JP3597986B2 - Non-contact vibration detection device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a non-contact vibration detecting device for measuring a vibration of an object to be measured in a non-contact manner.
[0002]
[Prior art]
Conventionally, an aperture grill mask is used as a color selection mechanism in a color cathode ray tube formed by an expansion mask method. The structure of this aperture grill mask is shown, for example, in FIG. In FIG. 1, reference numeral 1 denotes a frame including an upper frame 1a and a lower frame 1b, and reference numeral 2 denotes a plurality of aperture grills provided on the frame 1, which form a plurality of vertical stripe-shaped light shielding portions of a color cathode ray tube. Numeral 3 is a damping wire disposed on the aperture grill 2 and is suspended by the same left and right damper springs 4 attached to the lower frame 1b.
[0003]
The conventional color cathode ray tube is configured as described above, and when an external impact is applied to the color cathode ray tube, the aperture grill 2 vibrates. When the aperture grill 2 vibrates, the color selection function is not properly performed, and image shaking, color misregistration, color unevenness, and the like appear. Therefore, the damping wire 3 is stretched in order to attenuate the vibration of the aperture grill 2.
[0004]
[Problems to be solved by the invention]
The conventional color cathode ray tube is configured as described above, and the setting conditions of the aperture grill 2 and the damping wire 3 have been experimentally obtained. This is because, by setting the damping wire 3 on the aperture grill 2, one aperture grill 2 is interfered by resonance of the peripheral aperture grill 2, and shows a complicated vibration behavior, and such vibration is easily performed. This is because there is no means for measuring. For this reason, it has been very difficult to find the optimum setting conditions.
[0005]
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and has as its object to provide a non-contact vibration detecting device capable of easily detecting a vibration of an object to be measured in a non-contact manner.
[0006]
[Means for Solving the Problems]
A non-contact vibration detecting device according to a first aspect of the present invention includes a plurality of detecting means for simultaneously extracting the vibration of the object to be measured from a plurality of directions of the object using irradiation light in a non-contact manner, Irradiation position detecting means for detecting each aim and each focus, and each detecting means based on the detection result of the irradiation position detecting means, so that the irradiation position of each detecting means coincides with the vibration detection position of the measured object. Adjustment means for adjusting, and a positional relationship between each detection means and the object to be measured are set in a range where an adjustment operation for matching the irradiation position of each detection means to the vibration detection position of the object to be measured using the adjustment means is possible. The apparatus includes a moving unit and a calculating unit that obtains desired vibration behavior in a plurality of directions at a vibration detection position of the object by vector-converting a signal extracted by each detection unit.
[0007]
A non-contact vibration detecting device according to a second aspect of the present invention is the non-contact vibration detecting device according to the first aspect, wherein the non-contact vibration detecting device comprises three detecting means.
[0008]
According to a third aspect of the present invention, in the non-contact vibration detecting device according to the first or second aspect, when the irradiation light of each detection unit is visible light, the irradiation position detection unit can be visually detected. It is formed so that it can be performed.
[0009]
According to a fourth aspect of the present invention, there is provided the non-contact vibration detecting device according to any one of the first to third aspects, wherein the moving means places the object to be measured and moves the object to be measured in the XY plane. It consists of a possible first movement stage.
[0010]
According to a fifth aspect of the present invention, there is provided a non-contact vibration detecting device according to any one of the first to fourth aspects, wherein the adjusting means is provided with each detecting means and can move each irradiation position in the Z-axis direction. A second stage, and a third moving stage provided with each detecting means and capable of changing the inclination of each irradiation light and the position in the X-axis direction.
[0011]
According to a sixth aspect of the present invention, in the non-contact vibration detecting device according to any one of the first to fifth aspects, the calculating means determines a vibration behavior in an arbitrary plane at a vibration detection position of the measured object. Is what you want.
[0012]
According to a seventh aspect of the present invention, there is provided the non-contact vibration detecting device according to any one of the first to fifth aspects, wherein the calculating means performs frequency analysis for each unit frequency at the vibration detection position of the device under test. This is for obtaining the spectrum amplitude.
[0013]
The non-contact vibration detecting device according to claim 8 according to the present invention is the non-contact vibration detecting device according to any one of claims 1 to 5, wherein the calculating means performs time-frequency analysis to detect a vibration detection position of the device under test every unit time. The amplitude of the unit frequency component is obtained.
[0014]
According to a ninth aspect of the present invention, there is provided the non-contact vibration detecting device according to any one of the first to fifth aspects, wherein the calculating means performs time-series analysis to detect a vibration detection position of the device under test every unit time. And either one or both of the standard deviation and the decay rate are determined.
[0015]
According to a tenth aspect of the present invention, there is provided the non-contact vibration detecting device according to any one of the first to ninth aspects, wherein the object to be measured is a plurality of aperture grills provided in a color cathode ray tube. The moving means of the non-contact vibration detecting device includes means for scanning each detecting means in the direction in which the aperture grills are arranged, and reading the level change of a signal detected by each detecting means during scanning, and irradiating each detecting means. It is provided with means for determining which aperture grill the position has reached.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiment 1 FIG.
Hereinafter, embodiments of the present invention will be described. FIG. 1 is a view showing a structure of an aperture grill mask of a color cathode ray tube formed in the same manner as in the conventional case. 1 is a frame composed of an upper frame 1a and a lower frame 1b, and 2 is a plurality of frames arranged on the frame 1. A plurality of vertical stripe-shaped light shielding portions of the color cathode ray tube are formed by the aperture grille.
[0017]
Numeral 3 denotes a damping wire disposed on the aperture grill 2, which is spanned by the same left and right damper springs 4 attached to the lower frame 1b, and forms an aperture grill mask 5. In this case, the direction in which the damping wire 2 is stretched is defined as the X-axis direction, the direction in which the aperture grilles 2 are arranged is defined as the Y-axis direction, and the direction perpendicular to these XY planes is defined as the Z-axis direction. In this case, the aperture grill 2 is set as an object to be measured.
[0018]
FIG. 2 is a diagram showing a configuration of the non-contact vibration detecting device according to Embodiment 1 of the present invention. Reference numeral 6 denotes a color cathode ray tube in which an aperture grill mask 5 is disposed in a panel glass 7 and a funnel glass 8. Reference numerals 9 and 10 denote vibrations of the aperture grill 2 in a non-contact manner using irradiation light from a plurality of directions of the aperture grill 2. A laser Doppler vibrometer, in which the irradiation light is a laser beam, is used as a plurality of first and second detection units that are simultaneously extracted in the step (1). As the other detecting means, any means can be used as long as it can measure the displacement of the object to be measured using irradiation light, and a laser displacement meter or the like can be considered as an example.
[0019]
Numeral 11 denotes an irradiation position detecting means for detecting each aim and each focus of the first and second detecting means 9 and 10. For example, when the irradiation light includes visible light, a high magnification camera 11a and a first monitor 11b are used. The target can directly detect the aim and the focus of the first and second detection means 9 and 10 by looking directly at the first monitor 11b from the outside. Reference numeral 12 denotes first and second detection units based on the detection result of the irradiation position detection unit 11 so that the irradiation positions of the first and second detection units 9 and 10 coincide with the vibration detection position of the aperture grill 2. Adjusting means for adjusting 9, 9 respectively.
[0020]
The adjusting means 12 includes, for example, a second stage 13 provided with first and second detecting means 9 and 10 and capable of moving each irradiation position in the Z-axis direction, and a first and second detecting means. 9 and 10, and a third moving stage 14 capable of changing the inclination of each irradiation light and the position in the X-axis direction. Then, the first and second detection means 9 and 10 are respectively mounted on the third stage 14, and the third stage 14 is provided and formed on the second stage 13. The second stage 13 is installed on a first stage described later via a support 13a.
[0021]
Reference numeral 15 denotes the first and second detection means 9 within a range in which the adjustment operation of matching the irradiation positions of the first and second detection means 9 and 10 with the vibration detection position of the aperture grill 2 using the adjustment means 12 is possible. , 10 and a moving means for setting the positional relationship between the aperture grill 2 and, for example, a first moving stage on which the color cathode ray tube 6 is mounted and which can move the aperture grill 2 in the XY plane, Is provided with a direction sensing sensor 15a for sensing the reversal of.
[0022]
Reference numeral 16 denotes an amplifier circuit having an amplifying function of an output of a signal extracted by the first and second detecting means 9 and 10 and a filter function for removing an error. 17 is obtained through the amplifier circuit 16. , Vector conversion of the signals of the first and second detection means 9 and 10 to obtain desired vibration behaviors in a plurality of directions at the vibration detection position of the aperture grille 2, for example, an A / D conversion circuit 18 and a CPU 19 It becomes. Reference numeral 20 denotes a second monitor for displaying the result calculated by the calculating means 17.
[0023]
A1 is an incident angle when the irradiation light from the first and second detection means 9 and 10 irradiates the aperture grill 2, and the detection accuracy in each direction can be changed by the incident angle A1. In this case, when the angle of incidence A1 is reduced, the detection accuracy of the component in the Z-axis direction is improved, and the detection accuracy of the component in the X-axis direction is reduced. When the angle of incidence A1 is increased, the detection accuracy of the component in the Z-axis direction is reduced, and the detection accuracy of the component in the X-axis direction is improved. Here, since it is necessary to detect both the X-axis direction and the Z-axis direction, the angles of the irradiation light of the first and second detection means 9 and 10 from the Z-axis direction are each set to 45 degrees. The incident angle A1 may be set to 90 degrees.
[0024]
The operation of the non-contact vibration detecting device according to the first embodiment configured as described above will be described. First, since the aperture grill 2 is fixed in the Y-axis direction and the vibration wave in the Y-axis direction is small, the color cathode-ray tube 6 is provided as shown in FIG. 2 so that vibrations in the X-axis and Z-axis directions can be obtained. Is mounted on the moving means 15. Then, the moving unit 15 is operated to operate the aperture in the XY plane so that the irradiation positions of the first and second detecting units 9 and 10 can be adjusted to the desired vibration inspection position of the aperture grill 2. The grill 2 is moved.
[0025]
Next, the irradiation position detection unit 11 detects each aim and each focus of the first and second detection units 9 and 10. Then, based on the detection result, the adjustment unit 12 adjusts the irradiation positions of the first and second detection units 9 and 10 so as to match the vibration detection positions. Then, it is confirmed that the irradiation positions of the first and second detection means 9 and 10 coincide with the vibration detection positions.
[0026]
Then, vibration is applied to the color cathode ray tube 6 by a vibrator such as a shock hammer, and the vibration after the vibration is detected by the first and second detecting means 9 and 10 and processed by the amplifier circuit 16. The vector conversion is performed by the calculation means 17 to calculate the vibration behaviors in a plurality of desired directions at the vibration detection position of the aperture grill 2, here, the X-axis direction and the Z-axis direction of the aperture grill 2, and the second It is displayed on the monitor 20.
[0027]
A description will be given of what vibration behavior results are obtained when the color cathode ray tube 6 is actually vibrated. For example, when 0.35 N · m is applied to the color cathode ray tube 6 as an exciting force, the signals obtained by the first and second detecting means 9 and 10 are vector-converted by the calculating means 17 and the aperture grille is converted. The respective vibration components in the X-axis direction and the Z-axis direction of the second vibration were calculated. When these data are shown with time on the horizontal axis and amplitude on the vertical axis, information on the vibration behavior in the X-axis direction and the Z-axis direction is obtained as shown in FIGS. be able to.
[0028]
Then, these components are combined, and the horizontal axis indicates the displacement in the X-axis direction, and the vertical axis indicates the displacement in the Z-axis direction. FIG. 4 shows the vibration behavior in the XZ plane as an arbitrary plane. Can be obtained as follows. From this figure, it can be easily confirmed that the maximum vibration in the Z-axis direction at the vibration detection position is about 20 μm and the maximum vibration in the X-axis direction is about 5 μm.
[0029]
As another calculation method, when the vibration components of the vibration of the aperture grille 2 in the X-axis direction and the Z-axis direction are calculated, and the vertical axis indicates the pulse height and the horizontal axis indicates time, FIG. As shown in (a) and (b), information on the vibration behavior in the X-axis direction and the Z-axis direction can be obtained. As described above, if the vertical axis indicates the crest width, the decay time in the vibration in the X-axis direction and the Z-axis direction can be easily determined.
[0030]
Then, these components are combined, and the horizontal axis represents the displacement in the X-axis direction, and the vertical axis represents the displacement in the Z-axis direction. The vibration behavior of the peak value in the XZ plane as an arbitrary plane is shown in FIG. 6 can be obtained.
[0031]
As another analysis method, as a frequency analysis, for example, when fast Fourier transform (FFT) is used and analysis is performed for 5 seconds after excitation in the Z-axis direction, a result shown in FIG. 7 is obtained. From this figure, it can be confirmed that a frequency having a high spectral value exists at about 230 Hz, and that it can be easily confirmed that the frequency exists at about 460 Hz.
[0032]
When the analysis is performed for 5 seconds after the excitation in the Z-axis direction using, for example, wavelet analysis as the time-frequency analysis, a matrix-like result as shown in FIG. 8 is obtained. The level of each amplitude of the unit frequency component for each unit time is indicated by the shading of the color, with a white color indicating a higher level and a black color indicating a lower level. From this figure, it can be confirmed that the frequency of the vibration having a long duration exists at about 230 Hz.
[0033]
Further, a standard deviation, an attenuation rate, and the like for each unit time can be obtained by time series analysis. It is also possible to obtain desired data by various analysis means and estimate a vibration source or the like.
[0034]
The moving means 15 causes the first and second detecting means 9 and 10 to scan in the direction in which the aperture grilles 2 are arranged. At the time of scanning, the first and second detecting means 9 and 10 detect the movement. By reading the level change of the signal, it is possible to determine which of the aperture grilles 2 the irradiation positions of the first and second detection means 9 and 10 have reached.
[0035]
The actual method will be described with reference to FIG. For example, when the aperture grill 2 is present, the signal level of the signal from the first detecting means 9 is large because the reflected light is large, and the reflected light is small when the signal deviates from the aperture grill 2. The signal level decreases. Therefore, when the signal level of the first detecting means 9 is measured, a level change as shown in FIG. 9A can be obtained.
[0036]
This level change is counted based on the slice level (threshold), and the number of aperture grilles 2 can be counted. At the same time, if the output level of the direction sensing sensor 15a is obtained as shown in FIG. 9B, it is possible to determine the point at which the movement in the X-axis direction has been reversed. Then, when this signal is inverted, if the number of the aperture grill 2 is counted in reverse, it is possible to cope with both forward and reverse movements in the X-axis direction.
[0037]
According to the non-contact vibration detection device of the first embodiment configured as described above, the vibration at the desired vibration detection position of aperture grill 2 can be easily detected in a non-contact manner.
[0038]
Further, in the first embodiment, an example in which the aperture grill 2 is used as an object to be measured is not limited to this. For example, when the damping wire 3 is an object to be measured, the damping wire 3 may be X Since it is stretched and fixed in the axial direction, there are few vibration waves in the X-axis direction. Therefore, the color cathode ray tube 6 is rotated by 90 degrees from the state shown in FIG. 2 and placed on the moving means 15 so that vibrations in the Y-axis direction and the Z-axis direction can be obtained. do it.
[0039]
Further, in the first embodiment, an example of measuring the color cathode ray tube 6 in a state where the damping wire 3 is stretched is shown. However, the present invention is not limited to this. It is conceivable to measure both the state in which the damping wire 3 is set and to detect the influence on the damping wire 3.
[0040]
Further, in the first embodiment, an example in which two devices are used as the detection means has been described. However, the present invention is not limited to this. For example, if three devices are used, the X, Y, and Z axes may be used. The vibration behavior in each direction can be determined by one measurement.
[0041]
【The invention's effect】
As described above, according to the first aspect of the present invention, a plurality of detecting means for simultaneously extracting the vibration of the measured object from a plurality of directions of the measured object in a non-contact manner using irradiation light, Irradiation position detecting means for detecting each aim and each focus, and each detecting means based on the detection result of the irradiation position detecting means, so that the irradiation position of each detecting means coincides with the vibration detection position of the measured object. Adjustment means for adjusting, and a positional relationship between each detection means and the object to be measured are set in a range where an adjustment operation for matching the irradiation position of each detection means to the vibration detection position of the object to be measured using the adjustment means is possible. Since the moving means and the calculating means for converting the signals taken out by the respective detecting means into vectors to obtain desired plural directions of vibration behavior at the vibration detection position of the object to be measured are provided, the desired plural directions of vibration behavior can be obtained. Can ask Possible to provide a non-contact vibration detecting device become.
[0042]
According to the second aspect of the present invention, since the three detecting means are provided in the first aspect, it is possible to obtain a non-contact vibration detecting device capable of simultaneously obtaining vibration behaviors in arbitrary three directions. It becomes.
[0043]
Further, according to claim 3 of the present invention, in claim 1 or claim 2, when the irradiation light of each detection means is visible light, the irradiation position detection means is formed so as to be visually detectable. Therefore, it is possible to provide a non-contact vibration detection device that allows a measurer to easily confirm the irradiation position.
[0044]
According to a fourth aspect of the present invention, in any one of the first to third aspects, the moving means mounts the object to be measured and moves the object to be measured within the XY plane. Since it is composed of the moving stage, it is possible to provide a non-contact vibration detecting device that can easily set the positional relationship between the object to be measured and each detecting means.
[0045]
According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the adjusting means is provided with each detecting means and the second stage capable of moving each irradiation position in the Z-axis direction. And a third moving stage provided with each detecting means and capable of changing the inclination of each irradiation light and the position in the X-axis direction. Therefore, the irradiation position of each detecting means and the vibration measurement position of the DUT Can be provided easily.
[0046]
According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the calculation means obtains a vibration behavior in an arbitrary plane at a vibration detection position of the measured object. It is possible to provide a non-contact vibration detection device that can obtain a desired vibration behavior of a vibration detection position of an object.
[0047]
According to a seventh aspect of the present invention, in any one of the first to fifth aspects, the calculating means obtains the spectrum amplitude for each unit frequency at the vibration detection position of the measured object by frequency analysis. In addition, it is possible to provide a non-contact vibration detection device that can obtain a desired vibration behavior of a vibration detection position of an object to be measured.
[0048]
According to an eighth aspect of the present invention, in any one of the first to fifth aspects, the calculating means performs time-frequency analysis to calculate a unit frequency component of a unit frequency at a unit time at a vibration detection position of the device under test. Since the amplitude is obtained, it is possible to provide a non-contact vibration detection device capable of obtaining a desired vibration behavior at a vibration detection position of the measured object.
[0049]
According to a ninth aspect of the present invention, in any one of the first to fifth aspects, the calculating means performs time-series analysis to determine a standard deviation or a damping per unit time at the vibration detection position of the measured object. Since one or both of the ratios are obtained, it is possible to provide a non-contact vibration detection device that can obtain a desired vibration behavior of the vibration detection position of the measured object.
[0050]
According to a tenth aspect of the present invention, in the case where the object to be measured is a plurality of aperture grills provided in a color cathode ray tube, the non-contact vibration detecting device according to any one of the first to ninth aspects. Means for scanning each detecting means in the direction in which the aperture grills are arranged, and at the time of scanning, read a level change of a signal detected by each detecting means and determine an irradiation position of each detecting means. Since there is provided a means for determining whether the vehicle has reached the grill, it is possible to provide a non-contact vibration detection device that can easily determine which aperture grill has been reached.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of an aperture grill according to a first embodiment of the present invention.
FIG. 2 is a diagram illustrating a configuration of a non-contact vibration detection device according to the first embodiment of the present invention.
FIG. 3 is a diagram illustrating calculation results when measurement is performed using the non-contact vibration detection device illustrated in FIG. 2;
FIG. 4 is a diagram illustrating calculation results when measurement is performed using the non-contact vibration detection device illustrated in FIG. 2;
FIG. 5 is a diagram illustrating a calculation result when measurement is performed using the non-contact vibration detection device illustrated in FIG. 2;
FIG. 6 is a diagram illustrating calculation results when measurement is performed using the non-contact vibration detection device illustrated in FIG. 2;
FIG. 7 is a diagram illustrating calculation results when measurement is performed using the non-contact vibration detection device illustrated in FIG. 2;
FIG. 8 is a diagram showing a calculation result when measurement is performed using the non-contact vibration detection device shown in FIG. 2;
FIG. 9 is a diagram showing calculation results when measurement is performed using the non-contact vibration detection device shown in FIG. 2;
FIG. 10 is a diagram showing a configuration of a conventional aperture grill mask.
[Explanation of symbols]
2 aperture grille, 3 damping wire, 6 color cathode ray tube,
7 panel glass, 8 funnel glass, 9 first detection means,
10 second detecting means, 11 irradiation position detecting means, 11a camera,
11b first monitor, 12 adjusting means, 13 second stage,
13a support, 14 third stage, 15 moving means,
15a direction sensing sensor, 16 amplifier circuit, 17 calculating means,
18 A / D conversion circuit, 19 CPU, 20 second monitor.

Claims (10)

A plurality of detection means for simultaneously extracting the vibration of the object to be measured from the plurality of directions of the object to be measured in a plurality of directions using irradiation light in a non-contact manner, and an irradiation position detection means for detecting each aim and each focus of each of the detection means; Adjusting means for adjusting each of the detecting means based on the detection result of the irradiating position detecting means so that the irradiating position of each of the detecting means coincides with the vibration detecting position of the object to be measured; and Moving means for setting the positional relationship between each of the detection means and the object to be measured in a range where an adjustment operation for matching the irradiation position of each of the detection means to the vibration detection position of the object to be measured is possible, A non-contact vibration detecting device, comprising: a calculating unit that converts a signal extracted by each of the detecting units into a vector to obtain a desired plurality of vibration behaviors at a vibration detection position of the object under measurement. 2. The non-contact vibration detecting device according to claim 1, wherein three detecting means are provided. The non-contact vibration detecting device according to claim 1, wherein the irradiation position detection unit is formed so that the irradiation position detection unit can be visually detected when the irradiation light of each detection unit is visible light. 4. The moving means according to claim 1, wherein the moving means comprises a first moving stage on which the object to be measured is placed and the object to be measured can be moved in an XY plane. Non-contact vibration detection device. The adjusting means includes a second stage in which each detecting means is provided and each irradiation position can be moved in the Z-axis direction, and the adjusting means includes the respective detecting means and changes the inclination of each irradiation light and the position in the X-axis direction. The non-contact vibration detecting device according to any one of claims 1 to 4, further comprising a third movable stage. The non-contact vibration detecting device according to any one of claims 1 to 5, wherein the calculating means obtains a vibration behavior in an arbitrary plane at a vibration detection position of the measured object. 6. The non-contact vibration detecting device according to claim 1, wherein the calculating means obtains a spectrum amplitude for each unit frequency at a vibration detecting position of the measured object by frequency analysis. The non-contact vibration according to any one of claims 1 to 5, wherein the calculating means obtains an amplitude of a unit frequency component per unit time at a vibration detection position of the measured object by a time frequency analysis. Detection device. 6. The method according to claim 1, wherein the calculating means obtains one or both of a standard deviation and a damping rate per unit time at a vibration detection position of the device under test by a time series analysis. A non-contact vibration detecting device according to item 1. In the case where the object to be measured is a plurality of aperture grills arranged on a color cathode ray tube, the moving means of the non-contact vibration detecting device according to any one of claims 1 to 9, further comprises: Means for scanning in the direction in which the grills are arranged, and reading the level change of the signal detected by each of the detecting means during the scanning to determine which of the aperture grills the irradiation position of each of the detecting means has reached A non-contact vibration detecting device, comprising:

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