JP3629482B2 - Tool edge polishing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a processing apparatus for polishing a tool blade edge.
[0002]
[Prior art]
When polishing the tool edge, it is necessary to control the force with which the tool edge is pressed against the lapping machine. Conventionally, such force control has been controlled by incorporating a force sensor or the like at the base of the tool and using a weight, a piezoelectric element, a spring, or the like so that the actual pressing force becomes a set value.
[0003]
In addition, a load cell that detects the polishing load applied to the material to be polished and a piezoelectric element that moves the table are provided on a table that can move in the same direction as the direction in which the polishing load is applied to the material to be polished from the polishing tool. There is also known a polishing apparatus that can perform high-precision polishing on the order of nanometers (nm) by moving the table by driving the piezoelectric element so that the polishing load becomes a set value (see, for example, Patent Document 1). ).
[0004]
[Patent Document 1]
Japanese Patent No. 2977203 (column 4, line 40 to column 5, column 6, line 49 to column 7, FIG. 1, FIG. 2)
[0005]
[Problems to be solved by the invention]
When polishing the tool edge, use a sensor to detect the force that presses the tool edge against the lapping machine, and to control the force that is applied by a weight, piezoelectric element, spring, etc. based on this detected value Highly accurate assembly of circuits and mechanisms is required. However, since the number of parts to be used is increased, it is difficult to assemble and to obtain accuracy.
[0006]
SUMMARY OF THE INVENTION An object of the present invention is to provide a processing apparatus that can perform high-precision polishing of a tool edge with a simple configuration.
[0007]
[Means for Solving the Problems]
The present invention is a polishing apparatus that polishes a tool blade edge, a tool mounting base placed on a base via a static pressure slide mechanism, and the tool mounting base to be polished is a static pressure slide mechanism And a lapping machine provided at a position where the polishing tool cutting edge mounted on the polishing tool mounting base comes into contact with the base, and the base is inclined at a predetermined angle so that it is attached to the upper part of the hydrostatic slide mechanism. The force of the member to be slid by the action of gravity is used as a pressing force against the lapping machine of the tool edge to be polished. As a means for inclining the base, a fine lifting means is provided on the leg of the base, and by the fine lifting means, the static pressure slide mechanism side is raised to incline the base by a predetermined angle. Further, an air turbine is used as a drive source for rotating the lapping machine, and a static pressure air bearing motor is used as a drive source for rotating the tool blade edge. Furthermore, the tool mounting base is attached to a rotary table that is rotatable about a vertical axis provided at the top of the hydrostatic slide mechanism, so that the scooping and flank surfaces of the tool can be easily processed.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a perspective view of a processing apparatus according to an embodiment of the present invention. FIG. 2 is a front view of the same embodiment, and FIG. 3 is a side view as seen from the right direction of FIG.
A column 2 is erected on one side of the base 1, and the column 2 is provided with a lapping machine 3 that is rotationally driven by a drive source 11 such as an air turbine or a motor. In this embodiment, the air turbine 11 is used as the drive source. A static pressure slide mechanism 4 is provided on the other side of the base 1. Furthermore, a rotary table 5 is attached to the static pressure slide mechanism 4, and a tool mounting base 6 is attached to one end of the rotary table 5. A static pressure air bearing motor 7 is attached to the tool mounting base 6, and a tool 9 is attached to a chuck 8 provided on a rotating shaft driven by the static pressure air bearing motor 7.
[0009]
In this embodiment, the hydrostatic slide mechanism 4 is provided with a Y-axis hydrostatic slide shaft 4Y that slides in the Y-axis direction parallel to the rotation surface of the lapping machine 3 on the base 1, and the Y-axis on the Y-axis. An X-axis static pressure slide shaft 4X that slides in the X-axis direction orthogonal to the axis and orthogonal to the rotation surface of the lapping machine 3 is provided. The rotary table 5 is fixed to the upper surface of the X-axis static pressure slide shaft 4X.
[0010]
Further, the legs of the base 1 are provided with fine lifting means 10a, 10b, 10c. Among these, fine lifting means 10a and 10b for providing a horizontal level are provided at both ends on the column 2 side. Further, in order to incline the hydrostatic slide mechanism 4 by inclining the base 1, a fine elevating means 10c is provided at the center of the end on the hydrostatic slide mechanism 4 side, and a total of three fine elevating means 10a, 10b, 10c are provided. It is provided on the leg portion of the base 1.
[0011]
Therefore, the right side in FIG. 2 is raised by raising the base 1 by using the fine lifting means 10a, 10b on the column 2 side to adjust the horizontal level and adjusting the fine lifting means 10c on the static pressure slide mechanism 4 side. Give the base 1 a tilt. As a result, the static pressure slide mechanism 4 tilts in the X-axis direction, so the X-axis static pressure slide shaft 4X slides along this tilt, and the tool 9 attached to the chuck of the tool mounting base 6 is polished. It will be pressed against the lapping machine 3.
[0012]
The inclination angle of the base 1 and the static pressure slide mechanism 4 is the distance in the X-axis direction between the fine lift means 10a, 10b on the column 2 side and the fine lift means 10c on the static pressure slide mechanism 4 side, and on the column 2 side. It is determined by the amount of lift by the fine lift means 10c on the static pressure slide mechanism 4 side with respect to the fine lift means 10a, 10b. The force with which the tool 9 is pressed against the lapping machine 3 is determined by the weight and inclination angle of the member that slides in the X-axis direction.
[0013]
Therefore, a member that slides in the X-axis direction, that is, in this embodiment, the X-axis static pressure slide shaft 4X, the rotary table 5 fixed to the static pressure slide shaft 4X, and the object to be polished attached to the rotary table 5 The weight of the member that slides due to the inclination of the tool mounting base 6, the static pressure air bearing motor 7, the chuck 8, the tool 9, etc. is measured in advance, and the force of pressing the tool 9 against the lapping machine 3 by this weight and the inclination angle Is obtained. Therefore, if the inclination angle for obtaining the required pressing force is obtained, and the inclination angle obtained by adjusting the amount of elevation by the fine elevating means 10c on the hydrostatic slide mechanism 4 side is set to the obtained inclination angle, the tool 9 is caused by the action of gravity, The target pressing force to the lapping machine 3 can be obtained by the load of the sliding part at the top of the static pressure slide mechanism 4.
[0014]
And in the grinding process of the scooping surface of the cutting edge of the tool 9, and a flank, according to the angle, the rotary table 5 is rotated and each surface is grind | polished. If the inclination angle of the base 1 and the static pressure slide mechanism 4 is constant, the load applied to the cutting edge of the tool 9 can be kept constant. Therefore, the scooping surface and flank face of the tool cutting edge can be finished with surface accuracy on the order of nanometers. it can.
[0015]
In the above-described embodiment, the rotary table 5 is provided, the tool mounting base 6 is fixed to the rotary table 5, and the direction of the tool attached to the tool mounting base 6 is changed with respect to the lapping machine 3. Made it possible to grind the scooping and flank surfaces of tool edges. However, the rotary table 5 is not necessarily provided, and the mounting position and direction of the tool mounting base 6 with respect to the member (X-axis static pressure slide shaft 4X) that slides by the inclination of the static pressure slide mechanism 4 can be changed. It may be left.
[0016]
In the above-described embodiment, the static pressure slide mechanism 4 is slid in the X and Y axis directions orthogonal to each other, but the tool mounting base 6 is slid in the direction of the lapping machine 3 by tilting, and the tool edge is lapped. 3 may be a static pressure slide mechanism that slides only in the X-axis direction. In this case, when changing the position in the Y-axis direction, the mounting position of the tool mounting base 6 may be changed.
[0017]
【The invention's effect】
Since the base is inclined and the tool mounting base is slid in the direction of the lapping machine by the hydrostatic slide mechanism, the tool blade edge generated by the weight of the sliding member is processed using the force pressing the lapping machine. Since a constant pressing force can be obtained and the base only needs to be tilted, the configuration becomes very simple.
[Brief description of the drawings]
FIG. 1 is a perspective view of a processing apparatus according to an embodiment of the present invention.
FIG. 2 is a front view of the same embodiment.
FIG. 3 is a side view of the same embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base 2 Column 3 Lapping machine 4 Static pressure slide mechanism 4X X axis static pressure slide shaft 4Y Y axis static pressure slide shaft 5 Rotary table 6 Polishing tool mounting base 7 Hydrostatic air bearing motor 8 Chuck 9 Tools 10a, 10b , 10c Fine lifting means 11 Air turbine

Claims (5)

A polishing apparatus for polishing a tool blade edge, a tool mounting base mounted on a base via a static pressure slide mechanism, and the tool mounting base sliding by the static pressure slide mechanism. And a lapping machine provided at a position where the tool cutting edge attached to the tool mounting base contacts, and the base is inclined at a predetermined angle to be attached to the upper part of the hydrostatic slide mechanism. A tool cutting edge polishing apparatus characterized in that a force that causes a member to slide by the action of gravity is used as a pressing force of the tool cutting edge to the lapping machine. 2. The tool cutting edge polishing apparatus according to claim 1, wherein a fine lifting means is provided on a leg portion of the base, and the static pressure slide mechanism side is raised by the fine lifting means to incline the base by a predetermined angle. The tool cutting edge polishing apparatus according to claim 1 or 2, wherein an air turbine is used as a drive source for rotating the lapping machine. The tool cutting edge polishing apparatus according to any one of claims 1 to 3, wherein a static pressure air bearing motor is used as a drive source for rotating the tool edge. The tool cutting edge according to any one of claims 1 to 4, wherein the tool mounting base is attached to a rotary table that is rotatable about a vertical axis provided at an upper portion of the hydrostatic slide mechanism. Processing equipment.

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