ３３の空気流出端３２の面３３ｆのうちレール３３ａに対応する部位に形成してある。膜状素子構造部３４は、面３３ｆより順に、下地層としてアルミナ等の絶縁膜４０、ＦｅＮ（窒化鉄）等の下部シールド膜（磁性膜）４１、アルミナ等の絶縁膜４２、膜状の磁気抵抗効果素子４３及びこの両端に接続された膜状の導電部材４４、アルミナ等の絶縁膜４５、シールド膜を兼ねる下部磁性膜４６、絶縁膜４７、膜状のコイル４８、上部磁性膜４９、保護膜５０が積層された構造を有する。
【００２８】
面３３ｆには、導電部材４４の端部が磁気抵抗効果素子用の端子部４４’として、及び、コイル４８の端部がインダクティブヘッド用の端子部４８’として露出している。端子部４４’、４８’は、図３の装置の場合、リード線が半田付けされて、ヘッドを駆動するためのヘッドＩＣ等の回路へ連結されている。
５１は、膜状素子構造部３４のうち上記浮上面３３ｄと同じ側に位置する端面である。
【００２９】
下部磁性膜４６、絶縁膜４７、膜状のコイル４８、上部磁性膜４９が、記録専用素子を構成する。磁気抵抗効果素子４３が再生専用素子を構成する。
となる。
端面５１は、浮上面３３ｄより後退しており、浮上面３３ｄに対して段差寸法Ｙ１の段差５２を有している。端面５１は、浮上面３３ｄと平行である。
【００３０】
ここで、段差５２の大きさ、即ち、段差寸法Ｙ１は、磁気抵抗効果型ヘッド３０の浮上角をαラジアン、膜状素子構造部３４のうちスライダ３３の面３３ｆから磁気抵抗効果素子４３までの距離（絶縁膜４０、下部シールド膜（磁性膜）４１、絶縁膜４２の厚さを加算した値）をｔ１とした場合に、浮上角αが相当に小さいため、ｔ１×ｔａｎαで表される大きさと同じかこれより大きい。即ち、Ｙ１≧ｔ１×ｔａｎαである。
【００３１】
磁気抵抗効果型ヘッド３０の浮上角αは通常例えば０．２０ラジアンであり、距離ｔ１は例えば１０μｍである。この場合に、段差寸法Ｙ１は、約２μｍである。
図１を参照して図学的にみると、段差寸法Ｙ１は、磁気抵抗効果型ヘッド３０を浮上角α傾斜している姿勢とし、角部（アルチックエッジ）３３ｇを通り上記磁気ディスクと平行な仮想面５５を考えた場合に、磁気抵抗効果素子４３の上記端面５１に臨んでいる端部を、上記仮想面５５より上側に位置させるに足る寸法である。
【００３２】
なお、段差５２は例えば砥石による機械的研磨又はイオンミリング等による研磨によって形成されている。
図３は上記構成の磁気抵抗効果型ヘッド３０が組み込まれた磁気ディスク装置６０を示す。磁気ディスク装置６０は、ハウジング６１の内部に、磁気ディスク２０、この磁気ディスク２０を矢印ＣＣ方向に回転させるスピンドルモータ６８、回動アーム６３、回動アーム６３の先端の磁気抵抗効果型ヘッド３０、回動アーム６３を回動させるボイスコイルモータ６４等を有する構成である。
【００３３】
次に、図４（Ａ）乃至（Ｇ）を参照して、上記磁気ディスク装置６０の動作時における上記磁気抵抗効果型ヘッド３０の段差５２の作用について説明する。
図４（Ａ）に示すように、磁気ディスク２０が矢印ＣＣ方向に回転すると空気流２１が発生し、磁気抵抗効果型ヘッド３０は、この空気流２１の作用で、浮上量ｈ、浮上角αで（磁気抵抗効果素子４３側が下がった姿勢で）磁気ディスク２０の上面２０ａから浮上し続け、所望のトラックにアクセスして信号の読み書きを行う。
【００３４】
図４（Ｂ），（Ｄ），（Ｆ）に示すように、磁気ディスク２０は、製造工程との関係で、上面２０ａから突き出した大きさの異なる微小突起２１−１，２１−２，２１−３等を有する。微小突起２１−１は、突き出し寸法ｂ１が浮上量ｈより小さいものである。微小突起２１−２は、突き出し寸法ｂ２が浮上量ｈよと略同じものである。微小突起２１−３は、突き出し寸法ｂ３が浮上量ｈより寸法Ａ大きいものである。
【００３５】
微小突起２１−１は、図４（Ｂ）に示すように、膜状素子構造部３４の端面５１に衝突することなく磁気抵抗効果型ヘッド３０の下側を通り抜ける。よって、読みだし信号のエンベロープは、図４（Ｃ）に示す如くになり、サーマルアスペリティによる信号異常は発生しない。
微小突起２１−２は、図４（Ｄ）に示すように、膜状素子構造部３４の端面５１に衝突するけれども、衝突する個所は、端面５１のうち磁気抵抗効果素子４３より後方側の部分５１ａである。即ち、微小突起２１−２は磁気抵抗効果素子４３に衝突しない。このため、よって、読みだし信号のエンベロープは、図４（Ｅ）に示す如くになり、サーマルアスペリティによる信号異常は発生しない。
【００３６】
大き目の微小突起２１−３の場合は、図４（Ｆ）に示すように、スライダ３３の浮上面３３ｄのうち角部３３ｇの付近に衝突し、磁気抵抗効果型ヘッド３０は一旦押し上げられ、その後に下動する。この下動するときに、磁気抵抗効果素子４３が微小突起２１−３に衝突することが起きる場合がある。磁気抵抗効果素子４３が微小突起２１−３に衝突したとしても、微小突起が磁気抵抗効果素子を直撃した場合よりも衝突のエネルギーは遙かに小さい。このため、読みだし信号のエンベロープは、図４（Ｇ）に示す如くになり、サーマルアスペリティによる信号異常は発生したとしても小さい。
【００３７】
〔第２実施例〕
図５は、本発明の第２実施例になる磁気抵抗効果型ヘッド３０Ａを示す。図５中、図１に示す構成部分と同じ構成部分には同じ符号を付す。
膜状素子構造部３４の端面５１は、浮上面３３ｄに対して段差寸法Ｙ２の段差５２Ａを有している。ここで、段差５２Ａの大きさ、即ち、段差寸法Ｙ２は、磁気抵抗効果型ヘッド３０の浮上角をαラジアン、膜状素子構造部３４の厚さをｔ２とした場合に、浮上角αが相当に小さいため、ｔ２×ｔａｎαで表される大きさと同じかこれより大きい。即ち、Ｙ２≧ｔ２×ｔａｎαである。段差寸法Ｙ２は、前記の段差寸法Ｙ１より大きい。
【００３８】
よって、微小突起２１−２は、図６（Ａ）に示すように、微小突起２１−１の場合と同じく、膜状素子構造部３４の端面５１に衝突することなく磁気抵抗効果型ヘッド３０の下側を通り抜ける。よって、読みだし信号のエンベロープは、図６（Ｂ）に示す如くになり、サーマルアスペリティによる信号異常は発生しない。
【００３９】
大き目の微小突起２１−３の場合は、図６（Ｃ）に示すように、スライダ３３の浮上面３３ｄのうち角部３３ｇの付近に衝突し、磁気抵抗効果型ヘッド３０は一旦押し上げられ、その後に下動する。段差寸法Ｙ２が前記の段差寸法Ｙ１より大きいため、微小突起２１−３が端面５１に衝突する位置は後方にずれる。よって、この下動するときに、磁気抵抗効果素子４３が微小突起２１−３に衝突することが起きる確率は低下する。また、磁気抵抗効果素子４３が微小突起２１−３に衝突したとしても、微小突起が磁気抵抗効果素子を直撃した場合よりも衝突のエネルギーは遙かに小さい。このため、読みだし信号のエンベロープは、図６（Ｄ）に示す如くになり、サーマルアスペリティによる信号異常は発生したとしても小さい。従って、サーマルアスペリティによる信号異常の程度を、信号処理回路による修正可能範囲にすることが出来、再生復調信号への影響を小さくすることが出来る。
【００４０】
〔第３実施例〕
図７（Ａ）は、本発明の第３実施例になる磁気抵抗効果型ヘッド３０Ｂを示す。図７中、図１に示す構成部分と同じ構成部分には同じ符号を付す。磁気抵抗効果型ヘッド３０Ｂは、膜状素子構造部３４の熱膨張を考慮した構成である。
磁気抵抗効果型ヘッド３０Ｂの使用中に膜状素子構造部３４の温度が上昇する場合がある。膜状素子構造部３４の温度が上昇すると、図７（Ｂ）に示すように膜状素子構造部３４が熱膨張し、端面５１が盛り上がるように変形する。
【００４１】
端面５１のうち磁気抵抗効果素子４３の部位の盛り上がり変形量は、Ｎｈである。
図７（Ａ）に示すように、膜状素子構造部３４の端面５１は、浮上面３３ｄに対して段差寸法Ｙ３の段差５２Ｂを有している。ここで、段差５２Ｂの大きさ、即ち、段差寸法Ｙ３は、前記の段差寸法Ｙ１に上記の盛り上がり変形量Ｎｈを加えた値としてある。即ち、Ｙ３≧Ｙ１＋Ｎｈである。
【００４２】
この磁気抵抗効果型ヘッド３０Ｂによれば、使用中に膜状素子構造部３４の温度が上昇した場合にも、磁気抵抗効果素子４３は、図７（Ｂ）に示すように、仮想面５５近くまでは突き出すけれども、それ以上には突き出さない。よって、膜状素子構造部３４が変形しても磁気ディスク２０の微小突起が磁気抵抗効果素子４３を直撃することは起きず、サーマルアスペリティによる信号異常も発生しにくい。
【００４３】
この磁気抵抗効果型ヘッド３０Ｂは、使用される環境が温度の高い環境である場合に有効である。
〔第４実施例〕
図８は、本発明の第４実施例になる磁気抵抗効果型ヘッド３０Ｃを示す。図８中、図１に示す構成部分と同じ構成部分には同じ符号を付す。磁気抵抗効果型ヘッド３０Ｃは、ステップダウンを考慮した構成である。
【００４４】
図８に示すように、膜状素子構造部３４の端面５１は、浮上面３３ｄに対して段差寸法Ｙ４の段差５２Ｃを有している。ここで、段差５２Ｃの大きさ、即ち、段差寸法Ｙ４は、前記の段差寸法Ｙ１にステップダウン分（浮上変化分）Ｚを加えた値としてある。即ち、Ｙ４≧Ｙ１＋Ｚである。
図９（Ａ）に示すように、大き目の微小突起２１−３の場合は、スライダ３３の浮上面３３ｄのうち角部３３ｇの付近に衝突し、磁気抵抗効果型ヘッド３０は一旦押し上げられ、その後に下動（ステップダウン）する。図９（Ｂ）は、このときの磁気抵抗効果型ヘッド３０の動きを示す。線７０は、磁気抵抗効果型ヘッド３０が微小突起２１−３によって押し上げられるときの動きを示す。線７１は、微小突起２１−３がスライダ３３の角部（アルチックエッジ）３３ｇを通り越した後の、磁気抵抗効果型ヘッド３０の動きを示す。線７１は、Ｚ＝Ａ×｛１−ｓｉｎ（π／２＋Ｘ）｝で表される曲線である。ここで、Ａは微小突起２１−３の浮上量ｈより更に突き出た寸法である。Ｘは磁気抵抗効果型ヘッド３０の浮上追従時の位相であり、２π×ｔ１／（Ｕ／２ｆｏ）で表される。Ｕは磁気ディスク６２の磁気抵抗効果型ヘッド３０の個所の周速度、ｆｏは磁気抵抗効果型ヘッド３０の共振周波数である。
【００４５】
本実施例の磁気抵抗効果型ヘッド３０Ｃは、大き目の微小突起２１−３がスライダ３３の浮上面３３ｄのうち角部３３ｇの付近に衝突し、磁気抵抗効果型ヘッド３０が一旦押し上げられた後に下動（ステップダウン）する動きをする過程においても、磁気抵抗効果素子４３が微小突起２１−３と衝突することは回避され、サーマルアスペリティによる信号異常は発生しない。
【００４６】
〔第５実施例〕
図１０は、本発明の第５実施例になる磁気抵抗効果型ヘッド３０Ｄを示す。図８中、図１に示す構成部分と同じ構成部分には同じ符号を付す。磁気抵抗効果型ヘッド３０Ｄは、膜状素子構造部３４の熱膨張、及び上記のステップダウンの両方を考慮した構成である。
【００４７】
図１０に示すように、膜状素子構造部３４の端面５１は、浮上面３３ｄに対して段差寸法Ｙ５の段差５２Ｄを有している。ここで、段差５２Ｄの大きさ、即ち、段差寸法Ｙ５は、前記の段差寸法Ｙ１に、盛り上がり変形量Ｎｈとステップダウン分（浮上変化分）Ｚを加えた値としてある。即ち、Ｙ５≧Ｙ１＋Ｎｈ＋Ｚである。
【００４８】
本実施例の磁気抵抗効果型ヘッド３０Ｄによれば、温度の高い環境で使用され、大き目の微小突起２１−３に遭遇した場合でも、サーマルアスペリティによる信号異常は発生しない。
また、磁気ディスク装置は、上記の磁気抵抗効果型ヘッド３０Ａ〜３０Ｄのうち何れかの磁気抵抗効果型ヘッドを使用した構成と出来る。
【００４９】
図１１は、本発明者が実験を行った結果である、膜状素子構造部３４の端面５１の浮上面３３ｄに対する段差寸法とサーマルアスペリティの出力との関係を示す。同図より、段差寸法が増えるとサーマルアスペリティの出力が減少していることが分かる。
なお、上記段差をもうけると、磁気抵抗効果素子４３の端面と磁気ディスクの表面との距離が増すけれども、段差寸法は大きくはなく、磁気抵抗効果素子４３による磁気ディスク上の記録信号を再生することに対する影響は殆ど無い。よって、磁気ディスク上の記録信号は良好に再生される。
【００５０】
また、図１の段差Ｙ１に代えて図５の段差Ｙ２を基準としてもよい。この場合には、図７に示す上記第３実施例において、段差Ｙ３’は、Ｙ３’≧Ｙ２＋Ｎｈとなる。
また、図８に示す上記第４実施例において、段差Ｙ４’は、Ｙ４’≧Ｙ２＋Ｚとなる。
【００５１】
また、図１０に示す上記第５実施例において、段差Ｙ５’は、Ｙ５’≧Ｙ２＋Ｎｈ＋Ｚとなる。
図１２は図１及び図２に示す構成の磁気抵抗効果型ヘッド３０が組み込まれた別の磁気ディスク装置６０Ａを示す。図１２中、図３に示す構成部分と同じ部分に同じ符号を付す。回動アーム６３の先端には、図１３のジンバル部一体型サスペンション７０がカシメて固定してある。このジンバル部一体型サスペンション７０のジンバル部７０ａに、磁気抵抗効果型ヘッド３０が固定してある。
【００５２】
ジンバル部一体型サスペンション７０は、図１３に示すように、先端側にジンバル部７０ａを有し、中央部の両側に剛性をうるためのリブ７０ｂを有し、基部寄り側にＲ曲げ部７０ｃを有し、上面に基部からジンバル部７０ａまで延在する４本の配線パターン７０ｄを有する構成である。４本の配線パターン７０ｄのうち２本が磁気抵抗効果素子用であり、残りの２本がインダクティブヘッド用である。
【００５３】
磁気抵抗効果型ヘッド３０はジンバル部７０ａに接着されている。４本の配線パターン７０ｄの端の端子７０ｅと磁気抵抗効果型ヘッド３０の端子部４４’、４８’とが、金ボール７１によって接続されている。
磁気抵抗効果型ヘッド３０はＲ曲げ部７０ｃの弾性によって磁気ディスク側に押しつけられている。
【００５４】
【発明の効果】
以上のように、請求項１乃至請求項１３の発明によれば、膜状素子構造部のスライダの浮上面に対向する端面が、スライダの浮上面より、磁気ディスクの微小突起が端面に衝突することを回避できる大きさの所定の段差寸法後退した構成としたため、磁気ディスク上に浮上量を越える高さの大きめの微小突起がある場合でも、この大きめの微小突起が磁気抵抗効果素子に衝突することが効果的に回避され、サーマルアスペリティによる信号異常の発生を効果的に防止出来る。よって、近年の高密度記録化に伴って磁気抵抗効果型ヘッドの磁気ディスクに対する浮上量を小さくしようとする場合に、サーマルアスペリティによる信号異常の発生を防止する対策として効果がある。
【００５５】
請求項２、７、１１の発明によれば、段差寸法が膜状素子構造部が熱膨張したときの上記端面のうち磁気抵抗効果素子の部位の盛り上がり変形量を考慮した構成であるため、使用される環境が温度の高い環境である場合に有効である。
請求項３、９、１２の発明によれば、段差寸法がスライダが上記磁気ディスク上の微小突起を相対的に乗り越えたときのステップダウン分を考慮した構成であるため、大きめの微小突起が磁気抵抗効果素子に衝突することがより効果的に回避出来る。
【００５６】
請求項４、１０、１３の発明によれば、段差寸法が膜状素子構造部が熱膨張したときの上記端面のうち磁気抵抗効果素子の部位の盛り上がり変形量とスライダが上記磁気ディスク上の微小突起を相対的に乗り越えたときのステップダウン分との両方を考慮した構成であるため、温度の高い環境で使用されているときにも、大きめの微小突起が磁気抵抗効果素子に衝突することがより効果的に回避出来る。
【００５７】
請求項１４、１５の発明によれば、サーマルアスペリティを回避出来、よって、信号品質を向上できる磁気ディスク装置を実現出来る。またサーマルアスペリティを回避できるため、磁気抵抗効果型ヘッドを磁気ディスクの磁性膜により近づけて低浮上化が可能になり、より一層の高密度記録が可能となる磁気ディスク装置を実現出来る。
【図面の簡単な説明】
【図１】本発明の第１実施例になる磁気抵抗効果型ヘッドの要部を拡大して示す図である。
【図２】本発明の第１実施例になる磁気抵抗効果型ヘッドを示す図である。
【図３】図１の磁気抵抗効果型ヘッドが組み込まれている磁気ディスク装置を示す図である。
【図４】図１の磁気抵抗効果型ヘッドの段差の作用を説明する図である。
【図５】本発明の第２実施例になる磁気抵抗効果型ヘッドの要部を拡大して示す図である。
【図６】図５の磁気抵抗効果型ヘッドの段差の作用を説明する図である。
【図７】本発明の第３実施例になる磁気抵抗効果型ヘッドの要部を拡大して示す図である。
【図８】本発明の第４実施例になる磁気抵抗効果型ヘッドの要部を拡大して示す図である。
【図９】ステップダウンを説明する図である。
【図１０】本発明の第５実施例になる磁気抵抗効果型ヘッドの要部を拡大して示す図である。
【図１１】段差寸法とサーマルアスペリティの出力との関係を示す図である。
【図１２】図１の磁気抵抗効果型ヘッドが組み込まれている別の磁気ディスク装置を示す図である。
【図１３】図１２中、サスペンションを拡大して示す図である。
【図１４】従来の磁気抵抗効果型ヘッドを示す図である。
【符号の説明】
３０，３０Ａ，３０Ｂ，３０Ｃ，３０Ｄ 磁気抵抗効果型ヘッド
３１ 空気流入端
３２ 空気流出端
３３ スライダ
３３ａ，３３ｂ レール
３３ｃ 浅い凹部
３３ｄ，３３ｅ 浮上面
３３ｆ 空気流出端の面
３３ｇ 角部（アルチックエッジ）
３４ 膜状素子構造部
４０、４２、４５、４７ 絶縁膜
４１ 下部シールド膜（磁性膜）
４３ 膜状の磁気抵抗効果素子
４４ 膜状の導電部材
４６ 下部磁性膜
４８ 膜状のコイル
４９ 上部磁性膜
５０ 保護膜
５１ 端面
５２、５２Ａ，５２Ｂ，５２Ｃ，５２Ｄ 段差
５５ 仮想面
６０、６０Ａ 磁気ディスク装置
６３ 回動アーム
６４ ボイスコイルモータ
６８ スピンドルモータ
７０ ジンバル部一体型サスペンション
７０ｄ 配線パターン
７０ａ ジンバル部
７０ｅ 端子
７１ 金ボール[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a magnetoresistive head used in a magnetic disk device that records and reproduces information on a magnetic disk.
In recent years, magnetic disks have been reduced in diameter and magnetic disk devices have been downsized. When the diameter of the magnetic disk is reduced, the relative speed between the magnetic disk and the head decreases. The magnetoresistive head reads the signal on the magnetic disk based on the principle of the magnetoresistive effect. Even if the relative speed between the magnetic disk and the magnetoresistive head is not large, a read signal with a large output level is output. Therefore, the magnetic disk device is suitable for downsizing.
[0002]
This magnetoresistive head has a problem of signal abnormality due to thermal asperity described later, and it is necessary to solve this problem.
In addition, with the recent high density recording, the flying height of the magnetoresistive head with respect to the magnetic disk has been reduced. As the flying height decreases, the degree of signal abnormality due to thermal asperity tends to increase, so it is important to solve this problem.
[0003]
[Prior art]
14A and 14B show a conventional magnetoresistive head 10. The magnetoresistive head 10 includes a slider 11 and a film structure portion 12 on the air outflow end surface 11 a of the slider 11. The film structure unit 12 includes a magnetoresistive element 13. The end surface 12 a of the film structure portion 12 is located on the extended surface of the air bearing surface 11 b of the slider 11. That is, the end surface 12a is the same surface as the air bearing surface 11b.
[0004]
The magnetic disk 20 rotates in the direction of the arrow CC, and the magnetoresistive head 10 is moved by the air flow 21 with the flying height h and the flying angle α (with the magnetoresistive element 13 side lowered). The signal continues to rise from the upper surface 20a and reads the signal.
[0005]
In order to prevent the magnetic head from adsorbing to the magnetic disk when the magnetic head starts and stops contact, the magnetic disk is manufactured by texturing the substrate and forming a film on the textured surface. . The surface roughness Ra of the magnetic disk is about 10 to 50 mm so as not to hit the flying magnetoresistive head.
[0006]
[Problems to be solved by the invention]
The texturing is mechanically formed or formed by a laser, and the roughness Ra of the surface of the magnetic disk varies. As shown in FIG. 14B, there may be a case where a minute protrusion 21 protrudes from the upper surface 20a.
With recent high-density recording, the flying height h of the magnetoresistive head with respect to the magnetic disk has decreased to 30 to 50 nm, and these minute protrusions 21 are shown by a two-dot chain line in FIG. Thus, it is easy to collide with the end surface 12a of the film | membrane structure part 12. FIG. Further, when the swell deformation Nh (see FIG. 7B) due to thermal asperity is about 5 nm, the margin becomes worse and the probability of hitting is further increased.
[0007]
When the minute projection 21 collides with the magnetoresistive effect element 13 in the end surface 12a of the film structure portion 12, the magnetoresistive effect element 13 temporarily generates heat, and thereby the resistance value of the magnetoresistive effect element 13 is temporarily increased. Thus, an abnormal signal as indicated by reference numeral 26 in FIG. This abnormality signal 26 is referred to as signal abnormality due to thermal asperity.
[0008]
Conventionally, as a countermeasure against thermal asperity, it has been adopted to improve the surface quality of a magnetic disk or to provide a signal processing circuit for suppressing signal abnormality due to thermal asperity.
When the flying height h of the magnetoresistive head 10 decreases, the energy at which the minute projections 21 collide with the end surface 12a of the film structure 12 increases, and therefore the output level L of the abnormal signal 26 tends to increase. Therefore, the above measures are becoming insufficient.
[0009]
SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a magnetoresistive head that has solved the above problems and a magnetic disk device having the same.
[0010]
[Means for Solving the Problems]
  According to the first aspect of the present invention, there is provided a slider that floats at a predetermined flying angle with respect to a magnetic disk, and a film that includes a magnetoresistive element for reproducing information, which is formed at the air outflow end of the slider. In a magnetoresistive head having an element structure,
  The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
  The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. In consideration of the above, the end of the magnetoresistive effect element facing the end face has a size sufficient to be positioned above the virtual face.
[0012]
  ClaimItem 2The present invention relates to a slider that floats at a predetermined flying angle with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive effect element for reproducing information, In the magnetoresistive head having the above structure, the end surface of the film element structure portion on the same side as the air bearing surface of the slider is at a position recessed by a predetermined step size from the air bearing surface of the slider,
  The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When the film-like element structure is thermally expanded to a dimension sufficient to position the end facing the end face of the magnetoresistive element above the virtual plane, the end face rises and deforms. It is set as the structure which has the dimension which added quantity.
[0013]
  ClaimItem 3The present invention relates to a slider that floats at a predetermined flying angle with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive effect element for reproducing information, In the magnetoresistive head having the above structure, the end surface of the film element structure portion on the same side as the air bearing surface of the slider is at a position recessed by a predetermined step size from the air bearing surface of the slider,
  The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When the slider has moved over the small protrusion on the magnetic disk so that the end facing the end surface of the magnetoresistive element is positioned above the imaginary surface. It is set as the structure which has the dimension which added the part for this step-down.
[0014]
  ClaimItem 4The present invention relates to a slider that floats at a predetermined flying angle with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive effect element for reproducing information, In a magnetoresistive head having
  The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
  The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When the film-like element structure is thermally expanded to a dimension sufficient to position the end facing the end face of the magnetoresistive element above the virtual plane, the end face rises and deforms. In this configuration, the amount and the step-down amount when the slider relatively gets over the minute protrusion on the magnetic disk are added.
[0015]
  ClaimItem 5The present invention relates to a slider that floats at a predetermined flying angle with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive effect element for reproducing information, In a magnetoresistive head having
  The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
  The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. In consideration of the above, it is configured that the end of the air outflow end of the end face of the film element structure portion has a dimension sufficient to be positioned above the virtual plane.
[0016]
  ClaimItem 6The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The dimension Y1 of the step which is retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider of the film element structure portion is:
    Y1 ≧ t1 × tan α
    (Here, t1 is the distance from the air outflow end surface of the slider to the magnetoresistive element, and α is the flying angle of the magnetoresistive head.)
It is set as the structure which is the magnitude | size which satisfy | fills.
[0017]
  ClaimItem 7The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The step dimension Y2 of the step of the film-like element structure portion retreated from the flying surface of the slider on the same side as the flying surface of the slider is:
    Y2 ≧ t2 × tanα
    (Here, t2 is the thickness of the film element structure, and α is the flying angle of the magnetoresistive head.)
It is set as the structure which is the magnitude | size which satisfy | fills.
[0018]
  ClaimItem 8The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The step size Y3 of the step of the film-like element structure portion retreated from the flying surface of the slider on the same side as the flying surface of the slider is:
    Y3 ≧ (t1 × tan α) + Nh
    (Where t1 is the distance from the air outflow end surface of the slider to the magnetoresistive element, α is the flying angle of the magnetoresistive head, and Nh is the amount of bulging deformation due to thermal expansion of the film element structure) .)
It is set as the structure which is the magnitude | size which satisfy | fills.
[0019]
  ClaimItem 9The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The step dimension Y4 of the step of the film-like element structure part retreated from the flying surface of the slider on the same side as the flying surface of the slider is:
    Y4 ≧ (t1 × tan α) + Z
    (Where t1 is the distance from the air outflow end surface of the slider to the magnetoresistive effect element, α is the flying angle of the magnetoresistive head, and Z is the magnetoresistive head formed by a minute projection on the magnetic disk. (It is the distance that has been stepped down after being pushed up once.)
It is set as the structure which is the magnitude | size which satisfy | fills.
[0020]
  ClaimItem 10The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The dimension Y5 of the step which is retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider of the film element structure portion is:
    Y5 ≧ (t1 × tan α) + Nh + Z
    (Where t1 is the distance from the air outflow end surface of the slider to the magnetoresistive element, α is the flying angle of the magnetoresistive head, and Nh is the amount of bulging deformation due to thermal expansion of the film element structure) , Z is a distance in which the magnetoresistive head is stepped down after being once pushed up by the minute protrusions of the magnetic disk.
It is set as the structure which is the magnitude | size which satisfy | fills.
[0021]
  ClaimItem 11The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The step dimension Y3 'of the step of the film-like element structure portion retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider is:
    Y3 '≧ (t2 × tan α) + Nh
    Where t2 is the thickness of the film element structure, α is the flying angle of the magnetoresistive head, and Nh is the amount of bulge deformation due to thermal expansion of the film element structure. It is set as the structure which is.
[0022]
  ClaimItem 12The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The step dimension Y4 'of the step of the film-like element structure portion retreated from the slider floating surface on the same side as the slider floating surface is as follows.
    Y4 '≧ (t2 × tan α) + Z
    (Where t2 is the thickness of the film element structure portion, α is the flying angle of the magnetoresistive head, and Z is lowered after the magnetoresistive head is once pushed up by the minute protrusions of the magnetic disk. And stepped down.)
It is set as the structure which is the magnitude | size which satisfy | fills.
[0023]
  ClaimItem 13The present invention relates to a magnetoresistive element having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at an air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the effect type head,
  The step dimension Y5 'of the step of the film-like element structure portion retreated from the slider floating surface on the same side as the slider floating surface is as follows.
    Y5 '≧ (t2 × tan α) + Nh + Z
    (Where t2 is the thickness of the film element structure, α is the flying angle of the magnetoresistive head, Nh is the amount of bulging deformation due to thermal expansion of the film element structure, and Z is the magnetoresistive head. ) Is a distance that has been stepped down after being pushed up once by a minute protrusion on the magnetic disk.
It is set as the structure which is the magnitude | size which satisfy | fills.
[0024]
  ClaimItem 14The invention comprises a rotating magnetic disk;
  Claims 1 toItem 13The magnetoresistive head according to any one of the above, and a support means for supporting the magnetoresistive head so as to move on the magnetic disk.
  ClaimItem 15Invention claimsIn item 14The support means is formed of a suspension on which a wiring pattern is formed and a magnetoresistive head is fixed, and a terminal portion of the magnetoresistive head and a terminal of the wiring pattern are formed by a gold ball. This is a connected configuration.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
[First embodiment]
1 and 2A and 2B show a magnetoresistive head 30 according to a first embodiment of the present invention. The direction of the arrow CC is the direction of air flow, and the configuration of the magnetoresistive head 30 will be described with reference to the direction of air flow.
[0026]
The magnetoresistive head 30 has an air inflow end 31 and an air outflow end 32. The magnetoresistive head 30 is made of Al.2OThreeIt has a slider 33 made of TiC and cut into a block shape, and a film element structure portion 34 formed on the slider 33 by a semiconductor technique.
The slider 33 has two rails 33a and 33b on the lower surface (the surface facing the magnetic disk when incorporated in the magnetic disk device), and a shallow recess 33c between the two rails 33a and 33b. Both the rails 33a and 33b and the shallow concave portion 33c extend in the CC direction. 33d and 33e are air bearing surfaces, and are the lower surfaces of the rails 33a and 33b.
[0027]
33 g is a corner (altic edge) formed by the air bearing surface 33 d of the slider 33 and the surface 33 f of the air outflow end 32.
The film element structure portion 34 is formed in a portion corresponding to the rail 33 a in the surface 33 f of the air outflow end 32 of the slider 33. In order from the surface 33f, the film-like element structure portion 34 has an insulating film 40 such as alumina as a base layer, a lower shield film (magnetic film) 41 such as FeN (iron nitride), an insulating film 42 such as alumina, and a film-like magnetic film. Resistive effect element 43, film-like conductive member 44 connected to both ends, insulating film 45 such as alumina, lower magnetic film 46 also serving as a shield film, insulating film 47, film-like coil 48, upper magnetic film 49, protective film The film 50 has a stacked structure.
[0028]
On the surface 33f, the end of the conductive member 44 is exposed as a magnetoresistive effect element terminal 44 ', and the end of the coil 48 is exposed as an inductive head terminal 48'. In the case of the apparatus of FIG. 3, the terminal portions 44 'and 48' are connected to a circuit such as a head IC for driving the head by soldering lead wires.
Reference numeral 51 denotes an end face located on the same side as the air bearing surface 33d of the film element structure portion 34.
[0029]
The lower magnetic film 46, the insulating film 47, the film-like coil 48, and the upper magnetic film 49 constitute a recording-only element. The magnetoresistive effect element 43 constitutes a read-only element.
It becomes.
The end surface 51 is recessed from the air bearing surface 33d, and has a step 52 having a step dimension Y1 with respect to the air bearing surface 33d. The end surface 51 is parallel to the air bearing surface 33d.
[0030]
Here, the size of the step 52, that is, the step size Y 1, is that the flying angle of the magnetoresistive head 30 is α radians, and from the surface 33 f of the slider 33 to the magnetoresistive effect element 43 in the film element structure 34. When the distance (the value obtained by adding the thicknesses of the insulating film 40, the lower shield film (magnetic film) 41, and the insulating film 42) is t1, the flying angle α is considerably small, and thus the size represented by t1 × tan α. Same as or larger than That is, Y1 ≧ t1 × tan α.
[0031]
The flying angle α of the magnetoresistive head 30 is usually 0.20 radians, for example, and the distance t1 is 10 μm, for example. In this case, the step dimension Y1 is about 2 μm.
Referring to FIG. 1, the step size Y1 is such that the magnetoresistive head 30 is inclined at a flying angle α and passes through a corner (altic edge) 33g and parallel to the magnetic disk. When considering the virtual surface 55, the dimension is sufficient to position the end of the magnetoresistive element 43 facing the end surface 51 above the virtual surface 55.
[0032]
The step 52 is formed by, for example, mechanical polishing with a grindstone or polishing by ion milling or the like.
FIG. 3 shows a magnetic disk device 60 in which the magnetoresistive head 30 having the above structure is incorporated. The magnetic disk device 60 includes a magnetic disk 20, a spindle motor 68 that rotates the magnetic disk 20 in the direction of the arrow CC, a rotating arm 63, and a magnetoresistive head 30 at the tip of the rotating arm 63. The configuration includes a voice coil motor 64 that rotates the rotating arm 63.
[0033]
Next, with reference to FIGS. 4A to 4G, the operation of the step 52 of the magnetoresistive head 30 during the operation of the magnetic disk device 60 will be described.
As shown in FIG. 4A, when the magnetic disk 20 rotates in the direction of the arrow CC, an air flow 21 is generated, and the magnetoresistive head 30 has a flying height h and a flying angle α by the action of the air flow 21. (With the magnetoresistive effect element 43 side lowered) continues to float from the upper surface 20a of the magnetic disk 20, accesses a desired track, and reads and writes signals.
[0034]
As shown in FIGS. 4B, 4D, and 4F, the magnetic disk 20 has minute protrusions 21-1, 21-2, 21 protruding from the upper surface 20a with different sizes in relation to the manufacturing process. -3 etc. The minute protrusion 21-1 has a protruding dimension b1 smaller than the flying height h. The minute protrusion 21-2 has a protrusion dimension b2 that is substantially the same as the flying height h. The minute protrusion 21-3 has a protruding dimension b3 larger than the flying height h by a dimension A.
[0035]
As shown in FIG. 4B, the minute protrusion 21-1 passes through the lower side of the magnetoresistive head 30 without colliding with the end face 51 of the film element structure portion 34. Therefore, the envelope of the readout signal is as shown in FIG. 4C, and no signal abnormality due to thermal asperity occurs.
As shown in FIG. 4D, the microprojection 21-2 collides with the end surface 51 of the film element structure portion 34, but the colliding portion is a portion of the end surface 51 on the rear side of the magnetoresistive effect element 43. 51a. That is, the minute protrusion 21-2 does not collide with the magnetoresistive effect element 43. Therefore, the envelope of the readout signal becomes as shown in FIG. 4E, and no signal abnormality due to thermal asperity occurs.
[0036]
In the case of the large microprojection 21-3, as shown in FIG. 4F, it collides with the vicinity of the corner 33g of the flying surface 33d of the slider 33, and the magnetoresistive head 30 is once pushed up, and thereafter Move down. When moving downward, the magnetoresistive effect element 43 may collide with the minute protrusion 21-3. Even if the magnetoresistive effect element 43 collides with the minute projection 21-3, the energy of the collision is much smaller than when the minute projection strikes the magnetoresistive effect element directly. Therefore, the envelope of the readout signal is as shown in FIG. 4G, and even if a signal abnormality due to thermal asperity occurs, it is small.
[0037]
[Second Embodiment]
FIG. 5 shows a magnetoresistive head 30A according to the second embodiment of the present invention. 5, the same components as those shown in FIG.
The end face 51 of the film element structure 34 has a step 52A having a step size Y2 with respect to the air bearing surface 33d. Here, the size of the step 52A, that is, the step size Y2, corresponds to the flying angle α when the flying angle of the magnetoresistive head 30 is α radians and the thickness of the film element structure 34 is t2. Therefore, it is equal to or larger than the size represented by t2 × tanα. That is, Y2 ≧ t2 × tan α. The step size Y2 is larger than the step size Y1.
[0038]
Therefore, as shown in FIG. 6A, the microprojection 21-2 does not collide with the end surface 51 of the film element structure portion 34, as in the case of the microprojection 21-1. Go through the bottom. Therefore, the envelope of the readout signal is as shown in FIG. 6B, and signal abnormality due to thermal asperity does not occur.
[0039]
In the case of the large microprojection 21-3, as shown in FIG. 6C, it collides with the vicinity of the corner 33g of the flying surface 33d of the slider 33, and the magnetoresistive head 30 is once pushed up, and thereafter Move down. Since the step size Y2 is larger than the step size Y1, the position where the minute projection 21-3 collides with the end face 51 is shifted backward. Therefore, the probability that the magnetoresistive effect element 43 will collide with the minute protrusion 21-3 during the downward movement is lowered. Even if the magnetoresistive effect element 43 collides with the microprojection 21-3, the energy of the collision is much smaller than when the microprojection strikes the magnetoresistive effect element directly. For this reason, the envelope of the readout signal is as shown in FIG. 6D, and even if a signal abnormality due to thermal asperity occurs, it is small. Therefore, the degree of signal abnormality due to thermal asperity can be made within the range that can be corrected by the signal processing circuit, and the influence on the reproduction demodulated signal can be reduced.
[0040]
[Third embodiment]
FIG. 7A shows a magnetoresistive head 30B according to a third embodiment of the present invention. In FIG. 7, the same components as those shown in FIG. The magnetoresistive head 30 </ b> B is configured in consideration of thermal expansion of the film element structure portion 34.
During use of the magnetoresistive head 30B, the temperature of the film element structure 34 may increase. When the temperature of the film element structure portion 34 rises, the film element structure portion 34 is thermally expanded as shown in FIG. 7B, and is deformed so that the end face 51 is raised.
[0041]
The rising deformation amount of the part of the magnetoresistive effect element 43 in the end face 51 is Nh.
As shown in FIG. 7A, the end surface 51 of the film element structure portion 34 has a step 52B having a step size Y3 with respect to the air bearing surface 33d. Here, the size of the step 52B, that is, the step size Y3 is a value obtained by adding the above-described swell deformation amount Nh to the step size Y1. That is, Y3 ≧ Y1 + Nh.
[0042]
According to the magnetoresistive head 30B, even when the temperature of the film element structure 34 rises during use, the magnetoresistive element 43 is located near the virtual plane 55 as shown in FIG. It sticks out, but doesn't stick any further. Therefore, even if the film element structure 34 is deformed, the minute projections of the magnetic disk 20 do not directly hit the magnetoresistive effect element 43, and signal abnormality due to thermal asperity hardly occurs.
[0043]
This magnetoresistive head 30B is effective when the environment in which it is used is a high temperature environment.
[Fourth embodiment]
FIG. 8 shows a magnetoresistive head 30C according to a fourth embodiment of the present invention. In FIG. 8, the same components as those shown in FIG. The magnetoresistive head 30C has a configuration in consideration of step-down.
[0044]
As shown in FIG. 8, the end surface 51 of the film element structure 34 has a step 52C having a step size Y4 with respect to the air bearing surface 33d. Here, the size of the step 52C, that is, the step size Y4 is a value obtained by adding a step-down amount (a flying change amount) Z to the step size Y1. That is, Y4 ≧ Y1 + Z.
As shown in FIG. 9A, in the case of the large microprojection 21-3, it collides with the vicinity of the corner 33g of the flying surface 33d of the slider 33, and the magnetoresistive head 30 is once pushed up, and thereafter Down (step down). FIG. 9B shows the movement of the magnetoresistive head 30 at this time. A line 70 indicates a movement when the magnetoresistive head 30 is pushed up by the minute protrusion 21-3. A line 71 indicates the movement of the magnetoresistive head 30 after the minute protrusion 21-3 passes the corner (altic edge) 33g of the slider 33. The line 71 is a curve represented by Z = A × {1−sin (π / 2 + X)}. Here, A is a dimension that protrudes further than the flying height h of the minute protrusion 21-3. X is a phase at the time of follow-up of the magnetoresistive head 30 and is represented by 2π × t1 / (U / 2fo). U is the peripheral speed of the magnetoresistive head 30 of the magnetic disk 62, and fo is the resonance frequency of the magnetoresistive head 30.
[0045]
In the magnetoresistive head 30C of the present embodiment, the large minute protrusion 21-3 collides with the vicinity of the corner 33g of the flying surface 33d of the slider 33, and the magnetoresistive head 30 is once pushed up. Even in the process of moving (stepping down), the magnetoresistive effect element 43 is prevented from colliding with the minute protrusion 21-3, and no signal abnormality due to thermal asperity occurs.
[0046]
[Fifth embodiment]
FIG. 10 shows a magnetoresistive head 30D according to the fifth embodiment of the present invention. In FIG. 8, the same components as those shown in FIG. The magnetoresistive head 30D has a configuration that takes into account both the thermal expansion of the film element structure 34 and the above-described step-down.
[0047]
As shown in FIG. 10, the end surface 51 of the film element structure portion 34 has a step 52D having a step size Y5 with respect to the air bearing surface 33d. Here, the size of the step 52D, that is, the step size Y5 is a value obtained by adding the swell deformation amount Nh and the step-down amount (levitation change amount) Z to the step size Y1. That is, Y5 ≧ Y1 + Nh + Z.
[0048]
According to the magnetoresistive head 30D of the present embodiment, even when it is used in a high temperature environment and encounters a large minute protrusion 21-3, no signal abnormality due to thermal asperity occurs.
Further, the magnetic disk device can be configured to use any one of the magnetoresistive heads 30A to 30D.
[0049]
FIG. 11 shows the relationship between the step size with respect to the air bearing surface 33d of the end surface 51 of the film element structure portion 34 and the output of the thermal asperity, which is the result of experiments conducted by the present inventors. From the figure, it can be seen that the output of thermal asperity decreases as the step size increases.
If the step is provided, the distance between the end surface of the magnetoresistive effect element 43 and the surface of the magnetic disk increases, but the step size is not large, and the recording signal on the magnetic disk by the magnetoresistive effect element 43 is reproduced. There is almost no influence on. Therefore, the recording signal on the magnetic disk is reproduced well.
[0050]
Moreover, it is good also considering the level | step difference Y2 of FIG. 5 instead of the level | step difference Y1 of FIG. In this case, in the third embodiment shown in FIG. 7, the step Y3 'satisfies Y3'≥Y2 + Nh.
Further, in the fourth embodiment shown in FIG. 8, the step Y4 'satisfies Y4'≥Y2 + Z.
[0051]
Further, in the fifth embodiment shown in FIG. 10, the step Y5 'is Y5'≥Y2 + Nh + Z.
FIG. 12 shows another magnetic disk device 60A in which the magnetoresistive head 30 having the configuration shown in FIGS. 1 and 2 is incorporated. In FIG. 12, the same components as those shown in FIG. A gimbal unit-integrated suspension 70 shown in FIG. 13 is caulked and fixed to the tip of the rotating arm 63. The magnetoresistive head 30 is fixed to the gimbal part 70 a of the gimbal part-integrated suspension 70.
[0052]
As shown in FIG. 13, the gimbal-integrated suspension 70 has a gimbal portion 70a on the tip side, ribs 70b for obtaining rigidity on both sides of the center portion, and an R-bending portion 70c on the side closer to the base portion. And has four wiring patterns 70d extending from the base portion to the gimbal portion 70a on the upper surface. Of the four wiring patterns 70d, two are for the magnetoresistive element and the remaining two are for the inductive head.
[0053]
The magnetoresistive head 30 is bonded to the gimbal portion 70a. The terminal 70 e at the end of the four wiring patterns 70 d and the terminal portions 44 ′ and 48 ′ of the magnetoresistive head 30 are connected by a gold ball 71.
The magnetoresistive head 30 is pressed against the magnetic disk side by the elasticity of the R-bending portion 70c.
[0054]
【The invention's effect】
  As described above, claims 1 toItem 13According to the invention, the end surface of the film element structure portion facing the slider floating surface is retreated from the slider floating surface by a predetermined step size that is large enough to avoid collision of the minute protrusion of the magnetic disk with the end surface. Because of the configuration, even if there are large protrusions on the magnetic disk that exceed the flying height, it is possible to effectively avoid the collision of these large protrusions with the magnetoresistive element, and signal abnormalities due to thermal asperity Can be effectively prevented. Therefore, when the flying height of the magnetoresistive head with respect to the magnetic disk is reduced with the recent increase in recording density, it is effective as a measure for preventing the occurrence of signal abnormality due to thermal asperity.
[0055]
  ClaimTerms 2, 7, and 11According to the invention, since the step size is a configuration that takes into account the bulging deformation amount of the portion of the magnetoresistive effect element in the end face when the film element structure portion is thermally expanded, the environment used is a high temperature environment. It is effective when
  ClaimItem 3, 9, 12According to the invention, since the step size takes into account the step-down amount when the slider relatively moves over the minute protrusion on the magnetic disk, the larger minute protrusion may collide with the magnetoresistive element. It can be avoided more effectively.
[0056]
  ClaimItem 4, 10, 13According to the invention, the step size of the film-like element structure portion when the film-like element structure thermally expands, the amount of bulging deformation of the magnetoresistive effect element portion and the slider relatively overcame the minute protrusion on the magnetic disk. Since the configuration takes into account both the time step-down amount, even when the device is used in a high temperature environment, it can be more effectively avoided that the large micro-projections collide with the magnetoresistive element.
[0057]
  ClaimItem 14, 15According to the present invention, it is possible to realize a magnetic disk device that can avoid thermal asperity and thus improve signal quality. In addition, since thermal asperity can be avoided, the magnetoresistive head can be brought closer to the magnetic film of the magnetic disk to lower the flying height, thereby realizing a magnetic disk device that can achieve higher density recording.
[Brief description of the drawings]
FIG. 1 is an enlarged view showing a main part of a magnetoresistive head according to a first embodiment of the present invention.
FIG. 2 is a diagram showing a magnetoresistive head according to a first embodiment of the invention.
FIG. 3 is a diagram showing a magnetic disk device in which the magnetoresistive head of FIG. 1 is incorporated.
4 is a diagram for explaining the action of a step of the magnetoresistive head of FIG. 1; FIG.
FIG. 5 is an enlarged view showing a main part of a magnetoresistive head according to a second embodiment of the invention.
6 is a diagram for explaining the action of a step in the magnetoresistive head of FIG. 5;
FIG. 7 is an enlarged view showing a main part of a magnetoresistive head according to a third embodiment of the invention.
FIG. 8 is an enlarged view showing a main part of a magnetoresistive head according to a fourth embodiment of the invention.
FIG. 9 is a diagram illustrating step down.
FIG. 10 is an enlarged view showing a main part of a magnetoresistive head according to a fifth embodiment of the invention.
FIG. 11 is a diagram illustrating a relationship between a step size and an output of thermal asperity.
12 is a diagram showing another magnetic disk device in which the magnetoresistive head of FIG. 1 is incorporated. FIG.
13 is an enlarged view of the suspension in FIG.
FIG. 14 is a diagram showing a conventional magnetoresistive head.
[Explanation of symbols]
30, 30A, 30B, 30C, 30D Magnetoresistive head
31 Air inflow end
32 Air outflow end
33 Slider
33a, 33b rail
33c Shallow recess
33d, 33e Air bearing surface
33f Air outflow end surface
33g corner (altic edge)
34 Membrane element structure
40, 42, 45, 47 Insulating film
41 Lower shield film (magnetic film)
43 Film-like magnetoresistive effect element
44 Film-like conductive member
46 Lower magnetic film
48 Membrane coil
49 Upper magnetic film
50 Protective film
51 End face
52, 52A, 52B, 52C, 52D
55 Virtual plane
60, 60A magnetic disk drive
63 Rotating arm
64 voice coil motor
68 spindle motor
70 Gimbal integrated suspension
70d wiring pattern
70a Gimbal
70e terminal
71 gold balls

Claims (15)

磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、上記磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法を有する構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetic element having a slider that rises at a predetermined flying angle with respect to the magnetic disk, and a film-like element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the resistance effect type head,
The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When considering the above, the magnetoresistive head is characterized in that the end of the magnetoresistive element facing the end face has a size sufficient to be positioned above the virtual plane. 磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法に、上記膜状素子構造部が熱膨張したときの上記端面の盛り上がり変形量を加算した寸法を有する構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetic element having a slider that rises at a predetermined flying angle with respect to the magnetic disk, and a film-like element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the resistance effect type head,
The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When the film-like element structure is thermally expanded to a dimension sufficient to position the end facing the end face of the magnetoresistive element above the virtual plane, the end face rises and deforms. A magnetoresistive head characterized by having a configuration with an added quantity. 磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法に、上記スライダが上記磁気ディスク上の微小突起を相対的に乗り越えたときのステップダウン分を加算した寸法を有する構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetic element having a slider that rises at a predetermined flying angle with respect to the magnetic disk, and a film-like element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the resistance effect type head,
The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When the slider has moved over the small protrusion on the magnetic disk so that the end facing the end surface of the magnetoresistive element is positioned above the imaginary surface. A magnetoresistive head characterized by having a size obtained by adding the amount of step down. 磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、磁気抵抗効果素子の上記端面に臨んでいる端部を上記仮想面より上側に位置させるに足る寸法に、上記膜状素子構造部が熱膨張したときの上記端面の盛り上がり変形量と上記スライダが上記磁気ディスク上の微小突起を相対的に乗り越えたときのステップダウン分とを加算した寸法を有する構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetic element having a slider that rises at a predetermined flying angle with respect to the magnetic disk, and a film-like element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the resistance effect type head,
The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. When the film-like element structure is thermally expanded to a dimension sufficient to position the end facing the end face of the magnetoresistive element above the virtual plane, the end face rises and deforms. A magnetoresistive head having a size obtained by adding an amount and a step-down amount when the slider relatively gets over a minute protrusion on the magnetic disk. 磁気ディスクに対して所定の浮上角傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面が、該スライダの浮上面より所定の段差寸法後退した位置にあり、
該所定の段差寸法が、上記磁気抵抗効果型ヘッドを上記磁気ディスクに対して上記の所定の浮上角傾斜させた姿勢として上記スライダの空気流出端の角部を通り上記磁気ディスクと平行な仮想面を考えた場合に、該膜状素子構造部の上記端面の空気流出端の端部を上記仮想面より上側に位置させるに足る寸法を有する構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetic element having a slider that rises at a predetermined flying angle with respect to the magnetic disk, and a film-like element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In the resistance effect type head,
The end surface on the same side as the air bearing surface of the slider of the film element structure portion is at a position recessed by a predetermined step size from the air bearing surface of the slider,
The predetermined step size is an imaginary plane parallel to the magnetic disk passing through the corner of the air outflow end of the slider as a posture in which the magnetoresistive head is inclined at the predetermined flying angle with respect to the magnetic disk. In consideration of the above, a magnetoresistive head having a size sufficient to position the end of the air outflow end of the end face of the film element structure portion above the imaginary plane. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ１が、
Ｙ１≧ｔ１×ｔａｎα
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The dimension Y1 of the step which is retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider of the film element structure portion is:
Y1 ≧ t1 × tan α
(Here, t1 is the distance from the air outflow end surface of the slider to the magnetoresistive element, and α is the flying angle of the magnetoresistive head.)
A magnetoresistive head having a size satisfying the above requirements. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ２が、
Ｙ２≧ｔ２×ｔａｎα
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The step dimension Y2 of the step of the film-like element structure portion retreated from the flying surface of the slider on the same side as the flying surface of the slider is:
Y2 ≧ t2 × tanα
(Here, t2 is the thickness of the film element structure, and α is the flying angle of the magnetoresistive head.)
A magnetoresistive head having a size satisfying the above requirements. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ３が、
Ｙ３≧（ｔ１×ｔａｎα）＋Ｎｈ
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The step size Y3 of the step of the film-like element structure portion retreated from the flying surface of the slider on the same side as the flying surface of the slider is:
Y3 ≧ (t1 × tan α) + Nh
(Where t1 is the distance from the air outflow end surface of the slider to the magnetoresistive element, α is the flying angle of the magnetoresistive head, and Nh is the amount of bulging deformation due to thermal expansion of the film element structure) .)
A magnetoresistive head having a size satisfying the above requirements. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ４が、
Ｙ４≧（ｔ１×ｔａｎα）＋Ｚ
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The step dimension Y4 of the step of the film-like element structure portion retreated from the slider floating surface on the same side as the slider floating surface is as follows.
Y4 ≧ (t1 × tan α) + Z
(Where t1 is the distance from the air outflow end surface of the slider to the magnetoresistive effect element, α is the flying angle of the magnetoresistive head, and Z is the magnetoresistive head formed by a minute projection on the magnetic disk. (It is the distance that has been stepped down after being pushed up once.)
A magnetoresistive head having a size satisfying the above requirements. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ５が、
Ｙ５≧（ｔ１×ｔａｎα）＋Ｎｈ＋Ｚ
（ここで、ｔ１は上記スライダの空気流出端の面から上記磁気抵抗効果素子までの距離、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The dimension Y5 of the step which is retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider of the film element structure portion is:
Y5 ≧ (t1 × tan α) + Nh + Z
(Where t1 is the distance from the air outflow end surface of the slider to the magnetoresistive element, α is the flying angle of the magnetoresistive head, and Nh is the amount of bulging deformation due to thermal expansion of the film element structure) , Z is a distance in which the magnetoresistive head is stepped down after being once pushed up by the minute protrusions of the magnetic disk.
A magnetoresistive head having a size satisfying the above requirements. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ３’が、
Ｙ３’≧（ｔ２×ｔａｎα）＋Ｎｈ
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量である。）を満たす大きさである構成としたことを特徴とする請求項８記載の磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The step dimension Y3 ′ of the step of the membrane element structure portion retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider is:
Y3 ′ ≧ (t2 × tan α) + Nh
Where t2 is the thickness of the film element structure, α is the flying angle of the magnetoresistive head, and Nh is the amount of bulge deformation due to thermal expansion of the film element structure. The magnetoresistive head according to claim 8, wherein the magnetoresistive head is configured as follows. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ４’が、
Ｙ４’≧（ｔ２×ｔａｎα）＋Ｚ
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The step dimension Y4 ′ of the step of the film-like element structure portion retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider is:
Y4 ′ ≧ (t2 × tan α) + Z
(Where t2 is the thickness of the film element structure portion, α is the flying angle of the magnetoresistive head, and Z is lowered after the magnetoresistive head is once pushed up by the minute protrusions of the magnetic disk. And stepped down.)
A magnetoresistive head having a size satisfying the above requirements. 磁気ディスクに対して傾斜して浮上するスライダと、このスライダの空気流出端に形成してあり、情報の再生を行うため磁気抵抗効果素子を含む膜状素子構造部とを有する磁気抵抗効果型ヘッドにおいて、
該膜状素子構造部の該スライダの浮上面と同じ側の端面の該スライダの浮上面より後退した段差の寸法Ｙ５’が、
Ｙ５’≧（ｔ２×ｔａｎα）＋Ｎｈ＋Ｚ
（ここで、ｔ２は上記膜状素子構造部の厚さ、αは上記磁気抵抗効果型ヘッドの浮上角、Ｎｈは膜状素子構造部の熱膨張による盛り上がり変形量、Ｚは磁気抵抗効果型ヘッドが磁気ディスクの微小突起によって一旦押し上げられた後に下動してステップダウンした距離である。）
を満たす大きさである構成としたことを特徴とする磁気抵抗効果型ヘッド。A magnetoresistive head having a slider that is inclined and floats with respect to a magnetic disk, and a film element structure portion that is formed at the air outflow end of the slider and includes a magnetoresistive element for reproducing information. In
The step dimension Y5 ′ of the step of the film-like element structure portion retreated from the air bearing surface of the slider on the same side as the air bearing surface of the slider is:
Y5 ′ ≧ (t2 × tan α) + Nh + Z
(Where t2 is the thickness of the film element structure, α is the flying angle of the magnetoresistive head, Nh is the amount of bulging deformation due to thermal expansion of the film element structure, and Z is the magnetoresistive head. ) Is a distance that has been stepped down after being pushed up once by a minute protrusion on the magnetic disk.
A magnetoresistive head having a size satisfying the above requirements. 回転する磁気ディスクと、
請求項１乃至請求項１３のうちいずれか一項記載の磁気抵抗効果型ヘッドと、
該磁気抵抗効果型ヘッドを上記磁気ディスク上を移動するように支持する支持手段とを有する構成としたことを特徴をとする磁気ディスク装置。A rotating magnetic disk;
A magnetoresistive head according to any one of claims 1 to 13 ,
A magnetic disk drive comprising: a support means for supporting the magnetoresistive head so as to move on the magnetic disk. 該支持手段は、配線パターンが形成されており、磁気抵抗効果型ヘッドが固定してあるサスペンションよりなり、
該磁気抵抗効果型ヘッドの端子部と該配線パターンの端子とが金ボールによって接続されている構成としたことを特徴をとする請求項１４記載の磁気ディスク装置。The support means includes a suspension having a wiring pattern formed thereon and a magnetoresistive head fixed thereto.
Magnetoresistive head magnetic disk apparatus according to claim 14 Symbol mounting and characterized in that the terminal portion and the terminal of the wiring pattern is a configuration that is connected by gold balls.
JP06691497A 1994-03-17 1997-03-19 Magnetoresistive head and magnetic disk drive having the same Expired - Fee Related JP3649848B2 (en)

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JP06691497A JP3649848B2 (en) 1997-03-19 1997-03-19 Magnetoresistive head and magnetic disk drive having the same
US08/834,436 US6282061B1 (en) 1994-03-17 1997-04-16 Magnetic head with improved floating surface
DE19723998A DE19723998C2 (en) 1997-03-19 1997-06-06 MR head and magnetic disk drive equipped with the same
KR1019970025714A KR100275368B1 (en) 1997-03-19 1997-06-19 Mr head and magnetic disk drive having the same
CN97112780A CN1091287C (en) 1997-03-19 1997-06-19 MR head and magnetic disk drive having the same
US09/898,806 US7142393B2 (en) 1994-03-17 2001-07-03 Magnetic head and magnetic disk apparatus

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