JP3595989B2

JP3595989B2 - Carrier clamping apparatus and method, and master disc exposure apparatus

Info

Publication number: JP3595989B2
Application number: JP25417694A
Authority: JP
Inventors: 祐一安芸
Original assignee: Sony Corp
Current assignee: Sony Corp
Priority date: 1994-09-26
Filing date: 1994-09-26
Publication date: 2004-12-02
Anticipated expiration: 2019-12-02
Also published as: JPH0894895A

Description

【０００１】
【産業上の利用分野】
本発明は、例えば光ディスクの原盤を作成するための原盤露光装置において、その光学機能素子等が取り付けられているキャリアを光学ベンチ上で移動調整させ、その調整後の位置で固定するためのキャリアのクランプ機構（装置及び方法）等に関するものである。
【０００２】
【従来の技術】
光ディスクの原盤を作成するための原盤露光装置においては、その光学機能素子等が取り付けられているキャリアを光学ベンチのレール上で移動調整させ、その調整後の位置でキャリアをレールに固定してクランプする構造が採られている。
【０００３】
図３は、従来におけるクランプ機構の一例を示す概略縦断側面図である。図３において、符号１は図示せぬ装置本体等に固定される光学ベンチ（以下「レール１」と言う）、２はレール１上にスライド自在に取り付けられたキャリア、３はレール１にキャリア２を固定するための固定ネジであり、図示しないがキャリア２上には光学機能素子等が一体移動可能に取り付けられる。
【０００４】
さらに詳述すると、レール１は装置本体に固定されるベース部１ａと、このベース部１ａの一面より突出された本体部１ｂとを一体に有している。また、本体部１ｂの上下両側面には、先端側に進むに従って次第に外側へ向かう傾斜面２ａ，２ｂをそれぞれ有してなる断面略楔状をした係止用の翼部１ｃ，１ｄが一体に形成されており、さらに本体部１ｂの先端面は平面として形成されている。
【０００５】
一方、キャリア２の一面側には、レール１における本体部１ａの翼部１ｃ，１ｄが設けられている側を受け入れるのに十分な大きさの凹所４が形成されている。なお、この凹所４は両端が開口された溝状に形成されており、また凹所４内には翼部１ｃと対応した位置に、翼部１ｃが圧入係合される断面Ｖ字状をした係合溝５が形成されている。加えて、本体部１ａの翼部１ｄと対応しているキャリア２の他側面にはネジ孔６が形成されており、このネジ孔６に固定ネジ３のネジ部３ａがネジ込まれ、このネジ部３ａの先端がレール１の傾斜面２ａに当接可能となっている。
【０００６】
そして、この構造ではレール１にキャリア２を取り付ける場合、固定ネジ３のネジ部３ａが取り付けの邪魔とならない位置まで退避させておき、その後から凹所４内に本体部１ｂを挿入させ、かつ翼部１ｃを係合溝５内に係合させた状態にする。次いで、固定ネジ３をねじ込んで行くと、ネジ部３ａの先端がレール１の傾斜面２ａに当接される。また、さらに固定ネジ３をネジ込んで行くとキャリア２がレール１に対して図３中の矢印Ｆ方向の力を受け、翼部１ｃと係合溝５とを強く噛み合わせて、レール１にキャリア２をクランプすることができる。図３は、このクランプ状態を示している。
【０００７】
しかしながら、この構造では、強い保持力を得ようとして固定ネジ３を強くねじ込んで、大きなねじりトルクを与えると、ネジ部３ａの先端がレール１の斜面２ａに食い込んで傷を与えたり、またネジ部３ａの先端が傾斜面２ａ上を滑ってネジ孔６の部分にモーメント荷重がかかり、図４に示すようにネジ孔６の部分を変形あるいは破損してしまう問題がある。したがって、この構造では、各部材に損傷を与えない範囲のねじりトルクしか許容できないために保持力が弱く、また締め付けトルクも小さいために簡単に緩んでしまうと言う問題点があった。
【０００８】
そこで、この問題を解決する手段として、図５に示すような構造が従来より提案されている。図５において、図３と同一符号を付したものは図３と同一のものを示している。また、図５に示す構造は、図３に示した従来構造に当て駒７を付加した構造となっている。
【０００９】
さらに詳述すると、当て駒７は、凹所４内に配置されてレール１の傾斜面２ａに当接される板状をした第１の部材７ａと、この第１の部材７ａと対向して設けられキャリア２の外面側に配置される板状をした第２の部材７ｂと、第１の部材７ａと第２の部材７ｂとの間を連結している板状をした第３の部材７ｃとを一体に有して、断面略コ字状に形成されている。また、第２の部材７ｂには第１の部材７ａに向かって固定ネジ３が緩く貫通できる脱落防止用の孔８が形成されているとともに、第１の部材７ａの第２の部材７と対向している面には、固定ネジ３の先端が受け入れられて位置決めされる穴９が孔８と対応して形成されている。加えて、第１の部材７ａのレール１の傾斜面２ａと対向する面には、傾斜面２ａと密着当接可能な傾斜面１０が形成されている。
【００１０】
そして、この当て駒７は、凹所４内に第１の部材７ａを挿入させるとともに第２の部材７ｂをキャリア２の外側に配置し、かつキャリア２のネジ孔６に第２の部材７ｂの脱落防止用の孔８を対応させ、さらに脱落防止用の孔８を通して第２の部材７の外側から挿入された固定ネジ３をネジ孔６に螺合させることによって、固定ネジ３を介してキャリア２に取り付けられる。
【００１１】
また、この当て駒７を用いた構造において、レール１にキャリア２を取り付ける場合は、翼部１ｃを係合溝５に係合させてキャリア２の凹所４内にレール１を入れるのに邪魔とならない位置まで当て駒７を退避させておくことが出来る状態に固定ネジ３を戻しておく。そして、翼部１ｃを係合溝５に係合させて、キャリア２の凹所４内にレール１が入れられた状態にキャリア２が取り付けられたら、固定ネジ３をねじ込んで行く。すると、この固定ネジ３がねじ込まれて行くのに伴って、当て駒７も固定ネジ３に押されてレール１側に移動され、第１の部材７ａの傾斜面１０がレール１の傾斜面２ａに当接される。また、さらに固定ネジ３をネジ込んで行くと、キャリア２がレール１及び当て駒７に対して図５中の矢印Ｆ方向の力を受け、翼部１ｃと係合溝５とを強く噛み合わせるとともに、第１の部材７ａの傾斜面１０をレール１の傾斜面２ａに強く圧接させて、レール１にキャリア２をクランプすることができる。図５は、このクランプ状態を示している。
【００１２】
この構造では、キャリア２を固定ネジ３で固定する際に、レール１と固定ネジ３との間に配置された当て駒７によって、固定ネジ３の先端が直接レール１に当たらないようにしていて、より面積の広い当て駒７の接触面（傾斜面１０）で推力を伝達し、レール面の接触応力を緩和して傷等を与えにくくすることができるとともに、より大きなねじりトルクを与えることができる。
【００１３】
【発明が解決しようとする課題】
しかしながら、図５に示した従来構造では、当て駒７の第１の部材７ａと第２の部材７ｂとの間が大きく離れていて、当て駒７を介して締め付けたときに、第２の部材７ｂとキャリア２との間に大きな隙間ｘが形成されている。
このため、より大きなねじりトルクを与えると、図６に示すように、当て駒７が固定ネジ３の推力により、レール１の傾斜面２ａを滑ってモーメントがかかり、ネジ孔６を変形してしまう問題があった。また、さらに大きなねじりトルクを与えると、当て駒７がベース部１ａの裏面に接触し、キャリア２におけるネジ孔６の周辺部分を外側に変形させて、キャリア２の全体を外側へ浮き上がらせてしまう。このため、キャリア２上に搭載されるレンズやミラー等の光学機能素子の位置精度に狂いが生じてしまう問題点があった。
【００１４】
本発明は、上記問題点に鑑みてなされたものであり、その目的は固定ネジの締め付けトルクをレールとキャリアとの接触面に有効に作用させて、きわめて強固な保持力を得ることができる構造にしたキャリアのクランプ機構（装置及び方法）等を提供することにある。他の目的は、以下に説明する内容の中で順次明らかにして行く。
【００１５】
【課題を解決するための手段】
以上の目的を達成するため、請求項１の発明にあっては、キャリアに形成された溝状の凹所内にレールを配置するとともに、前記キャリアの一側に形成されているネジ孔に螺合されて前記凹所内に突出されている固定ネジのねじりトルクを前記レールの一側に与え、このねじりトルクで前記レールの他側に前記キャリアを圧接させて、前記キャリアを前記レールに固定するキャリアのクランプ装置において、前記固定ネジと前記レールとの間に当て駒を配置し、前記固定ネジのねじりトルクを前記当て駒を介して前記レールの一側に与えるとともに、その最終ネジ込み位置で前記キャリアの外側面に近接配置されて、前記レールに対する前記キャリアの浮き上がりを抑えるための浮き上がり防止部を前記当て駒に設けたことを特徴としている。
又、請求項６の発明は、キャリアに形成された溝状の凹所内にレールを配置し、前記キャリアの一側に貫通して形成されているネジ孔に螺合されて前記凹所内に突出されている固定ネジのねじりトルクを前記レールの一側に与え、このねじりトルクで前記レールの他側に前記キャリアを圧接させて、前記キャリアを前記レールに固定するキャリアのクランプ方法において、前記凹所内に配置されて前記レールの一側に当接される第１の部材、該第１の部材と対向して設けられ前記キャリアの外面に配置される浮き上がり防止部材としての第２の部材、前記第１の部材と前記第２の部材との間を連結している第３の部材を一体に有した当て駒を用い、前記固定ネジと前記レールとの間に前記当て駒を配置し、前記固定ネジのねじりトルクを前記当て駒の第１の部材を介して前記レールの一側に与えるとともに、前記固定ネジの最終ネジ込み位置で前記キャリアの外側面に前記当て駒の第２の部材を近接配置することにより、前記レールに対する前記キャリアの浮き上がりを抑えることを特徴としている。
【００１６】
【作用】
この構成によれば、当て駒の回転支点は、キャリアと浮き上がり防止部とが隣接して配置されている部分となるが、この部分ではキャリアと浮き上がり防止部との間が近接しているので、当て駒がレールと離れる方向に回転しようとした場合には、浮き上がり防止部がキャリアの外面に当接されて回転が抑えられる。したがって、固定ネジのねじりトルクは、概ね固定ネジの軸方向にしか加わらないので、固定ネジの締め付けトルクによる保持力が、レールとキャリアの全ての接触面に有効に伝達されて、きわめて強固な保持が可能となる。また、ネジ機構本来の強度限界までネジ部周辺が有害な変形や損傷を受けることがないので、最大限の締め付けトルクを付与することができ、さらに強固な保持が可能となる。
【００１７】
【実施例】
以下、本発明の実施例について図面を用いて詳細に説明する。
図１は本発明の一実施例として示すクランプ機構（装置及び方法）の概略縦断側面図である。この実施例は図３乃至図６に示した従来構造の場合と同様に、光ディスクの原盤を作成するための原盤露光装置において、その光学機能素子等が取り付けられるキャリアをレールに取り付ける場合を一例としている。また、図１において図３乃至図６と同一符号を付したものは図３乃至図６と同一のものを示している。
【００１８】
そして、この構造では、大きくは図示せぬ装置本体等に固定される光学ベンチ１（以下「レール１」と言う）と、このレール１上にスライド自在に取り付けられたキャリア２と、レール１にキャリア２を固定するための固定ネジ３と、この固定ネジ３とレール１との間に介装された当て駒７とで構成されており、また図示しないがキャリア２上には光学機能素子等が一体移動可能に取り付けられる。
【００１９】
さらに詳述すると、レール１は装置本体に固定されるベース部１ａと、このベース部１ａの一面より突出された本体部１ｂとを一体に有している。また、本体部１ｂの上下両側面には、先端側に進むに従って次第に外側へ向かう傾斜面２ａ，２ｂをそれぞれ有してなる断面略楔状をした係止用の翼部１ｃ，１ｄが一体に形成されており、さらに本体部１ｂの先端面は平面として形成されている。
【００２０】
一方、キャリア２の一面側には、レール１における本体部１ｂの翼部１ｃ，１ｄが設けられている側を受け入れるのに十分な大きさの凹所４が形成されている。なお、この凹所４は両端が開口された溝状に形成されており、また凹所４内には翼部１ｃと対応した位置に、翼部１ｃが圧入係合される断面Ｖ字状をした係合溝５が形成されている。加えて、本体部１ｂの翼部１ｄと対応しているキャリア２の他側面にはネジ孔６が形成されており、このネジ孔６に固定ネジ３のネジ部３ａがネジ込まれ、このネジ部３ａの先端がレール１の傾斜面２ａに当接可能となっている。
【００２１】
当て駒７は、凹所４内に配置されてレール１の傾斜面２ａに当接される板状をした第１の部材７ａと、この第１の部材７ａと対向して設けられキャリア２の外面側に配置される板状をした浮き上がり防止部材としての第２の部材７ｂと、第１の部材７ａと第２の部材７ｂとの間を連結している板状をした第３の部材７ｃとを一体に有して、断面略コ字状に形成されている。また、第２の部材７ｂには第１の部材７ａに向かって固定ネジ３が緩く貫通できる脱落防止用の孔８が形成されているとともに、第１の部材７ａの第２の部材７と対向している面には、固定ネジ３の先端が受け入れられて位置決めされる穴９が孔８と対応して形成されている。加えて、第１の部材７ａのレール１の傾斜面２ａと対向する面には、傾斜面２ａと密着当接可能な傾斜面１０が形成されている。
【００２２】
そして、この当て駒７は、凹所４内に第１の部材７ａを挿入させるとともに第２の部材７ｂをキャリア２の外側に配置し、かつキャリア２のネジ孔６に第２の部材７ｂの脱落防止用の孔８を対応させ、さらに脱落防止用の孔８を通して第２の部材７の外側から挿入された固定ネジ３をネジ孔６に螺合させることによって、固定ネジ３を介してキャリア２に取り付けられる。
【００２３】
また、この構造において、レール１にキャリア２を取り付ける場合は、翼部１ｃを係合溝５に係合させて、キャリア２の凹所４内にレール１を入れるのに邪魔とならない位置まで当て駒７を退避させておくことが出来るように、固定ネジ３を戻しておく。そして、翼部１ｃを係合溝５に係合させて、キャリア２の凹所４内にレール１が入れられた状態にキャリア２が取り付けられたら、固定ネジ３をねじ込んで行く。すると、この固定ネジ３がねじ込まれて行くのに伴って、当て駒７も固定ネジ３に押されてレール１側に移動され、第１の部材７ａの傾斜面１０がレール１の傾斜面２ａに当接される。
また、さらに固定ネジ３をネジ込んで行くと、キャリア２がレール１及び当て駒７に対して図５と同様の矢印Ｆ方向の力を受け、翼部１ｃと係合溝５とを強く噛み合わせるとともに、第１の部材７ａの傾斜面１０をレール１の傾斜面２ａに強く圧接させて、レール１にキャリア２をクランプすることができ、この状態では空き上がり防止部材としての第２の部材７ｂとキャリア２との間が極めて接近した状態となる。図１は、このクランプ状態を示している。なお、第２の部材７ｂとキャリア２との間の隙間ｓは、組立時における各部材の寸法公差を加味して設けられ、理想的には零に極めて近い状態に設定される。ここで、完全に零として場合には、締結力が低下することになるので、多少の隙間ｓは必要である。
【００２４】
そして、さらに強い保持力を得ようとして、さらに大きなねじりトルクを固定ネジ３に与えると、図２に示すように、当て駒７が固定ネジ３の推力により、レール１の傾斜面２ａを滑るためモーメント荷重がかかり、ネジ孔６のガタ、または弾性変形の範囲内で、固定ネジ３が若干傾きながら前進するが、当て駒７の脱落防止用の孔８を有する第２の部材７ｂがキャリア２の外面に接触して隙間ｓがなくなり、当て駒７の回転が抑えられて、この当て駒７がレール１の傾斜面２ａを滑ることを規制する。このため、固定ネジ３のねじ推力は、レール１の傾斜面２ａを滑る方向の力とレール１の傾斜面２ａと当て駒７のレール接触面（傾斜面１０）とが当接された面の垂直方向の接触力として作用する回転力とに分散されてほぼ釣り合い、ネジ孔６の部分には概ね軸方向にだけしか力が加わらないため、キャリア２等に不要な変形を起こさせることがない。
【００２５】
したがって、本実施例の構造によれば、固定ネジ３のねじりトルクは、概ね固定ネジ３の軸方向にしか加わらないので、固定ネジ３の締め付けトルクによる保持力が、レール１とキャリア２の全ての接触面に有効に伝達され、きわめて強固な保持が可能となる。また、ネジ機構本来の強度限界までネジ部周辺が有害な変形や損傷を受けることがないので、最大限の締め付けトルクを付与することができ、さらに強固な保持が可能となり、外力、または外部振動等によって簡単に緩んでしまうこともなく、長期間安定した強い締結力による保持性能を発揮する。これにより、各光学素子の位置精度が向上し、光学系の品質を安定させることができる。さらに、この精度向上を、単純で、かつ簡単な機構構成と、容易な加工及び組立だけで実現できるので、極めて安価で高精度なクランプ機構が得られる。
加えて、キャリア２を固定ネジ３で固定する際に、レール１と固定ネジ３との間に配置された当て駒７により、固定ネジ３の先端が直接レール１に当たらないようにしていて、より面積の広い当て駒７の接触面（傾斜面１０）で推力を伝達し、レール面の接触応力を緩和しているので、傷等を与えにくく、より大きなねじりトルクを与えて保持することができる。
【００２６】
なお、上記実施例では、光ディスクの原盤を作成するための原盤露光装置に適用した場合について説明したが、この原盤露光装置に限ることなく、分光器や、干渉計、レーザー発振器、その他の光学系を有する測定装置、露光装置、実験装置においても同様にして適用できるものである。
【００２７】
【発明の効果】
以上説明したとおり、本発明によれば、当て駒の回転支点は、キャリアと浮き上がり防止部材とが隣接して配置されている部分となるが、この部分ではキャリアと浮き上がり防止部材との間が近接しているので、当て駒がレールと離れる方向に回転しようとした場合には、浮き上がり防止部材がキャリアの外面に当接されて回転が抑えられる。
したがって、固定ネジのねじりトルクは、概ね固定ネジの軸方向にしか加わらないので、固定ネジの締め付けトルクによる保持力が、レールとキャリアの全ての接触面に有効に伝達されて、きわめて強固な保持が可能となる。
また、ネジ機構本来の強度限界までネジ部周辺が有害な変形や損傷を受けることがないので、最大限の締め付けトルクを付与することができ、さらに強固な保持が可能となる等の効果が期待できる。
【図面の簡単な説明】
【図１】本発明の一実施例として示すクランプ機構の概略縦断側面図である。
【図２】クランプ力を強固に効かした状態で示す本発明の一実施例として示すクランプ機構の概略縦断側面図である。
【図３】従来機構の一例を示す概略縦断側面図である。
【図４】図４に示した従来機構の問題点を説明するための概略縦断側面図である。
【図５】従来機構の他の例を示す概略縦断側面図である。
【図６】図５に示した従来機構の問題点を説明するための概略縦断側面図である。
【符号の説明】
１レール
２キャリア
２ａ傾斜面
２ｂ傾斜面
３固定ネジ
４凹所
５係合溝
６ネジ孔
７当て駒
７ａ第１の部材
７ｂ第２の部材（浮き上がり防止用部材）
７ｃ第３の部材
８貫通孔（脱落防止用孔）
９位置決め用穴
１０傾斜面[0001]
[Industrial applications]
The present invention provides, for example, a master exposure apparatus for producing a master of an optical disc, in which a carrier on which an optical functional element or the like is mounted is moved and adjusted on an optical bench, and a carrier for fixing the carrier at the adjusted position is used. The present invention relates to a clamp mechanism (apparatus and method) and the like .
[0002]
[Prior art]
In a master disc exposure apparatus for producing a master disc of an optical disc, the carrier on which the optical functional elements are mounted is moved and adjusted on the rail of the optical bench, and the carrier is fixed to the rail at the adjusted position and clamped. The structure is adopted.
[0003]
FIG. 3 is a schematic vertical sectional side view showing an example of a conventional clamp mechanism. In FIG. 3, reference numeral 1 denotes an optical bench (hereinafter referred to as “rail 1”) fixed to an apparatus main body or the like (not shown), 2 denotes a carrier slidably mounted on the rail 1, and 3 denotes a carrier 2 on the rail 1. , And an optical function element or the like is mounted on the carrier 2 so as to be integrally movable (not shown).
[0004]
More specifically, the rail 1 integrally includes a base 1a fixed to the apparatus main body and a main body 1b protruding from one surface of the base 1a. In addition, locking wings 1c, 1d each having a generally wedge-shaped cross section and having inclined surfaces 2a, 2b gradually outwardly approaching the distal end are integrally formed on the upper and lower sides of the main body 1b. In addition, the distal end surface of the main body 1b is formed as a flat surface.
[0005]
On the other hand, on one surface side of the carrier 2, a recess 4 having a size large enough to receive the side of the rail 1 on which the wings 1c and 1d of the main body 1a are provided is formed. The recess 4 is formed in a groove shape having both ends opened. The recess 4 has a V-shaped cross section at which the wing 1c is press-fitted at a position corresponding to the wing 1c. The engaging groove 5 is formed. In addition, a screw hole 6 is formed on the other side surface of the carrier 2 corresponding to the wing portion 1d of the main body portion 1a, and the screw portion 3a of the fixing screw 3 is screwed into the screw hole 6, and the screw hole 6 is formed. The tip of the portion 3a can contact the inclined surface 2a of the rail 1.
[0006]
In this structure, when the carrier 2 is mounted on the rail 1, the carrier 3 is retracted to a position where the screw 3 a of the fixing screw 3 does not hinder the mounting, and then the main body 1 b is inserted into the recess 4, and The portion 1c is engaged with the engagement groove 5. Next, when the fixing screw 3 is screwed in, the tip of the screw portion 3a comes into contact with the inclined surface 2a of the rail 1. Further, when the fixing screw 3 is further screwed in, the carrier 2 receives a force in the direction of arrow F in FIG. 3 against the rail 1, and the wing 1 c and the engaging groove 5 are strongly engaged with each other. The carrier 2 can be clamped. FIG. 3 shows this clamped state.
[0007]
However, in this structure, when the fixing screw 3 is strongly screwed in order to obtain a strong holding force, and a large torsion torque is applied, the tip of the screw portion 3a cuts into the slope 2a of the rail 1 to cause damage, or There is a problem that the tip of 3a slides on the inclined surface 2a and a moment load is applied to the screw hole 6, and the screw hole 6 is deformed or damaged as shown in FIG. Therefore, in this structure, there is a problem that the holding force is weak because only torsion torque within a range that does not damage each member is allowed, and the tightening torque is small, so that the member is easily loosened.
[0008]
Therefore, as a means for solving this problem, a structure as shown in FIG. 5 has been conventionally proposed. In FIG. 5, the same reference numerals as in FIG. 3 denote the same components as in FIG. Further, the structure shown in FIG. 5 is a structure in which a contact piece 7 is added to the conventional structure shown in FIG.
[0009]
More specifically, the abutment piece 7 is a plate-shaped first member 7a disposed in the recess 4 and abutted on the inclined surface 2a of the rail 1, and is opposed to the first member 7a. A plate-shaped second member 7b provided on the outer surface side of the carrier 2 and a plate-shaped third member 7c connecting between the first member 7a and the second member 7b And are formed in a substantially U-shaped cross section. The second member 7b is formed with a hole 8 for preventing the fixing screw 3 from loosely penetrating toward the first member 7a. The hole 8 is opposed to the second member 7 of the first member 7a. A hole 9 in which the tip of the fixing screw 3 is received and positioned is formed corresponding to the hole 8. In addition, on the surface of the first member 7a facing the inclined surface 2a of the rail 1, there is formed an inclined surface 10 which can be in close contact with the inclined surface 2a.
[0010]
The contact piece 7 allows the first member 7 a to be inserted into the recess 4, the second member 7 b to be disposed outside the carrier 2, and the second member 7 b to be inserted into the screw hole 6 of the carrier 2. The holes 8 for preventing falling off correspond to the holes 8, and the fixing screws 3 inserted from the outside of the second member 7 into the screw holes 6 through the holes 8 for preventing falling off. 2 attached.
[0011]
In the structure using the abutment piece 7, when the carrier 2 is attached to the rail 1, the wing 1c is engaged with the engagement groove 5 to prevent the rail 1 from being inserted into the recess 4 of the carrier 2. The fixing screw 3 is returned to a state in which the abutment piece 7 can be retracted to a position where the fixing piece 3 does not move. Then, the wing portion 1c is engaged with the engagement groove 5, and when the carrier 2 is mounted in a state where the rail 1 is inserted into the recess 4 of the carrier 2, the fixing screw 3 is screwed. Then, as the fixing screw 3 is screwed in, the abutment piece 7 is also pushed by the fixing screw 3 and is moved toward the rail 1, and the inclined surface 10 of the first member 7 a is changed to the inclined surface 2 a of the rail 1. Contacted. When the fixing screw 3 is further screwed in, the carrier 2 receives a force in the direction of arrow F in FIG. 5 against the rail 1 and the abutment piece 7, and the wing 1c and the engagement groove 5 are strongly engaged. At the same time, the carrier 2 can be clamped to the rail 1 by strongly pressing the inclined surface 10 of the first member 7a against the inclined surface 2a of the rail 1. FIG. 5 shows this clamped state.
[0012]
In this structure, when the carrier 2 is fixed with the fixing screw 3, the tip of the fixing screw 3 does not directly hit the rail 1 by the abutment piece 7 disposed between the rail 1 and the fixing screw 3. The thrust can be transmitted on the contact surface (inclined surface 10) of the contact piece 7 having a larger area, the contact stress on the rail surface can be relieved, the scratches and the like can be hardly caused, and a larger torsion torque can be applied. it can.
[0013]
[Problems to be solved by the invention]
However, in the conventional structure shown in FIG. 5, the first member 7a and the second member 7b of the backing piece 7 are largely separated from each other. A large gap x is formed between 7b and the carrier 2.
For this reason, when a larger torsion torque is applied, the contact piece 7 slides on the inclined surface 2 a of the rail 1 by the thrust of the fixing screw 3 to apply a moment to deform the screw hole 6 as shown in FIG. 6. There was a problem. Further, when a larger torsion torque is applied, the abutment piece 7 comes into contact with the back surface of the base portion 1a, deforming the peripheral portion of the screw hole 6 in the carrier 2 outward, thereby causing the entire carrier 2 to float outward. . For this reason, there has been a problem that the positional accuracy of the optical functional element such as a lens or a mirror mounted on the carrier 2 is deviated.
[0014]
The present invention has been made in view of the above problems, and has as its object to provide a structure capable of effectively applying a tightening torque of a fixing screw to a contact surface between a rail and a carrier to obtain an extremely strong holding force. And a carrier clamping mechanism (apparatus and method) . Other objects will be clarified in the following description.
[0015]
[Means for Solving the Problems]
In order to achieve the above object, according to the first aspect of the present invention, a rail is arranged in a groove-shaped recess formed in a carrier and screwed into a screw hole formed on one side of the carrier. And a torsion torque of a fixing screw projecting into the recess is applied to one side of the rail, and the carrier is pressed against the other side of the rail by the torsion torque to fix the carrier to the rail. In the clamping device, a contact piece is disposed between the fixing screw and the rail, and the torsion torque of the fixing screw is applied to one side of the rail via the contact piece, and the final screwing position is set at the final screwing position. disposed close to the outer surface of the carrier, the lift preventing portion for suppressing floating of the carrier with respect to the rails is characterized in that provided in the abutting piece
According to a sixth aspect of the present invention, a rail is disposed in a groove-shaped recess formed in a carrier, and is screwed into a screw hole formed through one side of the carrier to project into the recess. A torsion torque of the fixing screw is applied to one side of the rail, and the carrier is pressed against the other side of the rail with the torsion torque to fix the carrier to the rail. A first member that is disposed in a place and abuts on one side of the rail, a second member that is provided to face the first member and that is disposed on an outer surface of the carrier and that serves as a floating prevention member; Using a contact piece integrally having a third member connecting the first member and the second member, disposing the contact piece between the fixing screw and the rail, The torsion torque of the fixing screw The second member of the abutment piece is provided on one side of the rail via the first member of the support piece, and the second member of the abutment piece is arranged close to the outer surface of the carrier at the final screwing position of the fixing screw. It is characterized in that the lifting of the carrier is suppressed.
[0016]
[Action]
According to this configuration, the rotation fulcrum of the contact piece is a portion where the carrier and the lifting prevention portion are arranged adjacent to each other, but since the carrier and the lifting prevention portion are close to each other at this portion, When the piece tries to rotate in a direction away from the rail, the lifting prevention portion is in contact with the outer surface of the carrier, and the rotation is suppressed. Therefore, since the torsion torque of the fixing screw is generally applied only in the axial direction of the fixing screw, the holding force due to the tightening torque of the fixing screw is effectively transmitted to all the contact surfaces between the rail and the carrier, and extremely strong holding is achieved. Becomes possible. Further, since the periphery of the screw portion is not harmfully deformed or damaged up to the original strength limit of the screw mechanism, a maximum tightening torque can be applied, and more firm holding is possible.
[0017]
【Example】
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic vertical sectional side view of a clamp mechanism (apparatus and method) shown as one embodiment of the present invention. In this embodiment, as in the case of the conventional structure shown in FIGS. 3 to 6, in a master exposure apparatus for manufacturing a master of an optical disc, a case where a carrier to which an optical functional element and the like are mounted is attached to a rail. I have. Also, in FIG. 1, components denoted by the same reference numerals as those in FIGS. 3 to 6 indicate the same components as those in FIGS. 3 to 6.
[0018]
In this structure, an optical bench 1 (hereinafter, referred to as a “rail 1”) fixed to an apparatus main body or the like (not shown), a carrier 2 slidably mounted on the rail 1, and a rail 1 It is composed of a fixing screw 3 for fixing the carrier 2 and an abutment piece 7 interposed between the fixing screw 3 and the rail 1. An optical function element or the like (not shown) is provided on the carrier 2. Are movably mounted.
[0019]
More specifically, the rail 1 integrally includes a base 1a fixed to the apparatus main body and a main body 1b protruding from one surface of the base 1a. In addition, locking wings 1c, 1d each having a generally wedge-shaped cross section and having inclined surfaces 2a, 2b gradually outwardly approaching the distal end are integrally formed on the upper and lower sides of the main body 1b. In addition, the distal end surface of the main body 1b is formed as a flat surface.
[0020]
On the other hand, the one side of the carrier 2, the main body portion 1 b of the wings 1c, 1d are recess 4 is formed large enough to accommodate the side provided in the rail 1. The recess 4 is formed in a groove shape having both ends opened. The recess 4 has a V-shaped cross section at which the wing 1c is press-fitted at a position corresponding to the wing 1c. The engaging groove 5 is formed. In addition, the other side of the carrier 2 which correspond to the wing portion 1d of the body portion 1 b and the screw hole 6 is formed, the threaded portion 3a of the fixing screw 3 into the screw hole 6 is screwed, this The tip of the screw portion 3a can contact the inclined surface 2a of the rail 1.
[0021]
The abutment piece 7 is a plate-shaped first member 7a that is disposed in the recess 4 and abuts against the inclined surface 2a of the rail 1, and is provided to face the first member 7a. A plate-shaped third member 7c, which connects the first member 7a and the second member 7b, to a second member 7b serving as a plate-shaped floating prevention member disposed on the outer surface side. And are formed in a substantially U-shaped cross section. The second member 7b is formed with a hole 8 for preventing the fixing screw 3 from loosely penetrating toward the first member 7a. The hole 8 is opposed to the second member 7 of the first member 7a. A hole 9 in which the tip of the fixing screw 3 is received and positioned is formed corresponding to the hole 8. In addition, on the surface of the first member 7a facing the inclined surface 2a of the rail 1, there is formed an inclined surface 10 which can be in close contact with the inclined surface 2a.
[0022]
The contact piece 7 allows the first member 7 a to be inserted into the recess 4, the second member 7 b to be disposed outside the carrier 2, and the second member 7 b to be inserted into the screw hole 6 of the carrier 2. The holes 8 for preventing falling off correspond to the holes 8, and the fixing screws 3 inserted from the outside of the second member 7 into the screw holes 6 through the holes 8 for preventing falling off. 2 attached.
[0023]
In this structure, when the carrier 2 is mounted on the rail 1, the wings 1 c are engaged with the engagement grooves 5 so that the wings 1 c are brought into a position where they do not hinder the rail 1 from being inserted into the recess 4 of the carrier 2. The fixing screw 3 is returned so that the piece 7 can be retracted. Then, the wing portion 1c is engaged with the engagement groove 5, and when the carrier 2 is mounted in a state where the rail 1 is inserted into the recess 4 of the carrier 2, the fixing screw 3 is screwed. Then, as the fixing screw 3 is screwed in, the abutment piece 7 is also pushed by the fixing screw 3 and is moved toward the rail 1, and the inclined surface 10 of the first member 7 a is changed to the inclined surface 2 a of the rail 1. Contacted.
When the fixing screw 3 is further screwed in, the carrier 2 receives a force in the direction indicated by the arrow F in FIG. 5 against the rail 1 and the abutment piece 7, and strongly engages the wing 1c with the engaging groove 5. At the same time, the inclined surface 10 of the first member 7a is strongly pressed against the inclined surface 2a of the rail 1 so that the carrier 2 can be clamped to the rail 1. In this state, the second member as the empty rising prevention member 7b and the carrier 2 are extremely close to each other. FIG. 1 shows this clamped state. The gap s between the second member 7b and the carrier 2 is provided in consideration of the dimensional tolerance of each member at the time of assembly, and is ideally set to a state very close to zero. Here, if it is completely set to zero, the fastening force will be reduced, so some gap s is required.
[0024]
When a larger torsion torque is applied to the fixing screw 3 in order to obtain a stronger holding force, the contact piece 7 slides on the inclined surface 2a of the rail 1 by the thrust of the fixing screw 3 as shown in FIG. takes a moment load, the screw holes 6 looseness or within the range of elastic deformation, but the fixing screw 3 moves forward while being slanted slightly second member 7b is career having hit a hole 8 for drop-off prevention piece 7, 2, the gap s disappears by contacting the outer surface of the rail 2, and the rotation of the abutment piece 7 is suppressed. For this reason, the screw thrust of the fixing screw 3 is the force in the direction of sliding on the inclined surface 2 a of the rail 1 and the surface of the contact surface between the inclined surface 2 a of the rail 1 and the rail contact surface (inclined surface 10) of the abutment piece 7. substantially balance are dispersed in the torque acting as a contact force in the vertical direction, since the only force only applied in a generally axial direction in a portion of the screw holes 6, that cause unwanted deformation career 2 etc. Absent.
[0025]
Therefore, according to the structure of the present embodiment, the torsion torque of the fixing screw 3 is generally applied only in the axial direction of the fixing screw 3, and the holding force due to the tightening torque of the fixing screw 3 is applied to both the rail 1 and the carrier 2. Is effectively transmitted to the contact surface of the base member, and extremely strong holding is possible. In addition, since the periphery of the screw portion is not harmfully deformed or damaged up to the original strength limit of the screw mechanism, the maximum tightening torque can be applied, and more secure holding is possible, and external force or external vibration It does not easily loosen due to, for example, and exhibits a long-term stable holding performance with a strong fastening force. Thereby, the positional accuracy of each optical element is improved, and the quality of the optical system can be stabilized. Further, since this improvement in accuracy can be realized only by a simple and simple mechanism configuration and easy processing and assembly, an extremely inexpensive and highly accurate clamping mechanism can be obtained.
In addition, when the carrier 2 is fixed with the fixing screw 3, the tip of the fixing screw 3 is prevented from directly touching the rail 1 by the contact piece 7 disposed between the rail 1 and the fixing screw 3. Thrust is transmitted on the contact surface (inclined surface 10) of the contact piece 7 having a larger area, and the contact stress on the rail surface is reduced, so that scratches and the like are less likely to occur, and a larger torsion torque can be given and held. it can.
[0026]
In the above embodiment, the case where the present invention is applied to a master exposure apparatus for producing a master of an optical disc has been described. However, the present invention is not limited to this master exposure apparatus, but may include a spectroscope, an interferometer, a laser oscillator, and other optical systems. The present invention can be similarly applied to a measuring apparatus, an exposure apparatus, and an experimental apparatus having the above.
[0027]
【The invention's effect】
As described above , according to the present invention , the rotation fulcrum of the contact piece is a portion where the carrier and the lifting prevention member are arranged adjacent to each other. In this portion, the carrier and the lifting prevention member are close to each other. Therefore, when the contact piece attempts to rotate in a direction away from the rail, the lifting prevention member is brought into contact with the outer surface of the carrier to suppress the rotation.
Therefore, the torsional torque of the fixing screw is applied only in the axial direction of the fixing screw, so that the holding force due to the tightening torque of the fixing screw is effectively transmitted to all contact surfaces between the rail and the carrier, and extremely strong holding is achieved. Becomes possible.
In addition, since the periphery of the screw portion is not harmfully deformed or damaged up to the original strength limit of the screw mechanism, it is possible to apply the maximum tightening torque, and it is expected to have the effect of enabling stronger holding etc. it can.
[Brief description of the drawings]
FIG. 1 is a schematic vertical sectional side view of a clamp mechanism shown as one embodiment of the present invention.
FIG. 2 is a schematic vertical sectional side view of a clamp mechanism shown as one embodiment of the present invention in a state where a clamping force is strongly applied.
FIG. 3 is a schematic vertical sectional side view showing an example of a conventional mechanism.
FIG. 4 is a schematic vertical sectional side view for explaining a problem of the conventional mechanism shown in FIG. 4;
FIG. 5 is a schematic vertical sectional side view showing another example of the conventional mechanism.
FIG. 6 is a schematic vertical sectional side view for explaining a problem of the conventional mechanism shown in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Rail 2 Carrier 2a Inclined surface 2b Inclined surface 3 Fixing screw 4 Depression 5 Engagement groove 6 Screw hole 7 Abutment piece 7a First member 7b Second member (lifting prevention member)
7c Third member 8 Through hole (dropout prevention hole)
9 Positioning hole 10 Slope

Claims

A rail is disposed in a groove-shaped recess formed in the carrier, and a torsion torque of a fixing screw that is screwed into a screw hole formed through one side of the carrier and protrudes into the recess. Is applied to one side of the rail, the carrier is pressed against the other side of the rail with this torsion torque, and a carrier clamping device for fixing the carrier to the rail,
Arranging a contact piece between the fixing screw and the rail, applying the torsion torque of the fixing screw to one side of the rail via the contact piece, and applying the torsion torque to the outer surface of the carrier at the final screwed position. A carrier clamping device , wherein a lifting prevention portion is provided on the abutment piece, which is arranged close to the rail and suppresses the lifting of the carrier with respect to the rail.

2. The carrier clamping device according to claim 1, wherein the fixing screw is mounted in a state where the fixing screw penetrates a lifting prevention portion of the contact piece to prevent the contact piece from falling off. 3.

The contact surface between the rail and the abutment piece is formed as an inclined surface on which a force in a direction in which the rail and the carrier are pressed against each other acts when the rail and the carrier are in contact with each other. 3. The carrier clamping device according to 2.

4. The carrier clamping device according to claim 1, wherein one side of the rail and one side of the carrier are engaged by a wing portion and an engagement groove. 5.

A master exposure apparatus having the carrier clamping apparatus according to claim 1.

A rail is arranged in a groove-shaped recess formed in the carrier, and the torsion torque of a fixing screw that is screwed into a screw hole formed through one side of the carrier and protruded into the recess is reduced. A method of clamping the carrier, which is applied to one side of the rail, presses the carrier against the other side of the rail with the torsion torque, and fixes the carrier to the rail,
A first member disposed in the recess and in contact with one side of the rail, a second member provided opposite to the first member and serving as a lifting prevention member disposed on an outer surface of the carrier; Using a contact piece integrally having a third member connecting the first member and the second member,
Disposing the contact piece between the fixing screw and the rail, applying the torsion torque of the fixing screw to one side of the rail via the first member of the contact piece, and screwing in the final screw of the fixing screw; A method of clamping a carrier, comprising: arranging a second member of the abutment piece close to an outer surface of the carrier at a position to prevent the carrier from floating on the rail.