JP3595710B2 - Method of manufacturing ink jet recording head - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to the production how the ink jet recording head for recording by discharging ink.
[0002]
[Prior art]
The ink jet recording apparatus is provided integrally or separately as an output terminal of an information processing apparatus such as a word processor and a computer, a copying apparatus combined with an information reading apparatus, a facsimile apparatus having an information transmitting / receiving function, and a cloth. It is widely used in machines for printing textiles. This ink jet recording apparatus has a feature that high-definition images can be recorded at a high speed by ejecting ink as minute droplets from an ejection port at a high speed. In particular, a method in which an electrothermal converter is used as an energy generator that generates energy used for discharging ink, and ink is discharged using foaming of the ink generated by the heat energy generated by the electrothermal converter The ink-jet recording apparatus of this type has attracted attention in recent years because it is suitable for high definition of images, high-speed recording performance, miniaturization of recording heads and apparatuses, and colorization.
[0003]
An ink jet recording head (hereinafter, also simply referred to as “head”) used in an ink jet recording apparatus is usually provided with a plurality of ejection ports. Electrothermal converters that generate thermal energy used for discharging ink from the discharge ports are provided on the substrate corresponding to the respective ink flow paths. The electrothermal converter mainly includes a heating resistor, electrode wiring for supplying power to the heating resistor, and an insulating protective film for protecting these.
[0004]
Many heads have a basic structure in which a substrate provided with an electrothermal converter and a top plate provided with ink passages are joined. Each of the ink passages included in the ink passage has an end opposite to the ejection port communicating with the common ink chamber, and the ink supplied from the ink tank is stored in the common ink chamber. The plurality of ink flow paths and the common ink chamber are collectively referred to as “ink paths”.
[0005]
The ink supplied to the common ink chamber is guided to each ink flow path from here, and forms a meniscus near the ejection port and is held. By selectively driving the electrothermal transducer in this state, the ink on the heating surface is rapidly heated and boiled by utilizing the generated thermal energy, and the ink is ejected from the ejection port based on this. I do.
[0006]
One conventional example of such a head manufacturing method is described in U.S. Pat. No. 5,030,317. FIG. 1 is a schematic perspective view for explaining the process. A solid layer 28 made of, for example, a positive photosensitive resin is provided on a portion where an ink passage is to be formed on a substrate 27 provided with an electrothermal converter 27 disposed so as to correspond to the ink passage. (A)). On top of this, a layer made of an active energy ray-curable material to be the ink passage wall forming member 22 is provided so as to cover the solid layer 8 (FIG. 4B). Further, a top plate 24 provided with a concave portion 29 communicating with the ink supply port 26 is further laminated thereon (FIG. 3C). Thereafter, a photomask 32 is provided on a portion corresponding to the common ink chamber, and an active energy ray is irradiated in the direction of the arrow to cure the irradiated portion of the active energy ray-curable material (FIG. 4D). Then, a solid layer removing liquid is introduced from the ink supply port 26 or the like as shown by the arrow (FIG. 10E), and the solid layer 28 is removed. Thus, an ink passage communicating with the discharge port 33 is formed (FIG. 6F).
[0007]
[Problems to be solved by the invention]
However, in such a method, the bonding strength between the layer made of the active energy ray-curable material that becomes the ink passage wall forming member 22 and the top plate 24 is biased, and a slight gap is formed between them. In some cases, ink leaks, which may affect the strength and durability of the head itself.
[0008]
An object of the present invention is to provide a method for manufacturing an ink jet recording head capable of easily manufacturing a high-precision ink jet recording head having excellent strength and durability with good workability.
[0009]
[Means for Solving the Problems]
As a means for solving the above-described problems, the present invention provides an energy generator used for discharging ink, and an ink passage communicating with the discharge port where the energy generator is arranged and discharges ink. A method for manufacturing an ink jet recording head provided on a substrate and bonding the substrate and a top plate, wherein a solid layer arranging step of providing a solid layer at the portion where the ink passage is to be formed on the substrate is provided. A wall member disposing step of providing a material in a pre-cured state to be a wall member on the top plate facing upward so as to be held at a side end portion of the top plate by utilizing surface tension; The top plate and the substrate are arranged such that the material before curing provided on the top plate in the member disposing step covers the solid layer provided on the substrate in the solid layer disposing step. Joining process in which the parts are brought close to each other , There is provided a method of manufacturing an ink-jet recording head having a solid layer removing step of forming the ink passage and removing the solid layer.
[0010]
The present invention also provides a high-precision inkjet recording head manufactured by such a manufacturing method and having excellent strength and durability.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to these, and can be appropriately changed within the scope of the claims.
[0012]
(Example 1)
2 (1) to 2 (7) are schematic cross-sectional views showing the steps of manufacturing the ink jet recording head according to Embodiment 1 of the present invention.
[0013]
Figure 2 (1):
The first solid layer 2 having a thickness of 20 μm is formed at a portion where an ink passage is to be formed on a 2 mm-thick aluminum substrate 1 provided with two rows of electrothermal transducers 14 that generate thermal energy as energy used for discharging ink. It was formed in thickness. The solid layer 2 is removed after each of the steps described below, and the remaining space forms an ink passage. As the solid layer 2, "MF-58" manufactured by Tokyo Ohka was used.
[0014]
Fig. 2 (2):
A room temperature curable resin 8a was applied as a bonding layer to a portion of the substrate 1 where the solid layer 2 was not provided by a dispenser. As a room temperature curable resin 8a, 30 parts of a filler were added to a mixture of “Epicoat 828” (parts by weight 100) manufactured by Yuka Shell Epoxy Co., Ltd. and “Fuji Cure-6010” (parts by weight 50) manufactured by Fuji Chemical Industry Co., Ltd. What was further mixed by weight% was used. This was applied using a G19 needle at a discharge pressure of 0.8 kg / cm ² , an application speed of 30 mm / sec, and a distance between the substrate and the needle of 0.3 mm. This was further heated in an oven at 75 ° C. for 1 hour to bring the room temperature curable resin 8a into a semi-cured state.
[0015]
Fig. 2 (3):
As the top plate 5, an aluminum plate having a supply port 4 and having a thickness of 2 mm and subjected to an ink-resistant treatment was used. With the top plate 5 facing upward, a room temperature curable resin 8 serving as a wall member of an ink passage was applied from a dispenser 8b to a central portion (2.0 mm in width). The cold-setting resin 8 is obtained by removing the filler from the cold-setting resin 8a. This was applied using a G21 needle at a discharge pressure of 3.0 kg / cm ² , an application speed of 30 mm / sec, and a distance between the top plate and the needle of 0.2 mm. The room-temperature-curable resin 8 does not contain a filler, but is held at a relatively large thickness in a convex shape by surface tension at a side end of the top plate. This was left under vacuum at room temperature for 1 hour.
[0016]
The reason why the heating in (2) is performed under vacuum (under reduced pressure) while the heating is performed under atmospheric pressure is as follows. Since the adhesive layer is mainly for bonding the substrate 1 and the top plate 5, even if there are some bubbles in the resin, there is not much problem. On the other hand, the cold-setting resin 8 of (3) is in direct contact with the solid layer 2 which will later become a fine ink flow path. May be connected. Therefore, the defoaming process is performed under vacuum. Here, it may be performed under vacuum from the stage of the resin application step.
[0017]
Although the step of FIG. 2 (3) has been described as being performed after the steps of FIGS. 2 (1) and (2), the step of FIG. 2 (1) and FIG. You may go.
[0018]
Fig. 2 (4):
The substrate 1 and the top plate 5 were joined with the top plate 5 facing down. Since the resin is in a pre-cured state, the two are joined under relatively light pressure. Here, the common ink chamber 10 is not filled with resin, but if resin enters, it may be cut to reach the solid layer 2 as shown in FIG. 7 (5). Thereafter, the main curing treatment was performed at 30 ° C. for 24 hours and then at 120 ° C. for 1 hour.
[0019]
FIG. 3A is a schematic perspective view showing an ink jet recording head during manufacture corresponding to this step. In FIG. 3A, three pairs (a total of six heads) are formed on one substrate 1. FIG. 2D is a schematic cross-sectional view taken along a dashed line AA ′ in FIG.
[0020]
Fig. 2 (5):
The center of the row of electrothermal transducers 14 was cut with a diamond saw having a blade width of 1 mm (along the dashed line BB 'in FIG. 3A) and separated into two heads. Note that several beams (not shown) are provided at the supply port 4 portion of the top plate 5. That is, since the top plate 5 is not completely separated from the front and the rear of the common ink chamber 10, the strength is maintained. FIG. 3B is a schematic perspective view showing an ink jet recording head during manufacture corresponding to this step.
[0021]
Fig. 2 (6):
Ethyl cellosolve was sprayed from above the top plate 5 to remove the solid layer 2, and an ink passage communicating with the discharge port 9 was opened.
[0022]
Fig. 2 (7):
The lid plate 13 was bonded on the top plate 5. Next, ink supply members 15 and 15a were attached to the supply ports 4 located at both ends of the common ink chamber 10 of the head. FIG. 4 is a schematic front view of the ink jet recording head manufactured according to the present embodiment as viewed from the direction of arrow B.
[0023]
(Example 2)
FIG. 5 is a schematic cross-sectional view illustrating a manufacturing process of the inkjet recording head according to the second embodiment of the present invention. The main difference from the first embodiment is that, in the present embodiment, the thickness of the top plate 5 is partially different, and no resin is applied to the substrate 1 side. As in this embodiment, if a portion corresponding to the plurality of ink flow paths is thinner than the other portions as the top plate, a so-called space for forming a space for filling a material to be a wall member of the ink passage is formed. This is preferable because the number of spacers can be reduced.
[0024]
Fig. 5 (1):
This is almost the same as FIG. 2A in the first embodiment.
[0025]
Fig. 5 (2):
As the top plate 5, an aluminum plate partially subjected to an ink-resistant treatment having a different thickness was used. The outer thickness h1 of the top plate 5 was 2 mm, and the difference h2 between the outer and inner thickness was 0.1 mm. First, a room temperature curable resin 8 (the same material as that applied to the top plate 5 in Example 1) was applied to the center portion (2.0 mm in width) of the top plate 5 under the same conditions as in Example 1. Next, the same cold-setting resin 8 as before was applied to both sides of the top plate at a discharge pressure of 0.2 kg / cm ² . On both sides, unlike the central part, resin may be applied thinly.
[0026]
FIGS. 5 (3) to (6):
This is almost the same as FIGS. 2 (4) to 2 (7) in the first embodiment.
[0027]
(Example 3)
FIG. 6 is a schematic cross-sectional view illustrating a manufacturing process of the inkjet recording head according to the third embodiment of the present invention. The main difference from the second embodiment is that there is no hole in the upper part of the top plate 5 in the present embodiment.
[0028]
Fig. 6 (1):
This is almost the same as FIG. 5A in the second embodiment.
[0029]
Fig. 6 (2):
As the top plate 5, an aluminum plate subjected to an ink-resistant treatment without a hole at the top was used. The numerical values of h1 and h2, other manufacturing conditions, and the like are almost the same as those in the second embodiment.
[0030]
Fig. 6 (3):
This is almost the same as FIG. 5C in the second embodiment.
[0031]
Fig. 6 (4):
This is almost the same as FIG. 5 (4) in the second embodiment. In this embodiment, since there is no hole in the upper part of the top plate 5, the strength is more effective than that of the second embodiment.
[0032]
Fig. 6 (5):
Since there is no hole in the upper part of the top plate 5, the removing liquid was sprayed from the side of the head (from the direction perpendicular to the paper surface) to remove the solid layer 2 and open the ink passage. As described above, in this embodiment, since the top plate having no hole at the top is used, it is not necessary to newly attach a lid plate.
[0033]
(Example 4)
7 (1) to 7 (7) are schematic cross-sectional views showing the steps of manufacturing an ink jet recording head according to Embodiment 4 of the present invention.
[0034]
Fig. 7 (1):
This is almost the same as FIG. 6A in the third embodiment.
[0035]
Fig. 7 (2):
As the top plate 5, an aluminum plate having a supply port 4 and having a thickness of 2 mm and not subjected to an ink-resistant treatment was used. With the top plate 5 facing upward, the room temperature curable resin 8 was applied to both sides (width 1.2 mm) from a dispenser 8b. This room temperature curable resin 8 is a mixture of “Epicoat 828” (parts by weight 100) manufactured by Yuka Shell Epoxy Co., Ltd. and “Fuji Cure-6010” (parts by weight 50) manufactured by Fuji Kasei Kogyo Co., Ltd. This was applied using a G21 needle at a discharge pressure of 2.0 kg / cm ² , an application speed of 30 mm / sec, and a distance between the top plate and the needle of 0.1 mm. The cold-setting resin 8 is maintained in a convex shape by surface tension at the end of the top plate. This was heated in an oven at 75 ° C. for 1 hour to obtain a semi-cured state.
[0036]
Fig. 7 (3):
The substrate 1 and the top plate 5 were joined with the top plate 5 facing down. Since the resin is in a semi-cured state, the two are joined under relatively light pressure. As a result, a resin layer having a thickness of about 100 μm was formed.
[0037]
Fig. 7 (4):
From the ink supply port 4, the same room temperature curable resin 8 as described above was filled and cured. Details were performed in the following procedure. First, the resin was filled up to below the top plate 5. Subsequently, vacuum defoaming treatment was performed at room temperature for 1 hour. Subsequently, the resin was heated at 30 ° C. for 24 hours and then at 120 ° C. for 1 hour to bring the resin into a fully cured state. Next, the resin was filled up to the upper portion of the supply port 4 and heated at 60 ° C. for 6 hours to bring the resin into a semi-cured state. The reason why the main hardened state is not set immediately is to prevent the substrate from warping due to the shrinkage upon hardening.
[0038]
Fig. 7 (5):
The ink chamber 10 was formed by cutting the resin 8 near the supply port 4 down to the solid layer 2 with a diamond saw narrower than the supply port 4. As a result, the resin covering the side surface of the top plate 5 functions as an ink-resistant layer. Next, heating was performed at 120 ° C. for 1 hour, and the resin that was in a semi-cured state in the previous step was fully cured. Here, even if the substrate is heated at 120 ° C., the amount of the resin to be fully cured is relatively small, so that the substrate does not warp.
[0039]
Fig. 7 (6):
The center of the row of electrothermal transducers 14 was cut with a diamond saw and separated into two heads.
[0040]
Fig. 7 (7):
Ethyl cellosolve was sprayed from above the top plate 5 to remove the solid layer 2 and open the ink passage.
[0041]
(Example 5)
FIG. 8 is a schematic cross-sectional view illustrating a manufacturing process of the inkjet recording head according to the fifth embodiment of the present invention. The main difference from the fourth embodiment is that, in the present embodiment, the resin applied to the top plate and the resin to be filled are different. Desirably, the former resin has a relatively high viscosity to form voids, and the latter resin has a relatively low viscosity in order to have high ink resistance and to be able to spread to fine parts.
[0042]
In the present embodiment, the same resin 8 as the cold-setting resin used in Example 4 was used as the filling resin, and the filler was further mixed with the same cold-setting resin as the coating resin by 30% by weight to increase the viscosity. Resin 8a was used.
[0043]
【The invention's effect】
Inkjet according to the present invention, since provided on the top plate where the material before curing state in which the wall member of the ink passage upward, the bonding strength between the wall member and the top plate is high, which is excellent in strength and durability A recording head can be manufactured. In addition, since the uncured material serving as the wall member of the ink passage is held at the side end of the top plate using surface tension, a wall member of the ink passage having a desired relatively large thickness is desired. it can be easily formed on site.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view for explaining a conventional example of a method for manufacturing an ink jet recording head.
FIG. 2 is a schematic cross-sectional view showing a manufacturing process of the inkjet recording head according to the first embodiment of the present invention, and shows the process in order from (1).
FIG. 3 is a schematic perspective view showing an inkjet recording head during manufacture, corresponding to a part of FIG. 2;
FIG. 4 is a schematic front view showing an ink jet recording head manufactured by the manufacturing method of FIG. 2;
FIG. 5 is a schematic cross-sectional view showing a manufacturing process of the ink jet recording head according to the second embodiment of the present invention, and shows the process in order from (1).
FIG. 6 is a schematic cross-sectional view showing a manufacturing process of the ink jet recording head according to the third embodiment of the present invention, and shows the process in order from (1).
FIG. 7 is a schematic cross-sectional view showing a process of manufacturing an ink jet recording head according to Example 4 of the present invention, and shows the process in order from (1).
FIG. 8 is a schematic cross-sectional view showing a process of manufacturing an ink jet recording head according to Embodiment 5 of the present invention, and shows the process in order from (1).
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Substrate 2 Solid layer 4 Supply port 5 Top plate 8 Room temperature curable resin 8a Room temperature curable resin 8b Dispenser 9 Discharge port 10 Common ink chamber 13 Cover plate 14 Electrothermal converters 15, 15a Ink supply members

Claims (8)

An energy generator used to discharge ink, and an ink passage communicating with a discharge port where the energy generator is disposed and discharges ink are provided on a substrate, and the substrate and a top plate are joined. In the method for manufacturing an ink jet recording head,
A solid layer disposing step of providing a solid layer at the ink passage formation scheduled portion on the substrate,
The material cured prior state in which the wall member of the ink passage, on the top plate and upwardly provided to be held by utilizing the surface tension at the side end portion of the top plate wall members disposed step When,
The top plate and the top plate are provided such that the material before curing provided on the top plate in the wall member providing step covers the solid layer provided on the substrate in the solid layer providing step. A bonding step of bringing the substrate into close proximity and bonding;
A solid layer removing step of removing the solid layer to form the ink passage;
A method of manufacturing an ink jet recording head, comprising: The method according to claim 1, wherein in the joining step, the top plate faces down and is joined to the substrate . 3. The method according to claim 1, wherein, in the step of disposing the wall member, the material in the uncured state is provided on the top plate, and then left under reduced pressure. 4. . The inkjet recording according to any one of claims 1 to 4, further comprising a main curing step of fully curing the material in a state before curing between the joining step and the solid layer removing step. Head manufacturing method. The method according to claim 4, wherein a cutting process is performed between the main curing step and the solid layer removing step to obtain a plurality of inkjet recording heads. The method according to any one of claims 1 to 5, wherein the solid layer disposing step and the wall member disposing step are performed in this order. 6. The method according to claim 1, wherein the step of disposing the wall member is performed before the step of disposing the solid layer. The method according to any one of claims 1 to 5, wherein the solid layer disposing step and the wall member disposing step are performed in parallel.

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